WO2017107282A1 - Pixel circuit structure and fingerprint recognition system - Google Patents

Pixel circuit structure and fingerprint recognition system Download PDF

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Publication number
WO2017107282A1
WO2017107282A1 PCT/CN2016/072272 CN2016072272W WO2017107282A1 WO 2017107282 A1 WO2017107282 A1 WO 2017107282A1 CN 2016072272 W CN2016072272 W CN 2016072272W WO 2017107282 A1 WO2017107282 A1 WO 2017107282A1
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Prior art keywords
substrate
pixel circuit
circuit structure
capacitance
contact portion
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PCT/CN2016/072272
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French (fr)
Chinese (zh)
Inventor
刘毅成
杨孟达
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深圳市汇顶科技股份有限公司
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Publication of WO2017107282A1 publication Critical patent/WO2017107282A1/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1306Sensors therefor non-optical, e.g. ultrasonic or capacitive sensing

Definitions

  • the invention belongs to the technical field of fingerprint recognition, and in particular relates to a pixel circuit structure and a fingerprint identification system for reducing parasitic capacitance.
  • a fingerprint identification system includes a plurality of pixel circuits arranged in an array, each pixel circuit including a top electrode and a capacitance detecting circuit.
  • the top electrode is used to accept finger contact and form a contact capacitance with the finger.
  • the fingerprint identification system charges the contact capacitance and transmits the charge stored in the contact capacitance through charge sharing (Charge Sharing) or charge transfer (Charge Transferring) is converted into a fingerprint signal.
  • the capacitance detecting circuit determines the magnitude of the contact capacitance based on the fingerprint signal.
  • the top electrode will form a parasitic capacitance, and the parasitic capacitance is usually much larger than the contact capacitance, making the contact charge appear rather small, which is not conducive to the interpretation of the fingerprint signal, and even reduces the accuracy of fingerprint recognition. In view of this, how to improve the accuracy of fingerprint recognition has become one of the goals of the industry.
  • a first technical problem to be solved by embodiments of the present invention is to provide a pixel circuit structure capable of reducing parasitic capacitance to improve the disadvantages of the prior art.
  • a pixel circuit structure includes:
  • a contact portion disposed on the first side of the substrate for receiving contact with a finger
  • the capacitance detecting circuit is disposed on the second side of the substrate and coupled to the contact portion for detecting a capacitance between the contact portion and the finger.
  • a through hole (Via) is formed in the substrate, and the capacitance detecting circuit is coupled to the contact portion through the through hole.
  • the substrate is a silicon substrate (Silicon Substrate).
  • the through holes are formed by a through silicon via (TSV) process.
  • TSV through silicon via
  • the contact portion includes a top electrode, and the top electrode is coupled to the capacitance detecting circuit.
  • the contact portion further includes a passivation layer covering the top electrode.
  • an insulating layer is disposed between the top electrode and the substrate.
  • the capacitance detecting circuit includes a conductive layer, and the top electrode is coupled to the conductive layer.
  • a second technical problem to be solved by embodiments of the present invention is to provide a fingerprint identification system including the pixel circuit structure as described above.
  • the pixel circuit structure of the invention has the capacitance detecting circuit and the contacted portion connected to different sides of the substrate, thereby effectively reducing the parasitic capacitance, so that the fingerprint signal is more significant, thereby improving the accuracy of the fingerprint identification.
  • FIG. 1 is a schematic diagram of a pixel circuit structure provided by the prior art
  • FIG. 2 is a schematic diagram of a structure of a pixel circuit according to an embodiment of the present invention.
  • FIG. 1 is a schematic diagram of an existing pixel circuit structure 10 in an integrated circuit layout.
  • the pixel circuit structure 10 is applied to a fingerprint identification system.
  • the pixel circuit structure 10 includes a substrate SS, a capacitance detecting circuit CS, and a contact portion 100.
  • the substrate SS is a silicon substrate (Silicon
  • the contact portion 100 includes a first metal layer M1 (corresponding to the top electrode) and a passivation layer PV for receiving the contact of the finger; and the capacitance detecting circuit CS is disposed on the substrate SS and includes the second metal Layer M2 (corresponding to the conductive layer).
  • the passivation layer PV covers the first metal layer M1, and the contact capacitance CF (not shown) is formed between the first metal layer M1 and the finger, and the first metal layer M1 and the second metal layer M2 are A parasitic capacitance CP1 is formed therebetween.
  • the capacitance detecting circuit CS and the contact portion 100 are disposed on the same side of the substrate SS, the parasitic capacitance CP1 formed by the first metal layer M1 and the second metal layer M2 is generally much larger than The contact capacitance CF is not conducive to fingerprint recognition, and even reduces the accuracy of fingerprint recognition.
  • FIG. 2 is a schematic diagram of a pixel circuit structure 20 provided in an embodiment of the present invention (in an integrated circuit layout).
  • the pixel circuit structure 20 can be applied to a fingerprint recognition system. Similar to the pixel circuit structure 10, the pixel circuit structure 20 includes a substrate SS, a capacitance detecting circuit CS, and a contact portion 200.
  • the substrate SS may be a silicon substrate, and the contact portion 200 includes a first metal layer M1 and a passivation layer PV.
  • the contact portion 200 is used to receive contact with a finger, and a contact capacitance CF is formed between the first metal layer M1 and the finger. Not shown in the figure).
  • the fingerprint identification system charges the contact capacitance CF and forms a fingerprint signal, and the capacitance detection circuit CS can determine the size of the contact capacitance CF according to the fingerprint signal.
  • the capacitance detecting circuit CS may include a capacitor component such as a (transistor) switch, a capacitor, an operational amplifier, etc.
  • the circuit structure of the capacitance detecting circuit CS is well known to those skilled in the art, and thus will not be described herein.
  • the contact portion 200 and the capacitance detecting circuit CS are respectively disposed on different sides of the substrate SS, in other words, the contact portion 200 is disposed on the first side of the substrate SS. S1, and the capacitance detecting circuit CS is disposed on the second side S2 of the substrate SS. Setting the contact portion 200 and the capacitance detecting circuit CS on different sides of the substrate SS can effectively reduce the parasitic capacitance.
  • the capacitance detecting circuit CS is coupled to the contact portion 200 via the via Via. More specifically, the second metal layer M2 of the capacitance detecting circuit CS is coupled to the first metal layer M1 of the contact portion 200 through the via Via.
  • the through hole Via is directly coupled between the first metal layer M1 and the second metal layer M2 through the substrate SS, and the through hole Via can be perforated (Through) Silicon Via, TSV) process is formed.
  • an insulating layer IL is disposed between the first metal layer M1 and the first side S1 of the substrate SS.
  • the via hole Via is also coupled between the first metal layer M1 and the second metal layer M2 through the insulating layer IL.
  • the parasitic capacitance CP2 formed between the first metal layer M1 and the second metal layer M2 can be effectively reduced.
  • the parasitic capacitance CP2 can be reduced to half of the parasitic capacitance CP1 or even one tenth of the parasitic capacitance CP1 compared to the parasitic capacitance CP1. For example, assuming parasitic capacitance CP1 is 100 picofarad (pF), parasitic capacitance CP2 can be reduced to 10 to 50 pF.
  • the fingerprint signal formed by the fingerprint identification system charging the contact capacitance CF is more significant, and the fingerprint identification is more accurate.
  • the pixel circuit structure of the present invention connects the capacitance detecting circuit and the contacted portion to different sides of the substrate, effectively reducing parasitic capacitance, making the fingerprint signal more significant, thereby improving the accuracy of fingerprint recognition.
  • the passivation layer can be made of sapphire or glass material, and is not limited thereto.
  • the first metal layer may be a conductive layer made of a metal electrode or other materials, and is not limited thereto.
  • the pixel circuit structure of the present invention connects the capacitance detecting circuit and the contacted portion to different sides of the substrate, thereby effectively reducing the parasitic capacitance, so that the fingerprint signal is more significant, thereby improving the accuracy of fingerprint recognition.

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  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Image Input (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)

Abstract

Disclosed is a pixel circuit structure (20), comprising: a substrate (SS); a to-be-contacted portion (200) provided at a first side (S1) of the substrate (SS) and used for accepting a contact of a finger; and a capacitance detection circuit (CS) provided on a second side (S2) of the substrate, coupled to the to-be-contacted portion (200), and used for detecting a capacitance between the to-be-contacted portion (200) and the finger. A capacitance detection circuit (CS) and a to-be-contacted portion (200) are provided on different sides of a substrate (SS) by a pixel circuit structure (20), so that the parasitic capacitance (CP2) can be effectively reduced, and a fingerprint signal is relatively significant, thereby enhancing the accuracy of fingerprint recognition.

Description

像素电路结构及指纹辨识系统  Pixel circuit structure and fingerprint identification system 技术领域Technical field
本发明属于指纹识别技术领域,尤其涉及一种降低寄生电容的像素电路结构及指纹辨识系统。 The invention belongs to the technical field of fingerprint recognition, and in particular relates to a pixel circuit structure and a fingerprint identification system for reducing parasitic capacitance.
背景技术Background technique
随着科技日新月异,移动手机、数字相机、平板计算机、笔记本电脑等越来越多便携式电子装置已经成为了人们生活中必备之工具。由于便携式电子装置一般为个人使用,而具有一定的隐私性,因此其内部储存的数据,例如电话簿、相片、个人信息等等为私人所有。若电子装置一旦丢失,则这些数据可能会被他人所利用,而造成不必要的损失。虽然目前已有利用密码保护的方式来避免电子装置为他人所使用,但密码容易泄露或遭到破解,具有较低的安全性。并且,用户需记住密码才能使用电子装置,若忘记密码,则会带来许多不便。因此,目前发展出利用个人指纹辨识系统的方式来达到身份认证的目的,以提升数据安全性。With the rapid development of technology, more and more portable electronic devices such as mobile phones, digital cameras, tablet computers, and notebook computers have become essential tools in people's lives. Since portable electronic devices are generally used by individuals and have a certain degree of privacy, their internally stored data, such as phone books, photos, personal information, and the like, are privately owned. If the electronic device is lost, the data may be used by others and cause unnecessary losses. Although password protection has been used to prevent electronic devices from being used by others, passwords are easily leaked or cracked, and have low security. Moreover, the user needs to remember the password in order to use the electronic device, and if the password is forgotten, it will bring a lot of inconvenience. Therefore, the use of personal fingerprint identification systems to achieve identity authentication has been developed to improve data security.
一般来说,指纹辨识系统包含排列成数组的多个像素电路,每一像素电路包含顶层电极和电容检测电路。顶层电极用来接受手指的接触,并与手指形成接触电容。指纹辨识系统对接触电容充电,并将储存于接触电容的电荷透过电荷分享(Charge Sharing)或电荷转移(Charge Transferring)的方式转换成指纹信号。电容检测电路根据指纹信号判断接触电容的大小。然而,顶层电极会另形成寄生电容,而寄生电容通常远大于接触电容,使得接触电荷显得相当微小而不利于指纹信号的判读,甚至降低指纹辨识的精确度。有鉴于此,如何提升指纹辨识的精确度就成为业界所努力的目标之一。In general, a fingerprint identification system includes a plurality of pixel circuits arranged in an array, each pixel circuit including a top electrode and a capacitance detecting circuit. The top electrode is used to accept finger contact and form a contact capacitance with the finger. The fingerprint identification system charges the contact capacitance and transmits the charge stored in the contact capacitance through charge sharing (Charge Sharing) or charge transfer (Charge Transferring) is converted into a fingerprint signal. The capacitance detecting circuit determines the magnitude of the contact capacitance based on the fingerprint signal. However, the top electrode will form a parasitic capacitance, and the parasitic capacitance is usually much larger than the contact capacitance, making the contact charge appear rather small, which is not conducive to the interpretation of the fingerprint signal, and even reduces the accuracy of fingerprint recognition. In view of this, how to improve the accuracy of fingerprint recognition has become one of the goals of the industry.
技术问题technical problem
本发明实施例所要解决的第一个技术问题在于提供一种可降低寄生电容的像素电路结构,以改善现有技术的缺点。 A first technical problem to be solved by embodiments of the present invention is to provide a pixel circuit structure capable of reducing parasitic capacitance to improve the disadvantages of the prior art.
技术解决方案Technical solution
本发明实施例是这样实现的,一种像素电路结构,包含有:The embodiment of the present invention is implemented as follows. A pixel circuit structure includes:
基板;Substrate
受触部,设置于所述基板的第一侧,用来接受手指的接触;以及a contact portion disposed on the first side of the substrate for receiving contact with a finger;
电容检测电路,设置于所述基板的第二侧,耦接于所述受触部,用来检测所述受触部与所述手指之间的电容。The capacitance detecting circuit is disposed on the second side of the substrate and coupled to the contact portion for detecting a capacitance between the contact portion and the finger.
进一步地,所述基板中形成穿孔(Via),所述电容检测电路透过所述穿孔耦接于所述受触部。Further, a through hole (Via) is formed in the substrate, and the capacitance detecting circuit is coupled to the contact portion through the through hole.
进一步地,所述基板为硅基板(Silicon Substrate)。Further, the substrate is a silicon substrate (Silicon Substrate).
进一步地,所述穿孔由硅穿孔(Through Silicon Via,TSV)制程所形成。Further, the through holes are formed by a through silicon via (TSV) process.
进一步地,所述受触部包含顶层电极,所述顶层电极耦接于所述电容检测电路。Further, the contact portion includes a top electrode, and the top electrode is coupled to the capacitance detecting circuit.
进一步地,所述受触部还包含钝化层,所述钝化层覆盖所述顶层电极。Further, the contact portion further includes a passivation layer covering the top electrode.
进一步地,所述顶层电极与所述基板之间设置有绝缘层。Further, an insulating layer is disposed between the top electrode and the substrate.
进一步地,所述电容检测电路包含导电层,所述顶层电极耦接于所述导电层。Further, the capacitance detecting circuit includes a conductive layer, and the top electrode is coupled to the conductive layer.
本发明实施例所要解决的第二个技术问题在于提供一种指纹辨识系统,包含如上所述的像素电路结构。A second technical problem to be solved by embodiments of the present invention is to provide a fingerprint identification system including the pixel circuit structure as described above.
有益效果Beneficial effect
本发明的像素电路结构将电容检测电路与受触部接设置于基板的不同侧,有效降低寄生电容,使得指纹信号较为显著,进而增进指纹辨识的精确度。 The pixel circuit structure of the invention has the capacitance detecting circuit and the contacted portion connected to different sides of the substrate, thereby effectively reducing the parasitic capacitance, so that the fingerprint signal is more significant, thereby improving the accuracy of the fingerprint identification.
附图说明DRAWINGS
图1为现有技术提供的像素电路结构的示意图;1 is a schematic diagram of a pixel circuit structure provided by the prior art;
图2为本发明实施例提供的像素电路结构的示意图。2 is a schematic diagram of a structure of a pixel circuit according to an embodiment of the present invention.
本发明的实施方式Embodiments of the invention
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
请参考图1,图1为集成电路布局中现有的像素电路结构10的示意图。像素电路结构10应用于指纹辨识系统,像素电路结构10包含有基板SS、电容检测电路CS和受触部100。基板SS为硅基板(Silicon Substrate);受触部100包含有第一金属层M1(对应顶层电极)和钝化层PV,用来接受手指的接触;而电容检测电路CS设置于基板SS之上,并包含有第二金属层M2(对应导电层)。其中,钝化层PV覆盖于第一金属层M1之上,第一金属层M1与手指之间形成接触电容CF(图中未示出),而第一金属层M1与第二金属层M2之间形成寄生电容CP1。需注意的是,在像素电路结构10中,因电容检测电路CS和受触部100设置在基板SS的同一侧,第一金属层M1与第二金属层M2所形成的寄生电容CP1通常远大于接触电容CF,而不利于指纹辨识,甚至降低指纹辨识的精确度。Please refer to FIG. 1. FIG. 1 is a schematic diagram of an existing pixel circuit structure 10 in an integrated circuit layout. The pixel circuit structure 10 is applied to a fingerprint identification system. The pixel circuit structure 10 includes a substrate SS, a capacitance detecting circuit CS, and a contact portion 100. The substrate SS is a silicon substrate (Silicon The contact portion 100 includes a first metal layer M1 (corresponding to the top electrode) and a passivation layer PV for receiving the contact of the finger; and the capacitance detecting circuit CS is disposed on the substrate SS and includes the second metal Layer M2 (corresponding to the conductive layer). The passivation layer PV covers the first metal layer M1, and the contact capacitance CF (not shown) is formed between the first metal layer M1 and the finger, and the first metal layer M1 and the second metal layer M2 are A parasitic capacitance CP1 is formed therebetween. It should be noted that in the pixel circuit structure 10, since the capacitance detecting circuit CS and the contact portion 100 are disposed on the same side of the substrate SS, the parasitic capacitance CP1 formed by the first metal layer M1 and the second metal layer M2 is generally much larger than The contact capacitance CF is not conducive to fingerprint recognition, and even reduces the accuracy of fingerprint recognition.
为了提升指纹辨识的精确度,可将第一金属层M1和钝化层PV设置于基板SS的另一侧,如此一来,可有效降低寄生电容的电容值。具体来说,请参考图2,图2为本发明实施例(集成电路布局中)提供的像素电路结构20的示意图。In order to improve the accuracy of fingerprint recognition, the first metal layer M1 and the passivation layer PV may be disposed on the other side of the substrate SS, so that the capacitance value of the parasitic capacitance can be effectively reduced. Specifically, please refer to FIG. 2. FIG. 2 is a schematic diagram of a pixel circuit structure 20 provided in an embodiment of the present invention (in an integrated circuit layout).
像素电路结构20可应用于指纹辨识系统中。类似于像素电路结构10,像素电路结构20包含有基板SS、电容检测电路CS和受触部200。基板SS可为硅基板,受触部200包含有第一金属层M1和钝化层PV,受触部200用来接受手指的接触,第一金属层M1与手指之间形成有接触电容CF(图中未示出)。指纹辨识系统对接触电容CF充电并形成指纹信号,电容检测电路CS可根据指纹信号判断接触电容CF的大小。电容检测电路CS可包含(晶体管)开关、电容、运算放大器等电容组件,电容检测电路CS的电路结构为本领域技术人员所熟知,故不在此赘述。与像素电路结构10不同的是,在像素电路结构20中,受触部200与电容检测电路CS分别设置于基板SS之不同侧,换句话说,受触部200设置于基板SS的第一侧S1,而电容检测电路CS设置于基板SS的第二侧S2。将受触部200与电容检测电路CS设置于基板SS的不同侧可有效降低寄生电容。The pixel circuit structure 20 can be applied to a fingerprint recognition system. Similar to the pixel circuit structure 10, the pixel circuit structure 20 includes a substrate SS, a capacitance detecting circuit CS, and a contact portion 200. The substrate SS may be a silicon substrate, and the contact portion 200 includes a first metal layer M1 and a passivation layer PV. The contact portion 200 is used to receive contact with a finger, and a contact capacitance CF is formed between the first metal layer M1 and the finger. Not shown in the figure). The fingerprint identification system charges the contact capacitance CF and forms a fingerprint signal, and the capacitance detection circuit CS can determine the size of the contact capacitance CF according to the fingerprint signal. The capacitance detecting circuit CS may include a capacitor component such as a (transistor) switch, a capacitor, an operational amplifier, etc. The circuit structure of the capacitance detecting circuit CS is well known to those skilled in the art, and thus will not be described herein. Different from the pixel circuit structure 10, in the pixel circuit structure 20, the contact portion 200 and the capacitance detecting circuit CS are respectively disposed on different sides of the substrate SS, in other words, the contact portion 200 is disposed on the first side of the substrate SS. S1, and the capacitance detecting circuit CS is disposed on the second side S2 of the substrate SS. Setting the contact portion 200 and the capacitance detecting circuit CS on different sides of the substrate SS can effectively reduce the parasitic capacitance.
电容检测电路CS透过穿孔Via耦接于受触部200,更精确的说,电容检测电路CS的第二金属层M2透过穿孔Via耦接于受触部200的第一金属层M1。穿孔Via直接穿过基板SS而耦接于第一金属层M1与第二金属层M2之间,穿孔Via可由硅穿孔(Through Silicon Via,TSV)制程所形成。此外,第一金属层M1与基板SS的第一侧S1之间另设置有一绝缘层IL,穿孔Via亦穿过绝缘层IL而耦接于第一金属层M1与第二金属层M2之间。The capacitance detecting circuit CS is coupled to the contact portion 200 via the via Via. More specifically, the second metal layer M2 of the capacitance detecting circuit CS is coupled to the first metal layer M1 of the contact portion 200 through the via Via. The through hole Via is directly coupled between the first metal layer M1 and the second metal layer M2 through the substrate SS, and the through hole Via can be perforated (Through) Silicon Via, TSV) process is formed. In addition, an insulating layer IL is disposed between the first metal layer M1 and the first side S1 of the substrate SS. The via hole Via is also coupled between the first metal layer M1 and the second metal layer M2 through the insulating layer IL.
如此一来,第一金属层M1与第二金属层M2之间所形成的寄生电容CP2可有效降低。相较于寄生电容CP1,寄生电容CP2可降低至寄生电容CP1的一半甚至寄生电容CP1的十分之一。举例来说,假设寄生电容CP1为100皮法拉(picofarad,pF),寄生电容CP2可降至10~50pF。在降低寄生电容CP2的情形下,指纹辨识系统对接触电容CF充电所形成的指纹信号较为显著,而使指纹辨识更加精准。As a result, the parasitic capacitance CP2 formed between the first metal layer M1 and the second metal layer M2 can be effectively reduced. The parasitic capacitance CP2 can be reduced to half of the parasitic capacitance CP1 or even one tenth of the parasitic capacitance CP1 compared to the parasitic capacitance CP1. For example, assuming parasitic capacitance CP1 is 100 picofarad (pF), parasitic capacitance CP2 can be reduced to 10 to 50 pF. In the case of reducing the parasitic capacitance CP2, the fingerprint signal formed by the fingerprint identification system charging the contact capacitance CF is more significant, and the fingerprint identification is more accurate.
在现有的像素电路结构中,因电容检测电路与受触部接设置于基板的同一侧,而形成较大的寄生电容,不利于指纹辨识,甚至降低指纹辨识的精确度。相较之下,本发明的像素电路结构将电容检测电路与受触部接设置于基板的不同侧,有效降低寄生电容,使得指纹信号更为显著,进而增进指纹辨识的精确度。In the existing pixel circuit structure, since the capacitance detecting circuit and the contacted portion are disposed on the same side of the substrate, a large parasitic capacitance is formed, which is disadvantageous for fingerprint recognition and even reduces the accuracy of fingerprint recognition. In contrast, the pixel circuit structure of the present invention connects the capacitance detecting circuit and the contacted portion to different sides of the substrate, effectively reducing parasitic capacitance, making the fingerprint signal more significant, thereby improving the accuracy of fingerprint recognition.
需注意的是,前述实施例是用以说明本发明的概念,本领域技术人员当可据以做不同之修饰,而不限于此。举例来说,钝化层可为蓝宝石或玻璃材质所制成,而不限于此。另外,第一金属层可为金属电极或其他材质所制成的导电层,而不限于此。It should be noted that the foregoing embodiments are used to explain the concept of the present invention, and those skilled in the art can make various modifications, and are not limited thereto. For example, the passivation layer can be made of sapphire or glass material, and is not limited thereto. In addition, the first metal layer may be a conductive layer made of a metal electrode or other materials, and is not limited thereto.
综上所述,本发明的像素电路结构将电容检测电路与受触部接设置于基板的不同侧,有效降低寄生电容,使得指纹信号较为显著,进而增进指纹辨识的精确度。In summary, the pixel circuit structure of the present invention connects the capacitance detecting circuit and the contacted portion to different sides of the substrate, thereby effectively reducing the parasitic capacitance, so that the fingerprint signal is more significant, thereby improving the accuracy of fingerprint recognition.
以上仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above are only the preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalents, and improvements made within the spirit and scope of the present invention should be included in the scope of the present invention. Inside.

Claims (9)

  1. 一种像素电路结构,其特征在于,包含有: A pixel circuit structure characterized by comprising:
    基板;Substrate
    受触部,设置于所述基板的第一侧,用来接受手指的接触;以及a contact portion disposed on the first side of the substrate for receiving contact with a finger;
    电容检测电路,设置于所述基板的第二侧,耦接于所述受触部,用来检测所述受触部与所述手指之间的电容。The capacitance detecting circuit is disposed on the second side of the substrate and coupled to the contact portion for detecting a capacitance between the contact portion and the finger.
  2. 如权利要求1所述的像素电路结构,其特征在于,所述基板中形成穿孔(Via),所述电容检测电路透过所述穿孔耦接于所述受触部。 The pixel circuit structure of claim 1 , wherein a via is formed in the substrate, and the capacitance detecting circuit is coupled to the contact portion through the through hole.
  3. 如权利要求2所述的像素电路结构,其特征在于,所述基板为硅基板(Silicon Substrate)。The pixel circuit structure according to claim 2, wherein said substrate is a silicon substrate (Silicon Substrate).
  4. 如权利要求3所述的像素电路结构,其特征在于,所述穿孔由硅穿孔(Through Silicon Via,TSV)制程所形成。The pixel circuit structure of claim 3, wherein the via is made of through silicon (Through Silicon Via, TSV) process is formed.
  5. 如权利要求1所述的像素电路结构,其特征在于,所述受触部包含顶层电极,所述顶层电极耦接于所述电容检测电路。The pixel circuit structure of claim 1 , wherein the contact portion comprises a top electrode, and the top electrode is coupled to the capacitance detecting circuit.
  6. 如权利要求5所述的像素电路结构,其特征在于,所述受触部还包含钝化层,所述钝化层覆盖所述顶层电极。The pixel circuit structure of claim 5, wherein the contact portion further comprises a passivation layer, the passivation layer covering the top electrode.
  7. 如权利要求5所述的像素电路结构,其特征在于,所述顶层电极与所述基板之间设置有绝缘层。The pixel circuit structure according to claim 5, wherein an insulating layer is disposed between the top electrode and the substrate.
  8. 如权利要求5所述的像素电路结构,其特征在于,所述电容检测电路包含导电层,所述顶层电极耦接于所述导电层。The pixel circuit structure of claim 5, wherein the capacitance detecting circuit comprises a conductive layer, and the top electrode is coupled to the conductive layer.
  9. 一种指纹辨识系统,其特征在于,包含如权利要求1~8任一项所述的像素电路结构。A fingerprint identification system comprising the pixel circuit structure according to any one of claims 1 to 8.
PCT/CN2016/072272 2015-12-25 2016-01-27 Pixel circuit structure and fingerprint recognition system WO2017107282A1 (en)

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