WO2016167516A1 - Skin treatment device using plasma - Google Patents
Skin treatment device using plasma Download PDFInfo
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- WO2016167516A1 WO2016167516A1 PCT/KR2016/003746 KR2016003746W WO2016167516A1 WO 2016167516 A1 WO2016167516 A1 WO 2016167516A1 KR 2016003746 W KR2016003746 W KR 2016003746W WO 2016167516 A1 WO2016167516 A1 WO 2016167516A1
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- plasma
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B18/04—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body by heating
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/44—Applying ionised fluids
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/06—Radiation therapy using light
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
- A61N2005/1085—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy characterised by the type of particles applied to the patient
- A61N2005/1087—Ions; Protons
Definitions
- the state of matter can be divided into solids, liquids, and gases.
- energy When energy is applied to a gaseous substance, electrons are separated from atoms or molecules, and the plasma state is a mixture of electrons, ions, and neutral particles (molecules and atoms). Becomes
- These plasmas contain, for example, oxy-, hydroxyl-, and nitrogen radicals, electronically excited atoms or molecules, and chemically active species such as ultraviolet (UV) photons, ions, and radicals, which are affected by movement along the electric field. Lightly and gently tapping like a shower will irritate and sterilize the affected area.
- UV ultraviolet
- Plasma is easier to generate in a low pressure vacuum of 1 mTorr to 100 Torr than at atmospheric pressure, but in order to generate plasma at such low pressures, it is necessary to build a vacuum vessel and install a vacuum pump to maintain the vacuum. There are some constraints. For this reason, many studies on the method of generating plasma at atmospheric pressure instead of vacuum have recently been made possible to generate plasma at atmospheric pressure or higher.
- the plasma can be divided into thermal plasma discharge and non-thermal plasma discharge according to the method of generating, thermal plasma discharge is a method of ionizing the gas using heat, non-thermal plasma method minimizes the heating of the gas mainly It is a method of ionizing by heating electrons.
- the nonthermal plasma method is also referred to as non-equilibrium plasma because only electrons have a high temperature and the remaining ions and neutral particles are thermally unbalanced by maintaining a low temperature.
- the present invention relates to a nonthermal plasma method, which typically uses a dielectric barrier discharge (DBD).
- DBD dielectric barrier discharge
- DBD Dielectric Barrier Discharge
- a method of generating a dielectric barrier discharge is as follows.
- a dielectric is provided between two parallel conductor electrodes, and an alternating current (AC) type high voltage is applied to the conductor electrodes.
- AC alternating current
- the electrons generate radicals and ions between the electrodes.
- Such dielectrics used in dielectric barrier discharges are insulated, thus limiting current, preventing arc formation, and being dielectric, allowing charge accumulation.
- plasma' is to ensure the stability of the human body to electrical shock.
- the skin tissue has a lot of flexion and is not flat, so there is a protruding portion in the skin tissue, whereby the plasma is concentrated to the protruding portion or the skin tissue close to the dielectric, and thus the skin is damaged. have. In other words, it is difficult to generate uniform plasma.
- the conventional technology maintains an interval for generating plasma between the dielectric and skin tissue, but also has a problem in that the gap is present in an open form, which causes the plasma to leak to the outside to reduce the therapeutic effect.
- an object of the present invention is to provide a plurality of through-holes in the substrate to evenly distribute the generation of plasma to prevent damage to the skin, by providing a gap maintaining portion in the entire lower portion of the housing It provides a skin treatment device using plasma that prevents the leakage of plasma, separates the electrode into a plurality of shapes, makes power control easier, and forms an air layer between the substrate and the dielectric part to induce more stable current flow. It is.
- the skin treatment apparatus using a plasma the skin treatment apparatus for treating the skin using the plasma generated from the plasma generator, the plasma generator, the housing;
- An electrode positioned inside the housing to transfer power for skin treatment;
- a substrate having a plurality of through holes positioned below the electrode and having an inner surface coated or plated by a conductive material and electrically connected to the electrode;
- a dielectric part positioned below the substrate, wherein power from the electrode is supplied to the dielectric part through a through hole formed in the substrate to generate plasma in a space between the dielectric part and the skin.
- the plasma generator further includes an air layer between the substrate and the dielectric part, and power from the electrode is passed through the air layer and through holes formed in the substrate. Characterized in that supplied to the negative.
- the electrodes are characterized in that separated in a dot form arranged independently.
- the dielectric part is characterized in that any one of quartz, sapphire, glass, ceramic, polymer film, polyetherimide (PEI).
- the lower end portion of the housing is characterized in that it further comprises a spacing portion protruding downward.
- the gap maintaining part is characterized in that it is installed on the entire lower end of the housing.
- the present invention configured as described above prevents skin damage by evenly distributing the plasma in the space between the dielectric part and the skin, thereby reducing plasma concentration due to the bending of the skin.
- the current flowing into the dielectric part can be controlled to stably and comfortably treat the skin.
- the gap maintaining part forms a constant plasma active region between the dielectric part and the skin and separates it from the outside so that plasma leakage does not occur, thereby increasing the therapeutic effect.
- FIG. 1 is a block diagram showing the overall structure of the present invention.
- FIG. 2 is a view showing a cross-sectional structure of a plasma generator according to the present invention.
- FIG 3 is a cross-sectional view of a plasma generator having an air layer according to the present invention.
- FIG. 4 is a view showing the bottom portion of the plasma generator according to the present invention.
- FIG. 6 is an equivalent circuit of a plasma generator having an air layer according to the present invention.
- Skin treatment apparatus using a plasma according to the present invention is composed of a power supply unit 100, a high voltage module 300, a plasma generator 200, the high voltage module 300 is a control unit 310 ), A signal generator 321, an amplifier 322, and a transformer 323.
- the power supply unit 100 may be an external power source, or may be a battery to be used as a miniaturized portable device.
- the control unit 310 of the high voltage module 300 controls the DC power output from the power supply unit 100 to be converted into high frequency and high voltage AC power.
- the signal generator 321 of the high voltage module 300 is usually 20 kHz or less. Generates a frequency of, and the amplifier 322 of the high voltage module 300 is matched with an impedance of 5 ⁇ 10W.
- the transformer 323 of the high voltage module 300 supplies the frequency output from the amplifier 322 of the high voltage module 300 to the plasma generator 200 to generate plasma.
- the plasma generator 200 is surrounded by a housing 210 as shown in Figure 2, the housing 210 may be cylindrical or polygonal cylindrical shape, the material is preferably non-conductive.
- the skin (S) of the human body is used as a ground electrode for generating a plasma, but by using the skin (S) as a ground electrode, the electrode structure is simplified, there is an advantage that large area discharge is possible. In addition, only when the skin S is close to the electrode, plasma discharge occurs and unnecessary discharge is suppressed, so that power consumption can be reduced.
- the plasma generator 200 is an electrode 220 that receives a high voltage and a high frequency from the transformer 323 through the electrode pin 221, and a portion that is in contact with the electrode 220 while being positioned on the lower surface of the electrode 220.
- the substrate 230 having a disc shape having a plurality of through holes 231 at uniform intervals in the vertical direction, the dielectric portion 240 and the dielectric portion 240 contacting the lower surface of the substrate 230.
- the electrode 220 in order to obtain a uniform output density without a separate control device, it is necessary to make a plurality of separate and independent electrodes instead of a single flat electrode, preferably cm 2 in a dot shape having a diameter of 1 mm.
- the output density can be controlled by arranging 25 dot electrodes per.
- the output power per unit area is 0.1-2W (preferably 1.53W) / cm, and the output voltage is 4-20 (preferably). 9.5-10) kV, the frequency can be implemented 1 ⁇ 30 (preferably 25) kHz.
- the through hole 231 is formed in the substrate 230 similar to the hole shape of the shower in the substrate 230, and the inner surface of the through hole 231 may be coated or plated with a conductive material.
- the thickness and dielectric constant of the dielectric part 240 are related to each other. The larger the dielectric constant, the thinner the dielectric part 240 becomes, and the smaller the dielectric constant, the thicker the dielectric part 240 causes insulation breakdown with respect to the applied voltage. High density plasma can be discharged without.
- the dielectric portion 240 in the present invention may be formed of a material such as quartz, sapphire, glass, ceramics, polymer film, polyetherimide (PEI), the thickness is about 0.1mm ⁇ 3mm, relative dielectric constant Is about 4 to 18, and the greater the dielectric constant of the dielectric part 240, the less the risk of electric shock and heat dissipation, thereby increasing the applied power to increase discharge efficiency.
- a material such as quartz, sapphire, glass, ceramics, polymer film, polyetherimide (PEI)
- PEI polyetherimide
- Polyetherimide (PEI) among the materials of the dielectric part 240 is preferred in the present invention because it exhibits excellent performance as an insulating material under severe conditions due to its high radiation resistance characteristics.
- Plasma gap 212 is maintained at a constant interval by the gap holding unit 211, the interval is preferably 0.5 to 5 mm.
- the gap maintaining part 211 may protrude downward along the entire circumference of the lower edge of the housing 210.
- the power supplied from the electrode 220 is supplied to the dielectric part 240 evenly through a plurality of through holes 231 of the substrate 230, similarly to the shower method, wherein the skin S and the dielectric part 240 are in contact with each other.
- the plasma P is generated evenly by the smooth dielectric barrier discharge of the plasma shower method.
- the output power of about 1W is preferable in order to obtain a smooth dielectric barrier discharge plasma (P) harmless to the human body, and the voltage, frequency, dielectric part applied by the high voltage module 300 to obtain the optimal operating conditions
- P dielectric barrier discharge plasma
- a blue LED (not shown) is further mounted inside the housing 210, preferably above the dielectric part 240, which has a wavelength of about 400 to 680 nm. Since passing through 240 is irradiated to the skin (S) has the effect of calming the skin (S).
- the plasma generator 200 may form the dielectric part 240 at a position spaced apart from the lower surface of the substrate 230.
- an air layer 250 is formed between the substrate 230 and the dielectric part 240.
- the air layer 250 may have a thickness of 0.1 ⁇ 1mm preferably 0.5mm.
- the sensitive skin is more sensitive to skin.
- the plasma can be induced stably. The process will be described later.
- the power supply unit 100 supplies DC power to the high voltage module 300, the high voltage module 300 is the control unit 310
- the signal generator 321, the amplifier 322, and the transformer 323 convert the direct current power into high voltage and high frequency alternating current power and supply it to the electrode 220 through the electrode pin 221 of the plasma generator 200. do.
- the electrode 220 is composed of a plurality of separated and independent electrodes instead of one flat electrode, the output density can be uniformly controlled without a separate control device.
- the power supplied to the electrode 220 is evenly distributed through the plurality of through holes 231 and supplied to the dielectric part 240, thereby providing a plasma in the space between the dielectric part 240 and the skin S acting as an electrode. Is evenly distributed.
- the plasma generator 200 and the affected part generate plasma by the dielectric barrier discharge DBD through the dielectric part 240, and the dielectric part (through the plurality of through holes 231 formed in the substrate 230).
- a plasma having an even distribution in the space between the 240 and the skin S is generated.
- the gap maintaining part 211 is formed to protrude downward along the entire circumference of the lower edge portion of the housing 210, the plasma gap 212 in which the plasma P is generated is isolated from the outside to prevent leakage of the plasma. It is not generated can enhance the therapeutic effect, and the plasma can be evenly distributed by keeping the plasma active region between the dielectric part 240 and the skin S constant.
- 5 (a) is an equivalent circuit of the plasma generator 200 shown in FIG. 2, where 'C a ' is equivalent to the plasma gap 212 and 'C g ' is equivalent to the dielectric part 240.
- FIG 6 shows the case where the air layer 250 is formed in the second embodiment.
- Fig. 6B is an equivalent circuit before the initial discharge occurs
- Fig. 6C is an equivalent circuit when the plasma is generated normally after the initial discharge has occurred.
- the change in impedance is measured until the plasma gap 212 and the air layer 250 are insulated layers with values of C a and C b until just before discharge occurs. action and, once the insulation layer is destroyed and a discharge occurs, acts as a resistance value of R a and R b plasma gap 212 and the air layer 250 is a conductor.
- the air layer 250 between the dielectric part 240 and the substrate 230 acts as a resistance value of R b as a conductor. This prevents the generation of excessive plasma due to the rapid discharge in the early stage of discharge, and can stably induce the plasma on sensitive skin.
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Abstract
The present invention relates to a skin treatment device using plasma. The purpose of the present invention is to generate plasma, which is uniformly distributed, and prevent an injury of the skin by forming a substrate part having a plurality of substrates formed therein, to prevent leakage of plasma by installing a gap-maintaining part over the entire bottom portion of a housing, and to more stably induce plasma by forming an air layer between the substrate part and a dielectric part.
Description
본 발명은 플라즈마를 이용한 피부 치료 장치에 관한 것으로, 더욱 상세하게는 유전체 장벽 방전을 통해 피부에 플라즈마를 원활하게 생성할 수 있는 플라즈마 장치 구성에 관한 것이다.The present invention relates to a skin treatment apparatus using plasma, and more particularly, to a plasma apparatus configuration capable of smoothly generating plasma on the skin through dielectric barrier discharge.
물질의 상태는 고체, 액체, 기체로 나눌 수 있는데 기체 상태의 물질에 에너지를 가해주면 원자나 분자에서 전자가 분리되어 전자와 이온 그리고 중성입자(분자와 원자)들이 혼합된 상태로 존재하는 플라즈마 상태가 된다.The state of matter can be divided into solids, liquids, and gases. When energy is applied to a gaseous substance, electrons are separated from atoms or molecules, and the plasma state is a mixture of electrons, ions, and neutral particles (molecules and atoms). Becomes
이러한 플라즈마 상태에서는, 전자는 다양한 방식에 의해 쉽게 가속될 수 있으며 중성입자는 피처리물의 분자와 충돌하여 화학적 활성종을 생성하고, 이온은 처리하고자 하는 피처리물의 표면에 화학 반응이 일어날 수 있는 조건을 조성함으로, 활성종이 표면에서 활발한 화학 작용을 일으키게 한다. In such a plasma state, electrons can be easily accelerated by various methods, neutral particles collide with molecules of the object to generate chemically active species, and ions can cause chemical reactions on the surface of the object to be treated. By forming the active species, the active species causes active chemical action on the surface.
즉 이러한 플라즈마에는 예컨대 옥시-, 하이드록실-, 및 질소 라디칼, 전자적으로 여기된 원자나 분자, 및 자외선(UV) 광자, 이온, 라디칼 등의 화학적 활성종이 포함되어 있으며 이들은 전기장을 따라 운동하면서 환부를 샤워하듯이 가볍고 부드럽게 두드리면서 환부 내/외를 자극하고 살균하게 된다. These plasmas contain, for example, oxy-, hydroxyl-, and nitrogen radicals, electronically excited atoms or molecules, and chemically active species such as ultraviolet (UV) photons, ions, and radicals, which are affected by movement along the electric field. Lightly and gently tapping like a shower will irritate and sterilize the affected area.
플라즈마는 대기압에서 보다는 1 mTorr ~ 100 Torr 정도의 저압의 진공상태에서 발생시키는 것이 더 쉽지만, 이렇게 낮은 압력에서 플라즈마를 발생시키려면 진공 용기를 제작하고 진공을 유지하기 위해 진공 펌프를 장착해야 하는 등 여러 가지 제약 조건이 따른다. 이러한 이유로 진공이 아닌 대기압에서 플라즈마를 발생시키는 방법에 대한 많은 연구가 이루어져 최근에는 대기압 또는 그 이상의 압력에서도 플라마 발생이 가능하게 되었다.Plasma is easier to generate in a low pressure vacuum of 1 mTorr to 100 Torr than at atmospheric pressure, but in order to generate plasma at such low pressures, it is necessary to build a vacuum vessel and install a vacuum pump to maintain the vacuum. There are some constraints. For this reason, many studies on the method of generating plasma at atmospheric pressure instead of vacuum have recently been made possible to generate plasma at atmospheric pressure or higher.
이러한 플라즈마의 특성과 생성방법의 발전에 의해 플라즈마는 산업의 여러 분야에서 이용되고 있으며, 이 기술을 이용한 미생물의 살균, 상처의 지혈, 치아 미백, 암세포 사멸유도 등 의학 분야에 실용적 시도가 크게 늘어나고 있으며, 특히 피부 치료에 플라즈마를 이용하는 기술은 다른 분야에 비해 일찍 그 가능성이 입증되었고, 심도 있는 연구가 진행되어 오고 있다. Plasma has been used in various fields of the industry due to the development of plasma characteristics and production methods. Practical attempts in medical fields such as microbial sterilization, hemostasis of wounds, teeth whitening, and cancer cell death using this technology are increasing. In particular, the use of plasma, especially for skin treatment, has proved its potential earlier than in other fields, and in-depth research has been conducted.
한편, 플라즈마는 발생시키는 방법에 따라 열적 플라즈마 방전과 비열적 플라즈마 방전으로 나눌 수 있는데, 열적 플라즈마 방전은 가스를 열을 이용하여 이온화를 하는 방법이고, 비열적 플라즈마 방법은 가스의 가열은 최소화하고 주로 전자를 가열하여 이온화 시키는 방법이다. 이 중 비열적 플라즈마 방법은 전자만 높은 온도를 지니고 있고 나머지 이온과 중성입자는 낮은 온도를 유지하여 열적 비평형이기 때문에 비평형 플라즈마(non-equilibrium plasma)라고도 한다.On the other hand, the plasma can be divided into thermal plasma discharge and non-thermal plasma discharge according to the method of generating, thermal plasma discharge is a method of ionizing the gas using heat, non-thermal plasma method minimizes the heating of the gas mainly It is a method of ionizing by heating electrons. The nonthermal plasma method is also referred to as non-equilibrium plasma because only electrons have a high temperature and the remaining ions and neutral particles are thermally unbalanced by maintaining a low temperature.
비열적 플라즈마의 생성은 다음과 같은 과정으로 발생한다. 평면으로 된 두 개의 도체를 일정거리 d 만큼 떨어트려 놓은 뒤 도체에 전압 V를 가해주면 전기장 E는 E = V/d인 조건으로 생성된다. 이 때 전압의 세기가 어느 정도 이상이 되면 하전입자(전자)는 전기장 E에 의해 가속되어 하전입자(전자)가 에너지를 전달받은 후 중성 기체원자 또는 분자와 충돌을 한다. 그리하여 원자 및 분자들은 이온화되며 전자와 이온 그리고 중성입자(분자와 원자)들이 혼합된 플라즈마 상태가 되는 것이다.Generation of the nonthermal plasma occurs by the following process. If two plane conductors are separated by a distance d and a voltage V is applied to the conductor, the electric field E is created under the condition that E = V / d. At this time, when the intensity of the voltage reaches a certain degree or more, the charged particles (electrons) are accelerated by the electric field E, and the charged particles (electrons) receive energy and collide with neutral gas atoms or molecules. Thus, atoms and molecules are ionized and become a plasma state in which electrons, ions, and neutral particles (molecules and atoms) are mixed.
본 발명은 비열적 플라즈마 방법에 관한 것이며, 비열적 플라즈마 방법은 대표적으로 유전체 장벽 방전(DBD; Dielectric Barrier Discharge)을 사용하고 있다.The present invention relates to a nonthermal plasma method, which typically uses a dielectric barrier discharge (DBD).
유전체 장벽 방전(DBD)은 대기압에서 고출력 방전을 발생시킬 수 있으며, 또한 복잡한 펄스 전력 공급기가 없어도 되기 때문에 산업체에서 널리 이용되고 있으며, 특히 오존 발생, 자외선 광원, 오염물질 처리등에 널리 응용되고 있다.Dielectric Barrier Discharge (DBD) is widely used in the industry because it can generate high output discharge at atmospheric pressure and there is no need for complicated pulsed power supply, especially in ozone generation, ultraviolet light source, pollutant treatment.
유전체 장벽 방전(DBD)을 발생시키는 방법은 다음과 같다. 2개의 평행한 도체 전극 사이에 유전체를 구비하고, 도체 전극에 교류(AC)형 고전압을 인가한다. 그리고 전극에 전압이 인가되면 전극 주변의 유전체로 전하축적(build-up)현상이 생기고, 유전체에 쌓여 있던 전자가 방출되면서 전극들 사이에 많은 수의 마이크로 방전이 형성되고 마이크로 방전에 의해 형성되는 고농도 전자들에 의해, 전극사이에 라디칼(Radical) 및 이온들을 발생시킨다.A method of generating a dielectric barrier discharge (DBD) is as follows. A dielectric is provided between two parallel conductor electrodes, and an alternating current (AC) type high voltage is applied to the conductor electrodes. When voltage is applied to the electrode, a build-up phenomenon occurs in the dielectric around the electrode, and electrons accumulated in the dielectric are released, and a large number of micro discharges are formed between the electrodes, and a high concentration is formed by the micro discharge. The electrons generate radicals and ions between the electrodes.
이와같은 유전체 장벽 방전(DBD)에 사용되는 유전체는 절연성을 가지고 있으므로 전류를 제한하고 아크 형성을 방지하며, 유전성을 가지고 있으므로 전하축적을 가능하게 한다.Such dielectrics used in dielectric barrier discharges (DBDs) are insulated, thus limiting current, preventing arc formation, and being dielectric, allowing charge accumulation.
한편, 본 발명인 플라즈마를 이용한 피부 치료 장치'를 포함한 바이오 분야에서 특히 중요한 것은 전기적인 충격에 대한 인체의 안정성 확보이다.On the other hand, particularly important in the field of biotechnology, including the 'skin treatment apparatus using the present invention plasma' is to ensure the stability of the human body to electrical shock.
그런데, 종래의 기술에서는, 피부 조직은 굴곡이 많아 평탄하지 않으므로 피부 조직에는 돌출된 부위가 존재하며, 그로 인해 그 돌출된 부위 또는 유전체와 가까운 피부조직으로 플라즈마가 집중되어 피부가 손상되는 문제점을 가지고 있다. 즉, 균일한 플라즈마의 발생이 어려운 구조이다.By the way, in the prior art, the skin tissue has a lot of flexion and is not flat, so there is a protruding portion in the skin tissue, whereby the plasma is concentrated to the protruding portion or the skin tissue close to the dielectric, and thus the skin is damaged. have. In other words, it is difficult to generate uniform plasma.
또한 인체의 대한 안정성의 문제 외에도 종래의 기술에서는, 전극이 하나의 평면전극으로 되어 있는 경우 파워의 제어가 쉽지 않다는 문제점도 발생한다.In addition to the problem of the stability of the human body in the prior art, there is also a problem that the control of power is not easy when the electrode is a single flat electrode.
또한 종래의 기술에서는 유전체와 피부 조직 사이에 플라즈마가 발생되기 위한 간격을 유지하고 있지만, 그 간격이 개방된 형태로 존재함으로써 플라즈마가 외부로 누설되어 치료 효과를 떨어뜨리는 문제점도 가지고 있다.In addition, the conventional technology maintains an interval for generating plasma between the dielectric and skin tissue, but also has a problem in that the gap is present in an open form, which causes the plasma to leak to the outside to reduce the therapeutic effect.
본 발명은 상기의 문제점을 해결하기 위한 것으로서, 본 발명의 목적은 기판에 다수의 관통홀을 구비함으로써 플라즈마의 발생을 고르게 분포시켜 피부의 손상을 방지하고, 간격유지부를 하우징 하단부위 전체에 구비함으로써 플라즈마의 누설을 방지하며, 전극을 다수개로 분리되어 독립된 모양으로 하여 파워의 제어를 쉽게 하며, 아울러 기판과 유전체부 사이에 공기층을 형성하여 보다 안정적인 전류흐름을 유도하는 플라즈마를 이용한 피부 치료 장치를 제공하는 것이다.The present invention is to solve the above problems, an object of the present invention is to provide a plurality of through-holes in the substrate to evenly distribute the generation of plasma to prevent damage to the skin, by providing a gap maintaining portion in the entire lower portion of the housing It provides a skin treatment device using plasma that prevents the leakage of plasma, separates the electrode into a plurality of shapes, makes power control easier, and forms an air layer between the substrate and the dielectric part to induce more stable current flow. It is.
본 발명은 상기와 같은 목적을 달성하기 위하여, 본 발명에 따른 플라즈마를 이용한 피부 치료 장치는, 플라즈마 발생기로부터 발생된 플라즈마를 이용하여 피부를 치료하는 피부 치료 장치에 있어서, 상기 플라즈마발생기는, 하우징; 상기 하우징의 내부에 위치하여 피부치료를 위한 파워를 전달하는 전극; 상기 전극의 하측에 위치하며, 내측면은 도전물질에 의해 코팅 또는 도금되고 상기 전극에 전기적으로 연결되는 다수의 관통홀을 구비한 기판; 상기 기판의 하측에 위치하는 유전체부를 구비하여, 상기 전극으로부터의 파워가 상기 기판에 형성된 관통홀을 통해 상기 유전체부로 공급되어 유전체부와 피부 사이의 공간에서 플라즈마가 발생되도록 구성된 것을 특징으로 한다. The present invention, in order to achieve the above object, the skin treatment apparatus using a plasma according to the present invention, the skin treatment apparatus for treating the skin using the plasma generated from the plasma generator, the plasma generator, the housing; An electrode positioned inside the housing to transfer power for skin treatment; A substrate having a plurality of through holes positioned below the electrode and having an inner surface coated or plated by a conductive material and electrically connected to the electrode; And a dielectric part positioned below the substrate, wherein power from the electrode is supplied to the dielectric part through a through hole formed in the substrate to generate plasma in a space between the dielectric part and the skin.
본 발명에 따른 플라즈마를 이용한 피부 치료 장치에 있어서, 상기 플라즈마 발생기는 상기 기판과 상기 유전체부 사이에 공기층을 더 구비하여, 상기 전극으로부터의 파워가 상기 기판에 형성된 관통홀과 상기 공기층을 통해 상기 유전체부로 공급되는 것을 특징으로 한다. In the apparatus for treating skin using plasma according to the present invention, the plasma generator further includes an air layer between the substrate and the dielectric part, and power from the electrode is passed through the air layer and through holes formed in the substrate. Characterized in that supplied to the negative.
본 발명에 따른 플라즈마를 이용한 피부 치료 장치에 있어서, 상기 전극은 도트 형태로 분리되어 독립적으로 배열되는 것을 특징으로 한다. In the skin treatment apparatus using a plasma according to the present invention, the electrodes are characterized in that separated in a dot form arranged independently.
본 발명에 따른 플라즈마를 이용한 피부 치료 장치에 있어서, 상기 유전체부는 석영, 사파이어, 유리, 세라믹, 고분자필름, 폴리에터이미드(PEI) 중 어느 하나인 것을 특징으로 한다. In the skin treatment apparatus using the plasma according to the present invention, the dielectric part is characterized in that any one of quartz, sapphire, glass, ceramic, polymer film, polyetherimide (PEI).
본 발명에 따른 플라즈마를 이용한 피부 치료 장치에 있어서, 상기 하우징의 하단부위에는 하측으로 돌출된 간격유지부를 더 구비하는 것을 특징으로 한다.In the skin treatment apparatus using the plasma according to the present invention, the lower end portion of the housing is characterized in that it further comprises a spacing portion protruding downward.
본 발명에 따른 플라즈마를 이용한 피부 치료 장치에 있어서, 상기 간격유지부는 상기 하우징의 하단부위 전체에 설치되어 있는 것을 특징으로 한다.In the skin treatment apparatus using the plasma according to the present invention, the gap maintaining part is characterized in that it is installed on the entire lower end of the housing.
이와같이 구성된 본 발명은 유전체부와 피부 사이의 공간에서 플라즈마를 고르게 분포시켜 피부의 굴곡에 따른 플라즈마 집중현상을 감소시킴으로써 피부 손상을 방지한다.The present invention configured as described above prevents skin damage by evenly distributing the plasma in the space between the dielectric part and the skin, thereby reducing plasma concentration due to the bending of the skin.
그리고 유전체부와 기판 사이에 공기층을 형성함으로써 유전체부로 유입되는 전류를 제어하여 안정적이고 편안하게 피부를 치료할 수 있다.In addition, by forming an air layer between the dielectric part and the substrate, the current flowing into the dielectric part can be controlled to stably and comfortably treat the skin.
또한 별도의 제어장치 없이 출력밀도를 균일하게 가져가기 위해서는 하나의 평면전극이 아닌 다수의 분리되어 독립된 전극으로 만들 수 있어서 파워의 제어가 매우 간단한 장점이 있다.In addition, in order to bring the output density uniformly without a separate control device, it is possible to make a plurality of separate and independent electrodes instead of one flat electrode.
간격유지부에 의해서 유전체부와 피부 사이에 일정한 플라즈마 활성영역을 형성함과 아울러 외부와 격리시킴으로써 플라즈마의 누설이 발생하지 않게 되어 치료 효과를 높일 수 있는 장점이 있다.The gap maintaining part forms a constant plasma active region between the dielectric part and the skin and separates it from the outside so that plasma leakage does not occur, thereby increasing the therapeutic effect.
도1은 본 발명의 전체 구조를 보인 블럭도.1 is a block diagram showing the overall structure of the present invention.
도2는 본 발명에 따른 플라즈마 발생기의 단면 구조를 도시한 도면이다.2 is a view showing a cross-sectional structure of a plasma generator according to the present invention.
도3은 본 발명에 따른 공기층을 구비한 플라즈마 발생기의 단면 구조를 도시한 도면이다.3 is a cross-sectional view of a plasma generator having an air layer according to the present invention.
도4는 본 발명에 따른 플라즈마 발생기의 저면 부위를 도시한 도면이다.4 is a view showing the bottom portion of the plasma generator according to the present invention.
도5는 본 발명에 따른 플라즈마 발생기의 등가회로이다.5 is an equivalent circuit of the plasma generator according to the present invention.
도6은 본 발명에 따른 공기층을 구비한 플라즈마 발생기의 등가회로이다.6 is an equivalent circuit of a plasma generator having an air layer according to the present invention.
이하 본 발명에 첨부된 도면을 참조하여 본 발명의 바람직한 일실시예를 상세히 설명하기로 한다. 우선, 도면들중, 동일한 구성요소 또는 부품들은 가능한 한 동일한 참조부호를 상세히 설명하기로 한다. 본 발명을 설명함에 있어, 관련된 공지기능 혹은 구성에 대한 구체적인 설명은 본 발명의 요지를 모호하지 않게 하기 위하여 생략한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, among the drawings, like elements or parts will be described in detail with the same reference numerals as much as possible. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the subject matter of the present invention.
본 명세서에서 사용하는 용어는 다른 의미임을 필요로 하거나 다른 의미로 표시되지 않는 한 제시된 의미를 갖는다. 또 달리 언급되지 않는 한 단수형은 복수형을 포함하고, 복수형은 단수형을 일반적으로 포함하는 것으로 해석한다.The terms used in this specification have the meanings indicated unless they are required to have a different meaning or are not indicated otherwise. Unless otherwise stated, the singular forms "a", "an", "the" and "the" are intended to be interpreted as generally including the singular.
본 명세서에서 사용되는 정도의 용어 "약", "실질적으로" 등은 언급된 의미에 고유한 제조 및 물질 허용오차가 제시될 때 그 수치에서 또는 그 수치에 근접한 의미로 사용되고, 본 발명의 이해를 돕기 위해 정확하거나 절대 적인 수치가 언급된 개시 내용을 비양심적인 침해자가 부당하게 이용하는 것을 방지하기 위해 사용된다.As used herein, the terms "about", "substantially", and the like, are used at, or in close proximity to, numerical values when manufacturing and material tolerances inherent in the meanings indicated are intended to aid the understanding of the invention. Accurate or absolute figures are used to assist in the prevention of unfair use by unscrupulous infringers.
본 발명에 따른 플라즈마를 이용한 피부 치료 장치는 도1에 도시한 바와같이, 전원부(100), 고전압모듈(300), 플라즈마발생기(200)로 구성되어 있으며, 상기 고전압모듈(300)은 제어부(310), 신호발생기(321), 증폭기(322), 트랜스포머(323)로 구성되어 있다.Skin treatment apparatus using a plasma according to the present invention, as shown in Figure 1, is composed of a power supply unit 100, a high voltage module 300, a plasma generator 200, the high voltage module 300 is a control unit 310 ), A signal generator 321, an amplifier 322, and a transformer 323.
상기 전원부(100)는 외부 전원일 수 있고, 소형화된 휴대용으로 사용될 수 있도록 배터리일 수 있다.The power supply unit 100 may be an external power source, or may be a battery to be used as a miniaturized portable device.
상기 고전압모듈(300)의 제어부(310)는 전원부(100)로부터 출력되는 직류전원을 고주파, 고전압의 교류 전원으로 변환되도록 제어하는데, 상기 고전압 모듈(300)의 신호발생기(321)는 보통 20kHz 이하의 주파수를 발생하고, 상기 고전압 모듈(300)의 증폭기(322)는 5~10W의 임피던스로 매칭된다. The control unit 310 of the high voltage module 300 controls the DC power output from the power supply unit 100 to be converted into high frequency and high voltage AC power. The signal generator 321 of the high voltage module 300 is usually 20 kHz or less. Generates a frequency of, and the amplifier 322 of the high voltage module 300 is matched with an impedance of 5 ~ 10W.
상기 고전압 모듈(300)의 트랜스포머(323)는 상기 고전압 모듈(300)의 증폭기(322)로부터 출력되는 주파수를 플라즈마 발생기(200)로 공급함으로써 플라즈마 발생을 일으키도록 한다.The transformer 323 of the high voltage module 300 supplies the frequency output from the amplifier 322 of the high voltage module 300 to the plasma generator 200 to generate plasma.
플라즈마 발생기(200)는 도2에 도시한 바와같이 하우징(210)으로 둘러싸여 있으며, 상기 하우징(210)은 원통형상 또는 다각형 통형상일 수 있으며 재질은 비도전성이 바람직하다.The plasma generator 200 is surrounded by a housing 210 as shown in Figure 2, the housing 210 may be cylindrical or polygonal cylindrical shape, the material is preferably non-conductive.
본 발명에서는 인체의 피부(S)가 플라즈마를 발생시키는 접지전극으로 사용되는데 피부(S)를 접지 전극으로 사용함에 따라, 전극 구조가 단순해지며, 대면적 방전이 가능하다는 장점이 있다. 또한 피부(S)가 전극에 근접하는 경우에만, 플라즈마 방전이 발생하여 불필요한 방전이 억제되어, 전력 소비가 감소될 수 있다.In the present invention, the skin (S) of the human body is used as a ground electrode for generating a plasma, but by using the skin (S) as a ground electrode, the electrode structure is simplified, there is an advantage that large area discharge is possible. In addition, only when the skin S is close to the electrode, plasma discharge occurs and unnecessary discharge is suppressed, so that power consumption can be reduced.
상기 플라즈마 발생기(200)는 트랜스포머(323)로부터 전극핀(221)을 통해 고전압, 고주파수를 인가받는 전극(220)과, 상기 전극(220)의 하부면에 위치하면서 전극(220)과 접촉되는 부위에 상하방향으로 균일한 간격을 가지고 다수의 관통홀(231)이 형성된 원판 형태의 기판(230)과, 상기 기판(230)의 하부면에 접촉되어 있는 유전체부(240), 상기 유전체부(240)와 피부(S)사이의 간격유지부(211)로 형성될 수 있다. The plasma generator 200 is an electrode 220 that receives a high voltage and a high frequency from the transformer 323 through the electrode pin 221, and a portion that is in contact with the electrode 220 while being positioned on the lower surface of the electrode 220. The substrate 230 having a disc shape having a plurality of through holes 231 at uniform intervals in the vertical direction, the dielectric portion 240 and the dielectric portion 240 contacting the lower surface of the substrate 230. ) And the space maintaining part 211 between the skin (S).
상기 전극(220)에 있어서, 별도의 제어장치 없이 출력밀도를 균일하게 가져가기 위해서는 하나의 평면 전극이 아닌 다수의 분리되어 독립된 전극으로 만들 필요가 있으며, 바람직하게는 지름 1mm의 도트 형상으로 cm2 당 25개의 도트 전극을 배열하여 출력 밀도를 제어할 수 있다.In the electrode 220, in order to obtain a uniform output density without a separate control device, it is necessary to make a plurality of separate and independent electrodes instead of a single flat electrode, preferably cm 2 in a dot shape having a diameter of 1 mm. The output density can be controlled by arranging 25 dot electrodes per.
본원 발명에서는 전기적 쇼크가 없고 안정적으로 민감한 피부인 안면에 유전체 장벽 방전 플라즈마를 유도하기 위해 단위면적당 출력전력은 0.1~2W(바람직하게는 1.53W)/cm이고, 출력전압은 4~20(바람직하게는 9.5~10)kV, 주파수는 1~30(바람직하게는 25)kHz 정도로 구현할 수 있다.In the present invention, in order to induce the dielectric barrier discharge plasma on the face, which is an electric shock-free and stable sensitive skin, the output power per unit area is 0.1-2W (preferably 1.53W) / cm, and the output voltage is 4-20 (preferably). 9.5-10) kV, the frequency can be implemented 1 ~ 30 (preferably 25) kHz.
상기 관통홀(231)은 도4에서와 같이 기판(230)에 샤워기의 홀 형태와 유사하게 형성되며, 그 관통홀(231)의 내측면은 도전물질로 코팅 또는 도금할 수 있다.The through hole 231 is formed in the substrate 230 similar to the hole shape of the shower in the substrate 230, and the inner surface of the through hole 231 may be coated or plated with a conductive material.
상기 유전체부(240)의 두께와 유전율은 서로 연관되어, 유전율이 클수록 유전체부(240)의 두께를 얇게, 유전율이 작을수록 유전체부(240)의 두께를 두껍게 하여 인가전압에 대하여 절연파괴를 일으키지 않으면서 고밀도 플라즈마를 방전할 수 있다.The thickness and dielectric constant of the dielectric part 240 are related to each other. The larger the dielectric constant, the thinner the dielectric part 240 becomes, and the smaller the dielectric constant, the thicker the dielectric part 240 causes insulation breakdown with respect to the applied voltage. High density plasma can be discharged without.
본 발명에서의 상기 유전체부(240)는 석영, 사파이어, 유리, 세라믹, 고분자필름, 폴리에터이미드(PEI)등의 재질로 형성될 수 있으며, 그 두께가 0.1mm~3mm 정도이고, 상대 유전율은 4~18 정도가 바람직하며, 유전체부(240)의 유전율이 클수록 감전위험 및 방열이 적어 인가전력을 키워 방전효율을 높일 수 있다.The dielectric portion 240 in the present invention may be formed of a material such as quartz, sapphire, glass, ceramics, polymer film, polyetherimide (PEI), the thickness is about 0.1mm ~ 3mm, relative dielectric constant Is about 4 to 18, and the greater the dielectric constant of the dielectric part 240, the less the risk of electric shock and heat dissipation, thereby increasing the applied power to increase discharge efficiency.
상기 유전체부(240)의 재질중 폴리에터이미드(PEI)는 높은 내방사선 특성으로 인해 가혹한 조건하에서 절연재로서 우수한 성능을 발휘하므로 본 발명에서 선호된다.Polyetherimide (PEI) among the materials of the dielectric part 240 is preferred in the present invention because it exhibits excellent performance as an insulating material under severe conditions due to its high radiation resistance characteristics.
플라즈마 갭(212)은 상기 간격유지부(211)에 의해 일정한 간격을 유지하며, 그 간격은 0.5 내지 5 mm로 하는 것이 바람직하다. Plasma gap 212 is maintained at a constant interval by the gap holding unit 211, the interval is preferably 0.5 to 5 mm.
그리고 상기 간격유지부(211)는 하우징(210)의 하단부 가장자리 부분의 전체 둘레를 따라서 하측으로 돌출되어 형성할 수 있다.The gap maintaining part 211 may protrude downward along the entire circumference of the lower edge of the housing 210.
전극(220)으로부터 공급된 파워는 기판(230)의 다수의 관통홀(231)을 통해 샤워방식과 유사하게 고르게 유전체부(240)로 공급되며, 이때 접촉하는 피부(S)와 유전체부(240) 사이에 플라즈마 샤워 방식의 부드러운 유전체 장벽 방전에 의한 플라즈마(P)가 고르게 발생한다. The power supplied from the electrode 220 is supplied to the dielectric part 240 evenly through a plurality of through holes 231 of the substrate 230, similarly to the shower method, wherein the skin S and the dielectric part 240 are in contact with each other. The plasma P is generated evenly by the smooth dielectric barrier discharge of the plasma shower method.
한편, 인체에 해가 없고 부드러운 유전체 장벽 방전 플라즈마(P)를 얻기 위해서는 1W 정도의 출력전력이 바람직하며, 최적의 운전조건을 획득하기 위해 상기 고전압모듈(300)에서 인가하는 전압 및 주파수, 유전체부(240)를 구성하는 유전물질의 정전용량, 상기 유전체부(240)와 피부와의 정전용량값을 적정하게 조정한다.On the other hand, the output power of about 1W is preferable in order to obtain a smooth dielectric barrier discharge plasma (P) harmless to the human body, and the voltage, frequency, dielectric part applied by the high voltage module 300 to obtain the optimal operating conditions The capacitance of the dielectric material constituting 240 and the capacitance value between the dielectric part 240 and the skin are appropriately adjusted.
또한, 하우징(210)의 내측, 바람직하게는 유전체부(240)의 상측에는 블루 LED(미도시)가 더 장착되는데, 이러한 블루 LED(미도시)는 약 400~680nm의 파장을 가지게 되어 유전체부(240)를 통과하여 피부(S)에 조사되기 때문에 피부(S)를 진정시키는 효과를 갖는다. In addition, a blue LED (not shown) is further mounted inside the housing 210, preferably above the dielectric part 240, which has a wavelength of about 400 to 680 nm. Since passing through 240 is irradiated to the skin (S) has the effect of calming the skin (S).
본 발명의 제2실시예는 공기층(250)을 추가로 구비한 형태이다. In the second embodiment of the present invention, the air layer 250 is further provided.
상기 플라즈마 발생기(200)는 도3에 도시한 바와 같이 상기 기판(230)의 하부면으로부터 이격된 위치에 유전체부(240)를 형성할 수 도 있다. 이때 기판(230)과 유전체부(240) 사이에는 공기층(250)이 형성된다. 그리고 상기 공기층(250)은 0.1~1mm 바람직하게는 0.5mm의 두께를 가질 수 있다.As shown in FIG. 3, the plasma generator 200 may form the dielectric part 240 at a position spaced apart from the lower surface of the substrate 230. In this case, an air layer 250 is formed between the substrate 230 and the dielectric part 240. And the air layer 250 may have a thickness of 0.1 ~ 1mm preferably 0.5mm.
기판(230)과 유전체부(240)가 접촉되어 설치되는 경우(도2)보다는 기판(230)과 유전체부(240) 사이에 공기층(250)을 형성하는 경우(도3)에는 민감한 피부에 보다 안정적으로 플라즈마를 유도할 수 있다. 그 과정은 후술한다.When the air layer 250 is formed between the substrate 230 and the dielectric part 240 (FIG. 3), rather than when the substrate 230 is in contact with the dielectric part 240 (FIG. 2), the sensitive skin is more sensitive to skin. The plasma can be induced stably. The process will be described later.
상기와 같이 구성된 플라즈마를 이용한 피부치료장치의 작동 상태를 살펴보면 다음과 같다.Looking at the operating state of the skin treatment apparatus using the plasma configured as described above are as follows.
본 발명에서는 여드름이 있는 피부에 적용하는 경우를 예로 들어 피부치료과정을 설명한다.In the present invention, the skin treatment process will be described as an example when applied to the skin with acne.
먼저, 여드름이 있는 치료 부위에 본 발명의 피부치료장치를 위치시키고, 작동 시작 버튼을 누르면 전원부(100)는 직류 전원을 고전압모듈(300)에 공급하며, 고전압 모듈(300)은 제어부(310), 신호발생기(321), 증폭기(322), 트랜스포머(323)에 의해 직류전원을 고전압, 고주파수의 교류 전원으로 변환하여, 플라즈마 발생기(200)의 전극핀(221)을 통해 전극(220)에 공급한다.First, by placing the skin treatment device of the present invention in the treatment site with acne, pressing the operation start button, the power supply unit 100 supplies DC power to the high voltage module 300, the high voltage module 300 is the control unit 310 The signal generator 321, the amplifier 322, and the transformer 323 convert the direct current power into high voltage and high frequency alternating current power and supply it to the electrode 220 through the electrode pin 221 of the plasma generator 200. do.
상기 전극(220)은 하나의 평면 전극이 아닌 다수의 분리되어 독립된 전극으로 구성되어 있으므로 별도의 제어장치 없이 출력밀도를 균일하게 제어할 수 있다.Since the electrode 220 is composed of a plurality of separated and independent electrodes instead of one flat electrode, the output density can be uniformly controlled without a separate control device.
아울러 상기 전극(220)으로 공급된 파워는 다수의 관통홀(231)을 통해 고르게 분포되어 유전체부(240)로 공급시킴으로써 유전체부(240)와 전극으로 작용하는 피부(S) 사이의 공간에서 플라즈마가 고르게 분포되는 것이다.In addition, the power supplied to the electrode 220 is evenly distributed through the plurality of through holes 231 and supplied to the dielectric part 240, thereby providing a plasma in the space between the dielectric part 240 and the skin S acting as an electrode. Is evenly distributed.
즉 유전체부(240)를 매개로 하여 플라즈마 발생기(200)와 환부는 유전체 장벽 방전(DBD)에 의한 플라즈마가 발생하게 되며, 기판(230)에 형성된 다수의 관통홀(231)을 통해 유전체부(240)와 피부(S) 사이의 공간에서 고른 분포를 갖는 플라즈마가 발생되는 것이다.That is, the plasma generator 200 and the affected part generate plasma by the dielectric barrier discharge DBD through the dielectric part 240, and the dielectric part (through the plurality of through holes 231 formed in the substrate 230). A plasma having an even distribution in the space between the 240 and the skin S is generated.
상기 간격유지부(211)는 하우징(210)의 하단부 가장자리 부분의 전체 둘레를 따라서 하측으로 돌출되어 형성되어 있기 때문에 플라즈마(P)가 발생되는 플라즈마 갭(212)이 외부와 격리되어 플라즈마의 누설이 발생되지 않아 치료 효과를 증진시킬 수 있고, 유전체부(240)와 피부(S)사이의 플라즈마 활성 영역을 일정하게 유지시킴으로써 플라즈마가 고르게 분포될 수 있다.Since the gap maintaining part 211 is formed to protrude downward along the entire circumference of the lower edge portion of the housing 210, the plasma gap 212 in which the plasma P is generated is isolated from the outside to prevent leakage of the plasma. It is not generated can enhance the therapeutic effect, and the plasma can be evenly distributed by keeping the plasma active region between the dielectric part 240 and the skin S constant.
도5(a)는 도2에 도시된 플라즈마 발생기(200)의 등가회로로서 'Ca'는 플라즈마 갭(212)의 등가이고, 'Cg'는 유전체부(240)의 등가이다.5 (a) is an equivalent circuit of the plasma generator 200 shown in FIG. 2, where 'C a ' is equivalent to the plasma gap 212 and 'C g ' is equivalent to the dielectric part 240.
도5(b)는 초기 방전이 일어나기 전의 등가회로이고, 도5(c)는 초기 방전이 발생한 후 플라즈마가 정상 상태로 발생할 때의 등가회로이다.FIG. 5B is an equivalent circuit before the initial discharge occurs, and FIG. 5C is an equivalent circuit when the plasma is generated in a normal state after the initial discharge has occurred.
이러한 구조에 의해 초기에 전극(220)에 전원을 공급하여 피부(S)에 플라즈마를 유도할 때 임피던스 변화는 방전이 일어나기 직전까지 플라즈마 갭(212)은 절연층으로서 도5(b)와 같이 'Ca'값으로 작용하며, 절연층이 파괴되어 방전이 일어나면 플라즈마 갭(212)은 도전체로서 도5(c)와 같이 'Ra'의 저항값으로 작용한다. 따라서 플라즈마 양은 Ra'뿐만이 아니라 Cg'값에 의해 조절되므로 순간적으로 플라즈마 양이 증가하는 것을 방지할 수 있다.With this structure, when the electrode 220 is initially supplied with power to induce plasma to the skin S, the impedance change is until the plasma gap 212 is an insulating layer until just before discharge occurs, as shown in Fig. 5 (b). a c 'acts as a value, occurs, the insulation layer is destroyed and discharge as in the plasma gap 5 212 is also a conductor (c)' acts as a resistance value of R '. Therefore, since the plasma amount is controlled not only by Ra 'but also by Cg', it is possible to prevent the plasma amount from increasing instantly.
도6은 제 2실시예로 공기층(250)이 형성된 경우이다.6 shows the case where the air layer 250 is formed in the second embodiment.
도6(a)는 도3에 도시된 플라즈마 발생기(200)의 등가회로로서 'Ca'는 플라즈마 갭(212)의 등가이고, 'Cg'는 유전체부(240)의 등가이며, 'Cb'는 공기층(250)의 등가이다. 즉 유전체부(240)인 'Cg'와 기판(230) 사이에 공기층(250)인 'Cb'를 형성한 것이다.6 (a) is an equivalent circuit of the plasma generator 200 shown in FIG. 3, where 'C a ' is equivalent to the plasma gap 212, and 'C g ' is equivalent to the dielectric portion 240, and 'Cb Is the equivalent of the air layer 250. That is, the air layer 250 'C b ' is formed between the dielectric portion 240 'C g ' and the substrate 230.
도6(b)는 초기 방전이 일어나기 전의 등가회로이고, 도6(c)는 초기 방전이 발생한 후 플라즈마가 정상 상태로 발생할 때의 등가회로이다.Fig. 6B is an equivalent circuit before the initial discharge occurs, and Fig. 6C is an equivalent circuit when the plasma is generated normally after the initial discharge has occurred.
초기에 전극(220)에 전원을 공급하여 시술 부위에 플라즈마를 유도할 때에 임피던스의 변화는 방전이 일어나기 직전까지 플라즈마 갭(212)과 공기층(250)은 절연층으로서 Ca 및 Cb의 값으로 작용하며, 일단 절연층이 파괴되어 방전이 일어나면 플라즈마 갭(212)과 공기층(250)은 도전체로서 Ra 및 Rb의 저항 값으로 작용한다. When power is initially supplied to the electrode 220 to induce plasma to the procedure site, the change in impedance is measured until the plasma gap 212 and the air layer 250 are insulated layers with values of C a and C b until just before discharge occurs. action and, once the insulation layer is destroyed and a discharge occurs, acts as a resistance value of R a and R b plasma gap 212 and the air layer 250 is a conductor.
도6을 도5와 비교해서 살펴보면, 도6에는 공기층(250)에 해당하는 'Cb',Rb가 추가적으로 있다는 것을 알 수 있다.Referring to FIG. 6 in comparison with FIG. 5, it can be seen that there are additionally 'C b ' and R b corresponding to the air layer 250 in FIG. 6.
즉, 방전이 일어나고 정상적으로 플라즈마가 유지되면 이때 유전체부(240)와 기판(230) 사이의 공기층(250)은 도전체로서 Rb의 저항 값으로 작용한다. 이로인해 방전 초기의 급속 방전에 의한 과다한 플라즈마의 발생을 방지하고, 민감한 피부에 보다 안정적으로 플라즈마를 유도할 수 있다.That is, when discharge occurs and the plasma is normally maintained, the air layer 250 between the dielectric part 240 and the substrate 230 acts as a resistance value of R b as a conductor. This prevents the generation of excessive plasma due to the rapid discharge in the early stage of discharge, and can stably induce the plasma on sensitive skin.
이상에서 설명한 것은 본 발명에 따른 플라즈마를 이용한 피부치료장치를 실시하기 위한 하나의 실시 예에 불과한 것으로서, 본 발명은 상기한 실시 예에 한정되지 않고 이하 특허청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 본 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능한 범위까지 본 발명의 기술적 사상이 있다고 할 것이다.What has been described above is just one embodiment for carrying out the skin treatment apparatus using the plasma according to the present invention, the present invention is not limited to the above-described embodiments and deviates from the gist of the invention claimed in the claims below Without this, anyone skilled in the art to which the present invention pertains will have the technical idea of the present invention to the extent that various modifications can be made.
Claims (6)
- 플라즈마 발생기로부터 발생된 플라즈마를 이용하여 피부를 치료하는 피부 치료 장치에 있어서,In the skin treatment apparatus for treating the skin using the plasma generated from the plasma generator,상기 플라즈마 발생기(200)는,The plasma generator 200,하우징(210); A housing 210;상기 하우징(210)의 내부에 위치하여 피부치료를 위한 파워를 전달하는 전극(220);An electrode 220 positioned inside the housing 210 to transfer power for skin treatment;상기 전극(220)의 하측에 위치하며, 내측면은 도전물질에 의해 코팅 또는 도금되고 상기 전극(220)에 전기적으로 연결되는 다수의 관통홀(231)을 구비한 기판(230); A substrate 230 positioned below the electrode 220, the inner surface of the substrate having a plurality of through holes 231 coated or plated by a conductive material and electrically connected to the electrode 220;상기 기판(230)의 하측에 위치하는 유전체부(240)를 구비하여,It is provided with a dielectric portion 240 positioned below the substrate 230,상기 전극(220)으로부터의 파워가 상기 기판(230)에 형성된 관통홀(231)을 통해 상기 유전체부(240)로 공급되어 유전체부(240)와 피부(S) 사이의 공간에서 플라즈마가 발생되도록 구성된 것을 특징으로 하는 플라즈마를 이용한 피부 치료 장치.Power from the electrode 220 is supplied to the dielectric part 240 through the through hole 231 formed in the substrate 230 so that plasma is generated in the space between the dielectric part 240 and the skin S. Skin treatment apparatus using a plasma, characterized in that configured.
- 제1항에 있어서 상기 플라즈마 발생기(200)는 상기 기판(230)과 상기 유전체부(240) 사이에 공기층(250)을 더 구비하여,The plasma generator 200 further includes an air layer 250 between the substrate 230 and the dielectric part 240.상기 전극(220)으로부터의 파워가 상기 기판(230)에 형성된 관통홀(231)과 상기 공기층(250)을 통해 상기 유전체부(240)로 공급되는 것을 특징으로 하는 플라즈마를 이용한 피부 치료 장치.Power from the electrode 220 is a skin treatment apparatus using a plasma, characterized in that supplied to the dielectric portion 240 through the through-hole 231 and the air layer 250 formed in the substrate (230).
- 제1항 내지 제2항에 있어서 상기 전극(220)은 도트 형태로 분리되어 독립적으로 배열되는 것을 특징으로 하는 플라즈마를 이용한 피부 치료 장치.The apparatus for treating skin using plasma according to claim 1, wherein the electrodes are separated in a dot form and arranged independently.
- 제1항 내지 제2항에 있어서, 상기 유전체부(240)는 석영, 사파이어, 유리, 세라믹, 고분자필름, 폴리에터이미드(PEI) 중 어느 하나인 것을 특징으로 하는 플라즈마를 이용한 피부 치료 장치.The apparatus of claim 1, wherein the dielectric part 240 is any one of quartz, sapphire, glass, ceramic, polymer film, and polyetherimide (PEI).
- 제1항 내지 제2항에 있어서, 상기 하우징(210)의 하단부위에는 하측으로 돌출된 간격유지부(211)를 더 구비하는 것을 특징으로 하는 플라즈마를 이용한 피부 치료 장치.The skin treatment apparatus using plasma according to claim 1, further comprising a space keeping portion 211 protruding downward from a lower end portion of the housing 210.
- 제6항에 있어서, 상기 간격유지부(211)는 상기 하우징(210)의 하단부위 전체에 설치되어 있는 것을 특징으로 하는 플라즈마를 이용한 피부 치료 장치.The skin treatment apparatus using plasma according to claim 6, wherein the gap maintaining part 211 is installed at the entire lower end of the housing 210.
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