JP6261632B2 - Heat treatment equipment - Google Patents

Description

  In the present invention, a processing chamber for heat-treating an object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided, and the transfer unit is moved to a position facing the processing chamber. The extendable connecting member provided on any facing portion where the transfer unit and the processing chamber face each other is extended, and the transfer unit and the processing chamber are connected in a sealed state by this connecting member, and the object to be processed is The present invention relates to a heat treatment facility that delivers between a connected transfer unit and a processing chamber. When the connecting portion between the transfer unit and the processing chamber connected by a connecting member is depressurized, the transfer unit and the processing are performed. The position of the chamber is not shifted, and the transfer unit and the processing chamber are maintained in an appropriately connected state so that the object to be processed can be properly transferred between the connected transfer unit and the processing chamber. And it has a feature in that the so that.

  Conventionally, as a heat treatment facility for carburizing and quenching a workpiece, the workpiece is sequentially introduced into a long continuous furnace, and the workpiece is sequentially moved in the continuous furnace. Heat treatment equipment of continuous furnace type that continuously performs heat treatment such as heating, soaking, cooling, etc. on the processed material, and heating, soaking, cooling without moving the object to be processed in an independent batch furnace A batch furnace type heat treatment facility that performs heat treatment such as the above is known.

  Here, in the case of a continuous furnace type heat treatment equipment, since the object to be treated is continuously heat treated in a constant heat treatment pattern, the productivity is good, but the heat treatment pattern such as temperature rise and temperature fall becomes constant, As in recent years, there has been a problem that it is not possible to flexibly respond to a request to produce various kinds of products in small quantities by diversifying heat treatment patterns such as temperature rise and fall.

  On the other hand, in the batch furnace type heat treatment equipment, heat treatment is performed by changing the heat treatment conditions such as heating, soaking, and cooling in one furnace, so that it takes a lot of time to process one workpiece. As a result, there was a problem of poor productivity.

  For this reason, in recent years, as shown in Patent Documents 1 to 4, etc., as a processing chamber for heat-treating an object to be processed, at least a heating chamber for heating the object to be processed and cooling for cooling the heated object to be processed A processing unit that separates the chamber and provides a transport unit that transports an object to be processed to the processing chamber, moves the transport unit to a position facing the processing chamber, and faces the transport unit. In this state, a heat treatment facility is proposed in which the object to be processed is reduced in pressure in a sealed state, and in this state, the workpiece is transferred between the connected transfer unit and the processing chamber.

  Here, when the transport unit is moved to a position facing the processing chamber composed of a heating chamber and a cooling chamber as described above and the transport unit is connected to the facing processing chamber in a sealed state, Patent Documents 1 and 2 In this case, the entire transport unit is slid toward a processing chamber composed of a heating chamber and a cooling chamber facing each other, and the transport unit is connected to these processing chambers in a sealed state.

  However, as shown in Patent Documents 1 and 2, when the entire transport unit is slid toward the processing chamber consisting of a heating chamber and a cooling chamber facing each other, the entire transport unit is heavy, so the entire transport unit In order to slide the device, a large drive device, a guide mechanism, and the like are required, which causes a problem that the cost is very high and the device is enlarged.

  Moreover, in what is shown by patent document 3, 4, the connection member which can be expanded-contracted is provided in the any facing part which a conveyance unit and a process chamber face, This conveyance member is extended, A conveyance unit, a process chamber, Are connected in a sealed state, and then the connecting portion between the transfer unit and the processing chamber connected by the connecting member is decompressed.

  Here, when the connecting portion between the transport unit and the processing chamber connected by the connecting member is depressurized as described above, the force that the transport unit and the processing chamber are pulled toward each other via the connecting portion is approached. Even if it occurs and is firmly fixed to the floor, the position of the transfer unit or the processing chamber may be shifted over time.

  Moreover, in what is shown by patent document 4, expansion | extension apparatuses, such as a cylinder which expands / contracts a connection member, are provided, a connection member is extended | stretched by this expansion / contraction apparatus, and a conveyance unit and a processing chamber are sealed by this connection member. In this state, the connecting portion between the transfer unit and the processing chamber is decompressed.

  However, the expansion / contraction device disclosed in Patent Document 4 has only the force to extend the connecting member to simply connect the transport unit and the processing chamber, and depressurizes the connecting portion between the transport unit and the processing chamber as described above. In this case, the transfer unit and the processing chamber are pulled with respect to each other via the connecting portion, and cannot be resisted to move. Even if a large pressure that can resist these movements is applied between the unit and the processing chamber, the pressure is too large, the position of the transfer unit or the processing chamber shifts, the seal member is pressed too strongly, and the elasticity There was a problem that it was impossible to seal properly.

JP 2006-63363 A JP 2014-86475 A JP-A-5-86416 Japanese Patent No. 5686918

  In the present invention, a processing chamber for heat-treating an object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided, and the transfer unit is moved to a position facing the processing chamber. The extendable connecting member provided on any facing portion where the transfer unit and the processing chamber face each other is extended, and the transfer unit and the processing chamber are connected in a sealed state by the connecting member, and the processing target is It is an object of the present invention to solve the above-described problems in the heat treatment equipment in which an object is transferred between a connected transfer unit and a processing chamber.

  That is, the present invention does not shift the position of the transfer unit and the processing chamber when the connecting portion between the transfer unit and the processing chamber connected by the connecting member in the heat treatment facility as described above is decompressed, It is an object of the present invention to maintain a state where the transfer unit and the processing chamber are appropriately connected so that an object can be appropriately delivered between the connected transfer unit and the processing chamber.

In the heat treatment facility according to the present invention, in order to solve the above-described problems, a processing chamber for heat-treating an object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided. In a state where the processing unit is moved to a position facing the processing chamber, an extendable connecting member provided on any facing part where the transfer unit and the processing chamber face each other is extended, and the connecting member is used by the connecting member. In a heat treatment facility that connects a processing chamber in a sealed state and delivers the object to be processed between the connected transport unit and the processing chamber, a connecting portion between the transport unit and the processing chamber connected by a connecting member is provided. when reducing the pressure, as maintaining means for maintaining the processing chamber and the transport unit by the action of force between the processing chamber and the transport unit at a certain distance, thereby stretching the connecting member of the It provided a telescopic device for connecting the processing chamber and the transport unit in a sealed state, and a pressing device for applying a pressing force between the processing chamber and the transport unit which is connected by a connecting member.

  In the heat treatment facility according to the present invention, when the connecting portion between the transfer unit and the processing chamber connected by the connecting member as described above is depressurized, the maintaining means causes the transfer unit and the processing chamber to be interposed between the transfer unit and the processing chamber. A force is applied to maintain the transfer unit and the processing chamber at a certain distance.

Here, in the heat treatment equipment according to the present invention, as the maintaining means, and the expansion device for connecting the processing chamber and the transport unit in a sealed state the connecting member is extended as described above, the transport unit which is connected by a connecting member And a pressing device for applying a pressing force between the processing chamber and the processing chamber .

Then, the maintenance unit, the provision of said extension device and the pressing device, such as, the operation for connecting the processing chamber and the transport unit in a sealed state by expanding the connecting member with a seal member, a conveying unit When the connecting portion with the processing chamber is depressurized, the operation of maintaining the transfer unit and the processing chamber can be performed separately, and a large pressure is applied to the connecting member so that the elasticity of the seal member is lost and appropriate. There is no need to worry about being unable to seal properly.

  Further, in the heat treatment equipment according to the present invention, the force applied between the transfer unit and the processing chamber by the maintaining means is balanced according to the pressure inside the connection portion between the reduced pressure transfer unit and the processing chamber. Can be adjusted.

  Then, in adjusting the force acting between the transport unit and the processing chamber in this way, the force acting between the transport unit and the processing chamber is increased as the pressure inside the connecting portion decreases. Is preferred. In such a case, it is possible to appropriately prevent the position of the transfer unit or the processing chamber from being shifted due to the applied force being small or too large.

  Further, in the heat treatment facility according to the present invention, when the workpiece is transported to a plurality of processing chambers by the transport unit, the connecting member and the maintaining unit are disposed on the transport unit that transports the workpiece to the processing chamber. Is preferably provided. As described above, when the connecting member and the maintaining unit are provided in the transfer unit, the cost and the like are significantly reduced as compared with the case where the connecting member and the maintaining unit are individually provided in the plurality of processing chambers.

  In the heat treatment facility according to the present invention, the transfer unit is moved to a position facing the processing chamber, the transfer unit and the processing chamber are connected in a sealed state by the connecting member, and the transfer unit thus connected by the connecting member; When the object to be processed is transferred between the connected transfer unit and the processing chamber in a state where the connecting portion with the processing chamber is decompressed, the maintenance means acts between the connected transfer unit and the processing chamber. The force to be adjusted is maintained so that the transfer unit and the processing chamber are maintained in a stable state. Therefore, when the inside of the connection portion between the transfer unit and the processing chamber is decompressed, the positions of the transfer unit and the processing chamber are changed. The transfer unit and the processing chamber are maintained in an appropriately connected state without shifting, and an object to be processed is appropriately transferred between the connected transfer unit and the processing chamber. Kill as to become.

In the heat treatment equipment according to one embodiment of the present invention, a schematic plan view showing a state in which treatment chambers composed of a plurality of heating chambers and cooling chambers are linearly arranged on one side of a traveling rail on which the transport unit travels. It is. In the heat treatment facility according to the above embodiment, it is a longitudinal cross-sectional explanatory view showing a state in which a transfer unit faces a heating chamber and a cooling chamber. In the heat treatment facility according to the above embodiment, it is a cross-sectional explanatory view in the horizontal direction showing a state where the transfer unit faces the heating chamber and the cooling chamber. It is the block diagram which showed the apparatus structure which connects a conveyance unit to a heating chamber and a cooling chamber in the heat processing equipment which concerns on the said embodiment. In the heat treatment facility according to the above-described embodiment, the connecting member is moved toward the heating chamber or the cooling chamber by the expansion device provided on the front side of the transfer unit, and the transfer unit, the heating chamber, or the cooling chamber is moved by the connecting member. The state connected in a sealed state is shown, (A) is a longitudinal sectional explanatory view, (B) is a lateral sectional explanatory view. In the heat treatment facility according to the above embodiment, from the state shown in FIGS. 5A and 5B, the telescopic rod in the pressing device provided on the front side of the transport unit is extended to the front side of the heating chamber or the cooling chamber. FIG. 2 shows a state in which a pressing force is applied between the transfer unit and the heating chamber or the cooling chamber, wherein (A) is a longitudinal sectional explanatory view, and (B) is a lateral sectional explanatory view. . In the heat treatment facility according to the above-described embodiment, from the state shown in FIGS. 6A and 6B, the connecting portion between the transport unit connected by the connecting member and the heating chamber or the cooling chamber is depressurized, and the transport unit and Each open / close door in the connected heating chamber or cooling chamber is opened, and a state in which an object to be processed is transferred between the heating chamber or the cooling chamber connected to the transport unit is shown. (A) is a longitudinal section explanation. FIG. 4B is a cross-sectional explanatory diagram in the horizontal direction. In the heat treatment equipment according to the above embodiment, it is a schematic plan view showing a state in which processing chambers composed of a plurality of heating chambers and cooling chambers are arranged on both sides of a traveling rail on which a transport unit travels.

  Hereinafter, a heat treatment facility according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. In addition, the heat treatment equipment according to the present invention is not limited to the one shown in the following embodiment, and can be appropriately changed and implemented within a range not changing the gist of the invention.

  In the heat treatment facility according to this embodiment, as shown in FIG. 1, a plurality of (three in the example shown in the figure) heating chambers 10 for heating the workpiece W as the processing chamber H for heat-treating the workpiece W. And the cooling chamber 20 which cools the to-be-processed object W heated in the heating chamber 10 is arrange | positioned through the required space | interval on the one side of the traveling rail L on which the conveyance unit 30 drive | works. In addition, a supply unit P that supplies the workpiece W to the transport unit 30 is provided on one side of the traveling rail L that is the same as the heating chamber 10 and the cooling chamber 20 arranged in this manner.

  In the heat treatment facility according to this embodiment, as shown in FIG. 2 and FIG. 3, in the heating chamber 10 and the cooling chamber 20, the conveying unit 30 is respectively provided in the facing portion facing the conveying unit 30. Are provided with opening parts 11 and 21 for delivering the workpiece W between them, and sealed opening and closing doors 12 and 22 for opening and closing the opening parts 11 and 21 corresponding to these opening parts 11 and 21; , Door pockets 13 and 23 for accommodating the opening and closing doors 12 and 22 are provided.

  Further, in the transport unit 30, an opening 31 for delivering the workpiece W between the heating chamber 10 and the cooling chamber 20 is provided on the facing side facing the heating chamber 10 and the cooling chamber 20. In addition, a sealed door 32 that opens and closes the opening 31 and a door pocket 33 that accommodates the door 32 are provided.

  Moreover, in this embodiment, the connection member 34 which can be expanded-contracted is provided in the front side of the door pocket 33 in the said conveyance unit 30 which faces the said heating chamber 10 or the cooling chamber 20. As shown in FIG. As will be described later, the connecting member 34 is extended so that the transport unit 30 and the heating chamber 10 and the cooling chamber 20 are connected in a sealed state by the connecting member 34.

  In addition, in the state where the transport unit 30 is connected to the heating chamber 10 and the cooling chamber 20 in a sealed state by the connecting member 34 as described above, the transport unit 30 and the heating chamber 10 and the cooling chamber 20 connected by the connecting member 34 are connected. After the connecting portion is depressurized by the decompression device 35 as will be described later, the opening / closing doors 12 and 22 provided in the heating chamber 10 and the cooling chamber 20 and the opening and closing provided in the transport unit 30 as will be described later. The door 32 is opened, and through the opening 31 in the transfer unit 30 and the openings 11 and 21 in the heating chamber 10 and the cooling chamber 20, the transfer unit 30, the heating chamber 10, and the cooling chamber 20 connected to the workpiece W are connected. It is trying to pass between.

  Further, when the connecting portion between the transport unit 30 connected by the connecting member 34 and the heating chamber 10 or the cooling chamber 20 is depressurized as described above, the maintenance unit 40 causes the transport unit 30 to be connected to the heating chamber 10 or the cooling chamber. A force is applied between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 at a constant distance.

  Here, in this embodiment, when the extendable connecting member 34 is provided on the front side of the door pocket 33 in the transfer unit 30 that faces the heating chamber 10 and the cooling chamber 20, the heating chamber 10 and the cooling chamber 20 face each other. A projecting member 341 having a cylindrical shape is projected on the front surface of the door pocket 33 in the transport unit 30 toward the heating chamber 10 and the cooling chamber 20, and the projecting member 341 is arranged on the outer peripheral side of the projecting member 341. A cylindrical movable member 342 that is moved toward the heating chamber 10 and the cooling chamber 20 in close contact with a slidable seal member (not shown) is provided. In the movable member 342, the heating chamber is provided. A seal member 343 that seals between the movable member 342 and the heating chamber 10 or the cooling chamber 20 is provided on the flange 342a on the front side facing the cooling chamber 10 or the cooling chamber 20. That.

  In order to move the movable member 342 in the connecting member 34 toward the heating chamber 10 or the cooling chamber 20, an expansion / contraction device 41 including a cylinder is provided on the front side of the door pocket 33 in the transport unit 30. The tip of the telescopic rod 41a is attached to the movable member 342, the telescopic rod 41a is expanded and contracted to move the movable member 342 toward the heating chamber 10 and the cooling chamber 20, and the movable member 342 is moved to the heating chamber 10 and They are connected to the cooling chamber 20 or separated from the heating chamber 10 and the cooling chamber 20.

  In this embodiment, a projecting member 341 that is cylindrical toward the heating chamber 10 and the cooling chamber 20 is projected as a required length as the extendable connecting member 34, and on the outer peripheral side of the projecting member 341. Although the cylindrical movable member 342 that is moved toward the heating chamber 10 or the cooling chamber 20 in close contact with the protruding member 341 is provided, the extendable connecting member 34 is not limited to this. For example, although not shown, a bellows-type extendable connecting member may be provided as the connecting member that can be extended and contracted.

  Further, in this embodiment, in the transport unit 30, a pressing device including a cylinder on the front side of the door pocket 33 facing the heating chamber 10 and the cooling chamber 20 and outside the movable member 342. 42 is provided, and when the telescopic rod 42a in the pressing device 42 is extended, the contact member 14 is in contact with the front side portions of the door pockets 13 and 23 in the heating chamber 10 and the cooling chamber 20 with which the tip of the telescopic rod 42a contacts. , 24 are provided.

  And in this embodiment, the said expansion / contraction apparatus 41 and the press apparatus 42 are utilized as the said maintenance means 40, and the movable member 342 in the connection member 34 is made into the heating chamber 10 or cooling by the expansion / contraction apparatus 41 as mentioned above. The transfer unit 30 is moved toward the chamber 20, and the transfer unit 30 is connected to the heating chamber 10 and the cooling chamber 20 in a sealed state by the connecting member 34, and the transfer unit 30 thus connected to the heating chamber 10 and the cooling chamber 20 are connected. When the connecting portion between the heating unit 10 and the cooling chamber 20 is depressurized, a pressing force is applied between the transport unit 30 connected by the pressing device 42 and the heating chamber 10 or the cooling chamber 20 as described above. The heating chamber 10 and the cooling chamber 20 are maintained at a constant distance. In this case, when the connecting portion between the transport unit 30 connected by the connecting member 34 and the heating chamber 10 or the cooling chamber 20 is depressurized, the transport unit 30, the heating chamber 10, or the cooling chamber 20 It is possible to prevent the positions such as the distances between them from being shifted in the approaching direction.

  Here, when the connecting part between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 is depressurized by the decompression device 35 as described above, the transport unit 30 connected by the pressing device 42 and the When a pressing force is applied between the heating chamber 10 and the cooling chamber 20, as shown in FIG. 4, the pressure inside the connecting portion decompressed by the decompression device 35 is detected by the pressure sensor 43, and thus The control device 44 outputs the detected result to the control device 44, and the control device 44 controls the pressing device 42. The transport unit 30 connected by the pressing device 42 and the heating chamber 10 and the cooling chamber 20 are connected to each other. The pressing force acting between them can be adjusted.

  Specifically, in accordance with the pressure in the connection part, the transport unit 30 and the heating chamber 10 and the cooling room connected to each other are started in accordance with the pressure in the connection part as the pressure inside the connection part starts to be gradually reduced to a predetermined pressure. 20 so as to gradually increase the pressing force acting between the two. By doing so, the pressing force of the pressing device 42 becomes larger than the force that the transport unit 30 and the heating chamber 10 or the cooling chamber 20 are brought closer to each other due to the reduced pressure, and the transport unit 30, the heating chamber 10, or the cooling chamber 20 As a result, it is possible to prevent the transfer unit 30 and the heating chamber 10 and the cooling chamber 20 from being kept in their original positions. become.

  In this embodiment, as described above, the extension device 41 and the pressing device 42 are used as the maintaining means 40, and the transport unit 30 and the heating chamber 10 and the cooling chamber connected by the pressing device 42 are used. The pressing force acting between the transport unit 30 and the heating chamber 10 is adjusted as described above. However, the transport unit 30 and the heating chamber 10 or the cooling chamber 20 are maintained at a certain distance only by the telescopic device 41. It is also possible to do. In that case, the pressing force should not be excessively increased, and the material should not lose elasticity even when the sealing member 343 is repeatedly pressed.

  Next, in the heat treatment facility according to this embodiment, a case where the workpiece W is delivered in a reduced pressure state so as not to oxidize between the transfer unit 30 and the heating chamber 10 or the cooling chamber 20 will be described.

  First, the open / close door 32 in the transfer unit 30 is closed, the inside of the transfer unit 30 is made into a non-oxidizing atmosphere, and the open / close doors 12 and 22 in the heating chamber 10 and the cooling chamber 20 that deliver the workpiece W are closed. The heating chamber 10 and the cooling chamber 20 that are closed and deliver the workpiece W are set in a non-oxidizing atmosphere, and as shown in FIGS. 2 and 3, the transport unit 30 delivers the workpiece W. It moves to the position which faces the heating chamber 10 and the cooling chamber 20 via a required space | interval.

  Next, as shown in FIGS. 5A and 5B, the telescopic rod 41a in the telescopic device 41 provided on the front side of the transport unit 30 facing the heating chamber 10 and the cooling chamber 20 is expanded, The movable member 342 of the connecting member 34 attached to the distal end of the telescopic rod 41a is moved toward the heating chamber 10 and the cooling chamber 20 in close contact with the protruding member 341, and the front side of the movable member 342 is moved. The sealing member 343 provided in the part 342a is brought into close contact with the door pockets 13 and 23 on the front surface side of the heating chamber 10 and the cooling chamber 20 to be sealed.

  Next, in such a state that the sealing member 343 provided on the flange portion 342a on the front side of the movable member 342 is sealed in close contact with the door pockets 13 and 23 on the front side of the heating chamber 10 or the cooling chamber 20, As shown in FIGS. 6A and 6B, the telescopic rod 42a of the pressing device 42 provided on the front side of the transport unit 30 is extended, and the distal end of the telescopic rod 42a is moved to the heating chamber 10 or It is made to contact | abut to the contact members 14 and 24 provided in the part by the side of the front surface of the door pockets 13 and 23 in the cooling chamber 20. FIG.

  In this state, as described above, the decompression device 35 depressurizes the inside of the connecting portion between the transport unit 30 and the heating chamber 10 or the cooling chamber 20, and the transport unit 30 connected by the pressing device 42. A pressing force is applied between the heating chamber 10 and the cooling chamber 20 to keep the transport unit 30 and the heating chamber 10 and the cooling chamber 20 in a constant state. In this way, when the inside of the connecting portion between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 is depressurized, the positions of the transport unit 30 and the heating chamber 10 or the cooling chamber 20 are displaced as in the conventional case. The transport unit 30 and the heating chamber 10 and the cooling chamber 20 are maintained in a stable state at predetermined positions.

  In this embodiment, as described above, the expansion / contraction rod 41a of the expansion / contraction device 41 is extended, and the sealing member 343 provided on the flange 342a on the front surface side of the movable member 342 is replaced with the heating chamber 10 or the cooling chamber 20. Then, the telescopic rod 42a in the pressing device 42 is extended and the tip of the telescopic rod 42a is extended to the door pockets 13 and 23 in the heating chamber 10 and the cooling chamber 20. However, the sealing member 343 provided on the flange 342a on the front side of the movable member 342 is attached to the heating chamber 10 or the cooling chamber 20. An operation of bringing the door pockets 13 and 23 into close contact with each other on the front side and sealing, and a telescopic rod 42a of the pressing device 42 is extended, and the distal end of the telescopic rod 42a , It is also possible to perform the operation and to contact the contact member 14 and 24 provided on the portion of the front side of the door pocket 13, 23 in the heating chamber 10 and cooling chamber 20 at the same time. The abutting members 14 and 24 may or may not be provided.

  Next, as described above, the inside of the connecting portion between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 is depressurized to maintain the transport unit 30, the heating chamber 10, or the cooling chamber 20 in a predetermined position. 7A and 7B, the opening / closing door 32 in the transport unit 30 and the opening / closing doors 12 and 22 in the connected heating chamber 10 and cooling chamber 20 are opened. The workpiece W is transferred between the transport unit 30 and the heating chamber 10 or the cooling chamber 20.

  At this time, the pressure in the pressing device 42 is gradually increased as the internal pressure of the connecting portion gradually decreases to a predetermined pressure, so that the transport unit 30, the heating chamber 10, and the cooling chamber 20 are connected. It is preferable to balance the force to approach as much as possible by reducing the pressure.

  And after passing the to-be-processed object W between the conveyance unit 30 and the heating chamber 10 or the cooling chamber 20 in this way, contrary to the said case, the opening-and-closing door 32 and the connected heating in the conveyance unit 30 are connected. The open / close doors 12 and 22 in the chamber 10 and the cooling chamber 20 are closed, and the inside of the connecting portion between the transport unit 30 in the reduced pressure state and the heating chamber 10 and the cooling chamber 20 is returned to the atmospheric pressure.

  At this time, the pressure of the pressing device 42 is gradually decreased as the pressure inside the connecting portion gradually increases to the atmospheric pressure, and the transfer unit 30, the heating chamber 10, and the cooling chamber 20 are connected. It is preferable to balance with the force to approach by reducing the pressure.

  Next, the telescopic rod 42a in the pressing device 42 is contracted, and the distal end portion of the telescopic rod 42a is separated from the front side portions of the door pockets 13 and 23 in the heating chamber 10 and the cooling chamber 20, and further, the expansion and contraction is performed. The telescopic rod 41a in the device 41 is contracted so that the movable member 342 in the connecting member 34 attached to the tip of the telescopic rod 41a is separated from the door pockets 13 and 23 on the front side of the heating chamber 10 and the cooling chamber 20. .

  In this embodiment, as described above, the telescopic rod 42a in the pressing device 42 is contracted, and the distal end of the telescopic rod 42a is the front side portion of the door pockets 13 and 23 in the heating chamber 10 and the cooling chamber 20. After being separated from the telescopic rod 41 a in the telescopic device 41, the movable member 342 in the connecting member 34 attached to the tip of the telescopic rod 41 a is moved to the door pocket 13 on the front side of the heating chamber 10 or the cooling chamber 20. However, the operation of contracting the telescopic rod 42a in the pressing device 42 and the operation of contracting the telescopic rod 41a in the telescopic device 41 can be performed simultaneously.

  In the heat treatment facility according to this embodiment, the connection portion between the transport unit 30 and the heating chamber 10 or the cooling chamber 20 is depressurized as described above, and the workpiece W is transferred to the transport unit 30 and the heating chamber 10. In addition, the operation to be transferred to and from the cooling chamber 20 is repeatedly performed so that the workpieces W are sequentially processed.

  In the heat treatment facility in the above-described embodiment, as the processing chamber H that heat-treats the workpiece W, a plurality of heating chambers 10 that heat the workpiece W and the workpiece W heated in the heating chamber 10 are used. Although the cooling chamber 20 to be cooled is merely disposed on one side of the traveling rail L on which the transport unit 30 travels, the type and number of the processing chambers H in which the workpiece W is heat-treated are not particularly limited.

  For example, as illustrated in FIG. 8, a processing chamber H that heat-treats the workpiece W, a plurality of heating chambers 10 that heat the workpiece W, and cooling that cools the workpiece W heated in the heating chamber 10. The chambers 20 can be arranged on both sides of the travel rail L on which the transport unit 30 travels.

  In the heat treatment facility in the above embodiment, the connecting member 34 and the maintaining means 40 as described above are provided in the transport unit 30, but not shown, but a treatment chamber for heat treating the workpiece W. It is also possible to provide the connecting member 34 and the maintaining means 40 as described above in H.

DESCRIPTION OF SYMBOLS 10: Heating chamber 11: Opening part 12: Opening / closing door 13: Door pocket 14: Contact member 20: Cooling chamber 21: Opening part 22: Opening / closing door 23: Door bag 24: Contact member 30: Transfer unit 31: Opening part 32: Opening / closing door 33: Door pocket 34: Connecting member 35: Pressure reducing device 40: Maintaining means 41: Telescopic device 41a: Telescopic rod 42: Pressing device 42a: Telescopic rod 43: Pressure sensor 44: Control device 341: Protruding member 342: Movable member 342a: Trap Part 343: Seal member H: Processing chamber L: Traveling rail P: Supply part W: Object to be processed

Claims (4)

A processing chamber for heat-treating the object to be processed and a transfer unit for transferring the object to be processed to the processing chamber are provided, and the transfer unit is moved to a position facing the processing chamber, The extendable connecting member provided on any facing part facing the processing chamber is extended, and the transfer unit and the processing chamber are connected in a sealed state by this connecting member, and the object to be processed is connected. In the heat treatment equipment that delivers between the transport unit and the processing chamber, when the connecting portion between the transport unit and the processing chamber connected by the connecting member is depressurized, a force acts between the transport unit and the processing chamber. as a maintenance means for maintaining the is not constant distance between the processing chamber and the transport unit, a telescopic device for connecting sealingly to a processing chamber and the transport unit by expanding the connecting member of the, the coupling member Heat treatment equipment, characterized by comprising a pressing device for applying a pressing force between the processing chamber and linked transport unit Ri. 2. The heat treatment facility according to claim 1 , wherein the maintaining means acts between the transfer unit and the processing chamber in accordance with the pressure inside the connecting portion between the transfer unit and the processing chamber that has been depressurized as described above. Heat treatment equipment characterized by adjusting the force to be applied. In the heat treatment facility according to claim 2 , in adjusting the force to be applied between the transfer unit and the processing chamber, the force to be applied between the transfer unit and the processing chamber as the internal pressure of the connecting portion decreases. Heat treatment equipment characterized by raising The heat treatment equipment according to any one of claims 1 to 3 , wherein the connection unit and the maintaining means are provided in a transport unit for transporting an object to be processed to a processing chamber. .

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