WO2016037817A1 - Capteur de pression - Google Patents

Capteur de pression Download PDF

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Publication number
WO2016037817A1
WO2016037817A1 PCT/EP2015/069052 EP2015069052W WO2016037817A1 WO 2016037817 A1 WO2016037817 A1 WO 2016037817A1 EP 2015069052 W EP2015069052 W EP 2015069052W WO 2016037817 A1 WO2016037817 A1 WO 2016037817A1
Authority
WO
WIPO (PCT)
Prior art keywords
layers
measuring
thermal expansion
pressure
layer
Prior art date
Application number
PCT/EP2015/069052
Other languages
German (de)
English (en)
Inventor
Ulfert Drewes
Andreas Rossberg
Anh Tuan Tham
Original Assignee
Endress+Hauser Gmbh+Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co. Kg filed Critical Endress+Hauser Gmbh+Co. Kg
Publication of WO2016037817A1 publication Critical patent/WO2016037817A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Definitions

  • the present invention relates to a pressure sensor, comprising a housing, in particular a metallic housing, a pressure measuring cell, in particular a ceramic pressure measuring cell, which is mounted on a base body, enclosed between a shoulder which encloses an opening of the housing on all sides and an abutment a pressure measuring chamber arranged
  • Measuring membrane, and the measuring membrane is acted upon via the opening with a pressure.
  • Pressure sensors are widely used in almost all areas of industrial metrology.
  • These pressure sensors include equipped with absolute pressure cells
  • Absolute pressure sensors measuring the absolute vacuum pressure applied to the diaphragm, equipped with relative pressure cells
  • Differential pressure sensors which measure a pressure difference between a first pressure acting on the measuring diaphragm pressure and acting on a second measuring diaphragm of the differential pressure measuring cell second pressure.
  • Ceramic pressure measuring cells regularly have a ceramic body arranged on a ceramic base body, including a pressure measuring chamber
  • Ceramic pressure cells offer the advantage that they are not only thermally, chemically and mechanically very resistant, but also have a very high compressive strength. Ceramic pressure cells must be mounted on site and pressurized with the pressure to be measured. For this purpose, they are regularly used in a housing having an opening through which the measuring diaphragm can be acted upon by the pressure to be measured. In this case, the pressure measuring cell in the housing is arranged such that an outer edge of the pressure measuring cell between a the outside on all sides enclosing paragraph and a shoulder on one of the
  • Measuring diaphragm facing away from the back of the measuring cell arranged abutment is clamped.
  • the housing used for this purpose are regularly made of metal. This has the consequence that due to the different thermal expansion coefficients of ceramic pressure measuring cell and metallic housing thermomechanical
  • DE 10 2004 057 A1 and DE 103 34 854 A1 each describe a pressure sensor with
  • the measuring membrane is acted upon by the opening with a pressure
  • a seal is arranged between the decoupling ring and the measuring diaphragm and between the decoupling ring and the shoulder.
  • the described decoupling rings are made of ceramic or another material having a coefficient of thermal expansion adapted to the thermal expansion coefficient of the ceramic pressure measuring cell.
  • Measuring diaphragm is thus a body, namely the decoupling ring, with in
  • the measuring diaphragm is thus spatially separated by the decoupling ring from the place where the jump from the thermal expansion coefficient of the measuring diaphragm to the thermal expansion coefficient of the shoulder of the housing.
  • the decoupling ring causes a shift of forming in the radial direction thermo-mechanical stresses on the of the Measuring membrane facing away from the paragraph facing side of the decoupling ring.
  • This arrangement causes forming in the radial direction
  • PTFE Polytetrafluoroethylene
  • Decoupling ring each to provide an annular projection projecting in the axial direction, the end face of which forms the respective sealing surface.
  • a housing in particular a metallic housing
  • Pressure measuring cell in particular a ceramic pressure measuring cell
  • the measuring membrane can be acted upon via the opening with a pressure which is characterized in that between an outer edge of the measuring diaphragm and the paragraph, a matching body is arranged, the thermal
  • a seal in particular a seal made of an elastomer or a seal, in particular a flat seal, made of a thermoplastic material, in particular of polytetrafluoroethylene (PTFE), is provided between the adapter body and the measuring diaphragm and between the adapter body and the shoulder ).
  • PTFE polytetrafluoroethylene
  • the adaptation body is a fitting body closed in a ring and having a rectangular cross section.
  • PTFE Polytetrafluoroethylene
  • the fitting body is a body closed to a ring
  • the adjustment body on whose the measuring diaphragm facing front side and the paragraph facing the end face has structural elements.
  • the adaptation body has layers applied to one another,
  • PTFE Polytetrafluoroethylene
  • the fitting body is a body closed to a ring
  • the adjustment body on the end face facing the measuring diaphragm and the end face facing the shoulder each have a protruding projection in the axial direction, esp.
  • a closed loop to a ring has.
  • the adaptation body has layers applied to one another, and
  • the protrusion facing the measuring membrane forms the outermost membrane-facing layer of the matching body, and the protrusion facing the shoulder the opposite outermost layer facing the shoulder
  • Matching body forms, or the projections consist of several superimposed layers of the adapter body.
  • a preferred embodiment provides that the matching body arranged on each other layers of different composition, esp. By laser sintering of metallic and / or ceramic parts containing powder layers
  • the layers have a ceramic content that is greater than or equal to 0% and less than 100%, and have a metal content greater than or equal to 0% and less than 100%, wherein
  • Another training provides that
  • the adaptation body has layers applied to one another, and
  • the adaptation body has layers applied to one another, and
  • the layers have a layer thickness of not less than 10 ⁇ , in particular not less than 20 ⁇ , esp. Not less than 40 ⁇ have, and of not more than
  • the adjustment body comprises a body having a substantially rectangular cross-section which has a height in perpendicular to a direction from the paragraph to the measuring diaphragm and a width, and
  • Measuring diaphragm and the paragraph is smaller than a constant with the dimension 1 / K, where
  • the constant is less than 0.1% / K, in particular less than 500 ppm / K, in particular less than 250 ppm / K, in particular less than 125 ppm / K, in particular less than 60 ppm / K, and / or - the constant is equal to a quotient of a dimensionless one
  • Deformation parameters and a temperature difference between a maximum and a minimum temperature at which the pressure sensor is to be used is, and the deformation parameter is less than 4%, esp. Less than 2%, esp. Less than 1%.
  • the adaptation body comprises a body of substantially rectangular cross-section constructed from layers arranged on one another,
  • the individual layers each have a parallel to the surface normal to the layer extending layer thickness and perpendicular to the surface normal to the
  • Expansion coefficient of the layers adjacent to this layer is smaller than a constant with the dimension 1 / K, where
  • the constant is less than 0.1% / K, in particular less than 500 ppm / K, in particular less than 250 ppm / K, in particular less than 125 ppm / K, in particular less than 60 ppm / K, and / or
  • Deformation parameters and a temperature difference between a maximum and a minimum temperature at which the pressure sensor is to be used is, and the deformation parameter is less than 4%, esp. Less than 2%, esp. Less than 1%.
  • a further embodiment of the pressure sensors according to the invention provides that - the pressure measuring cell is a differential pressure measuring cell
  • a second adjustment body is arranged, which has a coefficient of thermal expansion, along the second fitting body in from the second paragraph to the second
  • the invention comprises a method for producing a layered adaptation body for a pressure sensor according to the invention, which is characterized in that
  • the individual layers are produced by a metal powder and ceramic powder in a composition corresponding to the respective layer
  • the individual layers are produced by a composition of the respective layer corresponding amount of metal powder and one of
  • composition of each layer corresponding amount of ceramic powder each applied as a powder layer to each other, and the two
  • Powder layers are mixed by laser sintering and solidified.
  • the invention has the advantage that the thermal expansion coefficient of the heel is gradually transferred by the fitting body in the axial direction in the thermal expansion coefficient of the measuring diaphragm. As a result, larger jumps between the thermal expansion coefficients of adjacent components, in which voltage spikes in radial
  • thermo-mechanical stresses forming in the radial direction have lower maximum values, and overall in the
  • Adjustment bodies are shifted into where they spread evenly over its entire height. Accordingly, the thermo-mechanical stresses acting at any height along the fitting body are correspondingly small and are absorbed by the fitting body.
  • the pressure measuring cell, esp. The measuring diaphragm is thus protected against acting in the radial direction of thermo-mechanical stresses.
  • Fig. 1 shows: a pressure sensor with a matching body with rectangular
  • Fig. 2 shows: a pressure sensor with a matching body on the
  • Fig. 3 shows: a pressure sensor with a matching body on whose end faces in each case an annular projection is provided;
  • Fig. 1 shows a section through a first embodiment of a
  • inventive pressure sensor This comprises a pressure measuring cell 1 with a ceramic base body 3 and a measuring diaphragm 7 mounted thereon with the inclusion of a pressure measuring chamber 5.
  • the base body 3 and the measuring diaphragm 7 are made of ceramic, eg of alumina ceramic (Al 2 O 3 ).
  • the pressure measuring cell 1 may be formed, for example, as an absolute pressure measuring cell.
  • the pressure measuring chamber 5 enclosed under the measuring diaphragm 7 is evacuated.
  • the pressure measuring chamber 5 is supplied with a reference pressure p ref , for example an ambient pressure, via a pressure supply line 9, which extends through the main body 3 through-shown as a dashed line here as an option.
  • the measuring diaphragm 7 is sensitive to pressure, ie a pressure p acting from outside causes a pressure-dependent deflection of the measuring diaphragm 7. This pressure-dependent deflection is detected by means of an electromechanical transducer which converts the pressure-dependent deflection into a primary electrical signal.
  • a capacitive transducer for example, a capacitive transducer is suitable, which comprises an electrode 1 1 applied to an end face of the base body 3 facing the measuring diaphragm 7 and a counter electrode 13 applied to an inner side of the measuring diaphragm 7 facing the base body 3.
  • the electrode 1 1 is electrically connected to a measuring electronics, not shown here, via a primary signal path 15, which is guided through the base body 3 outwardly, for example a tantalum pin inserted into the base body 3, which is determined by the pressure-dependent Deflection of the measuring membrane 7 dependent capacity of the capacitor formed by the electrode 1 1 and the counter electrode 13 determines the pressure acting on the measuring diaphragm 7 to be measured pressure p.
  • the ceramic pressure measuring cell 1 is clamped in a housing 17.
  • the housing 17 consists for example of a metal, for example of a stainless steel. It has an opening 19 on the front, via which the measuring diaphragm 7 of the pressure measuring cell 1 can be acted upon by the pressure p to be measured.
  • a clamping device is provided, in which an outer edge of the pressure measuring cell 1 in the axial direction, ie parallel to the surface normal to the measuring diaphragm 7, between a shoulder 21 of the housing 17 and an abutment 23 is clamped.
  • the shoulder 21 surrounds the opening 19 on all sides, and is formed in the embodiment shown here by a front of the housing 17 integrally formed, radially inwardly extending shoulder of the housing 17.
  • the anvil 23 is e.g. formed as a pressure ring which is screwed into the housing 17 such that the paragraph 21 facing the end face a
  • the clamping device preferably comprises at least one spring-elastic element.
  • the resilient element can be arranged on the rear side remote from the measuring diaphragm 7 and / or the front side of the pressure measuring cell 1 opposite this.
  • An embodiment of a provided on the back elastic element is shown in the right half of Fig. 1.
  • There is a tension spring 25 is disposed between the thrust bearing formed as an abutment 23 and the back of the pressure measuring cell 1, which is stretched by screwing the pressure ring.
  • the shoulder 21 may be formed as a resilient element.
  • a closed to a ring fitting body 27 is clamped between the outer edge of the measuring diaphragm 7 and the shoulder 21.
  • the matching body 27 is formed, for example, as a circular ring with a rectangular cross-section.
  • the adjustment body 27 has a coefficient of thermal expansion along the adjustment body 27 in the direction from the paragraph 21 to the measuring membrane 7 extending direction z of a thermal expansion coefficient o M of paragraph 21 corresponding expansion coefficient to a thermal
  • the adaptation body 27 preferably consists of a number N for this purpose
  • the composition of the individual layers S is set such that the paragraph 21 facing outermost layer Si of the matching body 27 has a thermal expansion coefficient CH, the thermal
  • Expansion coefficient a M of paragraph 21 corresponds, and starting from this outermost layer Si from layer to layer gradually decreases in such a way to the thermal expansion coefficient a M of the paragraph 21 that the measuring membrane 7 facing outermost layer S N has a thermal expansion coefficient a N , the expansion coefficient ⁇ of the measuring membrane 7 corresponds.
  • the layers S each having a ceramic fraction which is greater than or equal to 0% and less than or equal to 100%, and a metal content which is greater than or equal to 0% and less than or equal to 100%.
  • the proportions are preferably predetermined in such a way that the ceramic content of the layers S increases from layer to layer in the direction z extending from the shoulder 21 to the measuring diaphragm 7, while the metal portion of the layers S in the direction z extending from the shoulder 21 to the measuring diaphragm 7 extends from layer to layer Layer decreases.
  • gradient materials are used.
  • An example of this is the infiltration of a ceramic body having pores of different pore size described in EP 0984839 B1 with metal.
  • layers of different compositions arranged on one another can be produced by layer pressing, sedimentation or wet-powder spraying and subsequently sintered.
  • the adaptation body 27 is preferably a sintered body whose layers S, for example, are produced by laser sintering of powder layers corresponding from layer to layer of different composition.
  • layers S for example, are produced by laser sintering of powder layers corresponding from layer to layer of different composition.
  • laser sintering method for example, in the IMW Indus- try Communication No. 29 (2004) of Trenke with the title "selective laser sintering of metallic / ceramic layer structures" described laser sintering method can be used.
  • the components are e.g. provided in the form of microscale particles whose grain size is preferably not more than 20 ⁇ and more preferably not more than 10 ⁇ .
  • the desired composition of the respective layer S can be produced by applying a metal powder and ceramic powder in the desired mixing ratio in powdery layer containing mixed form and solidified by laser sintering.
  • the desired composition of the respective layer S can be produced by applying a metal powder and ceramic powder in the desired mixing ratio in powdery layer containing mixed form and solidified by laser sintering.
  • composition achieved by the appropriate amount
  • Metal powder and the appropriate amount of ceramic powder are applied to each other as a powder layer of appropriate thickness, and the two
  • Powder layers are mixed by laser sintering and solidified.
  • the differences in the coefficients of thermal expansion asi, asi + i of adjacent layers S ,, S i + of the adaptation body 27 are the lower, the greater the number N of layers S is. The smaller these differences are, the lower are the differences due to the different thermal properties Expansion coefficients forming temperarturjon voltages.
  • the adaptation body 27 has, in cross-section, a height h in a direction parallel to the surface normal to the layers S, from the shoulder 21 to the measuring diaphragm 7, and a width d in a direction perpendicular to the surface normal to the layers S.
  • the dimensions of the adaptation body 27 are preferably set such that the product of the ratio of the width d of the matching body 27 to its height h and the amount of the difference ⁇ of the thermal expansion coefficient ⁇ ⁇ , ⁇ ⁇ the measuring membrane 7 and paragraph 21, less than is a given constant ⁇ with the dimension 1 / K, for which the following applies: ⁇
  • ⁇ 0.1% / K in particular ⁇ 500 ppm / K, preferably ⁇ 250 ppm / K, more preferably ⁇ 125 ppm / K and particularly preferably ⁇ 60 ppm / K:
  • the constant ⁇ is preferably a quotient of a dimensionless
  • C is a dimensionless deformation parameter for which C ⁇ 4%, in particular C ⁇ 2% and preferably C ⁇ 1%.
  • the individual layers S, of the adaptation body 27 are preferably dimensioned such that the product of the ratio of the width d s of the respective layer Si to the layer thickness s and the amount of the difference ⁇ 5 of the thermal expansion coefficients a Si- i, a S i + i is also smaller than the abovementioned constant, preferably determined as a quotient of the dimensionless deformation parameter C and the temperature difference ⁇ , relative to this layer S, adjacent layers Si-i, Si + i. D. h .: - ⁇
  • the individual layers S preferably a layer thickness s of not less than 10 ⁇ , in particular not less than 20 ⁇ and preferably not less than 40 ⁇ , and of not more than 400 ⁇ , in particular not more than 200 ⁇ and preferably not more than 100 ⁇ on.
  • the width d of the adaptation body 27, which can be calculated via the above-mentioned design rule d / h ⁇ ⁇ , is preferably below 4.8 mm at a height h of 640 ⁇ m.
  • a seal 29 is provided in each case between the adaptation body 27 and the outer edge of the measuring diaphragm 7 and between the adaptation body 27 and the shoulder 21.
  • the seals 29 are made of an elastomer, for example, and are preferably designed as molded seals, in particular as flat molded seals with a spherical contour.
  • the thermal expansion coefficient a M of paragraph 21 in the axial direction is gradually in the thermal
  • thermomechanical stresses have lower maximum values, and away from the measuring membrane 7 and the shoulder 21 and into the fitting body 27 where they spread evenly over its entire height h. Accordingly, the thermo-mechanical stresses acting at any height along the fitting body 27 are correspondingly small and are absorbed by the fitting body 27.
  • seals 29 made of an elastomer instead of seals 29 made of an elastomer, seals made of a thermoplastic material, such as, for example, polytetrafluoroethylene (PTFE), can also be used in conjunction with the pressure sensors according to the invention. These sealants have the advantage over elastomers of a higher thermal and chemical resistance. Two embodiments of this are shown in FIGS. 2 and 3. she
  • the flat gaskets are preferably made of a thermoplastic material, e.g. B. of polytetrafluoroethylene (PFTE). Incidentally, reference is made to the description of FIG. 1.
  • PFTE polytetrafluoroethylene
  • the adaptation body 31 provided in the exemplary embodiment illustrated in FIG. 2 is a body of rectangular cross-section closed to a ring, on the front side facing the measuring diaphragm 7 and its front side facing the shoulder 21 each being provided with structural elements 37.
  • Structural elements 37 serve to limit a radial movement of the seals 35, in particular a cold flow under pressure. Structural elements 37 of low overall height are already sufficient for this purpose. So can be used in conjunction with flat gaskets
  • PTFE Polytetrafluoroethylene
  • Structural elements 37 are used with a height of 0.1 mm. Deviations from these numerical values are of course possible.
  • the fitting body 31 shown in FIG. 2 also has a thermal expansion coefficient corresponding to the thermal expansion coefficient OM of the shoulder 21 along the fitting body 31 in the direction z extending from the shoulder 21 to the diaphragm 7 coefficient of thermal expansion to a coefficient of thermal expansion Ok the measuring diaphragm 7 corresponding expansion coefficient decreases.
  • the adaptation body 31 can be constructed to the same extent as the adaptation body 27 shown in FIG. 1.
  • the protruding structural elements 37 may e.g. as a ring, e.g. be formed annular concentric webs. These are e.g. produced by means of micromechanical processing respectively adjacent webs of mutually separating grooves are generated with a height corresponding to the height of the webs groove depth. In that case, the grooves penetrate a number of the outer layers of the layer applied to each other corresponding to the groove depth
  • Adaptation body 31 This variant is shown in the left half of Fig. 2.
  • an outermost layer 39, 41 which has thicker structural elements 37 than the other layers, can be provided on the end side facing the measuring diaphragm 7 and the end face of the adaptation body 31 facing the shoulder 21.
  • these outermost layers 39, 41 have a layer thickness which is greater than or equal to the overall height of the structural element 37. This variant is shown in the right half of Fig. 2. It has the
  • the adaptation body 33 shown in FIG. 3 comprises a body of rectangular cross-section closed to a ring, on whose front face facing the measuring diaphragm 7 and its front side facing the shoulder 21 an annular projection 43, 45 or 47, 49 projecting in the axial direction , eg a web closed to a ring is provided.
  • the end faces of the projections 43, 45 and 47, 49 form the sealing surfaces of the adapter body 33. Due to the projections 43, 45 and 47, 49 reduced sealing surfaces, offer the advantage that with the same clamping force in the axial direction, a higher surface pressure of the gasket is achieved.
  • the projections 43, 45 and 47, 49 preferably have a height that is greater than or equal to a thickness of the seal 35.
  • the projections 43, 45 and 47, 49 have in the radial direction, for example, a width of the order of one to two tenths of a millimeter up to one to two millimeters, and in the axial direction, for example, a height of one to a few tenths of a millimeter, e.g. 0.3 mm, on.
  • the two projections 43, 45 can each, for example, by a single layer applied to the interposed body layer with corresponding
  • the shoulder 21 facing the projection 45 forms the opposite outermost the paragraph 21 facing layer of the adapter body 33 and has a thermal expansion coefficient a M of the paragraph 21 corresponding thermal expansion coefficient. It is preferably made of the metal of paragraph 21.
  • the protrusions 47, 49 may consist of several layers of the matching body 33 applied to each other. This variant is shown in the right half of FIG. 3.
  • the coefficient of thermal expansion of the adaptation body 33 over all layers thereof, including the layers forming the projections 47, 49 decreases from layer to layer in the direction extending from the shoulder 21 to the measuring diaphragm 7 to that corresponding to the thermal expansion coefficient o k of the measuring diaphragm 7 Expansion coefficients.
  • the invention is completely analogous also in connection with differential pressure sensors with a clamped in a metallic housing 51 differential pressure measuring cell 53, esp. A ceramic differential pressure measuring cell 53, can be used. An embodiment of this is shown in Fig. 4.
  • the differential pressure measuring cell 53 differs from the pressure measuring cells 1 shown in FIGS. 1 to 3 in that it comprises a second measuring diaphragm applied with the inclusion of a pressure measuring chamber 5 on the rear side of the main body 3 opposite the first measuring measuring diaphragm 7 7 has.
  • the second measuring membrane 7 can be acted upon via a second opening 21 in the housing 51 with a second pressure p 2 .
  • the two pressure measuring chambers 5 are filled with a pressure-transmitting liquid, and connected to each other via a pressure transmission line 55.
  • the deflection of the first and / or the second measuring membrane 7, which is dependent on the pressure difference ⁇ to be measured, is also described here as e.g. by means of a capacitive
  • Measuring electronics is connected, which determines the differential pressure ⁇ based on the measured capacitances.
  • the differential pressure measuring cell 53 is clamped in the housing 51 in the axial direction, that is parallel to the surface normal to the two measuring membranes 7.
  • the housing 51 has e.g. two in each case one of the openings 19 having housing segments 57, which are connected to each other by means of a mechanical connection device 59 shown only schematically here.
  • Each of the openings 19 is surrounded on the outside by a shoulder 21 of the respective housing segment 57.
  • the differential pressure measuring cell 53 is clamped between the shoulder 21 of one of the housing segments 57 and an abutment, the abutment here by the shoulder 21 of the opposite housing segment 57 and the two housing segments 57 connecting
  • Connecting device 59 is formed. Between the outer edges of the measuring membranes 7 and the opening 21, via which the respective measuring membrane 7 with the first and the second pressure pi, p 2 can be acted upon, outside surrounding paragraph 21 of the respective
  • Housing segments 57 each have a matching body 27 is arranged, which has a thermal expansion coefficient along each of the respective
  • Adaptation body 27 in each of the paragraph 21 to the respective diaphragm 7 extending direction of a coefficient of thermal expansion OM of the respective paragraph 21 corresponding thermal expansion coefficient to a coefficient of thermal expansion Ok of the respective diaphragm 7 corresponding expansion coefficient decreases.
  • Differential pressure sensor is also provided here between each of the adjustment body 27 and the outer edge of the measuring membrane facing this 7 and between each of the adjustment body 27 and the facing this paragraph 21 each have a seal 29.
  • the adjustment body 27 and the seals 29 may - as shown in Fig. 4 -darkar be formed in the manner described with reference to FIG. 1.
  • the adjustment body 31 or 33 and seals 35 described with reference to FIGS. 2 and 3 can be used.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Child & Adolescent Psychology (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un capteur de pression comprenant un boîtier (17, 51), notamment un boîtier métallique (17, 51), une cellule de mesure de pression (1), notamment une cellule de mesure de pression en céramique (1), serrée dans le boîtier (17, 51) entre un épaulement (21) qui entoure une ouverture (19) du boîtier (17) de tous les côtés vers l'extérieur et un palier support (23), laquelle possède une membrane de mesure (7) disposée sur un corps de base (3) en renfermant une chambre de mesure de pression (5) et dont la membrane de mesure (7) peut être soumise à une pression (p) par le biais de l'ouverture (21). La cellule de mesure de pression (1), notamment sa membrane de mesure (7), est protégée contre les contraintes thermomécaniques qui agissent dans le sens radial en ce qu'un corps d'adaptation (27, 31, 33) est disposé entre un bord extérieur de la membrane de mesure (7) et l'épaulement (21), lequel présente un coefficient de dilatation thermique qui diminue le long du corps d'adaptation (27, 31, 33) dans la direction de l'épaulement (21) vers la membrane de mesure (7) d'un coefficient de dilatation thermique correspondant à un coefficient de dilatation thermique (α M ) de l'épaulement (21) à un coefficient de dilatation thermique correspondant au coefficient de dilatation thermique (α k ) de la membrane de mesure (7).
PCT/EP2015/069052 2014-09-11 2015-08-19 Capteur de pression WO2016037817A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014113083.9 2014-09-11
DE102014113083.9A DE102014113083A1 (de) 2014-09-11 2014-09-11 Drucksensor

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Publication Number Publication Date
WO2016037817A1 true WO2016037817A1 (fr) 2016-03-17

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Publication number Priority date Publication date Assignee Title
DE102017124308A1 (de) 2017-10-18 2019-04-18 Endress+Hauser SE+Co. KG Austauschbare Prozessdichtung für einen Druckmessaufnehmer
DE102019133820A1 (de) * 2019-12-10 2021-06-10 Endress+Hauser SE+Co. KG Druckmesseinrichtung

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Publication number Priority date Publication date Assignee Title
DE10226034A1 (de) * 2002-06-12 2003-12-24 Bosch Gmbh Robert Sensor und Verfahren zur Herstellung eines Sensors
US20120216621A1 (en) * 2011-02-25 2012-08-30 Seiko Epson Corporation Physical quantity detector and method of manufacturing the same
WO2015039811A1 (fr) * 2013-09-19 2015-03-26 Endress+Hauser Gmbh+Co. Kg Appareil de mesure comportant un capteur à semi-conducteur et un corps de support métallique
WO2015161904A1 (fr) * 2014-04-23 2015-10-29 Endress+Hauser Gmbh+Co. Kg Capteur de pression comprenant un corps de base en céramique

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