WO2016086463A1 - 光阻解凝机 - Google Patents
光阻解凝机 Download PDFInfo
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- WO2016086463A1 WO2016086463A1 PCT/CN2014/094167 CN2014094167W WO2016086463A1 WO 2016086463 A1 WO2016086463 A1 WO 2016086463A1 CN 2014094167 W CN2014094167 W CN 2014094167W WO 2016086463 A1 WO2016086463 A1 WO 2016086463A1
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- photoresist
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- adjacent
- photoresist container
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F29/00—Mixers with rotating receptacles
Definitions
- the present invention relates to the field of display panel production technology, and in particular to a photoresist decondenser for use in a display panel process.
- CF Color Filter, color filter
- the photoresist material is generally subjected to temperature recovery (recovery temperature) in a static state and a normal temperature condition before being disposed on the CF substrate, and the temperature recovery process generally takes more than 12 hours.
- the photoresist material placed in the photoresist container is in a state of stagnation for a long time, and at this time, the molecules in the photoresist material may be partially due to the “Vandelwald force effect”. Gathering together, a plurality of particles having a larger particle size are formed in the photoresist material in the photoresist container.
- These larger particle size particles can increase the load placed on the CF substrate by the production line, and also affect the yield and display quality of the CF substrate.
- a photoresist decondenser comprising: a machine; a rotating member disposed on the machine, the rotating member for rotating the light-resisting container, wherein the light
- the resistor container is provided with a photoresist material; at least one transmission member is coupled to the rotating member; an electric motor is disposed on the machine table, and the motor is coupled to at least one of the transmission members for passing the transmission member
- the rotating member is rotated;
- the transmission member includes a gear set, and the gear set includes a first gear and at least a second gear, and the first gear and the second gear are coupled to each other.
- the first gear is configured to drive rotation of the second gear coupled thereto;
- the motor shaft of the motor is fixed to the first gear to rotate the first gear about the motor shaft;
- the second gear is fixed to the first rotating shaft of the rotating column.
- the rotating member includes: at least two rotating columns, the two rotating columns are used to jointly carry the photoresist container, and are used to jointly rotate the photoresist container;
- the first rotating shafts of the two rotating columns are located on the same plane and are parallel to each other, and a first gap is formed between the two adjacent rotating columns, and the first gap is smaller than the largest cross section of the photoresist container.
- the diameter of the inscribed circle; the rotation directions of the two adjacent rotating columns are the same, and the rotational speeds of the adjacent two rotating columns are the same; the first rotating shafts of the adjacent two rotating columns are located on the same horizontal plane or inclined surface.
- the surface of the rotating column is provided with a first cushion, the first cushion is for contacting the photoresist container, and for applying the chamber to the photoresist container
- the force provided by the rotating column is used to rotate the photoresist container.
- the rotating member includes: a first rotating base for carrying and fixing the photoresist container, and for driving the photoresist container to rotate about the second rotating shaft; a first rotating base for fixing one end of the photoresist container; the photoresist decondenser further comprising: a second rotating base for fixing the other end of the photoresist container And for assisting the rotation of the photoresist container, the rotating shaft of the second rotating base is collinear with the second rotating shaft; the third angle between the second rotating shaft and the horizontal plane is between 0 and 90 degrees Within the scope.
- the rotating member comprises: at least two roller sets, two adjacent roller sets for jointly carrying the photoresist container, and for jointly driving the photoresist container to rotate;
- the roller set includes at least two rollers, and at least two of the roller groups are serially connected to the third rotating shaft; the third rotating shafts of the adjacent two roller groups are located on the same plane and are parallel to each other.
- the second gap is smaller than the diameter of the largest inscribed circle of the cross section of the photoresist container; the rotation directions of the adjacent two roller groups are the same, The rotational speeds of the two adjacent roller sets are the same; the third rotating shafts of the adjacent two roller sets are located on the same horizontal plane or inclined surface.
- a photoresist decondenser comprising: a machine; a rotating member disposed on the machine, the rotating member for rotating the light-resisting container, wherein the light
- the resistor container is provided with a photoresist material; at least one transmission member is coupled to the rotating member; an electric motor is disposed on the machine table, and the motor is coupled to at least one of the transmission members for passing the transmission member
- the rotating member is driven to rotate.
- the rotating member comprises: at least two rotating columns, the adjacent two rotating columns are used for jointly carrying the photoresist container, and for jointly driving the photoresist container to rotate.
- the first rotating shafts of two adjacent rotating columns are located on the same plane and are parallel to each other, and a first gap is formed between two adjacent rotating columns, and the first gap is smaller than The diameter of the largest inscribed circle of the cross section of the photoresist container; the rotation directions of the adjacent two rotating columns are the same, and the rotational speeds of the adjacent two rotating columns are the same.
- the first rotating shafts of two adjacent rotating columns are located on the same horizontal plane or inclined surface.
- the surface of the rotating column is provided with a first cushion, the first cushion is for contacting the photoresist container, and for applying the chamber to the photoresist container
- the force provided by the rotating column is used to rotate the photoresist container.
- the first angle of the first rotating shaft and the horizontal plane is in the range of 1 to 89 degrees.
- the rotating member includes a first rotating base for carrying and fixing the photoresist container, and for driving the photoresist container to rotate about the second rotating shaft.
- the first spin base is used to fix one end of the photoresist container; the photoresist decondenser further includes: a second spin base, the second spin base The other end of the photoresist container is fixed and used to assist the rotation of the photoresist container, and the rotating shaft of the second rotating base is collinear with the second rotating shaft.
- the third angle between the second rotating shaft and the horizontal plane is in the range of 0 to 90 degrees.
- the first spin base has a nip portion for holding one end of the photoresist container.
- the rotating member comprises: at least two roller sets, two adjacent roller sets for jointly carrying the photoresist container, and for jointly driving the photoresist container to rotate;
- the roller set includes at least two rollers, and at least two of the rollers are serially connected to the third rotating shaft.
- the third rotating shafts of two adjacent roller groups are located on the same plane and are parallel to each other, and a second gap is formed between two adjacent roller groups, and the second gap is smaller than The diameter of the largest inscribed circle of the cross section of the photoresist container; the rotation directions of the adjacent two roller groups are the same, and the rotational speeds of the adjacent two roller groups are the same.
- the third rotating shafts of two adjacent roller groups are located on the same horizontal plane or inclined surface.
- the surface of the roller is provided with a second cushion for contacting the photoresist container, and for applying to the photoresist container
- the force provided by the roller set causes the photoresist container to rotate.
- the second angle between the third rotating shaft and the horizontal plane is in the range of 1 to 89 degrees.
- the present invention can continuously move the photoresist material in the photoresist container to prevent the photoresist material from coagulating.
- Figure 1 is a schematic view showing the working state of the first embodiment of the photoresist de-condensing machine of the present invention
- Figure 2 is a schematic view showing the working state of the second embodiment of the photoresist decondenser of the present invention
- Figure 3 is a schematic view showing the working state of the third embodiment of the photoresist decondenser of the present invention.
- Figure 4 is a schematic view showing the working state of the fourth embodiment of the photoresist decondensing machine of the present invention.
- Figure 5 is a schematic view showing the working state of the fifth embodiment of the photoresist decondensing machine of the present invention.
- Figure 6 is a schematic view showing the working state of the sixth embodiment of the photoresist decondenser of the present invention.
- Fig. 7 is a schematic view showing the operational state of the seventh embodiment of the photoresist decondensing machine of the present invention.
- FIG. 1 there is shown a schematic view of the operational state of a first embodiment of a photoresist de-condensing machine of the present invention.
- the photoresist decondenser of this embodiment includes a machine table 101, a rotating member, a transmission member 103, and an electric motor 102.
- the rotating member is disposed on the machine table 101, and the rotating member is used to drive the rotation of the photoresist container 105.
- the photoresist container 105 is filled with a photoresist material.
- the photoresist container 105 is a cylinder.
- the transmission member 103 is coupled to the rotating member.
- the transmission member 103 includes a gear set including a first gear and at least a second gear, the first gear and the second gear being coupled to each other.
- the first gear is used to drive the second gear coupled to its coupling to rotate.
- the motor 102 is disposed on the machine table 101.
- the motor 102 is coupled to at least one of the transmission members 103 for driving the rotating member to rotate by the transmission member 103.
- the motor shaft of the motor 102 is fixed to the first gear to rotate the first gear about the motor shaft.
- the rotating member includes at least two rotating columns 104, and the two rotating columns 104 are used to jointly carry the photoresist container 105, and are used to jointly drive the photoresist container 105 to rotate.
- the photoresist material is prevented from coagulating (so that the photoresist material is in a loose state).
- the second gear is fixed to the first rotating shaft of the rotating column 104.
- the first rotating shafts of the two adjacent rotating columns 104 are located on the same plane and are parallel to each other, and a first gap is formed between two adjacent rotating columns 104, and the first gap is smaller than The diameter of the largest inscribed circle of the cross section of the photoresist container 105, such that the photoresist container 105 can be placed on the adjacent two rotating columns 104 without falling into the first gap .
- the first rotating shafts of the two adjacent rotating columns 104 are located on the same horizontal plane.
- the rotation directions of the two adjacent rotating columns 104 are the same, and the rotational speeds of the adjacent two rotating columns 104 are the same.
- the surface of the rotating column 104 is provided with a first cushion for contacting the photoresist container 105, and for applying to the photoresist container 105 by the The force provided by the column 104 is rotated to rotate the photoresist container 105.
- the photoresist material in the photoresist container 105 can be continuously moved (the photoresist material is continuously stirred), thereby preventing the photoresist material from being coagulated, that is, preventing the light.
- the molecules of the resistive material are integrated into one body.
- the above technical solution can also make it possible to reduce the time required for the icing back (warming) process of the photoresist material.
- FIG. 2 is a schematic view showing the working state of the second embodiment of the photoresist decondensing machine of the present invention. This embodiment is similar to the first embodiment described above, except that:
- the first rotating shafts of the two adjacent rotating columns 104 are located on the same inclined surface.
- the first angle of the first rotating shaft and the horizontal plane is in a range of 1 degree to 89 degrees.
- the first angle is: 1 degree, 5 degrees, 10 degrees, 15 degrees, 25 degrees, 30 degrees, 35 degrees, 40 degrees, 45 degrees, 50 degrees, 55 degrees, 60 degrees, 65 degrees, 70 Degree, 75 degrees, 80 degrees, 85 degrees, 89 degrees, and so on.
- Fig. 3 is a schematic view showing the working state of the third embodiment of the photoresist decondensing machine of the present invention. This embodiment is similar to the first embodiment described above, except that:
- the rotating member includes at least two roller sets 301. Two adjacent roller sets 301 are used to jointly carry the photoresist container 105 and to jointly rotate the photoresist container 105.
- the roller set 301 includes at least two rollers, and at least two of the roller sets 301 are serially connected to the third rotating shaft 302.
- the third rotating shaft 302 of the roller set 301 is fixed to the second gear.
- the third rotating shafts 302 of the two adjacent roller groups 301 are located on the same plane and are parallel to each other, and a second gap is formed between the adjacent two roller groups 301, and the second gap is smaller than The diameter of the largest inscribed circle of the cross section of the photoresist container 105.
- the rotation directions of the two adjacent roller groups 301 are the same, and the rotational speeds of the adjacent two roller groups 301 are the same.
- the third rotating shafts 302 of the adjacent two roller groups 301 are located on the same horizontal plane.
- the surface of the roller is provided with a second cushion for contacting the photoresist container 105, and for applying the force provided by the roller set 301 to the photoresist container 105. To rotate the photoresist container 105.
- Fig. 4 is a schematic view showing the working state of the fourth embodiment of the photoresist decondensing machine of the present invention. This embodiment is similar to the third embodiment described above, except that:
- the third rotating shafts 302 of the adjacent two roller groups 301 are located on the same inclined surface.
- the second angle of the third rotating shaft 302 and the horizontal plane is in the range of 1 degree to 89 degrees.
- the second angle is: 1 degree, 5 degrees, 10 degrees, 15 degrees, 25 degrees, 30 degrees, 35 degrees, 40 degrees, 45 degrees, 50 degrees, 55 degrees, 60 degrees, 65 degrees, 70 Degree, 75 degrees, 80 degrees, 85 degrees, 89 degrees, and so on.
- FIG. 5 there is shown a schematic view of the operational state of the fifth embodiment of the photoresist de-condensing machine of the present invention. This embodiment is similar to the first embodiment described above, except that:
- the rotating member includes a first spin base 501.
- the first rotating base 501 is configured to carry and fix the photoresist container 105, and is configured to drive the photoresist container 105 to rotate about the second rotating shaft.
- the first spin base 501 is for fixing one end of the photoresist container 105. Specifically, the first spin base 501 has a clamping portion for clamping one end of the photoresist container 105.
- the third angle between the second shaft and the horizontal plane is in the range of 0 to 90 degrees.
- the third angle between the second rotating shaft and the horizontal plane is 0 degrees.
- Figure 6 is a schematic view showing the operational state of the sixth embodiment of the photoresist de-condensing machine of the present invention. This embodiment is similar to the fifth embodiment described above, except that:
- the photoresist decondenser further includes a second spin base 601.
- the second rotating base 601 is configured to fix the other end of the photoresist container 105 and to assist the rotation of the photoresist container 105.
- the rotating shaft of the second rotating base 601 is shared with the second rotating shaft. line.
- Figure 7 is a schematic view showing the operational state of the seventh embodiment of the photoresist de-condensing machine of the present invention. This embodiment is similar to the fifth or sixth embodiment described above, except that:
- the third angle between the second rotating shaft and the horizontal plane is 20 degrees.
- the third angle may also be 5 degrees, 10 degrees, 15 degrees, 25 degrees, 30 degrees, 35 degrees, 40 degrees, 45 degrees, 50 degrees, 55 degrees, 60 degrees, 65 degrees, 70 degrees, 75 degrees. , 80 degrees, 85 degrees, and so on.
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Abstract
一种光阻解凝机，光阻解凝机包括机台（101）、转动构件、传动构件（103）、电动机（102）。转动构件设置于机台（101）上，转动构件用于带动光阻容器（105）转动，其中，光阻容器（105）装有光阻材料；传动构件（103）与转动构件连接；电动机（102）设置于机台（101）上，电动机（102）与传动构件（103）连接，电动机（102）用于通过传动构件（103）带动转动构件转动。上述设计能防止光阻材料凝结。
Description
本发明涉及显示面板生产技术领域，特别涉及一种用于显示面板制程中的光阻解凝机。
目前，显示面板的分辨率有不断增加的趋势。
为了适应这一趋势，应用于CF（Color
Filter，彩色滤光片）基板中的光阻材料的颗粒的粒径需要足够小。
然而，所述光阻材料在设置到所述CF基板上之前，一般会在静止状态以及常温条件下进行回温（恢复温度），这个回温的过程一般需要12个小时以上。
在此回温的过程中，放置于光阻容器内的所述光阻材料处于长时间停滞的状态，此时，所述光阻材料中的分子会因“凡德瓦尔力效应”而部分地聚集在一起，因此，所述光阻容器内的所述光阻材料中则会形成若干粒径较大的颗粒。
这些粒径较大的颗粒会加重生产线将光阻材料设置到所述CF基板中的负荷，同时也会影响所述CF基板的良率和显示质量。
故，有必要提出一种新的技术方案，以解决上述技术问题。
本发明的目的在于提供一种光阻解凝机，其能防止光阻容器内的光阻材料凝结。
一种光阻解凝机，所述光阻解凝机包括：一机台；一转动构件，设置于所述机台上，所述转动构件用于带动光阻容器转动，其中，所述光阻容器装有光阻材料；至少一传动构件，与所述转动构件连接；一电动机，设置于所述机台上，所述电动机与至少一所述传动构件连接，用于通过所述传动构件带动所述转动构件转动；所述传动构件包括齿轮组，所述齿轮组包括一个第一齿轮和至少第二齿轮，所述第一齿轮和所述第二齿轮相互耦合连接。所述第一齿轮用于带动与其耦合连接的所述第二齿轮转动；所述电动机的电动机转轴与所述第一齿轮相固定，以使所述第一齿轮绕所述电动机转轴转动；所述第二齿轮与所述转动柱的第一转轴相固定。
在上述光阻解凝机中，所述转动构件包括：至少两转动柱，相邻两所述转动柱用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动；相邻两所述转动柱的第一转轴位于同一平面上，并且相互平行，相邻两所述转动柱之间具有一第一间隙，所述第一间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述转动柱的转动方向相同，相邻两所述转动柱的转动速度相同；相邻两所述转动柱的第一转轴位于同一水平面或斜面上。
在上述光阻解凝机中，所述转动柱的表面设置有第一缓冲垫，所述第一缓冲垫用于与所述光阻容器接触，以及用于向所述光阻容器施加由所述转动柱提供的作用力，以使所述光阻容器转动。
在上述光阻解凝机中，所述转动构件包括：一第一旋转基座，用于承载并固定所述光阻容器，以及用于带动所述光阻容器绕第二转轴转动；所述第一旋转基座用于固定所述光阻容器的一端；所述光阻解凝机还包括：第二旋转基座，所述第二旋转基座用于固定所述光阻容器的另一端，以及用于协助所述光阻容器转动，所述第二旋转基座的转轴与所述第二转轴共线；所述第二转轴与水平面之间的第三夹角处于0至90度的范围内。
在上述光阻解凝机中，所述转动构件包括：至少两滚轮组，相邻两所述滚轮组用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动；其中，所述滚轮组包括至少两个滚轮，所述滚轮组中的至少两所述滚轮串接于第三转轴上；相邻两所述滚轮组的第三转轴位于同一平面上，并且相互平行，相邻两所述滚轮组之间具有一第二间隙，所述第二间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述滚轮组的转动方向相同，相邻两所述滚轮组的转动速度相同；相邻两所述滚轮组的第三转轴位于同一水平面或斜面上。
一种光阻解凝机，所述光阻解凝机包括：一机台；一转动构件，设置于所述机台上，所述转动构件用于带动光阻容器转动，其中，所述光阻容器装有光阻材料；至少一传动构件，与所述转动构件连接；一电动机，设置于所述机台上，所述电动机与至少一所述传动构件连接，用于通过所述传动构件带动所述转动构件转动。
在上述光阻解凝机中，所述转动构件包括：至少两转动柱，相邻两所述转动柱用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动。
在上述光阻解凝机中，相邻两所述转动柱的第一转轴位于同一平面上，并且相互平行，相邻两所述转动柱之间具有一第一间隙，所述第一间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述转动柱的转动方向相同，相邻两所述转动柱的转动速度相同。
在上述光阻解凝机中，相邻两所述转动柱的第一转轴位于同一水平面或斜面上。
在上述光阻解凝机中，所述转动柱的表面设置有第一缓冲垫，所述第一缓冲垫用于与所述光阻容器接触，以及用于向所述光阻容器施加由所述转动柱提供的作用力，以使所述光阻容器转动。
在上述光阻解凝机中，所述第一转轴与水平面的第一夹角处于1度至89度的范围内。
在上述光阻解凝机中，所述转动构件包括：一第一旋转基座，用于承载并固定所述光阻容器，以及用于带动所述光阻容器绕第二转轴转动。
在上述光阻解凝机中，所述第一旋转基座用于固定所述光阻容器的一端；所述光阻解凝机还包括：第二旋转基座，所述第二旋转基座用于固定所述光阻容器的另一端，以及用于协助所述光阻容器转动，所述第二旋转基座的转轴与所述第二转轴共线。
在上述光阻解凝机中，所述第二转轴与水平面之间的第三夹角处于0至90度的范围内。
在上述光阻解凝机中，所述第一旋转基座具有夹持部，所述夹持部用于夹持所述光阻容器的一端。
在上述光阻解凝机中，所述转动构件包括：至少两滚轮组，相邻两所述滚轮组用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动；其中，所述滚轮组包括至少两个滚轮，所述滚轮组中的至少两所述滚轮串接于第三转轴上。
在上述光阻解凝机中，相邻两所述滚轮组的第三转轴位于同一平面上，并且相互平行，相邻两所述滚轮组之间具有一第二间隙，所述第二间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述滚轮组的转动方向相同，相邻两所述滚轮组的转动速度相同。
在上述光阻解凝机中，相邻两所述滚轮组的第三转轴位于同一水平面或斜面上。
在上述光阻解凝机中，所述滚轮的表面设置有第二缓冲垫，所述第二缓冲垫用于与所述光阻容器接触，以及用于向所述光阻容器施加由所述滚轮组提供的作用力，以使所述光阻容器转动。
在上述光阻解凝机中，所述第三转轴与水平面的第二夹角处于1度至89度的范围内。
相对现有技术，本发明可以使得光阻容器内的光阻材料不断地运动，从而防止光阻材料凝结。
图1为本发明的光阻解凝机的第一实施例的工作状态的示意图；
图2为本发明的光阻解凝机的第二实施例的工作状态的示意图；
图3为本发明的光阻解凝机的第三实施例的工作状态的示意图；
图4为本发明的光阻解凝机的第四实施例的工作状态的示意图；
图5为本发明的光阻解凝机的第五实施例的工作状态的示意图；
图6为本发明的光阻解凝机的第六实施例的工作状态的示意图；
图7为本发明的光阻解凝机的第七实施例的工作状态的示意图。
本说明书所使用的词语“实施例”意指用作实例、示例或例证。此外，本说明书和所附权利要求中所使用的冠词“一”一般地可以被解释为意指“一个或多个”，除非另外指定或从上下文可以清楚确定单数形式。
参考图1，图1为本发明的光阻解凝机的第一实施例的工作状态的示意图。
本实施例的光阻解凝机包括机台101、转动构件、传动构件103以及电动机102。
所述转动构件设置于所述机台101上，所述转动构件用于带动光阻容器105转动，其中，所述光阻容器105装有光阻材料。所述光阻容器105为圆柱体。
所述传动构件103与所述转动构件连接。具体地，所述传动构件103包括齿轮组，所述齿轮组包括一个第一齿轮和至少第二齿轮，所述第一齿轮和所述第二齿轮相互耦合连接。所述第一齿轮用于带动与其耦合连接的所述第二齿轮转动。
所述电动机102设置于所述机台101上，所述电动机102与至少一所述传动构件103连接，用于通过所述传动构件103带动所述转动构件转动。所述电动机102的电动机转轴与所述第一齿轮相固定，以使所述第一齿轮绕所述电动机转轴转动。
在本实施例中，所述转动构件包括至少两转动柱104，相邻两所述转动柱104用于共同承载所述光阻容器105，以及用于共同带动所述光阻容器105转动，以防止所述光阻材料凝结（使得所述光阻材料处于松散状态）。所述第二齿轮与所述转动柱104的第一转轴相固定。
在本实施例中，相邻两所述转动柱104的第一转轴位于同一平面上，并且相互平行，相邻两所述转动柱104之间具有一第一间隙，所述第一间隙小于所述光阻容器105的横截面的最大内切圆的直径，这样可以使得所述光阻容器105能够放置于相邻两所述转动柱104上，而不会掉落到所述第一间隙中。
相邻两所述转动柱104的第一转轴位于同一水平面上。
相邻两所述转动柱104的转动方向相同，相邻两所述转动柱104的转动速度相同。
作为一种改进，所述转动柱104的表面设置有第一缓冲垫，所述第一缓冲垫用于与所述光阻容器105接触，以及用于向所述光阻容器105施加由所述转动柱104提供的作用力，以使所述光阻容器105转动。
通过上述技术方案，可以使得所述光阻容器105内的所述光阻材料不断地运动（所述光阻材料受到不断的搅拌），从而防止所述光阻材料凝结，即，防止所述光阻材料的分子之间结合为一体。
此外，上述技术方案还可以使得减少所述光阻材料的退冰（回温）过程所需的时间。
参考图2，图2为本发明的光阻解凝机的第二实施例的工作状态的示意图。本实施例与上述第一实施例相似，不同之处在于：
在本实施例中，相邻两所述转动柱104的第一转轴位于同一斜面上。所述第一转轴与水平面的第一夹角处于1度至89度的范围内。例如，所述第一夹角为：1度、5度、10度、15度、25度、30度、35度、40度、45度、50度、55度、60度、65度、70度、75度、80度、85度、89度，等等。
参考图3，图3为本发明的光阻解凝机的第三实施例的工作状态的示意图。本实施例与上述第一实施例相似，不同之处在于：
在本实施例中，所述转动构件包括至少两滚轮组301。相邻两所述滚轮组301用于共同承载所述光阻容器105，以及用于共同带动所述光阻容器105转动。
其中，所述滚轮组301包括至少两个滚轮，所述滚轮组301中的至少两所述滚轮串接于第三转轴302上。所述滚轮组301的所述第三转轴302与所述第二齿轮相固定。
在本实施例中，相邻两所述滚轮组301的第三转轴302位于同一平面上，并且相互平行，相邻两所述滚轮组301之间具有一第二间隙，所述第二间隙小于所述光阻容器105的横截面的最大内切圆的直径。
相邻两所述滚轮组301的转动方向相同，相邻两所述滚轮组301的转动速度相同。
例如，相邻两所述滚轮组301的第三转轴302位于同一水平面上。
所述滚轮的表面设置有第二缓冲垫，所述第二缓冲垫用于与所述光阻容器105接触，以及用于向所述光阻容器105施加由所述滚轮组301提供的作用力，以使所述光阻容器105转动。
参考图4，图4为本发明的光阻解凝机的第四实施例的工作状态的示意图。本实施例与上述第三实施例相似，不同之处在于：
在本实施例中，相邻两所述滚轮组301的第三转轴302位于同一斜面上。所述第三转轴302与水平面的第二夹角处于1度至89度的范围内。例如，所述第二夹角为：1度、5度、10度、15度、25度、30度、35度、40度、45度、50度、55度、60度、65度、70度、75度、80度、85度、89度，等等。
参考图5，图5为本发明的光阻解凝机的第五实施例的工作状态的示意图。本实施例与上述第一实施例相似，不同之处在于：
在本实施例中，所述转动构件包括第一旋转基座501。所述第一旋转基座501用于承载并固定所述光阻容器105，以及用于带动所述光阻容器105绕第二转轴转动。
所述第一旋转基座501用于固定所述光阻容器105的一端。具体地，所述第一旋转基座501具有夹持部，所述夹持部用于夹持所述光阻容器105的一端。
所述第二转轴与水平面之间的第三夹角处于0至90度的范围内。例如，在本实施例中，所述第二转轴与水平面之间的第三夹角为0度。
参考图6，图6为本发明的光阻解凝机的第六实施例的工作状态的示意图。本实施例与上述第五实施例相似，不同之处在于：
在本实施例中，所述光阻解凝机还包括第二旋转基座601。所述第二旋转基座601用于固定所述光阻容器105的另一端，以及用于协助所述光阻容器105转动，所述第二旋转基座601的转轴与所述第二转轴共线。
参考图7，图7为本发明的光阻解凝机的第七实施例的工作状态的示意图。本实施例与上述第五或第六实施例相似，不同之处在于：
在本实施例中，所述第二转轴与水平面之间的所述第三夹角为20度。所述第三夹角还可以是5度、10度、15度、25度、30度、35度、40度、45度、50度、55度、60度、65度、70度、75度、80度、85度，等等。
尽管已经相对于一个或多个实现方式示出并描述了本发明，但是本领域技术人员基于对本说明书和附图的阅读和理解将会想到等价变型和修改。本发明包括所有这样的修改和变型，并且仅由所附权利要求的范围限制。特别地关于由上述组件执行的各种功能，用于描述这样的组件的术语旨在对应于执行所述组件的指定功能（例如其在功能上是等价的）的任意组件（除非另外指示），即使在结构上与执行本文所示的本说明书的示范性实现方式中的功能的公开结构不等同。此外，尽管本说明书的特定特征已经相对于若干实现方式中的仅一个被公开，但是这种特征可以与如可以对给定或特定应用而言是期望和有利的其他实现方式的一个或多个其他特征组合。而且，就术语“包括”、“具有”、“含有”或其变形被用在具体实施方式或权利要求中而言，这样的术语旨在以与术语“包含”相似的方式包括。
综上所述，虽然本发明已以优选实施例揭露如上，但上述优选实施例并非用以限制本发明，本领域的普通技术人员，在不脱离本发明的精神和范围内，均可作各种更动与润饰，因此本发明的保护范围以权利要求界定的范围为准。
Claims (20)
- 一种光阻解凝机，其中，所述光阻解凝机包括：一机台；一转动构件，设置于所述机台上，所述转动构件用于带动光阻容器转动，其中，所述光阻容器装有光阻材料；至少一传动构件，与所述转动构件连接；一电动机，设置于所述机台上，所述电动机与至少一所述传动构件连接，用于通过所述传动构件带动所述转动构件转动；所述传动构件包括齿轮组，所述齿轮组包括一个第一齿轮和至少第二齿轮，所述第一齿轮和所述第二齿轮相互耦合连接。所述第一齿轮用于带动与其耦合连接的所述第二齿轮转动；所述电动机的电动机转轴与所述第一齿轮相固定，以使所述第一齿轮绕所述电动机转轴转动；所述第二齿轮与所述转动柱的第一转轴相固定。
- 根据权利要求1所述的光阻解凝机，其中，所述转动构件包括：至少两转动柱，相邻两所述转动柱用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动；相邻两所述转动柱的第一转轴位于同一平面上，并且相互平行，相邻两所述转动柱之间具有一第一间隙，所述第一间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述转动柱的转动方向相同，相邻两所述转动柱的转动速度相同；相邻两所述转动柱的第一转轴位于同一水平面或斜面上。
- 根据权利要求2所述的光阻解凝机，其中，所述转动柱的表面设置有第一缓冲垫，所述第一缓冲垫用于与所述光阻容器接触，以及用于向所述光阻容器施加由所述转动柱提供的作用力，以使所述光阻容器转动。
- 根据权利要求1所述的光阻解凝机，其中，所述转动构件包括：一第一旋转基座，用于承载并固定所述光阻容器，以及用于带动所述光阻容器绕第二转轴转动；所述第一旋转基座用于固定所述光阻容器的一端；所述光阻解凝机还包括：第二旋转基座，所述第二旋转基座用于固定所述光阻容器的另一端，以及用于协助所述光阻容器转动，所述第二旋转基座的转轴与所述第二转轴共线；所述第二转轴与水平面之间的第三夹角处于0至90度的范围内。
- 根据权利要求1所述的光阻解凝机，其中，所述转动构件包括：至少两滚轮组，相邻两所述滚轮组用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动；其中，所述滚轮组包括至少两个滚轮，所述滚轮组中的至少两所述滚轮串接于第三转轴上；相邻两所述滚轮组的第三转轴位于同一平面上，并且相互平行，相邻两所述滚轮组之间具有一第二间隙，所述第二间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述滚轮组的转动方向相同，相邻两所述滚轮组的转动速度相同；相邻两所述滚轮组的第三转轴位于同一水平面或斜面上。
- 一种光阻解凝机，其中，所述光阻解凝机包括：一机台；一转动构件，设置于所述机台上，所述转动构件用于带动光阻容器转动，其中，所述光阻容器装有光阻材料；至少一传动构件，与所述转动构件连接；一电动机，设置于所述机台上，所述电动机与至少一所述传动构件连接，用于通过所述传动构件带动所述转动构件转动。
- 根据权利要求6所述的光阻解凝机，其中，所述转动构件包括：至少两转动柱，相邻两所述转动柱用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动。
- 根据权利要求7所述的光阻解凝机，其中，相邻两所述转动柱的第一转轴位于同一平面上，并且相互平行，相邻两所述转动柱之间具有一第一间隙，所述第一间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述转动柱的转动方向相同，相邻两所述转动柱的转动速度相同。
- 根据权利要求8所述的光阻解凝机，其中，相邻两所述转动柱的第一转轴位于同一水平面或斜面上。
- 根据权利要求8所述的光阻解凝机，其中，所述转动柱的表面设置有第一缓冲垫，所述第一缓冲垫用于与所述光阻容器接触，以及用于向所述光阻容器施加由所述转动柱提供的作用力，以使所述光阻容器转动。
- 根据权利要求8所述的光阻解凝机，其中，所述第一转轴与水平面的第一夹角处于1度至89度的范围内。
- 根据权利要求6所述的光阻解凝机，其中，所述转动构件包括：一第一旋转基座，用于承载并固定所述光阻容器，以及用于带动所述光阻容器绕第二转轴转动。
- 根据权利要求12所述的光阻解凝机，其中，所述第一旋转基座用于固定所述光阻容器的一端；所述光阻解凝机还包括：第二旋转基座，所述第二旋转基座用于固定所述光阻容器的另一端，以及用于协助所述光阻容器转动，所述第二旋转基座的转轴与所述第二转轴共线。
- 根据权利要求12所述的光阻解凝机，其中，所述第二转轴与水平面之间的第三夹角处于0至90度的范围内。
- 根据权利要求12所述的光阻解凝机，其中，所述第一旋转基座具有夹持部，所述夹持部用于夹持所述光阻容器的一端。
- 根据权利要求6所述的光阻解凝机，其中，所述转动构件包括：至少两滚轮组，相邻两所述滚轮组用于共同承载所述光阻容器，以及用于共同带动所述光阻容器转动；其中，所述滚轮组包括至少两个滚轮，所述滚轮组中的至少两所述滚轮串接于第三转轴上。
- 根据权利要求16所述的光阻解凝机，其中，相邻两所述滚轮组的第三转轴位于同一平面上，并且相互平行，相邻两所述滚轮组之间具有一第二间隙，所述第二间隙小于所述光阻容器的横截面的最大内切圆的直径；相邻两所述滚轮组的转动方向相同，相邻两所述滚轮组的转动速度相同。
- 根据权利要求17所述的光阻解凝机，其中，相邻两所述滚轮组的第三转轴位于同一水平面或斜面上。
- 根据权利要求17所述的光阻解凝机，其中，所述滚轮的表面设置有第二缓冲垫，所述第二缓冲垫用于与所述光阻容器接触，以及用于向所述光阻容器施加由所述滚轮组提供的作用力，以使所述光阻容器转动。
- 根据权利要求16所述的光阻解凝机，其中，所述第三转轴与水平面的第二夹角处于1度至89度的范围内。
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| CN201260949Y (zh) * | 2008-09-04 | 2009-06-24 | 浙江华越芯装电子股份有限公司 | 半导体芯片粘结用银胶滚动半自动搅拌装置 |
| CN201357062Y (zh) * | 2009-02-19 | 2009-12-09 | 上海神开石油化工装备股份有限公司 | 一种气体混合装置 |
| CN201404790Y (zh) * | 2009-03-07 | 2010-02-17 | 任增武 | 四轮驱动滚筒搅拌机 |
| CN202516509U (zh) * | 2012-01-12 | 2012-11-07 | 佛山市雅佳新型节能高分子材料有限公司 | 一种新型涂料混合机 |
| CN203281260U (zh) * | 2013-05-07 | 2013-11-13 | 浙江江山三友电子有限公司 | 一种荧光粉无轴搅拌机 |
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| CN104492324A (zh) | 2015-04-08 |
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