WO2018045734A1

WO2018045734A1 - Reflective mirror device capable of horizontal circumference adjustment and pitch adjustment

Info

Publication number: WO2018045734A1
Application number: PCT/CN2017/075820
Authority: WO
Inventors: 黄庭总; 刘龙为; 张鹏
Original assignee: 深圳市中图仪器股份有限公司
Priority date: 2016-09-06
Filing date: 2017-03-07
Publication date: 2018-03-15
Also published as: CN205826955U

Abstract

A reflective mirror device capable of horizontal circumference adjustment and pitch adjustment, comprising: a plane mirror, and a horizontal circumference adjustment mechanism connected with the plane mirror; the horizontal circumference adjustment mechanism comprises: a base, a bearing, a turntable, a horizontal knob and a first connecting screw; the bearing, turntable, horizontal knob and first connecting screw are coaxially mounted; the bearing is disposed on the base, the turntable is disposed on the bearing, the horizontal knob is disposed on the turntable, and the plane mirror is disposed on the horizontal knob; the turntable and the horizontal knob are connected by means of the first connecting screw. The beneficial effects of the device are as follows: on the one hand, the horizontal knob can be used to drive the plane mirror to make horizontal circumference adjustments; on the other hand, by using a first steel ball as a rotation axis, the plane mirror can be driven by a pitch knob to make pitch adjustments; the mirror device has a simple structure, compact size and small volume, and offers flexible and convenient adjustment of optical paths.

Description

[Name of invention made by ISA according to Rule 37.2] Mirror device capable of horizontal circumferential adjustment and pitch adjustment

Technical field

The present invention relates to a mirror device, and more particularly to a mirror device that can be adjusted horizontally and pitched.

Background technique

As with electronic levels, the use of a laser interferometer to detect flatness is usually done by the grid method or the diagonal method. Both methods require a steering mirror to reflect the beam from the laser to the angle interferometer. This steering mirror needs to be able to rotate in the horizontal direction and to be tilted. Therefore, the steering mirror device requires two adjustment mechanisms integrated together.

The traditional pitching mechanism has a complicated structure and a relatively large volume. The lens group of the laser interferometer is relatively small in size. If the steering mirror adjustment mechanism is bulky, it becomes uncoordinated and is not convenient to carry.

Summary of the invention

In order to solve the problems in the prior art, the present invention provides a mirror device that is small in size and simple in structure and capable of horizontal circumferential adjustment and pitch adjustment.

The invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment, comprising a plane mirror and a horizontal circumferential adjustment mechanism connected to the plane mirror, the horizontal circumferential adjustment mechanism comprising a base, a bearing, a turntable, a horizontal knob and a first Connecting a screw, the bearing, the turntable, the horizontal knob and the first connecting screw are coaxially mounted, the bearing is disposed on the base, the turntable is disposed on the bearing, and the horizontal knob is disposed on the turntable The plane mirror is disposed on the horizontal knob, and the turntable and the horizontal knob are connected by the first connecting screw, and an elastic mechanism is connected between the first connecting screw and the turntable, and the turntable, A pitch adjustment mechanism is provided between the horizontal knobs, the pitch adjustment mechanism includes a rotating portion and an adjustment portion respectively located at two sides of the turntable, the rotating portion including a first steel ball and a second connecting screw, the turntable The upper end surface of the horizontal knob is provided with a lower taper hole, and the first steel ball is disposed in the upper taper hole and the lower taper hole, The two connecting screws respectively connect the turntable and the horizontal knob, and the adjusting portion includes a pitch knob and a second steel ball, the pitch knob is screwed to the turntable, and the second steel ball is clamped on the tilt knob, Between the horizontal knobs.

As a further improvement of the present invention, the first steel ball has two, the first steel ball respectively corresponds to the upper cone hole and the lower cone hole, and the axis of the second connection screw is located at two places. At a midpoint between the first steel balls, the axis of the second connecting screw is spaced apart from the rotating shaft of the pitch knob by 180 degrees, and the second connecting screw is flexibly connected with the horizontal knob. Description An O-ring is disposed between the second connecting screw and the turntable.

As a further improvement of the present invention, the elastic mechanism includes a gasket, a spring and a spring seat, the spring seat is disposed at a head of the first connecting screw, and the turntable is provided with a mounting groove, the gasket Provided at a groove bottom of the mounting groove, the first connecting screw is flexibly connected to the horizontal knob through a groove bottom of the mounting groove, and the spring is coaxially mounted with the first connecting screw. Both ends of the spring are respectively connected to the spacer and the spring seat.

As a further improvement of the present invention, a first circlip is disposed between the bearing and the turntable.

As a further improvement of the present invention, a second retaining spring is disposed between the bearing and the base.

As a further improvement of the present invention, the base is provided with a mounting through hole, the bearing is disposed in the mounting through hole, and a bottom plate is connected to the bottom of the mounting through hole.

As a further improvement of the invention, the cover is mounted to the base by a locking screw.

As a further improvement of the present invention, an end plate pressing plate is disposed between the cover plate and the second retaining spring.

As a further improvement of the present invention, the end platen is provided with a claw projection.

The invention has the beneficial effects that: by the above solution, on one hand, the horizontal mirror can be used to drive the plane mirror to perform horizontal circumferential adjustment; on the other hand, the first steel ball can be used as the rotating shaft, and the tilting knob can be used to drive the plane mirror for pitch adjustment, and the structure is simple. Compact, small size, flexible and convenient optical path adjustment.

DRAWINGS

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a mirror device capable of horizontal circumferential adjustment and pitch adjustment according to the present invention.

2 is an exploded perspective view of a mirror device capable of horizontal circumferential adjustment and pitch adjustment according to the present invention.

3 is a schematic view of an end platen of a mirror device capable of horizontal circumferential adjustment and pitch adjustment according to the present invention.

detailed description

The invention will now be further described with reference to the drawings and specific embodiments.

1 to 3 are: plane mirror 1; horizontal knob 2; first steel ball 3; pitch knob 4; turntable 5; O-ring 6; second connecting screw 7; spacer 8; spring 9; Spring seat 10; first connecting screw 11; first retaining spring 12; bearing 13; second retaining spring 14; base 15; end platen 16; cover plate 17; locking screw 18; claw projection 19; second steel Ball 20.

As shown in FIG. 1 to FIG. 3, a mirror device capable of horizontal circumferential adjustment and pitch adjustment includes a plane mirror 1 and a horizontal circumferential adjustment mechanism connected to the plane mirror 1, the horizontal circumferential adjustment mechanism including a base 15, a bearing 13. Turntable 5, horizontal knob 2 and first connecting screw 11, The bearing 13, the turntable 5, the horizontal knob 2 and the first connecting screw 11 are coaxially mounted, the bearing 13 is disposed on the base 15, the turntable 5 is disposed on the bearing 13, and the horizontal knob 2 The plane mirror 1 is disposed on the horizontal knob 2, and the turntable 5 and the horizontal knob 2 are connected by the first connecting screw 11, the first connecting screw 11 and the An elastic mechanism is connected between the turntable 5, and the turntable 5 is engaged with the bearing 13. The first steel ball 3, the second connecting screw 7 and the first connecting screw 11 flexibly connect the horizontal knob 2 and the turntable 5 when the horizontal knob 2 is toggled. At this time, the plane mirror 1 can follow the turntable 5 to rotate in the horizontal direction.

As shown in FIG. 1 to FIG. 3, a pitch adjustment mechanism is provided between the turntable 5 and the horizontal knob 2, and the pitch adjustment mechanism includes a rotating portion and an adjustment portion respectively located at two sides of the turntable 5, and the rotating portion The first steel ball 3 and the second connecting screw 7 are included, the upper end surface of the turntable 5 is provided with an upper tapered hole, and the lower end surface of the horizontal knob 2 is provided with a lower tapered hole, and the first steel ball 3 is disposed at the The second connecting screw 7 is connected to the turntable 5 and the horizontal knob 2, and the adjusting portion includes a pitch knob 4 and a second steel ball 20, and the tilt knob 4 and the The turret 5 is screwed, and the second steel ball 20 is interposed between the pitch knob 4 and the horizontal knob 2 such that the lower end surface of the horizontal knob 2 is always in contact with the second steel ball 20 on the pitch knob 4. When the tilt knob 4 is rotated up and down, the plane mirror 1 follows the level knob 2 to perform a pitching motion.

As shown in FIG. 1 to FIG. 3, there are two first steel balls 3, and the first steel balls 3 are respectively corresponding to the upper and lower tapered holes, and the second connecting screws 7 are respectively The axis is located at a midpoint between the two first steel balls 3, the axis of the second connecting screw 7 is spaced apart from the axis of rotation of the pitch knob 4 by 180 degrees, the second connecting screw 7 and the A flexible connection is provided between the horizontal knobs 2, an O-ring 6 is disposed between the second connecting screw 7 and the turntable 5, and the horizontal knob 2 is rotated by two first steel balls 3, and the pitch knob 4 is Pushing the relative turntable 5 for the up and down pitch motion, and then driving the plane mirror 1 for the up and down pitch motion.

As shown in FIGS. 1 to 3, the elastic mechanism includes a spacer 8, a spring 9 and a spring seat 10, and the spring seat 10 is disposed at a head of the first connecting screw 11, and the turntable 5 is provided a groove is disposed, the gasket 8 is disposed at a groove bottom of the mounting groove, and the first connecting screw 11 is flexibly connected to the horizontal knob 2 through a groove bottom of the mounting groove, the spring 9 The first connecting screw 11 is mounted coaxially, and the two ends of the spring 9 are respectively connected to the spacer 8 and the spring seat 10.

As shown in FIGS. 1 to 3, a first circlip 12 is disposed between the bearing 13 and the turntable 5.

As shown in FIGS. 1 to 3, a second snap spring 14 is disposed between the bearing 13 and the base 15.

As shown in FIG. 1 to FIG. 3, the base 15 is provided with a mounting through hole, the bearing 13 is disposed in the mounting through hole, and a cover plate 17 is connected to the bottom of the mounting through hole.

As shown in FIGS. 1 to 3, the cover plate 17 is attached to the base 15 by a locking screw 18.

As shown in FIG. 1 to FIG. 3, an end plate pressing plate 16 is disposed between the cover plate 17 and the second retaining spring 14.

As shown in FIGS. 1 to 3, the end platen 16 is provided with a claw projection 19.

As shown in Fig. 1 to Fig. 3, the adjustment of the optical path requires that the pitch adjustment and the horizontal adjustment of the horizontal direction can be performed separately, and do not interfere with each other, that is, when the pitch is adjusted, the horizontal position needs to remain stationary, and the horizontal direction adjusts the pitch angle. Need to stay still. After adjusting the light path, the position and posture of the plane mirror 1 need to be kept still until a measurement link is completed to ensure the stability of the light path. Therefore, the horizontal adjustment of the circumference is not too flexible and requires a certain amount of damping. To this end, an end platen 16 is disposed at the end of the turntable 5, and the end platen 16 is made of a non-metallic material, one end of which is a claw projection 19 (see FIG. 3), and the intermediate portion of the claw projection 19 is pressed against the turntable 5. On one end, an elastic contact is formed. When the dialing horizontal knob 2 is rotated circumferentially, the frictional force between the end platen 16 and the turntable 5 acts as a damping. The magnitude of the damping is related to the amount of elastic deformation of the claw projection 19 of the end platen 16, and the greater the amount of deformation, the greater the damping.

The invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment, which is characterized by:

1) A pitch adjustment mode in which two first steel balls 3 are used as a pivot point.

2) Using a second connecting screw 7 and an O-ring 6 to flexibly connect the turntable 5 and the horizontal knob 2, and sandwich the two first steel balls 3 between the turntable 5 and the horizontal knob 2.

3) The manner in which the pawl lugs 19 are used to dampen the turntable 5 at the ends.

4) The end face plate 16 has a claw projection 19 at one end; the middle portion of the back surface of the claw projection 19 is also hollowed out, and when the middle portion of the claw projection 19 is pressed, the claw projection 19 has a certain degree. Elastic deformation.

The invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment. On the one hand, the horizontal mirror 2 can be used to drive the plane mirror 1 to perform horizontal circumferential adjustment; on the other hand, the first steel ball 3 can be used as a rotation axis. The tilt knob 4 drives the plane mirror 1 to perform pitch adjustment, and has a simple and compact structure, small volume, and flexible and convenient optical path adjustment.

The invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment, and can also be used in other optical industries similar to this, such as white light interferometer, imager, laser tracker and the like.

The above is a further detailed description of the present invention in connection with the specific preferred embodiments, and the specific embodiments of the present invention are not limited to the description. It will be apparent to those skilled in the art to which the present invention pertains, without departing from the inventive concept. Simple deduction or replacement should be considered as belonging to the scope of protection of the present invention.

Claims

A mirror device capable of horizontal circumferential adjustment and pitch adjustment, comprising: a plane mirror and a horizontal circumferential adjustment mechanism connected to the plane mirror, the horizontal circumferential adjustment mechanism comprising a base, a bearing, a turntable, a horizontal knob and the first Connecting a screw, the bearing, the turntable, the horizontal knob and the first connecting screw are coaxially mounted, the bearing is disposed on the base, the turntable is disposed on the bearing, and the horizontal knob is disposed on the turntable The plane mirror is disposed on the horizontal knob, and the turntable and the horizontal knob are connected by the first connecting screw, and an elastic mechanism is connected between the first connecting screw and the turntable, and the turntable, A pitch adjustment mechanism is provided between the horizontal knobs, the pitch adjustment mechanism includes a rotating portion and an adjustment portion respectively located at two sides of the turntable, the rotating portion including a first steel ball and a second connecting screw, the turntable The upper end surface of the horizontal knob is provided with a lower taper hole, and the first steel ball is disposed in the upper taper hole and the lower taper hole, The two connecting screws respectively connect the turntable and the horizontal knob, and the adjusting portion includes a pitch knob and a second steel ball, the pitch knob is screwed to the turntable, and the second steel ball is clamped on the tilt knob, Between the horizontal knobs.
The mirror device of claim 1 , wherein the first steel ball has two, the first steel ball and the upper cone hole and the lower cone hole respectively. One-to-one correspondence, an axis of the second connecting screw is located at a midpoint between the two first steel balls, and an axis of the second connecting screw is spaced apart from a rotating axis of the pitch knob by 180 degrees. A flexible connection is formed between the second connecting screw and the horizontal knob, and an O-ring is disposed between the second connecting screw and the turntable.
A mirror apparatus according to claim 1, wherein said elastic mechanism comprises a spacer, a spring and a spring seat, said spring seat being disposed at a head of said first connecting screw The turret is provided with a mounting groove, the spacer is disposed at a groove bottom of the mounting groove, and the first connecting screw is flexibly connected to the horizontal knob through a groove bottom of the mounting groove The spring is mounted coaxially with the first connecting screw, and two ends of the spring are respectively connected to the spacer and the spring seat.
The mirror device according to claim 1, wherein a first circlip is disposed between the bearing and the turntable.
A mirror device capable of horizontal circumferential adjustment and pitch adjustment according to claim 4, The utility model is characterized in that a second circlip spring is arranged between the bearing and the base.
The mirror device according to claim 5, wherein the base is provided with a mounting through hole, and the bearing is disposed in the mounting through hole, the mounting through hole The bottom is connected to the cover.
A mirror apparatus according to claim 6, wherein said cover is mounted to said base by a locking screw.
The mirror device of claim 6, wherein the cover plate and the second retaining spring are provided with an end plate.
The mirror device according to claim 8, wherein the end plate is provided with a claw projection.