WO2016117059A1

WO2016117059A1 - Positioning device

Info

Publication number: WO2016117059A1
Application number: PCT/JP2015/051582
Authority: WO
Inventors: 正興岩瀬; 福島　一彦; 茂男編笠屋; 興起仲; 和秋安藤
Original assignee: 三菱電機株式会社
Priority date: 2015-01-21
Filing date: 2015-01-21
Publication date: 2016-07-28
Also published as: JP5963968B1; JPWO2016117059A1

Abstract

A positioning device (1) is provided with: a guide member (2) extending in a mover movement direction; first and second movers (8, 9) movable in the mover movement direction along the guide member; a first link (12) connected at one end threreof to the first mover so as to be rotatable within a plane; a second link (13) for forming a link mechanism such that the second link (13) is connected at one end thereof to the second mover so as to be rotatable within a plane and is connected at the other end thereof to the other end of the first link so as to be rotatable within the plane, the second link (13) having a greater link length than the first link; and an end effecter (15) mounted to the link mechanism. The length of the guide member in the mover movement direction is equal to the value obtained by adding the link length of the second link to the width of the operation region of the end effecter in the mover movement direction.

Description

Positioning device

The present invention relates to a positioning device having a parallel link mechanism.

As a conventional positioning device, there is a device having a linear motion parallel link mechanism as disclosed in Patent Document 1. In general, the parallel link mechanism is advantageous in that the end effector can be driven at a higher speed and the positioning accuracy is higher than that of the serial link mechanism. Further, the linear motion parallel link mechanism has an advantage that the end effector operating area is wider than that of the rotational drive mechanism.

Japanese Patent No. 2588418

In the linear motion parallel link mechanism having two equal link lengths exemplified in Patent Document 1, the position of the end effector in the direction orthogonal to the mover moving direction is determined by the distance between the mover moving directions of the movers that drive the links. Determined uniquely. The position of each mover in the mover moving direction is symmetric with respect to the position of the end effector in the mover moving direction. A linear motion parallel link mechanism having two equal link lengths is hereinafter referred to as a linear motion equal length parallel link mechanism.

One of the performance indicators of the positioning device is area productivity, that is, work efficiency per unit area of the positioning device. In a positioning device having a linear motion equal-length parallel link mechanism, it is necessary to give the mover a higher speed than the target speed for the end effector, and the area occupied by the device is large, resulting in increased area productivity. There is a problem that is low.

The present invention has been made in view of the above, and it is possible to efficiently perform positioning work by reducing the speed applied to the mover, and to obtain a positioning apparatus with high area productivity by reducing the area occupied by the apparatus. With the goal.

In order to solve the above-described problems and achieve the object, the present invention provides a guide member extending in the mover moving direction, and first and second movable along the guide member in the mover moving direction. A first link having one end rotatably attached to the first mover in a plane, and one end rotatably attached to the second mover in a plane. A link mechanism is formed by attaching the other end of the link to the other end of the link so as to be rotatable in a plane, a second link having a longer link length than the first link, and an end attached to the link mechanism An effector, and the length of the guide member in the mover moving direction is a length obtained by adding the link length of the second link to the width in the mover moving direction of the operation region of the end effector. It is characterized by that.

The positioning device according to the present invention has an effect that the speed applied to the mover can be reduced to perform an efficient positioning operation, and the area occupied by the device can be reduced, thereby increasing the area productivity.

The figure which shows the structure of the positioning device concerning Embodiment 1 of this invention. The figure explaining arrangement | positioning of the needle | mover which implement | achieves that an end effector becomes the target position in the positioning device concerning Embodiment 1. FIG. The figure explaining another arrangement | positioning of the needle | mover which implement | achieves that an end effector becomes a target position in the positioning device concerning Embodiment 1. FIG. The figure explaining the length of the guide rail and guide member of a needle | mover moving direction in the positioning apparatus concerning Embodiment 1. FIG. The figure which shows the definition of the variable for demonstrating the speed | velocity | rate of the needle | mover which implement | achieves that the end effector becomes target Y direction speed in the positioning device concerning Embodiment 1. FIG. The figure which showed the relationship between the Y direction position of the end effector in the positioning apparatus concerning Embodiment 1, and sensitivity k. The figure which shows the structure of the positioning device concerning Embodiment 2 of this invention. Schematic plan view showing the configuration of the positioning device according to the third embodiment of the present invention. Schematic plan view for explaining the “passing” operation between the linear motion unequal length parallel link mechanisms in the positioning apparatus according to the third embodiment. Schematic plan view for explaining the “passing” operation between the linear motion unequal length parallel link mechanisms in the positioning apparatus according to the third embodiment. Schematic plan view for explaining the “passing” operation between the linear motion unequal length parallel link mechanisms in the positioning apparatus according to the third embodiment. Schematic which shows the end effector movable range in the positioning device using the linear motion equal length parallel link mechanism concerning Embodiment 3. FIG. Schematic which shows the end effector movable range in the positioning device using the linear motion unequal length parallel link mechanism concerning Embodiment 3. FIG. Schematic plan view showing the configuration of a positioning device according to a fourth embodiment of the present invention.

Hereinafter, a positioning device according to an embodiment of the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
FIG. 1 is a diagram illustrating a configuration of a positioning device 1 according to a first embodiment of the present invention. FIG. 1 shows the X direction, which is the mover moving direction, and the Y direction perpendicular thereto.

The positioning device 1 includes a guide member 2 extending in the X direction, a mover 8 that is a first mover movable in the X direction along the guide member 2, and a mover 9 that is a second mover. The

movable joints

8 and 9 respectively have rotating

joint mechanisms

10 and 11 and a first link whose one end is rotatably supported by the movable element 8 in the XY plane via the rotating joint mechanism 10. A short link 12 and a long link 13, which is a second link having one end rotatably supported in an XY plane via a rotary joint mechanism 11 by a mover 9, are provided. The long link 13 has a longer link length than the short link 12. That is, the positioning device 1 according to the first embodiment employs a linear motion unequal length parallel link mechanism in which two link lengths are different.

In addition, the positioning device 1 is attached to the link mechanism, a rotary joint mechanism 14 that forms a link mechanism by rotatably connecting the other end of the short link 12 and the other end of the long link 13 in the XY plane. An end effector 15 and a working unit 16 attached to the end effector 15. The short link 12, the long link 13, and the rotary joint mechanism 14 form a link mechanism. In the positioning device 1 of FIG. 1, the end effector 15 is the other end of the short link 12, that is, the rotary joint mechanism. It is attached to the 14th side. The mover 8 includes a coil module 6 that forms a linear motor, and the mover 9 includes a coil module 7 that forms a linear motor. The working unit 16 is shown as a working hand in the example of FIG. 1, but may be an inspection machine such as a nozzle or a camera, and is not particularly limited. The rotation

joint mechanisms

10, 11, and 14 are not particularly limited as long as the mechanisms have a rotation function such as a bearing.

In FIG. 1, when viewed from the guide member 2 in the Y direction, an example is shown in which the movable element 8 and the short link 12 are on the left side, and the movable element 9 and the long link 13 are on the right side. The reverse is also acceptable.

The guide member 2 includes a pair of

guide rails

3 and 4 parallel to each other and a magnet plate 5 constituting a linear motor.

Movable elements

8 and 9 are attached to the

guide rails

3 and 4 so as to be slidable in the X direction. The

movers

8 and 9 can be moved independently by applying a driving force in the X direction by some linear actuator. In the example of FIG. 1, a linear motor including the magnet plate 5 and the

coil modules

6 and 7 is used to apply a driving force, but it may be a ball screw drive and is not particularly limited.

A method for positioning the end effector 15 of the positioning device 1 according to the first embodiment will be described below. In a linear motion parallel link mechanism such as the positioning device 1, the position of the end effector 15 is uniquely determined by the arrangement of the

movers

8 and 9. Therefore, the arrangement of the

movable elements

8 and 9 that realize the target position of the end effector 15 is obtained by geometric calculation, and the positioning control of the

movable elements

8 and 9 is performed using the obtained arrangement of the

movable elements

8 and 9 as the target position. If executed, the end effector 15 can be positioned at a target position.

FIG. 2 is a diagram for explaining the arrangement of the

movers

8 and 9 that realize that the end effector 15 becomes a target position in the positioning device 1, and FIG. 3 shows the end effector 15 in the positioning device 1 as a target. It is a figure explaining another arrangement | positioning of the needle |

mover

8 and 9 which implement | achieves becoming a position to perform. In the linear motion unequal length parallel link mechanism employed in the positioning device 1, there are two arrangements of the

movers

8 and 9 that realize the target position of the end effector 15 as shown in FIGS. 2 and 3. . The short link angle θ, which is the angle of the inner angle formed by the short link 12 and the X direction, is an acute angle in FIG. 2 but an obtuse angle in FIG. 3, and the posture of the short link 12 is different.

Next, the lengths in the X direction of the

guide rails

3 and 4 and the guide member 2 will be described. FIG. 4 is a diagram illustrating the lengths of the

guide rails

3 and 4 and the guide member 2 in the X direction which is the moving direction of the mover in the positioning device 1. In FIG. 4, the operation region A to which the end effector 15 is given is indicated by shading. FIG. 4 shows the posture of the short link 12 and the long link 13 and the arrangement of the

movers

8 and 9 when the end effector 15 is positioned at the end in the X direction of the operation area A of the end effector 15.

Here, the condition of the link length of the short link 12 and the long link 13 of the positioning device 1 according to the first embodiment will be described. First, the link length of the short link 12 needs to be longer than the width of the operation area A in the Y direction. In the positioning device 1 according to the first embodiment, when the short link angle θ is 180 degrees, the mover 8 and the mover 9 are closest to each other, and the distance is the link length of the long link 13 and the short link 12. Equal to the difference. When the safety distance between the movable elements is set for the purpose of avoiding the collision between the movable elements, the link length of the long link 13 is made longer than the sum of the safety distance between the movable elements and the link length of the short link 12.

As shown by the solid line in FIG. 4, when the end effector 15 is positioned at the left end in the X direction of the operation area A, the posture of the short link 12 and the long link 13 at which the short link angle θ becomes an obtuse angle is selected. At this time, the

movers

8 and 9 are located on the right side of the left end of the operation region A in the X direction. That is, when the end effector 15 is positioned at the left end in the X direction of the operation area A, the short link angle θ is made an obtuse angle, and the movable element 8 has a range in the X direction of the operation area A as shown in FIG. It becomes possible not to arrange outside. Accordingly, both the

movers

8 and 9 can be arranged inside the range of the operation area A in the X direction. This eliminates the need for the

guide rails

3 and 4 and the guide member 2 in Embodiment 1 to extend to the left from the left end in the X direction of the operation area A as in the case of the linear motion equal length parallel link mechanism. . However, as shown by the broken line in FIG. 4, when the end effector 15 is positioned at the right end of the operation region A in the X direction, the long link 13 needs to be arranged on the right side of the right end of the operation region A in the X direction. Therefore, the

guide rails

3 and 4 and the guide member 2 need to extend from the right end of the operation region A in the X direction to the right side in addition to the width of the operation region A in the X direction.

As a result, the lengths of the

guide rails

3 and 4 and the guide member 2 in the X direction may be extended to the right by the length of the long link 13 from the length of the width in the X direction of the operation region A of the end effector 15. 3 and 4 and the extension to the left side of the guide member 2 become unnecessary. Thereby, in the positioning apparatus 1 concerning Embodiment 1, the exclusive area of the whole apparatus can be made smaller than the apparatus which has the linear motion equal length parallel link mechanism which needs the extension to the both sides of a guide member. In the above description, it is assumed that the short link 12 is on the left side of the long link 13. However, in the case of the arrangement in which the short link 12 is on the right side of the long link 13, the same discussion as above is valid with the left and right sides reversed.

Next, the in-plane angle indicating the direction in the XY plane of the end effector 15 of the positioning device 1 according to the first embodiment will be described. Since the end effector 15 is fixed to the short link 12, the in-plane angle of the end effector 15 in the XY plane is uniquely determined depending on the short link angle θ. However, the end effector 15 has a mechanism capable of rotating the working unit 16 relative to the end effector 15 by means such as incorporating a rotary actuator (not shown). This rotation mechanism enables angle correction for controlling the in-plane angle in the XY plane of the work unit 16 such as a work hand included in the end effector 15 to a target value.

The angle correction amount in the angle correction is a difference between the target in-plane angle on the XY plane of the working unit 16 and the short link angle θ. In the positioning device 1 according to the first embodiment, the angle correction amount described above is used. Thus, there are two patterns of postures of the short link 12 and the long link 13 that realize the target position of the end effector 15 and the arrangement of the

movers

8 and 9. That is, the short link angle θ can be selected from two values. Therefore, it is possible to increase the efficiency of the positioning work by selecting the pattern having the smaller angle correction amount of the end effector 15.

Next, in the positioning device 1 including the linear motion unequal length parallel link mechanism according to the first embodiment, the speeds of the

movers

8 and 9 necessary to realize the target Y-direction speed of the end effector 15. Will be explained.

FIG. 5 is a diagram showing the definition of variables for explaining the speeds of the

movers

8 and 9 that realize that the end effector 15 has a target Y-direction speed in the positioning device 1. As shown in FIG. 5, the internal angle formed by the short link 12 and the X direction is the short link angle θ, the external angle formed by the long link 13 and the X direction is the long link angle φ, and the coordinate of the mover 8 in the X direction is c ₁ , the coordinate of the mover 9 in the X direction is indicated by c ₂ . In the case of a linear-action equal-length parallel link mechanism in which the lengths of the short link 12 and the long link 13 are equal, the sum of the short link angle θ and the long link angle φ is 180 °, but the long link 13 is longer than the short link 12. In the positioning device 1 which is a linear motion unequal length parallel link mechanism, the sum of the short link angle θ and the long link angle φ does not become 180 °. With the speed dc ₂ / dt of the speed of dc ₁ / dt and the movable element 9 of the mover 8 of the linear motion parallel link mechanism, Y-direction speed dy / dt of the end effector 15 is represented by the following formula (1) The

dy / dt = (dc ₂ / dt−dc ₁ / dt) / k (1)

Here, k in the equation (1) represents the sensitivity of the velocity in the Y direction of the end effector 15 generated by the velocity difference (dc ₂ / dt−dc ₁ / dt) between the

movers

8 and 9, and the following equation ( As represented by 2), it is a function of the short link angle θ and the long link angle φ.

K = tanφ-tanθ (2)

Based on the above equations (1) and (2), the attitude of the short link 12 and the long link 13 and the operation pattern of the

movers

8 and 9 for realizing the target Y-direction speed will be described.

When the short link angle θ is an acute angle, since the long link angle φ is an obtuse angle, the value of the sensitivity k is always negative according to the equation (2). Accordingly, when a positive speed is applied to the end effector 15 in the Y direction, the speed difference (dc ₂ / dt−dc ₁ / dt) between the

movers

8 and 9 is negative, that is, the

movers

8 and 9 It is sufficient to operate so as to narrow the interval.

On the other hand, when the short link angle θ is an obtuse angle, considering that the long link angle φ is an obtuse angle and is always larger than the short link angle θ, the value of the sensitivity k is always positive according to the equation (2). Accordingly, when a positive speed is applied to the end effector 15 in the Y direction, the speed difference (dc ₂ / dt−dc ₁ / dt) between the

movers

8 and 9 becomes positive, that is, the

movers

8 and 9 What is necessary is just to operate | move so that the space | interval may be expanded.

In any of the above cases, the operation of the

movers

8 and 9 when a negative speed is applied to the end effector 15 in the Y direction is opposite to that when a positive speed is applied in the Y direction.

The sensitivity k of the Y-direction speed of the end effector 15 in the first embodiment will be described. As shown in the equation (1), the smaller the absolute value of the sensitivity k, the smaller the speed difference (dc ₂ / dt) between the

movable elements

8 and 9 required to realize the target Y-direction speed of the end effector 15. The absolute value of -dc ₁ / dt) may be small, and an efficient positioning operation in the Y direction becomes possible.

FIG. 6 is a diagram illustrating a relationship between the position [m] of the end effector 15 in the positioning device 1 according to the first embodiment and the sensitivity k. FIG. 6 shows the absolute value of sensitivity k by the linear motion equal length parallel link mechanism and the linear motion equal length parallel link mechanism and the short link length when the end effector 15 realizes the given position in the Y direction. The absolute value of the sensitivity k of the equal linear motion unequal length parallel link mechanism is shown in comparison. In the case of the linear motion unequal length parallel link mechanism, the absolute value of the sensitivity k in both cases where the short link angle θ is an acute angle and an obtuse angle is shown. Here, in FIG. 6, the lengths of both links of the linear motion equal length parallel link mechanism are both 1 m, the short link length of the linear motion unequal length parallel link mechanism is 1 m, and the long link length is 1.1 m. The absolute value of the sensitivity k by the linear motion equal length parallel link mechanism is indicated by a broken line, and the absolute value of the sensitivity k when the short link angle θ is an acute angle by the linear motion unequal length parallel link mechanism is indicated by a one-dot chain line. The absolute value of the sensitivity k when the short link angle θ is an obtuse angle in the isometric parallel link mechanism is indicated by a solid line.

As shown in FIG. 6, regardless of the position of the end effector 15 in the Y direction, the absolute value of the sensitivity k is the linear motion equal length parallel link mechanism, the linear motion inequality where the short link angle θ is an acute angle. The long parallel link mechanism and the direct link unequal length parallel link mechanism with an obtuse angle of the short link angle θ are sequentially reduced. In particular, when the absolute value of the sensitivity k is 2 or more, according to the equation (1), in order to make the end effector 15 achieve the target Y-direction speed, the

movable elements

8 and 9 that are twice or more than that are used. Speed difference (dc ₂ / dt−dc ₁ / dt). That is, it means that it is necessary to give at least one of the

movers

8 and 9 a speed equal to or higher than the target Y-direction speed of the end effector 15.

According to FIG. 6, the region in the Y direction position where the absolute value of sensitivity k is 2 or more is a linear motion equal length parallel link mechanism, a linear motion unequal length parallel link mechanism with a short short link angle θ, and a short link angle. The θ becomes smaller in the order of the linear link unequal length parallel link mechanism having an obtuse angle. Therefore, according to the positioning device 1 employing the linear motion unequal length parallel link mechanism according to the first embodiment, the

movers

8 and 9 must be given a speed equal to or higher than the target Y-direction speed of the end effector 15. It can be seen that the situation can be reduced. In other words, according to the positioning device 1 according to the first embodiment, the absolute value of the speeds of the

movers

8 and 9 required to realize the target Y-direction speed of the end effector 15 is the linear parallel isometric parallel link. On average, it is smaller than the mechanism. In other words, according to the positioning device 1 according to the first embodiment, the end effector 15 can be operated in the Y direction more efficiently than the linear motion equal length parallel link mechanism. It can also be seen that when the short link angle θ is an obtuse angle, the efficiency is even better than when it is an acute angle.

Accordingly, in the positioning device 1 according to the first embodiment, the angle correction amount described above of the working unit 16 with respect to the end effector 15 and the efficiency of the positioning operation in the Y direction described above are comprehensively taken into consideration. It is possible to select whether the short link angle θ at the time is an acute angle or an obtuse angle, and it is possible to improve the efficiency of comprehensive positioning work.

That is, according to the positioning device 1 according to the first embodiment, it is possible to improve the efficiency of comprehensive positioning work. Furthermore, according to the positioning device 1 according to the first embodiment, the exclusive area of the entire device can be made smaller than the device having the linear motion equal length parallel link mechanism, and the effect of improving the area productivity can be obtained.

Embodiment 2. FIG.
FIG. 7 is a diagram showing a configuration of a positioning device 1 ′ according to the second embodiment of the present invention. FIG. 7 shows the X direction as the mover moving direction and the Y direction perpendicular thereto.

Also in the positioning device 1 ′ shown in FIG. 7, the short link 12 ′ as the first link, the long link 13 ′ as the second link, and the rotary joint mechanism 14 form a link mechanism. Unlike the positioning device 1 shown in FIG. 1 of the first embodiment, the order in which the short link 12 ′ and the long link 13 ′ are connected on the rotating joint mechanism 14 side is reversed, and the lower side of the short link 12 ′. The long link 13 'is connected. The end effector 15 'is attached not to the short link 12' but to the end of the long link 13 'on the rotating joint mechanism 14 side. 7 and 1 have the same configuration and function, and the description thereof will be omitted.

FIG. 7 shows an example in which the movable element 8 and the short link 12 ′ are on the left side and the movable element 9 and the long link 13 ′ are on the right side when viewed from the guide member 2 in the Y direction. May be reversed.

The inertial force accompanying translational motion in the XY plane and the inertial torque accompanying link angle change act on the end effector 15 'fixed to the link end in the linear motion parallel link mechanism. The end effector 15 ′ needs to have sufficient rigidity and strength so as not to generate vibration or break against these inertial forces and inertial torques. Even if the end effector 15 'performs a translational movement that produces a certain amount of movement, the change in the angle of the link at that time is smaller for the long link than for the short link.

Therefore, in contrast to the case where the end effector 15 is fixed to the short link 12 as shown in FIG. 1, the case where the end effector 15 ′ is fixed to the long link 13 ′ as shown in FIG. In comparison, since the angle change of the end effector is small, the inertial torque received by the end effector 15 ′ is reduced compared to the end effector 15. Therefore, it is possible to reduce the weight of the end effector 15 ′ rather than the end effector 15 while satisfying the condition that the end effector has sufficient rigidity and strength.

That is, according to the positioning device 1 ′ according to the second embodiment, it is possible to improve the efficiency of positioning work, reduce the area occupied by the entire device, improve the area productivity, and reduce the weight of the end effector.

Embodiment 3 FIG.
FIG. 8 is a schematic plan view showing the configuration of the positioning device 10 according to the third embodiment of the present invention. The positioning device 10 according to the third embodiment is a positioning device having two linear motion unequal length parallel link mechanisms shown by the positioning device 1 of the first embodiment or the positioning device 1 ′ of the second embodiment. Specifically, the positioning device 10 includes linear motion unequal length

parallel link mechanisms

1a and 1b.

Since FIG. 8 is a schematic diagram, only the schematic configuration of the linear motion unequal length

parallel link mechanisms

1a and 1b is shown, and some components such as the guide member 2 and the rotary joint mechanism 14 are not shown. . The linear motion unequal length parallel link mechanism 1a includes

guide rails

3a and 4a,

movers

8a and 9a, rotary

joint mechanisms

10a and 11a, a short link 12a, a long link 13a, and an end effector 15a. The linear motion unequal length parallel link mechanism 1b includes

guide rails

3b and 4b,

movers

8b and 9b, rotary

joint mechanisms

10b and 11b, a short link 12b, a long link 13b, and an end effector 15b. Also in FIG. 8, the operation area A to which the

end effectors

15a and 15b are given is indicated by shading.

The linear motion unequal length

parallel link mechanisms

1a and 1b are the positioning device 1 of the first embodiment or the positioning device 1 'of the second embodiment, respectively. Both the linear motion unequal length

parallel link mechanisms

1a and 1b may be the positioning device 1 of the first embodiment, or both may be the positioning device 1 'of the second embodiment. Alternatively, one of the linear motion unequal length

parallel link mechanisms

1a and 1b may be the positioning device 1 of the first embodiment, and the other may be the positioning device 1 'of the second embodiment. The components shown in FIG. 8 have the same functions as those shown in FIG. 1 or FIG.

The linear motion unequal-length

parallel link mechanisms

1a and 1b have an operation area A shared by the

end effectors

15a and 15b, in contrast to the given operation area A of the

end effectors

15a and 15b shown in FIG. And so as to face each other. That is, the guide member provided with the

guide rails

3a and 4a and the guide member provided with the

guide rails

3b and 4b are opposed to each other with the common operation area A in between. That is, when viewed from the operation area A, the arrangement order along the guide members of the first movable element supporting the short first link and the second movable element supporting the long second link is the linear motion unequal length parallel. The

link mechanisms

1a and 1b are the same. When both of the linear motion unequal length

parallel link mechanisms

1a and 1b are the same linear motion unequal length parallel link mechanism, the axis perpendicular to the plane formed by the operation area A is the linear motion unequal length parallel link mechanism 1a. A linear motion unequal length parallel link mechanism 1b is arranged by rotating 180 ° around the movement area A and facing the linear motion unequal length parallel link mechanism 1a.

The “passing” operation of the linear motion unequal length

parallel link mechanisms

1a and 1b of the positioning device 10 will be described below. FIGS. 9 to 11 are schematic plan views for explaining the “passing” operation between the linear motion unequal length

parallel link mechanisms

1a and 1b in the positioning apparatus 10 according to the third embodiment shown in FIG.

First, as shown in FIG. 9, a linear motion unequal length parallel link mechanism between an initial position of the end effector 15a of the linear motion unequal length parallel link mechanism 1a and a target position B of the end effector 15a indicated by a dotted line in the figure. It is assumed that 1b exists. In the state of FIG. 9, if the linear motion unequal length parallel link mechanism 1a tries to position the linear motion unequal length

parallel link mechanisms

1a and 1b with the link posture shown in FIG. Since the

mechanisms

1a and 1b interfere with each other, the end effector 15a cannot be positioned at the target position B.

However, in the positioning device 10 according to the third embodiment, the end effector 15a is moved to the extent that the linear motion unequal-length

parallel link mechanisms

1a and 1b pass each other once from the state shown in FIG. 9 to the state shown in FIG. “Convolution” is performed by lowering the coordinates in the Y direction. In this state, the linear motion unequal length parallel link mechanism 1a is moved to perform the “passing” operation of the linear motion unequal length

parallel link mechanisms

1a and 1b. After the “passing” operation in FIG. 10, the end effector 15a can be positioned at the target position B as shown in FIG. Since this “folding” operation is an operation of moving the end effector 15a in the Y direction as described above, the end effector is made as shown in FIG. 6 of the first embodiment by making the short link angle θa an obtuse angle. It is possible to efficiently perform the “convolution” operation of 15a. In the “convolution” operation, the posture may be such that the short link angle θa is an acute angle.

According to the positioning device 10 according to the third embodiment, such a “convolution” operation can be performed. Therefore, it is possible to reduce the interference between the linear motion parallel link mechanisms and to expand the operable range of the end effector. become. It will be described below that this is made possible by adopting a linear motion unequal length parallel link mechanism instead of a linear motion equal length parallel link mechanism.

FIG. 12 is a schematic view showing the end effector movable range in the positioning device 20 using the linear motion isometric parallel link mechanism. FIG. 13 is a schematic diagram illustrating an end effector movable range in the positioning device 10 using the linear motion unequal length parallel link mechanism according to the third embodiment.

12 includes linear motion equal length parallel link mechanisms 1c and 1d. Since FIG. 12 is a schematic diagram, only a schematic configuration of the linear motion isometric parallel link mechanisms 1c and 1d is shown, and some components such as a guide member and a mover are not shown. The linear motion equal-length parallel link mechanism 1c includes rotating

joint mechanisms

10c and 11c,

links

12c and 13c, and an end effector 15c. The link lengths of the link 12c and the link 13c are equal. The linear motion equal-length parallel link mechanism 1d includes rotating

joint mechanisms

10d and 11d,

links

12d and 13d, and an end effector 15d. The link lengths of the link 12d and the link 13d are equal. In FIG. 12, the operation area A to which the

end effectors

15c and 15d are given is shown as a framed frame.

In FIG. 13, the positioning device 10 of FIG. 8 is further simplified, and some components such as a guide member and a mover are not shown. Also in FIG. 13, the operation area A to which the

end effectors

15 a and 15 b are given is shown as a frame surrounded by a frame.

In FIG. 12, when the end effector 15d of the linear motion equal length parallel link mechanism 1d is positioned at the center of the operation area A, the linear motion equal length parallel link mechanism 1c can position the end effector 15c. The effector movable range is indicated by hatching. Although the "passing" operation of the linear motion equal length parallel link mechanisms 1c and 1d is possible, the linear motion equal length parallel link mechanism 1c cannot position the end effector 15c in the white area in the operation area A. . That is, the end effector movable range in which the linear motion equal length parallel link mechanism 1c can position the end effector 15c by interference with the linear motion equal length parallel link mechanism 1d is narrower than the operation area A.

On the other hand, in the positioning device 10 of FIG. 13, the end effector 15b of the linear motion unequal length parallel link mechanism 1b is located at the center of the operation area A, but by making the short link angle θb an obtuse angle. The end effector 15b is positioned at the center of the operation area A by the above-described “folding” operation. The linear motion unequal-length parallel link mechanism 1a also allows the end effector 15a to perform a “folding” operation by setting the short link angle θa to an obtuse angle, so that the

end effectors

15a and 15b perform a “passing” operation in that state. It becomes possible to do. After the “passing” operation, the end effector 15a can perform positioning using the “folding” operation even in the region where the end effector 15c cannot be positioned in FIG. The region that becomes. As a result, it is possible to expand the end effector movable range of FIG. 13 indicated by the oblique lines in which the end effector 15a can be positioned by the linear motion unequal length parallel link mechanism 1a as compared with the end effector movable range of FIG. Become.

In other words, according to the positioning device 10 according to the third embodiment, the linear motion parallel link mechanisms are connected to each other by taking the link posture in which the short link angles θa and θb of the two linear motion unequal length parallel link mechanisms are obtuse. It is possible to widen the end effector movable range by reducing the chance of interference. Thereby, according to the positioning device 10 according to the third embodiment, in addition to the effects obtained in the first or second embodiment, the work efficiency is improved by the work by a plurality of mechanisms and the reduction of the interference opportunity. It becomes possible.

Embodiment 4 FIG.
FIG. 14 is a schematic plan view showing the configuration of the positioning device 30 according to the fourth embodiment of the present invention. The positioning device 30 according to the fourth embodiment is a positioning device having two linear motion unequal length parallel link mechanisms shown by the positioning device 1 of the first embodiment or the positioning device 1 ′ of the second embodiment. Specifically, the positioning device 30 includes linear motion unequal length

parallel link mechanisms

1a and 1e. However, the arrangement of the short links and the long links is reversed between the linear motion unequal length parallel link mechanism 1e and the linear motion unequal length parallel link mechanism 1b of FIG.

Since FIG. 14 is a schematic diagram, only schematic configurations of the linear motion unequal length

parallel link mechanisms

1a and 1e are shown, and some components such as the guide member 2 and the rotating joint mechanism 14 are not shown. . Since the linear motion unequal length parallel link mechanism 1a has been described in the third embodiment, a description thereof will be omitted. The linear motion unequal length parallel link mechanism 1e includes

guide rails

3e, 4e,

movers

8e, 9e, rotary

joint mechanisms

10e, 11e, a short link 12e, a long link 13e, and an end effector 15e. Also in FIG. 14, the operation area A to which the

end effectors

15 a and 15 e are given is indicated by shading.

The linear motion unequal length

parallel link mechanisms

1a and 1e are the positioning device 1 of the first embodiment or the positioning device 1 'of the second embodiment, respectively. Both the linear motion unequal length

parallel link mechanisms

1a and 1e may be the positioning device 1 of the first embodiment, or both may be the positioning device 1 'of the second embodiment. Alternatively, one of the linear motion unequal length

parallel link mechanisms

1a and 1e may be the positioning device 1 of the first embodiment, and the other may be the positioning device 1 'of the second embodiment. The components shown in FIG. 14 have the same functions as the components shown in FIG. 1 or FIG.

The linear motion unequal-length

parallel link mechanisms

1a and 1e have an operation area A shared by the

end effectors

15a and 15e as opposed to the given operation area A of the

end effectors

15a and 15e shown in FIG. And so as to face each other. That is, the guide member provided with the

guide rails

3a and 4a and the guide member provided with the

guide rails

3e and 4e are opposed to each other with the common operation area A in between.

However, in the positioning device 30, as shown in FIG. 14, the arrangement of the short link 12e and the long link 13e of the linear motion unequal length parallel link mechanism 1e is opposite to that of the linear motion unequal length parallel link mechanism 1b of FIG. ing. That is, when viewed from the operation area A, the arrangement order along the guide members of the first movable element supporting the short first link and the second movable element supporting the long second link is the linear motion unequal length parallel. The

link mechanisms

1a and 1e are reversed. Therefore, the direction of extension of the

guide rails

3e, 4e and the guide members including them and the

guide rails

3a, 4a and the guide members including them over the length of the width of the moving region of the operation area A is shown in FIG. Unlike the case, it can be taken in the same direction.

Thereby, according to the positioning device 30 according to the fourth embodiment, in addition to the effects obtained in the first or second embodiment, the work efficiency is improved by the plural mechanisms, and the entire apparatus when the plural mechanisms are mounted. The effect that the width | variety of this can be made small is acquired.

The configuration described in the above embodiment shows an example of the contents of the present invention, and can be combined with another known technique, and can be combined with other configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

1, 1 ', 10, 20, 30 Positioning device, 1a, 1b, 1e Linear motion unequal length parallel link mechanism, 1c, 1d Linear motion equal length parallel link mechanism, 2 guide member, 3, 3a, 3b, 3e, 4, 4a, 4b, 4e guide rail, 5 magnet plate, 6, 7 coil module, 8, 8a, 8b, 8e, 9, 9a, 9b, 9e mover, 10, 10a, 10b, 10c, 10d, 10e, 11, 11a, 11b, 11c, 11d, 11e, 14 Rotating joint mechanism, 12, 12 ′, 12a, 12b, 12e Short link, 13, 13 ′, 13a, 13b, 13e Long link, 12c, 12d, 13c, 13d link, 15, 15 ', 15a, 15b, 15c, 15d, 15e end effector, 16 working parts.

Claims

A guide member extending in the moving direction of the mover;
First and second movers movable in the mover moving direction along the guide member;
A first link having one end attached to the first mover so as to be rotatable in a plane;
One end of the second mover is rotatably attached in a plane, and the other end of the first link is attached to the other end of the first link so as to be rotatable in a plane, thereby forming a link mechanism. A second link having a longer link length than the link;
An end effector attached to the link mechanism;
With
The length of the guide member in the mover moving direction is a length obtained by adding the link length of the second link to the width in the mover moving direction of the operation region of the end effector. apparatus.
A guide member extending in the moving direction of the mover;
First and second movers movable in the mover moving direction along the guide member;
A first link having one end attached to the first mover so as to be rotatable in a plane;
One end of the second mover is rotatably attached in a plane, and the other end of the first link is attached to the other end of the first link so as to be rotatable in a plane, thereby forming a link mechanism. A second link having a longer link length than the link;
An end effector attached to the other end of the first link;
A positioning device comprising:
A guide member extending in the moving direction of the mover;
First and second movers movable in the mover moving direction along the guide member;
A first link having one end attached to the first mover so as to be rotatable in a plane;
One end of the second mover is rotatably attached in a plane, and the other end of the first link is attached to the other end of the first link so as to be rotatable in a plane, thereby forming a link mechanism. A second link having a longer link length than the link;
An end effector attached to the other end of the second link;
A positioning device comprising:
The positioning device according to claim 1, wherein the end effectors face each other across an operation region shared by the end effector, and the guide members of the first and second movers as viewed from the operation region. Two positioning devices having the same arrangement order along the line.
The positioning device according to claim 1, wherein the end effectors face each other across an operation region shared by the end effector, and the guide members of the first and second movers as viewed from the operation region. Two positioning devices are provided so that the arrangement order along the direction is reversed.