WO2017159768A1 - Dispositif de mesure optique, procédé de mesure optique et machine rotative - Google Patents

Dispositif de mesure optique, procédé de mesure optique et machine rotative Download PDF

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Publication number
WO2017159768A1
WO2017159768A1 PCT/JP2017/010572 JP2017010572W WO2017159768A1 WO 2017159768 A1 WO2017159768 A1 WO 2017159768A1 JP 2017010572 W JP2017010572 W JP 2017010572W WO 2017159768 A1 WO2017159768 A1 WO 2017159768A1
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WIPO (PCT)
Prior art keywords
light
optical
fiber
optical sensor
measuring device
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Application number
PCT/JP2017/010572
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English (en)
Japanese (ja)
Inventor
貴洋 宮本
明生 近藤
大西　智之
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三菱重工業株式会社
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Publication of WO2017159768A1 publication Critical patent/WO2017159768A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D11/00—Preventing or minimising internal leakage of working-fluid, e.g. between stages
    • F01D11/08—Preventing or minimising internal leakage of working-fluid, e.g. between stages for sealing space between rotor blade tips and stator
    • F01D11/14—Adjusting or regulating tip-clearance, i.e. distance between rotor-blade tips and stator casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D25/00—Component parts, details, or accessories, not provided for in, or of interest apart from, other groups
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
    • F02C7/00—Features, components parts, details or accessories, not provided for in, or of interest apart form groups F02C1/00 - F02C6/00; Air intakes for jet-propulsion plants
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
    • F02C7/00—Features, components parts, details or accessories, not provided for in, or of interest apart form groups F02C1/00 - F02C6/00; Air intakes for jet-propulsion plants
    • F02C7/28—Arrangement of seals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Definitions

  • the present invention relates to an optical measurement device, an optical measurement method, and a rotating machine.
  • an optical fiber type optical sensor 60 as shown in FIG.
  • This optical sensor 60 has a pair of optical fiber groups 61 and 62 arranged so as to be inclined so as to form two sides of a triangle in triangulation (see FIG. 9 described later).
  • the optical fiber group 61 includes one light-emitting fiber 61a that emits light and a plurality of light-receiving fibers 61b that receive light, with one light-emitting fiber 61a as the center.
  • a plurality of light receiving fibers 61b are arranged around the periphery (Patent Document 1).
  • the optical fiber group 62 also includes a light emitting fiber 62a and a light receiving fiber 62b, and has the same configuration as the optical fiber group 61.
  • the measurement principle of the optical sensor 60 will be described with reference to FIGS.
  • the tip portion of the blade 71 serving as a reflection target is measured.
  • light is emitted from the light emitting fiber 61a of the optical fiber group 61 and the light emitting fiber 62a of the optical fiber group 62, respectively.
  • the rotating blade 71 passes the position C
  • the light receiving fiber 61b of the optical fiber group 61 receives the light reflected from the blade 71 at time t1.
  • the light receiving fiber 62b of the optical fiber group 62 receives the light reflected from the blade 71 at time t2.
  • the distance from the tip of the optical sensor 60 to the tip of the blade 71 that is, the clearance is d.
  • an angle formed by two lights emitted from the pair of light emitting fibers 61a and 62a is ⁇ .
  • L the distance at the tip of the pair of light emitting fibers 61a and 62a, that is, the distance AB.
  • the interval CD is 2 ⁇ R ⁇ ⁇ ⁇ ⁇ t / T
  • the clearance d is expressed by the following equation 1 It can ask for. That is, the clearance d can be measured by the time difference ⁇ t between the two waveforms obtained by the pair of light receiving fibers 61b and 62b.
  • a transparent protective window 64 on the surface of the optical sensor 60 as shown in FIG.
  • the protective window 64 when the protective window 64 is attached, when the light T1 from the light source 65 is irradiated from the light emitting fiber 61a, a part of the light T2 passes through the protective window 64 and is irradiated to the blade 71.
  • the light T3 is reflected by the protective window 64 and received by the light receiving fiber 61b.
  • the light applied to the blade 71 is reflected as light R1, a part of the light R2 is reflected by the protective window 64, and a part of the light R3 passes through the protective window 64 and is received by the light receiving fiber 61b.
  • the light receiving fiber 61b receives not only the light R3 from the blade 71 but also the light T3 reflected by the protective window 64, and the light receiving element 66 measures the light R3 and T3. Therefore, as shown in the graph of FIG. 12, the waveform described above is buried in the intensity of the reflected light from the protective window 64, the SN ratio (signal noise ratio) becomes small, and the measurement accuracy is lowered.
  • the diameter of these fibers is about 200 ⁇ m, and it is difficult to produce a plurality of protective windows having such a size.
  • the present invention has been made in view of the above problems, and an object thereof is to provide an optical measurement device, an optical measurement method, and a rotating machine that protect an optical sensor and prevent a decrease in SN ratio.
  • An optical measurement device for solving the above-described problems is as follows.
  • An optical measuring device including an optical sensor having a protective window, A light source that outputs first light; Provided on the outer peripheral surface of the rotating body, when the first light output from the light source is irradiated, the first light is absorbed and second light having a wavelength different from the first light is emitted.
  • the optical sensor has a light emitting fiber that irradiates the rotating body with the first light output from the light source through the protective window,
  • the light emitter is made of a phosphor.
  • An optical measurement apparatus for solving the above-described problem is In the optical measurement apparatus according to the second invention, A filter provided between the light receiving fiber and the light receiving element and transmitting only the second light is provided.
  • An optical measurement device for solving the above-described problem is
  • the light source is disposed independently of the optical sensor,
  • the luminous body is made of a phosphor.
  • An optical measurement device for solving the above-described problem is
  • a plurality of the light sources are arranged such that the first light from the light source has a band shape along the rotation direction of the rotating body, or the light source has a band shape.
  • An optical measurement apparatus for solving the above-described problem is In the optical measurement device according to any one of the first to fifth inventions, A protective film is provided on the surface of the light emitter.
  • a rotating machine according to a seventh invention for solving the above-described problem is The optical measuring device according to any one of the first to sixth inventions is provided.
  • An optical measurement method for solving the above-described problems is as follows.
  • An optical measurement method using an optical sensor having a protective window Outputting the first light from the light source;
  • the first light is absorbed by a light emitter provided on the outer peripheral surface of the rotating body, and a second light having a wavelength different from the first light is absorbed.
  • the light of The second light emitted from the light emitter is received through the protective window by a light receiving fiber provided in the optical sensor,
  • the intensity of the second light received by the light receiving fiber is detected by a light receiving element.
  • the irradiated first light is converted back to the second light by the light emitter, and therefore, the influence of the first light reflected inside the protective window. As a result, it is possible to prevent the SN ratio from being lowered and the measurement accuracy from being lowered.
  • FIG. 1 It is a figure which shows an example (Example 1) of embodiment of the optical measuring device and rotary machine which concern on this invention, (a) is the schematic of a rotary machine, (b) is the schematic of the optical sensor part. It is a graph which shows the change of the intensity
  • FIGS. 1-10 embodiments of an optical measurement device, an optical measurement method, and a rotating machine according to the present invention will be described with reference to FIGS.
  • the rotor is illustrated here as a rotary body of a rotary machine, a shaft, a turbine, etc. can be used as a rotary body in this invention.
  • the optical measurement device includes a light emitter 13, an optical sensor 20, an optical signal processing unit 25, and an optical signal calculation unit 30.
  • the rotating machine 10 includes a casing 11 that is a stationary portion, and a rotor 12 (rotating body) that is a rotating portion that is rotatably supported inside the casing 11.
  • the optical sensor 20 is attached to the casing 11 and arranged so as to look at the outer peripheral surface 12a of the rotor 12.
  • the light emitter 13 replaces the above-described reflection target, and is disposed and fixed on the outer peripheral surface 12a of the rotor 12.
  • the light emitter 13 is made of a phosphor that is a light emitter that does not require a power source. This light absorber 13 absorbs light (first light) incident from the optical sensor 20 and modulates (wavelength-converts) light (second light). Light). If the material used for the light emitter 13 is an inorganic material, there is no problem of heat resistance.
  • the phosphor forming the light emitter 13 absorbs the irradiated energy in the same manner as the phosphor forming the light emitter 15 described later, whereby the electrons are excited and the excited electrons return to the ground state. It is a light emitter that emits excess energy (photoluminescence).
  • the light emitter 13 is formed using a phosphor having a relatively short light emission lifetime among such light emitters.
  • the optical sensor 20 basically has the same configuration as the optical sensor 60 described above. Specifically, it has a pair of optical fiber groups arranged so as to be inclined so as to form two sides of a triangle in triangulation, and each of the fiber groups emits light, and receives the light. And a plurality of light receiving fibers arranged around the light emitting fiber.
  • FIG. 1B one optical fiber group 21 of the pair of optical fiber groups is illustrated, one light-emitting fiber is denoted by reference numeral 21a, and a plurality of light-receiving fibers are denoted by reference numeral 21b. Yes.
  • a protective window 24 is attached to the surface of the optical sensor 20 as a countermeasure against optical fiber degradation.
  • the protective window 24 is made of, for example, sapphire, quartz, diamond or the like.
  • the optical signal processing unit 25 includes a light source 26, a filter 27, and a light receiving element 28.
  • the light source 26 is, for example, a laser and is connected to the light emitting fiber 21a.
  • the light receiving fiber 21 b is connected to the light receiving element 28 via the filter 27.
  • the filter 27 transmits only light having a wavelength converted by the light emitter 13.
  • the light receiving element 28 has a high light receiving sensitivity with respect to the wavelength of the wavelength-converted light.
  • the optical signal calculation unit 30 obtains, for example, the time difference ⁇ t described in FIG. 10 based on the change in the intensity of the light detected using the light receiving element 28 (see FIG. 2 described later), Based on Equation 1, the above-described clearance d can be obtained.
  • the light T1 output from the light source 26 is output through the light emitting fiber 21a, but a part of the light T2 passes through the protective window 24 and is directed toward the outer peripheral surface 12a of the rotor 12. Part of the light T3 is reflected by the protective window 24 and received by the light receiving fiber 21b.
  • the first light described above is represented by light T1 to T3
  • the second light described above is represented by light M1 to M3.
  • the light emitter 13 converts the wavelength of the incident light T2 and emits light as the light M1.
  • a part of the light M2 emitted from the light emitter 13 is reflected by the protective window 24, and a part of the light M3 passes through the protective window 24 and is received by the light receiving fiber 21b.
  • the light T3 and the light M3 received by the light receiving fiber 21b are input to the filter 27, but the filter 27 transmits only the light having the wavelength of the wavelength-converted light M3, so that the light T3 is removed.
  • the light receiving element 28 receives only the light M3 and detects its intensity.
  • the change in the intensity of the light M3 detected by the light receiving element 28 has a clear waveform and an increased S / N ratio as shown in the graph of FIG. That is, even in the configuration having the protective window 24, the wavelength of the light T3 reflected from the protective window 24 and the wavelength of the light M3 from the light emitter 13 are different. Therefore, only the light M3 from the light emitter 13 is received by the light receiving element 28. As a result, the SN ratio can be prevented from being lowered and the measurement accuracy can be prevented from being lowered.
  • the light emitter 13, the light source 26, the filter 27, and the light receiving element 28 can be appropriately changed according to the wavelength of light.
  • a phosphor made of CaS: Eu (calcium sulfide: europium) is used as the material of the light emitter 13, and a material that outputs laser light having a wavelength of 460 nm (blue) is used as the light source 26.
  • the light emitter 13 converts the laser light having a wavelength of 460 nm to emit light having a wavelength of 650 nm (red).
  • a filter that transmits only light having a wavelength of 650 nm is used as the filter 27, even if light having a wavelength of 460 nm and light having a wavelength of 650 nm is received by the light receiving fiber 21 b, the light having a wavelength of 460 nm is removed by the filter 27.
  • the element 28 detects only light having a wavelength of 650 nm, that is, only the wavelength of light emitted from the light emitter 13.
  • Example 2 The optical measurement device of the present embodiment is based on the optical measurement device shown in the first embodiment. Therefore, here, the same reference numerals are given to the same components as those of the optical measurement device according to the first embodiment shown in FIG. 1, and the description of the overlapping components is omitted.
  • the optical measuring device of this embodiment further has a weather-resistant protective film 14 for protecting the light emitter 13 as shown in FIG.
  • the protective film 14 is formed of a glassy material and is provided so as to cover the surface of the light emitting body 13.
  • the protective film 14 is provided on the surface of the light-emitting body 13, it is possible to prevent the phosphor forming the light-emitting body 13 from being deteriorated by a high-temperature, high-pressure fluid (for example, vapor). Further, it is possible to prevent the light emitter 13 itself from being separated from the outer peripheral surface 12 a of the rotor 12 by the flow of high-temperature and high-pressure fluid.
  • a high-temperature, high-pressure fluid for example, vapor
  • the optical measurement device includes a light emitter 15, an optical sensor 40, an optical signal processing unit 45, and an optical signal calculation unit 50.
  • the optical sensor 40 is attached to the casing 11 and arranged so as to look at the outer peripheral surface 12a of the rotor 12.
  • the rotary machine 10 it is set as the structure equivalent to what was demonstrated in Example 1, and the overlapping description is abbreviate
  • the light emitter 15 is also a substitute for the above-described reflection target, and is disposed and fixed on the outer peripheral surface 12a of the rotor 12.
  • the light emitter 15 is made of a phosphor (or phosphorescent material) that is a light emitter that does not require a power source, and this absorbs light (first light) incident from the optical sensor 40 and modulates (wavelength conversion). It emits light (second light). If the material used for the light emitter 15 is an inorganic material, there is no problem of heat resistance.
  • the phosphor which forms the light emitter 15 absorbs the irradiated energy in the same manner as the phosphor which forms the light emitter 13 described above, so that the electrons are excited and the excited electrons return to the ground state. It is a light emitter that emits excess energy (photoluminescence).
  • the phosphor 15 is formed using a phosphor having a relatively long emission lifetime among such phosphors. That is, the phosphor 15 made of a phosphor has a phosphorescent property and has a relatively long emission time (afterglow time) after energy irradiation. The light emission time may be 30 seconds or longer in consideration of measurement from the rotational speed of the rotor 12 of 2 rpm.
  • the optical sensor 40 has a configuration shown in FIG. 4B in consideration of the luminous property of the light emitter 15. Specifically, it has a pair of optical fiber groups 41 and 42 that are inclined to form two sides of a triangle in triangulation, and each of the optical fiber groups 41 and 42 It is comprised only with the some light receiving fiber which light-receives. That is, the optical fiber groups 41 and 42 do not have a light emitting fiber.
  • a light source 48 is attached to the casing 11 independently of the optical sensor 40, and the light source 48 is arranged so as to look at the outer peripheral surface 12a of the rotor 12.
  • the light source 48 may also be a laser, for example. Further, the light source 48 is arranged at a position closer to the front side than the optical sensor 40 in the rotation direction of the rotor 12, and the distance between them is a distance at which the light from the light source 48 does not enter the optical sensor 40 due to reflection.
  • an optical fiber connected to the light source 48 is attached to the casing 11 independently of the optical sensor 40, and this optical fiber is disposed so as to look at the outer peripheral surface 12 a of the rotor 12. You may do it.
  • a protective window 44 is attached to the surface of the optical sensor 40 as a countermeasure against optical fiber degradation.
  • the protective window 44 is also formed of sapphire, quartz, diamond, or the like, for example.
  • the optical signal processing unit 45 includes light receiving elements 46 and 47.
  • the optical fiber group 41 is connected to the light receiving element 46, and the optical fiber group 42 is connected to the light receiving element 47.
  • the light receiving elements 46 and 47 have high light receiving sensitivity with respect to the wavelength of light from the light source 48.
  • the optical signal calculation unit 50 obtains, for example, the time difference ⁇ t described in FIG. 10 based on the change in the intensity of the light detected using the light receiving elements 46 and 47 (see FIG. 2 described above), and this time difference ⁇ t And the above-mentioned clearance d can be obtained based on the above-mentioned formula 1.
  • the distance d between the light emitter 15 and the optical sensor 40 is arranged close to within 2 mm, whereby the influence of attenuation of light emitted from the light emitter 15 can be suppressed.
  • the light source 48 arranged away from the light sensor 40 emits the light. It will be incident on.
  • the protection window 44 does not reflect light from the light emitting fiber.
  • the light source 48 is arranged away from the optical sensor 40, the light from the light source 48 does not enter the optical sensor 40 due to reflection.
  • the light incident from the light source 48 is absorbed by the phosphor of the light emitter 15, and then the modulated (wavelength converted) light M1 emits light for a predetermined time.
  • the light M1 emitted from the light emitter 15 is then detected by the optical sensor 40 as the rotor 12 rotates. At this time, a part of the light M1 emitted from the light emitter 15 is reflected by the protective window 44, and a part of the light M3 is transmitted through the protective window 44 and received by the optical fiber groups 41 and 42. Is done.
  • the second light described above is represented by light M1 to M3.
  • the light M3 received by the optical fiber groups 41 and 42 is received by the light receiving elements 46 and 47, and the intensity thereof is detected.
  • the change in the intensity of the light M3 detected by the light receiving elements 46 and 47 becomes clear as shown in the graph of FIG. 2, and the SN ratio increases. That is, even in the configuration having the protective window 44, the light emitting fiber is eliminated from the pair of optical fibers 41 and 42 of the optical sensor 40, so that the light from the light source 48 is received by the light receiving elements 46 and 47. Thus, only the light M3 from the light emitter 15 is received by the light receiving elements 46 and 47. In other words, the light path in the protective window 44 is only the light path from the light emitter 15, and the reflection of light inside the protective window 44 is eliminated by making the light path one-pass. As a result, the SN ratio can be prevented from being lowered and the measurement accuracy can be prevented from being lowered. Further, since the optical sensor 40 does not have a light emitting fiber, the structure becomes simple.
  • a filter is provided in front of the light receiving elements 46 and 47 as in the first embodiment, even if light from the light source 48 interferes with the light, the filter uses light having the wavelength of the wavelength-converted light M3. Therefore, the light from the light source 48 can be removed.
  • Example 4 The optical measurement device of the present embodiment is based on the optical measurement device shown in the third embodiment. Therefore, here, the same reference numerals are given to the same components as those of the optical measurement apparatus according to the third embodiment illustrated in FIG. 4, and the description of the overlapping components is omitted.
  • the optical measuring device of the present embodiment further includes a weather-resistant protective film 16 that protects the light emitter 15.
  • the protective film 16 is made of a glassy material and is provided so as to cover the surface of the light emitter 15.
  • the protective film 16 is provided on the surface of the light emitter 15, it is possible to prevent the phosphor forming the light emitter 15 from being deteriorated by a high-temperature, high-pressure fluid (for example, vapor). Further, it is possible to prevent the light emitter 15 itself from being separated from the outer peripheral surface 12a of the rotor 12 by the flow of high-temperature and high-pressure fluid.
  • a high-temperature, high-pressure fluid for example, vapor
  • Example 5 The optical measurement device of the present embodiment is based on the optical measurement device shown in the third embodiment. Therefore, here, the same reference numerals are given to the same components as those of the optical measurement apparatus according to the third embodiment illustrated in FIG. 4, and the description of the overlapping components is omitted. Note that the optical measuring device shown in the fourth embodiment shown in FIG. 5 may be assumed.
  • the optical measurement device of this example is different from the above example 3 in the configuration of the light source. Specifically, as shown in FIG. 6, a plurality of light sources 48 are continuously arranged along the rotation direction of the rotor 12 so that the irradiated light has a long band shape along the rotation direction of the rotor 12. Further, as shown in FIG. 7, a light source 49 having a long strip shape is provided along the rotation direction of the rotor 12.
  • the irradiation time of the phosphor 15 with respect to the phosphor can be increased, and the phosphor 15 The amount of light emitted from the phosphor and the time can be increased.
  • the present invention is suitable for measurement of a rotating body of a rotating machine (for example, a turbo machine such as a steam turbine, a gas turbine, or a compressor).
  • a rotating machine for example, a turbo machine such as a steam turbine, a gas turbine, or a compressor.
  • a rotating machine for example, a turbo machine such as a steam turbine, a gas turbine, or a compressor.
  • a steam turbine it can be applied to blade vibration measurement and clearance measurement for reducing internal leak and avoiding rubbing.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)

Abstract

L'invention concerne un dispositif de mesure optique, un procédé de mesure optique et une machine rotative, une protection étant prévue pour des capteurs optiques et la dégradation du rapport S/N étant évitée. Ainsi, ce dispositif de mesure optique équipé d'un capteur optique (20) comportant une fenêtre de protection (24) comprend : une source de lumière (26) qui émet de la lumière (T1) ; une fibre électroluminescente (21a) qui projette sur un rotor (12), par l'intermédiaire de la fenêtre de protection (24), la lumière (T1) émise par la source de lumière (26) ; un corps lumineux (13) qui est disposé sur la surface périphérique extérieure (12a) du rotor (12), et qui, lorsque la lumière (T1) émise par la source de lumière (26) est projetée sur lui, absorbe la lumière (T1) et émet de la lumière (M1) présentant une longueur d'onde différente de celle de la lumière absorbée (T1) ; une fibre de réception de lumière (21b) qui reçoit, par l'intermédiaire de la fenêtre de protection (24), de la lumière (M3) émise par le corps lumineux (13) ; un élément de réception de lumière (28) qui détecte l'intensité de la lumière (M3) reçue par la fibre de réception de lumière (21b) ; et un filtre (27) qui est disposé entre la fibre de réception de lumière (21b) et l'élément de réception de lumière (28), et qui transmet uniquement la lumière (M3).
PCT/JP2017/010572 2016-03-18 2017-03-16 Dispositif de mesure optique, procédé de mesure optique et machine rotative WO2017159768A1 (fr)

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JP2016054850A JP2017167078A (ja) 2016-03-18 2016-03-18 光計測装置、光計測方法及び回転機械
JP2016-054850 2016-03-18

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JP7445496B2 (ja) * 2020-03-31 2024-03-07 三菱重工業株式会社 フィン先端位置の計測方法、フィン先端位置の計測システム、及びフィン先端位置の計測用冶具

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08233521A (ja) * 1995-02-28 1996-09-13 Toho Technol Kk 距離測定方法、回転角度測定方法、移動距離測定装置、位置測定装置、寸法測定装置、回転角度測定装置及び回転位置測定装置
JP2000258138A (ja) * 1999-03-11 2000-09-22 Toyo Glass Co Ltd 食品容器の形状計測方法
JP2002250608A (ja) * 2001-02-23 2002-09-06 Olympus Optical Co Ltd 光学式膜厚監視装置
JP2002261059A (ja) * 2001-03-01 2002-09-13 Omron Corp 研磨状態検出装置
US20100080500A1 (en) * 2008-09-30 2010-04-01 General Electric Company Fiberoptic clearance detection system and method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08233521A (ja) * 1995-02-28 1996-09-13 Toho Technol Kk 距離測定方法、回転角度測定方法、移動距離測定装置、位置測定装置、寸法測定装置、回転角度測定装置及び回転位置測定装置
JP2000258138A (ja) * 1999-03-11 2000-09-22 Toyo Glass Co Ltd 食品容器の形状計測方法
JP2002250608A (ja) * 2001-02-23 2002-09-06 Olympus Optical Co Ltd 光学式膜厚監視装置
JP2002261059A (ja) * 2001-03-01 2002-09-13 Omron Corp 研磨状態検出装置
US20100080500A1 (en) * 2008-09-30 2010-04-01 General Electric Company Fiberoptic clearance detection system and method

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