WO2017130942A1 - Dispositif de balayage optique - Google Patents

Dispositif de balayage optique Download PDF

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Publication number
WO2017130942A1
WO2017130942A1 PCT/JP2017/002292 JP2017002292W WO2017130942A1 WO 2017130942 A1 WO2017130942 A1 WO 2017130942A1 JP 2017002292 W JP2017002292 W JP 2017002292W WO 2017130942 A1 WO2017130942 A1 WO 2017130942A1
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WO
WIPO (PCT)
Prior art keywords
rotation axis
reflecting mirror
horizontal rotation
reflecting
horizontal
Prior art date
Application number
PCT/JP2017/002292
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English (en)
Japanese (ja)
Inventor
幸男 篠塚
Original Assignee
シナノケンシ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シナノケンシ株式会社 filed Critical シナノケンシ株式会社
Publication of WO2017130942A1 publication Critical patent/WO2017130942A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present invention relates to an optical scanning device.
  • FIG. 7 shows a schematic configuration diagram of the optical scanning device disclosed in Patent Document 1 and Patent Document 2.
  • the flat reflector 10 is provided so as to be rotatable about a vertical rotation axis Z and to be rotatable about a horizontal rotation axis Y.
  • the optical scanning device 2 is provided with an electric motor (not shown) for rotating the flat reflector 10 about the vertical rotation axis Z and the horizontal rotation axis Y.
  • the electric motor is disposed below the flat reflector 10, and the center of the electric motor is a hollow shaft 3.
  • a mirror 5 is arranged below the hollow shaft 3 of the electric motor.
  • a laser light emitting device 6 that makes scanning light incident on the mirror 5 is disposed at a position off the lower side of the hollow shaft 3.
  • a light receiving optical system 7 is provided below the mirror 5, and a laser light receiving device 8 is provided below the light receiving optical system 7.
  • Scanning light emitted from the laser light emitting device 6 in the horizontal direction is reflected by the mirror 5 and travels upward.
  • the scanning light reflected by the mirror 5 passes through the hollow shaft 3 and is reflected by the flat reflector 10.
  • the scanning light reflected by the flat reflector 10 is irradiated to the object 11.
  • the reflected light reflected by the object 11 returns to the flat reflector 10 as scattered light. At this time, since the reflected light is scattered when reflected by the object 11, the reflected light is received by the entire flat reflector 10. The reflected light is reflected by the flat reflector 10 and travels downward. The reflected light reflected by the flat reflecting mirror 10 passes through the hollow shaft 3 and enters the light receiving optical system 7. Then, the reflected light enters the laser light receiving device 8 through the light receiving optical system 7. A data processing device (not shown) is connected to the laser light receiving device 8.
  • Information relating to the scanning light is input from the laser light emitting device 6 and the laser light receiving device 8 to this data processing device, and further information relating to the direction in which the reflecting surface of the flat reflector 10 is facing from a rotary encoder (not shown). .
  • the data processing apparatus can calculate the reflected light as three-dimensional coordinate data.
  • the point cloud data obtained by acquiring a plurality of the three-dimensional coordinate data is processed, and the shape of the object 11 is measured.
  • JP 2010-527024 A Japanese Patent No. 5620603
  • FIG. 8 shows a state in which the angle of the reflecting surface of the flat plate reflecting mirror 10 changes as the flat plate reflecting mirror 10 rotates about the horizontal rotation axis Y in the conventional optical scanning device shown in FIG.
  • the reflection surface of the flat reflector 10 is at an angle close to the vertical surface as compared with the state of FIG. 7.
  • the area where light can be received is reduced by reducing the projected area of the flat reflector 10 as viewed from the reflection point of the object 11.
  • the measurable range is determined by the length of the flat reflector.
  • the load on the bearing and the like is increased, resulting in a structurally high cost, and the air resistance is increased, so that high-speed rotation is difficult and generation of noise and vibration is a concern.
  • the present invention is made to solve the above-mentioned problems, and the object of the present invention is to reduce the light receiving area of the reflected light from the object depending on the rotation angle without using a reflector that is long in the direction perpendicular to the horizontal rotation axis and has a large area.
  • An object of the present invention is to provide an optical scanning device that can prevent the measurable range from becoming narrow by preventing the change.
  • the motor and the vertical rotation axis having the vertical direction as the axis can be rotated, and the horizontal rotation axis having the horizontal direction as the axis can be rotated.
  • a reflecting mirror disposed at a position where the scanning light enters the reflecting surface along a direction parallel to the axis, and a drive transmission unit that transmits the rotational drive of the electric motor to the vertical rotational axis and the horizontal rotational axis.
  • the horizontal rotation axis has a predetermined angle other than a right angle or a parallel angle with respect to the reflecting surface of the reflecting mirror.
  • the range in which the reflected light of the reflecting surface of the reflecting mirror that rotates about the horizontal rotation axis can be received can be the same area regardless of the rotation angle, and the amount of reflected light that can be received is reduced. You can avoid it.
  • the reflecting mirror has a reflecting surface in which a tip of a cylindrical rod extending along the horizontal rotation axis direction has a reflection surface formed at a predetermined angle other than a right angle or a parallel angle with respect to the horizontal rotation axis. It is good also as a feature. According to this configuration, since the reflecting surface and the rotating shaft are composed of a single rod, when rotating around the horizontal rotating shaft, air resistance can be reduced, and wind noise can be generated. Can be prevented.
  • the horizontal rotation axis may pass through the center of the reflecting surface of the reflecting mirror, and the scanning light may enter the center of the reflecting surface of the reflecting mirror. According to this configuration, since the reflected light is also reflected around the center of the reflecting surface, the light-receiving area on the reflecting surface of the reflecting mirror can be increased, and the amount of reflected light can be increased.
  • the predetermined angle may be 45 degrees.
  • the measurable range can be prevented from being narrowed without using a reflecting mirror that is long in the direction perpendicular to the horizontal rotating axis and has a large area as a reflecting mirror that rotates about the horizontal rotating axis.
  • FIG. 1 shows a schematic configuration of the optical scanning device of the present embodiment, and first, an optical system will be mainly described.
  • the optical scanning device 30 irradiates an object around the optical scanning device 30 with the scanning light, acquires the shape of the surrounding space as point cloud data by reflected light from the surroundings, and measures the shape of the object. is there.
  • scanning light laser light is generally used.
  • the optical scanning device 30 includes an electric motor 32 and a reflecting mirror 34 disposed above the electric motor 32.
  • the reflecting mirror 34 irradiates the object (not shown) with scanning light and receives reflected light from the object.
  • the reflecting mirror 34 is rotatable about a horizontal rotation axis Y, and is provided so as to be rotatable about a vertical rotation axis Z integrally with a rotation unit 38 described later.
  • the horizontal rotation axis Y is provided so as to pass through the center of the reflecting surface of the reflecting mirror 34
  • the vertical rotating axis Z is also provided so as to pass through the center of the reflecting surface of the reflecting mirror 34.
  • the rotating shaft of the electric motor 32 is a hollow shaft 36 whose center is hollow.
  • a rotating portion 38 (see FIGS. 2 and 3) that rotates integrally with the hollow shaft 36 on a horizontal plane is fixed to the upper end portion of the hollow shaft 36.
  • a reflecting mirror 34 is attached to the rotating unit 38.
  • a lower reflecting mirror 45 is disposed below the hollow shaft 36 of the electric motor 32.
  • the lower reflecting mirror 45 has a function of introducing scanning light into the hollow shaft 36 and reflecting the reflected light that has passed through the hollow shaft 36 in the lateral direction.
  • the laser light emitting device 26 that outputs the scanning light is provided not at a position directly below the electric motor 32 but at a position shifted in the lateral direction.
  • the laser light emitting device 26 makes the scanning light incident on the lower reflecting mirror 45 through the plurality of mirrors 25.
  • the reflected light that has passed through the hollow shaft 36 vertically downward is reflected by the lower reflecting mirror 45 and enters the laser light receiving device 28 via the light receiving optical system 27.
  • a data processing device (not shown) is connected to the laser light receiving device 28, and the distance from the reflected light received by the laser light receiving device 28 to the measurement object can be calculated. By detecting the angle of the rotation axis, the direction in which the scanning light is irradiated can be calculated. It is possible to calculate the three-dimensional coordinate data based on these distance and direction information.
  • the data processing apparatus may be an ordinary personal computer or a dedicated machine for data processing.
  • Scanning light emitted from the upper end portion of the hollow shaft 36 enters the reflecting surface of the reflecting mirror 34 through an optical path having a plurality of reflecting mirrors.
  • the scanning light is incident on the reflecting mirror 34 in parallel with the horizontal rotation axis Y that is a rotation axis along the horizontal direction.
  • the scanning light is preferably incident on the same straight line with respect to the horizontal rotation axis Y, that is, incident on the center of the reflecting surface of the reflecting mirror 34.
  • a first reflecting mirror 48 is disposed immediately above the hollow shaft 36.
  • the first reflecting mirror 48 is arranged so that the reflecting surface thereof is inclined at an angle of 45 degrees downward with respect to the axis extending in the vertical direction of the hollow shaft 36. Scanning light incident from below through the hollow shaft 36 is reflected by the first reflecting mirror 48 in the horizontal direction.
  • a second reflecting mirror 49 for reflecting the scanning light in the vertical direction after being reflected in the horizontal direction by the first reflecting mirror 48 is provided.
  • the reflecting surface of the second reflecting mirror 49 is disposed at an angle inclined upward by 45 degrees with respect to the horizontal direction.
  • the second reflecting mirror 49 reflects the scanning light reflected from the first reflecting mirror 48 and incident in the horizontal direction vertically upward.
  • a third reflecting mirror 50 is disposed above the second reflecting mirror 49.
  • the third reflecting mirror 50 reflects the scanning light reflected by the second reflecting mirror 49 and incident vertically upward in the horizontal direction.
  • the reflecting surface of the third reflecting mirror 50 is disposed at an angle inclined downward by 45 degrees with respect to an axis extending in the vertical direction.
  • the scanning light reflected by the third reflecting mirror 50 is collinear with the axis of the horizontal rotation axis of the reflecting mirror 34 and is incident on the reflecting surface of the reflecting mirror 34.
  • the first reflecting mirror 48, the second reflecting mirror 49, and the third reflecting mirror 50 are fixed to the rotating unit 38, and rotate integrally with the rotating unit 38 around the vertical rotation axis Z.
  • the optical path of the reflected light reflected by the object will be described.
  • the scanning light is incident on the object, the scanning light is scattered and reflected by the object.
  • the reflected light is reflected by the reflecting surface of the reflecting mirror 34 and enters the third reflecting mirror 50.
  • the third reflecting mirror 50 reflects the reflected light vertically downward.
  • the reflected light reflected by the third reflecting mirror 50 is reflected in the horizontal direction by the second reflecting mirror 49 and enters the first reflecting mirror 48.
  • the first reflecting mirror 48 reflects the reflected light vertically downward.
  • the reflected light reflected by the first reflecting mirror 48 passes through the hollow shaft 36, passes through the light receiving optical system 27, is condensed, and enters the laser light receiving device 28.
  • the light receiving optical system 27 includes a convex lens that collects the reflected light.
  • FIG. 2 is a perspective view of the optical scanning device according to the present embodiment
  • FIG. 3 is a side view thereof, and the mechanical configuration of the optical scanning device according to the present embodiment will be described.
  • the reflecting mirror 34 rotates around the horizontal rotation axis Y, which is a rotation axis facing in the horizontal direction, and scans the scanning light in the vertical direction.
  • the reflecting mirror 34 is integrated with the rotating unit 38 and rotates around the vertical rotation axis Z that is a rotation axis facing in the vertical direction to scan the scanning light in the horizontal direction.
  • the vertical rotation axis of this embodiment is a hollow shaft 36.
  • the optical scanning device 30 is provided with a base portion 39 at the lowermost portion, and the base portion 39 is configured as an installation surface on the ground or floor surface.
  • the electric motor 32 is disposed on a base 40 provided above a predetermined distance from the base portion 39.
  • Support pillars 41 for supporting the base 40 are respectively arranged at the four corners of the upper surface of the base portion 39.
  • the optical scanning device 30 is provided with a drive transmission unit 52 that transmits the rotational drive of one electric motor 32 to both the vertical rotation axis Z and the horizontal rotation axis Y.
  • the drive transmission unit 52 includes a fixed gear 54 and a rotating gear 55.
  • the fixed gear 54 and the rotating gear 55 are bevel gears that mesh with each other.
  • the fixed gear 54 is a ring-shaped bevel gear and is disposed around the hollow shaft 36.
  • the fixed gear 54 is fixed to the upper surface of the electric motor 32 and does not rotate. In the drawing, the fixed gear 54 is illustrated as a transparent member, but actually it is not necessary to be transparent.
  • the rotating gear 55 is attached to the rotating portion 38 so as to be rotatable by a shaft 57 above the teeth of the fixed gear 54.
  • the axis of the shaft 57 of the rotary gear 55 coincides with the horizontal rotation axis Y.
  • the rotating gear 55 meshes with the fixed gear 54 and rotates in the vertical plane.
  • the rotating portion 38 is fixed to the hollow shaft 36, and rotates with the hollow shaft 36 as a rotation axis along with the hollow shaft 36 when the electric motor 32 is driven to rotate the hollow shaft 36.
  • the rotation gear 55 meshed with the fixed gear 54 rotates about a shaft 57 having the horizontal rotation axis Y as an axis.
  • the shaft 57 is connected to the end of the reflecting mirror 34 opposite to the side where the reflecting surface is formed. For this reason, the reflecting mirror 34 rotates around the shaft 57 centering on the horizontal rotation axis Y as the rotating gear 55 rotates.
  • the rotating portion 38 is disposed at a position opposed to each other with the hollow shaft 36 interposed therebetween, and connects the two column portions 58 and 59 protruding upward and the upper ends of the two column portions 58 and 59, respectively. And a beam portion 60.
  • the rotary gear 55 is attached to the column portion 59 so as to rotate the shaft 57.
  • the first reflecting mirror 48 described above is attached to the lower side of the column portion 59, and the second reflecting mirror 49 is attached to the column portion 58 at a position facing the first reflecting mirror 48 in the horizontal direction.
  • the third reflecting mirror 50 is mounted on the axis of the shaft 57 in the column portion 58, that is, on the rotation axis of the reflecting mirror 34 and above the second reflecting mirror 49.
  • the position directly above the reflecting mirror 34 is formed as a narrow portion 62 whose width is narrower than other portions. This is to reduce the vignetting caused by the beam portion 60.
  • the reflecting mirror 34 of the present embodiment is a rod mirror having a reflecting surface in which the tip of a cylindrical rod is inclined at a predetermined angle that is an angle other than perpendicular or parallel to the axial direction of the rod (horizontal rotation axis Y). Adopted.
  • the rod mirror is a reflecting surface formed by cutting the tip of a rod formed of glass or the like at a predetermined angle and depositing a reflecting film such as metal on the cutting surface.
  • the predetermined angle is 45 °, but the predetermined angle is not limited to 45 °.
  • the horizontal rotation axis Y of the reflecting mirror 34 is provided so as to coincide with the axis of the rod and pass through the center of the reflecting surface.
  • the scanning light incident in parallel with the horizontal rotation axis Y is directly below regardless of the rotation angle of the horizontal rotation axis Y. Except for this, it can scan evenly.
  • the vicinity of the zenith direction could not be measured with the configuration described in the prior art, but in the present invention, the zenith direction can also be measured.
  • the reflected light reflected from the object does not change the light receiving area of the reflected light depending on the angle even if the reflecting mirror 34 rotates about the horizontal rotation axis Y. it can. For this reason, the point cloud data based on reflected light can be acquired reliably.
  • the light receiving area can be made constant without changing depending on the rotation angle without increasing the area of the reflecting surface of the reflecting mirror, so that the structure can be realized at low cost and the air resistance is not increased. It is possible to prevent noise and vibration.
  • a rotating shaft 66 arranged on the same straight line as the horizontal rotating shaft is attached to a flat reflector 64 having a reflecting surface at a predetermined angle with respect to the horizontal rotating shaft directed in the horizontal direction. It may be a configuration.
  • optical scanning device of the present invention is not limited to the laser light as the scanning light, and light emitted by another light emitting element may be adopted.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

La présente invention aborde le problème de la réalisation d'un dispositif de balayage optique dans lequel, sans l'utilisation d'un miroir réfléchissant ayant une grande surface, la surface de réception de lumière pour la lumière réfléchie en provenance d'un objet n'est pas rendue plus petite en raison de l'angle de rotation, de sorte qu'il est possible de ne pas réduire la précision de mesure. La solution réalisée par l'invention est un dispositif de balayage optique comprenant : un moteur électrique (32) ; un miroir réfléchissant (34) qui peut tourner autour d'un axe de rotation vertical (Z) ayant comme axe la direction verticale et qui peut tourner autour d'un axe de rotation horizontal (Y) ayant comme axe la direction horizontale, ledit miroir réfléchissant (34) étant disposé au niveau d'une position à laquelle la lumière de balayage est incidente sur le plan de réflexion dans une direction parallèle à l'axe de rotation horizontal (Y) ; et une unité de transmission d'entraînement (52) qui transmet l'entraînement en rotation du moteur électrique (32) à l'axe de rotation vertical (Z) et à l'axe de rotation horizontal (Y). L'axe de rotation horizontal (Y) possède un angle prédéterminé différent d'un angle qui est perpendiculaire ou parallèle par rapport au plan de réflexion du miroir réfléchissant (34).
PCT/JP2017/002292 2016-01-28 2017-01-24 Dispositif de balayage optique WO2017130942A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-014900 2016-01-28
JP2016014900A JP6839335B2 (ja) 2016-01-28 2016-01-28 光走査装置

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WO2017130942A1 true WO2017130942A1 (fr) 2017-08-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112213736A (zh) * 2020-07-17 2021-01-12 中国工程物理研究院应用电子学研究所 一种三维目标成像激光雷达装置及目标探测方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6709471B2 (ja) 2018-08-02 2020-06-17 クモノスコーポレーション株式会社 三次元レーザー光走査装置
CN113124774B (zh) * 2021-04-08 2023-03-28 西安应用光学研究所 一种曲面镜面形误差直接测量及三维面形扫描系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508695A (ja) * 2009-11-20 2013-03-07 ファロ テクノロジーズ インコーポレーテッド 環境を光学的に走査し測定する装置
WO2015115643A1 (fr) * 2014-01-31 2015-08-06 株式会社デンソーウェーブ Dispositif radar à laser
JP2015197315A (ja) * 2014-03-31 2015-11-09 中西　健 螺旋状走査機構及び三次元測位装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013508695A (ja) * 2009-11-20 2013-03-07 ファロ テクノロジーズ インコーポレーテッド 環境を光学的に走査し測定する装置
WO2015115643A1 (fr) * 2014-01-31 2015-08-06 株式会社デンソーウェーブ Dispositif radar à laser
JP2015197315A (ja) * 2014-03-31 2015-11-09 中西　健 螺旋状走査機構及び三次元測位装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112213736A (zh) * 2020-07-17 2021-01-12 中国工程物理研究院应用电子学研究所 一种三维目标成像激光雷达装置及目标探测方法

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JP2017134293A (ja) 2017-08-03
JP6839335B2 (ja) 2021-03-10

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