WO2017036633A1 - Capteur et procédé de détection de deux grandeurs physiques - Google Patents

Capteur et procédé de détection de deux grandeurs physiques Download PDF

Info

Publication number
WO2017036633A1
WO2017036633A1 PCT/EP2016/065679 EP2016065679W WO2017036633A1 WO 2017036633 A1 WO2017036633 A1 WO 2017036633A1 EP 2016065679 W EP2016065679 W EP 2016065679W WO 2017036633 A1 WO2017036633 A1 WO 2017036633A1
Authority
WO
WIPO (PCT)
Prior art keywords
wire
capacitance
measuring
sensor
measuring element
Prior art date
Application number
PCT/EP2016/065679
Other languages
German (de)
English (en)
Inventor
Matthias Maute
Thomas Northemann
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2017036633A1 publication Critical patent/WO2017036633A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Definitions

  • the present invention relates to a sensor for detecting two physical quantities and a corresponding method.
  • acceleration sensors are used in a variety of applications.
  • such sensors are used in vehicles, e.g. to be able to detect the movement of the vehicle in an ESP system.
  • sensors may be e.g. in mobile devices, e.g. Smartphones are used.
  • AI is such a sensor for detecting a
  • a plurality of further sensors are also used, which serve to detect the environment of the vehicle or the state of the surroundings of the vehicle.
  • the present invention discloses a sensor having the features of claim 1 and a method having the features of claim 9.
  • a sensor for detecting two physical quantities with a first capacitive measuring element, which is formed, a first physical Detect size and output a corresponding first measurement signal, with a second capacitive measuring element, which is designed to detect a second physical quantity and output a corresponding second measurement signal, and with a computing device, which coupled to the first capacitive sensing element and the second capacitive sensing element is and is configured to determine the first physical variable in rotation based on the first measurement signal and to determine the second physical quantity based on the second measurement signal.
  • a measuring method for detecting two physical quantities comprising detecting a first physical quantity designed in particular as acceleration and outputting a corresponding first measuring signal, detecting a second physical quantity and outputting a
  • Capacitive sensing elements for acceleration detection may e.g. MEMS sensors, also called microelectromechanical sensors, be. These have a mass that is deflected by an acceleration. This deflection leads to a change in a capacitance of the sensor. The change in the capacitance can be used to calculate the acceleration acting on the sensor or the mass.
  • MEMS sensors also called microelectromechanical sensors
  • a circuit is therefore present in the computing device which can evaluate a signal of a capacitive measurement element.
  • the second capacitive measuring element can be any measuring element whose output signal is dependent on a different physical quantity than the acceleration of the sensor.
  • the second capacitive measuring element can be designed as a temperature or humidity sensor.
  • the second capacitive measuring element does not have to be designed as a ME MS element. Rather, it is sufficient that the capacitance of the second measuring element changes under the influence of the second physical quantity.
  • the present invention enables the construction of a very simple, less complex sensor. By minimizing the number of components, the reliability of the sensor is increased and the cost is reduced.
  • the senor may have a switching device, which is designed to electrically couple the first capacitive measuring element and the second capacitive measuring element to the computing device alternately. Due to the switching device, also called multiplexer, the switching device, also called multiplexer, the switching device, also called multiplexer, the switching device, also called multiplexer, the switching device, also called multiplexer, the switching device, also called multiplexer, the switching device, also called multiplexer, the switching device.
  • Computing be coupled to each of the capacitive sensing elements, without having to provide separate connections to the computing device for this purpose. Furthermore, by switching a mutual
  • the switching means and the computing means may e.g. be arranged together in an ASIC or the like. Need for the two
  • the structure of the ASICs can be simplified or its area can be minimized. .
  • the frequency with which the switching device or the computing device switches between the first and the second measurement signal may vary depending on the type of signals. Indicates the second measurement signal e.g. a slowly changing size, e.g. a temperature or humidity, this can be detected less often than the acceleration. For example, moisture may be detected only once per second while the acceleration is detected for the remainder of the time.
  • a slowly changing size e.g. a temperature or humidity
  • the first measuring element may be a first
  • a second terminal of the first measuring element may be connected to a second pole of the first
  • acceleration-dependent capacitance and a first pole of the second acceleration-dependent capacitance and a third terminal of the first measuring element may be connected to a second pole of the second acceleration-dependent capacitance
  • the first measuring element is consequently as a difference-based capacitive
  • Acceleration sensor formed. Such sensors with two capacities allow very accurate detection and evaluation of the acceleration.
  • the second measuring element may in particular be designed as a moisture sensor and have a measuring capacity whose capacitance value changes in particular under the influence of moisture.
  • a first terminal of the second measuring element may be coupled to a first pole of the measuring capacitance and a second terminal of the second
  • Measuring element may be coupled to a second pole of the measuring capacitance. If only one measuring capacitance is provided in the second measuring element, an absolute value of the second physical variable can be detected with a very simple construction of the sensor.
  • the switching device also requires only two switching elements in this case.
  • the second measuring capacitance may be formed as a first wire and a second wire. Moisture can be between the two _.
  • Wires change measurable capacity. This change can be
  • the second measuring element may further comprise a
  • the second terminal of the second measuring element may be further coupled to a first pole of the reference capacitance and a third terminal of the second measuring element may be coupled to a second pole of the reference capacitance.
  • the reference capacitance does not change its value by shielding against the influence of the second physical quantity, or only to a very small extent when the second physical quantity changes.
  • the value of the physical quantity may therefore be based on the difference between the value of the measuring capacity and the value of the
  • Reference capacity can be detected very accurately.
  • a value of the second physical quantity may be stored in the event that the value of the measuring capacitance equals the value of the reference capacitance. Based on this stored value and a corresponding mapping rule, the computing device can convert the difference between the value of the measuring capacity and the value of the reference capacitance into a corresponding value for the second physical quantity.
  • a look-up table can also be stored in the computing device, which has a direct mapping of the difference between the value of the measuring capacitance and the value of the reference capacitance to a value of the second physical variable. To reduce the memory requirement for the lookup table, the number of stored values can be reduced. If necessary, the computing device can then perform an interpolation between two values of the value table.
  • the reference capacitance may comprise the second wire of the measurement capacitance and a third wire.
  • Such a reference capacity is very simple in construction and can be very easily coupled with the computing device.
  • the second wire and the third wire may be disposed protected from moisture in the sensor.
  • the first wire can on the other hand, be arranged in the sensor such that moisture can get between the first wire and the second wire.
  • the second and the third wire can be deeply embedded in a protective layer, for example in a casting or molding compound.
  • the first wire may be attached to or near the surface of the molding compound. Moisture can thus penetrate the molding compound and alter the dielectric constant of the molding compound in the region between the first wire and the second wire.
  • two layers of different castables may be provided. For example, a lower layer in which the second wire and the third wire are disposed may be impermeable to the moisture. A second, upper layer, in which the first wire is arranged, may allow penetration of the moisture. With this arrangement, the second and third wires need not be placed very deep in the molding compound.
  • FIG. 1 is a block diagram of an embodiment of a sensor according to the invention.
  • Fig. 2 is a block diagram of another embodiment of a
  • Fig. 4 is a fragmentary cross-section through an embodiment of a sensor according to the invention.
  • Fig. 5 is a fragmentary cross-section through another
  • Embodiment of a sensor according to the invention Embodiment of a sensor according to the invention.
  • FIG. 1 shows a block diagram of an embodiment of a sensor 1-1 according to the invention.
  • the sensor 1-1 has a first capacitive measuring element 2, which is a differential measuring element 2. Consequently, two capacitors 9 and 10 are arranged in the measuring element 2. In this case, a first pole 12-1 of the first capacitor 9 is connected to a first terminal 11-1 of the measuring element 2. A second pole 12-2 of the first capacitance and a first pole 12-3 of the second capacitance 10 are connected to a second terminal 11-2 of the measuring element 2. Finally, a second pole 12-4 of the second capacitance 10 is coupled to the third terminal 11-3 of the measuring element 2. At the first capacitive measuring element 2, which is a differential measuring element 2. Consequently, two capacitors 9 and 10 are arranged in the measuring element 2. In this case, a first pole 12-1 of the first capacitor 9 is connected to a first terminal 11-1 of the measuring element 2. A second pole 12-2 of the first capacitance and a first pole 12-3 of the second capacitance 10 are connected to a second terminal 11-2 of the measuring element 2. Finally, a second pole 12-4 of the second capacitance 10 is coupled
  • Measuring element 2 may be any differential capacitive
  • Acceleration sensor 2 act.
  • the acceleration sensor 2 act.
  • Acceleration sensor 2 is a MEMS sensor, also known as a microelectromechanical sensor, which has two capacities 9 and 10.
  • the measuring element 2 outputs via the terminals 11-1 to 11-3 from a first measurement signal 4-1. This is transmitted to the computing device 5, which is arranged in an ASIC 20. Between the measuring element 2 and the
  • Computing device 5 is in the ASIC 20 a switching device 8-1 "
  • the switching device 8-1 has two switching elements 25-1 and 25-2, each having two inputs and one output.
  • An input of the first switching element 25-1 is coupled to the first terminal 11-1 of the first measuring element 2. Further, an input of the second
  • Switching element 25-2 coupled to the second terminal 11-2 of the first measuring element 2.
  • the third connection 11-3 of the first measuring element 2 is coupled directly to the computing device 5.
  • the sensor 1-1 of FIG. 1 has a second capacitive measuring element
  • the second measuring element 3-1 of Fig. 1 is a humidity sensor.
  • the measuring capacitance 13 is coupled to the first terminal 14-1 and the second terminal 14-2 of the second measuring element 3-1.
  • the measuring capacitance 13 is shown explicitly for the purpose of illustration only.
  • the measuring capacitance 13 is formed by the capacitance between the first wire 16 and the second wire 17, which are arranged in the second measuring element 3-1. So it is in addition to the wires 16 and 17, no further capacitive device available.
  • the wire 16 is coupled to a first terminal 14-1 of the second sensing element 3-1.
  • the wire 17 is coupled to a second terminal 14-2 of the second sensing element 3-1.
  • the second measuring element 3-1 is likewise provided with the switching device
  • the first terminal 14-1 of the second measuring element 3-1 is coupled to the second input of the first switching element 25-1
  • the second terminal 14-2 of the second measuring element 3-1 is coupled to the second input of the second switching element 25-2
  • the third terminal 11-3 of the first measuring element 2 is coupled directly to the computing device 5, since the second measuring element 3-1 only two Ports 14-1, 14-2 has.
  • the second measuring element 3-1 only two Ports 14-1, 14-2 has.
  • Switching device 8-1 have a third switching element whose first input can be coupled to the third terminal 11-3 of the first measuring element 2.
  • the second input of this switching element may e.g. Not
  • the individual switching elements 25-1, 25-2 can be controlled by the computing device 5 so that it determines whether it evaluates the measurement signal 4-1 or the measurement signal 4-2. Consequently, the computing device 5 can alternately detect the measurement signal 4-1 and the measurement signal 4-2 and calculate the acceleration 6 and the humidity 7 therefrom.
  • Computing device 5 have a memory with a value table, in which an assignment of the values of the measurement signal 4-1 and the measurement signal 4-2 to the acceleration 6 and the humidity 7 is deposited.
  • the arithmetic unit 5 may also be adapted to each of a value of the first measurement signal 4-1 and the second measurement signal 4- 2 based on a mapping rule (eg, a function 1st - n degrees), the corresponding value of the acceleration 6 or attributable to the humidity 7.
  • a mapping rule eg, a function 1st - n degrees
  • the values of the table of values or the coefficients of the mapping rule are stored in the computing device 5.
  • the second measuring element 3-1 of FIG. 1 has only one measuring capacitance 13. Consequently, only one absolute measurement is possible with this measuring element 3-1. Interference with the measuring capacity 13, which is not on a
  • Moisture change are therefore reflected as a change in the value of the humidity 7, which calculates the computing device 5.
  • Fig. 2 shows a block diagram of another embodiment of a
  • sensor 1-2 in which the second measuring element 3-2, as well as the first measuring element 2, is differentially executed.
  • the sensor 1-2 of FIG. 2 is based on the sensor 1-1 of FIG. 1. Only the second measuring element 3-2 has, in addition to the measuring capacitance 13
  • a first pole 15-3 of the reference capacitance 19 is coupled to the second terminal 14-2 of the second measuring element 3-2. Furthermore, a second pole 15-4 of the reference capacitance 19 is coupled to the third terminal 14-3 of the second measuring element 3-2.
  • the second measuring element 3-2 of FIG. 2 thus has, in contrast to the second measuring element 3-1 of FIG. 1, three terminals 14-1 to 14-3. Consequently, the switching device 8-2 has three switching elements 25-1 to 25-3.
  • the reference capacitance 19 is arranged in the second measuring element 3-1 or the sensor 1-2 in such a way that it is opposite to the second physical variable, thus e.g. against moisture, protected or
  • the reference capacitance 19 may also consist of two wires 17 and 18.
  • the second wire 17 can also be used to form the reference capacitance 19.
  • the wires 17 and 18 may e.g. shed so deep in a molding compound 22 that the moisture does not penetrate to that depth in the
  • Figs. 1 and 2 there are shown only schematically separate connections between the terminals 11-1 to 11-3 and the switching means 8-1, 8-2 and the terminals 14-1 to 14-3 and the switching means 8-1, 8-2, respectively .
  • the measuring elements 2, 3-1, 3-2 are coupled directly to the ASIC 20, in which the switching device 8-1, 8-2 or the
  • wires 16, 17 and 18 may be formed as bonding wires that are directly coupled to pads on the ASIC 20.
  • FIG. 3 shows a flow chart of an embodiment of a
  • Measuring method for detecting two physical quantities 6, 7.
  • the first physical variable 6 an acceleration is detected in step S1 and a corresponding first measurement signal 4-1 is output.
  • the second physical quantity 7, here a humidity is detected and a corresponding second measuring signal 4-2, 4-3 is output.
  • the values for acceleration 6 and humidity 7 are determined from measurement signals 4-1, 4-2, 4-3.
  • the value of the acceleration can also be determined after the first step S1, and the value of the humidity can be determined after the second step S2.
  • a measuring capacitance 13 For detecting the moisture 7, a measuring capacitance 13 can be detected whose capacitance value changes under the influence of the humidity 7.
  • the value of a moisture can be detected when detecting the moisture
  • Reference capacity 19 are detected. In this case, the reference capacitance 19 is shielded against influences of the second physical quantity 7.
  • FIG. 4 shows a partial cross section through an embodiment of a sensor 1-3 according to the invention.
  • FIG. 4 only the first wire 16, the second wire 17 and the third wire 18 of the second measuring element 3-1, 3-2, which are encapsulated in a casting compound 22 and arranged on a substrate 21, are shown.
  • the first wire 16 is arranged near the surface of the casting compound 22.
  • the second wire 17 is arranged vertically below the first wire 16 in the casting compound 22.
  • a dashed funnel indicates the
  • the second wire 17 is arranged so deep in the casting compound 22 that it lies outside the range in which the moisture 7 penetrates. Further below the second wire 17, the third wire 18 is arranged.
  • the capacitance between the first wire 16 and the second wire 17 thus changes with changes in moisture in the casting compound 22 or the environment of the casting material 22. This capacity is therefore the
  • the capacitance between the second wire 17 and the third wire 18 remains unchanged even with changes in humidity and can therefore as
  • Fig. 5 shows a fragmentary cross-section through another
  • Embodiment of a sensor 1-4 according to the invention Embodiment of a sensor 1-4 according to the invention.
  • the sensor 1-4 has two different layers.
  • the first layer consists of a casting compound 22 into which moisture 7 can penetrate.
  • the second layer on the other hand, consists of casting compound 23 into which moisture 7 can not penetrate.
  • a layer of the second molding compound 23 is arranged, in which the second wire 17 and the third wire 18 are arranged side by side.
  • the second wire 17 and the third wire 18 are thus shielded from moisture or moisture changes.
  • a second layer of the casting material 22 is arranged, in which the moisture 7 can penetrate. In this molding compound 22, the first wire 16 is arranged.
  • the height of the structure of cast mass 22, 23 and wires 16, 17 and 18 compared to the Fig. 4 can be significantly reduced, since the wires 17 and 18 are protected by the casting material 23 from moisture. It is therefore not necessary to embed them deep in the casting compound 22.
  • both a reference capacitance 19 and the measuring capacitance 13 can be provided.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

L'invention concerne un capteur destiné à détecter deux grandeurs physiques, comprenant un premier élément de mesure capacitif, lequel est conçu pour détecter en tant que première grandeur physique une accélération du capteur et pour délivrer un premier signal de mesure correspondant, un deuxième élément de mesure capacitif, lequel est conçu pour détecter une deuxième grandeur physique et pour délivrer un deuxième signal de mesure correspondant, et un dispositif de calcul, lequel est couplé au premier élément de mesure capacitif et au deuxième élément de mesure capacitif et est conçu en alternance pour déterminer l'accélération du capteur sur la base du premier signal de mesure et pour déterminer la deuxième grandeur physique sur la base du deuxième signal de mesure. L'invention concerne en outre un procédé correspondant.
PCT/EP2016/065679 2015-08-28 2016-07-04 Capteur et procédé de détection de deux grandeurs physiques WO2017036633A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015216465.9 2015-08-28
DE102015216465.9A DE102015216465A1 (de) 2015-08-28 2015-08-28 Sensor und Verfahren zur Erfassung von zwei physikalischen Größen

Publications (1)

Publication Number Publication Date
WO2017036633A1 true WO2017036633A1 (fr) 2017-03-09

Family

ID=56296841

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/065679 WO2017036633A1 (fr) 2015-08-28 2016-07-04 Capteur et procédé de détection de deux grandeurs physiques

Country Status (2)

Country Link
DE (1) DE102015216465A1 (fr)
WO (1) WO2017036633A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0322193A2 (fr) * 1987-12-23 1989-06-28 Tokyo Electric Co. Ltd. Balance électronique du type à capacité électrostatique
US4860232A (en) * 1987-04-22 1989-08-22 Massachusetts Institute Of Technology Digital technique for precise measurement of variable capacitance
US20060037404A1 (en) * 2004-08-20 2006-02-23 Denso Corporation Humidity sensor and composite sensor having humidity detecting function
US20090150029A1 (en) * 2007-11-19 2009-06-11 Honeywell International Inc. Capacitive integrated mems multi-sensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19637265A1 (de) 1996-09-13 1998-03-26 Bosch Gmbh Robert Sensor zur kapazitiven Aufnahme einer Beschleunigung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4860232A (en) * 1987-04-22 1989-08-22 Massachusetts Institute Of Technology Digital technique for precise measurement of variable capacitance
EP0322193A2 (fr) * 1987-12-23 1989-06-28 Tokyo Electric Co. Ltd. Balance électronique du type à capacité électrostatique
US20060037404A1 (en) * 2004-08-20 2006-02-23 Denso Corporation Humidity sensor and composite sensor having humidity detecting function
US20090150029A1 (en) * 2007-11-19 2009-06-11 Honeywell International Inc. Capacitive integrated mems multi-sensor

Also Published As

Publication number Publication date
DE102015216465A1 (de) 2017-03-02

Similar Documents

Publication Publication Date Title
EP1204848B1 (fr) Procede de mesure du niveau de remplissage et detecteur du niveau de remplissage
DE4431338C2 (de) Beschleunigungssensor
EP2668512B1 (fr) Procédé de détermination sans contact d'un potentiel électrique d'un objet au moyen de deux valeurs de flux électrique différentes et dispositif associé
DE10261767A1 (de) Vorrichtung und Verfahren zur Kapazitätsmessung sowie Einrichtung zum Ermitteln des Füllstandes einer Flüssigkeit mit einer solchen Vorrichtung
EP0145861A1 (fr) Dispositif pour mesurer des pressions et des marches de pression en fonction du temps
WO2008080683A2 (fr) Capteur d'accélération micromécanique à plusieurs axes
CH702942A1 (de) Kapazitives Messverfahren und Vorrichtung zur Füllstandsdetektion und entsprechend ausgestattetes Laborgerät.
DE19743288A1 (de) Mikromechanischer Sensor
DE102008040529A1 (de) Fehlerkorrekturverfahren und Fehlerkorrekturvorrichtung für einen Beschleunigungssensor
DE102005025908B3 (de) Kapazitiver Sensor zum Messen einer Messgrösse
EP2233890A2 (fr) Capteur capacitif et procédé de détection capacitive de l'écartement d'un objet
DE112014004697T5 (de) Beschleunigungssensor
EP1332374B1 (fr) Procede et dispositif de reglage electrique du zero pour un composant micromecanique
WO2017036633A1 (fr) Capteur et procédé de détection de deux grandeurs physiques
DE3045980A1 (de) Steigungs- und gefaelle-messgeraet fuer fahrzeuge
DE19601077C2 (de) Kraftsensor
DE102012025037C5 (de) Verfahren zur kapazitiven Sitzbelegungserkennung für Fahrzeugsitze
EP2795261B1 (fr) Système de détection
DE102014211054A1 (de) Mikromechanischer Beschleunigungssensor
DE102007002593A1 (de) Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße eines Mediums
DE102004009868B3 (de) Messeinrichtung zur linearen Positionserfassung
DE102015216997A1 (de) Kapazitive Struktur und Verfahren zum Bestimmen einer Ladungsmenge unter Verwendung der kapazitiven Struktur
DE102010063471A1 (de) Mikroelektromechanisches Element für die Verfahren zur Herstellung eines solchen
DE102008042358B4 (de) Beschleunigungssensor mit Elektrodenbrücke
DE102005055474A1 (de) Beschleunigungssensor

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16733995

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16733995

Country of ref document: EP

Kind code of ref document: A1