WO2018077573A1 - Procédé de fonctionnement d'un microspectromètre et microspectromètre - Google Patents

Procédé de fonctionnement d'un microspectromètre et microspectromètre Download PDF

Info

Publication number
WO2018077573A1
WO2018077573A1 PCT/EP2017/074981 EP2017074981W WO2018077573A1 WO 2018077573 A1 WO2018077573 A1 WO 2018077573A1 EP 2017074981 W EP2017074981 W EP 2017074981W WO 2018077573 A1 WO2018077573 A1 WO 2018077573A1
Authority
WO
WIPO (PCT)
Prior art keywords
intensity distribution
spectral intensity
wavelength range
spectral
microspectrometer
Prior art date
Application number
PCT/EP2017/074981
Other languages
German (de)
English (en)
Inventor
Martin HUSNIK
Christian Huber
Marc Schmid
Hartmut Kueppers
Benedikt Stein
Christoph Schelling
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to CN201780067294.1A priority Critical patent/CN109891204B/zh
Priority to EP17780698.1A priority patent/EP3532813A1/fr
Publication of WO2018077573A1 publication Critical patent/WO2018077573A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0272—Handheld
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/027—Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/427—Dual wavelengths spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J2003/102—Plural sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1234—Continuously variable IF [CVIF]; Wedge type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1247—Tuning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/425—Reflectance

Definitions

  • the invention is based on a device or a method
  • FPI Fabry-Perot interferometer
  • Light with the resonant wavelength can be the interferometer
  • an FPI can be considered as a spectral filter element
  • Intensity signal of the detector if only the intensity of the light of the
  • the harmonics are generated with a modulation other than the resonance wavelength.
  • Illuminated intensity distributions of an incident light is within the first spectral
  • the resulting first harmonic lies in the second spectral intensity distribution. At the detector all incident light is detected. The resulting signal has differently modulated signal components, which are separated from one another by demodulation.
  • two or more wavelengths can be detected simultaneously with one detector.
  • the wavelengths can be modulated and demodulation.
  • a method for operating a microspectrometer comprising the following steps:
  • Intensity distribution having a first pulse characteristic and at least a second spectral intensity distribution having a second pulse characteristic using a modulatable emitter device of the microspectrometer;
  • Intensity distribution associated second wavelength range from a re-emitted from the measurement object spectral reflectance intensity distribution using a tunable filter device of the microspectrometer Imaging a radiation intensity of the first wavelength range and the second wavelength range in a detector signal using a detector device of the microspectrometer; and demodulating the detector signal using the first one
  • Pulse characteristic and the second pulse characteristic to obtain a first intensity value associated with the first wavelength range and a second intensity value associated with the second wavelength range.
  • the microspectrometer has an emitter device, which has a first known spectral
  • Pulse characteristic can be an intensity curve, for example a
  • Modulation frequency or be a modulation rhythm.
  • a filter device may be a Fabry-Perot interferometer.
  • a detector device may comprise a photoelectric element and provide an electrical detector signal.
  • a spectral reflection intensity distribution can be understood to mean a spectral intensity distribution that has been reflected by an object.
  • the first spectral intensity distribution can be emitted offset by a wavelength amount relative to the second spectral intensity distribution.
  • the second spectral intensity distribution may be compared to the first spectral
  • the second spectral intensity distribution may be shifted to shorter wavelengths.
  • the first wavelength range may be part of the first spectral intensity distribution, while the second
  • Wavelength range is part of the second spectral intensity distribution.
  • Intensity distribution can be emitted partially overlapping.
  • Spectra may partially comprise the same wavelengths. Overlapping avoids a gap between the spectra.
  • a range around a set fundamental wavelength may be left by the filter device.
  • a range around a harmonic length of the first wavelength range may be left by the filter device.
  • Fundamental wavelength and the harmonic length can pass the same gap width of the filter element. As a result, only one filter is required to detect two wavelengths.
  • the filter device can be tuned to the first
  • Changing the wavelength range and the second wavelength range temporally In the step of demodulating, a first time sequence of first intensity values and a second sequence of second intensity values can be recorded.
  • the wavelength ranges can be adjusted within an adjustment range of the filter device.
  • the tuning can be called scanning. When tuning, a part or the entire adjustment range of the filter device can be used.
  • the measuring object can be equipped with at least one additional spectral
  • Intensity distribution are irradiated with a further pulse characteristic.
  • Wavelength range may be from the re-emitted spectral
  • Reflex intensity distribution are allowed to pass.
  • the radiation intensity of the further wavelength range can be imaged in the detector signal.
  • the detector signal may also be determined using the other
  • Wavelength range associated further intensity value to get By further spectra and other pulse characteristics can several
  • Wavelength ranges are detected simultaneously.
  • the further spectral intensity distribution can be emitted between the first spectral intensity distribution and the second spectral intensity distribution.
  • the additional spectral intensity distribution can be emitted in a gap between the spectra. Due to the intermediate spectral Intensity distribution, a large detection range of the microspectrometer can be achieved.
  • This method can be implemented, for example, in software or hardware or in a mixed form of software and hardware, for example in a control unit.
  • a microspectrometer is presented with the following features: a modulatable emitter device which is aligned with a sample location and is designed to have a first spectral intensity distribution with a first pulse characteristic and at least one second spectral intensity
  • a tunable filter device which is arranged after the sample location in an optical path of the microspectrometer and is adapted to a first spectral intensity distribution associated with the first
  • the emitter device may be a first light source for the first spectral
  • the emitter device may comprise a broadband light source for the first spectral intensity distribution and the second spectral intensity distribution.
  • the emitter device may comprise a first filter element for the first spectral intensity distribution and, alternatively or additionally, a second filter element for have the second spectral intensity distribution.
  • a filter element may be a bandpass filter.
  • the spectral intensity distribution may be in the
  • the emitter device may comprise a first shutter element for the first spectral
  • a closure element for the second spectral intensity distribution.
  • a closure element is designed to interrupt continuously emitted light and impart to it the pulse characteristic.
  • microspectrometer system with a microspectrometer according to the approach presented here and a control device for operating the microspectrometer is presented, the control device having a
  • Wavelength range associated with the second intensity value also provides a control unit which is designed to implement the steps of a variant of a method presented here
  • control unit may comprise at least one arithmetic unit for processing signals or data, at least one memory unit for storing signals or data, at least one interface to a sensor or an actuator for reading sensor signals from the sensor or for outputting control signals to the actuator and / or or at least one
  • the arithmetic unit may be, for example, a signal processor, a microcontroller or the like, wherein the memory unit is a flash memory, an EEPROM or a magnetic storage unit can be.
  • the communication interface can be designed to read or output data wirelessly and / or by line, wherein a communication interface which can read or output line-bound data, for example, electrically or optically read this data from a corresponding data transmission line or output in a corresponding data transmission line.
  • a control device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon.
  • the control unit may have an interface, which may be formed in hardware and / or software. In a hardware training, the interfaces may for example be part of a so-called system ASICs, the various functions of the
  • Control unit includes.
  • the interfaces are their own integrated circuits or at least partially consist of discrete components.
  • the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.
  • a computer program product or computer program with program code which can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and for carrying out, implementing and / or controlling the steps of the method according to one of the above
  • FIG. 1 is a block diagram of a microspectrometer system according to an embodiment
  • FIG. 2 is an illustration of a microspectrometer system according to one embodiment
  • FIG. 3 shows an illustration of an emitted first spectral intensity distribution and an emitted second spectral intensity distribution as well as two transmission wave ranges according to an exemplary embodiment
  • FIG. 4 shows a representation of an emitted first, second and third spectral intensity distribution as well as two transmission wave ranges according to an embodiment
  • FIG. 5 shows a representation of an overlapping emitted first and second spectral intensity distribution as well as two passband ranges according to an embodiment
  • FIG. 6 shows a further illustration of an overlapping emitted first and second spectral intensity distribution as well as two transmission wave ranges according to an embodiment
  • Microspectrometer system according to one embodiment.
  • the microspectrometer system 100 includes a microspectrometer 102 and a controller 104 for operating the
  • the microspectrometer 102 has a
  • the control device 104 has a drive device 112 and a demodulation device 114.
  • the drive device 112 controls the Emitter device 106 via a modulation signal 116 at.
  • the modulation signal 116 determines a first pulse characteristic 118 of a first spectral intensity distribution 120 (spectrum) emitted by the emitter device 106 and at least one second pulse characteristic 122 of a second spectral intensity distribution 124 emitted by the emitter device 106.
  • Intensity distribution 124 have different wavelengths.
  • Emitter 106 emits the first spectral intensity distribution 120 with the first pulse characteristic 118 and the second spectral intensity distribution 124 with the second pulse characteristic 122 on an optical path 126 of the microspectrometer 102 in the direction of one at a sample location 128
  • a material of the measuring object 130 interacts with the first spectral intensity distribution 120 and the second spectral intensity distribution 124, and a spectral intensity is formed on the optical path 126
  • Microspectrometer 102 re-emitted.
  • Reflex intensity distribution 132 is dependent on a composition of the material and the incident intensity distributions 120 and 124.
  • the filter device 108 is arranged in the optical path 126 between the sample location 128 and the detector device 110.
  • the filter device 108 is a Fabry-Perot interferometer 108.
  • the Fabry-Perot interferometer 108 has two opposing reflective surfaces. These may be formed for example as a dielectric Bragg mirror. They can also contain metallic layers. There is a gap between the surfaces. A gap width of the gap is adjustable. The gap width defines one
  • Resonant wavelength of the Fabry-Perot interferometer 108 Light in a first wavelength range 134 around the resonant wavelength can pass through the Fabry-Perot interferometer 108 substantially unattenuated. Also
  • At least a second wavelength range 136 may be one harmonic of the resonant wavelength Fabry-Perot interferometer 108 also pass substantially unattenuated.
  • the first spectral intensity distribution 120 is selected such that an extent of the resonance wavelengths that can be set on the filter element 108 is essentially covered.
  • the first wavelength range 134 is thus part of the first spectral intensity distribution 120.
  • Intensity distribution is chosen so that a scope of the adjustable on the filter element 108 harmonics is substantially covered.
  • the second wavelength range 136 is thus part of the second spectral
  • Pulse characteristic 118 while transmitted through the filter element 108 radiation within the second wavelength range 136, the second
  • Pulse characteristic 124 has.
  • the radiation from the first wavelength range 134 and the second wavelength range 136 strikes the detector device 110
  • Detector device 110 forms an intensity of the incident radiation or the light of both wavelength ranges 134, 136 in one
  • the detector signal is read in by the demodulator 114 and demodulated using the information about the first pulse characteristic 118 and the second pulse characteristic 122 contained in the modulation signal 116.
  • the result of the demodulation is a first intensity value 140 depicting a radiation intensity of the first wavelength range 120 and a second intensity value 142 depicting the radiation intensity of the second wavelength range 136.
  • the emitter device 106 has a broadband light source.
  • a spectral intensity distribution of the light source comprises the first spectral intensity distribution 120 and the second spectral intensity
  • the light source emits light without a pulse characteristic.
  • the light of the light source is through two different filtering devices directed. From the first filter device, the first spectral
  • Intensity distribution 120 emitted to the measuring object 130.
  • the second spectral intensity distribution 124 is emitted to the measurement object 130.
  • the filter devices may, for example, be bandpass filters which remove edge regions from the spectral intensity distribution of the light source.
  • a first breaker means is arranged, which is the first spectral
  • Intensity distribution 120 imprints the first pulse characteristic 118.
  • In the optical path 126 through the second filter means is a second one
  • Intensity distribution 124 imprints the second pulse characteristic 122.
  • Breaker devices are designed as a liquid crystal shutter.
  • FIG. 2 shows a representation of a micro spectrometer system 100 according to one exemplary embodiment.
  • the microspectrometer system 100 corresponds to
  • the emitter device 106 has two separately controllable light sources 200, 202.
  • the first light source 200 emits the first spectral intensity distribution 120 and is driven by the first pulse characteristic 118.
  • the second light source 202 emits the second spectral intensity distribution 124 and is driven by the second pulse characteristic 122.
  • the light sources 200, 202 are driven with different modulation frequencies 118, 122.
  • the light sources 200, 202 may be, for example, LED light sources, LED light sources with a phosphor, laser light sources, fluorescent light sources and / or incandescent light sources.
  • a microspectrum module 102 based on a tunable Fabry-Perot interferometer 108 having a plurality of modulated light sources 200, 202 is presented.
  • the miniaturized spectrometer 102 presented here is designed, depending on the application, to record spectra 120, 124 in the ultraviolet, visible, near-infrared and / or medium infrared range.
  • the microspectrometer 102 is in particular for installation in handheld devices, such as a
  • Fabry-Perot interferometers (FPIs) 108 may be realized as tunable interferometers 108 in which the desired transmission wavelength can be adjusted over the spacing of the mirror layers. In this case, for a certain distance of the mirror layers not only the fundamental mode in which the wavelength is equal to half the mirror spacing, but also higher
  • Harmonics are transmitted.
  • the harmonics are shorter wavelengths and may be referred to as higher interference orders which also satisfy the interference condition.
  • For use as a unique wavelength filter can be used in a conventional
  • Interferometer a bandpass pre-filter can be used, which limits the transmitted wavelength range to the distance between two adjacent orders.
  • the distance can be called Free Spectral Range (FSR). This therefore means a limitation of the wavelength range which a conventional tunable Fabry-Perot interferometer can measure.
  • FSR Free Spectral Range
  • One way to use two orders simultaneously is to use a Fabry-Perot interferometric dichroic mirror whose switching wavelength is between two orders, and thus can bring the signal of two orders to different detectors.
  • the dichroic mirror is installed at an angle of 45 ° and leads to an additional height at the height of the aperture diameter.
  • edge filters can be used.
  • the light sources 200, 202 are modulated with different pulse frequencies 118, 122.
  • the contributions of the individual orders can be demodulated by means of their frequency 118, 122 and thus separated from one another at the detector signal 138.
  • any desired number of orders of a Fabry-Perot interferometer 108 can be measured simultaneously, as long as a separately controllable / pulsable light source 200, 202 is present for each order, the spectral intensity distribution 120, 124 is limited to the spectrally tunable region of this order and as long their spectral
  • Intensity distribution is within the spectral range, within which the reflective surfaces of the FPI a sufficiently high
  • the design of the Fabry-Perot interferometer 108 can be made more flexible since the use of multiple interference orders also allows the Fabry-Perot interferometer to operate in higher order and still measure over an acceptable range of wavelengths. For higher orders is the Resolution of the Fabry-Perot interferometer 108 better. This can increase resolution without sacrificing Free Spectral Range (FSR).
  • FSR Free Spectral Range
  • the microspectrum module 102 consists of a plurality of light sources 200, 202, the Fabry-Perot
  • the light sources 200, 202 may be, depending on the desired wavelength range 120, 124, for example LEDs, LEDs with phosphor or incandescent light sources. Here are two light sources 200, 202 shown. With a suitable choice of the light sources 200, 202, however, even more light sources can be used.
  • the Fabry-Perot interferometer 108 consists of two highly reflective layers. These may be dielectric Bragg reflectors, thin metal layers or combinations thereof. The spacing of the layers can be tuned. This can typically be done electrostatically or piezoelectrically.
  • the detector 110 is a single detector, whichever is used
  • Wavelength range for example, a silicon detector, a
  • Detector can be.
  • a measurement object 130 is illuminated by means of the light sources 200, 202 and the diffused light 132 is illuminated by means of the Fabry-Perot interferometers 108 and
  • the Fabry-Perot interferometer 108 still has additional apertures and / or blocking filters, which are not shown here for clarity.
  • the Fabry-Perot interferometer 108 has two adjacent ones
  • the spectra 120, 124 of the light sources 200, 202 are selected such that they each extend over only one of the two Free Spectral Ranges (FSRs). If no light source with corresponding spectral intensity distributions 120, 124 is available, by means of separate blocking filters on the light sources 200, 202, the corresponding spectral intensity distributions 120, 124 are generated.
  • the light sources 200, 202 are additionally with
  • the Fabry-Perot interferometer 108 always passes both the peak of a first transmission order and the next higher transmission order, so that the sum signal reaches the detector 110. The lower orders should then be blocked by a shortpass filter. Because of the different modulation frequencies 118, 122 of the light sources
  • a broadband, unpulsed light source is used, which is split into the two spectral first-order and second-order intervals 120, 124 by means of two parallel bandpass filters.
  • each bandpass filter there is a controllable shutter in front of each bandpass filter.
  • the two shutters are driven with a different frequency 118, 120 and thus lead to the pulsing of the light source.
  • This embodiment is particularly advantageous if the additional power for a second separate light source 202 can not be provided or if the
  • Light source can not be modulated with an adequately high frequency.
  • Fig. 3 shows a representation of an emitted first spectral
  • Intensity distribution 124 according to one embodiment.
  • the spectra 120, 124 are shown in a diagram which has a wavelength on its abscissa and an intensity on its ordinate.
  • the second spectral intensity distribution 124 has shorter wavelengths than the first spectral intensity distribution 120 first spectral intensity distribution 120 and the second spectral intensity
  • Intensity distribution 124 is a gap 300.
  • the spectra 120, 124 do not overlap or only slightly. Through the gap 300, the spectra 120, 124 are clearly separated.
  • the first wavelength range 134 left by the filter device at an average gap width and the second wavelength range 136 left by the filter device at the middle gap width are shown in FIG.
  • the first wavelength range 134 lies in the first spectral intensity distribution 120.
  • the second wavelength range 136 lies in the second spectral intensity distribution 124.
  • the first wavelength range 134 is centered about a resonance wavelength associated with the gap width.
  • the second wavelength range 136 is centered around a harmonic associated with the gap width.
  • the Fabry-Perot interferometer of the filter device has an adjustment range 302 for the gap width, which comprises the first spectral intensity distribution 120 and the second spectral intensity distribution 124, respectively.
  • the adjustment range 302 may be referred to as Free Spectral Range (FSR).
  • FSR Free Spectral Range
  • a limit of the adjustment range 302 lies in the gap 300.
  • Intensity distribution 120, second spectral intensity distribution 124 and third spectral intensity distribution 400 according to an embodiment.
  • the representation essentially corresponds to the representation in FIG. 3. The first
  • Wavelength range 134 and the second wavelength range 136 are here by a large gap width of the interferometer at the top of the
  • the second wavelength range 136 lies substantially in the gap 300 and thus outside the first spectral intensity distribution 120 and the second spectral intensity distribution 124.
  • the third spectral intensity distribution 400 is additionally emitted by the emitter device with a third pulse characteristic.
  • the third spectral intensity distribution 400 fills the gap 300 between the first spectral intensity distribution 120 and the second spectral intensity distribution 124.
  • the third spectral intensity distribution 400 overlaps both spectra 120, 124 partially. Due to the position in the third spectral intensity distribution 400, the second wavelength range 136 has the third pulse characteristic.
  • the first wavelength range 134 can still be detected here, since it is still arranged within the first spectral intensity distribution 120.
  • the measurable intensity of the light sources between the two Free Spectral Ranges (FSRs) of the two orders drops to zero. If there is information about the sample to be measured with the microspectrometer in this spectral range, it can not be detected.
  • FSRs Free Spectral Ranges
  • the microspectrometer In order to cover the overlapping area 300 of two orders, and to capture the information, the microspectrometer has one
  • a third light source with a third modulation frequency with a third modulation frequency.
  • a third bandpass filter may be used with a third shutter.
  • the spectral intensity distribution 400 of the third light source is located just in the spectral region 300 between the spectra 120, 124 of the first light source and the second light source.
  • the third light source then leads at the detector to a signal with the third modulation frequency, which is again separated by demodulation of the signals of the first and second light sources.
  • FIGS. 5 and 6 show illustrations of an overlapping emitted first spectral intensity distribution 120 and second spectral intensity distribution 124 according to one exemplary embodiment.
  • the representation corresponds to
  • the overlapping of the spectra 120, 124 results in an overlap region 500. If the first wavelength range 134 or the second wavelength range 136 lies in the region of the overlap region 500, both the first and second wavelength ranges 134
  • Pulse characteristic and the second pulse characteristic imaged in the detector signal Pulse characteristic and the second pulse characteristic imaged in the detector signal.
  • the adjustment range 302 of the filter device is selected so that the overlap region 500 is covered by the resonance wavelength, ie only the first wavelength range 134 can lie in the overlap region 500.
  • the first wavelength range 134 is in the range of
  • Overlap region 500 while the second wavelength range 136 is outside the second spectral intensity distribution 124. This results in no signal at the detector due to the second wavelength range 136.
  • the first wavelength range 134 results in a mixed signal at the detector which has both pulse characteristics.
  • the first wavelength range 134 lies in a first range 600 excluding the first spectral intensity distribution 120.
  • Wavelength range 136 lies in a region 602 excluding the second spectral intensity distribution 124. This results in two different radiation intensities with different values at the detector
  • both light sources at their respective frequencies contribute to the signal at the detector.
  • the signal from the overlap area 500 is thus measured redundantly.
  • Light source spectra 120, 124 is located.
  • the embodiment described here functions exactly like the other embodiments.
  • the absolute tunable bandwidth of the Fabry-Perot interferometer is slightly reduced.
  • the light sources may also be selected such that the spectral emission regions 120, 124 overlap. In this case, that will Signal received redundantly from the overlap area. This results in a reduced bandwidth.
  • the approach presented here can be used not only for a tunable Fabry-Perot filter for the separation of successive orders, but also for static linearly variable Fabry-Perot filters in combination with a detector array.
  • FIG. 7 shows a flow chart of a method 700 for operating a microspectrometer system according to one exemplary embodiment. The procedure
  • step 700 includes a step 702 of irradiation, a step 704 of passing, a step 706 of mapping, and a step 708 of demodulating.
  • step 702 of irradiation a measured object to be measured having a first spectral intensity distribution with a first pulse characteristic and at least a second spectral intensity distribution with a second pulse characteristic is used using a modulatable emitter device of FIG.
  • a first wavelength range assigned to the first spectral intensity distribution and a second wavelength range assigned to the second spectral intensity distribution are made from a spectral re-emitted by the measurement object
  • Filter device of the microspectrometer passed.
  • step 706 of the imaging a radiation intensity of the first wavelength region and a radiation intensity of the second wavelength region in one
  • step 708 of demodulating the detector signal is demodulated using the first pulse characteristic and the second pulse characteristic to obtain a first intensity value associated with the first wavelength range and a second intensity value
  • Wavelength range associated with the second intensity value
  • the step 702 of irradiation may be performed using a
  • the emitter device is driven by the modulation signal to the first spectral intensity distribution with the first pulse frequency and at least the second spectral intensity distribution at the second pulse rate at a sample location for the measurement object of the microspectrometer.
  • the signal provided by the detector means of the microspectrometer may be provided
  • Intensity signal are demodulated using the modulation signal to separate the intensity values.
  • an exemplary embodiment comprises a "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment, both the first feature and the second feature and according to another embodiment either only first feature or only the second feature.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un procédé de fonctionnement d'un microspectromètre (102), le procédé présentant une étape consistant à irradier un objet de mesure (130) à mesurer par une première répartition (120) d'intensité spectrale pourvue d'une première caractéristique d'impulsion (118) et par au moins une deuxième répartition (124) d'intensité spectrale pourvue d'une deuxième caractéristique d'impulsion (122) avec utilisation d'un dispositif (106) d'émission modulable du microspectromètre (102), une étape consistant à faire passer une première plage (134) de longueurs d'onde associée à la première répartition (120) d'intensité spectrale et une deuxième plage (136) de longueurs d'onde associée à la deuxième répartition (124) d'intensité spectrale à partir d'une répartition (132) d'intensité de réflexion spectrale réémise par l'objet de mesure (130) avec utilisation d'un dispositif (108) de filtrage réglable du microspectromètre (102), une étape consistant à représenter une intensité de rayonnement de la première plage (134) de longueurs d'onde et de la deuxième plage (136) de longueurs d'onde dans un signal (138) de détecteur avec utilisation d'un dispositif de détecteur (110) du microspectromètre (102) et à démoduler le signal (138) de détecteur avec utilisation de la première caractéristique d'impulsion (118) et de la deuxième caractéristique d'impulsion (122), pour obtenir une première valeur d'intensité (140) associée à la première plage (134) de longueurs d'onde et une deuxième valeur d'intensité (142) associée à la deuxième plage (136) de longueurs d'onde.
PCT/EP2017/074981 2016-10-31 2017-10-02 Procédé de fonctionnement d'un microspectromètre et microspectromètre WO2018077573A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201780067294.1A CN109891204B (zh) 2016-10-31 2017-10-02 用于运行显微光谱仪的方法和显微光谱仪
EP17780698.1A EP3532813A1 (fr) 2016-10-31 2017-10-02 Procédé de fonctionnement d'un microspectromètre et microspectromètre

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016221383.0 2016-10-31
DE102016221383.0A DE102016221383A1 (de) 2016-10-31 2016-10-31 Verfahren und Steuergerät zum Betreiben eines Mikrospektrometers und Mikrospektrometersystem

Publications (1)

Publication Number Publication Date
WO2018077573A1 true WO2018077573A1 (fr) 2018-05-03

Family

ID=60037584

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2017/074981 WO2018077573A1 (fr) 2016-10-31 2017-10-02 Procédé de fonctionnement d'un microspectromètre et microspectromètre

Country Status (4)

Country Link
EP (1) EP3532813A1 (fr)
CN (1) CN109891204B (fr)
DE (1) DE102016221383A1 (fr)
WO (1) WO2018077573A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007135244A2 (fr) * 2006-05-24 2007-11-29 Valtion Teknillinen Tutkimuskeskus Spectromètre et procédé interférométrique
EP2816389A1 (fr) * 2013-06-18 2014-12-24 Teknologian Tutkimuskeskus VTT Miroir destiné à un interféromètre de Fabry-Perot et procédé de production de celui-ci
US20150211928A1 (en) * 2013-07-17 2015-07-30 Panasonic Intellectual Property Management Co., Lt Spectroscopic apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007135244A2 (fr) * 2006-05-24 2007-11-29 Valtion Teknillinen Tutkimuskeskus Spectromètre et procédé interférométrique
EP2816389A1 (fr) * 2013-06-18 2014-12-24 Teknologian Tutkimuskeskus VTT Miroir destiné à un interféromètre de Fabry-Perot et procédé de production de celui-ci
US20150211928A1 (en) * 2013-07-17 2015-07-30 Panasonic Intellectual Property Management Co., Lt Spectroscopic apparatus

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
LIU DAFU ET AL: "Recent development of infrared tunable filter", VISUAL COMMUNICATIONS AND IMAGE PROCESSING; 20-1-2004 - 20-1-2004; SAN JOSE,, vol. 9522, 13 April 2015 (2015-04-13), pages 95220X - 95220X, XP060053394, ISBN: 978-1-62841-730-2, DOI: 10.1117/12.2179550 *
MEINIG M ET AL: "Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers", 2011 16TH INTERNATIONAL SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS CONFERENCE (TRANSDUCERS 2011) ; BEIJING, CHINA; 5 - 9 JUNE 2011, IEEE, PISCATAWAY, NJ, 5 June 2011 (2011-06-05), pages 2538 - 2541, XP031911071, ISBN: 978-1-4577-0157-3, DOI: 10.1109/TRANSDUCERS.2011.5969764 *

Also Published As

Publication number Publication date
CN109891204A (zh) 2019-06-14
DE102016221383A1 (de) 2018-05-03
EP3532813A1 (fr) 2019-09-04
CN109891204B (zh) 2021-04-02

Similar Documents

Publication Publication Date Title
EP0076356B1 (fr) Procédé et dispositif pour la mesure de la concentration d'un composant absorbant un rayonnement infrarouge, proche infrarouge, visible ou ultraviolet dans un mélange
DE102016111747B4 (de) Verfahren und Vorrichtung zur Raman-Spektroskopie
EP2857811B1 (fr) Spectromètre pour l'analyse de gaz
DE69201917T2 (de) Hochauflösendes Spektroskopsystem.
EP2895844A1 (fr) Dispositif comprenant un agencement d'éléments optiques
DE102017130772A1 (de) Spektrometeranordnung, Verfahren zur Erzeugung eines zweidimensionalen Spektrums mittels einer solchen
DD292078A5 (de) Fchelle-polychromator
DE4017317C2 (de) Anodnung zur Verbesserung der Auflösung eines Spektrometers
DE3005352C2 (de) Optische Anordnung zum Erzeugen von zeitlich aufeinanderfolgenden Meßstrahlenbündeln unterschiedlicher Wellenlänge
EP3532813A1 (fr) Procédé de fonctionnement d'un microspectromètre et microspectromètre
DE102011083750A1 (de) Verfahren und Anordnung zum Einstellen eines Laserspektrometers
DE4441686A1 (de) Sortiervorrichtung
DE4223212C2 (de) Gitter-Polychromator
DE102017104872A1 (de) ATR Spektrometer und Verfahren zum Analysieren der chemischen Zusammensetzung einer Probe
DE3045156A1 (de) Vorrichtung zur spektralanalyse
EP3655736A1 (fr) Module de microspectromètrie et procédé de réception d'un spectre au moyen d'un module de microspectromètrie
WO2018149607A1 (fr) Microspectromètre, procédé et appareil de commande destinés au fonctionnement d'un microspectromètre
DE102016226241A1 (de) Interferometerbauelement, Verfahren zum Herstellen eines Interferometerbauelements und Verfahren zum Betreiben eines Interferometerbauelements
DE102022124375B3 (de) Vorrichtung und Verfahren zur Raman-Spektroskopie
DE102017203880A1 (de) Mikrospektrometermodul, Handgerät und Verfahren zum Betreiben eines Mikrospektrometermoduls
EP2028463B1 (fr) Dispositif et procédé destinés au référencement par longueurs d'onde d'interféromètres Fabry-Pérot déterminables
DE102020208314A1 (de) Optische Analyseeinrichtung und Verfahren zum Betreiben einer optischen Analyseeinrichtung
EP3417299A1 (fr) Dispositif et procédé d'analyse spectrale
DE102019210244A1 (de) Interferometereinrichtung und Verfahren zum Betreiben einer Interferometereinrichtung
EP1351042B1 (fr) Méthode et dispositif de mesure d'un spectre optique

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17780698

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 2017780698

Country of ref document: EP

Effective date: 20190531