WO2016173399A1 - 宽波段消色差复合波片的定标方法和装置及相应测量系统 - Google Patents
宽波段消色差复合波片的定标方法和装置及相应测量系统 Download PDFInfo
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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Definitions
- the present patent application relates to the field of polarization optical detection technology, and in particular to a method for wide-band achromatic composite wave plate calibration for Mueller matrix measurement.
- Mueller matrix measurement is one of the most important methods of polarization detection.
- the Mueller matrix is a 4 ⁇ 4 matrix, which describes the polarization effects and characteristics of optical devices and materials. It contains polarization information of almost all materials under test and is widely used. In the fields of materials, biology, semiconductors, etc., especially in the measurement of critical dimensions of semiconductor processes, it is an important basis for overcoming the defects of existing measurement techniques and measuring the critical dimension of the next generation process.
- the Mueller matrix measurement system generally consists of a polarization generator, a sample to be tested, a polarization analyzer and a detector.
- the polarization generator and the polarization analyzer are similar in structure, usually composed of a combination of a polarization device and a phase compensation device.
- the phase compensation device is generally a wave plate, a photoelastic modulator, or a liquid crystal modulator.
- phase compensation devices in Mueller matrix measurements are required to operate over a very wide band, and the resulting phase compensation can be limited to a small range, ie achromatic, over a wide range of wavelengths. Widely used is an achromatic composite wave plate, which has the characteristics of compact size, simple structure, and easy adjustment of light path.
- An achromatic composite wave plate typically consists of two or more individual wave plates.
- Wave plate is Optical components commonly used in the field of optical instrument design and optical measurement, also known as optical phase retarders, enable additional phase differences in the two vertical components of polarized light to change or examine the polarization state of the light wave.
- Wave plates are usually made of uniaxial or biaxial crystal materials, and the materials used to make the wave plates are usually quartz, magnesium fluoride, mica, gypsum, sapphire, and the like.
- a wave plate composed of a single wave plate is a single wave plate, and a wave plate composed of two or more wafers is a composite wave plate.
- the corresponding achromatic composite wave plate is designed according to the specific requirements.
- the optical axes of the individual wave plates constituting the composite wave plate are required to be in accordance with the design.
- the angle is strictly aligned.
- the accuracy of the alignment is difficult to ensure, and the alignment angle and the design angle are always different. Therefore, the polarization performance of the actually produced achromatic composite wave plate (that is, the Mueller matrix of the composite wave plate) is different from the ideal Mueller matrix of the design, and must be accurately scaled in the instrument measurement.
- Some existing methods for calibrating optical components in the Mueller matrix measurement system have not separately considered the problem of wave plate calibration in the case of misalignment of the optical wave plate of the composite wave plate. It is generally considered that the composite wave plate is an ideal wave plate. Only the phase delay amount is calibrated, but in practical applications, especially in the Mueller matrix measurement system, the influence of optical axis misalignment must be considered.
- An aspect of the invention discloses a calibration method for a composite wave plate, comprising: A. determining a first matrix characterizing the composite wave plate, the first matrix comprising at least one unknown; B. a first matrix determining a relationship between a theoretical light intensity and an alignment angle deviation value of the composite wave plate; C. based on the theoretically determined light intensity determined in step (B) and the alignment of the composite wave plate The relationship between the angular deviation values and the actual measured light intensity data is scaled to obtain a second matrix capable of characterizing the composite wave plate and containing no unknowns.
- the at least one unknown includes an alignment angle deviation value.
- the step A further comprises: determining, according to a third matrix representing the single wave plate in the composite wave plate and a coordinate transformation matrix determined by an alignment angle design value and the alignment angle deviation value.
- the first matrix is a third matrix representing the single wave plate in the composite wave plate.
- the step A further includes: determining the third matrix based on a characteristic parameter of the single wave plate, wherein the feature parameter comprises at least one of the following: a number of slices of a single wave plate; The material of the single wave plate; and the thickness of each of the single wave plates.
- the step B further comprises: constructing a functional relationship between the matrix elements in the first matrix and the alignment angle deviation values, such that each matrix element corresponds to the alignment angle deviation value.
- the step C further comprises: determining the alignment angle deviation value based on the at least one wavelength, thereby determining an unknown matrix element in the first matrix to determine the second matrix.
- Another aspect of the present invention also discloses an apparatus for calibration of a composite wave plate, comprising: a detecting unit for receiving or detecting the measured light intensity; and a processing unit configured to: determine the characterizing a first matrix of composite wave plates, the first matrix comprising at least one unknown; determining, based on the first matrix, a relationship between a theoretical light intensity and an alignment angle deviation value of the composite wave plate; Determining a relationship between the theoretical light intensity and the alignment angle deviation value of the composite wave plate and the measured light intensity data, determining a second matrix capable of characterizing the composite wave plate.
- the processing unit is further configured to: determine the first matrix based on a characteristic parameter of the composite wave plate, wherein a characteristic parameter of the composite wave plate includes at least one of the following: a single wave The number of sheets, the material of each of the single wave sheets, the thickness of each of the single wave sheets, and the alignment angle design value of the composite wave plate.
- the processing unit is further configured to: construct a functional relationship between the matrix elements in the first matrix and the alignment angle deviation values such that each matrix element is only the alignment angle deviation value function.
- the processing unit is further configured to determine the alignment angle deviation value based on the at least one wavelength to determine a matrix element in the first matrix.
- the invention also proposes a measurement system comprising: a polarizer for generating polarized light based on a light source; an analyzer for detecting the polarized light reflected from a surface of the sample; and a detector for Receiving light intensity of the polarized light from the analyzer, wherein the measuring system further comprises: at least one composite wave plate disposed between the polarizer and the analyzer according to an optical path, And the measuring system is configured to: adjust the polarizer and/or the composite wave plate and/or the analyzer to adjust the detected light intensity of the detector, and based on theoretical light intensity The relationship between the alignment angle deviation values of the composite wave plates is used to determine a matrix characterizing the composite wave plates.
- the measurement system is further configured to: determine a characterization based on a matrix characterizing the single wave plate in the composite wave plate and a coordinate transformation matrix determined by an alignment angle design value and the alignment angle deviation value A matrix of the composite wave plates.
- the measurement system is further configured to: construct a correspondence between matrix elements in the matrix characterizing the composite wave plate and the alignment angle deviation value, such that each matrix element is only the alignment The function of the angle deviation from the value.
- the measuring system is further configured to: after performing Fourier decomposition on the measured light intensity, and then determining a matrix characterizing the composite wave plate based on a theoretical light intensity value and a wavelength of the light ray;
- the optical axis direction of the first single wave plate of the composite wave plate is the difference between the system coordinate systems of the measurement system.
- a computer program product is provided, which is executed when the computer program product is executed by a computer device.
- a non-transitory computer readable medium comprising computer code, any of the foregoing methods being executed when the computer code is executed.
- a computer device comprising a memory and a processor, the memory storing computer code, the processor being configured to execute the computer code Perform any of the above methods.
- the technical solution of the invention when the composite wave plate or the measurement system is calibrated, the number of unknowns can be greatly reduced, thereby reducing the difficulty of calibration and improving the accuracy of calibration.
- FIG. 1 is a flow chart of a calibration method according to an embodiment of the present invention.
- FIG. 2 is a block diagram of a measurement system using a composite wave plate in accordance with an embodiment of the present invention.
- Computer device also referred to as “computer” in the context, is meant an intelligent electronic device that can perform predetermined processing, such as numerical calculations and/or logical calculations, by running a predetermined program or instruction, which can include a processor and Memory, executed by the processor The pre-stored surviving instructions in the memory are used to execute a predetermined process, or are executed by hardware such as an ASIC, an FPGA, a DSP, or the like, or a combination of the two.
- Computer devices include, but are not limited to, servers, personal computers, notebook computers, tablets, smart phones, and the like.
- the object of the present invention is to provide a calibration method for a composite wave plate in consideration of the deviation of the optical axis alignment degree of the achromatic composite wave plate.
- the Mueller matrix of the composite wave plate can be expressed as:
- the calibration wave plate is to obtain the unknown Mueller matrix elements of m 22 to m 44 , and each matrix element is a function of wavelength.
- Each wavelength corresponds to a matrix, ie 9 unknowns, that is, work.
- the waveplate calibration has 9N calibration unknowns.
- the first disadvantage of this calibration is that there are more unknowns that need to be scaled. It is generally not possible to scale all unknowns at the same time.
- a mathematical fitting analysis is performed at one wavelength. Not only is the calculation amount large, but the available information is relatively small, and the unknown quantity is relatively large. The accuracy and accuracy of each unknown quantity are difficult to guarantee.
- the present invention proposes an improved calibration method: instead of considering the achromatic composite wave plate as a single whole, it analyzes its composition and characteristics, and first obtains a matrix expression of its own. The form (ie, the first matrix), based on the first matrix, reduces the unknowns, thereby simplifying the calibration method.
- a calibration method for a composite wave plate comprising: A. determining a first matrix characterizing the composite wave plate; B. determining a theoretical light intensity based on the first matrix The relationship between the alignment angle deviation values of the composite wave plate; C. based on the relationship between the theoretical light intensity determined in step (B) and the alignment angle deviation value of the composite wave plate, and the measurement
- the intensity data is scaled to characterize a second matrix of the composite waveplate.
- the achromatic composite wave plate is composed of two or more optical axes of the same material or single wave plates of different materials at a certain angle.
- the single wave of the two optical axes perpendicular to each other is perpendicular to each other.
- a composite wave plate in which the sheets are combined is taken as an example. It can be understood that the method proposed in this embodiment can also be applied to achromatic composite wave plates of different materials, different number of sheets, and various optical axis alignment angles.
- FIG. 1 is a flow chart of a calibration method in accordance with an embodiment of the present invention.
- Step S11 determining the composition of the composite wave plate to be scaled
- the achromatic composite wave plate is composed of a plurality of single wave plates, and the Mueller matrix form of the single wave plate is determined, it is necessary to first determine the matrix form of the single wave plate, and then determine the composite wave plate matrix form. .
- Step S12 determining a matrix form of the composite wave plate by using a matrix of single wave plates and a coordinate transformation matrix determined by an alignment angle design value and an alignment angle deviation value.
- the characteristic parameters based on the single wave plate such as the number of single wave plates, the thickness of the material and the single wave plate, are determined by combining the coordinate transformation matrix between the alignment angle design value and the alignment angle deviation value.
- the matrix form of the composite wave plate is determined by combining the coordinate transformation matrix between the alignment angle design value and the alignment angle deviation value.
- Step S13 obtaining the measured light intensity and the unknown light based on the matrix of the composite wave plate The theoretical expression of the axis alignment angle deviation value.
- Step S14 The measured system light intensity data
- measurements are made through existing wave plates and other optical components such as analyzers, analyzers, and the like.
- Step S15 analyzing the measured light intensity and the theoretical light intensity to determine the alignment angle deviation value, and finally obtaining a matrix of the composite wave plate.
- the mathematical expression analysis is performed by the theoretical expression of the light intensity and the actual measured data, and the amount of the required calibration, that is, the deviation angle of the optical axis alignment angle is obtained, and the deviation value is substituted into the matrix expression of the composite wave plate.
- the matrix of the composite wave plate is obtained, and the calibration is completed.
- Equation (2) is the Mueller matrix of a single wave plate, where ⁇ is the phase delay it produces and is a function of wavelength:
- n o and n e are the refractive indices of the birefringent material parallel to the optical axis direction and perpendicular to the optical axis direction, respectively, and d is the thickness of the wave plate.
- the composite wave plate composed of two single wave plates has the optical axis aligned vertically (ie, 90 degrees), and the optical axis direction of the first wave plate is the direction of the system coordinate system, and the Mueller matrix is:
- the matrix of two single-wave plates are each:
- n o1 , n e1 and n o2 , n e2 are the respective refractive indices of the two materials, which are functions of wavelength, so the Mueller matrix of a single wave plate has a matrix at each wavelength, and each wavelength corresponds to a different matrix. .
- the matrix R( ⁇ ) is a rotation matrix between the optical element coordinate axis and the system coordinate axis, and its form is:
- Equation (5) the nine unknowns of m 22 to m 44 in equation (1) are not independent of each other, but the optical axis alignment angle deviation value C ⁇ and the refractive index and thickness of the wave plate material itself.
- the function (the formula of ⁇ 1,2 is shown in equation (3)).
- the matrix element of the waveplate is a function of the angular deviation from the value C ⁇
- C ⁇ is not a function of wavelength, it is a value for all wavelengths, so that the unknown of the entire system is from 9N (assumed measurement) N wavelengths have become one.
- the measurement data (ie, the light intensity) is mathematically fitted to the theoretical formula to obtain the unknown quantity that needs to be scaled.
- the matrix element of the wave plate is used by the formula ( 5) indicates that the theoretical formula obtained is the same at each wavelength.
- the refractive indices are different at different wavelengths, the values of the matrix elements are different at each wavelength, but the unknown number of the equation has only one C ⁇ and is independent of wavelength. . Therefore, the data of each wavelength can be used to scale C ⁇ , the amount of data is large, the amount of unknown is small, the difficulty of calibration is reduced, the accuracy and accuracy are correspondingly improved.
- the above example is an example of a composite wave plate composed of two separate wave plates of different materials.
- the optical axes are 90 degrees with each other.
- the optical axis design angle is any one.
- the calibration method is also applicable, or the matrix expression of the composite wave plate is obtained from the single wave plate.
- each matrix element is only a function of the alignment angle deviation value. . If the number of wave plates increases, the number of unknowns will increase, and one more wave plate will have an offset angle unknown value, but even then, the number of unknowns is much less than that of 9N.
- the measuring system includes: a polarizer 1 for generating polarized light based on a light source; A composite wave plate 2 is disposed between the polarizer and the sample according to an optical path; an analyzer 4 and a detector 5 for receiving an optical signal from the analyzer.
- the measuring system is configured to: adjust at least one of the polarizer 1, the first composite wave plate 2, and the analyzer 4 to adjust the light intensity data obtained by the detector 5, and based on the theoretical light intensity and the composite wave plate The relationship between the alignment angle deviation values is used to determine a second matrix capable of characterizing the first composite wave plate.
- the measurement system is first adjusted so that it can determine the various measurement parameters of the system in the measured state, and the Mueller matrix form of each optical component in the system except the first composite wave plate, in the usual Mueller matrix measurement system.
- the amount of error of the polarizer is very small and can be considered as an ideal original.
- Samples can be prepared using a variety of standard samples, such as the bare wafer or a known thickness of S i O 2 film.
- the light of the light source S passes through the polarizer 1 and enters the first composite wave plate 2 at the incident end, is irradiated to the sample, and is reflected by the sample into the exit end analyzer 4 to enter the detector 5.
- the polarizer 1 and the first composite wave plate 2 constitute a polarization generator at the incident end, and the analyzer 4 is a polarization detector.
- the operating mode of the system (the mode of measuring the light intensity) can be varied, such as the measurement of the rotating analyzer 4, or the rotating polarizer 1 or the addition of a composite wave plate 3 (indicated by a broken line in the figure, which can be determined)
- the labeled wave plate or the wave plate to be determined needs to be rotated, rotate any wave plate or rotate two wave plates at the same time (the rotation speed of the wave plate becomes a certain ratio).
- the composite wave plate is regarded as a whole, in order to scale the unknown 9 matrix elements (at one wavelength), it is necessary to measure the joints in several working modes to scale as much as possible. Now there is only one unknown.
- the quantity C ⁇ two unknowns C ⁇ 1 for the two composite plates to be scaled, 2 because the alignment deviation of the two wave plates is different
- We use the working mode of the rotary analyzer as an example.
- S 0 is the Stokes amount of the incident light source
- the Stokes amount is the amount describing the polarization characteristic of the light, which is a 4 ⁇ 1 vector whose first element is the light intensity.
- S is the amount of Stokes after the light passes through the system, and its first quantity S(1) is the light intensity that we can detect.
- M p , M A , M S are the polarizer, the Mueller matrix of the analyzer and the sample
- M Cf1 is the wave plate matrix of the incident end
- the R matrix is the rotation transformation matrix of the coordinate axis of the component and the system coordinate axis
- P and A are the angles between the optical axis of the polarizer and the analyzer and the system coordinate axis, respectively.
- C 1 is the optical axis direction of the first single wave plate and the system coordinate axis of the two single wave plates in the composite wave plate.
- the angle of the derivation (5) is based on the optical axis direction of the first single-wave plate of the composite wave plate.
- the hardware installation and debugging requirements are the axes of the system and the system.
- the direction is the same, but there is also a certain deviation. This deviation is C 1 .
- C 1 is calculated, which is also a wavelength-independent number. The amount of the target.
- ⁇ For the angular velocity of the rotation of the analyzer, ⁇ 2 (C ⁇ , C 1 ,), ⁇ 2 (C ⁇ , C 1 ,) is a functional expression of the amount to be scaled.
- the measured light intensity can be Fourier-decomposed to obtain the experimental ⁇ 2 and ⁇ 2 , and then mathematically fit with the theoretical expressions of the two to obtain the C ⁇ and C 1 , which need to be scaled.
- a matrix of scaled waves is required. When doing mathematical fitting, it can be obtained by using one wavelength of data. In order to improve the accuracy, data of multiple wavelengths can be used to fit together to obtain the amount to be scaled.
- the present invention also provides an apparatus for calibration of a composite wave plate, comprising: a detecting unit for receiving or detecting the measured light intensity; and a processing unit configured to: determine the first characterizing the composite wave plate a matrix; based on the first matrix, determining a relationship between a theoretical light intensity and an alignment angle deviation value of the composite wave plate; and based on the determined theoretical light intensity and the alignment angle deviation value of the composite wave plate The relationship and the measured light intensity data determine a second matrix capable of characterizing the composite wave plate.
- the processing unit is further configured to: determine the first matrix based on the characteristic parameters of the composite wave plate, wherein the characteristic parameters of the composite wave plate comprise at least one of the following: the number of single wave plates, each single wave The material of the sheet, the thickness of each single wave plate; and the alignment angle design value of the composite wave plate.
- the processing unit is further configured to: construct a functional relationship between the matrix elements in the first matrix and the alignment angle deviation values such that each matrix element is only a function of the alignment angle deviation value.
- the processing unit is further configured to determine an alignment angle deviation value based on the at least one wavelength, thereby determining a matrix element in the first matrix. It will be appreciated that the more wavelengths used, the more accurate the determined data.
- the present invention may be implemented in software and/or a combination of software and hardware, for example, an application specific integrated circuit (ASIC), a general purpose computer, or any other similar Hardware devices are implemented.
- the software program of the present invention may be executed by a processor to implement the steps or functions described above.
- the software program (including related data structures) of the present invention can be stored in a computer readable recording medium such as a RAM memory, a magnetic or optical drive or a floppy disk and the like.
- some of the steps or functions of the present invention may be implemented in hardware, for example, as a circuit that cooperates with a processor to perform various steps or functions.
- a portion of the invention can be applied as a computer program product, such as computer program instructions, which, when executed by a computer, can invoke or provide a method and/or solution in accordance with the present invention.
- the program instructions that invoke the method of the present invention may be stored in a fixed or removable recording medium, and/or by broadcast or The signal is transmitted by the data stream carried in the medium and/or stored in a working memory of the computer device operating in accordance with the program instructions.
- an embodiment in accordance with the present invention includes a device including a memory for storing computer program instructions and a processor for executing program instructions, wherein when the computer program instructions are executed by the processor, triggering
- the apparatus operates based on the aforementioned methods and/or technical solutions in accordance with various embodiments of the present invention.
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Abstract
Description
Claims (17)
- 一种用于复合波片的定标方法,其特征在于,包括:A.确定表征所述复合波片的第一矩阵,所述第一矩阵包含至少一个未知数;B.基于所述第一矩阵,确定理论上光强与所述复合波片的对准角度偏离值之间的关系;C.基于步骤(B)中已确定的理论上光强与所述复合波片的对准角度偏离值之间的关系以及实际测量得到的光强数据,定标得到能够表征所述复合波片且不含未知数的第二矩阵。
- 根据权利要求1所述的方法,其特征在于,所述至少一个未知数包括对准角度偏离值。
- 根据权利要求1所述的方法,其特征在于,所述步骤A还包括:基于所述复合波片中的表征单波片的第三矩阵和由对准角度设计值和所述对准角度偏离值决定的坐标变换矩阵来确定所述第一矩阵。
- 根据权利要求3所述的方法,其特征在于,所述步骤A还包括:基于所述单波片的特征参数,确定所述第三矩阵,其中,所述特征参数包括以下项中的至少一项:单波片的片数;各所述单波片的材料;以及各所述单波片的厚度。
- 根据权利要求1所述的方法,其特征在于,所述步骤B还包括:构建所述第一矩阵中的矩阵元与所述对准角度偏离值之间的函数关系,使得每个矩阵元与所述对准角度偏离值相对应。
- 根据权利要求1所述的方法,其特征在于,所述步骤C还包 括:基于至少一个波长,确定所述对准角度偏离值,进而确定所述第一矩阵中的未知的矩阵元以确定所述第二矩阵。
- 一种用于复合波片进行定标的装置,其特征在于,包括:检测单元,用于接收或检测测量到的光强;处理单元,其被配置为:确定表征所述复合波片的第一矩阵,所述第一矩阵包含至少一个未知数;基于所述第一矩阵,确定理论上光强与所述复合波片的对准角度偏离值之间的关系;以及基于已确定的理论上光强与所述复合波片的对准角度偏离值之间的关系以及测量得到的光强数据,确定能够表征所述复合波片的第二矩阵。
- 根据权利要求7所述的装置,其特征在于,所述处理单元还被配置为:基于所述复合波片的特征参数,确定所述第一矩阵,其中,所述复合波片的特征参数包括以下项中的至少一项:单波片的片数、各所述单波片的材料、各所述单波片的厚度;以及所述复合波片的对准角度设计值。
- 根据权利要求7所述的装置,其特征在于,所述处理单元还被配置为:构建所述第一矩阵中的矩阵元与所述对准角度偏离值之间的函数关系,使得每个矩阵元仅是所述对准角度偏离值的函数。
- 根据权利要求7所述的装置,其特征在于,所述处理单元还被配置为:基于至少一个波长,确定所述对准角度偏离值,进而确定所述第一矩阵中的矩阵元。
- 一种测量系统,其特征在于,包括:起偏器,其用于基于光源而产生偏振光;验偏器,其用于检测自样品表面反射的所述偏振光;探测器,其用于接收来自所述验偏器的所述偏振光的光强;其中,所述测量系统还包括:至少一个复合波片,其被依光学路径设置在所述起偏器与验偏器之间,并且所述测量系统被配置为:调整所述起偏器和/或所述复合波片和/或所述验偏器来调整所述探测器所探测到光强,并且基于理论上光强与复合波片的对准角度偏离值之间的关系来确定表征所述复合波片的矩阵。
- 根据权利要求11所述的测量系统,其特征在于,所述测量系统还被配置为:基于所述复合波片中的表征单波片的矩阵和由对准角度设计值和所述对准角度偏离值决定的坐标变换矩阵来确定能够表征所述复合波片的矩阵。
- 根据权利要求12所述的测量系统,其特征在于,所述测量系统还被配置为:构建表征所述复合波片的矩阵中的矩阵元与所述对准角度偏离值之间的对应关系,使得每个矩阵元仅是所述对准角度偏离值的函数。
- 根据权利要求11所述的测量系统,其特征在于,所述测量系统还被配置为:对测量得到的光强作傅里叶分解后,然后再基于理论上的光强值和光线的波长确定表征所述复合波片的矩阵和/或所述复合波片的第一片单波片的光轴方向所述测量系统的系统坐标系之间的差值。
- 一种计算机程序产品,当所述计算机程序产品被计算机设备执行时,如权利要求1-6中任一项所述的方法被执行。
- 一种非易失性计算机可读介质,其包括计算机代码,当所述计算机代码被执行时,如权利要求1-6中任一项所述的方法被执行。
- 一种计算机设备,所述计算机设备包括存储器和处理器,所述存储器中存储有计算机代码,所述处理器配置为通过执行所述计算机代码来执行如权利要求1-6中任一项所述的方法。
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