WO2017150414A1 - プラズマリアクタ - Google Patents
プラズマリアクタ Download PDFInfo
- Publication number
- WO2017150414A1 WO2017150414A1 PCT/JP2017/007359 JP2017007359W WO2017150414A1 WO 2017150414 A1 WO2017150414 A1 WO 2017150414A1 JP 2017007359 W JP2017007359 W JP 2017007359W WO 2017150414 A1 WO2017150414 A1 WO 2017150414A1
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- WIPO (PCT)
- Prior art keywords
- plasma
- mat
- case
- mats
- plasma reactor
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/0892—Electric or magnetic treatment, e.g. dissociation of noxious components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/92—Chemical or biological purification of waste gases of engine exhaust gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
- F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
- F01N3/023—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles
- F01N3/027—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles using electric or magnetic heating means
- F01N3/028—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles using electric or magnetic heating means using microwaves
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2437—Multilayer systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/17—Exhaust gases
Definitions
- the present invention relates to a plasma reactor, and more particularly to a plasma reactor suitable for an apparatus for purifying exhaust gas of an internal combustion engine.
- Patent Documents 1 to 3 a plurality of electrode panels in which discharge electrodes are formed are stacked, and a voltage is applied between adjacent electrode panels to generate a low temperature plasma (non-equilibrium plasma) by dielectric barrier discharge, thereby flowing between the electrode panels
- Various plasma reactors for oxidizing and removing PM in exhaust gas have been proposed (see Patent Documents 1 to 3).
- the plasma reactors described in Patent Documents 1 to 3 each include a case for housing a plasma panel stack formed by stacking electrode panels, a mat interposed between the case and the plasma panel stack, and the like. There is. Further, the plasma reactor is provided with an electrical conduction member electrically connected to the discharge electrode.
- the electrically conductive member is in contact with the case via the mat.
- a lead line member which is an electrical conducting member is provided, and the lead line member is in contact with the housing (case) via a mat.
- Patent No. 6464,945 (FIG. 8 etc.)
- Patent No. 3832654 (figure 4 grade)
- Patent No. 4448097 (FIG. 9 etc.)
- water may flow in into a plasma reactor.
- the water flowing into the plasma reactor for example, exhaust condensed water generated due to condensation in the exhaust pipe at the time of cold start of the vehicle, water flowing in from the muffler with the vehicle entering the water pool, etc. There is.
- the present invention has been made in view of the above problems, and an object thereof is to provide a plasma reactor capable of reliably generating plasma even when water flows in.
- means (means 1) for solving the above problems it has a structure in which a plurality of electrode panels having discharge electrodes are stacked, and plasma generating plasma when a voltage is applied between the adjacent electrode panels.
- a panel stack an electrical conducting member electrically connected to the discharge electrodes of the plurality of electrode panels, a case in which the plasma panel stack is housed, and an intervening member between the case and the plasma panel stack And a mat for fixing the plasma panel laminate to the case, wherein the mat is spaced apart from the electrically conductive member so as to have a gap therebetween.
- a plasma reactor that
- the mat interposed between the case and the plasma panel laminate is spaced apart so as to have a gap with the electrically conducting member. For this reason, the insulation between the electrically conductive member connected to the discharge electrode on the plasma panel laminate side and the mat is secured, and, in turn, the insulation between the electrically conductive member and the case is secured. Therefore, even if the mat absorbs water and becomes hydrated as the water flows into the plasma reactor, the conduction between the electrically conductive member and the case via the mat is prevented, so the electrically conductive member and the case are separated. It is possible to prevent the generation of leakage current due to the conduction of Therefore, since the generation amount of plasma with respect to the input power is sufficiently ensured, PM can be efficiently removed when PM in exhaust gas flowing between adjacent electrode panels is oxidized and removed using plasma. it can.
- the plasma panel laminated body which comprises the said plasma reactor has a structure which laminated
- materials for forming the discharge electrode include tungsten (W), molybdenum (Mo), ruthenium oxide (RuO 2 ), silver (Ag), copper (Cu), platinum (Pt) and the like.
- matte and an electrical conduction member is 2 mm or more and 30 mm or less, for example. If the size of the gap is less than 2 mm, creeping discharge is likely to occur, and there is a possibility that the electrically conductive member and the case may be electrically connected to each other through the mat. On the other hand, if the size of the gap is larger than 30 mm, the contact area between the case and the mat, and the contact area between the mat and the plasma panel laminate become smaller, so the plasma panel laminate can be reliably cased through the mat. May not be fixed.
- the size of the gap formed between the mat and the electrically conductive member changes in accordance with the level of voltage required to form the plasma. Generally, in order to prevent the occurrence of creeping discharge, it is known that the distance may be 1 mm per 1 kV. Therefore, the gap generated between the mat and the electrically conductive member may be a distance according to the voltage applied between the electrode panels.
- the structure having a gap between the mat and the electrically conducting member is not particularly limited.
- a cutout that penetrates the mat in the thickness direction is formed in the mat so as to avoid the electrically conducting member.
- a gap between the mat and the electrically conducting member or by arranging a plurality of mats apart from each other and positioning the electrically conducting member between the adjacent mats, thereby providing a gap Etc.
- it is set as the structure which formed the notch part, while being able to reduce a number of parts compared with the case where a some mat
- a plasma panel stack for generating plasma an electric conduction member electrically connected to the discharge electrodes of the plurality of electrode panels, a case for containing the plasma panel stack, the case and the case And a mat interposed between the plasma panel stacks to fix the plasma panel stacks to the case, wherein the plurality of mats are arranged apart from each other along the gas passing direction.
- a plasma reactor characterized in that Therefore, in the invention described in the above means 2, there are a plurality of mats interposed between the case and the plasma panel laminate, and the plurality of mats are arranged apart from each other along the gas passing direction.
- the plurality of mats may have equal dimensions. In this configuration, since a plurality of mats to be prepared can be one type, cost reduction can be easily achieved. Further, each of the plurality of mats may have a rectangular ring shape in a side view. Since it is a suitable shape, for example, when a plasma panel laminated body is a substantially rectangular parallelepiped shape as it is this structure, it becomes possible to manufacture a plasma reactor comparatively easily.
- the schematic sectional drawing which shows the plasma reactor in this embodiment.
- the top view which shows a plasma reactor.
- the perspective view which shows the state in which the plasma panel laminated body is accommodated in the case.
- the side view which shows the state in which the plasma panel laminated body is accommodated in the case.
- the top view which shows a plasma panel laminated body, a clamp, an external terminal, and a mat
- the perspective view which shows a plasma panel laminated body, a clamp, an external terminal, and a mat
- the top view which shows a plasma panel laminated body, a clamp, and an external terminal.
- the perspective view which shows a plasma panel laminated body, a clamp, and an external terminal.
- matte In other embodiment, the perspective view which shows a plasma panel laminated body, a clamp, an external terminal, and a mat
- the plasma reactor 1 of the present embodiment is a device for removing PM contained in the exhaust gas of an automobile engine (not shown), and is attached to the exhaust pipe 2. .
- the plasma reactor 1 includes a pulse generation power source 3, a case 10 and a plasma panel stack 20.
- the case 10 is formed in a rectangular cylindrical shape using, for example, stainless steel.
- a first cone portion 11 is connected to a first end (left end in FIG. 1) of the case 10, and a second cone 12 is connected to a second end (right end in FIG. 1) of the case 10 There is. Furthermore, the first cone portion 11 is connected to the upstream side portion 4 (portion on the engine side) of the exhaust pipe 2, and the second cone portion 12 is on the downstream side portion 5 of the exhaust pipe 2 (opposite to the engine side) Part) is connected. Exhaust gas from the engine flows into the case 10 from the upstream portion 4 of the exhaust pipe 2 via the first cone portion 11 and passes through the inside of the case 10, and then the exhaust pipe via the second cone portion 12 It flows to the downstream part 5 of 2.
- the plasma panel stack 20 is housed in the case 10 and includes a pair of gas passing surfaces 21 and 22 and four non-gas passing surfaces 23 and 24, 25 and 26 are formed in a substantially rectangular parallelepiped shape.
- the two gas passage surfaces 21 and 22 are opposite to each other in the plasma panel stack 20.
- each non-gas passing surface 23 to 26 is located between the pair of gas passing surfaces 21 and 22.
- the plasma panel stack 20 has a structure in which a plurality of electrode panels 30 are stacked.
- Each electrode panel 30 is disposed in parallel with the passing direction of exhaust gas in the case 10 (the direction from the first cone portion 11 to the second cone portion 12), and the gap (0.5 mm in this embodiment) It is arranged to have a gap).
- the first wires 6 and the second wires 7 are alternately and electrically connected to the electrode panels 30 along the thickness direction of the plasma panel stack 20.
- the first wiring 6 is electrically connected to the first terminal of the pulse generation power supply 3
- the second wiring 7 is electrically connected to the second terminal of the pulse generation power supply 3.
- the electrode panel 30 of the present embodiment has a first major surface 31 and a second major surface 32, and has a substantially rectangular plate shape of 100 mm long ⁇ 200 mm wide. .
- the first major surface 31 and the second major surface 32 are located opposite to each other in the thickness direction of the electrode panel 30.
- the electrode panel 30 has a structure in which the discharge electrode 34 (10 ⁇ m in thickness) is built in a rectangular plate-like dielectric 33.
- the dielectric 33 is made of ceramic such as alumina (Al 2 O 3 ), and the discharge electrode 34 is made of tungsten (W).
- the dielectric 33 also has a recess 35 opened at the second major surface 32.
- the recess 35 extends in the lateral direction of the electrode panel 30 and is open at both end surfaces of the electrode panel 30.
- the flow path of the exhaust gas is configured by the recess 35 and the first major surface 31 of the electrode panel 30 adjacent to the lower layer side.
- the electrode panel 30 does not exist in the lower layer side in the electrode panel 30 of the lowermost layer which comprises the plasma panel laminated body 20, the recessed part 35 is not formed.
- each conduction structure 40 includes a through hole conductor 41 which is an electric conduction member, a first pad 42 and a second pad 43.
- the through hole conductor 41 penetrates the first major surface 31 and the second major surface 32.
- the through-hole conductor 41 provided in one of the conductive structures 40 penetrates the extending portion 36 extending to the outer peripheral side from the discharge electrode 34.
- the first pad 42 is formed on the first main surface 31 and is electrically connected to the end portion of the through hole conductor 41 on the first main surface 31 side.
- the second pad 43 is formed on the second major surface 32 and is electrically connected to the end portion of the through hole conductor 41 on the second major surface 32 side.
- Each of the first pad 42 and the second pad 43 has a rectangular shape, and the surface is plated with Ni or the like.
- the plasma reactor 1 includes three first clamps 50, 51, 52 for sandwiching and fixing each electrode panel 30 (plasma panel stack 20) from the gas non-passing surface 24 side. And three second clamps 53, 54, 55 for holding and fixing each electrode panel 30 from the gas non-passing surface 26 side.
- Each clamp 50 to 55 is formed by bending a metal plate (for example, a stainless steel plate).
- the first clamps 50 to 52 are arranged at equal intervals along the lateral direction of the plasma panel stack 20 (direction perpendicular to the stack direction of the electrode panel 30) in the gas non-passing surface 24.
- the second clamps 53 to 55 are arranged at equal intervals along the lateral direction of the plasma panel stack 20 in the gas non-passing surface 26.
- the two clamps 54 have a function as an electrical conduction member electrically connected to the discharge electrode 34 in addition to the function of sandwiching each electrode panel 30 in the stacking direction.
- the first clamps 50 and 52 disposed on both sides of the gas non-passing surface 24 of the first clamps 50 to 52, and the second clamps 53 to 55 are disposed on both sides of the gas non-passing surface 26
- the second clamps 53 and 55 only have the function of sandwiching the electrode panels 30 in the stacking direction.
- each of the clamps 50 to 55 includes a clamp body 56 and a pressing plate 57.
- the clamp body 56 extends in the stacking direction of the electrode panel 30.
- the pressing plate 57 is integrally formed with the clamp main body 56 and disposed at both ends of the clamp main body 56.
- Each pressing plate 57 is a leaf spring having elasticity and a folded structure.
- the two pressure plates 57 constituting each of the clamps 50 to 55 are in pressure contact with the non-gas passing surface 23 and the non-gas passing surface 25 of the plasma panel stack 20, respectively.
- both the pressure plates 57 which constitute the clamps 51 and 54 have a first pad 42 formed on the gas non-passing surface 23 (the first major surface 31 of the uppermost electrode panel 30) and a gas non-passing surface 25 ( It is in pressure contact with the second pad 43 formed on the second major surface 32) of the lowermost electrode panel 30.
- the plasma reactor 1 includes a pair of external terminals 60 and 61.
- the external terminals 60 and 61 of the present embodiment have the same structure as the spark plug.
- the external terminals 60 and 61 include an external connection portion, a conductive seal containing metal powder, an insulator, a metal shell, talc, packings, and the like.
- the external connection portion is connected to the center shaft 62 via a conductive seal.
- the external terminal is not limited to that of the present embodiment, and any other structure may be used as long as the external connection portion and the case 10 are insulated by an insulator.
- the external terminal 60 is electrically connected at its proximal end to the clamp body 56 of the first clamp 51, and its distal end is exposed from the case 10 (see FIGS. 2 to 4).
- the external terminal 61 is electrically connected at its proximal end to the clamp body 56 of the second clamp 54, and its distal end is exposed from the case 10. That is, the external terminal 60 is disposed on the non-gas passing surface 24 of the plasma panel stack 20, and the external terminal 61 is disposed on the non-gas passing surface 26 opposite to the non-gas passing surface 24. And each external terminal 60, 61 protrudes in the mutually opposite direction.
- the tip of the external terminal 60 is connected to the first wire 6 (see FIG. 1), and the tip of the external terminal 61 is connected to the second wire 7 (see FIG. 1). It has become so.
- a mat 71 having a rectangular annular shape in a side view is interposed between the case 10 and the plasma panel stack 20 between the case 10 and the plasma panel stack 20, a mat 71 having a rectangular annular shape in a side view is interposed.
- the mat 71 has a function of fixing the plasma panel laminate 20 to the case 10.
- the mat 71 also covers the outer surface of the plasma panel laminate 20. More specifically, the mat 71 has a substantially rectangular plate-shaped first mat piece 72 covering the gas non-passing surface 23, a substantially rectangular plate-shaped second mat piece 73 covering the gas non-passing surface 24, and a gas non-passing surface
- the third mat piece 74 substantially in the form of a rectangular plate covering the first and second rectangular plate 25 and the fourth mat piece 75 substantially in the form of a rectangular plate covering the gas non-passing surface 26 are formed.
- the mat 71 is configured by bonding the mat pieces 72 to 75 to each other using an adhesive tape or the like as necessary.
- insulating materials such as a ceramic fiber, a metal fiber, a foam metal, can be used, for example.
- the mat 71 is arranged to be in contact with the clamps 50, 52, 53 and 55 which do not have a function as an electrical conducting member, It is spaced apart so as to have a gap between the clamps 51 and 54 having a function.
- a first notch 81 penetrating the mat 71 in the thickness direction is formed so as to avoid the first clamp 51, and a second notch penetrating the mat 71 in the thickness direction
- the portion 82 is formed to avoid the second clamp 54.
- the 1st clamp 51 is arrange
- the 2nd clamp 54 is arrange
- the first notch 81 includes a first groove 83 penetrating the second mat piece 73 in the thickness direction, and a pair of first recesses 84 penetrating the mat pieces 72 and 74 in the thickness direction. It has become.
- the first groove portion 83 extends in the stacking direction of the electrode panel 30 and divides the second mat piece 73.
- the first recess 84 is formed only on a part of the outer peripheral portion of the mat pieces 72 and 74 so as not to divide the mat pieces 72 and 74.
- the clamp main body 56 of the first clamp 51 and the base end of the external terminal 60 are disposed in the first groove portion 83, and the pressing plate 57 of the first clamp 51 is disposed in the first recess 84. ing.
- a first gap S1 is generated between the outer peripheral edge of
- size of 1st clearance gap S1 is set to 2 mm or more and 30 mm or less (this embodiment 5 mm at minimum).
- the second notch 82 is a pair of a second groove 85 penetrating the fourth mat piece 75 in the thickness direction, and a pair penetrating the mat pieces 72 and 74 in the thickness direction.
- a second recess 86 of the The second groove portion 85 extends along the stacking direction of the electrode panel 30 and divides the fourth mat piece 75.
- the second concave portion 86 is formed only on a part of the outer peripheral portion of the mat pieces 72 and 74 so as not to divide the mat pieces 72 and 74.
- the clamp main body 56 of the second clamp 54 and the base end of the external terminal 61 are disposed in the second groove 85, and the pressing plate 57 of the second clamp 54 is disposed in the second recess 86. ing. Then, between the mat 71 and the second clamp 54 (specifically, between the inner wall surface of the second groove 85 and the side edge of the clamp main body 56, and the inner surface of the second recess 86 and the pressing plate 57 A second gap S2 is created between the The size of the second gap S2 is equal to the size of the first gap S1, and is set to 2 mm or more and 30 mm or less (5 mm in the present embodiment as a minimum).
- the plasma reactor 1 of this embodiment is used, for example, for removing PM contained in exhaust gas.
- a pulse voltage for example, peak voltage: 5 kV (5000 V), pulse repetition frequency: 100 Hz
- a dielectric barrier discharge occurs, and the discharge electrode A plasma is generated due to the dielectric barrier discharge between 34.
- PM contained in the exhaust gas flowing between the discharge electrodes 34 is oxidized (burned) and removed.
- first to third ceramic green sheets to be the dielectric 33 are formed using a ceramic material containing alumina powder as a main component.
- a ceramic green sheet well-known shaping
- laser processing is performed on each ceramic green sheet to form through holes at predetermined positions.
- the through holes may be formed by punching, drilling or the like.
- the through holes of each ceramic green sheet are filled with a conductive paste (in the present embodiment, a tungsten paste), and unbaked to be the through hole conductor 41. Form a through-hole conductor portion.
- a conductive paste in the present embodiment, a tungsten paste
- the first ceramic green sheet is placed on a support (not shown). Further, a conductive paste is printed on the back surface of the first ceramic green sheet using a paste printing apparatus. As a result, on the back surface of the first ceramic green sheet, a 10 ⁇ m-thick unbaked electrode to be the discharge electrode 34 is formed.
- well-known printing methods such as screen printing, can be used as a printing method of the unbaked electrode with respect to a 1st ceramic green sheet.
- the second ceramic green sheet and the third ceramic green sheet are sequentially laminated on the back surface of the first ceramic green sheet on which the unfired electrode is printed, and in the sheet lamination direction Apply pressure.
- the ceramic green sheets are integrated to form a ceramic laminate.
- a conductive paste is printed on the main surface of the first ceramic green sheet to form an unfired first pad 42, and conductive on the back surface of the third ceramic green sheet. Is printed to form an unfired second pad 43.
- the third ceramic green sheet is laminated after being subjected to punching according to the shape of the recess 35.
- the ceramic laminate (ceramic green sheet and unfired electrode) is sintered at a predetermined temperature (eg, about 1400 ° C. to 1600 ° C.) at which alumina and tungsten can be sintered. Co-firing to heat).
- a predetermined temperature eg, about 1400 ° C. to 1600 ° C.
- the alumina in the ceramic green sheet and the tungsten in the conductive paste are co-sintered, and the dielectric 33, the discharge electrode 34, the through hole conductor 41, the first pad 42 and the second pad 43 are co-fired.
- the ceramic laminate becomes an electrode panel 30.
- a plurality of obtained electrode panels 30 are stacked to form a plasma panel stack 20.
- the plurality of electrode panels 30 are sandwiched and fixed in the stacking direction using the clamps 50 to 55.
- the pair of holding plates 57 constituting the clamps 51 and 54 are in pressure contact with the first pad 42 and the second pad 43.
- the proximal end portion of the external terminal 60 is connected to the clamp main body 56 constituting the first clamp 51 via the middle shaft 62 and the clamp main body 56 constituting the second clamp 54
- the base end of the external terminal 61 is connected via the center shaft 62.
- the case 10 is attached so as to cover the outer surface of the mat 71.
- the first wire 6 is connected to the tip of the external terminal 60
- the second wire 7 is connected to the tip of the external terminal 61.
- the mat 71 interposed between the case 10 and the plasma panel stack 20 is spaced apart so as to have the clearances S1 and S2 between the case 51 and the clamps 51 and 54. It is done. For this reason, the insulation between the clamps 51 and 54 connected to the discharge electrode 34 on the plasma panel stack 20 side and the mat 71 is secured, and in turn, the insulation between the clamps 51 and 54 and the case 10 is Will be secured. Therefore, even if the mat 71 absorbs water and becomes hydrated as the water flows into the plasma reactor 1, the conduction between the clamps 51 and 54 and the case 10 via the mat 71 is prevented, so the clamps It is possible to prevent the occurrence of leakage current due to conduction between 51, 54 and case 10. Therefore, the amount of generation of plasma with respect to the input power is sufficiently ensured, so when PM in exhaust gas flowing between adjacent electrode panels 30 is oxidized and removed using plasma, PM removal should be performed efficiently. Can.
- the gaps S1 and S2 are provided between the mat 71 and the clamps 51 and 54. There is. Therefore, for example, the number of parts of the plasma reactor 1 can be reduced as compared with the case where a gap is provided between the mat and the clamp by arranging the clamp between a plurality of mats.
- the plasma reactor 1 of the present embodiment is attached to the exhaust pipe 2 via the first cone portion 11 and the second cone portion 12.
- the resistance in the exhaust gas flow path in which the exhaust gas flows in the order of the upstream portion 4 of the exhaust pipe 2 ⁇ the first cone portion 11 ⁇ the plasma reactor 1 ⁇ the second cone portion 12 ⁇ the downstream portion 5 of the exhaust pipe 2 is reduced Therefore, pressure loss in the exhaust gas channel can be suppressed. As a result, it is also possible to prevent the engine power reduction due to the pressure loss.
- the gaps S1 and S2 are provided between the mat 71 and the clamps 51 and 54.
- the gap may be provided by another structure.
- the two mats 91 and 92 are completely separated by arranging the two mats 91 and 92 apart from each other along the exhaust gas passage direction, and the adjacent mats are separated.
- a gap S3 may be provided between the mats 91 and 92 and the clamps 93 and 94 by arranging the clamps 93 and 94 which are electrically conductive members between 91 and 92.
- the structures shown in FIGS. 10 and 11 have the following advantages.
- the other mat 91 disposed apart from one another is less likely to be exposed to water, and all the plurality of mats are prevented from being hydrated.
- the infiltration of water between the plasma panel stack 20 and the case 10 can be reduced, so that the decrease in capacitance between the clamps 51 and 54 and the case 10 is suppressed, and the space between the clamps 51 and 54-case 10 It is possible to suppress the generation of a leak current due to the conduction of (i.e., an excessive decrease in capacitance).
- the two mats 91 and 92 since the two mats 91 and 92 have the same dimensions, one type of mat 91 and 92 is sufficient for manufacturing the plasma reactor. Therefore, there is an advantage that cost reduction can be easily achieved.
- each of the mats 91 and 92 has a rectangular ring shape in a side view, the mats 91 and 92 have a shape suitable for surrounding the substantially rectangular parallelepiped plasma panel laminate 20. Therefore, there is an advantage that the plasma reactor can be manufactured relatively easily.
- the number of mats is not limited to two, and more (three , 4, 5, 6 ).
- FIG. 12 and FIG. 13 an example using four mats 111, 112, 113 and 114 is shown. Even with such a structure, some mats hold and hold water, so the remaining mats arranged at a distance are less likely to be exposed to water. Therefore, all of the plurality of mats are prevented from being hydrated.
- the mat 71 of the above embodiment is configured by bonding a plurality of mat pieces 72 to 75 to each other using an adhesive tape or the like as necessary
- the mat may be configured using another method. May be
- the mat 100 is configured by fitting the convex portion 102 provided on the outer peripheral portion of the mat piece 101 to the concave portion 104 formed on the outer peripheral portion of the adjacent mat piece 103. It is also good.
- the electrode panel 30 of the said embodiment was comprised by incorporating the discharge electrode 34 in the dielectric 33.
- the electrode panel may be formed by forming the discharge electrode 34 on the surface of the dielectric 33.
- the plasma reactor 1 of the said embodiment was used for exhaust gas purification of the engine of a motor vehicle, you may use it, for example in exhaust gas purification of engines, such as a ship. Further, the plasma reactor 1 may be anything that performs plasma processing, and may not be one that processes exhaust gas, and may not be used for purification.
- the mat is formed with a notch penetrating the mat in the thickness direction so as to avoid the electric conducting member, and the notch is along the stacking direction of the plurality of electrode panels.
- a plasma reactor characterized by extending.
- the electrode panel has a first main surface and a second main surface, and the electrode panel is electrically connected to the first main surface side and the second main surface side.
- a conduction structure is provided, and the conduction structure is formed on the first main surface and the through hole conductor penetrating the first main surface and the second main surface, and the first main surface side of the through hole conductor
- a first pad electrically connected to an end, and a second pad formed on the second main surface and electrically connected to an end of the through hole conductor on the second main surface side
- Plasma reactor characterized by
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Abstract
Description
上記課題を解決するための別の手段(手段2)としては、放電電極を有する複数の電極パネルを積層した構造を有し、隣接する前記電極パネル間にガスを通過した状態で電圧が印加されたときにプラズマを発生するプラズマパネル積層体と、前記複数の電極パネルの前記放電電極に電気的に接続される電気導通部材と、前記プラズマパネル積層体が収容されるケースと、前記ケース及び前記プラズマパネル積層体の間に介在され、前記プラズマパネル積層体を前記ケースに固定するマットとを備えるプラズマリアクタであって、複数の前記マットが、前記ガスの通過方向に沿って互いに離間して配置されていることを特徴とするプラズマリアクタがある。
従って、上記手段2に記載の発明では、ケース及びプラズマパネル積層体の間に介在されるマットが複数であり、それら複数のマットがガスの通過方向に沿って互いに離間して配置されている。このため、ガスが通過する際の上流側あるいは下流側からプラズマパネル積層体への水の流入に伴い、水の流入側に位置する一部のマットが水を吸って含水状態になったとしても、当該一部のマットがその水を保持してそこに留める。このため、離間して配置されている他のマットが水に晒されにくくなり、複数のマット全てが含水状態になることが防止される。その結果、プラズマパネル積層体とケース間への水の浸入を少なくできるため、電気導通部材とケースとの間の静電容量の低下が抑制される。従って、電気導通部材-ケース間の導通(即ち、静電容量の過度の低下)に起因するリーク電流の発生を抑制することができる。ゆえに、投入電力に対するプラズマの発生量が十分に確保されるため、隣接する電極パネル間を流れる排ガス中のPMをプラズマを用いて酸化して除去する場合に、PMの除去を効率良く行うことができる。
ここで、複数のマットは互いに等しい寸法を有していてもよい。この構成であると、準備しておく複数のマットが一種類でよくなるため、低コスト化を達成しやすくなる。また、複数のマットはいずれも側面視で矩形環状をなしていてもよい。この構成であると、例えばプラズマパネル積層体が略直方体状であるような場合に好適な形状であることから、プラズマリアクタの製造を比較的容易に行うことが可能となる。
なお、図10,図11に示した構造にはさらに以下のような利点がある。
例えば、排気管2の上流側部分4からプラズマパネル積層体20へ水が流入するような場合、流入側に位置する一方のマット91が水を吸って含水状態になったとしても、当該マット91がその水を保持してそこに留める。このため、離間して配置されている他方のマット92が水に晒されにくくなり、複数のマット全てが含水状態になることが防止される。またこれとは逆に、排気管2の下流側部分5からプラズマパネル積層体20へ水が流入するような場合、流入側に位置する一方のマット92が水を吸って含水状態になったとしても、当該マット92がその水を保持してそこに留める。このため、離間して配置されている他方のマット91が水に晒されにくくなり、複数のマット全てが含水状態になることが防止される。
その結果、プラズマパネル積層体20とケース10間への水の浸入を少なくできるため、クランプ51,54とケース10との間の静電容量の低下が抑制され、クランプ51,54-ケース10間の導通(即ち、静電容量の過度の低下)に起因するリーク電流の発生を抑制することができる。
加えて、このプラズマリアクタの場合、2つのマット91,92は互いに等しい寸法を有しているので、プラズマリアクタを製造するにあたり、準備しておくマット91,92が一種類でよくなる。そのため、低コスト化を達成しやすくなるというメリットがある。また、これらマット91,92はいずれも側面視で矩形環状をなしているため、略略直方体状のプラズマパネル積層体20を包囲するのに好適な形状となっている。ゆえに、プラズマリアクタの製造を比較的容易に行うことができるというメリットがある。
・なお、図10,図11のプラズマリアクタにおいては2つのマット91,92を排ガスの通過方向に沿って互いに離間して配置したが、マットの数は2つに限定されず、それ以上(3,4,5,6…)であってもよい。ここで、図12,図13のプラズマリアクタにおいては、4つのマット111,112,113,114を用いた例が示されている。このような構造であっても、一部のマットが水を保持してそこに留めることから、離間して配置されている残りのマットが水に晒されにくくなる。ゆえに、複数のマット全てが含水状態になることが防止される。
10…ケース
20…プラズマパネル積層体
30…電極パネル
34…放電電極
41…電気導通部材としてのスルーホール導体
42…電気導通部材としての第1パッド
43…電気導通部材としての第2パッド
51…電気導通部材としての第1クランプ
54…電気導通部材としての第2クランプ
71,91,92,100,111,112,113,114…マット
81…切欠部としての第1切欠部
82…切欠部としての第2切欠部
93,94…電気導通部材としてのクランプ
S1…隙間としての第1の隙間
S2…隙間としての第2の隙間
S3…隙間
Claims (7)
- 放電電極を有する複数の電極パネルを積層した構造を有し、隣接する前記電極パネル間に電圧が印加されたときにプラズマを発生するプラズマパネル積層体と、
前記複数の電極パネルの前記放電電極に電気的に接続される電気導通部材と、
前記プラズマパネル積層体が収容されるケースと、
前記ケース及び前記プラズマパネル積層体の間に介在され、前記プラズマパネル積層体を前記ケースに固定するマットと
を備えるプラズマリアクタであって、
前記マットは、前記電気導通部材との間に隙間を有するように離間して配置されていることを特徴とするプラズマリアクタ。 - 前記マットと前記電気導通部材との間に生じる前記隙間の大きさは、2mm以上30mm以下であることを特徴とする請求項1に記載のプラズマリアクタ。
- 前記マットに、同マットを厚さ方向に貫通する切欠部が前記電気導通部材を避けるように形成されることにより、前記マットと前記電気導通部材との間に前記隙間が設けられることを特徴とする請求項1または2に記載のプラズマリアクタ。
- 複数の前記マットが互いに離間して配置されており、隣接する前記マット間に前記電気導通部材が位置していることを特徴とする請求項1乃至3のいずれか1項に記載のプラズマリアクタ。
- 放電電極を有する複数の電極パネルを積層した構造を有し、隣接する前記電極パネル間にガスを通過した状態で電圧が印加されたときにプラズマを発生するプラズマパネル積層体と、
前記複数の電極パネルの前記放電電極に電気的に接続される電気導通部材と、
前記プラズマパネル積層体が収容されるケースと、
前記ケース及び前記プラズマパネル積層体の間に介在され、前記プラズマパネル積層体を前記ケースに固定するマットと
を備えるプラズマリアクタであって、
複数の前記マットが、前記ガスの通過方向に沿って互いに離間して配置されている
ことを特徴とするプラズマリアクタ。 - 複数の前記マットは、互いに等しい寸法を有することを特徴とする請求項5に記載のプラズマリアクタ。
- 複数の前記マットは、いずれも側面視で矩形環状をなすことを特徴とする請求項5または6に記載のプラズマリアクタ。
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