WO2016063681A1 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
WO2016063681A1
WO2016063681A1 PCT/JP2015/077318 JP2015077318W WO2016063681A1 WO 2016063681 A1 WO2016063681 A1 WO 2016063681A1 JP 2015077318 W JP2015077318 W JP 2015077318W WO 2016063681 A1 WO2016063681 A1 WO 2016063681A1
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WIPO (PCT)
Prior art keywords
gate
igbt element
semiconductor device
igbt
voltage
Prior art date
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PCT/JP2015/077318
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English (en)
French (fr)
Inventor
内藤　達也
正人 大月
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富士電機株式会社
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Application filed by 富士電機株式会社 filed Critical 富士電機株式会社
Priority to JP2016555144A priority Critical patent/JP6296166B2/ja
Publication of WO2016063681A1 publication Critical patent/WO2016063681A1/ja
Priority to US15/335,460 priority patent/US9881916B2/en

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Definitions

  • the present invention relates to a semiconductor device.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2014-130909 (U.S. Patent Application Publication No. 2014/184303)
  • the short-circuit tolerance of the semiconductor device is determined by the smaller one of the short-circuit tolerance of the IGBT and FET.
  • a short circuit is detected, a larger current flows in the IGBT than in the FET.
  • the short circuit tolerance of the semiconductor device in which the IGBT and the FET are connected in parallel is determined by the short circuit tolerance of the IGBT.
  • a semiconductor device including an IGBT element, a superjunction transistor element, and a limiting unit.
  • the superjunction transistor element may be connected in parallel with the IGBT element.
  • the limiting unit may limit the voltage applied to the gate terminal of the IGBT element more than the voltage applied to the gate terminal of the superjunction transistor element.
  • the semiconductor device may further include an external terminal that receives an external voltage from the outside.
  • a gate voltage based on a common external voltage may be applied to the IGBT element and the super junction transistor element.
  • the limiting unit may clamp the range of the gate voltage applied to the IGBT element to a range narrower than the range of the gate voltage applied to the super junction transistor element.
  • the limiting unit may include a clamp diode connected between the gate and emitter of the IGBT element.
  • the limiting unit may make the gate voltage applied to the IGBT element smaller than the gate voltage applied to the superjunction transistor element.
  • the limiting unit may include a voltage drop diode connected in series to the gate terminal of the IGBT element.
  • the gate resistance of the IGBT element may be larger than the gate resistance of the super junction transistor element.
  • the threshold voltage of the IGBT element may be higher than the threshold voltage of the superjunction transistor element.
  • the gate resistance of the super junction type transistor element may be larger than the gate resistance of the IGBT element.
  • the threshold voltage of the super junction transistor element may be higher than the threshold voltage of the IGBT element.
  • the IGBT element and the superjunction transistor element may be formed on the same semiconductor substrate.
  • a semiconductor device comprising an IGBT element, a super junction transistor element connected in parallel with the IGBT element, and a resistor connected to the gate terminal of the IGBT element.
  • the gate resistance of the IGBT element may be larger than the gate resistance of the super junction transistor element.
  • the IGBT element and the superjunction transistor element may be formed on the same semiconductor substrate.
  • a semiconductor device comprising an IGBT element, a superjunction transistor element connected in parallel with the IGBT element, and a resistor connected to the gate terminal of the superjunction transistor element.
  • the gate resistance of the super junction type transistor element may be larger than the gate resistance of the IGBT element.
  • the IGBT element and the superjunction transistor element may be formed on the same semiconductor substrate.
  • FIG. 2 is a diagram illustrating an example of a circuit configuration of a semiconductor device 100 and a protection circuit 200.
  • FIG. 2 is a diagram showing an example of a cross section of an IGBT element 120 and an SJMOS element 150.
  • FIG. It is a figure which shows an example of the Vce-Jc characteristic of an IGBT element.
  • FIG. 5 is a diagram showing an example of a short-circuit tolerance of the IGBT element 120 and the SJMOS element 150.
  • 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. It is a figure which shows an example of the cross section of the IGBT element 120 and the SJMOS element 150 which were formed in the same semiconductor substrate.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • FIG. 1 is a diagram illustrating an example of a circuit configuration of the semiconductor device 100 and the protection circuit 200.
  • the semiconductor device 100 limits the voltage applied to the gate terminal of the IGBT element 120 more than the voltage applied to the gate terminal of the SJMOS element 150 which is an example of a super junction transistor element. Thereby, even if the channel density of the IGBT element 120 is increased, the short-circuit withstand capability can be maintained. For this reason, the trade-off between the on-voltage and the turn-off loss can be improved while maintaining the short-circuit tolerance.
  • the semiconductor device 100 of this example includes an IGBT chip 110, an SJ (superjunction) type transistor chip 140, and external terminals 102, 104, 106, and 108.
  • External terminals 102 to 108 are terminals for electrically connecting the inside and the outside of the semiconductor device 100.
  • the IGBT chip 110 includes an IGBT element 120 and a limiting unit 112.
  • the SJ type transistor chip 140 has an SJMOS element 150.
  • the IGBT element 120 has a collector terminal connected to the external terminal 106 and an emitter terminal connected to the external terminal 108.
  • the SJMOS element 150 is connected in parallel with the IGBT element 120. That is, the SJMOS element 150 is connected between the external terminal 106 and the external terminal 108.
  • the on-voltage can be lowered using the characteristics of the SJMOS element 150 in the low current region. For this reason, steady loss can be made low.
  • a high breakdown voltage can be obtained by utilizing the characteristics of the IGBT element 120.
  • the limiting unit 112 limits the voltage applied to the gate terminal of the IGBT element 120 more than the voltage applied to the gate terminal of the SJMOS element 150. Limiting may refer to making the upper limit value of the voltage applied to the gate terminal of the IGBT element 120 lower than the upper limit value of the voltage applied to the gate terminal of the SJMOS element 150. It may indicate that the voltage applied to the gate terminal is lower than the voltage applied to the gate terminal of the SJMOS element 150.
  • the limiting unit 112 of this example clamps the range of the gate voltage applied to the IGBT element 120 to a range narrower than the range of the gate voltage applied to the SJMOS element.
  • the external terminal 102 receives an external voltage from an external power source.
  • the external voltage is 15 V, for example.
  • each gate terminal is electrically connected to the common external terminal 102, and a gate voltage based on the common external voltage is applied.
  • the gate voltage applied to the IGBT element 120 is limited by the limiting unit 112.
  • the gate voltage applied to the SJMOS element 150 is not limited by the limiting unit 112.
  • the limiting unit 112 may limit both gate voltages applied to the SJMOS element 150. In this case, the limiting unit 112 further limits the gate voltage applied to the IGBT element 120 more than the gate voltage applied to the SJMOS element 150.
  • the limiting unit 112 in this example includes a resistor 114 and a clamp diode 116.
  • the clamp diode 116 is connected between the gate and emitter of the IGBT element 120.
  • the cathode terminal of the clamp diode 116 is connected to the gate terminal of the IGBT element 120, and the anode terminal is connected to the emitter terminal of the IGBT element 120.
  • the clamp diode 116 is, for example, a Zener diode.
  • the clamp diode 116 conducts between the gate and emitter when a voltage equal to or higher than a predetermined clamp voltage is applied between the gate and emitter of the IGBT element 120. As a result, the voltage between the gate and emitter of the IGBT element 120 is clamped.
  • the clamp voltage is lower than the voltage applied to the external terminal 102 during normal operation.
  • the voltage applied to the external terminal 102 during normal operation is about 15V
  • the clamp voltage is about 13V.
  • a gate voltage of about 15V is applied to the SJMOS element 150 and a gate voltage of about 13V is applied to the IGBT element 120 during normal operation.
  • the short-circuit tolerance of the IGBT element 120 can be improved. For this reason, even if the channel density of the IGBT element 120 is increased according to the improvement of the short-circuit tolerance, the short-circuit tolerance can be maintained. Therefore, the trade-off between the on-state voltage and the turn-off loss can be improved while maintaining the short-circuit tolerance. Note that the short-circuit tolerance may be improved while maintaining the channel density.
  • the resistor 114 is connected between the external terminal 102 and the gate terminal of the IGBT element 120.
  • the gate resistance of the IGBT element 120 becomes larger than the gate resistance of the SJMOS element 150, and the threshold voltage of the IGBT element 120 becomes higher than the threshold voltage of the SJMOS element 150.
  • the gate resistance refers to a combined resistance component of a resistance component of the gate electrode itself and a resistance component connected to the gate electrode.
  • the SJMOS element 150 is turned on earlier than the IGBT element 120 and turned off later. Thereby, the turn-on loss can be reduced by first turning on the SJMOS element 150 having a large on-resistance in the large current region.
  • the protection circuit 200 includes a transistor 206, a comparator 208, a reference voltage source 210, a resistor 212, a connection terminal 202, and a connection terminal 204.
  • the connection terminal 202 is connected to the external terminal 102 of the semiconductor device 100.
  • the connection terminal 204 is connected to the external terminal 104 of the semiconductor device 100.
  • a voltage source that applies a gate voltage is connected to the external terminal 102.
  • One end of the resistor 212 is connected to the emitter terminal of the IGBT element 120 via the connection terminal 204 and the external terminal 104.
  • a reference potential such as a ground potential is applied to the other end of the resistor 212.
  • a current corresponding to the emitter current of the IGBT element 120 flows through the resistor 212. The voltage across the resistor 212 is determined according to the current.
  • the comparator 208 compares the potential at one end of the resistor 212 with a predetermined reference potential generated by the reference voltage source 210.
  • the comparator 208 turns off the transistor 206 when the potential of the resistor 212 is higher than the reference potential.
  • the transistor 206 is provided between the connection terminal 202 and the ground potential.
  • the gate terminal of the IGBT element 120 is connected to the ground potential to turn off the IGBT element 120.
  • FIG. 2 is a diagram showing an example of a cross section of the IGBT element 120 and the SJMOS element 150.
  • the IGBT element 120 has a p-type base layer 125 on the surface side.
  • the IGBT element 120 of this example includes a plurality of trench-type gate electrodes 122.
  • a gate insulating film 121 is formed around each gate electrode 122.
  • Each gate electrode 122 is formed so as to reach at least the end on the back surface side of the p-type base layer 125.
  • An emitter region 124 is formed in a region adjacent to the gate insulating film 121 on the surface of the p-type base layer 125. Further, a contact region 123 is formed in a region sandwiched between the emitter regions 124 on the surface of the p-type base layer 125.
  • the IGBT element 120 includes a surface electrode connected to the contact region 123 and the emitter region 124, an insulating film that insulates the surface electrode from the gate electrode 122, and the like, which are omitted in FIG.
  • the IGBT element 120 has an n-type base layer 126 on the back side of the p-type base layer 125 and the gate insulating film 121.
  • a predetermined voltage is applied to the gate electrode 122, a channel is formed in the p-type base layer 125 along the gate insulating film 121, and the emitter region 124 and the n-type base layer 126 are conducted.
  • an FS (field stop) layer 127, a collector layer 128, and a back electrode 129 are sequentially formed. Thereby, the IGBT element 120 is formed.
  • the SJMOS element 150 has a p-type base layer 155 on the surface side.
  • the SJMOS element 150 of this example has a plurality of trench-type gate electrodes 152.
  • a gate insulating film 151 is formed around each gate electrode 152.
  • Each gate electrode 152 is formed so as to reach at least the end portion on the back surface side of the p-type base layer 155.
  • a source region 154 is formed in a region adjacent to the gate insulating film 151 on the surface of the p-type base layer 155. Further, a contact region 153 is formed in a region sandwiched between the source regions 154 on the surface of the p-type base layer 155. Note that the SJMOS element 150 includes a surface electrode connected to the contact region 153 and the source region 154, an insulating film that insulates the surface electrode from the gate electrode 152, and the like, which are omitted in FIG.
  • the SJMOS element 150 has an n-type column 156-n and a p-type column 156-p on the back side of the p-type base layer 155 and the gate insulating film 151.
  • the n-type column 156-n and the p-type column 156-p are alternately arranged in a direction parallel to the surface of the SJMOS element 150.
  • an n-type column 156-n is provided on the back side of the gate insulating film 151, and a p-type column 156-p is formed on the back side of the p-type base layer 155. Note that the surface side end portion of the n-type column 156-n is also in contact with the p-type base layer 155.
  • FS layer 157, drain layer 158, and back electrode 159 are sequentially formed on the back side of n-type column 156-n and p-type column 156-p. Thereby, the SJMOS element 150 is formed.
  • FIG. 3 is a diagram showing an example of the Vce-Jc characteristic of the IGBT element.
  • Vce indicates the collector-emitter voltage
  • Jc indicates the collector current density.
  • the gate-emitter voltage VGE is set to 15V, 13V, 12.5V and 12V in the IGBT element having a high channel density
  • the gate-emitter voltage VGE is set to 15V in the IGBT element having a low channel density. Shows the case.
  • the saturation current density is almost the same. Can be. That is, even if the channel density is increased, clamping the gate voltage can prevent the saturation current density from increasing, and the short-circuit tolerance can be maintained. Since the channel density is increased, turn-off loss can be reduced.
  • Limiting unit 112 limits the gate voltage of IGBT element 120 so that the saturation current density of IGBT element 120 when the applied voltage of the external power supply is applied as the gate voltage is, for example, about 60%. To do.
  • the IGBT element 120 may increase the channel density as much as the saturation current density is reduced by limiting the gate voltage.
  • the limiting unit 112 is configured such that the saturation current density of the IGBT element 120 when the gate voltage is controlled is in the range of about 40% to 80% with respect to the saturation current density of the IGBT element 120 when the gate voltage is not limited.
  • the gate voltage may be limited. Preferably, the gate voltage is limited so that the saturation current density is in the range of about 50% to 70%.
  • FIG. 4 is a diagram illustrating an example of a short-circuit tolerance of the IGBT element 120 and the SJMOS element 150.
  • a comparative example an example of an IGBT element having a low channel density and a gate voltage set to 15 V is also shown.
  • the gate voltage is clamped to 13 V so that the channel density is higher than that of the IGBT element of the comparative example.
  • the SJMOS element 150 has a gate voltage of 15V.
  • the short-circuit withstand capability of the IGBT element 120 is equivalent to that of the comparative example having a low channel density. Note that the short-circuit tolerance corresponds to the length of time from when the current starts to flow until the current is interrupted in FIG.
  • FIG. 5 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example is different from the semiconductor device 100 shown in FIG. Other configurations are the same as those of the semiconductor device 100 shown in FIG.
  • the limiting unit 112 of this example makes the gate voltage applied to the IGBT element 120 smaller than the gate voltage applied to the SJMOS element 150.
  • the limiting unit 112 of this example includes a voltage drop diode 118 instead of the clamp diode 116.
  • the voltage drop diode 118 is connected in series to the gate terminal of the IGBT element 120.
  • a voltage drop diode 118 is provided between the resistor 114 and the gate terminal of the IGBT element 120.
  • the voltage drop diode 118 drops the gate voltage by about 2V, for example. Even with such a configuration, the gate voltage of the IGBT element 120 can be made lower than the gate voltage of the SJMOS element 150. Therefore, it is possible to increase the channel density and reduce the turn-off loss while maintaining the short-circuit withstand capability of the IGBT element 120.
  • FIG. 6 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example is different from the semiconductor device 100 shown in FIG. 1 in that the IGBT element 120 and the SJMOS element 150 are formed on the same semiconductor substrate 160.
  • a clamp diode 116 may also be formed on the semiconductor substrate 160.
  • the resistor 114 may be formed on the semiconductor substrate 160.
  • Other configurations are the same as those of the semiconductor device 100 shown in FIG. With such a configuration, the semiconductor device 100 can be reduced in size.
  • FIG. 7 is a diagram showing an example of a cross section of the IGBT element 120 and the SJMOS element 150 formed on the same semiconductor substrate.
  • the SJMOS element 150 of this example is formed adjacent to the IGBT element 120.
  • the FS layer 127 also functions as the FS layer of the SJMOS element 150.
  • the back electrode 129 also functions as a back electrode of the SJMOS element 150.
  • Other structures are the same as those of the IGBT element 120 and the SJMOS element 150 shown in FIG.
  • FIG. 8 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example is different from the semiconductor device 100 shown in FIG. 5 in that the IGBT element 120 and the SJMOS element 150 are formed on the same semiconductor substrate 160.
  • a voltage drop diode 118 may also be formed on the semiconductor substrate 160.
  • the resistor 114 may be formed on the semiconductor substrate 160.
  • Other configurations are the same as those of the semiconductor device 100 shown in FIG. With such a configuration, the semiconductor device 100 can be reduced in size.
  • FIG. 9 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example is different from the semiconductor device 100 shown in FIG. 1 or FIG. 9 shows an example in which the arrangement of the clamp diode 116 is changed with respect to the semiconductor device 100 shown in FIG.
  • the clamp diode 116 of this example has a cathode terminal connected to the gate terminal of the IGBT element 120 via the resistor 114. Even with such a configuration, the gate voltage of the IGBT element 120 can be limited.
  • FIG. 10 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example is different from the semiconductor device 100 shown in FIG. 5 or 8 in the arrangement of the voltage drop diode 118.
  • FIG. 10 shows an example in which the arrangement of the voltage drop diode 118 is changed with respect to the semiconductor device 100 shown in FIG.
  • the voltage drop diode 118 in this example is connected between the external terminal 102 and the resistor 114. Even with such a configuration, the gate voltage of the IGBT element 120 can be limited.
  • FIG. 11 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example differs from the semiconductor device 100 shown in FIGS. 1 to 10 in the arrangement of the resistors 114.
  • FIG. 11 shows an example in which the arrangement of the resistors 114 is changed with respect to the semiconductor device 100 shown in FIG.
  • the resistor 114 in this example is connected between the gate terminal of the SJMOS element 150 and the external terminal 102.
  • the gate resistance of the SJMOS element 150 becomes larger than the gate resistance of the IGBT element 120, and the threshold voltage of the SJMOS element 150 becomes higher than the threshold voltage of the IGBT element 120. Thereby, the IGBT element 120 is turned on earlier than the SJMOS element 150 and turned off later. Thereby, since the current flowing through the SJMOS element 150 can be suppressed, the SJMOS element 150 can be protected.
  • FIG. 12 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example does not have the limiting unit 112 and the clamp diode 116 as compared to the semiconductor device 100 illustrated in FIG.
  • the resistor 114 By connecting the resistor 114 to the gate terminal of the IGBT element 120, the gate resistance of the IGBT element 120 becomes larger than the gate resistance of the SJMOS element 150. Thereby, the SJMOS element 150 can be turned on earlier than the IGBT element 120 and turned off later.
  • the gate resistance of the IGBT element 120 may be increased by controlling the material, film thickness, etc. of the gate electrode of the IGBT element 120. If the resistance value of the gate electrode itself of the IGBT element 120 can be made sufficiently larger than the gate resistance of the SJMOS element 150, the resistor 114 need not be provided.
  • FIG. 13 is a diagram illustrating another configuration example of the semiconductor device 100.
  • the semiconductor device 100 of this example does not include the limiting unit 112 and the voltage drop diode 118 as compared to the semiconductor device 100 illustrated in FIG.
  • the resistor 114 By connecting the resistor 114 to the gate terminal of the SJMOS element 150, the gate resistance of the SJMOS element 150 becomes larger than the gate resistance of the IGBT element 120. Thereby, IGBT element 120 can be turned on earlier than SJMOS element 150 and turned off later.
  • the gate resistance of the SJMOS element 150 may be increased by controlling the material, film thickness, etc. of the gate electrode of the SJMOS element 150. If the resistance value of the gate electrode itself of the SJMOS element 150 can be made sufficiently larger than the gate resistance of the IGBT element 120, the resistor 114 need not be provided.
  • SYMBOLS 100 Semiconductor device, 102, 104, 106, 108 ... External terminal, 110 ... IGBT chip, 112 ... Limiting part, 114 ... Resistance, 116 ... Clamp diode, 118 ... Voltage drop diode, 120 ... IGBT element, 121 ... gate insulating film, 122 ... gate electrode, 123 ... contact region, 124 ... emitter region, 125 ... p-type base layer 126 ... n-type base layer, 127 ... FS layer, 128 ... collector layer, 129 ... back electrode, 140 ... SJ-type transistor chip, 150 ... SJMOS element, 151 ..

Abstract

　短絡耐量を維持しつつ、オン電圧とターンオフ損失のトレードオフを改善する。ＩＧＢＴ素子と、ＩＧＢＴ素子と並列に接続された超接合型トランジスタ素子と、ＩＧＢＴ素子のゲート端子に印加する電圧を、超接合型トランジスタ素子のゲート端子に印加する電圧よりも制限する制限部とを備える半導体装置を提供する。

Description

半導体装置
　本発明は、半導体装置に関する。
　従来、ＩＧＢＴ（絶縁ゲート型バイポーラトランジスタ）と、ＭＯＳＦＥＴ等の電界効果トランジスタとを並列に接続する半導体装置が知られている（例えば特許文献１参照）。
　特許文献１　特開２０１４－１３０９０９号公報（米国特許出願公開第２０１４／１８４３０３号明細書）
　半導体装置の短絡耐量は、ＩＧＢＴおよびＦＥＴの短絡耐量のうち小さい方で決まる。短絡検出時、ＩＧＢＴにはＦＥＴに比べて大きな電流が流れる。このため、ＩＧＢＴとＦＥＴを並列に接続した半導体装置の短絡耐量は、ＩＧＢＴの短絡耐量で定まる。ＩＧＢＴの短絡耐量を大きくするには、ＩＧＢＴのチャネル密度を低くすればよいが、チャネル密度を低くするとＩＧＢＴのターンオフ時の損失が大きくなってしまう。
　本発明の第１の態様においては、ＩＧＢＴ素子と、超接合型トランジスタ素子と、制限部とを備える半導体装置を提供する。超接合型トランジスタ素子は、ＩＧＢＴ素子と並列に接続されてよい。制限部は、ＩＧＢＴ素子のゲート端子に印加する電圧を、超接合型トランジスタ素子のゲート端子に印加する電圧よりも制限してよい。
　半導体装置は、外部から外部電圧を受け取る外部端子をさらに備えてよい。ＩＧＢＴ素子および超接合型トランジスタ素子は、共通の外部電圧にそれぞれ基づいたゲート電圧が印加されてよい。
　制限部は、ＩＧＢＴ素子に印加するゲート電圧の範囲を、超接合型トランジスタ素子に印加するゲート電圧の範囲よりも狭い範囲にクランプしてよい。制限部は、ＩＧＢＴ素子のゲートエミッタ間に接続されたクランプダイオードを有してよい。
　制限部は、ＩＧＢＴ素子に印加するゲート電圧を、超接合型トランジスタ素子に印加するゲート電圧よりも小さくしてよい。制限部は、ＩＧＢＴ素子のゲート端子に直列に接続した電圧ドロップ用ダイオードを有してよい。
　ＩＧＢＴ素子のゲート抵抗が、超接合型トランジスタ素子のゲート抵抗より大きくてよい。ＩＧＢＴ素子の閾値電圧が、超接合型トランジスタ素子の閾値電圧より高くてよい。超接合型トランジスタ素子のゲート抵抗が、ＩＧＢＴ素子のゲート抵抗より大きくてよい。超接合型トランジスタ素子の閾値電圧が、ＩＧＢＴ素子の閾値電圧より高くてよい。ＩＧＢＴ素子および超接合型トランジスタ素子を、同一の半導体基板に形成してよい。
　本発明の第２の態様においては、ＩＧＢＴ素子と、ＩＧＢＴ素子と並列に接続された超接合型トランジスタ素子と、ＩＧＢＴ素子のゲート端子に接続された抵抗とを備える半導体装置を提供する。ＩＧＢＴ素子のゲート抵抗が、超接合型トランジスタ素子のゲート抵抗より大きくてよい。ＩＧＢＴ素子および超接合型トランジスタ素子を、同一の半導体基板に形成してよい。
　本発明の第３の態様においては、ＩＧＢＴ素子と、ＩＧＢＴ素子と並列に接続された超接合型トランジスタ素子と、超接合型トランジスタ素子のゲート端子に接続された抵抗とを備える半導体装置を提供する。超接合型トランジスタ素子のゲート抵抗が、ＩＧＢＴ素子のゲート抵抗より大きくてよい。ＩＧＢＴ素子および超接合型トランジスタ素子を、同一の半導体基板に形成してよい。
　なお、上記の発明の概要は、本発明の特徴の全てを列挙したものではない。また、これらの特徴群のサブコンビネーションもまた、発明となりうる。
半導体装置１００および保護回路２００の回路構成の一例を示す図である。 ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０の断面の一例を示す図である。 ＩＧＢＴ素子のＶｃｅ－Ｊｃ特性の一例を示す図である。 ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０の短絡耐量の一例を示す図である。 半導体装置１００の他の構成例を示す図である。 半導体装置１００の他の構成例を示す図である。 同一の半導体基板に形成されたＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０の断面の一例を示す図である。 半導体装置１００の他の構成例を示す図である。 半導体装置１００の他の構成例を示す図である。 半導体装置１００の他の構成例を示す図である。 半導体装置１００の他の構成例を示す図である。 半導体装置１００の他の構成例を示す図である。 半導体装置１００の他の構成例を示す図である。
　以下、発明の実施の形態を通じて本発明を説明するが、以下の実施形態は請求の範囲にかかる発明を限定するものではない。また、実施形態の中で説明されている特徴の組み合わせの全てが発明の解決手段に必須であるとは限らない。
　図１は、半導体装置１００および保護回路２００の回路構成の一例を示す図である。半導体装置１００は、ＩＧＢＴ素子１２０のゲート端子に印加する電圧を、超接合型トランジスタ素子の一例であるＳＪＭＯＳ素子１５０のゲート端子に印加する電圧よりも制限する。これにより、ＩＧＢＴ素子１２０のチャネル密度を高くしても、短絡耐量を維持することができる。このため、短絡耐量を維持しつつ、オン電圧とターンオフ損失のトレードオフを改善できる。
　本例の半導体装置１００は、ＩＧＢＴチップ１１０、ＳＪ（超接合）型トランジスタチップ１４０、および、外部端子１０２、１０４、１０６、１０８を有する。外部端子１０２から１０８は、半導体装置１００の内部と外部とを電気的に接続するための端子である。
　ＩＧＢＴチップ１１０は、ＩＧＢＴ素子１２０および制限部１１２を有する。ＳＪ型トランジスタチップ１４０は、ＳＪＭＯＳ素子１５０を有する。ＩＧＢＴ素子１２０は、コレクタ端子が外部端子１０６に接続し、エミッタ端子が外部端子１０８に接続する。ＳＪＭＯＳ素子１５０は、ＩＧＢＴ素子１２０と並列に接続される。つまり、ＳＪＭＯＳ素子１５０は、外部端子１０６および外部端子１０８の間に接続される。
　ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０を並列に接続することで、低電流領域ではＳＪＭＯＳ素子１５０の特性を利用してオン電圧を低くできる。このため、定常損失を低くすることができる。また、大電流領域ではＩＧＢＴ素子１２０の特性を利用して、高耐圧にすることができる。
　制限部１１２は、ＩＧＢＴ素子１２０のゲート端子に印加する電圧を、ＳＪＭＯＳ素子１５０のゲート端子に印加する電圧よりも制限する。ここで制限するとは、ＩＧＢＴ素子１２０のゲート端子に印加する電圧の上限値を、ＳＪＭＯＳ素子１５０のゲート端子に印加する電圧の上限値よりも低くすることを指してよく、また、ＩＧＢＴ素子１２０のゲート端子に印加する電圧を、ＳＪＭＯＳ素子１５０のゲート端子に印加する電圧よりも低くすることを指してもよい。本例の制限部１１２は、ＩＧＢＴ素子１２０に印加するゲート電圧の範囲を、ＳＪＭＯＳ素子に印加するゲート電圧の範囲よりも狭い範囲にクランプする。
　外部端子１０２は、外部の電源から外部電圧を受け取る。当該外部電圧は、例えば１５Ｖ等である。本例のＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０は、各ゲート端子が共通の外部端子１０２に電気的に接続され、共通の外部電圧にそれぞれ基づいたゲート電圧が印加される。
　本例では、ＩＧＢＴ素子１２０に印加されるゲート電圧は、制限部１１２により制限される。一方、ＳＪＭＯＳ素子１５０に印加されるゲート電圧は、制限部１１２により制限されない。なお、制限部１１２は、ＳＪＭＯＳ素子１５０に印加されるゲート電圧の両方を制限してもよい。この場合、制限部１１２は、ＩＧＢＴ素子１２０に印加されるゲート電圧を、ＳＪＭＯＳ素子１５０に印加されるゲート電圧よりも更に制限する。
　本例の制限部１１２は、抵抗１１４およびクランプダイオード１１６を有する。クランプダイオード１１６は、ＩＧＢＴ素子１２０のゲートエミッタ間に接続される。クランプダイオード１１６のカソード端子はＩＧＢＴ素子１２０のゲート端子に接続し、アノード端子がＩＧＢＴ素子１２０のエミッタ端子に接続する。クランプダイオード１１６は、例えばツェナーダイオードである。クランプダイオード１１６は、所定のクランプ電圧以上の電圧がＩＧＢＴ素子１２０のゲートエミッタ間に印加された場合に、ゲートエミッタ間を導通させる。これにより、ＩＧＢＴ素子１２０のゲートエミッタ間の電圧がクランプされる。
　なお、当該クランプ電圧は、通常動作時に外部端子１０２に印加される電圧よりも低い。例えば通常動作時に外部端子１０２に印加される電圧は１５Ｖ程度であり、クランプ電圧は１３Ｖ程度である。これにより、通常動作時において、ＳＪＭＯＳ素子１５０には１５Ｖ程度のゲート電圧が印加され、ＩＧＢＴ素子１２０には１３Ｖ程度のゲート電圧が印加される。
　ＩＧＢＴ素子１２０のゲート電圧を制限することで、ＩＧＢＴ素子１２０の短絡耐量を向上させることができる。このため、短絡耐量が向上する分に応じてＩＧＢＴ素子１２０のチャネル密度を上昇させても、短絡耐量を維持することができる。従って、短絡耐量を維持しつつ、オン電圧とターンオフ損失のトレードオフを改善できる。なお、チャネル密度を維持しつつ、短絡耐量を向上させてもよい。
　抵抗１１４は、外部端子１０２とＩＧＢＴ素子１２０のゲート端子との間に接続される。抵抗１１４を設けることで、ＩＧＢＴ素子１２０のゲート抵抗がＳＪＭＯＳ素子１５０のゲート抵抗よりも大きくなり、ＩＧＢＴ素子１２０の閾値電圧がＳＪＭＯＳ素子１５０の閾値電圧よりも高くなる。なお、本明細書においてゲート抵抗は、ゲート電極自体の抵抗成分と、ゲート電極に接続される抵抗成分との合成抵抗成分を指す。これにより、ＩＧＢＴ素子１２０よりもＳＪＭＯＳ素子１５０のほうが早くターンオンして、遅くターンオフする。これにより大電流領域でオン抵抗の大きいＳＪＭＯＳ素子１５０を先にオンさせることでターンオン損失を低減できる。
　保護回路２００は、トランジスタ２０６、比較器２０８、基準電圧源２１０、抵抗２１２、接続端子２０２および接続端子２０４を有する。接続端子２０２は、半導体装置１００の外部端子１０２に接続する。接続端子２０４は、半導体装置１００の外部端子１０４に接続する。なお、外部端子１０２には、保護回路２００のほかに、ゲート電圧を印加する電圧源が接続される。
　抵抗２１２の一端は、接続端子２０４および外部端子１０４を介して、ＩＧＢＴ素子１２０のエミッタ端子に接続する。抵抗２１２の他端には、接地電位等の基準電位が印加される。抵抗２１２には、ＩＧＢＴ素子１２０のエミッタ電流に応じた電流が流れる。抵抗２１２の両端間の電圧は、当該電流に応じて定まる。
　比較器２０８は、抵抗２１２の一端の電位と、基準電圧源２１０が生成する所定の参照電位とを比較する。比較器２０８は、抵抗２１２の電位が参照電位よりも高い場合に、トランジスタ２０６をオフさせる。トランジスタ２０６は、接続端子２０２と接地電位との間に設けられる。トランジスタ２０６がオフすると、ＩＧＢＴ素子１２０のゲート端子が接地電位に接続されてＩＧＢＴ素子１２０をオフにする。このような構成により、例えば半導体装置１００の外部端子１０６および１０８間が短絡するアーム短絡が生じた場合に、ＩＧＢＴ素子１２０のゲート電圧をプルダウンして、ＩＧＢＴ素子１２０をオフすることができる。
　図２は、ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０の断面の一例を示す図である。ＩＧＢＴ素子１２０は、表面側にｐ型ベース層１２５を有する。また、本例のＩＧＢＴ素子１２０は、トレンチ型のゲート電極１２２を複数有する。それぞれのゲート電極１２２の周囲には、ゲート絶縁膜１２１が形成される。それぞれのゲート電極１２２は、少なくともｐ型ベース層１２５の裏面側端部まで達するように形成される。
　ｐ型ベース層１２５の表面においてゲート絶縁膜１２１と隣接する領域には、エミッタ領域１２４が形成される。また、ｐ型ベース層１２５の表面においてエミッタ領域１２４に挟まれた領域に、コンタクト領域１２３が形成される。なお、ＩＧＢＴ素子１２０は、コンタクト領域１２３およびエミッタ領域１２４に接続する表面電極、および、当該表面電極とゲート電極１２２とを絶縁する絶縁膜等を有するが、図２では省略している。
　ＩＧＢＴ素子１２０は、ｐ型ベース層１２５およびゲート絶縁膜１２１の裏面側に、ｎ型ベース層１２６を有する。ゲート電極１２２に所定の電圧が印加されると、ゲート絶縁膜１２１に沿ってｐ型ベース層１２５にチャネルが形成されて、エミッタ領域１２４およびｎ型ベース層１２６が導通する。
　ｎ型ベース層１２６の裏面側には、ＦＳ（フィールドストップ）層１２７、コレクタ層１２８および裏面電極１２９が順次形成される。これにより、ＩＧＢＴ素子１２０が形成される。
　ＳＪＭＯＳ素子１５０は、表面側にｐ型ベース層１５５を有する。また、本例のＳＪＭＯＳ素子１５０は、トレンチ型のゲート電極１５２を複数有する。それぞれのゲート電極１５２の周囲には、ゲート絶縁膜１５１が形成される。それぞれのゲート電極１５２は、少なくともｐ型ベース層１５５の裏面側端部まで達するように形成される。
　ｐ型ベース層１５５の表面においてゲート絶縁膜１５１と隣接する領域には、ソース領域１５４が形成される。また、ｐ型ベース層１５５の表面においてソース領域１５４に挟まれた領域に、コンタクト領域１５３が形成される。なお、ＳＪＭＯＳ素子１５０は、コンタクト領域１５３およびソース領域１５４に接続する表面電極、および、当該表面電極とゲート電極１５２とを絶縁する絶縁膜等を有するが、図２では省略している。
　ＳＪＭＯＳ素子１５０は、ｐ型ベース層１５５およびゲート絶縁膜１５１の裏面側に、ｎ型カラム１５６－ｎおよびｐ型カラム１５６－ｐを有する。ｎ型カラム１５６－ｎおよびｐ型カラム１５６－ｐは、ＳＪＭＯＳ素子１５０の表面と平行な方向において交互に配置される。本例では、ゲート絶縁膜１５１の裏面側にｎ型カラム１５６－ｎが設けられ、ｐ型ベース層１５５の裏面側にｐ型カラム１５６－ｐが形成される。なお、ｎ型カラム１５６－ｎの表面側端部は、ｐ型ベース層１５５にも接している。
　ｎ型カラム１５６－ｎおよびｐ型カラム１５６－ｐの裏面側には、ＦＳ層１５７、ドレイン層１５８および裏面電極１５９が順次形成される。これにより、ＳＪＭＯＳ素子１５０が形成される。
　図３は、ＩＧＢＴ素子のＶｃｅ－Ｊｃ特性の一例を示す図である。Ｖｃｅは、コレクタエミッタ間電圧を指し、Ｊｃはコレクタ電流密度を指す。図３では、高いチャネル密度を有するＩＧＢＴ素子においてゲートエミッタ間電圧ＶＧＥを１５Ｖ、１３Ｖ、１２．５Ｖおよび１２Ｖに設定した場合と、低いチャネル密度を有するＩＧＢＴ素子においてゲートエミッタ間電圧ＶＧＥを１５Ｖに設定した場合を示している。
　例えば、高いチャネル密度を有するＩＧＢＴ素子においてゲートエミッタ間電圧ＶＧＥを１３Ｖに設定した場合と、低いチャネル密度を有するＩＧＢＴ素子においてゲートエミッタ間電圧ＶＧＥを１５Ｖに設定した場合で、飽和電流密度をほぼ同一にすることができる。つまり、チャネル密度を高くしても、ゲート電圧をクランプすることで、飽和電流密度が上昇することを防ぐことができ、短絡耐量を維持することができる。そして、チャネル密度を高くしているので、ターンオフ損失を低減することができる。
　半導体装置１００の外部電源として、例えば１５Ｖの電源が用いられる。制限部１１２は、外部電源の印加電圧がゲート電圧として印加された場合のＩＧＢＴ素子１２０の飽和電流密度に対して、例えば６０％程度の飽和電流密度となるようにＩＧＢＴ素子１２０のゲート電圧を制限する。ＩＧＢＴ素子１２０は、ゲート電圧を制限して飽和電流密度が低下した分、チャネル密度を上昇させてよい。制限部１１２は、ゲート電圧を制限しない場合のＩＧＢＴ素子１２０の飽和電流密度に対して、ゲート電圧を制御した場合のＩＧＢＴ素子１２０の飽和電流密度が４０％から８０％程度の範囲となるように、ゲート電圧を制限してよい。好ましくは、飽和電流密度が５０％から７０％程度の範囲となるようにゲート電圧を制限する。
　図４は、ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０の短絡耐量の一例を示す図である。また、比較例として、低チャネル密度でゲート電圧を１５Ｖに設定したＩＧＢＴ素子の例を併せて示している。本例のＩＧＢＴ素子１２０は、ゲート電圧を１３Ｖにクランプして、チャネル密度を比較例のＩＧＢＴ素子よりも高くしている。また、ＳＪＭＯＳ素子１５０は、ゲート電圧を１５Ｖとしている。
　図４に示すように、ＩＧＢＴ素子１２０の短絡耐量は、チャネル密度が低い比較例と同等である。なお短絡耐量は、図４において電流が流れ始めてから、電流が遮断されるまでの時間の長さに対応する。
　図５は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図１に示した半導体装置１００に比べ、制限部１１２の構成が異なる。他の構成は、図１に示した半導体装置１００と同一である。本例の制限部１１２は、ＩＧＢＴ素子１２０に印加するゲート電圧を、ＳＪＭＯＳ素子１５０に印加するゲート電圧よりも小さくする。本例の制限部１１２は、クランプダイオード１１６に代えて電圧ドロップ用ダイオード１１８を有する。
　電圧ドロップ用ダイオード１１８は、ＩＧＢＴ素子１２０のゲート端子に直列に接続する。本例では、抵抗１１４と、ＩＧＢＴ素子１２０のゲート端子との間に電圧ドロップ用ダイオード１１８を設ける。電圧ドロップ用ダイオード１１８は、ゲート電圧を例えば２Ｖ程度降下させる。このような構成によっても、ＩＧＢＴ素子１２０のゲート電圧を、ＳＪＭＯＳ素子１５０のゲート電圧よりも低くすることができる。従って、ＩＧＢＴ素子１２０の短絡耐量を維持しつつ、チャネル密度を高くしてターンオフ損失を低減することができる。
　図６は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図１に示した半導体装置１００に比べ、ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０が同一の半導体基板１６０に形成される点が異なる。半導体基板１６０には、クランプダイオード１１６も形成されてよい。また、半導体基板１６０には、抵抗１１４も形成されてよい。他の構成は、図１に示した半導体装置１００と同一である。このような構成により、半導体装置１００を小型化することができる。
　図７は、同一の半導体基板に形成されたＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０の断面の一例を示す図である。本例のＳＪＭＯＳ素子１５０は、ＩＧＢＴ素子１２０と隣接して形成される。本例では、ＦＳ層１２７が、ＳＪＭＯＳ素子１５０のＦＳ層としても機能する。また、裏面電極１２９が、ＳＪＭＯＳ素子１５０の裏面電極としても機能する。他の構造は、図２に示したＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０と同一である。
　図８は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図５に示した半導体装置１００に比べ、ＩＧＢＴ素子１２０およびＳＪＭＯＳ素子１５０が同一の半導体基板１６０に形成される点が異なる。半導体基板１６０には、電圧ドロップ用ダイオード１１８も形成されてよい。また、半導体基板１６０には、抵抗１１４も形成されてよい。他の構成は、図５に示した半導体装置１００と同一である。このような構成により、半導体装置１００を小型化することができる。
　図９は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図１または図６に示したいずれかの半導体装置１００に比べ、クランプダイオード１１６の配置が異なる。図９では、図１に示した半導体装置１００に対してクランプダイオード１１６の配置を変更した例を示している。本例のクランプダイオード１１６は、カソード端子が抵抗１１４を介してＩＧＢＴ素子１２０のゲート端子に接続する。このような構成によってもＩＧＢＴ素子１２０のゲート電圧を制限することができる。
　図１０は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図５または図８に示したいずれかの半導体装置１００に比べ、電圧ドロップ用ダイオード１１８の配置が異なる。図１０では、図５に示した半導体装置１００に対して電圧ドロップ用ダイオード１１８の配置を変更した例を示している。本例の電圧ドロップ用ダイオード１１８は、外部端子１０２および抵抗１１４の間に接続される。このような構成によってもＩＧＢＴ素子１２０のゲート電圧を制限することができる。
　図１１は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図１から図１０に示したいずれかの半導体装置１００に比べ、抵抗１１４の配置が異なる。図１１では、図１に示した半導体装置１００に対して抵抗１１４の配置を変更した例を示している。本例の抵抗１１４は、ＳＪＭＯＳ素子１５０のゲート端子と外部端子１０２との間に接続する。
　抵抗１１４を設けることで、ＳＪＭＯＳ素子１５０のゲート抵抗がＩＧＢＴ素子１２０のゲート抵抗よりも大きくなり、ＳＪＭＯＳ素子１５０の閾値電圧がＩＧＢＴ素子１２０の閾値電圧よりも高くなる。これにより、ＳＪＭＯＳ素子１５０よりもＩＧＢＴ素子１２０のほうが早くターンオンして、遅くターンオフする。これにより、ＳＪＭＯＳ素子１５０に流れる電流を抑制することができるので、ＳＪＭＯＳ素子１５０を保護することができる。
　図１２は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図６に示した半導体装置１００に比べ、制限部１１２およびクランプダイオード１１６を有さない。抵抗１１４がＩＧＢＴ素子１２０のゲート端子に接続されることで、ＩＧＢＴ素子１２０のゲート抵抗が、ＳＪＭＯＳ素子１５０のゲート抵抗より大きくなる。これにより、ＩＧＢＴ素子１２０よりもＳＪＭＯＳ素子１５０を早くターンオンさせ、遅くターンオフさせることができる。
　また、ＩＧＢＴ素子１２０のゲート電極の材料、膜厚等を制御することで、ＩＧＢＴ素子１２０のゲート抵抗を大きくしてもよい。ＩＧＢＴ素子１２０のゲート電極自体の抵抗値を、ＳＪＭＯＳ素子１５０のゲート抵抗よりも十分大きくすることができれば、抵抗１１４は設けなくともよい。
　図１３は、半導体装置１００の他の構成例を示す図である。本例の半導体装置１００は、図８に示した半導体装置１００に比べ、制限部１１２および電圧ドロップ用ダイオード１１８を有さない。抵抗１１４がＳＪＭＯＳ素子１５０のゲート端子に接続されることで、ＳＪＭＯＳ素子１５０のゲート抵抗が、ＩＧＢＴ素子１２０のゲート抵抗より大きくなる。これにより、ＳＪＭＯＳ素子１５０よりもＩＧＢＴ素子１２０を早くターンオンさせ、遅くターンオフさせることができる。
　また、ＳＪＭＯＳ素子１５０のゲート電極の材料、膜厚等を制御することで、ＳＪＭＯＳ素子１５０のゲート抵抗を大きくしてもよい。ＳＪＭＯＳ素子１５０のゲート電極自体の抵抗値を、ＩＧＢＴ素子１２０のゲート抵抗よりも十分大きくすることができれば、抵抗１１４は設けなくともよい。
　以上、本発明を実施の形態を用いて説明したが、本発明の技術的範囲は上記実施の形態に記載の範囲には限定されない。上記実施の形態に、多様な変更または改良を加えることが可能であることが当業者に明らかである。その様な変更または改良を加えた形態も本発明の技術的範囲に含まれ得ることが、請求の範囲の記載から明らかである。
　請求の範囲、明細書、および図面中において示した装置、システム、プログラム、および方法における動作、手順、ステップ、および段階等の各処理の実行順序は、特段「より前に」、「先立って」等と明示しておらず、また、前の処理の出力を後の処理で用いるのでない限り、任意の順序で実現しうることに留意すべきである。請求の範囲、明細書、および図面中の動作フローに関して、便宜上「まず、」、「次に、」等を用いて説明したとしても、この順で実施することが必須であることを意味するものではない。
１００・・・半導体装置、１０２、１０４、１０６、１０８・・・外部端子、１１０・・・ＩＧＢＴチップ、１１２・・・制限部、１１４・・・抵抗、１１６・・・クランプダイオード、１１８・・・電圧ドロップ用ダイオード、１２０・・・ＩＧＢＴ素子、１２１・・・ゲート絶縁膜、１２２・・・ゲート電極、１２３・・・コンタクト領域、１２４・・・エミッタ領域、１２５・・・ｐ型ベース層、１２６・・・ｎ型ベース層、１２７・・・ＦＳ層、１２８・・・コレクタ層、１２９・・・裏面電極、１４０・・・ＳＪ型トランジスタチップ、１５０・・・ＳＪＭＯＳ素子、１５１・・・ゲート絶縁膜、１５２・・・ゲート電極、１５３・・・コンタクト領域、１５４・・・ソース領域、１５５・・・ｐ型ベース層、１５６－ｎ・・・ｎ型カラム、１５６－ｐ・・・ｐ型カラム、１５７・・・ＦＳ層、１５８・・・ドレイン層、１５９・・・裏面電極、１６０・・・半導体基板、２００・・・保護回路、２０２、２０４・・・接続端子、２０６・・・トランジスタ、２０８・・・比較器、２１０・・・基準電圧源、２１２・・・抵抗

Claims (9)

  1. 　ＩＧＢＴ素子と、
    　前記ＩＧＢＴ素子と並列に接続された超接合型トランジスタ素子と、
    　前記ＩＧＢＴ素子のゲート端子に印加するゲート電圧を、前記超接合型トランジスタ素子のゲート端子に印加するゲート電圧よりも制限する制限部と
    　を備える半導体装置。
  2. 　外部から外部電圧を受け取る外部端子をさらに備え、
    　前記ＩＧＢＴ素子および前記超接合型トランジスタ素子は、共通の前記外部電圧にそれぞれ基づいた前記ゲート電圧が印加される
    　請求項１に記載の半導体装置。
  3. 　前記制限部は、前記ＩＧＢＴ素子に印加する前記ゲート電圧の範囲を、前記超接合型トランジスタ素子に印加する前記ゲート電圧の範囲よりも狭い範囲にクランプする
    　請求項１または２に記載の半導体装置。
  4. 　前記制限部は、前記ＩＧＢＴ素子のゲートエミッタ間に接続されたクランプダイオードを有する
    　請求項３に記載の半導体装置。
  5. 　前記制限部は、前記ＩＧＢＴ素子に印加する前記ゲート電圧を、前記超接合型トランジスタ素子に印加する前記ゲート電圧よりも小さくする
    　請求項１または２に記載の半導体装置。
  6. 　前記制限部は、前記ＩＧＢＴ素子のゲート端子に直列に接続した電圧ドロップ用ダイオードを有する
    　請求項５に記載の半導体装置。
  7. 　前記ＩＧＢＴ素子のゲート抵抗が、前記超接合型トランジスタ素子のゲート抵抗より大きく、前記ＩＧＢＴ素子の閾値電圧が、前記超接合型トランジスタ素子の閾値電圧より高い
    　請求項５または６に記載の半導体装置。
  8. 　前記超接合型トランジスタ素子のゲート抵抗が、前記ＩＧＢＴ素子のゲート抵抗より大きく、前記超接合型トランジスタ素子の閾値電圧が、前記ＩＧＢＴ素子の閾値電圧より高い
    　請求項１から４のいずれか一項に記載の半導体装置。
  9. 　前記ＩＧＢＴ素子および前記超接合型トランジスタ素子を、同一の半導体基板に形成した
    　請求項１から８のいずれか一項に記載の半導体装置。
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