WO2018083800A1 - Outil d'alignement destiné à un épaisseurmètre de film - Google Patents

Outil d'alignement destiné à un épaisseurmètre de film Download PDF

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Publication number
WO2018083800A1
WO2018083800A1 PCT/JP2016/082981 JP2016082981W WO2018083800A1 WO 2018083800 A1 WO2018083800 A1 WO 2018083800A1 JP 2016082981 W JP2016082981 W JP 2016082981W WO 2018083800 A1 WO2018083800 A1 WO 2018083800A1
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WIPO (PCT)
Prior art keywords
probe
film thickness
slide member
guide member
magnetic core
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Application number
PCT/JP2016/082981
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English (en)
Japanese (ja)
Inventor
勝久 真壁
Original Assignee
中国電力株式会社
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Publication date
Application filed by 中国電力株式会社 filed Critical 中国電力株式会社
Priority to PCT/JP2016/082981 priority Critical patent/WO2018083800A1/fr
Priority to JP2017519939A priority patent/JP6237955B1/ja
Publication of WO2018083800A1 publication Critical patent/WO2018083800A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness

Definitions

  • This invention relates to an alignment jig for a film thickness meter.
  • Patent Document 1 describes a probe of a thickness measuring instrument used for measuring the thickness of a material such as metal, glass, or plastic and measuring the thickness of a surface treatment film on the surface of the material.
  • the probe elastically supports a probe arranged coaxially in a cylindrical body with a spring member extending from the periphery of the probe to the cylindrical body with a substantially uniform force in the circumferential direction.
  • Patent Document 2 in order to accurately and quickly align the film thickness measurement probe, the surface of the substrate placed on the placement member is moved relative to the substrate, and the substrate is moved relative to the substrate. It describes that an alignment jig for aligning a film thickness measurement probe that projects and receives light from above and measures the film thickness of a film formed on a substrate is described.
  • a film thickness meter is used to measure the plating film thickness applied to the surface of the electric power equipment.
  • the present invention has been made to solve these problems, and it is possible to improve the working efficiency in measuring the film thickness using the film thickness meter and to ensure the measurement accuracy and to adjust the alignment of the film thickness meter.
  • the purpose is to provide ingredients.
  • one of the present invention has a rod-shaped magnetic core and a coil wound around the magnetic core, and the coil when the end of the magnetic core is brought close to a measurement object
  • a slide member to which a probe of a film thickness meter that measures a film thickness based on a change in magnetic flux penetrating the wire and a guide member that supports the slide member to which the probe is fixed to slide in the axial direction of the magnetic core
  • the guide member is used together with a film thickness meter measuring jig having a first flat surface perpendicular to the axis of the magnetic core on the side of the magnetic core that is close to the measurement object,
  • the guide member is slidably provided so that the second flat surface parallel to the first flat surface and the axis of the magnetic core are perpendicular to the second flat surface.
  • the side surface to guide and the slide part Is provided at a predetermined height from the second flat surface around the opening, the lower surface having an opening through which the tip of the probe passes when being slid along the axial direction of the magnetic core.
  • a mark plate provided with a display indicating a position where the tip of the probe contacts the measurement object.
  • the user when measuring the film thickness using the measurement jig, the user can accurately bring the tip of the probe into contact with the measurement point of the measurement object with a simple operation.
  • Another aspect of the present invention is the above-described alignment jig, wherein the side surface forms an internal space having a shape and a size in which the outer shape of the guide member is exactly contained.
  • the user slides the guide member along the side surface of the alignment jig while holding the alignment jig so that the tip of the probe comes into contact with the measurement point of the measurement object accurately. Can be.
  • Another aspect of the present invention is the above-described alignment jig, wherein a part of the side surface is open.
  • Another aspect of the present invention is the alignment jig, wherein the first flat surface of the measurement jig slides the slide member in the direction of the measurement object along the axial direction of the magnetic core.
  • the probe has a through hole that penetrates the tip of the probe, and the probe generates a signal that indicates a timing for measuring the film thickness when the tip contacts or is pressed against the measurement object.
  • the height from the second flat surface to the upper surface of the mark plate is such that the tip of the probe is brought into contact with or pressed against the measurement object by moving the probe in the direction of the measurement object. It is set to a height at which a signal can be generated.
  • the tip of the probe when the slide member is pushed in the direction of the measurement object along the guide member, the tip of the probe can be reliably brought into contact with or pressed against the measurement object.
  • the alignment jig is the alignment jig, wherein the guide member is a cylindrical body, the first flat surface constitutes an end surface of the cylindrical body of the guide member, and the slide The member has an outer shape that can slide in close contact with the internal space of the cylindrical body of the guide member.
  • Another aspect of the present invention is the above-described alignment jig, wherein the slide member is in contact with a convex portion protruding from the outer periphery of the probe when the slide member is slid in the direction of the measurement object. It has a structure that acts to contact and move the probe in the direction of the measurement object.
  • Another one of the present invention is the alignment jig, wherein the first flat surface is formed by sliding the slide member in the direction of the measurement object along the axial direction of the magnetic core. It has a through hole that penetrates the tip of the probe.
  • the film thickness meter is an electromagnetic induction film thickness meter or an eddy current film thickness meter.
  • Another aspect of the present invention is the above-described measuring jig, wherein the guide member has a rectangular tube shape or a cylindrical shape.
  • the present invention it is possible to improve the working efficiency in measuring the film thickness using the film thickness meter and ensure the measurement accuracy.
  • FIG. 6B is a cross-sectional view of the probe 52 (cross-sectional view taken along line X-X ′ in FIG. 6A). It is a figure which shows a mode that the front-end
  • FIG. 2 is a perspective view showing a configuration of a slide member 11.
  • FIG. 3 is a perspective view showing a configuration of a guide member 12.
  • FIG. 3 is a perspective view showing a state in which a probe 52 is attached to a slide member 11.
  • FIG. It is a figure which shows a mode that the slide member 11 which attached the probe 52 is inserted in the guide member 12.
  • FIG. It is a figure which shows the state which attached the guide member 12 to the slide member 11.
  • FIG. It is a figure which shows a mode that the surface of the measuring object 2 and the outer surface of the end surface 112b of the guide member 12 are surface-contacted.
  • FIG. 6 is a perspective view showing another configuration of the slide member 11.
  • FIG. It is a perspective view which shows the other structure of the guide member 12.
  • FIG. 2 is a perspective view showing a state in which a guide member 12 is attached to a slide member 11.
  • FIG. 6 is a perspective view showing still another configuration of the measurement jig 1.
  • FIG. It is a figure (side view) which shows the other structure of the probe. It is a figure which shows a mode that the front-end
  • FIG. 21 is a view of the slide member 11 shown in FIG. 20 viewed from the ⁇ y direction.
  • FIG. 7 is a perspective view of an alignment jig 7.
  • FIG. It is the figure which looked at the alignment jig
  • FIG. 6 is a view of the alignment jig 7 as viewed from the front ( ⁇ y direction). It is a figure explaining the measurement procedure of the film thickness using the positioning jig. It is a figure explaining the measurement procedure of the film thickness using the positioning jig. It is a figure which shows the other structure of the positioning jig. It is a figure which shows the other structure of the positioning jig. It is a figure explaining the measurement procedure of the film thickness using the other structure of the alignment jig
  • the measurement jig of the present invention measures the film thickness by using electromagnetic interaction with a measurement object (substrate, coating). It can be widely applied to types of film thickness meters, such as eddy current film thickness meters (eddy current amplitude sensitive film thickness meters), eddy current phase film thickness meters (eddy current phase displacement sensitive film thickness meters), etc. it can.
  • eddy current film thickness meters eddy current amplitude sensitive film thickness meters
  • eddy current phase film thickness meters eddy current phase displacement sensitive film thickness meters
  • the film thickness meter is used, for example, for measuring the film thickness of the measuring object 2 in which the coating 22 is applied to the surface of the substrate 21.
  • the substrate 21 is a magnetic material such as iron, steel, or ferritic stainless steel
  • the coating 22 is a nonmagnetic coating such as plating (zinc plating or the like), paint, or resin film.
  • the probe 52 of the film thickness meter has a structure in which a primary coil 31 and a secondary coil 32 are coaxially wound around a rod-shaped magnetic core 520 made of a ferromagnetic material such as iron.
  • a primary coil 31 and a secondary coil 32 are coaxially wound around a rod-shaped magnetic core 520 made of a ferromagnetic material such as iron.
  • the voltage change ⁇ V is acquired as, for example, a current change ⁇ I, and the acquired current change ⁇ I is compared with calibration data (conversion data between a measured value and a film thickness value) prepared in advance, thereby The thickness, that is, the film thickness can be obtained.
  • FIG. 2 shows the appearance of an electromagnetic induction film thickness meter (hereinafter referred to as film thickness meter 5).
  • the film thickness meter 5 is portable and can be used by the user by bringing it to the site.
  • the film thickness meter 5 includes a main body device 51, a probe 52, and a cable 53 (cord).
  • the probe 52 is electrically connected to the main body device 51 via a cable 53 (cord).
  • the main unit 51 includes a user interface for the user to perform operation input and confirmation of the measurement result when measuring the film thickness.
  • the cable 53 includes, for example, wiring for supplying an alternating current from the main unit 51 to the primary coil 31 of the probe 52, and a measured value of a current flowing through the secondary coil 32 (or a voltage induced in the secondary coil 32). Wiring for transmitting a signal (hereinafter referred to as a measurement signal) to the main unit 51, wiring for transmitting a signal indicating the timing for acquiring the measurement value (hereinafter referred to as a trigger signal), and the like are included.
  • FIG. 3 shows the configuration of the main unit 51.
  • the main device 51 includes a processor 511, a storage device 512, a power supply circuit 513, an input device 514, an output device 515, and an A / D converter 516.
  • the processor 511 is configured using, for example, a CPU (Central Processing Unit) or an MPU (Micro Processing Unit).
  • the storage device 512 includes a RAM (Random Access Memory), a ROM (Read Only Memory), an NVRAM (Non-Volatile RAM), and the like.
  • the power supply circuit 513 includes a battery (primary battery, secondary battery), a DC / DC converter, a DC / AC inverter, and the like, and power necessary for operating the main body device 51 and the probe 52 (AC supplied to the primary coil 31). Including power).
  • the input device 514 is a user interface that receives input of information from the user, and is a keypad, a touch panel, or the like.
  • the output device 515 is a user interface that provides information to the user, and is an LCD (Liquid Crystal Display), a printing device, an audio output device, or the like.
  • the A / D converter 516 converts a signal input as an analog value from the probe 52 into a digital value.
  • FIG. 4 shows functions provided in the main device 51 and data stored in the main device 51.
  • the main device 51 includes functions of a calibration processing unit 521, a measurement processing unit 522, a film thickness calculation unit 523, and a result output unit 524. These functions are realized by the processor 511 of the main device 51 reading out and executing a program stored in the storage device 512 or by hardware provided in the main device 51. As shown in the figure, the main device 51 stores calibration data 531 and measurement values 532.
  • the calibration processing unit 521 is obtained by, for example, measuring the film thickness of several standard plates in which the coating 22 is applied to the same quality base material 21 with different thicknesses ( ⁇ 0). Based on the relationship between the current change ⁇ I (or voltage change ⁇ V) of 32 and the film thickness, calibration data 531 (calibration curve) is generated.
  • the measurement processing unit 522 obtains the current change ⁇ I (or voltage change ⁇ V) of the secondary coil 32 based on the measurement signal input from the probe 52 and stores the obtained value as the measured value 532.
  • FIG. 5 shows an example of calibration data 531 (calibration curve).
  • the vertical axis represents the measured value 532 (current change ⁇ I), and the horizontal axis represents the film thickness. Since the calibration data 531 varies depending on the material of the measurement object 2 (material of the substrate 21 and the coating 22), the calibration data 531 is prepared for each different material of the measurement object 2.
  • the film thickness calculation unit 523 obtains the film thickness of the measurement object 2 by comparing the measurement value 532 with the calibration data 531. For example, the film thickness calculation unit 523 obtains an average value of a plurality of measurement values 532 obtained by performing a plurality of measurements, and obtains a film thickness corresponding to the obtained average value from the calibration data 531. .
  • the result output unit 524 outputs the film thickness obtained by the film thickness calculation unit 523 to the output device 515.
  • the calibration processing unit 521, the measurement processing unit 522, the film thickness calculation unit 523, and the result output unit 524 have a function of receiving settings and instructions for the main body device 51 from the user at any time via the input device 514, It has a function of providing information to the user as needed via the output device 515.
  • FIG. 6A is a side view of the probe 52
  • FIG. 6B is a cross-sectional view of the probe 52 (a cross-sectional view taken along line X-X ′ in FIG. 6A).
  • the appearance of the probe 52 is substantially cylindrical.
  • the probe 52 is knurled on at least a part of the surface thereof, and a probe main body 61 constituting a portion of a predetermined length along the longitudinal direction from the tip of the probe 52, and the probe main body 61 on the cable 53 side.
  • a cap 62 (see FIG. 6B) provided, and a cap cover 63 made of a material such as a resin that protects the cap 62 and the ends of the cable 53.
  • a convex portion 617 concentric with the probe main body 61 (flange shape) is formed on the outer periphery of the probe main body 61.
  • the probe main body 61 is a substantially cylindrical outer cylinder 611, and is substantially accommodated coaxially with the outer cylinder 611 (coaxial with the central axis C of the probe 52) inside the outer cylinder 611. And a cylindrical inner cylinder 612.
  • a cylindrical coil bobbin 613 disposed coaxially with the inner cylinder 612 is accommodated near the tip of the probe main body 61 (inner cylinder 612).
  • a second bobbin 6132 around which the secondary coil 32 is wound is provided at a position of the coil bobbin 613 near the tip of the probe main body 61.
  • a first bobbin 6131 around which the primary coil 31 is wound is provided at a position of the coil bobbin 613 closer to the cable 53 than the second bobbin 6132. In the figure, the primary coil 31 and the secondary coil 32 are omitted.
  • a through-hole 6135 having a predetermined diameter is formed in the central portion of the coil bobbin 613 along the central axis of the coil bobbin 613 (coaxial with the central axis C of the probe 52).
  • a rod-like (columnar or the like) magnetic core 520 made of a ferromagnetic material such as iron is inserted into the through-hole 6135 so that the central axis thereof is coaxial with the central axis C of the probe 52.
  • a connector 615 to which the end of the wiring 631 of the cable 53 is connected is provided.
  • the primary coil 31 and the secondary coil 32 and the wiring 631 of the cable 53 are electrically connected through a connector 615.
  • a spring mechanism 64 is provided between the inner cylinder 612 and the outer cylinder 611.
  • the inner cylinder 612 is urged toward the tip of the probe 52 by the spring mechanism 64.
  • the end surface of the inner cylinder 612 and the tip of the magnetic core 520 are held in a state of slightly projecting (for example, about several mm) from the end surface 6111 of the outer cylinder 611 along the central axis C.
  • a switch 65 (electrical contact) is provided on the cap 62 side of the inner cylinder 612.
  • the switch 65 is configured such that the contact state (ON or OFF) is reversed when the inner cylinder 612 is pushed into the outer cylinder 611 against the urging force of the spring mechanism 64.
  • the switch 65 generates the trigger signal described above.
  • the switch 65 is electrically connected to the main body device 51 via the wiring 631 of the cable 53.
  • the function equivalent to that of the switch 65 can be realized by using other types of elements such as a piezoelectric element.
  • FIG. 7 shows a state in which the tip of the probe 52 (tip of the magnetic core 520 protruding from the probe 52) is pressed against the surface of the measurement object 2.
  • the tip of the probe 52 the end surface of the inner cylinder 612
  • the contact state of the switch 65 is reversed and the trigger signal is reversed. Is generated and input to the main device 51.
  • the main unit 51 takes in the current value of the secondary coil 32 from the probe 52 at the timing when the trigger signal is input.
  • the measuring jig 1 includes a slide member 11 shown in FIG. 8 and a guide member 12 shown in FIG. A probe 52 is fixed to the slide member 11.
  • the guide member 12 supports the slide member 11 to which the probe 52 is fixed so as to be slidable (slidable) in the direction of the central axis C of the probe 52 (the central axis of the magnetic core 520).
  • the slide member 11 and the guide member 12 are made of, for example, hard resin or metal as a material. Note that the slide member 11 and the guide member 12 may be made of, for example, a transparent material in order to make it easy to visually recognize the internal state from the outside.
  • FIG. 8 shows a configuration (perspective view) of the slide member 11.
  • the entire slide member 11 has a substantially rectangular parallelepiped shape.
  • one of the four side surfaces 111a to 111d (side surface 111a) of the rectangular parallelepiped is an opening surface.
  • the two end faces 112a and 112b of the rectangular parallelepiped are formed with notches 1121a and 1121b in a form (shape and size) that can accommodate just the outer diameter of the probe 52 on the opening face 111a side. ing.
  • the two notches 1121a and 1121b are arranged so that the center axis C of the probe 52 (the center axis of the magnetic core 520) is parallel to the longitudinal direction of the slide member 11 by the user fitting the probe 52 firmly into them. That is, the central axis C is formed so as to be perpendicular (at right angles) to the flat outer surface (the surface on the ⁇ z side) of the end face 112b. Therefore, the user easily fits the probe 52 into the two notches 1121a and 1121b, so that the central axis C of the probe 52 (the central axis of the magnetic core 520) can be easily connected to the outer surface of the end surface 112b (the surface on the ⁇ z side). It can be vertical (right angle).
  • each of the notches 1121a and 1121b is a combination of a semicircle (back side) and a rectangle (front side), but the form of the notches 1121a and 1121b is not limited to this.
  • FIG. 9 shows a configuration (perspective view) of the guide member 12.
  • the entire guide member 12 has a substantially rectangular parallelepiped shape.
  • the internal space of the cylindrical body constituted by the four side surfaces 121a to 121d of the rectangular parallelepiped has a form (shape and size) in which the outer shape of the slide member 11 is just fit. Therefore, the slide member 11 can be slid with respect to the guide member 12 while the outer peripheral surfaces of the three side surfaces 111b to 111d are in close contact with the inner peripheral surface of the guide member 12.
  • one of the two end faces 122a and 122b (end face 122a) of the rectangular parallelepiped is an open face.
  • the other end face 122b of the rectangular parallelepiped is provided with a through-hole 1221 having a form (shape and size) enough to accommodate the outer diameter of the probe 52.
  • the outer surface (the surface on the ⁇ z side) of the end surface 122b is a flat surface (first flat surface), and the flat surface is perpendicular (perpendicular) to the longitudinal direction of the rectangular parallelepiped.
  • FIG. 10 shows a state in which the probe 52 is attached to the slide member 11. As shown in the figure, as described above, the probe 52 is attached to the slide member 11 by fitting into the notches 1121a and 1121b provided on the two end faces 112a and 112b of the slide member 11, respectively.
  • the probe 52 is fixed to the slide member 11 by tightening with a belt-like member 115 (for example, rubber, wire, binding band, etc.) fixed to the slide member 11 around one notch 1121a of the probe 52. Is done.
  • a belt-like member 115 for example, rubber, wire, binding band, etc.
  • the method for fixing the probe 52 to the slide member 11 is not necessarily limited to this method.
  • the probe 52 may be fixed to the slide member 11 by another fitting form or screwing.
  • the probe 52 is arranged so that the convex portion 617 protruding from the outer periphery of the probe 52 is in contact with the outer surface of the end surface 112b of the slide member 11 around the other notch 1121b. It is attached to the slide member 11 so as to be placed on top (on the surface of the convex portion 617 on the cable 53 side). For this reason, when the user slides the slide member 11 in the direction of the measurement object 2 so as to bring the probe 52 closer to the measurement object 2, a force can be applied to the probe 52 without fail. Can be easily and reliably brought close to the measurement object 2.
  • the outer surface (the surface on the ⁇ z side) of the other end surface 122b of the guide member 12 is a flat surface, and the flat surface is perpendicular to the longitudinal direction of the rectangular parallelepiped of the guide member 12 ( (Right angle). Therefore, in a state where the probe 52 is fixed to the slide member 11, the central axis C of the probe 52 and the outer surface of the end surface 122 b of the guide member 12 have a vertical (right angle) relationship.
  • the user first inserts the slide member 11 to which the probe 52 is fixed into the guide member 12 from the opening surface 122 a of the guide member 12, and attaches the guide member 12 to the slide member 11.
  • the inner space of the guide member 12 has a form (shape and size) in which the slide member 11 can be accommodated. Therefore, the user slides the side surface of the slide member 11 along the guide member 12.
  • the guide member 12 can be easily attached to the slide member 11 simply by making it.
  • FIG. 12 shows a state in which the guide member 12 is attached (inserted) to the slide member 11.
  • the through hole 1221 of the guide member 12 is located on the central axis C of the probe 52 (the central axis of the magnetic core 520).
  • the diameter of the through hole 1221 is larger than the diameter of the probe 52. Therefore, the user can cause the tip of the probe 52 to protrude from the outer surface (flat surface) of the end surface 122b to the ⁇ z side by sliding the slide member 11 in the direction of the end surface 122b of the guide member 12.
  • the user brings the surface of the measuring object 2 and the outer surface (flat surface) of the end surface 122b of the guide member 12 into surface contact.
  • the center axis C of the probe 52 center axis of the magnetic core 520
  • the outer surface (flat surface) of the end surface 122b of the guide member 12 are perpendicular (at right angles)
  • the user can The surface of the measuring object 2 and the outer surface (flat surface) of the end face 122b of the guide member 12 are brought into surface contact with each other, whereby the surface of the measuring object 2 and the central axis C of the probe 52 (the central axis of the magnetic core 520). Can be easily in a vertical (right angle) relationship.
  • the user maintains the state in which the surface of the measurement object 2 and the outer surface (flat surface) of the end surface 122 b of the guide member 12 are in surface contact with each other, while the slide member 11 is maintained. Is slid in the direction of the measurement object 2 and the tip of the probe 52 is pushed in the direction of the surface of the measurement object 2. As a result, the inner cylindrical body 612 of the probe 52 is pushed into the outer cylindrical body 611 against the biasing force of the spring mechanism 64, and as a result, the contact state of the switch 65 is reversed and a trigger signal is input to the main body device 51.
  • the user holds the guide member 12 with one hand.
  • the slide member 11 is slid upward with the other hand while being pressed against the surface of the probe 52, the tip of the probe 52 is lifted about 10 mm from the surface of the measurement object 2, and the measurement is repeated by performing the above-described procedure again.
  • the user moves the slide member 11 while bringing the outer surface (flat surface) of the guide member 12 into surface contact with the surface of the measurement object 2.
  • the tip of the magnetic core 520 is measured while maintaining the central axis C of the probe 52 (the central axis of the magnetic core 520) in a perpendicular (right angle) relationship with the surface of the measurement object 2.
  • the object 2 can be approached. Therefore, the user can measure the film thickness of the surface of the measuring object 2 easily and with high accuracy by a simple operation.
  • the measurement jig 1 is configured such that the probe 52 is supported by the guide member 12 via the slide member 11, various types of probes can be obtained by preparing the slide member 11 in accordance with the form of the probe 52. 52 can be widely applied.
  • the guide member 12 is cylindrical, the user can easily hold the guide member 12 by hand during measurement, and the measurement jig 1 of this embodiment is excellent in workability.
  • the slide member 11 has a structure in which the probe 52 is fixed so as to coincide with the direction of the central axis of the magnetic core 520 of the probe 52 and the direction in which the slide member 11 slides, the user holds the probe 52 in the slide member 11.
  • the direction of the central axis of the magnetic core 520 of the probe 52 and the direction in which the slide member 11 slides can be easily matched by simply attaching to the probe 52.
  • the slide member 11 may be configured as shown in FIG. 14, and the guide member 12 may be configured as shown in FIG.
  • the slide member 11 includes a cylindrical cylinder 141.
  • an annular (low-back cylindrical) grip portion 1421a is formed coaxially with the central axis of the cylindrical body 141.
  • a circular opening 1421 b is formed on the lower end surface 142 b ( ⁇ z side end surface) of the cylindrical body 141 coaxially with the central axis of the cylindrical body 141.
  • Both the inner peripheral side of the grip part 1421a and the opening part 1421b are in a form (shape and size) such that the outer diameter of the probe 52 is just accommodated.
  • the grip portion 1421 a and the opening portion 1421 b are formed so that the center axis C of the probe 52 (the center axis of the magnetic core 520) is parallel to the longitudinal direction of the slide member 11 when the user fits the probe 52 therein. Yes.
  • the cylinder 141 has a structure that can be opened and closed by dividing it into two by a plane including the central axis of the cylinder 141 via a hinge mechanism 145.
  • the user When attaching the probe 52 to the cylinder 141, the user first opens the cylinder 141, sets the probe 52 in the internal space of the cylinder 141, and then closes the cylinder 141.
  • the guide member 12 includes a cylindrical tube 151 and a substantially square bottom plate 153 that is surface-bonded to the lower end surface 152b ( ⁇ z side end surface) of the tube 151. .
  • the area of the bottom plate 153 is larger than the area of the lower end surface 152b of the cylinder 151, and the peripheral portion of the bottom plate 153 extends in a bowl shape from the periphery of the lower end surface 152b.
  • the upper end surface 152a (+ z side end surface) of the cylindrical body 151 is an opening surface.
  • a circular opening 1521 penetrating both the lower end surface 152b and the bottom plate 153 is formed on the lower end surface 152b ( ⁇ z side end surface) of the cylinder 151 and the bottom plate 153 coaxially with the central axis of the cylinder 151. ing.
  • the outer surface (the surface on the ⁇ z side) of the bottom plate 153 of the guide member 12 is a flat surface, and the flat surface is perpendicular (right angle) to the longitudinal direction of the rectangular parallelepiped.
  • the internal space of the cylinder 151 has a form (shape and size) in which the outer shape of the slide member 11 shown in FIG. Therefore, the slide member 11 shown in FIG. 14 can be slid with respect to the guide member 12 while its outer peripheral surface is in close contact with the inner peripheral surface of the guide member 12 shown in FIG.
  • FIG. 16 shows a state in which the slide member 11 is inserted into the internal space of the cylindrical body 151 of the guide member 12.
  • the opening 1521 of the guide member 12 is positioned on the central axis C of the probe 52 (the central axis of the magnetic core 520), and the slide member 11 is slid in the direction of the bottom plate 153 of the guide member 12, thereby The tip of 52 can be projected in the ⁇ z direction from the outer surface (flat surface) of the bottom plate 153.
  • the probe 52 is arranged such that the convex portion 617 protruding from the outer periphery of the probe 52 is in contact with the outer surface of the lower end surface 142b of the slide member 11, that is, the slide member 11 is above the convex portion 617 (surface on the cable 53 side). ) To be attached to the slide member 11. With this configuration, the user can easily and surely slide the slide member 11 in the direction of the measurement object 2 to bring the probe 52 closer to the measurement object 2.
  • the user slides the slide member 11 along the guide member 12 while bringing the outer surface (flat surface) of the bottom plate 153 of the guide member 12 into surface contact with the surface of the object 2 to be measured.
  • the tip of the magnetic core 520 can be brought close to the measurement object 2 while maintaining the axis C (the central axis of the magnetic core 520) in a perpendicular (right angle) relationship with the surface of the measurement object 2.
  • the measuring jig 1 has a substantially cylindrical configuration as described above, the gripping property of the measuring jig 1 is increased (the force can be easily applied), and the user securely holds the measuring jig 1 during measurement. be able to.
  • FIG. 17 shows still another example of the measuring jig 1.
  • the measuring jig 1 includes a substantially cylindrical slide member 11 and a guide member 12 having a substantially horseshoe-shaped pedestal 174.
  • the guide member 12 has a cylindrical hole portion 176 supported via a semi-arched arm portion 175 extending upward from the pedestal portion 174.
  • the internal space of the cylindrical hole portion 176 has a form (shape, size) (cylindrical in this example) in which the outer shape of the slide member 11 can be inserted. Therefore, the slide member 11 can be slid with respect to the guide member 12 while the outer peripheral surface thereof is in close contact with the inner peripheral surface of the guide member 12 shown in FIG.
  • the guide member 12 since the frictional force between the outer peripheral surface of the slide member 11 and the inner peripheral surface of the cylindrical hole 176 is appropriately adjusted, the guide member 12 may be detached from the slide member 11 during the operation. There is no.
  • the internal space of the slide member 11 has a form (shape and size) to the extent that the outer diameter of the probe 52 is just accommodated.
  • the slide member 11 has a structure that can be opened and closed by dividing into two by a plane including the central axis of the slide member 11.
  • the internal space of the slide member 11 is such that the user holds the probe 52 therebetween, whereby the central axis C of the probe 52 (the central axis of the magnetic core 520) is the longitudinal direction of the slide member 11 (the central axis of the slide member 11). It is formed so that it may become parallel to.
  • the two leg portions 1741a and 1741b of the pedestal portion 174 are both flat, and the bottom surface (the surface on the -z side) is a flat surface.
  • the flat surfaces are all perpendicular (at right angles) to the central axis of the internal space of the cylindrical hole 176 of the guide member 12.
  • the two leg portions 1741a and 1741b extend substantially in parallel, and the distance between them is set larger than the diameter of the end face of the probe 52 so that the probe 52 can be passed between them.
  • the probe 52 is arranged such that the convex portion 617 protruding from the outer periphery of the probe 52 is in contact with the outer surface of the lower end surface 142b of the slide member 11, that is, the slide member 11 is above the convex portion 617 (surface on the cable 53 side). ) To be attached to the slide member 11.
  • the central axis C of the probe 52 (the central axis of the magnetic core 520) is the same as that of the pedestal 174 of the guide member 12. It passes between the two legs 1741a and 1741b. Therefore, the user can cause the tip of the probe 52 to protrude downward ( ⁇ z direction) from the pedestal portion 174 by sliding the slide member 11 downward ( ⁇ z direction) along the guide member 12.
  • the user slides the slide member 11 along the guide member 12 while bringing the bottom surfaces (flat surfaces) of the leg portions 1741a and 1741b of the guide member 12 into surface contact with the surface of the measurement object 2, thereby allowing the probe 52 to move.
  • the tip of the magnetic core 520 can be brought close to the measurement object 2 while maintaining the central axis C (the central axis of the magnetic core 520) in a perpendicular (right angle) relationship with the surface of the measurement object 2.
  • the measurement jig 1 the user can easily visually recognize the state of the slide member 11 (particularly, the state of the tip of the slide member 11), and can efficiently perform the measurement work.
  • FIG. 18 shows another configuration of the probe 52.
  • the probe 52 has a plurality of concentric annular convex portions 617 on the outer cylinder 611.
  • the outermost diameter of the lowermost convex portion 617a is slightly larger than that of the other convex portion 617b.
  • the line indicated by the symbol A is the end surface of the outer cylinder 611 (that is, the boundary between the outer cylinder 611 and the inner cylinder 612), and the inner cylinder is above the line (+ z side).
  • the surface of 612 is exposed.
  • a portion protruding from the lower end surface of the outer cylinder 611 with a length d is continuous with the inner cylinder 612 inside the outer cylinder 611.
  • FIG. 19 is a diagram illustrating a state in which the tip of the probe 52 illustrated in FIG. 18 is pressed against the surface of the measurement object 2. As shown in the figure, by pressing the tip of the probe 52 (tip of the magnetic core 520) against the surface of the measurement object 2, the tip of the probe 52 (tip of the inner cylinder 612) is brought into the outer cylinder 611. Recessed, a gap (length d) indicated by AA ′ in the figure is formed.
  • FIG. 20 and 21 are views showing a state in which the probe 52 shown in FIG. 18 is attached to the slide member 11 shown in FIG. 8, FIG. 20 is a perspective view thereof, and FIG. 21 is a slide member shown in FIG. 11 is a view of 11 viewed from the -y direction.
  • the probe 52 is arranged so that the convex portion 617a protruding from the outer periphery of the probe 52 is in contact with the outer surface of the end surface 112b of the slide member 11 around the notch 1121b, that is, the slide member. 11 is attached to the slide member 11 so that 11 is mounted on the convex part 617a (surface on the cable 53 side). For this reason, when the user slides the slide member 11 in the direction of the measurement object 2 so as to bring the probe 52 closer to the measurement object 2, a force can be applied to the probe 52 without fail. Can be easily and reliably brought close to the measurement object 2.
  • the lowermost convex portion 617b of the convex portion 617b protruding to the outer periphery of the probe 52 is in contact with the inner surface of the end surface 112b of the slide member 11 around the notch 1121b. That is, the projection 617b is attached to the slide member 11 so as to be placed on the slide member 11 (on the surface of the end surface 112b on the cable 53 side). For this reason, when the user slides the slide member 11 in the direction away from the measurement object 2 in an attempt to pull the probe 52 away from the measurement object 2, a force can be applied to the probe 52 without fail. It can be easily and reliably pulled away from the measuring object 2.
  • ⁇ Alignment jig> When measuring the film thickness using the film thickness meter 5, the tip of the probe 52 needs to be accurately applied to the measurement target site. In particular, when repeatedly measuring a specific measurement target portion (hereinafter referred to as measurement point P) of the measurement target 2, it is necessary to repeatedly and accurately apply the tip of the probe 52 to the same measurement point P. However, in the measurement using the measuring jig 1, the state near the tip of the probe 52 is difficult to visually recognize from the outside by the measuring jig 1, leading to a reduction in work efficiency. Therefore, when the measurement is performed using the measurement jig 1 described above, for example, a jig described below (hereinafter referred to as an alignment jig 7) may be used.
  • a jig described below hereinafter referred to as an alignment jig 7
  • FIG. 22A is a perspective view of the alignment jig 7 used together with the measurement jig 1 shown in FIGS. 8 to 13B.
  • FIG. 22B is a view of the alignment jig 7 as viewed from above (+ z direction).
  • FIG. 6 is a view of the alignment jig 7 as viewed from the front ( ⁇ y direction).
  • the positioning jig 7 has a substantially rectangular parallelepiped appearance, and an upper surface 71 and a side surface 72a which is one of the four side surfaces 72a to 72d of the substantially rectangular parallelepiped shape are opened. ing.
  • the internal space surrounded by the three side surfaces 72b to 72d is set to have a shape and size that exactly fits the outer shape of the guide member 12.
  • a rectangular opening 78 through which the tip of the probe 52 passes when the slide member 11 is slid along the axial direction of the magnetic core 520 is surrounded on the lower surface side of the alignment jig 7 on the side to be in contact with the measurement object 2.
  • a mark plate 75 is provided.
  • the opening 78 is not limited to a rectangle, but may be another shape such as a circle.
  • the mark plate 75 includes edge plates 751b to 751d extending from the inner peripheral surfaces of the three side surfaces 72b to 72d of the alignment jig 7 to the opening 78 side with a predetermined width.
  • the lower surface of the alignment jig 7 (in this example, the surface including the bottom surfaces of the three side plates 72b to 72d and the bottom surface of the mark plate 75 (which are flush with each other)) is the three side plates. It is a flat surface (hereinafter referred to as a second flat surface) perpendicular (perpendicular) to 72b-d. For this reason, when the lower surface of the alignment jig 7 is placed on the surface of the measurement object 2 (surface contact), the three side plates 72b to 72d are naturally perpendicular (perpendicular) to the surface of the measurement object 2. Become a relationship.
  • the axis of the magnetic core 520 of the probe 52 is perpendicular to the surface of the measurement object 2 (at right angles). ), The tip of the probe 52 can be brought into contact with the measurement point P.
  • the height of the upper surfaces of the edge plates 751b to 751d is increased so that the tip of the probe 52 can be brought into contact with the surface of the measurement object 2 and the switch 65 can be operated reliably.
  • the height (the height from the second flat surface to the upper surface of the mark plate 75) is set to a predetermined height or less.
  • the height of the upper surfaces of the edge plates 751b to 751d matches the thickness of the upper surfaces of the edge plates 751b to 751d. .
  • the edge plates 751b to 751d are provided with marks 752b to 75d indicating positions where the tip of the probe 52 is in contact with the surface of the object 2 to be measured.
  • the marks 752b to 752d are provided by, for example, printing or marking, but may be provided in other forms.
  • the marks 752b to 752d are provided in the vicinity of the center in the longitudinal direction of the respective edge plates 751b to 751d.
  • the marks 752b to 752d are all short straight lines, and the intersection of the line segment connecting the mark 752b and the mark 752d and the perpendicular line dropped from the mark 752c with respect to this line segment is the tip of the probe 52. A position in contact with the measurement object 2 is shown.
  • the measurement procedure of the film thickness by the film thickness meter 5 performed using the measurement jig 1 and the alignment jig 7 will be described with FIG. 23A and FIG. 23B.
  • the probe 52 of the type shown in FIG. 18 is used.
  • the user first places the alignment jig 7 on the surface of the measurement object 2 (the lower surface of the alignment jig 7 is in surface contact with the surface of the measurement object 2), and a mark 752b. While aligning -d, the alignment jig 7 is aligned so that the intersections of the marks 752b-d coincide with the measurement point P.
  • the user inserts the guide member 12 into which the slide member 11 (with the probe 52 fixed) is inserted into a space surrounded by the inner side surfaces of the three side plates 72b to 72d of the alignment jig 7.
  • the space is set to have a shape and a size that can fit the outer shape of the guide member 12 described above. Therefore, the user can insert the outer peripheral surface of the guide member 12 into the space slidably along the inner surfaces of the three side plates 72b to 72d.
  • the user slides the slide member 11 in the direction of the measurement object 2 with the other hand while holding the alignment jig 7 with one hand, for example.
  • the tip is pushed in the direction of the measurement object 2, and the tip of the probe 52 is brought into contact with the surface of the measurement object 2.
  • the contact state of the probe 52 is inverted and a trigger signal is input to the main body device 51.
  • the user maintains the tip of the probe 52 at the measurement point P while maintaining the axis of the magnetic core 520 of the probe 52 perpendicular to the surface of the object 2 to be measured. Can be brought into contact with each other accurately.
  • the user can accurately bring the tip of the probe 52 into contact with the measurement point with a simple operation. .
  • the alignment jig 7 described above opens the side surface 72a, which is one of the four side surfaces 72a to 72d, to improve the visibility.
  • the side surface 72a which is one of the four side surfaces 72a to 72d
  • the edge plate 751d constituting the mark plate 75 may be extended from the inner peripheral surface of the side surface 72a.
  • the height of the upper surface of the edge plate 751d is the same as that of the edge plates 751b to 751d.
  • a part of the side surface 72a may be opened (in this example, the side surface 72a (Leave both sides.)
  • the opening may be provided in the alignment jig 7 in another manner.
  • the alignment jig 7 used together with the measurement jig 1 shown in FIGS. 8 to 13B is shown as an example, but the same alignment is also applied to the measurement jig 1 shown in FIGS. A jig 7 can be used.
  • FIG. 25 shows the alignment jig 7 used together with the measurement jig 1 shown in FIGS.
  • the shape of the alignment jig 7 is the same as that shown in FIGS. 22A to 22C.
  • the internal space surrounded by the three side surfaces 72b to 72d is set to have a shape and size that just fits the peripheral portion (the ridge portion) of the bottom plate 153 of the guide member 12.
  • a modified example having the same shape as that shown in FIGS. 24A and 24B (the size is appropriately adjusted) can be adopted.
  • the user can accurately set the tip of the probe 52 to the measurement point P by a simple operation when measuring the film thickness using the measurement jig 1. It can be made to contact. Specifically, the user places the second flat surface of the alignment jig 7 on the surface of the measurement object 2, aligns the alignment jig 7 using the mark plate 75, By sliding the guide member 12 along the side surface of the alignment jig 7 while holding the alignment jig 7, the tip of the probe 52 attached to the measurement jig 1 comes into contact with the measurement point P accurately. Can be.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

L'invention concerne un outil d'alignement qui est destiné à un épaisseurmètre de film et qui est utilisé conjointement avec un outil de mesure qui est utilisé après avoir été fixé à une sonde de l'épaisseurmètre de film. L'outil de mesure (1) comprend un élément coulissant (11) auquel est fixée une sonde (52), et un élément de guidage (12) qui supporte de manière coulissante l'élément coulissant (11) et a une première surface plate sur un côté qui est amenée à s'approcher d'un objet de mesure. L'outil d'alignement (7) comprend une seconde surface plate qui est parallèle à la première surface plate, des surfaces latérales (72b à 72d) qui guident l'élément de guidage (12) d'une manière coulissante de sorte qu'il soit perpendiculaire à la seconde surface plate, une surface inférieure qui a une ouverture (78) que l'extrémité avant de la sonde (52) est amenée à traverser lorsque l'élément coulissant (11) est amené à coulisser, et une plaque de marquage (75) qui est prévue autour de l'ouverture (78) à une hauteur prescrite à partir de la seconde surface plate et qui est pourvue, sur sa surface supérieure, d'une indication montrant la position à laquelle l'extrémité avant de la sonde (52) va entrer en contact avec l'objet de mesure (2).
PCT/JP2016/082981 2016-11-07 2016-11-07 Outil d'alignement destiné à un épaisseurmètre de film WO2018083800A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2016/082981 WO2018083800A1 (fr) 2016-11-07 2016-11-07 Outil d'alignement destiné à un épaisseurmètre de film
JP2017519939A JP6237955B1 (ja) 2016-11-07 2016-11-07 膜厚計の位置合わせ治具

Applications Claiming Priority (1)

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PCT/JP2016/082981 WO2018083800A1 (fr) 2016-11-07 2016-11-07 Outil d'alignement destiné à un épaisseurmètre de film

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WO2018083800A1 true WO2018083800A1 (fr) 2018-05-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7498023B2 (ja) 2020-05-18 2024-06-11 株式会社Subaru 孔検査装置の送り出し装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7087529B2 (ja) 2018-03-23 2022-06-21 中国電力株式会社 膜厚計の位置合わせ治具
JP7010106B2 (ja) * 2018-03-23 2022-01-26 中国電力株式会社 膜厚計の位置合わせ治具

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610804U (fr) * 1979-07-04 1981-01-29
JPS603412U (ja) * 1983-06-21 1985-01-11 株式会社　三共技研 垂直測定器
JPS6417403U (fr) * 1987-07-20 1989-01-27
JPH03273108A (ja) * 1990-03-23 1991-12-04 Osaka Gas Co Ltd 超音波測定装置の探触子支持具
JPH08327348A (ja) * 1995-05-31 1996-12-13 Ket Kagaku Kenkyusho:Kk ワイヤレス膜厚計のための消費電力低減化プローブ
JP2003310578A (ja) * 2002-04-23 2003-11-05 Matsushita Electric Works Ltd 生体信号測定方法及び生体信号測定装置
JP2008275614A (ja) * 2007-04-27 2008-11-13 Snecma 自動較正を備えた非破壊検査用の渦電流を用いた方法および装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5610804U (fr) * 1979-07-04 1981-01-29
JPS603412U (ja) * 1983-06-21 1985-01-11 株式会社　三共技研 垂直測定器
JPS6417403U (fr) * 1987-07-20 1989-01-27
JPH03273108A (ja) * 1990-03-23 1991-12-04 Osaka Gas Co Ltd 超音波測定装置の探触子支持具
JPH08327348A (ja) * 1995-05-31 1996-12-13 Ket Kagaku Kenkyusho:Kk ワイヤレス膜厚計のための消費電力低減化プローブ
JP2003310578A (ja) * 2002-04-23 2003-11-05 Matsushita Electric Works Ltd 生体信号測定方法及び生体信号測定装置
JP2008275614A (ja) * 2007-04-27 2008-11-13 Snecma 自動較正を備えた非破壊検査用の渦電流を用いた方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7498023B2 (ja) 2020-05-18 2024-06-11 株式会社Subaru 孔検査装置の送り出し装置

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