EP3274681A1 - Capteur de pression - Google Patents

Capteur de pression

Info

Publication number
EP3274681A1
EP3274681A1 EP16704245.6A EP16704245A EP3274681A1 EP 3274681 A1 EP3274681 A1 EP 3274681A1 EP 16704245 A EP16704245 A EP 16704245A EP 3274681 A1 EP3274681 A1 EP 3274681A1
Authority
EP
European Patent Office
Prior art keywords
film
counter body
pressure sensor
measuring cell
sealing surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP16704245.6A
Other languages
German (de)
English (en)
Other versions
EP3274681B1 (fr
Inventor
Ulfert Drewes
Andreas Rossberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP3274681A1 publication Critical patent/EP3274681A1/fr
Application granted granted Critical
Publication of EP3274681B1 publication Critical patent/EP3274681B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/145—Housings with stress relieving means
    • G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief

Definitions

  • the present invention relates to a pressure sensor which has a ceramic pressure measuring cell clamped in the pressure sensor with the interposition of a seal sealing an interior of the pressure sensor outward, which pressure can be acted upon by an opening of the pressure sensor, and whose seal is between a dimensionally stable, planar sealing surface Pressure measuring cell and a dimensionally stable sealing surface of the opening surrounding the outside of the outer body in axial, perpendicular to the planes of the sealing surfaces extending direction of the clamped film of a thermoplastic material, esp. Of polytetrafluoroethylene (PTFE) comprises.
  • PTFE polytetrafluoroethylene
  • Pressure measuring cells regularly clamped with the interposition of an inner space of the pressure sensor to the outside sealing gasket in the pressure sensor and acted upon via an opening of the pressure sensor with the pressure to be detected.
  • seals in particular gaskets, come from chemically and / or thermally more resistant thermoplastics, such as e.g. Polytetrafluorehtylen (PFTE), used.
  • PFTE Polytetrafluorehtylen
  • Pressure sensor does not affect.
  • DE 196 28 551 A1 describes a pressure sensor with a pressure measuring cell arranged in a housing, in which a PTFE seal is clamped between a spring-elastic sealing spring web of the housing of the pressure sensor and the pressure measuring cell, wherein the sealing spring web has a groove for receiving the PTFE Has seal.
  • the comparatively massive seal has a thickness of 0.8 mm and is chambered, which should prevent the
  • thermoplastic sealing material is too much displaced by the surface pressure between the sealing surfaces.
  • comparatively large clamping forces are required to achieve a reliable seal.
  • Large clamping forces can, however, the accuracy of the pressure sensor, at least in small
  • PTFE polytetrafluoroethylene
  • the counterpart body is designed as a decoupling ring which is clamped between the pressure measuring cell and a shoulder of the housing and surrounds the opening, which separates the pressure measuring cell in particular from stresses acting in the radial direction, ie perpendicular to the surface normal to the sealing surfaces protects and this preferably consists of the ceramic of the pressure measuring cell.
  • This embodiment has the advantage that defined surface pressures of the seal can be achieved.
  • German Patent Application DE 10 2013 1 1 910.7 of the applicant of 29.10.2013 described to use a coating applied as a coating on a planar sealing surface of the counter body seal.
  • the coating comprises a first layer serving as a bonding agent, applied directly to the sealing surface of the counterbody, e.g. perfluoroalkoxy polymer (PFA) coated with a second layer of a thermoplastic material, e.g. made of polytetrafluoroethylene (PTFE). Both layers adjoin the opening of the pressure sensor, so that they are in the
  • Measuring mode are both exposed to the medium supplied via the opening, under the metrological pressure to be detected.
  • materials which can be used as adhesion promoters in particular due to their chemical properties, must not be in direct contact with the medium.
  • Pressure sensor clamped to the outside sealing gasket, through an opening the pressure sensor having a pressure to be measured acted upon ceramic pressure measuring cell
  • a fifth development is characterized in that the connecting layer has a layer thickness of the order of magnitude of several micrometers.
  • the counter body is clamped between a stop facing the pressure measuring cell, in particular a shoulder of a housing which surrounds the opening on the outside, and an outer edge of an end face of the pressure measuring cell facing the stop,
  • the further seal comprises a film of a thermoplastic material, esp. Of polytetrafluoroethylene (PTFE)
  • a preferred embodiment is characterized in that the pressure measuring cell and the counter body are clamped with an elastic bias in the axial direction against each other.
  • a preferred embodiment of the sixth development is characterized in that the seals, the lateral surfaces and the sealing surfaces of the counter body are formed identically to both sides of the counter body and arranged opposite one another.
  • the invention comprises a method for producing a pressure sensor according to the invention, which is characterized in that the second film segments with the interposition of the compound layer on the associated lateral surface of the
  • the invention comprises a method for producing a pressure sensor according to the invention, which is characterized in that the first foil segments of the seals in the clamped state at elevated temperature, esp. A temperature of not less than 80 ° C, esp. Not less than 100 ° C, esp. Not less than 150 ° C are annealed.
  • FIG. 2 shows: a circled in Fig. 1 section of the pressure sensor of Fig. 1 and FIG. 3 shows a counterbody with structures projecting in the axial direction.
  • FIG. 3 shows a counterbody with structures projecting in the axial direction.
  • Fig. 1 shows an embodiment of a pressure sensor according to the invention.
  • Fig. 2 shows an enlarged view of the circled in Fig. 1 section.
  • the pressure sensor comprises an interposition of an interior of the
  • Pressure sensor outwardly sealing seal 1 clamped in the pressure sensor, via an opening 3 of the pressure sensor with a pressure to be measured p
  • the pressure measuring cell 5 comprises in the illustrated embodiment, a ceramic base body 7 and a including a pressure chamber 9 thereon applied ceramic measuring membrane 1 1. It can, for example, as
  • Absolutdruckmesszelle be formed by the enclosed under the measuring membrane 1 1 enclosed pressure chamber 9 is evacuated.
  • she can as
  • Relativ horridasszelle be formed by the pressure chamber 9 via a running through the body 7 - here as an option dashed lines - pressure supply line 13, a reference pressure p ref , for example, an ambient pressure supplied.
  • a converter e.g. a capacitive transducer, the one on one of the measuring membrane 1 1
  • Electrode 15 and counter electrode 17 together form a capacitor with a dependent of the pressure-dependent deflection of the measuring membrane 1 1 capacity, which detects by means of a measurement circuit not shown here, and in a pressure-dependent signal
  • a clamping device For clamping the pressure measuring cell 5, a clamping device is provided, through which the pressure measuring cell 5 and the opening 3 of the pressure sensor outside surrounding the counter body 19 are clamped with an elastic bias against each other.
  • the seal 1 provided between the pressure measuring cell 5 and the counter body 19 comprises a foil 21 made of a thermoplastic material, especially of polytetrafluoroethylene (PTFE).
  • This film 21 comprises a first film segment 23, which between a dimensionally stable, planar sealing surface 25 of the pressure measuring cell 5 and a second dimensionally stable, planar sealing surface 27 of the outer side surrounding the opening 3 counter body 19 in axial, perpendicular to the planes of the sealing surfaces 25, 27 extending direction is clamped.
  • PTFE polytetrafluoroethylene
  • a film thickness dFo of the film 21 is preferably dimensioned such that the clamped first film segment 23 in the clamped state, a material thickness d F s greater than or equal to 0.03 mm, preferably greater than 0.06 mm and more preferably greater than 0.08 mm and less than or equal to 0.2 mm, preferably less than or equal to 0.15 mm and more preferably of less than or equal to 0.12 mm.
  • the film 21 comprises a second film segment 29, which extends over a different from the sealing surface 27 of the counter body 19, preferably planar, lateral surface 31 of the counter body 19 and there via a on the
  • Jacket surface 31 arranged connecting layer 33 is connected from a suitable as a bonding agent for the material of the film 21 material with the counter body 19. It is sufficient if the connecting layer 33 has a sufficient to fulfill its function as a bonding agent for fixing the film 21 layer thickness. For this purpose, layer thicknesses on the order of several micrometers are regularly sufficient.
  • the second film segment 29 is fixedly connected to the counter body 19, and the associated first film segment 23 is fixed in its spatial arrangement relative to the counter body 19. This offers the advantage that film 21 and counter-body 19 can be used as a composite in a single operation in the pressure sensor.
  • the sealing effect of the interior causing the first film segment 23 is automatically in the correct position on the sealing surface 27 of the counter body 19, and in contrast to the flat gaskets used in the prior art no longer precisely aligned and active until the completion of the clamping operation be held in position.
  • the lateral surface 31 is preferably offset from the sealing surface 27 of the counter body 19 in a direction away from the sealing surface 25 of the pressure measuring cell 5 offset by an offset h back.
  • the offset h is preferably greater than a sum of a layer thickness d v of the connecting layer 33 and a difference between the film thickness d F o in the unloaded state and the material thickness d F s of the film segment 23 in the clamped state; ie it is preferable
  • the height difference caused by the offset h between the first film segment 21 and the second film segment 29 by one the two film segments 21, 29 interconnecting, in contrast to the film segments 21, 29 but exposed on both sides, in the radial direction over the distance x extending region of the film 21 overcome.
  • the first film segment 23 is clamped freely lying in the main circuit, wherein the sealing properties of the seal 1 determined solely by the properties of the thermoplastic material of the first film segment 23 and changed neither by the connection of the second film segment 29 with the counter body 19, nor by properties of the connecting layer 33 become.
  • Expansion coefficient of the ceramic of the pressure measuring cell 5 is, or at least as similar as possible, e.g. from the ceramic of the pressure measuring cell. 5
  • the counter body 19 is in the housing 37 between one here by one of
  • Pressure measuring cell 5 facing inside of the shoulder 39 formed stop and an outer edge of the stop facing the end face of the pressure measuring cell 5 clamped in the axial direction and surrounds the opening 3 on the outside.
  • the second film segment 47 extends over a lateral surface 53 of the mating body 19 that is different from the sealing surface 49 of the mating body 19, where it is connected to the mating body 19 via a connecting layer 55 arranged on the mantle surface 53 of a suitable material as adhesion promoter for the material of the film 43 connected.
  • This lateral surface 53 is also preferably planar.
  • the lateral surface 53 is also here preferably opposite to the sealing surface 51 of the Gegenköpers 19 in of the
  • the connecting layer 55 preferably consists of a material which is particularly suitable as adhesion promoter for polytetrafluoroethylene (PTFE), for example a perfluoroalkoxy polymer (PFA).
  • the offset h is also preferably generated here by the fact that the counter body 19 has on its inner edge adjacent to the opening 3 an annular projection 57 extending in the axial direction, the planar end face of which faces the pressure measuring cell 5 forming the sealing surface 51 of the counter body 19.
  • the seals 1, 41, the lateral surfaces 31, 53 and the sealing surfaces 27, 51 on both sides of the counter body 19 are preferably identical and arranged opposite each other.
  • the designed as a decoupling ring counter body 19 causes due to the different thermal expansion coefficients of housing 37 and pressure measuring cell 5 resulting, esp. Acting in the radial direction, mechanical stresses and hysteresis phenomena on the between the stop and the stop facing sealing surface 51 of the counter body 19 clamped first film segment 45 of the seal 41 are collected, and thus hardly
  • the required for decoupling radial stiffness of the counter body 19 is preferably achieved via a corresponding wall thickness of a located between the two projections 35, 57, here designed as a cylinder tube portion portion of the counter body 19.
  • the cylinder tube section preferably one Wall thickness of not less than 0.5 mm, in particular not less than 1 mm, and not more than 10 mm.
  • the axial dimension of the cylinder tube section ie its height H, is less critical. Possibly. It may even be advantageous if the height H is so low that the decoupling ring can still twist to a slight extent, possibly occurring angle-dependent unevenness of the measuring diaphragm 1 1 of the pressure measuring cell 5 or the stop 37 formed here by the shoulder 39 of the housing compensate.
  • the cylinder tube section in the axial direction preferably has a height H which is not less than 0.25 times and preferably not less than half of its width B, and in particular not more than 1.5 times, and preferably not more than that 0.8 times its width.
  • the cylinder tube section has a height between 10 mm and 0, 1 mm.
  • the projections 35, 57 adjoining on both sides of the cylinder tube section preferably have, in the axial direction, a height corresponding to the offset h of one or a few tenths of a millimeter, e.g. from
  • the width of the projections 35, 57 corresponds to the radial width of the sealing surfaces 27, 51st
  • the cylinder tube section and the adjoining projections 35, 57 preferably have identical inner radii.
  • the seals 1, 41 provided on both sides of the counter body 19 also have an inner radius which is substantially equal to the inner radius of the respectively adjacent projection 35, 57.
  • the pressure measuring cell 5, the counter body 19 and the two seals 1, 41 are preferably clamped under a resilient bias in the housing 37.
  • the elastic clamping is used by the different thermal
  • a compression spring 59 can be used, which is arranged on a side facing away from the shoulder 39 rear of the pressure measuring cell 5 and by means of an inserted into the housing 37, for example screwed, pressure ring 61 is tensioned.
  • a stiff ring 63 is preferably provided between the compression spring 59 and the pressure measuring cell 5, which protects the pressure measuring cell 5 caused by the compression spring 59, acting in the radial direction voltages.
  • the ring 63 is preferably made of a material having a thermal Expansion coefficient which is as close as possible to the ceramic of the pressure measuring cell 5. For this purpose, it preferably consists of the ceramic of
  • the seals 1, 41 are connected to both sides of the counter body 19 via the connecting layers 33, 55 with the counter body 19, which is provided with the seals 1, 41 counter body 19 between the shoulder 39 and the pressure measuring cell 5 elastically clamped , and the first film segments 23, 45 are tempered in the clamped state at elevated temperature over a longer period of time, preferably over several hours.
  • the heat treatment is preferably carried out at a temperature of not less than 80 ° C, preferably not less than 100 ° C, and more preferably not less than 150 ° C. It causes the clamped first film segments 23, 45 are axially compressed and flow, so that they take in the final state of their material thickness d F s in the clamped state.
  • the structures 65 are, for example, in the axial direction projecting concentric webs.
  • the two embodiments are identical, so that reference is made to the description of FIGS. 1 and 2 in this respect.

Abstract

L'invention concerne un capteur de pression à utilisation polyvalente, qui comporte une cellule de mesure de pression (5) en céramique enserrée dans le capteur de pression en intercalant un joint d'étanchéité (1) étanchéfiant un espace intérieur du capteur de pression de l'extérieur, et pouvant être soumise à l'action d'une pression (p) à mesurer par l'intermédiaire d'une ouverture (3) du capteur de pression. Le joint d'étanchéité (1) du capteur de pression comprend un film (21) composé d'un matériau thermoplastique, en particulier de polytétrafluoroéthylène (PTFE), lequel film est enserré entre une surface d'étanchéité (25) plane et rigide de la cellule de mesure de pression (5) et une surface d'étanchéité (27, 27') rigide d'un contre-corps (19, 19') entourant côté extérieur l'ouverture (3), dans une direction (10) axiale s'étendant de manière perpendiculaire par rapport aux plans des surfaces d'étanchéité (25, 27). Selon l'invention, le film (21) comprend un premier segment de film (23), qui est enserré entre la surface d'étanchéité (25) de la cellule de mesure de pression (5) et la surface d'étanchéité (27, 27') du contre-corps (19). Le film (21) comprend également un deuxième segment de film (29), qui s'étend sur une surface circonférentielle (31), différente de la surface d'étanchéité (27, 27'), du contre-corps (19, 19') et qui est relié au contre-corps (19, 19') sur la surface circonférentielle (31) par l'intermédiaire d'une couche de liaison (33), disposée sur la surface circonférentielle (31) et composée d'un matériau faisant office de promoteur d'adhérence pour le matériau du film (21), en particulier d'un polymère perfluoroalcoxylé (PFA).
EP16704245.6A 2015-03-24 2016-02-15 Capteur de pression Active EP3274681B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015104365.3A DE102015104365A1 (de) 2015-03-24 2015-03-24 Drucksensor
PCT/EP2016/053129 WO2016150619A1 (fr) 2015-03-24 2016-02-15 Capteur de pression

Publications (2)

Publication Number Publication Date
EP3274681A1 true EP3274681A1 (fr) 2018-01-31
EP3274681B1 EP3274681B1 (fr) 2019-10-23

Family

ID=55353221

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16704245.6A Active EP3274681B1 (fr) 2015-03-24 2016-02-15 Capteur de pression

Country Status (5)

Country Link
US (1) US10422711B2 (fr)
EP (1) EP3274681B1 (fr)
CN (1) CN107430040B (fr)
DE (1) DE102015104365A1 (fr)
WO (1) WO2016150619A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015104365A1 (de) 2015-03-24 2016-09-29 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102017124308A1 (de) 2017-10-18 2019-04-18 Endress+Hauser SE+Co. KG Austauschbare Prozessdichtung für einen Druckmessaufnehmer
KR102520722B1 (ko) * 2018-04-05 2023-04-11 삼성디스플레이 주식회사 압력 센서
DE102018123041A1 (de) 2018-09-19 2020-03-19 Endress+Hauser SE+Co. KG Druckmesseinrichtung
DE102019123360A1 (de) * 2019-08-30 2021-03-04 Endress+Hauser SE+Co. KG Drucksensor
WO2021069218A1 (fr) * 2019-10-10 2021-04-15 Endress+Hauser SE+Co. KG Manomètre permettant la mesure d'une pression

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI75424C (fi) 1986-03-18 1988-06-09 Valmet Oy Genomfoerningskonstruktion i en maetanordning.
US5824909A (en) 1995-08-04 1998-10-20 Ifm Electronic Gmbh Pressure measuring sensor and apparatus having a seal between a housing and a pressure measuring cell
DE19628551B4 (de) 1995-08-04 2004-04-15 Ifm Electronic Gmbh Druckmeßgerät und Druckmeßanordnung
US5869766A (en) 1995-10-03 1999-02-09 Nt International, Inc. Non-contaminating pressure transducer module
US7059609B1 (en) * 2000-06-13 2006-06-13 Federal-Mogul World Wide, Inc. Metal gasket with cold formed stopper
DE10106129A1 (de) 2001-02-08 2003-01-09 Endress & Hauser Gmbh & Co Kg Druckmeßgerät
DE10334854A1 (de) 2003-07-29 2005-03-10 Endress & Hauser Gmbh & Co Kg Drucksensor
KR100970038B1 (ko) 2004-06-03 2010-07-16 나가노게이기가부시키가이샤 압력 센서 모듈 및 압력 검출 장치
DE102004057967A1 (de) * 2004-11-30 2006-06-01 Endress + Hauser Gmbh + Co. Kg Drucksensor
JP2006338998A (ja) 2005-06-01 2006-12-14 Surpass Kogyo Kk 圧力スイッチ
CN102009663B (zh) 2010-12-20 2012-07-18 南车戚墅堰机车车辆工艺研究所有限公司 城轨车辆齿轮箱密封结构
US9243711B2 (en) * 2011-07-19 2016-01-26 Vetco Gray Inc. Bi-directional pressure energized axial seal and a swivel connection application
DE102012102834A1 (de) * 2012-03-08 2013-09-12 Endress + Hauser Gmbh + Co. Kg Dichtring und Druckaufnehmer mit mindestens einem solchen Dichtring
DE102013111910A1 (de) 2013-10-29 2015-04-30 Endress + Hauser Gmbh + Co. Kg Drucksensor
DE102014102719A1 (de) * 2014-02-28 2015-09-03 Endress + Hauser Gmbh + Co. Kg Differenzdruckmessaufnehmer
DE102015104365A1 (de) 2015-03-24 2016-09-29 Endress + Hauser Gmbh + Co. Kg Drucksensor

Also Published As

Publication number Publication date
WO2016150619A1 (fr) 2016-09-29
CN107430040A (zh) 2017-12-01
US10422711B2 (en) 2019-09-24
CN107430040B (zh) 2019-12-10
DE102015104365A1 (de) 2016-09-29
EP3274681B1 (fr) 2019-10-23
US20180058964A1 (en) 2018-03-01

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