CN205832933U - A kind of acid and alkaline emission-control equipment - Google Patents
A kind of acid and alkaline emission-control equipment Download PDFInfo
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- CN205832933U CN205832933U CN201620548050.8U CN201620548050U CN205832933U CN 205832933 U CN205832933 U CN 205832933U CN 201620548050 U CN201620548050 U CN 201620548050U CN 205832933 U CN205832933 U CN 205832933U
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Abstract
This application discloses a kind of acid and alkalescence emission-control equipment, process left chamber and right chamber that cavity main body includes that only top interconnects, described left chamber has the first water tank, and described right chamber has the second water tank；Described first water tank be arranged above first order inserts unit, described first order inserts unit be provided around spraying the first spray unit of the first polar liquid, the position that the top in described left chamber and described right chamber interconnects is provided with the first liquid gas separative element；Described second water tank be arranged above second level inserts unit, described second level inserts unit be provided around spraying the second spray unit of the second polar liquid, the position that described right chamber is in communication with the outside is provided with the second liquid gas separative element；The Acidity of Aikalinity of described first polar liquid and described second polar liquid is contrary.This device can process the most acid or alkaline waste gas of discharge in manufacturing process for cleaning equipment production process effectively, it is to avoid generates solid particulate matter blocking discharge duct.
Description
Technical field
This utility model relates to gas purification technique field, more particularly, it relates to a kind of acid and alkalescence exhaust-gas treatment
Device.
Background technology
In the manufacture field such as quasiconductor, panel display, LED, solar energy and MEMS be micro electronmechanical, production process all can
Produce waste gas, as a example by semiconductor manufacturing, the gas of discharge in manufacturing process for cleaning equipment production process, owing to its discharge capacity is relatively big,
The most existing processing mode is: is delivered directly to rear end central authorities treating column by central exhaust duct and processes.But, clearly
Wash process apparatus discharge gas and mostly be sour gas (such as Fluohydric acid. or sulphuric acid) or alkaline gas (such as ammonia), at discharge duct
In, acid or alkaline gas contacts with each other mixing and can produce chemical reaction, such as hydrogen fluoride gas and ammonia and meet and will occur
Combination reaction, generates ammonium fluoride solid, and the by-product of this solid shape can be attached to inner-walls of duct and block pipeline, affect place
The capacity of process gases, the most also can form potential safety hazard.Existing gas treatment equipment, due to dimension volume, not
Adapt to install and use in the dust free room factory of an inch of land is an inch of gold, and can not remove simultaneously manufacturing process for cleaning equipment discharge acidity and
Alkalescence waste gas, but two kinds of equipment must be divided into process acid and alkalescence waste gas respectively.
Therefore, the most effectively process the most acid or alkaline waste gas of discharge in manufacturing process for cleaning equipment production process, keep away
Exempt to generate solid particulate matter blocking discharge duct, be a current problem demanding prompt solution.
Utility model content
For solving above-mentioned technical problem, this utility model provides a kind of acid and alkalescence emission-control equipment, it is possible to have
Effect is located in put in order washes the most acid or alkaline waste gas of discharge in process apparatus production process, it is to avoid generate solid particulate matter blocking
Discharge duct.
The above-mentioned acidity that this utility model provides and alkalescence emission-control equipment, including:
Process cavity main body；
Described process cavity main body includes left chamber that only top interconnects and right chamber, and the bottom in described left chamber has the first water
Case, the bottom in described right chamber has the second water tank；
The top in described left chamber is provided with waste gas inlet, and the first order that is arranged above of described first water tank fills material list
Unit, described first order inserts unit be arranged around the of oriented described first order inserts unit spray the first polar liquid
One spray unit, the position that the top in described left chamber and described right chamber interconnects is provided with the first liquid gas separative element；
Described second water tank be arranged above second level inserts unit, the surrounding of described second level inserts unit sets
Being equipped with the second spray unit to described second level inserts unit spray the second polar liquid, described right chamber is in communication with the outside
Position is provided with the second liquid gas separative element；
Wherein, described first polar liquid and described second polar liquid are the liquid that Acidity of Aikalinity is contrary.
Preferably, in above-mentioned acidity and alkalescence emission-control equipment, the outside of described second liquid gas separative element also connects
It is connected to air exhauster.
Preferably, in above-mentioned acidity and alkalescence emission-control equipment, described first order inserts unit and described second
The profile of level inserts unit is cylinder.
Preferably, in above-mentioned acidity and alkalescence emission-control equipment, described first order inserts unit and described second
Inserts inside level inserts unit is polypropylene ball.
Preferably, in above-mentioned acidity and alkalescence emission-control equipment, the diameter range of described polypropylene ball is 10 millis
Rice is to 20 millimeters.
Preferably, in above-mentioned acidity and alkalescence emission-control equipment, described first polar liquid is sodium hydroxide solution,
And described second polar liquid is sulphuric acid.
Preferably, in above-mentioned acidity and alkalescence emission-control equipment, described first polar liquid is sulphuric acid, and described the
Two polar liquids are sodium hydroxide solution.
From technique scheme it can be seen that above-mentioned acidity provided by the utility model and alkalescence emission-control equipment,
It is arranged above first order inserts unit, being provided around of described first order inserts unit due to described first water tank
To the first spray unit of described first order inserts unit spray the first polar liquid, described left chamber and the top in described right chamber
The position interconnected is provided with the first liquid gas separative element；Material list is filled in the second level that is arranged above of described second water tank
Unit, described second level inserts unit be arranged around the of oriented described second level inserts unit spray the second polar liquid
Two spray unit, the position that described right chamber is in communication with the outside is provided with the second liquid gas separative element；Wherein, described first polar liquid
Body and described second polar liquid are the liquid that Acidity of Aikalinity is contrary, therefore, it is possible to effectively process manufacturing process for cleaning equipment production process
The most acid or the alkaline waste gas of middle discharge, it is to avoid generate solid particulate matter blocking discharge duct.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only
It is embodiment of the present utility model, for those of ordinary skill in the art, on the premise of not paying creative work, also
Other accompanying drawing can be obtained according to the accompanying drawing provided.
The first acid and schematic diagram of alkalescence emission-control equipment that Fig. 1 provides for the embodiment of the present application；
The first acid and work process schematic diagram of alkalescence emission-control equipment that Fig. 2 provides for the embodiment of the present application.
Detailed description of the invention
Core concept of the present utility model is to provide a kind of acid and alkalescence emission-control equipment, it is possible to effectively process
The most acid or the alkaline waste gas of discharge in manufacturing process for cleaning equipment production process, it is to avoid generate solid particulate matter blocking exhaustor
Road.
Below in conjunction with the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of this utility model rather than whole
Embodiment.Based on the embodiment in this utility model, those of ordinary skill in the art are not under making creative work premise
The every other embodiment obtained, broadly falls into the scope of this utility model protection.
The first acid and alkalescence emission-control equipment that the embodiment of the present application provides as it is shown in figure 1, Fig. 1 to be the application real
Execute the first acid and schematic diagram of alkalescence emission-control equipment that example provides.This acidity and alkalescence emission-control equipment include:
Process cavity main body 1；
Described process cavity main body 1 includes left chamber that only top interconnects and right chamber, say, that the left chamber in figure and the right side
Separating between chamber, the position adjacent only to top can connect, and gas can pass through from this position, described left chamber
Bottom has the first water tank 2, and the bottom in described right chamber has the second water tank 3, and the two water tank is also mutually separated, mutually
Unaffected, it is used for holding different types of liquid；
The top in described left chamber is provided with waste gas inlet 4, flows into this dress for the waste gas making manufacturing process for cleaning equipment discharge
Put inside, described first water tank 2 be arranged above first order inserts unit 5, described first order inserts unit 5 is around
Oriented described first order inserts unit 5 is set and sprays the first spray unit 6 of the first polar liquid, described left chamber and the described right side
The position that the top in chamber interconnects is provided with the first liquid gas separative element 7；
Described second water tank 3 be arranged above second level inserts unit 8, the week of described second level inserts unit 8
Enclosing and arrange oriented described second level inserts unit 8 and spray the second spray unit 9 of the second polar liquid, described right chamber is with extraneous
The position of connection is provided with the second liquid gas separative element 10；
Wherein, described first polar liquid and described second polar liquid are the liquid that Acidity of Aikalinity is contrary.
The work process of said apparatus is as in figure 2 it is shown, the first acidity and alkalescence that Fig. 2 provides for the embodiment of the present application are given up
The work process schematic diagram of Flash Gas Compression Skid System.Gas is after entering device, and the first bottom from first order inserts unit 5 is entered
Enter, after the spray of the first spray unit 6, absorbed by a kind of polar liquid therein, and fall in the first water tank 2, not
Absorbed gas again from the top of first order inserts unit 5 after the first liquid gas separative element 7, arrive the second level fill out
The bottom of charge unit 8, now through the spray of the second spray unit 9, the second polar liquid of ejection sponges another kind of pole
The gas of property, and fall in the second water tank 3, through the spray process of twice, it becomes possible to by the acidity in waste gas and alkaline gas
All absorb complete, after the gas after process is then passed through the second liquid gas separative element 10, just meets environmental protection standard, and be discharged
To the external world.
From technique scheme it can be seen that at the first acid and alkalescence waste gas above-mentioned of being provided of the embodiment of the present application
Reason device, is arranged above first order inserts unit, the week of described first order inserts unit due to described first water tank
Enclose the first spray unit that oriented described first order inserts unit spray the first polar liquid is set, described left chamber and the described right side
The position that the top in chamber interconnects is provided with the first liquid gas separative element；The second level that is arranged above of described second water tank is filled out
Charge unit, described second level inserts unit be arranged around oriented described second level inserts unit spray the second polar liquid
Second spray unit of body, the position that described right chamber is in communication with the outside is provided with the second liquid gas separative element；Wherein, described first
Polar liquid and described second polar liquid are the liquid that Acidity of Aikalinity is contrary, therefore, it is possible to it is raw effectively to process manufacturing process for cleaning equipment
The most acid or the alkaline waste gas of discharge during product, it is to avoid generate solid particulate matter blocking discharge duct.
Acid and the alkaline emission-control equipment of the second that the embodiment of the present application provides, is at the first acid and alkali above-mentioned
On the basis of property emission-control equipment, also include following technical characteristic:
With continued reference to Fig. 1, the outside of described second liquid gas separative element 10 is also associated with air exhauster 11.This aerofluxus wind
Machine adjustable speed, for the wind speed in device and pressure are maintained at steady state, can keep in running inside device
Negative regulation.
The third acid and alkalescence emission-control equipment that the embodiment of the present application provides, is acid at above-mentioned the second and alkali
On the basis of property emission-control equipment, also include following technical characteristic:
The profile of described first order inserts unit and described second level inserts unit is cylinder.Cylindrical fills out
Charge unit is after putting into inserts, and entirety is the tightst, does not haves space, is the four of rectangle relative to inserts unit
The position at individual angle do not have filler cause leaking out space situation for, the filler unit of this cylinder has more advantage.
The 4th kind of acidity that the embodiment of the present application provides and alkalescence emission-control equipment, be at the third acid and alkali above-mentioned
On the basis of property emission-control equipment, also include following technical characteristic:
Inserts inside described first order inserts unit and described second level inserts unit is polypropylene ball.
The fine and closely woven consolidation of this ball, by increasing capacitance it is possible to increase the area of contact surface, so that waste gas can form greater area of contact with liquid,
Strengthen assimilation effect.
The 5th kind of acidity that the embodiment of the present application provides and alkalescence emission-control equipment, be at above-mentioned 4th kind of acidity and alkali
On the basis of property emission-control equipment, also include following technical characteristic:
The diameter range of described polypropylene ball is 10 millimeters to 20 millimeters.Further, it may be preferred to for using
The polypropylene ball of Globe-Pac 0.5 inch, less inserts would generally increase the area of contact surface, it is achieved gas and liquid
Being sufficiently mixed of body, thus form more preferable exhaust-gas treatment effect.
The 6th kind of acidity that the embodiment of the present application provides and alkalescence emission-control equipment, be at any of the above-described kind of acid and alkali
On the basis of property emission-control equipment, also include following technical characteristic:
Described first polar liquid is sodium hydroxide solution, and described second polar liquid is sulphuric acid.So, it is simply that first use
Sodium hydroxide solution absorbs the sour gas in waste gas, then with the alkaline gas in sulfuric acid absorption waste gas, walks through the two
Just the acidity in waste gas and alkaline gas can be absorbed cleanly after rapid, play preferable treatment effect.
The 7th kind of acidity that the embodiment of the present application provides and alkalescence emission-control equipment, be at any of the above-described kind of acid and alkali
On the basis of property emission-control equipment, also include following technical characteristic:
Described first polar liquid is sulphuric acid, and described second polar liquid is sodium hydroxide solution.So, it is simply that first use
Alkaline gas in sulfuric acid absorption waste gas, then absorbs the sour gas in waste gas with sodium hydroxide solution, walks through the two
Just the acidity in waste gas and alkaline gas can be absorbed cleanly after rapid, play preferable treatment effect.
Utilize said apparatus, it is possible to the concentration of this sour gas and alkaline gas controlled below equilibrium valve such as,
Under room temperature condition, this value is reduced to below 100ppm.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses this practicality new
Type.Multiple amendment to these embodiments will be apparent from for those skilled in the art, is determined herein
The General Principle of justice can realize in the case of without departing from spirit or scope of the present utility model in other embodiments.Cause
This, this utility model is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein
The widest scope consistent with features of novelty.
Claims (7)
1. an acidity and alkalescence emission-control equipment, it is characterised in that including:
Process cavity main body；
Described process cavity main body includes left chamber that only top interconnects and right chamber, and the bottom in described left chamber has the first water tank,
The bottom in described right chamber has the second water tank；
The top in described left chamber is provided with waste gas inlet, described first water tank be arranged above first order inserts unit,
Described first order inserts unit be arranged around the first of oriented described first order inserts unit spray the first polar liquid
Spray unit, the position that the top in described left chamber and described right chamber interconnects is provided with the first liquid gas separative element；
Described second water tank be arranged above second level inserts unit, being provided around of described second level inserts unit
To the second spray unit of described second level inserts unit spray the second polar liquid, the position that described right chamber is in communication with the outside
It is provided with the second liquid gas separative element；
Wherein, described first polar liquid and described second polar liquid are the liquid that Acidity of Aikalinity is contrary.
Acidity the most according to claim 1 and alkalescence emission-control equipment, it is characterised in that described second liquid edema caused by disorder of QI is from list
The outside of unit is also associated with air exhauster.
Acidity the most according to claim 2 and alkalescence emission-control equipment, it is characterised in that the described first order fills material list
First and described second level inserts unit profile is cylinder.
Acidity the most according to claim 3 and alkalescence emission-control equipment, it is characterised in that the described first order fills material list
Inserts inside first and described second level inserts unit is polypropylene ball.
Acidity the most according to claim 4 and alkalescence emission-control equipment, it is characterised in that described polypropylene ball straight
Footpath scope is 10 millimeters to 20 millimeters.
6. according to the acidity described in any one of claim 1-5 and alkalescence emission-control equipment, it is characterised in that described first pole
Property liquid is sodium hydroxide solution, and described second polar liquid is sulphuric acid.
7. according to the acidity described in any one of claim 1-5 and alkalescence emission-control equipment, it is characterised in that described first pole
Property liquid is sulphuric acid, and described second polar liquid is sodium hydroxide solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620548050.8U CN205832933U (en) | 2016-06-07 | 2016-06-07 | A kind of acid and alkaline emission-control equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620548050.8U CN205832933U (en) | 2016-06-07 | 2016-06-07 | A kind of acid and alkaline emission-control equipment |
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| Publication Number | Publication Date |
|---|---|
| CN205832933U true CN205832933U (en) | 2016-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201620548050.8U Active CN205832933U (en) | 2016-06-07 | 2016-06-07 | A kind of acid and alkaline emission-control equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107684814A (en) * | 2017-10-23 | 2018-02-13 | 张家港市艾尔环保工程有限公司 | The method for removing inorganic gas in removing exhaust gas |
| CN109260937A (en) * | 2018-11-26 | 2019-01-25 | 昆山嘉科环保设备有限公司 | Soda acid emission-control equipment |
-
2016
- 2016-06-07 CN CN201620548050.8U patent/CN205832933U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107684814A (en) * | 2017-10-23 | 2018-02-13 | 张家港市艾尔环保工程有限公司 | The method for removing inorganic gas in removing exhaust gas |
| CN109260937A (en) * | 2018-11-26 | 2019-01-25 | 昆山嘉科环保设备有限公司 | Soda acid emission-control equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 201821 room 2, 2 floor, 2, 2229 Yongsheng Road, Jiading District industrial area, Shanghai. Patentee after: Shanghai Sheng Jian environmental system Polytron Technologies Inc Address before: 201821 25F, Taihu Shijia International Building, 1198 De Fu Road, Jiading District, Shanghai Patentee before: SHANGHAI SHENGJIAN ENVIRONMENT SYSTEM TECHNOLOGY CO., LTD. |
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| CP03 | Change of name, title or address |