WO2017204560A1 - Procédé et appareil de détection de particules sur une surface supérieure de verre, et procédé d'exposition à un rayonnement de lumière incidente - Google Patents

Procédé et appareil de détection de particules sur une surface supérieure de verre, et procédé d'exposition à un rayonnement de lumière incidente Download PDF

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Publication number
WO2017204560A1
WO2017204560A1 PCT/KR2017/005418 KR2017005418W WO2017204560A1 WO 2017204560 A1 WO2017204560 A1 WO 2017204560A1 KR 2017005418 W KR2017005418 W KR 2017005418W WO 2017204560 A1 WO2017204560 A1 WO 2017204560A1
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WIPO (PCT)
Prior art keywords
glass
region
light
incident light
incident angle
Prior art date
Application number
PCT/KR2017/005418
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English (en)
Inventor
Sungchan HWANG
Jihwa Jung
Taeho Keem
Hyeongcheol Lee
Sungjong Pyo
Original Assignee
Corning Precision Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Corning Precision Materials Co., Ltd. filed Critical Corning Precision Materials Co., Ltd.
Priority to JP2018561206A priority Critical patent/JP6953446B2/ja
Priority to CN201780032453.4A priority patent/CN109564170A/zh
Publication of WO2017204560A1 publication Critical patent/WO2017204560A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G01N2021/945—Liquid or solid deposits of macroscopic size on surfaces, e.g. drops, films, or clustered contaminants
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Definitions

  • the present disclosure relates to a method and an apparatus for detecting particles on an upper surface of a glass, and a method of irradiating an incident light.
  • a micro circuit pattern is deposited on only one surface (e.g., an upper surface) of a flat glass which is used for a flat panel display, while the micro circuit pattern is not deposited on the other surface (e.g., a lower surface) of the flat glass. If the micro circuit pattern is deposited on particles which exist on the upper surface of the flat glass, the micro circuit pattern may have some defects. Thus, there is a need for inspecting whether the particles exist on the upper surface of the flat glass or not, before depositing the micro circuit pattern.
  • a conventional flat glass particle detecting apparatus includes: first and second irradiating devices configured to irradiate light to an upper surface and a lower surface of a flat glass at different angles above the flat glass, respectively; and first and second cameras configured to acquire images of an irradiated region of the upper surface and an irradiated region of the lower surface, respectively.
  • the particles on the upper surface are indicated as bright portions and the particles on the lower surface are indicated as dark portions on images.
  • the conventional apparatus is configured to compare and analyze the images acquired by each of the first and second cameras and to detect the particles existing on the upper surface.
  • the conventional apparatus since the conventional apparatus has two irradiating devices and two cameras, the cost for manufacturing the apparatus as well as the cost for manufacturing the flat glass increase. Further, as the conveying speed of the flat glass has become higher and higher recently, there is a demand for enhancing a detecting speed of the particles on the upper surface of the flat glass. However, since the conventional apparatus must compare and analyze the images acquired by two cameras, it is difficult to satisfy such a demand.
  • the present disclosure addresses solutions to at least one of the aforementioned problems.
  • the present disclosure provides a method and an apparatus of detecting particles on an upper surface of a glass that can use only one light source and only one camera and a method of irradiating an incident light.
  • One aspect of the present disclosure provides a method of detecting particles on an upper surface of a glass.
  • the method includes: disposing a rotatable mirror on a path of light emitted from a light source so that the mirror reflects the light to irradiate an incident light to the upper surface; calculating an incident angle of the incident light so that a first region where the incident light meets the upper surface of the glass and a second region where light transmits through the glass and meets a lower surface of the glass do not overlap with each other when viewed from above; rotating the mirror based on the calculated incident angle; acquiring an image of the first region with a camera disposed above the first region; and detecting particles by analyzing the acquired image.
  • the detected particles are considered as existing on the upper surface.
  • the incident angle is calculated based on a refractive index and a thickness of the glass.
  • the incident angle is calculated based on a maximum value of a horizontal distance between the right end of the first region and the left end of the second region.
  • the maximum value of the horizontal distance is calculated based on the following equation:
  • d is the thickness of the glass
  • n is the refractive index of the glass
  • ⁇ is the incident angle of the incident light
  • W is a width of the incident light.
  • rotating the mirror is performed before the glass is conveyed.
  • the camera is installed so that the right end of the first region is positioned at the right end of a field of view of the camera.
  • calculating the incident angle and rotating the mirror are performed when at least one of a refractive index and thickness of the glass is changed.
  • Another aspect of the present disclosure provides a method of irradiating an incident light to an upper surface of a glass for detecting particles on the upper surface.
  • the method includes: disposing a rotatable mirror on a path of light emitted from a light source so that the mirror reflects the light to irradiate the incident light to the upper surface; calculating an incident angle of the incident light based on a refractive index and a thickness of the glass so that a first region where the incident light meets the upper surface and a second region where light transmits through the glass and meets a lower surface of the glass do not overlap with each other when viewed from above; and rotating the mirror based on the calculated incident angle. Calculating the incident angle and rotating the mirror are performed when at least one of a refractive index and thickness of the glass is changed.
  • the incident angle is calculated based on a maximum value of a horizontal distance between the right end of the first region and the left end of the second region.
  • the maximum value of the horizontal distance is calculated based on the following equation:
  • d is the thickness of the glass
  • n is the refractive index of the glass
  • ⁇ is the incident angle of the incident light
  • W is the width of the incident light.
  • the apparatus includes: a light source configured to emit light; a rotatable mirror disposed on a path of the light and configured to adjust an incident angle of an incident light to be irradiated to the upper surface; a controller configured to control the rotation of the mirror so that a first region where the incident light meets the upper surface and a second region where light transmits through the glass and meets a lower surface of the glass do not overlap with each other when viewed from above; and a camera configured to acquire an image of the first region.
  • the controller is configured to detect particles by analyzing the acquired image and considers the detected particles as existing on the upper surface.
  • the controller is configured to control the rotation based on a refractive index and a thickness of the glass.
  • the controller is configured to control the rotation based on a maximum value of a horizontal distance between a right end of the first region and a left end of the second region.
  • the maximum value of the horizontal distance is calculated based on the following equation:
  • d is the thickness of the glass
  • n is the refractive index of the glass
  • ⁇ is the incident angle of the incident light
  • W is a width of the incident light.
  • the camera is configured so that the right end of the first region is positioned at the right end of a field of view of the camera.
  • FIG. 1 is a schematic side view showing an apparatus of detecting particles on an upper surface of a glass according to one embodiment.
  • FIG. 2 is a partially enlarged view of FIG. 1.
  • FIG. 3 is a partially enlarged view of FIG. 2.
  • FIG. 4 is a graph showing the relationship between an incident angle and a horizontal distance when the apparatus shown in FIG. 1 is used.
  • FIG. 5 is a flowchart showing a method of detecting particles on an upper surface of a glass according to one embodiment.
  • FIG. 6 is a flowchart showing a method of irradiating an incident light according to one embodiment.
  • FIGS. 1 to 3 of the accompanying drawings A 2-dimensional Cartesian coordinate system (X axis and Y axis) is used in FIGS. 1 to 3 of the accompanying drawings.
  • a positive X-axial direction and a positive Y-axial direction indicate a rightward direction and an upward direction, respectively.
  • a negative X-axial direction and a negative Y-axial direction indicate a leftward direction and a downward direction, respectively.
  • an apparatus of detecting particles on an upper surface of a glass 100 includes: a light source 110; a mirror 120; a controller 130; and a camera 140.
  • a target to be inspected is a glass 10 which is conveying in a horizontal direction (e.g., the rightward direction).
  • the target to be inspected may be a glass which is not conveyed and is stationary.
  • the glass 10 includes an upper surface 11 on which a micro circuit pattern is deposited and a lower surface 12 on which the micro circuit pattern is not deposited.
  • the glass 10 may include a flat glass, a glass substrate, a flat glass substrate, etc., which have a predetermined thickness and a predetermined width and extends along the leftward direction or a rightward direction.
  • FIGS. 1 to 3 the glass 10 is illustrated as having a magnified thickness which is shown as being thicker than an actual thickness of the glass 10 (e.g., approximately several millimeters to several micrometers).
  • the light source 110 is disposed above the glass 10 so as to emit a light 31 in a perpendicular direction with respect to the glass 10. Since the camera 140 is also disposed above the glass 10, the light source 110 can be manufactured integrally with the camera 140, thereby reducing the size of the particle detecting apparatus 100.
  • the light source 110 may cover concepts of a light emitting device, an illuminating device, a lamp, and a beam former, etc.
  • the light source 110 may be disposed above the glass 10 so as to emit the light 31 in an inclined direction with respect to the glass 10.
  • the light 31 may include a ray, and a laser beam, etc.
  • the light source 110 may include a focusing lens 111 for focusing the light 31 to a predetermined irradiating region.
  • the focusing lens 111 may be configured to adjust a size of the irradiating region by the light 31 emitted from the light source 110.
  • the mirror 120 is disposed on a path of the light 31 emitted from the light source 110 so that an incident light 32 is irradiated to the upper surface 11 of the glass 10.
  • An incident angle ⁇ of the incident light 32 is adjusted by the mirror 120 disposed on the path of the light 31.
  • the incident light 32 may be irradiated to the upper surface 11 of the glass 10 at relatively large range of incident angle ⁇ compared to the conventional apparatus where the light source is directly inclined with respect to the glass.
  • the mirror 120 is electrically connected to the controller 130 to be rotated based on control signals from the controller 130.
  • the mirror 120 is rotatable about a rotating shaft 121 in a clockwise direction or a counterclockwise direction.
  • the mirror 120 may include a driving mechanism and a power transmission mechanism.
  • the driving mechanism may include a driving motor, an electric motor, etc.
  • the power transmission mechanism may include a pulley and belt, a sprocket and chain, a driving gear and driven gear, etc.
  • the mirror 120 may cover concepts of a reflecting mirror, a reflecting device, a reflector, etc.
  • the incident light 32 means a light which advances from when the light 31 is reflected by the mirror 120 to when the light 31 reaches the upper surface 11 of the glass 10.
  • the controller 130 is configured to calculate an incident angle ⁇ of the incident light 32, control a rotation of the mirror 120 based on the calculated incident angle ⁇ , detect particles by analyzing images acquired by the camera 140 and determine that the detected particles are considered as existing on the upper surface 11 of the glass 10.
  • the controller 130 is configured to calculate the incident angle ⁇ of the incident light 32 so that a first region 41 and a second region 42 do not overlap with each other when viewed from above.
  • the first region 41 is a region where the incident light 32 meets the upper surface 11 of the glass 10
  • the second region 42 is a region where a transmitted light 33 transmitted through the glass 10 meets the lower surface 12 of the glass 10.
  • the controller 130 is configured to calculate the incident angle ⁇ of the incident light 32 so that a horizontal distance L' between a right end of the first region 41 and a left end of the second region 42 is greater than zero.
  • the first region 41 and the second region 42 do not overlap with each other when viewed from above, it is possible to acquire an image of the first region 41 without acquiring an image of the second region 42 by using the camera 140 above the glass 10.
  • an image of an irradiated region (i.e., the second region 42) on the lower surface 12 of the glass 10 is not acquired by the camera 140, an image of the particles on the second region 42 cannot be acquired by the camera 140.
  • any one of the lights does not reach the particles existing on a non-irradiated region (i.e., the rest region except the second region 42) on the lower surface 12 of the glass 10, an image of the particles cannot be acquired by the camera 140.
  • only the image of the upper particles 21 on the first region 41 can be acquired by the camera 140, while the image of lower particles existing on the lower surface 12 of the glass 10 cannot be acquired by the camera 140.
  • the controller 130 may include a computer having a program storage part. Any program or programs related to calculating the incident angle ⁇ , rotating the mirror 120, and analyzing the images can be stored in the program storage part.
  • the program storage part may include computer-readable hard disc, flexible disc, compact disc, magnet-optical disc, and memory card, etc.
  • the controller 130 may be configured to control the rotation of the mirror 120 based on the refractive index and the thickness of the glass 10 so that the first region 41 and the second region 42 do not overlap with each other when viewed from above.
  • the horizontal distance L' may be calculated by the following equation:
  • d is the thickness of the glass
  • n is the refractive index of the glass 10
  • ⁇ is the incident angle of the incident light 32
  • W is the width of the incident light 32 in the horizontal direction.
  • Equation 1 may be derived from the following Equations 2 to 6.
  • Equation 2 the horizontal distance L' may be expressed by Equation 2 as follows:
  • W A is the horizontal width of the first region 41
  • W B is a horizontal width of the second region 42
  • L is a horizontal distance between the center of W A and the center of W B .
  • Equation 2 since the thickness of the glass 10 is very thin such as from 0.2 mm to 4 mm, it can be assumed that the horizontal width W A of the first region 41 effectively equals the horizontal width W B of the second region 42. Accordingly, the horizontal distance L' may be expressed by Equation 3 as follows:
  • Equation 3 L may be expressed using the trigonometric function by Equation 4 that is related to an angle of refraction ⁇ :
  • Equation 4 the angle of refraction ⁇ may be expressed using Snell’s law by Equation 5 that is related to the incident angle ⁇ :
  • W A may be expressed by Equation 6 that is related to the incident angle ⁇ :
  • Equation 1 is derived. Since the refractive index n, the thickness d, and the width W are a constant in Equation 1, the horizontal distance L' is expressed by a function related to the incident angle ⁇ .
  • the incident angle ⁇ can be calculated based on Equation 1 so that the horizontal distance L' is more than zero (i.e., the first region 41 and the second region 42 do not overlap with each other when viewed from above).
  • Equation 1 is theoretical, and in reality the refractive index may not be uniform throughout the glass.
  • the incident angle ⁇ can be calculated based on Equation 1 so that the horizontal distance L' has a maximum value.
  • the glass 10 has the refractive index n of 1.5, the width W of 100 ⁇ m, and the thickness of 500 ⁇ m
  • the relationship between the horizontal distance L' and the incident angle ⁇ is illustrated in FIG. 4.
  • the incident angle ⁇ is 58.5 degrees
  • the horizontal distance L' has the maximum value.
  • the maximum value of the horizontal distance L' is 154.1 ⁇ m.
  • the controller 130 is configured to control the rotation (or an inclined angle) of the mirror 120 based on the incident angle ⁇ calculated through the aforementioned method by driving the driving mechanism of the mirror 120.
  • the controller 130 is configured to calculate the incident angle ⁇ of the incident light 32 based on the changed refractive index or the changed thickness to thereby control the rotation of the mirror 120 in accordance with the calculated incident angle ⁇ .
  • the camera 140 is disposed above the glass 10 in the perpendicular direction with respect to the glass 10.
  • the camera 140 has a field of view FOV (see the dotted line shown in FIGS. 1 and 2) which extends in the perpendicular direction with respect to the glass 10 downwardly from the camera 140 to meet the upper surface 11 of the glass 10.
  • the camera 140 is configured to acquire an image of the first region 41 without acquiring an image of the second region 42. That is to say, the camera 140 is installed so that the field of view FOV of the camera 140 includes the first region 41 and does not include the second region 42. Since the upper particles 21 existing on the first region 41 of the upper surface 11 scatter the incident light 32 to form scattered lights 34, the image of the upper particles are acquired by the camera 140.
  • the camera 140 is electrically connected to the controller 130.
  • the images acquired by the camera 140 are sent to the controller 130 in a form of electrical signals.
  • the camera 140 may include a line CCD (Charge Coupled Device) camera.
  • the camera 140 may cover concepts of a filming device, an imaging device, a detecting device, and a detector, etc.
  • the camera 140 may be installed so that the right end of the first region 41 is positioned at a right end of the field of view FOV, thereby positioning the field of view FOV the farthest from the second region 42.
  • FOV field of view
  • the controller 130 is configured to consider bright portions on the image as the particles by analyzing the images acquired by the camera 140. As described above, the image of the lower particles 22 existing on the lower surface 12 of the glass 10 is not acquired by the camera 140. Accordingly, the controller 130 is configured to consider that all of the detected particles exist on the upper surface 11 of the glass 10.
  • a method of detecting particles on the upper surface of the glass 200 includes: disposing the mirror S201; calculating the incident angle of the incident light S202; rotating the mirror S203; acquiring an image of the first region S204; and detecting the particles S205.
  • the mirror 120 In disposing the mirror S201, the mirror 120 is disposed on the path of the light 31 emitted from the light source 110.
  • the mirror 120 reflects the light 31 to irradiate the incident light 32 to the upper surface 11 of the glass 10.
  • the incident angle ⁇ of the incident light 32 is calculated so that the first region 41 and the second region 42 do not overlap with each other when viewed from above.
  • the incident angle ⁇ of the incident light 32 may be calculated in the same manner as the particle detecting apparatus 100 according to one embodiment. That is to say, the incident angle ⁇ of the incident light 32 may be calculated based on the refractive index and the thickness of the glass 10. Further, the incident angle ⁇ of the incident light 32 may be calculated based on the maximum value of the horizontal distance L'. Moreover, the maximum value of the horizontal distance L' may be calculated by Equation 1.
  • rotating the mirror S203 the mirror 120 is rotated based on the incident angle ⁇ calculated in calculating the incident angle of the incident light S202.
  • rotating the mirror S203 may be performed before the glass 10 is conveyed.
  • the camera 140 acquires an image of the first region 41 while the glass 10 is conveyed in a horizontal direction (e.g., the rightward direction). Since the position and the function of the camera 140 has been already described in the particle detecting apparatus 100 according to one embodiment, specific descriptions regarding the above are omitted.
  • the particles are detected by analyzing the images acquired in acquiring an image of the first region S202. Specifically, the particles are detected by finding a bright portion displayed by the scattered lights 34 from the images. The particles detected in detecting the particles S205 are considered as existing on the upper surface 11 of the glass 10.
  • a method of irradiating the incident light 300 includes: disposing the mirror S301; calculating the incident angle of the incident light S302; and rotating the mirror S303.
  • calculating the incident angle of the incident light S302 and rotating the mirror S303 are performed when at least one of the refractive index and the thickness of the glass 10 is changed.
  • the incident angle ⁇ of the incident light 32 is calculated based on the refractive index and the thickness of the glass 10 so that the first region 41 and the second region 42 do not overlap with each other when viewed from above.
  • the incident angle ⁇ of the incident light 32 may be calculated in the same manner as the particle detecting apparatus 100 according to one embodiment. That is to say, the incident angle ⁇ of the incident light 32 may be calculated based on the maximum value of the horizontal distance L'. Further, the maximum value of the horizontal distance L' may be calculated by Equation 1.
  • the method and the apparatus of detecting the particles on the upper surface of the glass is configured to calculate an optimal incident angle of the incident light and control the rotation of the mirror based on the calculated optimal incident angle.
  • an optimal incident angle of the incident light it is possible to precisely detect only particles on the upper surface of the glass by using only one camera.
  • the method of irradiating the incident light it is possible to precisely irradiate the incident light having the optimal incident angle to the upper surface of the glass.
  • FOV a filed of view

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Abstract

La présente invention concerne un procédé de détection de particules qui consiste à : disposer un miroir rotatif sur un trajet de lumière émise par une source de lumière de sorte que le miroir réfléchisse la lumière afin d'exposer la surface supérieure à une lumière incidente ; calculer un angle d'incidence de la lumière incidente de sorte qu'une première région au niveau de laquelle la lumière incidente rencontre la surface supérieure du verre et qu'une seconde région au niveau de laquelle la lumière passe à travers le verre et rencontre une surface inférieure du verre ne se chevauchent pas lorsqu'on regarde depuis le dessus ; faire tourner le miroir sur la base de l'angle d'incidence calculé ; acquérir une image de la première région avec une caméra disposée au-dessus de la première région tout en transportant le verre dans une direction horizontale ; et détecter des particules en analysant l'image acquise. Les particules détectées sont considérées comme étant présentes sur la surface supérieure.
PCT/KR2017/005418 2016-05-25 2017-05-24 Procédé et appareil de détection de particules sur une surface supérieure de verre, et procédé d'exposition à un rayonnement de lumière incidente WO2017204560A1 (fr)

Priority Applications (2)

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JP2018561206A JP6953446B2 (ja) 2016-05-25 2017-05-24 ガラス上面の粒子検出方法および装置、並びに、入射光照射方法
CN201780032453.4A CN109564170A (zh) 2016-05-25 2017-05-24 检测玻璃的上表面上的颗粒的方法和装置以及照射入射光的方法

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KR1020160064134A KR20170133113A (ko) 2016-05-25 2016-05-25 유리 상면 상의 이물질 검출 방법과 장치, 및 입사광 조사 방법
KR10-2016-0064134 2016-05-25

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US10677739B2 (en) 2016-11-02 2020-06-09 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate
US10732126B2 (en) 2016-11-02 2020-08-04 Corning Incorporated Method and apparatus for inspecting defects on transparent substrate and method emitting incident light

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TWI711802B (zh) * 2019-08-27 2020-12-01 勵威電子股份有限公司 一種對玻璃上的微粒進行統計的方法
CN111007016A (zh) * 2019-12-09 2020-04-14 暨南大学 一种检测透明材料表面微小颗粒杂质的装置及使用方法
TWI804401B (zh) * 2022-07-28 2023-06-01 國立成功大學 光學量測系統

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