WO2017126877A1 - Broche d'inspection de caractéristique électrique et unité d'inspection l'utilisant - Google Patents

Broche d'inspection de caractéristique électrique et unité d'inspection l'utilisant Download PDF

Info

Publication number
WO2017126877A1
WO2017126877A1 PCT/KR2017/000593 KR2017000593W WO2017126877A1 WO 2017126877 A1 WO2017126877 A1 WO 2017126877A1 KR 2017000593 W KR2017000593 W KR 2017000593W WO 2017126877 A1 WO2017126877 A1 WO 2017126877A1
Authority
WO
WIPO (PCT)
Prior art keywords
pin
conductive
pair
test
pins
Prior art date
Application number
PCT/KR2017/000593
Other languages
English (en)
Korean (ko)
Inventor
임경숙
오재숙
Original Assignee
임경숙
오재숙
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160006452A external-priority patent/KR101775978B1/ko
Priority claimed from KR1020160009384A external-priority patent/KR101775983B1/ko
Application filed by 임경숙, 오재숙 filed Critical 임경숙
Publication of WO2017126877A1 publication Critical patent/WO2017126877A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer

Definitions

  • the present invention relates to an electrical property test pin, and more particularly to an electrical property test pin and a test unit having the same that can perform a stable electrical property test.
  • the distance between the electrically conductive parts for transmitting the signal of the semiconductor is narrowed to 0.30mm or less, and as the functions of the semiconductor are diversified, the number of conductive parts of the semiconductor element increases from several hundreds to thousands. As the speed of the semiconductor increases, the frequency characteristic of the semiconductor is improved, and thus an electrical contact connector is required to replace the conventional spring pin.
  • 1 is a cross-sectional view showing an example of the structure of a conventional pogo pin.
  • the conventional pogo pin 20 includes a plunger 21, a barrel 22, and a coil spring 23.
  • Each barrel 22 is configured so that the upper and lower portions of the plunger 21 are fixed so that the plunger 21 does not fall out from the pressure pushed by the spring 23.
  • the pogo pin 20 having the above structure is fixed at a predetermined position to contact the semiconductor conductive portion.
  • the outer diameter of the barrel 22 including the spring 23 must be increased, and thus, in the case of a micro pitch (for example, 0.4 mm or less), the pogo pin
  • the machining cost of the plastic housing 10 for fixing 20 is increased because the gap between the holes and the holes becomes narrower.
  • the diameter of the plunger 22 is formed to be smaller than 0.15mm or less, it should be repeated tens of thousands to hundreds of thousands of times, but as the durability is lowered and broken, there is a problem that is difficult to apply for the semiconductor inspection of the fine pitch.
  • the spring is also thinner and thinner as the spacing of the conductive parts becomes smaller, the elasticity of the spring is lost due to the overcurrent applied to the spring.
  • An object of the present invention is to provide an electrical property test pin and a test unit having the same, which are simple in structure and can be manufactured in a large amount, and can be applied to a minute pitch using a test pin formed of a conductive metal.
  • another object of the present invention is to provide a test unit having an electrical property test pin and the same to improve the electrical properties and improve the service life by configuring the test pin formed of a conductive metal to surround the elastic polymer.
  • the present invention provides an electrical property test pin.
  • the present invention by connecting the upper pin and the lower pin in contact with the different contact to form a body, thereby improving the electrical resistance characteristics during the electrical characteristic inspection, and has the effect of maintaining a stable frequency characteristics even at high frequencies.
  • the present invention is configured to surround the upper pin and the lower pin formed of one body with an elastic body, to prevent the deviation of the posture of the upper pin and the lower pin during electrical property inspection and to maintain the repetitive elasticity Has
  • 1 is a cross-sectional view showing an example of the structure of a conventional pogo pin.
  • FIG. 2 is a perspective view illustrating an electrical characteristic test pin according to a first embodiment of the present invention.
  • FIG 3 is a cross-sectional view illustrating an electrical characteristic test pin according to a first embodiment of the present invention.
  • FIG. 4 is a cross-sectional view illustrating a case in which an auxiliary contact protrusion is further formed in the electrical property test pin according to the first embodiment of the present invention.
  • FIG. 5 is a cross-sectional view illustrating an electrical characteristic test pin according to a second exemplary embodiment of the present invention.
  • FIG. 6 is a plan view illustrating the pin guide of FIG. 5.
  • test pin 7 is a cross-sectional view showing an example in which the test pin is installed in the housing according to the second embodiment of the present invention.
  • FIG. 8 is a view showing an electrical characteristic test pin according to a third embodiment of the present invention.
  • FIG. 9 is a view showing an electrical characteristic test pin according to a modification of the third embodiment of the present invention.
  • FIG. 10 is a view showing the operation of the electrical characteristic test pin according to the third embodiment of the present invention.
  • FIG. 11 is a view illustrating a test unit having an electrical property test pin according to a third embodiment of the present invention.
  • 12A to 12D are cross-sectional views illustrating a manufacturing procedure of the electrical property test pin according to the present invention.
  • FIG. 13 is a view showing another example of the conductive connection according to the present invention.
  • FIG. 14 is a view showing another example of the conductive connection in accordance with the present invention.
  • 15 is a view showing another connection example of the conductive connection portion and a pair of electrical property test pins according to the present invention.
  • 16 is a view showing various shapes of the end of the electrical property test pin according to the present invention.
  • a pair of test pins formed of a conductive metal, disposed to face each other, contacted and fitted to allow relative flow by an external force; And an elastic retainer formed of an elastic body and surrounding the periphery of the pair of test pin portions, except for the ends of each of the pair of test pin portions.
  • the pair of conductive measuring pins are formed by cutting into the same shape by using a laser cutting device, and the elastic holding part forming step has a molding space set therein and is connected to the molding space.
  • a mold having an injection hole is prepared, and a plurality of pairs of conductive measuring pins connected to the conductive connection part are disposed in the molding space, and liquid silicone rubber is injected into the molding space through the injection hole and cured, thereby providing elasticity.
  • a method of manufacturing a flexible conductor for electrical property inspection characterized in that it forms an elastic retaining portion.
  • FIG. 2 is a perspective view showing an electrical property test pin according to a first embodiment of the present invention
  • Figure 3 is a cross-sectional view showing an electrical property test pin according to a first embodiment of the present invention
  • Figure 4 is a first view of the present invention
  • the electrical property test pin according to the first embodiment of the present invention includes a pair of test pin units 100 and an elastic retaining unit 300.
  • the pair of test pins 100 includes an upper pin 110, a lower pin 120, and a contact member 130, and the upper pin 110 and the lower pin 120 are disposed to face each other. They are fitted in contact with each other to enable relative flow by external forces.
  • each of the upper pin 110 and the lower pin 120 is made of a plate-like conductive metal, a large amount can be easily produced through a simple process such as a pressing process or a cutting process.
  • the upper pin 110 has a sliding groove 211a having a 'U' shape.
  • the upper pin 110, the upper pin body 211 is formed in the sliding groove 211a is opened to one side at one end, and the upper tip extending from the other end of the upper pin body 211 ( 112).
  • the upper pin body 211 is divided into two branches so that the sliding groove 211a is formed.
  • the upper tip 112 extends from the upper pin body 211, and an end thereof is formed in a pointed shape so as to be in contact with the inspection object.
  • the upper tip 112 forms an outer peripheral surface of the convex shape along the end. This may bring about an advantage of easily preventing damage when the upper tip 112 is in contact with the test object so that the thickness of the upper tip 112 is not reduced in a straight line along the end.
  • One end of the lower pin 120 is inserted into the sliding groove 211a.
  • the lower pin 120 is composed of a lower pin body 212 inserted into the sliding groove 211a at one end and a lower tip 122 extending from the other end of the lower pin body 212.
  • the lower pin body 212 is formed to have a set length and is disposed in the sliding groove 211a formed in the upper pin body 211 to be slidably flowable.
  • the lower tip 122 extends from the other end of the lower tip body 212 and has a pair of contact ends that are divided into two branches and have sharp ends.
  • the lower tip 122 is also formed to form a convex curved outer peripheral surface along the end. This also, when the thickness of the lower tip 122 is not reduced in a straight line along the end may bring the advantage of easily preventing damage when contacting the test object.
  • the contact member 130 for contacting the upper pin 110 and the lower pin 120 will be described.
  • the contact member 130 is in contact with the upper pin 110 and the lower pin 120 to be conductive.
  • the contact member 130 is composed of a first contact protrusion 131 and a second contact protrusion 132.
  • the first contact protrusion 131 protrudes from one end of the upper pin body 211 to the inner side of the sliding groove 211a, so that one end of the lower pin body 212 is disposed on the sliding groove 211a. Contact.
  • the second contact protrusion 132 is in contact with an inner circumferential surface of the sliding groove 211a formed in the upper pin body 211 at one end of the lower pin body 212.
  • first contact protrusion 131 and the second contact protrusion 132 according to the present invention may be formed in the disc shape.
  • the upper and lower pins 110 and 120 and the contact member 130 described above may be nickel and gold plated on materials such as beryllum kappa, tungsten, stainless steel, and the like to have excellent conductivity and minimize contamination.
  • the upper and lower fins 110 and 120 are used by plating nickel and gold on the material of beryllum kappa (Be-Cu), and do not get lead, flux, etc. from the semiconductor conductive balls and pads, so that they do not contain paradium, rhodium, or platinum. It may be used by plating of a platinum group element, cobalt coating, DLC (diamond like carbon) coating, or the like.
  • the upper pin 110 protrudes from the inner circumference of the sliding groove 211a in addition to the first contact protrusion 131 formed at the end of the upper pin body 211, thereby sliding the groove 211a. It may be further provided with a plurality of first auxiliary projections (131a) in contact with the circumferential surface of the lower pin body (212) fitted in the).
  • the lower pin 120 protrudes from the outer circumference of the lower pin body 212 in addition to the second contact protrusion 132 formed at the end of the lower pin body 212 to the inner circumferential surface of the sliding groove 211a. It may also be provided with a plurality of second auxiliary projections (132a) in contact.
  • the contact area for conducting the upper pin 110 and the lower pin 120 may be increased.
  • the elastic retaining part 300 is formed of an elastomer such as a silicone polymer, and has a circumference of a pair of test pin portions 100 except for an end of the upper pin 110 and an end of the lower pin 120. It is arranged to enclose.
  • an elastomer such as a silicone polymer
  • the elastic retaining unit 300 is a polymer having elasticity, any rubber material having elasticity such as silicone rubber, urethane, rubber, etc. may be used. Preferably, in the present invention, it is preferable to use gum-type silicone or liquid silicone rubber.
  • the hardness may be wrapped around the polymer of the conductive mixture to be described later, such as Shore hardness of about 10 to 80 depending on the intended use to prevent separation and adhere to the upper and lower pins to maintain repeated elasticity.
  • the hardness can be adjusted and produced according to the contact number of the object to be contacted and the maximum length (Stroke) to be pressed, and the preferred hardness is preferably 50 to 70.
  • the elastic polymer as the elastic retaining part 300 is firmly adhered to the upper and lower pins 110 and 120 so that the pins 110 and 120 repeatedly maintain elasticity when the pins 110 and 120 repeatedly move vertically, and maintain elasticity with the pins 110 and 120.
  • the bonding force may be improved by chemical treatment such as a primer or surface modification such as plasma surface treatment so as to achieve good bonding with the unit 300.
  • the upper pin 110 and the lower pin 120 may maintain elasticity at high and low temperatures, and may improve electrical characteristics and frequency characteristics.
  • the longitudinal section of the elastic retaining unit 300 may be formed in a polygonal or circular shape, the longitudinal cross-sectional shape thereof is not limited to the shape.
  • the longitudinal cross-sectional shape of the elastic retaining part 300 may be formed in a circular shape.
  • the elastic retaining unit 300 may further include a guide member on the upper and lower surfaces, for example, to stably support the sliding pins without sliding left and right when the pins slide to each other by an external action force.
  • the pin guide member may be formed of a film layer having a through hole and fixed to the upper and lower surfaces by an adhesive layer while allowing the pins to move on the upper and lower surfaces of the elastic retaining portion.
  • the film layer may be made of, for example, any one material of silicone rubber, polyimide, polyethylene, polypropylene, and polyester.
  • the elastic retaining unit 300 may form an air room at a central portion thereof (that is, a portion corresponding to the mutual contact portion of the pair of sliding contact pins), thereby making the elastic retaining portion more elastic. I can keep it smooth.
  • the space portion may further include a support member for stably maintaining the contact sliding movement of the pins (110, 120).
  • the support member protrudes from the inner wall of the space portion and the central portion has a through hole contacting the outer surface of each pin, and has a predetermined thickness of a silicone rubber or polyimide film made of a material having insulation and elasticity. It may be composed of a plate-shaped pad of).
  • the posture maintenance hole (H) is formed in a region other than the ends of each of the upper pin 110 and the lower pin (120).
  • the posture maintaining hole (H) is to widen the adhesive force of the elastic retaining portion 300 and the upper pin 110 and the lower pin 120 which is an elastic polymer to be described later so that the pins are firmly fixed.
  • the posture maintaining hole (H) may be formed in various shapes such as a circular hole, a polygon.
  • a protrusion or a depression may be formed in the region to increase adhesion to the elastomer.
  • the hole, the protrusion and the depression may be formed at the same time or selected.
  • the upper and lower tips which are both ends of the upper and lower pins 110 and 120, are in contact with terminals of the semiconductor device under test and the test apparatus, respectively, according to the physical properties and shapes of the terminals of the semiconductor device under test and the test apparatus. It can be manufactured in various shapes such as sawtooth, ellipse and probe shape.
  • the lower pin body 212 of the lower pin 120 is formed in the sliding groove 211a formed in the upper pin body 211. Insertion is placed.
  • one end of the lower pin body 212 is formed an area between the sliding groove 211a to form a predetermined interval.
  • the conductive mixture 400 of the conductive powder and the elastomer is accommodated in the area between the sliding grooves 211a. That is, the inter-region may serve as a receiving groove.
  • the conductive powder is formed of any one of Ni, Cu, Ag, Au, the surface of the conductive powder may be surface-treated with the Au.
  • the upper pin 110 and the lower pin 120 are connected to each other in a state of contacting through the contact member 130, thereby the upper pin 110 and the lower pin 120. ) May be directly connected to a conductive state.
  • the upper and lower pins 110 and 120 increase the contact force with the conductive mixture 400 by increasing the pressure applied when pressed, and the contact position between the upper and lower pins 110 and 120 is perpendicular to the conductive portion. Can be provided.
  • the conductive mixture 400 is a conductive powder combined with an elastomer, and the conductive powder is a metal powder such as nickel, gold, copper, silver, aluminum having good electrical conductivity, CNT (carbon nanotube), a polymer having elasticity, and the like. And gold-plated powder and the like, mixed with polymers such as rubber, gel and oil.
  • the conductive powder is preferably inexpensive and easy to purchase nickel powder surface-treated with gold
  • the outer shape of the conductive powder can be star, plate, spherical and the like, preferably spherical.
  • the conductive powder is preferably used as uniform as possible so that the conductive powder can be in good contact when the pins are pressed, and when it is difficult to use the uniform conductive powder, it is preferable to use a conductive powder having a small diameter.
  • the maximum size of the conductive powder is preferably 50 ⁇ m or less, but is not limited thereto.
  • the conductive mixture 400 uses a low hardness so that adhesion due to the pressure by the elastic retaining portion 300 of the elastomer when the upper and lower pins (110,120) is pressed and the metal powder is not separated Maintain a degree of cohesion.
  • the conductive mixture 400 is not flowable but preferably low in hardness, so that a silicone gel having a Shore hardness of 30 or less may be used.
  • the conductive mixture 400 Since the conductive mixture 400 has a lower hardness than the elastic polymer constituting the elastic holding part 300, the conductive mixture 400 serves as a bearing to form a conductive within a predetermined space after molding. Therefore, when the upper pin 110 and the lower pin 120 is pressed under pressure, the conductive mixture 400 moves like a bearing to form conductive paths between the upper and lower pins 110 and 120, and makes repeated contact with each other. To achieve.
  • FIG. 5 is a cross-sectional view showing the electrical characteristic test pin according to a second embodiment of the present invention
  • Figure 6 is a plan view showing a pin guide of Figure 5
  • Figure 7 is a test pin according to a second embodiment of the present invention housing It is sectional drawing which shows the example installed in.
  • the electrical property test pins according to the second exemplary embodiment of the present invention are formed of a plate-shaped conductive metal, are disposed to face each other, and have a sliding hole 401 having one end opened.
  • the elastic holding part 300 is formed and surrounds the circumference of the pair of test pin parts 440 and the circumference of the connection pin part 500, except for an end of each of the pair of test pin parts 440. It can be configured as.
  • the elastic retaining unit 300 is substantially the same as described above as the elastic polymer, description thereof will be omitted.
  • Each of the pair of test pin portions 440 includes a pin body 410 having a tip 411 formed at an end thereof, protrusions 420 protruding outwardly around both sides of the pin body 410, and It extends outward from the bottom of the pin body 410, and has a protrusion 430 protruding along the longitudinal direction.
  • the protrusions 420 may be surrounded by the elastic holding part 300 to fix the test pin part 400.
  • the tip 411 may be exposed to the outside of the elastic retaining part 300.
  • the connecting pin part 500 has a set length, and both ends thereof are fitted into the slide holes 401 formed in each of the pair of test pin parts 400.
  • both ends of the connecting pin portion 500 forms a state spaced apart from the inner end of each slide hole 401. Therefore, both ends of the connecting pin 500 may serve to guide the flow of each test pin 400 in a state of being fitted into the slide hole 401.
  • both ends of the connecting pin portion 500 is formed by forming two or more branches 510 in the slide hole 401.
  • Contact protrusions may be formed at the ends of the two or more prongs 510.
  • both ends of the connecting pin portion 500 is formed larger than the inner space of the slide hole 401 to increase the contact force with the inner wall of the slide hole 401. You can do that.
  • each of the pair of test pin units 440 may include a pin guide 450.
  • the pin guide 450 includes a pin guide body 451 through which the connecting pin 500 penetrates, and a guide hole 451a for guiding the flow of the connecting pin 500 to be penetrated therethrough. It is formed by cutting around the outer circumference of the pin guide body 451, and has a fixing groove 452 into which the protrusion 430 is fitted.
  • the pin guide body 451 is formed in a circular plate shape.
  • the pin guide 450 is easily guided when the connecting pin 500 is linearly flowed through the guide hole 451a, and the pair of test pins 440 in the fixing groove 452. Since the protrusions 430 are fitted, the pair of inspection pins 440 performs a function of preventing the movement.
  • the mold guide 460 may be fixedly installed at both sides of the elastic retaining part 300, but is not limited thereto.
  • the inspection unit having the electrical characteristic test pins according to the first and second embodiments of the present invention as shown in Figure 7, the housing portion is formed with a plurality of pin mounting holes 11 with a set interval 10, and the electrical characteristic test pin of the present invention described above.
  • the electrical property test pins are provided in plural and are arranged to be fitted into and fixed to each of the plurality of pin installation holes 11.
  • the inner diameters of the plurality of pin installation holes 11 may be formed to gradually increase along both ends at the center. Accordingly, the inner circumference of each of the plurality of pin installation holes 11 may be formed in a convex shape.
  • the shape of the plurality of pin installation holes 11 is preferably manufactured in the same manner as the appearance of the electrical property test pin. Therefore, it does not necessarily have to be circular.
  • the housing part is preferably made of fiber glass, engineering plastics (Ultem, Peek, Toron) excellent in electrical, chemical, strength and the like.
  • the upper pin 110 and the lower pin 120 is formed of a plate-like conductive metal, it is possible to manufacture a large amount through a simple process such as a press working, a cutting process, the conventional spring It is easier to manufacture than a pin, and can be manufactured with a simple structure, thereby reducing processing cost and greatly improving productivity.
  • the thickness of the upper pin and the lower pin can be made thin, it can be used for inspection of semiconductor devices with 0.1mm and 0.2mm of fine pitch.
  • the embodiment according to the present invention is configured to surround the upper pin and the lower pin formed of a single body with an elastic polymer, to prevent the deviation of the posture of the upper pin and the lower pin during the electrical property test and repetitive Elasticity can be maintained.
  • FIG. 8 is a view showing an electrical characteristic test pin according to a third embodiment of the present invention.
  • the same reference numerals are given to the same elements described above, and the description thereof will be briefly or omitted.
  • the electrical property test pin includes a pair of test pin parts 100, a connection part 202, and an elastic retaining part 300.
  • the pair of test pins 100 is composed of an upper pin 110 and a lower pin 120, are formed in the same shape and disposed to face each other.
  • each of the upper pin 110 and the lower pin 120 is made of a plate-like conductive metal, a large amount can be easily produced through a simple process such as a pressing process or a cutting process.
  • Holes h are formed in regions other than the first and second connection portions of the upper pin 110 and the lower pin 120 which will be described later.
  • the hole (h) is to widen the adhesive force of the elastic retaining portion 300 and the upper pin 110 and the lower pin 120 which is an elastic polymer to be described later so that the pins are firmly fixed.
  • the holes h may be formed in various shapes such as circular holes and polygons.
  • protrusions or depressions may be formed in the region to increase adhesion to the elastomer.
  • the hole, the protrusion and the depression may be formed at the same time or selected.
  • Both ends of the upper and lower pins 110 and 120 are in contact with the terminals of the semiconductor device and the test device under test, and according to the physical properties and the shape of the terminals of the semiconductor device and the test device under test, sawtooth, ellipse, It can be manufactured in various forms such as probe form.
  • the connecting portion 202 is formed with a first connecting portion 211 at the end of the upper pin 110
  • the second connecting portion 212 is formed at the end of the lower pin 120.
  • the first and second connectors 211 and 212 mean a portion where the upper and lower pins 110 and 120 are connected to each other, and the upper pin 110 and the first connector 211 and the lower pin 120 are connected to each other.
  • the second connection portion 212 is made of one plate each, but is not formed separately.
  • the first connector 211 and the second connector 212 are disposed to face each other.
  • Facing sections of the upper and lower fins 110 and 120 are preferably formed to have a surface to maximize the area in contact with each other.
  • connection part 202 is formed as an area where the first connection part 211 and the second connection part 212 are in surface contact with each other. That is, the upper pin 110 and the lower pin 120 are electrically connected to each other by the surface contact of the first and second connection parts 211 and 212.
  • connection part 202 may be directly contacted to form the connection part 202, thereby eliminating the need to use a separate conductive member or conductive powder.
  • the elastomer described below penetrates between the upper pins 110 and the lower pins 120, electrical insulation may occur, thereby preventing a problem from occurring, and thus, between the first and second connection parts 211 and 212. It is preferred that the polymer be prepared so as not to penetrate it.
  • the upper and lower pins 110 and 120 having the first and second connection parts 211 and 212 may be nickel and gold plated with materials such as beryllum kappa, tungsten, and stainless steel, so that the conductivity is excellent and the contamination is minimized.
  • the upper and lower fins 110 and 120 are used by plating nickel and gold on the material of beryllum kappa (Be-Cu), and do not get lead, flux, etc. from the semiconductor conductive balls and pads, so that they do not contain paradium, rhodium, or platinum. It may be used by plating of a platinum group element, cobalt coating, DLC (diamond like carbon) coating, or the like.
  • the elastic retaining part 300 is formed of an elastomer such as a silicone polymer, except for the ends of each of the pair of test pin parts 110 and 120, and the connection parts 211 and 212 and the pair of tests. It is arranged to surround the circumference of the pins (110, 120).
  • the elastic retaining unit 300 is a polymer having elasticity, any rubber material having elasticity such as silicone rubber, urethane, rubber, etc. may be used. Preferably, in the present invention, it is preferable to use gum-type silicone or liquid silicone rubber.
  • the hardness may be wrapped around the polymer of the conductive mixture to be described later, such as Shore hardness of about 10 to 80 depending on the intended use to prevent separation and adhere to the upper and lower pins to maintain repeated elasticity.
  • the hardness can be adjusted and produced according to the contact number of the object to be contacted and the maximum length (Stroke) to be pressed, and the preferred hardness is preferably 50 to 70.
  • the elastic polymer as the elastic retaining part 300 is firmly adhered to the upper and lower pins 110 and 120 so that the pins 110 and 120 repeatedly maintain elasticity when the pins 110 and 120 repeatedly move vertically, and maintain elasticity with the pins 110 and 120.
  • the bonding force may be improved by chemical treatment such as a primer or surface modification such as plasma surface treatment so as to achieve good bonding with the unit 300.
  • the upper pin 110 and the lower pin 120 may maintain elasticity at high and low temperatures, and may improve electrical characteristics and frequency characteristics.
  • the longitudinal section of the elastic retaining unit 300 may be formed in a polygonal or circular shape, the longitudinal cross-sectional shape thereof is not limited to the shape.
  • FIG. 9 is a view showing an electrical characteristic test pin according to a modification of the third embodiment of the present invention.
  • a conductive mixture 400 made of a conductive metal powder mixed with an elastomer is disposed in a region between the first connecting portion 211 and the second connecting portion 212.
  • the first connecting portion 211 and the second connecting portion 212 are connected to each other, so that the upper pin 110 and the lower pin 120 may be directly connected in a conductive state.
  • the upper and lower pins 110 and 120 increase the contact force with the conductive mixture 400 by increasing the pressure applied when pressed in a vertical or bent, stepped, etc., the contact between the upper pin 110 and the lower pin 120.
  • Conductivity can be provided by allowing the position to be vertical.
  • the conductive mixture 400 according to the present invention is a conductive powder combined with an elastomer, and the conductive powder is a metal powder such as nickel, gold, copper, silver, aluminum having good electrical conductivity, CNT (carbon nanotube), elastic It is composed by mixing Ni and gold-plated powder with polymer etc. with polymer such as rubber, gel and oil.
  • a metal powder such as nickel, gold, copper, silver, aluminum having good electrical conductivity, CNT (carbon nanotube), elastic It is composed by mixing Ni and gold-plated powder with polymer etc. with polymer such as rubber, gel and oil.
  • the conductive powder is preferably inexpensive and easy to purchase nickel powder surface-treated with gold
  • the outer shape of the conductive powder can be star, plate, spherical and the like, preferably spherical.
  • the conductive powder is preferably used as uniform as possible so that the conductive powder can be in good contact when the pins are pressed, and when it is difficult to use the uniform conductive powder, it is preferable to use a conductive powder having a small diameter.
  • the maximum size of the conductive powder is preferably 50 ⁇ m or less, but is not limited thereto.
  • the conductive mixture 400 according to the present invention uses a low hardness so that adhesion due to the pressure by the elastic retaining portion 300 of the elastomer when the upper and lower pins (110, 120) is pressed and the metal powder is It is good to maintain the bond strength that does not separate.
  • the conductive mixture 400 is not flowable but preferably low in hardness, so that a silicone gel having a Shore hardness of 30 or less may be used.
  • the conductive mixture 400 Since the conductive mixture 400 has a lower hardness than the elastic polymer constituting the elastic holding part 300, the conductive mixture 400 serves as a bearing to form a conductive within a predetermined space after molding. Therefore, when the upper pin 110 and the lower pin 120 is pressed under pressure, the conductive mixture 400 moves like a bearing to form conductive paths of the upper and lower pins 110 and 120 and make repeated contact with each other.
  • the stepped areas are formed in the areas facing each other of the first connection portion 211 and the second connection portion 212, respectively, each conductive step 400 in the stepped region This can be made to be arranged.
  • the upper pin 110 and the lower pin 120 may be conductive through the conductive mixture 400. That is, when the upper pin 110 and the lower pin 120 is pressed under pressure, the conductive mixture 400 moves like a bearing to form conductive passages of the upper and lower pins 110 and 120 and make repeated contact. .
  • the thickness of the electrical property test pin can be reduced, and because the upper and lower pins 110 and 120 slip, only the hardness of the conductive mixture 400 is affected. It becomes a conductive and repeatable conductivity can be implemented.
  • stepped regions are formed in regions where the first connecting portion 211 and the second connecting portion 212 face each other, and the respective stepped regions are formed to have a predetermined depth.
  • Receiving grooves are formed respectively, and each of the receiving grooves accommodates the conductive mixture 400.
  • the receiving flaw is formed in each of the stepped regions formed in the upper and lower fins 110 and 120, respectively, and the conductive mixture 400 is filled in each of the receiving grooves so that the upper and lower fins 110 and 120 are electrically conductive.
  • the surface contact is made through the stepped area.
  • the receiving groove may be formed only on one side of the stepped region, the conductive mixture 400 is accommodated in the receiving groove.
  • the stepped areas of the upper pin 110 or the lower pin 120 in which the receiving grooves are not formed are configured to contact the stepped areas in which the receiving grooves are formed in a flat shape without the receiving grooves.
  • the conductive mixture 400 may be effectively prevented from being separated out of the upper and lower fins 110 and 120.
  • one of the stepped regions formed in the areas facing each other of the first connecting portion 211 and the second connecting portion 212 forms a concave groove portion, and the other region is formed so as to form a protrusion inserted into the concave groove portion It can also be configured.
  • an electrical contact path may be formed by allowing the first and second connection portions 211 and 212 to be in surface contact with the concave groove portion and the protrusion inserted into the concave groove portion without storing the conductive mixture in the receiving groove.
  • Figure 11 is a view showing a test unit having an electrical property test pin according to a third embodiment of the present invention.
  • the inspection unit according to the third embodiment also includes a housing part 10 in which a plurality of installation holes 11 having a predetermined interval are formed, and the above-described electrical characteristic inspection pin 1.
  • the electrical property test pins 1 are provided in plural and are disposed to be fitted into and fixed to each of the plurality of installation holes 11.
  • the inner diameter of each of the plurality of installation holes 11 may be formed to gradually increase along both ends at the center. Accordingly, the inner circumference of each of the plurality of installation holes 11 may be formed in a convex shape.
  • the shape of the plurality of installation holes 11 is preferably made the same as the appearance of the electrical property test pin. Therefore, it does not necessarily have to be circular.
  • the housing unit 10 is preferably made of fiber glass, engineering plastics (Ultem, Peek, Toron) excellent in electrical, chemical, strength and the like.
  • FIG. 10 (a) shows one test pin in a normal state
  • FIG. 10 (b) shows a case in which pressure is applied in the direction of the up and down arrows in the state (a).
  • the elastic holding part 300 is expanded by the volume pressed in the direction of the arrow (that is, the length of the pin is pressed and the area of the pin of the pressed portion).
  • the upper and lower pins 110 and 120 bonded to the elastic retaining part 300 are opened at the centers of the upper and lower pins 110 and 120, so that the upper and lower pins 110 and 120 lose conductivity. do.
  • the conductive mixture 400 disposed between the upper and lower pins 110 and 120 maintains contact characteristics of the upper and lower pins while rolling or pushing like a bearing, thereby improving conductivity.
  • the repeated service life may be excellent.
  • the upper and lower pins 110 and 120 may be disposed in the housing part ( 10) can be sufficiently pressurized.
  • the upper and lower pins 110 and 120 are formed by convexly forming the inner circumference of the conductive mixture 400, that is, the pressurized region, or by forming the inner circumference of each of the plurality of through holes 50 of the housing part 10 in a convex shape.
  • the pressurized structure can be adopted even without pressing.
  • FIGS. 12A to 12D are cross-sectional views illustrating a manufacturing procedure of the electrical property test pin of the present invention.
  • the method of manufacturing the electrical property test pin according to the present invention proceeds in the order of forming a pair of conductive test pin parts 100-> forming a conductive connection part 200-> forming an elastic retaining part 300.
  • 12A is a view illustrating a step of forming a pair of conductive test pin portions according to the present invention.
  • a step of forming a pair of conductive test pin units 100 will be described.
  • a pair of conductive test pin portions 100 according to the present invention is prepared to be made of a conductive metal and formed in a plate shape.
  • each of the pair of conductive test pin portions 100, the fin body 100b having a uniform width and the tip body extending from the end of the pin body 100b, the end is formed sharply Cutting is performed using a laser device (not shown) to achieve 100a.
  • the pair of conductive test pin portions 100 can be cut from thousands to tens of thousands at the same time.
  • the pair of conductive test pin unit 100 is formed in the same shape with each other the upper pin 110 and the lower pin 120 It consists of.
  • a hole h is drilled in each of the pair of conductive test pins 100 using a laser device.
  • the hole (h) is to be drilled in the pin body (100b).
  • the hole h may be drilled into a circular hole or a polygonal hole.
  • the hole h is a portion exposed to the silicon rubber forming the elastic retaining part 300 to be described later, is located inside the elastic retaining part 300, the elastic retaining part 300 and the conductive test pin part 100 ) Can be fixed.
  • 12B is a view showing a conductive connection forming step according to the present invention.
  • the pair of conductive test pin units 100 may be disposed to face each other.
  • the conductive connecting portion 201 is prepared with a conductive wire 201 having a length.
  • the conductive wire 201 may be a conductive wire made of a flexible material.
  • the conductive wire 201 is cut to achieve a set length using a cutting device.
  • both ends of the conductive wire 201 is connected to the pair of conductive measuring pins.
  • both ends of the conductive connecting portion 201 may be joined to each of the pair of conductive test pin portions 100.
  • the conductive connecting portion 201 may be formed to be integral with the pair of conductive test pin portions 100.
  • the conductive connection portion 201 is connected to each of the ends of the upper pin 110 and the lower pin 120 so that the pair of conductive test pin 100 is electrically connected to each other. .
  • Figure 12c is a view showing the step of forming the elastic retaining portion according to the present invention
  • Figure 12d is a cross-sectional view showing an example of the manufactured test pin portion of the present invention.
  • a silicon mold base 401 having a molding space 400a in which a plurality of conductive test pin parts 100 are disposed, and an injection hole 410 covering the silicon mold base and connected to the molding space.
  • die 400 which consists of the silicon metal mold
  • a plurality of conductive test pin parts 100 are arranged in a line in a strip form on the silicon mold base 401, the silicon mold base 401 is covered with a silicon mold cover 402, and then the injection hole 410 is closed. Inject liquid silicone rubber through
  • the injected liquid silicone rubber is cured to manufacture a plurality of conductive test pin parts 100 connected in a strip form made of an elastomeric polymer.
  • a plurality of conductive test pin parts 100 connected in a strip form are cut by a laser device to form individual test pin parts according to the present invention having the elastic retaining part 300.
  • the test pin portion having the elastic retaining portion 300 of the present invention is formed by injecting the liquid silicone rubber into the silicon mold, but the liquid silicone rubber is disposed in a state where a plurality of conductive test pin portions 100 are disposed.
  • the test pin part having the elastic retaining part 300 of the present invention may be formed.
  • the elastic retaining part 300 formed as described above surrounds the circumference of the conductive connection parts 200 and 201 and the upper and lower pins 110 and 120 except for the ends of the upper pin 110 and the lower pin 120, respectively. It is molded in a state of being applied.
  • ends of the upper and lower pins 110 and 120 manufactured as described above are exposed to the outside from both ends of the elastic retaining part 300.
  • the elastic retainer 300 may be formed of silicon to have a tension. Accordingly, the upper pin 110 and the lower pin 120 may maintain elasticity at high and low temperatures, and may improve electrical characteristics and frequency characteristics.
  • the longitudinal section of the elastic retaining unit 300 may be formed in a polygonal or circular shape, the longitudinal cross-sectional shape thereof may be manufactured without being limited to the shape.
  • FIGS. 13 and 14 are views showing other examples of the conductive connection unit according to the present invention.
  • the conductive connection part 200 may be formed of a metal, and may be manufactured by using a laser cutting device into a thin plate having a predetermined length.
  • the conductive connection part 200 is formed in a wave shape that is repeated a plurality of times.
  • Both ends of the upper pin 110 and the lower pin 120 and both ends of the conductive connection portion 200 may be bonded and connected by a bonding method using wire bonding, soldering, and conductive paste. Therefore, the upper pin 110 and the lower pin 120 according to the present invention is connected to be directly conductive.
  • the upper pin 110 instead of cutting and using the conductive connection part 200 according to the present invention in a wave shape, the upper pin 110 to be integrally formed at both ends of the upper pin 110 and the lower pin 120. ) And the lower pin 120 may be manufactured at the same time.
  • Figure 15 is a view showing another connection example of the conductive connection portion and the pair of conductive test pins according to the present invention.
  • the cut grooves H are formed at the ends of the pair of conductive test pin portions 100. Each can be formed.
  • both ends of the conductive connection portion 201 which is the conductive wire, is fitted into the cutting groove (H) formed in each of the upper pin 110 and the lower pin 120 is fixed, through which the upper pin 110 ) And the lower pin 120.
  • 16 is a view showing various shapes of the end of the conductive measuring pin according to the present invention.
  • the ends of each of the upper pin 110 and the lower pin 120 are contacted with the contact point of the inspection object by using a laser cutting device. It may be formed in a pointed shape.
  • the shape of the end may be implemented in various shapes. That is, in addition, as shown in Figures 16 (a) to (d), the upper pins 110, 110 ', 110 ", 110' '' and the lower pins 120, 120 ', 120", 120' according to the present invention. '') Can be formed in various shapes.
  • the inspection unit manufacturing method having the inspection pin portion of this embodiment first prepare a housing in which a plurality of pin installation holes are formed at intervals, and the electrical characteristics manufactured through the above-described method Prepare multiple test pins.
  • an inspection unit for testing a semiconductor element for forming an electrical connection passage between the device under test and the test apparatus can be manufactured.
  • the upper pin 110 and the lower pin 120 are formed of a plate-shaped conductive metal, they can be manufactured in large quantities by a simple process such as a press working or a cutting process. It can be manufactured in a structure, the processing cost can be reduced, and the productivity can be greatly improved.
  • the present invention which is a flexible conductor tension structure, minimizes the force of the metal compared to the conventional integrated spring pin and replaces the force with the elastic retaining part 300, which is a silicon tensioner, thereby compressing the hardness of the silicon tensioner, that is, being compressed.
  • the contact pressure can be greatly reduced by adjusting the elastic force, so it can be applied as a socket for testing semiconductor devices suitable for multi-pin semiconductor devices.
  • the elastic retaining portion 300 of an elastomer, which is a silicone tensioner, it eliminates the causes of the electrical characteristics and frequency characteristics of the spring, which is a disadvantage of the conventional spring pin, and loses elasticity at high and low temperatures. We can improve characteristic efficiently
  • the upper pin 110 and the lower pin 120 according to the present invention which is a flexible conductor tension structure, are directly connected through the connecting parts 200 and 201, electrical resistance characteristics are improved through electricity without electrical contact.
  • there is no attenuation of the signal generated due to the long length like the spring in the frequency characteristics it is possible to maintain a stable characteristic even at high frequencies.
  • the elastic retaining portion 300 made of an elastomer since the spring is not used like the conventional spring pin, the gap of the conductive portion is continuously reduced due to the size of the spring. Limits can be overcome in reducing conductive gaps.
  • the limit of the conductive portion spacing can be made up to 0.15mm pitch.
  • connection portion 200, 201 connecting the upper pin 110 and the lower pin 120, in order to flow a large amount of current, the thickness, width, number of the foil of the conductive wire or sheet It can also be adjusted.
  • the present invention is applied to an electrical property test pin and an inspection unit having the same, which are used to perform a stable electrical property test.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

La présente invention concerne une broche d'inspection de caractéristique électrique et, plus particulièrement, une broche d'inspection de caractéristique électrique qui est capable de réaliser une inspection stable de caractéristique électrique et une unité d'inspection l'utilisant. La broche d'inspection de caractéristique électrique comprend : une paire de broches d'inspection en métal conducteur disposées l'une en face de l'autre, la paire de broches d'inspection étant en contact et emboîtées/accouplées l'une dans l'autre de telle manière qu'elles peuvent se déplacer selon un mouvement relatif sous l'action d'une force externe; et un corps de maintien d'élasticité en matériau élastique de façon à entourer la périphérie de la paire de broches d'inspection, à l'exclusion des extrémités respectives de la paire de broches d'inspection.
PCT/KR2017/000593 2016-01-19 2017-01-18 Broche d'inspection de caractéristique électrique et unité d'inspection l'utilisant WO2017126877A1 (fr)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
KR10-2016-0006452 2016-01-19
KR1020160006452A KR101775978B1 (ko) 2016-01-19 2016-01-19 슬라이딩 유동이 가능한 전기적 특성 검사핀 및 이를 갖는 검사 유니트
KR10-2016-0009395 2016-01-26
KR20160009395 2016-01-26
KR10-2016-0009398 2016-01-26
KR20160009398 2016-01-26
KR1020160009384A KR101775983B1 (ko) 2016-01-26 2016-01-26 전기적 특성 검사핀 및 이를 갖는 검사 유니트
KR10-2016-0009384 2016-01-26

Publications (1)

Publication Number Publication Date
WO2017126877A1 true WO2017126877A1 (fr) 2017-07-27

Family

ID=59362822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/000593 WO2017126877A1 (fr) 2016-01-19 2017-01-18 Broche d'inspection de caractéristique électrique et unité d'inspection l'utilisant

Country Status (1)

Country Link
WO (1) WO2017126877A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08130075A (ja) * 1994-05-09 1996-05-21 Johnstech Internatl Corp 電気デバイスの接触装置及び方法
JP2006084212A (ja) * 2004-09-14 2006-03-30 Unitechno Inc 両端変位型コンタクトプローブ
JP2010091358A (ja) * 2008-10-07 2010-04-22 Unitechno Inc 検査用ソケット
KR20110004818A (ko) * 2010-04-08 2011-01-14 박상량 인너 브릿지 타입의 스프링 프로브 핀
JP5097968B1 (ja) * 2011-08-02 2012-12-12 株式会社クローバーテクノロジー 異方導電性部材

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08130075A (ja) * 1994-05-09 1996-05-21 Johnstech Internatl Corp 電気デバイスの接触装置及び方法
JP2006084212A (ja) * 2004-09-14 2006-03-30 Unitechno Inc 両端変位型コンタクトプローブ
JP2010091358A (ja) * 2008-10-07 2010-04-22 Unitechno Inc 検査用ソケット
KR20110004818A (ko) * 2010-04-08 2011-01-14 박상량 인너 브릿지 타입의 스프링 프로브 핀
JP5097968B1 (ja) * 2011-08-02 2012-12-12 株式会社クローバーテクノロジー 異方導電性部材

Similar Documents

Publication Publication Date Title
WO2010008257A2 (fr) Ensemble à ressorts et prise de test l'utilisant
US7015708B2 (en) Method and apparatus for a high frequency, impedance controlled probing device with flexible ground contacts
KR100833637B1 (ko) 검사 유닛
US6844748B2 (en) Inspection jig for radio frequency device, and contact probe incorporated in the jig
WO2017007200A2 (fr) Prise de test, procédé de fabrication de prise de test, et ensemble gabarit pour prise de test
KR20130048157A (ko) 반도체 테스트 치구 및 그것을 이용한 내압 측정방법
WO2021066255A1 (fr) Contact à ressort et prise d'essai ayant un contact à ressort incorporé en son sein
US20070271781A9 (en) High density integrated circuit apparatus, test probe and methods of use thereof
WO2010104303A2 (fr) Unité sonde pour essai de panneau
JP2004510164A (ja) 高性能テスターインタフェースモジュール
WO2018021729A1 (fr) Appareil à broche de connexion pour test de puces semi-conductrice, et son procédé de fabrication
US4829242A (en) Multigigahertz probe
KR20190017427A (ko) 검사장치
WO2015170877A1 (fr) Interrupteur de tableau étanche à l'eau et procédé de fabrication d'interrupteur de tableau étanche à l'eau
WO2017126877A1 (fr) Broche d'inspection de caractéristique électrique et unité d'inspection l'utilisant
KR101002221B1 (ko) 도전성 접촉자 홀더의 제조방법
US20220178969A1 (en) Probe device and method of assembling the same
KR20200115782A (ko) 테스트용 소켓 및 그 제조방법
WO2017061656A1 (fr) Sonde de test de kelvin, module de sonde de test de kelvin, et leur procédé de fabrication
WO2019245153A1 (fr) Broche de connexion du type ressort lamelle
WO2020145577A1 (fr) Élément de protection de partie de conducteur pour connecteur de transmission de signal et procédé de fabrication associé, et connecteur de transmission de signal le comprenant et procédé de fabrication associé
KR100303039B1 (ko) 프로브(Probe) 카드(Card)
WO2021010583A1 (fr) Interface ayant une structure de courbure, ensemble interface et prise de test contenant ladite interface, et procédé de fabrication de ladite interface
JPH05267406A (ja) プローブ装置用メカニカル・ホルダー
KR101532390B1 (ko) 절연성 시트, 절연성 시트의 제조방법 및 전기적 검사장치

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17741643

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17741643

Country of ref document: EP

Kind code of ref document: A1