Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G54/00—Non-mechanical conveyors not otherwise provided for
  • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
  • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
  • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
  • F16C32/00—Bearings not otherwise provided for
  • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
  • F16C32/0406—Magnetic bearings
  • F16C32/0408—Passive magnetic bearings
  • F16C32/0436—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part
  • F16C32/0438—Passive magnetic bearings with a conductor on one part movable with respect to a magnetic field, e.g. a body of copper on one part and a permanent magnet on the other part with a superconducting body, e.g. a body made of high temperature superconducting material such as YBaCuO
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67706—Mechanical details, e.g. roller, belt
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
  • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
  • H01L21/67715—Changing the direction of the conveying path
• • H—ELECTRICITY
  • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
  • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
  • H02N15/04—Repulsion by the Meissner effect
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
  • F16C13/00—Rolls, drums, discs, or the like; Bearings or mountings therefor
  • F16C13/006—Guiding rollers, wheels or the like, formed by or on the outer element of a single bearing or bearing unit, e.g. two adjacent bearings, whose ratio of length to diameter is generally less than one
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
  • F16C2326/00—Articles relating to transporting
  • F16C2326/58—Conveyor systems, e.g. rollers or bearings therefor

Definitions

• the invention relates to a transport system with a plurality of along a transport path arranged and each rotatably mounted relative to a base body, rotationally metric trained rolling elements for supporting transport goods to be conveyed.
• a conveyor system in which a plurality of identically designed ball roller transport units are arranged on a ball platform to form a support surface, pushed over the objects to be transported, such as containers with low friction who can.
• the individual ball roller transport unit essentially comprises a spherical support shell with a plurality of support balls arranged therein, on which a ball is rotatably mounted in order to hang the object thereon. It can be provided to store the ball sprung to allow a limited up and down movement a uniform distribution of the load on several ball roller transport units.
• the object of the invention is to provide a transport system which is designed for use in clean rooms and / or for the transport of highly sensitive goods to be transported. This object is achieved for a transport system of the type mentioned with the features of claim 1.
• the rolling elements and the base body form a magnetic bearing device, which is designed for contactless mounting of the rolling elements relative to the base body and which comprises a superconducting system and a permanent magnet system which are matched to one another for mutually contactless provision of supporting forces.
• a frictional, rotatable mounting of the running ball is provided on a plurality of supporting balls, which in turn are rotatably received in a support shell.
• a contactless mounting of the rolling elements relative to the base body is provided in the transport system according to the invention. Through this contactless storage eliminates a direct mechanical contact between the rolling elements and the
• the rolling elements and the base body comprise a superconductor system and a permanent magnet system for the mutual exertion of supporting forces.
• the superconductor system is preferably one or more bodies made of a material that can be heated by tempering to or below a material-specific transition temperature. has superconducting properties, which includes a displacement of an external magnetic field and is utilized for the contactless mounting of the rolling elements.
• the use of so-called high-temperature superconductors is provided for the superconductor system according to the invention, which have superconducting properties even at temperatures above 23 Kelvin, in particular even at a temperature of 77 Kelvin, which corresponds to the boiling temperature of the liquid nitrogen, thereby providing relatively long-lasting cooling of the superconductor system can be ensured at or below the transition temperature.
• the permanent magnet system is adapted to the properties of the superconductor system in such a way that a rotationally movable mounting of the rolling elements is ensured at least about one axis of rotation, preferably about a plurality of axes of rotation, in particular about any axis of rotation.
• the superconductor system is assigned to the main body and if the permanent magnet system comprises several of the rolling elements which are each equipped with a permanent magnet arrangement.
• the superconductor system By assigning the superconductor system to the main body, a simple structure for the superconductor system can be realized.
• a central cooling is provided for a plurality of superconductors of the superconductor system, in particular for all superconductors of the superconductor system.
• This central cooling can optionally be realized by means of a liquefied gas, in particular by means of liquid nitrogen, which is accommodated in a tank system and which surrounds the superconductors of the superconductor system.
• a plurality of the rolling elements are equipped with a permanent magnet arrangement, each providing a magnetic field to or is below the Sprungtem ⁇ temperature as it were "frozen” in the respective superconductor during cooling of the superconductors. Subsequently, a change of the spatial Location of each equipped with a permanent magnet assembly rolling elements relative to the respective superconductor to reaction forces on the rolling elements, whereby the at least substantially stationary positioning of the rolling elements can be achieved.
• the permanent magnet arrangement of the rolling element is designed for providing a rotationally symmetrical magnetic field to the axis of rotation. This ensures that the appropriately equipped rolling element can rotate about the axis of rotation, without thereby reaction forces are exerted starting from the superconductor.
• the rolling element is designed in the manner of a circular-cylindrical and in the axial direction along a cylinder axis magnetized bar magnet.
• the respective rolling element During commissioning of the transport system, that is, during the cooling of the superconductor at or below the transition temperature, the respective rolling element has to be so in terms of its magnetic field be aligned with respect to the superconductor, as its axis of rotation should be aligned in the subsequent operation, since with the successful cooling to or below the transition temperature, the determination for the reaction force-free alignment for the rolling element takes place.
• rotational axes of the rolling elements are arranged in a common transport plane and / or in predetermined angular positions, in particular parallel, aligned with each other.
• the respective item to be transported can be transported over the rolling elements at least virtually without vibration.
• it is advantageous at least in the case of identically designed rolling elements if their axes of rotation are arranged in a common transport plane.
• the axes of rotation of the rolling elements are aligned in predefinable angular positions relative to one another in order to be able to ensure transport of the transported goods with as little friction as possible, preferably virtually frictionless.
• an arrangement of contact surfaces of the respective rolling elements is provided in a common transport plane as an alternative to the arrangement of the axes of rotation of the rolling elements in a common transport plane, said contact surfaces are those surfaces on the rolling elements in contact can come with the transported goods to be conveyed.
• the cargo can be transported along a straight transport route.
• the axes of rotation of the rolling elements are parallel to each other. aligned with each other.
• the rolling elements along the transport path in a fixed pitch, so are equidistant, at least at any point along the transport path and at any time during the transport of a cargo at least a certain number of rolling elements in touching contact with the transported to keep.
• the rolling element is designed as a permanent magnet arrangement.
• a particularly simple construction method for the respective rolling element is made possible, in particular in the case of a rod-shaped configuration of the rolling element, since in this case it is possible to make use of bar magnets manufactured in a cost-effective manner.
• a coating of the rolling element in particular with a plastic layer, can be provided.
• the rolling element of the permanent magnet arrangement and optionally from an associated Beschich device.
• a drive means is arranged, which is designed for a contactless torque introduction to at least one rolling element to effect a winningbewe supply for the transported goods.
• the torque input is torque input with respect to the axis of rotation of the respective rolling element provided so that it can already be moved without touching contact with the cargo in a Rotationsbe movement and low approaching or preferably without jerking a conveying movement can exert on the cargo at approaching cargo.
• a control or regulation for the drive means may be provided. hen to be able to provide a constant conveying movement or adapted to external conditions, speed variable conveying movement for the transported goods.
• the drive means may be, ei ⁇ nen electric motor or a fluid rotary drive in particular.
• the contactless torque input from the drive means to the respective rolling element is preferably realized by means of a magnetic coupling.
• permanent magnets corresponding to one another on both the rolling element and the drive means can be provided, which are ideally arranged away from the permanent magnet arrangement of the respective rolling element and are at least almost completely outside the sphere of influence of the superconductor.
• suitable shielding means may be provided to enable the magnetic fields of the magnetic coupling independently of the superconductors in a rotational movement about the axis of rotation of the rolling element can.
• a movable, in particular pivotable, arrangement of the superconductor system or individual superconductor of the superconductor system is provided on the main body to allow influencing a spatial orientation and / or position of rolling elements.
• individual superconductors of the superconductor system can be arranged pivotably on the base body, for example, by pivoting one or more superconductors, in particular about a pivot axis transverse to the axis of rotation, a selective diversion of transport goods to allow in the manner of a switch along at least two different transport routes.
• some of the superconductor of the superconductor system are at least depending ⁇ wells coupled to a stepper motor that enables an at least almost free of misalignment for the respective Supra ⁇ ladder about a pivot axis transverse to the transport plane.
• the base body is accommodated in a first spatial area and that the rolling elements are accommodated in a second spatial area, wherein the second spatial area is separated from a partition wall with respect to the first Jardinbe ⁇ rich.
• Such an embodiment of the transport system is of particular interest when used in clean rooms in which the rolling elements are arranged in a clean room area with a higher clean room class (lower particle density and / or particle size) than the main body, which in turn in a clean room area low clean room class (higher particle density and / or Pelleg ⁇ size) is arranged. Due to the contactless provision of support forces can thus a conveying movement for the
• the rolling element spherical or circular cylindrical or conical or as an arrangement of a first, rotationally symmetric portion and a along the axis of rotation adjacent to the first section second, in particular rotationally symmetric, section is formed.
• a spherical configuration of the rolling elements is of particular interest when individual superconductor of the superconductor system are arranged to be movable, in particular schwenkbeweg ⁇ Lich on the base body, a type of switching function for the transport system and along at least two different transport paths is provided to be conveyed transport goods.
• a circular cylindrical or conical configuration of the rolling elements enables a cost-effective production of the rolling elements, in particular based on bar magnets. It is in the conical geometry of the rolling elements, which is provided rotationally symmetrical to the axis of rotation, a centering effect for the transported goods to be transported possible.
• a marginal boundary of a transport path for the transported goods to be transported can be realized if the goods to be transported rest on the first rotationally symmetrical sections with a smaller diameter and possibly come to rest on the second sections when they may deviate from the intended transport route.
• Figure 1 is a plan view of a first embodiment of a transport system with two rows of parallel a spherical cross-sectional view of the transport system according to the figure 1, a schematic representation of a spherical rolling element for use in the transport system according to Figures 1 and 2, a second embodiment of a transport system with roller-shaped rolling elements, each having drive means for initiating conveying movements a side view of the second embodiment of the transport system according to the figure 4, a detailed view of the roller-shaped rolling element from the transport system according to Figures 4 and 5, an end view of the rolling element from the transport system according to Figures 4 and 5, a third embodiment of a transport system in which spherical rolling elements at least partially with rotatably mounted superconductors are in a non-contact force-transmitting relationship, in Figure 8, all rolling elements with parallel aligned rotational axes are provided for a straightforward promotion of goods transported, 9 shows a second operating situation for the transport system according to FIG. 8 with partially pivoted rotational axes of the rolling elements
• Figure 10 is a schematic sectional view of a coated spherical rolling element for use in the first or third embodiment of the transport system.
• a first embodiment of a transport system 1 shown in FIGS. 1 and 2 is designed for transporting exemplarily plate-shaped transport goods 2 along a transport path 3.
• the transported goods 2 may be, for example, semiconductor substrates (wafers), sample carriers for chemical or biological laboratory equipment or other sensitive goods.
• the transport path 3 is rectilinear.
• a transport system may also have a curved, possibly also curved in several spatial ⁇ directions, embodiment of a transport route.
• the transport system 1 shown in FIGS. 1 and 2 comprises a plurality of ball-shaped rolling elements 4, each of which is arranged in two parallel rows along the transport path 3.
• Each of the rolling elements 4 due to its properties described in more detail below, has a predeterminable axis of rotation, which is preferably identical to a rotational symmetry axis of the outer shape of the rolling elements 4.
• the rotation axis 5 is identical to a non-designated ball axis of the rolling elements. 4
• the transport system 1 comprises an exemplary box-shaped base body 6, the longest edge 7 also extends parallel to the transport path 3 and the example has a cuboid shape.
• a plurality of pieces of material, in particular pieces of strip, of a metallic or ceramic material arranged along the transport path 3 in a predeterminable division are assigned to the main body.
• the material reaches superconducting properties when it reaches or falls below a material-specific transition temperature having.
• These material sections, in particular band pieces, are referred to as superconductor 8 in the sense of the patent application.
• the superconductors 8 have a circular-cylindrical shape and are arranged in a channel-shaped, groove-like recess 9 in the base body 6.
• the superconductors 8 are arranged by spacers 10 at a predeterminable distance from a base surface 11 of the recess and form a superconductor system 22.
• the spacers 10 and the superconductors 8 are formed such that surfaces 12 of the superconductors 8 are arranged in a common termination plane.
• the recess 9 is formed such that between the superconductors 8 and the side surfaces 15, 16 of the recess 9 each still 1 gap exists.
• the recess 9 in the base body 6 is closed by way of example by a closure plate 17, which rests on the surfaces 12 of the superconductor 8 by way of example.
• a closure plate 17 which rests on the surfaces 12 of the superconductor 8 by way of example.
• One of the recess 9 and the end plate 17 limited and at least partially filled by the superconductors 8 and the spacers 10 cavity 18 within the body 6 is exemplified for receiving a cooling fluid.
• the cooling fluid is liquid nitrogen, which enables having a boiling ⁇ temperature of 77 Kelvin cooling of so-called high-temperature superconductor materials, such as yttrium barium copper oxide whose critical temperature, and thus can ensure the provision of the superconducting properties of high temperature superconductor used.
• the cavity 18 is connected in a fluidically communicating manner by a channel system (not shown in greater detail) with a tank region 19, which is arranged centrally in the base body 6. In this way, under the condition of a suitable choice of material for the base body 6 and possibly made, not shown insulation measures, a longer-lasting cooling of the superconductor 8 can be maintained without the need for a constant supply of cooling fluid such as liquid nitrogen is necessary.
• foreign-powered cooling means such as an electric cooling, which may be formed, for example, as a pulse tube cooler in the manner of a Stirling engine provided.
• the ball-shaped rolling elements 4 are produced in the transport system 1 according to FIGS. 1 and 2 by way of example as a permanent magnet arrangement 14 made of a permanent magnetic material and form in their entirety a permanent magnet system 23.
• a magnetization of the permanent magnet assembly 14 may be provided, as shown in Figure 3. It is provided that the magnetic field provided by the rolling element 4 is rotationally symmetrical to the axis of rotation 5, so that upon rotation of the rolling element 4 about its axis of rotation 5 no reaction forces caused by the respective associated superconductor 8.
• the transport system 1 can be provided, for example, to insert the rolling elements 4 in similar recesses of a plane parallel plate, not shown, which in turn is placed on the end plate 17.
• the arrangement of the rolling elements 4 is determined both along the transport path 3 and transversely thereto.
• the cavities 18 and the tank area 19 are filled with the cooling fluid, in particular liquid nitrogen, so that the desired cooling of the superconductors 8 takes place and the magnetic fields of the rolling elements 4 are effectively "frozen" in the superconductors 8.
• the transport system 1 shown in FIGS. 1 and 2 also has shock-absorbing properties which are of advantage in particular for the transport of sensitive goods to be transported.
• a deflection of the rolling elements 4 from the preferred position which is determined by the "freezing" of their magnetic field in the respective associated superconductor 8
• reaction forces to the deflected rolling element by the each associated superconductor.
• these reaction forces do not lead to a limitation of the movement of the rolling element 4 starting from its preferred position.
• a lower mass for the rolling elements are provided to ensure advantageous shock absorption properties in this area, while otherwise along the transport path rolling elements are provided with higher mass, the ensure a promotion of the transport goods in a transport level.
• FIG. 2 shows a partition wall 21 arranged between the rolling elements 4 and the main body 6, which may, for example, be a wall section of a clean room.
• the rolling elements 4 are arranged within a first spatial region in which higher demands on a Particle density and particle size are made as in a separated by the partition wall 21 space in which the base body 6 is arranged. Due to the contactless
• FIG. 31 The illustrated in Figures 4 to 7 second execution ⁇ form of a transport system 31 differs from that shown in Figures 1 to 3 transport system 1, characterized in that the rolling elements 34 are formed as an array of circular-cylindrical portions with mutually concentric axes, as described in more detail below becomes. Furthermore, the transport system 31 differs from the transport system 1 in that instead of the fluid cooling, in particular by means of liquefied nitrogen, an electrical cooling is provided, as shown schematically in FIG. In addition, the transport system 31 is independent of the selected type of cooling for active promotion of
• Transportguts 2 provided and has accordingly on
• Base body 36 arranged drive means which are provided for the introduction of torques about the respective axes of rotation 35 of the rolling elements 34.
• the transport system 31 is formed as an example as a module, which is provided for a one-sided support of the transported material 2.
• Transport of the goods to be transported 2 are accordingly 2 mirror images of each other arranged transport systems 31 provide.
• the transport system 31 in each case superconductors 38 are arranged in the same pitch along the transport path 33 in the base body 36 in conformity with the transport system 1. Notwithstanding the transport system 1 is the transport system 31st purely exemplarily provided an electrical cooling of the superconductor 38. This is achieved by means of a cooling device 39 arranged in the base body 36, which may be, for example, a cooling compressor or a heat pump.
• the cooling device 39 communicates with the superconductors 38 via cooling lines 40 in a heat-transmitting connection and can accordingly draw off heat from the superconductors 38, so that they can be cooled to one or below a transition temperature.
• the transport system 31 can be operated almost indefinitely provided that the permanent provision of electric power is provided.
• the rolling elements 34 have three rotationally symmetrical sections 42, 43 and 44, each formed in a circular-cylindrical manner.
• the first portion 42 of the rolling element 34 serves to support the transport good 2 and can be made for example of a plastic material.
• a second section 43 is formed of the rolling element 34 as a permanent magnet arrangement, wherein a magnetic field of the permanent magnet assembly rotations - symmetrically to the rotational axis 35 of the rolling element out forms ⁇ 34 is.
• the second section 43 is an arrangement of two circularly cylindrical bar magnets, which are fastened to one another with end faces of the same direction, so that poles in the same direction are present on mutually repellent end faces of the second section 43.
• the third portion 44 Adjacent to the second portion 43, the third portion 44 is arranged, which is a component of a magnetic coupling 45, which is provided for a torque transmission between the drive means 41 and the rolling element 34.
• the third section 44 is a combination of a magnetized in the radial direction, circular cylindrical permanent magnet portion 46 and a permanent magnet portion 46 surrounding shielding ring 47.
• the shield ring 47 is made of a material having strong damping properties for magnetic fields, so that an interaction of the permanent magnet portion 46 with the superconductor 38th is minimized or disappears and only an axial, torque-transmitting interaction with the oppositely disposed drive means 41 is made possible.
• a magnetic element 50 is arranged, as the third section
• the magnetic element 50 has the same construction as the third section 44 of the rolling element 34, wherein the respectively opposite opposing poles of the permanent magnet sections 46 allow a torque transmission between the drive means 48 and the rolling element 34.
• a peripheral boundary of the transport path 33 is also effected, so that the cargo 2 transversely to the transport path 33 is transported in a predetermined area and when leaving this area starts against the annular end face of the second section 43, in order subsequently to be conveyed further in the direction of the transport path 33.
• the transport system 51 in the third embodiment of a transport system 51 shown in FIGS. 8 and 9, basically the same structure as in the transport system 1 is selected. Allerding, the transport system 51 by way of example four mutually pa rallele rows of rolling elements 4, at least eini ge of the supra side not shown in Figures 8 and 9 pivotally to normal to the transport plane 70, which corresponds to the representation level of Figures 8 and 9, pivotally mounted bar are.
• the transport system spacers are rotatably received in the base body 56 and are connected to pivot drives, not shown, which allow the desired pivoting movement about the respective pivot axes.
• the axes of rotation 5 are all of the rolling elements
• a curved transport path 55 can be specified for a cargo 2, so that the transport system 51, for example, in the manner of a switch for an individual change de Transport distance 53, 54 or 55 of a transported goods to be transported 2 can be adjusted.
• the rolling element 4 known from FIG. 3 is additionally provided with a coating 65, which may be adapted, for example, to the transport item 2 to be transported and which is an example Plastic coating can act.
• insbesonde re band-shaped formed superconductor can be used instead of the cylindrically shaped superconductor and other shaped superconductors.

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• Engineering & Computer Science (AREA)
• Manufacturing & Machinery (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Combustion & Propulsion (AREA)
• Chemical & Material Sciences (AREA)
• Rollers For Roller Conveyors For Transfer (AREA)
• Magnetic Bearings And Hydrostatic Bearings (AREA)

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• 2014
  • 2014-07-02 DE DE112014006700.8T patent/DE112014006700B4/de active Active
  • 2014-07-02 WO PCT/EP2014/001815 patent/WO2016000731A1/de active Application Filing
  • 2014-07-02 CN CN201480080352.0A patent/CN107074453B/zh active Active

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