WO2017213294A1 - Auxiliary apparatus for polishing device - Google Patents
Auxiliary apparatus for polishing device Download PDFInfo
- Publication number
- WO2017213294A1 WO2017213294A1 PCT/KR2016/008385 KR2016008385W WO2017213294A1 WO 2017213294 A1 WO2017213294 A1 WO 2017213294A1 KR 2016008385 W KR2016008385 W KR 2016008385W WO 2017213294 A1 WO2017213294 A1 WO 2017213294A1
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- WIPO (PCT)
- Prior art keywords
- specimen
- polishing
- detachable
- pressing
- specimen holder
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
Definitions
- the present invention relates to an auxiliary device for a polishing apparatus, and more particularly, it is possible to obtain the effect of an automatic polishing apparatus at a low cost, to polish the specimen to a uniform flatness, and to have a simple structure, which is easy to manufacture and install.
- the present invention relates to an auxiliary device for a polishing apparatus that can easily check the state of the specimen during polishing.
- specimens for histological and physical properties are subjected to a pretreatment process to polish the surface to accurately perform various precise analyzes such as material organization, composition, texture and phase fraction.
- the uniform flatness is important for the specimen to observe the microstructure with an optical microscope or the like.
- Polishing polishing process is one of the precise polishing process, and is used for the purpose of reducing the surface roughness or removal of the deteriorated layer, and manual polishing method is preferred to improve the uniform flatness of the specimen.
- the specimen is manually held by the operator and polished by polishing the polishing pad of the manual polishing apparatus, that is, the rotating polishing pad.
- a plastic solution e.g. epoxy
- Another object of the present invention is to provide an auxiliary device for a polishing apparatus that can polish a specimen to uniform flatness.
- the object is, according to the present invention, the detachable means detachable to the polishing apparatus; Specimen polishing means for mounting a specimen, the specimen polishing means for pressing the mounted specimen toward the polishing apparatus side to polish through the polishing apparatus; Connecting means for connecting said detachable means and said specimen polishing means; It is achieved by an auxiliary device for a polishing apparatus comprising a.
- the detachable means, the detachable body; And a switch provided in the detachable body and controlling whether the electromagnet is driven by turning on or off the power supplied to the detachable body so that the detachable body is mounted or detached from the polishing apparatus. It is preferable to include.
- the specimen polishing means a specimen holder on which the specimen is mounted; An elastic body connected to the specimen holder to elastically support the specimen holder; A pressing body connected to the elastic body and capable of pressing operation to transfer a pressing force to the specimen holder through the elastic body; And a guide body mounted to the inside of the specimen holder and the pressing body so that the specimen holder and the pressing body protrude outwardly in opposite directions along a longitudinal direction, and guide the operation of the specimen holder and the pressing body. It is preferable to include.
- an opening hole is formed in the guide body along an operating direction of the pressing body, and either or both of the specimen holder and the pressing body are exposed to the outside through the opening hole.
- the connecting means the support pillar formed on the detachable means; And connecting rod for connecting between the support column and the specimen polishing means; It is preferable to include.
- the connecting table is preferably configured to be rotatable with respect to the support pillar.
- an auxiliary device for a polishing device that can attain the effect of an automatic polishing device at a low cost.
- the specimen can be polished to uniform flatness.
- FIG. 1 is an exploded view of an auxiliary device for a polishing apparatus according to a first embodiment of the present invention
- FIG. 2 is a combined view of the auxiliary device for the polishing apparatus shown in FIG.
- FIG. 3 is a cross-sectional view of the auxiliary device for the polishing apparatus shown in FIG.
- 4 (a) and 4 (b) show an auxiliary device for a polishing apparatus according to a second embodiment of the present invention
- FIG. 5 is a state diagram showing a state in which the polishing apparatus is polished by attaching the polishing apparatus auxiliary device according to the first embodiment of the present invention to the polishing apparatus.
- FIG. 1 is an exploded view of an auxiliary device for a polishing device according to a first embodiment of the present invention
- FIG. 2 is a combined view of the auxiliary device for the polishing device shown in FIG. 1
- FIG. 3 is for the polishing device shown in FIG. 2.
- the auxiliary device for the polishing apparatus includes a detachable means 100, a specimen polishing means 200, and a connecting means 300.
- the detachable means 100 is a component detachably attached to a polishing apparatus, in particular a manual polishing apparatus (PM of FIG. 5), and includes a detachable body 110 and a switch 120.
- the detachable body 110 is a portion directly attached to or detached from a polishing apparatus (PM of FIG. 5; hereinafter referred to as a manual polishing apparatus).
- the switch 120 is a part provided in the detachable body 110, and in particular, the detachable body 110 is manually polished by controlling whether the electromagnet is driven by turning on or off the power supplied to the electromagnet disposed in the detachable body 110.
- the power may be configured to supply through a separate power supply means (not shown), for example, a battery in the removable body 110, or to supply it through, or may be configured to supply using an external outlet.
- Specimen polishing means 200 is equipped with a specimen (T in Fig. 5), by pressing the mounted specimen (T in Fig. 5) toward the manual polishing apparatus (PM in Fig. 5) manual polishing apparatus (PM in Fig. 5) Is a component polished through).
- Specimen polishing means 200 used in the present invention comprises a specimen holder 210 and the elastic body 220, the pressing body 230 and the guide body 240.
- the specimen holder 210 is a portion on which the specimen (T in FIG. 5) is mounted, and is formed in a cylindrical shape, but the shape may be changed.
- the upper end side of the specimen holder 210 is provided with a locking portion 212 for coupling the specimen holder 210 to the guide body 240 described below, and the locking portion 212 is a guide body 240.
- Protruding protrusion 214 is inserted into the opening hole 242 of the.
- a specimen mounting portion 216 is formed at the lower end side of the specimen holder 210 to mount the specimen (T in FIG. 5).
- the plastic solution for example, epoxy is poured into a mold of a predetermined size and then the specimen (T in Fig. 5) is hardened.
- the specimen (T in FIG. 5), that is, the mounted specimen (T in FIG. 5) is mounted on the specimen mounting portion 216.
- the specimen holder 210 portion in which the specimen mounting portion 216 is formed is clamped through a separate fastening member in a partially cut state in order to more securely mount the mounted specimen (T in FIG. 5). It is configured to be loosened or loosened, and can be fixed by strongly pressing the circumferential side of the mounted specimen (T in FIG. 5) mounted to the specimen mounting portion 216, and after polishing, the easily mounted specimen (T in FIG. 5) It can be configured to be detachable.
- the elastic body 220 is connected to the specimen holder 210 to elastically support the specimen holder 210, and a spring may be used.
- the press body 230 is formed in a cylindrical shape similar to the specimen holder 210, and is connected to the elastic body 220 and is a component that transmits pressing force to the specimen holder 210 through the elastic body 220. .
- the pressing body 230 is formed with a locking portion 232 to be coupled to the guide body 240 described below on the lower end side in the figure.
- the guide body 240 is formed in a cylindrical shape so that the specimen holder 210 and the pressing body 230 are mounted on the inside such that the specimen holder 210 and the pressing body 230 protrude outwards in opposite directions along the length direction. This is a part for guiding the operation of the specimen holder 210 and the pressing body 230.
- the shape of the guide body 240 can be changed according to the shape of the specimen holder 210 and the pressing body 230.
- An opening hole 242 is formed in the guide body 240 along the direction of operation of the pressing body 230, and inside the engaging portions 212 and 232 of the specimen holder 210 and the pressing body 230.
- the guide groove 244 is formed so that the guide can move along the longitudinal direction of the guide body 240.
- one or two of the specimen holder 210 and the pressing body 230 may be exposed to the outside through the opening hole 242.
- the opening hole 242 is formed only on the lower side of the guide body 240 so that only the specimen holder 210 is exposed to the outside, but the opening hole 242 is along the longitudinal direction of the guide body 240.
- the specimen holder 210 and the pressing body 230 may be both exposed to the outside by being formed in a long hole shape.
- Exposing one or both of the specimen holder 210 and the pressing body 230 to the outside is a specimen that moves along the longitudinal direction of the opening hole 242 when the operator polishes the specimen (T in FIG. 5).
- the pressing force through the pressing body 230 can be adjusted while looking at one or two of the holder 210 and the pressing body 230, and the test piece (T in FIG. 5) is used to determine the degree of grinding.
- the protruding protrusion 214 of the specimen holder 210 is configured to be inserted into the opening hole 242 to be mounted so that the specimen holder 210 is more exposed to the outside, and thus the specimen holder 210.
- the protrusion 214 of the) is mounted to the opening hole 242 to be exposed to the outside, the operator can smoothly adjust the pressing force, it is easy to see the degree of polishing of the specimen (T in Fig. 5).
- it may be configured to form a scale along the longitudinal direction of the opening hole 242 for a more precise grinding of the specimen (T of FIG. 5).
- the connecting means 300 is a component for connecting the detachable means 100 and the specimen polishing means 200, and includes a support pillar 310 and a connecting table 320.
- Support pillar 310 is a portion formed in the detachable means 100, the connection table 320 is connected between the support pillar 310 and the specimen polishing means 200, in particular the guide body 240.
- FIGS. 4A and 4B are views showing an auxiliary device for a polishing apparatus according to a second embodiment of the present invention.
- the auxiliary device for the polishing device according to the second embodiment of the present invention is configured almost similarly to the auxiliary device for the polishing device according to the first embodiment described above.
- In the shape of 300 are distinguished from each other.
- the connecting table 320 is simply connected between the support pillar 310 and the guide body 240 of the specimen polishing means 200, but in the second embodiment, the connecting table 320 is hinged 322. It is configured to be rotatable with respect to the support pillar 310 by using a).
- the hinge 322 is fixed so that the connecting table 320 does not rotate when polishing the specimen (T in Fig. 5), and loosen the hinge 322 only to check the state of the specimen (T in Fig. 5) It is preferable to fasten the connecting rod 320 and the support pillar 310 in a structure that allows the connecting rod 320 to rotate, for example, by a screw or bolt.
- the connecting means 300 in addition to the auxiliary device for the polishing apparatus according to the second embodiment of the present invention is configured to be rotatable with respect to the support pillar 310 using the hinge 322, the connection means 300
- the support pillar 310 may be configured to be rotatable to the detachable body 110 of the detachable means 100 using a hinge or the like.
- FIG. 5 is a state diagram showing a state in which the polishing apparatus is polished by attaching the polishing apparatus auxiliary device according to the first embodiment of the present invention to the polishing apparatus.
- the specimen T is first mounted on the specimen holder 210. .
- the detachable means 100 is attached to the upper surface or the side of the manual polishing apparatus PM so that the mounted specimen T mounted on the specimen holder 210 is positioned above the polishing pad of the manual polishing apparatus PM.
- the switch 120 to supply power to the electromagnet in the detachable body 110, the detachable body 110 is fixed to the manual polishing apparatus (PM in Fig. 5) through the magnetism of the electromagnet.
- the operator can adjust the force for polishing the specimen (T) while watching the state in which the protrusion 214 of the pressing body 230 exposed through the opening hole 242 of the guide body 240 descends, the specimen The degree to which (T) is polished can be grasped.
- the auxiliary device for the polishing apparatus can obtain the effect of the automatic polishing apparatus at a low cost, can polish the specimen to a uniform flatness, and the structure is simple to manufacture and install, and the required cost can be reduced. It is a useful invention.
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Abstract
The present invention relates to an auxiliary apparatus, for a polishing device, comprising: an attaching/detaching means; a specimen grinding means; and a connecting means. Therefore, effects of an automatic polishing device can be obtained at a low cost, and a specimen can be ground to have a uniform flatness. Moreover, the present invention has a simple structure and thus can easily be manufactured and installed and enables cost reduction as well as simple checking of the state of a specimen during grinding.
Description
본 발명은 폴리싱 장치용 보조장치에 관한 것으로서, 더욱 상세하게는 적은 비용으로 자동식 폴리싱 장치의 효과를 얻을 수 있고, 시편을 균일한 평탄도로 연마할 수 있으며, 구조가 간단하여 제작 및 설치가 쉽고 소요 비용을 절감할 수 있을 뿐만 아니라 연마 도중 시편의 상태를 쉽게 확인할 수 있는 폴리싱 장치용 보조장치에 관한 것이다.The present invention relates to an auxiliary device for a polishing apparatus, and more particularly, it is possible to obtain the effect of an automatic polishing apparatus at a low cost, to polish the specimen to a uniform flatness, and to have a simple structure, which is easy to manufacture and install. In addition to reducing costs, the present invention relates to an auxiliary device for a polishing apparatus that can easily check the state of the specimen during polishing.
일반적으로 조직 및 물성 검사를 위한 시편은 재료의 조직, 조성, 집합 조직 및 상분율 등과 같은 여러가지 정밀 분석을 정확하게 할 수 있도록 표면을 연마하는 전처리 과정을 거친다.Generally, specimens for histological and physical properties are subjected to a pretreatment process to polish the surface to accurately perform various precise analyzes such as material organization, composition, texture and phase fraction.
특히, 시편은 광학 현미경 등으로 미세 조직을 관찰하기 위해 균일한 평탄도가 중요하다.In particular, the uniform flatness is important for the specimen to observe the microstructure with an optical microscope or the like.
폴리싱 연마공정은 정밀한 연마공정 중의 하나로, 표면거칠기 감소나 가공 변질층 제거 등을 목적으로 사용되며, 시편의 균일한 평탄도 향상을 위해 수동식 연마방법이 선호되고 있다.Polishing polishing process is one of the precise polishing process, and is used for the purpose of reducing the surface roughness or removal of the deteriorated layer, and manual polishing method is preferred to improve the uniform flatness of the specimen.
수동식 연마방법은 시편을 작업자가 직접 손으로 잡고 수동식 폴리싱 장치의 연마패드, 즉 회전하는 연마패드에 마찰시켜 연마하게 되는데, 시편의 크기가 너무 작거나 얇아서 손으로 잡아 연마하기 어려운 경우 일정 크기의 틀에 플라스틱 용액, 예를 들어 에폭시를 부은 다음 시편을 넣어서 굳힌 뒤 연마하게 된다. In the manual polishing method, the specimen is manually held by the operator and polished by polishing the polishing pad of the manual polishing apparatus, that is, the rotating polishing pad. Pour a plastic solution, e.g. epoxy, into the specimen, harden it and grind it.
그런데, 이러한 수동식 연마방법은 수작업을 통해 이루어지므로 작업시간이 현저하게 증대될 뿐만 아니라 인건비가 상승하고, 그에 따라 제조단가 또한 증대되는 문제점이 있었다.However, since the manual polishing method is performed by hand, not only the work time is significantly increased, but also the labor cost is increased, and thus the manufacturing cost is also increased.
따라서, 전술한 바와 같은 문제점이 보완된 폴리싱 장치용 보조장치의 필요성이 대두되고 있다.Accordingly, there is a need for an auxiliary device for a polishing apparatus in which the above problems are solved.
따라서, 본 발명의 목적은 이와 같은 종래의 문제점을 해결하기 위한 것으로서 적은 비용으로 자동식 폴리싱 장치의 효과를 얻을 수 있는 폴리싱 장치용 보조장치를 제공함에 있다.Accordingly, it is an object of the present invention to provide an auxiliary device for a polishing apparatus that can achieve the effect of an automatic polishing apparatus at a low cost to solve such a conventional problem.
또, 시편을 균일한 평탄도로 연마할 수 있는 폴리싱 장치용 보조장치를 제공함에 있다.Another object of the present invention is to provide an auxiliary device for a polishing apparatus that can polish a specimen to uniform flatness.
또한, 구조가 간단하여 제작 및 설치가 쉽고 소요 비용을 절감할 수 있는 폴리싱 장치용 보조장치를 제공함에 있다.In addition, it is to provide an auxiliary device for a polishing apparatus that is simple in structure and easy to manufacture and install, reducing the required cost.
또한, 연마 도중 시편의 상태를 쉽게 확인할 수 있는 폴리싱 장치용 보조장치를 제공함에 있다.In addition, to provide an auxiliary device for a polishing apparatus that can easily check the state of the specimen during polishing.
상기 목적은, 본 발명에 따라, 폴리싱 장치에 탈부착되는 탈부착수단; 시편이 장착되며, 장착된 상기 시편을 상기 폴리싱 장치측을 향해 가압하여 상기 폴리싱 장치를 통해 연마시키는 시편연마수단; 및 상기 탈부착수단과 상기 시편연마수단을 연결하는 연결수단; 을 포함하는 폴리싱 장치용 보조장치에 의해 달성된다.The object is, according to the present invention, the detachable means detachable to the polishing apparatus; Specimen polishing means for mounting a specimen, the specimen polishing means for pressing the mounted specimen toward the polishing apparatus side to polish through the polishing apparatus; Connecting means for connecting said detachable means and said specimen polishing means; It is achieved by an auxiliary device for a polishing apparatus comprising a.
여기서, 상기 탈부착수단은, 탈부착몸체; 및 상기 탈부착몸체에 마련되고, 상기 탈부착몸체가 상기 폴리싱 장치에 장착 또는 분리되도록 상기 탈부착몸체에 공급되는 전원을 온 또는 오프시켜 전자석의 구동여부를 제어하는 스위치; 를 포함하는 것이 바람직하다.Here, the detachable means, the detachable body; And a switch provided in the detachable body and controlling whether the electromagnet is driven by turning on or off the power supplied to the detachable body so that the detachable body is mounted or detached from the polishing apparatus. It is preferable to include.
여기서, 상기 시편연마수단은, 상기 시편이 장착되는 시편홀더; 상기 시편홀더에 연결되어 상기 시편홀더를 탄성지지하는 탄성체; 상기 탄성체에 연결되고, 누름 조작이 가능하여 상기 탄성체를 통해 상기 시편홀더에 가압력을 전달하는 누름체; 및 길이방향을 따라 상기 시편홀더와 상기 누름체가 서로 반대방향 외측으로 돌출되도록 상기 시편홀더와 상기 누름체가 내측에 장착되고, 상기 시편홀더와 상기 누름체의 동작을 가이드하는 가이드체; 를 포함하는 것이 바람직하다.Here, the specimen polishing means, a specimen holder on which the specimen is mounted; An elastic body connected to the specimen holder to elastically support the specimen holder; A pressing body connected to the elastic body and capable of pressing operation to transfer a pressing force to the specimen holder through the elastic body; And a guide body mounted to the inside of the specimen holder and the pressing body so that the specimen holder and the pressing body protrude outwardly in opposite directions along a longitudinal direction, and guide the operation of the specimen holder and the pressing body. It is preferable to include.
여기서, 상기 가이드체에는, 상기 누름체의 동작방향을 따라 개방된 개구홀이 형성되고, 상기 시편홀더, 상기 누름체 중 어느 하나 또는 둘이 상기 개구홀을 통해 외부에 노출되는 것이 바람직하다.Here, it is preferable that an opening hole is formed in the guide body along an operating direction of the pressing body, and either or both of the specimen holder and the pressing body are exposed to the outside through the opening hole.
여기서, 상기 연결수단은, 상기 탈부착수단에 형성되는 지지기둥; 및 상기 지지기둥과 상기 시편연마수단 사이를 연결하는 연결대; 를 포함하는 것이 바람직하다.Here, the connecting means, the support pillar formed on the detachable means; And connecting rod for connecting between the support column and the specimen polishing means; It is preferable to include.
여기서, 상기 연결대는, 상기 지지기둥에 대해 회동 가능하게 구성되는 것이 바람직하다.Here, the connecting table is preferably configured to be rotatable with respect to the support pillar.
본 발명에 따르면, 적은 비용으로 자동식 폴리싱 장치의 효과를 얻을 수 있는 폴리싱 장치용 보조장치가 제공된다.According to the present invention, there is provided an auxiliary device for a polishing device that can attain the effect of an automatic polishing device at a low cost.
또, 시편을 균일한 평탄도로 연마할 수 있다.In addition, the specimen can be polished to uniform flatness.
또한, 구조가 간단하여 제작 및 설치가 쉽고 소요 비용을 절감할 수 있게 된다.In addition, since the structure is simple, it is easy to manufacture and install, and can reduce the required cost.
또한, 연마 도중 시편의 상태를 쉽게 확인할 수 있게 된다.In addition, it is possible to easily check the state of the specimen during polishing.
도 1은 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치의 분해도,1 is an exploded view of an auxiliary device for a polishing apparatus according to a first embodiment of the present invention;
도 2는 도 1에 도시된 폴리싱 장치용 보조장치의 결합도,2 is a combined view of the auxiliary device for the polishing apparatus shown in FIG.
도 3은 도 2에 도시된 폴리싱 장치용 보조장치의 단면도,3 is a cross-sectional view of the auxiliary device for the polishing apparatus shown in FIG.
도 4의 (a) 및 (b)는 본 발명의 제2 실시예에 따른 폴리싱 장치용 보조장치를 나타낸 도,4 (a) and 4 (b) show an auxiliary device for a polishing apparatus according to a second embodiment of the present invention;
도 5는 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치를 폴리싱 장치에 부착시켜 시편을 연마하는 상태를 나타낸 상태도이다.5 is a state diagram showing a state in which the polishing apparatus is polished by attaching the polishing apparatus auxiliary device according to the first embodiment of the present invention to the polishing apparatus.
이하, 첨부한 도면을 참조하여 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치에 대하여 상세하게 설명한다. Hereinafter, an auxiliary device for a polishing apparatus according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 1은 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치의 분해도이고, 도 2는 도 1에 도시된 폴리싱 장치용 보조장치의 결합도이며, 도 3은 도 2에 도시된 폴리싱 장치용 보조장치의 단면도이다.1 is an exploded view of an auxiliary device for a polishing device according to a first embodiment of the present invention, FIG. 2 is a combined view of the auxiliary device for the polishing device shown in FIG. 1, and FIG. 3 is for the polishing device shown in FIG. 2. A cross section of the auxiliary device.
도 1 내지 도 3을 참조하면, 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치는 크게 탈부착수단(100)과 시편연마수단(200) 및 연결수단(300)을 포함하여 구성된다.1 to 3, the auxiliary device for the polishing apparatus according to the first embodiment of the present invention includes a detachable means 100, a specimen polishing means 200, and a connecting means 300.
탈부착수단(100)은 폴리싱 장치, 특히 수동식 폴리싱 장치(도 5의 PM)에 탈부착되는 구성요소로, 탈부착몸체(110)와 스위치(120)를 포함하여 이루어진다.The detachable means 100 is a component detachably attached to a polishing apparatus, in particular a manual polishing apparatus (PM of FIG. 5), and includes a detachable body 110 and a switch 120.
탈부착몸체(110)는 폴리싱 장치(도 5의 PM; 이하, 수동식 폴리싱 장치라 함)에 직접적으로 부착 또는 분리되는 부분이다.The detachable body 110 is a portion directly attached to or detached from a polishing apparatus (PM of FIG. 5; hereinafter referred to as a manual polishing apparatus).
스위치(120)는 탈부착몸체(110)에 마련되는 부분으로, 특히 탈부착몸체(110) 내에 배치되는 전자석에 공급되는 전원을 온 또는 오프시켜 전자석의 구동여부를 제어함으로서 탈부착몸체(110)가 수동식 폴리싱 장치(도 5의 PM)에 장착 또는 분리되도록 하게 된다. 여기서, 전원은 탈부착몸체(110)에 별도의 전원공급수단(도시하지 않음), 예를 들어 건전지를 두고 이를 통해 공급하도록 구성하거나, 외부의 콘센트 등을 이용하여 공급하도록 구성될 수 있다.The switch 120 is a part provided in the detachable body 110, and in particular, the detachable body 110 is manually polished by controlling whether the electromagnet is driven by turning on or off the power supplied to the electromagnet disposed in the detachable body 110. To the device (PM in FIG. 5). Here, the power may be configured to supply through a separate power supply means (not shown), for example, a battery in the removable body 110, or to supply it through, or may be configured to supply using an external outlet.
시편연마수단(200)은 시편(도 5의 T)이 장착되며, 장착된 시편(도 5의 T)을 수동식 폴리싱 장치(도 5의 PM)측을 향해 가압하여 수동식 폴리싱 장치(도 5의 PM)를 통해 연마시키는 구성요소이다. 본 발명에서 사용되는 시편연마수단(200)은 시편홀더(210)와 탄성체(220), 누름체(230) 및 가이드체(240)를 포함하여 이루어진다.Specimen polishing means 200 is equipped with a specimen (T in Fig. 5), by pressing the mounted specimen (T in Fig. 5) toward the manual polishing apparatus (PM in Fig. 5) manual polishing apparatus (PM in Fig. 5) Is a component polished through). Specimen polishing means 200 used in the present invention comprises a specimen holder 210 and the elastic body 220, the pressing body 230 and the guide body 240.
시편홀더(210)는 시편(도 5의 T)이 장착되는 부분으로, 원통 형상으로 이루어지나 이러한 형상은 변경 가능하다. 도면상 시편홀더(210)의 상부말단측에는 시편홀더(210)가 하기에 서술하는 가이드체(240)에 결합되도록 하는 걸림부(212)가 형성되고, 걸림부(212)에는 가이드체(240)의 개구홀(242)에 삽입되는 돌출돌기(214)가 형성된다. 그리고, 도면상 시편홀더(210)의 하부말단측에는 시편(도 5의 T)을 장착할 수 있도록 시편장착부(216)가 형성된다.The specimen holder 210 is a portion on which the specimen (T in FIG. 5) is mounted, and is formed in a cylindrical shape, but the shape may be changed. In the drawing, the upper end side of the specimen holder 210 is provided with a locking portion 212 for coupling the specimen holder 210 to the guide body 240 described below, and the locking portion 212 is a guide body 240. Protruding protrusion 214 is inserted into the opening hole 242 of the. In the drawing, a specimen mounting portion 216 is formed at the lower end side of the specimen holder 210 to mount the specimen (T in FIG. 5).
이때, 시편(도 5의 T)의 크기가 너무 작거나 얇아서 손으로 잡아 연마하기 어려운 경우 일정 크기의 틀에 플라스틱 용액, 예를 들어 에폭시를 부은 다음 시편(도 5의 T)을 넣어서 굳힌 상태의 시편(도 5의 T), 즉 마운트된 시편(도 5의 T)을 시편장착부(216)에 장착하게 된다.At this time, if the size of the specimen (T in Fig. 5) is too small or thin and difficult to hold and polish by hand, the plastic solution, for example, epoxy is poured into a mold of a predetermined size and then the specimen (T in Fig. 5) is hardened. The specimen (T in FIG. 5), that is, the mounted specimen (T in FIG. 5) is mounted on the specimen mounting portion 216.
여기서, 시편장착부(216)가 형성되는 시편홀더(210) 부분은 마운트된 시편(도 5의 T)을 좀 더 확실하게 고정시킬 수 있도록 둘레측이 일부 절개된 상태에서 별도의 체결부재를 통해 죄어지거나 풀어질 수 있도록 구성되어 시편장착부(216)에 장착되는 마운트된 시편(도 5의 T)의 둘레측을 강하게 가압하여 고정시킬 수 있고, 연마 후에는 쉽게 마운트된 시편(도 5의 T)을 분리할 수 있도록 구성될 수 있다.Here, the specimen holder 210 portion in which the specimen mounting portion 216 is formed is clamped through a separate fastening member in a partially cut state in order to more securely mount the mounted specimen (T in FIG. 5). It is configured to be loosened or loosened, and can be fixed by strongly pressing the circumferential side of the mounted specimen (T in FIG. 5) mounted to the specimen mounting portion 216, and after polishing, the easily mounted specimen (T in FIG. 5) It can be configured to be detachable.
탄성체(220)는 시편홀더(210)에 연결되어 시편홀더(210)를 탄성지지하는 부분으로, 스프링이 사용될 수 있다.The elastic body 220 is connected to the specimen holder 210 to elastically support the specimen holder 210, and a spring may be used.
누름체(230)는 시편홀더(210)와 마찬가지로 원통 형상으로 이루어지는데 탄성체(220)에 연결되고, 누름 조작이 가능하여 탄성체(220)를 통해 시편홀더(210)에 가압력을 전달하는 구성요소이다. 이러한 누름체(230)에는 도면상 하부말단측에 하기에 서술하는 가이드체(240)에 결합되도록 하는 걸림부(232)가 형성된다.The press body 230 is formed in a cylindrical shape similar to the specimen holder 210, and is connected to the elastic body 220 and is a component that transmits pressing force to the specimen holder 210 through the elastic body 220. . The pressing body 230 is formed with a locking portion 232 to be coupled to the guide body 240 described below on the lower end side in the figure.
가이드체(240)는 원통형상으로 이루어져 길이방향을 따라 시편홀더(210)와 누름체(230)가 서로 반대방향 외측으로 돌출되도록 시편홀더(210)와 누름체(230)가 내측에 장착되고, 시편홀더(210)와 누름체(230)의 동작을 가이드하는 부분이다. 이러한 가이드체(240)의 형상은 시편홀더(210)와 누름체(230)의 형상에 따라 변경 가능하다. The guide body 240 is formed in a cylindrical shape so that the specimen holder 210 and the pressing body 230 are mounted on the inside such that the specimen holder 210 and the pressing body 230 protrude outwards in opposite directions along the length direction. This is a part for guiding the operation of the specimen holder 210 and the pressing body 230. The shape of the guide body 240 can be changed according to the shape of the specimen holder 210 and the pressing body 230.
가이드체(240)에는 누름체(230)의 동작방향을 따라 개방된 개구홀(242)이 형성되고, 내측에는 전술한 시편홀더(210)와 누름체(230)의 걸림부(212, 232)가 가이드체(240)의 길이방향을 따라 이동할 수 있도록 가이드하는 가이드홈(244)이 형성된다. An opening hole 242 is formed in the guide body 240 along the direction of operation of the pressing body 230, and inside the engaging portions 212 and 232 of the specimen holder 210 and the pressing body 230. The guide groove 244 is formed so that the guide can move along the longitudinal direction of the guide body 240.
여기서, 개구홀(242)을 통해 시편홀더(210), 누름체(230) 중 어느 하나 또는 둘이 외부에 노출될 수 있다. Here, one or two of the specimen holder 210 and the pressing body 230 may be exposed to the outside through the opening hole 242.
도시된 도면에서는 개구홀(242)이 가이드체(240)의 하부측에만 형성되어 시편홀더(210)만 외부에 노출되도록 구성되나, 개구홀(242)이 가이드체(240)의 길이방향을 따라 장공 형상으로 형성되도록 하여 시편홀더(210)와 누름체(230)가 모두 외부에 노출되도록 구성될 수도 있다.In the figure, the opening hole 242 is formed only on the lower side of the guide body 240 so that only the specimen holder 210 is exposed to the outside, but the opening hole 242 is along the longitudinal direction of the guide body 240. The specimen holder 210 and the pressing body 230 may be both exposed to the outside by being formed in a long hole shape.
이처럼 시편홀더(210), 누름체(230) 중 어느 하나 또는 둘을 외부에 노출시키는 것은, 작업자가 시편(도 5의 T)을 연마할 때 개구홀(242)의 길이방향을 따라 움직이게 되는 시편홀더(210), 누름체(230) 중 어느 하나 또는 둘을 보면서 누름체(230)를 통한 가압력을 조절할 수 있고, 시편(도 5의 T)이 연마된 정도를 알 수 있도록 하기 위한 것이다.Exposing one or both of the specimen holder 210 and the pressing body 230 to the outside is a specimen that moves along the longitudinal direction of the opening hole 242 when the operator polishes the specimen (T in FIG. 5). The pressing force through the pressing body 230 can be adjusted while looking at one or two of the holder 210 and the pressing body 230, and the test piece (T in FIG. 5) is used to determine the degree of grinding.
특히, 본 발명에서는 시편홀더(210)의 돌출돌기(214)가 개구홀(242)에 삽입되어 장착되도록 구성되어 좀 더 시편홀더(210)가 외부에 잘 노출되도록 하게 되며, 이처럼 시편홀더(210)의 돌출돌기(214)가 개구홀(242)에 장착되어 외부에 노출됨으로써 작업자가 원활하게 가압력을 조절할 수 있고, 시편(도 5의 T)이 연마된 정도를 쉽게 알 수 있다. 이때, 도시되지는 않았으나, 보다 정밀한 시편(도 5의 T)의 연마를 위해 개구홀(242)의 길이방향을 따라 눈금을 형성하도록 구성될 수도 있다.In particular, in the present invention, the protruding protrusion 214 of the specimen holder 210 is configured to be inserted into the opening hole 242 to be mounted so that the specimen holder 210 is more exposed to the outside, and thus the specimen holder 210. The protrusion 214 of the) is mounted to the opening hole 242 to be exposed to the outside, the operator can smoothly adjust the pressing force, it is easy to see the degree of polishing of the specimen (T in Fig. 5). At this time, although not shown, it may be configured to form a scale along the longitudinal direction of the opening hole 242 for a more precise grinding of the specimen (T of FIG. 5).
연결수단(300)은 탈부착수단(100)과 시편연마수단(200)을 연결하는 구성요소로, 지지기둥(310)과 연결대(320)를 포함하여 이루어진다.The connecting means 300 is a component for connecting the detachable means 100 and the specimen polishing means 200, and includes a support pillar 310 and a connecting table 320.
지지기둥(310)은 탈부착수단(100)에 형성되는 부분이고, 연결대(320)는 지지기둥(310)과 시편연마수단(200), 특히 가이드체(240) 사이를 연결하게 된다. Support pillar 310 is a portion formed in the detachable means 100, the connection table 320 is connected between the support pillar 310 and the specimen polishing means 200, in particular the guide body 240.
도 4의 (a) 및 (b)는 본 발명의 제2 실시예에 따른 폴리싱 장치용 보조장치를 나타낸 도이다.4A and 4B are views showing an auxiliary device for a polishing apparatus according to a second embodiment of the present invention.
먼저, 도 4의 (a)에 나타나는 것과 같이, 본 발명의 제2 실시예에 따른 폴리싱 장치용 보조장치는 전술한 제1 실시예에 따른 폴리싱 장치용 보조장치와 거의 유사하게 구성되나, 연결수단(300)의 형상에서 서로 구분된다.First, as shown in (a) of FIG. 4, the auxiliary device for the polishing device according to the second embodiment of the present invention is configured almost similarly to the auxiliary device for the polishing device according to the first embodiment described above. In the shape of 300 are distinguished from each other.
즉, 제1 실시예에서는 연결대(320)가 단순히 지지기둥(310)과 시편연마수단(200)의 가이드체(240) 사이를 연결하게 되나, 제2 실시예에서는 연결대(320)가 힌지(322)를 이용하여 지지기둥(310)에 대해 회동 가능하게 구성된다.That is, in the first embodiment, the connecting table 320 is simply connected between the support pillar 310 and the guide body 240 of the specimen polishing means 200, but in the second embodiment, the connecting table 320 is hinged 322. It is configured to be rotatable with respect to the support pillar 310 by using a).
따라서, 시편(도 5의 T)의 연마하던 도중 도 4의 (b)와 같이 연결대(320)를 들어올려 연마중인 시편(도 5의 T)의 상태를 쉽게 확인할 수 있다.Therefore, while polishing the specimen (T in FIG. 5), it is possible to easily check the state of the specimen (T in FIG. 5) being polished by lifting the connecting rod 320 as shown in FIG. 4B.
이때, 힌지(322)는 시편(도 5의 T)의 연마시에는 연결대(320)가 회동하지 않도록 고정시키고, 시편(도 5의 T)의 상태를 확인하고자 할 때만 힌지(322)를 풀어주어 연결대(320)가 회동할 수 있도록 하는 구조, 예를 들어 나사나 볼트식으로 연결대(320)와 지지기둥(310)을 체결하는 것이 바람직하다.At this time, the hinge 322 is fixed so that the connecting table 320 does not rotate when polishing the specimen (T in Fig. 5), and loosen the hinge 322 only to check the state of the specimen (T in Fig. 5) It is preferable to fasten the connecting rod 320 and the support pillar 310 in a structure that allows the connecting rod 320 to rotate, for example, by a screw or bolt.
여기서, 도시되지는 않았으나 연결대(320)가 힌지(322)를 이용하여 지지기둥(310)에 대해 회동 가능하게 구성되는 본 발명의 제2 실시예에 따른 폴리싱 장치용 보조장치 외에 연결수단(300)의 지지기둥(310)이 힌지 등을 이용하여 탈부착수단(100)의 탈부착몸체(110)에 회동 가능하게 구성되도록 구성할 수도 있다.Here, although not shown, the connecting means 300 in addition to the auxiliary device for the polishing apparatus according to the second embodiment of the present invention is configured to be rotatable with respect to the support pillar 310 using the hinge 322, the connection means 300 The support pillar 310 may be configured to be rotatable to the detachable body 110 of the detachable means 100 using a hinge or the like.
지금부터는 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치의 동작에 대하여 설명한다. 이때, 본 발명의 제2 실시예에 따른 폴리싱 장치용 보조장치의 경우 제1 실시예에 따른 폴리싱 장치용 보조장치의 동작과 거의 동일하므로, 여기에서는 제2 실시예에 대한 설명은 생략한다.The operation of the auxiliary device for polishing apparatus according to the first embodiment of the present invention will now be described. At this time, since the auxiliary device for the polishing apparatus according to the second embodiment of the present invention is almost the same as the operation of the auxiliary device for the polishing apparatus according to the first embodiment, the description of the second embodiment is omitted here.
도 5는 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치를 폴리싱 장치에 부착시켜 시편을 연마하는 상태를 나타낸 상태도이다.5 is a state diagram showing a state in which the polishing apparatus is polished by attaching the polishing apparatus auxiliary device according to the first embodiment of the present invention to the polishing apparatus.
도 5에 도시된 바와 같이, 본 발명의 제1 실시예에 따른 폴리싱 장치용 보조장치를 사용하여 시편(T)을 연마하고자 하는 경우 우선, 시편(T)을 시편홀더(210)에 장착하게 된다.As shown in FIG. 5, when the specimen T is to be polished using the polishing apparatus auxiliary device according to the first embodiment of the present invention, the specimen T is first mounted on the specimen holder 210. .
이때, 시편(T)이 시편홀더(210)에 장착될 수 있는 충분한 크기가 아닌 경우 에폭시를 이용하여 마운트된 시편(T)을 시편홀더(210)의 시편장착부(216)에 장착한다.At this time, when the specimen (T) is not large enough to be mounted on the specimen holder 210, the specimen (T) mounted using the epoxy is mounted on the specimen mounting portion 216 of the specimen holder 210.
다음, 시편홀더(210)에 장착된 마운트된 시편(T)이 수동식 폴리싱 장치(PM)의 연마패드 상측에 위치하도록 수동식 폴리싱 장치(PM)의 상면 또는 측면에 탈부착수단(100)을 부착시킨다. 이를 위해, 스위치(120)를 동작시켜 탈부착몸체(110) 내의 전자석에 전원을 공급함으로써 전자석의 자성을 통해 탈부착몸체(110)가 수동식 폴리싱 장치(도 5의 PM)에 고정된다.Next, the detachable means 100 is attached to the upper surface or the side of the manual polishing apparatus PM so that the mounted specimen T mounted on the specimen holder 210 is positioned above the polishing pad of the manual polishing apparatus PM. To this end, by operating the switch 120 to supply power to the electromagnet in the detachable body 110, the detachable body 110 is fixed to the manual polishing apparatus (PM in Fig. 5) through the magnetism of the electromagnet.
그리고 수동식 폴리싱 장치(PM)의 내부에 설치된 모터(도시하지 않음)에 결합되어 모터(M)로부터 제공되는 회전력에 의해 연마패드가 회전하고 있는 상태에서 작업자가 누름체(230)를 직접 눌러 가압하면, 탄성체(220)를 통해 시편홀더(210)가 고르게 가압력을 받게 되어 시편홀더(210)에 장착된 시편(T)을 균일한 평탄도로 연마할 수 있게 된다.And when the operator directly presses the pressing body 230 in the state that the polishing pad is rotated by the rotational force provided from the motor (M) is coupled to a motor (not shown) installed inside the manual polishing device (PM) and pressurized The specimen holder 210 is uniformly subjected to pressing force through the elastic body 220, so that the specimen T mounted on the specimen holder 210 may be polished to a uniform flatness.
이때, 작업자는 가이드체(240)의 개구홀(242)을 통해 노출되는 누름체(230)의 돌출돌기(214)가 하강하는 상태를 보면서 시편(T)을 연마시키는 힘을 조절할 수 있고, 시편(T)이 연마된 정도를 파악할 수 있다. At this time, the operator can adjust the force for polishing the specimen (T) while watching the state in which the protrusion 214 of the pressing body 230 exposed through the opening hole 242 of the guide body 240 descends, the specimen The degree to which (T) is polished can be grasped.
이처럼 본 발명에 따른 폴리싱 장치용 보조장치는 적은 비용으로 자동식 폴리싱 장치의 효과를 얻을 수 있고, 시편을 균일한 평탄도로 연마할 수 있으며, 구조가 간단하여 제작 및 설치가 쉽고 소요 비용을 절감할 수 있는 유용한 발명이라 할 것이다.As such, the auxiliary device for the polishing apparatus according to the present invention can obtain the effect of the automatic polishing apparatus at a low cost, can polish the specimen to a uniform flatness, and the structure is simple to manufacture and install, and the required cost can be reduced. It is a useful invention.
본 발명의 권리범위는 상술한 실시예에 한정되는 것이 아니라 첨부된 특허청구범위 내에서 다양한 형태의 실시예로 구현될 수 있다. 특허청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술 분야에서 통상의 지식을 가진 자라면 누구든지 변형 가능한 다양한 범위까지 본 발명의 청구범위 기재의 범위 내에 있는 것으로 본다.The scope of the present invention is not limited to the above-described embodiment, but may be embodied in various forms of embodiments within the scope of the appended claims. Without departing from the gist of the invention claimed in the claims, it is intended that any person skilled in the art to which the present invention pertains falls within the scope of the claims described in the present invention to various extents which can be modified.
Claims (6)
- 폴리싱 장치용 보조장치에 있어서,In the auxiliary device for the polishing device,폴리싱 장치에 탈부착되는 탈부착수단;Detachable means detachable from the polishing apparatus;시편이 장착되며, 장착된 상기 시편을 상기 폴리싱 장치측을 향해 가압하여 상기 폴리싱 장치를 통해 연마시키는 시편연마수단; 및Specimen polishing means for mounting a specimen, the specimen polishing means for pressing the mounted specimen toward the polishing apparatus side to polish through the polishing apparatus; And상기 탈부착수단과 상기 시편연마수단을 연결하는 연결수단;을 포함하는 폴리싱 장치용 보조장치.And means for connecting said detachable means and said specimen polishing means.
- 제1항에 있어서,The method of claim 1,상기 탈부착수단은, The detachable means,탈부착몸체; 및Detachable body; And상기 탈부착몸체에 마련되고, 상기 탈부착몸체가 상기 폴리싱 장치에 장착 또는 분리되도록 상기 탈부착몸체에 공급되는 전원을 온 또는 오프시켜 전자석의 구동여부를 제어하는 스위치;를 포함하는 것을 특징으로 하는 폴리싱 장치용 보조장치.And a switch provided on the detachable body and controlling whether the electromagnet is driven by turning on or off the power supplied to the detachable body so that the detachable body is attached to or detached from the polishing apparatus. Auxiliary device.
- 제1항에 있어서,The method of claim 1,상기 시편연마수단은,The specimen polishing means,상기 시편이 장착되는 시편홀더;A specimen holder on which the specimen is mounted;상기 시편홀더에 연결되어 상기 시편홀더를 탄성지지하는 탄성체;An elastic body connected to the specimen holder to elastically support the specimen holder;상기 탄성체에 연결되고, 누름 조작이 가능하여 상기 탄성체를 통해 상기 시편홀더에 가압력을 전달하는 누름체; 및A pressing body connected to the elastic body and capable of pressing operation to transfer a pressing force to the specimen holder through the elastic body; And길이방향을 따라 상기 시편홀더와 상기 누름체가 서로 반대방향 외측으로 돌출되도록 상기 시편홀더와 상기 누름체가 내측에 장착되고, 상기 시편홀더와 상기 누름체의 동작을 가이드하는 가이드체;를 포함하는 것을 특징으로 하는 폴리싱 장치용 보조장치.And a guide body mounted to the inside of the specimen holder and the pressing body so that the specimen holder and the pressing body protrude outwardly in opposite directions along a longitudinal direction, and guide the operation of the specimen holder and the pressing body. Auxiliary apparatus for polishing apparatus.
- 제3항에 있어서,The method of claim 3,상기 가이드체에는,In the guide body,상기 누름체의 동작방향을 따라 개방된 개구홀이 형성되고,Opening holes are formed along the operation direction of the pressing body;상기 시편홀더, 상기 누름체 중 어느 하나 또는 둘이 상기 개구홀을 통해 외부에 노출되는 것을 특징으로 하는 폴리싱 장치용 보조장치.One or two of the specimen holder and the pressing body are exposed to the outside through the opening hole.
- 제1항 내지 제4항 중 어느 한 항에 있어서,The method according to any one of claims 1 to 4,상기 연결수단은,The connecting means,상기 탈부착수단에 형성되는 지지기둥; 및A support pillar formed on the detachable means; And상기 지지기둥과 상기 시편연마수단 사이를 연결하는 연결대;를 포함하는 것을 특징으로 하는 폴리싱 장치용 보조장치.A connecting device for connecting between the support pillar and the specimen polishing means; Auxiliary apparatus for a polishing device comprising a.
- 제5항에 있어서,The method of claim 5,상기 연결대는,The connecting rod,상기 지지기둥에 대해 회동 가능하게 구성되는 것을 특징으로 하는 폴리싱 장치용 보조장치.Auxiliary device for a polishing device, characterized in that configured to be rotatable with respect to the support pillar.
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KR102259857B1 (en) * | 2021-02-04 | 2021-06-03 | 대한민국 (관리부서 : 환경부 국립환경과학원장) | Apparatus and Method for Manufacturing Tire Particles for Risk Assessment |
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JP2003011055A (en) * | 2001-07-03 | 2003-01-15 | Dainippon Printing Co Ltd | Polishing machine |
KR20050039079A (en) * | 2003-10-23 | 2005-04-29 | 동부아남반도체 주식회사 | Machine and method for fabricating a sample |
KR101280690B1 (en) * | 2012-11-28 | 2013-07-01 | 허광호 | Auto polishing apparatus having polishing pad which can be attached and detached |
KR20130138419A (en) * | 2012-06-11 | 2013-12-19 | 주식회사 알앤비 | Specimen polishing machine |
KR20140125479A (en) * | 2013-04-19 | 2014-10-29 | 현대제철 주식회사 | Sample holder device and sample polishing apparatus with function of controling polishing thickness |
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- 2016-06-10 KR KR1020160072406A patent/KR101831517B1/en active IP Right Grant
- 2016-07-29 WO PCT/KR2016/008385 patent/WO2017213294A1/en active Application Filing
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JP2003011055A (en) * | 2001-07-03 | 2003-01-15 | Dainippon Printing Co Ltd | Polishing machine |
KR20050039079A (en) * | 2003-10-23 | 2005-04-29 | 동부아남반도체 주식회사 | Machine and method for fabricating a sample |
KR20130138419A (en) * | 2012-06-11 | 2013-12-19 | 주식회사 알앤비 | Specimen polishing machine |
KR101280690B1 (en) * | 2012-11-28 | 2013-07-01 | 허광호 | Auto polishing apparatus having polishing pad which can be attached and detached |
KR20140125479A (en) * | 2013-04-19 | 2014-10-29 | 현대제철 주식회사 | Sample holder device and sample polishing apparatus with function of controling polishing thickness |
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