JP2001221828A - Connector for test head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a connector for a test head which enables to replace a test board within a limited space and moreover, facilitate the connection of the test head to an automatic handler. SOLUTION: The connector 1 for a test head is so arranged to carry a test head 3 of an IC tester for connecting the test head to a testing part of an automatic handler. A positioning means is provided to position the test head 3 with the testing part, while aside from the positioning means, a rotary means is provided to turn the test head 3 to a position that allows the loading or unloading thereof. A rotating means is provided with a θ4-axis turntable 81 between a frame 2 and the test head 3, a ball bearing 84 to hold the θ4-axis turntable 81 rotatably within a horizontal plane, and a positioning pin 86 to fix the θ4-axis turntable 81 which is incapable of rotation at a prescribed position or release it at the position. The center C2 of the rotation of the θ4-axis turntable 81 is positioned being separated from the center C1 within the horizontal plane of the test head 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test head connection device for mounting a test head of an IC tester and connecting the test head to a test section of an auto handler.

[0002]

2. Description of the Related Art As shown in FIG. 24, a device test apparatus for testing the electrical characteristics of a semiconductor device that has been assembled is composed of an auto-handler 100, an IC tester 101 and the like. The IC tester 101 is a tester body 1
02, a test head 3 and the like, which are connected via a cable. A main control circuit, a power supply circuit, and the like are stored in the tester main body 102, while a test board 10 having a plurality of IC sockets is mounted in the test head 3.
3 is mounted. The test head 3 is an auto handler 10
0 is connected to the test unit 100A, and is appropriately replaced according to, for example, the type of the semiconductor device to be tested and the test content. The test head 3 is mounted on a connection device 105 of the test head, and the connection device 105 performs movement and positioning for replacement.

In the conventional test head connection device 105, an elevating mechanism for moving the test head 3 in the vertical direction (Z-axis direction) and the test head 3
And a horizontal moving mechanism for moving in a horizontal direction (Y-axis direction) that approaches and separates from the camera. For example, when connecting the test head 3 to the auto handler 100, the test head 3 is mounted on the connection device 105, and the test head 3 is moved in the Y-axis and Z-axis directions by the horizontal moving mechanism and the elevating mechanism. Test head 3 in the axial direction
After positioning, the test head 3 is moved to the test section 100A.
Connect to When replacing the test board 103, the connection between the test head 3 and the auto-handler 100 is released, and the test head 3 can be attached and detached by the horizontal moving mechanism and the elevating mechanism (that is, the auto-handler 1).
After the test head 3 is retracted to a position where 00 does not interfere, the test board 103 is replaced.

[0004]

However, in the above-described conventional test head connecting device 105, when the test head 3 is replaced or mounted, the test head 3 is retracted in the Y-axis direction. Space (vertical space) needed to be secured. As a result, the installation place of the auto handler 100 may be limited. Further, the conventional test head connection device 1
In the case of 05, each time the test board 103 is exchanged, the test head 3 has to be positioned with respect to the test section 100A.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and has an object to provide a test head connecting apparatus capable of replacing a test board in a limited space and easily connecting a test head to an auto handler. The purpose is to provide.

[0006]

According to an aspect of the present invention, there is provided a test head connecting apparatus for mounting a test head of an IC tester and connecting the test head to a test section of an auto handler. And a positioning means for positioning the test head with respect to the test portion, and a rotating means for rotating the test head to a detachable position separately from the positioning means.

According to the first aspect of the present invention, the test board is provided with a rotating means for rotating the test head to a detachable position, in addition to the positioning means for positioning the test head with respect to the test portion. The positioning of the test head at the time of replacement can be omitted, and the test head can be easily connected to the auto handler. In addition, since the test head is rotated and the test head is placed in its mounting / detaching position, the range of movement of the test head when replacing the test board can be reduced as compared with the conventional case, and the test board can be installed in a limited space. Can be replaced.

According to a second aspect of the present invention, in the connection device for a test head according to the first aspect, for example, as shown in FIG. 7 and FIG. 3) a rotary table (for example, a θ4-axis rotary table 81 or the like) provided between the rotary table and a rotary table holding means (for example, a ball bearing 84 or the like) for holding the rotary table in a rotatable state in a horizontal plane.
And a rotary table fixing means (for example, a positioning pin 86 and a guide hole 85a) for fixing or releasing the rotary table so that it cannot rotate at a predetermined position. The rotation center (C2) of the rotary table is determined by the test head. Is provided at a position separated from the center (C1) in the horizontal plane.

According to the second aspect of the present invention, the test head can be rotated by rotating the rotary table in a state where the fixing by the rotary table fixing means is released. Further, by fixing the rotary table by the rotary table fixing means, the test head can be fixed so as not to rotate.

According to a third aspect of the present invention, in the test head connecting device according to the second aspect, the rotary table fixing means includes, for example, a support table for supporting the rotary table as shown in FIGS. (E.g., the X-axis moving table 11), a plurality of engaging portions (e.g., guide holes 85a) arranged along an arc centered on the rotation center of the rotary table; And an engaged portion (for example, a positioning pin 86) that can be engaged with any one of the plurality of engaging portions.

According to the third aspect of the present invention, the rotary table can be non-rotatably fixed by engaging the engaging portion and the engaged portion. Also, since a plurality of engaging portions are provided,
The fixed position of the turntable can be selectively switched.

According to a fourth aspect of the present invention, in the test head connecting device according to the third aspect, the rotary table fixing means is provided in a direction approaching the engaging portion as shown in FIGS. 7 and 8, for example. (E.g., a coil spring 88) that applies an urging force to the engaged portion, and releases the engagement with the engaging portion against the urging force of the urging device. A locking means (for example, a locking pin 87b) capable of locking the engaged portion in the state is provided.

According to the fourth aspect of the present invention, the engagement state between the engaging portion and the engaged portion can be maintained by the urging means. Further, since the locking means is provided, the state in which the engagement between the engaging portion and the engaged portion is released can be maintained.

According to a fifth aspect of the present invention, in the test head connecting device according to the third aspect, the rotary table fixing means is provided, for example, as shown in FIG. Urging means (for example, a coil spring 88 or the like) for applying a urging force to the engaging portion; and moving the engaged portion in a direction away from the engaging portion to thereby engage the engaged portion with the engaging portion. Disengagement capable of releasing the engagement with the engagement portion and holding the engaged portion in a state where the engagement with the engagement portion is released against the urging force of the urging means. (E.g., a disengagement means including an engagement disengagement cylinder 200 and an air supply source).

According to the fifth aspect of the present invention, the engagement state between the engaging portion and the engaged portion can be maintained by the urging means. Further, the engagement between the engagement portion and the engaged portion can be released by the engagement release means, and the state in which the engagement has been released can be maintained.

According to a sixth aspect of the present invention, in the connection apparatus for a test head according to the fifth aspect, for example, as shown in FIG. Switch operation, etc.)
And moving the engaged portion in a direction away from the engaging portion.

According to the sixth aspect of the present invention, the engaged portion is moved in a direction away from the engaging portion based on a predetermined switch operation. Can be easily released.

According to a seventh aspect of the present invention, in the connection apparatus for a test head according to any one of the first to sixth aspects, the vertical axis passing through the center of the test head passes through the Z axis, the center passes through the center of the test head, With two axes orthogonal to each other in a horizontal plane as an X axis and a Y axis, the positioning means moves the test head in the X axis direction and adjusts the position of the test head in the X axis direction. Adjusting means, and moving the test head in the Y-axis direction,
Y-axis adjustment means capable of adjusting the position of the test head in the Y-axis direction, and Z-axis adjustment capable of adjusting the position of the test head in the Z-axis direction by moving the test head in the Z-axis direction. Means, θ1 axis adjusting means for rotating the test head in a rotation direction about the X axis as an axis, and adjusting a rotational position of the test head in the rotation direction, and the Y axis as an axis. Rotating the test head in a rotational direction, a θ2-axis adjusting means capable of adjusting a rotational position of the test head in the rotational direction, and rotating the test head in a rotational direction about the Z axis, Θ3 axis adjusting means capable of adjusting the rotational position of the test head in the rotational direction.

According to the present invention, the position of the test head in the X-axis direction is adjusted by the X-axis adjusting means, and the position of the test head in the Y-axis direction is adjusted by the Y-axis adjusting means. The position of the test head in the Z-axis direction is adjusted by the axis adjusting means, the rotational position of the test head in the rotational direction about the X axis is adjusted by the θ1-axis adjusting means, and the Y-axis adjusting means is adjusted by the θ2-axis adjusting means.
The rotational position of the test head in the rotational direction about the axis is adjusted, and the rotational position of the test head in the rotational direction about the Z axis is adjusted by the θ3-axis adjusting means. The test head can be positioned accurately. Therefore, the connection between the test head and the auto handler becomes easy.

According to an eighth aspect of the present invention, in the test head connecting device according to the seventh aspect, for example, as shown in FIGS. 19 and 23, the force in the Y-axis direction is applied to the test head. By doing so, the Y of the test head
Y-axis driving means (for example, Y-axis driving means for smooth movement in the axial direction)
(A Y-axis driving unit configured by an axis moving cylinder 210, an air supply source, and the like).

According to the eighth aspect of the present invention, the test head is provided with a Y-axis driving means for applying a force in the Y-axis direction to the test head to smoothly move the test head in the Y-axis direction. It is easy to move the head in the Y-axis direction. Therefore, the connection between the test head and the auto handler becomes easy.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIGS.

[First Embodiment] FIGS. 1 to 4 show a connection device for a test head according to a first embodiment of the present invention. FIG. 1 is a front view, and FIG. Side view, FIG. 3
Is a plan view (with the test head mounted), and FIG. 4 is a plan view (with the test head removed). In the following description, the vertical axis passing through the center C1 of the test head is the Z axis, the two axes passing through the center C1 of the test head and orthogonal to each other in the horizontal plane are the X axis and the Y axis, and the X axis is the axis. The rotation direction is the θ1 direction, the rotation direction about the Y axis is the θ2 direction, and the rotation direction about the Z axis is the θ3 direction. A vertical axis passing through a point C2 (see FIG. 3) located at a position separated from the center C1 of the test head in a horizontal plane is defined as a θ4 axis, and a rotation direction having the θ4 axis as an axis is defined as a θ4 direction.

As shown in FIGS. 1 to 4, on the gantry 2,
A θ3-axis rotating table 61 (θ3-axis adjusting means) is arranged so as to be rotatable in the θ3-direction with respect to the gantry 2, and moves on the θ3-axis rotating table 61 in the X-axis direction with respect to the θ3-axis rotating table 61. X-axis moving table 11 when possible
(X-axis adjusting means) is provided. On the X-axis moving table 11, a θ4-axis rotating table 81 (rotating means) is rotatable with respect to the X-axis moving table 11 in the θ4 direction.
Is mounted on the column portion 90 erected on the θ4-axis rotary table 81 so as to be movable in the Z-axis direction along the side wall surface 90A. I have. A substantially U-shaped arm 51 (θ2-axis adjusting means) in a plan view is attached to the lifting block 31 so as to be rotatable in the θ2 direction with respect to the side wall surface.
As shown in FIG. 18, θ1 axis rotating plates 41A and 41B (θ1 axis adjusting means) are rotatable in the θ1 direction with respect to the side walls 50A and 50B inside the both side walls 50A and 50B. Each is attached. Each θ1 axis rotating plate 41
Inside the A and 41B, Y-axis moving plates 21A and 21B (Y-axis adjusting means) are attached so as to be movable in the Y-axis direction with respect to the θ1-axis rotating plate.
During 1B, the test head 3 is mounted.

First, the θ3-axis adjusting means for adjusting the test head 3 in the θ3-direction and the X-axis adjusting means for adjusting the test head 3 in the X-axis direction will be described.

As shown in FIGS. 5 and 6, a pair of large and small arc-shaped guide rails 63A and 63B centered on the center C1 of the test head 3 (see FIG. 3) are laid on the gantry 2 side by side. ing. The θ3-axis rotating table 61 has a plurality of sliding portions 62 slidable along the guide rails 63A and 63B, and is rotatable in the θ3 direction with respect to the gantry 2. At both ends of the guide rail 63A, there are provided stopper blocks 64 for defining a rotation range of the θ3-axis rotary table 61 (a range in which the test head 3 can be finely adjusted in the θ3 direction).

On the θ3-axis rotary table 61, a pair of guide rails 12A and 12B parallel to the X axis are laid side by side. The X-axis moving table 11 includes a plurality of sliding portions 13 slidable along the guide rails 12A and 12B.
And is movable in the X-axis direction with respect to the θ3-axis rotating table 61. At both ends of the guide rail 12A, there are provided stopper blocks 14 for defining a moving range of the X-axis moving table 11 (a range in which the test head 3 can be finely adjusted in the X-axis direction).

On the lower surface of the X-axis moving table 11,
A clamp bracket 71 is attached. A clamp lever 72 is attached to the lower side of the clamp bracket 71 in a rotatable state via a hinge pin 74,
A knurled knob 73 having a thread on a shaft portion 73a is attached to a tip end of the clamp bracket 71 in a state of penetrating the X-axis moving table 11 and the clamp bracket 71. On the other hand, the spacer block 7
5, a flat brake shoe 76 is attached. The brake shoe 76 is horizontally disposed in a gap S between the clamp lever 72 and the clamp bracket 71 (a gap formed on the opposite side of the knurled knob 73 with the hinge pin 74 therebetween). That is, by rotating the knurled knob 73 and screwing the shaft portion 73a, the hinge pin 74
The clamp lever 72 is rotated about the brake lever 72 and the brake shoe 7 is
6, the X-axis moving table 11 and the θ3-axis rotating table 61 can be fixed to the gantry 2.

The X-axis adjusting means and θ
The test head 3 is moved in the X-axis direction and θ by the three-axis adjusting means.
When positioning in three directions, first, the operation handle 4
By operating (FIG. 1), the X-axis moving table 11 is finely adjusted in the X-axis direction, and the θ3-axis rotating table 61 is finely adjusted in the θ3 direction. Next, by rotating the knurled knob 73, the X-axis moving table 11 and the θ3-axis rotating table 61 are fixed to the gantry 2, and the test head 3 is positioned in the X-axis direction and the θ3 direction.

Next, a rotating means for rotating the test head 3 in the θ4 direction will be described.

As shown in FIGS. 7 and 8, on the X-axis moving table 11 (support table), a substantially columnar rotary support 82 whose axis is in the θ4-axis direction is protrudingly provided. A concave portion 83 into which the rotation support portion 82 is fitted
Are formed. Outer peripheral surface of rotation support portion 82 and concave portion 83
Ring-shaped ball bearing 84
(Rotating table holding means) is interposed, and the θ4 axis rotating table 81 is held by the ball bearing 84 so as to be rotatable in the θ4 direction with respect to the X axis moving table 11.

An arc-shaped guide block 85 is provided on the X-axis moving table 11, and a plurality of guide holes 85a (engagement portions) into which positioning pins 86 (engaged portions) can be inserted are provided on the upper surface of the guide block 85. Joint) is arranged. On the other hand, a positioning pin 86 is attached to the θ4-axis rotating table 81 in a state of vertically penetrating the θ4-axis rotating table 81. That is, the tip 86a of the positioning pin 86
Is inserted into the guide hole 85a of the guide block 85, the θ4-axis rotating table 81 is fixed to the X-axis moving table 11 so as not to rotate. Further, the fixed position of the θ4-axis rotary table 81 changes according to the guide hole 85a into which the positioning pin 86 is inserted. A coil spring 88 (biasing means) for applying a biasing force in a direction approaching the guide block 85 is attached to the positioning pin 86 in a state wound around the shaft portion 86b. A locking pin 87b (locking means) for locking the positioning pin 86 against the urging force of the coil spring 88 protrudes from the upper surface of the θ4-axis rotating table 81, while the shaft portion 86b of the positioning pin 86 is provided.
Has a notch 86 for preventing locking by the locking pin 87b.
c is formed.

That is, the tip portion 86 a of the positioning pin 86 is always brought into the guide hole 85 by the urging force of the coil spring 88.
The positioning pin 86 and the guide block 85 are engaged with each other, and the θ4-axis rotating table 81 is fixed to the X-axis moving table 11 so as not to rotate. From this state, when the positioning pin 86 is lifted up and the engagement between the positioning pin 86 and the guide block 85 is released, the θ4-axis rotating table 81 becomes rotatable in the θ4 direction with respect to the X-axis moving table 11. . At this time, if the positioning pin 86 is turned around the axis and the positioning pin 86 is locked by the locking pin 87b, this state can be maintained. Further, if the positioning pin 86 is further rotated to dispose the locking pin 87b and the notch 86c to face each other, the locking can be released. For example, when the θ4-axis rotating table 81 is rotated in the θ4 direction with respect to the X-axis moving table 11 in a state where the locking is released, the distal end portion 86 a of the positioning pin 86 advances while pressing the upper surface of the guide block 85. Later, when it encounters the guide hole 85a, and at that time, the distal end portion 86a of the positioning pin 86 is inserted into the guide hole 85a by the urging force of the coil spring 88,
At that time, the θ4-axis rotating table 81 is fixed non-rotatably with respect to the X-axis moving table 11.

When the test head 3 is rotated in the θ4 direction by the rotating means constructed as described above, the positioning pin 86 is pulled up (the engagement between the positioning pin 86 and the guide block 85 is released. State)
By operating the operation handle 4, the θ4 axis rotating table 81 is rotated in the θ4 direction with respect to the X axis moving table 11.
On the other hand, when the test head 3 is fixed so as not to rotate in the θ4 direction, the positioning pin 86 is pushed in (the positioning pin 86 and the guide block 85 are engaged).
And the θ4 axis rotation table 81 is
Is fixed so that it cannot rotate.

Next, Z-axis adjusting means for adjusting the test head 3 in the Z-axis direction will be described.

As shown in FIGS. 1 to 4, a hollow column 90 is erected on the θ4-axis rotating table 81, and inside its side wall surface 90A (the front surface as viewed from FIG. 1), As shown in FIGS. 10 and 11, a pair of guide rails 32 parallel to the Z axis are laid side by side. As shown in FIGS. 1 and 11, a pair of long holes 91 parallel to the Z-axis are formed in the side wall surface 90 </ b> A of the pillar portion 90. As shown in FIG. 4, the lifting block 31 includes a block body 31 </ b> A and a lifting plate 3 having a sliding portion 33 slidable along a guide rail 32.
1B, and a connecting portion 31C connecting the lifting plate 31B and the block body 31A. The block main body 31A is arranged outside the pillar portion 90, while the lifting plate 31
B is arranged inside the pillar portion 90. In addition, connecting part 3
1C is disposed so as to penetrate the side wall surface 90A of the pillar portion 90 through the elongated hole 91.

As shown in FIG. 10 and FIG.
A cylinder device 34 (slave drive source) having a piston rod whose axis is in the Z-axis direction is installed in the inside, and the tip of the piston rod is raised and lowered via a mounting angle 34a as shown in FIG. The plate 31B is connected.
As shown in FIG. 10, a motor 35 (main drive source) having an output shaft 35 f whose axis is in the Z-axis direction is installed next to the cylinder device 34, and the output shaft 35 f is provided as shown in FIG. 12. And a shaft 35a via a coupling ring 35b.
Are coaxially connected. A feed screw is formed on the outer peripheral surface of the shaft 35a.
The nut part c is engaged. The shaft 35a is held rotatably around the axis by a bearing 35d, and the moving block 35c is fixed to the elevating plate 31B. The shaft 35a has a handle mounting portion 35e at the upper end to which the emergency handle 36 can be mounted.
For example, when the motor 35 does not operate such as during a power failure,
The emergency handle 36 replaces the motor 35 with the shaft 3
5a can be rotated.

As shown in FIGS. 1 and 11, an operation box 92 is detachably mounted on the side wall surface 90B (the right side surface as viewed in FIG. 1) of the pillar portion 90.
As shown in FIG. 9, the operation box 92 is provided with a start switch, a high speed up switch, a low speed up switch, a down switch, an emergency stop switch, and the like. A control board (not shown) is provided inside the operation box 92. The switches are connected to the control board, and the motor 35 and the cylinder device 34 are electrically connected to the control board.

For example, when any one of the high speed up switch, the low speed up switch and the down switch is pressed simultaneously with the start switch, the motor 35 and the cylinder device 34 are controlled based on the input from these switches,
The lifting block 31 moves in the Z-axis direction by cooperation of these devices 35 and 34. That is, when the motor 35 is driven,
The shaft 35a rotates integrally with the output shaft 35f of the motor 35, and with the rotation, the moving block 35c, which is coupled to the shaft 35a by the feed screw method,
As it moves in the axial direction, the lifting block 31 fixed to the moving block 35c moves in the Z-axis direction along the guide rail 32. In the meantime, the cylinder device 34 applies an urging force to the mounting angle 34a in the moving direction of the lifting block 31 to reduce the load on the motor 35. When the pressing of the switch is released from this state, the drive of the motor 35 is stopped based on the input from the released switch, and the air pressure of the cylinder device 34 is adjusted to a predetermined value. Z
The movement in the axial direction is stopped.

When the test head 3 is positioned in the Z-axis direction by the Z-axis adjusting means constructed as described above, the switch of the operation box 92 is operated to move the lifting block 31 in the Z-axis direction. Then, the test head 3 is adjusted in the Z-axis direction. For example, when the test head 3 is connected to the test section of the auto-handler, the test head 3 is first brought close to the test section to some extent using a high-speed ascent switch, and then the test head 3 is connected to the Z-axis direction using a low-speed ascent switch. Tweak to. When the test head 3 is detached from the test section, a down switch is used.

Next, the θ2 axis adjusting means for adjusting the test head 3 in the θ2 direction will be described.

As shown in FIGS. 14 and 15, a ball bearing 53 whose axis is in the Y-axis direction is embedded in the block body 31A of the elevating block 31, and the shaft 52 is rotatable by the ball bearing 53 in the θ2 direction. It is supported in a state. An arm 51 having a substantially U-shape in plan view is coupled to one end of the shaft 52, and the shaft 52 and the arm 51 are configured to rotate integrally. A worm gear 52a is provided on the outer peripheral surface of the shaft 52 along the circumferential direction, and a worm 54b provided on a shaft portion 54a of the θ2-axis adjustment handle 54 meshes with the worm gear 52a. The θ2-axis adjustment handle 54 is disposed above the block main body 31A, and its shaft portion 54a is held by bearings 55a and 55b so as to be rotatable around its axis. That is, the θ2-axis adjustment handle 54
Is rotated around the axis, the shaft 52 coupled to the shaft portion 54a of the θ2-axis adjustment handle 54 via the worm gear
Rotates in the θ2 direction with respect to the elevating block 31, and the arm 51 rotates in the θ2 direction together therewith.

Also, at the upper end of the block body 31A,
While a lock pin 56 whose axis is in the Y-axis direction is attached, the arm 51 is provided with a plurality of guide holes 57a into which the lock pin 56 can be inserted, as shown in FIG. That is, the tip of the lock pin 56 is inserted into the guide hole 57a.
When the arm 51 is inserted into the block body 3
It is fixed non-rotatably with respect to 1A. As shown in FIG. 16, the guide hole 57a is provided in the arc-shaped guide block 57. The guide block 57 has a long hole 57b.
From the screw 57 toward the mounting hole (not shown) of the arm 51.
By passing through c, the arm 51 is attached to the side wall surface 50C. That is, the range in which the mounting position of the guide block 57 can be finely adjusted in the θ2 direction is defined by the elongated hole 57b.

When the test head 3 is adjusted in the θ2 direction by the θ2-axis adjusting means constructed as described above, the lock pin 56 is pulled to release the engagement between the lock pin 56 and the guide block 57. , The θ2 axis adjustment handle 54 is rotated to rotate the arm 51 in the θ2 direction. When the lock pin 56 has been rotated by the required amount, the lock pin 56 is pushed in, the tip of the lock pin 56 is inserted into the guide hole 57a, and the arm 51 is non-rotatably fixed to the block body 31A. When the test head 3 is to be finely adjusted in the θ2 direction, the screw 57c is loosened once, the mounting position of the guide block 57 is adjusted, and the engagement position between the lock pin 56 and the guide block 57, that is, with respect to the block body 31A, is adjusted. The fixing position of the arm 51 is finely adjusted in the θ2 direction.

Next, the θ1 axis adjusting means for adjusting the test head 3 in the θ1 direction will be described.

As shown in FIG. 17 and FIG.
The θ1-axis rotating plates 41A and 41B are attached to the inside of each of the side walls 50A and 50B. That is, the support shaft 42a protruding inside the side wall portions 50A and 50B is
Bearing 42b provided on θ1-axis rotating plates 41A and 41B
The bolts 44 are respectively passed from the plurality of long holes 43 provided in the side wall portions 50A, 50B to the mounting holes 46 provided in the θ1 axis rotating plates 41A, 41B in a state where the θ1 axis rotating plate is inserted. 41A and 41B are attached to the side wall portions 50A and 50B, respectively. That is,
The range in which the mounting positions of the θ1 axis rotating plates 41A and 41B can be finely adjusted in the θ1 direction is defined by the elongated holes 43. Further, a pair of θ1-axis adjustment screws 45 are attached to the lower end of the side wall 50A. These θ1-axis adjustment screws 45
Are in contact with the lower end of the θ1-axis rotating plate 41A.

When the test head 3 is positioned in the θ1 direction by the θ1 axis adjusting means constructed as described above, first, the bolts 44 are loosened and the side walls 50A, 50B are loosened.
, The θ1 axis rotating plates 41A and 41B are made rotatable about the support shaft 42a. Next, the θ1 axis adjustment screw 4
By adjusting the screwing amount of the side wall 50,
A, 50B, θ1 axis rotating plates 41A, 41B
Fine tune in the direction. Finally, tighten the bolts 44,
Each θ1-axis rotating plate 41A for the side wall portions 50A and 50B,
41B is fixed so that it cannot rotate.

Next, the Y-axis adjusting means for adjusting the test head 3 in the Y-axis direction will be described.

As shown in FIGS. 17 and 18, a pair of rails 24A parallel to the Y axis are laid vertically inside the θ1-axis rotating plates 41A and 41B. The Y-axis moving plates 21A, 21B have a plurality of sliding portions 24B slidable along the rail 24A, and the θ1-axis rotating plates 41A, 41
It can move in the Y-axis direction with respect to B. Also, Y
The test head 3 is mounted between the axis moving plate 21A and the Y-axis moving plate 21B.

A Y-axis adjustment knob 2 for finely adjusting the test head 3 in the Y-axis direction is provided on the side wall 50A of the arm 51.
2 are provided. Y axis adjustment knob 22
The shaft 27 is provided at one end of the shaft 27 in the axial direction. A feed screw is formed on the other end side of the shaft 27, and the nut portion 26a of the moving block 26 is engaged with the feed screw. The shaft 27 is held by a bearing 27b so as to be rotatable around the axis, and the moving block 26 is held by a guide block 26b so as to be slidable in the Y-axis direction with respect to the side wall 50A. The moving block 26 is provided with a Y-axis fixing knob 28 for fixing or releasing the moving block 26 immovably with respect to the side wall 50A. The moving block 26 has positioning pins 25.
On the other hand, the Y-axis moving plate 21A is provided with a plurality of guide holes 29 into which the positioning pins 25 can be inserted.

That is, the tip of the positioning pin 25 is inserted into the guide hole 29, and the moving block 26 is moved to the Y-axis moving plate 21.
In the state fixed to A, the Y-axis adjustment knob 22
Is rotated, the shaft 2 is integrated with the Y-axis adjustment knob 22.
7 rotates, the moving block 26 coupled to the shaft 27 by the feed screw system moves in the Y-axis direction with respect to the side wall portion 50A, and the Y-axis moving plate 21A, 2
1B and the test head 3 move in the Y-axis direction. When the positioning pin 25 is pulled out of the guide hole 29 by pulling the positioning pin 25, the engagement between the moving block 26 and the Y-axis moving plate 21A is released, and the Y-axis moving plate 21A is disengaged from the side walls 50A and 50B. , 21B are movable in the Y-axis direction.

The positioning pins 25 are arranged so as to penetrate the side wall 50A and the θ1-axis rotating plate 41A through the elongated holes. Even when the positioning pins 25 are inserted into the guide holes 29, the side walls 50A, 50B It is possible to slightly rotate the θ1 axis rotating plates 41A and 41B in the θ1 direction.

When the test head 3 is positioned in the Y-axis direction by the Y-axis adjusting means configured as described above, first, the test head 3 is provisionally positioned in the Y-axis direction. That is, after the positioning pin 25 is pulled to release the engagement between the moving block 26 and the Y-axis moving plate 21A, the test head 3 is operated to move the Y-axis moving plates 21A and 21B in the Y-axis direction. After moving to the position, the positioning pin 25 is inserted into the guide hole 29, and the moving block 26 is fixed to the Y-axis moving plate 21A. Next, the Y-axis adjustment knob 22 is rotated to finely adjust the moving block 26 and the Y-axis moving plate 21A in the Y-axis direction. Next, the Y-axis fixing knob 28 is rotated to move the moving block 26 and the Y-axis moving plate 21.
A is fixed to the side wall 50A, and the test head 3 is
Position in the axial direction.

As described above, according to the test head connection device 1 of this embodiment, the position of the test head 3 in the X-axis direction is adjusted by the X-axis adjusting means, and the test head is adjusted by the Y-axis adjusting means. The position of the test head 3 in the Y-axis direction is adjusted.
The position in the axial direction is adjusted, the rotational position of the test head 3 in the rotational direction (θ1 direction) around the X axis is adjusted by the θ1 axis adjusting means, and the Y axis is adjusted to the axial center by the θ2 axis adjusting means. The rotational position of the test head 3 in the rotating direction (the θ2 direction) is adjusted, and the rotational position of the test head 3 in the rotational direction (the θ3 direction) around the Z axis is adjusted by the θ3 axis adjusting means. That is, the positioning means is constituted by the respective adjusting means.

For example, when connecting the test head 3 to a test section (see FIG. 24) of the auto handler, the test head 3 is mounted between the Y-axis moving plates 21A and 21B.
After positioning the test head 3 by the positioning means, the test head 3 is connected to a test section.

When replacing the test board 103, the connection between the test head 3 and the auto-handler is released, and the test head 3 is separated from the test section by the Z-axis adjusting means. The moving means rotates the test head 3 to a position where the test head 3 can be attached and detached (that is, a position where the auto handler does not interfere). Thereafter, the test board 103 is replaced. When the replacement of the test board 103 is completed, the test head 3 is turned by the rotating means to return the test head 3 to a position facing the test section. Then, the test head 3 is raised by the Z-axis adjusting means, and the test head 3 and the auto handler are reconnected.

As described above, according to the test head connecting apparatus 1 of this embodiment, the test head 3 is pivoted to a position where the test head 3 can be detached separately from the positioning means for positioning the test head 3 with respect to the test portion. Since the rotation unit is provided, the positioning of the test head 3 when the test board 103 is replaced can be omitted, and the test head 3 can be easily connected to the test unit. In addition, since the test head 3 is rotated and the test head 3 is arranged at the attachment / detachment position, the moving range of the test head 3 at the time of replacing the test board 103 can be reduced as compared with the conventional case, and the limited space is limited. The test board 103 can be replaced inside.

[Second Embodiment] The connection device for a test head according to the second embodiment moves a positioning pin 86 (engaged portion) in a direction away from the guide hole 85a (engagement portion). Disengagement means for disengaging the positioning pin 86 from the guide hole 85a, and applying a force in the Y-axis direction to the test head 3 to move the test head 3 in the Y-axis direction. Y-axis driving means for smoothing. Except for the parts unique to the second embodiment, the first embodiment
This is the same as in the embodiment. In the second embodiment, the same parts as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

First, the engagement releasing means will be described.

As shown in FIG. 19 and FIG.
A lock switch 2 that can switch the supply state of the compressed air supplied to the disengagement cylinder 200 (described later)
02 is provided. As shown in FIGS. 21 and 22, the θ4-axis rotating table 81 has guide holes 85a.
An engagement release cylinder 200 for moving the positioning pin 86 (engaged portion) in a direction away from the (engagement portion) is provided. The cylinder 200 for disengagement is provided with a hollow chamber 200a which communicates with an air supply source (not shown) via a tube 201. The chamber 200a extends vertically through a bottom surface 200b thereof. Locating pin 8
6 are arranged. A movable portion 203 that can move up and down in the chamber 200 a in accordance with the supply state of the compressed air is connected to the upper end of the positioning pin 86, and the shaft 86 b of the positioning pin 86 is connected to the guide block 85 in a direction approaching the guide block 85. A coil spring 88 (biasing means) for applying a biasing force is wound.

Normally, as shown in FIG. 22 (b), the distal end portion 86a of the positioning pin 86 (engaged portion) becomes one of the guide holes 85a (engaged portion) by the urging force of the coil spring 88. When inserted, the positioning pin 86 and the guide block 85 are engaged with each other, and the θ4-axis rotating table 81 is fixed to the X-axis moving table 11 so as not to rotate.
At this time, the lock switch 202 is in the OFF state (the state in which the supply of the compressed air is stopped). When the lock switch 202 is switched to the ON state from this state, compressed air is supplied from the air supply source to the disengagement cylinder 200, and the movable portion 203 is pushed up as shown in FIG. The positioning pin 86 is moved in a direction away from the guide hole 85a, and the engagement between the positioning pin 86 and the guide block 85 is released. This gives θ
The four-axis rotating table 81 becomes rotatable in the θ4 direction with respect to the X-axis moving table 11, and this state is maintained until the lock switch 202 is turned off.

Therefore, for example, when rotating the test head 3 in the θ4 direction, the lock switch 202 is turned on.
Switching to the state, positioning pin 86 and guide block 8
After the engagement with the operating handle 4 is released,
To rotate the θ4-axis rotating table 81 in the θ4 direction with respect to the X-axis moving table 11. On the other hand, when the test head 3 is fixed so as not to rotate in the θ4 direction, the lock switch 202 is switched to the OFF state before the fixed position, and then the θ4-axis rotary table 81 is slowly set to θ.
Rotate in four directions. Then, after the distal end portion 86a of the positioning pin 86 advances while pressing on the upper surface of the guide block 85, the distal end portion 86a of the positioning pin 86 is guided by the urging force of the coil spring 88 when the guide hole 85a is encountered. The θ4-axis rotating table 81 is fixed to the X-axis moving table 11 so as not to rotate at that time.

Next, the Y-axis driving means will be described.

As shown in FIG. 23, the Y-axis moving plate 21A,
A pair of rails 24A, each parallel to the Y axis, are laid vertically one above the other outside 21B. Inside the side walls 50A, 50B of the arm 51, a plurality of sliding parts 24B slidable along the rail 24A are provided, and the Y-axis moving plates 21A, 21B are provided with respect to the side walls 50A, 50B of the arm 51. To be movable in the Y-axis direction. Note that, in this embodiment, θ is provided inside the Y-axis moving plates 21A and 21B.
The uniaxial rotary plates 41A and 41B are arranged, and the test head 3 is mounted between the θ1 rotary plates 41A and 41B. Further, as shown in FIG. 19, the side walls 50A and 50B of the arm 51 are shaped so that the side portions of the test head 3 are exposed, and the test head is mounted on the connection device of the test head. 3 can be replaced and pin cards can be replaced. That is, conventionally, when performing maintenance work or the like of the test head 3, it was necessary to temporarily remove the test head 3 from the test head connecting device, but this can be omitted.

As shown in FIG. 23, on the side wall 50B of the arm 51, a piston rod 21 whose axis is in the Y-axis direction is provided.
A cylinder 210 for Y-axis movement having a number 1 is provided. The tip of the piston rod 211 is a Y-axis moving plate 21B.
And a force in the Y-axis direction can be applied to the Y-axis moving plate 21B. Side wall 50 of arm 51
A is provided with the above-described Y-axis adjustment knob 22, Y-axis fixing knob 28, positioning pin 25, and the like. In addition, as shown in FIG. An air pressure adjusting knob 214 for adjustment, an air pressure display meter 213 for displaying the air pressure of the compressed air, and a changeover switch 214 for switching the direction and the supply state of the compressed air supplied to the Y-axis moving cylinder 210 are provided. In addition, a pair of handles 220 is provided above the side wall 50A.
Is erected.

For example, when the test head 3 is moved in the Y-axis direction, first, the positioning pin 25 is pulled,
After the engagement between the moving block 26 and the Y-axis moving plate 21A is released, the switch 214 is switched according to the moving direction of the test head 3 (the direction in which the test head 3 is moved). Then, compressed air is supplied to the Y-axis moving cylinder 210, and the test head 3 is moved from the piston rod 211.
Is applied to the moving direction. Next, the test head 3 is pressed in the above-described moving direction while holding the handle 220. Then, since a force in the moving direction is applied to the test head 3 from the piston rod 211 in advance, the test head 3 can be moved smoothly with a small force. For example, when the movement of the test head 3 is too good,
When the movement of the test head 3 is not good, the air pressure of the compressed air is adjusted by the air pressure adjusting knob 214 while the air pressure of the compressed air is checked by the air pressure display meter 213. When the test head 3 is moved in the direction opposite to the moving direction, the changeover switch 214 is operated to reverse the direction of the compressed air (switch the port). Thereafter, when the movement of the test head 3 is completed, the positioning pin 25 is inserted into the guide hole 29 to fix the moving block 26 to the Y-axis moving plate 21A, and the changeover switch 212 is switched to the OFF state. Thereby, the test head 3 is provisionally positioned in the Y-axis direction.

As described above, according to the test head connecting device of this embodiment, the positioning pin 86 (engaged portion) and the guide hole 85 are operated based on the operation of the lock switch 202.
a (engagement portion), which is capable of releasing the engagement with the engagement portion (disengagement means constituted by the engagement release cylinder 200, the lock switch 202, the air supply source, etc.)
It is easy to release the engagement between the positioning pin 86 and the guide hole 85a. Further, since the lock switch 202 is provided on the upper part of the column 90, the lock switch 202 can be operated in a posture in which the worker stands. Further, since the lock switch 202 is provided on the upper portion of the column 90, the lock switch 202 is not hidden by a cable or the like extending from the test head 3. Further, a Y-axis driving means (a cylinder 210 for Y-axis movement, a changeover switch 214, an air supply, etc.) for applying a force in the Y-axis direction to the test head 3 to smoothly move the test head 3 in the Y-axis direction. (Y-axis driving means) constituted by a source or the like, it is easy to move the test head 3 in the Y-axis direction. That is, in the related art, since the weight of the test head 3 and the cable is large, it sometimes takes time to move the test head 3 in the Y-axis direction, but this can be solved.

It should be noted that the present invention is not limited to the test head connecting devices described in the above embodiments, but can be applied to other test head connecting devices. That is, the positioning unit and the rotating unit described in each embodiment are merely examples, and can be changed as appropriate.
For example, the drive source constituting each means may be configured by a drive source (for example, a motor) other than the air cylinder. In addition, it goes without saying that specific detailed structures and the like can be appropriately changed without departing from the spirit of the present invention.

[0069]

According to the test head connecting device of the present invention, the positioning of the test head when replacing the test board can be omitted, and the test head can be easily connected to the auto handler. Further, the moving range of the test head when the test head is replaced can be reduced as compared with the conventional case, and the test board can be replaced in a limited space.

Further, it is easy to release the engagement between the engaging portion and the engaged portion. Further, it is easy to move the test head in the Y-axis direction.

[Brief description of the drawings]

FIG. 1 is a front view showing a test head connection device according to a first embodiment of the present invention.

FIG. 2 is a right side view of the same.

FIG. 3 is a plan view of the same (with a test head mounted).

FIG. 4 is a plan view of the same (with a test head removed).
It is.

FIG. 5 is a plan view of the X-axis moving table of FIG. 1;

FIG. 6 is a diagram viewed from a direction C in FIG. 5;

FIG. 7 is a plan view of the θ4-axis rotary table of FIG. 1;

FIG. 8 is a front view of the same.

FIG. 9 is a front view of the operation box of FIG. 1;

FIG. 10 is a plan view of a pillar in FIG. 1;

FIG. 11 is a front view of the same.

12 is a front view showing the motor of FIG. 11 and its power transmission mechanism.

FIG. 13 is a right side view showing the cylinder device of FIG. 11 and its power transmission mechanism.

FIG. 14 is a sectional view taken along line BB of FIG. 3;

FIG. 15 is a sectional view taken along line AA of FIG. 1;

FIG. 16 is a right side view of the arm of FIG. 1;

FIG. 17 is a front view of the same.

FIG. 18 is a plan view of the same.

FIG. 19 is a front view illustrating a test head connection device according to a second embodiment of the present invention.

FIG. 20 is a right side view of the same.

FIG. 21 is a plan view of the θ4-axis rotary table of FIG. 19;

FIG. 22 is a view showing a positioning pin of FIG. 21;

FIG. 23 is a cross-sectional view taken along a line DD of FIG. 19;

FIG. 24 is a schematic front view of a device test apparatus having a conventional test head connection device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Test head connection device 2 Mount 3 Test head 11 X-axis moving table (support table) 21A, 21B Y-axis moving plate 31 Elevating block 41A, 41B θ1-axis rotating plate 51 Arm 61 θ3-axis rotating table 81 θ4-axis rotating table ( (Rotating table) 82 Rotation support part 83 Recess 84 Ball bearing (rotary table holding means) 85 Guide block 85a Guide hole (engaging part) 86 Positioning pin (engaged part) 88 Coil spring (biasing means) 87b Locking pin (Locking means) 103 Test board 200 Disengagement cylinder (Disengagement means) 202 Lock switch (Disengagement means) 211 Y-axis moving cylinder (Y-axis drive means) 214 Changeover switch (Y-axis drive means)

Claims (8)

[Claims] 1. A test head connecting device for mounting a test head of an IC tester and connecting the test head to a test section of an auto-handler, comprising: positioning means for positioning the test head with respect to the test section. A test head connection device, comprising: a rotating means for rotating the test head to a detachable position separately from the positioning means. A rotating table provided between a gantry and the test head; a rotating table holding means for holding the rotating table rotatably in a horizontal plane; A rotation table fixing means for fixing or releasing the rotation table so as to be unrotatable at a position, wherein a rotation center of the rotation table is provided at a position apart from a center of the test head in a horizontal plane. Test head connection device as described. 3. The rotating table fixing means is provided on a support table that supports the rotating table, and a plurality of engaging portions arranged along an arc centered on a rotation center of the rotating table; The test head connection device according to claim 2, further comprising: an engaged portion provided on the table and capable of engaging with any one of the plurality of engagement portions. 4. The rotating table fixing means includes: an urging means for applying an urging force to the engaged portion in a direction approaching the engaging part; and a urging force against the urging force by the urging means. 4. The test head connection device according to claim 3, further comprising: locking means capable of locking the engaged portion in a state where the engagement with the engaging portion is released. 5. The rotating table fixing means includes: an urging means for applying an urging force to the engaged portion in a direction approaching the engaging portion; and the urging member in a direction away from the engaging portion. The engaging portion can be moved to release the engagement between the engaged portion and the engaging portion, and the engagement with the engaging portion can be released against the urging force of the urging means. The test head connection device according to claim 3, further comprising: engagement release means capable of holding the engaged portion in a state of being engaged. 6. The test head according to claim 5, wherein the engagement releasing means moves the engaged portion in a direction away from the engagement portion based on a predetermined switch operation. Connection device. 7. A vertical axis passing through the center of the test head is Z
An axis and two axes passing through the center of the test head and orthogonal to each other in a horizontal plane are defined as an X axis and a Y axis. The positioning unit moves the test head in the X axis direction, and moves the X of the test head. X with adjustable position in the axial direction
Axis adjusting means; and a Y capable of adjusting the position of the test head in the Y-axis direction by moving the test head in the Y-axis direction.
Axis adjusting means; Z capable of adjusting the position of the test head in the Z-axis direction by moving the test head in the Z-axis direction.
Axis adjustment means, θ1 axis adjustment means for rotating the test head in a rotation direction about the X axis as an axis, and adjusting the rotational position of the test head in the rotation direction, and an axis centered on the Y axis. Rotating the test head in a rotational direction to adjust the rotational position of the test head in the rotational direction, θ2-axis adjusting means; and rotating the test head in a rotational direction about the Z axis. 7. The test head connection device according to claim 1, further comprising: a θ3-axis adjusting unit configured to adjust a rotation position of the test head in the rotation direction. 8. A system according to claim 1, further comprising a Y-axis driving means for applying a force in said Y-axis direction to said test head so as to smoothly move said test head in said Y-axis direction. Item 8. A connection device for a test head according to Item 7.