WO2016026236A1 - 触控面板及其制造方法和显示装置 - Google Patents

触控面板及其制造方法和显示装置 Download PDF

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Publication number
WO2016026236A1
WO2016026236A1 PCT/CN2014/092701 CN2014092701W WO2016026236A1 WO 2016026236 A1 WO2016026236 A1 WO 2016026236A1 CN 2014092701 W CN2014092701 W CN 2014092701W WO 2016026236 A1 WO2016026236 A1 WO 2016026236A1
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WO
WIPO (PCT)
Prior art keywords
electrode
touch
insulating
touch electrode
touch panel
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Application number
PCT/CN2014/092701
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English (en)
French (fr)
Inventor
崔承镇
牛菁
孙双
张方振
Original Assignee
京东方科技集团股份有限公司
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Application filed by 京东方科技集团股份有限公司 filed Critical 京东方科技集团股份有限公司
Priority to US14/770,151 priority Critical patent/US10241628B2/en
Publication of WO2016026236A1 publication Critical patent/WO2016026236A1/zh

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412—Digitisers structurally integrated in a display
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04111—Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate

Definitions

  • Embodiments of the present invention relate to a touch panel, a method of manufacturing the touch panel, and a display device including the touch panel.
  • FIG. 1 to 3 show schematic views of a touch panel having a single layer glass structure (OGS, One Glass Solution).
  • the touch panel includes a plurality of first touch electrodes 10 and a plurality of second touch electrodes 20 , and the first touch electrodes 10 and the second touch electrodes 20 are insulated from each other.
  • the second touch electrodes 20 include an electrode portion disposed in the same layer as the first touch electrode 10 and a connecting portion 23 located below the electrode portion. As shown in a partially enlarged view of FIG.
  • the electrode portion includes a first electrode portion 21 located on the left side of the first touch electrode 10 and a second electrode portion 22 located on the right side of the first touch electrode 10 , and the connecting portion 23
  • the first electrode portion 21 and the second electrode portion 22 are electrically connected, and the connecting portion 23 is spaced apart from the first touch electrode 10 .
  • the touch panel further includes a first insulating layer 30 and a second insulating layer 40; the first insulating layer 30 is located at the first touch electrode.
  • the second insulating layer 40 covers the electrode portions of the first touch electrode 10 and the second touch electrode, and a portion of the second insulating layer 40 is disposed on the first touch electrode 10 and the first electrode. In the interval between the portions 21, another portion of the second insulating layer 40 is disposed in the interval between the first touch electrode 10 and the second electrode portion 21.
  • the main function of the first insulating layer 30 is to isolate the first touch electrode 10 and the second touch electrode 20 , and the second insulating layer 40 serves to reduce the relationship between the first touch electrode 10 and the second touch electrode 20 . Capacitance.
  • At least one embodiment of the present invention provides a touch panel, a method of manufacturing the touch panel, and a display device including the touch panel.
  • At least one embodiment of the present invention provides a touch panel including a first touch electrode and a second touch electrode, and an integrally formed insulating member therebetween, the first touch electrode
  • the second touch electrodes are disposed to be insulated from each other, and the second touch electrodes include an electrode portion disposed in the same layer as the first touch electrode and a connection portion disposed on the electrode portion.
  • the electrode portion includes a first electrode portion on one side in the width direction of the first touch electrode and a second electrode portion on the other side in the width direction of the first touch electrode, the connection portion The first electrode portion and the second electrode portion are electrically connected, and the connecting portion is spaced apart from the first touch electrode, and the insulating member includes the connecting portion and the first touch a first insulating portion between the electrodes and a second insulating portion between the first electrode portion and the first touch electrode and between the second electrode portion and the first touch electrode.
  • an edge of the connecting portion in the width direction of the first touch electrode is beyond an edge of the first insulating portion in a width direction of the first touch electrode, such that the first electrode portion a portion of the connecting portion is electrically connected to a portion of the connecting portion that is beyond the first insulating portion and is located on the same side as the first electrode portion, and a portion of the second electrode portion and the connecting portion exceed the first portion
  • the insulating portion is electrically connected to a portion on the same side as the second electrode portion.
  • At least one embodiment of the present invention provides a method of manufacturing a touch panel, the method of manufacturing comprising: forming a pattern including a connection portion; forming a pattern including an insulating member, the insulating member including a first insulating portion and from the a second insulating portion protruding on the first insulating portion; forming a pattern including the electrode portion and the first touch electrode, wherein the electrode portion includes a first electrode portion and a second electrode portion, the connecting portion The first electrode portion and the second electrode portion are electrically connected to form a second touch electrode, the first insulating portion is located between the connecting portion and the first touch electrode, and the second insulating portion a second insulating portion between the first electrode portion and the first touch electrode and between the second electrode portion and the first touch electrode.
  • an edge of the connecting portion in the width direction of the first touch electrode is beyond an edge of the first insulating portion in a width direction of the first touch electrode, such that the first electrode portion a portion of the connecting portion is electrically connected to a portion of the connecting portion that is beyond the first insulating portion and is located on the same side as the first electrode portion, and a portion of the second electrode portion and the connecting portion exceed the first portion
  • the insulating portion is electrically connected to a portion on the same side as the second electrode portion.
  • forming a pattern including an insulating member includes: forming a layer of insulating material; forming a photoresist over the insulating material layer; exposing and developing the photoresist using a halftone mask to lithography after exposure Forming a pattern corresponding to the insulating member on the adhesive layer, the halftone mask comprising a light transmitting region, an opaque region and a partially transparent region, wherein the opaque region corresponds to the second insulating portion, Said The partially transparent region corresponds to the first insulating portion, and a portion of the halftone mask except the light transmitting region and the partial light transmitting region is the light transmitting region.
  • the insulating material layer is made of a transparent resin material.
  • forming a pattern including the electrode portion and the first touch electrode includes: forming an electrode material layer covering the insulating member; forming a photoresist layer, the photoresist layer covering the electrode material layer Exposing and developing the photoresist layer to form a pattern corresponding to the first touch electrode and a pattern corresponding to the electrode portion; according to the layer formed in the photoresist layer corresponding to the first
  • the electrode material layer is etched by a pattern of a touch electrode and a pattern corresponding to the electrode portion to form the first touch electrode and the electrode portion.
  • the electrode material layer is made of a transparent electrode material.
  • At least one embodiment of the present invention provides a display device including a display panel and a touch panel, the touch panel being disposed on a light emitting surface of the display panel, wherein the touch panel is the present invention At least one embodiment of the above touch panel is provided.
  • the upper substrate of the display panel is formed integrally with the base substrate of the touch panel.
  • 1 is a top plan view of a touch panel
  • FIG. 2 is a partial enlarged view of the touch panel of FIG. 1, wherein the second insulating layer is not shown in the structure shown in FIG. 2;
  • Figure 3 is a cross-sectional view taken along line A-A of the structure shown in Figure 2, wherein a second insulating layer is included in the structure shown in Figure 3;
  • Figure 4 is a cross-sectional view taken along line B-B of the structure shown in Figure 2 before forming a second insulating layer;
  • FIG. 5 is a partial plan view of a touch panel according to an embodiment of the invention.
  • Figure 6 is a cross-sectional view of the structural portion shown in Figure 5 taken along line F-F;
  • Figure 7a is a schematic view showing the steps of forming an insulating member
  • Figure 7b is a schematic view showing the steps of forming an electrode material layer
  • Figure 7c is a schematic view showing the steps of forming a photoresist layer
  • Figure 7d is a schematic view showing the steps of exposing and developing the photoresist
  • 7e is a schematic view showing a step of etching the electrode material layer
  • 7f is a partial cross-sectional view of the touch panel formed after stripping the photoresist
  • Figure 8 is a cross-sectional view of an insulating member in accordance with an embodiment of the present invention.
  • FIG. 9 is a schematic diagram of a display device in accordance with an embodiment of the present invention.
  • first touch electrode 20 second touch electrode
  • first electrode portion 22 second electrode portion
  • connection portion 30 first insulation layer
  • first insulating portion 52 second insulating portion
  • touch panel 200 display panel
  • the manufacturing process of the touch panel shown in FIG. 1-3 may be: forming the connecting portion 23 first; forming the first insulating layer 30; and forming the electrode portions of the first touch electrode 10 and the second touch electrode 20.
  • Figure 4 is a cross-sectional view taken along line B-B of the structure shown in Figure 2 before forming a second insulating layer. It can be seen from FIG. 4 that after the first insulating layer 30 is formed, the second insulating layer 40 is not formed between the electrode portions of the first touch electrode 10 and the second touch electrode 20, and therefore, the second layer needs to be formed. The step of insulating layer. It can be seen that the manufacturing process of the touch panel is complicated.
  • orientation words “left and right” used in the present disclosure refer to the “left and right” directions in FIGS. 5 to 8, and the orientation words “up and down” used in the present disclosure are Refers to the “up and down” directions in Figures 6-8.
  • At least one embodiment of the present invention provides a touch panel including a plurality of first touch electrodes 10 parallel to each other and a plurality of second touch electrodes 20 parallel to each other.
  • Figure Only one first touch electrode 10 and one second touch electrode 20 are shown.
  • the first touch electrode 10 and the second touch electrode 20 are insulated from each other, and the second touch electrode 20 includes An electrode portion provided in the same layer of the touch electrode 10 and a connecting portion 23 provided on the electrode portion.
  • the electrode portion includes a first electrode portion 21 located on one side (left side in FIG. 5) of the first touch electrode 10 in the width direction and another side in the width direction of the first touch electrode 10 (FIG.
  • the second electrode portion 22 of the right side is the second electrode portion 22.
  • the connection portion 23 electrically connects the first electrode portion 21 and the second electrode portion 22, and the connection portion 23 is spaced apart from the first touch electrode 10.
  • the touch panel further includes an integrally formed insulating member 50 disposed between the first touch electrode 10 and the second touch electrode 20 . As shown in FIG. 6 and FIG. 8 , the insulating member 50 includes a first insulating portion 51 between the connecting portion 23 and the first touch electrode 10 and between the first electrode portion 21 and the first touch electrode 10 . The second insulating portion 52 between the second electrode portion 22 and the first touch electrode 10 .
  • the arrangement of the electrode portions 21, 22 and the connecting portion 23 means that the electrode portion and the connecting portion 23 are located in different layers with the electrode portions 21, 22 and the connecting portion 23 interposed therebetween.
  • the middle layer is the arrangement of the electrode portions 21, 22 and the connecting portion 23.
  • the insulating member 50 has an integral structure, the insulating portion 51 can be obtained by one patterning process, so that the manufacturing method of manufacturing the touch panel can be simplified.
  • the materials for forming the first touch electrode 10 and the second touch electrode 20 are not specifically limited.
  • the first touch electrode 10 and the second touch electrode 20 may each be made of a transparent electrode material (for example, ITO).
  • at least one of the first touch electrode 10 and the second touch electrode 20 may be made of an opaque metal material.
  • the position of the touch electrode made of a metal material corresponds to, for example, the position of the black matrix in the display panel used in conjunction with the touch panel.
  • the insulating member 50 should be made of a transparent insulating material, for example, may be made of a transparent resin material such as an epoxy resin, a polystyrene resin, or the like; or, in one example, the transparent resin material may have a photosensitive property Therefore, it can be directly used in the photolithography process.
  • the first insulating portion 51 is located between the connecting portion 23 and the first touch electrode 10 for reducing the capacitance between the connecting portion 23 and the first touch electrode 10; the second insulating portion 52 is located at the first electrode portion 21 and Between the touch electrodes 10 and between the second electrode portion 22 and the first touch electrode 10, the capacitance between the first electrode portion 21 and the first touch electrode is reduced, and the second electrode portion 22 is reduced. The capacitance between the first touch electrode 10 and the first touch electrode 10.
  • the electrode portions 21, 22 of the second touch electrode 20 and the connecting portion 23 are electrically connected.
  • the electrical connection between the electrode portions 21, 22 of the second touch electrode 20 and the connection portion 23 can be achieved in various ways.
  • the electrode portion of the second touch electrode 20 may be connected to the connection portion 23 through a via hole.
  • the first insulating portion 51 of the insulating member 50 may be disposed such that the boundary of the first insulating portion 51 exceeds the connecting portion 23, a through hole is formed in the first insulating portion 51, and then the first touch electrode 10 and the first electrode are deposited.
  • the electrode material of the electrode portion of the touch electrode 20 is deposited in the through hole to form a conductive via, and the electrode portion of the second touch electrode 20 is electrically connected to the connecting portion 23 .
  • the edge of the connecting portion 23 in the width direction W of the first touch electrode 10 exceeds the first insulating portion 51 at the first touch.
  • the edge of the electrode 10 in the width direction W a portion of the first electrode portion 21 can be electrically connected to a portion of the connection portion 23 that is beyond the first insulating portion 51 and is located on the same side as the first electrode portion 21, and a portion of the second electrode portion 22 can be made A part of the connecting portion 23 that is beyond the first insulating portion 51 and is located on the same side as the second electrode portion 23 is bonded to each other.
  • the bonding of the first electrode portion 21 and the connecting portion 23 realizes electrical connection between the first electrode portion 21 and the connecting portion 23, and the bonding of the second electrode portion 22 and the connecting portion 23 realizes the second electrode portion 21 and The connection portion 23 is electrically connected to form the second touch electrode 20. Since there is no via for conduction in the structure shown in Fig. 6, the structure shown in Fig. 6 can be manufactured by a simpler manufacturing method.
  • the touch panel provided by at least one embodiment of the present invention further includes a transparent substrate, and the first touch electrode 10, the second touch electrode 20, and the insulating member 50 are all disposed on the base substrate. on.
  • At least one embodiment of the present invention provides a method of fabricating a touch panel.
  • the manufacturing method includes the following steps:
  • the insulating member 50 includes a first insulating portion 51 and a second insulating portion 52 protruding from the first insulating portion 51;
  • the electrode portion includes a first electrode portion 21 and a second electrode portion 22, the connecting portion to the first electrode portion 21 and the second portion
  • the electrode portion 22 is electrically connected to form a second touch electrode 20, the first insulating portion 51 is located between the connecting portion and the first touch electrode 10, and the second insulating portion 52 is located at the One electrode portion 21
  • the first touch electrode 10 and the second electrode portion 22 and the first touch electrode 10 are disposed.
  • the insulator 50 can be formed by a one-step patterning process, and thus the manufacturing method provided by at least one embodiment of the present invention is relatively simple.
  • the specific process of forming the connecting portion is not specifically limited.
  • the connecting portion may be formed by any one of patterning processes such as printing, transfer, and photolithography.
  • connection portion is formed by a conventional photolithography patterning process
  • the following steps may be included: forming an electrode material layer on the substrate substrate; coating a photoresist layer on the electrode material layer; and performing a photoresist layer on the photoresist layer Exposure development; forming a pattern including a joint by etching.
  • the electrode material layer may be formed on the base substrate by any one of deposition, evaporation, or the like.
  • the pattern including the electrode portion and the first touch electrode 10 can be formed by any patterning process such as transfer, printing, photolithography, or the like.
  • the connecting portion 23 and the electrode portions 21, 22 can be electrically connected to each other through the via holes.
  • the edge of the connecting portion 23 in the width direction of the first touch electrode 10 is beyond the width direction of the first touch portion 10 of the first insulating portion 51.
  • the insulating member 50 may be formed using a halftone mask.
  • the insulating member 50 shown in FIG. 8 can be formed by the same photolithography process. In this case, the insulating member 50 needs to be formed using a halftone mask. On the halftone mask, the light transmittance of the portion corresponding to the second insulating portion 52 is different from the light transmittance of the portion corresponding to the first insulating portion 51.
  • the step of forming a pattern including the insulating member 50 includes: forming a layer of insulating material, for example, the thickness of the insulating material layer may be between 1 ⁇ m and 3 ⁇ m; forming a photoresist over the insulating material layer; using a halftone mask The photoresist is exposed and developed to form a pattern corresponding to the insulating member 50 on the exposed photoresist layer, the halftone mask comprising a light transmitting region, an opaque region and a portion a light transmissive area, the opaque area corresponding to the second insulating portion 52, the partial light transmitting area corresponding to the first insulating portion 51, the halftone mask except the light transmitting area And the part A portion other than the light transmitting region is the light transmitting region.
  • the insulating material layer is made of a transparent resin material.
  • the electrode material layer is deposited, and the portion of the electrode material layer corresponding to the electrode portion directly adheres to the portion of the connecting portion that extends beyond the insulating member 50. Therefore, the electrode portion and the first contact are formed by a patterning process. After the electrode 10 is controlled, the electrode portion is electrically connected to the connection portion, and the step of forming the via hole is omitted.
  • forming a pattern including the electrode portion and the first touch electrode 10 by a photolithography patterning process will be described below.
  • forming a pattern including the electrode portion and the first touch electrode 10 may include the following steps.
  • An electrode material layer C (FIG. 7b) is formed, and the electrode material layer C covers the insulating member 50 (here, for the sake of simplicity and clarity of the illustration, only the convex portion on the left side of the insulating member 50 in FIG. 6 is shown in the drawing. a second insulating portion 52, omitting the first insulating portion 51 and the convex second insulating portion 52);
  • Etching the electrode material according to a pattern formed in the photoresist layer D corresponding to the first touch electrode 10 and a pattern corresponding to the electrode portion to form the first touch electrode 10 and the electrode portion 21 (Fig. 7e).
  • Fig. 7f The structure shown in Fig. 7f is obtained by peeling off the residual photoresist.
  • the electrode material layer C may be a transparent electrode material or a non-transparent electrode material (for example, a metal material).
  • a transparent electrode material for example, a metal material.
  • the first touch electrode 10 and the second touch electrode 20 should overlap with the black matrix of the display panel used in conjunction with the touch panel.
  • At least one embodiment of the present invention provides a display device.
  • the display device includes a display panel 200 and a touch panel 100 , and the touch panel 100 is disposed on a light emitting surface of the display panel 200 .
  • the touch panel 100 is the touch panel provided by at least one embodiment of the present invention.
  • the display device may be an electronic device such as a mobile phone or a tablet computer.
  • the upper substrate of the display panel and the base substrate of the touch panel are integrally formed. That is, when manufacturing the touch panel, directly A touch electrode, a second touch electrode and an insulating member are fabricated on the upper substrate of the display panel.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Position Input By Displaying (AREA)

Abstract

一种触控面板及其制造方法和显示装置，该触控面板包括第一触控电极（10）、第二触控电极（20）以及一体形成的绝缘件（50），第二触控电极（20）包括与第一触控电极（10）同层设置的电极部和位于电极部下方的连接部（23），电极部包括第一电极部（21）和第二电极部（22），连接部（23）将第一电极部（21）和第二电极部（22）电连接，且连接部（23）与第一触控电极（10）间隔设置，该绝缘件包括位于连接部（23）和第一触控电极（10）之间的第一绝缘部（51）和位于第一电极部（21）与第一触控电极（10）之间以及第二电极部（22）与第一触控电极（10）之间的第二绝缘部（52）。可以通过一次构图工艺获得绝缘部，从而可以简化触控面板的制造方法。

Description

触控面板及其制造方法和显示装置 技术领域
本发明的实施例涉及一种触控面板、触控面板的制造方法和包括触控面板的显示装置。
背景技术
图1至图3示出了一种具有单层玻璃结构(OGS，One Glass Solution)的触控面板的示意图。如图1的俯视图中所示，所述触控面板包括多条第一触控电极10和多条第二触控电极20，第一触控电极10和所述第二触控电极20互相绝缘地交叉设置，且第二触控电极20包括与第一触控电极10同层设置的电极部和位于电极部下方的连接部23。如图2的局部放大图所示，所述电极部包括位于第一触控电极10左侧的第一电极部21和位于第一触控电极10右侧的第二电极部22，连接部23将第一电极部21和第二电极部22电连接，且连接部23与第一触控电极10间隔设置。此外，如图3中对应于图2中沿A-A线的截面图所示，所述触控面板还包括第一绝缘层30和第二绝缘层40；第一绝缘层30位于第一触控电极10和连接部23之间，第二绝缘层40覆盖第一触控电极10和第二触控电极的电极部，且第二绝缘层40的一部分设置在第一触控电极10与第一电极部21之间的间隔中，第二绝缘层40的另一部分设置在第一触控电极10与第二电极部21之间的间隔中。
第一绝缘层30的主要作用是隔离第一触控电极10和第二触控电极20，而第二绝缘层40的主要作用为减少第一触控电极10和第二触控电极20之间的电容。
发明内容
本发明的至少一实施例提供一种触控面板、所述触控面板的制造方法和包括所述触控面板的显示装置。
本发明的至少一实施例提供一种触控面板，所述触控面板包括第一触控电极和第二触控电极以及二者之间的一体形成的绝缘件，所述第一触控电极 和所述第二触控电极互相绝缘地交叉设置，且所述第二触控电极包括与所述第一触控电极同层设置的电极部和与所述电极部隔层设置的连接部，所述电极部包括位于所述第一触控电极的宽度方向的一侧的第一电极部和位于所述第一触控电极的宽度方向的另一侧的第二电极部，所述连接部将所述第一电极部和所述第二电极部电连接，且所述连接部与所述第一触控电极间隔设置，所述绝缘件包括位于所述连接部和所述第一触控电极之间的第一绝缘部和位于所述第一电极部与所述第一触控电极之间以及所述第二电极部与所述第一触控电极之间的第二绝缘部。
例如，所述连接部的在所述第一触控电极的宽度方向的边缘超出所述第一绝缘部的在所述第一触控电极的宽度方向的边缘，以使得所述第一电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第一电极部位于同一侧的部分电连接，所述第二电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第二电极部位于同一侧的部分电连接。
本发明的至少一实施例提供一种触控面板的制造方法，所述制造方法包括：形成包括连接部的图形；形成包括绝缘件的图形，所述绝缘件包括第一绝缘部和从所述第一绝缘部上凸出的第二绝缘部；形成包括电极部和第一触控电极的图形，其中，所述电极部包括第一电极部和第二电极部，所述连接部将所述第一电极部和所述第二电极部电连接，以形成第二触控电极，所述第一绝缘部位于所述连接部和所述第一触控电极之间，所述第二绝缘部位于所述第一电极部与所述第一触控电极之间以及所述第二电极部与所述第一触控电极之间的第二绝缘部。
例如，所述连接部的在所述第一触控电极的宽度方向的边缘超出所述第一绝缘部的在所述第一触控电极的宽度方向的边缘，以使得所述第一电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第一电极部位于同一侧的部分电连接，所述第二电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第二电极部位于同一侧的部分电连接。
例如，形成包括绝缘件的图形包括：形成绝缘材料层；在所述绝缘材料层上方形成光刻胶；利用半色调掩膜板对所述光刻胶进行曝光显影，以在曝光后的光刻胶层上形成对应于所述绝缘件的图形，所述半色调掩膜板包括透光区、不透光区和部分透光区，所述不透光区对应于所述第二绝缘部，所述 部分透光区对应于所述第一绝缘部，所述半色调掩膜板上除所述透光区和所述部分透光区之外的部分为所述透光区。
例如，所述绝缘材料层由透明的树脂材料制成。
例如，形成包括电极部和第一触控电极的图形包括：形成电极材料层，所述电极材料层覆盖所述绝缘件；形成光刻胶层，所述光刻胶层覆盖所述电极材料层；对所述光刻胶层进行曝光显影，以形成对应于所述第一触控电极的图形以及对应于所述电极部的图形；根据所述光刻胶层中形成的对应于所述第一触控电极的图形以及对应于所述电极部的图形对所述电极材料层进行刻蚀，以形成所述第一触控电极和所述电极部。
例如，所述电极材料层由透明电极材料制成。
本发明至少一实施例提供一种显示装置，所述显示装置包括显示面板和触控面板，所述触控面板设置在所述显示面板的出光面上，其中，所述触控面板为本发明至少一实施例所提供的上述触控面板。
例如，所述显示面板的上基板与所述触控面板的衬底基板形成为一体。
附图说明
为了更清楚地说明本发明实施例的技术方案，下面将对实施例的附图作简单地介绍，显而易见地，下面描述中的附图仅仅涉及本发明的一些实施例，而非对本发明的限制。
图1是一种触控面板的俯视图；
图2是图1中的触控面板的局部放大图，其中，在图2中所示的结构中未示出第二绝缘层；
图3为图2中所示结构沿A-A线剖视图，其中，在图3中所示的结构中包括第二绝缘层；
图4为图2中所示结构的在形成第二绝缘层之前的B-B剖视图；
图5为本发明一实施例提供的触摸面板的局部俯视图；
图6为图5中所示结构部沿F-F线剖视图；
图7a为形成绝缘件的步骤的示意图；
图7b为形成电极材料层的步骤的示意图；
图7c为形成光刻胶层的步骤的示意图；
图7d为对光刻胶进行曝光显影的步骤的示意图；
图7e为对所述电极材料层进行刻蚀的步骤的示意图；
图7f为剥离光刻胶后形成的触控面板的局部剖视图；
图8为根据本发明实施例的绝缘件的剖视图；
图9为根据本发明实施例的显示装置的示意图。
附图标记
10：第一触控电极     20：第二触控电极
21：第一电极部       22：第二电极部
23：连接部           30：第一绝缘层
40：第二绝缘层       50：绝缘件
51：第一绝缘部       52：第二绝缘部
100：触控面板        200：显示面板
具体实施方式
为使本发明实施例的目的、技术方案和优点更加清楚，下面将结合本发明实施例的附图，对本发明实施例的技术方案进行清楚、完整地描述。显然，所描述的实施例是本发明的一部分实施例，而不是全部的实施例。基于所描述的本发明的实施例，本领域普通技术人员在无需创造性劳动的前提下所获得的所有其他实施例，都属于本发明保护的范围。
图1-3所示的触控面板的制作顺序可以为：先形成连接部23；形成第一绝缘层30；形成第一触控电极10和第二触控电极20的电极部。图4为图2中所示结构的在形成第二绝缘层之前的沿B-B线剖视图。从图4中可知，在形成的第一绝缘层30之后，第一触控电极10和第二触控电极20的电极部之间并没有形成第二绝缘层40，因此，需要进行形成第二绝缘层的步骤。由此可知，制作所述触控面板的制作工艺较为复杂。
应当理解的是，在本公开中所用到的方位词“左、右”是指图5至图8中的“左、右”方向，而本公开中用到的方位词“上、下”则是指图6至图8中的“上、下”方向。
如图5所示，本发明至少一实施例提供一种触控面板，所述触控面板包括多条彼此平行的第一触控电极10和多条彼此平行的第二触控电极20。图 中仅示出了一条第一触控电极10和一条第二触控电极20，第一触控电极10和第二触控电极20互相绝缘地交叉设置，且第二触控电极20包括与第一触控电极10同层设置的电极部和与该电极部隔层设置的连接部23。所述电极部包括位于第一触控电极10的宽度方向的一侧(在图5中为左侧)的第一电极部21和位于第一触控电极10的宽度方向的另一侧(图5中为右侧)的第二电极部22。连接部23将第一电极部21和第二电极部22电连接，且连接部23与第一触控电极10间隔设置。所述触控面板还包括设置在第一触控电极10和第二触控电极20之间的一体形成的绝缘件50。如图6和图8中所示，绝缘件50包括位于连接部23和第一触控电极10之间的第一绝缘部51和位于第一电极部21与第一触控电极之间10以及第二电极部22与第一触控电极10之间的第二绝缘部52。
所述电极部21、22与连接部23隔层设置的意思是，所述电极部与连接部23位于不同层中，且二者之间设置有将电极部21、22和连接部23隔开的中间层。
由于绝缘件50具有一体结构，因此可以通过一次构图工艺获得绝缘部51，从而可以简化制造触控面板的制造方法。
在本发明至少一实施例中，对制成第一触控电极10和第二触控电极20的材料并没有具体的限制。例如，第一触控电极10和第二触控电极20均可以由透明电极材料(例如，ITO)制成。又或者，第一触控电极10和第二触控电极20中的至少一者可以由不透明的金属材料制成。在这种情况中，由金属材料制成的触控电极的位置例如与和所述触控面板配合使用的显示面板中的黑矩阵的位置对应。
绝缘件50应当由透明的绝缘材料制成，例如，可以由透明的树脂材料制成，例如环氧树脂、聚苯乙烯树脂等；或者，在一个示例中，该透明的树脂材料可以具有感光性能，从而可以直接用于光刻工艺之中。第一绝缘部51位于连接部23与第一触控电极10之间，用于减少连接部23与第一触控电极10之间的电容；第二绝缘部52位于第一电极部21与第一触控电极10之间，以及第二电极部22与第一触控电极10之间，用于减少第一电极部21与第一触控电极之间的电容，以及减少第二电极部22与第一触控电极10之间的电容。
在本发明至少一实施例中，第二触控电极20的电极部21、22与连接部23之间是电连接的。可以通过多种方式实现第二触控电极20的电极部21、22与连接部23之间的电连接。例如，可以通过过孔将第二触控电极20的电极部与连接部23相连。例如，可以将绝缘件50的第一绝缘部51设置为该第一绝缘部51的边界超过连接部23，在第一绝缘部51上设置通孔，然后沉积形成第一触控电极10和第二触控电极20的电极部的电极材料，电极材料沉积在所述通孔中，形成能够导电的过孔，并将第二触控电极20的电极部与连接部23导电连接。
为了进一步简化制作所述触控面板时的制造方法，例如，如图6所示，连接部23的在第一触控电极10的宽度方向W的边缘超出第一绝缘部51在第一触控电极10的宽度方向W的边缘。这样，第一电极部21的一部分能够与连接部23上超出第一绝缘部51且与所述第一电极部21位于同一侧的部分电连接，并且可以使得第二电极部22的一部分与所述连接部23上超出所述第一绝缘部51且与所述第二电极部23位于同一侧的一部分贴合。此处，第一电极部21与连接部23的贴合实现了第一电极部21与连接部23的电连接，第二电极部22与连接部23的贴合实现了第二电极部21与连接部23的电连接，从而形成第二触控电极20。由于图6中所示的结构中不存在用于导电的过孔，因此，可以利用更加简单的制造方法制造图6中所示的结构。
容易理解的是，本发明至少一实施例提供的触控面板还包括透明的衬底基板，所述上述第一触控电极10、第二触控电极20以及绝缘件50均设置在衬底基板上。
本发明至少一实施例提供一种触控面板的制造方法。所述制造方法包括以下步骤：
形成包括连接部23的图形；
形成包括绝缘件50的图形(参见图7a)，所述绝缘件50包括第一绝缘部51和从所述第一绝缘部51上凸出的第二绝缘部52；
形成包括电极部和第一触控电极10的图形，其中，所述电极部包括第一电极部21和第二电极部22，所述连接部将所述第一电极部21和所述第二电极部22电连接，以形成第二触控电极20，所述第一绝缘部51位于所述连接部和所述第一触控电极10之间，所述第二绝缘部52位于所述第一电极部21 与所述第一触控电极10之间以及所述第二电极部22与所述第一触控电极10之间。
如上所述，通过一步构图工艺即可形成所述绝缘体50，因此本发明至少一实施例提供的制造方法比较简单。
在本发明至少一实施例中，对形成连接部的具体过程并不做具体限制。例如，可以利用打印、转印、光刻等构图工艺中的任意一种形成所述连接部。
在利用传统的光刻构图工艺形成连接部时，可以包括以下步骤：在衬底基板上形成电极材料层；在电极材料层上涂敷光刻胶层；利用掩膜板对光刻胶层进行曝光显影；通过刻蚀形成包括连接部的图形。可以利用沉积、蒸镀等任意一种方式在衬底基板上形成电极材料层。
同样地，可以利用转印、打印、光刻等任意一种构图工艺形成包括电极部和第一触控电极10的图形。
如上所述，连接部23和电极部21、22可以通过过孔彼此电连接。为了进一步简化制造方法，例如，所述连接部23的在所述第一触控电极10的宽度方向的边缘超出所述第一绝缘部51的在所述第一触控电极10的宽度方向的边缘，以使得所述第一电极部21的一部分与所述连接部23上超出所述第一绝缘部51且与所述第一电极部21位于同一侧的部分电连接，所述第二电极部22的一部分与所述连接部23上超出所述第一绝缘部51且与所述第二电极部22位于同一侧的部分电连接。
为了简化制造方法，例如，可以利用半色调掩膜板形成所述绝缘件50。在本发明至少一实施例中，可以同一步光刻工艺形成图8中所示的绝缘件50，此时，需要利用半色调掩膜板形成所述绝缘件50。在所述半色调掩膜板上，对应于第二绝缘部52的部分的光透过率不同于对应于第一绝缘部51的部分的光透过率。
例如，形成包括绝缘件50的图形的步骤包括：形成绝缘材料层，例如，绝缘材料层的厚度可以在1μm至3μm之间；在所述绝缘材料层上方形成光刻胶；利用半色调掩膜板对所述光刻胶进行曝光显影，以在曝光后的光刻胶层上形成对应于所述绝缘件50的图形，所述半色调掩膜板包括透光区、不透光区和部分透光区，所述不透光区对应于所述第二绝缘部52，所述部分透光区对应于所述第一绝缘部51，所述半色调掩膜板上除所述透光区和所述部分 透光区之外的部分为所述透光区。
如上所述，例如，所述绝缘材料层由透明的树脂材料制成。
形成了绝缘件50之后，沉积电极材料层，电极材料层中与电极部对应的部分直接与连接部上超出绝缘件50的部分贴合，因此，在利用构图工艺形成了电极部和第一触控电极10之后，即可使得电极部与连接部电连接，省去了形成过孔的步骤。
下面介绍利用光刻构图工艺形成包括电极部和第一触控电极10的图形的步骤。例如，形成包括电极部和第一触控电极10的图形可以包括如下步骤。
形成电极材料层C(图7b)，电极材料层C覆盖所述绝缘件50(这里为了图示的简洁和清楚起见，图中仅示出了例如图6中的绝缘件50左侧的凸出的第二绝缘部52，而省略了第一绝缘部51和右侧的凸出的第二绝缘部52)；
形成光刻胶层D(图7c)，光刻胶层D覆盖电极材料层C；
对光刻胶层D进行曝光显影(图7d)，以形成对应于所述第一触控电极10的图形以及对应于所述电极部的图形；
根据所述光刻胶层D中形成的对应于所述第一触控电极10的图形以及对应于所述电极部的图形对所述电极材料进行刻蚀，以形成所述第一触控电极10和所述电极部21(图7e)。
将残余的光刻胶剥离后即可获得图7f中所示的结构。
如上所述，电极材料层C可以为透明电极材料，也可以为非透明电极材料(例如，金属材料)。当电极材料层C由金属制成时，第一触控电极10和第二触控电极20应当和与所述触摸面板配合使用的显示面板的黑矩阵重叠。
本发明至少一实施例提供一种显示装置，如图9所示，所述显示装置包括显示面板200和触控面板100，所述触控面板100设置在所述显示面板200的出光面上，所述触控面板100为本发明至少一个实施例所提供的上述触控面板。
由于所述触控面板制造方法较为简单，因此，所述触控面板具有较低的成本。所述显示装置可以为手机、平板电脑等电子设备。
为了减小所述显示装置的整体厚度，例如，所述显示面板的上基板与所述触控面板的衬底基板形成为一体。即，在制造所述触控面板时，直接将第 一触控电极、第二触控电极和绝缘件制造在显示面板的上基板上。
以上所述仅是本发明的示范性实施方式，而非用于限制本发明的保护范围，本发明的保护范围由所附的权利要求确定。
本申请要求于2014年8月22日递交的中国专利申请第201410419265.5号的优先权，在此全文引用上述中国专利申请公开的内容以作为本申请的一部分。

Claims (10)

  1. 一种触控面板，所述触控面板包括第一触控电极和第二触控电极以及位于所述第一触控电极和所述第二触控电极之间的一体形成的绝缘件，
    其中，所述第一触控电极和所述第二触控电极互相绝缘地交叉设置，且所述第二触控电极包括与所述第一触控电极同层设置的电极部和与所述电极部隔层设置的连接部，
    所述电极部包括位于所述第一触控电极的宽度方向的一侧的第一电极部和位于所述第一触控电极的宽度方向的另一侧的第二电极部，
    所述连接部将所述第一电极部和所述第二电极部电连接，且所述连接部与所述第一触控电极间隔设置，
    所述一体形成的绝缘件包括位于所述连接部和所述第一触控电极之间的第一绝缘部和位于所述第一电极部与所述第一触控电极之间以及所述第二电极部与所述第一触控电极之间的第二绝缘部。
  2. 根据权利要求1所述的触控面板，其中，所述连接部的在所述第一触控电极的宽度方向的边缘超出所述第一绝缘部的在所述第一触控电极的宽度方向的边缘，以使得所述第一电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第一电极部位于同一侧的部分电连接，所述第二电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第二电极部位于同一侧的部分电连接。
  3. 一种触控面板的制造方法，所述制造方法包括：
    形成包括连接部的图形；
    形成包括绝缘件的图形，所述绝缘件包括第一绝缘部和从所述第一绝缘部上凸出的第二绝缘部；
    形成包括电极部和第一触控电极的图形，
    其中，所述电极部包括第一电极部和第二电极部，所述连接部将所述第一电极部和所述第二电极部电连接，以形成第二触控电极，所述第一绝缘部位于所述连接部和所述第一触控电极之间，所述第二绝缘部位于所述第一电极部与所述第一触控电极之间以及所述第二电极部与所述第一触控电极之间。
  4. 根据权利要求3所述的触控面板的制造方法，其中，所述连接部的在所述第一触控电极的宽度方向的边缘超出所述第一绝缘部的在所述第一触控电极的宽度方向的边缘，以使得所述第一电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第一电极部位于同一侧的部分电连接，所述第二电极部的一部分与所述连接部上超出所述第一绝缘部且与所述第二电极部位于同一侧的部分电连接。
  5. 根据权利要求3或4所述的触控面板的制造方法，其中，形成包括绝缘件的图形包括：
    形成绝缘材料层；
    在所述绝缘材料层上方形成光刻胶；
    利用半色调掩膜板对所述光刻胶进行曝光显影，以在曝光后的光刻胶层上形成对应于所述绝缘件的图形，所述半色调掩膜板包括透光区、不透光区和部分透光区，所述不透光区对应于所述第二绝缘部，所述部分透光区对应于所述第一绝缘部，所述半色调掩膜板上除所述透光区和所述部分透光区之外的部分为所述透光区。
  6. 根据权利要求5所述的触控面板的制造方法，其中，所述绝缘材料层由透明的树脂材料制成。
  7. 根据权利要求3或4所述的触控面板的制造方法，其中，形成包括电极部和第一触控电极的图形包括：
    形成电极材料层，所述电极材料层覆盖所述绝缘件；
    形成光刻胶层，所述光刻胶层覆盖所述电极材料层；
    对所述光刻胶层进行曝光显影，以形成对应于所述第一触控电极的图形以及对应于所述电极部的图形；
    根据所述光刻胶层中形成的对应于所述第一触控电极的图形以及对应于所述电极部的图形对所述电极材料层进行刻蚀，以形成所述第一触控电极和所述电极部。
  8. 根据权利要求7所述的触控面板的制造方法，其中，所述电极材料层由透明电极材料制成。
  9. 一种显示装置，所述显示装置包括显示面板和触控面板，所述触控面板设置在所述显示面板的出光面上，其中，所述触控面板为权利要求1或2 所述的触控面板。
  10. 根据权利要求9所述的显示装置，其中，所述显示面板的上基板与所述触控面板的衬底基板形成为一体。
PCT/CN2014/092701 2014-08-22 2014-12-01 触控面板及其制造方法和显示装置 WO2016026236A1 (zh)

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