WO2018070469A1 - Spectroscope et microscope doté de celui-ci - Google Patents

Spectroscope et microscope doté de celui-ci Download PDF

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Publication number
WO2018070469A1
WO2018070469A1 PCT/JP2017/036966 JP2017036966W WO2018070469A1 WO 2018070469 A1 WO2018070469 A1 WO 2018070469A1 JP 2017036966 W JP2017036966 W JP 2017036966W WO 2018070469 A1 WO2018070469 A1 WO 2018070469A1
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WO
WIPO (PCT)
Prior art keywords
light
refractive lens
lens
incident
spectroscope
Prior art date
Application number
PCT/JP2017/036966
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English (en)
Japanese (ja)
Inventor
世智 佐藤
Original Assignee
株式会社堀場製作所
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Publication date
Application filed by 株式会社堀場製作所 filed Critical 株式会社堀場製作所
Priority to JP2018545046A priority Critical patent/JP6847973B2/ja
Publication of WO2018070469A1 publication Critical patent/WO2018070469A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes

Definitions

  • the present invention relates to a spectroscope used for spectroscopic analysis, for example.
  • a Dyson type spectrometer is known as one of the spectrometers with excellent imaging performance.
  • This Dyson type spectroscope includes an entrance slit, a refractive lens having a convex curved surface, a reflective diffraction grating having a concave curved surface, and a detector.
  • the convex curved surface of the refractive lens and the concave curved surface of the reflective diffraction grating are concentric. Are arranged in a shape.
  • the Dyson spectroscope 100A described in Patent Document 1 compensates for the influence of the aberration of the refractive lens 3A and improves the spectral resolution, as shown in FIG.
  • a compensating lens 5A is provided between the concave curved surface 4A.
  • the compensation lens 5A is provided between the refractive lens 3A and the reflective diffraction grating 4A, when light enters the reflective diffraction grating 4A from the refractive lens 4A, it is reflected by the reflective diffraction grating 4A.
  • the compensation lens 5A is passed twice. For this reason, when the compensation lens 5A is designed so that the position and angle of the light that passes through the refractive lens 3A and enters the reflective diffraction grating 4A is optimized, the light reflected by the reflective diffraction grating 4A is compensated for. The light is refracted by 5A and cannot enter the refraction lens 3A at an optimum position. This is a cause of hindering further improvement in spectral resolution.
  • the light path is an optical path that passes through the compensation lens 5A twice, the number of times of passage through the interface serving as a reflection surface is increased four times as compared with the conventional Dyson spectroscope. The amount of light that can be reached decreases and efficiency decreases, or stray light increases.
  • the present invention has been made in view of the above-described problems, and a spectroscope capable of improving spectral resolution in a wide wavelength range while suppressing a decrease in light receiving efficiency and generation of stray light, and the use thereof.
  • An object of the present invention is to provide a conventional microscope.
  • the spectroscope according to the present invention includes a refractive lens including a first surface on which light emitted from a light source is incident, and a convexly curved second surface on which light incident from the first surface is emitted.
  • a reflection-type diffraction grating having a concave curved surface that reflects and diffracts incident light that is emitted from the second surface of the refractive lens, and is reflected by the reflection-type diffraction grating and is reflected by the first of the refractive lens.
  • a compensation element for compensating for the aberration of the lens.
  • the compensation element is provided between the first surface of the refractive lens and the detector, light can pass through the compensation element only once. Therefore, it is possible to form an image of light on the detector after compensating and optimizing the influence of coma aberration, chromatic aberration and the like in the refractive lens.
  • the light passes only once through the compensation element, the number of interfaces through which the light passes can be minimized, and a decrease in efficiency and an increase in stray light can be suppressed.
  • the compensation element is a combination of a plurality of lenses formed of a light-transmitting material having different refractive indexes. Any configuration may be used. If this is the case, it is easy to design optimal compensation for each wavelength.
  • each surface of the combination lens constituting the compensation element is a spherical surface.
  • either the light incident surface or the light exit surface of the combination lens constituting the compensation element is flat. If it is.
  • the compensation element is composed of an aspheric lens.
  • the convex curved surface of the second surface of the refractive lens and the concave curved surface of the reflective diffraction grating may be arranged concentrically.
  • the detector and the entrance slit can be separated from each other, and in order to make it easy to attach even a large device, a reflection element provided between the light source and the first surface of the refractive lens is provided.
  • the light source is provided so that the optical axis direction of the light source intersects the optical axis direction of the refractive lens, and the light that has passed through the entrance slit is reflected by the reflective element and What is necessary is just to be comprised so that it may inject into 1 surface.
  • the reflective element is a reflective prism. Yes, it suffices if the light exit surface of the reflecting prism and the first surface of the refractive lens are separated from each other.
  • the light sources are arranged concentrically.
  • the center of the convex surface of the second surface and the concave surface of the reflective diffraction grating may be arranged so as to be shifted from the point to be surfaced with respect to the reflective surface of the reflective element.
  • a microscope equipped with a separation instrument according to the present invention can realize high-resolution spectroscopic analysis in a wide wavelength range.
  • the spectroscope according to the present invention compensates for the influence of the aberration of the refractive lens to improve the spectral resolution, while reducing the number of times the light passes through the compensation element only once, thereby reducing the light receiving efficiency and increasing the stray light. Can be suppressed.
  • a spectroscope 100 according to an embodiment of the present invention will be described with reference to FIG.
  • the spectroscope 100 is used for a spectroscopic microscope, for example, and is a so-called Dyson spectroscope further provided with a compensation element 5.
  • the spectroscope 100 is provided with an incident slit 1, a reflecting element 2, a refractive lens 3, a reflecting diffraction grating 4, a compensating element 5, and a detector 6 which are light sources in the order of the optical path.
  • incident slit 1 a reflecting element 2
  • refractive lens 3 a refractive lens 3
  • reflecting diffraction grating 4 a reflecting diffraction grating 4
  • compensating element 5 a detector 6 which are light sources in the order of the optical path.
  • the entrance slit 1 has a predetermined rectangular slit width.
  • the entrance slit 1 has a rectangular slit of 10 ⁇ m ⁇ 100 ⁇ m. Reflected light or transmitted light from a measurement object measured with a microscope is incident on the entrance slit 1, and the beam cross section is emitted in a substantially rectangular shape. As shown in FIG. 1, the opening direction of the entrance slit 1 is provided to be perpendicular to the optical axis direction of the refractive lens 3.
  • the reflection element 2 is a reflection prism made of glass, for example, and reflects the light that has passed through the entrance slit 1 to enter the refractive lens 3.
  • the reflecting surface of the reflecting element 2 is inclined at an angle of about 45 degrees with respect to the opening direction of the entrance slit 1. That is, the center of the convex curved surface of the refractive lens 3 is arranged at a position where the reflecting surface of the reflecting element 2 and the surface object are in relation to the point where the incident slit 1 is provided.
  • the refractive lens 3 is a lens having a substantially plano-convex shape, and a first surface 31 that is a plane on which light passing through the entrance slit 1 is incident, and light incident from the first surface 31 passes through the inside. And a convex curved second surface 32 that is ejected to the outside. As shown in FIG. 1, in this embodiment, light that has passed through the incident slit 1 is reflected by the reflecting element 2 so that its traveling direction is bent by 90 degrees and then enters the first surface 31. It is configured. The position of the incident point of the light incident on the first surface 31 is outside the center line of the first surface 31.
  • the reflection type diffraction grating 4 has a concave curved surface formed with a grating at an interval of 100 to 1000 lines / mm.
  • the concave curved surface and the second surface 32 of the refractive lens 3 are concentric, and the light is dispersed in the light width direction.
  • Most of the light diffracted and reflected by the reflective diffraction grating 4 is a part different from the part where the light is emitted on the second surface 32, and is incident on the upper half part on the paper surface. is there.
  • the compensation element 5 is opposite to a portion where the light reflected by the reflective diffraction grating 4 enters the second surface 32 of the refractive lens 3, passes through the inside, and exits from the first surface 31. The other is opposed to the detector 6.
  • the compensation element 5 is a combination lens made up of two lenses having different refractive indexes from the refractive lens 3, and the three boundary surfaces formed by the two lenses each form a spherical surface.
  • the compensation element 5 compensates for an error caused by the aberration of the refractive lens 3 and is configured to act more strongly on the light on the long wavelength side than on the light on the short wavelength side.
  • the detector 6 is provided at a position where each of the dispersed light beams that have passed through the compensation element 5 forms an image, and the light receiving surface thereof is provided so as to be substantially parallel to the first surface 31 of the refractive lens 3. .
  • Figure 2 shows the simulation results.
  • the slit shape is detected on the longer wavelength side as compared with the conventional spectroscope 100, and the minimum unit that can be distinguished from adjacent wavelengths is more You can see that it is small.
  • the compensation element 5 is provided between the first surface 31 of the refractive lens 3 and the detector 6 and passes only once. Even if the optimum design is performed in order to compensate for the influence of the third aberration, the action can hardly cause another influence on other optical systems. For this reason, compared with the conventional spectroscope 100, a more accurate spectral resolution can be obtained.
  • the incident slit 1 does not have to be opposed to the first surface 31 of the refractive lens 3 by the reflecting element 2, the incident slit 1 and the detector 6 can be provided apart from each other. Therefore, the detector 6 having a high resolution and a large size can be easily used, and the handling of the entrance slit 1 and the detector 6 can be improved.
  • the compensation element is not limited to a combination lens, and for example, a single lens may be used for compensation. Conversely, a compensation element may be constituted by a combination lens composed of three or more lenses so that the aberration of the refractive lens can be compensated with higher accuracy.
  • the combination lens constituting the compensation element 5 it is not necessary to make all surfaces of the combination lens constituting the compensation element curved, and the light incident surface facing the first surface 31 of the refractive lens 3 in the combination lens constituting the compensation element 5 as shown in FIG. May be formed as a plane.
  • the combination lens constituting the compensation element 5 in the combination lens constituting the compensation element 5, the light exit surface facing the detector 6 may be formed as a plane. If these are used, the compensation element 5 can be easily processed and the manufacturing cost can be easily reduced while the aberration of the refractive lens 3 can be compensated.
  • the compensation element 5 may be formed of an aspheric lens as shown in FIG.
  • a DO lens or a DO element using a diffraction phenomenon may be used.
  • an aberration correction plate may be used as the correction element 5, or a distributed refractive index lens (GRIN lens) may be used.
  • a gap may be formed between the first surface 31 of the refractive lens 3 and the light exit surface of the reflecting element 2 constituted by the reflecting prism so as to be separated by a predetermined distance.
  • the gap between the reflecting element 2 and the refractive lens 3 can be increased by making the gap larger than the wavelength of the light passing therethrough or by making the gap larger than the coherence length when the light source is a broadband light source such as a halogen lamp or SLD. Interference fringes can be suppressed when light passes between them.
  • the gap without being filled with an adhesive or the like, it is possible to prevent a part of the light passing therethrough from being attenuated by being absorbed or irregularly reflected by the adhesive. Therefore, a wide range of wavelengths can be guided to the detector 6.
  • the position of the entrance slit 1 that is a light source with respect to the reflection element 2 may be shifted from the first embodiment to the first surface 31 side of the refractive lens 3. That is, when the convex curved surface of the second surface 32 of the refractive lens 3 and the concave curved surface of the reflective diffraction grating 4 are arranged so as to be concentric, the position of the entrance slit 1 is relative to the reflective surface of the reflective element 2. However, they may not be aligned with the center of the concentric circles and may be arranged in a shifted state.
  • the light reflected by the second surface 32 of the refractive lens 3 or the reflective diffraction grating 4 is as shown in FIG. May return to the light source and become stray light.
  • the reflected light generated by the second surface 32 or the reflective diffraction grating 4 can be prevented from returning to the light source and stray light can be prevented from being generated. .
  • the reflection element may be omitted, and the opening direction of the entrance slit may be arranged to face the first surface of the refractive lens as in the conventional case.
  • the light source is not limited to the line light formed by the entrance slit, and for example, a light source in which optical fibers are arranged in one or a plurality of rows may be used as the light source for emitting the line light.
  • the spectroscope according to the present invention is not used only for a microscope, but may be used for a camera or other purposes.
  • a spectroscope capable of improving the spectral resolution by compensating for the influence of the aberration of the refractive lens and suppressing the decrease in the light receiving efficiency and the increase in stray light by reducing the number of times the light passes through the compensation element.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Lenses (AREA)

Abstract

L'objet de la présente invention est de fournir un spectroscope avec lequel il est possible d'améliorer la résolution spectrale sur une large plage de longueurs d'onde tout en supprimant une détérioration de l'efficacité de réception de lumière et en supprimant la génération de lumière parasite. À cet effet, ce spectroscope est pourvu de : une lentille de réfraction (3) équipée d'une première surface (31) sur laquelle est incidente une lumière émise par une source de lumière, et d'une seconde surface (32) en forme de surface incurvée convexe à partir de laquelle est émise la lumière qui a pénétré à partir de la première surface (31) ; un réseau de diffraction de type à réflexion (4) en forme de surface incurvée concave qui réfléchit et diffracte la lumière incidente qui est la lumière émise à partir de la seconde surface (32) de la lentille de réfraction (3) ; un détecteur (6) disposé dans une position dans laquelle la lumière qui a été réfléchie par le réseau de diffraction de type à réflexion (4), a pénétré à partir de la seconde surface (32) de la lentille de réfraction (3) et a été émise par la première surface (31) forme une image ; et un élément de compensation (5) disposé entre la première surface (31) de la lentille de réfraction (3) et le détecteur (6).
PCT/JP2017/036966 2016-10-14 2017-10-12 Spectroscope et microscope doté de celui-ci WO2018070469A1 (fr)

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JP2018545046A JP6847973B2 (ja) 2016-10-14 2017-10-12 分光器、及び、それを備えた顕微鏡

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023248572A1 (fr) * 2022-06-24 2023-12-28 英弘精機株式会社 Dispositif de réception de lumière lidar, lidar et lidar d'observation météorologique

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990002928A1 (fr) * 1988-09-07 1990-03-22 Sira Limited Spectrometre a formation d'image
JPH10293062A (ja) * 1997-02-28 1998-11-04 Instr Sa Inc 改良型コンセントリックスペクトログラフ、光を分散する方法および２本の光ビームを回折する方法
US20090237657A1 (en) * 2008-03-20 2009-09-24 David Wheeler Warren Compact, high-throughput spectrometer apparatus for hyperspectral remote sensing
JP2012506562A (ja) * 2008-10-20 2012-03-15 ニンボ ユアンル エレクトロ−オプティクス，コーポレーション リミテッド 収差補正凹面回折格子と透過型収差補正手段とを備える分光計
JP2012507698A (ja) * 2008-11-03 2012-03-29 オリバ ジョビン イボン エス． アー． エス． 改良された像質と小歪曲を有するダイソン型イメージング分光計
WO2012099987A2 (fr) * 2011-01-20 2012-07-26 Ningbo Yuanlu Electro-Optics, Co., Ltd. Spectromètres à canaux multiples

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990002928A1 (fr) * 1988-09-07 1990-03-22 Sira Limited Spectrometre a formation d'image
JPH10293062A (ja) * 1997-02-28 1998-11-04 Instr Sa Inc 改良型コンセントリックスペクトログラフ、光を分散する方法および２本の光ビームを回折する方法
US20090237657A1 (en) * 2008-03-20 2009-09-24 David Wheeler Warren Compact, high-throughput spectrometer apparatus for hyperspectral remote sensing
JP2012506562A (ja) * 2008-10-20 2012-03-15 ニンボ ユアンル エレクトロ−オプティクス，コーポレーション リミテッド 収差補正凹面回折格子と透過型収差補正手段とを備える分光計
JP2012507698A (ja) * 2008-11-03 2012-03-29 オリバ ジョビン イボン エス． アー． エス． 改良された像質と小歪曲を有するダイソン型イメージング分光計
WO2012099987A2 (fr) * 2011-01-20 2012-07-26 Ningbo Yuanlu Electro-Optics, Co., Ltd. Spectromètres à canaux multiples

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LOBB, D. R.: "Theory of concentric designs for grating spectrometers", APPLIED OPTICS, vol. 33, no. 13, 1 May 1994 (1994-05-01), pages 2648 - 2658, XP000442289, DOI: doi:10.1364/AO.33.002648 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023248572A1 (fr) * 2022-06-24 2023-12-28 英弘精機株式会社 Dispositif de réception de lumière lidar, lidar et lidar d'observation météorologique

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JP6847973B2 (ja) 2021-03-24

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