WO2017097206A1 - Surging type electrode manufacturing system - Google Patents

Surging type electrode manufacturing system Download PDF

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Publication number
WO2017097206A1
WO2017097206A1 PCT/CN2016/108912 CN2016108912W WO2017097206A1 WO 2017097206 A1 WO2017097206 A1 WO 2017097206A1 CN 2016108912 W CN2016108912 W CN 2016108912W WO 2017097206 A1 WO2017097206 A1 WO 2017097206A1
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surge
tank
pipe
waste liquid
liquid discharge
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PCT/CN2016/108912
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French (fr)
Chinese (zh)
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赵宗轩
陶少勋
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金英花
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/08Apparatus, e.g. for photomechanical printing surfaces

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  • the present invention relates to the field of electrode preparation technology, and in particular, to a surge electrode fabrication system.
  • the yellow light process mainly uses the working method of spray chemical liquid to complete the processes of exposure, development, etching and stripping.
  • the nozzles of each section must be kept unblocked, and there is no blockage.
  • the solution, spray water and spray pressure need to be precisely controlled.
  • the liquid ejected from the nozzle generates a certain impact force, which directly acts on the electrode surface of the touch screen, and develops and etches when producing an electrode structure of an electrode, especially a very fine mesh line (width 1-10 ⁇ m). Products such as stripping and removing processes are very likely to cause damage and reduce product yield.
  • the present invention provides an surge electrode fabrication system that can effectively avoid damage to the grid structure of the electrodes, and can be used for electrode line preparation.
  • An surge electrode fabrication system comprising a reaction system and a circulation system, the reaction system comprising an outer tank, an inner tank and an surge device disposed in the outer tank, the circulation system including the outer tank a liquid inlet pipe connected to the bottom of the inner tank, a liquid outlet pipe connecting the bottom of the outer tank, and a power device connected between the liquid inlet pipe and the liquid discharge pipe; the surge device is disposed at the
  • the inner tank includes a conveying device for conveying an electrode from the outlet pipe side toward the inlet pipe side after the liquid in the inner tank is not over the electrode.
  • the surge device further includes a transfer pipe connected to the liquid inlet pipe, the transfer pipe being vertically disposed in the inner tank near the inlet pipe side and having a top end higher than the conveying device.
  • the surge device further includes a branch pipe that connects the duct and extends toward the side of the inlet pipe.
  • At least one branch of the power tube is connected to the branch pipe.
  • a plurality of through holes are formed in the pipe wall of the branch pipe.
  • the plurality of branch pipes are connected to a plurality of portions of the side wall of the conveying pipe at intervals.
  • the surge electrode fabrication system further includes a waste liquid discharge system connected to the bottom of the outer tank.
  • the inner groove is spaced apart from the bottom surface of the outer groove, and the bottom surface of the outer groove and the bottom of the inner groove are simultaneously connected to the waste liquid discharge system.
  • the circulation system further includes a circulation tank connected between the discharge pipe and the power unit.
  • the bottom of the circulation tank is connected to the waste liquid discharge system.
  • the electrode fabrication system of the present invention does not use a conventional nozzle to spray a chemical liquid on the surface of the electrode, but immerses the liquid through the electrode product and performs a relatively gentle treatment on the surface of the electrode by continuously circulating the liquid to achieve development, etching, and
  • the production process of each stage of stripping can be used for the production of extremely fine copper grid lines without being easily damaged, which improves the yield of the product.
  • FIG. 1 is a schematic structural view of a surge electrode manufacturing system according to an embodiment of the present invention.
  • a surging electrode fabrication system includes a reaction system 1 and a circulation system 2 for placing an electrode product and performing development, etching, and stripping processes, including an outer tank 11 and
  • the inner tank 12 and the surge device 13 in the outer tank 11 and the circulation system 2 include an inlet pipe 21, a liquid outlet pipe 22 and a power unit 23, and the inlet pipe 21 passes through the outer tank 11 and is connected to the bottom of the inner tank 12.
  • the liquid outlet pipe 22 is connected to the bottom of the outer tank 11 and on a different side from the inlet pipe 21.
  • the power unit 23 includes a power pump connected between the inlet pipe 21 and the outlet pipe 22 for supplying power to the circulation system 2 to allow the liquid to flow from the inlet pipe 21 into the inner tank 12 and to the electrode in the inner tank 12.
  • the liquid level reaches a certain height and overflows from the inner tank 12, and flows into the outer tank 11 and flows out from the liquid outlet tube 22 to realize the liquid circulation.
  • the surge device 13 is disposed in the inner tank 12, and includes a conveying device 131 for conveying the electrode from the side of the liquid outlet pipe 22 toward the liquid inlet pipe 21 side after the liquid in the inner tank 12 is not over the electrode.
  • the conveying device 131 is a plurality of conveying rollers arranged horizontally, and both sides of the electrode product placed on the conveying roller can be infiltrated by the liquid in the inner tank 12, and various processes are completed under the surge of the liquid.
  • a set of air knives 10 are respectively installed between the outer groove 11 and the side wall of the inner groove 12, and each set of air knives 10 is disposed on opposite sides of the electrode product, one set of the air knife 10 (close to the side of the liquid outlet pipe 22) After the air knife is blown dry on both sides of the electrode product, the electrode product is sent into the inner tank 12 by the conveying device 131 to be immersed in the liquid and subjected to surge treatment to complete development, etching and stripping, and then through the outer tank 11 A set of air knives 10 (the air knife 10 on the side close to the inlet pipe 21) is dried and sent out. At the same time, since the inner tank 12 is close to the conveying inlet and the outlet of the electrode product, liquid overflows.
  • the air knife 10 on both sides of the inner tank 12 can also form two during the working process.
  • the barrier prevents the overflowing liquid from being trapped in the two barriers, preventing the liquid from overflowing along the handling device 131 to the outside of the outer tank 11.
  • the surge device 13 includes a conveying device 131, a conveying pipe 132, and a branch pipe 133.
  • the conveying pipe 132 is connected to the liquid inlet pipe 21, and is vertically disposed in the inner tank 12 and is closer to the liquid inlet pipe 21 than the liquid discharging pipe 22.
  • a plurality of branch pipes 133 are intermittently connected to a plurality of portions of the conveying pipe 132 and extend toward the liquid inlet pipe 21, and the top end of the conveying pipe 132 is higher than the conveying device 131, thereby ensuring that the liquid flowing out from the uppermost branch pipe 133 can be From the top to the bottom, the liquid flowing out of the branch pipe 133 below the conveying device 131 can surge from the bottom to the top, so that the surface of the electrode is sufficiently and gently stressed.
  • the top of the delivery tube 132 can also be perforated with liquid flowing from its top end.
  • a plurality of through holes may be opened above and below the pipe wall of each branch pipe 133, and liquid may flow out from all directions of the pipe wall, and at the same time, at least one branch of the power pipe is disposed in each branch pipe 133.
  • the power tube 133a is preferably a plurality of, spacedly connected to the pipe wall of each branch pipe 133, perpendicular to the corresponding branch pipe 133 and parallel to the bottom of the inner groove 12 (ie, horizontally disposed), and each power pipe 133a may also be A through hole for the liquid to flow out is opened, so that the outflow portion of the liquid is more, which improves the surge effect of the liquid.
  • the power pump of the power unit 23 is a variable frequency power pump, and its operating frequency can be adjusted within a certain range, such as 35-75 Hz. By adjusting its working frequency, the speed of the liquid injected from the branch pipe 133 and the power tube 133a can be changed accordingly, thereby The speed of the liquid flowing into and out of the inner tank 12 is controlled in real time, and the surge amplitude is indirectly controlled.
  • the circulation system 2 further includes a large-capacity circulation tank 24 connected between the discharge pipe 22 and the power unit 23.
  • the top end of the liquid outlet tube 22 of the present embodiment is disposed higher than the outer tank 11 due to the occurrence of deposit impurities during development, etching, etc. of the electrode.
  • the bottom surface makes it difficult for the sediment to clog the liquid outlet tube 22.
  • a filtering device 25 is connected between the inlet pipe 21 and the power unit 23, and the liquid flowing out from the liquid outlet pipe 22 can be filtered to further avoid the blockage of the pipe.
  • the filtering device 25 includes a coarse filter core 25a and a fine filter core 25b, and the coarse filter core 25a is disposed near one end of the liquid outlet tube 22, and the fine filter element 25b is disposed near one end of the liquid inlet tube 21.
  • the liquid flowing out through the liquid outlet tube 22 is filtered through the coarse filter element 25a and the fine filter element 25b in two steps, and continuously forms a fresh liquid into the inner tank. 12, less liquid impurities.
  • the filtration precision of the coarse filter element 25a was 10 ⁇ m
  • the filtration precision of the fine filter element 25b was 1 ⁇ m.
  • a control valve 26 and a pressure gauge 27 are sequentially connected between the power unit 23 and the filter unit 25, and when the liquid level needs to be lifted to make the electrode product immersed, The control valve 26 is opened and the power of the power unit 23 is adjusted until the liquid level rises to a suitable position.
  • the embodiment is further provided with a waste liquid discharge system 3, the inner tank 12 is spaced apart from the bottom surface of the outer tank 11, and the bottom surface of the outer tank 11 and the bottom of the inner tank 12 are simultaneously connected to the waste liquid discharge system 3, and the outer tank 11 A bottom portion and a portion of the bottom portion of the inner tank 12 connected to the waste liquid discharge system 3 are respectively provided with a drain valve 30, and the bottom of the circulation tank 24 is also connected to the waste liquid discharge system 3, and the discharge port of the waste liquid discharge system 3 is further provided with a discharge port.
  • the total drain valve 30 is configured such that the waste liquid precipitated by the outer tank 11, the inner tank 12 and the circulation tank 24 flows out to the waste liquid discharge system 3 through the bottom of the three, and can no longer be used when the liquid is used for a certain number of times. By opening all the drain valves 30 of the waste liquid discharge system 3, the waste liquid can be discharged to the neutralization tank, and discharged after being neutralized by acid and alkali to neutral.
  • the electrode fabrication system of the present invention does not use a conventional nozzle to spray a chemical liquid on the surface of the electrode, but immerses the liquid through the electrode product and performs a relatively gentle treatment on the surface of the electrode by continuously circulating the liquid to achieve development, etching, and
  • the production process of each stage of stripping can be used for the production of very fine copper grid lines (especially line width 1-10 ⁇ m) without damage, which improves the yield of the product, and at the same time, the chemical liquid can be recycled.
  • the use of multiple times saves the production cost, and the chemical liquid that can no longer be used can be discharged after being treated by the waste liquid discharge system, thereby reducing pollution.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
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Abstract

A surging type electrode manufacturing system, comprising a reaction system (1) and a circulating system (2). The reaction system (1) comprises an outer tank (11), an inner tank (12) provided inside the outer tank (11), and a surging apparatus (13). The circulating system (2) comprises a liquid inlet pipe (21) communicated with the bottom of the inner tank (12) after penetrating through the outer tank (11), a liquid outlet pipe (22) communicated with the bottom of the outer tank (11), and a power apparatus (23) connected between the liquid inlet pipe (21) and the liquid outlet pipe (22). The surging apparatus (13) is arranged inside the inner tank (12), and comprises a conveying apparatus (131) for conveying electrodes from the liquid outlet pipe (22) side to the liquid inlet pipe (21) side after the electrodes are immersed by liquid in the inner tank (12).

Description

一种涌动式电极制作系统Surge electrode manufacturing system 技术领域Technical field
本发明涉及电极制备技术领域,尤其涉及一种涌动式电极制作系统。The present invention relates to the field of electrode preparation technology, and in particular, to a surge electrode fabrication system.
背景技术Background technique
作为目前最为主流的触摸屏制作工艺,黄光制程被普遍应用在触摸屏厂商的生产过程中。黄光制程主要采用喷淋化学液的工作方式完成曝光、显影、蚀刻和脱膜等工序,而在整个工艺过程中,各段的喷头必须要保持畅通,不能有堵塞现象,同时,各段喷射溶液、喷淋水和喷射压力需要精确控制。液体喷淋时,从喷头喷出的液体产生一定的冲击力,直接作用于触摸屏的电极表面,在生产电极尤其是极细网格线条(宽度为1-10μm)的电极结构时对显影、蚀刻、脱膜等工序的产品非常容易造成损坏,降低了产品良率。As the most mainstream touch screen production process, the Huangguang process is widely used in the production process of touch screen manufacturers. The yellow light process mainly uses the working method of spray chemical liquid to complete the processes of exposure, development, etching and stripping. In the whole process, the nozzles of each section must be kept unblocked, and there is no blockage. The solution, spray water and spray pressure need to be precisely controlled. When the liquid is sprayed, the liquid ejected from the nozzle generates a certain impact force, which directly acts on the electrode surface of the touch screen, and develops and etches when producing an electrode structure of an electrode, especially a very fine mesh line (width 1-10 μm). Products such as stripping and removing processes are very likely to cause damage and reduce product yield.
发明内容Summary of the invention
鉴于现有技术存在的不足,本发明提供了一种可有效避免电极的网格结构损坏的涌动式电极制作系统,可用于电极线路的制备。In view of the deficiencies of the prior art, the present invention provides an surge electrode fabrication system that can effectively avoid damage to the grid structure of the electrodes, and can be used for electrode line preparation.
为了实现上述的目的,本发明采用了如下的技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:
一种涌动式电极制作系统,包括反应系统和循环系统,所述反应系统包括外槽、设于所述外槽内的内槽和涌动装置,所述循环系统包括穿过所述外槽后连通所述内槽底部的进液管、连通所述外槽底部的出液管以及连接在所述进液管和所述出液管之间的动力装置;所述涌动装置设于所述内槽内,包括用于在所述内槽内的液体没过电极后自所述出液管一侧朝所述进液管一侧传送电极的搬运装置。An surge electrode fabrication system comprising a reaction system and a circulation system, the reaction system comprising an outer tank, an inner tank and an surge device disposed in the outer tank, the circulation system including the outer tank a liquid inlet pipe connected to the bottom of the inner tank, a liquid outlet pipe connecting the bottom of the outer tank, and a power device connected between the liquid inlet pipe and the liquid discharge pipe; the surge device is disposed at the The inner tank includes a conveying device for conveying an electrode from the outlet pipe side toward the inlet pipe side after the liquid in the inner tank is not over the electrode.
进一步地,所述涌动装置还包括连接所述进液管的输送管,所述输送管竖直设于所述内槽内靠近所述进液管侧且顶端高于所述搬运装置。Further, the surge device further includes a transfer pipe connected to the liquid inlet pipe, the transfer pipe being vertically disposed in the inner tank near the inlet pipe side and having a top end higher than the conveying device.
进一步地,所述涌动装置还包括连接所述输送管并朝所述进液管侧延伸的支管。 Further, the surge device further includes a branch pipe that connects the duct and extends toward the side of the inlet pipe.
进一步地,所述支管上连接有至少一根分支的动力管。Further, at least one branch of the power tube is connected to the branch pipe.
进一步地,所述支管的管壁上开设有多个通孔。Further, a plurality of through holes are formed in the pipe wall of the branch pipe.
进一步地,所述支管为多根,间隔地连接在所述输送管的侧壁的多个部位。Further, the plurality of branch pipes are connected to a plurality of portions of the side wall of the conveying pipe at intervals.
进一步地,所述的涌动式电极制作系统还包括废液排放系统,所述废液排放系统连接在所述外槽底部。Further, the surge electrode fabrication system further includes a waste liquid discharge system connected to the bottom of the outer tank.
进一步地,所述内槽与所述外槽的底面间隔设置,所述外槽的底面和所述内槽底部同时连接所述废液排放系统。Further, the inner groove is spaced apart from the bottom surface of the outer groove, and the bottom surface of the outer groove and the bottom of the inner groove are simultaneously connected to the waste liquid discharge system.
进一步地,所述循环系统还包括连接在所述出液管和所述动力装置之间的循环箱。Further, the circulation system further includes a circulation tank connected between the discharge pipe and the power unit.
进一步地,所述循环箱的底部与所述废液排放系统连接。Further, the bottom of the circulation tank is connected to the waste liquid discharge system.
本发明的电极制作系统并不使用传统的喷头对电极表面喷射化学液,而是将液体浸过电极产品并利用不断循环涌动的液体对电极表面进行比较平和的处理,可以实现显影、蚀刻和脱膜各阶段的制作过程,可以用于极细的铜网格线条的制作而不易损坏,很好的提高了产品的良率。The electrode fabrication system of the present invention does not use a conventional nozzle to spray a chemical liquid on the surface of the electrode, but immerses the liquid through the electrode product and performs a relatively gentle treatment on the surface of the electrode by continuously circulating the liquid to achieve development, etching, and The production process of each stage of stripping can be used for the production of extremely fine copper grid lines without being easily damaged, which improves the yield of the product.
附图说明DRAWINGS
图1为本发明实施例的涌动式电极制作系统的结构示意图。FIG. 1 is a schematic structural view of a surge electrode manufacturing system according to an embodiment of the present invention.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
参阅图1,本发明实施例的涌动式电极制作系统包括反应系统1和循环系统2,反应系统1用于放置电极产品并进行显影、蚀刻和脱膜各个制程,包括外槽11、设于外槽11内的内槽12和涌动装置13,而循环系统2包括进液管21、出液管22和动力装置23,进液管21穿过外槽11后连接在内槽12的底部,出液管22连接在外槽11的底部,且与进液管21在不同侧。动力装置23包括动力泵,连接在进液管21和出液管22之间,用于为循环系统2提供动力,使液体自进液管21流入内槽12,并对内槽12内的电极产品进行处理,液体液位达到一定高度后自内槽12溢出,并流入外槽11后自出液管22流出,实现液体的循 环和反复利用;涌动装置13设于内槽12内,包括用于在内槽12内的液体没过电极后自出液管22一侧朝进液管21一侧传送电极的搬运装置131,这里,搬运装置131为水平布置的若干传送辊,放置在传送辊上的电极产品的两面都可以由内槽12内的液体浸润,在液体的涌动下完成各项制程。Referring to FIG. 1, a surging electrode fabrication system according to an embodiment of the present invention includes a reaction system 1 and a circulation system 2 for placing an electrode product and performing development, etching, and stripping processes, including an outer tank 11 and The inner tank 12 and the surge device 13 in the outer tank 11 and the circulation system 2 include an inlet pipe 21, a liquid outlet pipe 22 and a power unit 23, and the inlet pipe 21 passes through the outer tank 11 and is connected to the bottom of the inner tank 12. The liquid outlet pipe 22 is connected to the bottom of the outer tank 11 and on a different side from the inlet pipe 21. The power unit 23 includes a power pump connected between the inlet pipe 21 and the outlet pipe 22 for supplying power to the circulation system 2 to allow the liquid to flow from the inlet pipe 21 into the inner tank 12 and to the electrode in the inner tank 12. After the product is processed, the liquid level reaches a certain height and overflows from the inner tank 12, and flows into the outer tank 11 and flows out from the liquid outlet tube 22 to realize the liquid circulation. The ring and the repeated use; the surge device 13 is disposed in the inner tank 12, and includes a conveying device 131 for conveying the electrode from the side of the liquid outlet pipe 22 toward the liquid inlet pipe 21 side after the liquid in the inner tank 12 is not over the electrode. Here, the conveying device 131 is a plurality of conveying rollers arranged horizontally, and both sides of the electrode product placed on the conveying roller can be infiltrated by the liquid in the inner tank 12, and various processes are completed under the surge of the liquid.
在外槽11和内槽12的侧壁之间还分别安装有一组风刀10,每组风刀10上下相对设置在电极产品的两侧,其中一组风刀10(靠近出液管22一侧的风刀10)将电极产品两侧吹干后,电极产品被搬运装置131送入内槽12内由液体浸泡并进行涌动处理,完成显影、蚀刻和脱膜,然后经过外槽11内另一组风刀10(靠近进液管21一侧的风刀10)烘干后送出。同时,由于内槽12靠近电极产品的搬运入口和出口处都会有液体溢出,为防止液体沿搬运装置131溢出至外槽11外,内槽12两侧的风刀10工作过程中还可形成两道屏障,将溢出的液体阻挡在两道屏障内,避免液体沿搬运装置131溢出至外槽11外。A set of air knives 10 are respectively installed between the outer groove 11 and the side wall of the inner groove 12, and each set of air knives 10 is disposed on opposite sides of the electrode product, one set of the air knife 10 (close to the side of the liquid outlet pipe 22) After the air knife is blown dry on both sides of the electrode product, the electrode product is sent into the inner tank 12 by the conveying device 131 to be immersed in the liquid and subjected to surge treatment to complete development, etching and stripping, and then through the outer tank 11 A set of air knives 10 (the air knife 10 on the side close to the inlet pipe 21) is dried and sent out. At the same time, since the inner tank 12 is close to the conveying inlet and the outlet of the electrode product, liquid overflows. In order to prevent the liquid from overflowing to the outer tank 11 along the conveying device 131, the air knife 10 on both sides of the inner tank 12 can also form two during the working process. The barrier prevents the overflowing liquid from being trapped in the two barriers, preventing the liquid from overflowing along the handling device 131 to the outside of the outer tank 11.
具体地,涌动装置13包括搬运装置131、输送管132和支管133,输送管132连接进液管21,且竖直设于内槽12内相比出液管22更靠近进液管21的一侧,若干条支管133间隔地连接在输送管132的多个部位上并朝进液管21侧延伸,输送管132的顶端高于搬运装置131,保证了最上方的支管133流出的液体可以自上而下涌动,搬运装置131下方的支管133流出的液体可以自下而上涌动,使得电极表面受力充分而平缓。在其他实施方式中,输送管132的顶部也可以开孔,液体自其顶端流出。Specifically, the surge device 13 includes a conveying device 131, a conveying pipe 132, and a branch pipe 133. The conveying pipe 132 is connected to the liquid inlet pipe 21, and is vertically disposed in the inner tank 12 and is closer to the liquid inlet pipe 21 than the liquid discharging pipe 22. On one side, a plurality of branch pipes 133 are intermittently connected to a plurality of portions of the conveying pipe 132 and extend toward the liquid inlet pipe 21, and the top end of the conveying pipe 132 is higher than the conveying device 131, thereby ensuring that the liquid flowing out from the uppermost branch pipe 133 can be From the top to the bottom, the liquid flowing out of the branch pipe 133 below the conveying device 131 can surge from the bottom to the top, so that the surface of the electrode is sufficiently and gently stressed. In other embodiments, the top of the delivery tube 132 can also be perforated with liquid flowing from its top end.
在每根支管133的管壁上下还可开设有多个通孔(图未示),液体可自管壁的各个方向流出,同时,每根支管133内还设有至少一根分支的动力管133a,动力管133a最好是多个,间隔地连接在每根支管133的管壁,垂直于相应的支管133并平行于内槽12底部(即水平设置),每根动力管133a上也可以开设有供液体流出的通孔,这样液体的流出部位更多,提高了液体的涌动效果。A plurality of through holes (not shown) may be opened above and below the pipe wall of each branch pipe 133, and liquid may flow out from all directions of the pipe wall, and at the same time, at least one branch of the power pipe is disposed in each branch pipe 133. 133a, the power tube 133a is preferably a plurality of, spacedly connected to the pipe wall of each branch pipe 133, perpendicular to the corresponding branch pipe 133 and parallel to the bottom of the inner groove 12 (ie, horizontally disposed), and each power pipe 133a may also be A through hole for the liquid to flow out is opened, so that the outflow portion of the liquid is more, which improves the surge effect of the liquid.
动力装置23的动力泵为变频动力泵,其工作频率可在一定范围内进行调节,如35-75Hz,通过调节其工作频率,从支管133和动力管133a注入的液体的速度可相应变化,从而实时控制流入和流出内槽12的液体的速度,间接控制涌动幅度。The power pump of the power unit 23 is a variable frequency power pump, and its operating frequency can be adjusted within a certain range, such as 35-75 Hz. By adjusting its working frequency, the speed of the liquid injected from the branch pipe 133 and the power tube 133a can be changed accordingly, thereby The speed of the liquid flowing into and out of the inner tank 12 is controlled in real time, and the surge amplitude is indirectly controlled.
为增强循环系统2的储液能力,防止涌动中断,循环系统2还包括连接在出液管22和动力装置23之间的大容量循环箱24。由于电极的显影、蚀刻等过程中会产生沉淀物杂质,本实施例的出液管22的顶端被设置成高出外槽11的 底面,使得沉淀物不容易堵塞出液管22。In order to enhance the liquid storage capacity of the circulation system 2 and prevent the interruption of the surge, the circulation system 2 further includes a large-capacity circulation tank 24 connected between the discharge pipe 22 and the power unit 23. The top end of the liquid outlet tube 22 of the present embodiment is disposed higher than the outer tank 11 due to the occurrence of deposit impurities during development, etching, etc. of the electrode. The bottom surface makes it difficult for the sediment to clog the liquid outlet tube 22.
同时,进液管21与动力装置23之间还连接有过滤装置25,可以过滤自出液管22流出的液体,进一步避免管道堵塞,该过滤装置25包括粗滤芯25a和细滤芯25b,粗滤芯25a设于靠近出液管22一端,细滤芯25b设于靠近进液管21一端,经出液管22流出的液体依次经过粗滤芯25a和细滤芯25b两次过滤后不断形成新鲜液体流入内槽12,液体杂质少。其中,粗滤芯25a的过滤精度为10μm,细滤芯25b的过滤精度为1μm。At the same time, a filtering device 25 is connected between the inlet pipe 21 and the power unit 23, and the liquid flowing out from the liquid outlet pipe 22 can be filtered to further avoid the blockage of the pipe. The filtering device 25 includes a coarse filter core 25a and a fine filter core 25b, and the coarse filter core 25a is disposed near one end of the liquid outlet tube 22, and the fine filter element 25b is disposed near one end of the liquid inlet tube 21. The liquid flowing out through the liquid outlet tube 22 is filtered through the coarse filter element 25a and the fine filter element 25b in two steps, and continuously forms a fresh liquid into the inner tank. 12, less liquid impurities. Among them, the filtration precision of the coarse filter element 25a was 10 μm, and the filtration precision of the fine filter element 25b was 1 μm.
为方便控制液体在内槽12内的液位和涌动状态,动力装置23与过滤装置25之间还依次连接有控制阀26和压力表27,当需要提升液位使电极产品被浸泡时,开启控制阀26并调节动力装置23功率,直至液位上升至合适位置。In order to facilitate the control of the liquid level and the surge state in the inner tank 12, a control valve 26 and a pressure gauge 27 are sequentially connected between the power unit 23 and the filter unit 25, and when the liquid level needs to be lifted to make the electrode product immersed, The control valve 26 is opened and the power of the power unit 23 is adjusted until the liquid level rises to a suitable position.
另外,本实施例还设置有废液排放系统3,内槽12与外槽11的底面隔开一段距离,外槽11的底面和内槽12底部同时连接废液排放系统3,外槽11的底面和内槽12底部与废液排放系统3连接的部分分别设有一个排污阀30,同时循环箱24的底部也与废液排放系统3连接,废液排放系统3的排出口还设有一个总的排污阀30,通过这样的设置,外槽11、内槽12和循环箱24沉淀后的废液经三者底部流出至废液排放系统3,当液体使用到达一定次数后无法再使用时,开启废液排放系统3的所有排污阀30即可将废液排放到中和池,经酸碱中和至中性后排放。In addition, the embodiment is further provided with a waste liquid discharge system 3, the inner tank 12 is spaced apart from the bottom surface of the outer tank 11, and the bottom surface of the outer tank 11 and the bottom of the inner tank 12 are simultaneously connected to the waste liquid discharge system 3, and the outer tank 11 A bottom portion and a portion of the bottom portion of the inner tank 12 connected to the waste liquid discharge system 3 are respectively provided with a drain valve 30, and the bottom of the circulation tank 24 is also connected to the waste liquid discharge system 3, and the discharge port of the waste liquid discharge system 3 is further provided with a discharge port. The total drain valve 30 is configured such that the waste liquid precipitated by the outer tank 11, the inner tank 12 and the circulation tank 24 flows out to the waste liquid discharge system 3 through the bottom of the three, and can no longer be used when the liquid is used for a certain number of times. By opening all the drain valves 30 of the waste liquid discharge system 3, the waste liquid can be discharged to the neutralization tank, and discharged after being neutralized by acid and alkali to neutral.
本发明的电极制作系统并不使用传统的喷头对电极表面喷射化学液,而是将液体浸过电极产品并利用不断循环涌动的液体对电极表面进行比较平和的处理,可以实现显影、蚀刻和脱膜各阶段的制作过程,可以用于极细的铜网格线条(尤其是线宽为1-10μm)的制作而不易损坏,很好的提高了产品的良率,同时,化学液可循环多次使用,节省了制作成本,不能再使用的化学液还可经过废液排放系统处理后排放,降低了污染。The electrode fabrication system of the present invention does not use a conventional nozzle to spray a chemical liquid on the surface of the electrode, but immerses the liquid through the electrode product and performs a relatively gentle treatment on the surface of the electrode by continuously circulating the liquid to achieve development, etching, and The production process of each stage of stripping can be used for the production of very fine copper grid lines (especially line width 1-10μm) without damage, which improves the yield of the product, and at the same time, the chemical liquid can be recycled. The use of multiple times saves the production cost, and the chemical liquid that can no longer be used can be discharged after being treated by the waste liquid discharge system, thereby reducing pollution.
以上仅是本申请的具体实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也应视为本申请的保护范围。 The above is only a specific embodiment of the present application, and it should be noted that those skilled in the art can also make several improvements and retouchings without departing from the principle of the present application. These improvements and retouchings should also be considered. This is the scope of protection of this application.

Claims (20)

  1. 一种涌动式电极制作系统,其中,包括反应系统和循环系统,所述反应系统包括外槽、设于所述外槽内的内槽和涌动装置,所述循环系统包括穿过所述外槽后连通所述内槽底部的进液管、连通所述外槽底部的出液管以及连接在所述进液管和所述出液管之间的动力装置;所述涌动装置设于所述内槽内,包括用于在所述内槽内的液体没过电极后自所述出液管一侧朝所述进液管一侧传送电极的搬运装置。An surge electrode fabrication system, comprising a reaction system and a circulation system, the reaction system comprising an outer tank, an inner tank and an surge device disposed in the outer tank, the circulation system comprising a liquid inlet pipe connecting the bottom of the inner tank, an outlet pipe connecting the bottom of the outer tank, and a power device connected between the liquid inlet pipe and the liquid discharge pipe; the surge device is provided The inner tank includes a conveying device for conveying an electrode from the outlet pipe side toward the inlet pipe side after the liquid in the inner tank does not pass through the electrode.
  2. 根据权利要求1所述的涌动式电极制作系统,其中,所述涌动装置还包括连接所述进液管的输送管,所述输送管竖直设于所述内槽内靠近所述进液管侧且顶端高于所述搬运装置。The surge electrode manufacturing system according to claim 1, wherein said surge device further comprises a transfer pipe connected to said liquid inlet pipe, said transfer pipe being vertically disposed in said inner groove near said inlet The liquid pipe side and the top end are higher than the conveying device.
  3. 根据权利要求2所述的涌动式电极制作系统,其中,所述涌动装置还包括连接所述输送管并朝所述进液管侧延伸的支管。The surge electrode fabrication system according to claim 2, wherein said surge device further comprises a branch pipe that connects said delivery pipe and extends toward said inlet pipe side.
  4. 根据权利要求3所述的涌动式电极制作系统,其中,所述支管上连接有至少一根分支的动力管。The surge electrode fabrication system according to claim 3, wherein at least one branched power tube is connected to the branch pipe.
  5. 根据权利要求3所述的涌动式电极制作系统,其中,所述支管的管壁上开设有多个通孔。The surge electrode manufacturing system according to claim 3, wherein a plurality of through holes are formed in the pipe wall of the branch pipe.
  6. 根据权利要求3所述的涌动式电极制作系统,其中,所述支管为多根,间隔地连接在所述输送管的侧壁的多个部位。The surge electrode manufacturing system according to claim 3, wherein said plurality of branch pipes are spaced apart from each other at a plurality of locations on a side wall of said transfer pipe.
  7. 根据权利要求1所述的涌动式电极制作系统,其中,还包括废液排放系统,所述废液排放系统连接在所述外槽底部。The surge electrode fabrication system according to claim 1, further comprising a waste liquid discharge system connected to a bottom of said outer tank.
  8. 根据权利要求7所述的涌动式电极制作系统,其中,所述内槽与所述外槽的底面间隔设置,所述外槽的底面和所述内槽底部同时连接所述废液排放系统。The surge electrode manufacturing system according to claim 7, wherein the inner groove is spaced apart from a bottom surface of the outer groove, and a bottom surface of the outer groove and a bottom portion of the inner groove simultaneously connect the waste liquid discharge system .
  9. 根据权利要求7所述的涌动式电极制作系统,其中,所述循环系统还包括连接在所述出液管和所述动力装置之间的循环箱。The surge electrode fabrication system of claim 7 wherein said circulation system further comprises a circulation tank coupled between said discharge conduit and said power unit.
  10. 根据权利要求9所述的涌动式电极制作系统,其中,所述循环箱的底部与所述废液排放系统连接。The surge electrode fabrication system according to claim 9, wherein a bottom of the circulation tank is connected to the waste liquid discharge system.
  11. 根据权利要求2所述的涌动式电极制作系统,其中,还包括废液排放 系统,所述废液排放系统连接在所述外槽底部。The surge electrode fabrication system according to claim 2, further comprising waste liquid discharge System, the waste liquid discharge system is coupled to the bottom of the outer tank.
  12. 根据权利要求11所述的涌动式电极制作系统,其中,所述内槽与所述外槽的底面间隔设置,所述外槽的底面和所述内槽底部同时连接所述废液排放系统。The surge electrode manufacturing system according to claim 11, wherein the inner groove is spaced apart from a bottom surface of the outer groove, and a bottom surface of the outer groove and a bottom portion of the inner groove simultaneously connect the waste liquid discharge system .
  13. 根据权利要求11所述的涌动式电极制作系统,其中,所述循环系统还包括连接在所述出液管和所述动力装置之间的循环箱。The surge electrode fabrication system of claim 11 wherein said circulation system further comprises a circulation tank coupled between said discharge conduit and said power unit.
  14. 根据权利要求13所述的涌动式电极制作系统,其中,所述循环箱的底部与所述废液排放系统连接。The surge electrode fabrication system according to claim 13, wherein a bottom of the circulation tank is connected to the waste liquid discharge system.
  15. 根据权利要求3所述的涌动式电极制作系统,其中,还包括废液排放系统,所述废液排放系统连接在所述外槽底部。The surge electrode fabrication system according to claim 3, further comprising a waste liquid discharge system connected to the bottom of the outer tank.
  16. 根据权利要求15所述的涌动式电极制作系统,其中,所述内槽与所述外槽的底面间隔设置,所述外槽的底面和所述内槽底部同时连接所述废液排放系统。The surge electrode manufacturing system according to claim 15, wherein the inner groove is spaced apart from a bottom surface of the outer groove, and a bottom surface of the outer groove and a bottom portion of the inner groove simultaneously connect the waste liquid discharge system .
  17. 根据权利要求15所述的涌动式电极制作系统,其中,所述循环系统还包括连接在所述出液管和所述动力装置之间的循环箱。The surge electrode fabrication system of claim 15 wherein said circulation system further comprises a circulation tank coupled between said discharge conduit and said power unit.
  18. 根据权利要求17所述的涌动式电极制作系统,其中,所述循环箱的底部与所述废液排放系统连接。The surge electrode fabrication system according to claim 17, wherein a bottom of the circulation tank is connected to the waste liquid discharge system.
  19. 根据权利要求4所述的涌动式电极制作系统,其中,还包括废液排放系统,所述废液排放系统连接在所述外槽底部。The surge electrode fabrication system according to claim 4, further comprising a waste liquid discharge system connected to the bottom of the outer tank.
  20. 根据权利要求5所述的涌动式电极制作系统,其中,还包括废液排放系统,所述废液排放系统连接在所述外槽底部。 The surge electrode fabrication system according to claim 5, further comprising a waste liquid discharge system connected to the bottom of the outer tank.
PCT/CN2016/108912 2015-12-08 2016-12-07 Surging type electrode manufacturing system WO2017097206A1 (en)

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