CN201654310U - Adjusting mechanism of reflecting mirror - Google Patents

Adjusting mechanism of reflecting mirror Download PDF

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Publication number
CN201654310U
CN201654310U CN2010201202845U CN201020120284U CN201654310U CN 201654310 U CN201654310 U CN 201654310U CN 2010201202845 U CN2010201202845 U CN 2010201202845U CN 201020120284 U CN201020120284 U CN 201020120284U CN 201654310 U CN201654310 U CN 201654310U
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CN
China
Prior art keywords
adjusting
holder
adjusting mechanism
symmetry
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2010201202845U
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Chinese (zh)
Inventor
张春莲
徐兵
蔡巍
陈跃飞
王端秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Publication date
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Priority to CN2010201202845U priority Critical patent/CN201654310U/en
Application granted granted Critical
Publication of CN201654310U publication Critical patent/CN201654310U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model discloses an adjusting mechanism of a reflecting mirror, which comprises a fixed seat, a normal adjustable fixed part, a coarse adjusting part, and a fine adjusting part. The fixed seat contains the reflecting mirror; the normal adjustable fixed part fixes the fixed seat to a base part, forms a symmetric axis passing through the center of the fixed seat on the fixed seat, and leads the symmetric axis to move along the normal direction of the reflecting mirror; the coarse adjusting part is arranged along the symmetric axis, and adjusts the inclination angle corresponding to the symmetric axis for the fixed seat; the fine adjusting part is arranged along the symmetric axis, and adjusts the inclination angle corresponding to the symmetric axis for the fixed seat; the inclination-angle adjustment range of the coarse adjusting part is larger than that of the fine adjusting part. The adjusting mechanism of the reflecting mirror adopts adjustment of multi-points evenly distributed relative to the symmetric axis; through adjusting the position of coarse-adjusting bolts and micro-adjusting bolts at both sides as well as supporting points in normal direction of the reflecting mirror, the position of the reflecting mirror in light path can be adjusted. The advantages of the adjusting mechanism are as follows: the structure is simple, the adjusting efficiency is high, the optical spot is easy to control, and the mechanical structure can change along with the changing of the reflecting mirror and is not limited to space.

Description

The adjusting mechanism of catoptron
Technical field
The utility model relates to adjusting mechanism, relates in particular to the adjusting mechanism of catoptron normal direction.
Background technology
Catoptron is used for the optical path direction conversion of different angles in optical system.In order to make the direction outgoing of the light that incides on the catoptron, just need adjust the catoptron normal direction along system requirements.For fixing of reflector position, different demands and space bit are equipped with different installations and regulative mode.For the application that light beam is changed 90 degree directions with catoptron, the adjusting mechanism of normal direction comprises adjustment seat, microscope base, set screw and spheric washer etc. in the optical system at present, inserts a Heibei provincial opera screw is adjusted catoptron as the central pivot point of the catoptron anglec of rotation two-dimentional inclination angle at the center of normal direction upper adjusting seat.This structure needs certain space, can not be common in any light path.In addition, prior art also adopts in the plane the angle of uniform three the coarse adjustment screws of 120 degree, three micrometer adjusting screws adjustment catoptrons at interval, and is though this structure is simple in structure, adjustable with the locus physical dimension, but do not have fixed pivot, reflector position is not easy to adjust and locking.Head it off need structurally add spheric washer, not only increases part, and for the structure of limited space system, small-sized spheric washer is difficult for processing.Add inclination and be difficult for adjusting, the hot spot path is wayward, and it is low to adjust efficient.
Summary of the invention
Because the above-mentioned defective of prior art, technical problem to be solved in the utility model provides a kind of simple in structure, adjusts the high mirror adjustment mechanism of precision.
For achieving the above object, the utility model provides a kind of adjusting mechanism of catoptron, comprises holder, and it holds described catoptron; Be located at the adjustable fixed part of normal direction on the described holder, it is fixed to base portion with described holder, the adjustable fixed part of described normal direction forms the axis of symmetry through described holder center on described holder, and makes described axis of symmetry to move along the normal direction of described catoptron; Along the coarse adjustment portion that described axis of symmetry is provided with, it adjusts the inclination angle with respect to described axis of symmetry of described holder; Along the accurate adjustment portion that described axis of symmetry is provided with, it adjusts the inclination angle with respect to described axis of symmetry of described holder; Wherein, the inclination angle setting range of described coarse adjustment portion is greater than the inclination angle setting range of described accurate adjustment portion.
Preferably, the adjustable fixed part of described normal direction comprises screw, compression spring and cross recess closely-pitched sunk screw.
Preferably, described coarse adjustment portion comprises screw, compression spring and hexagon socket cap head screw.
Preferably, described accurate adjustment portion comprises top wire hole, interior hexagonal pommel closely-pitched holding screw.
Preferably, described adjusting mechanism also comprises latch mechanism, so that described holder is locked with respect to described base portion.
Preferably, described latch mechanism is a set nut.
Mirror adjustment mechanism of the present utility model adopts the multiple spot adjustment uniform with respect to axis of symmetry, coarse adjustment screw by adjusting both sides and micrometer adjusting screw and fulcrum can be adjusted the position of catoptron in light path in the position of catoptron normal orientation, it is simple in structure, adjustment efficient height, the light path hot spot is controlled easily, physical construction can not be subjected to the restriction in space with the size variation of catoptron.
Description of drawings
Reference is the description and the accompanying drawing of preferred embodiment hereinafter, can understand the utility model and purpose and advantage best, wherein:
Fig. 1 is the side view according to mirror adjustment mechanism of the present utility model;
Fig. 2 is the diagrammatic top view of the described mirror adjustment mechanism of Fig. 1;
Fig. 3 is the partial isometric of catoptron shown in Figure 1.
Embodiment
Referring to the accompanying drawing of the utility model embodiment, hereinafter the utility model will be described in more detail.Yet the utility model can be realized with many different forms, and should not be construed as the restriction of the embodiment that is subjected in this proposition.On the contrary, it is abundant and complete open in order to reach proposing these embodiment, and makes those skilled in the art understand scope of the present utility model fully.
Now describe according to mirror adjustment mechanism of the present utility model according to Fig. 1-3.Fig. 1 is the side view according to mirror adjustment mechanism of the present utility model.Fig. 2 is the diagrammatic top view of the described mirror adjustment mechanism of Fig. 1.Fig. 3 is the partial isometric of catoptron shown in Figure 1.
As Figure 1-3, adjusting mechanism is included as the catoptron holder 1 of circular.Be provided with the chamber that holds catoptron 2 in the middle of the holder 1.After catoptron 2 places described chamber, catoptron 2 is fixed in the described chamber thereby transparent gland 3 is pressed into described chamber.The upper surface of holder 1 is provided with along the screw 8 of its two break-through holders 1 radially in alignment.In the present embodiment, on the horizontal direction of two screws 8 in Fig. 2, along axis setting through holder 1 center.They should be understood that screw 8 also can have other set-up mode, as long as with respect to the center symmetry of holder, can form the axis of symmetry through holder 1 center.Pack in the screw 8 on the catoptron holder 1 adjusting spring 6, insert cross recess closely-pitched sunk screw 81 then.Thereby being screwed into sunk screw 81 is installed in catoptron holder 1 on the pedestal 7.
Because holder 1 is equipped with two screws 8 in the horizontal direction, and screw 8 just is equivalent to horizontal direction and determines an axis of symmetry through the center of holder 1 by two fulcrums along the center symmetry with respect to holder 1.Compression spring 6 and sunk screw 81 match, by tightening and unscrew sunk screw 81, thereby restriction holder 1 perpendicular to the displacement on the direction of catoptron normal direction, promptly this axis of symmetry is removable in the normal direction of catoptron.Screw 8, compression spring 6 and cross recess closely-pitched sunk screw 81 are the example of the adjustable fixed part of normal direction.
On the upper surface of holder 1, along the screw 5 that is evenly distributed in six break-through holders outside.Should be understood that screw 5 is not limited to six, can several symmetrical screws 5 be set along described axis of symmetry.Compression spring 6 is packed in the screw 5, insert hexagon socket cap head screw 51 then.Thereby being screwed into socket head cap screw 51 further is fixed on holder 1 on the pedestal 7.Compression spring 6 and socket head cap screw 51 match, and by tightening or unscrew socket head cap screw 5, thereby regulate holder 1 with respect to the inclination angle by the described axis of symmetry of the adjustable fixed part control of normal direction.Because socket head cap screw 51 directly is fixed to pedestal 7, and the size of the screw of selecting for use is bigger, therefore can do in a big way adjusting to the inclination angle of holder 1.Screw 5, compression spring 6 and socket head cap screw 51 are the example of coarse adjustment portion.
On the upper surface of holder 1, around the opening of described chamber, be provided with ten top wire holes 4.Should be understood that top wire hole 4 is not limited to ten, can several symmetrical top wire holes 4 be set along described axis of symmetry.Different with screw 5 with screw 8, top wire hole 4 is also not perforated.Interior hexagonal pommel closely-pitched holding screw 41 is inserted top wire hole 4.Thereby tighten holding screw 41 and regulate the inclination angle of holder 1 with respect to the described axis of symmetry of controlling by the adjustable fixed part of normal direction.Be not attached to pedestal 7 owing to holding screw 41 only is screwed into holder 1, and holding screw 41 is the closely-pitched holding screw, can does accurate fine adjustments to the inclination angle of holder 1 thus.Top wire hole 4, compression spring 6 and holding screw 41 are the example of accurate adjustment portion.
Thus, by coarse adjustment portion and the accurate adjustment portion that spring is housed, respectively to the inclination angle of holder 1 work with respect to the axis of symmetry of controlling by the adjustable fixed part of described normal direction, can realize that angle significantly adjusts, also can realize local the adjustment, so that change in the direction that appointed positions reaches 90 degree from the light beam in catoptron the place ahead.
Among another embodiment, also be provided with set nut 9 on the holding screw 41.Set nut 9 is after coarse adjustment portion and accurate adjustment portion adjust fully, and the interior hexagonal pommel closely-pitched holding screw 41 that all the other are unsettled is screwed to seat surface, and utilize set nut lock 9 with holder 1 with respect to pedestal 7 lockings.Jack panel lock 9 is the example of latch mechanism.
Adjustment process according to mirror adjustment mechanism of the present utility model is now described.
At first, the adjustment of reflector position generally judges that in the sharpness of CCD imaging the normal direction position of catoptron and inclination adjust suitable degree by hot spot in the light path in light path.At first adjust cross recess closely-pitched sunk screw 81 based on the situation of CCD imaging and adjust catoptron, so that catoptron 2 moves on to index path picture position more clearly in the normal direction displacement.
The axle of forming with the fulcrum of cross recess closely-pitched sunk screw 81 positions is an axis of symmetry then, adjusts hexagon socket cap head screw 51 and carries out coarse adjustment.
Then, the axle of forming with the fulcrum of cross recess closely-pitched sunk screw position is an axis of symmetry, and the interior hexagonal pommel closely-pitched holding screw of adjusting with respect to axis of symmetry 41 carries out accurate adjustment, also will cooperate coarse adjustment adjustment simultaneously.
Then, when catoptron is transferred to the appropriate location, can judge by the precision of measuring ccd image whether the position of catoptron meets the demands.
At last, utilize all the other unsettled interior hexagonal pommel closely-pitched holding screws 41 to be screwed to seat surface, and utilize set nut 9 lockings to get final product.
Finally judge the position of catoptron in the sharpness of CCD imaging at normal direction and inclination angle with light path.
Mirror adjustment mechanism of the present utility model has following advantage.
(1) mirror adjustment mechanism of the present utility model adopts the multiple spot adjustment uniform with respect to axis of symmetry, and coarse adjustment screw by adjusting both sides and micrometer adjusting screw and fulcrum can be adjusted the position of catoptron in light path in the position of catoptron normal orientation.Simple in structure, adjust the efficient height, the light path hot spot is controlled easily, and physical construction can not be subjected to the restriction in space with the size variation of catoptron;
(2) mirror adjustment mechanism of the present utility model adopts and fix the degree of freedom that two fulcrums limit the vertical Normal plane of central shaft on the catoptron Normal plane, and this fulcrum is adjustable on normal orientation, and the precision of Tiao Zhenging is higher thus;
(3) mirror adjustment mechanism of the present utility model adopts the two-stage adjustment of coarse adjustment and accurate adjustment, has further promoted the precision of adjusting;
(4) mirror adjustment mechanism of the present utility model also has latch mechanism, has solved the weakness that catoptron of the prior art is difficult for locking.
Here description of the present utility model and application are illustrative, are not to want with scope restriction of the present utility model in the above-described embodiments.Here the distortion of disclosed embodiment and change are possible, and the various parts of the replacement of embodiment and equivalence are known for those those of ordinary skill in the art.Those skilled in the art are noted that under the situation that does not break away from spirit of the present utility model or essential characteristic, and the utility model can be with other forms, structure, layout, ratio, and realize with other elements, material and parts.Under the situation that does not break away from the utility model scope and spirit, can carry out other distortion and change here to disclosed embodiment.

Claims (6)

1. the adjusting mechanism of a catoptron is characterized in that, comprising:
Holder, it holds described catoptron;
Be located at the adjustable fixed part of normal direction on the described holder, it is fixed to base portion with described holder, the adjustable fixed part of described normal direction forms the axis of symmetry through described holder center on described holder, and makes described axis of symmetry to move along the normal direction of described catoptron;
Along the coarse adjustment portion that described axis of symmetry is provided with, it adjusts the inclination angle with respect to described axis of symmetry of described holder;
Along the accurate adjustment portion that described axis of symmetry is provided with, it adjusts the inclination angle with respect to described axis of symmetry of described holder;
Wherein, the inclination angle setting range of described coarse adjustment portion is greater than the inclination angle setting range of described accurate adjustment portion.
2. adjusting mechanism as claimed in claim 1 is characterized in that, the adjustable fixed part of described normal direction comprises screw, compression spring and cross recess closely-pitched sunk screw.
3. adjusting mechanism as claimed in claim 1 is characterized in that, described coarse adjustment portion comprises screw, compression spring and hexagon socket cap head screw.
4. adjusting mechanism as claimed in claim 1 is characterized in that, described accurate adjustment portion comprises top wire hole, interior hexagonal pommel closely-pitched holding screw.
5. adjusting mechanism as claimed in claim 1 is characterized in that described adjusting mechanism also comprises latch mechanism, so that described holder is locked with respect to described base portion.
6. adjusting mechanism as claimed in claim 5 is characterized in that, described latch mechanism is a set nut.
CN2010201202845U 2010-02-26 2010-02-26 Adjusting mechanism of reflecting mirror Expired - Lifetime CN201654310U (en)

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Application Number Priority Date Filing Date Title
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102707411A (en) * 2012-05-31 2012-10-03 中国科学院西安光学精密机械研究所 Compact universal adjusting folding-shaft reflecting mirror mechanism
US9832352B2 (en) 2011-11-16 2017-11-28 Autofuss System and method for 3D projection mapping with robotically controlled objects
WO2018045734A1 (en) * 2016-09-06 2018-03-15 深圳市中图仪器股份有限公司 Reflective mirror device capable of horizontal circumference adjustment and pitch adjustment
CN107991253A (en) * 2017-11-28 2018-05-04 北京凯尔科技发展有限公司 A kind of gas-detecting device
CN108227175A (en) * 2018-03-16 2018-06-29 南通斯密特森光电科技有限公司 The adjustable astronomical telescope of principal reflection mirror
CN115016091A (en) * 2022-08-05 2022-09-06 山西汉威激光科技股份有限公司 Two-axis optical lens angle adjusting device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9832352B2 (en) 2011-11-16 2017-11-28 Autofuss System and method for 3D projection mapping with robotically controlled objects
US10447899B2 (en) 2011-11-16 2019-10-15 X Development Llc System and method for 3D projection mapping with robotically controlled objects
CN102707411A (en) * 2012-05-31 2012-10-03 中国科学院西安光学精密机械研究所 Compact universal adjusting folding-shaft reflecting mirror mechanism
WO2018045734A1 (en) * 2016-09-06 2018-03-15 深圳市中图仪器股份有限公司 Reflective mirror device capable of horizontal circumference adjustment and pitch adjustment
CN107991253A (en) * 2017-11-28 2018-05-04 北京凯尔科技发展有限公司 A kind of gas-detecting device
CN108227175A (en) * 2018-03-16 2018-06-29 南通斯密特森光电科技有限公司 The adjustable astronomical telescope of principal reflection mirror
CN108227175B (en) * 2018-03-16 2024-02-20 南通斯密特森光电科技有限公司 Astronomical telescope with adjustable main reflector
CN115016091A (en) * 2022-08-05 2022-09-06 山西汉威激光科技股份有限公司 Two-axis optical lens angle adjusting device
CN115016091B (en) * 2022-08-05 2022-11-08 山西汉威激光科技股份有限公司 Two-axis optical lens angle adjusting device

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C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Zhangjiang High Tech Park, Shanghai, Zhang Dong Road, No. 1525

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.

CX01 Expiry of patent term

Granted publication date: 20101124

CX01 Expiry of patent term