WO2018059411A1 - Broad spectrum light source - Google Patents

Broad spectrum light source Download PDF

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Publication number
WO2018059411A1
WO2018059411A1 PCT/CN2017/103536 CN2017103536W WO2018059411A1 WO 2018059411 A1 WO2018059411 A1 WO 2018059411A1 CN 2017103536 W CN2017103536 W CN 2017103536W WO 2018059411 A1 WO2018059411 A1 WO 2018059411A1
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WO
WIPO (PCT)
Prior art keywords
light
light source
fiber
spectrum
optical fiber
Prior art date
Application number
PCT/CN2017/103536
Other languages
French (fr)
Chinese (zh)
Inventor
苑高强
刘民玉
Original Assignee
高利通科技(深圳)有限公司
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Publication of WO2018059411A1 publication Critical patent/WO2018059411A1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/1256Generating the spectrum; Monochromators using acousto-optic tunable filter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path

Definitions

  • the present invention relates to a light source for material analysis, and more particularly to a light source having broadband spectral design features for spectral analysis and measurement of materials.
  • the broadband source commonly used in spectroscopic analysis on the market is a tungsten-tungsten lamp, that is, a combination of a xenon lamp and a tungsten lamp by a reflective structure or a transmissive structure for spectral analysis measurement.
  • the spectrum of the tungsten lamp and the xenon lamp is shown in Figure 1 (no absolute spectral intensity calibration), 101 is the tungsten lamp spectrum, 102 is the xenon lamp spectrum, and 103 is the xenon lamp peak spectrum 656. lnm.
  • the spectrum in Figure 1 is measured by a spectrometer with a CCD detector.
  • the visible light peak in the tungsten lamp spectrum 101 is between 571 nm and 637 nm.
  • a tungsten-tungsten lamp having a transmissive structure is illustrated as an example, as shown in FIG.
  • the design is to focus the light emitted by the tungsten lamp 201 with the lens 202 and pass through the aperture beam in the bulb of the xenon lamp 203 to form a broadband spectrum 204 with the light emitted by the xenon lamp (such as a ⁇ produced by Avantes, the Netherlands). Tungsten light broadband source - AvaLight-DH-S, etc.). It is known from the spectrum in Fig.
  • the xenon lamp spectrum (ultraviolet to visible) has a partial peak spectrum (such as 656.1 nm, etc.) which easily saturates the detector of the spectrometer; When the detector of the saturated helium spectrometer does not work properly.
  • some companies use a two-color spectroscope to filter out most of the 656. lnm spike spectrum to avoid saturation problems (such as a tungsten-tungsten broadband source produced by Avantes in the Netherlands - AvaLight-DH-S-BAL, etc.), but This will increase the cost because the dichroic mirror is made by the coating process.
  • the spectral responsivity of CCD or CMOS is very low in the near-infrared spectrum
  • the signal-to-noise ratio of the corresponding near-infrared spectral section is small and is not conducive to spectral analysis measurement.
  • high-power tungsten lamps can be used to increase near-infrared light intensity, this can lead to new problems such as increased power consumption and more heat generation, and in the case of increasing near-infrared pupils, the visible portion will also increase when visible light Partially strong to a certain extent The spectrometer produces saturation; the detector of this spectrometer does not work properly.
  • Patent 201520834344.2 provides a light source having a broadband spectrum, as shown in FIG. 3, comprising: a first light source 301, a short pass filter 302, a first fiber input connector 303, a second light source 304, and a visible attenuation filter.
  • the three optical fiber input connectors and the two fiber output connectors constitute a light combining device, wherein the first light source is an ultraviolet light source and a blue light source, and the second light source is a light source including ultraviolet light, visible light and near infrared light.
  • the patent can solve the spectrum of the xenon lamp in the broadband spectrum as the peak of 6 56. lnm
  • the spectral and visible light relative to ultraviolet light and near-infrared light intensity are too large to easily saturate the spectrometer with CCD or CM OS as a detector, and the problem of low signal-to-noise ratio of near-infrared light in the broadband spectrum can be solved.
  • the broadband spectrum produced by this patent has a problem that the xenon lamp spectrum is relatively weak at 400 nm; in addition, because of the built-in two tungsten lamps, there is a large power consumption and it is easy to generate excess heat and a large volume.
  • a light source having a broadband spectrum having a broadband spectrum which is generally flat, wide-band and nearly doubled in near-infrared light, including ultraviolet light, visible light, and near-infrared light.
  • the light source can solve the saturation spectrum problem of the xenon lamp spectrum in the broadband spectrum as the 656.1 nm spike spectrum and the visible light relative to the ultraviolet light and the near-infrared light intensity, so that the spectrometer with the CCD or CMOS as the detector can easily solve the near-infrared in the broadband spectrum.
  • the problem of low optical signal-to-noise ratio and the same problem can also solve the problem that the broadband spectrum has a relatively weak 400 nm spectrum of the xenon lamp, and it can also solve the problem of excessive heat and large volume due to the large power consumption of the built-in two tungsten lamps.
  • the present invention provides a broadband spectral light source, comprising: a first light source, a short pass filter, a 400 nm band pass filter, a second light source, a visible attenuation filter, and a long pass filter.
  • a film and a light combining device the light combining device is a quadruple comprising four fiber input connectors and one fiber output connector An optical fiber
  • the first light source is an ultraviolet light and a blue light source
  • the second light source is a light source including ultraviolet light, visible light and near infrared light
  • the light generated in the first direction of the first light source passes through the short pass filter to obtain a blue light and ultraviolet spectrum, and the blue light and ultraviolet spectrum are coupled into the first optical fiber input connector of the light combining device;
  • the light generated in the second direction of the first light source passes through the 400 nm band pass filter to obtain a 400 nm blue portion spectrum, and the 400 nm blue portion spectrum passes through the first variable light intensity device or changes the first a coupling distance between a light source and an optical transmission device between the optical fiber output connectors of the light combining device to adjust the light intensity and output;
  • the light generated in the first direction of the second light source passes through the visible attenuation filter to obtain light that is partially attenuated by the visible light, and the light that is partially attenuated by the visible light is coupled into the third portion of the light combining device.
  • Fiber optic input connector
  • the light generated in the second direction of the second light source passes through the long pass filter to obtain a near-infrared spectrum, and the near-infrared spectrum passes through the second variable light intensity device or changes the second light source with a coupling distance of the optical transmission device between the optical fiber output connectors of the light combining device to adjust the light intensity and output;
  • the light combining device combines light entering by the four fiber input connectors and outputs an overall flat broadband spectrum including ultraviolet light, visible light, and near-infrared light through the fiber output connector.
  • the light combining device includes a first two-in-one Y-type optical fiber, a second two-in-one Y-type optical fiber, and a third two-in-one Y respectively having two input connectors and one output connector.
  • two input connectors of the first two-in-one Y-type optical fiber respectively serve as a first optical fiber input connector and a second optical fiber input connector of the light combining device;
  • two input connectors of the second two-in-one Y-type optical fiber respectively serve as a third optical fiber input connector and a fourth optical fiber input connector of the light combining device;
  • the two input connectors of the third two-in-one Y-type optical fiber are respectively connected to the output connectors of the first two-in-one Y-type optical fiber and the second two-in-one Y-type optical fiber, and the third two-in-one An output connector of a Y-type fiber is an optical fiber output connector of the light combining device.
  • the first variable light intensity device of the first light source is a motor driven variable diaphragm
  • the second variable light intensity device of the second light source is a motor driven variable light bar, and the motor drives a wheeled gradient Neutral filter or motor driven wedge plate pair.
  • the light generated in the second direction of the first light source adjusts the light intensity thereof by changing the distance between the second fiber input joint and the first light source;
  • the light generated in the second direction adjusts its light intensity by changing the distance between the fourth fiber input interface and the second light source.
  • the second optical fiber input connector and the optical fiber of the fourth fiber input connector are respectively provided with an optical fiber twisting structure
  • the light generated in the second direction of the first light source is adjusted in intensity by adjusting a distance of the fiber conjugate structure in the fiber of the second fiber input connector, and the light generated in the second direction of the second light source is adjusted by adjusting The strength of the fiber-coupling structure in the fiber of the fourth fiber input connector is adjusted.
  • the light generated in the second direction of the first light source is adjusted in intensity by varying the distance between the collimator lens and the optical fiber in the second fiber input joint;
  • the light generated in the second direction of the second light source is adjusted in intensity by varying the distance of the collimator lens in the fourth fiber input connector from the fiber.
  • the second optical fiber input connector passes the optical fibers of different core diameters to change the light intensity of the light generated in the second direction of the first light source; the fourth optical fiber input connector passes Optical fibers of different core diameters are provided to vary the intensity of light generated by the second direction of the second source.
  • the fiber used in the second direction of the second light source uses a fiber with a larger core diameter to balance each part.
  • the light is strong.
  • the light combining means is bifurcated or branched; and the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the output light intensity of the second light source is adjusted by adjusting its driving current to change the second light source current to change the ultraviolet light spectrum and the visible light spectrum obtained in the first direction of the second light source.
  • the near-infrared spectrum and the intensity of the near-infrared spectrum obtained in the second direction of the second source are adjusted by adjusting its driving current to change the second light source current to change the ultraviolet light spectrum and the visible light spectrum obtained in the first direction of the second light source.
  • the four fiber input connectors are further provided with a neutral light attenuating sheet for adjusting the balance light intensity.
  • the first light source is a xenon lamp, a hydrogen lamp or a xenon lamp
  • the second light source is a tungsten lamp or a xenon lamp.
  • the second technical problem to be solved by the present invention is that the two tungsten lamps installed in the patent 201520834344.2 have large power consumption and are easy to generate excess heat and large volume shortage, and the proposed first direction of the second light source is generated. After passing through the visible attenuation filter, light having a visible light portion is attenuated and light generated in a second direction of the second light source is superimposed on the long-wavelength filter to obtain a near-infrared spectrum to reduce a tungsten The lamp, to solve the large power consumption, easily generates excess heat and a large volume shortage.
  • one of the technical problems to be solved by the present invention is a design scheme of a 400 nm blue light partial spectrum obtained in the second direction of the superimposed xenon lamp proposed for the problem that the xenon lamp spectrum is relatively weak at 400 nm.
  • one of the technical problems to be solved by the present invention is to utilize the combined multi-spectrum, including the power consumption of the existing patent 2015208343 44.2, which is easy to generate excess heat and volume.
  • the near-infrared spectrum obtained in the second direction of the lamp is combined by a light combining device to obtain a broadband spectrum design in which the overall smoothness, wideband, and near-infrared light intensity are almost doubled.
  • FIG. 1 is a spectrum of a common tungsten lamp and a xenon lamp
  • FIG. 2 is a schematic diagram of a common tungsten light source used in the prior art
  • FIG. 3 is a schematic structural diagram of a patent 201520834344.2
  • 5 is a schematic structural diagram of a first embodiment of the present invention
  • 6 is a schematic structural diagram of a second embodiment of the present invention
  • FIG. 7 is a schematic structural diagram of a third embodiment of the present invention.
  • FIG. 8 is a schematic structural diagram of a fourth embodiment of the present invention.
  • FIG. 9 is a schematic structural diagram of a fifth embodiment of the present invention.
  • FIG. 10 is a schematic structural diagram of a sixth embodiment of the present invention.
  • FIG. 11 is a schematic structural diagram of a seventh embodiment of the present invention.
  • the basic principle of the present invention is: a light source that obtains a broadband spectrum by combining multiple spectra, including: a first light source, a short pass filter, a 400 nm band pass filter, a second light source, a visible attenuation filter, Long pass filter and light combining device; the light combining device includes four fiber input connectors and one fiber output connector.
  • the first light source is an ultraviolet light source and a blue light source
  • the second light source is a light source including ultraviolet light, visible light and near infrared light.
  • the light generated in the first direction of the first light source passes through the short pass filter to obtain a blue light and ultraviolet spectrum, and the blue light and the ultraviolet spectrum are coupled into the first optical fiber input joint of the light combining device;
  • the light generated in the second direction of the first light source passes through the 400 nm band pass filter to obtain a 400 nm blue portion spectrum, and the 400 nm blue portion is spectrally coupled into the second fiber input connector of the light combining device; the 400 nm blue portion spectrum passes through a variable light intensity device or a coupling distance of the optical transmission device between the first light source and the optical fiber output connector of the light combining device to adjust the light intensity and output; thereby adjusting the 400 nm portion obtained in the second direction matching the first light source
  • the relative spectral intensity of the blue and ultraviolet spectra obtained in the first direction of the first source is obtained to obtain a smooth blue and ultraviolet spectrum.
  • the light generated in the first direction of the second light source passes through the visible attenuation filter to obtain the light partially attenuated by the visible light, and the ultraviolet light generated by the first direction of the second light source, the attenuated visible light and the near-infrared light are coupled into the light.
  • a third fiber optic input connector of the light combining device ;
  • the light generated in the second direction of the second light source passes through the long pass filter to obtain a near-infrared spectrum, near-infrared light
  • the spectral coupling is coupled to the fourth fiber optic input connector of the light combining device; the near infrared spectroscopy adjusts the light by the second variable light intensity device or by changing the coupling distance of the optical transmission device between the second light source and the fiber output connector of the light combining device
  • the output is strong, thereby adjusting the relative intensity of the near-infrared spectrum obtained in the second direction of the tungsten lamp and the ultraviolet spectrum, the visible spectrum and the near-infrared spectrum obtained in the first direction of the tungsten lamp.
  • the ultraviolet light spectrum, the visible light spectrum and the near-infrared light spectrum obtained in the first direction of the second light source, and the near-infrared spectrum obtained by the second direction of the tungsten lamp can be changed by adjusting the adjustable electric resistance to change the second light source current.
  • the intensity of the two segments is such that the intensity of the two segments is matched to the intensity of the gradual blue light and the ultraviolet spectrum obtained from the first source to obtain a broad spectrum of the overall smooth, broadband and near-infrared light intensity almost doubled.
  • the present invention solves the problem that the spectrum of the 400 nm blue light portion is relatively weak by superimposing the 400 nm blue light partial spectrum obtained in the second direction of the first light source.
  • the present invention solves the 656.1 nm spike spectrum and the visible light relative to the ultraviolet light and the near-infrared light intensity in the xenon lamp spectrum of the prior art as the second light source by superimposing the near-infrared spectrum obtained in the second direction of the second light source. It is easy to solve the problem of saturation of spectrometer with CCD or CMOS as detector, which can solve the problem of low signal-to-noise ratio of near-infrared light in broadband spectrum. In addition, since only one second light source is provided, it can avoid large power consumption and easily generate excess heat. And big problems.
  • a relatively high signal-to-noise ratio can be obtained at near-infrared light; and when the overall light source intensity is increased, including ultraviolet light, visible light, and near-infrared light
  • the intensity of the light is ⁇ , and the visible light portion does not saturate such a spectrometer over a large dynamic range.
  • the broadband light source designed by the invention is economical and practical, and can be widely used for material analysis and measurement, and is convenient and practical.
  • the present invention employs a xenon lamp as a first light source and a tungsten lamp as a second light source.
  • the first light source may also use other ultraviolet light and blue light sources, such as xenon lamps, etc.
  • the second light source may also use other light sources including ultraviolet light, visible light, and near-infrared light, such as xenon lamps.
  • the xenon lamp and the tungsten lamp in the following embodiments are not intended to limit the invention.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • Pass filter 50 5 xenon lamp variable light intensity device 506, second optical fiber input connector 507 of the light combining device, tungsten lamp 508, visible attenuation filter 509, third optical fiber input connector 510 of the light combining device, long wave pass filter 511, tungsten lamp 508 variable light intensity device 512, fourth optical fiber input connector 513 of the light combining device, light 514 generated in the first direction of the xenon lamp 501, light 515 generated in the second direction of the xenon lamp 501, tungsten lamp 508 Light 516 is generated in one direction, and light 517 is generated in the second direction of tungsten lamp 508.
  • the first fiber input connector 503, the second fiber input connector 507, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
  • the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the light 514 generated in the first direction of the xenon lamp 501.
  • the light is coupled into the optical fiber through the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device.
  • the light 515 generated in the second direction of the xenon lamp 5 01 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion spectrum.
  • the portion of the light passing through the variable light intensity device of the xenon lamp 501-motor-driven variable diaphragm 506 adjusts the appropriate light intensity, enters the optical fiber through the second fiber input connector 507, and enters the fiber output connector 504 of the light combining device;
  • the visible attenuation filter 509 After the light 516 generated in the first direction of the lamp 5 08 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508;
  • the intensity of ultraviolet, visible, and near-infrared light, the visible portion is not saturated with a spectrometer that uses CCD or CMOS as a detector; the attenuated visible and ultraviolet and near-infrared light passes through
  • the ultraviolet light and the visible light are filtered to obtain the near infrared.
  • the portion of the light is passed through the tungsten lamp 508 variable light intensity device-motor driven variable diaphragm 512 to adjust the appropriate light intensity, then enters the optical fiber through the fourth fiber input connector 513, and then enters the optical fiber output connector 504 of the light combining device. .
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained.
  • the ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum.
  • a relatively high signal-to-noise ratio can be obtained at near-infrared light.
  • the overall light source intensity including ultraviolet light, visible light and near-infrared light
  • the inner visible portion is not saturated with such spectrometers.
  • the light combining device may be composed of a first two-in-one Y-type fiber, a second two-in-one Y-type fiber, and a third two-in-one Y-type fiber respectively having two input connectors and one output connector. .
  • the two input connectors of the first two-in-one Y-type optical fiber respectively serve as the first optical fiber input connector 503 and the second optical fiber input connector 507 of the light combining device; the two input connectors of the second two-in-one Y-type optical fiber respectively serve as the light combining
  • the third fiber input connector 510 and the fourth fiber input connector 513 of the device; the two input connectors of the third two-in-one Y-type fiber are respectively outputted from the first two-in-one ⁇ -type fiber and the second two-in-one Y-type fiber
  • the connector is connected, and the output connector of the third 2-in-1 Y-type fiber is the fiber output connector 504 of the light combining device.
  • the light generated in the first direction of the xenon lamp 501 passes through the short pass filter 502 and is coupled into one of the input connectors of the first two-in-one Y-type fiber, and the light generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass.
  • the filter 505 is post-coupled into the other input connector of the first 2-in-1 Y-type fiber; the light generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509 and is coupled into the second 2-in-1 Y-type fiber.
  • One of the input connectors, the light generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511 and is coupled into the other input connector of the second two-in-one Y-type fiber; the output connector of the first two-in-one Y-type fiber is connected.
  • One of the input connectors of the third two-in-one Y-type fiber, the output connector of the second two-in-one Y-type fiber is connected to the other input connector of the third two-in-one Y-type fiber, in the third two-in-one Y-type fiber
  • the output connector output includes a broad, broad spectrum of ultraviolet, visible, and near-infrared light, broadband and near-infrared light intensity that is nearly doubled.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first optical fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • the first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be a bifurcation Or split style.
  • the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501.
  • the light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device.
  • the light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion.
  • the part of the light is adjusted by the device of the variable light intensity of the xenon lamp-motor-driven wheeled gradient neutral filter 601, and then enters the fiber through the second fiber input connector 507, and then enters the fiber of the light combining device.
  • Output connector 504 after the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508;
  • the overall light source intensity includes the intensity of ultraviolet light, visible light, and near-infrared light, which is not saturated with a spectrometer that uses CCD or CMOS as a detector;
  • the reduced visible light and ultraviolet light and near-infrared light are coupled into the optical fiber through the third optical fiber input connector 510, and then enter the optical fiber output connector 504 of the light combining device, and the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511.
  • the ultraviolet light and the visible light are filtered to obtain a near-infrared spectrum, and the portion of the light is adjusted by the tungsten light 508 variable light intensity device-motor driven wheeled gradient neutral filter 602 to adjust the appropriate light intensity, after the fourth
  • the fiber optic input connector 513 enters the fiber and enters the fiber optic output connector 504 of the light combining device.
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained.
  • the ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum.
  • This broadband spectrum By using this broadband spectrum to perform spectrometry with a spectrometer using CCD or CMOS as a detector, a relatively high signal-to-noise ratio can be obtained at near-infrared light.
  • the overall light source intensity including ultraviolet light, visible light, and near-infrared light
  • the visible light portion does not saturate such a spectrometer over a large dynamic range.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • the fourth fiber input connector 513 of the light combining device, the light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the second direction of the tungsten lamp 508 The generated light 517.
  • the first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
  • the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the light 514 generated in the first direction of the xenon lamp 501.
  • the light is coupled into the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device.
  • the light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion spectrum.
  • the variable light intensity device of the xenon lamp-motor driven wedge plate pair 701 adjusts the appropriate light intensity, enters the optical fiber through the second fiber input connector 507, and enters the fiber output connector 504 of the light combining device, the tungsten lamp 508
  • the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508 ; when the overall light source intensity is increased, including ultraviolet light, The intensity of visible light and near-infrared light ⁇ , the visible light portion is not saturated with a spectrometer using CCD or C MOS as a detector; the attenuated visible light and ultraviolet light and near-infrared light pass through
  • the fiber input connector 510 is coupled into the fiber, and then enters the fiber output connector 504 of the light combining device.
  • the ultraviolet light and the visible light are filtered to obtain the near infrared.
  • the spectrum, the portion of the light is adjusted by the tungsten light 508 variable light intensity device-motor driven wedge plate pair 702 to adjust the appropriate light intensity, then enters the optical fiber through the fourth fiber input connector 513, and then enters the optical fiber output connector 504 of the light combining device. .
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained.
  • the ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first optical fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • the first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
  • the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501.
  • the light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device.
  • the light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion.
  • the portion of the light is adjusted to a suitable intensity by changing the distance D1 between the second fiber input connector 507 and the xenon lamp 501, and then enters the fiber through the second fiber input connector 507, and then enters the fiber output connector 504 of the light combining device, tungsten.
  • the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; when the overall light source intensity is increased, including ultraviolet light
  • the intensity of light, visible light, and near-infrared light which is not saturated with spectrometers that use C CD or CMOS as detectors; the attenuated visible and ultraviolet and near-infrared
  • the light is coupled into the optical fiber through the third fiber input connector 510, and then enters the fiber output connector 504 of the light combining device.
  • the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511, wherein the ultraviolet light and the visible light are filtered.
  • the near-infrared spectrum is obtained, and the portion of the light is adjusted to a suitable light intensity by changing the distance D2 between the fourth fiber input connector 513 and the tungsten lamp 508, and then enters the fiber through the fourth fiber input connector 513, and then enters the fiber of the light combining device.
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained.
  • the ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smoothness including ultraviolet light, visible low beam and infrared light. Wideband and near-infrared light intensity almost doubled the broadband spectrum.
  • a relatively high signal-to-noise ratio can be obtained at near-infrared light.
  • the overall light source intensity including ultraviolet light, visible light, and near-infrared light
  • the visible light portion does not saturate such a spectrometer over a large dynamic range.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • a pass filter 505 a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device
  • the first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
  • the second fiber input connector 507 and the fourth fiber input connector 513 have a fiber-bonding structure in the fiber, and the fiber coupling structure is composed of two fibers coupled to each other.
  • the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501.
  • the light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device.
  • the light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion.
  • the portion of the light enters the optical fiber through the second fiber input connector 507, and adjusts the appropriate light intensity by changing the distance D3 of the two coupled fibers in the fiber-bonding structure of the second fiber input connector 507, and then enters the light combining device.
  • the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 50 9 , the visible portion thereof is attenuated to balance the relative intensity of the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508;
  • the visible light portion will not saturate the spectrometer with CCD or CMOS as the detector; the attenuation is visible Light and ultraviolet light and near-infrared light are coupled into the optical fiber via the third fiber input connector 510, and then enter the fiber output connector 504 of the light combining device.
  • the fiber output connector 504 of the light combining device is again accessed.
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained.
  • the ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum.
  • a relatively high signal-to-noise ratio can be obtained at near-infrared light.
  • the overall light source intensity including ultraviolet light, visible light, and near-infrared light
  • the visible light portion does not saturate such a spectrometer over a large dynamic range.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • a pass filter 505 a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device
  • the first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
  • a second collimator lens is provided in the second fiber input connector 507 and the fourth fiber input connector 513.
  • the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501.
  • the light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device.
  • the light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion.
  • the portion of the light is adjusted to a suitable light intensity by varying the distance D5 between the collimator lens and the optical fiber in the second fiber input connector 507, and then enters the optical fiber through the second fiber input connector 507, and then enters the light of the light combining device.
  • the fiber output connector 504 after the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance the relative intensity of the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; Increasing the overall light source intensity including the intensity of ultraviolet light, visible light, and near-infrared light, the visible light portion is not saturated with a spectrometer that uses CCD or CMOS as a detector; the attenuated visible light and ultraviolet light and near-infrared light are input through the third optical fiber.
  • the connector 510 is coupled into the optical fiber, and then enters the optical fiber output connector 504 of the light combining device.
  • the ultraviolet light and the visible light are filtered to obtain the near infrared spectrum.
  • the portion of the light is adjusted to a suitable light intensity by changing the distance D6 between the collimator lens and the optical fiber in the fourth optical fiber input connector 513, and then enters the optical fiber through the fourth optical fiber input connector 513, and then enters the optical fiber output connector 504 of the light combining device. .
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained.
  • the obtained ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Double the broadband spectrum.
  • a relatively high signal-to-noise ratio can be obtained at near-infrared light.
  • the overall light source intensity including ultraviolet light, visible light, and near-infrared light
  • the visible light portion does not saturate such a spectrometer over a large dynamic range.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band.
  • a pass filter 505 a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device
  • the first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched. Fibers of different core diameters are disposed in the second fiber input connector 507 and the fourth fiber input connector 513.
  • the short pass filter 502 After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, it contains a 656.1 nm spike spectrum.
  • the visible light is filtered out to obtain a smooth blue and ultraviolet spectrum, that is, light 514 generated in the first direction of the xenon lamp 501, which is coupled into the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device,
  • the light 515 generated in the second direction of the lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion spectrum, which is adjusted by adjusting the appropriate light intensity by combining the fibers with different diameters and adjusting the distance D7 of the different diameter twisted fibers.
  • the second fiber input connector 507 enters the optical fiber, and then enters the fiber output connector 504 of the light combining device.
  • the visible portion thereof is attenuated to balance the The relative intensity of the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; when the intensity of the overall light source is increased, including the intensity of ultraviolet light, visible light, and near-infrared light, the visible light portion is not saturated with the spectrometer using CCD or CMOS as a detector.
  • the attenuated visible light is coupled to the ultraviolet light and the near-infrared light via the third fiber input connector 510 into the fiber, and then enters the fiber of the light combining device.
  • the output connector 504, the light 517 generated in the second direction of the tungsten lamp 508 passes through the long-wavelength filter 511, wherein the ultraviolet light and the visible light are filtered to obtain a near-infrared spectrum, and the portion of the light is twisted by different diameters and adjusted. After adjusting the appropriate light intensity by the distance D8 of the diameter of the optical fiber, the fiber enters the optical fiber through the fourth fiber input connector 513, and then enters the fiber output connector 504 of the light combining device.
  • the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501 and the 400 nm blue light portion spectrum obtained in the second direction of the xenon lamp 501 can be utilized by the principle of combining multiple spectra.
  • the ultraviolet light obtained by the first direction of the tungsten lamp 508, the attenuated visible light and the near-infrared light and the near-infrared light obtained by the second direction of the tungsten lamp 508 are superposed to obtain an overall smooth, wide band including ultraviolet light, visible low beam and infrared light. Moreover, the near-infrared light intensity almost doubles the broadband spectrum.
  • a relatively high signal-to-noise ratio can be obtained at near-infrared light.
  • the overall light source intensity including ultraviolet light, visible light, and near-infrared light
  • the visible light portion does not saturate such a spectrometer over a large dynamic range.
  • the method uses near-infrared light multi-coupling, visible light and ultraviolet light coupling less, that is, the optical fiber used in the second direction of the tungsten lamp 508 uses a larger core diameter fiber to balance the light intensity of each part to overcome the CCD or COMS A defect in which the near-infrared light portion is relatively weak due to low responsivity at the near-infrared light.
  • the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
  • the output light intensity of the tungsten lamp 508 can be adjusted by adjusting its driving current to change the second source current to change the ultraviolet spectrum and the visible spectrum of the second source.
  • the broad spectrum of infrared light intensity is almost doubled.
  • optical fiber output connectors of the xenon lamp and the tungsten lamp 508 may also be respectively provided with neutral light attenuating sheets for balancing the light intensity.
  • the use of near-infrared light multi-coupling (such as with a larger core fiber, etc.), visible light and ultraviolet light less coupling (such as with a smaller core fiber, etc.), that is, tungsten lamp 508
  • the fiber used in the two directions uses a fiber with a larger core diameter to balance the light intensity of each part. It is possible to overcome the drawback that the near-infrared light portion of the CCD or COMS at the near-infrared light is relatively weak and the near-infrared light portion is relatively weak.
  • the tungsten lamp 508 can be other light sources including ultraviolet light, visible light, and near-infrared light; such as xenon lamps and the like.

Abstract

A broad spectrum light source applicable to the field of light source technologies for materials analysis is provided. A broad spectrum light source is obtained by means of the concept of combined multi-spectral imaging. Specifically, a shortpass filter (502) filters out a visible spectrum comprising a peak spectral line from light (514) in a first direction of a deuterium lamp (501) to obtain blue light and an ultraviolet spectrum. Light (515) generated in a second direction of the deuterium lamp (501) passes through a 400 nm bandpass filter (505) to generate a 400 nm partial blue light spectrum. A neutral density filter (509) reduces visible light from light (516) in a first direction of a tungsten lamp (508). A longpass filter (511) filters blue light, an ultraviolet spectrum, and a visible spectrum from light (517) generated in a second direction of the tungsten lamp (508) to obtain a near-infrared spectrum. Light obtained after filtering in the first direction and the second direction of the deuterium lamp (501) and light obtained after filtering in the first direction and the second direction of the tungsten lamp (508) are combined by a light combining device, to obtain a smooth broad spectrum light source having a near-infrared light intensity of nearly double conventional light sources.

Description

发明名称:一种宽带光谱光源  Title of Invention: A Broadband Spectral Source
技术领域  Technical field
[0001] 本发明涉及一种用于材料分析的光源, 更具体的说是涉及一种用于材料光谱分 析与测量的具有宽带光谱设计特点的光源。  [0001] The present invention relates to a light source for material analysis, and more particularly to a light source having broadband spectral design features for spectral analysis and measurement of materials.
背景技术  Background technique
[0002] 目前, 市场上光谱分析常用的宽带光源是氘钨灯, 即或利用反射结构或利用透 射结构将氘灯和钨灯所发出的光组合到一起做光谱分析测量之用。 钨灯和氘灯 的光谱如图 1所示 (未做绝对光谱强度标定) , 101是钨灯光谱, 102是氘灯光谱 , 103是氘灯尖峰光谱 656. lnm。 图 1中光谱是以 CCD为探测器的光谱仪测量所得 。 其中钨灯光谱 101中的可见光峰值在 571nm至 637nm之间。 当用这类钨灯配合 此类光谱仪进行光谱测量吋, 如需要增加整体光源强度 (包括紫外光、 可见光 和近红外光) 以增加近红外光吋, 当可见光部分强到一定程度吋对此类光谱仪 会产生饱和; 此吋光谱仪的探测器便不能正常工作。  [0002] At present, the broadband source commonly used in spectroscopic analysis on the market is a tungsten-tungsten lamp, that is, a combination of a xenon lamp and a tungsten lamp by a reflective structure or a transmissive structure for spectral analysis measurement. The spectrum of the tungsten lamp and the xenon lamp is shown in Figure 1 (no absolute spectral intensity calibration), 101 is the tungsten lamp spectrum, 102 is the xenon lamp spectrum, and 103 is the xenon lamp peak spectrum 656. lnm. The spectrum in Figure 1 is measured by a spectrometer with a CCD detector. The visible light peak in the tungsten lamp spectrum 101 is between 571 nm and 637 nm. When using such tungsten lamps in conjunction with such spectrometers for spectral measurements, if it is necessary to increase the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) to increase the near-infrared pupil, when the visible light portion is strong to some extent, The spectrometer produces saturation; the detector of this spectrometer does not work properly.
[0003] 为简明起见, 仅以具有透射结构的氘钨灯作为一个例子说明, 如图 2所示。 其 设计是将¾钨灯 201发出的光用透镜 202聚焦并通过氘灯 203灯泡中的小孔光栏后 与氘灯发出的光合光得到宽带光谱 204 (如由荷兰 Avantes公司生产的一种氘钨灯 宽带光源 -AvaLight-DH-S等)。 由图 1中光谱便知, 此类氘钨灯存在两个固有的问 题: 一是氘灯光谱 (紫外光到可见光) 有部分尖峰光谱(如 656.1nm等)而容易使 光谱仪的探测器饱和; 当饱和吋光谱仪的探测器不能正常工作。 虽然, 有公司 采用二色分光镜滤掉大部分 656. lnm尖峰光谱以避免饱和问题 (如由荷兰 Avantes 公司生产的一种氘钨灯宽带光源 -AvaLight-DH-S-BAL等) , 但相对而言会增加 成本, 因为二色分光镜要由镀膜工艺制作而成。 二是因为 CCD或 CMOS光谱响应 度在近红外光谱段很低, 所以对于以 CCD或 CMOS作为探测器的光谱仪, 相应近 红外光谱段的信噪比小而不利于光谱分析测量。 虽然可以使用高功率钨灯以增 加近红外光强度, 但这会带来新的问题如加大功耗和产生更多热量等, 而且在 增加近红外光吋, 可见光部分也会增加, 当可见光部分强到一定程度吋对此类 光谱仪会产生饱和; 此吋光谱仪的探测器便不能正常工作。 [0003] For the sake of simplicity, only a tungsten-tungsten lamp having a transmissive structure is illustrated as an example, as shown in FIG. The design is to focus the light emitted by the tungsten lamp 201 with the lens 202 and pass through the aperture beam in the bulb of the xenon lamp 203 to form a broadband spectrum 204 with the light emitted by the xenon lamp (such as a 生产 produced by Avantes, the Netherlands). Tungsten light broadband source - AvaLight-DH-S, etc.). It is known from the spectrum in Fig. 1 that there are two inherent problems with such a tungsten-tungsten lamp: First, the xenon lamp spectrum (ultraviolet to visible) has a partial peak spectrum (such as 656.1 nm, etc.) which easily saturates the detector of the spectrometer; When the detector of the saturated helium spectrometer does not work properly. Although, some companies use a two-color spectroscope to filter out most of the 656. lnm spike spectrum to avoid saturation problems (such as a tungsten-tungsten broadband source produced by Avantes in the Netherlands - AvaLight-DH-S-BAL, etc.), but This will increase the cost because the dichroic mirror is made by the coating process. Second, because the spectral responsivity of CCD or CMOS is very low in the near-infrared spectrum, for the spectrometer with CCD or CMOS as the detector, the signal-to-noise ratio of the corresponding near-infrared spectral section is small and is not conducive to spectral analysis measurement. Although high-power tungsten lamps can be used to increase near-infrared light intensity, this can lead to new problems such as increased power consumption and more heat generation, and in the case of increasing near-infrared pupils, the visible portion will also increase when visible light Partially strong to a certain extent The spectrometer produces saturation; the detector of this spectrometer does not work properly.
[0004] 专利 201520834344.2提供一种具有宽带光谱的光源, 如图 3所示, 包括: 第一光 源 301、 短波通滤光片 302、 第一光纤输入接头 303, 第二光源 304、 可见衰减滤 光片 305、 第二光纤输入接头 306, 第三光源 307、 长波通滤光片 308, 第三光纤 输入接头 309, 第一光纤输出接头 310, 第四光纤输入接头 311以及第二光纤输出 接头 312, 其中三个光纤输入接头以及两个光纤输出接头构成合光装置, 其中第 一光源为紫外光和蓝光光源, 第二光源为包括紫外光、 可见光与近红外光的光 源。 该专利所产生的具有平缓宽带而且近红外光几乎加倍的宽带光谱, 如图 4所 示, 包括紫外光、 可见光和近红外光, 该专利能解决宽带光谱中氘灯光谱有如 6 56. lnm尖峰谱以及可见光相对紫外光、 近红外光强度过大而容易使以 CCD或 CM OS作为探测器的光谱仪的饱和问题, 同吋能够解决宽带光谱中近红外光信噪比 低的问题。 但该专利所产生的宽带光谱有氘灯光谱 400nm相对弱的问题; 此外 , 因为内装二个钨灯,所以有功耗大易产生多余的热量和体积大的不足。  [0004] Patent 201520834344.2 provides a light source having a broadband spectrum, as shown in FIG. 3, comprising: a first light source 301, a short pass filter 302, a first fiber input connector 303, a second light source 304, and a visible attenuation filter. a sheet 305, a second fiber input connector 306, a third light source 307, a long pass filter 308, a third fiber input connector 309, a first fiber output connector 310, a fourth fiber input connector 311, and a second fiber output connector 312, The three optical fiber input connectors and the two fiber output connectors constitute a light combining device, wherein the first light source is an ultraviolet light source and a blue light source, and the second light source is a light source including ultraviolet light, visible light and near infrared light. The wideband spectrum produced by the patent with a flat broadband and nearly doubled near-infrared light, as shown in Fig. 4, includes ultraviolet light, visible light and near-infrared light. The patent can solve the spectrum of the xenon lamp in the broadband spectrum as the peak of 6 56. lnm The spectral and visible light relative to ultraviolet light and near-infrared light intensity are too large to easily saturate the spectrometer with CCD or CM OS as a detector, and the problem of low signal-to-noise ratio of near-infrared light in the broadband spectrum can be solved. However, the broadband spectrum produced by this patent has a problem that the xenon lamp spectrum is relatively weak at 400 nm; in addition, because of the built-in two tungsten lamps, there is a large power consumption and it is easy to generate excess heat and a large volume.
[0005] 综上可知, 现有技术在实际使用上显然存在缺陷或不足, 所以有必要加以改进 技术问题  [0005] In summary, the prior art obviously has defects or deficiencies in actual use, so it is necessary to improve technical problems.
[0006] 针对上述的缺陷或不足, 本发明的目的在于提供一种具有宽带光谱的光源, 该 光源具有整体平缓、 宽带而且近红外光几乎加倍的宽带光谱, 包括紫外光、 可 见光和近红外光。 该光源能解决宽带光谱中氘灯光谱有如 656.1nm尖峰谱以及可 见光相对紫外光、 近红外光强度过大而容易使以 CCD或 CMOS作为探测器的光谱 仪的饱和问题、 能够解决宽带光谱中近红外光信噪比低的问题、 同吋也能够解 决宽带光谱有氘灯光谱 400nm相对弱的问题、 此外还能够解决因为内装二个钨灯 功耗大易产生多余的热量和体积大的不足。  [0006] In view of the above-mentioned drawbacks or deficiencies, it is an object of the present invention to provide a light source having a broadband spectrum having a broadband spectrum which is generally flat, wide-band and nearly doubled in near-infrared light, including ultraviolet light, visible light, and near-infrared light. . The light source can solve the saturation spectrum problem of the xenon lamp spectrum in the broadband spectrum as the 656.1 nm spike spectrum and the visible light relative to the ultraviolet light and the near-infrared light intensity, so that the spectrometer with the CCD or CMOS as the detector can easily solve the near-infrared in the broadband spectrum. The problem of low optical signal-to-noise ratio and the same problem can also solve the problem that the broadband spectrum has a relatively weak 400 nm spectrum of the xenon lamp, and it can also solve the problem of excessive heat and large volume due to the large power consumption of the built-in two tungsten lamps.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0007] 为了实现上述目的, 本发明提供一种宽带光谱光源, 包括:第一光源、 短波通 滤光片、 400nm带通滤光片、 第二光源、 可见衰减滤光片、 长波通滤光片以及合 光装置, 所述合光装置为包括四个光纤输入接头以及一个光纤输出接头的四合 一光纤, 所述第一光源为紫外光和蓝光光源, 所述第二光源为包括紫外光、 可 见光与近红外光的光源; In order to achieve the above object, the present invention provides a broadband spectral light source, comprising: a first light source, a short pass filter, a 400 nm band pass filter, a second light source, a visible attenuation filter, and a long pass filter. a film and a light combining device, the light combining device is a quadruple comprising four fiber input connectors and one fiber output connector An optical fiber, the first light source is an ultraviolet light and a blue light source, and the second light source is a light source including ultraviolet light, visible light and near infrared light;
[0008] 所述第一光源的第一方向产生的光经过所述短波通滤光片后得到蓝光与紫外光 谱, 所述蓝光与紫外光谱耦合进入所述合光装置的第一光纤输入接头;  [0008] the light generated in the first direction of the first light source passes through the short pass filter to obtain a blue light and ultraviolet spectrum, and the blue light and ultraviolet spectrum are coupled into the first optical fiber input connector of the light combining device;
[0009] 所述第一光源的第二方向产生的光经过所述 400nm带通滤光片后得到 400nm蓝 光部分光谱, 所述 400nm蓝光部分光谱通过第一可变光强器件或改变所述第一光 源与所述合光装置的光纤输出接头之间的光传输器件的耦合距离以调节光强后 输出;  [0009] The light generated in the second direction of the first light source passes through the 400 nm band pass filter to obtain a 400 nm blue portion spectrum, and the 400 nm blue portion spectrum passes through the first variable light intensity device or changes the first a coupling distance between a light source and an optical transmission device between the optical fiber output connectors of the light combining device to adjust the light intensity and output;
[0010] 所述第二光源的第一方向产生的光经过所述可见衰减滤光片后得到可见光部分 被衰减的光, 所述可见光部分被衰减的光耦合进入所述合光装置的第三光纤输 入接头;  [0010] the light generated in the first direction of the second light source passes through the visible attenuation filter to obtain light that is partially attenuated by the visible light, and the light that is partially attenuated by the visible light is coupled into the third portion of the light combining device. Fiber optic input connector;
[0011] 所述第二光源的第二方向产生的光经过所述长波通滤光片后得到近红外光谱, 所述近红外光谱通过第二可变光强器件或改变所述第二光源与所述合光装置的 光纤输出接头之间的光传输器件的耦合距离以调节光强后输出;  [0011] the light generated in the second direction of the second light source passes through the long pass filter to obtain a near-infrared spectrum, and the near-infrared spectrum passes through the second variable light intensity device or changes the second light source with a coupling distance of the optical transmission device between the optical fiber output connectors of the light combining device to adjust the light intensity and output;
[0012] 所述合光装置将由所述四个光纤输入接头进入的光进行合光后经所述光纤输出 接头输出包括紫外光、 可见光和近红外光的整体平缓的宽带光谱。  [0012] The light combining device combines light entering by the four fiber input connectors and outputs an overall flat broadband spectrum including ultraviolet light, visible light, and near-infrared light through the fiber output connector.
[0013] 根据本发明的光源, 所述合光装置包括分别具有两个输入接头以及一个输出接 头的第一二合一 Y型光纤、 第二二合一 Y型光纤以及第三二合一 Y型光纤; [0013] According to the light source of the present invention, the light combining device includes a first two-in-one Y-type optical fiber, a second two-in-one Y-type optical fiber, and a third two-in-one Y respectively having two input connectors and one output connector. Optical fiber
[0014] 所述第一二合一 Y型光纤的两个输入接头分别作为所述合光装置的第一光纤输 入接头和第二光纤输入接头; [0014] two input connectors of the first two-in-one Y-type optical fiber respectively serve as a first optical fiber input connector and a second optical fiber input connector of the light combining device;
[0015] 所述第二二合一 Y型光纤的两个输入接头分别作为所述合光装置的第三光纤输 入接头和第四光纤输入接头; [0015] two input connectors of the second two-in-one Y-type optical fiber respectively serve as a third optical fiber input connector and a fourth optical fiber input connector of the light combining device;
[0016] 所述第三二合一 Y型光纤的两个输入接头分别与所述第一二合一 Y型光纤、 第 二二合一 Y型光纤的输出接头连接, 所述第三二合一 Y型光纤的输出接头为所述 合光装置的光纤输出接头。 [0016] The two input connectors of the third two-in-one Y-type optical fiber are respectively connected to the output connectors of the first two-in-one Y-type optical fiber and the second two-in-one Y-type optical fiber, and the third two-in-one An output connector of a Y-type fiber is an optical fiber output connector of the light combining device.
[0017] 根据本发明的光源, 所述第一光源的第一可变光强的器件为电机驱动可变光栏 [0017] According to the light source of the present invention, the first variable light intensity device of the first light source is a motor driven variable diaphragm
、 电机驱动轮式渐变中性滤光片或电机驱动楔型板对; , motor driven wheeled gradient neutral filter or motor driven wedge plate pair;
[0018] 所述第二光源的第二可变光强的器件为电机驱动可变光栏、 电机驱动轮式渐变 中性滤光片或电机驱动楔型板对。 [0018] the second variable light intensity device of the second light source is a motor driven variable light bar, and the motor drives a wheeled gradient Neutral filter or motor driven wedge plate pair.
[0019] 根据本发明的光源, 所述第一光源的第二方向产生的光经改变所述第二光纤输 入接头与所述第一光源的距离而调整其光强; 所述第二光源的第二方向产生的 光经改变所述第四光纤输入接口与所述第二光源的距离而调整其光强。  [0019] According to the light source of the present invention, the light generated in the second direction of the first light source adjusts the light intensity thereof by changing the distance between the second fiber input joint and the first light source; The light generated in the second direction adjusts its light intensity by changing the distance between the fourth fiber input interface and the second light source.
[0020] 根据本发明的光源, 所述第二光纤输入接头以及所述第四光纤输入接头的光纤 中分别设置有光纤藕合结构; [0020] According to the light source of the present invention, the second optical fiber input connector and the optical fiber of the fourth fiber input connector are respectively provided with an optical fiber twisting structure;
[0021] 第一光源的第二方向产生的光通过调节所述第二光纤输入接头的光纤中光纤藕 合结构的距离而调整其强度, 第二光源的第二方向产生的光通过调节所述第四 光纤输入接头的光纤中光纤藕合结构的距离而调整其强度。 [0021] the light generated in the second direction of the first light source is adjusted in intensity by adjusting a distance of the fiber conjugate structure in the fiber of the second fiber input connector, and the light generated in the second direction of the second light source is adjusted by adjusting The strength of the fiber-coupling structure in the fiber of the fourth fiber input connector is adjusted.
[0022] 根据本发明的光源, 所述第一光源的第二方向产生的光经变化所述第二光纤输 入接头中的准直器透镜与光纤的距离而调整其强度; [0022] According to the light source of the present invention, the light generated in the second direction of the first light source is adjusted in intensity by varying the distance between the collimator lens and the optical fiber in the second fiber input joint;
[0023] 所述第二光源的第二方向产生的光经变化第四光纤输入接头中的准直器透镜与 光纤的距离而调整其强度。 [0023] The light generated in the second direction of the second light source is adjusted in intensity by varying the distance of the collimator lens in the fourth fiber input connector from the fiber.
[0024] 根据本发明的光源, 所述第二光纤输入接头中通过设置不同芯径的光纤以变化 所述第一光源的第二方向产生的光的光强; 所述第四光纤输入接头通过设置不 同芯径的光纤以变化所述第二光源的第二方向产生的光的光强。 [0024] According to the light source of the present invention, the second optical fiber input connector passes the optical fibers of different core diameters to change the light intensity of the light generated in the second direction of the first light source; the fourth optical fiber input connector passes Optical fibers of different core diameters are provided to vary the intensity of light generated by the second direction of the second source.
[0025] 根据本发明的光源, 采用近红外光多耦合、 可见光及紫外光光少耦合的方法, 即所述第二光源的第二方向所用的光纤采用较大芯径的光纤以平衡各部分的光 强。 [0025] According to the light source of the present invention, a method of coupling near-infrared light multi-coupling, visible light and ultraviolet light is used, that is, the fiber used in the second direction of the second light source uses a fiber with a larger core diameter to balance each part. The light is strong.
[0026] 根据本发明的光源, 所述合光装置为分叉或分劈式; 且所述光与光纤接头的输 入或输出耦合为直接耦合或用透镜耦合。  In accordance with the light source of the present invention, the light combining means is bifurcated or branched; and the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0027] 根据本发明的光源, 所述第二光源的输出光强通过调节其驱动电流进行调节以 改变第二光源电流而改变第二光源的第一方向上得到的紫外光光谱、 可见光光 谱与近红外光光谱以及第二光源的第二方向得到的近红外光谱的强度。 [0027] According to the light source of the present invention, the output light intensity of the second light source is adjusted by adjusting its driving current to change the second light source current to change the ultraviolet light spectrum and the visible light spectrum obtained in the first direction of the second light source. The near-infrared spectrum and the intensity of the near-infrared spectrum obtained in the second direction of the second source.
[0028] 根据本发明的光源, 所述四个光纤输入接头还设置有用于调节平衡光强的中性 光衰减片。 [0028] According to the light source of the present invention, the four fiber input connectors are further provided with a neutral light attenuating sheet for adjusting the balance light intensity.
[0029] 根据本发明的光源, 所述第一光源为氘灯、 氢灯或氙灯, 所述第二光源为钨灯 或氙灯。 [0030] 本发明要解决的技术问题之一是针对宽带光谱光源中氘灯光谱中 400nm相对弱 的问题, 而提出的将所述第一光源的第二方向上除 400nm部分的蓝光与紫外光谱 滤掉得到 400nm蓝光部分光谱; 所述 400nm蓝光部分光谱耦合进入所述合光装置 的第二个光纤输入接头与第一光源的第一方向上产生的光叠加, 以解决氘灯光 谱 400nm相对弱的问题。 [0029] According to the light source of the present invention, the first light source is a xenon lamp, a hydrogen lamp or a xenon lamp, and the second light source is a tungsten lamp or a xenon lamp. [0030] One of the technical problems to be solved by the present invention is to solve the problem that the 400 nm is relatively weak in the spectrum of the xenon lamp in the broadband spectrum light source, and the blue light and ultraviolet spectrum in the second direction except the 400 nm portion of the first light source are proposed. Filtering off a 400 nm blue light partial spectrum; the 400 nm blue light portion is spectrally coupled into the second optical fiber input of the light combining device and superimposed with the light generated in the first direction of the first light source to solve the xenon lamp spectrum is relatively weak The problem.
[0031] 本发明要解决的技术问题之二是专利 201520834344.2内装二个钨灯功耗大易产 生多余的热量和体积大的不足, 而提出的将所述第二光源的第一方向上产生的 光经过所述可见衰减滤光片后得到可见光部分被衰减的光与所述第二光源的第 二方向上产生的光经过所述长波通滤光片后得到近红外光谱叠加, 以减少一个 钨灯, 以解决功耗大易产生多余的热量和体积大的不足。  [0031] The second technical problem to be solved by the present invention is that the two tungsten lamps installed in the patent 201520834344.2 have large power consumption and are easy to generate excess heat and large volume shortage, and the proposed first direction of the second light source is generated. After passing through the visible attenuation filter, light having a visible light portion is attenuated and light generated in a second direction of the second light source is superimposed on the long-wavelength filter to obtain a near-infrared spectrum to reduce a tungsten The lamp, to solve the large power consumption, easily generates excess heat and a large volume shortage.
发明的有益效果  Advantageous effects of the invention
有益效果  Beneficial effect
[0032] 本发明的整体技术效果体现在以下方面。  [0032] The overall technical effects of the present invention are embodied in the following aspects.
[0033] (一) 在本发明中, 本发明要解决的技术问题之一是针对氘灯光谱 400nm相对 弱的问题而提出的叠加氘灯第二方向上得到的 400nm蓝光部分光谱的设计方案。  [0033] (I) In the present invention, one of the technical problems to be solved by the present invention is a design scheme of a 400 nm blue light partial spectrum obtained in the second direction of the superimposed xenon lamp proposed for the problem that the xenon lamp spectrum is relatively weak at 400 nm.
[0034] (二) 在本发明中, 本发明要解决的技术问题之一是针对已有专利 2015208343 44.2的功耗大、 易产生多余的热量和体积大问题而提出的利用组合多光谱, 包括 将氘灯第一方向上得到的蓝光与紫外光谱、 氘灯第二方向上得到的 400nm部分的 光谱、 钨灯第一方向上得到的紫外光光谱、 衰减的可见光光谱与近红外光光谱 以及钨灯第二方向上得到的近红外光谱通过合光装置合并,即可得整体平缓、 宽 带而且近红外光强度几乎加倍的宽带光谱的设计方案。  [0034] (B) In the present invention, one of the technical problems to be solved by the present invention is to utilize the combined multi-spectrum, including the power consumption of the existing patent 2015208343 44.2, which is easy to generate excess heat and volume. The blue light and ultraviolet spectrum obtained in the first direction of the xenon lamp, the spectrum of the 400 nm portion obtained in the second direction of the xenon lamp, the ultraviolet light spectrum obtained in the first direction of the tungsten lamp, the attenuated visible light spectrum and the near-infrared light spectrum, and tungsten The near-infrared spectrum obtained in the second direction of the lamp is combined by a light combining device to obtain a broadband spectrum design in which the overall smoothness, wideband, and near-infrared light intensity are almost doubled.
对附图的简要说明  Brief description of the drawing
附图说明  DRAWINGS
[0035] 图 1是常用钨灯和氘灯光谱; [0035] FIG. 1 is a spectrum of a common tungsten lamp and a xenon lamp;
[0036] 图 2是现有技术中常用的氘钨灯光源一种原理图; 2 is a schematic diagram of a common tungsten light source used in the prior art;
[0037] 图 3是专利 201520834344.2的原理结构示意图; 3 is a schematic structural diagram of a patent 201520834344.2;
[0038] 图 4是专利 201520834344.2的宽带光谱; 4 is a broadband spectrum of the patent 201520834344.2;
[0039] 图 5是本发明第一实施例的原理结构示意图; [0040] 图 6是本发明的第二实施例的原理结构示意图; 5 is a schematic structural diagram of a first embodiment of the present invention; 6 is a schematic structural diagram of a second embodiment of the present invention;
[0041] 图 7是本发明的第三实施例的原理结构示意图;  7 is a schematic structural diagram of a third embodiment of the present invention;
[0042] 图 8是本发明的第四实施例的原理结构示意图;  8 is a schematic structural diagram of a fourth embodiment of the present invention;
[0043] 图 9是本发明的第五实施例的原理结构示意图;  9 is a schematic structural diagram of a fifth embodiment of the present invention;
[0044] 图 10是本发明的第六实施例的原理结构示意图;  10 is a schematic structural diagram of a sixth embodiment of the present invention;
[0045] 图 11是本发明的第七实施例的原理结构示意图。  11 is a schematic structural diagram of a seventh embodiment of the present invention.
实施该发明的最佳实施例  BEST MODE FOR CARRYING OUT THE INVENTION
本发明的最佳实施方式  BEST MODE FOR CARRYING OUT THE INVENTION
[0046] 为了使本发明的目的、 技术方案及优点更加清楚明白, 以下结合附图及实施例 , 对本发明进行进一步详细说明。 应当理解, 此处所描述的具体实施例仅仅用 以解释本发明, 并不用于限定本发明。 The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
[0047] 本发明的基本原理是: 利用组合多光谱而获得宽带光谱的光源, 包括: 第一光 源、 短波通滤光片、 400nm带通滤光片、 第二光源、 可见衰减滤光片、 长波通滤 光片以及合光装置; 合光装置包括四个光纤输入接头以及一个光纤输出接头。 其中第一光源为紫外光和蓝光光源, 第二光源为包括紫外光、 可见光与近红外 光的光源。  [0047] The basic principle of the present invention is: a light source that obtains a broadband spectrum by combining multiple spectra, including: a first light source, a short pass filter, a 400 nm band pass filter, a second light source, a visible attenuation filter, Long pass filter and light combining device; the light combining device includes four fiber input connectors and one fiber output connector. The first light source is an ultraviolet light source and a blue light source, and the second light source is a light source including ultraviolet light, visible light and near infrared light.
[0048] 第一光源的第一方向产生的光经过短波通滤光片后得到蓝光与紫外光谱, 蓝光 与紫外光谱耦合进入合光装置的第一光纤输入接头;  [0048] The light generated in the first direction of the first light source passes through the short pass filter to obtain a blue light and ultraviolet spectrum, and the blue light and the ultraviolet spectrum are coupled into the first optical fiber input joint of the light combining device;
[0049] 第一光源的第二方向产生的光经过 400nm带通滤光片后得到 400nm蓝光部分光 谱, 400nm蓝光部分光谱耦合进入合光装置的第二个光纤输入接头; 400nm蓝光 部分光谱通过第一可变光强器件或改变第一光源与合光装置的光纤输出接头之 间的光传输器件的耦合距离以调节光强后输出; 从而调整匹配第一光源的第二 方向上得到的 400nm部分的光谱与第一光源的第一方向上得到的蓝光与紫外光谱 的相对光谱强度以获得平缓蓝光与紫外光谱。  [0049] The light generated in the second direction of the first light source passes through the 400 nm band pass filter to obtain a 400 nm blue portion spectrum, and the 400 nm blue portion is spectrally coupled into the second fiber input connector of the light combining device; the 400 nm blue portion spectrum passes through a variable light intensity device or a coupling distance of the optical transmission device between the first light source and the optical fiber output connector of the light combining device to adjust the light intensity and output; thereby adjusting the 400 nm portion obtained in the second direction matching the first light source The relative spectral intensity of the blue and ultraviolet spectra obtained in the first direction of the first source is obtained to obtain a smooth blue and ultraviolet spectrum.
[0050] 第二光源的第一方向产生的光经过可见衰减滤光片后得到可见光部分被衰减的 光, 第二光源的第一方向产生的紫外光、 被衰减的可见光与近红外光耦合进入 合光装置的第三光纤输入接头;  [0050] the light generated in the first direction of the second light source passes through the visible attenuation filter to obtain the light partially attenuated by the visible light, and the ultraviolet light generated by the first direction of the second light source, the attenuated visible light and the near-infrared light are coupled into the light. a third fiber optic input connector of the light combining device;
[0051] 第二光源的第二方向产生的光经过长波通滤光片后得到近红外光谱, 近红外光 谱耦合进入合光装置的第四个光纤输入接头; 近红外光谱通过第二可变光强器 件或改变第二光源与合光装置的光纤输出接头之间的光传输器件的耦合距离以 调节光强后输出, 从而调整匹配钨灯第二方向上得到的近红外光谱与钨灯第一 方向上得到的紫外光光谱、 可见光光谱与近红外光光谱的相对强度。 [0051] The light generated in the second direction of the second light source passes through the long pass filter to obtain a near-infrared spectrum, near-infrared light The spectral coupling is coupled to the fourth fiber optic input connector of the light combining device; the near infrared spectroscopy adjusts the light by the second variable light intensity device or by changing the coupling distance of the optical transmission device between the second light source and the fiber output connector of the light combining device The output is strong, thereby adjusting the relative intensity of the near-infrared spectrum obtained in the second direction of the tungsten lamp and the ultraviolet spectrum, the visible spectrum and the near-infrared spectrum obtained in the first direction of the tungsten lamp.
[0052] 另外, 可通过调节可调电阻改变第二光源电流而改变第二光源第一方向上得到 的紫外光光谱、 可见光光谱与近红外光光谱以及钨灯的第二方向得到的近红外 光谱的强度; 以便使这两段光谱强度与从第一光源获得的平缓蓝光与紫外光谱 强度相匹配而得到整体平缓、 宽带而且近红外光强度几乎加倍的宽带光谱。  [0052] In addition, the ultraviolet light spectrum, the visible light spectrum and the near-infrared light spectrum obtained in the first direction of the second light source, and the near-infrared spectrum obtained by the second direction of the tungsten lamp can be changed by adjusting the adjustable electric resistance to change the second light source current. The intensity of the two segments is such that the intensity of the two segments is matched to the intensity of the gradual blue light and the ultraviolet spectrum obtained from the first source to obtain a broad spectrum of the overall smooth, broadband and near-infrared light intensity almost doubled.
[0053] 本发明通过叠加第一光源的第二方向上得到的 400nm蓝光部分光谱解决 400nm 蓝光部分光谱相对弱的问题。 本发明通过叠加第二光源的第二方向上得到的近 红外光谱, 以解决现有技术中作为第二光源的氘灯光谱中 656.1nm尖峰谱以及可 见光相对紫外光、 近红外光强度过大而容易使以 CCD或 CMOS作为探测器的光谱 仪的饱和问题, 能够解决宽带光谱中近红外光信噪比低的问题, 另外由于仅设 置一个第二光源, 可以避免功耗大、 易产生多余的热量和体积大问题。  [0053] The present invention solves the problem that the spectrum of the 400 nm blue light portion is relatively weak by superimposing the 400 nm blue light partial spectrum obtained in the second direction of the first light source. The present invention solves the 656.1 nm spike spectrum and the visible light relative to the ultraviolet light and the near-infrared light intensity in the xenon lamp spectrum of the prior art as the second light source by superimposing the near-infrared spectrum obtained in the second direction of the second light source. It is easy to solve the problem of saturation of spectrometer with CCD or CMOS as detector, which can solve the problem of low signal-to-noise ratio of near-infrared light in broadband spectrum. In addition, since only one second light source is provided, it can avoid large power consumption and easily generate excess heat. And big problems.
[0054] 用该宽带光谱配合以 CCD或 CMOS作为探测器的光谱仪进行光谱测量吋, 在近 红外光处可以获得比较高的信噪比; 此外当增加整体光源强度包括紫外光、 可 见光和近红外光的强度吋, 在很大的动态范围内可见光部分不会对此类光谱仪 饱和。 采用本发明设计的宽带光源经济实用, 可广泛用于材料分析与测量, 方 便实用。  [0054] Using the broadband spectrum to perform spectral measurement with a spectrometer using CCD or CMOS as a detector, a relatively high signal-to-noise ratio can be obtained at near-infrared light; and when the overall light source intensity is increased, including ultraviolet light, visible light, and near-infrared light The intensity of the light is 吋, and the visible light portion does not saturate such a spectrometer over a large dynamic range. The broadband light source designed by the invention is economical and practical, and can be widely used for material analysis and measurement, and is convenient and practical.
[0055] 由于在实际应用中, 常常采用氘灯作为紫外光和蓝光光源使用, 将钨灯作为包 括紫外光、 可见光与近红外光的光源和近红外光光源使用。 因此, 在以下实施 例中, 本发明采用氘灯作为第一光源、 钨灯作为第二光源。 实际上第一光源还 可采用其他紫外光和蓝光光源, 例如氙灯等; 第二光源还可采用其他包括紫外 光、 可见光及近红外光的光源, 例如氙灯等。 以下实施例中的氘灯、 钨灯并不 作为限制本发明之用。  [0055] Since xenon lamps are often used as ultraviolet light and blue light sources in practical applications, tungsten lamps are used as light sources including ultraviolet light, visible light and near-infrared light, and near-infrared light sources. Therefore, in the following embodiments, the present invention employs a xenon lamp as a first light source and a tungsten lamp as a second light source. In fact, the first light source may also use other ultraviolet light and blue light sources, such as xenon lamps, etc.; the second light source may also use other light sources including ultraviolet light, visible light, and near-infrared light, such as xenon lamps. The xenon lamp and the tungsten lamp in the following embodiments are not intended to limit the invention.
[0056] 实施例一  [0056] Embodiment 1
[0057] 如图 5所示,本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光装 置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 50 5, 氘灯可变光强的器件 506, 合光装置的第二光纤输入接头 507, 钨灯 508, 可 见衰减滤光片 509, 合光装置的第三光纤输入接头 510, 长波通滤光片 511, 钨灯 508可变光强的器件 512, 合光装置的第四光纤输入接头 513, 氘灯 501第一方向 产生的光 514, 氘灯 501第二方向产生的光 515, 钨灯 508第一方向产生的光 516, 钨灯 508第二方向产生的光 517。 [0057] As shown in FIG. 5, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. Pass filter 50 5, xenon lamp variable light intensity device 506, second optical fiber input connector 507 of the light combining device, tungsten lamp 508, visible attenuation filter 509, third optical fiber input connector 510 of the light combining device, long wave pass filter 511, tungsten lamp 508 variable light intensity device 512, fourth optical fiber input connector 513 of the light combining device, light 514 generated in the first direction of the xenon lamp 501, light 515 generated in the second direction of the xenon lamp 501, tungsten lamp 508 Light 516 is generated in one direction, and light 517 is generated in the second direction of tungsten lamp 508.
第一个光纤输入接头 503、 第二个光纤输入接头 507、 第三光纤输入接头 509和第 四光纤输入接头 513构成合光装置, 合光装置可以是分叉或分劈式。 氘灯 501第 一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱的可见光被 滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514, 该光经第 一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 5 01第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光部分光谱, 该部分光经氘灯 501可变光强的器件 -电机驱动可变光栏 506调节合适的光强后, 经第二光纤输入接头 507进入光纤, 再进入合光装置的光纤输出接头 504; 钨灯 5 08第一方向产生的光 516经过可见衰减滤光片 509后, 其可见光部分被衰减以平 衡其与该钨灯 508发出的紫外光和近红外光的相对强度; 当增加整体光源强度包 括紫外光、 可见光和近红外光的强度吋, 该可见光部分不会对以 CCD或 CMOS作 为探测器的光谱仪饱和; 该衰减的可见光与紫外光和近红外光经第三光纤输入 接头 510耦合进入光纤, 再进入合光装置的光纤输出接头 504, 钨灯 508第二方向 产生的光 517经过长波通滤光片 511后, 其中紫外光和可见光被滤掉而得近红外 光谱, 该部分光经钨灯 508可变光强的器件 -电机驱动可变光栏 512调节合适的光 强后, 经第四光纤输入接头 513进入光纤, 再进入合光装置的光纤输出接头 504 。 如此, 在合光装置的光纤输出接头 504处便可以将氘灯 501第一方向得到的紫 外光和蓝光光谱、 氘灯 501第二方向上得到的 400nm蓝光部分光谱、 钨灯 508第一 方向得到的紫外光、 衰减的可见光和近红外光和钨灯 508第二方向得到的近红外 光光谱叠加, 以获得包括紫外光、 可见近光和红外光的整体平缓、 宽带而且近 红外光强度几乎加倍的宽带光谱。 用该宽带光谱配合以 CCD或 CMOS作为探测器 的光谱仪进行光谱测量吋, 在近红外光处可以获得比较高的信噪比。 此外, 当 增加整体光源强度 (包括紫外光、 可见光和近红外光) 吋, 在很大的动态范围 内可见光部分不会对此类光谱仪饱和。 The first fiber input connector 503, the second fiber input connector 507, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched. After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the light 514 generated in the first direction of the xenon lamp 501. The light is coupled into the optical fiber through the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device. The light 515 generated in the second direction of the xenon lamp 5 01 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion spectrum. The portion of the light passing through the variable light intensity device of the xenon lamp 501-motor-driven variable diaphragm 506 adjusts the appropriate light intensity, enters the optical fiber through the second fiber input connector 507, and enters the fiber output connector 504 of the light combining device; After the light 516 generated in the first direction of the lamp 5 08 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; The intensity of ultraviolet, visible, and near-infrared light, the visible portion is not saturated with a spectrometer that uses CCD or CMOS as a detector; the attenuated visible and ultraviolet and near-infrared light passes through The fiber input connector 510 is coupled into the fiber, and then enters the fiber output connector 504 of the light combining device. After the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511, the ultraviolet light and the visible light are filtered to obtain the near infrared. Spectral, the portion of the light is passed through the tungsten lamp 508 variable light intensity device-motor driven variable diaphragm 512 to adjust the appropriate light intensity, then enters the optical fiber through the fourth fiber input connector 513, and then enters the optical fiber output connector 504 of the light combining device. . Thus, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained. The ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum. By using the broadband spectrum with a spectrometer using CCD or CMOS as a detector for spectral measurement, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when increasing the overall light source intensity (including ultraviolet light, visible light and near-infrared light), in a large dynamic range The inner visible portion is not saturated with such spectrometers.
[0058] 优选的是, 合光装置可由包括分别具有两个输入接头以及一个输出接头的第一 二合一 Y型光纤、 第二二合一 Y型光纤以及第三二合一 Y型光纤组成。 第一二合 一 Y型光纤的两个输入接头分别作为合光装置的第一光纤输入接头 503和第二光 纤输入接头 507; 第二二合一 Y型光纤的两个输入接头分别作为合光装置的第三 光纤输入接头 510和第四光纤输入接头 513; 第三二合一 Y型光纤的两个输入接头 分别与第一二合一 γ型光纤、 第二二合一 Y型光纤的输出接头连接, 第三二合一 Y型光纤的输出接头为合光装置的光纤输出接头 504。  [0058] Preferably, the light combining device may be composed of a first two-in-one Y-type fiber, a second two-in-one Y-type fiber, and a third two-in-one Y-type fiber respectively having two input connectors and one output connector. . The two input connectors of the first two-in-one Y-type optical fiber respectively serve as the first optical fiber input connector 503 and the second optical fiber input connector 507 of the light combining device; the two input connectors of the second two-in-one Y-type optical fiber respectively serve as the light combining The third fiber input connector 510 and the fourth fiber input connector 513 of the device; the two input connectors of the third two-in-one Y-type fiber are respectively outputted from the first two-in-one γ-type fiber and the second two-in-one Y-type fiber The connector is connected, and the output connector of the third 2-in-1 Y-type fiber is the fiber output connector 504 of the light combining device.
[0059] 氘灯 501的第一方向产生的光经过短波通滤光片 502后耦合进入第一二合一 Y型 光纤的其中一个输入接头, 氘灯 501第二方向产生的光经过 400nm带通滤光片 505 后耦合进入第一二合一 Y型光纤的另一个输入接头; 钨灯 508的第一方向产生的 光经过可见衰减滤光片 509后耦合进入第二二合一 Y型光纤的其中一个输入接头 , 钨灯 508第二方向产生的光经过长波通滤光片 511后耦合进入第二二合一 Y型光 纤的另一个输入接头; 第一二合一 Y型光纤的输出接头连接第三二合一 Y型光纤 的其中一个输入接头, 第二二合一 Y型光纤的输出接头连接第三二合一 Y型光纤 的另一个输入接头, 在第三二合一 Y型光纤的输出接头输出包括紫外光、 可见光 和近红外光的整体平缓、 宽带而且近红外光强度几乎加倍的宽带光谱。  [0059] The light generated in the first direction of the xenon lamp 501 passes through the short pass filter 502 and is coupled into one of the input connectors of the first two-in-one Y-type fiber, and the light generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass. The filter 505 is post-coupled into the other input connector of the first 2-in-1 Y-type fiber; the light generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509 and is coupled into the second 2-in-1 Y-type fiber. One of the input connectors, the light generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511 and is coupled into the other input connector of the second two-in-one Y-type fiber; the output connector of the first two-in-one Y-type fiber is connected. One of the input connectors of the third two-in-one Y-type fiber, the output connector of the second two-in-one Y-type fiber is connected to the other input connector of the third two-in-one Y-type fiber, in the third two-in-one Y-type fiber The output connector output includes a broad, broad spectrum of ultraviolet, visible, and near-infrared light, broadband and near-infrared light intensity that is nearly doubled.
[0060] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。  [0060] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0061] 实施例二  Embodiment 2
[0062] 如图 6所示, 本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光 装置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 505, 氘灯可变光强的器件-电机驱动轮式渐变中性滤光片 601, 合光装置的第二 光纤输入接头 507, 钨灯 508, 可见衰减滤光片 509, 合光装置的第三光纤输入接 头 510, 长波通滤光片 511, 钨灯 508可变光强的器件-电机驱动轮式渐变中性滤光 片 602, 合光装置的第四光纤输入接头 513, 氘灯 501第一方向产生的光 514, 氘 灯 501第二方向产生的光 515, 钨灯 508第一方向产生的光 516, 钨灯 508第二方向 产生的光 517。 第一光纤输入接头 503、 合光装置的第二光纤输入接头 507、 第三 光纤输入接头 509和第四光纤输入接头 513构成合光装置, 合光装置可以是分叉 或分劈式。 As shown in FIG. 6, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first optical fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. Pass filter 505, xenon lamp variable light intensity device - motor drive wheel type gradient neutral filter 601, second optical fiber input connector 507 of light combining device, tungsten lamp 508, visible attenuation filter 509, a third optical fiber input connector 510 of the optical device, a long pass filter 511, a tungsten light 508 variable light intensity device-motor driven wheeled gradient neutral filter 602, a fourth optical fiber input connector 513 of the light combining device, The light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the light 517 generated in the second direction of the tungsten lamp 508. The first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be a bifurcation Or split style.
[0063] 氘灯 501第一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱 的可见光被滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514 , 该光经第一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 501第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光 部分光谱, 该部分光经氘灯可变光强的器件-电机驱动轮式渐变中性滤光片 601调 节合适的光强后, 经第二光纤输入接头 507进入光纤, 再进入合光装置的光纤输 出接头 504, 钨灯 508第一方向产生的光 516经过可见衰减滤光片 509后, 其可见 光部分被衰减以平衡其与该钨灯 508发出的紫外光和近红外光的相对强度; 当增 加整体光源强度包括紫外光、 可见光和近红外光的强度吋, 该可见光部分不会 对以 CCD或 CMOS作为探测器的光谱仪饱和; 该衰减的可见光与紫外光和近红外 光经第三光纤输入接头 510耦合进入光纤, 再进入合光装置的光纤输出接头 504 , 钨灯 508第二方向产生的光 517经过长波通滤光片 511后, 其中紫外光和可见光 被滤掉而得近红外光谱, 该部分光经钨灯 508可变光强的器件 -电机驱动轮式渐变 中性滤光片 602调节合适的光强后, 经第四光纤输入接头 513进入光纤, 再进入 合光装置的光纤输出接头 504。 如此, 在合光装置的光纤输出接头 504处便可以 将氘灯 501第一方向得到的紫外光和蓝光光谱、 氘灯 501第二方向上得到的 400nm 蓝光部分光谱、 钨灯 508第一方向得到的紫外光、 衰减的可见光和近红外光和钨 灯 508第二方向得到的近红外光光谱叠加, 以获得包括紫外光、 可见近光和红外 光的整体平缓、 宽带而且近红外光强度几乎加倍的宽带光谱。 用该宽带光谱配 合以 CCD或 CMOS作为探测器的光谱仪进行光谱测量吋, 在近红外光处可以获得 比较高的信噪比。 此外, 当增加整体光源强度 (包括紫外光、 可见光和近红外 光) 吋, 在很大的动态范围内可见光部分不会对此类光谱仪饱和。  [0063] After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501. The light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device. The light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion. Spectral, the part of the light is adjusted by the device of the variable light intensity of the xenon lamp-motor-driven wheeled gradient neutral filter 601, and then enters the fiber through the second fiber input connector 507, and then enters the fiber of the light combining device. Output connector 504, after the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; The overall light source intensity includes the intensity of ultraviolet light, visible light, and near-infrared light, which is not saturated with a spectrometer that uses CCD or CMOS as a detector; The reduced visible light and ultraviolet light and near-infrared light are coupled into the optical fiber through the third optical fiber input connector 510, and then enter the optical fiber output connector 504 of the light combining device, and the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511. , wherein the ultraviolet light and the visible light are filtered to obtain a near-infrared spectrum, and the portion of the light is adjusted by the tungsten light 508 variable light intensity device-motor driven wheeled gradient neutral filter 602 to adjust the appropriate light intensity, after the fourth The fiber optic input connector 513 enters the fiber and enters the fiber optic output connector 504 of the light combining device. Thus, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained. The ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum. By using this broadband spectrum to perform spectrometry with a spectrometer using CCD or CMOS as a detector, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) is increased, the visible light portion does not saturate such a spectrometer over a large dynamic range.
[0064] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。  [0064] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0065] 实施例三  Embodiment 3
[0066] 如图 7所示, 本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光 装置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 505, 氘灯可变光强的器件 -电机驱动楔型板对 701, 合光装置的第二光纤输入接 头 507, 钨灯 508, 可见衰减滤光片 509, 合光装置的第三光纤输入接头 510, 长 波通滤光片 511, 钨灯 508可变光强的器件 -电机驱动楔型板对 702, 合光装置的第 四光纤输入接头 513, 氘灯 501第一方向产生的光 514, 氘灯 501第二方向产生的 光 515, 钨灯 508第一方向产生的光 516, 钨灯 508第二方向产生的光 517。 第一光 纤输入接头 503、 合光装置的第二光纤输入接头 507、 第三光纤输入接头 509和第 四光纤输入接头 513构成合光装置, 合光装置可以是分叉或分劈式。 As shown in FIG. 7, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. Pass filter 505, xenon lamp variable light intensity device - motor drive wedge plate pair 701, second optical input of the light combining device Head 507, tungsten lamp 508, visible attenuation filter 509, third fiber input connector 510 of the light combining device, long pass filter 511, tungsten lamp 508 variable light intensity device - motor driven wedge plate pair 702, The fourth fiber input connector 513 of the light combining device, the light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the second direction of the tungsten lamp 508 The generated light 517. The first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
氘灯 501第一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱 的可见光被滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514 , 该光经第一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 501第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光 部分光谱, 该部分光经氘灯可变光强的器件 -电机驱动楔型板对 701调节合适的光 强后, 经第二光纤输入接头 507进入光纤, 再进入合光装置的光纤输出接头 504 , 钨灯 508第一方向产生的光 516经过可见衰减滤光片 509后, 其可见光部分被衰 减以平衡其与该钨灯 508发出的紫外光和近红外光的相对强度; 当增加整体光源 强度包括紫外光、 可见光和近红外光的强度吋, 该可见光部分不会对以 CCD或 C MOS作为探测器的光谱仪饱和; 该衰减的可见光与紫外光和近红外光经第三光 纤输入接头 510耦合进入光纤, 再进入合光装置的光纤输出接头 504, 钨灯 508第 二方向产生的光 517经过长波通滤光片 511后, 其中紫外光和可见光被滤掉而得 近红外光谱, 该部分光经钨灯 508可变光强的器件 -电机驱动楔型板对 702调节合 适的光强后, 经第四光纤输入接头 513进入光纤, 再进入合光装置的光纤输出接 头 504。 如此, 在合光装置的光纤输出接头 504处便可以将氘灯 501第一方向得到 的紫外光和蓝光光谱、 氘灯 501第二方向上得到的 400nm蓝光部分光谱、 钨灯 508 第一方向得到的紫外光、 衰减的可见光和近红外光和钨灯 508第二方向得到的近 红外光光谱叠加, 以获得包括紫外光、 可见近光和红外光的整体平缓、 宽带而 且近红外光强度几乎加倍的宽带光谱。 用该宽带光谱配合以 CCD或 CMOS作为探 测器的光谱仪进行光谱测量吋, 在近红外光处可以获得比较高的信噪比。 此外 , 当增加整体光源强度 (包括紫外光、 可见光和近红外光) 吋, 在很大的动态 范围内可见光部分不会对此类光谱仪饱和。 [0068] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。 After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the light 514 generated in the first direction of the xenon lamp 501. The light is coupled into the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device. The light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion spectrum. Part of the light passing through the variable light intensity device of the xenon lamp-motor driven wedge plate pair 701 adjusts the appropriate light intensity, enters the optical fiber through the second fiber input connector 507, and enters the fiber output connector 504 of the light combining device, the tungsten lamp 508 After the light 516 generated in the first direction passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508 ; when the overall light source intensity is increased, including ultraviolet light, The intensity of visible light and near-infrared light 吋, the visible light portion is not saturated with a spectrometer using CCD or C MOS as a detector; the attenuated visible light and ultraviolet light and near-infrared light pass through The fiber input connector 510 is coupled into the fiber, and then enters the fiber output connector 504 of the light combining device. After the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511, the ultraviolet light and the visible light are filtered to obtain the near infrared. The spectrum, the portion of the light is adjusted by the tungsten light 508 variable light intensity device-motor driven wedge plate pair 702 to adjust the appropriate light intensity, then enters the optical fiber through the fourth fiber input connector 513, and then enters the optical fiber output connector 504 of the light combining device. . Thus, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained. The ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum. By using the broadband spectrum with a spectrometer using CCD or CMOS as a detector for spectral measurement, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) is increased, the visible light portion does not saturate such a spectrometer over a large dynamic range. [0068] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0069] 实施例四 [0069] Embodiment 4
[0070] 如图 8所示, 本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光 装置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 505, 合光装置的第二光纤输入接头 507, 钨灯 508, 可见衰减滤光片 509, 合光 装置的第三光纤输入接头 510, 长波通滤光片 511, 合光装置的第四光纤输入接 头 513, 氘灯 501第一方向产生的光 514, 氘灯 501第二方向产生的光 515, 钨灯 50 8第一方向产生的光 516, 钨灯 508第二方向产生的光 517。 第一光纤输入接头 503 、 合光装置的第二光纤输入接头 507、 第三光纤输入接头 509和第四光纤输入接 头 513构成合光装置, 合光装置可以是分叉或分劈式。  As shown in FIG. 8, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first optical fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. a pass filter 505, a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device The fourth optical fiber input connector 513, the light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the light generated in the second direction of the tungsten lamp 508 517. The first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched.
[0071] 氘灯 501第一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱 的可见光被滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514 , 该光经第一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 501第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光 部分光谱, 该部分光经变化第二光纤输入接头 507与氘灯 501的距离 D1而调节合 适的光强后, 经第二光纤输入接头 507进入光纤, 再进入合光装置的光纤输出接 头 504, 钨灯 508第一方向产生的光 516经过可见衰减滤光片 509后, 其可见光部 分被衰减以平衡其与该钨灯 508发出的紫外光和近红外光的相对强度; 当增加整 体光源强度包括紫外光、 可见光和近红外光的强度吋, 该可见光部分不会对以 C CD或 CMOS作为探测器的光谱仪饱和; 该衰减的可见光与紫外光和近红外光经 第三光纤输入接头 510耦合进入光纤, 再进入合光装置的光纤输出接头 504, 钨 灯 508第二方向产生的光 517经过长波通滤光片 511后, 其中紫外光和见光被滤掉 而得近红外光谱, 该部分光经变化第四光纤输入接头 513与钨灯 508的距离 D2而 调节合适的光强后, 经第四光纤输入接头 513进入光纤, 再进入合光装置的光纤 输出接头 504。 如此, 在合光装置的光纤输出接头 504处便可以将氘灯 501第一方 向得到的紫外光和蓝光光谱、 氘灯 501第二方向上得到的 400nm蓝光部分光谱、 钨灯 508第一方向得到的紫外光、 衰减的可见光和近红外光和钨灯 508第二方向 得到的近红外光光谱叠加, 以获得包括紫外光、 可见近光和红外光的整体平缓 、 宽带而且近红外光强度几乎加倍的宽带光谱。 用该宽带光谱配合以 CCD或 CM OS作为探测器的光谱仪进行光谱测量吋, 在近红外光处可以获得比较高的信噪 比。 此外, 当增加整体光源强度 (包括紫外光、 可见光和近红外光) 吋, 在很 大的动态范围内可见光部分不会对此类光谱仪饱和。 [0071] After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501. The light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device. The light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion. The portion of the light is adjusted to a suitable intensity by changing the distance D1 between the second fiber input connector 507 and the xenon lamp 501, and then enters the fiber through the second fiber input connector 507, and then enters the fiber output connector 504 of the light combining device, tungsten. After the light 516 generated in the first direction of the lamp 508 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance its relative intensity with the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; when the overall light source intensity is increased, including ultraviolet light The intensity of light, visible light, and near-infrared light, which is not saturated with spectrometers that use C CD or CMOS as detectors; the attenuated visible and ultraviolet and near-infrared The light is coupled into the optical fiber through the third fiber input connector 510, and then enters the fiber output connector 504 of the light combining device. The light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511, wherein the ultraviolet light and the visible light are filtered. The near-infrared spectrum is obtained, and the portion of the light is adjusted to a suitable light intensity by changing the distance D2 between the fourth fiber input connector 513 and the tungsten lamp 508, and then enters the fiber through the fourth fiber input connector 513, and then enters the fiber of the light combining device. Output connector 504. Thus, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained. The ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smoothness including ultraviolet light, visible low beam and infrared light. Wideband and near-infrared light intensity almost doubled the broadband spectrum. By using the broadband spectrum with a spectrometer using a CCD or CM OS as a detector for spectral measurement, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) is increased, the visible light portion does not saturate such a spectrometer over a large dynamic range.
[0072] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。  [0072] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0073] 实施例五  Embodiment 5
[0074] 如图 9所示, 本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光 装置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 505, 合光装置的第二光纤输入接头 507, 钨灯 508, 可见衰减滤光片 509, 合光 装置的第三光纤输入接头 510, 长波通滤光片 511, 合光装置的第四光纤输入接 头 513, 氘灯 501第一方向产生的光 514, 氘灯 501第二方向产生的光 515, 钨灯 50 8第一方向产生的光 516, 钨灯 508第二方向产生的光 517。 第一光纤输入接头 503 、 合光装置的第二光纤输入接头 507、 第三光纤输入接头 509和第四光纤输入接 头 513构成合光装置, 合光装置可以是分叉或分劈式。 第二光纤输入接头 507和 第四光纤输入接头 513的光纤中具有光纤藕合结构, 光纤耦合结构由两段互相耦 合的光纤组成。  As shown in FIG. 9, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. a pass filter 505, a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device The fourth optical fiber input connector 513, the light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the light generated in the second direction of the tungsten lamp 508 517. The first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched. The second fiber input connector 507 and the fourth fiber input connector 513 have a fiber-bonding structure in the fiber, and the fiber coupling structure is composed of two fibers coupled to each other.
[0075] 氘灯 501第一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱 的可见光被滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514 , 该光经第一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 501第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光 部分光谱, 该部分光经第二光纤输入接头 507进入光纤, 经变化第二光纤输入接 头 507的光纤藕合结构中两藕合光纤的距离 D3而调节合适的光强后, 再进入合光 装置的光纤输出接头 504, 钨灯 508第一方向产生的光 516经过可见衰减滤光片 50 9后, 其可见光部分被衰减以平衡其与该钨灯 508发出的紫外光和近红外光的相 对强度; 当增加整体光源强度包括紫外光、 可见光和近红外光的强度吋, 该可 见光部分不会对以 CCD或 CMOS作为探测器的光谱仪饱和; 该衰减的可见光与紫 外光和近红外光经第三光纤输入接头 510耦合进入光纤, 再进入合光装置的光纤 输出接头 504, 钨灯 508第二方向产生的光 517经过长波通滤光片 511后, 其中紫 外光和见光被滤掉而得近红外光谱, 该部分光经第四光输入接口 513进入光纤, 经变化第四光纤输入接头 513的光纤藕合结构中两藕合光纤的距离 D4而调节合适 的光强后, 再进入合光装置的光纤输出接头 504。 如此, 在合光装置的光纤输出 接头 504处便可以将氘灯 501第一方向得到的紫外光和蓝光光谱、 氘灯 501第二方 向上得到的 400nm蓝光部分光谱、 钨灯 508第一方向得到的紫外光、 衰减的可见 光和近红外光和钨灯 508第二方向得到的近红外光光谱叠加, 以获得包括紫外光 、 可见近光和红外光的整体平缓、 宽带而且近红外光强度几乎加倍的宽带光谱 。 用该宽带光谱配合以 CCD或 CMOS作为探测器的光谱仪进行光谱测量吋, 在近 红外光处可以获得比较高的信噪比。 此外, 当增加整体光源强度 (包括紫外光 、 可见光和近红外光) 吋, 在很大的动态范围内可见光部分不会对此类光谱仪 饱和。 [0075] After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501. The light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device. The light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion. Spectral, the portion of the light enters the optical fiber through the second fiber input connector 507, and adjusts the appropriate light intensity by changing the distance D3 of the two coupled fibers in the fiber-bonding structure of the second fiber input connector 507, and then enters the light combining device. After the optical output connector 504, the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 50 9 , the visible portion thereof is attenuated to balance the relative intensity of the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; When increasing the intensity of the overall light source including the intensity of ultraviolet light, visible light and near-infrared light, the visible light portion will not saturate the spectrometer with CCD or CMOS as the detector; the attenuation is visible Light and ultraviolet light and near-infrared light are coupled into the optical fiber via the third fiber input connector 510, and then enter the fiber output connector 504 of the light combining device. After the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511, Purple The external light and the visible light are filtered out to obtain a near-infrared spectrum, and the portion of the light enters the optical fiber through the fourth optical input interface 513, and is adjusted by changing the distance D4 of the two coupled optical fibers in the fiber-bonding structure of the fourth optical fiber input connector 513. After a suitable light intensity, the fiber output connector 504 of the light combining device is again accessed. Thus, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained. The ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Broadband spectrum. By using the broadband spectrum with a spectrometer using CCD or CMOS as a detector for spectral measurement, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) is increased, the visible light portion does not saturate such a spectrometer over a large dynamic range.
[0076] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。  [0076] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0077] 实施例六 Embodiment 6
[0078] 如图 10所示, 本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光 装置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 505, 合光装置的第二光纤输入接头 507, 钨灯 508, 可见衰减滤光片 509, 合光 装置的第三光纤输入接头 510, 长波通滤光片 511, 合光装置的第四光纤输入接 头 513, 氘灯 501第一方向产生的光 514, 氘灯 501第二方向产生的光 515, 钨灯 50 8第一方向产生的光 516, 钨灯 508第二方向产生的光 517。 第一光纤输入接头 503 、 合光装置的第二光纤输入接头 507、 第三光纤输入接头 509和第四光纤输入接 头 513构成合光装置, 合光装置可以是分叉或分劈式。 第二光纤输入接头 507和 第四光纤输入接头 513中具有准直器透镜。  As shown in FIG. 10, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. a pass filter 505, a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device The fourth optical fiber input connector 513, the light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the light generated in the second direction of the tungsten lamp 508 517. The first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched. A second collimator lens is provided in the second fiber input connector 507 and the fourth fiber input connector 513.
[0079] 氘灯 501第一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱 的可见光被滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514 , 该光经第一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 501第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光 部分光谱, 该部分光经变化第二光纤输入接头 507中准直器透镜与光纤的距离 D5 而调节合适的光强后, 经第二光纤输入接头 507进入光纤, 再进入合光装置的光 纤输出接头 504, 钨灯 508第一方向产生的光 516经过可见衰减滤光片 509后, 其 可见光部分被衰减以平衡其与该钨灯 508发出的紫外光和近红外光的相对强度; 当增加整体光源强度包括紫外光、 可见光和近红外光的强度吋, 该可见光部分 不会对以 CCD或 CMOS作为探测器的光谱仪饱和; 该衰减的可见光与紫外光和近 红外光经第三光纤输入接头 510耦合进入光纤, 再进入合光装置的光纤输出接头 504, 钨灯 508第二方向产生的光 517经过长波通滤光片 511后, 其中紫外光和见 光被滤掉而得近红外光谱, 该部分光经变化第四光纤输入接头 513中准直器透镜 与光纤的距离 D6而调节合适的光强后, 经第四光纤输入接头 513进入光纤, 再进 入合光装置的光纤输出接头 504。 如此, 在合光装置的光纤输出接头 504处便可 以将氘灯 501第一方向得到的紫外光和蓝光光谱、 氘灯 501第二方向上得到的 400 nm蓝光部分光谱、 钨灯 508第一方向得到的紫外光、 衰减的可见光和近红外光和 钨灯 508第二方向得到的近红外光光谱叠加, 以获得包括紫外光、 可见近光和红 外光的整体平缓、 宽带而且近红外光强度几乎加倍的宽带光谱。 用该宽带光谱 配合以 CCD或 CMOS作为探测器的光谱仪进行光谱测量吋, 在近红外光处可以获 得比较高的信噪比。 此外, 当增加整体光源强度 (包括紫外光、 可见光和近红 外光) 吋, 在很大的动态范围内可见光部分不会对此类光谱仪饱和。 [0079] After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, the visible light containing the 656.1 nm spike spectrum is filtered to obtain a gentle blue and ultraviolet spectrum, that is, the first direction of the xenon lamp 501. The light 514 is coupled to the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device. The light 515 generated in the second direction of the xenon lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion. The portion of the light is adjusted to a suitable light intensity by varying the distance D5 between the collimator lens and the optical fiber in the second fiber input connector 507, and then enters the optical fiber through the second fiber input connector 507, and then enters the light of the light combining device. The fiber output connector 504, after the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance the relative intensity of the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; Increasing the overall light source intensity including the intensity of ultraviolet light, visible light, and near-infrared light, the visible light portion is not saturated with a spectrometer that uses CCD or CMOS as a detector; the attenuated visible light and ultraviolet light and near-infrared light are input through the third optical fiber. The connector 510 is coupled into the optical fiber, and then enters the optical fiber output connector 504 of the light combining device. After the light 517 generated in the second direction of the tungsten lamp 508 passes through the long pass filter 511, the ultraviolet light and the visible light are filtered to obtain the near infrared spectrum. The portion of the light is adjusted to a suitable light intensity by changing the distance D6 between the collimator lens and the optical fiber in the fourth optical fiber input connector 513, and then enters the optical fiber through the fourth optical fiber input connector 513, and then enters the optical fiber output connector 504 of the light combining device. . Thus, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501, the 400 nm blue light partial spectrum obtained in the second direction of the xenon lamp 501, and the first direction of the tungsten lamp 508 can be obtained. The obtained ultraviolet light, the attenuated visible light and the near-infrared light and the near-infrared light spectrum obtained by the second direction of the tungsten lamp 508 are superimposed to obtain an overall smooth, wide-band and near-infrared light intensity including ultraviolet light, visible low beam and infrared light. Double the broadband spectrum. By using the broadband spectrum with a spectrometer using CCD or CMOS as a detector for spectral measurement, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) is increased, the visible light portion does not saturate such a spectrometer over a large dynamic range.
[0080] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。  [0080] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0081] 实施例七  Example 7
[0082] 如图 11所示, 本实施例中宽带光谱光源包括氘灯 501, 短波通滤光片 502, 合光 装置的第一光纤输入接头 503, 合光装置的光纤输出接头 504, 400nm带通滤光片 505, 合光装置的第二光纤输入接头 507, 钨灯 508, 可见衰减滤光片 509, 合光 装置的第三光纤输入接头 510, 长波通滤光片 511, 合光装置的第四光纤输入接 头 513, 氘灯 501第一方向产生的光 514, 氘灯 501第二方向产生的光 515, 钨灯 50 8第一方向产生的光 516, 钨灯 508第二方向产生的光 517。 第一光纤输入接头 503 、 合光装置的第二光纤输入接头 507、 第三光纤输入接头 509和第四光纤输入接 头 513构成合光装置, 合光装置可以是分叉或分劈式。 第二光纤输入接头 507和 第四光纤输入接头 513中设置不同芯径的光纤。  As shown in FIG. 11, the broadband spectral light source in this embodiment includes a xenon lamp 501, a short pass filter 502, a first fiber input connector 503 of the light combining device, an optical fiber output connector 504 of the light combining device, and a 400 nm band. a pass filter 505, a second fiber input connector 507 of the light combining device, a tungsten lamp 508, a visible attenuation filter 509, a third fiber input connector 510 of the light combining device, a long pass filter 511, a light combining device The fourth optical fiber input connector 513, the light 514 generated in the first direction of the xenon lamp 501, the light 515 generated in the second direction of the xenon lamp 501, the light 516 generated in the first direction of the tungsten lamp 508, and the light generated in the second direction of the tungsten lamp 508 517. The first fiber input connector 503, the second fiber input connector 507 of the light combining device, the third fiber input connector 509, and the fourth fiber input connector 513 constitute a light combining device, and the light combining device may be bifurcated or branched. Fibers of different core diameters are disposed in the second fiber input connector 507 and the fourth fiber input connector 513.
[0083] 氘灯 501第一方向产生的光 514经过短波通滤光片 502后, 其包含 656.1nm尖峰谱 的可见光被滤掉得到平缓的蓝光与紫外光谱, 即氘灯 501第一方向产生的光 514 , 该光经第一光纤输入接头 503耦合进入光纤, 再进入合光装置的光纤输出接头 504, 氘灯 501第二方向产生的光 515经过 400nm带通滤光片 505后产生 400nm蓝光 部分光谱, 该部分光经不同直径藕合光纤以及调节不同直径藕合光纤的距离 D7 而调节合适的光强后, 经第二光纤输入接头 507进入光纤, 再进入合光装置的光 纤输出接头 504, 钨灯 508第一方向产生的光 516经过可见衰减滤光片 509后, 其 可见光部分被衰减以平衡其与该钨灯 508发出的紫外光和近红外光的相对强度; 当增加整体光源强度包括紫外光、 可见光和近红外光的强度吋, 该可见光部分 不会对以 CCD或 CMOS作为探测器的光谱仪饱和; 该衰减的可见光与紫外光和 近红外光经第三光纤输入接头 510耦合进入光纤, 再进入合光装置的光纤输出接 头 504, 钨灯 508第二方向产生的光 517经过长波通滤光片 511后, 其中紫外光和 见光被滤掉而得近红外光谱, 该部分光经不同直径藕合光纤以及调节不同直径 藕合光纤的距离 D8而调节合适的光强后, 经第四光纤输入接头 513进入光纤, 再 进入合光装置的光纤输出接头 504。 如此, 在合光装置的光纤输出接头 504处便 可以利用组合多光谱的原理, 将氘灯 501第一方向得到的紫外光和蓝光光谱、 氘 灯 501第二方向上得到的 400nm蓝光部分光谱、 钨灯 508第一方向得到的紫外光、 衰减的可见光和近红外光和钨灯 508第二方向得到的近红外光光谱叠加, 以获得 包括紫外光、 可见近光和红外光的整体平缓、 宽带而且近红外光强度几乎加倍 的宽带光谱。 用该宽带光谱配合以 CCD或 CMOS作为探测器的光谱仪进行光谱测 量吋, 在近红外光处可以获得比较高的信噪比。 此外, 当增加整体光源强度 ( 包括紫外光、 可见光和近红外光) 吋, 在很大的动态范围内可见光部分不会对 此类光谱仪饱和。 采用近红外光多耦合、 可见光及紫外光光少耦合的方法, 即 钨灯 508的第二方向所用的光纤采用较大芯径的光纤以平衡各部分的光强, 以克 服因为 CCD或 COMS在近红外光处的响应度低而引起的近红外光部分相对较弱的 缺陷。 [0083] After the light 514 generated in the first direction of the xenon lamp 501 passes through the short pass filter 502, it contains a 656.1 nm spike spectrum. The visible light is filtered out to obtain a smooth blue and ultraviolet spectrum, that is, light 514 generated in the first direction of the xenon lamp 501, which is coupled into the optical fiber via the first fiber input connector 503, and then enters the fiber output connector 504 of the light combining device, The light 515 generated in the second direction of the lamp 501 passes through the 400 nm band pass filter 505 to generate a 400 nm blue portion spectrum, which is adjusted by adjusting the appropriate light intensity by combining the fibers with different diameters and adjusting the distance D7 of the different diameter twisted fibers. The second fiber input connector 507 enters the optical fiber, and then enters the fiber output connector 504 of the light combining device. After the light 516 generated in the first direction of the tungsten lamp 508 passes through the visible attenuation filter 509, the visible portion thereof is attenuated to balance the The relative intensity of the ultraviolet light and the near-infrared light emitted by the tungsten lamp 508; when the intensity of the overall light source is increased, including the intensity of ultraviolet light, visible light, and near-infrared light, the visible light portion is not saturated with the spectrometer using CCD or CMOS as a detector. The attenuated visible light is coupled to the ultraviolet light and the near-infrared light via the third fiber input connector 510 into the fiber, and then enters the fiber of the light combining device. The output connector 504, the light 517 generated in the second direction of the tungsten lamp 508 passes through the long-wavelength filter 511, wherein the ultraviolet light and the visible light are filtered to obtain a near-infrared spectrum, and the portion of the light is twisted by different diameters and adjusted. After adjusting the appropriate light intensity by the distance D8 of the diameter of the optical fiber, the fiber enters the optical fiber through the fourth fiber input connector 513, and then enters the fiber output connector 504 of the light combining device. In this way, at the fiber output connector 504 of the light combining device, the ultraviolet light and blue light spectrum obtained in the first direction of the xenon lamp 501 and the 400 nm blue light portion spectrum obtained in the second direction of the xenon lamp 501 can be utilized by the principle of combining multiple spectra. The ultraviolet light obtained by the first direction of the tungsten lamp 508, the attenuated visible light and the near-infrared light and the near-infrared light obtained by the second direction of the tungsten lamp 508 are superposed to obtain an overall smooth, wide band including ultraviolet light, visible low beam and infrared light. Moreover, the near-infrared light intensity almost doubles the broadband spectrum. By using the broadband spectrum with a spectrometer using CCD or CMOS as a detector for spectral measurement, a relatively high signal-to-noise ratio can be obtained at near-infrared light. In addition, when the overall light source intensity (including ultraviolet light, visible light, and near-infrared light) is increased, the visible light portion does not saturate such a spectrometer over a large dynamic range. The method uses near-infrared light multi-coupling, visible light and ultraviolet light coupling less, that is, the optical fiber used in the second direction of the tungsten lamp 508 uses a larger core diameter fiber to balance the light intensity of each part to overcome the CCD or COMS A defect in which the near-infrared light portion is relatively weak due to low responsivity at the near-infrared light.
[0084] 在本实施例中, 光与光纤接头的输入或输出耦合为直接耦合或用透镜耦合。  [0084] In this embodiment, the light is coupled to the input or output of the fiber optic connector for direct coupling or coupling with a lens.
[0085] 在本发明中, 钨灯 508的输出光强可以通过调节其驱动电流进行调节, 以改变 第二光源电流而改变第二光源的第一方向上得到的紫外光光谱、 可见光光谱与 近红外光光谱以及第二光源的第二方向得到的近红外光谱的强度, 从而使这两 段光谱强度与从第一光源获得的平缓蓝光与紫外光谱强度相匹配而得到整体平 缓、 宽带而且近红外光强度几乎加倍的宽带光谱。 [0085] In the present invention, the output light intensity of the tungsten lamp 508 can be adjusted by adjusting its driving current to change the second source current to change the ultraviolet spectrum and the visible spectrum of the second source. The intensity of the near-infrared spectrum obtained by the near-infrared spectrum and the second direction of the second source, so that the intensity of the two segments is matched with the smooth blue and ultraviolet spectral intensity obtained from the first source to obtain a smooth, broadband and near-integral The broad spectrum of infrared light intensity is almost doubled.
[0086] 氘灯、 钨灯 508的光纤输出接头还可以分别设置有用于平衡光强的中性光衰减 片。  [0086] The optical fiber output connectors of the xenon lamp and the tungsten lamp 508 may also be respectively provided with neutral light attenuating sheets for balancing the light intensity.
[0087] 在本发明中, 采用近红外光多耦合 (如用较大芯径光纤等) 、 可见光及紫外光 光少耦合 (如用较小芯径光纤等) 的方法, 即钨灯 508第二方向所用的光纤采用 较大芯径的光纤以平衡各部分的光强。 可以克服因为 CCD或 COMS在近红外光处 的响应度低而弓 I起的近红外光部分相对较弱的缺陷。  [0087] In the present invention, the use of near-infrared light multi-coupling (such as with a larger core fiber, etc.), visible light and ultraviolet light less coupling (such as with a smaller core fiber, etc.), that is, tungsten lamp 508 The fiber used in the two directions uses a fiber with a larger core diameter to balance the light intensity of each part. It is possible to overcome the drawback that the near-infrared light portion of the CCD or COMS at the near-infrared light is relatively weak and the near-infrared light portion is relatively weak.
[0088] 钨灯 508可以为其它的包括紫外光、 可见光与近红外光的光源; 如氘灯等。 [0088] The tungsten lamp 508 can be other light sources including ultraviolet light, visible light, and near-infrared light; such as xenon lamps and the like.
[0089] 当然, 本发明还可有其它多种实施例, 在不背离本发明精神及其实质的情况下 , 熟悉本领域的技术人员当可根据本发明作出各种相应的改变和变形, 但这些 相应的改变和变形都应属于本发明所附的权利要求的保护范围。 The present invention may, of course, be embodied in various other modifications and changes without departing from the spirit and scope of the invention. These respective changes and modifications are intended to fall within the scope of the appended claims.

Claims

权利要求书 Claim
[权利要求 1] 一种宽带光谱光源, 其特征在于, 包括:  [Claim 1] A broadband spectral light source, comprising:
第一光源、 短波通滤光片、 400nm带通滤光片、 第二光源、 可见衰减 滤光片、 长波通滤光片以及合光装置, 所述合光装置为包括四个光纤 输入接头以及一个光纤输出接头的四合一光纤, 所述第一光源为紫外 光和蓝光光源, 所述第二光源为包括紫外光、 可见光与近红外光的光 源,  a first light source, a short pass filter, a 400 nm band pass filter, a second light source, a visible attenuation filter, a long pass filter, and a light combining device, the light combining device comprising four fiber input connectors and a four-in-one optical fiber of a fiber output connector, the first light source is an ultraviolet light source and a blue light source, and the second light source is a light source including ultraviolet light, visible light and near infrared light.
所述第一光源的第一方向产生的光经过所述短波通滤光片后得到蓝光 与紫外光谱, 所述蓝光与紫外光谱耦合进入所述合光装置的第一光纤 输入接头;  The light generated in the first direction of the first light source passes through the short pass filter to obtain a blue light and an ultraviolet spectrum, and the blue light and ultraviolet spectrum are coupled into the first fiber input connector of the light combining device;
所述第一光源的第二方向产生的光经过所述 400nm带通滤光片后得到 400nm蓝光部分光谱, 所述 400nm蓝光部分光谱通过第一可变光强器 件或改变所述第一光源与所述合光装置的光纤输出接头之间的光传输 器件的耦合距离以调节光强后输出;  The light generated in the second direction of the first light source passes through the 400 nm band pass filter to obtain a 400 nm blue portion spectrum, and the 400 nm blue portion spectrum passes through the first variable light intensity device or changes the first light source and a coupling distance of the optical transmission device between the optical fiber output connectors of the light combining device to adjust the light intensity and output;
所述第二光源的第一方向产生的光经过所述可见衰减滤光片后得到可 见光部分被衰减的光, 所述可见光部分被衰减的光耦合进入所述合光 装置的第三光纤输入接头;  The light generated in the first direction of the second light source passes through the visible attenuation filter to obtain light that is partially attenuated by the visible light, and the light that is partially attenuated by the visible light is coupled into the third optical fiber input connector of the light combining device. ;
所述第二光源的第二方向产生的光经过所述长波通滤光片后得到近红 外光谱, 所述近红外光谱通过第二可变光强器件或改变所述第二光源 与所述合光装置的光纤输出接头之间的光传输器件的耦合距离以调节 光强后输出;  The light generated in the second direction of the second light source passes through the long pass filter to obtain a near-infrared spectrum, and the near-infrared spectrum passes through the second variable light intensity device or changes the second light source to the a coupling distance of the optical transmission device between the optical fiber output connectors of the optical device to adjust the light intensity and output;
所述合光装置将由所述四个光纤输入接头进入的光进行合光后经所述 光纤输出接头输出包括紫外光、 可见光和近红外光的整体平缓的宽带 光谱。  The light combining device combines light entering by the four fiber input connectors and outputs an overall flat broadband spectrum including ultraviolet light, visible light, and near-infrared light through the fiber output connector.
[权利要求 2] 根据权利要求 1所述的光源, 其特征在于, 所述合光装置包括分别具 有两个输入接头以及一个输出接头的第一二合一 Y型光纤、 第二二合 一 Y型光纤以及第三二合一 Y型光纤;  [Claim 2] The light source according to claim 1, wherein the light combining device comprises a first two-in-one Y-type optical fiber and a second two-in-one Y respectively having two input connectors and one output connector. Type fiber and third 2-in-1 Y-type fiber;
所述第一二合一 Y型光纤的两个输入接头分别作为所述合光装置的第 一光纤输入接头和第二光纤输入接头; Two input connectors of the first two-in-one Y-type optical fiber respectively serve as the first unit of the light combining device a fiber input connector and a second fiber input connector;
所述第二二合一 Y型光纤的两个输入接头分别作为所述合光装置的第 三光纤输入接头和第四光纤输入接头;  The two input connectors of the second two-in-one Y-type optical fiber respectively serve as a third optical fiber input connector and a fourth optical fiber input connector of the light combining device;
所述第三二合一 Y型光纤的两个输入接头分别与所述第一二合一 Y型 光纤、 第二二合一 Y型光纤的输出接头连接, 所述第三二合一 Y型光 纤的输出接头为所述合光装置的光纤输出接头。  The two input connectors of the third two-in-one Y-type optical fiber are respectively connected to the output connectors of the first two-in-one Y-type optical fiber and the second two-in-one Y-shaped optical fiber, and the third two-in-one Y-type The output connector of the optical fiber is the fiber output connector of the light combining device.
[权利要求 3] 根据权利要求 1所述的光源, 其特征在于, 所述第一光源的第一可变 光强的器件为电机驱动可变光栏、 电机驱动轮式渐变中性滤光片或电 机驱动楔型板对;  [Claim 3] The light source according to claim 1, wherein the first variable light intensity device of the first light source is a motor driven variable diaphragm, and the motor drives a wheeled gradient neutral filter. Or a motor driven wedge plate pair;
所述第二光源的第二可变光强的器件为电机驱动可变光栏、 电机驱动 轮式渐变中性滤光片或电机驱动楔型板对。  The second variable light intensity device of the second light source is a motor driven variable diaphragm, a motor driven wheeled gradient neutral filter or a motor driven wedge plate pair.
[权利要求 4] 根据权利要求 1所述的光源, 其特征在于, [Claim 4] The light source according to claim 1, wherein
所述第一光源的第二方向产生的光经改变所述第二光纤输入接头与所 述第一光源的距离而调整其光强;  The light generated in the second direction of the first light source adjusts the light intensity thereof by changing a distance between the second fiber input connector and the first light source;
所述第二光源的第二方向产生的光经改变所述第四光纤输入接口与所 述第二光源的距离而调整其光强。  The light generated in the second direction of the second light source adjusts its light intensity by changing the distance between the fourth fiber input interface and the second light source.
[权利要求 5] 根据权利要求 1所述的光源, 其特征在于, 所述第二光纤输入接头以 及所述第四光纤输入接头的光纤中分别设置有光纤藕合结构; 第一光源的第二方向产生的光通过调节所述第二光纤输入接头的光纤 中光纤藕合结构的距离而调整其强度, 第二光源的第二方向产生的光 通过调节所述第四光纤输入接头的光纤中光纤藕合结构的距离而调整 其强度。 The light source according to claim 1, wherein the second optical fiber input connector and the optical fiber of the fourth optical fiber input connector are respectively provided with an optical fiber twisting structure; The direction-generated light adjusts its intensity by adjusting the distance of the fiber-coupling structure in the fiber of the second fiber input connector, and the light generated in the second direction of the second source passes through the fiber in the fiber of the fourth fiber input connector. Adjust the strength of the structure by adjusting the distance of the structure.
[权利要求 6] 根据权利要求 1所述的光源, 其特征在于, 所述第一光源的第二方向 产生的光经变化所述第二光纤输入接头中的准直器透镜与光纤的距离 而调整其强度;  [Claim 6] The light source according to claim 1, wherein the light generated in the second direction of the first light source is changed by the distance between the collimator lens and the optical fiber in the second fiber input connector. Adjust its strength;
所述第二光源的第二方向产生的光经变化第四光纤输入接头中的准直 器透镜与光纤的距离而调整其强度。  The light generated in the second direction of the second source is adjusted in intensity by varying the distance of the collimator lens in the fourth fiber input connector from the fiber.
[权利要求 7] 根据权利要求 1所述的光源, 其特征在于, 所述第二光纤输入接头中 通过设置不同芯径的光纤以变化所述第一光源的第二方向产生的光的 光强; 所述第四光纤输入接头通过设置不同芯径的光纤以变化所述第 二光源的第二方向产生的光的光强。 [Lighting device 7] The light source according to claim 1, wherein: the second optical fiber input connector The light intensity of the light generated by changing the second direction of the first light source by the fibers of different core diameters; the fourth fiber input joint is configured to change the second direction of the second light source by providing fibers of different core diameters The intensity of the light produced.
[权利要求 8] 根据权利要求 7所述的光源, 其特征在于, 采用近红外光多耦合、 可 见光及紫外光光少耦合的方法, 即所述第二光源的第二方向所用的光 纤采用较大芯径的光纤以平衡各部分的光强。 [Claim 8] The light source according to claim 7, wherein the method of coupling near-infrared light multi-coupling, visible light, and ultraviolet light is used, that is, the optical fiber used in the second direction of the second light source is Large core fiber to balance the light intensity of each part.
[权利要求 9] 根据权利要求 1至 8任一项所述的光源, 其特征在于, 所述合光装置 为分叉或分劈式; 且所述光与光纤接头的输入或输出耦合为直接耦合 或用透镜耦合。 [Claim 9] The light source according to any one of claims 1 to 8, wherein the light combining device is bifurcated or branched; and the light is coupled directly to an input or an output of the optical fiber connector Coupled or coupled with a lens.
[权利要求 10] 根据权利要求 1至 8任一项所述的光源, 其特征在于, 所述第二光源的 输出光强通过调节其驱动电流进行调节以改变第二光源电流而改变第 二光源的第一方向上得到的紫外光光谱、 可见光光谱与近红外光光谱 以及第二光源的第二方向得到的近红外光谱的强度。  [Claim 10] The light source according to any one of claims 1 to 8, wherein an output light intensity of the second light source is adjusted by adjusting a driving current thereof to change a second light source current to change a second light source The intensity of the near-infrared spectrum obtained in the first direction of the ultraviolet spectrum, the visible spectrum and the near-infrared spectrum, and the second direction of the second source.
[权利要求 11] 根据权利要求 1至 8任一项所述的光源, 其特征在于, 所述四个光纤输 入接头还设置有用于调节平衡光强的中性光衰减片。  The light source according to any one of claims 1 to 8, characterized in that the four optical fiber input connectors are further provided with a neutral light attenuating sheet for adjusting the balance light intensity.
[权利要求 12] 根据权利要求 1至 8任一项所述的光源, 其特征在于, 所述第一光源为 氘灯、 氢灯或氙灯, 所述第二光源为钨灯或氙灯。  The light source according to any one of claims 1 to 8, wherein the first light source is a xenon lamp, a hydrogen lamp or a xenon lamp, and the second light source is a tungsten lamp or a xenon lamp.
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