WO2016170065A1 - Dispositif à vanne et procédé pour faire fonctionner un dispositif à vanne - Google Patents

Dispositif à vanne et procédé pour faire fonctionner un dispositif à vanne Download PDF

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Publication number
WO2016170065A1
WO2016170065A1 PCT/EP2016/058912 EP2016058912W WO2016170065A1 WO 2016170065 A1 WO2016170065 A1 WO 2016170065A1 EP 2016058912 W EP2016058912 W EP 2016058912W WO 2016170065 A1 WO2016170065 A1 WO 2016170065A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
auxiliary valve
connection
main
auxiliary
Prior art date
Application number
PCT/EP2016/058912
Other languages
German (de)
English (en)
Inventor
Hans-Walter Schneider
Original Assignee
Mobilplan Industrie- Und Umwelttechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mobilplan Industrie- Und Umwelttechnik filed Critical Mobilplan Industrie- Und Umwelttechnik
Priority to EP16721710.8A priority Critical patent/EP3286434A1/fr
Publication of WO2016170065A1 publication Critical patent/WO2016170065A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/22—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by means of valves
    • F04B49/24—Bypassing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/01—Pressure before the pump inlet

Definitions

  • Valve device and method for operating the valve device are Valve device and method for operating the valve device
  • the invention relates to a valve device according to the preamble of claim 1 and a corresponding method for operating such a valve device.
  • the valve device is used in particular for connecting a vacuum pump to the vacuum piping of a clean room.
  • the vacuum piping is usually performed by a partition or a floor ceiling, so that the vacuum pump and the valve device can be arranged separately from the actual clean room in a pump room. This has the advantage that the valve device and in particular the vacuum pump need not be operated within the clean room.
  • valve device in addition to the main connection, which is formed between an inlet port and an outlet port and having a main valve, with a bypass connection, in which an auxiliary valve is arranged.
  • the bypass connection has a significantly smaller free flow area than the main connection, initially only the bypass connection is opened to achieve a gradual pressure reduction within the vacuum piping. Only when a correspondingly low pressure has been reached, the main connection is opened.
  • the invention is based on the object to provide a valve device and a corresponding method, with a review of the vacuum pump, in particular its pump performance, with little effort is possible.
  • the solution should allow in particular easy retrofitting.
  • a second auxiliary valve is arranged in the flow direction behind the first auxiliary valve, wherein the measuring point is arranged between the first auxiliary valve and the second auxiliary valve.
  • a pressure gauge is connected to the measuring point, which is in particular connected signal-transmitting to an external control device.
  • the connection can be wireless or wired.
  • the pressure gauge can serve for continuous or periodic pressure measurement.
  • the pressure measurement can be carried out automatically, without having to access the valve device by an operator.
  • a request can be initialized via the control device, wherein the control device can be arranged in the clean room.
  • the control device it is also possible to design the control device as a mobile device or to integrate in a smartphone or the like.
  • the main valve, the first auxiliary valve and the second auxiliary valve are controllable via the control device.
  • the entire valve device can then be operated via the control device.
  • status queries that is, which valve is open or closed, can be made via the control device and displayed there.
  • the bypass connection has a smaller diameter than the main connection, wherein the diameter ratios are in particular at most 1:10. An even smaller diameter ratio is preferred.
  • a throttle point is formed in the bypass connection upstream of the first auxiliary valve. This serves to reduce the free cross section of the bypass connection to ensure a gradual pressure equalization.
  • the first auxiliary valve is designed as a normally open valve and the second auxiliary valve is designed as a normally closed valve.
  • This embodiment has the advantage that both valves can be kept in the normal position during operation. Closing the first auxiliary valve is only necessary to check the pump power, while the second auxiliary valve only has to be opened during commissioning to establish a corresponding pressure equalization via the bypass connection. The energy required for the operation of the auxiliary valves is thus kept low.
  • the bypass connection is first opened when the main connection is closed and the main connection is opened only after a predetermined period of time or below a predetermined pressure difference between the inlet connection and the outlet connection becomes. The occurrence of turbulence within the vacuum piping is thus avoided. Rather, so to speak, a soft start with a gradual pressure equalization takes place. The pump, the process plant and the associated measuring devices and vacuum pumps are therefore spared.
  • the main connection and the bypass connection is closed to detect a pump power and then carried out a pump-side pressure measurement in the bypass connection.
  • closing the main connection and the bypass connection prevents the influence of the vacuum piping on the measurement result. Rather, a relatively accurate measurement of the pressure and thus the pump power can be done.
  • the main valve and the first auxiliary valve closed and the second auxiliary valve are opened, wherein a detected in the bypass connection between the first auxiliary valve and the second auxiliary valve pressure is transmitted to a control device.
  • the detection of the pump power can be initiated, for example, via the control device, so that an external review, for example, from the clean room itself is possible.
  • the acquisition of the pump power takes only relatively little time, so relatively often a corresponding measurement can be performed. Process reliability is thus increased.
  • the pump power is detected periodically. There is thus an automatic monitoring and thus an increase in process reliability.
  • a detection of the pump power is detected when a fault occurs, such as, for example, a corresponding pressure change at the measuring point when the second auxiliary valve is closed. This also serves to increase process reliability.
  • Fig. 1 shows a schematic structure of a valve device.
  • FIG. 1 schematically shows a valve device 1 which has an inlet connection 2 and an outlet connection 3.
  • the inlet port 2 is connected to a vacuum piping 4, which leads to a clean room.
  • a vacuum pump 5 is connected, which can generate a vacuum, in particular a high vacuum, via the valve device 1 in the vacuum piping 4.
  • the valve device 1 has a main connection 6 between the inlet connection 2 and the outlet connection 3, in which a main valve 7 is arranged, with which the main connection 6 can be opened or closed.
  • the main valve 7 is designed for example as a switching valve, which is controlled electrically, pneumatically or hydraulically.
  • Parallel to the main valve 7, a bypass connection 8 is provided, via which the main valve 7 can be bypassed.
  • the bypass connection 8 in this case has a smaller free flow cross-section than the main connection 6, which can be achieved by a correspondingly smaller pipe diameter, but also by a throttle point 9.
  • a first auxiliary valve 10 and a second auxiliary valve 1 1 are arranged in series one behind the other in the flow direction, wherein between the first auxiliary valve 10 and the second auxiliary valve 1 1, a measuring point 12 is formed.
  • a pressure measuring device 13 is arranged at the measuring point 12, which can measure a pressure of the bypass connection 8 and transmitted to a control device 14.
  • the valve device 1 enables a gentle start-up, in which initially a pressure equalization between the outlet port 3, to which a particularly low pressure is applied during operation of the vacuum pump 5, to the inlet port 2 and the vacuum piping.
  • This pressure equalization takes place via the bypass connection 8, which has only a very small flow cross-section, so that no turbulence occurs. Only after reaching a correspondingly small pressure difference is the main valve 7 and thus the main connection 6 released.
  • the bypass connection 8 can be closed via one of the auxiliary valves 10, 11. In this case, it is preferable to close the bypass connection 8 via the second auxiliary valve 11, so that monitoring of the negative pressure in the vacuum tube system or in front of the main valve 7 can take place via the measuring point 12 or the pressure gauge 13.
  • the main valve 7 and the first auxiliary valve 10 is closed and the second auxiliary valve 1 1 is opened.
  • the measuring point 12 with the pressure gauge 13 is located relatively close to the outlet port 3 or to the vacuum pump 5, so that the negative pressure generated by the vacuum pump 5 can be detected relatively accurately.
  • a disturbance by the vacuum piping is prevented by the closed main valve 7 and the closed first auxiliary valve 10. Due to the relatively small enclosed volume, a stable state is reached relatively quickly, in which a precise measurement can be made. Subsequently, the valve device can be opened again during commissioning, so it can first be done via the bypass connection 8 pressure equalization until the main connection 6 is released by opening the main valve 7.
  • the second auxiliary valve 1 1 close, so as to lock the bypass connection.
  • the first auxiliary valve 10 is formed as a normally open and the second auxiliary valve 1 1 as a normally closed valve. This corresponds to the desired state of the auxiliary valves during normal operation.
  • a measurement of the pump power or a monitoring of the vacuum pump 5 can thus be effected by simply controlling valves, wherein a measured value can be transmitted to an arbitrarily placed control device 14. Direct access to the valve device or the vacuum pump is not required for this purpose. Rather, a check can be carried out relatively easily from the outside via the control device, wherein if appropriate this can also be done automatically or depending on the situation. This ensures high process reliability with little effort.
  • the invention is not limited to the described embodiment, but can be modified in many ways.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Details Of Valves (AREA)

Abstract

L'invention concerne un dispositif à vanne (1) destiné au raccordement d'une pompe à vide (5) à une conduite de vide (4) d'une salle blanche, comprenant un raccord d'entrée (2) et un raccord de sortie (3). L'invention concerne également un procédé pour faire fonctionner le dispositif à vanne. Une liaison principale (6), dans laquelle est disposée une vanne principale (7), est formée entre le raccord d'entrée (2) et le raccord de sortie (3). Un liaison de contournement (8) dans laquelle est disposée une première vanne auxiliaire (10) est formée en parallèle de la vanne principale (7). En vue de pouvoir surveiller le fonctionnement de la pompe à vide le plus simplement possible, un point de mesure (12) est formé dans la liaison de contournement (8) dans le sens de l'écoulement derrière la première vanne auxiliaire (10).
PCT/EP2016/058912 2015-04-23 2016-04-21 Dispositif à vanne et procédé pour faire fonctionner un dispositif à vanne WO2016170065A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP16721710.8A EP3286434A1 (fr) 2015-04-23 2016-04-21 Dispositif à vanne et procédé pour faire fonctionner un dispositif à vanne

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015106279.8 2015-04-23
DE102015106279.8A DE102015106279A1 (de) 2015-04-23 2015-04-23 Ventileinrichtung und Verfahren zum Betrieb der Ventileinrichtung

Publications (1)

Publication Number Publication Date
WO2016170065A1 true WO2016170065A1 (fr) 2016-10-27

Family

ID=55963307

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/058912 WO2016170065A1 (fr) 2015-04-23 2016-04-21 Dispositif à vanne et procédé pour faire fonctionner un dispositif à vanne

Country Status (3)

Country Link
EP (1) EP3286434A1 (fr)
DE (1) DE102015106279A1 (fr)
WO (1) WO2016170065A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5575853A (en) * 1994-07-01 1996-11-19 Tokyo Electron Limited Vacuum exhaust system for processing apparatus
JP2003139080A (ja) * 2001-10-31 2003-05-14 Ulvac Japan Ltd 真空排気装置の運転方法
WO2012059679A1 (fr) * 2010-11-05 2012-05-10 Centre National De La Recherche Scientifique - Cnrs - Installation de pompage pour l'obtention d'un vide poussé et procédé de pompage mettant en oeuvre une telle installation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3235025C2 (de) * 1982-09-22 1994-05-11 Erbe Elektromedizin Saugeinrichtung zur Applikation von Saugelektroden und zur Saugmassage
ITVI980127A1 (it) * 1998-06-29 1999-12-29 Cartigliano Off Spa Impianto di essicazione ad alto vuoto equilibrato per pelli industria li e prodotti similari
WO2010124907A1 (fr) * 2009-04-28 2010-11-04 Boehringer Ingelheim International Gmbh Procédé de contrôle de l'étanchéité d'un réservoir rempli d'un fluide
DE102013114383B4 (de) * 2013-12-18 2016-04-07 Khs Gmbh Reinigungsvorrichtung sowie Verfahren zum Reinigen von Behältern

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5575853A (en) * 1994-07-01 1996-11-19 Tokyo Electron Limited Vacuum exhaust system for processing apparatus
JP2003139080A (ja) * 2001-10-31 2003-05-14 Ulvac Japan Ltd 真空排気装置の運転方法
WO2012059679A1 (fr) * 2010-11-05 2012-05-10 Centre National De La Recherche Scientifique - Cnrs - Installation de pompage pour l'obtention d'un vide poussé et procédé de pompage mettant en oeuvre une telle installation

Also Published As

Publication number Publication date
EP3286434A1 (fr) 2018-02-28
DE102015106279A1 (de) 2016-10-27

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