WO2016002442A1 - Dispositif et procédé de mesure de distance - Google Patents

Dispositif et procédé de mesure de distance Download PDF

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Publication number
WO2016002442A1
WO2016002442A1 PCT/JP2015/066469 JP2015066469W WO2016002442A1 WO 2016002442 A1 WO2016002442 A1 WO 2016002442A1 JP 2015066469 W JP2015066469 W JP 2015066469W WO 2016002442 A1 WO2016002442 A1 WO 2016002442A1
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WIPO (PCT)
Prior art keywords
light
distance
double
half mirror
lens
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PCT/JP2015/066469
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English (en)
Japanese (ja)
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藤原　久利
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アズビル株式会社
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Publication of WO2016002442A1 publication Critical patent/WO2016002442A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00—Measuring distances in line of sight; Optical rangefinders
    • G01C3/02—Details
    • G01C3/06—Use of electric means to obtain final indication

Definitions

  • the present invention relates to a distance measurement technique, and more particularly to an optical distance measurement technique for irradiating an object with light and reflecting the object, and measuring an objective distance to the object based on the reflected light.
  • Optical measuring devices that can measure the object distance to an object in a non-contact manner using light such as laser light are known.
  • Such an optical measuring apparatus is not only for measuring an objective distance to an object, but is also considered to be applied to various uses such as measuring the surface shape of an object and measuring the thickness of a thin film.
  • an optical measuring device for example, laser light is irradiated obliquely to the surface of an object, and the distance to the surface is calculated based on the principle of triangulation based on the position where the reflected light has reached. It has been known.
  • Such an optical measuring apparatus is widely used as an inexpensive measuring apparatus because the apparatus configuration is relatively simple. However, since the tilt of the reflecting surface directly affects the distance measurement value, the measurement error increases when the surface of the object to be measured is not flat.
  • An optical lens system is disposed between the measurement point and the CCD image sensor, and the reflected light reaches the CCD image sensor through the optical lens system.
  • the optical lens system is configured such that the reflected light from the point to be measured passes through a plurality of optical paths and is then irradiated on the CCD image sensor. Since the optical path lengths of the respective optical paths are different from each other, interference fringes are generated on the CCD image sensor due to the optical path difference.
  • the fringe spacing of the interference fringes changes according to the objective distance between the measurement point and the CCD image sensor. Therefore, in this optical measuring device, the objective distance to the measurement point is calculated based on the fringe interval obtained from the output of the CCD image sensor.
  • an optical lens system in order to generate a plurality of optical paths having different optical path lengths.
  • Such an optical lens system is a multifocal lens that requires precise polishing. Or a spherical lens. Accordingly, such optical lens systems are generally expensive and require precise assembly. For this reason, there existed a problem that the cost of a distance measuring device increased.
  • the present invention is to solve such problems, and an object of the present invention is to provide a distance measuring technique capable of accurately measuring an objective distance to an object with an optical lens system having a simple configuration.
  • a distance measuring device is a distance measuring device that irradiates and reflects light on an object, and measures an objective distance to the object based on the reflected light.
  • a double-sided half mirror that outputs from a second surface facing the surface, a light-detecting element that detects interference fringes generated on a detection surface by two output lights from the double-sided half-mirror, and detection obtained by the light-detecting element
  • a distance calculation unit that calculates a result of the calculation to extract a pitch of the interference fringes and calculates an objective distance from the condenser lens to the object based on the pitch;
  • the distance measuring method is a distance measuring method for irradiating and reflecting light on an object and measuring an objective distance to the object based on the reflected light, the reflected light from the object
  • a condensing step for condensing the light into an imaginary spot, and the reflected light that has passed through the imaginary spot is internally separated into two output lights, from a second surface facing the first surface on which the reflected light is incident
  • a light separating step for outputting a light detecting step for detecting interference fringes generated on a detection surface by two output lights from the double-sided half mirror; and a detection result obtained by the light detecting element for arithmetic processing to perform the interference.
  • reflected light from an object is separated into two output lights having different imaginary spot positions as virtual condensing points.
  • Interference fringes whose pitch changes according to the object distance are generated on the detection surface by the output light.
  • FIG. 1 is an explanatory diagram illustrating the configuration of the distance measuring apparatus according to the first embodiment.
  • FIG. 2 is an explanatory diagram showing an interval between two imaginary spots generated by the double-sided half mirror.
  • FIG. 3 is an explanatory view showing the extension of the image formation point by the double-sided half mirror.
  • FIG. 4 is an explanatory view showing the shift of light by the double-sided half mirror.
  • FIG. 5 is an explanatory diagram showing the chief ray of the first output light.
  • FIG. 6 is an explanatory diagram showing the chief ray of the second output light.
  • FIG. 7 is an explanatory diagram showing the relationship between the light spot interval and the optical path difference.
  • FIG. 8 is an explanatory diagram showing the principle of distance measurement according to the present invention.
  • FIG. 1 is an explanatory diagram illustrating the configuration of the distance measuring apparatus according to the first embodiment.
  • FIG. 2 is an explanatory diagram showing an interval between two imaginary spots generated by the double-sided half mirror.
  • FIG. 3 is an
  • FIG. 9 is an image example showing interference fringes generated on the detection surface.
  • FIG. 10 is an analysis example of the detection result obtained by the light detection element.
  • FIG. 11 is an explanatory diagram illustrating the configuration of the distance measuring apparatus according to the second embodiment.
  • FIG. 12 is a graph showing the relationship between the objective distance and the interference fringe pitch.
  • This distance measuring device 10 has a function of irradiating and reflecting light on an object T to be measured for distance, and measuring an objective distance to the object T based on the reflected light.
  • the distance measurement apparatus 10 includes, as main components, a light source 11, a light source lens 12, a beam splitter 13, a condenser lens 14, a double-sided half mirror 15, a light detection element 16, and a distance calculation unit 17. These are housed inside a casing (not shown).
  • the light source 11 is a device that emits light of a single wavelength (monochromatic light) used for distance measurement.
  • a monochromatic light such as a semiconductor laser device or a sodium lamp, or a device that emits light having a single wavelength by a white light source and a narrow band-pass filter.
  • the light source lens 12 has a function of condensing the light emitted from the light source 11 and outputting it to the beam splitter 13.
  • the beam splitter 13 is disposed on the optical axis O of the condensing optical system, reflects the light from the light source 11 collected by the light source lens 12, and is directed to the light spot A of the object T along the optical axis O. Of the reflected light diffused and reflected by the light spot A, the reflected light reflected in the direction of the optical axis O is transmitted to the condenser lens 14. In the present invention, when the light spot A is not on the optical axis O, the optical axis is read as a principal ray.
  • the condensing lens 14 is composed of, for example, a convex lens, and is disposed on the optical axis O and has a function of condensing the reflected light from the object T transmitted through the beam splitter 13 onto the imaginary spot Q.
  • the double-sided half mirror 15 has a first surface 15A and a second surface 15B having semi-translucency, which are made of a transparent parallel plate as a whole and are arranged in parallel to each other and subjected to processing such as half-mirror coating.
  • the principal ray S that is reflected light that is disposed with an inclination with respect to the optical axis O of the condensing optical system and passes through the imaginary spot Q is internally separated into two output lights S1 and S2, and the reflected light Has a function of outputting from the second surface 15B facing the first surface 15A.
  • the incident principal ray S mainly passes through the first surface 15A and then passes through the second surface 15B, and the incident principal ray S passes through the first surface 15A. After that, the light is separated into the second output light S2 that is reflected by the second surface 15B, then reflected again by the first surface 15A, and then transmitted through the second surface 15B.
  • the transmittance and the reflectance on the first surface 15A and the second surface 15B of the double-sided half mirror 15 are not limited to 1: 1, and may be other than 1: 1.
  • the light detection element 16 has a function of detecting interference fringes generated on the detection surface I using the two output lights S1 and S2 that have passed through the double-sided half mirror 15, and outputting a detection result.
  • a light detection element 16 for example, a light receiving element arranged in one dimension such as a charge coupled device (CCD), a complementary metal oxide semiconductor (CMOS) linear image sensor, or a photodiode array can be used.
  • the distance calculation unit 17 includes an arithmetic processing circuit using a CPU, extracts the pitch (period length) of the interference fringes by performing arithmetic processing on the detection result obtained by the light detection element 16, and based on the obtained pitch. It has a function of calculating the objective distance from the condenser lens 14 to the object T.
  • FIG. 8 only the condensing optical system of the distance measuring device 10 is shown as the main part, and the projection optical system is omitted. 2 to 8, for the sake of easy understanding, only the principal ray is shown as the ray, and the vertical direction of the drawing in the direction orthogonal to the optical axis O is the X direction, and the vertical direction of the drawing is the Y direction. The left-right direction on the paper along the optical axis O was taken as the Z direction.
  • the lens originally has two principal points according to the incident direction of light, and the positions thereof are different, but in the following, in order to avoid complication of the mathematical expression, the condenser lens 14 is composed of a thin single lens, Assuming that there is only one principal point at the lens center, each equation was derived.
  • the second surface mainly passes through the first surface 15 ⁇ / b> A.
  • the output light S2 is separated. Therefore, the second output light S2 is parallel to the first output light S1, but is reflected twice inside the double-sided half mirror 15, and therefore the position where the first output light S1 is emitted from the second surface 15B. It is emitted from different positions.
  • the virtual condensing points (light source points) of the first output light S1 and the second output light S2 are imaginary spots Q1 and Q2
  • double-sided half Due to refraction and reflection at the mirror 15 these imaginary spots Q 1 and Q 2 are located at different positions that are shifted from the imaginary spot Q of the actual principal ray S. Therefore, when the first and second output lights S1, S2 from the imaginary spots Q1, Q2 are projected onto the detection surface I of the light detection element 16, interference fringes are generated on the detection surface I.
  • the present invention pays attention to the fact that the pitch p of the interference fringes changes according to the objective distance a from the condenser lens 14 to the light spot A of the object T, and detects the interference fringes generated on the detection surface I. It is detected by the element 16 and the distance calculation unit 17 measures the pitch p, and the objective distance a from the condenser lens 14 to the object T is calculated based on the obtained pitch p.
  • the first and second output lights S1 and S2 emitted from the double-sided half mirror 15 have the principal ray S along the normal direction Zg of the double-sided half mirror 15 to the detection surface I side or the condenser lens 14 side, respectively. It can be regarded as a translation. Therefore, if the distances Ld1 and Ld2 from the imaginary spot Q to the imaginary spots Q1 and Q2 in the normal direction Zg of the double-sided half mirror 15 are calculated, the imaginary spot between the imaginary spots Q1 and Q2 in the Z direction from these Ld1 and Ld2 The interval ⁇ Z can be obtained.
  • a medium G having translucency composed of parallel flat plates such as a double-sided half mirror 15 having a high refractive index is disposed between a condensing lens C for condensing the light Sa and its imaging point Pa.
  • the light Sa is translated, and the imaging point of the light Sb transmitted through the medium G is extended from the imaging point Pa to the imaging point Pb along the normal direction Zg of the medium G. become.
  • the relative refractive index of the medium G is n
  • the thickness of the medium G is t
  • the incident angle of the light Sa to the medium G is ⁇ 1
  • the refraction angle inside the medium G is ⁇ 2.
  • the optical axis O is inclined and the normal line of the double-sided half mirror 15 is used as a reference (horizontal). Similar to the parallel movement of the light described above, the first output light S1 emitted from the double-sided half mirror 15 has a principal ray S incident on the double-sided half mirror 15 as shown in FIG. It can be considered that it is translated along the normal direction Zg.
  • the principal ray S incident from the point A on the first surface 15A at the incident angle ⁇ 1 is refracted at an angle of refraction angle ⁇ 2 with respect to the normal direction Zg, and then passes through the inside of the double-sided half mirror 15, The light is emitted from the point C on the second surface 15B as the first output light S1.
  • the position where the normal passing through the point A intersects with the second surface 15B is defined as a point B, and the position where the first output light S1 extends to the first surface 15A side intersects with the first surface 15A.
  • the point A ′′ is the point A ′ and the position where the line A ′′ -C intersects the line AB is the point A ′
  • the first output light S1 passing through the point A ′ and emitted from the point C is .
  • the straight traveling light S1 ′ of the principal ray S incident on the point A can be regarded as being translated to the point A ′ on the detection surface I side along the normal direction Zg, and the distance of the line segment AA ′.
  • d1 corresponds to the parallel movement distance of the first output light S1.
  • the optical path length of the chief ray S is shortened to the detection surface I side by the length Ld1 of the line segment A ′′ -A ′ by such parallel movement of the first output light S1.
  • the imaginary spot Q has moved to the imaginary spot Q1 on the detection surface I side by a distance d1 along the normal direction Zg.
  • This Ld1 is obtained by the following equation (9) from the distance d1 obtained by the equation (8).
  • the optical axis O is inclined and the normal line of the double-sided half mirror 15 is used as a reference.
  • the second output light S2 emitted from the double-sided half mirror 15 has a principal ray S incident on the double-sided half mirror 15 as shown in FIG. It can be considered that the double-sided half mirror 15 is translated along the normal direction Zg.
  • the principal ray S incident from the point A on the first surface 15A at the incident angle ⁇ 1 is refracted at an angle of refraction angle ⁇ 2 with respect to the normal direction Zg, and then passes through the inside of the double-sided half mirror 15, The light is reflected by the second surface 15B and the first surface 15A, and is emitted from the point E on the second surface 15B as the first output light S1.
  • the path from the point A to the point E can be regarded as the same as the path that passes through the double-sided half mirror 15 having a thickness of 3 t without being reflected. Therefore, the path from the point A to the point E is developed on the left side of the first surface 15A, and the normal line passing through the development path and the point A on the virtual first surface separated by the distance 2t from the first surface 15A Is the point D, and when the second output light S2 is extended to the virtual first surface side, the point that intersects the normal passing through the point A is the point D ', and the point D' is passed.
  • the second output light S2 can be regarded as the straight light S2 ′ of the principal ray S ′ incident on the point D being translated to the detection surface I side along the normal direction Zg.
  • ⁇ D ′ corresponds to the parallel movement distance d2 of the second output light S2.
  • the distance Ld2 ′ includes a developed distance 2t / cos ⁇ 1 developed by 2t up to the virtual first surface. Therefore, when the second output light S2 is extended to the virtual first surface side and the point intersecting with the first surface 15B is a point D ′ ′′, only the line segment D′ ⁇ D ′ ′′ It can be considered that the optical path length of the light beam S extends to the condensing lens 14 side, and this optical path length Ld2 is obtained by the following equation (13).
  • the interval ⁇ z between the imaginary spots Q1 and Q2 in the Z direction is obtained by the following equation (14) based on the optical path difference Ld1 of the first output light S1 and the optical path difference Ld2 of the second output light S2.
  • the imaginary spots Q1 and Q2 are separated by an interval ⁇ X in the X direction and are separated by an interval ⁇ Z in the Z direction.
  • the arrival point at which the first output light S1 from the imaginary spot Q1 and the second output light S2 from the imaginary spot Q2 have reached the detection surface I of the light detection element 16 is defined as V
  • the imaginary spot Q1 is defined as
  • the intersection of the X-direction line passing through and the Z-direction line passing through the imaginary spot Q2 is defined as a point D, and a point where the line extending from the intermediate point D0 of the line segment Q1-D and extending in the Z direction intersects the detection surface I.
  • V0 is a distance from V0 to V along the Y direction on the detection surface I
  • P is a distance from the imaginary spot Q1 to the detection surface I.
  • the optical path length L1 from the imaginary spot Q1 to the arrival point V with respect to the first output light S1 is obtained by the following equation (15) by the three-square theorem.
  • the interval ⁇ x is very small compared to the distance c, and the slopes of the first output light S1 and the second output light S2 represented by the slope ⁇ of the line segment D0-V with respect to the Z direction are very small. Therefore, the optical path length L1 can be approximated as the following equation (16).
  • the optical path length L2 from the imaginary spot Q2 to the arrival point V regarding the second output light S2 is the line segment Q2-Q2 'And the sum of the optical path length L22 of the line segment Q2'-V.
  • the optical path length L21 is obtained by the following equation (17) in the same manner as the equation (16) described above, where the distance of the line segment DQ2 ′ is x ′.
  • the optical path length L21 can be approximated by ⁇ z.
  • the optical path length L22 is obtained by the following equation (18) by the square theorem, similarly to the optical path length L1.
  • the optical path length L2 is obtained by the following equation (19), and the optical path difference ⁇ L between the first output light S1 from the imaginary spot Q1 and the second output light S2 from the imaginary spot Q2 is It is calculated
  • interference fringes are generated due to this optical path difference ⁇ L.
  • the optical path difference ⁇ L is an integer m (m is an integer of 0 or more) times the wavelength ⁇ of light, A bright line appears.
  • the interval ⁇ z of the optical path difference ⁇ L is a constant value, and this value only affects the initial phase of the interference fringes and does not affect the interference fringe pitch p.
  • the objective distance from the object T to the principal point M that is, the position of the condenser lens 14 is a
  • the distance from the principal point to the imaginary spot Q is b
  • the focal length of the condenser lens 14 Where f is expressed by the following formula (22) by the imaging formula (lens formula).
  • the above-described equation (21) becomes the following equation (23). Therefore, from the equation (23, the objective distance a from the object T to the principal point M, that is, the position of the condenser lens 14, is obtained by the following equation (24).
  • the interference fringes are formed by repeating bright lines with high luminance and dark lines with low luminance in a stripe shape. Accordingly, the interval between adjacent bright lines (or dark lines) corresponds to the interference fringe pitch p.
  • the horizontal axis indicates the pixel position [pic] of the image along the X direction orthogonal to the interference fringes
  • the vertical axis indicates the light intensity (no unit) at each pixel position.
  • the obtained detection result has a substantially sine wave shape, and its peak position corresponds to a bright line. Therefore, the actual distance indicating the interference fringe pitch p can be calculated from the number of pixels existing between the peak positions.
  • the reflected light from the object T is once condensed on the imaginary spot Q by the condenser lens 14, and then separated into two output lights by the double-sided half mirror 15, and the reflected light is
  • the light is output from the second surface opposite to the incident first surface, the interference fringes generated on the detection surface I by these two output lights are detected by the light detection element 16, and the obtained detection results are subjected to arithmetic processing to cause interference.
  • the fringe pitch is extracted, and the distance calculation unit 17 calculates the objective distance a from the condenser lens 14 to the object T based on this pitch.
  • the output light S1 and S2 of the output light S1 and S2 that are different from each other in the positions of the imaginary spots Q1 and Q2, which are virtual condensing points, are reflected light from the object T by a very simple existing optical element called the double-sided half mirror 15.
  • Interference fringes whose pitch p changes according to the objective distance a are generated on the detection surface I by these output lights S1 and S2. Therefore, it is not necessary to use a conventional multifocal lens or spherical lens that requires precise polishing, and an expensive optical lens and its precise assembly can be omitted. For this reason, it is possible to realize a distance measuring device that can accurately measure the objective distance a to the object T at a relatively low cost.
  • the double-sided half mirror 15 is provided with two first and second surfaces 15A and 15B arranged in parallel, each having semi-translucency, and the reflected light once condensed on the imaginary spot Q is provided.
  • the light transmitted through the first surface 15A is transmitted without being reflected by the second surface 15B and is output as the first output light S1
  • the light transmitted through the first surface 15A is reflected by the second surface 15B.
  • the light is reflected again by the first surface 15A, transmitted through the second surface 15B, and output as the second output light S2.
  • the reflected light S from the imaginary spot Q is converted into the first output light S1 from the imaginary spot Q1 and the second output light S2 from the imaginary spot Q2 with a very simple optical element called the double-sided half mirror 15. They can be easily separated and interference fringes can be generated efficiently. Further, since the interference fringes have a sine wave shape, the interference fringe pitch p can be easily measured, and the interference fringes are not localized, that is, the phenomenon in which the interference fringes appear only in the vicinity of a specific periodic distance does not occur. The measurement span of the objective distance a can be widened. Furthermore, since the interference fringe pitch p is constant on the detection surface I, there is no need to correct the detection result of the light detection element 16, and the arithmetic processing can be simplified and the measurement error of the interference fringe pitch p can be reduced.
  • the distance measuring apparatus 10 concerning the 2nd Embodiment of this invention is demonstrated.
  • the objective lens 20 is provided in the condensing optical system in the first embodiment described above, and the reflected light from the object T is parallel in the section between the objective lens 20 and the condenser lens 14. The case of converting to light will be described.
  • the objective lens 20 has a function of converting the reflected light from the object T into parallel light and outputting it to the condenser lens 14.
  • the beam splitter 13 is disposed between the objective lens 20 and the condenser lens 14. Thereby, the light emitted from the light source 11 is converted into parallel light by the light source lens 12, reflected by the beam splitter 13, and then condensed by the objective lens 20 and applied to the object T.
  • the reflected light from the object T is converted into parallel light by the objective lens 20, passes through the beam splitter 13, and is once condensed on the imaginary spot Q by the condenser lens 14, and then starts to spread from the imaginary spot Q.
  • the reflected light passes through the double-sided half mirror 15 and is applied to the detection surface I.
  • the relationship between the objective distance a and the interference fringe pitch p is obtained by simulation based on the present embodiment.
  • the objective lens 20 is provided in the condensing optical system, and the reflected light from the object T is converted into parallel light in the section between the objective lens 20 and the condensing lens 14. Therefore, even if the objective distance a to the object T changes, the optical path is changed in the section from the objective lens 20 to the detection surface I by replacing the objective lens 20 with a focal length corresponding to the objective distance a. It becomes constant. For this reason, it is possible to deal with a wide range of objective distances a, and the measurement range can be greatly expanded.
  • SYMBOLS 10 Distance measuring device, 14 ... Condensing lens, 15 ... Double-sided half mirror, 16 ... Photodetection element, 17 ... Distance calculation part, T ... Object, Q ... Imaginary spot, I ... Detection surface, a ... Objective distance, p ... interference fringe pitch.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

La présente invention consiste : d'abord à concentrer la lumière réfléchie par un objet (T) sur un point imaginaire (Q) à l'aide d'une lentille de concentration de lumière (14) ; puis à la séparer en deux faisceaux lumineux de sortie, à l'aide d'un demi-miroir à deux surfaces (15) ; à la sortir par une seconde surface faisant face à une première surface sur laquelle la lumière réfléchie est incidente ; à utiliser un élément de photodétection (16) pour détecter une frange d'interférence produite sur une surface de détection (I) par les deux faisceaux lumineux de sortie ; à extraire un pas de frange d'interférence (p) en calculant les résultats de détection obtenus ; à utiliser une unité de calcul de distance (17) pour calculer la distance cible (a) de la lentille de captage de lumière (14) à l'objet (T), sur la base de ce pas (p). Par conséquent, il est possible de mesurer avec précision la distance cible (a) à un objet (T) à l'aide d'un système de lentille optique ayant une configuration simple.
PCT/JP2015/066469 2014-07-04 2015-06-08 Dispositif et procédé de mesure de distance WO2016002442A1 (fr)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0560652A (ja) * 1991-01-29 1993-03-12 Asahi Optical Co Ltd ダハ面の測定方法
JP2009180562A (ja) * 2008-01-29 2009-08-13 Tokyo Institute Of Technology 距離計測装置及び距離計測方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0560652A (ja) * 1991-01-29 1993-03-12 Asahi Optical Co Ltd ダハ面の測定方法
JP2009180562A (ja) * 2008-01-29 2009-08-13 Tokyo Institute Of Technology 距離計測装置及び距離計測方法

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