WO2016169054A1 - Structure de guide d'ondes et puce à base de silicium - Google Patents

Structure de guide d'ondes et puce à base de silicium Download PDF

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Publication number
WO2016169054A1
WO2016169054A1 PCT/CN2015/077406 CN2015077406W WO2016169054A1 WO 2016169054 A1 WO2016169054 A1 WO 2016169054A1 CN 2015077406 W CN2015077406 W CN 2015077406W WO 2016169054 A1 WO2016169054 A1 WO 2016169054A1
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WO
WIPO (PCT)
Prior art keywords
waveguide
optical waveguide
channel
multimode interference
interference optical
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Application number
PCT/CN2015/077406
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English (en)
Chinese (zh)
Inventor
魏玉明
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华为技术有限公司
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Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to CN201580077736.1A priority Critical patent/CN107407775A/zh
Priority to PCT/CN2015/077406 priority patent/WO2016169054A1/fr
Publication of WO2016169054A1 publication Critical patent/WO2016169054A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths

Definitions

  • the present invention relates to the technical field of optical chips, and more particularly to a waveguide structure and a silicon-based chip.
  • silicon-based photoelectrons uniformly fabricate devices such as lasers, modulators, detectors, and optical switches onto silicon-on-insulator (SOI) materials, which are silicon-based chips.
  • SOI silicon-on-insulator
  • the multimode interference structure (Fig. 1) is widely used. It can be used as a beam splitter, a combiner or other devices to form optical switches, modulators, optical terminals, etc. .
  • a classical 2 ⁇ 2 multimode interference structure consists of an input/output channel 1 and a multimode interference optical waveguide 2, the principle of which is to excite many modes by light excitation in the multimode interference portion.
  • the light field distribution allowed by the waveguide creates an interference phenomenon that eventually forms an image of the input light at a particular location.
  • the most important performance parameters are loss and back reflection characteristics.
  • the invention provides a waveguide structure and a silicon-based chip for reducing light loss and improving the adverse effects of reflected light on the device.
  • a waveguide structure comprising a multimode interference optical waveguide and an input/output channel disposed on both sides of the multimode interference optical waveguide, wherein the multimode interference optical waveguide is provided with useful A waveguide channel that dissipates reflected light generated in the multimode interference optical waveguide.
  • each of the waveguide channels has a structure in which the width gradually decreases in an outward direction of the multimode interference optical waveguide.
  • a minimum value of a width of an end of the waveguide channel away from the multimode interference optical waveguide is smaller than the multimode interference light The single mode width of the waveguide at a specified wavelength.
  • the length of the waveguide channel meets a set length, where the set length is greater than a width of the waveguide channel
  • the width of the waveguide channel connected to the multimode interference optical waveguide is converted to a single mode width while satisfying the minimum length required without introducing a loss condition.
  • the sidewall of the waveguide channel has a concave arc shape.
  • the number of input/output channels located on the same side of the multimode interference optical waveguide is multiple, and at least one side of the plurality of interference partial optical waveguides, At least one of the waveguide channels is disposed between adjacent input/output channels.
  • the waveguide channels are symmetrically disposed on opposite sides of the multimode interference optical waveguide.
  • each of the input/output channels passes through the transition part of the optical waveguide
  • the multimode interference optical waveguide is connected, wherein the transition portion of the optical waveguide has a gradually increasing width, and a narrower end is connected to the input/output channel, and a wider end is interfering with the multimode Optical waveguide connection.
  • the sidewall of the transition portion optical waveguide is an arcuate sidewall having a gradually changing slope and no abrupt change.
  • the sidewall of the transition portion optical waveguide is connected to the input/output channel and the multimode interference optical waveguide The slope of the joint is the same.
  • a silicon-based chip comprising the waveguide structure of any of the above.
  • the present invention provides a waveguide channel on the multimode interference optical waveguide, which can slowly dissipate the light originally to be reflected back.
  • the light reflected back into the input channel is reduced, the reflectivity of the waveguide structure is reduced, thereby avoiding the significant influence of the reflected light on the performance of the device, and the quality of the output optical signal is degraded, the crosstalk is enhanced, and the multimode interference structure is connected in front of the structure.
  • the device can slowly dissipate the light originally to be reflected back.
  • the light reflected back into the input channel is reduced, the reflectivity of the waveguide structure is reduced, thereby avoiding the significant influence of the reflected light on the performance of the device, and the quality of the output optical signal is degraded, the crosstalk is enhanced, and the multimode interference structure is connected in front of the structure. The case of the device.
  • FIG. 1 is a perspective view of a waveguide structure in the prior art
  • FIG. 2 is a schematic view showing a state of reflected light in a waveguide structure in the prior art
  • FIG. 3 is a schematic structural diagram of a waveguide structure according to an embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a waveguide channel according to an embodiment of the present invention.
  • FIG. 5 is another schematic structural diagram of an optical waveguide structure according to an embodiment of the present invention.
  • FIG. 6 is another schematic structural diagram of an optical waveguide structure according to an embodiment of the present invention.
  • FIG. 7 is another schematic structural diagram of an optical waveguide structure according to an embodiment of the present invention.
  • FIG. 9 is a spectrum diagram of an optical waveguide structure according to an embodiment of the present invention.
  • FIG. 3 As shown in FIG. 3, FIG. 5 and FIG. 6, FIG. 3, FIG. 5 and FIG. 6 are schematic diagrams showing the waveguide structures of different structures provided in this embodiment.
  • Embodiments of the present invention provide a waveguide structure including a multimode interference optical waveguide 20 and an input/output channel 10 disposed on both sides of the multimode interference optical waveguide 20, wherein the multimode interference optical waveguide 20 is connected for The waveguide channel 30 that dissipates the reflected light generated in the multimode interference optical waveguide is dissipated.
  • the input/output channel 10 can be used both as a waveguide for light input and as a waveguide for light output. In specific use, it can only have one function, and the input is located on both sides of the multimode interference portion waveguide. / Output channel 10, when the input/output channel 10 on one side is used as an input channel, and the input/output channel 10 on the other side is used as an output channel.
  • the waveguide channel 30 can slowly dissipate the light originally to be reflected back, reduce the light reflected back into the input channel, and reduce the waveguide.
  • the reflectivity of the structure avoids the following drawbacks in the prior art: reflected light has a significant effect on the performance of the device, which causes a decrease in the quality of the output optical signal, an increase in crosstalk, and also jeopardizes the connection of the front of the multimode interference structure. Device. Especially when cascading multiple multimode interference structures, such as optical switch matrices, reflected light will always exist and propagate in the optical path, which adversely affects system performance.
  • FIG. 4 shows the wear and tear of light in the optical waveguide. Specifically, the light is transmitted in the waveguide, and from the perspective of the ray, the reflection is continuously performed at the two interfaces of the waveguide. And refraction, when the refractive index distribution of the optical waveguide satisfies n1>n2, n1>n3 At the interface 1 and interface 2, total reflection may occur, that is, the refraction angle ⁇ 3 is equal to 90°, where n1 is the refractive index of the waveguide channel, and n2 and n3 are the refractive indices of the medium on both sides of the waveguide channel.
  • the incident angle ⁇ 1 also becomes smaller so that the total reflection condition is no longer satisfied, and the light leaks outward through the interface one and the interface two, thereby consuming the light.
  • the input/output channels on both sides of the multimode interference optical waveguide 20 in the light guiding structure 10 is symmetrically disposed, and the number of input/output channels 10 on the same side of the multimode interference optical waveguide 20 on one side is plural, and on at least one side of the plurality of interference portion optical waveguides, adjacent inputs/ A waveguide channel 30 is disposed between the output channels 10.
  • the input/output channel 10 on the same side is an input channel
  • the input/output channel 10 on the other side is an output channel.
  • the number of the waveguide channels 30 is set corresponding to the input/output channel 10 as described above.
  • the waveguide channel 30 may be disposed on both sides of the multimode interference optical waveguide 20, or the waveguide channel 30 may be disposed on one side of the multimode interference optical waveguide 20, as shown in FIG. As shown in FIG. 6 and FIG. 7, when the waveguide channel 30 is disposed on both sides, the symmetry of the waveguide channel 30 is disposed on both sides of the multimode interference optical waveguide 20.
  • the input/output channel 10 can be based on actual conditions.
  • a waveguide channel (shown in FIG. 6) may be disposed between the two adjacent input/output channels 10 on the same side, or may be set.
  • the specific settings are as needed. As shown in FIG. 3, when the optical waveguide channel 30 is disposed on one side, the optical waveguide channel 30 is disposed on one side of the output channel.
  • the specific settings can be determined according to actual needs.
  • each waveguide channel 30 has a structure in which the width of the waveguide channel 30 gradually decreases in the outward direction of the multimode interference optical waveguide. That is, the waveguide channel 30 is a structure in which one end is wide and one end is narrow, wherein the wide end is in communication with the multimode interference optical waveguide 20, so that more light can enter the optical waveguide channel 30, and the end is wider and narrower at one end.
  • the structure increases the incident angle of the light, making it easier for the light to be dissipated within the waveguide channel 30, thereby reducing the reflection of light back into the input channel.
  • the sidewall of the waveguide channel 30 may adopt a linear sidewall.
  • the waveguide channel 30 has a trapezoidal structure, so that the light can be better in the waveguide channel. 30 internal wear and tear.
  • the trapezoidal structure is an isosceles trapezoidal structure, so that light energy is depleted in the waveguide channel 30 when applied to a plurality of input channels.
  • the waveguide channel 30 adopts another preferred embodiment, that is, the sidewall of the waveguide channel 30 has a concave arc shape.
  • the sidewall of the waveguide channel 30 has a concave arc shape.
  • the minimum value of the width of one end of the waveguide channel 30 away from the multimode interference optical waveguide 20 is smaller than the single mode width of the multimode interference optical waveguide 20 at a specified wavelength.
  • the single mode width the optical waveguide determined by the refractive index distribution on one section, we can find the spatial distribution of the electric field/magnetic field strength by discretizing the Maxwell's equations (the classical formula that all electromagnetic fields must satisfy). The situation, a distribution that is calculated in this way, is the solution of Maxwell's equations, which we call a pattern. The mode with the lowest order is called the fundamental mode.
  • the optical waveguide satisfies the single mode condition (there is already an approximation Calculated formula).
  • the single mode width is wavelength dependent. Since optical devices typically operate over a range of wavelengths, we choose a single mode width at the center wavelength.
  • the specified wavelengths are common wavelengths such as 1550 nm and 1310 nm.
  • the length of the waveguide channel 30 also satisfies the set length, and the set length is greater than the width of the waveguide channel 30 from the width of the waveguide channel 30 connected to the multimode interference optical waveguide 20 to the single mode width, while satisfying the loss of introduction.
  • the lossless length is: the mode described in the single mode width, which are the solutions of Maxwell's equations, so they can propagate without loss in the optical waveguide, but when the refractive index distribution occurs in the transmission direction of the optical waveguide Studies have shown that only when the length of this mutation is very small can it be considered lossless. In practical applications, we often want to make some changes in the width of the waveguide. Then we can achieve a lossless width transition by cascading a number of segments (or smoothing into a curve) without loss. The shortest length required is called lossless length.
  • each input/output channel 10 is connected to the multimode interference optical waveguide 20 through a transition portion optical waveguide 40, wherein the transition portion of the optical waveguide 40 is gradually increased in width.
  • the structure has a narrower end connected to the input/output channel 10 and a wider end connected to the multimode interference optical waveguide.
  • the portion where the mode interference optical waveguide 20 is connected is provided with a transition portion optical waveguide 40 which also has a structure in which one end is wide and one end is narrow, and the narrow end is connected to the input/output channel 10, and the wide end is multimode.
  • the interference optical waveguide 20 is connected.
  • the transition portion of the optical waveguide 40 when light is reflected to the input channel, the light is reflected back through the sidewall of the transition portion of the optical waveguide 40 to prevent light from entering the input channel.
  • the side wall of the transitional optical waveguide is an inclined side wall, and when the reflected light illuminates the transition portion of the light.
  • the incident angle of the reflected light is smaller than the incident angle directly incident on the sidewall of the input channel, so that the light is more easily consumed in the transition portion of the optical waveguide 40, thereby reducing the reflection of the reflected light from the input channel, thereby Improves the adverse effects of reflected light on the device.
  • the sidewall of the transition portion optical waveguide 40 is a curved sidewall having a gradually changing slope and no abrupt change.
  • the curved sidewall is a curved sidewall protruding from the outside of the transitional optical waveguide, further reducing the incident angle of the reflected light.
  • the sidewall of the transition portion optical waveguide 40 has the same slope at the junction with the input/output channel 10 and the multimode interference optical waveguide 20. Thereby, the loss of light energy caused by the mutation occurring at the junction is avoided.
  • FIG. 8 is a 2 ⁇ 2 multimode interference structure in the prior art (shown in FIG. 2 Reflected light spectrum of the structure)
  • FIG. 9 is a reflected light spectrum of the 2 ⁇ 2 multimode interference structure (the structure shown in FIG. 5) provided by the embodiment, wherein 1# represents the first input channel, and 2# represents The second input channel, as can be seen from the comparison of FIG. 8 and FIG. 9, the reflected light of the optical waveguide structure provided by this embodiment is significantly reduced.
  • the present invention is capable of reducing the reflection intensity by 10 dB; the corresponding cost to be paid is small, and the structure of the present invention has little effect on the insertion loss of the device, and does not increase the process difficulty or introduce additional Process steps; in addition, a wide range of uses: multimode interference structures are widely used in the field of optics.
  • Embodiments of the present invention also provide a silicon-based chip including the waveguide structure of any of the above.
  • the waveguide channel 30 on the multimode interference optical waveguide 20
  • the wave The guiding channel can slowly dissipate the light originally to be reflected back, reduce the light reflected back into the input channel, and reduce the reflectivity of the waveguide structure, thereby avoiding the following defects in the prior art: the performance of the reflected light on the device
  • the effect is significant, which causes the quality of the output optical signal to decrease, the crosstalk to increase, and the device connected to the front of the multimode interference structure.
  • reflected light will always exist and propagate in the optical path, which adversely affects system performance.

Abstract

L'invention concerne une structure de guide d'ondes et une puce à base de silicium contenant la structure de guide d'ondes. La structure de guide d'ondes comprend un guide d'ondes optique multimode à interférence (20) et un canal d'entrée/sortie (10) situé sur deux côtés du guide d'ondes optique multimode à interférence (20), le guide d'ondes optique multimode à interférence (20) comprenant un canal de guide d'ondes (30) utilisé pour dissiper la lumière réfléchie générée dans le guide d'ondes optique multimode à interférence (20), et le canal de guide d'ondes (30) peut dissiper lentement la lumière qui serait réfléchie à l'origine, de manière à réduire les rayons lumineux réfléchis vers le canal d'entrée (10), ce qui permet de réduire la réflectivité de la structure de guide d'ondes. La structure de guide d'ondes permet d'éviter les cas où la qualité d'un signal lumineux de sortie diminue, une diaphonie augmente, et un dispositif monté en amont d'une structure d'interférence multi-mode est endommagé.
PCT/CN2015/077406 2015-04-24 2015-04-24 Structure de guide d'ondes et puce à base de silicium WO2016169054A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201580077736.1A CN107407775A (zh) 2015-04-24 2015-04-24 一种波导结构及硅基芯片
PCT/CN2015/077406 WO2016169054A1 (fr) 2015-04-24 2015-04-24 Structure de guide d'ondes et puce à base de silicium

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PCT/CN2015/077406 WO2016169054A1 (fr) 2015-04-24 2015-04-24 Structure de guide d'ondes et puce à base de silicium

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109407211A (zh) * 2018-11-30 2019-03-01 武汉邮电科学研究院有限公司 一种波导元件及分合束器

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KR20020008455A (ko) * 2000-07-20 2002-01-31 허남기 광분배기와 파장분할다중화모듈을 위한 저손실다중모드간섭계
JP2006323135A (ja) * 2005-05-19 2006-11-30 Nippon Telegr & Teleph Corp <Ntt> 多モード干渉型光導波路
US20070127868A1 (en) * 2005-12-06 2007-06-07 Hiroshi Wada Multi-mode optical coherence device and fabrication method thereof
CN102422190A (zh) * 2009-05-13 2012-04-18 塞图尼股份公司 具有低反射率的光波导
JP2013137360A (ja) * 2011-12-28 2013-07-11 Mitsubishi Electric Corp 光合分波素子およびマッハツェンダ型光変調器

Family Cites Families (1)

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Publication number Priority date Publication date Assignee Title
EP0663111B1 (fr) * 1993-08-04 1996-11-13 Koninklijke Philips Electronics N.V. Composant d'imagerie multimode et laser annulaire pourvu d'un tel composant

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020008455A (ko) * 2000-07-20 2002-01-31 허남기 광분배기와 파장분할다중화모듈을 위한 저손실다중모드간섭계
JP2006323135A (ja) * 2005-05-19 2006-11-30 Nippon Telegr & Teleph Corp <Ntt> 多モード干渉型光導波路
US20070127868A1 (en) * 2005-12-06 2007-06-07 Hiroshi Wada Multi-mode optical coherence device and fabrication method thereof
CN102422190A (zh) * 2009-05-13 2012-04-18 塞图尼股份公司 具有低反射率的光波导
JP2013137360A (ja) * 2011-12-28 2013-07-11 Mitsubishi Electric Corp 光合分波素子およびマッハツェンダ型光変調器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109407211A (zh) * 2018-11-30 2019-03-01 武汉邮电科学研究院有限公司 一种波导元件及分合束器

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