WO2016026541A1 - Cellule de mesure de pression - Google Patents

Cellule de mesure de pression Download PDF

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Publication number
WO2016026541A1
WO2016026541A1 PCT/EP2014/078600 EP2014078600W WO2016026541A1 WO 2016026541 A1 WO2016026541 A1 WO 2016026541A1 EP 2014078600 W EP2014078600 W EP 2014078600W WO 2016026541 A1 WO2016026541 A1 WO 2016026541A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
pressure measuring
layers
base body
measuring cell
Prior art date
Application number
PCT/EP2014/078600
Other languages
German (de)
English (en)
Inventor
Andreas Rossberg
Elke Schmidt
Andrea Berlinger
Original Assignee
Endress+Hauser Gmbh+Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co. Kg filed Critical Endress+Hauser Gmbh+Co. Kg
Publication of WO2016026541A1 publication Critical patent/WO2016026541A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation

Definitions

  • the present invention relates to a pressure measuring cell with a base body and arranged on the base body with the inclusion of a pressure measuring chamber, externally acted upon by a pressure to be measured, ceramic
  • Pressure measuring cells are widely used in almost all areas of industrial metrology.
  • - One on the ceramic base body including a pressure measuring chamber arranged, externally acted upon by a pressure to be measured, ceramic measuring membrane.
  • Measuring membrane can be exposed directly to the medium whose pressure is to be measured. Ceramics points to the extent for the application in the
  • Diaphragm seals which transmit the pressure to be measured by means of a pressure-transmitting liquid to the pressure measuring cell, are therefore not required.
  • ceramic pressure cells must be mounted on site. For this they are regularly in a equipped with a process connection
  • Elastomers e.g. Acrylonitrile butadiene rubber or acrylate rubber used.
  • the invention comprises a pressure measuring cell, with
  • the base body consists of metal, and
  • the base body and measuring diaphragm are connected to each other via a pressure measuring chamber enclosing the outside fitting body having a coefficient of thermal expansion along the fitting body extending from the base body to the measuring diaphragm direction of a thermal expansion coefficient of the body corresponding expansion coefficient to a coefficient of thermal expansion of the diaphragm corresponding expansion coefficient drops.
  • the adaptation body is connected to the base body by a first joining, in particular a welding, in particular an electron beam welding or a laser welding, and to an outer edge of the measuring membrane by a second joint.
  • a first further training provides that
  • the second joining is active brazing, in particular active brazing carried out by means of a ternary Zr-Ni alloy and titanium, active brazing solder, or
  • the fitting body is a sintered body made up of layers
  • the second joint is one by sintering, esp. by laser sintering, one of
  • Measuring membrane facing outermost layer of the adapter body formed on the measuring membrane Füge is.
  • a second development consists in that a coating of a corrosion-resistant material, in particular of ceramic or of tantalum, is provided on an outer circumferential surface of the adaptation body.
  • a capacitive electromechanical transducer is provided which comprises at least one capacitor,
  • Measuring membrane-facing end face of the body esp. An end face of a projecting in the direction of the measuring diaphragm, outside on all sides surrounded by the adjustment body and on all sides of the fitting body
  • spaced heel, arranged, spaced from the fitting body electrode comprises, and
  • a glass feedthrough is provided, via which the electrode is electrically connected, and / or
  • an electrically conductive coating is provided, different from the
  • Counter electrode extends over an inner circumferential surface of the adapter body to the base body, so that the counter electrode is electrically connected via the base body.
  • Composition in particular by laser sintering of metallic and / or ceramic portions containing powder layers applied to one another layers, and
  • the layers have a ceramic content that is greater than or equal to 0% and less than 100%, and have a metal content greater than or equal to 0% and less than 100%, wherein
  • the adaptation body is a fitting body made up of layers
  • Coefficient of expansion of the measuring membrane divided by 2 ppm / K in particular greater than or equal to the difference divided by 1 ppm / K, in particular greater than or equal to twice the difference divided by
  • the fitting body is a fitting body made up of layers
  • the layers have a layer thickness of not less than 10 ⁇ m, in particular not less than 20 ⁇ m, in particular not less than 40 ⁇ m, and of not more than 400 ⁇ m, in particular not more than 200 ⁇ m, in particular not more than 100 ⁇ m exhibit.
  • Coefficient of expansion of diaphragm and body is smaller than a constant of dimension 1 / K, where
  • the constant is less than 0.1% / K, in particular less than 500 ppm / K, in particular less than 250 ppm / K, in particular less than 125 ppm / K, in particular less than 60 ppm / K, and / or
  • Deformation parameters and a temperature difference between a maximum and a minimum temperature at which the pressure cell is to be used is, and the deformation parameter is less than 4%, esp. Less than 2%, esp. Less than 1%.
  • the adaptation body is a fitting body made up of layers arranged on one another,
  • Expansion coefficient of the layers adjacent to this layer is smaller than a constant with the dimension 1 / K, where
  • the constant is less than 0.1% / K, in particular less than 500 ppm / K, in particular less than 250 ppm / K, in particular less than 125 ppm / K, in particular less than 60 ppm / K, and / or - the constant is equal to a quotient of a dimensionless one
  • Deformation parameters and a temperature difference between a maximum and a minimum temperature at which the pressure measuring cell (3) is to be used, is, and the deformation parameter is less than 4%, esp. Less than 2%, esp. Less than 1%.
  • the invention comprises a pressure measuring cell according to the invention, which is characterized in that the adaptation body
  • Measuring membrane extending direction increases from layer sequence to layer sequence and decreases a metal content of the layer sequences in the running from the base body to the measuring membrane direction from layer to layer.
  • the adjustment body is connected by a first joint with the base body and by a second joint with an outer edge of the measuring membrane, wherein
  • Base body and the measuring diaphragm arranged blanks are produced joints.
  • the invention comprises a differential pressure measuring cell with a
  • a second pressure measuring cell in particular an identically designed second pressure measuring cell, on a rear side of the pressure measuring cell facing away from the measuring diaphragm, is arranged such that the measuring membranes of the two pressure measuring cells facing outward, and
  • the invention comprises a differential pressure measuring cell according to the invention with two pressure measuring cells according to the third development, which is characterized in that on the side facing away from the measuring membrane back of each pressure measuring cell is provided in each case to the further through passage extending through the respective body through, the laterally out the differential pressure cell out.
  • a development of the two differential pressure measuring cells according to the invention provides that
  • Basic body is provided in each case an insulating layer, in particular a glass layer,
  • Isolation layers each have a conductor track, esp. Along the surface of a contact pin of the implementation to an outer surface of the
  • Differential pressure measuring cell extending conductor track is provided, and
  • Pressure measuring cells mechanically interconnecting insulation layer is provided.
  • the invention comprises a pressure sensor with a
  • Housing section esp. A used equipped with a process connection housing or housing section, in particular welded, is, or
  • the base body and a body containing the housing portion, esp. A housing equipped with a process connection housing portion are formed as a one-piece component.
  • the connection according to the invention of base body and measuring diaphragm via the adapter body makes it possible to place the ceramic measuring diaphragm on a
  • Adaptation body and measuring membrane each interfaces with the same or at least very similar thermal expansion coefficient.
  • the pressure sensors according to the invention offer the advantage that housing and
  • Base body made of metal and thus directly, i. without the interposition of seals, connected to each other, especially welded, can be.
  • base body and housing have comparable, preferably even identical thermal expansion coefficients. This offers the advantage that no temperature-dependent stresses develop between the base body and the housing, which affect the measuring diaphragm and thus the
  • Fig. 1 shows: a pressure sensor with a pressure measuring cell according to the invention
  • Fig. 2 shows: a pressure sensor with an inventive
  • Differential pressure measuring cell. 1 shows an embodiment of a pressure sensor according to the invention with a pressure measuring cell 3 according to the invention inserted in a housing 1.
  • the housing 1 consists of a metal, eg a stainless steel, and preferably has a process connection 5 via which the pressure sensor at the place of use is complementary to one Counterpart can be mounted.
  • the process connection 5 is eg - as shown here - a flange, with which the pressure sensor on a corresponding counterflange can be mounted on site.
  • the pressure measuring cell 3 comprises a metallic base body 7 and a ceramic measuring membrane 1 1 arranged on the base body 7, including a pressure measuring chamber 9.
  • the main body 7 is preferably made of the same metal as the housing 1, in which the pressure measuring cell 3 is to be used.
  • the metallic base body 7 offers the advantage that it can be connected directly to the housing 1 without the interposition of seals.
  • the base body 7 is arranged for this purpose in a form-identical recess in the housing 1, and connected via a - symbolized here by a triangle - welding with the housing 1.
  • the base body 7 and at least one housing section containing the main body 7 of the housing 1 may be formed as a one-piece component.
  • the base body 7 and the housing 1 have at least very similar, preferably identical, thermal expansion coefficients. This offers the advantage that no temperature-dependent voltages occur in the transition region of the housing 1 and the main body 7, which could adversely affect the pressure measuring cell 3, in particular its measuring accuracy.
  • the measuring membrane 1 1 consists for example of alumina (Al 2 0 3 ). Alternatively, it may also consist of another ceramic material, such as silicon carbide ceramic (SiC) or spinel.
  • the side facing away from the base body 7 side of the measuring diaphragm 1 1 is acted upon from the outside with a pressure to be measured p, which causes a dependent of the pressure to be measured p deflection of the measuring diaphragm 1 1.
  • the pressure measuring cell 3 shown in FIG. 1 is designed as a relative pressure measuring cell.
  • the main body 7 a through the base body 7 extending through in the pressure measuring chamber 9 opening bore 13 is provided, via which the
  • Pressure measuring chamber 9 a reference pressure p ref , for example, the atmospheric pressure to which the pressure to be measured is to be supplied is supplied.
  • the Pressure measuring cell be designed as absolute pressure measuring cell. In the case eliminates the bore 13, and enclosed under the measuring membrane 1 1
  • Pressure measuring chamber 9 is evacuated.
  • the metallic main body 7 is connected to the ceramic measuring membrane 1 1 via a pressure measuring chamber 9 on the outside enclosing fitting body 15.
  • the adaptation body 15 is for this purpose preferably designed as a ring, esp. To a circular ring, closed web.
  • the adaptation body 15 has a coefficient of thermal expansion which decreases along the adaptation body 15 in the direction from the base body 7 to the measuring membrane 1 1 direction of a thermal expansion coefficient a M of the base body 7 corresponding expansion coefficient to the thermal expansion coefficient ⁇ of the measuring diaphragm 1 1 corresponding expansion coefficient.
  • the adaptation body 15 preferably consists of a number N of layers S arranged on top of one another, of different composition.
  • the individual layers S parallel to each other and parallel to the measuring membrane 1 1.
  • the composition of the individual layers S is set such that the adjoining the base body 7 outermost layer Si has a thermal expansion coefficient a S i, the coefficient of expansion a M of Base body 7 corresponds, and starting from this outermost layer Si from layer to layer gradually in such a way to the thermal
  • Expansion coefficient ⁇ ⁇ of the measuring membrane 1 1 corresponds.
  • the layers S each having a ceramic fraction which is greater than or equal to 0% and less than or equal to 100%, and a metal content which is greater than or equal to 0% and less than or equal to 100%.
  • the proportions are preferably predetermined in such a way that the ceramic proportion of the layers S increases from layer to layer in the direction extending from the main body 7 to the measuring membrane 11, while the metal portion of the layers S, in the direction extending from the main body 7 to the measuring membrane 11, extends from layer to layer Layer decreases.
  • the adaptation body 15 is preferably a sintered body whose layers S are produced, for example, by laser sintering of powder layers corresponding from layer to layer of different composition.
  • layers S are produced, for example, by laser sintering of powder layers corresponding from layer to layer of different composition.
  • the components can be provided in the form of microscale granules whose grain size is preferably not more than 20 ⁇ m and more preferably not more than 10 ⁇ m.
  • the desired composition of the respective layer S can be produced by applying a metal powder and ceramic powder in the desired mixing ratio in powdery layer containing mixed form and solidified by laser sintering.
  • the composition can be achieved by applying the appropriate amount of metal powder and the corresponding amount of ceramic powder in each case as a powder layer of appropriate thickness, and the two powder layers are mixed and solidified by laser sintering.
  • Measuring diaphragm 1 1 preferably specified such that the number N not less than ( ⁇ ) / (2 ppm / K), in particular not less than
  • the adaptation body 15 has a height h in cross-section in a direction parallel to the surface normal to the layers S, from the base body 7 to the measuring membrane 1 1 extending direction and in a direction perpendicular to the surface normal to the layers Si direction extending to a width d.
  • Adaptation body 15 are preferably set such that the product of the ratio of its width d to its height h and the amount of the difference ⁇ of the thermal expansion coefficient ⁇ ⁇ , ⁇ ⁇ of the base body 7 and diaphragm 1 1, smaller than a predetermined constant ⁇ with the dimension
  • ⁇ ⁇ 0.1% / K in particular ⁇ 500 ppm / K, preferably ⁇ 250 ppm / K, more preferably ⁇ 125 ppm / K and particularly preferably ⁇ 60 ppm / K:
  • the constant ⁇ is preferably a quotient of a dimensionless deformation parameter C and a temperature difference ⁇ according to:
  • C is a dimensionless deformation parameter for which C ⁇ 4%, in particular C ⁇ 2% and preferably C ⁇ 1%.
  • the individual layers S, of the adaptation body 15 are preferably dimensioned such that the product of the ratio of the width d s of the respective layer S, to the layer thickness s and the amount of the difference ⁇ 5 of the thermal expansion coefficients asi-i, asi + i the to this layer S, adjacent
  • Layers SM, S i + also smaller than the above preferably as a quotient of the dimensionless deformation parameter C and the
  • the individual layers S preferably have a layer thickness s of not less than 10 ⁇ m, in particular not less than 20 ⁇ m, and preferably not less than 40 ⁇ m, and of not more than 400 ⁇ m, in particular not more than 200 ⁇ m, and preferably no longer as 100 ⁇ on.
  • a metallic base body 7 made of stainless steel with a thermal expansion coefficient a M of 16 ppm / K and a measuring membrane 1 1 of alumina ceramic with a thermal expansion coefficient ⁇ of 8 ppm / K then the difference ⁇ is the thermal
  • Adaptation body 15 from 640 ⁇ to 1, 6 mm. If one goes from one
  • the width d of the adaptation body 15, which can be calculated via the above-mentioned design rule d / h ⁇ ⁇ , is preferably below 4.8 mm at a height h of 640 ⁇ m.
  • the adaptation body 15 has an end face facing the base body 7, which is connected in a pressure-tight manner via a first joint 17 to an end face of the base body 7 facing the measuring membrane 1 1.
  • This first joint 17 is preferably a weld, e.g. an electron beam welding or a laser welding.
  • the measuring diaphragm 1 1 facing end face is connected via a second joint 19 with an outer edge of the main body 7 facing side of the measuring diaphragm 19 pressure-tight.
  • This second joining 19 is preferably realized in that the adaptation body 15 is built up in layers on the edge of the measuring membrane 1 1. In this case, the second joining 19 forms during sintering of the outermost layer SN on the edge of the measuring membrane 1 1.
  • the adaptation body 15 can be prefabricated as a separate component.
  • Adaptation body 15 preferably an active brazing.
  • the active brazing is preferably carried out with a Zr-Ni alloy and titanium ternary active brazing.
  • Such active hard solders are known from EP 0 490 807 A2, and have the advantage of a thermal
  • the fitting body 15 may be made by sintering one in one
  • Printing processes are printed on each other, with the printed
  • Layers each, e.g. are solidified by drying before being overprinted with the next layer.
  • the adaptation body 15 produced by the screen printing method preferably has layers with a layer thickness of the order of a few micrometers.
  • Blanks produced three-dimensional sintered bodies are described for example in EP 0 627 983 B1.
  • Mr. Riecker lecture entitled "Fraunhofer Institute for Manufacturing Technology and Applied Materials” entitled : '3D screen printing -
  • a process for component manufacturing' presented a three-dimensional graded structure of steel and ceramic, whose ceramic content decreases continuously in a spatial direction, and their steel content in the same
  • the adaptation body 15 produced in this way can, as in the previous exemplary embodiment, be constructed of layers of different compositions described in connection with the previous exemplary embodiment whose proportion of ceramics increases from layer to layer in the direction extending from the main body 7 to the measuring membrane 11, and the same Metal content decreases from the base body 7 to the measuring membrane 1 1 extending direction from layer to layer.
  • the design data given above for the number of layers N, the ratio of the width d of the adaptation body 15 to its height h, and the ratio of the width d s of the individual layers to their layer thickness s apply
  • the design data refer here to the present after sintering of the blank dimensions.
  • the matching body 15 may have layer sequences arranged on each other, each consisting of layers arranged on one another, each consisting either exclusively of metal or exclusively of ceramic.
  • the layers preferably have the smallest possible thickness, in particular a thickness of the order of magnitude of a few micrometers, in particular 2 ⁇ m to 3 ⁇ m.
  • This embodiment offers the advantage that only two different printing pastes, namely a ceramic paste and a metal paste are needed to produce the blank. For imprinting ceramic and metallic
  • the first and the second joint 17, 19 can be produced by arranging the blank between the base body 7 and the measuring membrane 11 and sintering it there.
  • the corrosion resistance of the matching body 15 may on an outer circumferential surface of the adapter body 15 a
  • Coating 21 of a corrosion-resistant material esp. Made of ceramic, preferably from the ceramic of the measuring membrane 1 1, or tantalum, are applied.
  • the coating 21 may, depending on the choice of material, e.g. by
  • Plasma coating or be applied by sputtering Plasma coating or be applied by sputtering.
  • thermomechanical stresses are thus distributed over the entire height h of the adjustment body 15, and degraded over this.
  • measuring diaphragm 1 1 To connect measuring diaphragm 1 1, without the risk that the joints 17, 19 are charged due to temperature-induced voltages over charge or even break, and without the measurement accuracy due to the Measuring membrane 1 1 impacting temperature-dependent tension is significantly impaired.
  • the pressure measuring cell 3 comprises an electromechanical transducer which serves to convert the deflection of the measuring diaphragm 1 1 dependent on the pressure to be measured into an electrical signal dependent on the pressure to be measured, and for display and / or further evaluation and / or processing To make available.
  • an electromechanical transducer a capacitive transducer is provided in Fig. 1, which has at least one capacitor with a dependent of the deflection of the measuring membrane 1 1 capacity.
  • the capacitor comprises an electrode 23 arranged on an end face of the main body 7 facing the measuring diaphragm 11, and a side of the measuring diaphragm 7 arranged on the side of the main body 7
  • the electrode 23 is spaced from the matching body 15 and thus electrically insulated therefrom.
  • an insulating layer 27 e.g. a glass layer or a silicon dioxide layer (S1O2), on which the electrode 23 is arranged.
  • the pressure dependent capacity of this capacitor is e.g. determined by means connected to the electrode 23 and the counter electrode 25 measuring electronics 29, and for example by means of a preliminary in the context of a
  • the electrical connection of the electrode 23 to the measuring electronics 29 is preferably carried out via an electrical feedthrough 31 which extends through the main body 7 therethrough.
  • the bushing 31 is e.g. a glass feedthrough with a contact pin 33 extending to the electrode 23, e.g. can be contacted via a arranged on the back of the pressure measuring cell 3 contact.
  • the electrical connection of the counterelectrode 25 to the measuring electronics 29 preferably takes place via an electrically conductive coating 35 connecting the counterelectrode 25 to the base body 7. This extends from the counterelectrode 25 via an inner circumferential surface of the matching body 15 to the base body 7 the counter electrode 25 at the same potential As the base body 7, so that the connection of the counter electrode 25 can be made via a arranged for example on the back of the body 7 contact.
  • the conductive coating 35 is preferably after sintering the
  • the conductive coating 35 is preferably a metallization, which is preferably applied in one operation together with the counterelectrode 25 likewise designed as a metallization, e.g. sputtered, will.
  • the measurement accuracy achievable with the capacitive electromechanical transducer is the greater, the larger the basic capacitance of the capacitor formed by the electrode 23 and the counter electrode 25. This basic capacity is in turn the greater, the smaller the electrode spacing between electrode 23 and
  • the electrode 23 is therefore preferably arranged on a protruding in the direction of the measuring membrane 1 1 paragraph 37 of the base body 7.
  • the shoulder 37 is on the outside surrounded on all sides by the adjustment body 15 and spaced from it on all sides. This has the advantage that a corresponding dimensioning of the height of the shoulder 37, a small electrode spacing can be achieved, and the electrode spacing co-determining height h of the matching body 15 at the same time according to the above-described design rules for an optimal adjustment of the thermal expansion coefficient ⁇ , OM of measuring diaphragm 1 1 and body 7 can be specified.
  • Fig. 2 shows a further embodiment of an inventive
  • Differential pressure measuring cell 41 Due to the extensive agreement with the pressure sensor shown in Fig. 1, only the existing differences are explained in more detail below. Incidentally, reference is made to the description of FIG. 1.
  • the differential pressure measuring cell 41 is formed by the fact that on the side facing away from the measuring diaphragm 1 1 back of the pressure measuring cell according to the invention 3, for example, according to FIG. 1, a second, preferably identical pressure measuring cell 3 is arranged such that the measuring membranes 1 1 of the two pressure measuring cells 3 face outward.
  • a second, preferably identical pressure measuring cell 3 is arranged such that the measuring membranes 1 1 of the two pressure measuring cells 3 face outward.
  • Pressure transmission line 43 is provided, via which the two pressure measuring chambers 9 are interconnected.
  • Pressure transmission line 43 are connected to a pressure transmitting liquid, e.g. Silicone oil, filled.
  • a pressure transmitting liquid e.g. Silicone oil
  • one of the two measuring membranes 1 1 is applied with a first pressure pi, and the other measuring membrane 1 1 with a second pressure p 2 .
  • This pressurization causes the differential pressure to be measured ⁇ between the first and the second pressure-p ⁇ , p 2 dependent deflection of the measuring membrane 1 1, which by means of an electromechanical transducer
  • Measuring signal is converted.
  • the differential pressure ⁇ can be determined on the basis of the measured capacitance of each of the two capacitors, or on the basis of the differential change f of the capacitances C1, C2 of the two capacitors.
  • the electrical connection of the two counterelectrodes 25 preferably takes place in each case via a contact arranged on an outer circumferential surface of the associated base body 7, which is in electrically conductive connection with the respective counterelectrode 25 via the respective base body 7 and the respective conductive coating 35.
  • Each of these secondary bushings 45 has a on the of the
  • a conductor 49 is provided in each case, which extends along the surface of the contact pin 33 to an outer surface of the differential pressure measuring cell 41, where it can be contacted via a corresponding contact.
  • a further insulating layer 51 is provided, via which the two interconnects 49 are electrically isolated from each other.
  • This further insulation layer 51 is preferably at the same time for
  • the mechanical connection of the two back each provided with the insulating layer 47 and the conductor 49 main body 7 used may e.g. be formed as a glass layer of the base body 7 connecting glass soldering.
  • differential pressure measuring cell 41 is used without interposing seals in the housing 39 by the differential pressure measuring cell 41
  • the housing 39 preferably has two interconnected housing sections 53, each having a recess for receiving one of the two interconnected main body 7. In this way, each housing section 53 can be pushed over the respective base body 7 from the outside over the respective measuring diaphragm 1 1 and welded there.
  • the base body 7 and the respective base body 7 containing housing sections can also be formed here as a one-piece component.
  • the housing 39 has a arranged on the outer surface of the differential pressure measuring cell 41 contacts for the connection of
  • Electrodes 23 and the counter electrodes 25 exposed recess 55, through which the electrodes 23 and the counter electrodes 25 are connected to a measuring electronics 57.
  • Each housing section 53 is equipped with a process connection 5, via which the differential pressure sensor 41 can be connected at the place of use with a counterpart complementary thereto via which the respective measuring diaphragm 11 in FIG

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne une cellule de mesure de pression (3) qui comprend un corps de base (7) et une membrane de mesure (11) en céramique qui est disposée sur le corps de base (7) de façon à former à l'intérieur une chambre de mesure de pression (9) et qui peut être soumise depuis l'extérieur à une pression à mesurer (P). La membrane de mesure peut être insérée, sans l'utilisation de joints d'étanchéité, dans un boîtier métallique (1, 39) ou une partie de boîtier métallique (53) en raison du fait que le corps de base (7) est en métal. Le corps de base (7) et la membrane de mesure (11) sont reliés l'un à l'autre par un élément d'adaptation (15) qui entoure du côté extérieur la chambre de mesure de pression (9) et qui présente un coefficient de dilation thermique qui diminue le long du corps d'adaptation (13), du corps de base (7) jusqu'à la membrane de mesure (11), dans un sens qui va d'un coefficient de dilatation, correspondant au coefficient de dilatation thermique (OM) du corps de base (7), à un coefficient de dilatation, correspondant à un coefficient de dilatation thermique (ακ) de la membrane de mesure (11),.
PCT/EP2014/078600 2014-08-20 2014-12-18 Cellule de mesure de pression WO2016026541A1 (fr)

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DE102014111911.8 2014-08-20

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
CN113227743A (zh) * 2018-12-21 2021-08-06 埃克森蒂斯知识股份有限公司 一种成型体及制造成型体的方法
CN113260842A (zh) * 2018-12-21 2021-08-13 埃克森蒂斯知识股份有限公司 一种成型体及制造成型体的方法
CN113260840A (zh) * 2018-12-21 2021-08-13 埃克森蒂斯知识股份有限公司 一种成型体及制造成型体的方法
CN113260841A (zh) * 2018-12-21 2021-08-13 埃克森蒂斯知识股份有限公司 一种成型体及制造成型体的方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017115651A1 (de) * 2017-07-12 2019-01-17 Endress+Hauser SE+Co. KG Verfahren zur Herstellung einer korrosionsbeständigen Baugruppe eines Feldgeräts

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CN113260840A (zh) * 2018-12-21 2021-08-13 埃克森蒂斯知识股份有限公司 一种成型体及制造成型体的方法
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