WO2017039133A1 - Filtre de masse quadrupolaire pour spectromètre de masse, et spectromètre de masse quadrupolaire le comprenant - Google Patents

Filtre de masse quadrupolaire pour spectromètre de masse, et spectromètre de masse quadrupolaire le comprenant Download PDF

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Publication number
WO2017039133A1
WO2017039133A1 PCT/KR2016/007013 KR2016007013W WO2017039133A1 WO 2017039133 A1 WO2017039133 A1 WO 2017039133A1 KR 2016007013 W KR2016007013 W KR 2016007013W WO 2017039133 A1 WO2017039133 A1 WO 2017039133A1
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WIPO (PCT)
Prior art keywords
electrode
quadrupole mass
insulator holder
mass filter
filter
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PCT/KR2016/007013
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English (en)
Korean (ko)
Inventor
박창준
안상정
윤세원
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한국표준과학연구원
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Publication of WO2017039133A1 publication Critical patent/WO2017039133A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/622—Ion mobility spectrometry
    • G01N27/623—Ion mobility spectrometry combined with mass spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Definitions

  • the present invention relates to a quadrupole mass filter for use in a mass spectrometer and a mass spectrometer including the same. More specifically, a quadrupole mass filter and a mass spectrometer including the same in order to align each electrode rod in the same line in the quadrupole mass filter It is about.
  • Mass spectrometry is the measurement of mass-to-charge ratios by the ionization of sample molecules or atoms vaporized in a vacuum atmosphere, using the specific motions of molecules or atoms ionized under electric, magnetic or electromagnetic fields. That's how.
  • a high vacuum device For mass spectrometry, a high vacuum device, an ionizer, a separator according to the mass-to-charge ratio value, and a detector for each charged particle are required.
  • mass spectrometers are a quadrupole mass spectrometer, which is smaller in volume than other mass spectrometers, enables stable measurement of samples, and is inexpensive and structured compared to other mass spectrometers. As it is simple, it is widely used for residual gas detector, air monitoring, respiratory examination of patients, and monitoring of fermentation process.
  • This quadrupole mass spectrometer is equipped with a quadrupole mass filter constructed as shown in FIG.
  • the quadrupole mass filter shown in FIG. 1 is a mass filter according to the prior art, and includes a main filter 100 having a length of 100 mm or more and a pre filter 200 having a length of about 20 mm. do.
  • the quadrupole main filter 100 is composed of four electrodes, as shown in FIG. 1, in which a pair of electrodes facing each other forms a pair and supplies power in opposite phases to different pairs.
  • the quadrupole mass filter for the quadrupole mass spectrometer configured as described above is assembled with the prefilter 200 together with the main filter 100 by a ceramic ring 210 made of alumina or the like to form the inside of one cylindrical case 300. Can be mounted.
  • the quadrupole mass filter is an electrode assembly consisting of four parallel metal rods.
  • FIG. 2A a quadrupole mass filter having an ideal hyperbolic surface and a quadrupole mass having a cylindrical shape sharing part of the hyperbolic surface are illustrated. The filter is shown.
  • n is the mass of ions
  • f is the RF frequency given in units of MHz
  • r o is the radius of the space inside the four rods.
  • FIG. 2A illustrates a quadrupole mass filter presented by replacing a circular surface with a central portion of the hyperbolic surface in comparison with the ideal hyperbolic surface.
  • the electrode of the quadrupole mass filter initially used a metal rod, but recently, a hyperbolic rod is injected from a ceramic and quartz material that can significantly reduce thermal expansion due to temperature, and gold plating only on the inner surface thereof. Assembled quadrupoles are used in expensive mass spectrometers.
  • the hyperbolic quadrupole is difficult to manufacture precisely, so many mass spectrometers still use quadrupole mass spectrometers made of circular rods.
  • a circular rod may be used instead of a hyperbolic surface that is difficult to process.
  • replacing the hyperbolic surface with a circular rod replaces only a small part of the center, so the assembly precision of the circular rod should be 1 to 2 um, and even a slight twist may cause a problem of failing to obtain a normal mass spectrum.
  • a mass spectrometer that analyzes an organic sample such as a gas chromatography-mass spectrometer (GCMS) uses a cartridge heater to prevent organic matter from adsorbing to an ion source into which a sample gas is introduced and a quadrupole mass spectrometer.
  • GCMS gas chromatography-mass spectrometer
  • RAA residual gas analyzer
  • the conventional quadrupole mass spectrometer includes a disadvantage in that performance is gradually decreased since the expansion and contraction due to heat are severe and the initial assembly accuracy is gradually lost, and the conventional quadrupole mass spectrometer is free in addition to the quadrupole main filter. It includes the difficulty of making the filter separately and attaching it precisely in parallel with the main filter, and the difficulty of assembling four electrodes accurately.
  • Korean Patent Publication No. 10-0786621 (December 21, 2007) describes a platinum group metal plated hyperbolic quadrupole mass spectrometer of quartz material.
  • Korean Patent Publication No. 10-0936749 (2010.01.15.) Describes a quadrupole mass spectrometer in which a main filter and a prefilter are integrally formed to easily align the main filter and the prefilter.
  • the quadrupole mass filter obtained by the prior art including the above-mentioned literature has a disadvantage in that it is difficult to align each electrode including the prefilter, the main filter, and the like on the same line, and requires a difficult assembly precision of the circular rod from the center. Even a slight misalignment does not give you a normal mass spectrum.
  • the quadrupole mass filter obtained by the prior art has a disadvantage in that it is difficult to process the insulator holder required to space each electrode at a predetermined interval into a circular cross-sectional shape of the electrode.
  • the economy is inferior due to the cost for the processing of the insulator holder, it is possible to align each electrode in the quadrupole mass filter more efficiently quadrupole mass including an insulator holder manufactured by an economical method.
  • An object of the present invention is to provide a quadrupole mass filter for a mass spectrometer and a quadrupole mass spectrometer including the same, and to provide a quadrupole mass filter having excellent parallelism, straightness, and assembly precision of quadrupoles.
  • the present invention relates to a quadrupole mass filter 400 for a quadrupole mass spectrometer including four electrode units 10, 20, 30, and 40 and at least one insulator holder 50 for fixing the four electrode units.
  • the insulator holder 50 has four electrode portions 10, 20, 30, and 40 arranged in a symmetrical shape to be spaced apart from each other in parallel to each other at a predetermined distance, and includes a ring including an empty space on an inner surface thereof.
  • the inner surface of the insulator holder 50 is in contact with each of the electrode parts is made of a plane
  • each of the four electrode parts (10, 20, 30, 40) is the insulator holder ( 50)
  • the quadrupole mass filter is characterized in that the contact with the insulator holder in contact with the inner surface consisting of the plane of the insulator holder 50 is made of a flat surface.
  • the four electrode units 10, 20, 30, and 40 may have a circular or hyperbolic shape based on portions where at least a portion of each cross section faces each other.
  • each of the four electrode units 10, 20, 30, and 40 may include a main filter electrode and a prefilter electrode, in which case the pre-electrode may be used.
  • the length of the filter electrode may range from 8% to 25% of the length of the main filter electrode.
  • the four electrode portions 10, 20, 30, 40 may each have the same cross-section.
  • the insulator holder 50 may be made of alumina.
  • the four electrode portions 10, 20, 30, and 40 are provided with coupling grooves 11, 21, 31, and 41 formed in a plane in contact with the insulator holder 50 of each electrode portion.
  • the insulator holder 50 has four openings 10a, 20a, 30a, and 40a, which can be coupled with four electrode units, and the coupling grooves and the openings are connected by fastening members 60, respectively.
  • the electrode unit and the insulator holder may be coupled to each other.
  • the thickness of the insulator holder 50 may range from 1.2 mm to 7 mm.
  • the insulator holder 50 may be one to four.
  • each cross section of the four electrode parts 10, 20, 30, and 40 may have a structure in which a part having a smaller area is removed from a part divided by a straight line parallel to the diameter of the circle. have.
  • the cross section of each of the four electrode portions 10, 20, 30, 40 may have a structure in which cross-sections of opposite ends of the electrodes are opened in the direction of the insulator holder 50 in the form of a hyperbola.
  • the present invention also provides a quadrupole mass spectrometer including the quadrupole mass filter.
  • the present invention is four electrode unit (10, 20, 30, 40); An insulator holder (50) for fixing the four respective electrode portions; A fastening member 60 for coupling the insulator holder and each electrode; And a case surrounding each of the electrodes and the insulator holder.
  • each of the four electrode parts is formed in a flat surface, and each of the four electrode parts is formed in a flat surface in contact with the insulator holder 50, thereby contacting an inner surface made of a plane of the insulator holder.
  • a quadrupole mass filter for a quadrupole mass spectrometer wherein each electrode portion is in close contact with an insulator holder.
  • each of the four electrode portions has a structure in which each cross section of the four electrode portions has a cross section of opposite ends between the electrodes extending in the direction of the insulator holder 50 in the form of a hyperbola, or
  • Each cross section may have a structure in which a portion having a smaller area is removed from a portion divided by a straight line parallel to the diameter of the circle.
  • a portion of the inner surface of the insulator holder that contacts each electrode is made of a flat surface, and each of the four electrodes has a portion that makes contact with the insulator holder of a flat surface of the quadrupole mass filter.
  • the present invention is easy to process the insulator holder can be processed quickly and simply the insulator holder, there is an advantage that can provide a quadrupole mass filter more economically.
  • FIG. 1 is a diagram illustrating a quadrupole mass filter according to the prior art.
  • FIG. 2A is a cross-sectional view of an electrode of a quadrupole mass filter having an ideal hyperbolic surface
  • FIG. 2B is a stability curve of the quadrupole mass filter.
  • 3A and 3B are cross-sectional and perspective views, respectively, of an insulator holder according to one embodiment of the present invention.
  • 4A, 4B and 4C are cross-sectional, perspective and front views of an electrode, in accordance with an embodiment of the present invention.
  • 5A, 5B and 5C are cross-sectional, perspective and front views of an electrode, according to another embodiment of the present invention.
  • 6A and 6B are cross-sectional views and perspective views, respectively, of a quadrupole mass filter obtained by assembling four electrodes and an alumina holder, according to an embodiment of the present invention.
  • electrode part 50 insulator holder
  • the quadrupole mass filter of the quadrupole mass spectrometer of the present invention includes four electrode portions 10, 20, 30, and 40 and at least one insulator holder 50 for fixing the four electrode portions, wherein the insulator
  • the holder 50 has a ring structure including an empty space on its inner surface such that the four electrode portions 10, 20, 30, and 40 are spaced apart from each other at a predetermined distance in parallel to form a symmetrical shape.
  • each electrode portion of the inner surface of the insulator holder 50 in contact with each electrode portion is made of a plane, each of the four electrode portions (10, 20, 30, 40) and the insulator holder (50) Since the contacting portion is made of a plane, each electrode portion is in close contact with the insulator holder by contacting an inner surface of the insulator holder 50.
  • the quadrupole mass filter includes an electrode part consisting of four parallel metal rods and an insulator holder for fixing the four electrode parts, and may include a case surrounding the electrode parts and the insulator holder.
  • the electrode portions each include a conductive material such as four parallel metal rods, and must be precisely assembled so that they can be spaced in parallel at a predetermined distance.
  • the electrode portion is operated on a continuous ion beam, but a pulsed ion beam may be used by appropriate modification of a scan function and data acquisition algorithm to properly integrate discontinuous signals.
  • a quadrupole field is generated in the device by dynamically applying an electric potential on each of the electrode portions arranged in quadruple symmetry around the long axis.
  • the axis of symmetry is referred to as the z axis.
  • each of the four electrode portions is depicted as an x rod pair and a y rod pair.
  • the two x-rods have the same potential as each other, and so are the two y-rods.
  • the potential of the y rod is opposite to the x rod.
  • the potential of each rod set can be expressed as a RF component oscillating at high speed and a constant DC offset.
  • the cation is affected by the restoring force to keep it close to the z-axis, and the potential in the x direction is equal to a well.
  • the DC offset on the y-rod is a negative offset, the cation is affected by the repulsive force driving it away from the z-axis, and the potential in the y direction is like a saddle.
  • a vibrating RF component is applied to both rod pairs.
  • the RF phase on the x-rod is the same and is 180 ° different from the phase on the y-rod.
  • Ions move inertically along the z axis from the inlet of the quadrupole to the detector, which is often placed at the outlet of the quadrupole.
  • the ions Inside the quadrupole, the ions have orbits that are separable in the x and y directions.
  • the applied RF field carries ions with the minimum mass to charge ratio out of the potential well and into the rods. Ions with sufficiently high mass-to-charge ratios remain trapped in the wells and have a stable orbit in the x direction.
  • the field applied in the x direction acts as a highpass mass filter.
  • the field applied in the y direction acts as a low pass mass filter, and ions with stable component orbits in both x and y pass through the quadrupole to reach the detector.
  • the DC offset and the RF amplitude in the mass spectrometer including the quadrupole mass filter may be selected to measure only ions having a desirable m / z value range.
  • the bounded solution of the Matthew equation corresponds to an orbit that never leaves a finite radius cylinder, the radius of which depends on the initial state of the ions.
  • Boundary solutions are typically identified with orbits carrying ions to the detector through quadrupoles.
  • the region containing the boundary solution of the Matthew equation is called the stability region, and the stability region is formed by the intersection of two regions corresponding to the regions where the x and y components of the orbit are respectively stabilized.
  • the ions passing through the quadrupole mass filter can pass with a stable trajectory when they are within the stability shown in Figure 2b, and have a fixed value r 0 .
  • r 0 For ⁇ , U and V, all the ions with the same m / e have the same operating point (a, q) in stability, since a / q equals 2U / V but does not depend on m / e, The operating point of all ions located on the same line as the constant a / q passes through the origin of stability.
  • the mass scan line approaches the vertex of the stability region, and the mass range of ions passing through becomes narrower, and thus the resolution may increase.
  • the insulator holder in the present invention includes an empty space on the inner surface so that the four electrode portions 10, 20, 30, 40 are each spaced in parallel to each other at a predetermined distance to form a symmetrical shape. It has a ring structure, the portion of the inner surface of the insulator holder 50 which is in contact with each electrode portion is made of a plane, and each of the four electrode portions (10, 20, 30, 40) The contact portion of the insulator holder 50 is made of a flat surface, so that each electrode part is in close contact with the insulator holder in contact with an inner surface formed of the plane of the insulator holder 50.
  • the insulator holder includes an empty space therein, and a portion of the insulator holder in contact with each of the electrode portions is formed in a flat surface, and a portion of the insulator holder in contact with the insulator holder in each of the electrode portions is flat.
  • the accuracy of the assembly of each electrode and insulator holder in the quadrupole mass filter which is a drawback in the quadrupole mass filter as shown in FIG. 1, depends on the precision machining of the insulator holder.
  • 3A and 3B are cross-sectional and perspective views, respectively, of an insulator holder according to one embodiment of the present invention.
  • the insulator holder according to the present invention unlike the structure in which the portion coupled to the electrode portion in the conventional insulator holder has a curved surface, the inner surface of the empty space of the insulator holder is a quadrilateral shape To be processed, each side of the quadrilateral plane is in contact with the electrode is composed of a plane, there is an advantage that can be easily assembled and precisely in close contact with the surface in contact with the holder of the electrode side.
  • the insulator holder may be made of an insulating ceramic, preferably made of alumina, and the thickness of the insulator holder may range from 1.2 mm to 7 mm.
  • the insulator holder may be provided with at least one or more in the quadrupole mass filter, preferably have one to four, more preferably two to three.
  • 3B illustrates a perspective view of an insulator holder in accordance with one embodiment of the present invention, and includes four openings 10a, 20a, 30a, and 40a of the insulator holder.
  • the openings are formed in the insulator holder to join the insulator holder and the four electrode portions, and coupling grooves 11, 21, 31, and 41 respectively formed in the four electrode portions 10, 20, 30, and 40 described later.
  • each of the four electrode parts can be fixed to the insulator holder to be coupled.
  • each opening of the insulator holder may have a circular cross section or a polygon such as a triangle or a square, but preferably has a circular cross section for the convenience of coupling with the fastening member.
  • the fastening member may be a metal screw having a function that can be coupled to the opening formed in the insulator holder and the coupling grooves formed in each of the four electrode parts in close contact with each other, generally stainless steel screws are used a lot.
  • the opening of the insulator holder may be formed such that the opening surface of the outer side is larger than the inner side, and as shown in Figure 3b, two cylinders, the radius of the outer cylinder is larger than the radius of the cylinder of the inner opening This may have a shape overlapping each other.
  • the four electrode parts in the contact with the insulator holder 50 is formed in the plane, respectively, as described above, the respective in contact with the inner surface consisting of the plane of the insulator holder 50
  • the electrode portion may be brought into close contact with the insulator holder.
  • the size of the plane formed on the inner surface of the insulator holder is larger than the size of the plane included in the electrode portion.
  • the four electrode portions 10, 20, 30, and 40 may be formed to have the same cross-section, respectively, and the four electrode portions may be provided with a pair of electrodes facing each other and different from each other. It can be configured by supplying power of opposite phase to the pair.
  • each electrode unit may include a main filter (maim filter) electrode and a pre-filter (pre filter) electrode
  • the length of the prefilter electrode may range from 8% to 25% of the length of the main filter electrode.
  • the spacing between the prefilter and the main filter can range from 1.7 to 2.5 mm, which are isolated from the insulator.
  • FIGS. 5A, 5B, and 5C are electrode portions 10, 20, 30, and 40.
  • the electrode part shown in FIGS. 4 and 5 is disposed on a plane in contact with the insulator holder 50 of each of the four electrode parts 10, 20, 30, and 40.
  • the coupling grooves 11, 21, 31, and 41 are formed, the coupling grooves formed in the electrode portion and the opening may be connected by the fastening member 60 to allow the electrode portion and the insulator holder to be coupled to each other.
  • the coupling groove may have a screw thread structure to facilitate coupling with a fastening member having a screw thread corresponding thereto.
  • the electrode portion in FIG. 4A has a structure in which the cross-section of each electrode portion is removed from the portion having a smaller area among the portions divided by a straight line parallel to the diameter of the circle. Can be represented.
  • the portion to be joined to the insulator holder has a plane, so that the cross section of the electrode portion is parallel to the diameter of the circle as described above. It is possible to have a structure in which a portion having a smaller area (a portion including an arc of a dotted line in FIG. 4A) among the portions divided by a straight line is removed.
  • the electrode portion has an easier manufacturing point than the electrode portion having a hyperbolic shape, and thus, the electrode portion can be formed more economically and with high accuracy, thereby improving the accuracy of assembling the quadrupole mass filter finally obtained.
  • FIG. 4B and FIG. 4C show a structure in which coupling grooves 11, 21, 31, and 41 are formed in the electrode portions as described above.
  • the electrode unit of FIG. 5A may have a structure in which cross-sections of end portions of the electrodes opposing to each other, in the direction of the insulator holder 50 in the form of a hyperbola, except for the portion where the coupling groove is formed.
  • a part of the positive center of each electrode portion facing each other has a form of a hyperbola, and as shown in FIG. 5A, the shape of the hyperbola (h1 part in FIG. 5A) in which the curve on the left side of the electrode portion is opened in the insulator holder direction is shown.
  • the electrode part may be processed to be in contact with the hyperbola in a vertical direction (h2 part in FIG. 5A) in a plane formed to be in close contact with the insulator holder of the electrode part so that the inner surface of the insulator holder and the electrode part are in close contact with each other.
  • at least a part of the opposing point side of each of the electrode portions facing each other can have a form of a hyperbola.
  • 5B and 5C illustrate a structure in which coupling grooves 11, 21, 31, and 41 are formed in respective electrode portions as described above.
  • 4c and 5c show the length of the exemplary electrode portion and the position of the coupling groove in accordance with the present invention.
  • the length of the electrode part having a form in which a portion of the cylinder of FIG. 4 is cut is 100 mm, and they can be seen that coupling grooves are formed at intervals of 20 mm to 30 mm.
  • the length of the electrode portion having a hyperbolic shape in FIG. 5 represents 180 mm, where the height H of the electrode rod is the sum of h 1 and h 2 , and h 1 is the height of the hyperbolic surface, h 2 Is the height between the ends of the electrodes at the bottom of the hyperbolic surface.
  • the h 1 is 2.247 mm and h 2 is 4.957 mm.
  • the diameter (D) can be made to the electrode rod 10 mm, which can be changed according to the mass spectrometer or the analysis conditions to be analyzed by the user, and is not limited to the above values.
  • the height (H) of the electrode rod shows an error within 0.001 to 0.002 mm, It can be seen that the diameter (D) of the rod is well manufactured as there is no error.
  • FIG. 6 illustrates a state in which the electrode unit and the insulator holder used in the quadrupole mass filter according to the present invention are combined.
  • 6A and 6B are cross-sectional views and perspective views of a quadrupole mass filter obtained by assembling four electrodes and an alumina holder, respectively, according to one embodiment of the present invention.
  • each electrode portion in contact with the insulator holder 50 is formed in a flat surface, so that each electrode portion is in close contact with the insulator holder in contact with an inner surface of the plane of the insulator holder 50. Since the conventional quadrupole mass filter shown in Figure 1 to solve the problem caused by manufacturing the inside of the insulator holder in a circular shape to fix the electrode portion, it can be seen that the assembly precision is excellent.
  • Table 1 shows the results of measuring the assembly error of the quadrupole mass filter obtained by processing the electrode unit and the insulator holder (alumina holder) according to the present invention and then assembling them.
  • 1, 2, and 3 of the position-specific numbers in FIG. 6B show the results of the electrode located at the top
  • 2, 4, and 6 show the results of the electrode located at the left side. Corresponds to the parallelism and precision of assembly by position.
  • the present invention can provide a quadrupole mass spectrometer including the quadrupole mass filter. This may correspond to those skilled in the art by adding various components according to the prior art used in the mass spectrometer based on the quadrupole mass filter.
  • the present invention relates to a quadrupole mass filter for a mass spectrometer and a quadrupole mass spectrometer including the same, and can provide a more efficient and economical quadrupole mass filter for industrial application.

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Abstract

La présente invention concerne un filtre de masse quadrupolaire pour spectromètre de masse quadrupolaire, le filtre de masse quadrupolaire comprenant quatre électrodes et un support isolant destiné à fixer les quatre électrodes. Dans le filtre de masse quadrupolaire selon la présente invention, une partie de la surface intérieure du support isolant, qui vient en contact avec chaque électrode, est formée en tant que surface plate, et une partie de chacune des quatre électrodes, qui vient en contact avec le support isolant, est formée en tant que surface plate. Par conséquent, la présente invention peut procurer un spectromètre de masse quadrupolaire qui est excellent en termes de parallélisme, de rectitude et de précision d'assemblage d'un quadrupôle.
PCT/KR2016/007013 2015-08-31 2016-06-30 Filtre de masse quadrupolaire pour spectromètre de masse, et spectromètre de masse quadrupolaire le comprenant WO2017039133A1 (fr)

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Publication number Priority date Publication date Assignee Title
JPH10223174A (ja) * 1997-02-03 1998-08-21 Yokogawa Electric Corp 四重極形質量分析計
JPH1186781A (ja) * 1997-09-16 1999-03-30 Shimadzu Corp 四重極質量分析装置
JP2006332003A (ja) * 2005-05-30 2006-12-07 Omron Corp 四重極電極ユニット、電極構造物及びその製造方法
KR20090066070A (ko) * 2007-12-18 2009-06-23 한국표준과학연구원 사중극자 질량분석기의 사중극자 질량필터 및 그 제조 방법
KR20140075403A (ko) * 2012-12-11 2014-06-19 한국기초과학지원연구원 사중극자 이온필터 및 이를 이용한 2차이온 검출 배제방법.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100786621B1 (ko) 2005-12-19 2007-12-21 한국표준과학연구원 석영 재질의 백금족금속 도금한 쌍곡선면 사중극자 질량분석기

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10223174A (ja) * 1997-02-03 1998-08-21 Yokogawa Electric Corp 四重極形質量分析計
JPH1186781A (ja) * 1997-09-16 1999-03-30 Shimadzu Corp 四重極質量分析装置
JP2006332003A (ja) * 2005-05-30 2006-12-07 Omron Corp 四重極電極ユニット、電極構造物及びその製造方法
KR20090066070A (ko) * 2007-12-18 2009-06-23 한국표준과학연구원 사중극자 질량분석기의 사중극자 질량필터 및 그 제조 방법
KR20140075403A (ko) * 2012-12-11 2014-06-19 한국기초과학지원연구원 사중극자 이온필터 및 이를 이용한 2차이온 검출 배제방법.

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