JP2016003372A - Heat treatment facility - Google Patents

Heat treatment facility

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JP2016003372A
JP2016003372A JP2014124918A JP2014124918A JP2016003372A JP 2016003372 A JP2016003372 A JP 2016003372A JP 2014124918 A JP2014124918 A JP 2014124918A JP 2014124918 A JP2014124918 A JP 2014124918A JP 2016003372 A JP2016003372 A JP 2016003372A
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chamber
workpiece
heating chamber
heating
delivery
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JP5686918B1 (en
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智彦 藤野
Tomohiko Fujino
智彦 藤野
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Chugai Ro Co Ltd
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Chugai Ro Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To shorten the time required for conveyance of a heat-treated material from a heating chamber to a cooling chamber and for conveyance of another material to be treated to the heating chamber in a heat treatment device in which the heating and cooling chambers are provided separately, and the material to be treated is carried in and out of the heating and cooling chambers using a conveyance unit to be heat-treated.SOLUTION: In a heat treatment facility, a carrying-in part 1, a heating chamber 10 and a cooling chamber 20 are separately provided, and also a conveyance unit 30 is provided to convey the material to be treated carried in from the carrying-in part to the heating chamber and to convey the material heated in the heating chamber to the cooling chamber by moving between the carrying-in part and the heating and cooling chambers. The conveyance unit comprises: a delivery chamber 32 for delivering the material between the carrying-in part and the heating and cooling chambers; a standby chamber 33 for causing the material carried in the delivery chamber from the carrying-in part to be standby; and a thermal insulation chamber 34 for keeping warm the material heated in the heating chamber and carried in the delivery chamber at a prescribed temperature.

Description

本発明は、被処理物を搬入させる搬入部と、被処理物を加熱させる加熱室と、加熱された被処理物を冷却させる冷却室とが分離して設けられると共に、前記の搬入部と加熱室と冷却室との間を移動して、搬入部から搬入された被処理物を加熱室に搬送させると共に、加熱室において加熱された被処理物を冷却室に搬送させる搬送ユニットが設けられた熱処理設備に関するものである。特に、前記の搬送ユニットに、前記の搬入部と加熱室と冷却室との間で被処理物を受け渡しする受渡し室と、加熱室において加熱された被処理物を所定の温度で保温させる保温室とを設け、加熱室において加熱された被処理物を、搬送ユニットにおける受渡し室を通して保温室に搬入させるようにした熱処理設備において、加熱された被処理物を保温室に搬入させた後、この加熱室内に新たな被処理物を効率よく搬入できるようにした点に特徴を有するものである。   In the present invention, a carry-in unit for carrying in a workpiece, a heating chamber for heating the workpiece, and a cooling chamber for cooling the heated workpiece are provided separately, and the carry-in unit and the heating unit are heated. A transport unit is provided that moves between the chamber and the cooling chamber, transports the object to be processed loaded from the loading section to the heating chamber, and conveys the object to be processed heated in the heating chamber to the cooling chamber. It relates to heat treatment equipment. In particular, a delivery chamber that delivers the object to be processed between the carry-in unit, the heating chamber, and the cooling chamber to the transport unit, and a warming chamber that keeps the object to be processed heated in the heating chamber at a predetermined temperature. In a heat treatment facility in which the object to be processed heated in the heating chamber is carried into the temperature-retaining room through the delivery chamber in the transport unit, the heated object to be treated is brought into the temperature-retaining room and then heated. It is characterized in that a new workpiece can be efficiently carried into the room.

従来、浸炭焼入れ等を行う熱処理設備としては、被処理物を長い連続炉内に順々に導入させ、この連続炉内において被処理物を順々に移動させて、被処理物に対して加熱、均熱等の熱処理を連続的に行うようにした連続炉形式の熱処理設備と、独立したバッチ炉内において被処理物を移動させずに加熱、均熱等の熱処理を行うようにしたバッチ炉式の熱処理設備とが知られている。   Conventionally, as a heat treatment facility for carburizing and quenching, the workpieces are sequentially introduced into a long continuous furnace, and the workpieces are sequentially moved in the continuous furnace to heat the workpieces. , A continuous furnace type heat treatment facility that continuously performs heat treatment such as soaking, and a batch furnace that performs heat treatment such as heating and soaking without moving the object to be processed in an independent batch furnace Heat treatment equipment of the type is known.

ここで、連続炉形式の熱処理設備の場合、被処理物を一定した熱処理パターンで連続して熱処理するため、生産性は良好であるが、昇温,降温等の熱処理パターンが一定化し、近年のように様々な種類の製品を少量生産するという要請に対して柔軟に対応することができないという問題があった。   Here, in the case of a continuous furnace type heat treatment facility, the workpiece is continuously heat treated with a constant heat treatment pattern, so the productivity is good, but the heat treatment pattern such as temperature rise and temperature fall has become constant, As described above, there is a problem that it is not possible to flexibly respond to a request for producing various kinds of products in small quantities.

一方、前記のバッチ炉式の熱処理設備では、1つの炉において加熱、均熱等の熱処理の条件を変更させて熱処理を行うため、1つの被処理物の処理に多くの時間が必要になって、生産性が悪いという問題があった。   On the other hand, in the batch furnace type heat treatment equipment, heat treatment is performed by changing the heat treatment conditions such as heating and soaking in one furnace, so that it takes a lot of time to process one workpiece. There was a problem of poor productivity.

このため、近年においては、特許文献1に示されるように、被処理物を搬入させる搬入部と、被処理物を加熱させる加熱室と、加熱された被処理物を冷却させる冷却室とを分離して設け、前記の搬入部から被処理物を搬送ユニット内に搬入させた後、この搬送ユニットを加熱室の位置に移動させて加熱室に連結させ、前記の被処理物を搬送ユニットから加熱室内に搬入させて加熱させるようにし、このような操作を繰り返して、複数の加熱室内において被処理物を加熱させるようにし、何れかの加熱室において被処理物が適切に加熱された場合には、この加熱室の位置に搬送ユニットを移動させて連結させ、加熱された被処理物を搬送ユニット内に搬入させた後、この搬送ユニットを冷却室の位置に移動させて冷却室に連結させ、加熱された被処理物を搬送ユニットから冷却室に搬入させて冷却させるようにした熱処理設備が提案されている。   For this reason, in recent years, as shown in Patent Document 1, a carry-in unit for carrying in a workpiece, a heating chamber for heating the workpiece, and a cooling chamber for cooling the heated workpiece are separated. After the workpiece is carried into the transfer unit from the carry-in section, the transfer unit is moved to the position of the heating chamber and connected to the heating chamber, and the workpiece is heated from the transfer unit. When the object to be processed is heated in one of the heating chambers, the object to be processed is heated in a plurality of heating chambers by repeating the above operation. The transport unit is moved and connected to the position of the heating chamber, and the heated object to be processed is carried into the transport unit, and then the transport unit is moved to the position of the cooling chamber and connected to the cooling chamber. Heated Treated was so as to cool by carried into the cooling chamber from the transport unit heat treatment equipment is proposed.

しかし、前記のように加熱室において加熱された被処理物を搬送ユニット内に搬入させた後、この搬送ユニットを冷却室の位置に移動させて冷却室に連結させて、加熱された被処理物を搬送ユニットから冷却室に搬入させるまでには時間がかかり、その間に加熱された被処理物の温度が低下してしまい、被処理物を冷却室において焼入れする場合に、被処理物の温度が所定温度以下になって焼入れ不良が発生し、製品の品質が低下するという問題があった。特に、被処理物に対して浸炭焼入れ等の熱処理を行う場合には、搬送ユニットを加熱室や冷却室に連結させ、非酸化雰囲気の状態にして、被処理物の受け渡しを行うことが必要になるため、搬送ユニット内や連結部分を非酸化雰囲気にするための時間が必要になり、加熱された被処理物を搬送ユニットから冷却室に搬入させるまでの時間がさらに長くなって、被処理物の温度がさらに低下するという問題があった。   However, after the workpiece heated in the heating chamber as described above is carried into the transport unit, the transport unit is moved to the position of the cooling chamber and connected to the cooling chamber, and the heated workpiece It takes time until the workpiece is carried into the cooling chamber from the transfer unit, and the temperature of the workpiece to be heated decreases during that time, and when the workpiece is quenched in the cooling chamber, the temperature of the workpiece is There was a problem that the quenching failure occurred at a temperature lower than the predetermined temperature, and the quality of the product was lowered. In particular, when heat treatment such as carburizing and quenching is performed on the workpiece, it is necessary to connect the transport unit to a heating chamber or a cooling chamber and to deliver the workpiece in a non-oxidizing atmosphere. Therefore, it takes time to make the inside of the transfer unit and the connection portion into a non-oxidizing atmosphere, and the time until the heated object to be processed is transferred from the transfer unit to the cooling chamber is further increased. There was a problem that the temperature of the liquid crystal further decreased.

また、特許文献2においては、前記の搬送ユニットに、加熱室や冷却室との間で被処理物の受け渡しを行う受渡し室と、加熱室において加熱されて受渡し室に搬入された被処理物を保温させる保温室を設け、前記のように搬送ユニットを加熱室に連結させた状態で、加熱室において加熱された被処理物を、搬送ユニットにおける前記の受渡し室を通して保温室に搬入させ、この保温室において加熱された被処理物を保温させた状態で、搬送ユニットを冷却室の位置に移動させて冷却室に連結させ、保温室において保温されていた被処理物を、前記の受渡し室を通して冷却室に搬入させるようにした熱処理設備が提案されている。   Further, in Patent Document 2, a transfer chamber that transfers a workpiece to and from the heating chamber and the cooling chamber, and a workpiece that is heated in the heating chamber and carried into the transfer chamber are transferred to the transport unit. In the state in which the temperature-retaining room is provided and the transfer unit is connected to the heating chamber as described above, the object to be processed heated in the heating chamber is carried into the temperature-retaining room through the delivery chamber in the transfer unit. In a state where the object to be processed heated in the chamber is kept warm, the transfer unit is moved to the position of the cooling chamber and connected to the cooling chamber, and the object to be processed which has been kept warm in the heat retaining room is cooled through the delivery chamber. Heat treatment equipment that can be brought into the room has been proposed.

ここで、このような熱処理設備においても、前記のように搬送ユニットを加熱室に連結させ、加熱室において加熱された被処理物を、搬送ユニットにおける受渡し室を通して保温室に搬入させた場合、前記の加熱室内には被処理物が存在しない状態になり、この加熱室内に新たに被処理物を搬入させて加熱させることが必要になる。   Here, also in such a heat treatment facility, when the transport unit is connected to the heating chamber as described above, and the object to be processed heated in the heating chamber is carried into the storage room through the delivery chamber in the transport unit, In this heating chamber, there is no object to be processed, and it is necessary to bring the object to be processed into this heating chamber and heat it.

しかし、前記の加熱室内に新たに被処理物を搬入させるためには、前記のように保温室において加熱された被処理物を保温させた状態で、前記の搬送ユニットを搬入部の位置に導いて、搬入部から被処理物を搬送ユニット内に搬入させた後、この搬送ユニットを加熱室の位置に移動させて加熱室に連結させ、前記の被処理物を搬送ユニットから加熱室内に搬入させることが必要になり、加熱室に新たに被処理物を搬入させて加熱させるまでに多くの時間がかかり、生産性が悪くなるという問題があった。特に、被処理物に対して浸炭焼入れ等の熱処理を行う場合には、前記のように搬送ユニットを加熱室に連結させ、非酸化雰囲気の状態にして、被処理物の受け渡しを行うことが必要になるため、搬送ユニット内や連結部分を非酸化雰囲気にするための時間が必要になって、加熱室において新たに被処理物を加熱させるまでの時間がさらに長くなり、生産性がさらに悪くなるという問題があった。   However, in order to newly carry a workpiece into the heating chamber, the conveyance unit is guided to the position of the carry-in section while keeping the workpiece heated in the heat-retaining room as described above. Then, after the workpiece is carried into the transport unit from the carry-in section, the transport unit is moved to the position of the heating chamber and connected to the heating chamber, and the workpiece is carried into the heating chamber from the transport unit. Therefore, it takes a lot of time to bring the object to be treated into the heating chamber and heat it, resulting in a problem of poor productivity. In particular, when heat treatment such as carburizing and quenching is performed on the workpiece, it is necessary to connect the transport unit to the heating chamber as described above and to deliver the workpiece in a non-oxidizing atmosphere. Therefore, it takes time to make the inside of the transport unit and the connection part into a non-oxidizing atmosphere, and the time until the workpiece is newly heated in the heating chamber is further increased, and the productivity is further deteriorated. There was a problem.

特開2013−64184号公報JP 2013-64184 A 特開2006−63363号公報JP 2006-63363 A

本発明は、被処理物を搬入させる搬入部と、被処理物を加熱させる加熱室と、加熱された被処理物を冷却させる冷却室とを分離して設け、前記の搬入部と加熱室と冷却室との間を移動する搬送ユニットにより、搬入部から搬入された被処理物を加熱室に搬送させて加熱させると共に、加熱室において加熱された被処理物を冷却室に搬送させて冷却させるようにした熱処理設備における前記のような様々な問題を解決することを課題とするものである。   The present invention separately provides a carry-in section for carrying in a workpiece, a heating chamber for heating the workpiece, and a cooling chamber for cooling the heated workpiece, and the carry-in section and the heating chamber By the transfer unit moving between the cooling chambers, the object to be processed that has been carried in from the carry-in section is conveyed to the heating chamber and heated, and the object to be processed that has been heated in the heating chamber is conveyed to the cooling chamber and cooled. An object of the present invention is to solve the above-described various problems in the heat treatment equipment.

特に、本発明においては、前記の搬送ユニットに、前記の搬入部と加熱室と冷却室との間で被処理物を受け渡しする受渡し室と、加熱室において加熱された被処理物を所定の温度で保温させる保温室とを設け、加熱室において加熱された被処理物を、搬送ユニットにおける受渡し室を通して保温室に搬入させるようにした熱処理設備において、加熱された被処理物を保温室に搬入させた後、この加熱室内に新たな被処理物を効率よく搬入できるようにすることを課題とするものである。   In particular, in the present invention, the transfer unit that delivers the object to be processed among the carry-in unit, the heating chamber, and the cooling chamber to the transport unit, and the object to be processed heated in the heating chamber at a predetermined temperature. In the heat treatment facility, the heated processing object is carried into the thermal storage room in the heat treatment facility in which the heated processing object is brought into the thermal storage room through the delivery chamber in the transport unit. Then, it is an object to make it possible to efficiently carry a new object to be processed into the heating chamber.

本発明においては、前記のような課題を解決するため、被処理物を搬入させる搬入部と、被処理物を加熱させる加熱室と、加熱された被処理物を冷却させる冷却室とが分離して設けられると共に、前記の搬入部と加熱室と冷却室との間を移動して、搬入部から搬入された被処理物を加熱室に搬送させると共に、加熱室において加熱された被処理物を冷却室に搬送させる搬送ユニットが設けられた熱処理設備において、前記の搬送ユニットに、前記の搬入部と加熱室と冷却室との間で被処理物を受け渡しする受渡し室と、前記の搬入部から受渡し室に搬入された被処理物を待機させる待機室と、前記の加熱室において加熱されて受渡し室に搬入された被処理物を所定の温度で保温させる保温室を設けた。   In the present invention, in order to solve the above-described problems, a carry-in unit for carrying in the workpiece, a heating chamber for heating the workpiece, and a cooling chamber for cooling the heated workpiece are separated. And moving between the carry-in unit, the heating chamber, and the cooling chamber to transport the workpiece carried in from the carry-in unit to the heating chamber, and the workpiece heated in the heating chamber. In a heat treatment facility provided with a transfer unit to be transferred to the cooling chamber, a transfer chamber for transferring an object to be processed between the transfer portion, the heating chamber, and the cooling chamber to the transfer unit; and the transfer portion A waiting room for waiting for the object to be processed carried into the delivery chamber and a warming room for keeping the object heated in the heating chamber and carried into the delivery chamber at a predetermined temperature were provided.

そして、本発明の熱処理設備のように、搬送ユニットに、搬入部と加熱室と冷却室との間で被処理物を受け渡しする受渡し室と、搬入部から受渡し室に搬入された被処理物を待機させる待機室と、加熱室において加熱されて受渡し室に搬入された被処理物を所定の温度で保温させる保温室とを設けると、前記の待機室に搬入部から搬入された被処理物を待機させた状態で、搬送ユニットを加熱室の位置に導き、加熱室において加熱された被処理物を、この搬送ユニットの受渡し室を経由して保温室内に搬入させた後、そのままの状態で、前記の待機室に待機されていた被処理物を、受渡し室を経由してこの加熱室内に搬入させて加熱させることができる。   And like the heat treatment equipment of the present invention, the transfer unit is provided with a delivery chamber for delivering the workpiece between the carry-in unit, the heating chamber, and the cooling chamber, and the workpiece carried into the delivery chamber from the carry-in unit. When a standby chamber for waiting and a warming chamber for keeping the workpiece heated in the heating chamber and carried into the delivery chamber at a predetermined temperature are provided, the workpiece carried into the standby chamber from the carry-in section is In a state of waiting, the transport unit is guided to the position of the heating chamber, and the object to be processed heated in the heating chamber is brought into the storage room via the transfer chamber of the transport unit, and then, as it is, The object to be processed that has been waiting in the waiting chamber can be heated by being carried into the heating chamber via the delivery chamber.

ここで、前記のように搬送ユニットに待機室を設けるにあたり、待機室を設ける位置については、受渡し室との間で被処理物を移動できると共に、受渡し室と保温室との間で被処理物を移動させる場合に邪魔にならない位置であれば特に限定されず、例えば、待機室を前記の受渡し室の上方に設けるようにすることができる。   Here, when providing the standby chamber in the transfer unit as described above, the position of the standby chamber can be moved between the delivery chamber and the workpiece to be processed between the delivery chamber and the storage room. The position is not particularly limited as long as the position does not get in the way of movement, and for example, a waiting room can be provided above the delivery room.

ここで、本発明の熱処理設備において、前記の搬送ユニットにおける受渡し室を、前記の加熱室及び冷却室に密封状態で連結させる連結部を設け、前記の搬入部から搬入された被処理物を待機室に待機させた状態で、前記の連結部を前記の加熱室に連結させ、加熱室において非酸化雰囲気下で加熱された被処理物を、非酸化雰囲気下において、前記の連結部から前記の受渡し室を経由して前記の保温室に導くと共に、前記の待機室に待機されている被処理物を、受渡し室を経由して連結部から加熱室内に搬入させる一方、前記の連結部を前記の冷却室に連結させ、前記の保温室において非酸化雰囲気下で所定の温度に保温された被処理物を、非酸化雰囲気下において前記の受渡し室を経由して前記の連結部から冷却室に導くようにすることができる。なお、前記の非酸化雰囲気とは、加熱された被処理物が酸化されない雰囲気を意味し、例えば、真空等の減圧雰囲気や、不活性ガス等を用いた不活性雰囲気や、減圧雰囲気と不活性雰囲気とを組み合わせた雰囲気等になっていることを意味する。   Here, in the heat treatment equipment according to the present invention, a connecting portion that connects the delivery chamber in the transfer unit to the heating chamber and the cooling chamber in a sealed state is provided, and a workpiece to be processed loaded from the loading portion is on standby. In a state of waiting in a chamber, the connecting portion is connected to the heating chamber, and an object to be processed that is heated in a non-oxidizing atmosphere in the heating chamber is removed from the connecting portion in the non-oxidizing atmosphere. The workpiece to be treated in the standby chamber is introduced into the heating chamber through the delivery chamber, while being guided to the warming chamber through the delivery chamber. The object to be processed, which is connected to the cooling chamber and kept at a predetermined temperature in a non-oxidizing atmosphere in the warming room, is transferred from the connecting part to the cooling chamber via the delivery chamber in the non-oxidizing atmosphere. To guide Kill. The non-oxidizing atmosphere means an atmosphere in which a heated object is not oxidized. For example, a reduced pressure atmosphere such as a vacuum, an inert atmosphere using an inert gas, or a reduced pressure atmosphere and an inert atmosphere. It means that the atmosphere is combined with the atmosphere.

また、本発明の熱処理設備において、前記のように被処理物を非酸化雰囲気下において熱処理して浸炭処理等を行う場合には、前記の加熱室と冷却室とにそれぞれ密封式の開閉扉を設け、前記の搬送ユニットの受渡し室との間で被処理物を受け渡す際に、それぞれ前記の開閉扉を開閉させるようにすると共に、前記の搬送ユニットにおける受渡し室と保温室との間に密封式の開閉扉を設け、受渡し室と保温室との間で被処理物を移動させる際に、この開閉扉を開閉させるようにすることができる。さらに、前記の連結部と受渡し室との間に密封式の開閉扉を設け、受渡し室と前記の加熱室及び冷却室との間で被処理物を受け渡す際に、この開閉扉を開閉させるようにすることができる。   Further, in the heat treatment equipment of the present invention, when carburizing treatment is performed by heat-treating an object to be treated in a non-oxidizing atmosphere as described above, sealed opening / closing doors are respectively provided in the heating chamber and the cooling chamber. And opening and closing the opening and closing doors when delivering the workpiece to and from the delivery chamber of the transport unit, and sealing between the delivery chamber and the storage room in the transport unit. When the workpiece is moved between the delivery chamber and the greenhouse, this door can be opened and closed. Further, a sealing type opening / closing door is provided between the connecting portion and the delivery chamber, and the opening / closing door is opened and closed when the workpiece is delivered between the delivery chamber and the heating chamber and the cooling chamber. Can be.

本発明における熱処理設備においては、前記のように搬送ユニットに、搬入部と加熱室と冷却室との間で被処理物を受け渡しする受渡し室と、搬入部から受渡し室に搬入された被処理物を待機させる待機室と、加熱室から受渡し室に搬入された加熱された被処理物を所定の温度で保温させる保温室とを設けたため、前記の待機室に搬入部から搬入された被処理物を待機させた状態で、搬送ユニットを加熱室の位置に導き、加熱室において加熱された被処理物を、この搬送ユニットの受渡し室を経由して保温室内に搬入させた後、そのままの状態で、前記の待機室に待機された被処理物を、受渡し室を経由してこの加熱室内に搬入されて加熱させるようにすることができる。   In the heat treatment facility according to the present invention, as described above, the transfer unit delivers the workpiece between the carry-in unit, the heating chamber, and the cooling chamber, and the workpiece to be carried into the delivery chamber from the carry-in unit. Since the standby chamber for waiting for the temperature and the warming room for keeping the heated processed material carried into the delivery chamber from the heating chamber at a predetermined temperature are provided, the processed material carried into the standby chamber from the carry-in section The transport unit is guided to the position of the heating chamber in the state of waiting, and the workpiece heated in the heating chamber is brought into the storage room via the transfer chamber of the transport unit, and then left as it is. The object to be processed waiting in the standby chamber can be carried into the heating chamber via the delivery chamber and heated.

この結果、本発明における熱処理設備においては、加熱室において加熱された被処理物を、搬送ユニットにおける受渡し室を通して保温室に搬入させた後、この加熱室に新たな被処理物を搬入させて加熱させるまでの時間を大幅に短縮することができるようになり、生産性が著しく向上する。   As a result, in the heat treatment facility according to the present invention, the object to be processed heated in the heating chamber is carried into the storage room through the delivery chamber in the transport unit, and then the new object to be treated is carried into the heating chamber and heated. It is possible to significantly reduce the time required for the production, and the productivity is remarkably improved.

また、本発明における熱処理設備により、被処理物に対して浸炭焼入れ等の熱処理を行うにあたり、搬送ユニットにおける受渡し室を、加熱室及び冷却室に密封状態で連結させる連結部を設け、搬入部から搬入された被処理物を待機室に待機させた状態で、前記の連結部を加熱室に連結させ、加熱室において非酸化雰囲気下で加熱された被処理物を、非酸化雰囲気下において、連結部から受渡し室を経由して保温室に導くと共に、待機室に待機されている被処理物を、受渡し室を経由して連結部から加熱室内に搬入させるようにすると、加熱室内に新たな被処理物を搬入させる際に、従来のように、新たに搬送ユニット内や連結部分を非酸化雰囲気にする必要がなくなり、加熱室内に新たな被処理物を搬入させるための時間をさらに短縮させることができ、浸炭焼入れ等の熱処理がさらに効率よく行えるようになる。   In addition, when performing heat treatment such as carburizing and quenching on an object to be processed by the heat treatment equipment in the present invention, a connecting portion for connecting the delivery chamber in the transfer unit to the heating chamber and the cooling chamber in a sealed state is provided. In a state where the workpiece to be loaded is kept waiting in the standby chamber, the connecting portion is connected to the heating chamber, and the workpiece heated in the non-oxidizing atmosphere in the heating chamber is connected in the non-oxidizing atmosphere. If the work to be processed is kept in the standby chamber from the section through the delivery chamber, and the workpiece to be waited in the standby room is carried into the heating chamber from the connecting section through the delivery chamber, a new object is introduced into the heating chamber. When loading the processed material, there is no need to newly add a non-oxidizing atmosphere in the transfer unit or the connection part as in the past, and the time for loading a new processed material into the heating chamber is further shortened. It can become allow better heat treatment more efficient, such as carburizing and quenching.

本発明の一実施形態に係る熱処理設備において、搬送ユニットの移動方向に沿って、被処理物を搬送ユニットに搬入させる搬入部と、被処理物を加熱させる複数の加熱室と、加熱された被処理物を冷却させる冷却室とを直線状に配列させた状態を示した概略平面図である。In the heat treatment facility according to one embodiment of the present invention, along the moving direction of the transfer unit, a carry-in unit that loads the workpiece into the transfer unit, a plurality of heating chambers that heat the workpiece, and the heated workpiece It is the schematic plan view which showed the state which arranged the cooling chamber which cools a processed material linearly. 前記の実施形態に係る熱処理設備に使用する搬送ユニットを示した概略断面説明図である。It is a schematic sectional explanatory drawing which showed the conveyance unit used for the heat processing equipment which concerns on the said embodiment. 前記の実施形態に係る熱処理設備において、搬入部から被処理物を搬送ユニットの受渡し室内に搬入させた状態を示した概略断面説明図である。FIG. 5 is a schematic cross-sectional explanatory diagram illustrating a state in which an object to be processed is carried into a delivery chamber of a transfer unit from a carry-in unit in the heat treatment facility according to the embodiment. 前記の実施形態に係る熱処理設備において、被処理物が受渡し室内に搬入された搬送ユニットを適当な加熱室の位置に導き、この搬送ユニットを加熱室に向けてスライドさせて、この搬送ユニットにおける連結部を加熱室に連結させた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, the conveyance unit in which the workpiece is carried into the delivery chamber is guided to the position of the appropriate heating chamber, and the conveyance unit is slid toward the heating chamber to connect the conveyance unit. It is a schematic sectional explanatory drawing which showed the state which connected the part to the heating chamber. 前記の実施形態に係る熱処理設備において、搬送ユニットの受渡し室の開閉扉と加熱室の開閉扉とを開けて、受渡し室内における被処理物を、連結部を通して加熱室内に搬入させた状態を示した概略断面説明図である。In the heat treatment equipment according to the embodiment, the opening / closing door of the transfer chamber of the transfer unit and the opening / closing door of the heating chamber are opened, and the object to be processed in the transfer chamber is brought into the heating chamber through the connecting portion. It is a schematic cross-sectional explanatory drawing. 前記の実施形態に係る熱処理設備において、被処理物を加熱室内に搬入させた状態で、受渡し室の開閉扉と加熱室の開閉扉とを閉じて、搬送ユニットを加熱室から離れる方向にスライドさせた状態を示した概略断面説明図である。In the heat treatment facility according to the above embodiment, with the workpiece to be carried into the heating chamber, the opening / closing door of the delivery chamber and the opening / closing door of the heating chamber are closed, and the transfer unit is slid away from the heating chamber. It is a schematic cross-section explanatory drawing which showed the state. 前記の実施形態に係る熱処理設備において、前記の搬送ユニットにより各加熱室内に被処理物を搬入させて、被処理物を各加熱室内において加熱処理させる状態を示した概略平面図である。FIG. 4 is a schematic plan view showing a state in which an object to be processed is carried into each heating chamber by the transfer unit and the object to be processed is heated in each heating chamber in the heat treatment facility according to the embodiment. 前記の実施形態に係る熱処理設備において、搬入部から搬送ユニットの受渡し室内に搬入された被処理物を、受渡し室の上方に設けられた待機室に待機させた状態を示した概略断面説明図である。In the heat treatment facility according to the above embodiment, a schematic cross-sectional explanatory diagram showing a state in which an object to be processed, which is carried into the delivery chamber of the transfer unit from the carry-in unit, is put on standby in a standby chamber provided above the delivery chamber. is there. 前記の実施形態に係る熱処理設備において、被処理物を待機室に待機させた状態で搬送ユニットを、被処理物が加熱処理された加熱室の位置に移動させ、この搬送ユニットを加熱室に向けてスライドさせて、搬送ユニットにおける連結部を前記の加熱室に連結させた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, the transfer unit is moved to the position of the heating chamber in which the object to be processed is heat-treated in a state where the object to be processed is in the standby chamber, and the transfer unit is directed to the heating chamber. FIG. 6 is a schematic cross-sectional explanatory view showing a state in which the connecting portion in the transport unit is connected to the heating chamber by sliding the connecting portion. 前記の実施形態に係る熱処理設備において、加熱室における開閉扉、受渡し室における連結部側の開閉扉及び受渡し室と保温室との間の開閉扉を開け、加熱室内において加熱処理された被処理物を、加熱室から受渡し室を通して保温室に移動させた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, the opening / closing door in the heating chamber, the opening / closing door on the connecting portion side in the delivery chamber, and the opening / closing door between the delivery chamber and the thermal storage room are opened, and the object to be treated is heated in the heating chamber. It is a schematic cross-section explanatory drawing which showed the state which moved to the thermal storage room through a delivery chamber from a heating chamber. 前記の実施形態に係る熱処理設備において、受渡し室と保温室との間の開閉扉を閉じて、加熱処理された被処理物を保温室内において保温させた状態で、受渡し室の上の待機室に待機されていた被処理物を、待機室から受渡し室を通して加熱室に搬入させた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, the open / close door between the delivery chamber and the warming room is closed, and the heat-treated object is kept warm in the warming room, and then the waiting room above the delivery room. It is schematic sectional drawing which showed the state which carried in the to-be-processed object from the waiting chamber through the delivery chamber to the heating chamber. 前記の実施形態に係る熱処理設備において、加熱処理された被処理物を保温室内において保温させると共に、待機させていた被処理物を加熱室内に搬入させた状態で、受渡し室の開閉扉と加熱室の開閉扉とを閉じて、搬送ユニットを加熱室から離れる方向にスライドさせた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, the heat-treated object is kept warm in the heat-retaining room, and the waiting object is brought into the heating chamber, and the opening / closing door and the heating chamber of the delivery chamber FIG. 6 is a schematic cross-sectional explanatory view showing a state in which the door is closed and the transfer unit is slid in a direction away from the heating chamber. 前記の実施形態に係る熱処理設備において、加熱処理された被処理物を保温室内において保温させた状態で、搬送ユニットを冷却室の位置に移動させ、この搬送ユニットを冷却室に向けてスライドさせて、この搬送ユニットにおける連結部を冷却室に連結させた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, in a state where the heat-treated object is kept warm in the temperature-retaining room, the transfer unit is moved to the position of the cooling chamber, and the transfer unit is slid toward the cooling chamber. FIG. 5 is a schematic cross-sectional explanatory view showing a state in which a connecting portion in the transport unit is connected to a cooling chamber. 前記の実施形態に係る熱処理設備において、受渡し室と保温室との間の開閉扉を開けると共に、受渡し室の開閉扉と冷却室の開閉扉を開け、保温室内において保温されていた被処理物を保温室から受渡し室を通して冷却室内に搬入させた状態を示した概略断面説明図である。In the heat treatment facility according to the above-described embodiment, the open / close door between the delivery chamber and the thermal storage room is opened, the open / close door of the delivery chamber and the open / close door of the cooling chamber are opened, and the object to be treated that has been kept warm in the thermal storage room. It is a schematic sectional explanatory drawing which showed the state carried in into the cooling chamber through the delivery chamber from the heat retention chamber. 前記の実施形態に係る熱処理設備において、受渡し室と保温室との間の開閉扉を閉じると共に、冷却室の開閉扉を閉じ、冷却室内に搬入された被処理物を冷却させる一方、受渡し室における連結部側の開閉扉を閉じた後、搬送ユニットを冷却室から離れる方向にスライドさせて、搬送ユニットを冷却室から離間させた状態を示した概略断面説明図である。In the heat treatment facility according to the above embodiment, the open / close door between the delivery chamber and the thermal storage room is closed, the open / close door of the cooling chamber is closed, and the object to be processed carried into the cooling chamber is cooled. FIG. 5 is a schematic cross-sectional explanatory view showing a state in which the conveyance unit is slid away from the cooling chamber by closing the opening / closing door on the connection portion side and then sliding in the direction away from the cooling chamber. 前記の実施形態に係る熱処理設備において使用する搬送ユニットの第1の変更例を示した概略平面図である。It is the schematic plan view which showed the 1st modification of the conveyance unit used in the heat processing equipment which concerns on the said embodiment. 前記の実施形態に係る熱処理設備において使用する搬送ユニットの第2の変更例を示した概略平面図である。It is the schematic plan view which showed the 2nd modification of the conveyance unit used in the heat processing equipment which concerns on the said embodiment. 前記の実施形態に係る熱処理設備において使用する搬送ユニットの第3の変更例を示した概略平面図である。It is the schematic plan view which showed the 3rd modification of the conveyance unit used in the heat processing equipment which concerns on the said embodiment. 前記の実施形態に係る熱処理設備において使用する搬送ユニットの第4の変更例を示した概略平面図である。It is the schematic plan view which showed the 4th modification of the conveyance unit used in the heat processing equipment which concerns on the said embodiment. 前記の実施形態に係る熱処理設備において使用する搬送ユニットの第5の変更例を示した概略断面説明図である。It is a schematic cross-sectional explanatory view showing a fifth modification of the transfer unit used in the heat treatment facility according to the embodiment.

以下、本発明の実施形態に係る熱処理設備を添付図面に基づいて具体的に説明する。なお、本発明に係る熱処理設備は下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。   Hereinafter, a heat treatment facility according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. The heat treatment equipment according to the present invention is not limited to the one shown in the following embodiment, and can be implemented with appropriate modifications within a range not changing the gist of the invention.

この実施形態に係る熱処理設備においては、図1に示すように、被処理物Wを搬入させる搬入部1と、被処理物Wを非酸化雰囲気下で加熱させる複数(図に示す例では3つ)の加熱室10と、加熱された被処理物Wを冷却させる冷却室20とを分離させて直線状に配列させている。   In the heat treatment facility according to this embodiment, as shown in FIG. 1, a carry-in unit 1 for carrying in the workpiece W and a plurality of (three in the example shown in the figure) that heat the workpiece W in a non-oxidizing atmosphere. ) And the cooling chamber 20 for cooling the heated workpiece W are separated and arranged linearly.

また、前記の搬入部1と加熱室10と冷却室20の配列方向に沿って走行レールLを設け、この走行レールLに沿って搬送ユニット30を走行させて、搬送ユニット30を、前記の搬入部1と加熱室10と冷却室20との間で移動させるようにしている。   Further, a travel rail L is provided along the arrangement direction of the carry-in unit 1, the heating chamber 10, and the cooling chamber 20, and the transport unit 30 is caused to travel along the travel rail L so that the transport unit 30 is moved into the carry-in unit. It is made to move among the part 1, the heating chamber 10, and the cooling chamber 20.

そして、前記の搬入部1から搬送ユニット30内に被処理物Wを搬入させて、この搬送ユニット30を加熱室10に移動させ、搬送ユニット30内に搬入された被処理物Wを加熱室10内に搬入させて、この加熱室10内において被処理物Wを加熱させ、このように加熱室10内において加熱された被処理物Wを搬送ユニット30により冷却室20に搬送させ、加熱された被処理物Wを搬送ユニット30から冷却室20内に搬入させて冷却させるようにしている。   Then, the workpiece W is carried into the conveyance unit 30 from the carry-in unit 1, the conveyance unit 30 is moved to the heating chamber 10, and the workpiece W carried into the conveyance unit 30 is moved to the heating chamber 10. Then, the workpiece W is heated in the heating chamber 10, and the workpiece W heated in the heating chamber 10 is transported to the cooling chamber 20 by the transport unit 30 and heated. The workpiece W is carried into the cooling chamber 20 from the transport unit 30 and cooled.

ここで、前記の加熱室10においては、前記の搬送ユニット30との間で被処理物Wを受け渡す開口部に密封式の開閉扉11を設け、この開閉扉11を閉じ、加熱室10内を減圧装置(図示せず)により減圧させて非酸化雰囲気にした状態で、前記のように搬送ユニット30から加熱室10内に搬入された被処理物Wを加熱装置(図示せず)により加熱させるようにしている。   Here, in the heating chamber 10, a hermetic opening / closing door 11 is provided at an opening for transferring the workpiece W to / from the transfer unit 30, and the opening / closing door 11 is closed to close the heating chamber 10. In a state where the pressure is reduced by a pressure reducing device (not shown) to form a non-oxidizing atmosphere, the workpiece W carried into the heating chamber 10 from the transport unit 30 is heated by the heating device (not shown) as described above. I try to let them.

また、前記の冷却室20においては、前記の搬送ユニット30との間で被処理物Wを受け渡す開口部に密封式の開閉扉21を設け、この開閉扉21を閉じ、冷却室20内を減圧装置(図示せず)により減圧させて非酸化雰囲気にした状態で、前記のように搬送ユニット30から冷却室20内に搬入された前記の加熱された被処理物Wを冷却させるようにしている。なお、被処理物Wを冷却室20において冷却させるにあたっては、例えば、冷却室20に油冷漕(図示せず)等を設け、加熱された被処理物Wを油冷させて、被処理物Wを焼入れさせるようにすることができる。なお、被処理物Wを冷却させる方法は、油冷に限られず、水冷やガス冷却など、どのような方法であってもよい。   Further, in the cooling chamber 20, a hermetic opening / closing door 21 is provided in an opening for transferring the workpiece W to / from the transfer unit 30, and the opening / closing door 21 is closed to close the inside of the cooling chamber 20. In a state where the pressure is reduced by a pressure reducing device (not shown) to make a non-oxidizing atmosphere, the heated workpiece W carried into the cooling chamber 20 from the transport unit 30 is cooled as described above. Yes. In order to cool the workpiece W in the cooling chamber 20, for example, an oil cooler (not shown) or the like is provided in the cooling chamber 20, and the heated workpiece W is oil-cooled. W can be hardened. The method for cooling the workpiece W is not limited to oil cooling, and any method such as water cooling or gas cooling may be used.

また、前記の搬送ユニット30においては、前記の加熱室10や冷却室20と対面する部分に、この搬送ユニット30を加熱室10や冷却室20と連結させる連結部31を設けると共に、加熱室10及び冷却室20にも、搬送ユニット30の連結部31と嵌め合わせて密封状態で連結させる連結部12及び連結部22を設けている。   In the transport unit 30, a connecting portion 31 that connects the transport unit 30 to the heating chamber 10 and the cooling chamber 20 is provided at a portion facing the heating chamber 10 and the cooling chamber 20. The cooling chamber 20 is also provided with a connecting portion 12 and a connecting portion 22 that are fitted with the connecting portion 31 of the transport unit 30 and connected in a sealed state.

そして、この搬送ユニット30においては、前記の連結部31を通して前記の搬入部1と加熱室10と冷却室20との間で被処理物Wを受け渡しする受渡し室32と、受渡し室32の上方において前記の搬入部1から受渡し室32に搬入された被処理物Wを待機させる待機室33を設けると共に、前記の受渡し室32を介して前記の加熱室10や冷却室20と反対側の位置に、加熱室10において加熱された被処理物Wを非酸化雰囲気にした状態で所定の温度に保温させる保温室34を設けている。   In the transport unit 30, a delivery chamber 32 that delivers the workpiece W between the carry-in unit 1, the heating chamber 10, and the cooling chamber 20 through the connection unit 31, and above the delivery chamber 32. A standby chamber 33 is provided for waiting for the workpiece W carried into the delivery chamber 32 from the carry-in section 1, and at a position opposite to the heating chamber 10 and the cooling chamber 20 via the delivery chamber 32. In addition, there is provided a thermal insulation chamber 34 that keeps the workpiece W heated in the heating chamber 10 at a predetermined temperature in a non-oxidizing atmosphere.

また、前記の連結部31と受渡し室32との間の開口部に密封式の開閉扉35を設けると共に、受渡し室32と前記の保温室34との間の開口部にも密封式の開閉扉36を設けている。   In addition, a sealed door 35 is provided at the opening between the connecting portion 31 and the delivery chamber 32, and a sealed door is also provided at the opening between the delivery chamber 32 and the warm storage chamber 34. 36 is provided.

そして、この搬送ユニット30における前記の連結部31を加熱室10や冷却室20に連結させるにあたり、この実施形態においては、前記の搬送ユニット30にスライドベース37を設け、搬送ユニット30における受渡し室32が前記の加熱室10や冷却室20と対面する位置において、搬送ユニット30全体を加熱室10や冷却室20に向けてスライドさせて、前記のように搬送ユニット30における前記の連結部31を、加熱室10や冷却室20に設けられた連結部12や連結部22と密封状態で連結させるようにしている。   In connecting the connecting portion 31 in the transport unit 30 to the heating chamber 10 and the cooling chamber 20, in this embodiment, the transport unit 30 is provided with a slide base 37, and the delivery chamber 32 in the transport unit 30 is provided. At the position facing the heating chamber 10 or the cooling chamber 20, the entire conveyance unit 30 is slid toward the heating chamber 10 or the cooling chamber 20, and the connecting portion 31 in the conveyance unit 30 is moved as described above. The connecting portion 12 and the connecting portion 22 provided in the heating chamber 10 and the cooling chamber 20 are connected in a sealed state.

また、前記の搬送ユニット30においては、図2に示すように、前記の受渡し室32と前記の加熱室10や冷却室20や保温室34との間で被処理物Wを移送させる移送用台車41を設けると共に、前記の受渡し室32の位置において、移送用台車41の上に保持された被処理物Wを昇降させる昇降装置42を設け、この昇降装置42により、被処理物Wを受渡し室32とその上に設けられた前記の待機室33との間で移動させるようにしている。   Further, as shown in FIG. 2, in the transport unit 30, a transfer carriage for transferring the workpiece W between the delivery chamber 32 and the heating chamber 10, the cooling chamber 20, and the thermal storage chamber 34. 41 is provided, and at the position of the delivery chamber 32, a lifting device 42 for lifting the workpiece W held on the transfer carriage 41 is provided, and the lifting device 42 allows the workpiece W to be delivered to the delivery chamber. 32 and the standby chamber 33 provided thereon.

ここで、前記の移送用台車41により被処理物Wを移動させて、被処理物Wを加熱室10のセット部13や冷却室20のセット部23や保温室34のセット部34aにセットしたり、これらのセット部13,23,34aから被処理物Wを取り出したりするにあたり、図示していないが、移送用台車41に被処理物Wを昇降させる機構を設けるようにしている。また、図示していないが、前記の移送用台車41に代えて、被処理物Wを下からすくい上げる伸縮可能なアームを設けるようにすることも可能である。   Here, the workpiece W is moved by the transfer carriage 41, and the workpiece W is set in the set portion 13 of the heating chamber 10, the set portion 23 of the cooling chamber 20, and the set portion 34a of the warming chamber 34. When the workpiece W is taken out from the set parts 13, 23, 34a, a mechanism for raising and lowering the workpiece W is provided on the transfer carriage 41, although not shown. Although not shown, it is also possible to provide an extendable arm for scooping up the workpiece W from below instead of the transfer carriage 41.

また、この実施形態においては、前記の昇降装置42として、被処理物Wを両側から抱えこむように保持するアーム部42aを用いるようにしたが、昇降装置42はこのようなものに限定されず、被処理物Wを昇降させると共に、被処理物Wを上方に持ち上げた状態で保持できるものであれはどのようなものであってもよい。   Further, in this embodiment, the arm unit 42a that holds the workpiece W from both sides is used as the lifting device 42. However, the lifting device 42 is not limited to this, Any material may be used as long as the workpiece W can be moved up and down and can be held in a state where the workpiece W is lifted upward.

次に、この実施形態に係る熱処理設備において、被処理物Wを非酸化雰囲気下において熱処理して浸炭処理等を行う場合について説明する。   Next, in the heat treatment facility according to this embodiment, a case where the workpiece W is heat-treated in a non-oxidizing atmosphere to perform a carburizing process or the like will be described.

先ず、図3に示すように、前記の搬送ユニット30を、前記の搬入部1の位置に移動させ、受渡し室32と保温室34との間の開閉扉36を閉じ、保温室34を非酸化雰囲気にした状態で維持させる一方、前記の連結部31側における受渡し室32の開閉扉35を開け、前記の移送用台車41を、矢印で示すように、受渡し室32と搬入部1との間で移動させて、搬入部1における被処理物Wを、この移送用台車41により連結部31を通して受渡し室32内に搬入させる。なお、この実施形態においては、移送用台車41により、搬入部1における被処理物Wを受渡し室32内に搬入させるようにしたが、搬入部1の方に、被処理物Wを搬送ユニット30の受渡し室32内に搬入させる搬入装置(図示せず)を設けるようにすることもできる。   First, as shown in FIG. 3, the transport unit 30 is moved to the position of the carry-in unit 1, the open / close door 36 between the delivery chamber 32 and the warm chamber 34 is closed, and the warm chamber 34 is non-oxidized. While maintaining the atmosphere, the open / close door 35 of the delivery chamber 32 on the side of the connecting portion 31 is opened, and the transfer carriage 41 is placed between the delivery chamber 32 and the carry-in portion 1 as indicated by an arrow. The workpiece W in the carry-in unit 1 is carried into the delivery chamber 32 through the connecting unit 31 by the transfer carriage 41. In this embodiment, the workpiece W in the carry-in unit 1 is carried into the delivery chamber 32 by the transfer carriage 41. However, the workpiece W is moved toward the carry-in unit 1 by the transport unit 30. It is also possible to provide a carry-in device (not shown) for carrying in the delivery chamber 32.

そして、このように被処理物Wを搬送ユニット30の受渡し室32内に搬入させた後、前記の開閉扉35を閉じ、この搬送ユニット30における前記の受渡し室32及び待機室33内を減圧装置(図示せず)により減圧させて、前記の加熱室10や保温室34と同じ圧力の非酸化雰囲気にすると共に、図4に示すように、この搬送ユニット30を走行レールLに沿って移動させて適当な加熱室10の位置に導き、この搬送ユニット30全体を、矢印で示すように、加熱室10に向けてスライドさせて、前記の連結部31を加熱室10の連結部12に密封状態になるようにして連結させる。その後、このように連結部31と連結部12とにより連結された受渡し室32と加熱室10との連結部分を減圧装置(図示せず)により減圧させて、この連結部分の空間Sを、前記の加熱室10や搬送ユニット30における受渡し室32、待機室33及び保温室34と同じ圧力の非酸化雰囲気にする。   After the workpiece W is thus carried into the delivery chamber 32 of the transfer unit 30, the opening / closing door 35 is closed, and the delivery chamber 32 and the standby chamber 33 in the transfer unit 30 are reduced in pressure. (Not shown), the pressure is reduced to a non-oxidizing atmosphere having the same pressure as that of the heating chamber 10 or the thermal storage chamber 34, and the transport unit 30 is moved along the traveling rail L as shown in FIG. Then, the transfer unit 30 is entirely slid toward the heating chamber 10 as indicated by an arrow, and the connecting portion 31 is sealed to the connecting portion 12 of the heating chamber 10. Connect as follows. Thereafter, the connecting portion between the delivery chamber 32 and the heating chamber 10 thus connected by the connecting portion 31 and the connecting portion 12 is decompressed by a decompression device (not shown), and the space S of the connecting portion is The non-oxidizing atmosphere of the same pressure as the delivery chamber 32, the standby chamber 33, and the warming chamber 34 in the heating chamber 10 and the transfer unit 30 is set.

次いで、このように搬送ユニット30における受渡し室32及び待機室33内や前記の連結部分の空間Sを非酸化雰囲気及び圧力にした状態で、図5に示すように、前記の加熱室10における開閉扉11及び受渡し室32における連結部31側の開閉扉35を開け、前記の移送用台車41を受渡し室32と加熱室10との間で移動させて、被処理物Wを加熱室10内に搬入させる。   Next, in the state where the delivery chamber 32 and the standby chamber 33 in the transfer unit 30 and the space S of the connecting portion are in a non-oxidizing atmosphere and pressure, as shown in FIG. 5, the heating chamber 10 is opened and closed. The door 11 and the opening / closing door 35 on the connecting portion 31 side in the delivery chamber 32 are opened, the transfer carriage 41 is moved between the delivery chamber 32 and the heating chamber 10, and the workpiece W is moved into the heating chamber 10. Bring it in.

その後、図6に示すように、加熱室10における開閉扉11を閉じて、加熱室10内に搬入された被処理物Wを加熱処理(例えば、真空浸炭処理)させるようにすると共に、前記の受渡し室32における連結部31側の開閉扉35を閉じた後、減圧状態にある空間Sを大気圧に戻し、前記の搬送ユニット30全体を加熱室10から離れる方向にスライドさせて、搬送ユニット30を加熱室10から離間させるようにする。   Thereafter, as shown in FIG. 6, the open / close door 11 in the heating chamber 10 is closed so that the workpiece W carried into the heating chamber 10 is subjected to heat treatment (for example, vacuum carburization treatment), and After closing the open / close door 35 on the connecting portion 31 side in the delivery chamber 32, the space S in a decompressed state is returned to atmospheric pressure, and the entire transport unit 30 is slid in a direction away from the heating chamber 10, so that the transport unit 30. Is separated from the heating chamber 10.

また、必要に応じて、前記の搬送ユニット30を、前記の搬入部1と各加熱室10との間を走行させ、前記のような操作を繰り返して行い、図7に示すように、各加熱室10内に被処理物Wを搬入させて、被処理物Wを各加熱室10内において非酸化雰囲気下で加熱処理させる。   Further, if necessary, the transport unit 30 is caused to travel between the carry-in unit 1 and each heating chamber 10 and the above-described operation is repeatedly performed. As shown in FIG. The workpiece W is carried into the chamber 10 and the workpiece W is heat-treated in each heating chamber 10 in a non-oxidizing atmosphere.

そして、前記のように加熱室10内において被処理物Wを加熱処理させている間に、前記の搬送ユニット30を搬入部1の位置に移動させ、前記の図3に示したように、連結部31側における受渡し室32の開閉扉35を開け、搬入部1における被処理物Wを、移送用台車41により連結部31を通して受渡し室32内に搬入させる。   Then, while the workpiece W is being heat-treated in the heating chamber 10 as described above, the transport unit 30 is moved to the position of the carry-in unit 1 and, as shown in FIG. The opening / closing door 35 of the delivery chamber 32 on the part 31 side is opened, and the workpiece W in the carry-in unit 1 is carried into the delivery chamber 32 through the connecting part 31 by the transfer carriage 41.

その後、図8に示すように、受渡し室32内において移送用台車41の上に保持された被処理物W1を、前記の昇降装置42により上方に移動させて受渡し室32の上に設けられた前記の待機室33に待機させると共に、連結部31側における受渡し室32の開閉扉35を閉じ、この搬送ユニット30における受渡し室32及び待機室33内を減圧装置により減圧させて、前記の加熱室10や保温室34と同じ圧力の非酸化雰囲気にする。   Thereafter, as shown in FIG. 8, the workpiece W <b> 1 held on the transfer carriage 41 in the delivery chamber 32 is moved upward by the lifting device 42 and provided on the delivery chamber 32. The standby chamber 33 is made to wait, and the opening / closing door 35 of the delivery chamber 32 on the connecting portion 31 side is closed, and the delivery chamber 32 and the standby chamber 33 in the transfer unit 30 are decompressed by a decompression device, so that the heating chamber 10 and the non-oxidizing atmosphere at the same pressure as the thermal storage chamber 34.

そして、何れかの加熱室10内において被処理物W2が適切に加熱処理されると、図9に示すように、被処理物W1を待機室33に待機させた前記の搬送ユニット30を、被処理物W2が加熱処理された加熱室10の位置に移動させ、前記の図4に示した場合と同様に、搬送ユニット30全体を加熱室10に向けてスライドさせて、前記の連結部31を加熱室10の連結部12に密封状態になるようにして連結させ、受渡し室32と加熱室10との連結部分の空間Sを減圧させて、この連結部分を前記の加熱室10や搬送ユニット30における受渡し室32、待機室33及び保温室34と同じ圧力の非酸化雰囲気にする。   Then, when the workpiece W2 is appropriately heat-treated in any of the heating chambers 10, as shown in FIG. The workpiece W2 is moved to the position of the heating chamber 10 where the heat treatment is performed, and the entire transport unit 30 is slid toward the heating chamber 10 as in the case shown in FIG. It connects with the connection part 12 of the heating chamber 10 so that it may be sealed, the space S of the connection part of the delivery chamber 32 and the heating chamber 10 is decompressed, and this connection part is said heating chamber 10 or the conveyance unit 30. In the non-oxidizing atmosphere of the same pressure as the delivery chamber 32, the standby chamber 33, and the thermal storage chamber 34.

次いで、このように非酸化雰囲気にした状態で、図10に示すように、加熱室10における開閉扉11、受渡し室32における連結部31側の開閉扉35及び受渡し室32と保温室34との間の開閉扉36を開け、前記の移送用台車41を受渡し室32から加熱室10に導き、加熱処理された被処理物W2を移送用台車41に保持させ、この状態で、移送用台車41を加熱室10から受渡し室32を通して保温室34に移動させて、加熱処理された被処理物W2を移送用台車41により保温室34に搬入させた後、この移送用台車41を受渡し室32に戻すようにする。   Next, in such a non-oxidizing atmosphere, as shown in FIG. 10, the opening / closing door 11 in the heating chamber 10, the opening / closing door 35 on the connecting portion 31 side in the delivery chamber 32, the delivery chamber 32, and the storage chamber 34. The opening / closing door 36 is opened, the transfer carriage 41 is guided from the delivery chamber 32 to the heating chamber 10, and the heat-treated object W2 is held by the transfer carriage 41. In this state, the transfer carriage 41 Is transferred from the heating chamber 10 to the storage chamber 34 through the delivery chamber 32, and the heat-treated object W <b> 2 is carried into the storage chamber 34 by the transfer carriage 41, and then the transfer carriage 41 is transferred to the delivery chamber 32. Try to bring it back.

また、このように受渡し室32に移送用台車41を戻した後、図11に示すように、受渡し室32と保温室34との間の開閉扉36を閉じて、加熱処理された被処理物W2を保温室34において所定の温度に保温させると共に、前記の昇降装置42を下降させて、受渡し室32の上の待機室33に待機されていた被処理物W1を移送用台車41の上にセットし、この移送用台車41を受渡し室32と加熱室10との間で移動させて、前記の被処理物W1を加熱室10内に搬入させる。   In addition, after returning the transfer carriage 41 to the delivery chamber 32 in this way, as shown in FIG. 11, the open / close door 36 between the delivery chamber 32 and the thermal storage room 34 is closed, and the heat-treated object to be processed is obtained. While keeping W2 at a predetermined temperature in the temperature-retaining room 34, the lifting device 42 is lowered, and the workpiece W1 that has been waiting in the standby chamber 33 above the delivery chamber 32 is placed on the transfer carriage 41. The transfer carriage 41 is moved between the delivery chamber 32 and the heating chamber 10, and the workpiece W <b> 1 is carried into the heating chamber 10.

その後、図12に示すように、前記の図6の場合と同様に、加熱室10における開閉扉11を閉じて、前記のように加熱室10内に搬入された被処理物W1を加熱処理させるようにすると共に、前記の受渡し室32における連結部31側の開閉扉35を閉じた後、減圧状態にある空間Sを大気圧に戻し、この搬送ユニット30全体を、加熱室10から離れる方向にスライドさせて、搬送ユニット30を加熱室10から離間させるようにする。   Thereafter, as shown in FIG. 12, the door 11 in the heating chamber 10 is closed as in the case of FIG. 6, and the workpiece W1 carried into the heating chamber 10 is heat-treated as described above. In addition, after closing the open / close door 35 on the connecting portion 31 side in the delivery chamber 32, the space S in a decompressed state is returned to atmospheric pressure, and the entire transport unit 30 is moved away from the heating chamber 10. The conveyance unit 30 is separated from the heating chamber 10 by sliding.

そして、前記のように加熱処理された被処理物W2を保温室34において所定の温度に保温させた状態で、加熱室10から離間させた搬送ユニット30を走行レールLに沿って前記の冷却室20の位置に移動させた後、図13に示すように、この搬送ユニット30全体を冷却室20に向けてスライドさせて、前記の連結部31を冷却室20の連結部22に密封状態になるようにして連結させ、受渡し室32と冷却室20との連結部分の空間Sを減圧させて、この連結部分を、冷却室20や搬送ユニット30における受渡し室32等と同じ圧力の非酸化雰囲気にする。   And in the state which kept the to-be-processed object W2 heat-processed as mentioned above at the predetermined temperature in the heat retention chamber 34, the conveyance unit 30 spaced apart from the heating chamber 10 is made into the said cooling chamber along the running rail L. After moving to the position 20, the entire transport unit 30 is slid toward the cooling chamber 20 as shown in FIG. 13, and the connecting portion 31 is sealed to the connecting portion 22 of the cooling chamber 20. In this way, the space S of the connecting portion between the delivery chamber 32 and the cooling chamber 20 is depressurized, and this connecting portion is brought into a non-oxidizing atmosphere having the same pressure as the delivery chamber 32 and the like in the cooling chamber 20 and the transfer unit 30. To do.

次いで、図14に示すように、前記の受渡し室32と保温室34との間の開閉扉36を開けると共に、受渡し室32における連結部31側の開閉扉35と冷却室20における開閉扉21とを開け、前記の移送用台車41を受渡し室32から保温室34に移動させて、保温室34内において所定の温度に保温された被処理物W2を移送用台車41の上に保持させ、この移送用台車41を保温室34から受渡し室32を通して冷却室20に移動させて、移送用台車41の上に保持された前記の被処理物W2を冷却室20内に搬入させるようにする。   Next, as shown in FIG. 14, the opening / closing door 36 between the delivery chamber 32 and the storage chamber 34 is opened, the opening / closing door 35 on the connection portion 31 side in the delivery chamber 32, and the opening / closing door 21 in the cooling chamber 20. And the transfer carriage 41 is moved from the delivery chamber 32 to the temperature-retaining room 34, and the workpiece W2 kept at a predetermined temperature in the temperature-retaining room 34 is held on the transfer position 41. The transfer carriage 41 is moved from the storage room 34 through the delivery chamber 32 to the cooling chamber 20, so that the workpiece W <b> 2 held on the transfer carriage 41 is carried into the cooling chamber 20.

次いで、図15に示すように、受渡し室32と保温室34との間の開閉扉35を閉じると共に、冷却室20における開閉扉21を閉じ、冷却室20内に搬入された被処理物W2を、油冷漕(図示せず)内に浸漬させて油冷させて、被処理物W2を焼入れさせるようにする一方、前記の受渡し室32における連結部31側の開閉扉35を閉じた後、減圧状態にある空間Sを大気圧に戻し、搬送ユニット30全体を冷却室20から離れる方向にスライドさせて、搬送ユニット30を冷却室20から離間させるようにする。なお、冷却室20において冷却された後の被処理物W2は次の工程に移動される。   Next, as shown in FIG. 15, the open / close door 35 between the delivery chamber 32 and the storage chamber 34 is closed, the open / close door 21 in the cooling chamber 20 is closed, and the workpiece W2 carried into the cooling chamber 20 is moved. After immersing in an oil cooler (not shown) and oil cooling to quench the workpiece W2, the closing door 35 on the connecting portion 31 side in the delivery chamber 32 is closed, The space S in the decompressed state is returned to atmospheric pressure, and the entire transport unit 30 is slid in a direction away from the cooling chamber 20 so that the transport unit 30 is separated from the cooling chamber 20. The workpiece W2 after being cooled in the cooling chamber 20 is moved to the next step.

その後、再び図8に示すように、搬送ユニット30を搬入部1の位置に導き、この搬入部1から受渡し室32内に搬入された被処理物W1を、昇降装置42により受渡し室32の上に設けられた待機室33に待機させた状態にし、他の加熱室10内において被処理物W2が加熱処理されると、この加熱室10の位置に前記の搬送ユニット30を移動させ、この加熱室10内において加熱処理された被処理物W2を、前記のように加熱室10から保温室34内に搬入させて所定の温度に保温させる一方、待機室33に待機されている被処理物W1を、加熱処理された被処理物W2が搬出された加熱室10内に搬入させ、その後、保温室34内において所定の温度に保温された被処理物W2を冷却室20内に搬入させて冷却させるようにし、このような操作を繰り返して行うようにする。   Thereafter, as shown in FIG. 8 again, the conveyance unit 30 is guided to the position of the carry-in unit 1, and the workpiece W1 carried into the delivery chamber 32 from the carry-in unit 1 is placed on the delivery chamber 32 by the lifting device 42. When the workpiece W2 is heated in the other heating chamber 10, the transfer unit 30 is moved to the position of the heating chamber 10, and the heating unit 10 is moved to the heating chamber 10. The workpiece W2 heated in the chamber 10 is carried from the heating chamber 10 into the warming chamber 34 as described above and kept at a predetermined temperature, while the workpiece W1 waiting in the standby chamber 33 is kept. Is carried into the heating chamber 10 where the heat-treated workpiece W2 is carried out, and then the workpiece W2 kept at a predetermined temperature in the temperature-retaining room 34 is carried into the cooling chamber 20 for cooling. Let this To perform repeat the cormorant Do operation.

このようにすると、加熱処理された被処理物W2を搬送ユニット30の保温室34に搬入させた後、この加熱室10に対して待機室33に待機されている新たな被処理物W1を速やかに搬入させて、この加熱室10内において新たな被処理物W1を加熱処理させることができ、加熱室10内に新たな被処理物W1を搬入させる際に、搬送ユニット30を搬入部1に移動させることなく、そのままの状態で、新たな被処理物W1を加熱室10内に搬入させることができ、従来のものに比べて、加熱された被処理物W2を取り出した後の加熱室10に対して、新たな被処理物W1を搬入させて加熱処理させるまでの時間を大幅に短縮することができ、生産性が著しく向上する。   In this way, after the heat-treated object W2 is carried into the temperature-retaining room 34 of the transport unit 30, a new object W1 that is waiting in the standby chamber 33 with respect to the heating chamber 10 is quickly received. In this heating chamber 10, a new workpiece W 1 can be heat-treated. When the new workpiece W 1 is carried into the heating chamber 10, the conveyance unit 30 is brought into the loading section 1. A new workpiece W1 can be carried into the heating chamber 10 as it is without being moved, and the heating chamber 10 after taking out the heated workpiece W2 as compared with the conventional one. On the other hand, it is possible to significantly shorten the time from the introduction of a new workpiece W1 to the heat treatment, and the productivity is remarkably improved.

また、前記のように搬入部1から搬入された被処理物W1を待機室33に待機させた状態で、前記の連結部31を加熱室10に連結させ、加熱室10において非酸化雰囲気下で加熱された被処理物W2を、非酸化雰囲気下において、連結部31から受渡し室32を経由して保温室34に導くと共に、待機室33に待機されている被処理物W1を、受渡し室32を経由して連結部31から加熱室10内に搬入させるようにしたため、加熱室10内に新たな被処理物W1を搬入させる際に、従来のように、搬送ユニット30内や連結部分を大気圧に戻して離間させたり、新たに非酸化雰囲気にしたりする必要がなくなり、加熱室10内に新たな被処理物W1を搬入させるための時間をさらに短縮させることができ、浸炭焼入れ等の熱処理がさらに効率よく行えるようになる。   Moreover, in the state which made the to-be-processed object W1 carried in from the carrying-in part 1 wait in the waiting chamber 33 as mentioned above, the said connection part 31 is connected to the heating chamber 10, and it is a non-oxidizing atmosphere in the heating chamber 10. In a non-oxidizing atmosphere, the heated workpiece W2 is guided from the connecting portion 31 to the storage chamber 34 via the delivery chamber 32, and the workpiece W1 waiting in the standby chamber 33 is transferred to the delivery chamber 32. Therefore, when a new workpiece W1 is carried into the heating chamber 10, the inside of the transport unit 30 or the connecting portion is made large as in the prior art. There is no need to return to the atmospheric pressure and separate it, or to make a new non-oxidizing atmosphere, and it is possible to further reduce the time for bringing the new workpiece W1 into the heating chamber 10, and heat treatment such as carburizing and quenching. But more So that the rate can be performed well.

なお、前記の実施形態における熱処理設備においては、前記の搬送ユニット30において、加熱された被処理物Wを所定の温度に保温させる保温室34を、前記の受渡し室32を介して加熱室10や冷却室20と反対側の位置に設けるようにしたが、図16及び図17に示すように、前記の受渡し室32に対して、保温室34を搬送ユニット30の移動方向(走行レールLに沿った方向)側の位置に設けるようにすることもできる。このようにすると、搬送ユニット30において、保温室34が加熱室10や冷却室20と反対側に突出するということがなく、搬送ユニット30を、加熱室10と冷却室20との間を移動させるための移動用のスペースを小さくすることができると共に、前記の加熱室10や冷却室20を、走行レールLを介して搬送ユニット30の移動方向両側の位置に設けることも可能になる。   In the heat treatment facility in the above-described embodiment, in the transport unit 30, the warming chamber 34 that keeps the heated workpiece W at a predetermined temperature is connected to the heating chamber 10 or the like via the delivery chamber 32. Although it is provided at a position opposite to the cooling chamber 20, as shown in FIG. 16 and FIG. It can also be provided at a position on the other side. If it does in this way, in the conveyance unit 30, the thermal insulation 34 does not protrude on the opposite side to the heating chamber 10 or the cooling chamber 20, and the conveyance unit 30 is moved between the heating chamber 10 and the cooling chamber 20. Therefore, the heating chamber 10 and the cooling chamber 20 can be provided at positions on both sides in the moving direction of the transport unit 30 via the traveling rail L.

また、前記の実施形態における熱処理設備においては、前記の搬送ユニット30において、受渡し室32に搬入された被処理物Wを待機させる待機室33を、受渡し室32の上に設けるようにしたが、図17や図18に示すように、前記の受渡し室32に対して、待機室33を搬送ユニット30の移動方向(走行レールLに沿った方向)側の位置に設けるようにすることもできる。   Further, in the heat treatment facility in the above embodiment, in the transfer unit 30, the standby chamber 33 that waits for the workpiece W carried into the delivery chamber 32 is provided on the delivery chamber 32. As shown in FIGS. 17 and 18, the standby chamber 33 may be provided at a position on the moving direction (direction along the traveling rail L) side of the transfer unit 30 with respect to the delivery chamber 32.

さらに、図19に示すように、前記の保温室34を、前記の受渡し室32に対して搬送ユニット30の移動方向側の位置に設ける一方、前記の待機室33を、受渡し室32を介して加熱室10や冷却室20と反対側の位置に設けるようにすることも可能である。   Further, as shown in FIG. 19, the warm storage chamber 34 is provided at a position on the moving direction side of the transfer unit 30 with respect to the delivery chamber 32, while the standby chamber 33 is provided via the delivery chamber 32. It is also possible to provide it at a position opposite to the heating chamber 10 and the cooling chamber 20.

ここで、前記のように保温室34や待機室33を、前記の受渡し室32に対して搬送ユニット30の移動方向側の位置に設けた場合、移送用台車41により受渡し室32に搬入された被処理物Wを、この受渡し室32と前記の保温室34や待機室33との間で移送させるために、例えば、図16〜図19に示すように、前記の受渡し室32に回転装置43を設け、この回転装置43の上に被処理物Wを保持した移送用台車41をセットさせた状態で、この回転装置43を回転させて、被処理物Wを保持した移送用台車41が搬送ユニット30の移動方向に向かうようにし、この移送用台車41により被処理物Wを、前記の受渡し室32と前記の保温室34や待機室33との間で移送させるようにすることができる。   Here, when the warming room 34 and the waiting room 33 are provided at a position on the moving direction side of the transfer unit 30 with respect to the delivery chamber 32 as described above, they are carried into the delivery chamber 32 by the transfer carriage 41. In order to transfer the workpiece W between the delivery chamber 32 and the storage chamber 34 or the standby chamber 33, for example, as shown in FIGS. The transfer carriage 41 holding the workpiece W is conveyed by rotating the rotary device 43 in a state where the transfer carriage 41 holding the workpiece W is set on the rotation device 43. It can be made to move to the moving direction of the unit 30, and the to-be-processed object W can be made to transfer between the said delivery chamber 32, the said warm storage chamber 34, and the waiting room 33 by this trolley | bogie 41 for transfer.

また、前記の実施形態においては、搬送ユニット30の連結部31と受渡し室32との間の開口部に開閉扉35を設けると共に、受渡し室32と前記の保温室34との間の開口部にも開閉扉36を設けるようにしたが、図20に示すように、連結部31と受渡し室32との間の開口部における開閉扉35をなくし、受渡し室32と前記の保温室34との間の開口部にだけ開閉扉36を設けるようにすることもできる。   Moreover, in the said embodiment, while providing the opening-and-closing door 35 in the opening part between the connection part 31 of the conveyance unit 30, and the delivery chamber 32, it is in the opening part between the delivery chamber 32 and the said thermal storage 34. Although the opening / closing door 36 is also provided, as shown in FIG. 20, the opening / closing door 35 in the opening between the connecting portion 31 and the delivery chamber 32 is eliminated, and the space between the delivery chamber 32 and the above-described warm storage chamber 34 is eliminated. The opening / closing door 36 may be provided only at the opening.

1 搬入部
10 加熱室
11 開閉扉
12 連結部
13 セット部
20 冷却室
21 開閉扉
22 連結部
23 セット部
30 搬送ユニット
31 連結部
32 受渡し室
33 待機室
34 保温室
34a セット部
35,36 開閉扉
37 スライドベース
41 移送用台車
42 昇降装置
42a アーム部
43 回転装置
L 走行レール
S 連結部分の空間
W,W1,W2 被処理物
DESCRIPTION OF SYMBOLS 1 Carry-in part 10 Heating chamber 11 Opening / closing door 12 Connection part 13 Set part 20 Cooling chamber 21 Opening / closing door 22 Connection part 23 Set part 30 Transfer unit 31 Connection part 32 Delivery room 33 Waiting room 34 Warm storage 34a Set part 35, 36 Open / close door 37 Slide base 41 Transfer carriage 42 Lifting device 42a Arm unit 43 Rotating device L Traveling rail S Space of connecting part W, W1, W2

Claims (5)

被処理物を搬入させる搬入部と、被処理物を加熱させる加熱室と、加熱された被処理物を冷却させる冷却室とが分離して設けられると共に、前記の搬入部と加熱室と冷却室との間を移動して、搬入部から搬入された被処理物を加熱室に搬送させると共に、加熱室において加熱された被処理物を冷却室に搬送させる搬送ユニットが設けられた熱処理設備において、前記の搬送ユニットに、前記の搬入部と加熱室と冷却室との間で被処理物を受け渡しする受渡し室と、前記の搬入部から受渡し室に搬入された被処理物を待機させる待機室と、前記の加熱室において加熱されて受渡し室に搬入された被処理物を所定の温度で保温させる保温室を設けたことを特徴とする熱処理設備。   A carry-in unit for carrying in the workpiece, a heating chamber for heating the workpiece, and a cooling chamber for cooling the heated workpiece are provided separately, and the carry-in portion, the heating chamber, and the cooling chamber are provided. In the heat treatment equipment provided with a transport unit for transporting the object to be processed carried from the carry-in unit to the heating chamber and conveying the object to be processed heated in the heating chamber to the cooling chamber, A delivery chamber for delivering a workpiece between the carry-in unit, the heating chamber and the cooling chamber, and a standby chamber for waiting for the workpiece carried into the delivery chamber from the carry-in unit; A heat treatment facility characterized in that a heat-retaining room is provided for keeping the object to be processed heated in the heating chamber and carried into the delivery chamber at a predetermined temperature. 請求項1に記載の熱処理設備において、前記の搬送ユニットにおける前記の待機室を、前記の受渡し室の上方に設けたことを特徴とする熱処理設備。   2. The heat treatment facility according to claim 1, wherein the standby chamber in the transfer unit is provided above the delivery chamber. 請求項1又は請求項2に記載の熱処理設備において、前記の搬送ユニットにおける受渡し室を、前記の加熱室及び冷却室に密封状態で連結させる連結部を設け、前記の搬入部から搬入された被処理物を待機室に待機させた状態で、前記の連結部を前記の加熱室に連結させ、加熱室において非酸化雰囲気下で加熱された被処理物を、非酸化雰囲気下において、前記の連結部から前記の受渡し室を経由して前記の保温室に導くと共に、前記の待機室に待機されている被処理物を、受渡し室を経由して連結部から加熱室内に搬入させる一方、前記の連結部を前記の冷却室に連結させ、前記の保温室において非酸化雰囲気下で所定の温度に保温された被処理物を、非酸化雰囲気下において前記の受渡し室を経由して前記の連結部から冷却室に導くことを特徴とする熱処理設備。   The heat treatment equipment according to claim 1 or 2, wherein a connecting portion for connecting the delivery chamber in the transfer unit in a sealed state to the heating chamber and the cooling chamber is provided, and the object carried from the carry-in portion is provided. In a state where the processing object is kept waiting in the standby chamber, the connecting portion is connected to the heating chamber, and the workpiece heated in the non-oxidizing atmosphere in the heating chamber is connected to the connection in the non-oxidizing atmosphere. The workpiece is guided to the warming chamber via the delivery chamber from the section, and the object to be processed waiting in the standby chamber is carried into the heating chamber from the connection section via the delivery chamber. A connecting part is connected to the cooling chamber, and the object to be processed, which is kept at a predetermined temperature in a non-oxidizing atmosphere in the temperature-retaining room, is transferred to the connecting part via the delivery chamber in a non-oxidizing atmosphere. Leading to the cooling chamber Heat treatment equipment which is characterized. 請求項3に記載の熱処理設備において、前記の加熱室と冷却室とにそれぞれ密封式の開閉扉を設け、前記の搬送ユニットの受渡し室との間で被処理物を受け渡す際に、それぞれ前記の開閉扉を開閉させるようにすると共に、前記の搬送ユニットにおける受渡し室と保温室との間に密封式の開閉扉を設け、受渡し室と保温室との間で被処理物を移動させる際に、この開閉扉を開閉させることを特徴とする熱処理設備。   In the heat treatment facility according to claim 3, each of the heating chamber and the cooling chamber is provided with a hermetic opening / closing door, and when the workpiece is transferred to and from the transfer chamber of the transfer unit, When the workpiece is moved between the delivery chamber and the thermal storage room, a sealing type open / close door is provided between the delivery room and the thermal storage room in the transfer unit. A heat treatment facility characterized by opening and closing the door. 請求項3又は請求項4に記載の熱処理設備において、前記の連結部と受渡し室との間に密封式の開閉扉を設け、受渡し室と前記の加熱室及び冷却室との間で被処理物を受け渡す際に、この開閉扉を開閉させることを特徴とする熱処理設備。   5. The heat treatment facility according to claim 3, wherein a sealed opening / closing door is provided between the connection portion and the delivery chamber, and an object to be processed is provided between the delivery chamber and the heating chamber and the cooling chamber. A heat treatment facility that opens and closes the door when handing over.
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