WO2016138816A1 - 阵列基板及其制作方法以及相应的数据线合格性测试方法和装置 - Google Patents
阵列基板及其制作方法以及相应的数据线合格性测试方法和装置 Download PDFInfo
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- WO2016138816A1 WO2016138816A1 PCT/CN2016/073849 CN2016073849W WO2016138816A1 WO 2016138816 A1 WO2016138816 A1 WO 2016138816A1 CN 2016073849 W CN2016073849 W CN 2016073849W WO 2016138816 A1 WO2016138816 A1 WO 2016138816A1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
- H10P74/203—Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
- H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
- H10P74/207—Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/58—Testing of lines, cables or conductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
- H10D86/021—Manufacture or treatment of multiple TFTs
- H10D86/0212—Manufacture or treatment of multiple TFTs comprising manufacture, treatment or coating of substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
Definitions
- An exemplary embodiment of the present invention is directed to an array substrate and a method of fabricating the same, and a corresponding data line qualification test method and apparatus.
- One test method in the prior art is to simultaneously fabricate a metal test line from the data drive circuit and extend through the edge region outside the sealant region of the panel to the data drive when fabricating the array substrate.
- the voltage drop of the metal test line is determined by measuring the voltage at the end of the metal test line at the opposite end of the data drive circuit, and then the voltage drop of the data line can be simulated, and the line resistance of the data line is judged to be acceptable.
- annular common electrode pattern Since the annular common electrode pattern is usually disposed under the sealant region, an opening is required at a corner of the annular common electrode pattern away from the data driving circuit so that the metal test line located at the edge region can be introduced at the opposite end of the data driving circuit. Go to the pixel area.
- FIG. 1 it is a schematic structural view of an array substrate fabricated by the method for fabricating an array substrate in the prior art before forming a sealant at a panel.
- the array substrate includes a pixel area AA and is surrounded by a ring-shaped common electrode pattern 1 outside the pixel area AA and a metal test line 2 formed outside the common electrode pattern 1, the common electrode pattern 1 is provided with an opening at a corner, and the metal test line 2 is introduced through the opening Pixel area AA.
- the sealant is required to be laser irradiated for curing.
- the metal test line has a higher reflectance than the other ones in the open position
- the area and the cooling rate of the metal test line are different from the sealant, which results in different curing speeds and cooling rates of the sealant at the metal test line and the sealant at the metal test line, thereby making the position of the opening
- the sealant is cracked, causing the package to fail.
- the array substrate needs to be cut to obtain individual panels.
- the metal test line 2 located on the right side of the common electrode pattern 1 is cut, which exposes the metal test line 2 under the extended cutting line.
- the exposed metal test line will undergo electrochemical corrosion, which will eventually cause the sealant around it to be corroded, which will also lead to package failure.
- an array substrate and a manufacturing method thereof, and a corresponding data line qualification test method and apparatus can complete the test of the data line qualification of the array substrate without providing a metal test line.
- the problem of package failure due to the provision of metal test leads can be fundamentally avoided.
- a method for fabricating an array substrate comprising:
- a continuous and complete annular common electrode pattern surrounding the pixel area is formed.
- the forming a continuous and complete annular common electrode pattern surrounding the pixel region includes forming the continuous and complete annular common electrode in the same layer when forming the data line pattern of the array substrate Graphics.
- forming the continuous and complete annular common electrode pattern by the same layer includes:
- a patterning process is performed on the metal electrode layer to form a data line pattern and a continuous and complete annular common electrode pattern.
- the depositing the metal electrode layer includes depositing a metal material by a sputtering process.
- the array substrate fabrication method further includes coating a photoresist over the metal electrode layer, and exposing and developing the photoresist using a mask.
- the mask is opaque or not completely transparent at a position corresponding to the data line pattern and the continuous and complete annular common electrode pattern.
- the performing a patterning process on the metal electrode layer to form a data line pattern and the continuous and complete annular common electrode pattern further includes:
- the metal electrode layer on the periphery of the continuous and complete annular common electrode pattern is etched away.
- an array substrate comprising:
- a continuous and complete annular common electrode pattern surrounding the pixel area is provided.
- the array substrate further includes:
- the array substrate further includes:
- metal electrode layer forms the data line pattern and the continuous and complete annular common electrode pattern by a single patterning process.
- the array substrate further includes:
- the photoresist layer being coated on the metal electrode layer.
- a data line eligibility test method for the above array substrate comprising:
- the first preset data voltage is equal in magnitude to the second preset data voltage.
- the preset luminance difference corresponds to the first preset data voltage and the second preset data voltage.
- the first pixel and the second pixel include the same number of plurality of sub-pixels.
- a data line eligibility testing apparatus for the above array substrate comprising:
- a lighting module configured to illuminate a first pixel closest to the data driving circuit according to the first preset data voltage, and illuminate a second pixel farthest from the data driving circuit according to the second preset data voltage;
- the pixel and the second pixel are connected to the same measured data line;
- An acquiring module configured to acquire brightness of the first pixel and brightness of the second pixel
- a determining module configured to determine whether an actual brightness difference between the brightness of the first pixel and the brightness of the second pixel is greater than a preset brightness difference; and determining the measured data when the actual brightness difference is greater than a preset brightness difference The line does not meet the requirements.
- the first preset voltage is equal in magnitude to the second preset data voltage.
- the preset luminance difference corresponds to the first preset data voltage and the second preset data voltage.
- the first pixel and the second pixel include the same number of plurality of sub-pixels.
- the acquisition module is a photosensitive detection device.
- FIG. 1 is a schematic structural view of an array substrate in the prior art
- FIG. 2 is a schematic flow chart of a data line eligibility test method according to an embodiment of the invention.
- FIG. 3 is a schematic structural view of an array substrate fabricated by using the manufacturing method provided by the embodiment of the present invention.
- FIG. 4 is a schematic structural diagram of a data line qualification test apparatus according to an embodiment of the present invention.
- first, second, and third are used for descriptive purposes only, and are not to be construed as indicating or implying relative importance.
- plurality refers to two or more, unless specifically defined otherwise.
- a data line eligibility test method for an array substrate in an embodiment of the present invention is provided. As shown in FIG. 2, the method may include:
- Step S1 illuminating the first pixel closest to the data driving circuit according to the first preset data voltage, and illuminating the second pixel farthest from the data driving circuit according to the second preset data voltage, wherein the first pixel and The second pixel is connected to the same measured data line;
- Step S2 acquiring brightness of the first pixel and brightness of the second pixel
- Step S3 determining the actual brightness of the brightness of the first pixel and the brightness of the second pixel Whether the difference is greater than a preset brightness difference; and when the actual brightness difference is greater than the preset brightness difference, determining that the measured data line does not meet the requirement.
- the first predetermined data voltage and the second data voltage are respectively used to respectively illuminate two pixels that are closest to and farthest from the data driving circuit and connected to the same measured data line, if such two If the brightness difference of the pixel is greater than the preset value, the line resistance of the data line is too large and does not meet the requirements. In addition, if it is determined that the brightness difference between the two pixels is less than or equal to the preset value, it indicates that the line resistance of the data line can basically meet the requirement of uniform illumination of the display panel, and at this time, it is determined that the measured data line meets the requirements.
- the qualification test of the data line can be completed without the aid of the metal test line, and the problem of package failure due to the provision of the metal test line can be fundamentally avoided.
- the first preset data voltage and the second preset data voltage in the above step S1 can be set as needed.
- the preset brightness difference should correspond to the selected first preset data voltage and the second preset data voltage.
- the first preset voltage and the second preset voltage may be set to a larger data voltage, so that the first pixel and the second pixel can display a larger brightness for detection. And judgment.
- the values of the first preset voltage and the second preset voltage may be set equal, which can reduce the complexity of setting the preset luminance difference.
- first pixel herein may include a plurality of sub-pixels, and the corresponding second pixel may also include the same number of multiple sub-pixels.
- the brightness of the first pixel and the brightness of the second pixel can be acquired using the photosensitive detecting means.
- an array substrate manufacturing method is provided.
- the array substrate fabricated according to the method for fabricating an array substrate provided by the embodiment of the present invention can be applied to the above data line qualification test method.
- the method for fabricating the array substrate includes:
- the complete annular common electrode pattern is closed at each corner of the side away from the data driving circuit (no need to provide an opening through which the metal test line passes), and the annular common electrode pattern is formed without forming the annular common electrode pattern
- the outer periphery forms a metal test line.
- the structure of the array substrate prepared by the method for fabricating the array substrate according to the embodiment of the present invention may be as shown in FIG. 3, and includes a pixel area AA and a surrounding at a corner away from the side of the data driving circuit. A continuous and complete annular common electrode pattern 1 outside the pixel area.
- the common electrode pattern 1 does not need to form an opening through which the metal test line passes at a corner away from the side of the data drive circuit. This on the one hand reduces the complexity of the manufacturing process, on the other hand, it can completely avoid the package failure caused by the electrochemical corrosion of the metal test line in the reliability test.
- the ring common electrode pattern here can be made of metal and can be used to access a common high voltage VGH, or a common low voltage VSS.
- the forming a continuous and complete annular common electrode pattern surrounding the pixel region may include forming the continuous and complete annular common electrode pattern in the same layer when forming the data line pattern of the array substrate. This can reduce the thickness of the formed array substrate, which is advantageous for lightening and thinning of the product.
- forming the continuous and complete annular common electrode pattern by the same layer herein may include: depositing a metal electrode layer; performing a patterning process on the metal electrode layer to form a data line pattern and continuous And a complete circular common electrode pattern. In this way, the number of patterning processes used can be reduced, reducing process complexity.
- a metal material may be deposited as a metal electrode layer by a sputtering process, then a photoresist is coated on the metal electrode layer, and the photoresist is exposed and developed using a mask.
- the mask is opaque or not completely transparent at locations corresponding to the data line pattern and the continuous and complete annular common electrode pattern.
- the photoresist corresponding to the data line pattern and the annular common electrode pattern region is not etched, and then the metal electrode layer is etched by using the photoresist as a protective layer to form a data line pattern and a continuous and complete ring common. Electrode pattern.
- data line graphics can also be formed and continuous and complete
- the metal electrode layer on the periphery of the ring-shaped common electrode pattern is etched away, thereby forming an array substrate not including the metal test line.
- a data line eligibility testing device that can be used in the array substrate in the embodiment of the present invention is further provided, and can be used to implement the data line eligibility testing method in the above embodiment.
- the device may specifically include:
- the lighting module 401 is configured to illuminate the first pixel closest to the data driving circuit according to the first preset data voltage, and illuminate the second pixel farthest from the data driving circuit according to the second preset data voltage; One pixel and the second pixel are connected to the same measured data line;
- the obtaining module 402 is configured to acquire the brightness of the first pixel and the brightness of the second pixel;
- the determining module 403 is configured to determine whether an actual brightness difference between the brightness of the first pixel and the brightness of the second pixel is greater than a preset brightness difference; and when the actual brightness difference is greater than a preset brightness difference, determine the The measured data line does not meet the requirements.
- the first preset voltage is equal in magnitude to the second preset data voltage.
- array substrate fabricated according to the array substrate fabrication method provided in the above embodiments and the display device including the above array substrate also fall within the protection scope of the present invention.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (20)
- 一种阵列基板制作方法,包括:形成环绕像素区域的连续且完整的环形公共电极图形。
- 如权利要求1所述的方法,其中,所述形成环绕像素区域的连续且完整的环形公共电极图形包括:在形成所述阵列基板的数据线图形时,同层形成所述连续且完整的环形公共电极图形。
- 如权利要求2所述的方法,其中,所述在形成所述阵列基板的数据线图形时,同层形成所述连续且完整的环形公共电极图形包括:沉积金属电极层;对所述金属电极层进行一次图案化工艺形成数据线图形和连续且完整的环形公共电极图形。
- 如权利要求3所述的方法,其中,所述沉积金属电极层包括通过溅射工艺沉积金属材料。
- 如权利要求3或者4所述的方法,还包括在金属电极层之上涂覆光刻胶,并使用掩膜板对所述光刻胶进行曝光显影。
- 如权利要求5所述的方法,其中,所述掩膜板在对应于数据线图形和连续且完整的环形公共电极图形的位置不透明或者不完全透明。
- 如权利要求3-6任一所述的方法,其中,所述对所述金属电极层进行一次图案化工艺形成数据线图形和连续且完整的环形公共电极图形还包括:在同一次图案化工艺中,刻蚀掉所述连续且完整的环形公共电极图形外围的金属电极层。
- 一种阵列基板,包括:像素区域;以及环绕像素区域的连续且完整的环形公共电极图形。
- 如权利要求8所述的阵列基板,还包括:数据线图形,其中所述数据线图形和所述连续且完整的环形公共电极图形同层形成。
- 如权利要求9所述的阵列基板,还包括:金属电极层,其中所述金属电极层通过一次图案化工艺形成所述数据线图形和所述连续且完整的环形公共电极图形。
- 如权利要求10所述的阵列基板,还包括:光刻胶层,所述光刻胶层涂覆在所述金属电极层之上。
- 一种用于如权利要求8-11任一所述的阵列基板的数据线合格性测试方法,包括:根据第一预设数据电压点亮距离数据驱动电路最近的第一像素,并根据第二预设数据电压点亮距离数据驱动电路最远的第二像素;所述第一像素和所述第二像素对应连接同一条被测数据线;获取所述第一像素的亮度和所述第二像素的亮度;判断所述第一像素的亮度与所述第二像素的亮度的实际亮度差是否大于预设亮度差;并在所述实际亮度差大于预设亮度差时,判定所述被测数据线不符合要求。
- 如权利要求12所述的方法,其中,所述第一预设数据电压与所述第二预设数据电压的大小相等。
- 如权利要求12或者13所述的方法,其中,所述预设亮度差与所述第一预设数据电压和第二预设数据电压相对应。
- 如权利要求12-14任一所述的方法,其中,所述第一像素和所述第二像素包括相同数目的多个子像素。
- 一种用于根据权利要求8-11任一所述的阵列基板的数据线合格性测试装置,包括:点亮模块,用于根据第一预设数据电压点亮距离数据驱动电路最近的第一像素,并根据第二预设数据电压点亮距离数据驱动电路最远的第二像素;所述第一像素和所述第二像素对应连接同一条被测数据线;获取模块,用于获取所述第一像素的亮度和所述第二像素的亮度;以及判断模块,用于判断所述第一像素的亮度与所述第二像素的亮度的实 际亮度差是否大于预设亮度差;并在所述实际亮度差大于预设亮度差时,判定被测数据线不符合要求。
- 如权利要求16所述的装置,所述第一预设电压与所述第二预设数据电压的大小相等。
- 如权利要求16或者17所述的装置,其中,所述预设亮度差与所述第一预设数据电压和第二预设数据电压相对应。
- 如权利要求16-18任一所述的装置,其中,所述第一像素和所述第二像素包括相同数目的多个子像素。
- 如权利要求16-19任一所述的装置,其中,所述获取模块为光敏检测装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/128,168 US20170098399A1 (en) | 2015-03-03 | 2016-02-16 | Array substrate and fabricating method thereof, and method and device for testing eligibility of data line |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510094570.6 | 2015-03-03 | ||
| CN201510094570.6A CN104637834B (zh) | 2015-03-03 | 2015-03-03 | 数据线合格性测试方法和装置、阵列基板及其制作方法 |
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| Publication Number | Publication Date |
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| WO2016138816A1 true WO2016138816A1 (zh) | 2016-09-09 |
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| PCT/CN2016/073849 Ceased WO2016138816A1 (zh) | 2015-03-03 | 2016-02-16 | 阵列基板及其制作方法以及相应的数据线合格性测试方法和装置 |
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| Country | Link |
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| US (1) | US20170098399A1 (zh) |
| CN (1) | CN104637834B (zh) |
| WO (1) | WO2016138816A1 (zh) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104637834B (zh) * | 2015-03-03 | 2017-04-19 | 京东方科技集团股份有限公司 | 数据线合格性测试方法和装置、阵列基板及其制作方法 |
| CN106205443A (zh) * | 2016-09-22 | 2016-12-07 | 合肥京东方光电科技有限公司 | 检测电路及其工作方法、驱动电路 |
| CN118411937B (zh) * | 2024-07-02 | 2024-10-22 | 惠科股份有限公司 | 显示面板以及显示装置 |
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| CN101666948A (zh) * | 2008-09-03 | 2010-03-10 | 北京京东方光电科技有限公司 | Tft-lcd像素结构、制造方法和断线修复方法 |
| JP2011164189A (ja) * | 2010-02-05 | 2011-08-25 | Seiko Epson Corp | 電気光学装置および電子機器 |
| CN201984264U (zh) * | 2010-10-29 | 2011-09-21 | 北京京东方光电科技有限公司 | 薄膜晶体管阵列基板、液晶显示装置及已修复的阵列基板 |
| CN104637834A (zh) * | 2015-03-03 | 2015-05-20 | 京东方科技集团股份有限公司 | 数据线合格性测试方法和装置、阵列基板及其制作方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW536691B (en) * | 2002-03-19 | 2003-06-11 | Au Optronics Corp | Drive circuit of display |
| JP4023335B2 (ja) * | 2003-02-19 | 2007-12-19 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の駆動方法および電子機器 |
| KR100927608B1 (ko) * | 2003-10-09 | 2009-11-23 | 삼성에스디아이 주식회사 | 영상표시장치에 있어서 휘도제어방법 및 장치 |
| KR100775827B1 (ko) * | 2005-12-22 | 2007-11-13 | 엘지전자 주식회사 | 균일한 저항값을 갖는 스캔 라인을 포함한 유기 전계 발광소자 |
| CN103929639B (zh) * | 2014-04-30 | 2016-03-02 | 信利光电股份有限公司 | 显示模组显示画面条纹现象检测方法 |
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2015
- 2015-03-03 CN CN201510094570.6A patent/CN104637834B/zh not_active Expired - Fee Related
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2016
- 2016-02-16 WO PCT/CN2016/073849 patent/WO2016138816A1/zh not_active Ceased
- 2016-02-16 US US15/128,168 patent/US20170098399A1/en not_active Abandoned
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666948A (zh) * | 2008-09-03 | 2010-03-10 | 北京京东方光电科技有限公司 | Tft-lcd像素结构、制造方法和断线修复方法 |
| JP2011164189A (ja) * | 2010-02-05 | 2011-08-25 | Seiko Epson Corp | 電気光学装置および電子機器 |
| CN201984264U (zh) * | 2010-10-29 | 2011-09-21 | 北京京东方光电科技有限公司 | 薄膜晶体管阵列基板、液晶显示装置及已修复的阵列基板 |
| CN104637834A (zh) * | 2015-03-03 | 2015-05-20 | 京东方科技集团股份有限公司 | 数据线合格性测试方法和装置、阵列基板及其制作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104637834B (zh) | 2017-04-19 |
| US20170098399A1 (en) | 2017-04-06 |
| CN104637834A (zh) | 2015-05-20 |
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