WO2018045734A1 - Dispositif de miroir réfléchissant capable d'effectuer un réglage horizontal de circonférence et un réglage de pas - Google Patents

Dispositif de miroir réfléchissant capable d'effectuer un réglage horizontal de circonférence et un réglage de pas Download PDF

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Publication number
WO2018045734A1
WO2018045734A1 PCT/CN2017/075820 CN2017075820W WO2018045734A1 WO 2018045734 A1 WO2018045734 A1 WO 2018045734A1 CN 2017075820 W CN2017075820 W CN 2017075820W WO 2018045734 A1 WO2018045734 A1 WO 2018045734A1
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WO
WIPO (PCT)
Prior art keywords
horizontal
turntable
knob
disposed
connecting screw
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Application number
PCT/CN2017/075820
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English (en)
Chinese (zh)
Inventor
黄庭总
刘龙为
张鹏
Original Assignee
深圳市中图仪器股份有限公司
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Filing date
Publication date
Application filed by 深圳市中图仪器股份有限公司 filed Critical 深圳市中图仪器股份有限公司
Publication of WO2018045734A1 publication Critical patent/WO2018045734A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light

Definitions

  • the present invention relates to a mirror device, and more particularly to a mirror device that can be adjusted horizontally and pitched.
  • the use of a laser interferometer to detect flatness is usually done by the grid method or the diagonal method. Both methods require a steering mirror to reflect the beam from the laser to the angle interferometer. This steering mirror needs to be able to rotate in the horizontal direction and to be tilted. Therefore, the steering mirror device requires two adjustment mechanisms integrated together.
  • the traditional pitching mechanism has a complicated structure and a relatively large volume.
  • the lens group of the laser interferometer is relatively small in size. If the steering mirror adjustment mechanism is bulky, it becomes uncoordinated and is not convenient to carry.
  • the present invention provides a mirror device that is small in size and simple in structure and capable of horizontal circumferential adjustment and pitch adjustment.
  • the invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment, comprising a plane mirror and a horizontal circumferential adjustment mechanism connected to the plane mirror, the horizontal circumferential adjustment mechanism comprising a base, a bearing, a turntable, a horizontal knob and a first Connecting a screw, the bearing, the turntable, the horizontal knob and the first connecting screw are coaxially mounted, the bearing is disposed on the base, the turntable is disposed on the bearing, and the horizontal knob is disposed on the turntable
  • the plane mirror is disposed on the horizontal knob, and the turntable and the horizontal knob are connected by the first connecting screw, and an elastic mechanism is connected between the first connecting screw and the turntable, and the turntable,
  • a pitch adjustment mechanism is provided between the horizontal knobs, the pitch adjustment mechanism includes a rotating portion and an adjustment portion respectively located at two sides of the turntable, the rotating portion including a first steel ball and a second connecting screw, the turntable
  • the upper end surface of the horizontal knob is provided with a lower taper hole, and the
  • the first steel ball has two, the first steel ball respectively corresponds to the upper cone hole and the lower cone hole, and the axis of the second connection screw is located at two places. At a midpoint between the first steel balls, the axis of the second connecting screw is spaced apart from the rotating shaft of the pitch knob by 180 degrees, and the second connecting screw is flexibly connected with the horizontal knob. Description An O-ring is disposed between the second connecting screw and the turntable.
  • the elastic mechanism includes a gasket, a spring and a spring seat
  • the spring seat is disposed at a head of the first connecting screw
  • the turntable is provided with a mounting groove
  • the gasket Provided at a groove bottom of the mounting groove
  • the first connecting screw is flexibly connected to the horizontal knob through a groove bottom of the mounting groove
  • the spring is coaxially mounted with the first connecting screw. Both ends of the spring are respectively connected to the spacer and the spring seat.
  • a first circlip is disposed between the bearing and the turntable.
  • a second retaining spring is disposed between the bearing and the base.
  • the base is provided with a mounting through hole
  • the bearing is disposed in the mounting through hole
  • a bottom plate is connected to the bottom of the mounting through hole.
  • the cover is mounted to the base by a locking screw.
  • an end plate pressing plate is disposed between the cover plate and the second retaining spring.
  • the end platen is provided with a claw projection.
  • the invention has the beneficial effects that: by the above solution, on one hand, the horizontal mirror can be used to drive the plane mirror to perform horizontal circumferential adjustment; on the other hand, the first steel ball can be used as the rotating shaft, and the tilting knob can be used to drive the plane mirror for pitch adjustment, and the structure is simple. Compact, small size, flexible and convenient optical path adjustment.
  • Fig. 1 is a schematic cross-sectional view showing a mirror device capable of horizontal circumferential adjustment and pitch adjustment according to the present invention.
  • FIG. 2 is an exploded perspective view of a mirror device capable of horizontal circumferential adjustment and pitch adjustment according to the present invention.
  • FIG 3 is a schematic view of an end platen of a mirror device capable of horizontal circumferential adjustment and pitch adjustment according to the present invention.
  • 1 to 3 are: plane mirror 1; horizontal knob 2; first steel ball 3; pitch knob 4; turntable 5; O-ring 6; second connecting screw 7; spacer 8; spring 9; Spring seat 10; first connecting screw 11; first retaining spring 12; bearing 13; second retaining spring 14; base 15; end platen 16; cover plate 17; locking screw 18; claw projection 19; second steel Ball 20.
  • a mirror device capable of horizontal circumferential adjustment and pitch adjustment includes a plane mirror 1 and a horizontal circumferential adjustment mechanism connected to the plane mirror 1, the horizontal circumferential adjustment mechanism including a base 15, a bearing 13.
  • the plane mirror 1 is disposed on the horizontal knob 2, and the turntable 5 and the horizontal knob 2 are connected by the first connecting screw 11, the first connecting screw 11 and the An elastic mechanism is connected between the turntable 5, and the turntable 5 is engaged with the bearing 13.
  • the first steel ball 3, the second connecting screw 7 and the first connecting screw 11 flexibly connect the horizontal knob 2 and the turntable 5 when the horizontal knob 2 is toggled. At this time, the plane mirror 1 can follow the turntable 5 to rotate in the horizontal direction.
  • a pitch adjustment mechanism is provided between the turntable 5 and the horizontal knob 2, and the pitch adjustment mechanism includes a rotating portion and an adjustment portion respectively located at two sides of the turntable 5, and the rotating portion
  • the first steel ball 3 and the second connecting screw 7 are included, the upper end surface of the turntable 5 is provided with an upper tapered hole, and the lower end surface of the horizontal knob 2 is provided with a lower tapered hole, and the first steel ball 3 is disposed at the
  • the second connecting screw 7 is connected to the turntable 5 and the horizontal knob 2, and the adjusting portion includes a pitch knob 4 and a second steel ball 20, and the tilt knob 4 and the The turret 5 is screwed, and the second steel ball 20 is interposed between the pitch knob 4 and the horizontal knob 2 such that the lower end surface of the horizontal knob 2 is always in contact with the second steel ball 20 on the pitch knob 4.
  • FIG. 1 to FIG. 3 there are two first steel balls 3, and the first steel balls 3 are respectively corresponding to the upper and lower tapered holes, and the second connecting screws 7 are respectively
  • the axis is located at a midpoint between the two first steel balls 3, the axis of the second connecting screw 7 is spaced apart from the axis of rotation of the pitch knob 4 by 180 degrees, the second connecting screw 7 and the A flexible connection is provided between the horizontal knobs 2, an O-ring 6 is disposed between the second connecting screw 7 and the turntable 5, and the horizontal knob 2 is rotated by two first steel balls 3, and the pitch knob 4 is Pushing the relative turntable 5 for the up and down pitch motion, and then driving the plane mirror 1 for the up and down pitch motion.
  • the elastic mechanism includes a spacer 8, a spring 9 and a spring seat 10, and the spring seat 10 is disposed at a head of the first connecting screw 11, and the turntable 5 is provided a groove is disposed, the gasket 8 is disposed at a groove bottom of the mounting groove, and the first connecting screw 11 is flexibly connected to the horizontal knob 2 through a groove bottom of the mounting groove, the spring 9
  • the first connecting screw 11 is mounted coaxially, and the two ends of the spring 9 are respectively connected to the spacer 8 and the spring seat 10.
  • a first circlip 12 is disposed between the bearing 13 and the turntable 5.
  • a second snap spring 14 is disposed between the bearing 13 and the base 15.
  • the base 15 is provided with a mounting through hole
  • the bearing 13 is disposed in the mounting through hole
  • a cover plate 17 is connected to the bottom of the mounting through hole.
  • the cover plate 17 is attached to the base 15 by a locking screw 18.
  • an end plate pressing plate 16 is disposed between the cover plate 17 and the second retaining spring 14.
  • the end platen 16 is provided with a claw projection 19.
  • the adjustment of the optical path requires that the pitch adjustment and the horizontal adjustment of the horizontal direction can be performed separately, and do not interfere with each other, that is, when the pitch is adjusted, the horizontal position needs to remain stationary, and the horizontal direction adjusts the pitch angle. Need to stay still.
  • the position and posture of the plane mirror 1 need to be kept still until a measurement link is completed to ensure the stability of the light path. Therefore, the horizontal adjustment of the circumference is not too flexible and requires a certain amount of damping.
  • an end platen 16 is disposed at the end of the turntable 5, and the end platen 16 is made of a non-metallic material, one end of which is a claw projection 19 (see FIG.
  • the invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment, which is characterized by:
  • the end face plate 16 has a claw projection 19 at one end; the middle portion of the back surface of the claw projection 19 is also hollowed out, and when the middle portion of the claw projection 19 is pressed, the claw projection 19 has a certain degree. Elastic deformation.
  • the invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment.
  • the horizontal mirror 2 can be used to drive the plane mirror 1 to perform horizontal circumferential adjustment;
  • the first steel ball 3 can be used as a rotation axis.
  • the tilt knob 4 drives the plane mirror 1 to perform pitch adjustment, and has a simple and compact structure, small volume, and flexible and convenient optical path adjustment.
  • the invention provides a mirror device capable of horizontal circumferential adjustment and pitch adjustment, and can also be used in other optical industries similar to this, such as white light interferometer, imager, laser tracker and the like.

Abstract

La présente invention concerne un dispositif de miroir réfléchissant capable d'effectuer un réglage horizontal de circonférence et un réglage de pas, comprenant : un miroir plan, et un mécanisme de réglage horizontal de circonférence relié au miroir plan ; le mécanisme de réglage horizontal de circonférence comprend : une base, un palier, un plateau tournant, un bouton horizontal et une première vis de raccordement ; le palier, le plateau tournant, un bouton horizontal et une première vis de raccordement sont montés de manière coaxiale ; le palier est disposé sur la base, le plateau tournant est disposé sur le palier, le bouton horizontal est disposé sur le plateau tournant, et le miroir plan est disposé sur le bouton horizontal ; le plateau tournant et le bouton horizontal sont reliés au moyen de la première vis de liaison. Les effets bénéfiques du dispositif sont les suivants : d'une part, le bouton horizontal peut servir à entraîner le miroir plan pour effectuer des réglages horizontaux de circonférence ; d'autre part, en utilisant une première bille d'acier comme axe de rotation, le miroir plan peut être entraîné par un bouton de pas pour effectuer des réglages de pas ; le dispositif miroir a une structure simple, une taille compacte et un petit volume, et permet d'effectuer un réglage flexible et pratique de trajets optiques.
PCT/CN2017/075820 2016-09-06 2017-03-07 Dispositif de miroir réfléchissant capable d'effectuer un réglage horizontal de circonférence et un réglage de pas WO2018045734A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201621039012.6 2016-09-06
CN201621039012.6U CN205826955U (zh) 2016-09-06 2016-09-06 一种可以水平圆周调节及俯仰调节的反射镜装置

Publications (1)

Publication Number Publication Date
WO2018045734A1 true WO2018045734A1 (fr) 2018-03-15

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PCT/CN2017/075820 WO2018045734A1 (fr) 2016-09-06 2017-03-07 Dispositif de miroir réfléchissant capable d'effectuer un réglage horizontal de circonférence et un réglage de pas

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CN (1) CN205826955U (fr)
WO (1) WO2018045734A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN205826955U (zh) * 2016-09-06 2016-12-21 深圳市中图仪器科技有限公司 一种可以水平圆周调节及俯仰调节的反射镜装置
CN113534402A (zh) * 2021-07-13 2021-10-22 万灵帮桥医疗器械(广州)有限责任公司 反射镜调节装置

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4060314A (en) * 1976-06-28 1977-11-29 Rockwell International Corporation Two axes remote mirror mount
CN201654310U (zh) * 2010-02-26 2010-11-24 上海微电子装备有限公司 反射镜的调整机构
CN201876595U (zh) * 2010-11-19 2011-06-22 无锡荣兴科技有限公司 一种通用平面反射镜二维角度调整机构
CN102721412A (zh) * 2012-06-21 2012-10-10 宁波舜宇测绘科技有限公司 一种可微调旋转的万向节底座
CN202710830U (zh) * 2012-05-31 2013-01-30 中国科学院西安光学精密机械研究所 一种紧凑型万向调节折轴反射镜机构
CN202939352U (zh) * 2012-11-28 2013-05-15 北京镭宝光电技术有限公司 一种高稳定性的光学调整架
CN203287603U (zh) * 2013-05-22 2013-11-13 上海微电子装备有限公司 一种反射镜球面调整装置
CN104319601A (zh) * 2014-11-12 2015-01-28 核工业理化工程研究院 真空环境下的光腔调整机构
CN204216395U (zh) * 2014-11-12 2015-03-18 核工业理化工程研究院 一种真空环境下的光腔调整机构
CN105467553A (zh) * 2015-12-12 2016-04-06 中国科学院西安光学精密机械研究所 一种用于圆周支撑大孔径反射镜的二维镜架
CN205826955U (zh) * 2016-09-06 2016-12-21 深圳市中图仪器科技有限公司 一种可以水平圆周调节及俯仰调节的反射镜装置

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4060314A (en) * 1976-06-28 1977-11-29 Rockwell International Corporation Two axes remote mirror mount
CN201654310U (zh) * 2010-02-26 2010-11-24 上海微电子装备有限公司 反射镜的调整机构
CN201876595U (zh) * 2010-11-19 2011-06-22 无锡荣兴科技有限公司 一种通用平面反射镜二维角度调整机构
CN202710830U (zh) * 2012-05-31 2013-01-30 中国科学院西安光学精密机械研究所 一种紧凑型万向调节折轴反射镜机构
CN102721412A (zh) * 2012-06-21 2012-10-10 宁波舜宇测绘科技有限公司 一种可微调旋转的万向节底座
CN202939352U (zh) * 2012-11-28 2013-05-15 北京镭宝光电技术有限公司 一种高稳定性的光学调整架
CN203287603U (zh) * 2013-05-22 2013-11-13 上海微电子装备有限公司 一种反射镜球面调整装置
CN104319601A (zh) * 2014-11-12 2015-01-28 核工业理化工程研究院 真空环境下的光腔调整机构
CN204216395U (zh) * 2014-11-12 2015-03-18 核工业理化工程研究院 一种真空环境下的光腔调整机构
CN105467553A (zh) * 2015-12-12 2016-04-06 中国科学院西安光学精密机械研究所 一种用于圆周支撑大孔径反射镜的二维镜架
CN205826955U (zh) * 2016-09-06 2016-12-21 深圳市中图仪器科技有限公司 一种可以水平圆周调节及俯仰调节的反射镜装置

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