CN105386054B - One kind springing up formula electrode fabrication system - Google Patents
One kind springing up formula electrode fabrication system Download PDFInfo
- Publication number
- CN105386054B CN105386054B CN201510895108.6A CN201510895108A CN105386054B CN 105386054 B CN105386054 B CN 105386054B CN 201510895108 A CN201510895108 A CN 201510895108A CN 105386054 B CN105386054 B CN 105386054B
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- China
- Prior art keywords
- inside groove
- liquid
- electrode
- groove
- outlet tube
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 239000007788 liquid Substances 0.000 claims abstract description 67
- 238000006243 chemical reaction Methods 0.000 claims abstract description 8
- 239000002699 waste material Substances 0.000 claims description 18
- 238000007599 discharging Methods 0.000 claims description 16
- 238000012545 processing Methods 0.000 abstract description 9
- 238000005530 etching Methods 0.000 abstract description 6
- 239000007921 spray Substances 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 6
- 238000011161 development Methods 0.000 abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052802 copper Inorganic materials 0.000 abstract description 3
- 239000010949 copper Substances 0.000 abstract description 3
- 239000000047 product Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 10
- 238000001914 filtration Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Weting (AREA)
Abstract
The invention discloses one kind springing up formula electrode fabrication system, including reaction system and the circulatory system, the reaction system includes outer groove, the inside groove in the outer groove and springs up device, and the circulatory system includes the inlet tube that the inside groove bottom is connected to after the outer groove, the outlet tube for being connected to outer slot bottom and the power plant being connected to the inlet tube and the outlet tube；The device that springs up includes not having after electrode from the outlet tube side towards the handling device of inlet tube side carry electrode for the liquid in the inside groove in the inside groove.The electrode fabrication system of the present invention simultaneously sprays chemical liquids without using traditional nozzle to electrode surface, but gentle processing is compared to electrode surface by the dipped electrode product of liquid and using the liquid sprung up is constantly recycled, the manufacturing process of development, etching and demoulding each stage may be implemented, it can be used for the making of superfine copper mesh lines and be hardly damaged, improve the yield of product well.
Description
Technical field
The present invention relates to electrode fabrication fields more particularly to one kind springing up formula electrode fabrication system.
Background technology
As the technology for manufacturing touch screen of presently the most mainstream, yellow light processing procedure is commonly utilized in the production of touch screen manufacturer
In the process.Yellow light processing procedure mainly completes the processes such as exposure, development, etching and demoulding using the working method of spray chemical liquids, and
In entire technical process, each section of nozzle has to keep unimpeded, and cannot have clogging, meanwhile, each section of injection solution, spray
Water drenching and injection pressure needs accurately control.When liquid sprays, the liquid sprayed from nozzle generates certain impact force, directly makees
For the electrode surface of touch screen, when producing the electrode structure of the especially superfine grid lines (width is 1-10 μm) of electrode pair
The product of the processes such as development, etching, demoulding is very easy to damage, and reduces product yield.
Invention content
In view of the shortcomings of the prior art, the present invention provides a kind of network damages can effectively avoid electrode
Formula electrode fabrication system is sprung up, the preparation of electrode circuit is can be used for.
In order to achieve the above purpose, present invention employs the following technical solutions：
One kind springing up formula electrode fabrication system, including reaction system and the circulatory system, and the reaction system includes outer groove, sets
In in the outer groove inside groove and spring up device, the circulatory system includes that the inside groove bottom is connected to after the outer groove
Inlet tube, the outlet tube for being connected to the outer slot bottom and the power being connected between the inlet tube and outlet tube dress
It sets；The device that springs up includes not having after electrode to go out liquid described in for the liquid in the inside groove in the inside groove
Handling device of the pipe side towards inlet tube side carry electrode.
Further, the device that springs up further includes the delivery pipe for connecting the inlet tube, and the delivery pipe is set to vertically
It is higher than the handling device close to the inlet tube side and top in the inside groove.
Further, the branch pipe for springing up device and further including the connection delivery pipe and extending towards the outlet tube side.
Further, the power pipe of at least one branch is connected on the branch pipe.
Further, multiple through-holes are offered on the tube wall of the branch pipe.
Further, the branch pipe is more, and compartment of terrain is connected to multiple positions of the side wall of the delivery pipe.
Further, the formula electrode fabrication system that springs up further includes discharging of waste liquid system, the discharging of waste liquid system
It is connected to the outer slot bottom.
Further, the bottom surface interval of the inside groove and the outer groove is arranged, the bottom surface of the outer groove and the internal groove bottom
Portion connects the discharging of waste liquid system simultaneously.
Further, the circulatory system further includes the cycle being connected between the outlet tube and the power plant
Case.
Further, the bottom of the circulating box is connect with the discharging of waste liquid system.
The electrode fabrication system of the present invention simultaneously sprays chemical liquids without using traditional nozzle to electrode surface, but by liquid
Dipped electrode product is simultaneously compared electrode surface gentle processing using the liquid sprung up is constantly recycled, and may be implemented to show
Shadow, etching and demoulding each stage manufacturing process, can be used for the making of superfine copper mesh lines and be hardly damaged, well
Improve the yield of product.
Description of the drawings
Fig. 1 is the structural schematic diagram for springing up formula electrode fabrication system of the embodiment of the present invention.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further described.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
Refering to fig. 1, the formula electrode fabrication system that springs up of the embodiment of the present invention includes reaction system 1 and the circulatory system 2, reaction
System 1 for placing electrode product and developed, etch and each processing procedure of demoulding, including outer groove 11, in outer groove 11
Inside groove 12 and spring up device 13, and the circulatory system 2 includes inlet tube 21, outlet tube 22 and power plant 23, inlet tube 21 passes through
The bottom of inside groove 12 is connected to after outer groove 11, outlet tube 22 is connected to the bottom of outer groove 11, and with inlet tube 21 in not homonymy.It is dynamic
Power apparatus 23 includes kinetic pump, is connected between inlet tube 21 and outlet tube 22, for providing power for the circulatory system 2, makes liquid
Body flows into inside groove 12 from inlet tube 21, and handles the electrode product in inside groove 12, after liquid level reach a certain height
It overflows from inside groove 12, and is flowed out from outlet tube 22 after flowing into outer groove 11, realize the cycle of liquid and recycle；Spring up device 13
Include not passing from 22 side of outlet tube towards 21 side of inlet tube after electrode for the liquid in inside groove 12 in inside groove 12
The handling device 131 of sending electrode, here, handling device 131 are preferably horizontally disposed several transfer rollers, are placed on transfer roller
The two sides of electrode product can be infiltrated by the liquid in inside groove 12, every processing procedure is completed under the springing up of liquid.
One group of air knife 10 is also separately installed between outer groove 11 and the side wall of inside groove 12, every group of about 10 air knife is opposite to be set
It sets in the both sides of electrode product, one of which air knife 10 (air knife 10 close to 22 side of outlet tube) dries up electrode product both sides
Afterwards, electrode product, which is handled upside down device 131 and is sent into inside groove 12, is impregnated by liquid and spring up processing, complete to develop, etch and
Then demoulding is sent out after another group of air knife 10 (air knife 10 close to 21 side of inlet tube) drying in outer groove 11.Meanwhile by
Can all there be liquid spilling at the carrying entrance and exit of electrode product in inside groove 12, to prevent liquid along handling device 131
It is spilled over to outside outer groove 11, twice barrier can be also formed in 10 course of work of air knife of 12 both sides of inside groove, the liquid of spilling is stopped
In twice barrier, liquid is avoided to be spilled over to outside outer groove 11 along handling device 131.
Specifically, it includes handling device 131, delivery pipe 132 and branch pipe 133 to spring up device 13, and delivery pipe 132 connects feed liquor
Pipe 21, and be set to vertically in inside groove 12 compared to outlet tube 22 closer to the side of inlet tube 21, several 133 compartment of terrain of branch pipe connect
It is connected on multiple positions of delivery pipe 132 and extends towards 22 side of outlet tube, the top of delivery pipe 132 is higher than handling device 131, protects
Having demonstrate,proved the liquid of the outflow of branch pipe 133 of the top can spring up from top to bottom, the outflow of branch pipe 133 of 131 lower section of handling device
Liquid can be sprung up from bottom to top so that electrode surface stress is abundant and gentle.In other embodiments, delivery pipe 132
Top can also trepanning, liquid from its top flow out.
Multiple through-hole (not shown) can be also offered up and down in the tube wall of every branch pipe 133, and liquid can be from each of tube wall
Direction is flowed out, meanwhile, the power pipe 133a of at least one branch is additionally provided in every branch pipe 133, preferably power pipe 133a is more
A, compartment of terrain is connected to the tube wall of every branch pipe 133, perpendicular to corresponding branch pipe 133 and is parallel to 12 bottom of inside groove (i.e. level
Setting), the through-hole flowed out for liquid can also be offered on every power pipe 133a, the outflow position of such liquid is more, carries
High liquid springs up effect.
The kinetic pump of power plant 23 is preferably variable frequency power pump, and working frequency can be adjusted in a certain range,
Such as 35-75Hz, by adjusting its working frequency, the speed of the liquid injected from branch pipe 133 and power pipe 133a can respective change,
To which real-time control flows in and out the speed of the liquid of inside groove 12, indirect control springs up amplitude.
To enhance the liquid storage capacity of the circulatory system 2, prevent from springing up interruption, the circulatory system 2 further includes being connected to outlet tube 22
Large capacity circulating box 24 between power plant 23.Due to will produce sediment impurity during the development of electrode, etching etc.,
The top of the outlet tube 22 of the present embodiment is configured to be higher by the bottom surface of outer groove 11 so that sediment is not easy to block outlet tube
22。
Meanwhile filter device 25 is also associated between inlet tube 21 and power plant 23, it can filter and be flowed from outlet tube 22
The liquid gone out, further avoids line clogging, which includes coarse filter element 25a and fine filtering core 25b, and coarse filter element 25a is set
In close to 22 one end of outlet tube, fine filtering core 25b is provided close to 21 one end of inlet tube, and the liquid flowed out through outlet tube 22 passes through successively
Coarse filter element 25a and fine filtering core 25b constantly forms fresh liquid and flows into inside groove 12 after filtering twice, liquid impurity is few.Preferably, slightly
The filtering accuracy of filter core 25a is 10 μm, and the filtering accuracy of fine filtering core 25b is 1 μm.
For convenience of controlling liquid level of the liquid in inside groove 12 and springing up state, between power plant 23 and filter device 25 also
It is connected with control valve 26 and pressure gauge 27 in turn, when needing promotion liquid level that electrode product is made to be impregnated, opening controlling valve 26 is simultaneously
23 power of power plant is adjusted, until liquid level rises to suitable position.
In addition, the present embodiment is additionally provided with discharging of waste liquid system 3, the bottom surface of inside groove 12 and outer groove 11 from a distance,
The bottom surface and 12 bottom of inside groove of outer groove 11 connect discharging of waste liquid system 3, the bottom surface and 12 bottom of inside groove of outer groove 11 and waste liquid simultaneously
The part that exhaust system 3 connects is respectively equipped with a blowdown valve 30, while the bottom of circulating box 24 also connects with discharging of waste liquid system 3
It connects, the outlet of discharging of waste liquid system 3 is additionally provided with a total blowdown valve 30, setting in this way, outer groove 11,12 and of inside groove
Waste liquid after circulating box 24 precipitates flows out to discharging of waste liquid system 3 through three bottom, when liquid uses nothing after reaching certain number
When method reuses, all blowdown valves 30 for opening discharging of waste liquid system 3 can be by discharging of waste liquid to neutralization pond, extremely through acid-base neutralization
It is discharged after neutrality.
The electrode fabrication system of the present invention simultaneously sprays chemical liquids without using traditional nozzle to electrode surface, but by liquid
Dipped electrode product is simultaneously compared electrode surface gentle processing using the liquid sprung up is constantly recycled, and may be implemented to show
Shadow, etching and demoulding each stage manufacturing process, can be used for superfine copper mesh lines (especially line width be 1-10 μm)
It makes and is hardly damaged, improve the yield of product well, meanwhile, chemical liquids are recyclable to be used for multiple times, and is saved and is fabricated to
This, the chemical liquids that cannot be reused can also discharge after the processing of discharging of waste liquid system, reduce pollution.
It the above is only the specific implementation mode of the application, it is noted that those skilled in the art are come
It says, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications also should be regarded as
The protection domain of the application.
Claims (8)
1. one kind springing up formula electrode fabrication system, which is characterized in that including reaction system (1) and the circulatory system (2), the reaction
System (1) includes outer groove (11), the inside groove (12) being set in the outer groove (11) and springs up device (13), the circulatory system
(2) include inlet tube (21), connection outer groove (11) bottom for being connected to the inside groove (12) bottom afterwards across the outer groove (11)
The outlet tube (22) in portion and the power plant (23) being connected between the inlet tube (21) and the outlet tube (22), liquid
It flows into from the inlet tube (21), is flowed out from the outlet tube (22)；The device (13) that springs up is interior set on the inside groove (12),
Do not had after electrode from the outlet tube (22) side towards the inlet tube (21) including being used for the liquid in the inside groove (12)
The handling device (131) of side carry electrode；The device (13) that springs up further includes the delivery pipe for connecting the inlet tube (21)
(132), the delivery pipe (132) is set in the inside groove (12) vertically close to the inlet tube (21) side and top is higher than described
Handling device (131)；The device (13) that springs up further includes the connection delivery pipe (132) and prolongs towards the outlet tube (22) side
The branch pipe (133) stretched.
2. according to claim 1 spring up formula electrode fabrication system, which is characterized in that be connected on the branch pipe (133)
The power pipe (133a) of at least one branch.
3. according to claim 1 spring up formula electrode fabrication system, which is characterized in that on the tube wall of the branch pipe (133)
Offer multiple through-holes.
4. according to claim 1 spring up formula electrode fabrication system, which is characterized in that the branch pipe (133) is more,
Multiple positions of the side wall of the delivery pipe (132) are connected to every ground.
5. described springing up formula electrode fabrication system according to claim 1-4 is any, which is characterized in that further include discharging of waste liquid system
It unites (3), the discharging of waste liquid system (3) is connected to the outer groove (11) bottom.
6. according to claim 5 spring up formula electrode fabrication system, which is characterized in that the inside groove (12) and the outer groove
(11) bottom surface interval setting, the bottom surface and the inside groove (12) bottom of the outer groove (11) connect the discharging of waste liquid system simultaneously
It unites (3).
7. according to claim 6 spring up formula electrode fabrication system, which is characterized in that the circulatory system (2) further includes
The circulating box (24) being connected between the outlet tube (22) and the power plant (23).
8. according to claim 7 spring up formula electrode fabrication system, which is characterized in that the bottom of the circulating box (24) with
Discharging of waste liquid system (3) connection.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510895108.6A CN105386054B (en) | 2015-12-08 | 2015-12-08 | One kind springing up formula electrode fabrication system |
| HK16109880.6A HK1221750A1 (en) | 2015-12-08 | 2016-08-17 | Surging type electrode manufacturing system |
| PCT/CN2016/108912 WO2017097206A1 (en) | 2015-12-08 | 2016-12-07 | Surging type electrode manufacturing system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510895108.6A CN105386054B (en) | 2015-12-08 | 2015-12-08 | One kind springing up formula electrode fabrication system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105386054A CN105386054A (en) | 2016-03-09 |
| CN105386054B true CN105386054B (en) | 2018-10-09 |
Family
ID=55418811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510895108.6A Active CN105386054B (en) | 2015-12-08 | 2015-12-08 | One kind springing up formula electrode fabrication system |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN105386054B (en) |
| HK (1) | HK1221750A1 (en) |
| WO (1) | WO2017097206A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105386054B (en) * | 2015-12-08 | 2018-10-09 | 赵宗轩 | One kind springing up formula electrode fabrication system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201654457U (en) * | 2010-05-19 | 2010-11-24 | 北京京东方光电科技有限公司 | Liquid recovery device and developing apparatus |
| CN203388232U (en) * | 2013-06-28 | 2014-01-15 | 福建省红太阳精品有限公司 | Shredded kelp-washing return recycling system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4964365A (en) * | 1988-11-03 | 1990-10-23 | D.E.M. Controls Of Canada | Immersion process machine |
| CN1056423C (en) * | 1996-08-16 | 2000-09-13 | 柯建信 | Immersing spray method |
| FR2876863B1 (en) * | 2004-10-19 | 2007-01-12 | Saint Gobain | DEVICE FOR ETCHING A CONDUCTIVE LAYER AND ETCHING METHOD |
| JP5798505B2 (en) * | 2011-04-27 | 2015-10-21 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing apparatus and substrate processing method |
| CN105386054B (en) * | 2015-12-08 | 2018-10-09 | 赵宗轩 | One kind springing up formula electrode fabrication system |
-
2015
- 2015-12-08 CN CN201510895108.6A patent/CN105386054B/en active Active
-
2016
- 2016-08-17 HK HK16109880.6A patent/HK1221750A1/en not_active IP Right Cessation
- 2016-12-07 WO PCT/CN2016/108912 patent/WO2017097206A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201654457U (en) * | 2010-05-19 | 2010-11-24 | 北京京东方光电科技有限公司 | Liquid recovery device and developing apparatus |
| CN203388232U (en) * | 2013-06-28 | 2014-01-15 | 福建省红太阳精品有限公司 | Shredded kelp-washing return recycling system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105386054A (en) | 2016-03-09 |
| HK1221750A1 (en) | 2017-06-09 |
| WO2017097206A1 (en) | 2017-06-15 |
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Address after: 518000 Nanshan District, Guangdong, Shahe, East Road, international mayor Exchange Center Room 1519 Patentee after: Zhao Zongxuan Address before: No. 18, Youyi Road, Lingang Economic Park, Gaogang District, Taizhou City, Jiangsu Province Patentee before: Zhao Zongxuan |
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Address after: 545000 no.1-11, building 18, Baoli Dajiang County, Baisha Road, Liubei District, Liuzhou City, Guangxi Zhuang Autonomous Region Patentee after: Zhao Zongxuan Address before: 518000 room 1519, international mayor exchange center, Shahe East Road, Nanshan District, Shenzhen City, Guangdong Province Patentee before: Zhao Zongxuan |
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Address after: 518000 room 1519, international mayor exchange center, Shahe East Road, Nanshan District, Shenzhen City, Guangdong Province Patentee after: Zhao Zongxuan Address before: 545000 no.1-11, building 18, Baoli Dajiang County, Baisha Road, Liubei District, Liuzhou City, Guangxi Zhuang Autonomous Region Patentee before: Zhao Zongxuan |