WO2017090890A1 - Epoxy resin composition for sealing semiconductor device and semiconductor device sealed using same - Google Patents

Epoxy resin composition for sealing semiconductor device and semiconductor device sealed using same Download PDF

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Publication number
WO2017090890A1
WO2017090890A1 PCT/KR2016/011745 KR2016011745W WO2017090890A1 WO 2017090890 A1 WO2017090890 A1 WO 2017090890A1 KR 2016011745 W KR2016011745 W KR 2016011745W WO 2017090890 A1 WO2017090890 A1 WO 2017090890A1
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Prior art keywords
epoxy resin
resin composition
formula
semiconductor device
weight
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PCT/KR2016/011745
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French (fr)
Korean (ko)
Inventor
한승
정주영
김민겸
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삼성에스디아이 주식회사
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Priority to CN201680069339.4A priority Critical patent/CN108291052B/en
Publication of WO2017090890A1 publication Critical patent/WO2017090890A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00Use of inorganic substances as compounding ingredients
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/49Phosphorus-containing compounds
    • C08K5/50Phosphorus bound to carbon only
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection

Definitions

  • the present invention relates to an epoxy resin composition for semiconductor device sealing and a semiconductor device sealed using the same. More specifically, it is possible to minimize the reduction in shrinkage, curing strength and continuous workability of the epoxy resin composition according to the addition of the flame-retardant material including a phosphorus-based flame retardant of a specific structure, epoxy resin for sealing a semiconductor device exhibiting excellent flame retardancy and the same It relates to a semiconductor element sealed using.
  • organic flame retardants phosphorus-based flame retardants such as phosphazene and phosphate esters or resins containing nitrogen have been studied.
  • nitrogen-containing resin the flame retardancy is not sufficient, and in the case of phosphorus-based flame retardant, even if only a small amount is used, there is a problem that the shrinkage ratio of the epoxy resin composition is increased, and the glass transition temperature after curing of the resin composition is lowered.
  • An object of the present invention is to provide an epoxy resin composition for sealing a semiconductor device that can implement excellent flame retardancy while minimizing the physical properties such as shrinkage, curing strength and workability due to the addition of flame retardant.
  • Another object of the present invention is to provide a semiconductor device sealed by the epoxy resin composition as described above.
  • the present invention provides an epoxy resin composition for sealing a semiconductor device comprising an epoxy resin, a curing agent, an inorganic filler and a flame retardant represented by the following formula (1).
  • R is hydrogen or a hydrocarbon group of 1 to 20 carbon atoms.
  • R may be hydrogen, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, and more preferably, R is It may be a phenyl group, a biphenyl group or a naphthalene group.
  • the flame retardant may be represented by the following formula (2) or formula (3).
  • the flame retardant may be included in about 0.01% to about 3% by weight of the epoxy resin composition.
  • the epoxy resin composition is about 0.1% to about 15% by weight of the epoxy resin, about 0.1% to about 13% by weight of the curing agent, about 70% to about 95% by weight of the inorganic filler and flame retardant represented by Formula 1 0.01 wt% to about 3 wt%.
  • the present invention provides a semiconductor device sealed by the epoxy resin composition according to the present invention.
  • the epoxy resin composition according to the present invention exhibits excellent flame retardancy while minimizing deterioration in shrinkage, curing strength and continuous workability of the epoxy resin composition due to the addition of the flame retardant by using a phosphorus-based flame retardant.
  • X-Y which shows a range means "X or more and Y or less.”
  • the epoxy resin composition for semiconductor element sealing of this invention contains an epoxy resin, a hardening
  • the flame retardant may be represented by the following formula (1).
  • R is hydrogen or a hydrocarbon group of 1 to 20 carbon atoms, preferably, hydrogen, an alkyl group of 1 to 20 carbon atoms, an alkenyl group of 1 to 20 carbon atoms, an alkoxy group of 1 to 20 carbon atoms or 6 to 6 carbon atoms 20 may be an aryl group. More preferably, R may be a phenyl group, a biphenyl group or a naphthalene group.
  • the present inventors conducted a study to develop a technology that can realize a sufficient flame retardancy without lowering the existing physical properties of the epoxy resin composition, when using the flame retardant represented by the formula (1), curing shrinkage rate, strength after curing, work It was found that excellent flame retardancy can be realized without deteriorating physical properties such as properties, and completed the present invention.
  • the flame retardant represented by Chemical Formula 1 may be represented by the following Chemical Formula 2 or Chemical Formula 3.
  • the flame retardant represented by Chemical Formula 1 may be included in about 0.01% to about 3% by weight, preferably about 0.05% to about 1% by weight of the epoxy resin composition.
  • the content of the flame retardant is within the above range, it is possible to implement excellent flame retardant properties without deteriorating the physical properties of the resin composition.
  • the epoxy resin may be used epoxy resins generally used for semiconductor device sealing, it is not particularly limited.
  • an epoxy compound containing two or more epoxy groups in a molecule may be used as the epoxy resin.
  • Such epoxy resins include epoxy resins obtained by epoxidizing condensates of phenol or alkyl phenols with hydroxybenzaldehyde, phenol novolak type epoxy resins, cresol novolak type epoxy resins, polyfunctional type epoxy resins, naphthol novolak type epoxys, etc.
  • Resins novolac epoxy resins of bisphenol A / bisphenol F / bisphenol AD, glycidyl ethers of bisphenol A / bisphenol F / bisphenol AD, bishydroxybiphenyl epoxy resins, dicyclopentadiene epoxy resins, and the like.
  • the epoxy resin may include at least one of a cresol novolac epoxy resin, a polyfunctional epoxy resin, a phenol aralkyl type epoxy resin and a biphenyl type epoxy resin.
  • the multifunctional epoxy resin may be, for example, an epoxy resin represented by the following Formula (4).
  • R1, R2, R3, R4, and R5 are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms
  • R6 and R7 are each independently a hydrogen atom, a methyl group, or an ethyl group
  • a is 0 to 6 Is an integer.
  • R1, R2, R3, R4 and R5 are each independently hydrogen, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group or hexyl group
  • R6 and R7 may be hydrogen, but are not necessarily limited thereto.
  • the multifunctional epoxy resin of [Formula 4] can reduce the deformation of the package, and has excellent advantages in fast curing, latentness and preservation, as well as excellent cured strength and adhesiveness.
  • the multifunctional epoxy resin composition may be a triphenol alkane type epoxy resin such as a triphenol methane type epoxy resin, a triphenol propane type epoxy resin, or the like.
  • the phenol aralkyl type epoxy resin may be, for example, a phenol aralkyl type epoxy resin having a novolak structure including a biphenyl derivative represented by the following Formula 5.
  • the phenol aralkyl type epoxy resin of [Formula 5] forms a structure having a biphenyl in the middle based on a phenol skeleton, and thus has excellent hygroscopicity, toughness, oxidation resistance, and crack resistance. While forming a carbon layer (char) has the advantage that it can secure a certain level of flame resistance in itself.
  • the biphenyl type epoxy resin may be, for example, a biphenyl type epoxy resin represented by the following formula (6).
  • R8, R9, R10, R11, R12, R13, R14 and R15 are each independently an alkyl group having 1 to 4 carbon atoms, the average value of c is 0 to 7.
  • the biphenyl type epoxy resin of the above [Formula 6] is preferable from the viewpoint of fluidity and reliability strengthening of the resin composition.
  • epoxy resins may be used alone or in combination, and are additive compounds made by preliminary reactions such as melt master batches with other components such as hardeners, curing accelerators, mold release agents, coupling agents, and stress relieving agents. It can also be used in the form. On the other hand, in order to improve the moisture resistance reliability, it is preferable to use the epoxy resin that is low in chlorine ions, sodium ions, and other ionic impurities contained in the epoxy resin.
  • the epoxy resin is about 0.1% to about 15% by weight of the epoxy resin composition for sealing semiconductor devices, specifically about 0.1% to about 12% by weight, more specifically about 3% to about 12% by weight It may be included in the content of.
  • the content of the epoxy resin satisfies the above range, it is possible to better implement the adhesive strength and strength of the epoxy resin composition after curing.
  • curing agents generally used for sealing semiconductor devices may be used without limitation, and preferably, curing agents having two or more reactors may be used.
  • a phenol aralkyl type phenol resin such as acid anhydride, metaphenylenediamine, diaminodiphenylmethane, diaminodiphenylsulfone, and the like may be used, but are not limited thereto.
  • the curing agent may include one or more of phenol novolak-type phenol resin, xylox phenol resin, phenol aralkyl type phenol resin, and polyfunctional phenol resin.
  • the phenol novolak type phenol resin may be, for example, a phenol novolak type phenol resin represented by the following [Formula 7], and the phenol aralkyl type phenol resin is represented by, for example, [Formula 8] below It may be a phenol aralkyl type phenol resin having a novolak structure containing a biphenyl derivative in a molecule thereof.
  • the xylloxyl phenolic resin may be, for example, a xyloxyl phenolic resin represented by the following [Formula 9], and the polyfunctional phenolic resin is, for example, represented by the following [Formula 10] It may be a polyfunctional phenol resin containing the repeating unit represented.
  • d is 1 to 7.
  • the average value of g in [Formula 10] is 1 to 7.
  • curing agents may be used alone or in combination, and may also be used as additive compounds made by preliminary reactions such as melt master batches with other components such as epoxy resins, curing accelerators, release agents, coupling agents, and stress relaxation agents.
  • the curing agent may be included in about 0.1% to about 13% by weight, preferably about 0.1% to about 10% by weight, more preferably about 0.1% to about 8% by weight of the epoxy resin composition.
  • the content of the curing agent satisfies the above range, the curing degree of the epoxy resin composition and the strength of the cured product are excellent.
  • the compounding ratio of the epoxy resin and the curing agent may be adjusted according to the requirements of mechanical properties and moisture resistance reliability in the package.
  • the chemical equivalent ratio of the epoxy resin to the curing agent may be about 0.95 to about 3, specifically about 1 to about 2, more specifically about 1 to about 1.75.
  • the inorganic fillers may be used without limitation, general inorganic fillers used in the semiconductor sealing material, it is not particularly limited.
  • the inorganic filler fused silica, crystalline silica, calcium carbonate, magnesium carbonate, alumina, magnesia, clay, talc, calcium silicate, titanium oxide, antimony oxide, glass fiber, etc. may be used. Can be. These may be used alone or in combination.
  • molten silica having a low coefficient of linear expansion is used to reduce stress.
  • Fused silica refers to amorphous silica having a specific gravity of about 2.3 or less, and also includes amorphous silica made by melting crystalline silica or synthesized from various raw materials.
  • the shape and particle diameter of the molten silica are not particularly limited, but the spherical molten silica having a spherical molten silica having an average particle diameter of about 5 ⁇ m to about 30 ⁇ m and a spherical molten silica having an average particle diameter of about 0.001 ⁇ m to about 1 ⁇ m Preferably comprises from about 40% to about 100% by weight of the molten silica mixture comprising about 1% to about 50% by weight relative to the total filler. Moreover, according to a use, the maximum particle diameter can be adjusted to any one of about 45 micrometers, about 55 micrometers, and about 75 micrometers, and can be used.
  • conductive carbon may be included as a foreign material on the silica surface, but it is also important to select a material containing less polar foreign matter.
  • the amount of the inorganic filler used depends on the required physical properties such as formability, low stress, and high temperature strength.
  • the inorganic filler may be included in about 70% to about 95% by weight, for example about 80% to about 90% or about 83% to about 97% by weight of the epoxy resin composition. Within this range, flame retardancy, fluidity and reliability of the epoxy resin composition can be ensured.
  • the epoxy resin composition which concerns on this invention can further contain a hardening accelerator as needed.
  • the curing accelerator is a substance that promotes the reaction of the epoxy resin and the curing agent.
  • a tertiary amine, an organometallic compound, an organophosphorus compound, an imidazole, a boron compound, etc. can be used, for example.
  • Tertiary amines include benzyldimethylamine, triethanolamine, triethylenediamine, diethylaminoethanol, tri (dimethylaminomethyl) phenol, 2-2- (dimethylaminomethyl) phenol, 2,4,6-tris (diaminomethyl ) Phenol and tri-2-ethylhexyl acid salt.
  • organometallic compound examples include chromium acetylacetonate, zinc acetylacetonate, nickel acetylacetonate, and the like.
  • Organophosphorus compounds include tris-4-methoxyphosphine, tetrabutylphosphonium bromide, tetraphenylphosphonium bromide, phenylphosphine, diphenylphosphine, triphenylphosphine, triphenylphosphine triphenylborane, triphenylphosphate And pin-1,4-benzoquinones adducts.
  • the imidazoles include 2-phenyl-4methylimidazole, 2-methylimidazole, # 2-phenylimidazole, # 2-aminoimidazole, 2-methyl-1-vinylimidazole, and 2-ethyl-4.
  • boron compound examples include tetraphenylphosphonium-tetraphenylborate, triphenylphosphine tetraphenylborate, tetraphenylboron salt, trifluoroborane-n-hexylamine, trifluoroborane monoethylamine, tetrafluoro Roboranetriethylamine, tetrafluoroboraneamine, and the like.
  • 1, 5- diazabicyclo [4.3.0] non-5-ene (1, 5- diazabicyclo [4.3.0] non-5-ene: DBN)
  • 1, 8- diazabicyclo [5.4. 0] undec-7-ene 1,8-diazabicyclo [5.4.0] undec-7-ene: DBU
  • phenol novolak resin salts and the like.
  • an organophosphorus compound, a boron compound, an amine type, or an imidazole series hardening accelerator can be used individually or in mixture as said hardening accelerator.
  • the curing accelerator may also use an epoxy resin or an adduct made by preliminary reaction with a curing agent.
  • the amount of the curing accelerator used in the present invention may be about 0.01% to about 2% by weight based on the total weight of the epoxy resin composition, specifically about 0.02% to about 1.5% by weight, more specifically about 0.05% to about It may be about 1% by weight. In the above range, there is an advantage that the curing of the epoxy resin composition is promoted and the degree of curing is also good.
  • the epoxy resin composition of the present invention may further include a conventional additive contained in the composition.
  • the additive may comprise one or more of a coupling agent, a release agent, a stress relaxer, a crosslinking enhancer, a leveling agent, a colorant.
  • the coupling agent may use one or more selected from the group consisting of epoxysilane, aminosilane, mercaptosilane, alkylsilane and alkoxysilane, but is not limited thereto.
  • the coupling agent may be included in about 0.1% to about 1% by weight of the epoxy resin composition.
  • the release agent may use one or more selected from the group consisting of paraffin wax, ester wax, higher fatty acid, higher fatty acid metal salt, natural fatty acid and natural fatty acid metal salt.
  • the release agent may be included in about 0.1% to about 1% by weight of the epoxy resin composition.
  • the stress relieving agent may use one or more selected from the group consisting of modified silicone oils, silicone elastomers, silicone powders and silicone resins, but is not limited thereto.
  • the stress relieving agent is preferably contained in 0 to about 6.5% by weight, for example from about 0.1% to about 1% by weight in the epoxy resin composition, may optionally be included, both may be contained.
  • the modified silicone oil is preferably a silicone polymer having excellent heat resistance, and the total epoxy resin composition by mixing one or two or more kinds of a silicone oil having an epoxy functional group, a silicone oil having an amine functional group, and a silicone oil having a carboxyl functional group. About 0.05% to about 1.5% by weight relative to about 20% by weight.
  • the silicone oil exceeds about 1.5% by weight or more, surface contamination is likely to occur and the resin bleed may be long, and when used below about 0.05% by weight, sufficient low modulus of elasticity may not be obtained. There may be.
  • the silicon powder has a central particle diameter of 15 ⁇ m or less because it does not act as a cause of the deterioration of moldability, and is about 0 to about 5 wt%, for example, about 0.1 wt% to about 5 wt% based on the total resin composition. It may be contained in%.
  • Colorants are for laser marking of semiconductor device sealants, and colorants commonly used in the art, such as carbon black, titanium nitride, titanium black, copper phosphate hydroxide, iron oxides, mica or combinations thereof, may be used. Can be. Colorants may be included from about 0.05% to about 4.0% by weight in the epoxy resin composition. Within this range, incomplete marking of the epoxy resin composition can be prevented from occurring, soot can be prevented from occurring due to sooting during marking, and electrical insulation of the resin composition can be prevented from deteriorating.
  • the additive may be included in about 0.1% to about 10% by weight, for example about 0.1% to about 3% by weight of the epoxy resin composition.
  • a predetermined amount is uniformly mixed sufficiently using a Henschel mixer or Lodige mixer, and then roll-mill After kneading with a kneader or a kneader, cooling and grinding are used to obtain a final powder product.
  • a low pressure transfer molding method can be generally used as a method of sealing a semiconductor element using the epoxy resin composition obtained in the present invention.
  • the present invention is not limited thereto, and molding may also be performed by an injection molding method or a casting method.
  • the epoxy resin composition is preplated with a copper lead frame (e.g., silver plated copper lead frame), a nickel alloy lead frame, and a material containing nickel and palladium in the lead frame by the above method.
  • a semiconductor device in which a semiconductor device is sealed may be manufactured by attaching a lead frame, a PCB, or the like plated with one or more of Ag) and gold (Au).
  • (C) Curing accelerator Triphenylphosphine from Hokko, a triphenylphosphine, was used.
  • (D) Inorganic filler A spherical molten silica having an average particle diameter of 18 ⁇ m and a spherical molten silica having an average particle diameter of 0.5 ⁇ m were mixed and used in a weight ratio of 9 to 1.
  • KBM-803 (Shinetsu), a mercaptopropyltrimethoxysilane (E1), and SZ-6070 (Dow Corning Chemical, Inc.), a methyltrimethoxysilane, were used in combination.
  • Carnauba wax was used as the release agent (f1) and carbon black MA-600 (Matsusita Chemical Co., Ltd.) was used as the colorant.
  • the components were weighed according to the composition of Table 1 below, and then uniformly mixed using a Henschel mixer (KEUM SUNG MACHINERY CO.LTD (KSM-22)) to prepare a powder-based primary composition. Then, melt kneading at 95 ° C. using a continuous kneader, followed by cooling and pulverization to prepare an epoxy resin composition for sealing a semiconductor device.
  • a Henschel mixer KEUM SUNG MACHINERY CO.LTD (KSM-22)
  • Flowability (inch) Flow length was measured using a transfer molding press at 175 ° C. and 70 kgf / cm 2 using an evaluation mold according to EMMI-1-66. The higher the measured value, the better the fluidity.
  • Hardening shrinkage (%): Molded specimens (125 ⁇ 12.6 ⁇ ) using a transfer molding press at 175 ° C. and 70 kgf / cm 2 using ASTM molds for flexural strength specimen preparation for the prepared composition. 6.4 mm). The obtained specimen was placed in an oven at 170 ° C. to 180 ° C. for 4 hours, post-cured (PMC: post molding cure), and then cooled. The length of the specimen was measured by a caliper. The cure shrinkage was calculated from the following equation 1.
  • C is the length of the specimen obtained by the transfer molding press of the epoxy resin composition at 175 °C, 70kgf / cm 2
  • D is the specimen obtained after curing and cooling the specimen at 170 ⁇ 180 °C 4 hours Length).
  • Release force The mold release force test mold was cleaned three times at 175 ° C. for 300 seconds using melamine resin, and then molded twice at 175 ° C. for 300 seconds using Tablet wax to apply Wax to the test mold. After the epoxy resin composition prepared as described above was molded at 175 ° C. for 120 seconds, a release force with a mold was measured using a release force measuring device. The release force was measured 50 times, and the force was measured using a force pull gauge.

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Abstract

The present invention relates to an epoxy resin composition for sealing a semiconductor device, the composition containing an epoxy resin, a curing agent, an inorganic filler, and a flame retardant represented by chemical formula 1, and to a semiconductor device sealed by the same. In chemical formula 1, R is hydrogen or a C1-C20 hydrocarbon group.

Description

반도체 소자 밀봉용 에폭시 수지 조성물 및 이를 이용하여 밀봉된 반도체 소자Epoxy resin composition for semiconductor device sealing and semiconductor device sealed using the same
본 발명은 반도체 소자 밀봉용 에폭시 수지 조성물 및 이를 이용하여 밀봉된 반도체 소자에 관한 것이다. 보다 상세하게는, 특정 구조의 인계 난연재를 포함하여 난연재 첨가에 따른 에폭시 수지 조성물의 수축율, 경화 강도 및 연속 작업성이 저하되는 것을 최소화할 수 있으며, 우수한 난연성을 나타내는 반도체 소자 밀봉용 에폭시 수지 및 이를 이용하여 밀봉된 반도체 소자에 관한 것이다.The present invention relates to an epoxy resin composition for semiconductor device sealing and a semiconductor device sealed using the same. More specifically, it is possible to minimize the reduction in shrinkage, curing strength and continuous workability of the epoxy resin composition according to the addition of the flame-retardant material including a phosphorus-based flame retardant of a specific structure, epoxy resin for sealing a semiconductor device exhibiting excellent flame retardancy and the same It relates to a semiconductor element sealed using.
반도체 소자 등의 밀봉에 사용되는 에폭시 수지 조성물의 경우, 일반적으로 난연성이 요구되며, 반도체 업체의 경우, UL94 V-0 수준의 난연성을 요구하고 있다. 이러한 난연성을 확보하기 위하여, 종래에는 할로겐계 난연재를 에폭시 수지 조성물에 첨가하여 사용하여 왔다. 그러나, 할로겐계 난연재의 경우, 소각 시나 화재 시에 다이옥산이나 다이퓨란 등과 같은 유독성 발암 물질이 발생하고, 연소 시에 브롬화수소, 염화수소 등과 같은 산성 가스가 발생하여 인체에 유독하며, 반도체 칩이나 와이어, 리드 프레임과 같은 부품을 부식시킨다는 문제점이 있다.In the case of the epoxy resin composition used for sealing of semiconductor elements, etc., flame retardancy is generally required, and in the case of semiconductor companies, flame retardancy of UL94 V-0 level is required. In order to secure such flame retardancy, the halogen-type flame retardant was conventionally added and used for the epoxy resin composition. However, in the case of halogen-based flame retardants, toxic carcinogens such as dioxane and difuran are generated during incineration or fire, and acid gases such as hydrogen bromide and hydrogen chloride are generated during combustion, and are toxic to the human body. There is a problem of corrosion of parts such as lead frames.
상기와 같은 문제점을 해결하기 위해, 비할로겐계 유기 난연재와 무기 난연재를 개발하기 위한 연구들이 시도되었다. 유기 난연재로는 포스파젠이나 인산에스테르와 같은 인계 난연재 또는 질소를 함유하는 수지 등이 검토되었다. 그러나, 질소 함유 수지의 경우, 난연성이 충분하지 않으며, 인계 난연재의 경우, 소량만 사용하여도 에폭시 수지 조성물의 수축율이 커지고, 수지 조성물의 경화 후 유리전이온도가 저하된다는 문제점이 있다.In order to solve the above problems, studies have been attempted to develop non-halogen organic flame retardants and inorganic flame retardants. As organic flame retardants, phosphorus-based flame retardants such as phosphazene and phosphate esters or resins containing nitrogen have been studied. However, in the case of nitrogen-containing resin, the flame retardancy is not sufficient, and in the case of phosphorus-based flame retardant, even if only a small amount is used, there is a problem that the shrinkage ratio of the epoxy resin composition is increased, and the glass transition temperature after curing of the resin composition is lowered.
최근 작고, 얇은 디자인의 디지털 기기들이 보편화되면서, 그 내부에 실장되는 반도체 패키지 역시 경박단소화되어 가는 추세이기 때문에, 밀봉재인 에폭시 수지의 수축율이 커질 경우, 반도체 패키지가 휘어지는 휨(warpage)가 발생하게 된다. 반도체 패키지에 휨이 발생하면, 납땜 시에 납땜 불량이 발생하고, 이에 따라 전기적 불량이 발생된다. 이러한 이유에서 에폭시 수지 조성물의 수축율을 증가시키는 인계 난연재의 경우 사용이 제약되고 있다.In recent years, as digital devices with small and thin designs are becoming more common, semiconductor packages mounted therein are also thin and short. Therefore, when the shrinkage ratio of the epoxy resin as a sealing material increases, warpage of the semiconductor package may occur. do. If warpage occurs in the semiconductor package, soldering defects occur at the time of soldering, thereby causing electrical defects. For this reason, the use of phosphorus-based flame retardants that increase the shrinkage of the epoxy resin composition is limited.
한편, 무기 난연재로는 수산화마그네슘이나 징크보레이트 등과 같은 물질들이 검토되고 있으나, 상기 무기 난연재들의 경우, 충분한 난연성을 확보하기 위해서는, 과량으로 사용되어야 하고, 이 경우, 밀봉용 에폭시 수지 조성물의 경화성이나 연속 성형성 등이 저하된다는 문제점이 있다.On the other hand, as inorganic flame retardant materials such as magnesium hydroxide or zinc borate have been studied, in the case of the inorganic flame retardant materials, in order to ensure sufficient flame retardancy, should be used in excess, in this case, the curability or continuous of the sealing epoxy resin composition There exists a problem that moldability etc. fall.
따라서, 에폭시 수지 조성물의 수축율, 경화 강도 및 연속 작업성이 저하되는 것을 최소화할 수 있으며, 우수한 난연성을 나타내는 반도체 소자 밀봉용 에폭시 수지 조성물에 대한 개발이 필요한 실정이다.Therefore, it is possible to minimize the reduction in shrinkage, curing strength and continuous workability of the epoxy resin composition, and it is necessary to develop an epoxy resin composition for sealing semiconductor devices that exhibits excellent flame resistance.
관련 선행기술이 한국공개특허 제2012-0110267호에 개시되어 있다.Related prior art is disclosed in Korean Patent Laid-Open No. 2012-0110267.
본 발명의 목적은 난연재 첨가에 따른 수축율, 경화 강도 및 작업성 등의 물성 저하를 최소화하면서 우수한 난연성을 구현할 수 있는 반도체 소자 밀봉용 에폭시 수지 조성물을 제공하는 것이다.An object of the present invention is to provide an epoxy resin composition for sealing a semiconductor device that can implement excellent flame retardancy while minimizing the physical properties such as shrinkage, curing strength and workability due to the addition of flame retardant.
본 발명의 다른 목적은 상기와 같은 에폭시 수지 조성물에 의해 밀봉된 반도체 소자를 제공하는 것이다.Another object of the present invention is to provide a semiconductor device sealed by the epoxy resin composition as described above.
일 측면에서, 본 발명은 에폭시 수지, 경화제, 무기 충전재 및 하기 화학식 1로 표시되는 난연재를 포함하는 반도체 소자 밀봉용 에폭시 수지 조성물을 제공한다.In one aspect, the present invention provides an epoxy resin composition for sealing a semiconductor device comprising an epoxy resin, a curing agent, an inorganic filler and a flame retardant represented by the following formula (1).
[화학식 1][Formula 1]
Figure PCTKR2016011745-appb-I000001
Figure PCTKR2016011745-appb-I000001
상기 화학식 1에서, R은 수소 또는 탄소수 1~20의 탄화수소기이다. 바람직하게는, 상기 R은 수소, 탄소수 1~20의 알킬기, 탄소수 1~20의 알케닐기, 탄소수 1~20의 알콕시기 또는 탄소수 6~20의 아릴기일 수 있으며, 더 바람직하게는, 상기 R은 페닐기, 비페닐기 또는 나프탈렌기일 수 있다.In Formula 1, R is hydrogen or a hydrocarbon group of 1 to 20 carbon atoms. Preferably, R may be hydrogen, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, and more preferably, R is It may be a phenyl group, a biphenyl group or a naphthalene group.
구체예에서, 상기 난연재는 하기 화학식 2 또는 화학식 3으로 표시되는 것일 수 있다.In embodiments, the flame retardant may be represented by the following formula (2) or formula (3).
[화학식 2][Formula 2]
Figure PCTKR2016011745-appb-I000002
Figure PCTKR2016011745-appb-I000002
[화학식 3][Formula 3]
Figure PCTKR2016011745-appb-I000003
Figure PCTKR2016011745-appb-I000003
상기 난연재는 에폭시 수지 조성물 중 약 0.01 중량% 내지 약 3 중량%로 포함될 수 있다.The flame retardant may be included in about 0.01% to about 3% by weight of the epoxy resin composition.
또한, 상기 에폭시 수지 조성물은 에폭시 수지 약 0.1중량% 내지 약 15중량%, 경화제 약 0.1중량% 내지 약 13중량%, 무기 충전재 약 70중량% 내지 약 95중량% 및 화학식 1로 표시되는 난연재를 약 0.01 중량% 내지 약 3 중량%를 포함할 수 있다.In addition, the epoxy resin composition is about 0.1% to about 15% by weight of the epoxy resin, about 0.1% to about 13% by weight of the curing agent, about 70% to about 95% by weight of the inorganic filler and flame retardant represented by Formula 1 0.01 wt% to about 3 wt%.
다른 측면에서, 본 발명은 상기 본 발명에 따른 에폭시 수지 조성물에 의해 밀봉된 반도체 소자를 제공한다. In another aspect, the present invention provides a semiconductor device sealed by the epoxy resin composition according to the present invention.
본 발명에 따른 에폭시 수지 조성물은 특정 구조의 인계 난연재를 사용함으로써, 난연재 첨가에 따른 에폭시 수지 조성물의 수축율, 경화 강도 및 연속 작업성이 저하되는 것을 최소화하면서도 우수한 난연성을 나타낸다.The epoxy resin composition according to the present invention exhibits excellent flame retardancy while minimizing deterioration in shrinkage, curing strength and continuous workability of the epoxy resin composition due to the addition of the flame retardant by using a phosphorus-based flame retardant.
이하, 본 발명을 보다 자세히 설명한다.Hereinafter, the present invention will be described in more detail.
본 발명을 설명함에 있어서, 관련된 공지 기술에 대한 구체적인 설명이 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우 그 상세한 설명은 생략한다.In describing the present invention, when it is determined that the detailed description of the related known technology may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted.
본 명세서 상에서 언급한 “포함한다”, “갖는다”, “이루어진다” 등이 사용되는 경우 “~만”이 사용되지 않는 이상 다른 부분이 추가될 수 있다. 구성 요소를 단수로 표현한 경우에 특별히 명시적인 기재 사항이 없는 한 복수를 포함하는 경우를 포함한다.When "include", "have", "consist", or the like mentioned in the present specification, other parts may be added unless "only" is used. In the case where the component is expressed in the singular, the plural includes the plural unless specifically stated otherwise.
또한, 구성 요소를 해석함에 있어서, 별도의 명시적 기재가 없더라도 오차 범위를 포함하는 것으로 해석한다.In addition, in interpreting a component, even if there is no separate description, it is interpreted as including an error range.
또한, 본 명세서에 있어서, 범위를 나타내는 「X 내지 Y」는 「X 이상 Y 이하」를 의미한다. In addition, in this specification, "X-Y" which shows a range means "X or more and Y or less."
에폭시 수지 조성물Epoxy resin composition
먼저, 본 발명에 따른 에폭시 수지 조성물에 대해 설명한다.First, the epoxy resin composition which concerns on this invention is demonstrated.
본 발명의 반도체 소자 밀봉용 에폭시 수지 조성물은 에폭시 수지, 경화제, 무기 충전재 및 난연재를 포함한다. The epoxy resin composition for semiconductor element sealing of this invention contains an epoxy resin, a hardening | curing agent, an inorganic filler, and a flame retardant.
이때 상기 난연재는 하기 화학식 1로 표시되는 것일 수 있다.At this time, the flame retardant may be represented by the following formula (1).
[화학식 1][Formula 1]
Figure PCTKR2016011745-appb-I000004
Figure PCTKR2016011745-appb-I000004
상기 화학식 1에서, R은 수소 또는 탄소수 1~20의 탄화수소기이며, 바람직하게는, 수소, 탄소수 1~20의 알킬기, 탄소수 1~20의 알케닐기, 탄소수 1~20의 알콕시기 또는 탄소수 6~20의 아릴기일 수 있다. 더 바람직하게는, 상기 R은 페닐기, 비페닐기 또는 나프탈렌기일 수 있다.In Formula 1, R is hydrogen or a hydrocarbon group of 1 to 20 carbon atoms, preferably, hydrogen, an alkyl group of 1 to 20 carbon atoms, an alkenyl group of 1 to 20 carbon atoms, an alkoxy group of 1 to 20 carbon atoms or 6 to 6 carbon atoms 20 may be an aryl group. More preferably, R may be a phenyl group, a biphenyl group or a naphthalene group.
본 발명자들은 에폭시 수지 조성물의 기존 물성을 저하시키지 않으면서도 충분한 난연성을 구현할 수 있는 기술을 개발하기 위해 연구를 거듭한 결과, 상기 화학식 1로 표시되는 난연재를 사용할 경우, 경화 수축율, 경화 후 강도, 작업성 등의 물성 저하 없이 우수한 난연성을 구현할 수 있음을 알아내고 본 발명을 완성하였다.The present inventors conducted a study to develop a technology that can realize a sufficient flame retardancy without lowering the existing physical properties of the epoxy resin composition, when using the flame retardant represented by the formula (1), curing shrinkage rate, strength after curing, work It was found that excellent flame retardancy can be realized without deteriorating physical properties such as properties, and completed the present invention.
구체적으로는, 상기 화학식 1로 표시되는 난연재는 하기 화학식 2 또는 화학식 3으로 표시되는 것일 수 있다. Specifically, the flame retardant represented by Chemical Formula 1 may be represented by the following Chemical Formula 2 or Chemical Formula 3.
[화학식 2][Formula 2]
Figure PCTKR2016011745-appb-I000005
Figure PCTKR2016011745-appb-I000005
[화학식 3][Formula 3]
Figure PCTKR2016011745-appb-I000006
Figure PCTKR2016011745-appb-I000006
한편, 본 발명에 있어서, 상기 화학식 1로 표시되는 난연재는 에폭시 수지 조성물 중 약 0.01 중량% 내지 약 3 중량%, 바람직하게는 약 0.05 중량% 내지 약 1 중량%로 포함될 수 있다. 난연재의 함량이 상기 범위를 만족할 경우, 수지 조성물의 물성 저하 없이 우수한 난연 특성을 구현할 수 있다.Meanwhile, in the present invention, the flame retardant represented by Chemical Formula 1 may be included in about 0.01% to about 3% by weight, preferably about 0.05% to about 1% by weight of the epoxy resin composition. When the content of the flame retardant is within the above range, it is possible to implement excellent flame retardant properties without deteriorating the physical properties of the resin composition.
한편, 상기 에폭시 수지로는 반도체 소자 밀봉용으로 일반적으로 사용되는 에폭시 수지들이 사용될 수 있으며, 특별히 제한되지 않는다. 예를 들면, 상기 에폭시 수지로 분자 중에 2개 이상의 에폭시기를 함유하는 에폭시 화합물을 사용할 수 있다. 이와 같은 에폭시 수지로는 페놀 또는 알킬 페놀류와 히드록시벤즈알데히드와의 축합물을 에폭시화함으로써 얻어지는 에폭시 수지, 페놀노볼락형 에폭시 수지, 크레졸노볼락형 에폭시 수지, 다관능형 에폭시 수지, 나프톨노볼락형 에폭시 수지, 비스페놀A/비스페놀F/비스페놀AD의 노볼락형 에폭시 수지, 비스페놀A/비스페놀F/비스페놀AD의 글리시딜에테르, 비스히드록시비페닐계 에폭시 수지, 디시클로펜타디엔계 에폭시 수지 등을 들 수 있다. 보다 구체적으로는, 상기 에폭시 수지는 크레졸노볼락형 에폭시 수지, 다관능형 에폭시 수지, 페놀아랄킬형 에폭시 수지 및 바이페닐형 에폭시 수지 중 하나 이상을 포함할 수 있다.On the other hand, the epoxy resin may be used epoxy resins generally used for semiconductor device sealing, it is not particularly limited. For example, an epoxy compound containing two or more epoxy groups in a molecule may be used as the epoxy resin. Such epoxy resins include epoxy resins obtained by epoxidizing condensates of phenol or alkyl phenols with hydroxybenzaldehyde, phenol novolak type epoxy resins, cresol novolak type epoxy resins, polyfunctional type epoxy resins, naphthol novolak type epoxys, etc. Resins, novolac epoxy resins of bisphenol A / bisphenol F / bisphenol AD, glycidyl ethers of bisphenol A / bisphenol F / bisphenol AD, bishydroxybiphenyl epoxy resins, dicyclopentadiene epoxy resins, and the like. Can be. More specifically, the epoxy resin may include at least one of a cresol novolac epoxy resin, a polyfunctional epoxy resin, a phenol aralkyl type epoxy resin and a biphenyl type epoxy resin.
상기 다관능형 에폭시 수지는, 예를 들면, 하기 화학식 4로 표시되는 에폭시 수지일 수 있다.The multifunctional epoxy resin may be, for example, an epoxy resin represented by the following Formula (4).
[화학식 4][Formula 4]
Figure PCTKR2016011745-appb-I000007
Figure PCTKR2016011745-appb-I000007
상기 [화학식 4]에서 R1, R2, R3, R4 및 R5는 각각 독립적으로 수소 원자 또는 탄소수 1~10의 알킬기이고, R6 및 R7은 각각 독립적으로 수소 원자, 메틸기 또는 에틸기이고, a는 O 내지 6의 정수이다. 바람직하게는, 상기 R1, R2, R3, R4 및 R5는 각각 독립적으로 수소, 메틸기, 에틸기, 프로필기, 이소프로필기, n-부틸기, 이소부틸기, tert-부틸기, 펜틸기 또는 헥실기이며, R6 및 R7은 수소일 수 있으나, 반드시 이에 제한되는 것은 아니다. In Formula [4], R1, R2, R3, R4, and R5 are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms, R6 and R7 are each independently a hydrogen atom, a methyl group, or an ethyl group, and a is 0 to 6 Is an integer. Preferably, R1, R2, R3, R4 and R5 are each independently hydrogen, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group or hexyl group R6 and R7 may be hydrogen, but are not necessarily limited thereto.
상기 [화학식 4]의 다관능형 에폭시 수지는 패키지의 변형을 작게 할 수 있고, 속경화성, 잠재성 및 보존성이 우수할 뿐만 아니라, 경화물 강도 및 접착성도 우수한 장점이 있다.The multifunctional epoxy resin of [Formula 4] can reduce the deformation of the package, and has excellent advantages in fast curing, latentness and preservation, as well as excellent cured strength and adhesiveness.
보다 구체적으로 상기 다관능형 에폭시 수지 조성물은 트리페놀메탄형 에폭시 수지, 트리페놀프로판형 에폭시 수지 등과 같은 트리페놀알칸형 에폭시 수지일 수 있다.More specifically, the multifunctional epoxy resin composition may be a triphenol alkane type epoxy resin such as a triphenol methane type epoxy resin, a triphenol propane type epoxy resin, or the like.
상기 페놀아랄킬형 에폭시 수지는, 예를 들면, 하기 화학식 5로 표시되는 바이페닐(biphenyl) 유도체를 포함하는 노볼락 구조의 페놀아랄킬형 에폭시 수지일 수 있다. The phenol aralkyl type epoxy resin may be, for example, a phenol aralkyl type epoxy resin having a novolak structure including a biphenyl derivative represented by the following Formula 5.
[화학식 5][Formula 5]
Figure PCTKR2016011745-appb-I000008
Figure PCTKR2016011745-appb-I000008
상기 [화학식 5]에서, b의 평균치는 1 내지 7이다.In [Formula 5], the average value of b is 1 to 7.
상기 [화학식 5]의 페놀아랄킬형 에폭시 수지는 페놀 골격을 바탕으로 하면서 중간에 바이페닐을 가지고 있는 구조를 형성하여 흡습성, 인성, 내산화성 및 내크랙성이 우수하며, 가교 밀도가 낮아서 고온에서 연소 시 탄소층(char)을 형성하면서 그 자체로 어느 정도 수준의 난연성을 확보할 수 있는 장점이 있다.The phenol aralkyl type epoxy resin of [Formula 5] forms a structure having a biphenyl in the middle based on a phenol skeleton, and thus has excellent hygroscopicity, toughness, oxidation resistance, and crack resistance. While forming a carbon layer (char) has the advantage that it can secure a certain level of flame resistance in itself.
상기 바이페닐형 에폭시 수지는, 예를 들면, 하기 화학식 6으로 표시되는 바이페닐형 에폭시 수지일 수 있다.The biphenyl type epoxy resin may be, for example, a biphenyl type epoxy resin represented by the following formula (6).
[화학식 6][Formula 6]
Figure PCTKR2016011745-appb-I000009
Figure PCTKR2016011745-appb-I000009
상기 [화학식 6]에서, R8, R9, R10, R11, R12, R13, R14 및 R15는 각각 독립적으로 탄소수 1~4의 알킬기이며, c의 평균값은 0 내지 7이다.In [Formula 6], R8, R9, R10, R11, R12, R13, R14 and R15 are each independently an alkyl group having 1 to 4 carbon atoms, the average value of c is 0 to 7.
상기 [화학식 6]의 바이페닐형 에폭시 수지는 수지 조성물의 유동성 및 신뢰성 강화 측면에서 바람직하다.The biphenyl type epoxy resin of the above [Formula 6] is preferable from the viewpoint of fluidity and reliability strengthening of the resin composition.
이들 에폭시 수지는 단독 혹은 병용하여 사용될 수 있으며, 에폭시 수지에 경화제, 경화 촉진제, 이형제, 커플링제, 및 응력완화제 등의 기타 성분과 멜트 마스터배치(melt master batch)와 같은 선반응을 시켜 만든 부가 화합물 형태로 사용할 수도 있다. 한편, 내습 신뢰성 향상을 위해 상기 에폭시 수지는 에폭시 수지 중에 함유된 염소 이온(ion), 나트륨 이온(sodium ion), 및 그 밖의 이온성 불순물이 낮은 것을 사용하는 것이 바람직하다.These epoxy resins may be used alone or in combination, and are additive compounds made by preliminary reactions such as melt master batches with other components such as hardeners, curing accelerators, mold release agents, coupling agents, and stress relieving agents. It can also be used in the form. On the other hand, in order to improve the moisture resistance reliability, it is preferable to use the epoxy resin that is low in chlorine ions, sodium ions, and other ionic impurities contained in the epoxy resin.
상기 에폭시 수지는 반도체 소자 밀봉용 에폭시 수지 조성물 중 약 0.1중량% 내지 약 15중량% 정도, 구체적으로는 약 0.1중량% 내지 약 12중량% 정도, 더욱 구체적으로 약 3중량% 내지 약 12중량% 정도의 함량으로 포함될 수 있다. 에폭시 수지의 함량이 상기 범위를 만족할 경우, 경화 후 에폭시 수지 조성물의 접착력 및 강도를 보다 우수하게 구현할 수 있다.The epoxy resin is about 0.1% to about 15% by weight of the epoxy resin composition for sealing semiconductor devices, specifically about 0.1% to about 12% by weight, more specifically about 3% to about 12% by weight It may be included in the content of. When the content of the epoxy resin satisfies the above range, it is possible to better implement the adhesive strength and strength of the epoxy resin composition after curing.
다음으로, 상기 경화제로는, 반도체 소자 밀봉용으로 일반적으로 사용되는 경화제들이 제한 없이 사용될 수 있으며, 바람직하게는 2개 이상의 반응기를 가진 경화제가 사용될 수 있다.Next, as the curing agent, curing agents generally used for sealing semiconductor devices may be used without limitation, and preferably, curing agents having two or more reactors may be used.
구체적으로는, 상기 경화제로는, 페놀아랄킬형 페놀수지, 페놀노볼락형 페놀수지, 자일록(xylok)형 페놀수지, 크레졸 노볼락형 페놀수지, 나프톨형 페놀수지, 테르펜형 페놀수지, 다관능형 페놀수지, 디시클로펜타디엔계 페놀수지, 비스페놀 A와 레졸로부터 합성된 노볼락형 페놀수지, 트리스(하이드록시페닐)메탄, 디하이드록시바이페닐을 포함하는 다가 페놀 화합물, 무수 말레인산 및 무수 프탈산을 포함하는 산무수물, 메타페닐렌디아민, 디아미노디페닐메탄, 디아미노디페닐설폰 등의 방향족 아민 등이 사용될 수 있으나, 이에 한정되는 것은 아니다. Specifically, as the curing agent, a phenol aralkyl type phenol resin, a phenol phenol novolak type phenol resin, a xylok type phenol resin, a cresol novolak type phenol resin, a naphthol type phenol resin, a terpene type phenol resin, a polyfunctional type Phenol resins, dicyclopentadiene phenol resins, polyhydric phenol compounds including novolac-type phenol resins synthesized from bisphenol A and resol, tris (hydroxyphenyl) methane, dihydroxybiphenyl, maleic anhydride and phthalic anhydride Aromatic amines such as acid anhydride, metaphenylenediamine, diaminodiphenylmethane, diaminodiphenylsulfone, and the like may be used, but are not limited thereto.
예를 들어, 상기 경화제는 페놀노볼락형 페놀수지, 자일록형 페놀수지, 페놀아랄킬형 페놀수지 및 다관능형 페놀수지 중 하나 이상을 포함할 수 있다. 상기 페놀노볼락형 페놀수지는, 예를 들면, 하기 [화학식 7]로 표시되는 페놀노볼락형 패놀수지일 수 있으며, 상기 페놀아랄킬형 페놀수지는 예를 들면, 하기 [화학식 8]로 표시되는 분자 중에 바이페닐 유도체를 포함하는 노볼락 구조의 페놀아랄킬형 페놀수지일 수 있다. 또한, 상기 자일록형 페놀수지는, 예를 들면, 하기 [화학식 9]으로 표시되는 자일록(xylok)형 페놀수지일 수 있으며, 상기 다관능형 페놀수지는, 예를 들면, 하기 [화학식 10]으로 표시되는 반복 단위를 포함하는 다관능형 페놀수지일 수 있다.For example, the curing agent may include one or more of phenol novolak-type phenol resin, xylox phenol resin, phenol aralkyl type phenol resin, and polyfunctional phenol resin. The phenol novolak type phenol resin may be, for example, a phenol novolak type phenol resin represented by the following [Formula 7], and the phenol aralkyl type phenol resin is represented by, for example, [Formula 8] below It may be a phenol aralkyl type phenol resin having a novolak structure containing a biphenyl derivative in a molecule thereof. In addition, the xylloxyl phenolic resin may be, for example, a xyloxyl phenolic resin represented by the following [Formula 9], and the polyfunctional phenolic resin is, for example, represented by the following [Formula 10] It may be a polyfunctional phenol resin containing the repeating unit represented.
[화학식 7][Formula 7]
Figure PCTKR2016011745-appb-I000010
Figure PCTKR2016011745-appb-I000010
상기 [화학식 7]에서 d는 1 내지 7이다.In Formula 7, d is 1 to 7.
[화학식 8][Formula 8]
Figure PCTKR2016011745-appb-I000011
Figure PCTKR2016011745-appb-I000011
상기 [화학식 8]에서, e의 평균치는 1 내지 7이다.In [Formula 8], the average value of e is 1 to 7.
[화학식 9][Formula 9]
Figure PCTKR2016011745-appb-I000012
Figure PCTKR2016011745-appb-I000012
상기 [화학식 9]에서, f의 평균치는 0 내지 7이다.In [Formula 9], the average value of f is 0 to 7.
[화학식 10][Formula 10]
Figure PCTKR2016011745-appb-I000013
Figure PCTKR2016011745-appb-I000013
상기 [화학식 10]에서 g의 평균치는 1 내지 7이다.The average value of g in [Formula 10] is 1 to 7.
이들 경화제는 단독 혹은 병용하여 사용될 수 있으며, 경화제에 에폭시 수지, 경화 촉진제, 이형제, 커플링제, 및 응력완화제 등의 기타 성분과 멜트 마스터 배치와 같은 선반응을 시켜 만든 부가 화합물로도 사용할 수 있다.These curing agents may be used alone or in combination, and may also be used as additive compounds made by preliminary reactions such as melt master batches with other components such as epoxy resins, curing accelerators, release agents, coupling agents, and stress relaxation agents.
상기 경화제는 에폭시 수지 조성물 중 약 0.1 중량% 내지 약 13 중량%, 바람직하게는 약 0.1 중량% 내지 약 10 중량%, 더욱 바람직하게는 약 0.1 중량% 내지 약 8 중량%으로 포함될 수 있다. 경화제의 함량이 상기의 범위를 만족할 경우, 에폭시 수지 조성물의 경화도 및 경화물의 강도가 우수하다.The curing agent may be included in about 0.1% to about 13% by weight, preferably about 0.1% to about 10% by weight, more preferably about 0.1% to about 8% by weight of the epoxy resin composition. When the content of the curing agent satisfies the above range, the curing degree of the epoxy resin composition and the strength of the cured product are excellent.
한편, 상기 에폭시 수지와 경화제와의 배합비는 패키지에서의 기계적 성질 및 내습 신뢰성의 요구에 따라 조절될 수 있다. 예를 들면, 상기 경화제에 대한 에폭시 수지의 화학 당량비가 약 0.95 내지 약 3일 수 있으며, 구체적으로 약 1 내지 약 2, 더욱 구체적으로 약 1 내지 약 1.75일 수 있다. 에폭시 수지와 경화제의 배합비가 상기의 범위를 만족할 경우, 에폭시 수지 조성물 경화 후에 우수한 강도를 구현할 수 있다.On the other hand, the compounding ratio of the epoxy resin and the curing agent may be adjusted according to the requirements of mechanical properties and moisture resistance reliability in the package. For example, the chemical equivalent ratio of the epoxy resin to the curing agent may be about 0.95 to about 3, specifically about 1 to about 2, more specifically about 1 to about 1.75. When the compounding ratio of the epoxy resin and the curing agent satisfies the above range, it is possible to implement excellent strength after curing the epoxy resin composition.
다음으로, 상기 무기 충전재는 반도체 밀봉재에 사용되는 일반적인 무기 충전재들이 제한없이 사용될 수 있으며, 특별히 한정되지 않는다. 예를 들면, 상기 무기 충전재로는 용융실리카, 결정성실리카, 탄산칼슘, 탄산마그네슘, 알루미나, 마그네시아, 클레이(clay), 탈크(talc), 규산칼슘, 산화티탄, 산화안티몬, 유리섬유 등이 사용될 수 있다. 이들은 단독 또는 혼합하여 사용될 수 있다. Next, the inorganic fillers may be used without limitation, general inorganic fillers used in the semiconductor sealing material, it is not particularly limited. For example, as the inorganic filler, fused silica, crystalline silica, calcium carbonate, magnesium carbonate, alumina, magnesia, clay, talc, calcium silicate, titanium oxide, antimony oxide, glass fiber, etc. may be used. Can be. These may be used alone or in combination.
바람직하게는 저응력화를 위해서 선팽창계수가 낮은 용융실리카를 사용한다. 용융실리카는 진비중이 약 2.3 이하인 비결정성 실리카를 의미하는 것으로 결정성 실리카를 용융하여 만들거나 다양한 원료로부터 합성한 비결정성 실리카도 포함된다. 용융실리카의 형상 및 입경은 특별히 한정되지는 않지만, 평균 입경 약 5㎛ 내지 약 30㎛의 구상용융실리카를 약 50중량% 내지 약 99중량%, 평균입경 약 0.001㎛ 내지 약 1㎛의 구상 용융실리카를 약 1중량% 내지 약 50중량%를 포함한 용융실리카 혼합물을 전체 충전재에 대하여 약 40중량% 내지 약 100중량%가 되도록 포함하는 것이 좋다. 또한, 용도에 맞춰 그 최대 입경을 약 45㎛, 약 55㎛, 및 약 75㎛ 중 어느 하나로 조정해서 사용할 수가 있다. 상기 구상 용융실리카에는 도전성의 카본이 실리카 표면에 이물질로서 포함되는 경우가 있으나 극성 이물질의 혼입이 적은 물질을 선택하는 것도 중요하다.Preferably, molten silica having a low coefficient of linear expansion is used to reduce stress. Fused silica refers to amorphous silica having a specific gravity of about 2.3 or less, and also includes amorphous silica made by melting crystalline silica or synthesized from various raw materials. The shape and particle diameter of the molten silica are not particularly limited, but the spherical molten silica having a spherical molten silica having an average particle diameter of about 5 μm to about 30 μm and a spherical molten silica having an average particle diameter of about 0.001 μm to about 1 μm Preferably comprises from about 40% to about 100% by weight of the molten silica mixture comprising about 1% to about 50% by weight relative to the total filler. Moreover, according to a use, the maximum particle diameter can be adjusted to any one of about 45 micrometers, about 55 micrometers, and about 75 micrometers, and can be used. In the spherical molten silica, conductive carbon may be included as a foreign material on the silica surface, but it is also important to select a material containing less polar foreign matter.
무기 충전재의 사용량은 성형성, 저응력성, 및 고온강도 등의 요구 물성에 따라 다르다. 구체예에서는 상기 무기 충전재는 에폭시 수지 조성물 중 약 70 중량% 내지 약 95중량%, 예를 들면 약 80중량% 내지 약 90중량% 또는 약 83중량% 내지 약 97중량%로 포함될 수 있다. 상기 범위에서, 에폭시 수지 조성물의 난연성, 유동성 및 신뢰성을 확보할 수 있다.The amount of the inorganic filler used depends on the required physical properties such as formability, low stress, and high temperature strength. In embodiments, the inorganic filler may be included in about 70% to about 95% by weight, for example about 80% to about 90% or about 83% to about 97% by weight of the epoxy resin composition. Within this range, flame retardancy, fluidity and reliability of the epoxy resin composition can be ensured.
한편, 본 발명에 따른 에폭시 수지 조성물은, 필요에 따라 경화 촉진제를 더 포함할 수 있다.On the other hand, the epoxy resin composition which concerns on this invention can further contain a hardening accelerator as needed.
상기 경화 촉진제는 에폭시 수지와 경화제의 반응을 촉진하는 물질이다. 상기 경화 촉진제로는, 예를 들면, 3급 아민, 유기금속화합물, 유기인화합물, 이미다졸, 및 붕소화합물 등이 사용 가능하다. 3급 아민에는 벤질디메틸아민, 트리에탄올아민, 트리에틸렌디아민, 디에틸아미노에탄올, 트리(디메틸아미노메틸)페놀, 2-2-(디메틸아미노메틸)페놀, 2,4,6-트리스(디아미노메틸)페놀과 트리-2-에틸헥실산염 등이 있다. The curing accelerator is a substance that promotes the reaction of the epoxy resin and the curing agent. As said hardening accelerator, a tertiary amine, an organometallic compound, an organophosphorus compound, an imidazole, a boron compound, etc. can be used, for example. Tertiary amines include benzyldimethylamine, triethanolamine, triethylenediamine, diethylaminoethanol, tri (dimethylaminomethyl) phenol, 2-2- (dimethylaminomethyl) phenol, 2,4,6-tris (diaminomethyl ) Phenol and tri-2-ethylhexyl acid salt.
상기 유기 금속화합물의 구체적인 예로는, 크로뮴아세틸아세토네이트, 징크아세틸아세토네이트, 니켈아세틸아세토네이트 등이 있다. 유기인화합물에는 트리스-4-메톡시포스핀, 테트라부틸포스포늄브로마이드, 테트라페닐포스포늄브로마이드, 페닐포스핀, 디페닐포스핀, 트리페닐포스핀, 트리페닐포스핀트리페닐보란, 트리페닐포스핀-1,4-벤조퀴논 부가물 등이 있다. 이미다졸류에는 2-페닐-4메틸이미다졸, 2-메틸이미다졸, 2-페닐이미다졸, 2-아미노이미다졸, 2-메틸-1-비닐이미다졸, 2-에틸-4-메틸이미다졸, 2-헵타데실이미다졸 등을 들 수 있으나, 이에 한정되는 것은 아니다. 상기 붕소화합물의 구체적인 예로는, 테트라페닐포스포늄-테트라페닐보레이트, 트리페닐포스핀 테트라페닐보레이트, 테트라페닐보론염, 트리플루오로보란-n-헥실아민, 트리플루오로보란모노에틸아민, 테트라플루오로보란트리에틸아민, 테트라플루오로보란아민 등이 있다. 이외에도 1,5-디아자바이시클로[4.3.0]논-5-엔(1,5-diazabicyclo[4.3.0]non-5-ene:DBN), 1,8-디아자바이시클로[5.4.0]운덱-7-엔(1,8-diazabicyclo[5.4.0]undec-7-ene: DBU) 및 페놀노볼락 수지염 등을 들 수 있으나, 이에 한정되는 것은 아니다.Specific examples of the organometallic compound include chromium acetylacetonate, zinc acetylacetonate, nickel acetylacetonate, and the like. Organophosphorus compounds include tris-4-methoxyphosphine, tetrabutylphosphonium bromide, tetraphenylphosphonium bromide, phenylphosphine, diphenylphosphine, triphenylphosphine, triphenylphosphine triphenylborane, triphenylphosphate And pin-1,4-benzoquinones adducts. The imidazoles include 2-phenyl-4methylimidazole, 2-methylimidazole, # 2-phenylimidazole, # 2-aminoimidazole, 2-methyl-1-vinylimidazole, and 2-ethyl-4. -Methylimidazole, 2-heptadecylimidazole, and the like, but are not limited thereto. Specific examples of the boron compound include tetraphenylphosphonium-tetraphenylborate, triphenylphosphine tetraphenylborate, tetraphenylboron salt, trifluoroborane-n-hexylamine, trifluoroborane monoethylamine, tetrafluoro Roboranetriethylamine, tetrafluoroboraneamine, and the like. In addition, 1, 5- diazabicyclo [4.3.0] non-5-ene (1, 5- diazabicyclo [4.3.0] non-5-ene: DBN), 1, 8- diazabicyclo [5.4. 0] undec-7-ene (1,8-diazabicyclo [5.4.0] undec-7-ene: DBU) and phenol novolak resin salts, and the like.
보다 구체적으로는, 상기 경화 촉진제로 유기인화합물, 붕소화합물, 아민계, 또는 이미다졸계 경화 촉진제를 단독 혹은 혼합하여 사용할 수 있다. 상기 경화 촉진제는 에폭시 수지 또는 경화제와 선반응하여 만든 부가물을 사용하는 것도 가능하다.More specifically, an organophosphorus compound, a boron compound, an amine type, or an imidazole series hardening accelerator can be used individually or in mixture as said hardening accelerator. The curing accelerator may also use an epoxy resin or an adduct made by preliminary reaction with a curing agent.
본 발명에서 경화 촉진제의 사용량은 에폭시 수지 조성물 총 중량에 대하여 약 0.01중량% 내지 약 2 중량% 정도일 수 있으며, 구체적으로 약 0.02중량% 내지 약 1.5 중량% 정도, 더욱 구체적으로 약 0.05중량% 내지 약 1 중량% 정도일 수 있다. 상기의 범위에서 에폭시 수지 조성물의 경화를 촉진하고 또한, 경화도도 좋은 장점이 있다.The amount of the curing accelerator used in the present invention may be about 0.01% to about 2% by weight based on the total weight of the epoxy resin composition, specifically about 0.02% to about 1.5% by weight, more specifically about 0.05% to about It may be about 1% by weight. In the above range, there is an advantage that the curing of the epoxy resin composition is promoted and the degree of curing is also good.
또한, 본 발명의 에폭시 수지 조성물은 조성물에 포함되는 통상의 첨가제를 더 포함할 수 있다. 구체예에서, 첨가제는 커플링제, 이형제, 응력 완화제, 가교 증진제, 레벨링제, 착색제 중 하나 이상을 포함할 수 있다.In addition, the epoxy resin composition of the present invention may further include a conventional additive contained in the composition. In an embodiment, the additive may comprise one or more of a coupling agent, a release agent, a stress relaxer, a crosslinking enhancer, a leveling agent, a colorant.
커플링제는 에폭시실란, 아미노실란, 머캡토실란, 알킬실란 및 알콕시실란으로 이루어진 군으로부터 선택되는 1종 이상을 사용할 수 있지만, 이에 제한되지 않는다. 커플링제는 에폭시 수지 조성물 중 약 0.1중량% 내지 약 1중량%로 포함될 수 있다.The coupling agent may use one or more selected from the group consisting of epoxysilane, aminosilane, mercaptosilane, alkylsilane and alkoxysilane, but is not limited thereto. The coupling agent may be included in about 0.1% to about 1% by weight of the epoxy resin composition.
이형제는 파라핀계 왁스, 에스테르계 왁스, 고급 지방산, 고급 지방산 금속염, 천연 지방산 및 천연 지방산 금속염으로 이루어진 군으로부터 선택되는 1종 이상을 사용할 수 있다. 이형제는 에폭시 수지 조성물 중 약 0.1중량% 내지 약 1중량%로 포함될 수 있다.The release agent may use one or more selected from the group consisting of paraffin wax, ester wax, higher fatty acid, higher fatty acid metal salt, natural fatty acid and natural fatty acid metal salt. The release agent may be included in about 0.1% to about 1% by weight of the epoxy resin composition.
응력 완화제는 변성 실리콘 오일, 실리콘 엘라스토머, 실리콘 파우더 및 실리콘 레진으로 이루어진 군으로부터 선택되는 1종 이상을 사용할 수 있지만, 이에 제한되지 않는다. 응력 완화제는 에폭시 수지 조성물 중 0 내지 약 6.5중량%, 예를 들면 약 0.1중량% 내지 약 1중량%로 함유되는 것이 바람직한데, 선택적으로 함유될 수도 있고, 양자 모두 함유될 수도 있다. 이때, 변성 실리콘 오일로는 내열성이 우수한 실리콘 중합체가 좋으며, 에폭시 관능기를 갖는 실리콘 오일, 아민 관능기를 갖는 실리콘 오일 및 카르복실 관능기를 갖는 실리콘 오일 등을 1종 또는 2종 이상 혼합하여 전체 에폭시 수지 조성물에 대해 약 0.05 중량% 내지 약 1.5 중량% 사용할 수 있다. 다만, 실리콘 오일을 약 1.5 중량% 이상 초과할 경우에는 표면 오염이 발생하기 쉽고 레진 블리드(bleed)가 길어질 우려가 있으며, 약 0.05 중량% 미만으로 사용 시에는 충분한 저탄성률을 얻을 수가 없게 되는 문제점이 있을 수 있다. 또한, 실리콘 파우더는 중심입경이 15㎛ 이하인 것이 성형성 저하의 원인으로 작용하지 않기에 특히 바람직하며, 전체 수지 조성물에 대하여 약 0 내지 약 5중량%, 예를 들면 약 0.1중량% 내지 약 5중량%로 함유될 수 있다.The stress relieving agent may use one or more selected from the group consisting of modified silicone oils, silicone elastomers, silicone powders and silicone resins, but is not limited thereto. The stress relieving agent is preferably contained in 0 to about 6.5% by weight, for example from about 0.1% to about 1% by weight in the epoxy resin composition, may optionally be included, both may be contained. At this time, the modified silicone oil is preferably a silicone polymer having excellent heat resistance, and the total epoxy resin composition by mixing one or two or more kinds of a silicone oil having an epoxy functional group, a silicone oil having an amine functional group, and a silicone oil having a carboxyl functional group. About 0.05% to about 1.5% by weight relative to about 20% by weight. However, if the silicone oil exceeds about 1.5% by weight or more, surface contamination is likely to occur and the resin bleed may be long, and when used below about 0.05% by weight, sufficient low modulus of elasticity may not be obtained. There may be. In addition, it is particularly preferable that the silicon powder has a central particle diameter of 15 μm or less because it does not act as a cause of the deterioration of moldability, and is about 0 to about 5 wt%, for example, about 0.1 wt% to about 5 wt% based on the total resin composition. It may be contained in%.
착색제는 반도체 소자 밀봉재의 레이저 마킹을 위한 것으로, 당해 기술 분야에서 일반적으로 사용되는 착색제들, 예를 들면, 카본블랙, 티탄 질화물, 티탄블랙, 인산수산화구리, 철산화물, 운모 또는 이들의 조합이 사용될 수 있다. 착색제는 에폭시 수지 조성물 중 약 0.05중량% 내지 약 4.0중량%로 포함될 수 있다. 상기 범위에서, 에폭시 수지 조성물의 불완전 마킹이 일어나는 것을 방지하고, 마킹시 그을음이 발생하여 마킹성이 저하되는 것을 막을 수 있으며, 수지 조성물의 전기 절연성이 나빠지는 것을 막을 수 있다.Colorants are for laser marking of semiconductor device sealants, and colorants commonly used in the art, such as carbon black, titanium nitride, titanium black, copper phosphate hydroxide, iron oxides, mica or combinations thereof, may be used. Can be. Colorants may be included from about 0.05% to about 4.0% by weight in the epoxy resin composition. Within this range, incomplete marking of the epoxy resin composition can be prevented from occurring, soot can be prevented from occurring due to sooting during marking, and electrical insulation of the resin composition can be prevented from deteriorating.
상기 첨가제는 에폭시 수지 조성물 중 약 0.1중량% 내지 약 10중량%, 예를 들면 약 0.1중량% 내지 약 3중량%로 포함될 수 있다.The additive may be included in about 0.1% to about 10% by weight, for example about 0.1% to about 3% by weight of the epoxy resin composition.
이상과 같은 원재료를 이용하여 에폭시 수지 조성물을 제조하는 일반적인 방법으로는 소정의 배합량을 헨셀 믹서(Hensel mixer)나 뢰디게 믹서(Lodige mixer)를 이용하여 균일하게 충분히 혼합한 뒤, 롤밀(roll-mill)이나 니이더(kneader)로 용융 혼련한 후, 냉각, 분쇄 과정을 거쳐 최종 분말 제품을 얻는 방법이 사용되고 있다.As a general method for producing an epoxy resin composition using the raw materials described above, a predetermined amount is uniformly mixed sufficiently using a Henschel mixer or Lodige mixer, and then roll-mill After kneading with a kneader or a kneader, cooling and grinding are used to obtain a final powder product.
본 발명에서 얻어진 에폭시 수지 조성물을 사용하여 반도체 소자를 밀봉하는 방법으로써는 저압 트랜스퍼 성형법이 일반적으로 사용될 수 있다. 그러나, 이에 한정되는 것은 아니며, 인젝션(injection) 성형법이나 캐스팅(casting) 등의 방법으로도 성형이 가능하다.As a method of sealing a semiconductor element using the epoxy resin composition obtained in the present invention, a low pressure transfer molding method can be generally used. However, the present invention is not limited thereto, and molding may also be performed by an injection molding method or a casting method.
상기 방법에 의해 에폭시 수지 조성물을, 구리계 리드프레임(예: 은 도금된 구리 리드프레임), 니켈 합금계 리드프레임, 상기 리드프레임에 니켈과 팔라듐을 포함하는 물질로 선도금(preplating)후 은(Ag) 및 금(Au) 중 하나 이상으로 도금된 리드프레임, PCB 등과 부착시켜 반도체 소자를 밀봉한 반도체 장치를 제조할 수 있다.The epoxy resin composition is preplated with a copper lead frame (e.g., silver plated copper lead frame), a nickel alloy lead frame, and a material containing nickel and palladium in the lead frame by the above method. A semiconductor device in which a semiconductor device is sealed may be manufactured by attaching a lead frame, a PCB, or the like plated with one or more of Ag) and gold (Au).
이하, 본 발명의 바람직한 실시예를 통해 본 발명의 구성 및 작용을 더욱 상세히 설명하기로 한다. 다만, 이는 본 발명의 바람직한 예시로 제시된 것이며 어떠한 의미로도 이에 의해 본 발명이 제한되는 것으로 해석될 수는 없다.Hereinafter, the configuration and operation of the present invention through the preferred embodiment of the present invention will be described in more detail. However, this is presented as a preferred example of the present invention and in no sense can be construed as limiting the present invention.
여기에 기재되지 않은 내용은 이 기술 분야에서 숙련된 자이면 충분히 기술적으로 유추할 수 있는 것이므로 그 설명을 생략하기로 한다.Details that are not described herein will be omitted since those skilled in the art can sufficiently infer technically.
실시예Example
하기 실시예 및 비교예에서 사용된 성분들의 구체적인 사양은 다음과 같다.Specific specifications of the components used in the following Examples and Comparative Examples are as follows.
(A) 에폭시 수지(A) epoxy resin
(a1) 비페닐 아랄킬형 에폭시 수지인 Nippon Kayaku사의 NC-3000을 사용하였다.(a1) NC-3000 by Nippon Kayaku, a biphenyl aralkyl type epoxy resin, was used.
(a2) 다관능성 에폭시 수지인 Nippon Kayaku사의 EPPN-501HY를 사용하였다.(a2) EPPN-501HY of Nippon Kayaku, a polyfunctional epoxy resin, was used.
(B) 경화제 : 다관능성 페놀수지인 Meiwa사의 MEH-7500을 사용하였다.(B) Curing agent: MEH-7500 of Meiwa, a polyfunctional phenol resin, was used.
(C) 경화촉진제: 트리페닐포스핀인 Hokko사의 Triphenylphosphine을 사용하였다.(C) Curing accelerator: Triphenylphosphine from Hokko, a triphenylphosphine, was used.
(D) 무기충전재: 평균입경이 18㎛인 구상 용융실리카와 평균입경이 0.5㎛인 구상 용융실리카를 9 대 1의 중량비로 혼합하여 사용하였다.(D) Inorganic filler: A spherical molten silica having an average particle diameter of 18 µm and a spherical molten silica having an average particle diameter of 0.5 µm were mixed and used in a weight ratio of 9 to 1.
(E) 커플링제:(E) coupling agent:
(e1) 머캡토프로필트리메톡시실란인 KBM-803(Shinetsu사) 및 (e2) 메틸트리메톡시실란인 SZ-6070(Dow Corning chemical사)을 혼합하여 사용하였다.KBM-803 (Shinetsu), a mercaptopropyltrimethoxysilane (E1), and SZ-6070 (Dow Corning Chemical, Inc.), a methyltrimethoxysilane, were used in combination.
(F) 첨가제:(F) Additives:
(f1) 이형제로 카르나우바왁스 및 (f2) 착색제로 카본 블랙 MA-600(Matsusita Chemical사)을 사용하였다.Carnauba wax was used as the release agent (f1) and carbon black MA-600 (Matsusita Chemical Co., Ltd.) was used as the colorant.
(G) 난연재(G) flame retardant
(g1) 하기 방법으로 합성된 4-히드록시페닐 트리페닐포스포늄 3-히드록시-2-나프타날리드(4-Hydroxyphenyltriphenylphosphonium 3-hydroxy 2-naphthanalide)를 사용하였다.(g1) 4-Hydroxyphenyltriphenylphosphonium 3-hydroxy 2-naphthanalide 4-hydroxyphenyl triphenylphosphonium 3-hydroxy-2-naphthanide synthesized by the following method was used.
1L 둥근바닥 플라스크에 triphenylphosphine 100g과 4-Bromophenol 60g, NiBr2 3.7g을 넣고 ethylene glycol 130g을 넣은 후, 180℃에서 6시간 동안 반응시켜 아래 화학식 11과 같은 구조의 페놀이 치환된 포스포늄 브로마이드 염(tetraphenylphosphonium bromide)을 얻었다.Into a 1 L round bottom flask, 100 g of triphenylphosphine, 60 g of 4-Bromophenol, and 3.7 g of NiBr 2 were added thereto, and 130 g of ethylene glycol was added thereto. tetraphenylphosphonium bromide).
[화학식 11][Formula 11]
Figure PCTKR2016011745-appb-I000014
Figure PCTKR2016011745-appb-I000014
MeOH 50g에 3-hydroxy-2-naphthanalide 27g을 넣고, 25% sodium methoxide solution 21.6g을 투입하여 상온에서 30분간 반응시키면서 완전히 녹인 후, 메탄올 50g에 미리 녹여 놓은 상기 화학식 11과 같은 구조의 페놀이 치환된 포스포늄 브로마이드 염 43.5g을 서서히 투입하고 1시간을 더 반응시킨 후 생성된 흰색 고체 화합물을 걸러내어 47g을 얻어냈다. NMR 데이타로 하기 화학식 2의 화합물임을 확인하였다.3-hydroxy-2-naphthanalide in 50g MeOH 27 g was added, 25% sodium methoxide solution was added 21.6 g, and the mixture was completely dissolved while reacting at room temperature for 30 minutes. Then, 43.5 g of a phenol substituted phosphonium bromide salt, which was previously dissolved in 50 g of methanol, was slowly added thereto. After further reacting for 1 hour, the produced white solid compound was filtered to obtain 47 g. NMR data confirmed that the compound of the formula (2).
[화학식 2][Formula 2]
Figure PCTKR2016011745-appb-I000015
Figure PCTKR2016011745-appb-I000015
(g2) 하기 방법으로 합성된 4-히드록시페닐 트리페닐포스포늄 3-히드록시 N-(1-나프틸) 2-나프타미드(4-Hydroxyphenyltriphenylphosphonium 3-hydroxy N-(1-naphthyl) 2-naphthamide)를 사용하였다.(g2) 4-hydroxyphenyl triphenylphosphonium 3-hydroxy N- (1-naphthyl) 2-naphtamide synthesized by the following method (4-Hydroxyphenyltriphenylphosphonium 3-hydroxy N- (1-naphthyl) 2-naphthamide ) Was used.
MeOH 50g에 3-hydroxy-N-(1-naphthyl)-2-naphthamide 32.2g을 넣고, 25% sodium methoxide solution 21.6g을 투입하여 상온에서 30분간 반응시키면서 완전히 녹인 후, 메탄올 50g에 미리 녹여 놓은 상기 화학식 11과 같은 구조의 페놀이 치환된 포스포늄 브로마이드 염 43.5g을 서서히 투입하고 1시간을 더 반응시킨 후 생성된 흰색 고체 화학식 3의 화합물을 걸러내어 47g을 얻어냈다. NMR 데이타로 하기 화학식 3의 화합물임을 확인하였다.32.2 g of 3-hydroxy-N- (1-naphthyl) -2-naphthamide was added to 50 g of MeOH, 21.6 g of 25% sodium methoxide solution was added thereto, followed by reaction at room temperature for 30 minutes, and then completely dissolved in 50 g of methanol. 43.5 g of a phenol-substituted phosphonium bromide salt having the structure shown in Chemical Formula 11 was slowly added thereto, and further reacted for 1 hour, after which the resulting white solid compound of Chemical Formula 3 was filtered to obtain 47 g. NMR data confirmed that the compound of the formula (3).
[화학식 3][Formula 3]
Figure PCTKR2016011745-appb-I000016
Figure PCTKR2016011745-appb-I000016
(g3) Sigma-Aldrich의 시약급 Triphenyl phosphate를 사용하였다.(g3) Sigma-Aldrich's reagent grade Triphenyl phosphate was used.
(g4) HOKKO CHEMICAL의 Triphenylphosphine oxide를 사용하였다.(g4) Triphenylphosphine oxide of HOKKO CHEMICAL was used.
(g5) TATEHO MAGU사의 Magnesium Zinc Hydroxide인 ECOMAG Z-10을 사용하였다.(g5) ECOMAG Z-10, Magnesium Zinc Hydroxide from TATEHO MAGU, was used.
(g6) SUMITOMO CHEMICAL사의 Aluminum Hydroxide CL-310을 사용하였다.(g6) Aluminum Hydroxide CL-310 manufactured by SUMITOMO CHEMICAL was used.
실시예Example 1~3,  1 to 3, 비교예Comparative example 1~2 1 ~ 2
상기 각 성분들을 하기 표 1의 조성에 따라 평량한 후, 헨셀 믹서(KEUM SUNG MACHINERY CO.LTD(KSM-22))를 이용하여 균일하게 혼합하여 분말 상태의 1차 조성물을 제조하였다. 이후, 연속 니이더(Kneader)를 이용하여 95℃에서 용융 혼련 후, 냉각 및 분쇄하여 반도체 소자 밀봉용 에폭시 수지 조성물을 제조하였다. The components were weighed according to the composition of Table 1 below, and then uniformly mixed using a Henschel mixer (KEUM SUNG MACHINERY CO.LTD (KSM-22)) to prepare a powder-based primary composition. Then, melt kneading at 95 ° C. using a continuous kneader, followed by cooling and pulverization to prepare an epoxy resin composition for sealing a semiconductor device.
Figure PCTKR2016011745-appb-T000001
Figure PCTKR2016011745-appb-T000001
상기 실시예 1 ~ 3 및 비교예 1~5에 의해 제조된 반도체 소자 밀봉용 에폭시 수지 조성물의 유동성, 경화도, 경화 수축율, 유리전이온도, 이형력, 연속 작업성 및 난연성을 하기 물성측정방법을 통해 측정하였다. 측정 결과는 하기 [표 2]에 나타내었다.The physical properties of the epoxy resin composition for sealing semiconductor elements prepared by Examples 1 to 3 and Comparative Examples 1 to 5, the degree of cure, cure shrinkage rate, glass transition temperature, release force, continuous workability and flame retardancy Measured through. The measurement results are shown in the following [Table 2].
물성측정방법Property Measurement Method
(1) 유동성(inch): EMMI-1-66에 준하여 평가용 금형을 사용하여 175℃, 70kgf/cm2 에서 트랜스퍼 몰딩 프레스(transfer molding press)를 이용하여 유동 길이를 측정하였다. 측정값이 높을수록 유동성이 우수하다. (1) Flowability (inch): Flow length was measured using a transfer molding press at 175 ° C. and 70 kgf / cm 2 using an evaluation mold according to EMMI-1-66. The higher the measured value, the better the fluidity.
(2) 경화도: 경화도(shore-D): 구리 금속 소자를 포함하는 가로 24mm, 세로 24mm, 두께 1mm인 eTQFP(exposed Thin Quad Flat Package) 패키지용 금형이 장착된 MPS(Multi Plunger System) 성형기를 이용하여 175℃에서 40초, 50초, 60초, 70초 그리고 80초간 평가하고자 하는 에폭시 수지 조성물을 경화시킨 후 금형 위의 패지지에 직접 Shore-D형 경도계로 경화시간에 따른 경화물의 경도를 측정하였다. 값이 높을 수록 경화도가 우수하다.(2) Curing degree: shore-D: MPS (Multi Plunger System) molding machine equipped with mold for exposed thin quad flat package (eTQFP) package with 24mm width, 24mm length and 1mm thickness including copper metal elements. After curing the epoxy resin composition to be evaluated at 175 ° C. for 40 seconds, 50 seconds, 60 seconds, 70 seconds and 80 seconds, the hardness of the cured product according to the curing time with Shore-D hardness tester directly on the package on the mold. Was measured. The higher the value, the better the degree of curing.
(3) 경화 수축율(%): 제조된 조성에 대해 굴곡 강도 시편 제작용 ASTM금형을 사용하여 175℃, 70kgf/cm2에서 트랜스퍼 몰딩 프레스(transfer molding press)를 이용하여 성형시편(125×12.6×6.4mm)을 얻었다. 얻은 시편을 170~180℃의 오븐에 넣어 4시간 동안 후경화(PMC:post molding cure)시킨 다음 냉각한 후 시험편의 길이를 캘리퍼스로 측정하였다. 경화 수축율은 다음과 같은 식 1로부터 계산하였다.(3) Hardening shrinkage (%): Molded specimens (125 × 12.6 ×) using a transfer molding press at 175 ° C. and 70 kgf / cm 2 using ASTM molds for flexural strength specimen preparation for the prepared composition. 6.4 mm). The obtained specimen was placed in an oven at 170 ° C. to 180 ° C. for 4 hours, post-cured (PMC: post molding cure), and then cooled. The length of the specimen was measured by a caliper. The cure shrinkage was calculated from the following equation 1.
<식 1> <Equation 1>
경화수축률= (C - D)/C × 100Hardening shrinkage ratio = (C-D) / C × 100
(상기 식 1에서, C는 에폭시수지 조성물을 175℃, 70kgf/cm2의 트랜스퍼 몰딩 프레스하여 얻은 시편의 길이, D는 상기 시편을 170~180℃에서 4시간 후경화하고 냉각시킨 후 얻은 시편의 길이이다).(In Formula 1, C is the length of the specimen obtained by the transfer molding press of the epoxy resin composition at 175 ℃, 70kgf / cm 2 , D is the specimen obtained after curing and cooling the specimen at 170 ~ 180 ℃ 4 hours Length).
(4) 유리전이온도(℃): 열기계 분석기(Thermomechanical Analyzer, TMA)를 이용하여 측정하였다. 이때 TMA는 25℃에서 분당 10℃씩 온도를 상승시켜 300℃까지 측정하는 조건으로 설정하였다.(4) Glass transition temperature (° C.): Measured using a thermomechanical analyzer (TMA). At this time, the TMA was set to the conditions to increase the temperature by 10 ℃ per minute at 25 ℃ measured to 300 ℃.
(5) 이형력: 멜라민 수지를 이용 300초간 175℃에서 3번의 성형으로 이형력 테스트 금형을 클리닝한 후 Tablet wax를 이용하여 300초간 175℃에서 2번의 성형하여 테스트 몰드에 Wax를 도포하였다. 상기와 같이 제조된 에폭시 수지 조성물을 175℃에서 120초 동안 성형 후 이형력 측정장치를 이용하여 금형과의 이형력을 측정하였다. 이형력 측정은 50회 이루어졌으며, 이형력 측정은 force pull gauge를 사용하였다.(5) Release force: The mold release force test mold was cleaned three times at 175 ° C. for 300 seconds using melamine resin, and then molded twice at 175 ° C. for 300 seconds using Tablet wax to apply Wax to the test mold. After the epoxy resin composition prepared as described above was molded at 175 ° C. for 120 seconds, a release force with a mold was measured using a release force measuring device. The release force was measured 50 times, and the force was measured using a force pull gauge.
(6) 연속작업성: 트랜스터 성형기를 이용하여, 금형온도 175℃, 주입압력 9.0MPa, 경화시간 60sec에서 208LQFP(28mm×28mm×1.4mm 두께)를 연속으로 성형하였다.게이트 막힘, 에어벤트 막힘, 금형에서의 패키지 스티킹, 컬 스티킹 등의 성형 불량이 발생하기까지의 쇼트 수를 이형불량으로 나타냈다. 값이 높을 수록 연속작업성이 우수하다.(6) Continuous workability: A 208 LQFP (28 mm x 28 mm x 1.4 mm thickness) was continuously formed at a mold temperature of 175 DEG C, an injection pressure of 9.0 MPa and a curing time of 60 sec using a transfer molding machine. The number of shots before molding defects such as package sticking and curl sticking in the mold was indicated as release defects. The higher the value, the better the continuous workability.
(7) 난연성: 1/8 inch 시편을 이용하여 UL 94에 준하여 측정하였다. (7) Flame retardant: measured in accordance with UL 94 using a 1/8 inch specimen.
Figure PCTKR2016011745-appb-T000002
Figure PCTKR2016011745-appb-T000002
상기 [표 2]에 나타난 바와 같이, 화학식 1의 난연재를 사용한 실시예 1 ~ 3의 에폭시 수지 조성물의 경우, 경화도, 경화수축율, 유리전이온도, 이형력, 연속 성형성이 모두 우수하게 나타났다. 이에 반해, 난연재를 사용하지 않은 비교예 1의 경우, 난연성이 확보되지 않았으며, 유기 인계 난연재를 사용한 비교예 2, 3의 경우, 경화수축율 및 유리전이온도가 저하되었음을 알 수 있다. 또한, 무기계 난연재를 사용한 비교예 4 및 5의 경우, 연속 성형성이 현저하게 저하되고, 이형력이 떨어져 작업성이 좋지 못함을 알 수 있다. As shown in Table 2, in the epoxy resin compositions of Examples 1 to 3 using the flame retardant of Chemical Formula 1, the degree of curing, curing shrinkage, glass transition temperature, release force, and continuous moldability were all excellent. On the other hand, in the case of Comparative Example 1, which does not use a flame retardant material, the flame retardancy was not secured, and in Comparative Examples 2 and 3 using the organophosphorus-based flame retardant material, it can be seen that the curing shrinkage rate and the glass transition temperature were lowered. In addition, in the case of Comparative Examples 4 and 5 using the inorganic flame retardant material, it can be seen that the continuous moldability is remarkably lowered and the release force is poor, resulting in poor workability.

Claims (7)

  1. 에폭시 수지, 경화제, 무기 충전재 및 하기 화학식 1로 표시되는 난연재를 포함하는 반도체 소자 밀봉용 에폭시 수지 조성물.An epoxy resin composition for sealing semiconductor elements comprising an epoxy resin, a curing agent, an inorganic filler, and a flame retardant represented by the following formula (1).
    [화학식 1][Formula 1]
    Figure PCTKR2016011745-appb-I000017
    Figure PCTKR2016011745-appb-I000017
    상기 화학식 1에서, R은 수소 또는 탄소수 1~20의 탄화수소기임.In Formula 1, R is hydrogen or a hydrocarbon group having 1 to 20 carbon atoms.
  2. 제1항에 있어서,The method of claim 1,
    상기 R은 수소, 탄소수 1~20의 알킬기, 탄소수 1~20의 알케닐기, 탄소수 1~20의 알콕시기 또는 탄소수 6~20의 아릴기인 반도체 소자 밀봉용 에폭시 수지 조성물.The R is an epoxy resin composition for sealing a semiconductor element which is hydrogen, an alkyl group having 1 to 20 carbon atoms, an alkenyl group having 1 to 20 carbon atoms, an alkoxy group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms.
  3. 제1항에 있어서,The method of claim 1,
    상기 R은 페닐기, 비페닐기 또는 나프탈렌기인 반도체 소자 밀봉용 에폭시 수지 조성물.Wherein R is a phenyl group, a biphenyl group or a naphthalene group epoxy resin composition for sealing semiconductor elements.
  4. 제1항에 있어서,The method of claim 1,
    상기 난연재는 하기 화학식 2 또는 화학식 3으로 표시되는 것인 반도체 소자 밀봉용 에폭시 수지 조성물.The flame retardant is an epoxy resin composition for sealing a semiconductor device represented by the following formula (2) or (3).
    [화학식 2][Formula 2]
    Figure PCTKR2016011745-appb-I000018
    Figure PCTKR2016011745-appb-I000018
    [화학식 3][Formula 3]
    Figure PCTKR2016011745-appb-I000019
    Figure PCTKR2016011745-appb-I000019
  5. 제1항에 있어서,The method of claim 1,
    상기 난연재는 에폭시 수지 조성물 중 약 0.01 중량% 내지 약 3 중량%로 포함되는 반도체 소자 밀봉용 에폭시 수지 조성물.The flame retardant is an epoxy resin composition for sealing a semiconductor device containing about 0.01% to about 3% by weight of the epoxy resin composition.
  6. 제1항에 있어서,The method of claim 1,
    상기 에폭시 수지 조성물은 에폭시 수지 약 0.1중량% 내지 약 15중량%, 경화제 약 0.1중량% 내지 약 13중량%, 무기 충전재 약 70중량% 내지 약 95중량% 및 화학식 1로 표시되는 난연재 약 0.01중량% 내지 약 3 중량%를 포함하는 반도체 소자 밀봉용 에폭시 수지 조성물.The epoxy resin composition is about 0.1% to about 15% by weight of epoxy resin, about 0.1% to about 13% by weight of the curing agent, about 70% to about 95% by weight of the inorganic filler and about 0.01% by weight of the flame retardant represented by Formula 1 Epoxy resin composition for sealing a semiconductor device comprising from about 3% by weight.
  7. 제1항 내지 제6항중 어느 한 항의 에폭시 수지 조성물에 의해 밀봉된 반도체 소자.The semiconductor element sealed by the epoxy resin composition of any one of Claims 1-6.
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KR20140082528A (en) * 2012-12-24 2014-07-02 제일모직주식회사 Tetravalent phosphonium salt, epoxy resin composition for encapsulating semiconductor device comprising the same and semiconductor device encapsulated with the same
KR20150011747A (en) * 2013-07-23 2015-02-02 제일모직주식회사 Compound comprising phosphonium ion, epoxy resin composition comprising the same and apparatus prepared from using the same

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CN108291052B (en) 2020-07-03

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