WO2017145445A1 - Heat treatment equipment - Google Patents

Heat treatment equipment Download PDF

Info

Publication number
WO2017145445A1
WO2017145445A1 PCT/JP2016/082369 JP2016082369W WO2017145445A1 WO 2017145445 A1 WO2017145445 A1 WO 2017145445A1 JP 2016082369 W JP2016082369 W JP 2016082369W WO 2017145445 A1 WO2017145445 A1 WO 2017145445A1
Authority
WO
WIPO (PCT)
Prior art keywords
transfer unit
chamber
processing chamber
heat treatment
cooling chamber
Prior art date
Application number
PCT/JP2016/082369
Other languages
French (fr)
Japanese (ja)
Inventor
修 大下
真 寺田
啓 神田
Original Assignee
中外炉工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 中外炉工業株式会社 filed Critical 中外炉工業株式会社
Priority to KR1020187008699A priority Critical patent/KR101861512B1/en
Priority to CN201680064786.0A priority patent/CN108350517B/en
Publication of WO2017145445A1 publication Critical patent/WO2017145445A1/en

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge

Definitions

  • the present invention is provided with a processing chamber for heat-treating an object and a transfer unit for transferring the object to the processing chamber, and the transfer unit is moved to a position facing the processing chamber.
  • the stretchable connecting member provided in any facing portion where the transfer unit and the processing chamber face each other is extended, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, and the object to be processed is
  • the present invention relates to a heat treatment facility for transferring between a transfer unit and a processing chamber connected to each other, and when the connecting portion between the transfer unit connected by the connecting member and the processing chamber is decompressed, the transfer unit or processing is performed.
  • the position of the chamber does not shift, and the transfer unit and the processing chamber are maintained in a properly connected state, and the object is properly transferred between the connected transfer unit and the processing chamber. And it has a feature in that the wear manner.
  • the object to be treated is sequentially introduced into a long continuous furnace, and the object to be treated is sequentially moved in the continuous furnace to Heating, soaking, cooling without moving the object in a continuous furnace type heat treatment facility that continuously performs heat treatment such as heating, soaking, cooling, etc. on the treated material and in a separate batch furnace And the like are known as batch furnace type heat treatment equipment adapted to carry out heat treatment such as.
  • the heat treatment pattern such as temperature rise and temperature drop becomes constant although the productivity is good because the object to be treated is continuously heat treated with a constant heat treatment pattern.
  • the heat treatment pattern such as temperature rise and temperature drop
  • heat treatment is carried out by changing the conditions of heat treatment such as heating, soaking, and cooling in one furnace, so a lot of time is required for processing one object to be treated Problem of poor productivity.
  • Patent Documents 1 to 4 At least a heating chamber for heating the object to be treated and a cooling for cooling the object to be treated as a treatment chamber for subjecting the object to heat treatment
  • a treatment unit is provided separately from the chamber, and a conveyance unit is provided to convey the object to be processed to the treatment chamber, and the conveyance unit is moved to a position facing the treatment chambers to face the conveyance unit.
  • a heat treatment facility has been proposed which is connected in a sealed state and decompressed, and in this state, the object to be treated is transferred between the connected transfer unit and the treatment chamber.
  • the transfer unit is moved to the position facing the processing chamber including the heating chamber and the cooling chamber as described above and the transfer unit is connected to the processing chamber facing the sealing unit in a sealed state
  • the entire transport unit is slid toward the processing chamber including the heating chamber and the cooling chamber facing each other, and the transport unit is sealingly connected to these processing chambers.
  • a telescopic connection member is provided at any facing portion where the transport unit and the processing chamber face each other, and the transport member and the processing chamber are expanded by extending this coupling member. Are connected in a sealed state, and then the connection between the transfer unit connected by the connection member and the processing chamber is decompressed.
  • connection portion between the transfer unit and the processing chamber connected by the connection member is decompressed as described above, there is a force that causes the transfer unit and the processing chamber to mutually pull through the connection portion and approach each other. Even if it is generated and firmly fixed to the floor surface, there is a possibility that the position of the transfer unit or the processing chamber may shift over time.
  • an expansion-contraction apparatus such as a cylinder which expands-contracts a connection member, is provided, a connection member is extended by this expansion-contraction device, and a conveyance unit and a processing chamber are sealed by this connection member. It is made to connect and it is made to pressure-reduce the connection part of a conveyance unit and a processing chamber in this state.
  • the telescopic device disclosed in Patent Document 4 has only a force to extend the connecting member and simply connect the transfer unit and the processing chamber, and as described above reduces the pressure at the connecting portion between the transfer unit and the processing chamber. If the transfer unit and the processing chamber are mutually pulled through the connecting portion, they can not resist movement, and the connecting member is extended by the above-mentioned expansion and contraction device to transfer the transfer member. Even if a large pressure that can resist these movements is applied between the unit and the processing chamber, the pressure is too large, the position of the transfer unit or the processing chamber is shifted, or the seal member is pushed too much. And there was a problem that it could not seal properly.
  • the present invention is provided with a processing chamber for heat-treating an object and a transfer unit for transferring the object to the processing chamber, and the transfer unit is moved to a position facing the processing chamber.
  • the stretchable connecting member provided in any facing portion where the transfer unit and the processing chamber face each other is extended, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, It is an object of the present invention to solve the above-mentioned problems in a heat treatment facility in which an object is transferred between a connected transfer unit and a processing chamber.
  • An object of the present invention is to maintain a transport unit and a processing chamber in a properly connected state so that an object can be properly transferred between the transport unit and the processing chamber connected.
  • a treatment chamber for subjecting the object to heat treatment and a transfer unit for transferring the object to the treatment chamber are provided.
  • the stretchable connecting member provided in any facing portion where the transfer unit and the processing chamber are facing is expanded, and the transfer member
  • a connection portion between the transfer unit connected by the connecting member and the processing chamber is provided.
  • the maintaining means between the transfer unit and the processing chamber Force is applied to maintain the transfer unit and the processing chamber at a fixed distance.
  • an expansion and contraction device can be used in which the above-mentioned connection member is expanded to connect the transfer unit and the processing chamber in a sealed state.
  • a pressing device for applying a pressing force between the transfer unit connected by the connection member and the processing chamber can be provided.
  • the connecting member with the seal member is extended to make the transfer unit
  • the operation of connecting the processing chamber in a sealed state and the operation of maintaining the transfer unit and the processing chamber when the connection between the transfer unit and the processing chamber is decompressed can be separately performed, and the connecting member is large
  • the pressure is applied to lose the elasticity of the sealing member, eliminating the concern of not being able to properly seal.
  • the force applied between the transfer unit and the processing chamber is balanced by the above-mentioned maintaining means in accordance with the pressure inside the connecting portion between the reduced transfer unit and the processing chamber. Can be adjusted to
  • the force to be applied between the transfer unit and the processing chamber should be increased. Is preferred. By doing so, it is possible to appropriately prevent the position of the transfer unit or the processing chamber from being shifted due to a small or excessive force.
  • connection member and the maintenance means are directed to the transport unit for transporting the object to the processing chamber.
  • the connecting member and the maintaining means are provided in the transport unit, the cost and the like are significantly reduced as compared with the case where the connecting members and the maintaining means are individually provided in the plurality of processing chambers.
  • the transfer unit is moved to a position facing the processing chamber, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, and the transfer unit connected by the connecting member in this manner
  • the maintaining means acts between the transfer unit connected to the processing chamber and the processing unit
  • the transfer unit and the processing chamber are maintained in a stable state by adjusting the force to be moved, the position of the transfer unit and the processing chamber is reduced when the pressure in the connecting portion between the transfer unit and the processing chamber is reduced.
  • the transfer unit and the processing chamber are maintained in a properly connected state without shifting, and the object is properly transferred between the connected transfer unit and the processing chamber. It becomes possible way.
  • the heat processing installation concerning one embodiment of the present invention WHEREIN The schematic plan view which showed the state which arranged the processing chamber which consists of a several heating chamber and a cooling chamber linearly on one side of the traveling rail in which a conveyance unit travels. It is.
  • the heat processing installation which concerns on said embodiment WHEREIN It is cross-sectional explanatory drawing of the vertical direction which showed the state which made the conveyance unit face the heating chamber and the cooling chamber.
  • the heat processing installation which concerns on the said embodiment WHEREIN It is cross-sectional explanatory drawing of the horizontal direction which showed the state which made the conveyance unit face the heating chamber and the cooling chamber.
  • the heat processing installation which concerns on said embodiment WHEREIN It is the block diagram which showed the apparatus structure which connects a conveyance unit to a heating chamber and a cooling chamber.
  • the connecting member is moved toward the heating chamber or the cooling chamber by the expansion device provided on the front side of the conveying unit, and the conveying unit, the heating chamber, and the cooling chamber are moved by the connecting member.
  • the state which connects in a sealing state is shown, (A) is a cross-sectional explanatory drawing of the vertical direction, (B) is a cross-sectional explanatory drawing of a horizontal direction.
  • FIG. 6 (A) and 6 (B) the pressure at the connection portion between the transfer unit connected by the connection member and the heating chamber or cooling chamber is reduced to The open / close door of the connected heating chamber and cooling chamber is opened, and a state in which the object to be treated is transferred between the heating chamber and the cooling chamber connected to the transfer unit is shown.
  • a figure, (B) is a section explanatory view of a transverse direction.
  • the cooling chamber 20 which cools the to-be-processed object W heated in the heating chamber 10 is arrange
  • the supply part P which supplies the to-be-processed object W to the conveyance unit 30 is provided in the one side of the same traveling rail L as the heating chamber 10 arrange
  • the transfer unit 30 is placed in the facing portion facing the transfer unit 30 respectively.
  • the openings 11 and 21 for delivering the object to be processed W, and the opening / closing doors 12 and 22 for opening and closing the openings 11 and 21 corresponding to the openings 11 The door case 13 and 23 which accommodates the said opening-closing door 12 and 22 is provided.
  • the opening portion 31 for delivering the object W to be processed between the heating chamber 10 and the cooling chamber 20 is provided on the facing portion side facing the heating chamber 10 and the cooling chamber 20.
  • a sealed opening / closing door 32 for opening and closing the opening 31 and a door pocket 33 for housing the opening / closing door 32 are provided.
  • an expandable connecting member 34 is provided on the front side of the door pocket 33 in the transfer unit 30 facing the heating chamber 10 and the cooling chamber 20. Then, as described later, the connecting member 34 is extended to connect the transfer unit 30 with the heating chamber 10 and the cooling chamber 20 in a sealed state by the connecting member 34.
  • the transfer unit 30 in a state where the transfer unit 30 is connected in a sealed state to the heating chamber 10 and the cooling chamber 20 by the connecting member 34 in this manner, the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 connected by the connecting member 34 After the connection part is decompressed by the decompression device 35 as described later, as described later, the open / close doors 12 and 22 provided in the heating chamber 10 and the cooling chamber 20 and the opening / closing provided in the transport unit 30 The door 32 is opened, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 to which the object W is connected through the opening 31 in the transfer unit 30 and the openings 11 and 21 in the heating chamber 10 and the cooling chamber 20. Between the two.
  • connection between the transfer unit 30 connected by the connection member 34 and the heating chamber 10 or the cooling chamber 20 is decompressed as described above, the transfer unit 30 and the heating chamber 10 or the cooling chamber are maintained by the maintaining means 40.
  • a force is applied between the transfer unit 30 and the transfer unit 20 to maintain the transfer unit 30, the heating chamber 10, and the cooling chamber 20 at a constant distance.
  • the connecting member 34 faces the heating chamber 10 and the cooling chamber 20.
  • a cylindrical projecting member 341 is projected toward the heating chamber 10 and the cooling chamber 20 to a required length on the front surface of the door pocket 33 in the transport unit 30, and the projecting member 341 is provided on the outer peripheral side of the projecting member 341.
  • a cylindrical movable member 342 which is moved toward the heating chamber 10 or the cooling chamber 20 in close contact with a slidable seal member (not shown) is provided.
  • a seal member 343 for sealing between the movable member 342 and the heating chamber 10 or the cooling chamber 20 is provided on the front flange portion 342 a facing the cooling chamber 20 or 10.
  • an expansion and contraction device 41 consisting of a cylinder is provided on the front side of the door pocket 33 in the transport unit 30.
  • the tip of the telescopic rod 41a in the case is attached to the movable member 342, and the telescopic rod 41a is expanded and contracted to move the movable member 342 toward the heating chamber 10 or the cooling chamber 20, and the movable member 342 is moved It is connected to the cooling chamber 20 or separated from the heating chamber 10 and the cooling chamber 20.
  • the expandable and contractible connecting member 34 As the expandable and contractible connecting member 34, the projecting member 341 cylindrically shaped toward the heating chamber 10 and the cooling chamber 20 is projected for a required length, and at the outer peripheral side of the projecting member 341 The cylindrical movable member 342 is provided to move toward the heating chamber 10 or the cooling chamber 20 in close contact with the projecting member 341.
  • the expandable connection member 34 is not limited to this.
  • a bellows-type expandable connection member may be provided as an expandable connection member.
  • a pressing device which is a cylinder at a position on the front side of the door 33 facing the heating chamber 10 and the cooling chamber 20 in the transfer unit 30 and outside the movable member 342 42 is provided, and when the telescopic rod 42a in the pressing device 42 is extended, the front side portion of the door bags 13 and 23 in the heating chamber 10 and the cooling chamber 20 with which the distal end portion of the telescopic rod 42a comes in contact , 24 are provided.
  • the expansion and contraction device 41 and the pressing device 42 are used as the maintenance means 40, and the movable member 342 in the connecting member 34 is cooled by the expansion and contraction device 41 as described above.
  • the transfer unit 30 is moved toward the chamber 20, and the transfer unit 30 is connected in a sealed state to the heating chamber 10 and the cooling chamber 20 by the connecting member 34, and the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 are connected in this manner.
  • the pressure between the transfer unit 30 connected by the pressing device 42 and the heating chamber 10 or the cooling chamber 20 as described above causes the transfer unit 30 to move.
  • the heating chamber 10 and the cooling chamber 20 are maintained at a constant distance.
  • the transfer unit 30 and the transfer unit connected by the pressing device 42 are In order to apply a pressing force between the heating chamber 10 and the cooling chamber 20, as shown in FIG.
  • the control unit 44 outputs the detection result to the control unit 44 to control the pressing unit 42, and the conveyance unit 30 connected by the pressing unit 42 and the heating chamber 10 or the cooling chamber 20 The pressing force applied between can be adjusted.
  • the transfer unit 30, the heating chamber 10, and the cooling chamber are connected according to the pressure in the connecting portion being started as the internal pressure in the connecting portion starts to be reduced. Adjust so as to gradually increase the pressure applied between 20 and 20.
  • the pressing force of the pressing device 42 becomes larger than the force by which the transfer unit 30 and the heating chamber 10 and the cooling chamber 20 try to approach due to decompression, and the transfer unit 30 and the heating chamber 10 and the cooling chamber 20 It is also prevented that the position such as the distance between them is deviated in the direction of separation, and it is easy to maintain the transport unit 30 and the heating chamber 10 or the cooling chamber 20 in the original position. become.
  • the expansion device 41 and the pressing device 42 are used as the maintaining means 40, and the transfer unit 30 connected by the pressing device 42, the heating chamber 10, and the cooling chamber
  • the pressing force to be applied between 20 and 20 is adjusted as described above, the transport unit 30 and the heating chamber 10 and the cooling chamber 20 can be maintained at a constant distance by only the above-mentioned expansion and contraction device 41. It is also possible. In that case, the pressing force is prevented from becoming too large, and the sealing member 343 is made of a material that does not lose its elasticity even if it is pressed repeatedly.
  • the open / close door 32 in the transfer unit 30 is closed to make the inside of the transfer unit 30 a non-oxidizing atmosphere, and the open / close doors 12, 22 in the heating chamber 10 or the cooling chamber 20 for delivering the object W
  • the heating chamber 10 and the cooling chamber 20 for delivering the object W are closed, and the inside of the cooling chamber 20 is made non-oxidizing, and the transfer unit 30 is delivered with the object W, as shown in FIGS. 2 and 3. It is moved to a position facing the heating chamber 10 or the cooling chamber 20 through a required interval.
  • the telescopic rod 41a of the telescopic device 41 provided on the front side of the transport unit 30 facing the heating chamber 10 and the cooling chamber 20 is stretched to make the telescopic rod 41a
  • the movable member 342 in the connecting member 34 attached to the end of the telescopic rod 41 a is moved toward the heating chamber 10 or the cooling chamber 20 in a state in which the movable member 342 is in close contact with the projecting member 341.
  • the seal member 343 provided in the portion 342 a is brought into close contact with the door bags 13 and 23 on the front side of the heating chamber 10 and the cooling chamber 20 to seal them.
  • the pressure reducing device 35 reduces the pressure in the connecting portion between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20, and the transfer unit 30 connected by the pressing device 42.
  • a pressing force is applied between the heating chamber 10 and the cooling chamber 20 to maintain the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 in a constant state.
  • the positions of the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 are shifted as in the prior art.
  • the transport unit 30, the heating chamber 10 and the cooling chamber 20 can be stably maintained at predetermined positions.
  • the expansion / contraction rod 41a of the expansion / contraction device 41 is extended to form the seal member 343 provided on the flange portion 342a on the front side of the movable member 342 in the heating chamber 10 or the cooling chamber 20.
  • the telescopic rod 42a of the pressing device 42 is extended to seal the distal end portion of the telescopic rod 42a in the heating chamber 10 or the cooling chamber 20.
  • the seal member 343 provided on the flange portion 342a of the movable member 342 on the front side of the movable member 342 corresponds to that of the heating chamber 10 or the cooling chamber 20.
  • an operation for bringing the door bags 13 and 23 into close contact with each other and sealing, and expanding the telescopic rod 42a in the pressing device 42, the tip end of the telescopic rod 42a The can also be performed and an operation to abut against the abutting members 14 and 24 provided on the portion of the front side of the door pocket 13, 23 in the heating chamber 10 and cooling chamber 20 at the same time.
  • the backing members 14 and 24 may or may not be provided.
  • the pressure in the connection between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 is reduced to maintain the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 at predetermined positions.
  • 7 (A) and 7 (B) the open / close door 32 in the transfer unit 30 and the open / close door 12, 22 in the heating chamber 10 or the cooling chamber 20 connected are opened as shown in FIGS.
  • the workpiece W is transferred between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20.
  • the pressure in the pressing device 42 is gradually raised as the pressure in the connection portion gradually decreases to a predetermined pressure, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 It is preferable to make the pressure as equal as possible to the pressure to be approached by pressure reduction.
  • the heating connected with the open / close door 32 in the transfer unit 30 is conversely to the above case.
  • the open / close doors 12 and 22 in the chamber 10 and the cooling chamber 20 are closed, and the inside of the connecting portion between the transfer unit 30 in a depressurized state and the heating chamber 10 and the cooling chamber 20 is returned to atmospheric pressure.
  • the pressure in the pressing device 42 is gradually lowered as the pressure inside the connection part gradually rises to the atmospheric pressure, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 It is preferable to balance the force that it tries to approach by depressurization.
  • the telescopic rod 42a of the pressing device 42 is contracted to separate the tip end of the telescopic rod 42a from the front side of the door bags 13 and 23 in the heating chamber 10 and the cooling chamber 20, and the telescopic rod
  • the telescopic rod 41a in the device 41 is contracted so that the movable member 342 in the connecting member 34 attached to the tip of the telescopic rod 41a is separated from the door bags 13 and 23 on the front side of the heating chamber 10 and the cooling chamber 20.
  • the telescopic rod 42a of the pressing device 42 is contracted as described above, and the tip end portion of the telescopic rod 42a is a portion on the front side of the door bags 13, 23 in the heating chamber 10 or the cooling chamber 20.
  • the telescopic rod 41a of the telescopic device 41 is contracted to move the movable member 342 of the connecting member 34 attached to the tip of the telescopic rod 41a to the door case 13 on the front side of the heating chamber 10 or the cooling chamber 20.
  • connection part between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 is decompressed to transfer the object W to the transfer unit 30 and the heating chamber 10.
  • the operation of transferring the substrate W with the cooling chamber 20 is repeated to process the object W in order.
  • a plurality of heating chambers 10 for heating the object to be treated W and the object to be treated W heated in the heating chamber 10 are used as the treatment chamber H for heat treating the object to be treated W.
  • the cooling chamber 20 to be cooled is only disposed on one side of the traveling rail L on which the transport unit 30 travels, but the type and number of processing chambers H for heat-treating the object W are not particularly limited.
  • a plurality of heating chambers 10 for heating the object W and a cooling for cooling the object W heated in the heating chamber 10 as the processing chamber H for heat-treating the object W The chambers 20 can be arranged on both sides of the traveling rail L on which the transport unit 30 travels.
  • connection member 34 and the maintaining means 40 as described above are provided in the transport unit 30, but although not shown, the treatment chamber for subjecting the object W to heat treatment It is also possible to provide the H with the connecting member 34 and the maintaining means 40 as described above.

Abstract

Provided is heat treatment equipment wherein a conveyance unit for conveying an object to be treated is guided to a position facing a treatment chamber for heat-treating the object so that the object is transferred between the conveyance unit and the treatment chamber while the conveyance unit and the treatment chamber are connected hermetically by an extendable connection member. The heat treatment equipment is provided with a maintaining means for maintaining, when the pressure inside the connected portion between the conveyance unit and the treatment chamber connected by the connection member is reduced, a constant distance between the conveyance unit and the treatment chamber by causing a force to act between the conveyance unit and the treatment chamber.

Description

熱処理設備Heat treatment equipment
　本発明は、被処理物を熱処理させる処理室と、被処理物を前記の処理室に搬送させる搬送ユニットが設けられ、前記の搬送ユニットを前記の処理室と対面する位置に移動させた状態で、搬送ユニットと処理室とが対面する何れかの対面部に設けられた伸縮可能な連結部材を伸張させて、この連結部材により搬送ユニットと処理室とを密封状態で連結させ、被処理物を連結された搬送ユニットと処理室との間で受け渡しするようにした熱処理設備に関するものであり、連結部材により連結された搬送ユニットと処理室との連結部分を減圧させた際に、搬送ユニットや処理室の位置がずれたりすることがなく、搬送ユニットと処理室とが適切に連結された状態で維持されて、被処理物を連結された搬送ユニットと処理室との間で適切に受け渡しできるようにした点に特徴を有するものである。 The present invention is provided with a processing chamber for heat-treating an object and a transfer unit for transferring the object to the processing chamber, and the transfer unit is moved to a position facing the processing chamber. The stretchable connecting member provided in any facing portion where the transfer unit and the processing chamber face each other is extended, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, and the object to be processed is The present invention relates to a heat treatment facility for transferring between a transfer unit and a processing chamber connected to each other, and when the connecting portion between the transfer unit connected by the connecting member and the processing chamber is decompressed, the transfer unit or processing is performed. The position of the chamber does not shift, and the transfer unit and the processing chamber are maintained in a properly connected state, and the object is properly transferred between the connected transfer unit and the processing chamber. And it has a feature in that the wear manner.
　従来、被処理物に対して浸炭焼入れ等を行う熱処理設備としては、被処理物を長い連続炉内に順々に導入させ、この連続炉内において被処理物を順々に移動させて、被処理物に対して加熱、均熱、冷却等の熱処理を連続的に行うようにした連続炉形式の熱処理設備と、独立したバッチ炉内において被処理物を移動させずに加熱、均熱、冷却等の熱処理を行うようにしたバッチ炉式の熱処理設備とが知られている。 Conventionally, as a heat treatment equipment for performing carburizing and quenching on an object to be treated, the object to be treated is sequentially introduced into a long continuous furnace, and the object to be treated is sequentially moved in the continuous furnace to Heating, soaking, cooling without moving the object in a continuous furnace type heat treatment facility that continuously performs heat treatment such as heating, soaking, cooling, etc. on the treated material and in a separate batch furnace And the like are known as batch furnace type heat treatment equipment adapted to carry out heat treatment such as.
　ここで、連続炉形式の熱処理設備の場合、被処理物を一定した熱処理パターンで連続して熱処理するため、生産性は良好であるが、昇温，降温等の熱処理パターンが一定化してしまい、近年のように、昇温，降温等の熱処理パターンを多様化させて、様々な種類の製品を少量生産するという要請に対して柔軟に対応することができないという問題があった。 Here, in the case of the continuous furnace type heat treatment equipment, the heat treatment pattern such as temperature rise and temperature drop becomes constant although the productivity is good because the object to be treated is continuously heat treated with a constant heat treatment pattern. As in recent years, there has been a problem that it is not possible to flexibly respond to the demand for producing a small amount of various types of products by diversifying the heat treatment pattern such as the temperature rise and temperature drop.
　一方、前記のバッチ炉式の熱処理設備では、１つの炉において加熱、均熱、冷却等の熱処理の条件を変更させて熱処理を行うため、１つの被処理物の処理に多くの時間が必要になって、生産性が悪いという問題があった。 On the other hand, in the batch furnace type heat treatment equipment described above, heat treatment is carried out by changing the conditions of heat treatment such as heating, soaking, and cooling in one furnace, so a lot of time is required for processing one object to be treated Problem of poor productivity.
　このため、近年においては、特許文献１～４等に示されるように、被処理物を熱処理させる処理室として、少なくとも被処理物を加熱させる加熱室と、加熱された被処理物を冷却させる冷却室とを分離して設けると共に、被処理物を前記の処理室に搬送させる搬送ユニットを設け、この搬送ユニットをこれらの処理室と対面する位置に移動させて、この搬送ユニットを対面する処理室に密封状態で連結させて減圧させ、この状態で、前記の被処理物を連結された搬送ユニットと処理室との間で受け渡しするようにした熱処理設備が提案されている。 Therefore, in recent years, as shown in Patent Documents 1 to 4, etc., at least a heating chamber for heating the object to be treated and a cooling for cooling the object to be treated as a treatment chamber for subjecting the object to heat treatment A treatment unit is provided separately from the chamber, and a conveyance unit is provided to convey the object to be processed to the treatment chamber, and the conveyance unit is moved to a position facing the treatment chambers to face the conveyance unit. A heat treatment facility has been proposed which is connected in a sealed state and decompressed, and in this state, the object to be treated is transferred between the connected transfer unit and the treatment chamber.
　ここで、前記のように搬送ユニットを加熱室や冷却室からなる処理室と対面する位置に移動させて、搬送ユニットを対面する処理室に密封状態で連結させるにあたり、特許文献１，２のものにおいては、搬送ユニット全体を対面した状態にある加熱室や冷却室からなる処理室に向けてスライドさせて、搬送ユニットをこれらの処理室に密封状態で連結させるようにしている。 Here, in the case where the transfer unit is moved to the position facing the processing chamber including the heating chamber and the cooling chamber as described above and the transfer unit is connected to the processing chamber facing the sealing unit in a sealed state, In the above, the entire transport unit is slid toward the processing chamber including the heating chamber and the cooling chamber facing each other, and the transport unit is sealingly connected to these processing chambers.
　しかし、特許文献１，２に示されるように、搬送ユニット全体を対面した状態にある加熱室や冷却室からなる処理室に向けてスライドさせる場合、搬送ユニット全体の重量が大きいため、搬送ユニット全体をスライドさせるのに、大型の駆動装置やガイド機構等が必要になり、コストが非常に高く付くと共に、装置が大型化するという問題があった。 However, as disclosed in Patent Documents 1 and 2, when the entire transport unit is slid toward the processing chamber including the heating chamber and the cooling chamber facing each other, the entire transport unit is heavy, so the entire transport unit In order to slide the slider, a large drive unit and a guide mechanism are required, and the cost is very high, and there is a problem that the apparatus becomes large.
　また、特許文献３，４に示されるものにおいては、搬送ユニットと処理室とが対面する何れかの対面部に伸縮可能な連結部材を設け、この連結部材を伸張させて搬送ユニットと処理室とを密封状態で連結させ、その後、連結部材により連結された搬送ユニットと処理室との連結部分を減圧させるようにしている。 Further, in Patent Documents 3 and 4, a telescopic connection member is provided at any facing portion where the transport unit and the processing chamber face each other, and the transport member and the processing chamber are expanded by extending this coupling member. Are connected in a sealed state, and then the connection between the transfer unit connected by the connection member and the processing chamber is decompressed.
　ここで、前記のように連結部材により連結された搬送ユニットと処理室との連結部分を減圧させた場合、搬送ユニットと処理室とが連結部分を介して相互に引っ張られて近づこうとする力が発生し、床面に強固に固定していても、経年的に搬送ユニットや処理室の位置がずれたりするおそれがあった。 Here, in the case where the connection portion between the transfer unit and the processing chamber connected by the connection member is decompressed as described above, there is a force that causes the transfer unit and the processing chamber to mutually pull through the connection portion and approach each other. Even if it is generated and firmly fixed to the floor surface, there is a possibility that the position of the transfer unit or the processing chamber may shift over time.
　また、特許文献４に示されるものにおいては、連結部材を伸縮させるシリンダー等の伸縮装置を設け、この伸縮装置によって連結部材を伸張させて、この連結部材により搬送ユニットと処理室とを密封状態で連結させ、この状態で搬送ユニットと処理室との連結部分を減圧させるようにしている。 Moreover, in what is shown by patent document 4, an expansion-contraction apparatus, such as a cylinder which expands-contracts a connection member, is provided, a connection member is extended by this expansion-contraction device, and a conveyance unit and a processing chamber are sealed by this connection member. It is made to connect and it is made to pressure-reduce the connection part of a conveyance unit and a processing chamber in this state.
　しかし、特許文献４に示される伸縮装置は、連結部材を伸張させて単に搬送ユニットと処理室とを連結させるだけの力しかなく、前記のように搬送ユニットと処理室との連結部分を減圧させた場合に、搬送ユニットと処理室とが連結部分を介して相互に引っ張られて、これらが移動するのに抵抗することはできず、また、前記の伸縮装置により連結部材を伸張させて、搬送ユニットと処理室との間にこれらの移動に抵抗できる大きな圧力を作用させたとしても、その圧力が大きすぎて、搬送ユニットや処理室の位置がずれたり、シール部材を強く押しすぎて、弾力を失わせ、適切にシールできなくなるという問題が有った。 However, the telescopic device disclosed in Patent Document 4 has only a force to extend the connecting member and simply connect the transfer unit and the processing chamber, and as described above reduces the pressure at the connecting portion between the transfer unit and the processing chamber. If the transfer unit and the processing chamber are mutually pulled through the connecting portion, they can not resist movement, and the connecting member is extended by the above-mentioned expansion and contraction device to transfer the transfer member. Even if a large pressure that can resist these movements is applied between the unit and the processing chamber, the pressure is too large, the position of the transfer unit or the processing chamber is shifted, or the seal member is pushed too much. And there was a problem that it could not seal properly.
特開２００６－６３３６３号公報JP, 2006-63363, A 特開２０１４－８６４７５号公報JP, 2014-86475, A 特開平５－８６４１６号公報Japanese Patent Application Laid-Open No. 5-86416 特許第５６８６９１８号公報Patent No. 5686918 gazette
　本発明は、被処理物を熱処理させる処理室と、被処理物を前記の処理室に搬送させる搬送ユニットが設けられ、前記の搬送ユニットを前記の処理室と対面する位置に移動させた状態で、搬送ユニットと処理室とが対面する何れかの対面部に設けられた伸縮可能な連結部材を伸張させて、この連結部材により搬送ユニットと処理室とを密封状態で連結させ、前記の被処理物を連結された搬送ユニットと処理室との間で受け渡しするようにした熱処理設備における前記のような問題を解決することを課題とするものである。 The present invention is provided with a processing chamber for heat-treating an object and a transfer unit for transferring the object to the processing chamber, and the transfer unit is moved to a position facing the processing chamber. The stretchable connecting member provided in any facing portion where the transfer unit and the processing chamber face each other is extended, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, It is an object of the present invention to solve the above-mentioned problems in a heat treatment facility in which an object is transferred between a connected transfer unit and a processing chamber.
　すなわち、本発明は、前記のような熱処理設備において連結部材により連結された搬送ユニットと処理室との連結部分を減圧させた際に、搬送ユニットや処理室の位置がずれたりすることがなく、搬送ユニットと処理室とが適切に連結された状態で維持されて、被処理物を連結された搬送ユニットと処理室との間で適切に受け渡しできるようにすることを課題とするものである。 That is, according to the present invention, when the connecting portion between the transfer unit connected by the connecting member and the processing chamber is decompressed in the heat treatment equipment as described above, the positions of the transfer unit and the processing chamber do not shift. An object of the present invention is to maintain a transport unit and a processing chamber in a properly connected state so that an object can be properly transferred between the transport unit and the processing chamber connected.
　本発明における熱処理設備においては、前記のような課題を解決するため、被処理物を熱処理させる処理室と、被処理物を前記の処理室に搬送させる搬送ユニットが設けられ、前記の搬送ユニットを前記の処理室と対面する位置に移動させた状態で、搬送ユニットと処理室とが対面する何れかの対面部に設けられた伸縮可能な連結部材を伸張させて、この連結部材により搬送ユニットと処理室とを密封状態で連結させ、前記の被処理物を連結された搬送ユニットと処理室との間で受け渡しする熱処理設備において、連結部材により連結された搬送ユニットと処理室との連結部分を減圧させた場合に、搬送ユニットと処理室との間に力を作用させて搬送ユニットと処理室とを一定の距離に維持させる維持手段を設けた。 In the heat treatment equipment according to the present invention, in order to solve the problems as described above, a treatment chamber for subjecting the object to heat treatment and a transfer unit for transferring the object to the treatment chamber are provided. In a state of being moved to a position facing the processing chamber, the stretchable connecting member provided in any facing portion where the transfer unit and the processing chamber are facing is expanded, and the transfer member In a heat treatment facility for sealingly connecting the processing chamber and transferring the object to be processed between the transfer unit and the processing chamber, a connection portion between the transfer unit connected by the connecting member and the processing chamber is provided. When the pressure is reduced, a maintenance means is provided to maintain a constant distance between the transfer unit and the processing chamber by applying a force between the transfer unit and the processing chamber.
　そして、本発明における熱処理設備においては、前記のように連結部材により連結された搬送ユニットと処理室との連結部分を減圧させる場合に、前記の維持手段により、搬送ユニットと処理室との間に力を作用させて、搬送ユニットと処理室とを一定の距離に維持させるようにする。 And, in the heat treatment equipment according to the present invention, when the connecting portion between the transfer unit connected by the connecting member and the processing chamber is decompressed as described above, the maintaining means between the transfer unit and the processing chamber Force is applied to maintain the transfer unit and the processing chamber at a fixed distance.
　ここで、本発明における熱処理設備において、前記の維持手段としては、前記の連結部材を伸張させて搬送ユニットと処理室とを密封状態で連結させる伸縮装置を用いることができる。 Here, in the heat treatment equipment in the present invention, as the above-mentioned maintenance means, an expansion and contraction device can be used in which the above-mentioned connection member is expanded to connect the transfer unit and the processing chamber in a sealed state.
　また、維持手段としては、前記のような伸縮装置の他に、連結部材により連結された搬送ユニットと処理室との間に押圧力を作用させる押圧装置を設けるようにすることができる。このように、伸縮装置の他に、連結部材により連結された搬送ユニットと処理室との間に押圧力を作用させる押圧装置を設けると、シール部材の付いた連結部材を伸張させて搬送ユニットと処理室とを密封状態で連結させる動作と、搬送ユニットと処理室との連結部分を減圧させた際に、搬送ユニットと処理室とを維持させる動作とを別に行うことができ、連結部材に大きな圧力をかけて、シール部材の弾性を失わせて、適切なシールができなくなるという心配がなくなる。 Further, as the maintaining means, in addition to the above-described expansion and contraction device, a pressing device for applying a pressing force between the transfer unit connected by the connection member and the processing chamber can be provided. As described above, when a pressing device for applying a pressing force between the transfer unit connected by the connecting member and the processing chamber is provided in addition to the expansion and contraction device, the connecting member with the seal member is extended to make the transfer unit The operation of connecting the processing chamber in a sealed state and the operation of maintaining the transfer unit and the processing chamber when the connection between the transfer unit and the processing chamber is decompressed can be separately performed, and the connecting member is large The pressure is applied to lose the elasticity of the sealing member, eliminating the concern of not being able to properly seal.
　また、本発明における熱処理設備においては、減圧させた搬送ユニットと処理室との連結部分の内部の圧力に応じて、前記の維持手段により、搬送ユニットと処理室との間に作用させる力がバランスするように調整させることができる。 Further, in the heat treatment equipment according to the present invention, the force applied between the transfer unit and the processing chamber is balanced by the above-mentioned maintaining means in accordance with the pressure inside the connecting portion between the reduced transfer unit and the processing chamber. Can be adjusted to
　そして、このように搬送ユニットと処理室との間に作用させる力を調整するにあたり、連結部分の内部の圧力が下がるのにつれて、搬送ユニットと処理室との間に作用させる力を上げていくことが好ましい。そのようにすれば、作用させる力が小さかったり、大きすぎたりして、搬送ユニットや処理室の位置がずれるのを適切に防止できる。 And, in adjusting the force to be applied between the transfer unit and the processing chamber in this manner, as the pressure inside the connection portion is lowered, the force to be applied between the transfer unit and the processing chamber should be increased. Is preferred. By doing so, it is possible to appropriately prevent the position of the transfer unit or the processing chamber from being shifted due to a small or excessive force.
　また、本発明における熱処理設備において、前記の搬送ユニットによって被処理物を複数の処理室に搬送させる場合、被処理物を処理室に搬送させる搬送ユニットの方に、前記の連結部材と維持手段とを設けることが好ましい。このように、搬送ユニットに連結部材と維持手段とを設けると、複数の処理室にそれぞれ個別に連結部材と維持手段とを設ける場合に比べてコスト等が大幅に低減される。 Further, in the heat treatment facility according to the present invention, in the case where the object to be treated is transported to the plurality of processing chambers by the transport unit, the connection member and the maintenance means are directed to the transport unit for transporting the object to the processing chamber. Is preferably provided. As described above, when the connecting member and the maintaining means are provided in the transport unit, the cost and the like are significantly reduced as compared with the case where the connecting members and the maintaining means are individually provided in the plurality of processing chambers.
　本発明における熱処理設備においては、搬送ユニットを処理室と対面する位置に移動させて、連結部材により搬送ユニットと処理室とを密封状態で連結させ、このように連結部材により連結された搬送ユニットと処理室との連結部分を減圧させた状態で、被処理物を連結された搬送ユニットと処理室との間で受け渡すにあたり、維持手段によって、連結された搬送ユニットと処理室との間に作用させる力を調整して、搬送ユニットと処理室とを安定した状態に維持させるようにしたため、搬送ユニットと処理室との連結部分の内部を減圧させた際に、搬送ユニットや処理室の位置がずれたりすることがなく、搬送ユニットと処理室とが適切に連結された状態で維持されて、被処理物を連結された搬送ユニットと処理室との間で適切に受け渡しできるようになる。 In the heat treatment equipment of the present invention, the transfer unit is moved to a position facing the processing chamber, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, and the transfer unit connected by the connecting member in this manner In transferring the processing object between the transfer unit connected to the processing chamber and the processing chamber in a state in which the connection part with the processing chamber is decompressed, the maintaining means acts between the transfer unit connected to the processing chamber and the processing unit Because the transfer unit and the processing chamber are maintained in a stable state by adjusting the force to be moved, the position of the transfer unit and the processing chamber is reduced when the pressure in the connecting portion between the transfer unit and the processing chamber is reduced. The transfer unit and the processing chamber are maintained in a properly connected state without shifting, and the object is properly transferred between the connected transfer unit and the processing chamber. It becomes possible way.
本発明の一実施形態に係る熱処理設備において、搬送ユニットが走行される走行レールの片側に、複数の加熱室と冷却室とからなる処理室を直線状に配列させた状態を示した概略平面図である。The heat processing installation concerning one embodiment of the present invention WHEREIN: The schematic plan view which showed the state which arranged the processing chamber which consists of a several heating chamber and a cooling chamber linearly on one side of the traveling rail in which a conveyance unit travels. It is. 前記の実施形態に係る熱処理設備において、搬送ユニットを加熱室や冷却室と対面させた状態を示した縦方向の断面説明図である。The heat processing installation which concerns on said embodiment WHEREIN: It is cross-sectional explanatory drawing of the vertical direction which showed the state which made the conveyance unit face the heating chamber and the cooling chamber. 前記の実施形態に係る熱処理設備において、搬送ユニットを加熱室や冷却室と対面させた状態を示した横方向の断面説明図である。The heat processing installation which concerns on the said embodiment WHEREIN: It is cross-sectional explanatory drawing of the horizontal direction which showed the state which made the conveyance unit face the heating chamber and the cooling chamber. 前記の実施形態に係る熱処理設備において、搬送ユニットを加熱室や冷却室に連結させる装置構成を示したブロック図である。The heat processing installation which concerns on said embodiment WHEREIN: It is the block diagram which showed the apparatus structure which connects a conveyance unit to a heating chamber and a cooling chamber. 前記の実施形態に係る熱処理設備において、搬送ユニットの前面側に設けた伸縮装置によって連結部材を加熱室や冷却室に向けて移動させて、この連結部材により搬送ユニットと加熱室や冷却室とを密封状態で連結させる状態を示し、（Ａ）は縦方向の断面説明図、（Ｂ）は横方向の断面説明図である。In the heat treatment equipment according to the above embodiment, the connecting member is moved toward the heating chamber or the cooling chamber by the expansion device provided on the front side of the conveying unit, and the conveying unit, the heating chamber, and the cooling chamber are moved by the connecting member. The state which connects in a sealing state is shown, (A) is a cross-sectional explanatory drawing of the vertical direction, (B) is a cross-sectional explanatory drawing of a horizontal direction. 前記の実施形態に係る熱処理設備において、図５（Ａ），（Ｂ）に示す状態から、搬送ユニットの前面側に設けた押圧装置における伸縮ロッドを伸張させて加熱室や冷却室の前面側の部分に当接させ、搬送ユニットと加熱室や冷却室との間に押圧力を作用させる状態を示し、（Ａ）は縦方向の断面説明図、（Ｂ）は横方向の断面説明図である。In the heat treatment equipment according to the above-described embodiment, from the states shown in FIGS. 5A and 5B, the telescopic rods in the pressing device provided on the front side of the transport unit are stretched to extend the front side of the heating chamber or the cooling chamber. A state in which a pressing force is applied between the transfer unit and the heating chamber or the cooling chamber is shown, with (A) being a cross-sectional explanatory view in the longitudinal direction, (B) being a cross-sectional explanatory view in the lateral direction. . 前記の実施形態に係る熱処理設備において、図６（Ａ），（Ｂ）に示す状態から、連結部材により連結された搬送ユニットと加熱室や冷却室との連結部分を減圧させて、搬送ユニット及び連結された加熱室や冷却室における各開閉扉を開けて、被処理物を搬送ユニットと連結された加熱室や冷却室との間で受け渡しさせる状態を示し、（Ａ）は縦方向の断面説明図、（Ｂ）は横方向の断面説明図である。In the heat treatment equipment according to the above embodiment, from the states shown in FIGS. 6 (A) and 6 (B), the pressure at the connection portion between the transfer unit connected by the connection member and the heating chamber or cooling chamber is reduced to The open / close door of the connected heating chamber and cooling chamber is opened, and a state in which the object to be treated is transferred between the heating chamber and the cooling chamber connected to the transfer unit is shown. A figure, (B) is a section explanatory view of a transverse direction. 前記の実施形態に係る熱処理設備において、搬送ユニットが走行される走行レールの両側に、複数の加熱室と冷却室とからなる処理室を配列させた状態を示した概略平面図である。The heat processing installation which concerns on said embodiment WHEREIN: It is the schematic plan view which showed the state which arranged the process chamber which consists of a several heating chamber and a cooling chamber on the both sides of the traveling rail in which a conveyance unit travels.
　以下、本発明の実施形態に係る熱処理設備を添付図面に基づいて具体的に説明する。なお、本発明に係る熱処理設備は、下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。 Hereinafter, the heat treatment equipment concerning an embodiment of the present invention is concretely explained based on an accompanying drawing. In addition, the heat processing installation which concerns on this invention is not limited to what was shown to the following embodiment, In the range which does not change the summary of invention, it can change suitably and can implement.
　この実施形態に係る熱処理設備においては、図１に示すように、被処理物Ｗを熱処理させる処理室Ｈとして、被処理物Ｗを加熱させる複数（図に示す例では３つ）の加熱室１０と、加熱室１０において加熱された被処理物Ｗを冷却させる冷却室２０とを、搬送ユニット３０が走行される走行レールＬの片側に所要間隔を介して配置させている。また、このように配置された加熱室１０や冷却室２０と同じ走行レールＬの片側に、被処理物Ｗを搬送ユニット３０に供給する供給部Ｐを設けている。 In the heat treatment equipment according to this embodiment, as shown in FIG. 1, a plurality of (three in the example shown) heating chambers 10 for heating the object W as the processing chamber H for heat treating the object W And the cooling chamber 20 which cools the to-be-processed object W heated in the heating chamber 10 is arrange | positioned through the required space | interval on the one side of the traveling rail L in which the conveyance unit 30 travels. Moreover, the supply part P which supplies the to-be-processed object W to the conveyance unit 30 is provided in the one side of the same traveling rail L as the heating chamber 10 arrange | positioned in this way and the cooling chamber 20.
　そして、この実施形態に係る熱処理設備においては、図２及び図３等に示すように、前記の加熱室１０や冷却室２０において、前記の搬送ユニット３０と対面する対面部に、それぞれ搬送ユニット３０との間で被処理物Ｗを受け渡す開口部１１、２１を設けると共に、これらの開口部１１、２１に対応させて、開口部１１、２１の開閉を行う密封式の開閉扉１２、２２と、前記の開閉扉１２、２２を収容させる戸袋１３，２３とを設けている。 In the heat treatment equipment according to this embodiment, as shown in FIG. 2 and FIG. 3, etc., in the heating chamber 10 and the cooling chamber 20, the transfer unit 30 is placed in the facing portion facing the transfer unit 30 respectively. And the openings 11 and 21 for delivering the object to be processed W, and the opening / closing doors 12 and 22 for opening and closing the openings 11 and 21 corresponding to the openings 11 The door case 13 and 23 which accommodates the said opening-closing door 12 and 22 is provided.
　また、前記の搬送ユニット３０においては、前記の加熱室１０や冷却室２０と対面する対面部側に、加熱室１０や冷却室２０との間で被処理物Ｗを受け渡す開口部３１を設けると共に、この開口部３１の開閉を行う密封式の開閉扉３２と、この開閉扉３２を収容させる戸袋３３とを設けている。 Further, in the transfer unit 30, the opening portion 31 for delivering the object W to be processed between the heating chamber 10 and the cooling chamber 20 is provided on the facing portion side facing the heating chamber 10 and the cooling chamber 20. In addition, a sealed opening / closing door 32 for opening and closing the opening 31 and a door pocket 33 for housing the opening / closing door 32 are provided.
　また、この実施形態においては、前記の加熱室１０や冷却室２０と対面する前記の搬送ユニット３０における戸袋３３の前面側に伸縮可能な連結部材３４を設けている。そして、後述するように、この連結部材３４を伸張させて、前記の搬送ユニット３０と前記の加熱室１０や冷却室２０とを、この連結部材３４によって密封状態で連結させるようにしている。 Further, in this embodiment, an expandable connecting member 34 is provided on the front side of the door pocket 33 in the transfer unit 30 facing the heating chamber 10 and the cooling chamber 20. Then, as described later, the connecting member 34 is extended to connect the transfer unit 30 with the heating chamber 10 and the cooling chamber 20 in a sealed state by the connecting member 34.
　また、このように連結部材３４により搬送ユニット３０を加熱室１０や冷却室２０と密封状態で連結させた状態で、連結部材３４によって連結された搬送ユニット３０と加熱室１０や冷却室２０との連結部分を、後述するように減圧装置３５によって減圧させた後、後述するように、前記の加熱室１０や冷却室２０に設けられた開閉扉１２、２２と、搬送ユニット３０に設けられた開閉扉３２とを開け、搬送ユニット３０における開口部３１と加熱室１０や冷却室２０における開口部１１、２１とを通して、被処理物Ｗを連結された搬送ユニット３０と加熱室１０や冷却室２０との間で受け渡しするようにしている。 Further, in a state where the transfer unit 30 is connected in a sealed state to the heating chamber 10 and the cooling chamber 20 by the connecting member 34 in this manner, the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 connected by the connecting member 34 After the connection part is decompressed by the decompression device 35 as described later, as described later, the open / close doors 12 and 22 provided in the heating chamber 10 and the cooling chamber 20 and the opening / closing provided in the transport unit 30 The door 32 is opened, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 to which the object W is connected through the opening 31 in the transfer unit 30 and the openings 11 and 21 in the heating chamber 10 and the cooling chamber 20. Between the two.
　また、前記のように連結部材３４により連結された搬送ユニット３０と加熱室１０や冷却室２０との連結部分を減圧させた場合に、維持手段４０により、搬送ユニット３０と加熱室１０や冷却室２０との間に力を作用させて、搬送ユニット３０と加熱室１０や冷却室２０とを一定の距離に維持させるようにしている。 When the connection between the transfer unit 30 connected by the connection member 34 and the heating chamber 10 or the cooling chamber 20 is decompressed as described above, the transfer unit 30 and the heating chamber 10 or the cooling chamber are maintained by the maintaining means 40. A force is applied between the transfer unit 30 and the transfer unit 20 to maintain the transfer unit 30, the heating chamber 10, and the cooling chamber 20 at a constant distance.
　ここで、この実施形態においては、加熱室１０や冷却室２０と対面する搬送ユニット３０における戸袋３３の前面側に伸縮可能な連結部材３４を設けるにあたっては、加熱室１０や冷却室２０と対面する搬送ユニット３０における戸袋３３の前面に、筒状になった突出部材３４１を前記の加熱室１０や冷却室２０に向けて所要長さ突出させると共に、この突出部材３４１の外周側において突出部材３４１と摺動可能なシール部材（図示せず）を用いて密接状態で加熱室１０や冷却室２０に向けて移動される筒状になった可動部材３４２を設け、この可動部材３４２において前記の加熱室１０や冷却室２０と対面する前面側の鍔部３４２ａに、この可動部材３４２と前記の加熱室１０や冷却室２０との間をシールするシール部材３４３を設けている。 Here, in this embodiment, when providing the expandable and contractible connection member 34 on the front side of the door pocket 33 in the transfer unit 30 facing the heating chamber 10 and the cooling chamber 20, the connecting member 34 faces the heating chamber 10 and the cooling chamber 20. A cylindrical projecting member 341 is projected toward the heating chamber 10 and the cooling chamber 20 to a required length on the front surface of the door pocket 33 in the transport unit 30, and the projecting member 341 is provided on the outer peripheral side of the projecting member 341. A cylindrical movable member 342 which is moved toward the heating chamber 10 or the cooling chamber 20 in close contact with a slidable seal member (not shown) is provided. A seal member 343 for sealing between the movable member 342 and the heating chamber 10 or the cooling chamber 20 is provided on the front flange portion 342 a facing the cooling chamber 20 or 10. There.
　そして、前記の連結部材３４における可動部材３４２を加熱室１０や冷却室２０に向けて移動させるにあたっては、搬送ユニット３０における戸袋３３の前面側にシリンダーからなる伸縮装置４１を設け、この伸縮装置４１における伸縮ロッド４１ａの先端を可動部材３４２に取り付け、この伸縮ロッド４１ａを伸縮させて前記の可動部材３４２を加熱室１０や冷却室２０に向けて移動させ、可動部材３４２を前記の加熱室１０や冷却室２０に連結させたり、加熱室１０や冷却室２０から離間させたりするようにしている。 Then, when moving the movable member 342 in the connecting member 34 toward the heating chamber 10 or the cooling chamber 20, an expansion and contraction device 41 consisting of a cylinder is provided on the front side of the door pocket 33 in the transport unit 30. The tip of the telescopic rod 41a in the case is attached to the movable member 342, and the telescopic rod 41a is expanded and contracted to move the movable member 342 toward the heating chamber 10 or the cooling chamber 20, and the movable member 342 is moved It is connected to the cooling chamber 20 or separated from the heating chamber 10 and the cooling chamber 20.
　なお、この実施形態においては、伸縮可能な連結部材３４として、加熱室１０や冷却室２０に向けて筒状になった突出部材３４１を所要長さ突出させると共に、この突出部材３４１の外周側において突出部材３４１と密接状態で加熱室１０や冷却室２０に向けて移動される筒状になった可動部材３４２を設けるようにしたが、伸縮可能な連結部材３４はこのようなものに限定されない。例えば、図示していないが、伸縮可能な連結部材として、蛇腹式の伸縮可能な連結部材を設けるようにすることもできる。 In this embodiment, as the expandable and contractible connecting member 34, the projecting member 341 cylindrically shaped toward the heating chamber 10 and the cooling chamber 20 is projected for a required length, and at the outer peripheral side of the projecting member 341 The cylindrical movable member 342 is provided to move toward the heating chamber 10 or the cooling chamber 20 in close contact with the projecting member 341. However, the expandable connection member 34 is not limited to this. For example, although not shown, a bellows-type expandable connection member may be provided as an expandable connection member.
　また、この実施形態においては、前記の搬送ユニット３０において、加熱室１０や冷却室２０と対面する戸袋３３の前面側であって、前記の可動部材３４２よりも外側の位置にシリンダーからなる押圧装置４２を設け、この押圧装置４２における伸縮ロッド４２ａを伸張させた場合に、この伸縮ロッド４２ａの先端部が接触する加熱室１０や冷却室２０における戸袋１３，２３の前面側の部分に当て部材１４、２４を設けている。 Further, in this embodiment, a pressing device, which is a cylinder at a position on the front side of the door 33 facing the heating chamber 10 and the cooling chamber 20 in the transfer unit 30 and outside the movable member 342 42 is provided, and when the telescopic rod 42a in the pressing device 42 is extended, the front side portion of the door bags 13 and 23 in the heating chamber 10 and the cooling chamber 20 with which the distal end portion of the telescopic rod 42a comes in contact , 24 are provided.
　そして、この実施形態においては、前記の維持手段４０として、前記の伸縮装置４１と押圧装置４２とを利用し、前記のように伸縮装置４１によって連結部材３４における可動部材３４２を加熱室１０や冷却室２０に向けて移動させ、搬送ユニット３０を連結部材３４により加熱室１０や冷却室２０と密封状態で連結させると共に、このように連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間の連結部分を減圧させた場合に、前記のように押圧装置４２によって連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間に押圧力を作用させ、搬送ユニット３０と加熱室１０や冷却室２０とを一定の距離に維持させるようにしている。このようにすると、連結部材３４により連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間の連結部分を減圧させた場合に、搬送ユニット３０と加熱室１０や冷却室２０との間における距離等の位置が近づく方向にずれるのが防止されるようになる。 And in this embodiment, the expansion and contraction device 41 and the pressing device 42 are used as the maintenance means 40, and the movable member 342 in the connecting member 34 is cooled by the expansion and contraction device 41 as described above. The transfer unit 30 is moved toward the chamber 20, and the transfer unit 30 is connected in a sealed state to the heating chamber 10 and the cooling chamber 20 by the connecting member 34, and the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 are connected in this manner. The pressure between the transfer unit 30 connected by the pressing device 42 and the heating chamber 10 or the cooling chamber 20 as described above causes the transfer unit 30 to move. The heating chamber 10 and the cooling chamber 20 are maintained at a constant distance. By doing this, when the connection between the transfer unit 30 connected by the connection member 34 and the heating chamber 10 or the cooling chamber 20 is decompressed, the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 It is prevented that the position such as the distance between them is shifted in the approaching direction.
　ここで、前記のように搬送ユニット３０と加熱室１０や冷却室２０との間の連結部分を減圧装置３５によって減圧させた場合に、前記の押圧装置４２により、連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間に押圧力を作用させるにあたっては、図４に示すように、減圧装置３５によって減圧された連結部分の内部における圧力を圧力センサー４３によって検知し、このように検知した結果を制御装置４４に出力して、この制御装置４４により前記の押圧装置４２を制御し、この押圧装置４２によって連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間に作用させる押圧力を調整することができる。 Here, when the connection between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 is reduced in pressure by the pressure reducing device 35 as described above, the transfer unit 30 and the transfer unit connected by the pressing device 42 are In order to apply a pressing force between the heating chamber 10 and the cooling chamber 20, as shown in FIG. The control unit 44 outputs the detection result to the control unit 44 to control the pressing unit 42, and the conveyance unit 30 connected by the pressing unit 42 and the heating chamber 10 or the cooling chamber 20 The pressing force applied between can be adjusted.
　具体的には、連結部分の内部の減圧を開始し、所定の圧力まで徐々に下がっていくのに合わせて、連結部分における圧力に応じて、連結された搬送ユニット３０と加熱室１０や冷却室２０との間に作用させる押圧力を徐々に上げていくように調整する。そうすることにより、押圧装置４２の押圧力が、減圧によって搬送ユニット３０と加熱室１０や冷却室２０とが近づこうとする力よりも大きくなって、搬送ユニット３０と加熱室１０や冷却室２０との間における距離等の位置が離れる方向にずれたりするのも防止されるようになり、搬送ユニット３０と加熱室１０や冷却室２０とを元のままの位置に維持させることが簡単に行えるようになる。 Specifically, in accordance with the pressure in the connecting portion, the transfer unit 30, the heating chamber 10, and the cooling chamber are connected according to the pressure in the connecting portion being started as the internal pressure in the connecting portion starts to be reduced. Adjust so as to gradually increase the pressure applied between 20 and 20. By doing so, the pressing force of the pressing device 42 becomes larger than the force by which the transfer unit 30 and the heating chamber 10 and the cooling chamber 20 try to approach due to decompression, and the transfer unit 30 and the heating chamber 10 and the cooling chamber 20 It is also prevented that the position such as the distance between them is deviated in the direction of separation, and it is easy to maintain the transport unit 30 and the heating chamber 10 or the cooling chamber 20 in the original position. become.
　なお、この実施形態においては、前記のように維持手段４０として、伸縮装置４１と押圧装置４２とを利用するようにし、押圧装置４２によって連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間に作用させる押圧力を前記のように調整するようにしたが、前記の伸縮装置４１だけで、搬送ユニット３０と加熱室１０や冷却室２０とを一定の距離に維持させるようにすることも可能である。その場合は、押圧力が大きくなり過ぎないようにし、シール部材３４３を繰り返して押し付けても弾力を失わない材質とする。 In this embodiment, as described above, the expansion device 41 and the pressing device 42 are used as the maintaining means 40, and the transfer unit 30 connected by the pressing device 42, the heating chamber 10, and the cooling chamber Although the pressing force to be applied between 20 and 20 is adjusted as described above, the transport unit 30 and the heating chamber 10 and the cooling chamber 20 can be maintained at a constant distance by only the above-mentioned expansion and contraction device 41. It is also possible. In that case, the pressing force is prevented from becoming too large, and the sealing member 343 is made of a material that does not lose its elasticity even if it is pressed repeatedly.
　次に、この実施形態における熱処理設備において、前記の搬送ユニット３０と前記の加熱室１０や冷却室２０との間で、被処理物Ｗを酸化させないように減圧状態で受け渡す場合について説明する。 Next, in the heat treatment equipment in this embodiment, a case where the object W to be processed is delivered under reduced pressure so as not to be oxidized between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 will be described.
　先ず、搬送ユニット３０における前記の開閉扉３２を閉じて、搬送ユニット３０内を非酸化雰囲気にすると共に、被処理物Ｗを受け渡しする加熱室１０や冷却室２０における前記の開閉扉１２、２２を閉じて、被処理物Ｗを受け渡しする加熱室１０や冷却室２０内を非酸化雰囲気にし、前記の図２及び図３に示すように、前記の搬送ユニット３０を、被処理物Ｗを受け渡す加熱室１０や冷却室２０と所要間隔を介して対面する位置に移動させる。 First, the open / close door 32 in the transfer unit 30 is closed to make the inside of the transfer unit 30 a non-oxidizing atmosphere, and the open / close doors 12, 22 in the heating chamber 10 or the cooling chamber 20 for delivering the object W The heating chamber 10 and the cooling chamber 20 for delivering the object W are closed, and the inside of the cooling chamber 20 is made non-oxidizing, and the transfer unit 30 is delivered with the object W, as shown in FIGS. 2 and 3. It is moved to a position facing the heating chamber 10 or the cooling chamber 20 through a required interval.
　次いで、図５（Ａ），（Ｂ）に示すように、加熱室１０や冷却室２０と対面する搬送ユニット３０の前面側に設けた前記の伸縮装置４１における伸縮ロッド４１ａを伸張させて、この伸縮ロッド４１ａの先端に取り付けられた連結部材３４における可動部材３４２を前記の突出部材３４１に密接させた状態で加熱室１０や冷却室２０に向けて移動させ、この可動部材３４２の前面側の鍔部３４２ａに設けたシール部材３４３を、前記の加熱室１０や冷却室２０の前面側における戸袋１３，２３に密接させてシールさせる。 Next, as shown in FIGS. 5A and 5B, the telescopic rod 41a of the telescopic device 41 provided on the front side of the transport unit 30 facing the heating chamber 10 and the cooling chamber 20 is stretched to make the telescopic rod 41a The movable member 342 in the connecting member 34 attached to the end of the telescopic rod 41 a is moved toward the heating chamber 10 or the cooling chamber 20 in a state in which the movable member 342 is in close contact with the projecting member 341. The seal member 343 provided in the portion 342 a is brought into close contact with the door bags 13 and 23 on the front side of the heating chamber 10 and the cooling chamber 20 to seal them.
　次いで、このように可動部材３４２の前面側の鍔部３４２ａに設けたシール部材３４３を、前記の加熱室１０や冷却室２０の前面側における戸袋１３，２３に密接させてシールさせた状態で、図６（Ａ），（Ｂ）に示すように、搬送ユニット３０の前面側に設けた前記の押圧装置４２における伸縮ロッド４２ａを伸張させて、この伸縮ロッド４２ａの先端部を、加熱室１０や冷却室２０における戸袋１３，２３の前面側の部分に設けられた当て部材１４、２４に当接させるようにする。 Next, in a state where the seal member 343 provided to the flange portion 342 a on the front side of the movable member 342 is in close contact with the door bags 13 and 23 on the front side of the heating chamber 10 and the cooling chamber 20 as described above, As shown in FIGS. 6A and 6B, the telescopic rod 42a of the pressing device 42 provided on the front side of the transport unit 30 is extended, and the distal end portion of the telescopic rod 42a is moved to the heating chamber 10 or the like. It is made to abut on the abutment members 14 and 24 provided on the front side of the door bags 13 and 23 in the cooling chamber 20.
　そして、この状態で、前記のように減圧装置３５によって搬送ユニット３０と加熱室１０や冷却室２０との間の連結部分の内部を減圧させると共に、前記の押圧装置４２によって連結された搬送ユニット３０と前記の加熱室１０や冷却室２０との間に押圧力を作用させ、搬送ユニット３０と加熱室１０や冷却室２０とを一定した状態で維持させるようにする。このようにすると、搬送ユニット３０と加熱室１０や冷却室２０との間の連結部分の内部を減圧させた場合に、従来のように搬送ユニット３０と加熱室１０や冷却室２０の位置がずれたりすることがなく、搬送ユニット３０と加熱室１０や冷却室２０とが所定の位置において安定した状態で維持されるようになる。 Then, in this state, as described above, the pressure reducing device 35 reduces the pressure in the connecting portion between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20, and the transfer unit 30 connected by the pressing device 42. A pressing force is applied between the heating chamber 10 and the cooling chamber 20 to maintain the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 in a constant state. Thus, when the pressure in the connection between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 is reduced, the positions of the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 are shifted as in the prior art. Thus, the transport unit 30, the heating chamber 10 and the cooling chamber 20 can be stably maintained at predetermined positions.
　なお、この実施形態においては、前記のように伸縮装置４１における伸縮ロッド４１ａを伸張させて、可動部材３４２の前面側の鍔部３４２ａに設けられたシール部材３４３を、加熱室１０や冷却室２０の前面側における戸袋１３，２３に密接させてシールさせた後、押圧装置４２における伸縮ロッド４２ａを伸張させて、この伸縮ロッド４２ａの先端部を、加熱室１０や冷却室２０における戸袋１３，２３の前面側の部分に設けられた当て部材１４、２４に当接させるようにしたが、可動部材３４２の前面側の鍔部３４２ａに設けられたシール部材３４３を、加熱室１０や冷却室２０の前面側における戸袋１３，２３に密接させてシールさせる動作と、押圧装置４２における伸縮ロッド４２ａを伸張させて、この伸縮ロッド４２ａの先端部を、加熱室１０や冷却室２０における戸袋１３，２３の前面側の部分に設けられた当て部材１４、２４に当接させる動作とを同時に行うようにすることもできる。なお、当て部材１４、２４は、設けても、設けなくてもよい。 In this embodiment, as described above, the expansion / contraction rod 41a of the expansion / contraction device 41 is extended to form the seal member 343 provided on the flange portion 342a on the front side of the movable member 342 in the heating chamber 10 or the cooling chamber 20. The telescopic rod 42a of the pressing device 42 is extended to seal the distal end portion of the telescopic rod 42a in the heating chamber 10 or the cooling chamber 20. However, the seal member 343 provided on the flange portion 342a of the movable member 342 on the front side of the movable member 342 corresponds to that of the heating chamber 10 or the cooling chamber 20. In the front side, an operation for bringing the door bags 13 and 23 into close contact with each other and sealing, and expanding the telescopic rod 42a in the pressing device 42, the tip end of the telescopic rod 42a The can also be performed and an operation to abut against the abutting members 14 and 24 provided on the portion of the front side of the door pocket 13, 23 in the heating chamber 10 and cooling chamber 20 at the same time. The backing members 14 and 24 may or may not be provided.
　次に、前記のように搬送ユニット３０と加熱室１０や冷却室２０との間の連結部分の内部を減圧させて、搬送ユニット３０と加熱室１０や冷却室２０とを所定の位置に維持させた状態で、図７（Ａ），（Ｂ）に示すように、搬送ユニット３０における前記の開閉扉３２及び連結された加熱室１０や冷却室２０における前記の開閉扉１２、２２を開けて、被処理物Ｗを前記の搬送ユニット３０と前記の加熱室１０や冷却室２０との間で受け渡しさせる。 Next, as described above, the pressure in the connection between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 is reduced to maintain the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 at predetermined positions. 7 (A) and 7 (B), the open / close door 32 in the transfer unit 30 and the open / close door 12, 22 in the heating chamber 10 or the cooling chamber 20 connected are opened as shown in FIGS. The workpiece W is transferred between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20.
　この時、連結部分の内部の圧力が、所定の圧力まで徐々に下がっていくのに合わせて、押圧装置４２の圧力を徐々に上げていき、搬送ユニット３０と加熱室１０や冷却室２０とが減圧によって近づこうとする力とできるだけ同圧となるようにバランスさせるのが好ましい。 At this time, the pressure in the pressing device 42 is gradually raised as the pressure in the connection portion gradually decreases to a predetermined pressure, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 It is preferable to make the pressure as equal as possible to the pressure to be approached by pressure reduction.
　そして、このように被処理物Ｗを搬送ユニット３０と加熱室１０や冷却室２０との間で受け渡した後は、前記の場合とは逆に、搬送ユニット３０における開閉扉３２及び連結された加熱室１０や冷却室２０における開閉扉１２、２２を閉じると共に、減圧状態にある搬送ユニット３０と加熱室１０や冷却室２０との間の連結部分の内部を大気圧に戻すようにする。 Then, after the object W to be treated is delivered between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 in this manner, the heating connected with the open / close door 32 in the transfer unit 30 is conversely to the above case. The open / close doors 12 and 22 in the chamber 10 and the cooling chamber 20 are closed, and the inside of the connecting portion between the transfer unit 30 in a depressurized state and the heating chamber 10 and the cooling chamber 20 is returned to atmospheric pressure.
　この時も、連結部分の内部の圧力が、大気圧まで徐々に上がっていくのに合わせて、押圧装置４２の圧力を徐々に下げていき、搬送ユニット３０と加熱室１０や冷却室２０とが減圧によって近づこうとする力とバランスさせるのが好ましい。 Also at this time, the pressure in the pressing device 42 is gradually lowered as the pressure inside the connection part gradually rises to the atmospheric pressure, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 It is preferable to balance the force that it tries to approach by depressurization.
　次いで、前記の押圧装置４２における伸縮ロッド４２ａを収縮させて、この伸縮ロッド４２ａの先端部を、加熱室１０や冷却室２０における戸袋１３，２３の前面側の部分から離間させ、さらに前記の伸縮装置４１における伸縮ロッド４１ａを収縮させて、この伸縮ロッド４１ａの先端に取り付けられた連結部材３４における可動部材３４２を加熱室１０や冷却室２０の前面側における戸袋１３，２３から離間させるようにする。 Then, the telescopic rod 42a of the pressing device 42 is contracted to separate the tip end of the telescopic rod 42a from the front side of the door bags 13 and 23 in the heating chamber 10 and the cooling chamber 20, and the telescopic rod The telescopic rod 41a in the device 41 is contracted so that the movable member 342 in the connecting member 34 attached to the tip of the telescopic rod 41a is separated from the door bags 13 and 23 on the front side of the heating chamber 10 and the cooling chamber 20. .
　なお、この実施形態においては、前記のように押圧装置４２における伸縮ロッド４２ａを収縮させて、この伸縮ロッド４２ａの先端部を、加熱室１０や冷却室２０における戸袋１３，２３の前面側の部分から離間させた後、伸縮装置４１における伸縮ロッド４１ａを収縮させて、この伸縮ロッド４１ａの先端に取り付けられた連結部材３４における可動部材３４２を加熱室１０や冷却室２０の前面側における戸袋１３，２３から離間させるようにしたが、押圧装置４２における伸縮ロッド４２ａを収縮させる動作と、伸縮装置４１における伸縮ロッド４１ａを収縮させる動作を同時に行うようにすることも可能である。 In this embodiment, the telescopic rod 42a of the pressing device 42 is contracted as described above, and the tip end portion of the telescopic rod 42a is a portion on the front side of the door bags 13, 23 in the heating chamber 10 or the cooling chamber 20. The telescopic rod 41a of the telescopic device 41 is contracted to move the movable member 342 of the connecting member 34 attached to the tip of the telescopic rod 41a to the door case 13 on the front side of the heating chamber 10 or the cooling chamber 20. Although it was made to space apart from 23, it is also possible to perform simultaneously the operation which contracts expansion-contraction rod 42a in pressing device 42, and the operation which contracts expansion-contraction rod 41a in expansion-contraction device 41 simultaneously.
　そして、この実施形態における熱処理設備においては、前記のように搬送ユニット３０と加熱室１０や冷却室２０との間の連結部分を減圧状態にして、被処理物Ｗを搬送ユニット３０と加熱室１０や冷却室２０との間で受け渡す操作を繰り返して行い、被処理物Ｗを順々に処理させるようにする。 Then, in the heat treatment equipment in this embodiment, as described above, the connection part between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 is decompressed to transfer the object W to the transfer unit 30 and the heating chamber 10. The operation of transferring the substrate W with the cooling chamber 20 is repeated to process the object W in order.
　なお、前記の実施形態における熱処理設備においては、被処理物Ｗを熱処理させる処理室Ｈとして、被処理物Ｗを加熱させる複数の加熱室１０と、加熱室１０において加熱された被処理物Ｗを冷却させる冷却室２０とを、搬送ユニット３０が走行される走行レールＬの片側に配置させるようにしただけであるが、被処理物Ｗを熱処理させる処理室Ｈの種類や数は特に限定されない。 In the heat treatment equipment according to the above-described embodiment, a plurality of heating chambers 10 for heating the object to be treated W and the object to be treated W heated in the heating chamber 10 are used as the treatment chamber H for heat treating the object to be treated W. The cooling chamber 20 to be cooled is only disposed on one side of the traveling rail L on which the transport unit 30 travels, but the type and number of processing chambers H for heat-treating the object W are not particularly limited.
　例えば、図８に示すように、被処理物Ｗを熱処理させる処理室Ｈとして、被処理物Ｗを加熱させる複数の加熱室１０と、加熱室１０において加熱された被処理物Ｗを冷却させる冷却室２０とを、搬送ユニット３０が走行される走行レールＬの両側に配置させるようにすることができる。 For example, as shown in FIG. 8, a plurality of heating chambers 10 for heating the object W and a cooling for cooling the object W heated in the heating chamber 10 as the processing chamber H for heat-treating the object W The chambers 20 can be arranged on both sides of the traveling rail L on which the transport unit 30 travels.
　また、前記の実施形態における熱処理設備においては、前記のような連結部材３４と維持手段４０とを搬送ユニット３０に設けるようにしたが、図示していないが、被処理物Ｗを熱処理させる処理室Ｈに前記のような連結部材３４と維持手段４０とを設けるようにすることも可能である。 Further, in the heat treatment equipment in the above embodiment, the connection member 34 and the maintaining means 40 as described above are provided in the transport unit 30, but although not shown, the treatment chamber for subjecting the object W to heat treatment It is also possible to provide the H with the connecting member 34 and the maintaining means 40 as described above.
１０　　　：加熱室
１１　　　：開口部
１２　　　：開閉扉
１３　　　：戸袋
１４　　　：当て部材
２０　　　：冷却室
２１　　　：開口部
２２　　　：開閉扉
２３　　　：戸袋
２４　　　：当て部材
３０　　　：搬送ユニット
３１　　　：開口部
３２　　　：開閉扉
３３　　　：戸袋
３４　　　：連結部材
３５　　　：減圧装置
４０　　　：維持手段
４１　　　：伸縮装置
４１ａ　　：伸縮ロッド
４２　　　：押圧装置
４２ａ　　：伸縮ロッド
４３　　　：圧力センサー
４４　　　：制御装置
３４１　　：突出部材
３４２　　：可動部材
３４２ａ　：鍔部
３４３　　：シール部材
Ｈ　　　　：処理室
Ｌ　　　　：走行レール
Ｐ　　　　：供給部
Ｗ　　　　：被処理物 DESCRIPTION OF SYMBOLS 10: Heating chamber 11: Opening 12: Opening / closing door 13: Door pocket 14: Contact member 20: Cooling chamber 21: Opening 22: Opening / closing door 23: Door pocket 24: Contact member 30: Conveying unit 30: Opening 32: Opening / closing door 33: door pocket 34: connecting member 35: pressure reducing device 40: maintaining means 41: telescopic device 41a: telescopic rod 42: pressing device 42a: telescopic rod 43: pressure sensor 44: control device 341: projecting member 342: movable member 342a: scissors Part 343: Sealing member H: Processing chamber L: Traveling rail P: Supply part W: Workpiece

Claims (6)

  1. 　被処理物を熱処理させる処理室と、被処理物を前記の処理室に搬送させる搬送ユニットが設けられ、前記の搬送ユニットを前記の処理室と対面する位置に移動させた状態で、搬送ユニットと処理室とが対面する何れかの対面部に設けられた伸縮可能な連結部材を伸張させて、この連結部材により搬送ユニットと処理室とを密封状態で連結させ、前記の被処理物を連結された搬送ユニットと処理室との間で受け渡しする熱処理設備において、連結部材により連結された搬送ユニットと処理室との連結部分を減圧させた場合に、搬送ユニットと処理室との間に力を作用させて搬送ユニットと処理室とを一定の距離に維持させる維持手段を設けたことを特徴とする熱処理設備。 A processing chamber for heat-treating an object and a transfer unit for transferring the object to the processing chamber are provided, and the transfer unit is moved to a position facing the processing chamber. The stretchable connecting member provided at any of the facing portions facing the processing chamber is extended, and the transfer unit and the processing chamber are connected in a sealed state by this connecting member, and the object to be processed is connected. In a heat treatment facility for transferring between the transfer unit and the processing chamber, a force is applied between the transfer unit and the processing chamber when the connecting portion between the transfer unit connected by the connecting member and the processing chamber is decompressed. A heat treatment facility characterized in that a maintaining means is provided to keep the transfer unit and the processing chamber at a constant distance.
  2. 　請求項１に記載の熱処理設備において、前記の維持手段として、前記の連結部材を伸張させて搬送ユニットと処理室とを密封状態で連結させる伸縮装置を用いたことを特徴とする熱処理設備。 The heat treatment equipment according to claim 1, wherein an expansion device is used as the maintenance means, in which the connection member is expanded to connect the transfer unit and the processing chamber in a sealed state.
  3. 　請求項１に記載の熱処理設備において、前記の維持手段として、前記の連結部材を伸張させて搬送ユニットと処理室とを密封状態で連結させる伸縮装置の他に、連結部材により連結された搬送ユニットと処理室との間に押圧力を作用させる押圧装置を設けたことを特徴とする熱処理設備。 The heat treatment equipment according to claim 1, wherein the transfer unit is connected by a connecting member in addition to an expansion device which extends the connecting member to connect the transfer unit and the processing chamber in a sealed state as the maintaining means. A heat treatment facility comprising a pressing device for applying a pressing force between the chamber and the processing chamber.
  4. 　請求項１～請求項３の何れか１項に記載の熱処理設備において、前記の維持手段は、前記のように減圧させた搬送ユニットと処理室との連結部分の内部の圧力に応じて、搬送ユニットと処理室との間に作用させる力を調整することを特徴とする熱処理設備。 The heat treatment facility according to any one of claims 1 to 3, wherein the maintaining means carries the transfer according to the internal pressure of the connection portion between the transfer unit and the processing chamber which are depressurized as described above. A heat treatment facility characterized by adjusting a force exerted between a unit and a processing chamber.
  5. 　請求項４に記載の熱処理設備において、搬送ユニットと処理室との間に作用させる力を調整するにあたり、連結部分の内部の圧力が下がるのにつれて、搬送ユニットと処理室との間に作用させる力を上げていくことを特徴とする熱処理設備。 In the heat treatment equipment according to claim 4, in adjusting the force applied between the transfer unit and the processing chamber, the force applied between the transfer unit and the processing chamber as the pressure inside the connecting portion is lowered. Heat treatment equipment characterized by raising
  6. 　請求項１～請求項５の何れか１項に記載の熱処理設備において、被処理物を処理室に搬送させる搬送ユニットに、前記の連結部材と維持手段とを設けたことを特徴とする熱処理設備。 The heat treatment equipment according to any one of claims 1 to 5, wherein the transfer member for conveying the object to be treated to the treatment chamber is provided with the connecting member and the maintaining means. .
PCT/JP2016/082369 2016-02-22 2016-11-01 Heat treatment equipment WO2017145445A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020187008699A KR101861512B1 (en) 2016-02-22 2016-11-01 Heat Treatment Equipment
CN201680064786.0A CN108350517B (en) 2016-02-22 2016-11-01 Equipment for Heating Processing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-030563 2016-02-22
JP2016030563A JP6261632B2 (en) 2016-02-22 2016-02-22 Heat treatment equipment

Publications (1)

Publication Number Publication Date
WO2017145445A1 true WO2017145445A1 (en) 2017-08-31

Family

ID=59685025

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/082369 WO2017145445A1 (en) 2016-02-22 2016-11-01 Heat treatment equipment

Country Status (4)

Country Link
JP (1) JP6261632B2 (en)
KR (1) KR101861512B1 (en)
CN (1) CN108350517B (en)
WO (1) WO2017145445A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110747326A (en) * 2019-11-29 2020-02-04 宁波汉博贵金属合金有限公司 Spindle heating device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0586416A (en) * 1991-09-30 1993-04-06 Thermo Tex:Kk Heat treatment equipment
JP2006063363A (en) * 2004-08-25 2006-03-09 Daido Steel Co Ltd Heat treatment facility
JP2009236344A (en) * 2008-03-26 2009-10-15 Ihi Corp Thermal treatment system
JP2013064184A (en) * 2011-09-20 2013-04-11 Aisin Aw Co Ltd Heat treatment facility and heat treatment method
JP5669981B1 (en) * 2014-10-27 2015-02-18 中外炉工業株式会社 Heat treatment equipment
JP2015206084A (en) * 2014-04-22 2015-11-19 中外炉工業株式会社 Heat treatment facility

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3934103A1 (en) * 1989-10-12 1991-04-25 Ipsen Ind Int Gmbh OVEN FOR PARTIAL HEAT TREATMENT OF TOOLS
JP3479485B2 (en) * 2000-02-10 2003-12-15 島津メクテム株式会社 Continuous processing equipment
CN100494416C (en) * 2008-02-27 2009-06-03 江苏丰东热技术股份有限公司 Thermal treatment vacuum furnace material transferring device
CN203144449U (en) * 2013-04-16 2013-08-21 江苏沙钢集团淮钢特钢股份有限公司 Multifunctional rack of trolley type heat treatment furnace

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0586416A (en) * 1991-09-30 1993-04-06 Thermo Tex:Kk Heat treatment equipment
JP2006063363A (en) * 2004-08-25 2006-03-09 Daido Steel Co Ltd Heat treatment facility
JP2009236344A (en) * 2008-03-26 2009-10-15 Ihi Corp Thermal treatment system
JP2013064184A (en) * 2011-09-20 2013-04-11 Aisin Aw Co Ltd Heat treatment facility and heat treatment method
JP2015206084A (en) * 2014-04-22 2015-11-19 中外炉工業株式会社 Heat treatment facility
JP5669981B1 (en) * 2014-10-27 2015-02-18 中外炉工業株式会社 Heat treatment equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110747326A (en) * 2019-11-29 2020-02-04 宁波汉博贵金属合金有限公司 Spindle heating device

Also Published As

Publication number Publication date
CN108350517B (en) 2019-08-06
JP2017149999A (en) 2017-08-31
KR20180038058A (en) 2018-04-13
CN108350517A (en) 2018-07-31
JP6261632B2 (en) 2018-01-17
KR101861512B1 (en) 2018-05-25

Similar Documents

Publication Publication Date Title
JP5669981B1 (en) Heat treatment equipment
US8529250B2 (en) Method and continuous furnace for heating workpieces
US20080258360A1 (en) Continuous carburizing furnace
TW201433640A (en) Handling device
WO2017145445A1 (en) Heat treatment equipment
JP2009250389A (en) Sealing mechanism and heat treatment furnace using the same
RU2709320C1 (en) Device for hot pressing
JP4849785B2 (en) Vacuum heat treatment equipment
JP2014136814A (en) Method for manufacturing high-strength sintered component and continuous sintering furnace
JP2006070343A (en) High frequency heat treatment method and high frequency heat treatment device
JP2014051431A (en) Molding apparatus
JP2016003372A (en) Heat treatment facility
WO2017043138A1 (en) Heat treatment apparatus
EP3908556B1 (en) Glass sheet quench arrangement and method of quenching glass sheet
JP6051272B2 (en) Molding equipment
JP2011006270A (en) Molding apparatus
JP6767784B2 (en) Continuous heat treatment furnace
WO2016017354A1 (en) Conveyance device for heat treatment device and heat treatment device
JP5752291B1 (en) Heat treatment equipment
JP6951500B2 (en) Continuous heat treatment furnace
JP2601514Y2 (en) Continuous heat treatment furnace
JP6391041B2 (en) Vacuum processing equipment
CN207227473U (en) Equipment for conveying at least one heated component
US20170165731A1 (en) Temperature adjustment station and method for operating the temperature adjustment station
KR102104241B1 (en) Multistory heat treating furnace and operating method for heating metallic material using thereof

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 20187008699

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16891601

Country of ref document: EP

Kind code of ref document: A1

122 Ep: pct application non-entry in european phase

Ref document number: 16891601

Country of ref document: EP

Kind code of ref document: A1