WO2018054182A1 - 延时线装置及太赫兹时域光谱仪系统 - Google Patents

延时线装置及太赫兹时域光谱仪系统 Download PDF

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Publication number
WO2018054182A1
WO2018054182A1 PCT/CN2017/096773 CN2017096773W WO2018054182A1 WO 2018054182 A1 WO2018054182 A1 WO 2018054182A1 CN 2017096773 W CN2017096773 W CN 2017096773W WO 2018054182 A1 WO2018054182 A1 WO 2018054182A1
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Prior art keywords
delay line
line device
assembly
slider
bottom plate
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PCT/CN2017/096773
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English (en)
French (fr)
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丁庆
彭世昌
潘奕
李辰
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深圳市太赫兹科技创新研究院
深圳市太赫兹系统设备有限公司
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Application filed by 深圳市太赫兹科技创新研究院, 深圳市太赫兹系统设备有限公司 filed Critical 深圳市太赫兹科技创新研究院
Priority to EP17851947.6A priority Critical patent/EP3517907A4/en
Priority to US15/768,714 priority patent/US10161790B2/en
Publication of WO2018054182A1 publication Critical patent/WO2018054182A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/06—Scanning arrangements arrangements for order-selection
    • G01J2003/064—Use of other elements for scan, e.g. mirror, fixed grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/423—Spectral arrangements using lasers, e.g. tunable

Definitions

  • the invention relates to the field of terahertz technology, in particular to a delay line device and a terahertz time domain spectrometer system.
  • Terahertz time-domain spectroscopy is a far-infrared coherence spectroscopy technique developed by D.H. Auston et al. based on the antenna radiation mechanism in the 1980s.
  • This technique uses the terahertz radiation pulse to transmit or reflect from the surface of the sample to record the terahertz time domain electric field waveform when there is no sample, and then perform fast Fourier transform on the two waveforms to obtain the frequency of the signal when there is no sample.
  • the domain waveform and the mathematical calculation of the spectral data can obtain the refractive index, dielectric constant, and absorption coefficient of the sample to be tested.
  • terahertz time-domain spectroscopy technology not only has wide measurement bandwidth, high spectral resolution, good spectral signal-to-noise ratio, but also can record amplitude information and phase information of the sample signal under test. .
  • Typical terahertz time domain spectrometer systems include femtosecond pulsed lasers, terahertz radiation devices, terahertz detection devices, and delay line devices.
  • the conventional delay line device generally implements a 180-degree turning of the optical path based on a stepping motor to construct a set of symmetrical mirrors, and then adjusts the delay of the pump optical path and the detecting optical path through the motor controller.
  • the inherent cumbersomeness of the device, the large footprint, and the inability to modularize it make it unsuitable for commercialization, miniaturization, and portable terahertz time domain spectrometer systems.
  • a delay line device for adjusting the delay of the pump light and the probe light time signal including:
  • slide rail assembly the slide rail assembly is mounted on the bottom plate, and the slide rail assembly includes a slider The slider is movable relative to the base;
  • the grating rule assembly is disposed on the slide rail assembly for collecting displacement information when the slider moves;
  • An electromagnetic induction assembly including an induction coil that abuts a second end of the slider, the electromagnetic induction assembly for providing power to push the slider to move.
  • the slide rail assembly further includes a slide rail base, the slide rail base is fixed on the bottom plate; the slide rail base is provided with a groove, and the slider is disposed in the concave In the slot.
  • the mirror is a retroreflector or a set of symmetric mirrors.
  • the scale assembly comprises:
  • a scale grating fixed on an upper surface of the slider for measuring displacement information when the slider moves;
  • a grating readhead correspondingly disposed above the scale grating and disposed equidistantly parallel to the scale grating for capturing displacement information of the slider when the slider is moved;
  • a fixing block wherein two ends of the fixing block are respectively fixedly connected to the bottom plate and the grating read head for fixing the grating read head to the bottom plate.
  • the grating readhead is spaced from the scale grating by a distance of 2.4 mm to 2.6 mm.
  • the electromagnetic induction component comprises:
  • the induction coil being nested within the magnet, the ferromagnetic being used to generate a stable magnetic field
  • a magnet support seat is fixedly coupled to the magnet for supporting the magnet such that the magnet is disposed coaxially with the induction coil.
  • the delay line device further includes a substrate and a pad, the bottom plate and the magnet support are disposed on the substrate, and the pad is disposed on the substrate and the bottom plate On the opposite side, the pad is used to adjust the height of the delay device.
  • the bottom plate is provided with a plurality of sliding slots for receiving the fasteners.
  • the bottom plate and the substrate are relatively movable.
  • the delay line device further includes a fixing portion connected to the pad for fixing the delay line device to the work platform.
  • a terahertz time domain spectrometer system including:
  • Femtosecond pulsed laser for radiating femtosecond lasers
  • a splitting sheet for dividing the femtosecond laser into pump light and probe light
  • a terahertz radiation device disposed at an optical path of the pump light for generating terahertz radiation
  • a terahertz detecting device for detecting a terahertz pulse signal output from the terahertz radiating device, the delay line device for adjusting a delay of the pumping light and the detecting light time signal.
  • the delay line device comprises a bottom plate and a slide assembly, wherein the slide assembly comprises a slider, a mirror, a grating assembly and an electromagnetic induction assembly.
  • the pump light is illuminated on the mirror to achieve a 180° transition of the pump light.
  • the electromagnetic induction component is turned on, the magnetic induction coil is cut to generate power to push the slider to move, and the grating rule component disposed on the slide assembly collects displacement information when the slider moves.
  • the slider movement causes the mirrors disposed on the slider to move together to change the optical path of the pump light, thereby generating a delay between the pump light and the probe light.
  • the delay line device uses electromagnetic induction components to provide the power to drive the slider movement, which can realize fast scanning, and uses the grating ruler component to collect the displacement information when the slider moves, and the grating ruler component has the displacement relative to the stepping motor. Higher precision, better stability, faster response, and greater immunity to interference.
  • the delay line device adopts the modular integrated assembly method, which makes the structure compact and saves space, which is beneficial to the miniaturization of the structure.
  • FIG. 1 is a schematic structural view of a delay line device according to an embodiment
  • FIG. 2 is a schematic structural view of a slide rail assembly according to an embodiment
  • FIG. 3 is a schematic structural view of a bottom plate of an embodiment
  • FIG. 1 is a schematic structural diagram of a delay line device according to an embodiment.
  • the delay line device 10 is disposed in an optical path of the pump light for adjusting a delay time of the pump light and the probe light time signal.
  • the delay line device 10 includes a bottom plate 110 and a slide assembly 120.
  • the slide assembly 120 includes a slider 121, a scale assembly 130, a mirror 140, and an electromagnetic induction assembly 150.
  • the pump light is irradiated on the mirror 140 to achieve a 180° turn of the pump light.
  • the electromagnetic induction component 150 turns on the current
  • the cutting magnetic induction coil generates power to push the slider 121 to move
  • the grating rule assembly 130 disposed on the sliding rail assembly 120 collects displacement information when the slider 121 moves.
  • the movement of the slider 121 drives the mirror 140 disposed on the slider 121 to move together, changing the optical path of the pump light, thereby generating a delay between the pump light and the probe light; the slider 121 is empty
  • the delay line device 10 uses the electromagnetic induction component 150 to provide power for driving the slider 121 to perform fast scanning, and the grating rule assembly 130 is used to collect the displacement information when the slider 121 is moved, and the displacement is measured relative to the stepping motor.
  • the grating ruler assembly 130 has the advantages of higher precision, better stability, faster response speed, and stronger anti-interference ability.
  • the delay line device 10 adopts a modular integrated assembly method, which makes the structure compact and saves space, and is advantageous for miniaturization of the structure.
  • the bottom plate 110 is used to carry the slide rail assembly 120.
  • the slide rail assembly 120 is fixedly connected to the slide rail assembly 120 through a mounting hole provided in the bottom plate 110, if the mirror 140 or the grating is disposed on the slide rail assembly 120.
  • the bottom plate 110 needs to be disassembled for convenient maintenance.
  • FIG. 2 is a schematic structural view of the slide rail assembly 120, and the slide rail assembly 120 further includes a slide rail bottom.
  • the seat 123 is fixed on the bottom plate 110; the slide base 123 is provided with a groove 1231, and the slider 121 is disposed in the groove 1231.
  • the electromagnetic induction assembly 150 provides power to push the slider 121, its slider 121 moves along the groove 1231.
  • the scale assembly 130 the scale assembly 130 is disposed on the slide assembly 120 for collecting displacement information of the slider 121 during movement.
  • the scale assembly 130 includes a scale grating, a grating readhead and a fixed block.
  • the scale grating is fixed to the upper surface of the slider 121 for measuring displacement information when the slider 121 is moved.
  • the scale grating is embedded in the slider 121 such that the upper surface of the scale grating is on the same level as the upper surface of the slider 121.
  • the scale grating is a steel strip scale with high precision.
  • the grating read head is correspondingly disposed above the middle position of the scale grating, and is disposed equidistantly parallel with the scale grating for matching the displacement information of the scale grating acquisition slider 121 during movement.
  • the distance between the grating readhead and the scale grating is 2.4 mm to 2.6 mm. In this embodiment, the distance between the grating readhead and the scale grating is 2.5 mm. At this interval, the grating reading head acquires the signal of the scale grating data with the strongest signal, good stability, fast response speed and strong anti-interference ability.
  • the fixing block is fixedly connected to the bottom plate 110 and the grating read head respectively for fixing the grating read head to the bottom plate 110.
  • the fixed block is a lightweight aluminum block, which can reduce the overall quality of the delay line device 10.
  • the fixing block is vertically fixed on the bottom plate 110, and the fixing block and the grating read head are fixedly connected by fasteners in an L shape, thereby ensuring that the grating reading head is arranged in parallel with the scale grating, and the grating reading head is stationary with respect to the bottom plate 110.
  • the slider 121 When the slider 121 moves, it drives the scale grating movement disposed on the slider 121, and the grating read head is relatively stationary with the bottom plate 110 through the fixing block, that is, when the slider 121 moves, the scale grating also moves relative to the bottom plate 110. Moreover, the grating readhead is stationary relative to the bottom plate 110, i.e., the scale assembly 130 can capture displacement information as the slider 121 moves.
  • the mirror 140 is a retroreflector and the retroreflector is formed by three mirrors being vertically bonded together. By setting a retroreflector, a 180° reversal of the pump light can be achieved.
  • the mirror 140 can also be a set of symmetrical mirrors 140, and two symmetrical mirrors are provided at the same time, and 180° reversal of the pump light can also be achieved.
  • the electromagnetic induction component 150 includes an induction coil 151.
  • the induction coil 151 abuts the second end of the slider 121, and the electromagnetic induction component 150 is used to provide power to push the slider 121 to move.
  • the magnetic induction assembly 150 includes an induction coil 151, a magnet 153, and a magnet support 155.
  • the induction coil 151 is configured to cut a magnetic induction line to generate a magnetic field after the current is turned on, and the induction coil 151 is nested in the magnet 153.
  • the ferromagnetic field generates a stable magnetic field to interact with the magnetic field generated by the induction coil 151, and pushes the slider 121 to move.
  • the magnet support base 155 is fixedly coupled to the magnet 153, and supports the magnet 153 such that the magnet 153 is disposed coaxially with the induction coil 151, that is, the center height of the magnet 153 is the same as the center height of the induction coil 151. In the coaxial arrangement, after the electromagnetic induction component 150 is energized, the driving force generated is in the horizontal direction.
  • the magnet support 155 is also made of a lightweight aluminum material.
  • the delay line device 10 further includes a substrate 160 and a pad 170, and the bottom plate 110 and the magnet support 155 are both disposed on the substrate 160.
  • the bottom plate 110 and the magnet support base 155 are fixed on the substrate 160 to be integrated. When the applicable environment is changed, the delay line device 10 does not need to be calibrated for easy operation.
  • the delay line device 10 further includes a paddle 170 disposed on a side of the substrate 160 opposite the bottom plate 110 for adjusting the height of the delay device.
  • a paddle 170 disposed on a side of the substrate 160 opposite the bottom plate 110 for adjusting the height of the delay device.
  • the bottom plate 110 is provided with a plurality of sliding slots 111.
  • the fasteners are received to enable relative movement of the bottom plate 110 and the substrate 160.
  • the number of the chutes 111 is four, and is disposed at the four corners of the bottom plate 110.
  • the number and position of the chutes 111 are not limited thereto, and may be set according to actual needs.
  • the bottom plate 110 is fixedly coupled to the substrate 160 when the fasteners received in the chute 111 are locked. If the movement displacement amount of the slider 121 is larger than the set amount in the device in a special application scenario, the fasteners accommodated in the sliding slot 111 can be loosened slightly, so that the bottom plate 110 can be opposite to the substrate 160. The movement, which extends the displacement amount of the slider 121, does not need to be reset to the device on the slide rail assembly 120, so that the application scene is wide and the efficiency is high.
  • the delay line device 10 further includes a fixing portion 180 that is coupled to the pad 170 for fixing the delay line device 10 to the work platform.
  • the fixing portion 180 includes a plurality of fixing legs disposed at both ends of the height plate 170.
  • the fixing portion 180 can also be a plurality of spiral legs for ensuring the horizontal and stable delay line device 10.
  • the delay line device can be adjusted by adjusting the height of each spiral leg. 10 maintains level and stability.
  • the terahertz time domain spectrometer system includes a femtosecond pulse laser, a beam splitter, a delay line device 10, a terahertz radiation device, and a terahertz detection device.
  • a femtosecond pulse laser is used to radiate a femtosecond laser.
  • a beam splitter is used to divide the femtosecond laser into pump light and probe light.
  • the delay line device 10 is disposed on the optical path where the pump light is located to adjust the delay time of the pump light and the probe light time signal.
  • a terahertz radiation device is disposed in the optical path in which the pump light is located for generating terahertz radiation.
  • a terahertz detecting device is used to detect a terahertz pulse signal output from the terahertz radiating device.
  • the femtosecond pulse laser radiates the femtosecond laser pulse and is split into two beams, one beam as pump light and one beam as probe light.
  • the pump light passes through the delay line device 10 to produce an adjustable time delay (compared to the probe light) and then enters the terahertz radiation device, producing a terahertz pulse having a time scale on the order of picoseconds (10 -12 s), too
  • the Hertz pulse passes through the sample and enters the terahertz detection device simultaneously with the probe light on the time scale in the order of femtosecond (10 -15 s).
  • the time scale of the probe light is very short relative to the terahertz pulse, it can be used as a point pulse, and the delay line device 10 moves 1 micron in space and corresponds to 6.67 femtoseconds in time (6.67*10 -15 ). Delay.
  • the terahertz detection device can sample the terahertz signal point by point to record the entire terahertz waveform. Simultaneously setting the delay line device 10 described above can provide a high precision terahertz time domain spectrometer system.

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Abstract

一种延时线装置（10）及太赫兹时域光谱仪系统，其中，延时线装置（10）包括底板（110）、滑轨组件（120），滑轨组件（120）中包括滑块（121）、反射镜（140）、光栅尺组件（130）以及电磁感应组件（150）。当电磁感应组件（150）接通电流后切割磁感应线圈（151）产生动力推动滑块（121）运动，设置在滑轨组件（120）上的光栅尺组件（130）采集滑块（121）运动时的位移信息。滑块（121）运动会带动设置在滑块（121）的反射镜（140）一起运动，改变泵浦光的光程，从而产生泵浦光与探测光之间的延时。延时线装置（10）采用电磁感应组件（150）提供驱动滑块（121）运动的动力，可实现快速扫描，而且采用光栅尺组件（130）来对滑块（121）运动时的位移信息进行采集，精度高、稳定性好、响应速度快、抗干扰能力强。同时，延时线装置（10）采用模块集成的组装方式，使其结构紧凑、节省了空间，利于结构小型化。

Description

延时线装置及太赫兹时域光谱仪系统 技术领域
本发明涉及太赫兹技术领域，特别是涉及延时线装置及太赫兹时域光谱仪系统。
背景技术
太赫兹时域光谱技术是在20世纪80年代由D.H.Auston等人基于天线辐射机制发展起来的一种远红外相干光谱测量技术。这种技术是利用太赫兹辐射脉冲透过或从样品表面反射，分别记录有无样品时的太赫兹时域电场波形，再对这两个波形进行快速傅立叶变换后得到有无样品时信号的频域波形，对频谱数据进行相关数学计算处理就可以得到被测样品的折射率、介电常数、吸收系数等。相比于传统光谱学技术，太赫兹时域光谱技术不仅有较宽的测量带宽、较高的光谱分辨率、较好的光谱信噪比而且可以同时记录被测样品信号的振幅信息和相位信息。
典型的太赫兹时域光谱仪系统包括：飞秒脉冲激光器、太赫兹辐射装置、太赫兹探测装置以及延时线装置。传统的延时线装置一般是基于步进电机搭建一组对称的反射镜实现光路的180度转折，再通过电机控制器实现泵浦光路与探测光路的延时调节。然而该装置固有的笨重、占用空间大、不能模块化集成的缺点使得它并不适用于商用化、小型化以及便携式太赫兹时域光谱仪系统中。
发明内容
基于此，有必要针对上述问题，提供一种模块小型化且便于加工集成的延时线装置及太赫兹时域光谱仪系统。
一种延时线装置，用于调节泵浦光与探测光时间信号的延时，包括：
底板，用于承重；
滑轨组件，所述滑轨组件安装在所述底板上，所述滑轨组件中包括滑块， 所述滑块能够相对所述底座运动；
反射镜，所述反射镜固定在所述滑块的第一端，用于实现所述泵浦光的180度反转；
光栅尺组件，所述光栅尺组件设置在所述滑轨组件上，用于采集所述滑块运动时的位移信息；
电磁感应组件，所述电磁组件包括感应线圈，所述感应线圈与所述滑块的第二端抵接，所述电磁感应组件用于提供动力推动所述滑块运动。
在其中一个实施例中，所述滑轨组件还包括滑轨底座，所述滑轨底座固定在所述底板上；所述滑轨底座上设有凹槽，所述滑块设置在所述凹槽中。
在其中一个实施例中，所述反射镜为后向反射镜或一组对称反射镜。
在其中一个实施例中，所述光栅尺组件包括：
标尺光栅，固定在所述滑块的上表面，用于测量所述滑块运动时的位移信息；
光栅读数头，对应设置在所述标尺光栅上方，且与所述标尺光栅平行等距设置，用于配合所述标尺光栅采集所述滑块运动时的位移信息；
固定块，所述固定块的两端分别与所述底板、光栅读数头固定连接，用于将所述光栅读数头固定在所述底板上。
在其中一个实施例中，所述光栅读数头与所述标尺光栅的间距为2.4毫米～2.6毫米。
在其中一个实施例中，所述电磁感应组件包括：
感应线圈，用于接通电流后切割磁感应线产生动力推动所述滑块运动；
磁铁，所述感应线圈嵌套在所述磁铁内，所述铁磁用于产生稳定的磁场；
磁铁支撑座，与所述磁铁固定连接，用于将支撑所述磁铁，使所述磁铁与所述感应线圈同轴设置。
在其中一个实施例中，所述延时线装置还包括基板和垫高板，所述底板、磁铁支撑座均设置在所述基板上，所述垫高板设置在所述基板与所述底板相对的一侧，所述垫高板用于调节所述延时装置的高度。
在其中一个实施例中，所述底板上设有多个滑槽，用于容置紧固件，使所 述底板与所述基板能够相对运动。
在其中一个实施例中，所述延时线装置还包括固定部，所述固定部与所述垫高板连接，用于将所述延时线装置固定在工作平台上。
此外，还提供一种太赫兹时域光谱仪系统，包括：
飞秒脉冲激光器，用于辐射飞秒激光；
分束片，用于将所述飞秒激光分为泵浦光和探测光；
太赫兹辐射装置，设置在所述泵浦光所在的光路，用于产生太赫兹辐射；
太赫兹探测装置，用于探测从所述太赫兹辐射装置输出的太赫兹脉冲信号，用于调节泵浦光与探测光时间信号的延时的所述延时线装置。
上述延时线装置包括底板、滑轨组件，其中，滑轨组件中包括滑块、反射镜、光栅尺组件以及电磁感应组件。泵浦光照射在反射镜上，可实现泵浦光的180°转折。当电磁感应组件接通电流后切割磁感应线圈产生动力推动滑块运动，设置在滑轨组件上的光栅尺组件采集滑块运动时的位移信息。滑块运动会带动设置在滑块的反射镜一起运动，改变泵浦光的光程，从而产生泵浦光与探测光之间的延时。延时线装置采用电磁感应组件提供驱动滑块运动的动力，可实现快速扫描，而且采用光栅尺组件来对滑块运动时的位移信息进行采集，相对于步进电机测量位移，光栅尺组件具有精度更高、稳定性更好、响应速度更快、抗干扰能力更强的优势。同时，延时线装置，采用模块集成的组装方式，使其结构紧凑、节省了空间，利于结构小型化。
附图说明
图1为一实施例种延时线装置的结构示意图；
图2为一实施例滑轨组件的结构示意图；
图3为一实施例底板的结构示意图；
图4为一实施例太赫兹时域光谱仪系统。
具体实施方式
为了便于理解本发明，下面将参照相关附图对发明进行更全面的描述。附图中给出了发明的较佳实施例。但是，本发明可以以许多不同的形式来实现，并不限于本文所描述的实施例。相反地，提供这些实施例的目的是使对本发明的公开内容的理解更加透彻全面。
除非另有定义，本文所使用的所有的技术和科学术语与属于本发明的技术领域的技术人员通常理解的含义相同。本文中在发明的说明书中所使用的术语只是为了描述具体的实施例的目的，不是旨在限制本发明。本文所使用的术语“和/或”包括一个或多个相关的所列项目的任意的和所有的组合。
如图1所示的为一实施例种延时线装置的结构示意图，延时线装置10设置在泵浦光的光路中，用于调节泵浦光与探测光时间信号的延时。延时线装置10包括底板110，滑轨组件120，其中，滑轨组件120中包括滑块121、光栅尺组件130、反射镜140以及电磁感应组件150。泵浦光照射在反射镜140上，可实现泵浦光的180°转折。当电磁感应组件150接通电流后切割磁感应线圈产生动力推动滑块121运动，设置在滑轨组件120上的光栅尺组件130采集滑块121运动时的位移信息。滑块121运动会带动设置在滑块121的反射镜140一起运动，改变泵浦光的光程，从而产生泵浦光与探测光之间的延时；滑块121在空
间上每移动1微米，泵浦光与探测光在时间上就对应6.67飞秒的延时，即Δτ＝[(1+1)*10-6(m/s)]/[3*108(m/s)]＝6.67*10-15(s)。
延时线装置10采用电磁感应组件150提供驱动滑块121运动的动力，可实现快速扫描，而且采用光栅尺组件130来对滑块121运动时的位移信息进行采集，相对于步进电机测量位移，光栅尺组件130具有精度更高、稳定性更好、响应速度更快、抗干扰能力更强的优势。同时，延时线装置10，采用模块集成的组装方式，使其结构紧凑、节省了空间，利于结构小型化。
底板110用于承载滑轨组件120，滑轨组件120通过设置在底板110上的安装孔，使底板110与滑轨组件120固定连接，若设置在滑轨组件120上的反射镜140或光栅尺组件130等出现异常或故障时，是需要将底板110拆卸，方便维护。
如图2所示的为滑轨组件120的结构示意图，滑轨组件120还包括滑轨底 座123，滑轨底座123固定在底板110上；滑轨底座123上设有凹槽1231，滑块121设置在凹槽1231中。当电磁感应组件150提供动力推动滑块121时，其滑块121沿着凹槽1231运动。
光栅尺组件130，光栅尺组件130设置在滑轨组件120上，用于采集滑块121运动时的位移信息。其中，光栅尺组件130包括标尺光栅、光栅读数头和固定块。
标尺光栅固定在滑块121的上表面，用于测量滑块121运动时的位移信息。在本实施例中，标尺光栅嵌在滑块121中，使标尺光栅的上表面与滑块121的上表面位于同一水平面上。在本实施例中，标尺光栅为钢带栅尺，精度高。光栅读数头，对应设置在与标尺光栅中间位置的上方，且与标尺光栅平行等距设置，用于配合标尺光栅采集滑块121运动时的位移信息。
光栅读数头与标尺光栅的间距为2.4毫米～2.6毫米。在本实施例中，光栅读数头与标尺光栅的间距为2.5毫米，在此间距，其光栅读数头采集标尺光栅数据的信号最强、稳定性好、响应速度快、抗干扰能力强。
固定块，固定块的两端分别与底板110、光栅读数头固定连接，用于将光栅读数头固定在底板110上。在本实施例中，固定块为轻质的铝块，可以减小延时线装置10的整体质量。固定块垂直固定在底板110上，且固定块与光栅读数头通过紧固件固定连接，呈L型，从而保证光栅读数头与标尺光栅平行设置，且光栅读数头相对底板110静止。当滑块121运动时，就是带动设置在滑块121上的标尺光栅运动，其光栅读数头通过固定块相对与底板110静止，也即，滑块121运动时，标尺光栅也相对底板110运动，而且光栅读数头相对底板110静止，也即，光栅尺组件130可以采集滑块121运动时的位移信息。
在一实施例中，反射镜140为后向反射镜，后向反射镜是由三块反射镜两两垂直粘合在一起形成的。通过设置一个后向反射镜，就可以实现泵浦光的180°反转。在其他实施例中，反射镜140还可以为一组对称反射镜140，同时设置两片对称的反射镜，也可以实现泵浦光的180°反转。
电磁感应组件150，电磁组件包括感应线圈151，感应线圈151与滑块121的第二端抵接，电磁感应组件150用于提供动力推动滑块121运动。其中，电 磁感应组件150包括感应线圈151、磁铁153和磁铁支撑座155。感应线圈151，用于接通电流后切割磁感应线产生磁场，感应线圈151嵌套在磁铁153内，铁磁产生稳定的磁场与感应线圈151通电后产生的磁场相互作用，推动滑块121运动。磁铁支撑座155，与磁铁153固定连接，支撑磁铁153，使磁铁153与感应线圈151同轴设置，也即，是磁铁153的中心高度与感应线圈151的中心高度相同。同轴设置，电磁感应组件150通电后，产生的推动力在水平方向。磁铁支撑座155也是轻质的铝制材质。
延时线装置10还包括基板160和垫高板170，底板110、磁铁支撑座155均设置在基板160上。将底板110和磁铁支撑座155固定在基板160上，使其成为一个整体，当改变适用环境使，不需要对延时线装置10校准，便于操作。
延时线装置10还包括垫高板170，垫高板170设置在基板160与底板110相对的一侧，垫高板170用于调节延时装置的高度。当需要进行延迟的泵浦光和探测光所在的系统发生变化时，只需改变垫高板170的厚度而不必调整延时线装置10的其他部件就可以适应相应的变化，适应性强，可广泛应用于不同的延迟系统中。
在一实施例中，底板110上设有多个滑槽111，参考图3，用于容置紧固件，使底板110与基板160能够相对运动。其中，滑槽111的数量为4个，且分别设置在底板110的四角处，其滑槽111的数量、位置并不限于此，可根据实际需要设定。当容置在滑槽111中的紧固件锁紧时，底板110与基板160固定连接。若在特殊的应用场景中，其滑块121的运动位移量大于本装置中的设定量时，可将容置在滑槽111中的紧固件稍微松开，使底板110能够相对基板160运动，延长滑块121的位移量，但不用重新设置在滑轨组件120上的器件使其应用场景广泛，效率高。
延时线装置10还包括固定部180，固定部180与垫高板170连接，用于将延时线装置10固定在工作平台上。在本实施例中，该固定部180包括多个固定脚，设置在垫高板170的两端。在其他实施例中，其固定部180还可以为为了保证延时线装置10水平和稳定的多个螺旋脚，为了适应不同的工作平台，可以通过调节各个螺旋脚的高度，使延时线装置10保持水平和稳定。
此外，还提供一种太赫兹时域光谱仪系统，参考图4，太赫兹时域光谱仪系统包括飞秒脉冲激光器、分束片、延时线装置10、太赫兹辐射装置和太赫兹探测装置。其中，飞秒脉冲激光器用于辐射飞秒激光。分束片用于将所述飞秒激光分为泵浦光和探测光。延时线装置10设置在所述泵浦光所在的光路，于调节泵浦光与探测光时间信号的延时。太赫兹辐射装置设置在所述泵浦光所在的光路，用于产生太赫兹辐射。太赫兹探测装置用于探测从所述太赫兹辐射装置输出的太赫兹脉冲信号。
具体的，飞秒脉冲激光器辐射出飞秒激光脉冲被分束片分为二束，一束作为泵浦光，一束作为探测光。泵浦光经过延时线装置10产生可调的时间延时(相比于探测光)后进入太赫兹辐射装置，产生时间尺度在皮秒(10-12s)量级的太赫兹脉冲，太赫兹脉冲经过样品后与时间尺度在飞秒(10-15s)量级的探测光同步进入太赫兹探测装置。由于探测光的时间尺度相对于太赫兹脉冲来说非常短，可以作为一个点脉冲，且延时线装置10每在空间上移动1微米在时间上就对应6.67飞秒(6.67*10-15)的延时。通过延时线装置10在空间上扫描一段距离，太赫兹探测装置就可以逐点取样太赫兹信号从而实现记录整个太赫兹波形。同时设置上述延时线装置10可以提供一种高精度的太赫兹时域光谱仪系统。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (9)

  1. 一种延时线装置，用于调节泵浦光与探测光时间信号的延时，其特征在于，包括：
    底板，用于承重；
    滑轨组件，所述滑轨组件安装在所述底板上，所述滑轨组件中包括滑块，所述滑块能够相对所述底座运动；
    反射镜，所述反射镜固定在所述滑块的第一端，用于实现所述泵浦光的180度反转；其中，所述反射镜为后向反射镜；
    光栅尺组件，所述光栅尺组件设置在所述滑轨组件上，用于采集所述滑块运动时的位移信息；
    电磁感应组件，所述电磁组件包括感应线圈，所述感应线圈与所述滑块的第二端抵接，所述电磁感应组件用于提供动力推动所述滑块运动。
  2. 根据权利要求1所述的延时线装置，其特征在于，所述滑轨组件还包括滑轨底座，所述滑轨底座固定在所述底板上；所述滑轨底座上设有凹槽，所述滑块设置在所述凹槽中。
  3. 根据权利要求1所述的延时线装置，其特征在于，所述光栅尺组件包括：
    标尺光栅，固定在所述滑块的上表面，用于测量所述滑块运动时的位移信息；
    光栅读数头，对应设置在所述标尺光栅上方，且与所述标尺光栅平行等距设置，用于配合所述标尺光栅采集所述滑块运动时的位移信息；
    固定块，所述固定块的两端分别与所述底板、光栅读数头固定连接，用于将所述光栅读数头固定在所述底板上。
  4. 根据权利要求3所述的延时线装置，其特征在于，所述光栅读数头与所述标尺光栅的间距为2.4毫米～2.6毫米。
  5. 根据权利要求1所述的延时线装置，其特征在于，所述电磁感应组件包括：
    感应线圈，用于接通电流后切割磁感应线产生动力推动所述滑块运动；
    磁铁，所述感应线圈嵌套在所述磁铁内，所述铁磁用于产生稳定的磁场；
    磁铁支撑座，与所述磁铁固定连接，用于将支撑所述磁铁，使所述磁铁与所述感应线圈同轴设置。
  6. 根据权利要求5所述的延时线装置，其特征在于，所述延时线装置还包括基板和垫高板，所述底板、磁铁支撑座均设置在所述基板上，所述垫高板设置在所述基板与所述底板相对的一侧，所述垫高板用于调节所述延时装置的高度。
  7. 根据权利要求6所述的延时线装置，其特征在于，所述底板上设有多个滑槽，用于容置紧固件，使所述底板与所述基板能够相对运动。
  8. 根据权利要求6所述的延时线装置，其特征在于，所述延时线装置还包括固定部，所述固定部与所述垫高板连接，用于将所述延时线装置固定在工作平台上。
  9. 一种太赫兹时域光谱仪系统，包括：
    飞秒脉冲激光器，用于辐射飞秒激光；
    分束片，用于将所述飞秒激光分为泵浦光和探测光；
    太赫兹辐射装置，设置在所述泵浦光所在的光路，用于产生太赫兹辐射；
    太赫兹探测装置，用于探测从所述太赫兹辐射装置输出的太赫兹脉冲信号，其特征在于，还包括如权利要求1～8任一项用于调节泵浦光与探测光时间信号的延时的所述延时线装置。
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