WO2016103887A1 - 圧力センサ - Google Patents

圧力センサ Download PDF

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Publication number
WO2016103887A1
WO2016103887A1 PCT/JP2015/080015 JP2015080015W WO2016103887A1 WO 2016103887 A1 WO2016103887 A1 WO 2016103887A1 JP 2015080015 W JP2015080015 W JP 2015080015W WO 2016103887 A1 WO2016103887 A1 WO 2016103887A1
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WIPO (PCT)
Prior art keywords
piezoelectric sheet
layer
sheet
piezoelectric
pressure sensor
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PCT/JP2015/080015
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English (en)
French (fr)
Japanese (ja)
Inventor
裕次 渡津
柴田　淳一
直人 井前
啓佑 尾▲崎▼
栄二 角谷
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Nissha Printing Co Ltd
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Nissha Printing Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices

Definitions

  • the present invention relates to a pressure sensor, and more particularly to a pressure sensor using a bimorph or a monomorph.
  • a pressure sensor using a piezoelectric sheet is known as a device for detecting the amount of pressure on the touch panel (see, for example, Patent Document 1).
  • the pressure-sensitive sensors are stacked on the plane of the flexible touch panel so as to be in close contact with each other.
  • the pressure sensor is a monomorph composed of a single piezoelectric sheet
  • charge detection electrodes are provided on both sides of the piezoelectric sheet, and the piezoelectric sheet is bonded to glass with an adhesive.
  • the pressure sensor is a bimorph composed of two piezoelectric sheets, the two piezoelectric sheets are bonded to each other with an adhesive to form a bimorph structure, and the bimorph structure is bonded to the glass with an adhesive.
  • the conventional pressure sensor has a problem of output delay in which the output does not instantaneously rise to a steady value and gradually increases when a pressing force is applied. Therefore, the accuracy of pressure detection was low.
  • An object of the present invention is to increase the accuracy of pressure detection in a pressure sensor using a piezoelectric sheet.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference between two piezoelectric sheets generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a first piezoelectric sheet, a second piezoelectric sheet, a first detection electrode, a second detection electrode, an intermediate layer, a first layer, and a second layer.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the first piezoelectric sheet is disposed at the center of the second surface of the sheet member.
  • the second piezoelectric sheet is disposed opposite the first piezoelectric sheet on the side opposite to the sheet member of the first piezoelectric sheet.
  • the first detection electrode is disposed on the opposite side of the first piezoelectric sheet from the second piezoelectric sheet.
  • the second detection electrode is disposed on the opposite side of the second piezoelectric sheet from the first piezoelectric sheet.
  • the intermediate layer is disposed between the first piezoelectric sheet and the second piezoelectric sheet.
  • the first layer is disposed on the opposite side of the second piezoelectric sheet from the first piezoelectric sheet.
  • the second layer is disposed between the sheet member and the first piezoelectric sheet.
  • the resistance of 50 cm 2 of at least one of the first layer, the second layer, and the intermediate layer is 10 M ⁇ or less or 1 G ⁇ or more.
  • the piezoelectric output rapidly increases after pressing starts and immediately becomes a steady state. Accordingly, there is a great difference between immediately after the start of pressing (for example, after 1 second) and after a certain time has elapsed (for example, after 5 seconds). That is, the accuracy of piezoelectric output detection is high. If the resistance is 1 G ⁇ or more, the piezoelectric output increases at a low increase rate after the start of pressing. Therefore, the accuracy of piezoelectric output detection is high.
  • the resistance of 50 cm 2 of at least one of the first layer, the second layer, and the intermediate layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the first layer, the second layer, and the intermediate layer may be an adhesive.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference between two piezoelectric sheets generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a first piezoelectric sheet, a second piezoelectric sheet, a first detection electrode, a second detection electrode, an intermediate layer, and a second layer.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the first piezoelectric sheet is disposed at the center of the second surface of the sheet member.
  • the second piezoelectric sheet is disposed opposite the first piezoelectric sheet on the side opposite to the sheet member of the first piezoelectric sheet.
  • the first detection electrode is disposed on the opposite side of the first piezoelectric sheet from the second piezoelectric sheet.
  • the second detection electrode is disposed on the opposite side of the second piezoelectric sheet from the first piezoelectric sheet.
  • the intermediate layer is disposed between the first piezoelectric sheet and the second piezoelectric sheet.
  • the second layer is disposed between the sheet member and the second piezoelectric sheet.
  • the resistance of 50 cm 2 of at least one of the second layer and the intermediate layer is 10 M ⁇ or less or 1 G ⁇ or more. In this case, as described above, if the resistance satisfies the above condition, the accuracy of detecting the pressing force is increased.
  • the resistance of 50 cm 2 of at least one of the second layer and the intermediate layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the second layer and the intermediate layer may be an adhesive.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference between two piezoelectric sheets generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a first power generation sheet, a second power generation sheet, an intermediate layer, a first detection electrode, and a second detection electrode.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the first piezoelectric sheet is provided on the second surface side of the sheet member.
  • the second piezoelectric sheet is disposed opposite the first piezoelectric sheet on the side opposite to the sheet member of the first piezoelectric sheet.
  • the intermediate layer is disposed between the first piezoelectric sheet and the second piezoelectric sheet.
  • the first detection electrode is formed on the surface of the second piezoelectric sheet opposite to the first piezoelectric sheet.
  • the second detection electrode is formed on the surface of the first piezoelectric sheet on the sheet member side.
  • the 50 cm 2 resistance of the intermediate layer is 10 M ⁇ or less or 1 G ⁇ or more. In this case, as described above, if the resistance satisfies the above condition, the accuracy of detecting the pressing force is increased.
  • the resistance of 50 cm 2 of the intermediate layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the intermediate layer may be an adhesive.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference between two piezoelectric sheets generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a first piezoelectric sheet, a second piezoelectric sheet, an intermediate layer, a first film layer, a first detection electrode, a second detection electrode, and a first layer.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the first piezoelectric sheet is provided on the second surface side of the sheet member.
  • the second piezoelectric sheet is disposed opposite the first piezoelectric sheet on the side opposite to the sheet member of the first piezoelectric sheet.
  • the intermediate layer is disposed between the first piezoelectric sheet and the second piezoelectric sheet.
  • the first film layer is disposed on the opposite side of the second piezoelectric sheet from the first piezoelectric sheet.
  • the first detection electrode is formed on the surface of the first film layer on the second piezoelectric sheet side.
  • the second detection electrode is formed on the surface of the first piezoelectric sheet on the sheet member side.
  • the first layer is disposed between the first film layer, the first detection electrode, and the first piezoelectric sheet.
  • the resistance of 50 cm 2 of at least one of the first layer and the intermediate layer is 10 M ⁇ or less or 1 G ⁇ or more. In this case, as described above, if the resistance satisfies the above condition, the accuracy of detecting the pressing force is increased.
  • the resistance of 50 cm 2 of at least one of the first layer and the intermediate layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the first layer and the intermediate layer may be an adhesive.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference of one piezoelectric sheet generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a piezoelectric sheet, a first detection electrode, a second detection electrode, a first layer, and a second layer.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the piezoelectric sheet is disposed at the center of the second surface of the sheet member.
  • the first detection electrode is disposed on the sheet member side of the piezoelectric sheet.
  • the second detection electrode is disposed on the side opposite to the sheet member of the piezoelectric sheet.
  • the first layer is disposed on the side opposite to the sheet member of the piezoelectric sheet.
  • the second layer is disposed between the sheet member and the piezoelectric sheet.
  • the resistance of 50 cm 2 of at least one of the first layer and the second layer is 10 M ⁇ or less or 1 G ⁇ or more. In this case, as described above, if the resistance satisfies the above condition, the accuracy of detecting the pressing force is increased.
  • the resistance of at least one of the first layer and the second layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the first layer and the second layer may be an adhesive.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference of one piezoelectric sheet generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a piezoelectric sheet, a first detection electrode, a second detection electrode, and a second layer.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the piezoelectric sheet is disposed at the center of the second surface of the sheet member.
  • the first detection electrode is disposed on the sheet member side of the piezoelectric sheet.
  • the second detection electrode is disposed on the side opposite to the sheet member of the piezoelectric sheet.
  • the second layer is disposed between the sheet member and the piezoelectric sheet.
  • the 50 cm 2 resistance of the second layer is 10 M ⁇ or less or 1 G ⁇ or more. In this case, as described above, if the resistance satisfies the above condition, the accuracy of detecting the pressing force is increased.
  • the 50 cm 2 resistance of the second layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the second layer may be an adhesive.
  • a pressure sensor is a pressure sensor for detecting pressure based on a potential difference between two piezoelectric sheets generated by pressure applied from the outside.
  • the pressure sensor includes a sheet member, a piezoelectric sheet, a first film layer, a first detection electrode, a second detection electrode, and a first layer.
  • the sheet member has a first surface on which pressure acts and a second surface on which the edge is supported.
  • the piezoelectric sheet is provided on the second surface side of the sheet member.
  • the first film layer is disposed on the side opposite to the sheet member of the piezoelectric sheet.
  • the first detection electrode is formed on the surface of the first film layer on the sheet member side.
  • the second detection electrode is formed on the surface of the piezoelectric sheet on the sheet member side.
  • the first layer is disposed between the first film layer, the first detection electrode, and the piezoelectric sheet.
  • the 50 cm 2 resistance of the first layer is 10 M ⁇ or less or 1 G ⁇ or more. In this case, as described above, if the resistance satisfies the above condition, the accuracy of detecting the pressing force is increased.
  • the 50 cm 2 resistance of the first layer may be 10 M ⁇ or less or 10 G ⁇ or more.
  • the first layer may be an adhesive.
  • the accuracy of pressure detection is increased.
  • FIG. 1 is a schematic configuration diagram of a pressure detection device according to the first embodiment.
  • the pressure detection device 1 is a device for measuring the magnitude of a pressing force (load) when pressed by a finger or a pen. Specifically, the pressure detection device 1 detects a pressure based on a potential difference between two piezoelectric sheets generated by a pressure applied from the outside.
  • the front side (upper side in FIG. 1) viewed from the user during use is referred to as the “input surface side” of the pressure detection device 1, and the rear side (lower side in FIG. 1) viewed from the user is the pressure detection device. 1 is called “rear side”.
  • the pressing means for applying pressure to the pressure detection device 1 is not particularly limited as long as it can apply pressure. Examples of the pressing means include a finger and a stylus ben.
  • the pressure detection device 1 includes a pressure sensor 3 and a detection circuit 5.
  • the pressure sensor 3 is a sensor that generates a voltage according to the pressing force.
  • the detection circuit 5 is a circuit for detecting the pressing amount from the voltage signal detected by the detection electrode, and includes an integration circuit 31 and an AD conversion unit 33.
  • the integration circuit 31 converts the total amount of charges output from the pressure sensor 3 into a voltage signal, that is, integrates and outputs the piezoelectric signal.
  • the output voltage signal is hereinafter referred to as “piezoelectric output”.
  • the AD converter 33 converts the analog voltage signal output from the integration circuit 31 into a digital voltage signal.
  • the pressure sensor 3 mainly includes the sheet member 7, the first piezoelectric sheet 9 a, the second piezoelectric sheet 9 b, the second detection electrode 13, the first detection electrode 17, and the intermediate adhesive layer 53. (An example of an intermediate layer), a first adhesive layer 23 (an example of a first layer), and a second adhesive layer 21 (an example of a second layer).
  • a first adhesive layer 23 an example of a first layer
  • a second adhesive layer 21 an example of a second layer
  • the pressure sensor 3 has a case 41.
  • the casing 41 has a rectangular frame shape and can be formed of synthetic resin or metal. Another configuration of the pressure sensor 3 is accommodated in the housing 41. More specifically, the housing 41 has a recess 41a that opens in a rectangular shape toward the input surface.
  • the recess 41a is formed to have a step, and this step is a support portion 41b.
  • the support portion 41b corresponds to the shape of the recess 41a, that is, is formed in a rectangular frame shape.
  • the support portion 41 b corresponds to an edge portion of the back surface 7 b of the sheet member 7 described later, and has a structure for supporting pressure acting on the sheet member 7.
  • a sheet member 7 (to be described later) is stored in the first region on the input surface side of the support portion 41b, and other components to be described later are stored in the second region on the back side.
  • the side surface of the first region is in contact with the sheet member 7 with a slight gap
  • the side surface of the second region is in contact with the other components of the pressure sensor 3 with a slight gap
  • a space 43 is secured between the bottom surface of the housing 41 and the pressure sensor 3.
  • the pressure sensor 3 includes the sheet member 7, the third adhesive layer 19, the second resin film 11, the second detection electrode 13, the second adhesive layer 21, and the first one from the input surface side toward the back surface side.
  • the piezoelectric sheet 9a, the intermediate adhesive layer 53, the second piezoelectric sheet 9b, the first adhesive layer 23, the first detection electrode 17, and the first resin film 15 are provided. Each configuration will be described below. Note that in FIG. 1 and other cross-sectional views, the position and thickness of each layer are appropriately adjusted for convenience of explanation.
  • the sheet member 7 includes an input surface 7a (an example of the first surface) on which pressure acts, and a back surface 7b (an example of the second surface) on which the edge is supported.
  • the sheet member 7 is a sheet-like member, and is disposed so as to cover the support portion 41b of the housing 41 and the region surrounded by the support portion 41b.
  • the edge part of the back surface 7b is being fixed so that it may be supported by the support part 41b.
  • the sheet member 7 preferably has transparency, scratch resistance, antifouling property, and the like as a protective plate.
  • the material of the sheet member 7 include general-purpose resins such as polyethylene terephthalate and acrylic resins, general-purpose engineering resins such as polyacetal resins and polycarbonate resins, super engineering resins such as polysulfone resins and polyphenylsulfide resins, and glass. There is.
  • the thickness of the sheet member 7 is, for example, 0.4 mm to 1.0 mm.
  • the second resin film 11 is fixed to the back surface 7 b of the sheet member 7 through the third adhesive layer 19.
  • the second resin film 11 is a transparent resin film, and is made of, for example, polyethylene terephthalate (PET) resin or polycarbonate (PC) resin.
  • a transparent optical adhesive is used for the third adhesive layer 19.
  • An example of this is a pressure sensitive adhesive (hereinafter referred to as “PSA”).
  • PSA pressure sensitive adhesive
  • the thickness of the third adhesive layer 19 is 5 ⁇ m to 300 ⁇ m.
  • the material of the third adhesive layer 19 is, for example, an acrylic, silicone, or epoxy adhesive.
  • the first piezoelectric sheet 9 a is disposed at the center of the back surface 7 b of the sheet member 7.
  • the second piezoelectric sheet 9b is disposed on the opposite side of the first piezoelectric sheet 9a from the sheet member 7 so as to face the first piezoelectric sheet 9a.
  • the second adhesive layer 21 (an example of the second layer) is disposed between the sheet member 7 and the first piezoelectric sheet 9a. That is, the first piezoelectric sheet 9 a and the second piezoelectric sheet 9 b are fixed to the back surface of the second resin film 11 via the second adhesive layer 21.
  • a transparent optical adhesive is used for the second adhesive layer 21.
  • An example of such is a pressure sensitive adhesive (PSA).
  • PSA pressure sensitive adhesive
  • the thickness of the second adhesive layer 21 is 5 ⁇ m to 300 ⁇ m.
  • the material of the second adhesive layer 21 is, for example, an acrylic, silicone, or epoxy adhesive.
  • the second adhesive layer 21 is preferably cured by UV curing or heat curing after the adhesive is bonded.
  • the first piezoelectric sheet 9a and the second piezoelectric sheet 9b constitute a bimorph that generates a potential difference corresponding to the pressing force on both surfaces when the bending caused by the pressing force is generated. Both sheets have the same shape and face each other.
  • the first piezoelectric sheet 9a is disposed on the input surface side, and the second piezoelectric sheet 9b is disposed on the back side.
  • the first piezoelectric sheet 9a and the second piezoelectric sheet 9b are bonded to each other through an intermediate adhesive layer 53 made of PSA.
  • the intermediate adhesive layer 53 is disposed between the first piezoelectric sheet 9a and the second piezoelectric sheet 9b.
  • the intermediate adhesive layer 53 is made of the same material as the second adhesive layer 21, for example.
  • the thickness of the intermediate adhesive layer 53 is 5 ⁇ m or more. More preferably, the thickness of the intermediate adhesive layer 53 is in the range of 25 to 100 ⁇ m.
  • the second detection electrode 13 is disposed on the opposite side of the first piezoelectric sheet 9a from the second piezoelectric sheet 9b, that is, on the input surface side of the first piezoelectric sheet 9a. Specifically, the second detection electrode 13 is formed on the back surface of the second resin film 11.
  • the first detection electrode 17 is disposed on the opposite side of the second piezoelectric sheet 9b from the first piezoelectric sheet 9a, that is, on the back side of the second piezoelectric sheet 9b. Specifically, the first detection electrode 17 is formed on the input side surface of the first resin film 15.
  • the 2nd detection electrode 13 and the 1st detection electrode 17 are comprised with the material which has electroconductivity.
  • the conductive material include transparent conductive oxides such as indium-tin oxide (ITO), tin-zinc oxide (Tin), polyethylene dioxythiophene A conductive polymer such as (Polyethylenedioxythiophene, PEDOT) can be used.
  • the second detection electrode 13 and the first detection electrode 17 may be directly formed on the surfaces of the first piezoelectric sheet 9a and the second piezoelectric sheet 9b, respectively.
  • a manufacturing method of a detection back electrode there exists vapor deposition or screen printing, for example.
  • the first resin film and / or the second resin film is omitted.
  • the thicknesses of the second detection electrode 13 and the first detection electrode 17 are, for example, 1 nm to 30,000 nm, respectively.
  • a conductive metal such as copper or silver may be used as the conductive material.
  • the detection electrode may be formed on the piezoelectric sheet by vapor deposition, or may be formed using a metal paste such as a copper paste or a silver paste. Note that the detection electrode made of metal may have a mesh structure in order to improve translucency.
  • a material having conductivity a material in which a conductive material such as carbon nanotube, metal particle, or metal nanofiber is dispersed in a binder may be used.
  • the first resin film 15 is disposed at the lowest position of the layer configuration.
  • the first resin film 15 is fixed to the second piezoelectric sheet 9 b by the first adhesive layer 23.
  • the first resin film 15 is a transparent resin film, and is made of, for example, polyethylene terephthalate (PET) resin or polycarbonate (PC) resin.
  • PET polyethylene terephthalate
  • PC polycarbonate
  • the first adhesive layer 23 (an example of the first layer) is disposed on the opposite side of the second piezoelectric sheet 9b from the first piezoelectric sheet 9a.
  • the first adhesive layer 23 is made of the same material as the second adhesive layer 21 and the intermediate adhesive layer 53, for example.
  • first piezoelectric sheet 9a and the second piezoelectric sheet 9b a sheet obtained by forming a ferroelectric material into a sheet shape and then polarizing it in the thickness direction can be used.
  • ferroelectric material include PVDF, copolymers such as PVDF and TrFE, ETFE, and PZT.
  • the first piezoelectric sheet 9a and the second piezoelectric sheet 9b are laminated so that their polarization directions are opposite to each other.
  • an optically active substance such as polylactic acid can be used.
  • PLLA may be used for the first piezoelectric sheet 9a and PDLA may be used for the second piezoelectric sheet 9b.
  • the combination of the materials of the first piezoelectric sheet 9a and the second piezoelectric sheet 9b is not particularly limited. However, it is preferable that the material which has the same characteristic is used for both sheets. This is because unnecessary output from the piezoelectric sheet caused by thermal stress due to temperature change and pyroelectric effect can be canceled.
  • the sheet member 7 has higher rigidity than the first piezoelectric sheet 9a and the second piezoelectric sheet 9b, so that the first piezoelectric sheet 9a and the second piezoelectric sheet 9b include Tensile stress is generated.
  • a tensile stress ⁇ u is generated in the first piezoelectric sheet 9a
  • a tensile stress ⁇ l is generated in the second piezoelectric sheet 9b.
  • the potential difference V 2 ′ generated between the second piezoelectric sheets 9b is a difference between the potential on the input surface side and the potential on the back surface side of the second piezoelectric sheet 9b, and the potential difference V 2 ′ is the magnitude of the tensile stress ⁇ l . It is proportional to
  • the intermediate layer disposed between the first piezoelectric sheet 9 a and the second piezoelectric sheet 9 b is only the intermediate adhesive layer 53.
  • the configuration is not limited to the adhesive layer alone.
  • the intermediate layer may be composed of a core sheet and an adhesive on both sides.
  • a sheet that realizes optical characteristics may be used as a part of the intermediate layer.
  • the above also applies to other adhesive layers.
  • the resistance is 10 M ⁇ or less or 1 G ⁇ or more.
  • the use temperature range is, for example, a range of 0 ° C. to 40 ° C.
  • FIGS. 2 to 8 are diagrams illustrating how the charge generated by the potential difference generated in the piezoelectric sheet in the pressure sensor 3 moves to the detection circuit using a capacitive coupling model.
  • a capacitor Cp2 is formed between the second detection electrode 13 and the first piezoelectric sheet 9a with the second adhesive layer 21 interposed therebetween.
  • a capacitor Cm is formed with an intermediate adhesive layer 53 interposed therebetween.
  • a capacitor C p1 is formed between the first detection electrode 17 and the second piezoelectric sheet 9b with the first adhesive layer 23 interposed therebetween.
  • a minute current flows through each adhesive layer, it can be modeled as a circuit with a resistor in parallel with a capacitor.
  • the capacitor C 2 sandwiching the first piezoelectric sheet 9a is formed between the upper and lower surfaces of the first piezoelectric sheet 9a. Between the upper and lower surfaces of the second piezoelectric sheet 9b, the capacitor C 1 is formed across the second piezoelectric sheet 9b.
  • the first piezoelectric sheets 9a and 9b are usually low in conductivity.
  • the electrode connected to the detection circuit 5 is maintained at a substantially constant potential. The pressure is measured by detecting the amount of charge flowing into the detection circuit via this electrode.
  • Step 2 the remaining charges slowly pass through the resistors R p1 , R m, and R p2 of the first adhesive layer 23, the intermediate adhesive layer 53, and the second adhesive layer 21, and the detection circuit 5 (Step 2).
  • Step 1 in FIG. 4 will be described in detail with reference to FIGS.
  • the potentials of the second detection electrode 13 and the first detection electrode 17 need to be constant. Therefore, the following equation 1 is obtained according to Kirchhoff's law.
  • step 2 in FIG. 5 will be described in detail with reference to FIG. 8.
  • the remaining charge slowly passes through the resistors R p1 , R m, and R p2 of the first adhesive layer 23, the intermediate adhesive layer 53, and the second adhesive layer 21 and flows into the detection circuit 5. .
  • the charges of the capacitors C p1 , C m and C p2 of the first adhesive layer 23, the intermediate adhesive layer 53, and the second adhesive layer 21 are slowly lost.
  • the output increases at a low increase rate. Therefore, for example, the ratio of the piezoelectric output 1 second after the press start to the piezoelectric output 5 seconds after the press start increases. That is, the difference in piezoelectric output between 5 seconds after the start of pressing, in which the piezoelectric output is stable, and 1 second immediately after the start of pressing is small, that is, the accuracy of piezoelectric output detection is high. In the above case, if the resistances R p1 , R m, and R p2 are small, the resistance increases rapidly and immediately becomes a steady state.
  • the ratio of the piezoelectric output 1 second after the press start to the piezoelectric output 5 seconds after the press start increases. That is, the difference in piezoelectric output between 5 seconds after the start of pressing, in which the piezoelectric output is stable, and 1 second immediately after the start of pressing is small, that is, the accuracy of piezoelectric output detection is high.
  • the output increases at an increasing rate such that it becomes a steady state after 5 to 6 seconds, for example. Therefore, for example, the ratio of the piezoelectric output 1 second after the press start to the piezoelectric output 5 seconds after the press start is low. That is, there is a large difference in pressure voltage between 5 seconds after the start of pressing, in which the piezoelectric output is stable, and 1 second after the start of pressing, that is, the accuracy of the piezoelectric output is low.
  • the charge generated in the piezoelectric sheet is instantaneously detected according to Equation 4 (Step 1), and then gradually detected by flowing through the resistor (Step 2).
  • the simulation result by calculation will be described.
  • the simulation has the same structure as that of the above-described embodiment.
  • a bimorph (corresponding to the first piezoelectric sheet 9a and the second piezoelectric sheet 9b) is bonded to glass (corresponding to the sheet member 7), and the four sides are the base (the housing of the electronic device).
  • the pressure (corresponding to the pressure sensor 3) fixed to the body 41 with a double-sided tape was assumed.
  • the piezoelectric sheet was a film-like PVDF copolymer.
  • the thickness of the piezoelectric sheet was 0.03 mm.
  • PSA 1 (corresponding to the first adhesive layer 23), PSA 2 (corresponding to the second adhesive layer 21), and PSA mid (corresponding to the intermediate adhesive layer 53) were acrylic pressure-sensitive adhesives.
  • the thickness of PSA mid was 0.040 mm.
  • PSA 1 and PSA 2 had a thickness of 0.025 mm.
  • the PET had a thickness of 0.05 mm.
  • the calculation was performed using EXCEL. And the electric charge of the surface of the piezoelectric sheet which arose by pressing was 1 nC, respectively. Further, with respect to the parameters, referring to FIGS.
  • Q 1 is 1 nC
  • Q 2 is 1 nC
  • C 1 is 14.8 nF
  • C m is 4.5 nF
  • C 2 was 7.1 nF
  • R p1 , R m and R p2 were variable.
  • the value of each resistance in the following description is for an area of 50 cm 2 and is appropriately changed if the size of the sensor changes.
  • FIG. 9 is a table showing the output rate in the transient characteristic of the piezoelectric output corresponding to the combination of the resistance of the intermediate layer and the resistance of the first layer and the second layer.
  • the resistances R p1 and R p2 of the first adhesive layer 23 (an example of the first layer) and the second adhesive layer 21 (an example of the second layer), and the intermediate adhesive layer 53 (intermediate layer) resistance R m of example) is in the case of 100M ⁇ / 50cm 2, the ratio is the lowest.
  • At least one of the resistances R p1 and R p2 of the first adhesive layer 23 and the second adhesive layer 21 and the resistance R m of the intermediate adhesive layer 53 needs to be 10 M ⁇ / 50 cm 2 or less or 1 G ⁇ / 50 cm 2 or more. It is.
  • a region 79 is an unfavorable reference example. In the following description, the notation of / 50 cm 2 is omitted for simplification in the description of resistance.
  • the region 81 (not including the region 79) is an example which is an example but relatively unfavorable.
  • the area other than the area 79 is the range of the present embodiment, and the area other than the area 81 (outside the area 81) is a more preferable range of the present embodiment.
  • the output in FIG. 10 is a charge flowing into the detection circuit.
  • the resistances R p1 and R p2 of the first adhesive layer 23 (corresponding to the first layer) and the second adhesive layer 21 (second layer, two layers, etc.) and the intermediate adhesive layer 53 (corresponding to the intermediate layer) the resistor R m was changed to 1M ⁇ ⁇ 100G ⁇ while the same value.
  • the first detection electrode 17 is formed on the first resin film 15, but the first detection electrode 17 may be formed on the back side of the second piezoelectric sheet 9b.
  • FIG. 11 is a schematic configuration diagram of a pressure sensor according to the second embodiment.
  • FIG. 12 is a graph showing transient characteristics of the pressure sensor.
  • description is abbreviate
  • the first detection electrode 17A is directly formed on the back surface of the second piezoelectric sheet 9b.
  • the first detection electrode 17A is, for example, ITO, silver nanowire, or PEDOT.
  • the simulation result of the second embodiment is shown in FIG.
  • the increase rate of the piezoelectric output is highest when the resistances R p2 and R m are 100 M ⁇ , and the piezoelectric output is increased when the resistances R p2 and R m are 1 M ⁇ , 10 M ⁇ , 1 G ⁇ , 10 G ⁇ , and 100 G ⁇ . It can be seen that the rate of increase is low. Also, FIG. 12 shows that the increase rate of the piezoelectric output is higher when the resistances R p2 and R m are 1 G ⁇ than when the resistances are 1 M ⁇ , 10 M ⁇ , 10 G ⁇ , and 100 G ⁇ . Thus, in the second embodiment, the same excellent effect as that of the first embodiment can be obtained.
  • the second detection electrode 13 is formed on the second resin film 11, but the second detection electrode 13 may be formed on the back side of the first piezoelectric sheet 9a.
  • FIG. 13 is a schematic configuration diagram of a pressure sensor according to the third embodiment.
  • description is abbreviate
  • the second detection electrode 13A is directly formed on the back surface of the first piezoelectric sheet 9a.
  • the second detection electrode 13A is, for example, ITO, silver nanowire, or PEDOT.
  • FIG. 14 is a table showing the output rate in the transient characteristic of the piezoelectric output corresponding to the resistance of the intermediate layer.
  • the resistance of the intermediate bonding layer 53 is represented as R m.
  • R m the resistance of the intermediate bonding layer 53
  • the resistance R m of the intermediate adhesive layer 53 is 100 M.OMEGA, the ratio is the lowest.
  • the resistance R m of the intermediate adhesive layer 53 is required to be 10M ⁇ less or 1G ⁇ or more.
  • a region 67 is an unfavorable reference example.
  • the resistance of the intermediate adhesive layer 53 is medium (for example, 1 G ⁇ ), the ratio is not so high. Therefore, the resistance of the intermediate adhesive layer 53 is preferably 10 G ⁇ or more.
  • the region 69 (not including the region 67) is an example which is an example but relatively unfavorable. To summarize the above, in FIG. 14, the area other than the area 67 is the range of the present embodiment, and the area other than the area 69 (outside the area 69) is a more preferable range of the present embodiment.
  • the second detection electrode 13 is formed on the second resin film 11, but the second detection electrode 13 may be formed on the back side of the first piezoelectric sheet 9a.
  • FIG. 15 is a schematic configuration diagram of a pressure sensor according to the fourth embodiment.
  • description is abbreviate
  • the second detection electrode 13A is directly formed on the back surface of the first piezoelectric sheet 9a.
  • the second detection electrode 13A is, for example, ITO, silver nanowire, or PEDOT.
  • the same excellent effects as those of the first embodiment can be obtained by setting the conditions of the first adhesive layer 23 and the intermediate adhesive layer 53 to the same conditions as those of the first embodiment.
  • FIG. 16 is a schematic configuration diagram of a pressure detection device according to the fifth embodiment.
  • description of the same structure as that of the first embodiment will be omitted, and only different points will be described.
  • the piezoelectric sheet 9 is a single sheet unlike the first embodiment.
  • the pressure sensor 3 can be modeled as a circuit diagram as shown in FIGS.
  • FIGS. 17 to 23 are diagrams illustrating how the charge generated by the potential difference generated in the piezoelectric sheet in the pressure sensor moves to the detection circuit using a capacitive coupling model.
  • a capacitor Cp2 is formed between the second detection electrode 13 and the first piezoelectric sheet 9a with the second adhesive layer 21 interposed therebetween.
  • a capacitor C p1 is formed between the first detection electrode 17 and the second piezoelectric sheet 9b with the first adhesive layer 23 interposed therebetween.
  • a minute current flows through each adhesive layer, it can be modeled as a circuit with a resistor in parallel with a capacitor.
  • the capacitor C 1 across the piezoelectric sheet 9 is formed.
  • the piezoelectric sheet 9 is usually low in conductivity.
  • the electrode connected to the detection circuit 5 is maintained at a substantially constant potential. The pressure is measured by detecting the amount of charge flowing into the detection circuit via this electrode.
  • Step 2 the remaining charges slowly pass through the resistors R p1 and R p2 of the first adhesive layer 23 and the second adhesive layer 21 and flow into the detection circuit 5 (step 2).
  • Step 1 in FIG. 19 will be described in detail with reference to FIGS. 21 and 22.
  • the potentials of the second detection electrode 13 and the first detection electrode 17 need to be constant. Therefore, the following expression 5 is obtained according to Kirchhoff's law.
  • step 2 in FIG. 20 will be described in detail with reference to FIG.
  • the remaining charge slowly passes through the resistors R p1 and R p2 of the first adhesive layer 23 and the second adhesive layer 21 and flows into the detection circuit 5. In this way, the charges of the capacitors C p1 and C p2 of the first adhesive layer 23 and the second adhesive layer 21 are slowly lost.
  • the output increases at a low increase rate after the start of pressing. Therefore, for example, the ratio of the piezoelectric output 1 second after the press start to the piezoelectric output 5 seconds after the press start increases. That is, the difference in piezoelectric output between 5 seconds after the start of pressing, in which the piezoelectric output is stable, and 1 second immediately after the start of pressing is small, that is, the accuracy of piezoelectric output detection is high. In the above case, if the resistances R p1 and R p2 are small, the output increases rapidly after the start of pressing and immediately becomes a steady state.
  • the ratio of the piezoelectric output 1 second after the press start to the piezoelectric output 5 seconds after the press start increases. That is, the difference in piezoelectric output between 5 seconds after the start of pressing, in which the piezoelectric output is stable, and 1 second immediately after the start of pressing is small, that is, the accuracy of piezoelectric output detection is high.
  • the output increases at an increase rate such that it becomes a steady state after 5 to 6 seconds, for example. Therefore, for example, the ratio of the piezoelectric output 1 second after the press start to the piezoelectric output 5 seconds after the press start is low. That is, there is a large difference in pressure voltage between 5 seconds after the start of pressing, in which the piezoelectric output is stable, and 1 second after the start of pressing, that is, the accuracy of the piezoelectric output is low.
  • FIG. 24 is a table showing the output rate in the transient characteristic of the piezoelectric output corresponding to the combination of the resistance of the first layer and the resistance of the second layer.
  • the above ratio is obtained when the resistance R p1 of the first adhesive layer 23 (an example of the first layer) and the resistance R p2 of the second adhesive layer 21 (an example of the second layer) are 100 M ⁇ . Is the lowest. Therefore, at least one of the resistance R p1 of the first adhesive layer 23 and the resistance R p2 of the second adhesive layer 21 needs to be 10 M ⁇ or less or 1 G ⁇ or more.
  • the region 71 is an unfavorable reference example.
  • the region 73 (not including the region 71) is an example, which is a relatively unpreferable example.
  • the region other than the region 71 is the range of the present embodiment, and the region other than the region 73 (outside the region 73) is a more preferable range of the present embodiment.
  • FIG. 25 is a graph showing transient characteristics of the pressure sensor. Note that the output in FIG. 25 is a charge flowing into the detection circuit.
  • FIG. 26 is a schematic configuration diagram of a pressure sensor according to the sixth embodiment.
  • description is abbreviate
  • the first detection electrode 17A is directly formed on the back surface of the second piezoelectric sheet 9b.
  • the first detection electrode 17A is, for example, ITO, silver nanowire, or PEDOT.
  • the simulation result of the fourth embodiment will be described with reference to FIGS.
  • FIG. 27 is a table showing the output rate in the transient characteristic of the piezoelectric output corresponding to the resistance of the second layer.
  • the resistance of the second adhesive layer 21 is expressed as R p2 .
  • the resistance R p2 of the second adhesive layer 21 is 100 M ⁇ , the ratio is the lowest. Therefore, the resistance Rp2 of the second adhesive layer 21 needs to be 10 M ⁇ or less or 1 G ⁇ or more.
  • a region 75 is an unfavorable reference example.
  • the resistance of the second adhesive layer 21 is medium (for example, 1 G ⁇ ), the ratio is not so high. Therefore, the resistance of the second adhesive layer 21 is preferably 10 G ⁇ or more.
  • the region 77 (not including the region 75) is an example, which is a relatively undesirable example.
  • the region other than the region 75 is the range of the present embodiment, and the region other than the region 77 (outside the region 77) is a more preferable range of the present embodiment.
  • FIG. 28 is a graph showing transient characteristics of the pressure sensor. Note that the output in FIG. 28 is the electric charge flowing into the detection circuit. As apparent from FIG. 28, the increase rate of the piezoelectric output is highest when the resistance R p2 is 100 M ⁇ , and the increase rate of the piezoelectric output is low when the resistance R p2 is 1 ⁇ , 10 ⁇ , 1 G ⁇ , 10 G ⁇ , and 100 G ⁇ . I understand that. Further, FIG.
  • FIG. 29 is a schematic configuration diagram of a pressure sensor according to the seventh embodiment.
  • description is abbreviate
  • the second detection electrode 13 ⁇ / b> A is directly formed on the back surface of the piezoelectric sheet 9.
  • the second detection electrode 13A is, for example, ITO, silver nanowire, or PEDOT.
  • the same excellent effect as that of the fifth embodiment can be obtained by setting the conditions of the first adhesive layer 23 to the same conditions as those of the first adhesive layer 23 of the fifth embodiment.
  • the present invention can be widely applied to pressure sensors, particularly pressure sensors using monomorphs or bimorphs.
  • Pressure detection device 3 Pressure sensor 5: Detection circuit 7: Sheet member 8: Intermediate adhesive layer (intermediate layer) 9: Piezoelectric sheet 9a: First piezoelectric sheet 9b: Second piezoelectric sheet 11: Second resin film (second film layer) 13: Second detection electrode 15: First resin film (first film layer) 17: First detection electrode 17A: Second detection electrode (first detection electrode) 19: Third adhesive layer 21: Second adhesive layer (second layer) 23: First adhesive layer (first layer) 53: Intermediate adhesive layer (intermediate layer)

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JPS62156503A (ja) * 1985-12-27 1987-07-11 Daikin Ind Ltd 圧電センサ
JPH0817027A (ja) * 1994-06-27 1996-01-19 Matsushita Electric Ind Co Ltd 磁気記録再生装置
JP2009080090A (ja) * 2007-09-05 2009-04-16 Erumekku Denshi Kogyo Kk 圧電センサ
JP2011222679A (ja) * 2010-04-07 2011-11-04 Daikin Ind Ltd 透明圧電シート
JP2013131110A (ja) * 2011-12-22 2013-07-04 Kddi Corp タッチパネル、電話機
JP2013531893A (ja) * 2010-06-14 2013-08-08 ザ・ボーイング・カンパニー 太陽電池セル構造、及び同太陽電池セル構造を形成する組成物及び方法

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JPH04285720A (ja) * 1991-03-14 1992-10-09 Toshiba Corp 磁気ヘッド装置
JPH11118823A (ja) * 1997-10-14 1999-04-30 Matsushita Electric Ind Co Ltd 機械−電気変換子、機械−電気変換子の製造方法及び加速度センサ

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Publication number Priority date Publication date Assignee Title
JPS62156503A (ja) * 1985-12-27 1987-07-11 Daikin Ind Ltd 圧電センサ
JPH0817027A (ja) * 1994-06-27 1996-01-19 Matsushita Electric Ind Co Ltd 磁気記録再生装置
JP2009080090A (ja) * 2007-09-05 2009-04-16 Erumekku Denshi Kogyo Kk 圧電センサ
JP2011222679A (ja) * 2010-04-07 2011-11-04 Daikin Ind Ltd 透明圧電シート
JP2013531893A (ja) * 2010-06-14 2013-08-08 ザ・ボーイング・カンパニー 太陽電池セル構造、及び同太陽電池セル構造を形成する組成物及び方法
JP2013131110A (ja) * 2011-12-22 2013-07-04 Kddi Corp タッチパネル、電話機

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