WO2017108314A1 - Capteur de particules - Google Patents

Capteur de particules Download PDF

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Publication number
WO2017108314A1
WO2017108314A1 PCT/EP2016/078521 EP2016078521W WO2017108314A1 WO 2017108314 A1 WO2017108314 A1 WO 2017108314A1 EP 2016078521 W EP2016078521 W EP 2016078521W WO 2017108314 A1 WO2017108314 A1 WO 2017108314A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrates
sensor element
ceramic
μηι
sensor
Prior art date
Application number
PCT/EP2016/078521
Other languages
German (de)
English (en)
Inventor
Sabine Roesch
Jens Schneider
Stefan Rodewald
Christine Nagel
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2017108314A1 publication Critical patent/WO2017108314A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods

Definitions

  • Particle sensors are already known from the prior art, for example resistive particle sensors having the features of the preamble of the independent apparatus claim.
  • the ceramics of the substrates consists in the prior art of yttrium-stabilized zirconia (YSZ), the electrically conductive functional layers of platinum, Pt alloy or Pt cermet.
  • YSZ yttrium-stabilized zirconia
  • electrically highly insulated intermediate layers must be applied by means of screen printing between the substrates and the electrically conductive functional layers, that is to say the interdigital electrode, the heater and the temperature measuring element in order to avoid undesired shunts.
  • the structure of the sensor elements with printed insulation layer is so far consuming.
  • the structure is simplified in this respect. Moreover, both the functionality and the chemical and mechanical robustness of the sensor element over a long lifetime is ensured.
  • a structure with exactly two ceramic substrates, between which the heating element is arranged in the middle, has proven to be particularly thermomechanically stable and loadable.
  • the interdigital electrode and the temperature measuring element can be arranged on the sides of the substrates opposite the heating element.
  • specific electrically insulating materials are specified for the substrates. Adapted to these specific substrate thicknesses are given in each case, which are to be observed advantageously to ensure a sufficient breaking strength of the substrates. Furthermore, maximum heating powers are indicated in each case, which the sensor elements designed in this way can advantageously withstand. Furthermore, resistance values for the heating element are indicated, from which the stated heating power is calculated on the basis of a
  • a planar ceramic sensor element 10 comprises two ceramic substrates 1 1 a, 1 1 b, which form a planar ceramic body. They consist of an electrically insulating material.
  • the sensor element 10 may have on its upper side and on its lower side in each case a covering layer 12a, 12b of an electrically insulating material, which may have been applied by means of screen printing, for example.
  • the sensor element 10 furthermore has a heating element 40, which is designed in the form of an electrical resistance conductor track and serves for heating the sensor element 10, in particular for the early operating temperature or the burnup of the particles deposited on the large surfaces of the sensor element 10.
  • the resistance conductor track is furthermore designed in the form of a meander and has at both ends the plated-through holes 42,44 and electrical contacts 46,48. By applying a corresponding heating voltage, for example 12 V, to the contacts 46, 48 of the resistance conductor track, the heating power of the heating element 40 can be regulated accordingly.
  • an interdigital electrode 14, 16 is applied, the contacts 18, 20 are provided for contacting the interdigital electrode 14, 16 in the region of a gas mixture facing away from the end of the sensor element.
  • interdigital electrode is meant in this document and in particular always a toothed pair of electrodes with two separate contacts.
  • the sensor element 10 comprises on the opposite large surface of the sensor element 10, a temperature measuring element 30, which is designed in the form of an electrical resistance track and may have the shape of a meander.
  • a temperature measuring element 30 is designed in the form of an electrical resistance track and may have the shape of a meander.
  • One of the terminals of the resistor trace may be connected to the six and 14 contacts.
  • Another electrical connection of the temperature measuring element 30 is formed by a further contact 22.
  • the substrates 1 1 1 a, 1 1 b of alumina with a purity of at least 98% by weight have in the sintered state a total thickness of 900-1500 ⁇ .
  • This sensor element 10 can be loaded up to 1400 ° C. temperature. Taking into account the other mechanical and thermal properties results in a maximum heat output of 30 W is permitted. This corresponds to an electrical resistance of the heater 40 of about 5 ohms at room temperature.
  • the substrates 11a, 11b consist of alumina with a proportion of 3-15% by weight, in particular 10% by weight, of yttrium-stabilized zirconium oxide.
  • the two substrates 1 1 a, 1 1 b have a sintered thickness of together 800-1500 ⁇ .
  • This sensor element 10 can be loaded up to 1400 ° C. temperature. Taking into account the other mechanical and thermal properties results in a maximum heat output of 30 W is permitted. This corresponds to an electrical resistance of the heater 40 of about 5 ohms at room temperature.
  • the use of ceramic green sheets, which have a degree of filling of 65-85% by weight, has proven.
  • the substrates 1 1 1 a, 1 1 b made of cordierite
  • the two substrates 1 1 1 a, 1 1 b have a thickness of 800-2000 ⁇ together.
  • This sensor element 10 is loadable up to 1200 ° C temperature. Taking into account the further mechanical and thermal properties results in a maximum heat output of 40 W is permissible. This corresponds to an electrical resistance of the heater 40 of about 3.5 ohms at room temperature.
  • the use of ceramic green films, which have a degree of filling of 40-80% by weight, has proven.
  • the substrates 1 1 1 a, 1 1 b consist of forsterite (Mg 2 [SiO 4]).
  • the two substrates 1 1 a, 1 1 b have a thickness of 800-2000 ⁇ together.
  • This sensor element 10 is loadable up to 900 ° C temperature. Taking into account the further mechanical and thermal properties results in a maximum heat output of 40 W is permissible. This corresponds to an electrical resistance of the heater 40 of about 3.5 ohms at room temperature.
  • the use of ceramic green films, which have a degree of filling of 40-80% by weight, has proven.
  • the substrates 11a, 11b consist of mullite (65-80% Al 2 O 3, remainder SiO 2 Mg 2).
  • the two substrates 1 1 a, 1 1 b have a total thickness of 800-2000 ⁇ on.
  • This sensor element 10 is loadable up to 1200 ° C temperature. Under Considering the other mechanical and thermal properties results in a maximum heat output of 30 W is permissible. This corresponds to an electrical resistance of the heater 40 of about 5 ohms at room temperature.
  • the use of ceramic green films, which have a degree of filling of 40-80% by weight, has proven.
  • the substrates 11a, 11b consist of Mg-Al spinel (MgAl204).
  • the two substrates 1 1 a, 1 1 b have a thickness of 900 to 2000 ⁇ together.
  • This sensor element 10 is loadable up to 1000 ° C temperature. Taking into account the further mechanical and thermal properties results in a maximum heating power of 35 W is permissible. This corresponds to an electrical resistance of the heater 40 of about 4 ohms at room temperature.
  • the substrates 1 1 1 a, 1 1 b consist of ⁇ 2 ⁇ 05.
  • the two substrates 1 1 a, 1 1 b have a total thickness of 800-1800 ⁇ on.
  • This sensor element 10 can be loaded up to 1100 ° C. temperature. Taking into account the other mechanical and thermal properties results in that a maximum heating power of 25 W is permitted. This corresponds to an electrical resistance of the heater 40 of about 6 ohms at room temperature.
  • the use of ceramic green sheets, which have a degree of filling of 65- 85% by weight, has been proven.
  • the substrates 1 1 1 a, 1 1 b consist of Si 3 N 4.
  • the two substrates 1 1 a, 1 1 b have a thickness of 75-1600 ⁇ together.
  • This sensor element 10 can be loaded up to 1100 ° C. temperature. Taking into account the further mechanical and thermal properties results in a maximum heat output of 40 W is permissible. This corresponds to an electrical resistance of the heater 40 of about 3.5 ohms at room temperature.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

L'invention concerne un élément sensible plan, céramique destiné à un capteur de gaz pour détecter des particules dans un gaz, comportant une électrode interdigitée (14, 16) pouvant être exposée au gaz, un élément chauffant électrique (40) conçu en tant que piste conductrice, un élément de mesure de la température (30) conçu en tant que piste conductrice, et deux substrats céramiques (11a, 11b), un premier substrat céramique (11a) étant disposé entre l'électrode interdigitée (14, 16) et l'élément chauffant (40) et un deuxième substrat céramique (11b) étant disposé entre l'élément chauffant (40) et l'élément de mesure de la température (30), les substrats céramiques (11a, 11b) étant composés d'un matériau électriquement isolant.
PCT/EP2016/078521 2015-12-21 2016-11-23 Capteur de particules WO2017108314A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015226352.5A DE102015226352A1 (de) 2015-12-21 2015-12-21 Partikelsensor
DE102015226352.5 2015-12-21

Publications (1)

Publication Number Publication Date
WO2017108314A1 true WO2017108314A1 (fr) 2017-06-29

Family

ID=57394558

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/078521 WO2017108314A1 (fr) 2015-12-21 2016-11-23 Capteur de particules

Country Status (2)

Country Link
DE (1) DE102015226352A1 (fr)
WO (1) WO2017108314A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017210622A1 (de) * 2017-06-23 2018-12-27 Robert Bosch Gmbh Sensorelement für einen Abgassensor
CN108020494A (zh) * 2017-12-26 2018-05-11 中国科学院合肥物质科学研究院 一种耐温型高灵敏度电容式碳尘pm快速测量装置及方法
DE102018215322A1 (de) 2018-09-10 2020-03-12 Robert Bosch Gmbh Verfahren zum Test der Integrität einer gedruckten Leiterbahn
DE102019219552A1 (de) 2019-12-13 2021-06-17 Robert Bosch Gmbh Verfahren zur Erprobung eines keramischen Sensorelements für einen Abgassensor

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005017296A1 (de) * 2004-04-15 2006-02-02 Denso Corp., Kariya Mehrschichtiges Gassensorelement
DE102005051182A1 (de) * 2005-10-24 2007-04-26 Heraeus Sensor Technology Gmbh Störmungssensorelement und dessen Selbstreinigung
DE102005053120A1 (de) * 2005-11-08 2007-05-10 Robert Bosch Gmbh Sensorelement für Gassensoren und Verfahren zum Betrieb desselben
DE102008007664A1 (de) * 2008-02-06 2009-08-13 Robert Bosch Gmbh Keramisches Heizelement
DE102012202944A1 (de) * 2011-02-28 2012-08-30 Ngk Spark Plug Co., Ltd. Gassensorelement und Gassensor
DE102013212307A1 (de) * 2013-06-26 2013-09-19 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum
DE102013205037A1 (de) * 2013-03-21 2014-09-25 Robert Bosch Gmbh Sensorelement und Abgassensor aufweisend ein Sensorelement
DE102013211796A1 (de) * 2013-06-21 2014-12-24 Robert Bosch Gmbh Sensorelement mit Leiterbahn und Durchführung

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005017296A1 (de) * 2004-04-15 2006-02-02 Denso Corp., Kariya Mehrschichtiges Gassensorelement
DE102005051182A1 (de) * 2005-10-24 2007-04-26 Heraeus Sensor Technology Gmbh Störmungssensorelement und dessen Selbstreinigung
DE102005053120A1 (de) * 2005-11-08 2007-05-10 Robert Bosch Gmbh Sensorelement für Gassensoren und Verfahren zum Betrieb desselben
DE102008007664A1 (de) * 2008-02-06 2009-08-13 Robert Bosch Gmbh Keramisches Heizelement
DE102012202944A1 (de) * 2011-02-28 2012-08-30 Ngk Spark Plug Co., Ltd. Gassensorelement und Gassensor
DE102013205037A1 (de) * 2013-03-21 2014-09-25 Robert Bosch Gmbh Sensorelement und Abgassensor aufweisend ein Sensorelement
DE102013211796A1 (de) * 2013-06-21 2014-12-24 Robert Bosch Gmbh Sensorelement mit Leiterbahn und Durchführung
DE102013212307A1 (de) * 2013-06-26 2013-09-19 Robert Bosch Gmbh Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum

Also Published As

Publication number Publication date
DE102015226352A1 (de) 2017-06-22

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