WO2016068331A1 - Buse, dispositif de formation de film, et procédé de formation de film de revêtement - Google Patents

Buse, dispositif de formation de film, et procédé de formation de film de revêtement Download PDF

Info

Publication number
WO2016068331A1
WO2016068331A1 PCT/JP2015/080830 JP2015080830W WO2016068331A1 WO 2016068331 A1 WO2016068331 A1 WO 2016068331A1 JP 2015080830 W JP2015080830 W JP 2015080830W WO 2016068331 A1 WO2016068331 A1 WO 2016068331A1
Authority
WO
WIPO (PCT)
Prior art keywords
nozzle
powder
gas
tube
film
Prior art date
Application number
PCT/JP2015/080830
Other languages
English (en)
Japanese (ja)
Inventor
公一 川崎
智資 平野
正樹 遠藤
洋子 榊原
Original Assignee
日本発條株式会社
学校法人東京電機大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本発條株式会社, 学校法人東京電機大学 filed Critical 日本発條株式会社
Priority to JP2016556684A priority Critical patent/JP6637897B2/ja
Publication of WO2016068331A1 publication Critical patent/WO2016068331A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles

Definitions

  • the present invention relates to a nozzle for a film forming apparatus using a cold spray method, a film forming apparatus, and a film forming method.
  • the cold spray method is a method of forming a film on the surface of a base material by injecting the powder of the material from a nozzle together with a high-pressure gas having a temperature equal to or lower than the melting point or softening point and colliding with the base material in a solid state. It is.
  • the processing is performed at a lower temperature than the thermal spraying method, it is possible to obtain a metal film having no phase transformation and suppressing oxidation. In addition, the influence of thermal stress can be reduced.
  • both the base material and the material to be the film are metal
  • plastic deformation occurs between the powder and the base material when the metal material powder collides with the base material (or the previously formed film). Since the anchor effect is obtained and the oxide films of each other are destroyed and metal bonds are formed by the new surfaces, a laminate with high adhesion strength can be obtained.
  • a taper-shaped nozzle (so-called Laval nozzle) whose width gradually decreases from the proximal end side toward the distal end side and then widens again toward the distal end is used.
  • the high-pressure gas and the powder of material are accelerated and injected when passing through the Laval nozzle.
  • FIG. 21 of Patent Document 3 discloses the structure of an acceleration nozzle connected to the tip of the main body as an injection nozzle device for cold spray.
  • this accelerating nozzle has a complicated structure and it is necessary to supply gas to the inner wall of the powder flow path, the configuration of the entire apparatus becomes complicated and large, and it is difficult to put it into practical use.
  • the present invention has been made in view of the above, and a nozzle capable of increasing the injection speed of powder used in the cold spray method with a simple configuration, and a film forming apparatus including such a nozzle And it aims at providing the formation method of a membrane
  • the nozzle according to the present invention sprays material powder together with gas and sprays and deposits the powder on the surface of the base material in a solid state.
  • a nozzle used in a film forming apparatus for forming a film wherein a nozzle tube having a passage through which the powder passes together with the gas is formed, and provided at a tip portion of the nozzle tube, and emitted from the tip portion
  • a cylindrical member that allows the powder and the gas to pass therethrough and includes a cylindrical member in which a width between inner wall side surfaces at an end surface on the proximal end side is wider than a width of the passage at a distal end portion of the nozzle tube. It is characterized by.
  • the proximal end surface of the cylindrical member is closed except for a connection portion with a distal end portion of the nozzle tube.
  • the nozzle In the cross section including the central axis of the nozzle, the nozzle has an angle formed by the inner wall surface of the passage at the distal end portion of the nozzle tube and the end surface on the proximal end side of the cylindrical member is 270 ° or less.
  • the width between the inner wall side surfaces of the end surface on the base end side of the cylindrical member is 1.1 times or more and 1.4 times or less than the width of the passage at the distal end portion of the nozzle tube.
  • the length of the cylindrical member is 3 to 5 times the width of the passage at the tip of the nozzle tube.
  • the nozzle is characterized in that the nozzle tube and the cylindrical member have a circular shape, an elliptical shape, a rectangular shape, or a polygonal shape in a cross section orthogonal to the central axis of the nozzle.
  • the film forming apparatus includes the nozzle, a gas powder mixing unit that mixes the powder with a compressed gas and supplies the mixed gas to the nozzle, and a gas that introduces the compressed gas into the gas powder mixing unit And a powder supply unit for supplying the powder to the gas powder mixing unit.
  • the powder of the film material is accelerated together with the gas by the film forming apparatus on the surface of the base material, and sprayed and deposited in a solid phase state to be deposited on the base material.
  • the method includes a step of forming a film.
  • the tubular member having a width between the inner wall side surfaces on the proximal end side wider than the width of the passage at the distal end portion of the nozzle tube is provided at the distal end portion of the nozzle tube. It can be inflated and accelerated. Therefore, it is possible to increase the injection speed of the powder injected from the nozzle together with the gas with a simple device.
  • FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to an embodiment of the present invention.
  • FIG. 2 is a perspective view schematically showing the appearance of the nozzle shown in FIG.
  • FIG. 3 is an enlarged longitudinal sectional view showing the tip of the nozzle shown in FIG.
  • FIG. 4 is a plan view of the nozzle shown in FIG. 1 as viewed from the front of the injection port.
  • FIG. 5 is a longitudinal sectional view showing a reference example of the shape of the base end side of the expansion tube.
  • FIG. 6 is a longitudinal sectional view showing a modification of the shape of the base end side of the magnifying tube.
  • FIG. 7 is a perspective view showing a modification of the shape of the nozzle according to the embodiment of the present invention.
  • FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to an embodiment of the present invention.
  • FIG. 2 is a perspective view schematically showing the appearance of the nozzle shown in FIG.
  • FIG. 3 is
  • FIG. 8 is a plan view showing a modified example of the shape of the nozzle according to the embodiment of the present invention.
  • FIG. 9 is a plan view showing another modification of the shape of the nozzle according to the embodiment of the present invention.
  • FIG. 10 is a plan view showing still another modified example of the shape of the nozzle according to the embodiment of the present invention.
  • FIG. 11 is a longitudinal sectional view showing a modification of the shape of the nozzle tube included in the nozzle according to the embodiment of the present invention.
  • FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to an embodiment of the present invention.
  • a film forming apparatus 1 according to the present embodiment is a film forming apparatus using a cold spray method, and a gas heater 2 for heating a high-pressure gas (compressed gas) and a film forming material powder.
  • Powder supply device 3 for storing and supplying to spray gun 4, spray gun 4 for mixing heated high-pressure gas with powder and introducing it into nozzle 5, supply of high-pressure gas to gas heater 2 and powder supply device 3 Valves 6 and 7 for adjusting the amounts are provided.
  • the spray gun 4 includes a nozzle 5 that injects powder together with high-pressure gas.
  • the high-pressure gas inexpensive air or an inert gas such as helium or nitrogen is used.
  • the high-pressure gas supplied to the gas heater 2 is heated to a temperature in a range lower than the melting point of the material powder, and then introduced into the spray gun 4.
  • the heating temperature of the high pressure gas is preferably 150 to 900 ° C.
  • the high-pressure gas supplied to the powder supply device 3 supplies the powder in the powder supply device 3 to the spray gun 4 so that a predetermined discharge amount is obtained.
  • the heated high-pressure gas is jetted as a supersonic flow (about 340 m / s or more for air and nitrogen, about 1000 m / s or more for helium) by passing through the nozzle 5.
  • the gas pressure of the high-pressure gas is preferably about 0.3 to 5 MPa. This is because by adjusting the pressure of the high-pressure gas to this level, the adhesion strength of the film 101 to the substrate 100 can be improved. More preferably, the treatment is performed at a pressure of about 3 to 5 MPa.
  • the base material 100 is arranged facing the spray gun 4, and the film forming material powder is put into the powder supply apparatus 3, and the high-pressure gas to the gas heater 2 and the powder supply apparatus 3.
  • the powder supplied to the spray gun 4 is injected into the supersonic flow of the high-pressure gas, accelerated, and injected from the nozzle 5.
  • the powder 101 collides and deposits on the base material 100 at a high speed in a solid phase state, whereby the coating 101 is formed.
  • FIG. 2 is a perspective view schematically showing the appearance of the nozzle 5.
  • 3 is an enlarged longitudinal sectional view (a sectional view including the central axis of the nozzle 5) showing the tip of the nozzle 5.
  • FIG. 4 is a plan view of the nozzle 5 as viewed from the front of the injection port.
  • the nozzle 5 includes a nozzle tube 51 in which a passage 51 a through which powder passes is formed, and an enlarged tube 52 which is a cylindrical member provided at the tip of the nozzle tube 51.
  • the nozzle port 51 and the expansion port 52 have a rectangular shape.
  • the length of the white arrow shown in FIG. 3 schematically represents the speed of the powder introduced into the nozzle 5.
  • 3 schematically represents the flow of the high-pressure gas emitted from the nozzle tube 51 to the expansion tube 52.
  • the passage 51a of the nozzle tube 51 has a width D once narrowed from the base end side (spray gun 4 side shown in FIG. 1) to the tip end side (enlarged tube 52 side), and then again toward the tip end. It has a widening divergent shape.
  • a nozzle provided with a passage having such a shape is called a Laval nozzle, and a portion having the narrowest width D of the passage 51a is called a throat.
  • the powder introduced together with the gas from the spray gun 4 is accelerated when passing through the throat 51 b and is injected into the expansion tube 52 from the tip of the nozzle tube 51.
  • the expansion tube 52 is a cylindrical member in which the width W between the inner wall side surfaces on the proximal end side is wider than the width D 1 of the passage 51 a in the emission end surface 51 c of the nozzle tube 51.
  • the end face 52a on the proximal end side of the magnifying tube 52 is closed except for the connecting portion with the nozzle tube 51, and the end face 52b on the distal end side of the magnifying tube 52 is open.
  • the gas injected from the nozzle tube 51 is rapidly expanded and accelerated in the expansion tube 52. Along with this expanded gas, the powder is also accelerated and injected outward from the tip of the expansion tube 52.
  • the width W between the inner wall side surface of the base end portion of the expanded tube 52 is wider than the width D 1 of the passage 51a at the output end face 51c.
  • the width W of the enlarged tube 52 about 1.1 times to 1.4 times the width D 1 of the passage 51a, and more preferably may be approximately 1.2 times.
  • the length L of the enlarged tube 52 in order to sufficiently accelerate while rectifying the expanded high pressure gas and powder, about 3 times higher than five times the width D 1, and more preferably about 4 fold or.
  • the angle ⁇ formed by the inner wall surface 51d of the passage 51a and the end surface 52a of the expansion tube 52 at the tip end portion (near the emission end surface 51c) of the nozzle tube 51 is 270 °. It is not limited to. Preferably, the angle ⁇ is 270 ° or less.
  • FIG. 5 is a longitudinal sectional view showing a reference example of the shape of the base end side of the expansion tube.
  • FIG. 6 is a longitudinal sectional view showing a modification of the shape of the base end side of the magnifying tube.
  • the enlarged tube 52 is provided at the tip of the nozzle tube 51, it is possible to increase the speed of the powder sprayed from the nozzle tube 51 with a simple configuration. Accordingly, a dense film can be formed, and the film quality can be improved. Further, according to the present embodiment, since the powder can be made faster than the conventional one with the same amount of gas consumption as the conventional configuration in which the expansion pipe 52 is not provided, without increasing the manufacturing cost, A high-quality film can be formed, or various kinds of films can be formed. Furthermore, according to the present embodiment, since the speed of the powder can be maintained at the same level as the conventional one with a smaller gas supply amount than the conventional one, the manufacturing cost of the coating can be reduced.
  • FIG. 7 is a perspective view showing a modified example of the shape of the nozzle according to the present embodiment.
  • 8 to 10 are plan views showing modified examples of the shape of the nozzle according to the present embodiment.
  • the shape of the nozzle tube 51 and the expansion tube 52 as viewed from the front of the injection port is not limited to a rectangular shape.
  • the cross-sectional shapes of the nozzle tubes 51A to 51C and the enlarged tubes 52A to 52C may be similar to each other, but are not limited thereto.
  • the width D 1 of the passage at the output end face of the nozzle tubes 51A ⁇ 51C by increasing the width W between the side of the inner wall of the expansion pipe 52A ⁇ 52C, the high pressure gas emitted from the nozzle tubes 51 What is necessary is just to be able to expand rapidly.
  • FIG. 11 is a longitudinal sectional view showing a modification of the shape of the nozzle tube included in the nozzle according to the present embodiment.
  • a Laval nozzle is applied as the nozzle tube 51, but the shape of the nozzle is not limited to this.
  • the magnifying tube 52 may be attached to the tip of the tapered nozzle 55 whose tip 55a is narrowed. Also in this case, the high-pressure gas emitted from the tapered nozzle 55 can be accelerated by rapidly expanding in the expansion tube 52.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Nozzles (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

L'invention fournit une buse, ou similaire, qui dans un dispositif de formation de film mettant en œuvre une projection dynamique par gaz froid, permet au moyen d'une configuration simple l'accélération d'une poudre pulvérisée par la buse. Cette buse est mise en œuvre dans un dispositif de formation de film destiné à former un film de revêtement en pulvérisant avec un gaz une poudre de matière, et en accumulant par soufflage cette poudre à l'état de phase solide à la surface d'un matériau de base. En outre, cette buse est équipée : d'un conduit de buse (51) dans la partie interne duquel est formé un trajet de circulation (51a) dans lequel la poudre circule avec le gaz ; et d'un conduit large (52) de forme tubulaire qui est agencé au niveau de la partie extrémité avant du conduit de buse (51), à travers lequel circule la poudre et le gaz émis en sortie depuis cette partie extrémité avant, et dont la largeur (W) entre les face côté paroi interne au niveau d'une face extrémité côté extrémité de base, est supérieure à la largeur (D1) du trajet de circulation (51a) de la partie extrémité avant du conduit de buse (51).
PCT/JP2015/080830 2014-10-31 2015-10-30 Buse, dispositif de formation de film, et procédé de formation de film de revêtement WO2016068331A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016556684A JP6637897B2 (ja) 2014-10-31 2015-10-30 ノズル、成膜装置及び皮膜の形成方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-223544 2014-10-31
JP2014223544 2014-10-31

Publications (1)

Publication Number Publication Date
WO2016068331A1 true WO2016068331A1 (fr) 2016-05-06

Family

ID=55857664

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/080830 WO2016068331A1 (fr) 2014-10-31 2015-10-30 Buse, dispositif de formation de film, et procédé de formation de film de revêtement

Country Status (2)

Country Link
JP (1) JP6637897B2 (fr)
WO (1) WO2016068331A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007184269A (ja) * 2005-12-21 2007-07-19 Sulzer Metco Us Inc プラズマとコールドスプレーとを組み合わせた方法および装置
JP2009136870A (ja) * 2006-09-01 2009-06-25 Kobe Steel Ltd 噴射ノズル装置
JP2011240314A (ja) * 2010-05-21 2011-12-01 Kobe Steel Ltd コールドスプレー装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007184269A (ja) * 2005-12-21 2007-07-19 Sulzer Metco Us Inc プラズマとコールドスプレーとを組み合わせた方法および装置
JP2009136870A (ja) * 2006-09-01 2009-06-25 Kobe Steel Ltd 噴射ノズル装置
JP2011240314A (ja) * 2010-05-21 2011-12-01 Kobe Steel Ltd コールドスプレー装置

Also Published As

Publication number Publication date
JPWO2016068331A1 (ja) 2017-09-14
JP6637897B2 (ja) 2020-01-29

Similar Documents

Publication Publication Date Title
US7621466B2 (en) Nozzle for cold spray and cold spray apparatus using same
KR100776194B1 (ko) 콜드 스프레이용 노즐 및 이를 이용한 콜드 스프레이 장치
US6569245B2 (en) Method and apparatus for applying a powder coating
US20200376507A1 (en) Internally Cooled Aerodynamically Centralizing Nozzle (ICCN)
US8651394B2 (en) Laval nozzle for thermal spraying and kinetic spraying
US20180021793A1 (en) Directional cold spray method
WO2015133338A1 (fr) Dispositif de formation de film
US9834844B2 (en) Nozzle for a thermal spray gun and method of thermal spraying
WO2016208598A1 (fr) Procédé et dispositif de formation de film
JP5845733B2 (ja) コールドスプレー用ノズル、及びコールドスプレー装置
WO2016068331A1 (fr) Buse, dispositif de formation de film, et procédé de formation de film de revêtement
JP5773808B2 (ja) 塗料用スプレーガン
JP2001179634A (ja) 洗浄用ドライアイススノー噴射装置とそれを使用した洗浄方法
KR100776537B1 (ko) 콜드 스프레이용 노즐 및 이를 이용한 콜드 스프레이 장치
JP6588029B2 (ja) ノズル、成膜装置及び皮膜の形成方法
JP2020082269A (ja) ノズル、及びドライアイス噴射装置
RU2650471C1 (ru) Способ напыления газотермических покрытий на внутренние поверхности и устройство для его реализации
KR20160080599A (ko) 상온 분말 분사 노즐
ES2398386T3 (es) Tobera de Laval para pulverización térmica o cinética
CA2755921A1 (fr) Appareil de pulverisation dynamique par gaz froid

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 15854114

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2016556684

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 15854114

Country of ref document: EP

Kind code of ref document: A1