WO2018149607A1 - Microspectromètre, procédé et appareil de commande destinés au fonctionnement d'un microspectromètre - Google Patents

Microspectromètre, procédé et appareil de commande destinés au fonctionnement d'un microspectromètre Download PDF

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Publication number
WO2018149607A1
WO2018149607A1 PCT/EP2018/051803 EP2018051803W WO2018149607A1 WO 2018149607 A1 WO2018149607 A1 WO 2018149607A1 EP 2018051803 W EP2018051803 W EP 2018051803W WO 2018149607 A1 WO2018149607 A1 WO 2018149607A1
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WO
WIPO (PCT)
Prior art keywords
light
wavelength range
sample
filter
microspectrometer
Prior art date
Application number
PCT/EP2018/051803
Other languages
German (de)
English (en)
Inventor
Ingo Herrmann
Andreas Merz
Martin HUSNIK
Benedikt Stein
Christoph Schelling
Original Assignee
Robert Bosch Gmbh
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Filing date
Publication date
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Publication of WO2018149607A1 publication Critical patent/WO2018149607A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Definitions

  • the invention is based on a device or a method according to the preamble of the independent claims.
  • the subject of the present invention is also a computer program.
  • a spectrum of light can be imaged by a plurality of temporally staggered intensity values.
  • the intensity values can each represent a radiation intensity of a wavelength range.
  • the wavelength range can be adjusted by a tunable filter element.
  • Microspectrometer a method for operating a microspectrometer, further a control unit, which uses this method, and finally presented a corresponding computer program according to the main claims.
  • the measures listed in the dependent claims are advantageous developments and improvements in the independent
  • the light emitted by the material may be wavelength-shifted with respect to the irradiating light. This allows a reflection spectrum of the Material difficult to interpret, since the shifted wavelengths are superimposed on similar unshifted wavelengths and falsified
  • the intensities of the wavelength-shifted light can be detected independently and calculated out of the reflection spectrum.
  • the detection of the shifted wavelengths can be prevented by adjusting the detected wavelength range outside the shifted wavelengths.
  • a microspectrometer comprising: a lighting device for providing light, wherein the
  • Microspectrometer is aligned; a first tunable filter device for passing a first selectable wavelength range of the light from the illumination device to the sample location; a detector means for detecting an intensity of the light, the detector means being aligned with the sample location; and second tunable filter means for passing a second selectable wavelength range of the light from the sample location to the first
  • a microspectrometer can be understood as a miniaturized, highly integrated component.
  • An illumination device can have a light source for broadband light.
  • the light source may be an incandescent light source, LED and / or fluorescent light source.
  • the sample location is to be understood as a location that may be one of several possible locations in the vicinity of or in the microspectrometer on which the sample is positioned. The term "sample location" therefore means the position at which the sample is actually arranged for the current measurement.
  • a filter device can be wavelength-selective and / or modulatable.
  • the filter device may adjust the wavelength range in response to a
  • a wavelength range may be a range close to a set resonance wavelength or a set resonance frequency of the filter device.
  • Detector device may comprise a photoelectric element, which is adapted to image the intensity of the light in an electrical value.
  • the illumination device and the detector device can be arranged in a transmission geometry on opposite sides of the sample location.
  • the illumination device can be designed to illuminate the sample.
  • the illumination device and the detector device can be aligned in a reflection geometry at an angle to each other on the sample location.
  • the lighting device and the detector device can be aligned in a reflection geometry at an angle to each other on the sample location.
  • the lighting device and the detector device can be aligned in a reflection geometry at an angle to each other on the sample location.
  • Detector device may be arranged on the same side of the sample location.
  • the microspectrometer can also have a further illumination device, which is likewise aligned with the sample location from another angle.
  • the light from the illumination device can be (diffusely) reflected or scattered at the sample.
  • the first filter device and the illumination device can be combined to form a lighting unit.
  • the second filter device and the detector device can be combined to form a detector unit. Both units can be integrated again. By combining compact dimensions of the microspectrometer can be achieved.
  • the first filter device may comprise at least a first Fabry-Perot filter.
  • the second filter device may comprise at least one second Fabry Include perot filters.
  • a Fabry-Perot filter or interferometer has a gap between two reflective surfaces. A gap width of the gap determines a resonant frequency for incident light in the gap. Light in a wavelength range near the resonance frequency is only slightly attenuated and can pass through the gap. Light outside the set wavelength range is attenuated and does not pass through the interferometer.
  • Fabry-Perot filters are easy to pass through
  • the lighting device can be modulated.
  • Light source can provide different wavelength ranges and / or time-varying emit light of different wavelengths. It is also conceivable that the first tunable filter device and / or the second tunable filter device can also be modulated, in particular wherein the first tunable filter device (104) has a modulatable first Fabry-Perot filter and / or a second Fabry-Perot filter.
  • Filter device rapidly between two wavelengths (areas) continuously back and forth process and the second filter device on one of these
  • Wavelength range and / or a time-controllable release of light can be achieved.
  • the first wavelength range and / or the second wavelength range can be changed over time.
  • a temporal spectrum of the light from the sample can be recorded.
  • the second wavelength range can be varied while the first wavelength range is kept constant.
  • the first wavelength range is kept constant.
  • Wavelength range can be varied while the second wavelength range is kept constant. It is also conceivable methods in which both filters are simultaneously varied in different ways to each other (see here, for example, the following explanations). Also, multiple filters may be serially or in parallel before and after the sample instead of a filter. Furthermore, so different spectra can be recorded. Due to the different spectra, wavelength shifts can be easily detected and compensated and / or evaluated accordingly.
  • the first wavelength range and the second wavelength range can be tuned to different harmonics. Harmonics can be different multiples of a reference wavelength. Different harmonics allow higher order harmonics to be filtered out.
  • This method can be implemented, for example, in software or hardware or in a mixed form of software and hardware, for example in a control unit.
  • the approach presented here also provides a control unit which is designed to implement the steps of a variant of a method presented here
  • control unit may comprise at least one arithmetic unit for processing signals or data, at least one memory unit for storing signals or data, at least one interface to a sensor or an actuator for reading sensor signals from the sensor or for outputting control signals to the actuator and / or or at least one
  • the arithmetic unit may be, for example, a signal processor, a microcontroller or the like, wherein the memory unit may be a flash memory, an EEPROM or a magnetic memory unit.
  • the communication interface can be designed to read or output data wirelessly and / or by line, wherein a communication interface that can read or output line-bound data, for example, electrically or optically read this data from a corresponding data transmission line or output in a corresponding data transmission line.
  • a control device can be understood as meaning an electrical device which processes sensor signals and outputs control and / or data signals in dependence thereon.
  • the control unit may have an interface, which may be formed in hardware and / or software. In a hardware training, the interfaces may for example be part of a so-called system ASICs, the various functions of the
  • Control unit includes.
  • the interfaces are their own integrated circuits or at least partially consist of discrete components.
  • the interfaces may be software modules that are present, for example, on a microcontroller in addition to other software modules.
  • the microspectrometer may comprise a controller according to the approach presented here. Also of advantage is a computer program product or computer program with program code which can be stored on a machine-readable carrier or storage medium such as a semiconductor memory, a hard disk memory or an optical memory and for carrying out, implementing and / or controlling the steps of the method according to one of the above
  • FIG. 2 is a block diagram of a microspectrometer according to a
  • Fig. 3 is a representation of excitation states when excited by
  • Fig. 4 is an illustration of a Stokes shift
  • Fig. 5 is an illustration of various harmonics
  • Fig. 6 is a representation of a change over time of a
  • Wavelength range according to an embodiment
  • Microspectrometer according to one embodiment.
  • FIG. 1 shows representations of two microspectrometers 100 in different embodiments. Both microspectrometers 100 each have one
  • Illumination device 102 Illumination device 102, a tunable filter device 104, a sample location 106 and a detector device 108.
  • a tunable filter device 104 At the first
  • the filter device 104 is arranged between the illumination device 102 and the sample location 106. In the second microspectrometer 100 shown, the filter device 104 is arranged between the sample location 106 and the detector device 108.
  • the illumination device 102 provides broadband light 110.
  • the light 110 is emitted by the filter device 104 to the sample location 106.
  • the filter device 104 passes only a selectable wavelength range 112 of the light 110.
  • the light 110 or the wavelength range 112 strikes a sample 114 to be analyzed.
  • the sample 114 interacts with the light 110 or the wavelength range 112.
  • a portion of the light 110 or of the wavelength range 112 is applied to the sample 114 in the direction of the detector device 108 reflected and / or scattered.
  • the light 110 or the wavelength range 112 excites the sample 114 for emitting light.
  • the light 116 originating from the sample 114 has wavelengths dependent on a material of the sample 114.
  • the emitted wavelengths can be outside the
  • Wavelength range 112 are.
  • the light 116 emanating from the sample 114 falls in front of the detector device 108
  • Filter means 104 so that only the wavelength range 112 of the light 116 reaches the detector device 108.
  • an intensity of the incident light 116 is imaged in an intensity value.
  • the filter device 104 transmits different wavelength regions 112 over time, multiple intensity values for the various
  • Wavelength ranges 112 combined into a spectrum of outgoing from the sample 114 light 116.
  • Spectroscopy systems 100 consist in the vast majority of cases of a light source 102, the sample 114, a filter element 104 and a detector 108.
  • the spectral filter element 104 or a plurality of spectral filter elements 104, such as Fabry-Perot filter (FPI) are either before or after the Sample 114.
  • FIG. 2 shows a block diagram of a microspectrometer 100 according to one exemplary embodiment.
  • the microspectrometer 100 essentially corresponds to one of the microspectrometers shown in FIG. 1 and has a
  • Illumination device 102 a first tunable filter device 104, a sample location 106 and a detector device 108.
  • the microspectrometer 100 has a second tunable filter device 200.
  • the first filter device 104 is arranged between the illumination device 102 and the sample 114 or the sample location 106.
  • the second filter device 200 is between the sample 114 and the
  • Sample location 106 and the detector device 108 arranged. The arrangement can also be reversed.
  • the first filter device 104 passes a first wavelength range 112 of the light of the illumination device 102 to the sample 114 or the sample location 106.
  • the second filter device 200 passes through a second wavelength range of the light 116 emanating from the sample 114.
  • the first wavelength range 112 and the second wavelength range may be substantially coincident.
  • the second wavelength range may deviate from the first wavelength range 112. If the first
  • Wavelength range 112 and the second wavelength range match, deviating wavelengths are not transmitted to the detector device 108. If the second wavelength range of the first Wavelength range 112 deviates and there is no overlap of
  • the light in the second wavelength range is formed by excitation of the sample 114 for luminescence, in particular, for example, for fluorescence or phosphorescence. In other words, light gets in the second
  • the first wavelength range 112 can be kept constant while the second wavelength range is changed.
  • the intensity values represent a spectrum of the sample 114 when irradiated with the first wavelength range 112. Subsequently, the first wavelength range 112 can be changed and again a plurality of intensity values can be detected while the second wavelength range is changed.
  • the first wavelength range 112 may be changed while the second wavelength range is kept constant.
  • Wavelength ranges in which the sample 114 reflects or emits when irradiated with a spectrum of light 116 can be changed and again a plurality of intensity values can be detected while the first wavelength range 112 is changed.
  • the illumination device 102 and the detector device 108 are aligned with the sample location 106.
  • the illumination device 102 and the detector device 108 are arranged at an angle to each other, so that the light from the illumination device 102 is reflected at the sample 114 and thrown to the detector device 108.
  • the illumination device 102 and the detector device 108 may also be aligned with each other while the sample site 106 is interposed therebetween. Then, the light from the illumination device 102 can penetrate the sample 114 to reach the detector device 108.
  • the first filter device 104 and the illumination device 102 are integrated in a lighting unit 202.
  • the second filter device 200 and the detector device 108 are integrated in a detector unit 204.
  • a controller 206 for operating the microspectrometer 100 is connected to the illumination unit 202 and the detector unit 204.
  • Control unit 206 is configured to control the illumination device 102, the first filter device 104, the second filter device 200 and the detector device via control signals 208.
  • the controller 206 is further configured to record and process the intensity values.
  • the filter devices 104, 200 can be designed as a Fabry-Perot filter.
  • the transmitted wavelength range is dependent on one
  • Gap width between two reflective surfaces of the filter device 104, 200 determines a resonant wavelength, which is little attenuated and therefore is transmitted.
  • the gap width is adjustable.
  • Resonance wavelength and its harmonics can penetrate the filter device.
  • the first filter means 104 When the first filter means 104 is set to the resonant wavelength and the second filter means 200 is tuned to one of the harmonics, many higher order harmonics can be filtered out (as will be explained later with reference to FIG. 5) and on
  • the spectroscopy system 100 presented here consists of two subsystems 202, 204.
  • Lighting system 102 for the illumination of the sample 114 and a first A tunable FPI filter system 104 for spectrally filtering the light in front of the sample 114, and a second subsystem 204 having a second tunable FPI filter system 200 for spectrally filtering the light 116 coming from the sample 114 and a detector system 108.
  • the subsystems 202, 204 can be positioned either in a transmission geometry, ie on a common optical axis or in reflection geometry relative to each other.
  • the illumination system 102 and the first FPI filter system 104 as well as the second FPI filter system 200 and the detector system 108 are compactly integrated together.
  • the FPI filters 104, 200 may be MOEMS elements. Both units 202, 204 may in turn be integrated in a common housing.
  • the resonator lengths of the two FPI filter elements 104, 200 are different from each other.
  • FIG. 2 shows a spectroscopy system 100 according to the approach presented here with a filter system 104 in front of and a filter system 200 after the sample 114.
  • both the non-wavelength shifted scattered / transmitted light and the wavelength-shifted light can be detected and distinguished from each other.
  • Unwanted fluorescent light from the sample 114 can be directly quantified and eliminated, or only the fluorescence light can be determined.
  • the spectroscopy system 100 provides more accurate spectra.
  • Detection arm with dichroic beam splitter and detector which is perpendicular to the other detection arm saved. This makes the spectroscopy system 100 more compact and cheaper.
  • By different resonator lengths of the two FPIs 104, 200 can be targeted filter out disturbing, especially higher orders and perform dark current reference measurements and background light measurements.
  • It may be a fast light modulation with a predetermined drive frequency by off-resonance modulation drive of the first FPI filter 104 to
  • the illumination system 102 of the spectroscopic system 100 described herein includes a light source and, if necessary, collimating optics.
  • Light source may, for example, an incandescent lamp, a thermal emitter, a laser, an LED, an LED with a phosphorus light source or a
  • the light source can have a plurality of spectrally overlapping radiation sources.
  • the radiation source can be mechanically, optically or electrically modulated to allow lock-in detection.
  • the first FPI filter system 104 is integrated. This can for example be different from a Fabry-Perot interferometer FPI or several parallel Fabry-Perot interferometers FPI
  • Wavelength ranges can be set extremely precisely, or several serial FPI filters, for example, to filter out higher orders.
  • the or the FPI elements can be constructed, for example, from a MOEMS element. Thereafter, the light beam 112 is directed to the sample 114.
  • the light 112 radiated thereon may be transmitted, reflected, diffused - scattered, as well as absorbed and remitted, for example, materials containing dye molecules or similar behaviors.
  • the wavelength of the remitted light 116 shifts significantly. In practice, a superposition of these processes usually occurs, which makes massively difficult the evaluation of the acquired spectra. That's why this one is here
  • the proportion of light 116 emitted wavelength-shifted is quantified.
  • the light 116 from the sample 114 is then directed into the second FPI filter system 200.
  • various optical components such as a lens, a reflector, a diffuser directed in particular, and / or an element restricting the field of view can be used for this purpose. Alternatively, these can also be located between FPI and detector.
  • the FPI filter system 200 can be made of a Fabry-Perot interferometer FPI, several parallel Fabry-Perot interferometers, for example to be able to set extremely precisely in different wavelength ranges, or several serial Fabry-Perot interferometer filters, for example for filtering out higher orders exist.
  • the light is detected with one or more detectors 108. Depending on the wavelength of the light 116 can also be used.
  • different detectors 108 may be, for example, Si, Ge, InGaAs or PbSe. Again, the second FPI filter system 200 and the detection system 1108 are integrated together.
  • the spectroscopy system 100 is controlled by an electronics 206
  • the lock-in technique can be used.
  • the measurement of a portion of the light 112 after the first FPI filter system 104 by means of an additional detector for referencing the incident on the sample 114 light power.
  • further optical filters can be arranged at different points of the beam path.
  • fixed references may be included in the spectroscopy system 100. The Vernier effect can be used to create very narrow transmitted wavelength ranges.
  • Figures 3 and 4 show a representation of various luminescence / photoluminescent processes with excitation states 300, 306, 308 when excited by radiation and a representation of a Stokes shift 400 at a selected molecule.
  • a fluorescent material is irradiated with light, The fluorophore absorbs a photon and enters an excited state 300. Usually, energy is then released to the environment through vibrational relaxation 302 before the fluorophore relaxes back to ground state 306 by emission 304 of a photon.
  • the transition 302 may form an "intersystem crossing.”
  • the left emission process 304 may be referred to as "intersystem crossing.”
  • Fluorescence, the right transition or emission 304 may be considered as phosporescence. Also, upon emission 304 of a photon, the fluorophore may relax to a higher vibrational state 308 than the ground state 306. Thus, the emitted light 304 is long-wavelength or shifted to lower energies compared to the incident light 110. This effect is referred to as Stokes shift 400.
  • sample materials can also exhibit an anti-Stokes shift, a phosphorescence or even an inelastic scattering.
  • Filtering means before a second filter means after the sample makes it possible to visualize wavelength shifts 400 by various physical or chemical effects of the light 304 irradiated and emitted onto a sample.
  • the spectrometer system has two filter elements in order to be able to distinguish between non-shifted and (anti) Stokes-shifted light.
  • the proportion of the light scattered scattered at a wavelength other than the irradiated wavelength can be quantitatively discriminated from that reflected at the same wavelength.
  • 5 shows a representation of different harmonics 500, 502, 504, 506.
  • the harmonics are shown in a diagram which has plotted on its abscissa a decreasing wavelength or an increasing frequency. On the ordinate an intensity is offered.
  • Harmonics 502, 504, 506 are the higher order harmonics of
  • the filter devices shown in Fig. 2 can be designed as a Fabry-Perot interferometer. Then, a gap width between two reflective surfaces of the interferometer determines the fundamental wavelength 500.
  • the fundamental wavelength 500 corresponds to the resonant frequency corresponding to the gap width. Light with the resonance frequency respectively
  • the interferometer may pass substantially unattenuated. Other frequencies are attenuated and out of the light
  • the harmonics 502, 504, 506 each have an integer multiple frequency of the resonance frequency and can also the
  • Interferometer happen because they are also resonant at the gap width of the fundamental wavelength 500.
  • the second filter device can be set, for example, to the first harmonic 502 as the fundamental wavelength. Then be at the second
  • the third harmonic 506 may pass through the second filter device again because the third harmonic 506 is also the first harmonic of the gap width of the second filter device.
  • Fig. 6 shows a representation of a temporal change of a first
  • Wavelength range 112 according to an embodiment.
  • the change is plotted on a graph, on its abscissa the time and on its ordinate an ascending frequency or decreasing
  • Wavelength range set which is shown in Fig. 6 by the curve with the plateaus 600, 602, 604 and 606.
  • the other FPI is preferably resonant between the desired wavelength range and a
  • Wavelength range 608 next to it small amplitude over the respective
  • This periodic signal change is then used for lock-in detection, which dramatically improves the signal-to-noise ratio of the measurement signal. Also, such a disturbing background signal can be eliminated.
  • FIG. 6 shows a sketch of how the resonator lengths of the two filter devices can be set for lock-in detection, wherein a y-scale of the two resonator lengths is not necessarily identical.
  • the approach presented here for the fresh determination of pork can be used. If Pork with blue / UV light z. B., a wavelength of about 410 nm) is irradiated, depending on the freshness of a varying proportion
  • fluorescent light in a wavelength range of about 500 to 600 nm.
  • broadband lighting and detection can only with
  • FIG. 7 shows a flow chart of a method 700 for operating a microspectrometer according to one exemplary embodiment.
  • the method 700 may be performed on a microspectrometer as in FIG. 2.
  • the method 700 includes a step 702 of providing a step 704 of FIG.
  • step 702 of providing light is provided using a lighting device.
  • the light is broadband, so has a spectrum with a large frequency range.
  • step 704 of passing a first one is selectable using a first filter means
  • Wavelength range of light transmitted to a sample Wavelength range of light transmitted to a sample. Further, in step 704 of passing using a second filter means, a second selectable wavelength range from the sample to a
  • Detector device passed.
  • step 706 of detecting an intensity of the transmitted light from the sample is detected in an intensity value.
  • the wavelengths transmitted by the first and second FPI filter systems are set equal and a wavelength scan is performed. Then, for each wavelength set at the first filter system, the second filter system is scanned.
  • the wavelength shifted components can be determined and subtracted from the first acquired measurement data.
  • algorithms such as Hadamard matrices, the measurement time can be reduced.
  • an exemplary embodiment comprises a "and / or" link between a first feature and a second feature, then this is to be read so that the embodiment according to one embodiment is both the first feature as well as the second feature and according to another embodiment, either only the first feature or only the second feature.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un microspectromètre (100) comprenant un dispositif d'illumination (102) destiné à fournir une lumière (110), le dispositif d'illumination (102) étant orienté vers un emplacement d'échantillon (106), destiné à un échantillon (114), du microspectromètre (100), un premier dispositif filtre (104) accordable destiné à la transmission d'une première plage de longueurs d'ondes (112), sélectionnable, de la lumière (110) du dispositif d'illumination (102) jusqu'à l'emplacement d'échantillon (106), un dispositif détecteur (108) destiné à la détection de l'intensité de la lumière (116), le dispositif détecteur (108) étant orienté vers l'emplacement d'échantillon (106), et un deuxième dispositif filtre (200) accordable permettant la transmission d'une deuxième plage de longueurs d'ondes, sélectionnable, de la lumière (116) de l'emplacement d'échantillon (106) jusqu'au dispositif détecteur (108).
PCT/EP2018/051803 2017-02-20 2018-01-25 Microspectromètre, procédé et appareil de commande destinés au fonctionnement d'un microspectromètre WO2018149607A1 (fr)

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DE102019205195A1 (de) * 2019-04-11 2020-10-15 Robert Bosch Gmbh Optische Analyseeinrichtung zum Erzeugen eines Spektrums von einer Probe und Verfahren zum Betreiben einer optischen Analyseeinrichtung

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GB2445956A (en) * 2007-01-26 2008-07-30 Valtion Teknillinen Multiple-source spectrometer with tunable filter
WO2010112679A1 (fr) * 2009-04-02 2010-10-07 Valtion Teknillinen Tutkimuskeskus Système et procédé pour la mesure optique d'une cible

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DE3925692C1 (fr) 1989-08-03 1990-08-23 Hartmann & Braun Ag, 6000 Frankfurt, De
EP1936362B1 (fr) 2006-12-20 2020-03-18 Roche Diabetes Care GmbH Elément de test avec référencement
DE102012007030C5 (de) 2012-04-05 2019-01-10 Drägerwerk AG & Co. KGaA Vorrichtung und Verfahren zur schnellen Aufnahme eines Absorptionsspektrums eines Fluids

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Publication number Priority date Publication date Assignee Title
GB2445956A (en) * 2007-01-26 2008-07-30 Valtion Teknillinen Multiple-source spectrometer with tunable filter
WO2010112679A1 (fr) * 2009-04-02 2010-10-07 Valtion Teknillinen Tutkimuskeskus Système et procédé pour la mesure optique d'une cible

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