WO2017079882A1 - 一种端面具有金属微纳米结构的光纤及其制备方法和应用方法 - Google Patents
一种端面具有金属微纳米结构的光纤及其制备方法和应用方法 Download PDFInfo
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- WO2017079882A1 WO2017079882A1 PCT/CN2015/094144 CN2015094144W WO2017079882A1 WO 2017079882 A1 WO2017079882 A1 WO 2017079882A1 CN 2015094144 W CN2015094144 W CN 2015094144W WO 2017079882 A1 WO2017079882 A1 WO 2017079882A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/262—Optical details of coupling light into, or out of, or between fibre ends, e.g. special fibre end shapes or associated optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N2021/7706—Reagent provision
- G01N2021/772—Tip coated light guide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1809—Diffraction gratings with pitch less than or comparable to the wavelength
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29361—Interference filters, e.g. multilayer coatings, thin film filters, dichroic splitters or mirrors based on multilayers, WDM filters
- G02B6/29368—Light guide comprising the filter, e.g. filter deposited on a fibre end
Definitions
- the invention belongs to the field of micro-nano optical devices, in particular to an optical fiber with a metal micro-nano structure on the end face, a preparation method and an application method thereof.
- a surface plasmon is a surface wave formed by the coupling of a metal surface charge and an electromagnetic field.
- a light wave is incident on the interface between the metal and the medium, the free electrons on the metal surface collectively oscillate, and the light wave is freely electronically coupled with the metal surface to form a surface plasmon.
- the frequency and phase of the surface plasmon coincide with the incident light wave, resonance occurs, and the resonance conditions such as the wavelength, the light intensity, the exit angle, and the like vary with the refractive index of the environment. Therefore, surface plasmon resonance (SPR) is used to measure the refractive index of the environment. This measurement can reflect the molecular interaction and the concentration of molecular solutions. It is widely used in life science research, drug screening and food industry. application.
- Integrating SPR with optical fiber to utilize fiber guided wave technology to easily stimulate SPR and sense it has been pursued for many years.
- the micro-nano device is integrated on the end face of the fiber, and the light wave excitation and detection of the micro-nano device through the fiber guided wave technology will enable the mature fiber-optic communication technology to be well integrated with the novel sensing technology, and at the same time, it is simple and flexible. Easy to carry optical function device.
- the fiber is very thin, these devices can be inserted into a small space and work in the body environment.
- the fiber-optic end-face SPR devices of the predecessors are all single-cycle structures, and their performance is far worse than the commercial free-space SPR sensors. So far, no real application has been obtained. In order to circumvent this difficulty, some people have made SPR devices on the side of the fiber, but this method has certain limitations on the sample holding method.
- micro-nano patterns and devices on the end faces of fibers using existing mainstream micro-nano patterning techniques, including ultraviolet lithography, electron beam lithography, focused ion beam etching, and the like.
- ultraviolet lithography electron beam lithography
- focused ion beam etching and the like.
- the micro-nano pattern is directly prepared on the end face of the fiber by ultraviolet lithography or electron beam lithography, the photoresist needs to be uniformly and controllably coated on the sample, and the light of the entire fiber end face is achieved to achieve high processing precision.
- the thickness of the glue needs to be very uniform, and because the area of the fiber end face is very small (for example, the fiber used for fiber communication, the cladding diameter is usually only about 125 microns), it is impossible to apply the photoresist by the spin coating method commonly used in the semiconductor industry. .
- the technique of applying a droplet of photoresist to the end face of the fiber and then flattening the droplet of the photoresist with an air gun is used, but this method is very inaccurate in controlling the thickness of the photoresist, and the method is used on the end face of the fiber.
- micro/nano patterns The yield of preparing micro/nano patterns is very low (Shengfei Feng, Xinping Zhang, Hao Wang, Mudi Xin, and Zhenzhen Lu, "Fiber coupled waveguide structures", Appl. Phys. Lett. 96, 133101 (2010)).
- a micro-nano pattern is prepared on the end face of the fiber by using a focused ion beam etching method, although the desired pattern can be obtained,
- focused ion beam etching has a long preparation time and a very high preparation cost; and each time a new fiber end face is fabricated, the focus parameters of the focused ion beam etching instrument need to be recalibrated (A.
- an object of the present invention is to provide an optical fiber having a metal micro/nano structure on an end face, a preparation method thereof and an application method thereof, so as to realize integration of high performance SPR and optical fiber.
- the present invention provides good SPR performance integrated in the fiber end face.
- the present invention provides a high quality, simple and fast method for preparing a fiber end face metal micro/nano structure by pasting and stripping and processing the fiber end face and the metal micro/nano structure alignment. With such an optical fiber having a metal micro/nano structure on its end face, the present invention provides a method of highly sensitive sensing of the refractive index.
- the present invention provides an optical fiber having a metal micro/nano structure on an end surface, wherein the metal micro/nano structure is a metal micro/nano structure resonant cavity, and the metal micro/nano structure resonant cavity is formed on a metal thin film.
- Micro-nano pattern composition is a metal micro/nano structure on an end surface, wherein the metal micro/nano structure is a metal micro/nano structure resonant cavity, and the metal micro/nano structure resonant cavity is formed on a metal thin film.
- the metal micro/nano structure resonant cavity is formed by a micro/nano pattern on the metal film and causes surface plasmons on the metal film to resonate.
- the end face is an end face of the fiber substantially perpendicular to the optical fiber.
- the “end face is an end face of the fiber substantially perpendicular to the optical fiber” means that the angle between the end face and the optical fiber is within 90 ⁇ 8 degrees, and the angle is within 90 ⁇ 2 degrees for achieving a better effect.
- the metal micro/nano structure resonator is composed of an intermediate region and a side region.
- the intermediate portion is positioned in alignment with the core layer of the optical fiber.
- the intermediate region is for coupling with an incident fiber to form a surface plasmon.
- the side region is for reflecting the surface plasmon.
- the intermediate region is a periodic metal micro-nanoar array structure.
- the period of the periodic metal micro-nanoar array structure of the intermediate region is approximately equal to the wavelength of the surface plasmon resonance on the metal thin film.
- "about equal to" as used in the present invention means that the deviation is within ⁇ 10%.
- the periodic metal micro-nanoar array structure of the intermediate region is a periodic nanowire groove array.
- the periodic metal micro-nano array structure of the intermediate region is a square array.
- the side region is a periodic metal micro-nano array structure.
- the periodic metal micro-nanoar array structure of the side region has a period approximately equal to a half wavelength of the surface plasmon resonance on the metal thin film.
- the periodic metal micro-nanoar array structure of the side region is a periodic nanowire groove array.
- the periodic metal micro-nano array structure of the side region is a square array.
- the nanowire groove has a width of 5 to 200 nm and a depth of 5 to 200 nm.
- the optical fiber is a single mode fiber and/or a bare fiber.
- the metal is gold.
- the invention also provides a method for preparing an optical fiber having a metal micro-nano structure on an end surface, the method comprising at least the following steps:
- the substrate is a substrate transparent to ultraviolet light, such as glass, quartz, mica, etc., while the curing light of the adhesive is ultraviolet light.
- the adhesive is cured under ultraviolet light.
- the method of aligning the end face of the optical fiber with the position of the metal micro/nano structure is to insert broad-spectrum light into the optical fiber.
- the broad spectrum light is transmitted along the optical fiber and emitted from the end face of the optical fiber, and then reflected by the metal micro-nano structure to return into the optical fiber, moving the relative position of the optical fiber and the metal micro-nano structure and measuring the spectrum of the reflected light during the movement.
- the alignment of the fiber end face and the metal micro/nano structure is judged from the comparison between the spectrum of the reflected light and the expected reflection spectrum in the case of perfect alignment.
- the method of aligning the end face of the optical fiber with the position of the metal micro/nano structure is The direction of the side of the substrate without the metal micro-nanostructure is microscopically observed, and the position of the fiber end face and the metal micro-nanostructure is observed and aligned.
- the method may be used in combination with the method of aligning the end face of the fiber with the position of the metal micro/nano structure of the above preferred embodiment, or may be used independently.
- the end surface is an optical fiber end surface substantially perpendicular to the optical fiber
- the metal micro/nano structure is a metal micro/nano structure resonant cavity
- the metal micro The nanostructured cavity is composed of a micro/nano pattern on the metal film and causes surface plasmons on the metal film to resonate.
- the metal micro-nanostructure resonator is composed of an intermediate region and a side region.
- the intermediate portion is positioned in alignment with the core layer of the optical fiber.
- the intermediate region is for coupling with an incident fiber to form a surface plasmon.
- the side region is for reflecting the surface plasmon.
- the intermediate region is a periodic metal micro-nano array structure.
- the period of the periodic metal micro-nanoar array structure of the intermediate region is approximately equal to the wavelength of the surface plasmon resonance on the metal thin film.
- the periodic metal micro-nanoar array structure of the intermediate region is a periodic nano-slot array.
- the periodic metal micro-nano array structure of the intermediate region is a square array.
- the side region is a periodic metal micro-nano array structure.
- the period of the periodic metal micro-nanostructure of the side region is approximately equal to a half wavelength of the surface plasmon resonance on the metal film.
- the periodic metal micro-nanoar array structure of the side region is a periodic nano-slot array.
- the periodic metal micro-nano array structure of the side region is a square array.
- the nanowire groove has a width of 5 to 200 nm and a depth of 5 to 200 nm.
- the optical fiber is a single mode fiber and/or a bare fiber.
- the metal is gold.
- the invention also provides an optical fiber end face having an optical micro-nano structure as a sensor, wherein the end face is an end face of the fiber substantially perpendicular to the optical fiber, and the metal micro-nano structure is a metal micro-nano structure resonant cavity, the metal micro The nanostructured cavity is composed of a micro/nano pattern on the metal film and resonates the surface plasmons on the metal film, the method comprising the steps of:
- the medium which may be an external substance such as a molecule fixed, adsorbed and/or bonded at the end face of the fiber and/or the metal surface.
- the environment of the liquid and gas, etc. may also be a substance inside the fiber-optic sensor device, such as a binder or other substance between the metal micro-nano structure and the end face of the fiber, and a substance deposited on the surface of the metal and/or the end face of the fiber;
- the metal micro-nanostructure resonator is composed of an intermediate region and a side region.
- the position of the intermediate portion is aligned with the core layer of the optical fiber.
- the intermediate region is used to couple with the incident fiber waveguide to form a surface plasmon.
- the side region is for reflecting the surface plasmon.
- the intermediate region is a periodic metal micro-nano array structure.
- the period of the periodic metal micro-nanostructure of the intermediate region is approximately equal to the wavelength of the surface plasmon resonance on the metal film.
- the periodic metal micro-nano array structure of the intermediate region is a periodic nano-slot array.
- the periodic metal micro-nano array structure of the intermediate region is a square array.
- the side region is a periodic metal micro-nano array structure.
- the period of the periodic metal micro-nano array structure of the side region is approximately equal to the half of the surface plasmon resonance on the metal film. wavelength.
- the periodic metal micro-nano array structure of the side region is a periodic nano-slot array.
- the periodic metal micro-nano array structure of the side region is a square array.
- the nanowire groove has a width of 5 to 200 nm, and the depth, that is, the thickness of the metal film is 5 to 200 nm.
- the optical fiber having the metal micro/nano structure of the end face of the present invention is a single mode fiber and/or a bare fiber.
- the optical fiber having the metal micro/nano structure of the end face of the present invention is gold.
- the optical fiber having the metal micro-nano structure of the end face of the present invention, the preparation method and the application method thereof have the following beneficial effects: the integration of the metal micro-nano structure resonant cavity and the optical fiber guided wave enables the high-performance SPR to be guided by the optical fiber.
- Technology to stimulate and detect which can integrate mature fiber-optic communication technology with SPR sensing technology, while providing sensor components that are simple, flexible, easy to carry, and can be measured in vivo.
- the preparation method of the invention avoids the complexity of the processing flow and the cost increase caused by directly performing micro-nano processing on the fiber end face, and realizes high-quality, simple and rapid alignment and peeling transfer of the metal micro-nano structure to the fiber end face. .
- the minimum refractive index change detectable by the present invention when applied to refractive index sensing is more than one order of magnitude smaller than that of the previously reported fiber end face SPR refractive index sensor.
- surface or chemical modification of the metal surface or fiber end face can be performed to capture specific molecules and perform biological or chemical sensing by refractive index changes caused by molecular capture and release.
- these signals can also be measured on a fiber end face or a surface of a metal micro/nano structure with a substance whose equivalent refractive index changes with various signals (such as pressure, temperature, sound wave/ultrasonic/infrasound wave, electromagnetic wave).
- the fiber shown in the present invention having a metal micro/nano structure has high-performance SPR sensing capability, a highly efficient and simple preparation method, and a wide application prospect.
- FIG. 1 is a schematic view showing the structure of a metal micro/nano structure resonator on an end face of an optical fiber having a metal micro/nano structure on the end face of the present invention.
- FIG. 2 is a schematic flow chart showing the implementation of a method for preparing an optical fiber having a metal micro/nano structure on the end surface of the present invention.
- FIG 3 is a schematic view showing a method for fabricating a metal micro/nano structure resonator on an end face of an optical fiber according to an embodiment of the method for fabricating an optical fiber having a metal micro/nano structure on the end face of the present invention.
- FIG. 4 is a schematic view showing another embodiment of a method for fabricating an optical fiber having a metal micro/nano structure according to the present invention, in which a metal micro/nano structure resonator is fabricated on an end face of an optical fiber.
- Fig. 5 is a photograph showing an end face of an optical fiber having a metal micro/nano structure on the end face of the present invention and a metal micro/nano structure resonator cavity thereon under an optical microscope.
- Figure 6 is a photograph showing the metal micro-nanostructure resonator on the end face of the optical fiber having the metal micro-nano structure of the present invention under an electron microscope, showing the boundary between the intermediate portion and the side region.
- Fig. 7 is a view showing the reflection spectrum of the end face of the optical fiber having the metal micro/nano structure on the end face of the present invention inserted into seven different solutions.
- Figure 8 is a view showing that the end face insertion of the optical fiber having the metal micro/nano structure on the end face of the present invention varies at a small concentration interval The result of measuring the wavelength of the surface plasmon resonance as a function of concentration in an ethanol solution.
- the embodiment provides an optical fiber 101 having a metal micro/nano structure on the end surface, wherein the end surface is an optical fiber end surface substantially perpendicular to the optical fiber 101.
- the basic vertical direction refers to a range of an angle between the end surface and the optical fiber. 90 ⁇ 8 degrees, preferably 90 ⁇ 2 degrees
- the metal micro-nano structure is a metal micro-nano structure resonator 102, which is composed of a micro-nano pattern on a metal film, and makes a metal film The surface plasmon on the surface resonates.
- the optical fiber is a single mode fiber (Nufern 780-HP) having a working wavelength of 780 nm or more, and the front end of the fiber is a bare fiber.
- the metal is gold.
- the metal micro-nanostructure resonator 102 is composed of an intermediate region 103 and a side region 104. The position of the intermediate region 103 is aligned with the core of the optical fiber 101.
- the intermediate region 103 and the side region 104 are both periodic metal micro-nano array structures, and the periodic metal micro-nano array structure is a periodic nano-line groove array, wherein the nano-groove has a width of 50 nm and a depth of 55 nm.
- the periodic metal micro-nanoar array structure of the intermediate region 103 is a square array having a size of about 11 ⁇ 11 ⁇ m 2 with a period of 645 nm and a period approximately equal to the wavelength of the surface plasmon resonance on the metal thin film.
- the periodic metal micro-nanoar array structure of the side region 104 surrounds the intermediate region 103, which is a square array having an outer dimension of about 100 x 100 ⁇ m 2 with a period of 315 nm and a period approximately equal to the surface plasmon resonance. Half wavelength on a metal film.
- the intermediate region 103 When light is incident from the core layer of the fiber, the intermediate region 103 is coupled to the incident fiber to form a surface plasmon (on the gold film) that reflects the surface plasmon.
- the number of periods of the periodic metal micro-nano array structure in FIG. 1 is not consistent with the above description and is for illustrative purposes only.
- the optical fiber having the metal micro-nano-structure resonant cavity on the end face is immersed in water, its material and structural characteristics make it possible to generate a surface plasmon resonance corresponding to a free-space wavelength of about 850 nm, and the optical fiber at this wavelength is Single mode fiber.
- "about equal" in the present invention means that the deviation of the numerical value is within ⁇ 10%.
- the present invention also provides a method for preparing an optical fiber 101 having a metal micro/nano structure on its end surface. As shown in FIG. 2, the method includes at least the following steps:
- step 1) S1 providing a substrate 106 and an optical fiber 101, preparing a metal micro-nano structure having a low bonding force with the substrate 106 on the surface of the substrate 106; and then performing step 2) S2 on the end face of the fiber or
- the surface of the metal micro-nano structure is coated with an adhesive 105;
- step 3) S3 is performed to adjust the position of the optical fiber 101 to align the end face of the optical fiber with the position of the metal micro-nano structure, and
- the adhesive 105 is in contact (the end face of the fiber is not necessarily in direct contact with the metal micro-nano structure);
- step 4) S4 is performed, and the substrate 106 is passed from the back surface of the substrate 106 (the side without the metal micro-nano structure).
- the adhesive 105 is irradiated with an adhesive to illuminate the adhesive 105 to be cured, and then the end face of the optical fiber and the metal micro/nano structure are peeled off from the surface of the substrate 106 to
- the substrate 106 is a substrate that is transparent to ultraviolet light while the adhesive curing light is ultraviolet light, and the adhesive 105 is cured under ultraviolet light.
- the substrate 106 is a quartz plate, and the adhesive 105 is methyl acrylate (Norland NOA81).
- the adhesive is transparent to the wavelength of light used for sensing, and has an ultraviolet curing wavelength range of 100. ⁇ 400 nm, curing light intensity is 1 to 2000 J/cm 2 , and curing time is 5 to 600 s; preferably, the curing wavelength is around 320 nm, curing light intensity is 100 J/cm 2 , and curing time is 300 s.
- the light source 114 that cures the light of the adhesive is an ultraviolet light source having a center wavelength of 320 nm and a maximum illumination power of 2000 J/cm 2 .
- the end surface is an optical fiber end surface substantially perpendicular to the optical fiber 101
- the metal micro-nano structure is a metal micro-nano structure resonant cavity 102
- the metal micro-nano structure The cavity is composed of a micro-nano pattern on the metal film and causes surface plasmons on the metal film to resonate.
- the optical fiber is a single mode fiber (Nufern 780-HP) having a working wavelength of 780 nm or more, and the front end of the fiber is a bare fiber.
- the metal is gold. As shown in FIG.
- the metal micro-nanostructure resonator 102 is composed of an intermediate region 103 and a side region 104.
- the position of the intermediate region 103 is aligned with the core of the optical fiber 101.
- the intermediate region 103 and the side region 104 are both periodic metal micro-nano array structures, and the periodic metal micro-nano array structure is a periodic nano-line groove array, wherein the nano-groove has a width of 50 nm and a depth of 55 nm. .
- the depth of the nanogrooves is equal to the thickness of the gold film because the nanogrooves penetrate the gold film.
- the periodic metal micro-nanoar array structure of the intermediate region 103 is a square array having a size of about 11 ⁇ 11 ⁇ m 2 with a period of 645 nm and a period approximately equal to the wavelength of the surface plasmon resonance on the metal thin film.
- the periodic metal micro-nanoar array structure of the side region 104 surrounds the intermediate region 103, which is a square array having an outer dimension of about 100 x 100 ⁇ m 2 with a period of 315 nm and a period approximately equal to the surface plasmon resonance.
- Half wavelength on a metal film When light is incident from the core layer of the fiber, the intermediate region 103 is coupled to the incident fiber to form a surface plasmon (on the gold film) that reflects the surface plasmon.
- the specific implementation process is as follows: firstly, a gold film having a thickness of 55 nm is deposited on the quartz wafer substrate 106 by electron beam evaporation, and then a film of 50 to 200 nm thick poly(methyl methacrylate) (PMMA) is spin-coated on the gold film, and then Forming a micro-nano-structure resonator cavity on the PMMA film by electron beam lithography, and transferring the micro-nano pattern to the gold film by an argon ion beam etching process to form a gold micro-nano-structure cavity 102 Finally, it was washed with acetone to remove the PMMA film.
- PMMA poly(methyl methacrylate)
- the metal micro/nano resonator 102 is stripped from the substrate 106 and transferred to the end face of the optical fiber 101, as shown in FIG. 3, the metal micro/nano resonator 102 is fabricated using the jig 107.
- the substrate 106 is fixed at an observation point of the stereo microscope 108 at an angle to the horizontal plane (the side of the metal micro/nanostructure resonator 102 is upward), and the angle used here is 60°.
- the droplets of the adhesive 105 are taken up on the end faces of the optical fibers 101, and then the optical fibers 101 are fixed on a five-dimensional stage 109 including x, y, z, pitch angles, and horizontal corners.
- the five-dimensional stage 109 is adjusted by the stereo microscope 108 to adjust the position of the optical fiber 101 such that the optical fiber 101 is perpendicular to the substrate 106.
- the surface is such that the end face of the optical fiber 101 approaches and aligns with the metal micro/nanostructure resonator 102, and the adhesive 105 of the end face of the optical fiber 101 is brought into contact with the metal micro/nanostructure resonator 102.
- wide-spectrum light is driven into the optical fiber 101 through the broad-spectrum light source 110.
- the wide-spectrum light source 110 It can be a bromine tungsten lamp, which is transmitted along the optical fiber 101, passes through the fiber directional coupler, and then exits from the fiber end face, and then the broad spectrum light is reflected by the metal micro/nano structure resonator 102 to return to the optical fiber 101, and the reflection
- the light passes through the fiber directional coupler and enters the spectrometer 111; the five-dimensional stage 109 is moved to adjust the relative positions of the optical fiber 101 and the metal micro-nanostructure resonator 102 while the spectrum of the reflected light is measured by the spectrometer 111 from the spectrum of the reflected light
- the alignment of the fiber end face and the metal micro/nano structure can be judged and compared with the expected reflection spectrum in the case of perfect alignment; in the present embodiment, the adhesive 105 at the end face of the fiber 101 is in contact with the metal micro/nano structure.
- the expected reflection spectrum in perfect alignment has a low reflectivity valley at 930 nm, in the measured reflectance spectrum.
- This valley is now adjusted to the deepest valley depth and when the fiber end faces, and the metal micro-nano structure alignment is completed, i.e., the position of the optical fiber core 101 of the intermediate region 103 is aligned.
- the adhesive 105 is irradiated from the back side of the quartz sheet substrate 106 through the substrate 106 with a light source 114 that cures the light with an adhesive to cure it.
- Irradiating the adhesive 105 from the back surface of the quartz plate substrate 106 with the light source 114 for curing the light of the adhesive can avoid the influence of the optical fiber on the curing effect and improve the curing effect.
- the light source 114 for curing the adhesive is an ultraviolet light source having a center wavelength of 320 nm, a curing light intensity of 100 J/cm 2 and a curing time of 300 s.
- the optical fiber 101 is quickly removed in a direction perpendicular to the surface of the substrate 106, thereby peeling the end face of the optical fiber from the surface of the metal micro-nanostructure resonant cavity 102 from the surface of the substrate 106 to complete a metal micro-nano structure resonant cavity.
- the transfer of 102 to the end face of the optical fiber 101 is completed.
- the finished device photo is shown in Figure 5 and Figure 6.
- the rectangular black area in Fig. 5 is an alignment mark
- the circular outline is the outer edge of the fiber cladding
- the less smooth contour is the outer edge of the gold film
- the square shadow area is the side area of the gold micro/nano structure in the shaded area.
- the brighter square area of the center is the middle area of the gold micro/nano structure.
- Figure 6 shows the junction of the intermediate zone 103 and the side zone 104.
- the end face of the optical fiber 101 and the metal micro/nano structure resonant cavity can also be obtained by the following embodiments.
- Position alignment of 102 The optical fiber 101 and the metal micro/nano structure resonator 102 are fixed in the same manner as in the previous embodiment, and a lens 113 (20 ⁇ microscope objective lens) is combined with the imaging element 112 to form a microscope on the back side of the substrate 106.
- the imaging element 112 can be a camera, an enlarged image of the end face of the optical fiber 101 and the metal micro-nanostructure resonant cavity 102 is displayed on a computer display screen connected to the imaging element through the display
- the five-dimensional stage 109 is imaged and adjusted to observe and align the end faces of the optical fibers 101 with the position of the metal micro/nanostructure resonant cavity 102.
- the same subsequent steps are performed as in the previous embodiment, including using ultraviolet light.
- the adhesive 105 is irradiated to cure it.
- the light source 114 that cures the light of the adhesive is not shown in FIG.
- the method of aligning the end faces of the optical fibers 101 with the position of the metal micro/nanostructures in the embodiment does not depend on the metal micro/nanostructure resonant cavity, and is therefore also suitable for the alignment of the metal micro/nanostructures of the non-resonant cavity.
- the present invention also provides an optical fiber 101 having a metal micro/nano structure with an end face as a sensor.
- the end surface is an optical fiber end surface substantially perpendicular to the optical fiber
- the metal micro/nano structure is a metal micro/nano structure resonant cavity 102.
- the metal micro/nano structure resonator 102 is composed of a micro/nano pattern on the metal film and resonates the surface plasmons on the metal film, the method comprising the steps of:
- the combined molecules, liquid and gas environment, etc. may also be materials inside the fiber-optic sensor device, such as a binder or other substance between the metal micro-nano structure and the fiber end face, additionally deposited on the metal surface and/or the fiber end face. Substance, etc.
- the optical fiber is a single mode fiber (Nufern 780-HP) having a working wavelength of 780 nm or more, and the front end of the optical fiber is a bare optical fiber, and the metal is gold.
- the metal micro/nanostructure resonator 102 is composed of an intermediate region 103 and a side region 104. The position of the intermediate region 103 is aligned with the core of the optical fiber 101.
- the intermediate region 103 and the side region 104 are both periodic metal micro-nano array structures, and the periodic metal micro-nano array structure is a periodic nano-line groove array, wherein the nano-groove has a width of 50 nm and a depth of 55 nm.
- the periodic metal micro-nanoar array structure of the intermediate region 103 is a square array having a size of about 11 ⁇ 11 ⁇ m 2 with a period of 645 nm and a period approximately equal to the wavelength of the surface plasmon resonance on the metal thin film.
- the periodic metal micro-nanoar array structure of the side region 104 surrounds the intermediate region 103, which is a square array having an outer dimension of about 100 x 100 ⁇ m 2 with a period of 315 nm and a period approximately equal to the surface plasmon resonance.
- Half wavelength on a metal film When light is incident from the core layer of the fiber, the intermediate region 103 is coupled to the incident fiber to form a surface plasmon (on the gold film) that reflects the surface plasmon.
- the end face of the optical fiber 101 having the metal micro-nanostructure resonant cavity 102 on the end face is inserted into seven different solutions: methanol having a concentration of 99.7%, water, alcohol having a concentration of 99.7%, and isopropyl having a concentration of 99.7%.
- the broad-spectrum light source used herein is a super-radiation diode having a wavelength in the range of 790 nm to 970 nm, which is transmitted along the optical fiber 101, passes through the fiber directional coupler, and then exits from the end face of the fiber, which is used here.
- the fiber directional coupler is a 2 ⁇ 2, 50%: 50% fiber directional coupler with a center operating wavelength of 850 nm, and then the broad spectrum light is reflected by the metal micro/nano structure resonator 102 at the end face of the fiber to return to the optical fiber 101.
- the reflected light passes through the fiber directional coupler and enters the spectrometer (using a CCD as a detector and a grating to spread the spectrometer of different wavelengths).
- Figure 7 shows the normalized reflection spectrum obtained by inserting the end faces of the optical fibers 101 having the metal micro/nano resonators on the end faces into the above seven different solutions, wherein the reflection valley at the shortest wavelength in each spectrum is
- the surface plasmon resonance at the interface between the metal micro/nanostructure resonator and the solution has a refractive index sensitivity of 572 nm/RIU, and the full width at half maximum of the resonant valley is 8-9 nm.
- the quotient of the two is the quality factor FOM.
- this FOM value is more than 20 times that of the surface plasmon resonance of the single-mode fiber end face reported by the predecessors.
- the end face of the optical fiber 101 having the metal micro-nanostructure resonator 102 on the end face is also inserted into an ethanol solution which changes at a small concentration interval, and the surface plasmon resonance is also measured by the above method.
- the wavelength varies with concentration, and the integration time per measurement is 1 second, as shown in FIG. Figure 8 shows a 3x root mean square (rms) error for wavelength measurement of surface plasmon resonance of about 0.005 nm, which corresponds to a lower detection limit of 8 ⁇ 10 -6 for refractive index change, compared to the prior art. The result is less than an order of magnitude lower.
- the pressure in the end face environment of the fiber can be measured by a substance whose refractive index changes with pressure near the end face of the fiber.
- the pressure may be from sound waves, ultrasonic waves or infrasound waves in a solution, which may be a binder or other substance between the metal micro/nano structure and the end face of the fiber, or may be additionally deposited on the metal surface and/or fiber.
- the substance of the end face may be from sound waves, ultrasonic waves or infrasound waves in a solution, which may be a binder or other substance between the metal micro/nano structure and the end face of the fiber, or may be additionally deposited on the metal surface and/or fiber.
- the end face of the present invention has a metal micro-nano structure fiber, and the surface plasmon on the metal film of the fiber end face resonates at the cavity when the fiber guided wave is incident, so that the high-performance SPR can be used.
- Fiber guided wave technology to stimulate and detect.
- the preparation method of the invention avoids the complication of the processing flow caused by the micro-nano processing directly on the fiber end face and the cost increase, and realizes the high-quality, simple and fast alignment and paste of the metal micro-nano structure to the fiber end face. Peel transfer, in which the adhesive of the end face of the fiber can be better cured by irradiating the adhesive with ultraviolet light through the substrate.
- the application method of the present invention provides a new refractive index sensor device.
- a simple and convenient refractive index measurement method but also a lower detection limit of the refractive index change is obtained by the high performance fiber-optic integrated SPR. It reaches the level of 10 -6 , which is much smaller than the work of the predecessors.
- the optical fiber having the metal micro-nano structure on the end surface of the invention and the preparation method and application method thereof have high-performance SPR sensing capability, high-efficiency and simple preparation method and wide application prospect. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.
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Abstract
一种端面具有金属微纳米结构的光纤及其制备方法和应用方法。所述金属微纳米结构为金属薄膜上的微纳米结构谐振腔,在光纤导波入射下产生表面等离激元谐振。其制备方法为将基底表面的金属微纳米结构对准粘贴和剥离转移到光纤端面。其应用方法为将所述光纤端面与介质接触或靠近,通过测量金属微纳米结构谐振腔对光纤导波的反射来测量所述介质的折射率。通过将金属微纳米结构谐振腔的表面等离激元谐振与光纤导波技术结合,为高性能的折射率传感提供了新器件和新方法,并提供了高效简单的器件制备方法。
Description
本发明属于微纳光学器件领域,特别是涉及一种端面具有金属微纳米结构的光纤及其制备方法和应用方法。
表面等离激元(Surface plasmon)是金属表面电荷与电磁场耦合形成的表面波。光波入射到金属与介质分界面时,金属表面的自由电子发生集体振荡,光波与金属表面自由电子耦合形成表面等离激元。表面等离激元的频率与相位同入射光波吻合时就会产生谐振,谐振条件如波长、光强、出射角等随着所处环境的折射率而变化。因此表面等离激元谐振(Surface Plasmon resonance,SPR)被用于环境折射率的测量,这种测量可以反应分子相互作用和分子溶液的浓度,在生命科学研究、药物筛选和食品工业得到大量的应用。
将SPR与光纤集成,从而利用光纤导波技术来方便的激发SPR并进行传感,是人们多年来所追求的。这是因为将微纳米器件集成在光纤的端面,通过光纤导波技术用光波激发与探测微纳米器件,将使得成熟的光纤通信技术与新颖的传感技术很好的集成,同时带来简便灵活、易于携带的光学功能器件。同时因为光纤很细,这类器件可以插入很小的空间和体内环境进行工作。然而前人的光纤端面SPR器件均为单一周期性的结构,其性能比商用的自由空间SPR传感器相差甚远,至今没有得到真正的应用。为了规避这一困难,有人把SPR器件制作在光纤的侧面,但是这种方式对样品的盛放方法有一定限制。
另一方面,使用现有的主流微纳米图形加工技术,包括紫外光刻、电子束光刻、聚焦离子束刻蚀等,很难在光纤端面直接有效地制备微纳米图形和器件。这是因为如果使用紫外光刻或电子束光刻在光纤端面直接制备微纳米图形,则需要在样品上均匀可控地涂敷光刻胶,为达到较高的加工精度,整个光纤端面的光刻胶厚度需要非常均匀,而因为光纤端面的面积非常小(例如光纤通信使用的光纤,其包层直径通常仅有125微米左右),无法采用半导体行业常用的旋涂方法来涂敷光刻胶。人们采用了在光纤端面沾上光刻胶的液滴然后用气枪将光刻胶液滴吹平的技术,但是这种方法对光刻胶厚度的控制非常不准确,使用这种方法在光纤端面制备微纳米图形的成品率很低(Shengfei Feng,Xinping Zhang,Hao Wang,Mudi Xin,and Zhenzhen Lu,“Fiber coupled waveguide grating structures,”Appl.Phys.Lett.96,133101(2010))。而如果使用聚焦离子束刻蚀的方法在光纤端面制备微纳米图形,虽然可以获得所需要的图形,
但是聚焦离子束刻蚀的制备时间很长,制备成本非常高;并且每在一根新的光纤的端面制作前都需要重新校准聚焦离子束刻蚀仪器的聚焦参数(A.Dhawan,J.F.Muth,D.N.Leonard,M.D.Gerhold,J.Gleeson,T.Vo-Dinh,and P.E.Russell,“Focused ion beam fabrication of metallic nanostructures on end faces of optical fibers for chemical sensing applications,”J.Vac.Sci.Technol.B 26,2168(2008))。
发明内容
鉴于以上所述现有技术的缺点,本发明的目的在于提供一种端面具有金属微纳米结构的光纤及其制备方法和应用方法,以实现高性能SPR与光纤的集成。其中通过金属微纳米结构谐振腔,本发明提供良好的集成在光纤端面的SPR性能。通过粘贴再剥离及光纤端面和金属微纳米结构对准的加工方法,本发明提供高质量、简单快速的光纤端面金属微纳米结构的制备方法。利用这种端面具有金属微纳米结构的光纤,本发明提供对折射率进行高灵敏度传感的方法。
为实现上述目的及其他相关目的,本发明提供一种端面具有金属微纳米结构的光纤,所述金属微纳米结构为金属微纳米结构谐振腔,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成。
优选的,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振。
其中,所述端面为与光纤基本垂直的光纤端面。优选的,所述“端面为与光纤基本垂直的光纤端面”均表示所述端面与光纤的夹角为90±8度以内,为了达到比较好的效果所述夹角为90±2度以内。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,金属微纳米结构谐振腔由中间区域和旁边区域组成。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述中间区域的位置与光纤的芯层对准。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述中间区域用于与入射的光纤导波耦合形成表面等离激元。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述旁边区域用于反射所述表面等离激元。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述中间区域为周期性金属微纳米阵列结构。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述中间区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的波长。优选的,本发明中所述及的“约等于”均表示偏差在±10%以内。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述中间区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述中间区域的周期性金属微纳米阵列结构为方形阵列。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述旁边区域为周期性金属微纳米阵列结构。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的半波长。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构为方形阵列。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述纳米线槽的宽度为5~200纳米,深度为5~200纳米。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述光纤为单模光纤和/或裸光纤。
作为本发明的端面具有金属微纳米结构的光纤的一个优选方案,所述金属为金。
本发明还提供一种端面具有金属微纳米结构的光纤的制备方法,所述方法至少包括以下步骤:
1)提供基底及光纤,于所述基底表面制备与所述基底具有低结合力特性的金属微纳米结构;
2)于所述光纤端面或所述金属微纳米结构的表面涂敷粘合剂;
3)调整所述光纤的位置以使所述光纤端面与所述金属微纳米结构的位置对准,并通过所述粘合剂相接触(所述光纤端面与所述金属微纳米结构未必直接接触);
4)从所述基底的没有金属微纳米结构的一面的方向、透过基底用粘合剂固化光来照射所述粘合剂以使之固化,然后将所述光纤端面与所述金属微纳米结构从所述基底表面进行剥离,以完成制作。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述基底为对紫外光透明的基底,例如玻璃、石英、云母等,同时所述粘合剂固化光为紫外光,所述粘合剂在紫外光照射下固化。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,使所述光纤端面与所述金属微纳米结构的位置对准的方法为,向光纤里打入宽谱光,所述宽谱光沿所述光纤传输并从所述光纤端面射出,之后被所述金属微纳米结构反射从而返回进入光纤,移动光纤和金属微纳米结构的相对位置并测量移动过程中反射光的光谱,从所述反射光的光谱与完美对准情形下的预期反射光谱的比较判断光纤端面和金属微纳米结构是否对准。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,当基底为透明基底时,使所述光纤端面与所述金属微纳米结构的位置对准的方法为,从所述基底的没有金属微纳米结构的一面的方向进行显微观察,观察并对准所述光纤端面与所述金属微纳米结构的位置。本方法可以与上一条优选方案的使所述光纤端面与所述金属微纳米结构的位置对准的方法结合使用,也可以独立使用。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述端面为与光纤基本垂直的光纤端面,所述金属微纳米结构为金属微纳米结构谐振腔,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述金属微纳米结构谐振腔由中间区域和旁边区域组成。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述中间区域的位置与光纤的芯层对准。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述中间区域用于与入射的光纤导波耦合形成表面等离激元。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述旁边区域用于反射所述表面等离激元。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述中间区域为周期性金属微纳米阵列结构。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述中间区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的波长。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述中间区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述中间区域的周期性金属微纳米阵列结构为方形阵列。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述旁边区域为周期性金属微纳米阵列结构。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述旁边区域周期性金属微纳米结构的周期约等于表面等离激元谐振在金属薄膜上的半波长。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构为方形阵列。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述纳米线槽的宽度为5~200纳米,深度为5~200纳米。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述光纤为单模光纤和/或裸光纤。
作为本发明的端面具有金属微纳米结构的光纤的制备方法的一个优选方案,所述金属为金。
本发明还提供一种端面具有金属微纳米结构的光纤作为传感器的应用方法,所述端面为与光纤基本垂直的光纤端面,所述金属微纳米结构为金属微纳米结构谐振腔,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振,所述方法包括以下步骤:
(1)将所述具有金属微纳米结构谐振腔的光纤端面与介质接触或靠近,所述介质既可以是外部的物质,例如在光纤端面和/或金属表面固定、吸附和/或结合的分子,液体和气体的环境等,也可以是光纤传感器件内部的物质,例如金属微纳米结构与光纤端面之间的粘合剂或其他物质,附加沉积在金属表面和/或光纤端面的物质等;
(2)采集光沿所述光纤传输并达到所述光纤端面,在所述金属微纳米结构谐振腔处发生表面等离激元谐振之后反射回光纤的反射光;
(3)分析所述反射光的光谱和/或强度,根据表面等离激元谐振的波长和/或光强随介质折射率变化的原理得到所述介质的折射率信息。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述金属微纳米结构谐振腔由中间区域和旁边区域组成。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述中间区域的位置与光纤的芯层对准。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述中间区域用于与入射的光纤波导耦合形成表面等离激元。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述旁边区域用于反射所述表面等离激元。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述中间区域为周期性金属微纳米阵列结构。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述中间区域的周期性金属微纳米结构的周期约等于表面等离激元谐振在金属薄膜上的波长。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述中间区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述中间区域的周期性金属微纳米阵列结构为方形阵列。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述旁边区域为周期性金属微纳米阵列结构。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的半波长。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述旁边区域的周期性金属微纳米阵列结构为方形阵列。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述纳米线槽的宽度为5~200纳米,深度即金属薄膜的厚度为5-200纳米。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述光纤为单模光纤和/或裸光纤。
作为本发明的端面具有金属微纳米结构的光纤作为传感器的应用方法的一个优选方案,所述金属为金。
如上所述,本发明的端面具有金属微纳米结构的光纤及其制备方法和应用方法,具有以下有益效果:金属微纳米结构谐振腔与光纤导波的集成使高性能的SPR可以用光纤导波技术来激发与探测,这可以将成熟的光纤通信技术与SPR传感技术很好的集成,同时提供简便灵活、易于携带、及可以进行体内测量的传感器件。本发明的制备方法避免了直接对光纤端面进行微纳米加工所造成的加工流程的复杂化以及成本的提高,实现了金属微纳米结构向光纤端面的高质量、简单快速的对准粘贴和剥离转移。本发明应用于折射率传感时可检测到的最小折射率变化比前人报道的光纤端面SPR折射率传感器件小一个量级以上。将来可以对其金属表面或光纤端面进行表面化学修饰,以捕获特定分子,并通过分子的捕获与释放造成的折射率变化来进行生物或化学传感。将来也可以在光纤端面或金属微纳米结构表面附加等效折射率随各种信号(比如压力、温度、声波/超声波/次声波、电磁波)变化的物质来对这些信号进行测量。总之,本发明展示的端面具有金属微纳米结构的光纤具有高性能的SPR传感能力、高效简单的制备方法及广泛的应用前景。
图1显示为本发明的端面具有金属微纳米结构的光纤的端面上的金属微纳米结构谐振腔的结构示意图。
图2显示为本发明的端面具有金属微纳米结构的光纤的制备方法实施流程示意图。
图3显示为本发明的端面具有金属微纳米结构的光纤的制备方法的一实施例在光纤端面制作金属微纳米结构谐振腔的示意图。
图4显示为本发明的端面具有金属微纳米结构的光纤的制备方法的另一实施例在光纤端面制作金属微纳米结构谐振腔的示意图。
图5显示为本发明的端面具有金属微纳米结构的光纤的端面及其上的金属微纳米结构谐振腔在光学显微镜下的照片。
图6显示为本发明的端面具有金属微纳米结构的光纤的端面上的金属微纳米结构谐振腔在电子显微镜下的照片,所示为其中间区域与旁边区域的交界处。
图7显示为本发明的端面具有金属微纳米结构的光纤的端面插入7种不同溶液中的反射光谱。
图8显示为本发明的端面具有金属微纳米结构的光纤的端面插入以很小的浓度间隔变化
的乙醇溶液中测量表面等离激元谐振的波长随浓度的变化的结果。
元件标号说明
101 | 光纤 |
102 | 金属微纳米结构谐振腔 |
103 | 中间区域 |
104 | 旁边区域 |
105 | 粘合剂 |
106 | 基底 |
107 | 夹具 |
108 | 体视显微镜 |
109 | 五维位移台 |
110 | 宽谱光源 |
111 | 光谱仪 |
112 | 成像元件 |
113 | 透镜 |
114 | 粘合剂固化光的光源 |
S1-S4 | 步骤 |
以下通过特定的具体实例说明本发明的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本发明的其他优点与功效。本发明还可以通过另外不同的具体实施方式加以实施或应用,本说明书中的各项细节也可以基于不同观点与应用,在没有背离本发明的精神下进行各种修饰或改变。
请参阅图1~图8。需要说明的是,本实施例中所提供的图示仅以示意方式说明本发明的基本构想,遂图式中仅显示与本发明中有关的组件而非按照实际实施时的组件数目、形状及尺寸绘制,其实际实施时各组件的型态、数量及比例可为一种随意的改变,且其组件布局型态也可能更为复杂。
本实施例提供一种端面具有金属微纳米结构的光纤101,所述端面为与光纤101基本垂直的光纤端面,在具体的实施例中,所述基本垂直是指端面与光纤的夹角的范围为90±8度,优选为90±2度,所述金属微纳米结构为金属微纳米结构谐振腔102,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振。作为示例,所述的光纤为工作波长在780nm以上的单模光纤(Nufern公司780-HP),所述的光纤的前端为裸光纤。作为示例,所述金属为金。如图1所示,所述金属微纳米结构谐振腔102由中间区域103和旁边区域104组成。所述中间区域103的位置与光纤101的芯层对准。所述中间区域103和所述旁边区域104均为周期性金属微纳米阵列结构,且所述周期性金属微纳米阵列结构为周期性纳米线槽阵列,其中纳米槽的宽度为50nm,深度为55nm(等于金薄膜的厚度,纳米槽贯穿金薄膜)。所述中间区域103的周期性金属微纳米阵列结构为尺寸约为11×11μm2的方形阵列,其周期为645nm,其周期约等于表面等离激元谐振在金属薄膜上的波长。所述旁边区域104的周期性金属微纳米阵列结构围绕所述中间区域103,其是外部尺寸约为100×100μm2的方形阵列,其周期为315nm,其周期约等于表面等离激元谐振在金属薄膜上的半波长。当光从光纤的芯层入射时,所述中间区域103与入射的光纤导波耦合形成(金薄膜上的)表面等离激元,所述旁边区域反射所述表面等离激元。需要注意,图1中的周期性金属微纳米阵列结构的周期个数与以上描述并不相符,仅作为示意用。当上述端面具有金属微纳米结构谐振腔的光纤浸没在水中时,其材料与结构特性使其可产生的一种表面等离激元谐振对应约为850nm的自由空间波长,上述光纤在此波长为单模光纤。在具体的实施例中,本发明中的“约等于”表示数值的偏差为±10%以内。
本发明还提供一种端面具有金属微纳米结构的光纤101的制备方法,如图2所示,所述方法至少包括以下步骤:
首先进行步骤1)S1,提供基底106及光纤101,于所述基底106表面制备与所述基底106具有低结合力特性的金属微纳米结构;然后进行步骤2)S2,于所述光纤端面或所述金属微纳米结构的表面涂敷粘合剂105;然后进行步骤3)S3调整所述光纤101的位置以使所述光纤端面与所述金属微纳米结构的位置对准,并通过所述粘合剂105相接触(所述光纤端面与所述金属微纳米结构未必直接接触);最后进行步骤4)S4,从所述基底106的背面(没有金属微纳米结构的一面)透过基底106用粘合剂固化光来照射所述粘合剂105以使之固化,然后将所述光纤端面与所述金属微纳米结构从所述基底106表面进行剥离,以完成制作。
作为示例,所述基底106为对紫外光透明的基底,同时所述粘合剂固化光为紫外光,所述粘合剂105在紫外光照射下固化。在实施例中,所述基底106为石英片,所述粘合剂105
为丙烯酸甲酯(Norland公司NOA81),此粘合剂同时对传感所用的光波长透明,其紫外固化波长范围为100~400nm,固化光强度为1~2000J/cm2,固化时间为5~600s;优选地,所述固化波长为320nm附近,固化光强度为100J/cm2,固化时间为300s。在实施例中,所述粘合剂固化光的光源114为中心波长在320nm,最大照射功率为2000J/cm2的紫外光源。
作为示例,对于所述端面具有金属微纳米结构的光纤101,所述端面为与光纤101基本垂直的光纤端面,所述金属微纳米结构为金属微纳米结构谐振腔102,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振。作为示例,所述的光纤为工作波长在780nm以上的单模光纤(Nufern公司780-HP),所述的光纤的前端为裸光纤。作为示例,所述金属为金。如图1所示,所述金属微纳米结构谐振腔102由中间区域103和旁边区域104组成。所述中间区域103的位置与光纤101的芯层对准。所述中间区域103和所述旁边区域104均为周期性金属微纳米阵列结构,且所述周期性金属微纳米阵列结构为周期性纳米线槽阵列,其中纳米槽的宽度为50nm,深度为55nm。在实施例中,因为纳米槽贯穿金薄膜,所以纳米槽的深度等于金薄膜的厚度。所述中间区域103的周期性金属微纳米阵列结构为尺寸为约11×11μm2的方形阵列,其周期为645nm,其周期约等于表面等离激元谐振在金属薄膜上的波长。所述旁边区域104的周期性金属微纳米阵列结构围绕所述中间区域103,其是外部尺寸约为100×100μm2的方形阵列,其周期为315nm,其周期约等于表面等离激元谐振在金属薄膜上的半波长。当光从光纤的芯层入射时,所述中间区域103与入射的光纤导波耦合形成(金薄膜上的)表面等离激元,所述旁边区域反射所述表面等离激元。
具体实施流程为:首先用电子束蒸发在石英片基底106上沉积厚度为55nm的金薄膜,然后在所述金薄膜上旋涂50~200nm厚的Poly(methyl methacrylate)(PMMA)的薄膜,接着用电子束光刻的工艺在所述PMMA薄膜上制备微纳米结构谐振腔的图案,再用氩离子束刻蚀的工艺把微纳米图形转移到所述金薄膜上制作金微纳米结构谐振腔102,最后用丙酮清洗以去除所述PMMA薄膜。
然后,在一种将金属微纳米结构谐振腔102从基底106剥离,从而转移到光纤101的端面的具体实施例中,如图3所示,用夹具107将制作有金属微纳米结构谐振腔102的基底106以与水平面成一定角度固定在体视显微镜108的观察点上(有金属微纳米结构谐振腔102的一面向上),此处采用的角度为60°。在光纤101的端面沾取粘合剂105的液滴,接着,将光纤101固定在一个包括x、y、z、俯仰角及水平转角的五维位移台109之上。通过体视显微镜108观察,调节五维位移台109以调整光纤101的位置,使光纤101垂直于基底106的
表面,使光纤101的端面接近并对准金属微纳米结构谐振腔102,并使使光纤101的端面的粘合剂105接触到金属微纳米结构谐振腔102。其中在把光纤101的端面和金属微纳米结构谐振腔102对准的调节过程中:通过宽谱光源110向光纤101里打入宽谱光,在具体的实施例中,所述宽谱光源110可以为溴钨灯,所述宽谱光沿光纤101传输、经过光纤定向耦合器、然后从所述光纤端面射出,接着宽谱光被金属微纳米结构谐振腔102反射从而返回进入光纤101,反射光经过光纤定向耦合器并进入光谱仪111;移动五维位移台109以调节光纤101和金属微纳米结构谐振腔102的相对位置,同时通过光谱仪111测量反射光的光谱,从所述反射光的光谱与完美对准情形下的预期反射光谱的比较可以判断与调整光纤端面和金属微纳米结构的对准情况;在本实施例中,在光纤101的端面的粘合剂105接触到金属微纳米结构谐振腔102后,完美对准情形下的预期反射光谱在930纳米波长处有一个低反射率的谷,当所测量到的反射光谱里出现此谷且谷深被调节到最深时,光纤端面和金属微纳米结构完成了对准,即所述中间区域103的位置与光纤101的芯层对准。
最后,从石英片基底106的背面透过基底106用粘合剂固化光的光源114来照射粘合剂105以使之固化。从石英片基底106的背面用粘合剂固化光的光源114来照射粘合剂105可以避免光纤对固化效果的影响,提高固化效果。在本实施例中,所述粘合剂固化光的光源114为中心波长在320nm的紫外光源,固化光强度为100J/cm2,固化时间为300s。最后,将光纤101以垂直于基底106表面的方向快速移开,从而将所述光纤端面与所述金属微纳米结构谐振腔102从所述基底106的表面进行剥离,完成金属微纳米结构谐振腔102到光纤101的端面的转移,以完成制作。制作完成的器件照片如图5、图6所示。图5中的矩形黑色区域为对准标记,圆形轮廓为光纤包层的外缘,较不光滑的轮廓为金薄膜的外缘,方形阴影区域为金微纳米结构的旁边区域,在阴影区域中心的较亮的方形区域为金微纳米结构的中间区域。图6显示为中间区域103和旁边区域104的交界处。
在另一具体的实施例中,如图4所示,当基底106为透明基底(如玻璃、石英、云母等)时,还可以通过如下实施方式使光纤101的端面与金属微纳米结构谐振腔102的位置对准:固定光纤101和金属微纳米结构谐振腔102的方式与前一实施例相同,在基底106的背面利用透镜113(20×显微物镜)与成像元件112组合成一个显微系统、并进行显微观察,所述成像元件112可以为照相机,光纤101的端面与金属微纳米结构谐振腔102的放大的像显示在与成像元件连接的计算机显示屏上,通过显示屏上的图像和调节五维位移台109来观察并对准光纤101的端面与金属微纳米结构谐振腔102的位置。在完成使光纤101的端面与金属微纳米结构谐振腔102的位置对准后,与前一实施例进行同样的后续步骤,包括用紫外光来
照射粘合剂105使之发生固化。粘合剂固化光的光源114未在图4中示出。实施例中使光纤101的端面与金属微纳米结构的位置对准的方法不依赖于金属微纳米结构谐振腔,因此也适用于非谐振腔的金属微纳米结构的对准。
本发明还提供一种端面具有金属微纳米结构的光纤101作为传感器的应用方法,所述端面为与光纤基本垂直的光纤端面,所述金属微纳米结构为金属微纳米结构谐振腔102,所述金属微纳米结构谐振腔102由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振,所述方法包括以下步骤:
(1)将所述具有金属微纳米结构谐振腔102的光纤101的端面与介质接触或靠近,所述介质既可以是外部的物质,例如在光纤端面和/或金属表面固定、吸附和/或结合的分子,液体和气体的环境等,也可以是光纤传感器件内部的物质,例如金属微纳米结构与光纤端面之间的粘合剂或其他物质,附加沉积在金属表面和/或光纤端面的物质等;
(2)采集光沿所述光纤101传输并达到所述光纤101的端面射出,在所述金属微纳米结构谐振腔102处发生表面等离激元谐振之后反射回光纤101的反射光;
(3)分析所述反射光的光谱和/或强度,根据表面等离激元谐振的波长和/或光强随介质折射率变化得到所述介质的折射率信息。
在具体的实施例中,所述的光纤为工作波长在780nm以上的单模光纤(Nufern公司780-HP),所述的光纤的前端为裸光纤,所述金属为金。所述金属微纳米结构谐振腔102由中间区域103和旁边区域104组成。所述中间区域103的位置与光纤101的芯层对准。所述中间区域103和所述旁边区域104均为周期性金属微纳米阵列结构,且所述周期性金属微纳米阵列结构为周期性纳米线槽阵列,其中纳米槽的宽度为50nm,深度为55nm(等于金薄膜的厚度,纳米槽贯穿金薄膜)。所述中间区域103的周期性金属微纳米阵列结构为尺寸约为11×11μm2的方形阵列,其周期为645nm,其周期约等于表面等离激元谐振在金属薄膜上的波长。所述旁边区域104的周期性金属微纳米阵列结构围绕所述中间区域103,其是外部尺寸约为100×100μm2的方形阵列,其周期为315nm,其周期约等于表面等离激元谐振在金属薄膜上的半波长。当光从光纤的芯层入射时,所述中间区域103与入射的光纤导波耦合形成(金薄膜上的)表面等离激元,所述旁边区域反射所述表面等离激元。
在具体实施例中,将所述端面具有金属微纳米结构谐振腔102的光纤101的端面插入7种不同的溶液:浓度99.7%的甲醇、水、浓度99.7%的酒精、浓度99.7%的异丙醇,浓度99.7%的丙醇,浓度99.7%的异丁醇,浓度99.7%的异戊醇中,通过宽谱光源向光纤101内输入宽
谱光,此处采用的宽谱光源为波长范围为790nm-970nm的超辐射二极管,所述宽谱光沿光纤101传输、经过光纤定向耦合器、然后从所述光纤端面射出,此处采用的光纤定向耦合器为2×2、50%:50%、中心工作波长在850nm的光纤定向耦合器,接着宽谱光在所述光纤端面被金属微纳米结构谐振腔102反射从而返回进入光纤101,反射光经过光纤定向耦合器并进入光谱仪(用CCD作为探测器、用光栅散开不同波长的光谱仪)。图7展示了当所述端面有金属微纳米结构谐振腔的光纤101的端面插入上述7种不同的溶液中,所得到的归一化反射光谱,其中每条光谱里最短波长处的反射谷是在金属微纳米结构谐振腔与溶液的界面处的表面等离激元谐振,其折射率灵敏度为572纳米/RIU,谐振谷的半高宽为8-9纳米,两者之商即优质因数FOM为68,此FOM值是前人报道的单模光纤端面的表面等离激元谐振的20倍以上。
在另一实例中,所述端面具有金属微纳米结构谐振腔102的光纤101的端面还被插入了以很小的浓度间隔变化的乙醇溶液中,同样利用上述方法测量表面等离激元谐振的波长随浓度的变化,每次测量的积分时间为1秒,如图8所示。图8中显示对表面等离激元谐振的波长测量的3倍均方根(rms)误差约为0.005纳米,这对应对折射率变化的探测下限为8×10-6,要比现有技术中的结果低一个数量级以上。
此外,还可以通过光纤端面附近的折射率随压力变化的物质,来测量光纤端面环境里的压力。例如,所述压力可以来自溶液里的声波、超声波或次声波,所述物质可以是金属微纳米结构与光纤端面之间的粘合剂或其他物质,也可以是附加沉积在金属表面和/或光纤端面的物质。
综上所述,本发明的端面具有金属微纳米结构的光纤,在光纤导波入射时光纤端面的金属薄膜上的表面等离激元在谐振腔处产生谐振,从而使高性能的SPR可以用光纤导波技术来激发与探测。同时,本发明的制备方法避免了直接对光纤端面进行微纳米加工所造成的加工流程的复杂化以及成本的提高,实现了金属微纳米结构向光纤端面的高质量、简单快速的对准粘贴和剥离转移,其中透过基底用紫外光照射粘合剂的方法使光纤端面的粘合剂能够较好的固化。本发明的应用方法提供了新的折射率传感器件,在本发明的实施例中,通过高性能的光纤集成的SPR,不仅得到了简单方便的折射率测量方式,而且对折射率变化的检测下限达到10-6量级,远远小于前人的工作。总之,本发明展示的端面具有金属微纳米结构的光纤及其制备方法和应用方法拥有高性能的SPR传感能力、高效简单的制备方法及广泛的应用前景。所以,本发明有效克服了现有技术中的种种缺点而具高度产业利用价值。
上述实施例仅例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟悉此技
术的人士皆可在不违背本发明的精神及范畴下,对上述实施例进行修饰或改变。因此,举凡所属技术领域中具有通常知识者在未脱离本发明所揭示的精神与技术思想下所完成的一切等效修饰或改变,仍应由本发明的权利要求所涵盖。
Claims (53)
- 一种端面具有金属微纳米结构的光纤,其特征在于:所述金属微纳米结构为金属微纳米结构谐振腔,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成。
- 根据权利要求1所述的端面具有金属微纳米结构的光纤,其特征在于:所述端面为与光纤基本垂直的光纤端面,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振。
- 根据权利要求2所述的端面具有金属微纳米结构的光纤,其特征在于:金属微纳米结构谐振腔由中间区域和旁边区域组成。
- 根据权利要求3所述的端面具有金属微纳米结构的光纤,其特征在于:所述中间区域的位置与光纤的芯层对准。
- 根据权利要求4所述的端面具有金属微纳米结构的光纤,其特征在于:所述中间区域用于与入射的光纤导波耦合形成表面等离激元。
- 根据权利要求3所述的端面具有金属微纳米结构的光纤,其特征在于:所述旁边区域用于反射所述表面等离激元。
- 根据权利要求3所述的端面具有金属微纳米结构的光纤,其特征在于:所述中间区域为周期性金属微纳米阵列结构。
- 根据权利要求7所述的端面具有金属微纳米结构的光纤,其特征在于:所述中间区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的波长。
- 根据权利要求7所述的端面具有金属微纳米结构的光纤,其特征在于:所述中间区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
- 根据权利要求7所述的端面具有金属微纳米结构的光纤,其特征在于:所述中间区域的周期性金属微纳米阵列结构为方形阵列。
- 根据权利要求3所述的端面具有金属微纳米结构的光纤,其特征在于:所述旁边区域为周期性金属微纳米阵列结构。
- 根据权利要求11所述的端面具有金属微纳米结构的光纤,其特征在于:所述旁边区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的半波长。
- 根据权利要求11所述的端面具有金属微纳米结构的光纤,其特征在于:所述旁边区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
- 根据权利要求11所述的端面具有金属微纳米结构的光纤,其特征在于:所述旁边区域的周期性金属微纳米阵列结构为方形阵列。
- 根据权利要求9或13所述的端面具有金属微纳米结构的光纤,其特征在于:所述纳米线槽的宽度为5~200纳米,深度为5-200纳米。
- 根据权利要求1-15之一所述的端面具有金属微纳米结构的光纤,其特征在于:所述光纤为单模光纤和/或裸光纤。
- 根据权利要求1-15之一所述的端面具有金属微纳米结构的光纤,其特征在于:所述金属为金。
- 一种端面具有金属微纳米结构的光纤的制备方法,其特征在于,所述方法至少包括以下步骤:1)提供基底及光纤,于所述基底表面制备与所述基底具有低结合力特性的金属微纳米结构;2)于所述光纤端面或所述金属微纳米结构的表面涂敷粘合剂;3)调整所述光纤的位置以使所述光纤端面与所述金属微纳米结构的位置对准,并通过所述粘合剂相接触;4)从所述基底的没有金属微纳米结构的一面的方向、透过基底用粘合剂固化光来照射所述粘合剂以使之固化,然后将所述光纤端面与所述金属微纳米结构从所述基底表面进行剥离,以完成制作。
- 根据权利要求18所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述基底为对紫外光透明的基底,所述粘合剂固化光为紫外光,所述粘合剂在紫外光照射下固化。
- 根据权利要求18所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:使所述光纤端面与所述金属微纳米结构的位置对准的方法为,向光纤里打入宽谱光,所述宽谱光沿所述光纤传输并从所述光纤端面射出,之后被所述金属微纳米结构反射从而返回进入光纤,移动光纤和金属微纳米结构的相对位置并测量移动过程中反射光的光谱,从所述反射光的光谱与完美对准情形下的预期反射光谱的比较判断光纤端面和金属微纳米结构是否对准。
- 根据权利要求18所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:当所述基底为透明基底时,使所述光纤端面与所述金属微纳米结构的位置对准的方法为,从所述基底的没有金属微纳米结构的一面的方向进行显微观察,观察并对准所述光纤端面与所述金属微纳米结构的位置。
- 根据权利要求18所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于: 所述端面为与光纤基本垂直的光纤端面,所述金属微纳米结构为金属微纳米结构谐振腔,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振。
- 根据权利要求22所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:金属微纳米结构谐振腔由中间区域和旁边区域组成。
- 根据权利要求23所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述中间区域的位置与光纤的芯层对准。
- 根据权利要求24所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述中间区域用于与入射的光纤导波耦合形成表面等离激元。
- 根据权利要求23所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述旁边区域用于反射所述表面等离激元。
- 根据权利要求23所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述中间区域为周期性金属微纳米阵列结构。
- 根据权利要求27所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述中间区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的波长。
- 根据权利要求27所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述中间区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
- 根据权利要求27所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述中间区域的周期性金属微纳米阵列结构为方形阵列。
- 根据权利要求23所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述旁边区域为周期性金属微纳米阵列结构。
- 根据权利要求31所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述旁边区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的半波长。
- 根据权利要求31所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述旁边区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
- 根据权利要求31所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述旁边区域的周期性金属微纳米阵列结构为方形阵列。
- 根据权利要求29或33所述的端面具有金属微纳米结构的光纤的制备方法,其特征在 于:所述纳米线槽的宽度为5~200纳米,深度为5-200纳米。
- 根据权利要求18-35之一所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述光纤为单模光纤和/或裸光纤。
- 根据权利要求18-35之一所述的端面具有金属微纳米结构的光纤的制备方法,其特征在于:所述金属为金。
- 一种端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于,所述端面为与光纤基本垂直的光纤端面,所述金属微纳米结构为金属微纳米结构谐振腔,所述金属微纳米结构谐振腔由金属薄膜上的微纳米图案构成、且使金属薄膜上的表面等离激元产生谐振,所述方法包括以下步骤:(1)将所述具有金属微纳米结构谐振腔的光纤端面与介质接触或靠近;(2)采集光沿所述光纤传输并达到所述光纤端面,在所述金属微纳米结构谐振腔处发生表面等离激元谐振之后反射回光纤的反射光;(3)分析所述反射光的光谱和/或强度,根据表面等离激元谐振的波长和/或光强随介质折射率变化得到所述介质的折射率信息。
- 根据权利要求38所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:金属微纳米结构谐振腔由中间区域和旁边区域组成。
- 根据权利要求39所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述中间区域的位置与光纤的芯层对准。
- 根据权利要求40所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述中间区域用于与入射的光纤导波耦合形成表面等离激元。
- 根据权利要求39所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述旁边区域用于反射所述表面等离激元。
- 根据权利要求39所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述中间区域为周期性金属微纳米阵列结构。
- 根据权利要求43所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述中间区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的波长。
- 根据权利要求43所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述中间区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
- 根据权利要求43所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其 特征在于:所述中间区域的周期性金属微纳米阵列结构为方形阵列。
- 根据权利要求39所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述旁边区域为周期性金属微纳米阵列结构。
- 根据权利要求47所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述旁边区域的周期性金属微纳米阵列结构的周期约等于表面等离激元谐振在金属薄膜上的半波长。
- 根据权利要求47所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述旁边区域的周期性金属微纳米阵列结构为周期性纳米线槽阵列。
- 根据权利要求47所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述旁边区域的周期性金属微纳米阵列结构为方形阵列。
- 根据权利要求45或49所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述纳米线槽的宽度为5~200纳米,深度为5-200纳米。
- 根据权利要求38-51之一所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述光纤为单模光纤和/或裸光纤。
- 根据权利要求38-51之一所述的端面具有金属微纳米结构的光纤作为传感器的应用方法,其特征在于:所述金属为金。
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