WO2015192520A1

WO2015192520A1 - Touchscreen, manufacturing method therefor, and display apparatus

Info

Publication number: WO2015192520A1
Application number: PCT/CN2014/087138
Authority: WO
Inventors: 刘广辉; 李文波; 杨添
Original assignee: 京东方科技集团股份有限公司
Priority date: 2014-06-20
Filing date: 2014-09-23
Publication date: 2015-12-23
Also published as: CN104090676A; CN104090676B

Abstract

A touchscreen, a manufacturing method therefor, and a display apparatus. The touchscreen comprises a first base palate (100) comprising a first substrate (10) and a second base plate (200) comprising a second substrate (20), wherein the first base palate (100) is opposite to the second base plate (200), and also comprises first electrodes (21) forming multiple rows along a first direction (101), second electrodes (22) forming multiple rows along a second direction (102), and a nano-piezoelectric unit layer (11) formed on the first substrate (10). The nano-piezoelectric unit layer (11) comprises a first linear nano-piezoelectric material growing vertically along the first substrate (10), or comprises at least one linear piezoelectric material lay growing in parallel along the first substrate (10) at a position where the first electrodes (21) and the second electrodes (22) are intersected.

Description

Touch screen, manufacturing method thereof, and display device

Technical field

At least one embodiment of the present invention is directed to a touch screen, a method of fabricating the same, and a display device.

Background technique

Touch screen, also known as "touch screen" or "touch panel", is the most simple, convenient and natural human-computer interaction method. It gives multimedia a new look and is very attractive new. Multimedia interactive device.

Currently common touch screen methods are resistive and capacitive. The resistive touch screen includes a first substrate 10, a first electrode 21 disposed on the first substrate 10, a second substrate 20, and a first substrate 20 disposed on the second substrate 20, as shown in FIG. Two electrodes 22. As shown in FIG. 1 , the resistive touch screen uses the touch pressure (for example, the pressure of the finger 30 in FIG. 1 ) to cause the first electrode 21 and the second electrode 22 to contact, thereby changing the resistance value in the touch loop, thereby determining the touch. Control position.

The circuit principle of the capacitive touch screen is as shown in FIG. 2, which mainly utilizes a human body electric field. When the finger 30 touches the screen, the capacitances of the first electrode 21 and the second electrode 22 at the touch position change, so that the touch can be detected. Control position.

Summary of the invention

At least one embodiment of the present invention provides a touch screen, a method for fabricating the same, and a display device, which solve the problem of power consumption and limited operation of the touch screen.

At least one embodiment of the present invention provides a touch screen including: a first substrate including a first substrate and a second substrate including a second substrate, a first electrode, a second electrode, and the A layer of nano-piezoelectric cells on the first substrate. The first electrodes are formed in a plurality of rows along a first direction, and the second electrodes are formed in a plurality of rows along a second direction, the first direction and the second direction being different; the nano-piezoelectric unit layer comprising a linear nano piezoelectric material vertically grown on the first substrate, or the nano piezoelectric unit layer including parallel growth along the first substrate at a position corresponding to intersection of the first electrode and the second electrode At least one layer of linear piezoelectric material.

At least one embodiment of the present invention provides a display device including a display screen and the present invention In the above touch screen provided by the embodiment, the touch screen is located on the light exiting side or the backlight side of the display screen.

At least one embodiment of the present invention provides a method of fabricating a touch screen, comprising: forming a first substrate including a first substrate and a second substrate including a second substrate; forming a first electrode, a second electrode, and forming a nano piezoelectric unit layer on the first substrate; and a pair of the first substrate and the second substrate. The first electrodes are formed in a plurality of rows along a first direction, and the second electrodes are formed in a plurality of rows along a second direction, the first direction and the second direction being different; the nano-piezoelectric unit layer comprising a linear nano piezoelectric material vertically grown on the first substrate, or the nano piezoelectric unit layer includes at least one straight line growing parallel along the first substrate at a position corresponding to the intersection of the first electrode and the second electrode Type piezoelectric material layer.

DRAWINGS

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments will be briefly described below. It is obvious that the drawings in the following description relate only to some embodiments of the present invention, and are not intended to limit the present invention. .

1 is a schematic diagram of a resistive touch screen;

2 is a schematic diagram of a capacitive touch screen;

FIG. 3 is a schematic diagram of a touch screen according to an embodiment of the present disclosure;

4 is a schematic top plan view of a first electrode and a second electrode;

FIG. 5 is a schematic diagram of another touch screen according to an embodiment of the present disclosure;

FIG. 6 is a schematic diagram of another touch screen according to an embodiment of the present disclosure;

FIG. 7 is a schematic diagram of a method for fabricating a touch screen according to an embodiment of the present invention; FIG.

FIG. 8 is a schematic diagram of a method for forming a nano piezoelectric unit layer according to an embodiment of the present invention; FIG.

FIG. 9 is a schematic diagram of a method of forming a first electrode and a second electrode according to an embodiment of the present invention; FIG.

FIG. 10 is a schematic diagram of another touch screen according to an embodiment of the present disclosure;

FIG. 11 is a schematic diagram of another touch screen according to an embodiment of the present disclosure;

FIG. 12 is a schematic diagram of another touch screen according to an embodiment of the present disclosure;

FIG. 13 is a schematic diagram of another touch screen according to an embodiment of the present disclosure;

FIG. 14 is a schematic diagram of a layer of a nano piezoelectric unit according to an embodiment of the present invention; FIG.

FIG. 15 is a schematic diagram of a method of forming a second electrode according to an embodiment of the present invention; FIG.

16 is a layer of forming a first electrode, a second electrode, and a nano piezoelectric unit according to an embodiment of the present invention. Schematic diagram of the method.

Reference mark:

10-first substrate; 11-nanometer piezoelectric unit layer; 12-layer underlayer; 20-second substrate; 21-first electrode; 22-second electrode; 23-auxiliary electrode; 30-finger; a spacer; 100-first substrate; 200-second substrate.

detailed description

The technical solutions of the embodiments of the present invention will be clearly and completely described in the following with reference to the accompanying drawings. It is apparent that the described embodiments are a part of the embodiments of the invention, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the described embodiments of the invention, without departing from the scope of the invention, are within the scope of the invention.

The inventors of the present application have noted that the resistive touch panel shown in Fig. 1 requires that the first electrode 21 and the second electrode 22 must ensure that the current is always turned on when there is no touch action, which increases the power consumption of the device. Moreover, when the two touch points are too close, the resistance sensor cannot distinguish whether it is one point or two points, thereby causing recognition errors, so that the accuracy is not high. The capacitive touch screen shown in Fig. 2 needs to be operated with a finger, is not recognized for an insulating object, and does not support other object operations, which limits the use range of the capacitive touch screen. At the same time, the surface of the capacitive touch screen panel must be kept clean, and any static stains, mist, etc. can cause misoperation.

For example, in the above touch screen, when the nano-piezoelectric unit layer includes a linear nano-piezoelectric material vertically grown along the first substrate, the second substrate is formed with the non-contacting ones on the second substrate a first electrode and the second electrode. For example, in the above touch screen, when the nano piezoelectric unit layer includes at least one layer of a linear piezoelectric material grown in parallel along the first substrate, The second electrode is disposed on the second substrate, and the first electrode is disposed on the first substrate.

At least one embodiment of the present invention provides a method of fabricating a touch screen, including forming a first substrate including a first substrate and a second substrate including a second substrate; forming a first electrode, a second electrode, and forming a nano piezoelectric unit layer on the first substrate; and a pair of the first substrate and the second substrate. The first electrodes are formed in a plurality of rows along a first direction, and the second electrodes are formed in a plurality of rows along a second direction, the first direction and the second direction being different. The nano-piezoelectric unit layer includes a linear nano-piezoelectric material vertically grown along the first substrate; or the nano-piezoelectric unit layer includes a rim along a position corresponding to a intersection of the first electrode and the second electrode At least one layer of linear piezoelectric material in which the first substrate is grown in parallel.

For example, when the nano-piezoelectric unit layer includes a linear nano-piezoelectric material vertically grown along the first substrate, the first electrode and the first electrode that are not in contact with each other are formed on the second substrate Second electrode. For example, when the nano-piezoelectric cell layer includes at least one layer of a linear piezoelectric material grown in parallel along the first substrate, the second electrode is formed on the second substrate, The first electrode is formed on the first substrate.

At least one embodiment of the present invention provides a touch screen, as shown in FIG. 3, including a first substrate 100 including a first substrate 10 and a second substrate 200 including a second substrate 20, a first electrode 21 (not shown in FIG. 3), a second electrode 22, and a nano-piezoelectric unit layer 11 formed on the first substrate 10. The nano-piezoelectric unit layer 11 includes a linear nano-piezoelectric material that grows vertically along the first substrate 10. Forming a first electrode 21 and a second electrode 22 that are not in contact with each other on the second substrate 20, as shown in FIG. 4, the first electrode 21 is formed in a plurality of rows along the first direction 101, the second The electrodes 22 are formed in a plurality of rows along the second direction 102, the first direction 101 being different from the second direction 102.

It should be noted that the first direction and the second direction are different, that is, the first direction and the second direction necessarily intersect. In the embodiment of the present invention, as shown in FIG. 4 , the first direction 101 and the second direction 102 are perpendicular to each other as an example for detailed description. Regarding the linear nano piezoelectric material vertically grown along the first substrate, the linear nano material refers to a central axis of the nano material, and a central axis of the linear nano piezoelectric material The first substrate is vertical. In the embodiment of the present invention, the nano piezoelectric unit layer includes a linear nano piezoelectric material vertically grown along the first substrate, that is, as shown in FIG. 3, the linear nano piezoelectric material and the first substrate 10 Vertical, and the nano-piezoelectric material is a vertical straight line. When a piezoelectric material vertically grown along the first substrate is subjected to a force The bending property (in this case, the non-linear type) has piezoelectric characteristics. That is, the nano-piezoelectric material is deformed by pressing under pressure, so that a piezoelectric potential can be generated to generate a Schottky junction; the generated current is respectively derived from the first electrode and the second electrode, and the processor is based on the current outflow position. The touch position and gesture action can be determined. The stretching and extrusion of the nano-piezoelectric material will produce an electric field in the opposite direction, that is, two electric fields in opposite directions will be generated on both sides of the meso-plane in the axial direction. Therefore, the tensile surface of the cross section is always a positive potential, the pressing surface is a negative potential, the middle surface is connected to the growth substrate to a zero potential, and the positive potential of the tensile surface of the cross section is curved with the nanorod. The degree is proportional, the larger the bend, the higher the potential. As shown in FIG. 5, when the linear nano-piezoelectric material of the nano-piezoelectric unit layer 11 is deformed by being pressed, it is bent, and has a positive potential on the stretching surface and a negative potential on the pressing surface. Since the first electrode and the second electrode are formed on the second substrate 20, when the stretching surface of the linear nano piezoelectric material is in contact with the first electrode, and the pressing surface is in contact with the second electrode, the current is respectively determined by the first The electrode layer and the second electrode layer are derived, and the processor can determine the touch position and the gesture action according to the current outflow position to implement the touch function.

In addition, in all embodiments of the present invention, the first electrode and the second electrode may be a driving electrode and a sensing electrode, respectively, that is, the first electrode is a driving electrode, and the second electrode is a sensing electrode; or The first electrode is a sensing electrode, and the second electrode is a driving electrode.

The first electrode and the second electrode are not in contact with each other. For example, an insulating layer may be formed between the first electrode and the second electrode, the first electrode and the second electrode being respectively located on both sides of the insulating layer, that is, formed on different layers. For example, the first electrode may be disconnected at a position corresponding to the second electrode, and then electrically connected through a via or the like, that is, the first electrode and the second electrode are located in the same layer. The embodiment of the invention is exemplified by the disconnection of the first electrode at a position corresponding to the second electrode.

In the embodiment of the present invention, the first substrate and the second substrate may be a base substrate, and may be, for example, a glass substrate, or may be another film or layer structure or the like.

The touch screen provided by the embodiment of the invention adopts a piezoelectric effect self-power generation technology of a nano array, and when the pressure is applied to the surface of the touch screen, the linear nano piezoelectric material of the nano piezoelectric unit layer is bent on the stretching surface. The positive potential is a negative potential on the pressing surface, and the piezoelectric potential and current are generated by the piezoelectric effect, and then derived by the first electrode and the second electrode, so that the touch position and the gesture action can be determined, and the touch function can be realized. Compared with common resistive screens and capacitive screens, the touch screen can generate current from the touch screen itself through the piezoelectric effect, and does not require an external power supply, which can reduce the power consumption of the device. And the piezoelectric current is generated by the pressure, and the pressure on the touch screen can be an electric conductor, It can be an insulator, so other static stains, mists, etc. will not affect the touch operation, which makes the touch screen more applicable.

In one embodiment, as shown in FIG. 5, the first electrode 21 (not shown) and/or the surface of the second electrode 22 are formed with a microstructure. In one embodiment, as shown in FIG. 6, an auxiliary electrode 23 is further formed on the first electrode and/or the second electrode, and the surface of the auxiliary electrode 23 is formed with a microstructure. For example, the microstructure is a sawtooth structure. The microstructure is beneficial for improving the contact between the electrode and the nano-piezoelectric material, so that when the linear nano-material is deformed by pressure extrusion, it is advantageous for the current of the stretching surface and the pressing surface to pass through the microstructure respectively. Output through the first electrode and the second electrode. Of course, the microstructure may be other convex structures, etc., and the embodiment of the present invention is only described in detail by taking the microstructure as a sawtooth structure as an example.

For example, the auxiliary electrode is a metal electrode, and the first electrode and the second electrode are ITO electrodes. The metal layer has a high electron mobility and a small electrical resistance, but the adhesion of the metal is small, which is generally disadvantageous for being directly formed on a substrate such as a glass substrate. The ITO layer is an indium tin oxide indium tin oxide layer. The electric resistance of the ITO layer is larger than that of the metal layer, but the adhesion is good, and it is not easily peeled off on the substrate. In the embodiment of the present invention, the first electrode layer and the second electrode layer are ITO layers, and the auxiliary electrode layer is a metal layer as an example for detailed description.

In one embodiment, the first substrate 100 further includes a primer layer 12 between the first substrate 10 and the nano-piezoelectric unit layer 11, and the nano-piezoelectric unit layer 11 is formed in the Hit the bottom layer 12.

The underlayer may be a silicon nitride layer or the like, and since the linear nano piezoelectric material forming the nano piezoelectric unit layer is directly formed on the first substrate (for example, a glass substrate), it is difficult to pass through the glass. First, a bottom layer of a silicon nitride layer is formed on the substrate, and a linear nano-piezoelectric material is formed on the underlying layer, which is not only advantageous for the fabrication of the linear nano-piezoelectric material, but also the linear nano-piezoelectric material is formed on the substrate. The adhesion on the bottom layer is good and it is not easy to fall off.

In one embodiment, as shown in FIG. 3, FIG. 5, and FIG. 6, a spacer 40 is disposed between the first substrate 100 and the second substrate 200, and the spacer 40 makes the nanometer. The piezoelectric unit layer 11 is not in contact with the second substrate 200.

For example, the nano-piezoelectric material of the nano-piezoelectric unit layer does not generate current under normal conditions as long as it is linearly deformed without being subjected to pressure, in order to further ensure that the nano-piezoelectric material in the formed touch screen is not under pressure. In the case of a straight type, through the spacer, making it and the second substrate No contact, that is, no contact with the first electrode, the second electrode, and the auxiliary electrodes of the first electrode and the second electrode on the second substrate to improve the accuracy of the touch screen.

A spacer is disposed between the first substrate and the second substrate, the spacer causes the nano piezoelectric unit layer to be out of contact with the second electrode layer, and the spacer may be located as shown in FIG. The first substrate 10 and the second substrate 20 are located between the first electrode layer and the second electrode layer. The embodiment of the present invention is only exemplified by FIG. And the spacer may also be a frame sealant.

In various embodiments, the nano-piezoelectric unit layer may be a combination of one or a combination of linear nanotubes, nano-bars, and nano-rings arranged in an array. In one embodiment, the material forming the nano-piezoelectric unit is zinc oxide. That is, the material of the nano piezoelectric unit layer is zinc oxide nanotube, zinc oxide nano strip or zinc oxide nano ring. The material of the nano piezoelectric unit layer may also be a combination of any two or three of zinc oxide nanotubes, zinc oxide nanorods, and zinc oxide nanorings.

Of course, the material forming the nano-piezoelectric unit may be other materials, for example, silicon dioxide, gallium oxysulfide, etc., and the embodiments of the present invention are only described in detail by way of example.

In one embodiment, the nano-piezoelectric cell layers are array-arranged nanotubes. The transmittance of the nanotubes is higher than that of the nanorods and the nanorings.

At least one embodiment of the present invention provides a display device including a display screen and any of the above-described touch screens provided by the embodiments of the present invention, and the touch screen may be located on a light exiting side or a backlight side of the display screen.

In one embodiment, the nano-piezoelectric cell layer of the touch screen comprises array-arranged nanotubes, and the touch screen is located on the light-emitting side of the display screen. The nanotubes have better light transmittance than the nanorods or the nano strips, and the touch screen of the nanotubes can be disposed on the light emitting surface of the touch screen, which is more favorable for improving the precision of the touch.

At least one embodiment of the present invention provides a method for fabricating a touch screen provided by an embodiment of the present invention. As shown in FIG. 7, the method includes the following steps 101 to 103.

Step 101: Form a first substrate including a first substrate and a second substrate including a second substrate.

Step 102, forming a first electrode, a second electrode, and a nano piezoelectric unit layer.

For example, a nano-piezoelectric cell layer is formed on the first substrate. The nano-piezoelectric cell layer includes a linear nano-piezoelectric material grown vertically along the first substrate. Forming a first electrode and a second electrode that are not in contact with each other on the second substrate, the first electrode forming a plurality of rows along the first direction, the second electrode forming a plurality of rows along the second direction, the first direction Different from the second direction.

In one embodiment, a nano-piezoelectric cell layer of a zinc oxide nano-array is formed on a first substrate. For example, a zinc oxide nano array can be formed on the first substrate by a PECVD (Plasma Enhanced Chemical Vapor Deposition) method.

In one embodiment, a zinc oxide nanotube can be formed on the first substrate. The preparation of the nanotubes may be based on the nanowires, using 0.3 mol per liter of sodium hydroxide or the like to etch the prepared nanowires, and etching in a water bath at about 85 ° C for less than 30 minutes. That is, the nanobars can be etched into nanotubes. Nanotubes can significantly improve the light transmission of the touch screen.

In one embodiment, as shown in FIG. 8, forming the nano-piezoelectric cell layer on the first substrate may include the following steps 1021a and 1022a.

Step 1021a, forming a primer layer on the first substrate.

For example, the underlayer may be a silicon oxide layer or a silicon nitride layer or the like. Forming the underlayer on the first substrate may, for example, form a silicon oxide film on the surface of the first substrate by spin coating or the like.

Step 1022a, forming a nano piezoelectric unit layer on the underlayer.

That is, a nano piezoelectric unit layer is formed on the first substrate on which the underlayer is formed. A method of forming a nano-piezoelectric unit layer can be referred to the above embodiment.

For example, as shown in FIG. 9, the forming the first electrode and the second electrode may include: step 1023a, forming first and second electrodes that are not in contact with each other on the second substrate. The first electrodes are formed in a plurality of rows along a first direction, and the second electrodes are formed in a plurality of rows along a second direction, the first direction and the second direction being different.

For example, a first electrode may be formed on the second substrate, and then an insulating layer may be formed at an intersection of the first electrode and the second electrode, and then a second electrode may be formed on the second substrate. For example, the first electrode and the second electrode that are not in contact with each other may be formed by one patterning process; the first electrode may be formed in a plurality of rows along the first direction, and the first electrodes in the same row are in direct contact with the electrical connection; the second electrode A plurality of rows are formed in the second direction, and the second electrodes in the same row are disconnected at the first electrode, and the second electrodes located in the same row are electrically connected through the connecting wires.

In various embodiments, after forming the first electrode and the second electrode that are not in contact with each other on the second substrate, forming the first electrode and the second electrode may further include: at the first electrode and/or The surface of the second electrode forms a microstructure.

In an embodiment, the forming the first electrode and the second electrode may include: step 1024a, An auxiliary electrode is formed on the first electrode and/or the second electrode, and the surface of the auxiliary electrode is formed with a microstructure.

Step 103: Pair the first substrate and the second substrate with a box.

For example, the first substrate and the second substrate pair cassette may include: forming a spacer between the first substrate and the second substrate, and then pairing the first substrate and the second substrate with a box, The spacer causes the nano-piezoelectric unit layer to be out of contact with the second substrate.

At least one embodiment of the present invention provides a touch screen, as shown in FIG. 10, including opposing first and

second substrates

100 and 200, a first electrode 21, a second electrode 22, and a nano-piezoelectric layer 11. The second substrate 200 includes a second substrate 20; the first substrate 100 includes a first substrate 10. The first electrode 21 is disposed on the first substrate 10 and formed in a plurality of rows along a first direction, and the second electrode 22 is disposed on the second substrate 20 and forms a plurality of rows in a second direction, The first direction is different from the second direction (the top view of the first electrode 21 and the second electrode 22 is as shown in FIG. 3). As shown in FIG. 10, the nano-piezoelectric unit layer 11 is disposed on the first substrate 10 and includes parallel growth along the first substrate 10 at least at a position corresponding to the intersection of the first electrode 21 and the second electrode 22. At least one layer of linear piezoelectric material.

The at least one layer of linear nano-piezoelectric material grown in parallel along the first substrate, that is, the at least one layer of linear nano-piezoelectric material is parallel to the first substrate. It should be noted that the at least one layer of the linear nano piezoelectric materials may be parallel to each other, or may be arranged in a three-dimensional space. The linear nano material means that the central axis of the nano material is a straight line, and when the at least one layer of the linear nano piezoelectric material is parallel to each other, that is, the central axis of the linear nano piezoelectric material and the first A substrate is parallel.

The nano piezoelectric unit layer includes at least one linear piezoelectric material grown in parallel along the first substrate at a position corresponding to the intersection of the first electrode and the second electrode, that is, the nano piezoelectric unit layer may be The linear piezoelectric material is grown in parallel along the first substrate only at a position corresponding to the intersection of the first electrode and the second electrode. As shown in FIG. 11, when the linear nano-piezoelectric material of the nano-piezoelectric unit layer 11 is deformed by being pressed, it is bent, and has a positive potential on the stretching surface and a negative potential on the pressing surface. The pressing surface is in direct electrical contact with the first electrode 21 on the first substrate 10; the stretching surface is in direct electrical contact with the second electrode 22 on the second substrate 20, and the current is respectively composed of the first electrode and the second electrode. Exporting, the processor can determine the touch position and the gesture action according to the current outflow position to implement the touch function.

The nano-piezoelectric unit layer includes at least one layer of linear piezoelectric material grown in parallel along the first substrate at a position corresponding to the intersection of the first electrode and the second electrode. That is, the nano piezoelectric unit layer may include a layer of linear piezoelectric material, and may also include a plurality of linear piezoelectric materials. The piezoelectric series generated by the multi-layer linear piezoelectric material can further increase the piezoelectric current and improve the touch sensitivity. As shown in FIG. 10, in the embodiment of the present invention, the nano piezoelectric unit layer includes a plurality of nano piezoelectric materials as an example for detailed description.

It should be noted that the first direction and the second direction are different, that is, the first direction and the second direction necessarily intersect. In the embodiment of the present invention, as shown in FIG. 4 , the first direction 101 and the second direction 102 are perpendicular to each other as an example for detailed description.

The touch screen provided by the embodiment of the invention adopts a piezoelectric effect self-power generation technology of a nano array, and when the pressure is applied to the surface of the touch screen, the linear nano piezoelectric material of the nano piezoelectric unit layer is bent on the stretching surface. At a positive potential, the pressed surface is at a negative potential, and the piezoelectric potential and current are generated by the piezoelectric effect, which is then derived by the first electrode and the second electrode, so that the touch position and the gesture action can be determined. Compared with the common resistive screen and capacitive screen, the touch screen can generate current from the touch screen itself through the piezoelectric effect, and does not require an external power source, thereby reducing the power consumption of the device. And the piezoelectric current is generated by the pressure, so other static stains, mist, etc. will not affect the touch operation, and the applicability is stronger.

In one embodiment, as shown in FIG. 12, the opposite side of the second electrode 22 from the nano-piezoelectric unit layer 11 includes a plurality of microstructures. For example, as shown in FIG. 13, an auxiliary electrode 23 is formed on the second electrode 22, and a side of the auxiliary electrode 23 opposite to the nano-piezoelectric unit layer 11 includes a plurality of microstructures. For example, the microstructure is a sawtooth structure.

The microstructure is beneficial for improving the contact between the electrode and the nano-piezoelectric material, so that when the nano-material is deformed by pressure extrusion, it is advantageous for the current of the stretching surface and the pressing surface to pass through the first electrode through the microstructure. And a second electrode output. Of course, the microstructure may be other convex structures, etc., and the embodiment of the present invention is only described in detail by taking the microstructure as a sawtooth structure as an example.

For example, the auxiliary electrode is a metal electrode, and the first electrode and the second electrode are ITO electrodes. The metal layer has a high electron mobility and a small electrical resistance, but the adhesion of the metal is small, which is generally disadvantageous for being directly formed on a substrate such as a glass substrate. The ITO layer is an indium tin oxide indium tin oxide layer. The electric resistance of the ITO layer is larger than that of the metal layer, but the adhesion is good, and it is not easily peeled off on the substrate. In the embodiment of the invention, the first electrode layer and the second electrode layer are ITO layers, and the auxiliary electrode layer is The metal layer is described in detail as an example.

In one embodiment, the nano-piezoelectric unit layer includes a plurality of layers of linear piezoelectric material grown in parallel along the first substrate, and the linear piezoelectric materials in the same layer are parallel to each other (ie, each linear type The piezoelectric material layer includes a plurality of parallel linear piezoelectric materials).

That is, as shown in Fig. 14, the linear piezoelectric materials located in the same layer are parallel to each other. When the nano piezoelectric unit layer comprises a plurality of layers of linear piezoelectric material layers, the multi-layer linear piezoelectric material layers are in contact with each other, and the generated piezoelectric currents are connected in series, which is advantageous for increasing the piezoelectric current.

Of course, linear piezoelectric materials on the same layer can also be arranged in a three-dimensional space. In the embodiment of the present invention, only the linear piezoelectric materials located in the same layer are parallel to each other as an example for detailed description.

In one embodiment, as shown in FIG. 10 to FIG. 13 , a spacer 40 is disposed between the first substrate 100 and the second substrate 200 , and the spacer 40 makes the nano piezoelectric unit The layer 11 is not in contact with the second substrate 200.

For example, the nano-piezoelectric material of the nano-piezoelectric unit layer does not generate current under normal conditions as long as it is linearly deformed without being subjected to pressure, in order to further ensure that the nano-piezoelectric material in the formed touch screen is not under pressure. In the case of a straight type, the spacer is not in contact with the second substrate, that is, the first electrode on the second substrate, the second electrode, and the auxiliary electrodes of the first electrode and the second electrode are not in contact with each other. To improve the accuracy of the touch screen.

A spacer is disposed between the first substrate and the second substrate, the spacer causes the nano piezoelectric unit layer to be out of contact with the second electrode layer, and the spacer may be as shown in FIG. 10-13. It is shown between the first substrate 10 and the second substrate 20, and may also be located between the first electrode layer and the second electrode layer. The embodiment of the present invention is only illustrated by way of example. For example, the spacer may be a frame sealant.

For example, the nano-piezoelectric unit layer includes one or a combination of linear nanotubes, nano-bars, and nano-rings.

For example, the linear piezoelectric material is zinc oxide. That is, the material of the nano piezoelectric unit layer is zinc oxide nanotube, zinc oxide nano strip or zinc oxide nano ring. For example, the material of the nano piezoelectric unit layer may also be a combination of any two or three of zinc oxide nanotubes, zinc oxide nanorods, and zinc oxide nanorings.

In one embodiment, the nano-piezoelectric cell layers are array-arranged nanotubes. Relative to nano For rice bars and nano-rings, the transmittance of nanotubes is higher.

In one embodiment, the nano-piezoelectric cell layer of the touch screen may comprise array-arranged nanotubes, and the touch screen is located on the light-emitting side of the display screen. The nanotubes have better light transmittance than the nanorods or the nano strips, and the touch screen of the nanotubes can be disposed on the light emitting surface of the touch screen, which is more favorable for improving the precision of the touch.

At least one embodiment of the present invention provides a method for fabricating a touch screen provided by an embodiment of the present invention. As shown in FIG. 7, the method includes steps 101 to 103 described below.

For example, a plurality of rows of first electrodes and nano-piezoelectric unit layers are formed on the first substrate, and a plurality of rows of second electrodes are formed on the second substrate in the second direction, the first The direction is different from the second direction; the nano-piezoelectric unit layer includes at least one layer of linear piezoelectric material grown in parallel along the first substrate at a position corresponding to the intersection of the first electrode and the second electrode.

For example, as shown in FIG. 16, step 102 can include the following steps 1021b and 1022b.

Step 1021b, forming a plurality of rows of first electrodes in a first direction on a first substrate, and forming a plurality of rows of second electrodes in a second direction on the second substrate, the first direction and the first The two directions are different. For example, the first direction and the second square are perpendicular.

For example, forming the first electrode on the first substrate may include forming the first electrode formed in the first direction by a patterning process or the like by forming a conductive film on the first substrate.

As shown in FIG. 15, forming the second electrode may include: step 10211b, forming a second electrode forming a plurality of rows in the second direction on the second substrate. For example, a second electrode formed in the second direction is formed by forming a conductive film, followed by a patterning process or the like.

In one embodiment, the second electrode surface may include a plurality of microstructures on a side opposite the nano-piezoelectric cell layer. Forming a microstructure on the surface of the second electrode can also be formed by a patterning process.

For example, as shown in FIG. 15, forming the second electrode may further include: step 10212b, forming an auxiliary electrode on the second electrode, the surface of the auxiliary electrode opposite to the nano piezoelectric unit layer Includes multiple microstructures.

Step 1022b, forming a nano-piezoelectric cell layer at a position where the first electrode surface intersects the second electrode. The nano-piezoelectric unit layer includes at least one layer of a linear piezoelectric material grown in parallel along the first substrate at a position corresponding to the intersection of the first electrode and the second electrode.

Forming the nano-piezoelectric unit layer at a position where the first electrode surface intersects the second electrode may, for example, include: exposing the position where the first electrode and the second electrode intersect by a mask, and covering other portions; PECVD forms, for example, a zinc oxide nano array at a position where the first electrode and the second electrode intersect.

Step 103: Pair the first substrate and the second substrate with a box.

The pair of the first substrate and the second substrate may include: forming a spacer between the first substrate and the second substrate, and then the first substrate and the second a substrate pair cassette, the spacer causing the nano piezoelectric unit layer to be out of contact with the second substrate.

It should be noted that the method for manufacturing the touch screen provided by the embodiment of the present invention is not limited. For example, the method for manufacturing the touch screen may also adjust corresponding step sequences and the like according to specific production. For example, the fabrication of the first substrate and the second substrate in the step 101, the fabrication of the first electrode, the second electrode, and the nano-piezoelectric cell layer in the step 102 are not limited in specific fabrication order, and may be adjusted as needed.

The above is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention. It should be covered by the scope of the present invention. Therefore, the scope of the invention should be determined by the scope of the appended claims.

The present application claims the priority of the Chinese Patent Application No. 201410281122.2 filed on Jun. 20, 2014, the entire content of which is hereby incorporated by reference.

Claims

A touch screen includes: a first substrate including a first substrate and a second substrate including a second substrate, first and second electrodes, and a nano piezoelectric unit formed on the first substrate Layer, where

The first electrodes are formed in a plurality of rows along a first direction, and the second electrodes are formed in a plurality of rows along a second direction, the first direction and the second direction being different;

The nano piezoelectric unit layer includes a linear nano piezoelectric material vertically grown along the first substrate, or the nano piezoelectric unit layer is at a position corresponding to the intersection of the first electrode and the second electrode A layer of at least one layer of linear piezoelectric material grown in parallel along the first substrate is included.
The touch screen of claim 1, wherein when the nano-piezoelectric unit layer comprises a linear nano-piezoelectric material grown vertically along the first substrate,

The first electrode and the second electrode that are not in contact with each other are formed on the second substrate.
The touch screen of claim 1, wherein when the nano-piezoelectric unit layer comprises at least one layer of a linear piezoelectric material grown in parallel along the first substrate,

The second electrode is disposed on the second substrate, and the first electrode is disposed on the first substrate.
The touch screen of claim 2, wherein the first electrode and/or the second electrode surface are formed with a microstructure.
The touch screen of claim 3, wherein a surface of the second electrode opposite to the nano-piezoelectric unit layer is formed with a microstructure.
The touch screen according to claim 4, wherein an auxiliary electrode is formed on the first electrode and/or the second electrode, and the auxiliary electrode surface is formed with the microstructure.
The touch panel according to claim 5, wherein an auxiliary electrode is formed on the second electrode, and a surface of the auxiliary electrode opposite to the nano-piezoelectric unit layer is formed with the microstructure.
A touch screen according to any of claims 4-7, wherein the microstructures are sawtooth structures.
The touch screen according to claim 6 or 7, wherein the auxiliary electrode is a metal electrode, and the first electrode and the second electrode are ITO electrodes.
The touch screen of any one of claims 2, 4, wherein the first substrate further comprises a primer layer between the first substrate and the nano-piezoelectric unit layer, the nano-piezoelectric A unit layer is formed on the underlayer.
The touch screen according to any one of claims 1 to 10, wherein a spacer is disposed between the first substrate and the second substrate, the spacer causing the nano piezoelectric unit layer and the The second substrate is not in contact.
The touch screen of any of claims 3, 5, 7 wherein the nano-piezoelectric unit layer comprises a plurality of layers of linear piezoelectric material grown in parallel along the first substrate, and each linear pressure The layer of electrically material comprises a plurality of parallel linear piezoelectric materials.
The touch screen according to any one of claims 1 to 12, wherein the nano-piezoelectric unit layer is a combination of one or a combination of linear nanotubes, nano-bars and nano-rings arranged in an array.
The touch screen according to any one of claims 1 to 13, wherein the material forming the nano piezoelectric unit is zinc oxide, silicon dioxide or gallium oxysulfide.
The touch screen of any of claims 1-14, wherein the first direction and the second direction are perpendicular.
A display device comprising a display screen and the touch screen of any one of claims 1 to 15, the touch screen being located on a light exiting side or a backlight side of the display screen.
The display device of claim 16, wherein the nano-piezoelectric cell layer of the touch screen comprises an array of nanotubes, the touch screen being located on a light exiting side of the display screen.
A method for manufacturing a touch screen, comprising:

Forming a first substrate including a first substrate and a second substrate including a second substrate,

Forming a first electrode, a second electrode, and a nano-piezoelectric unit layer formed on the first substrate, and

Comparing the first substrate and the second substrate to a box, wherein:

The first electrodes are formed in a plurality of rows along a first direction, and the second electrodes are formed in a plurality of rows along a second direction, the first direction and the second direction being different;

The nano-piezoelectric unit layer includes a linear nano-piezoelectric material vertically grown along the first substrate, or the nano-piezoelectric unit layer includes along the position corresponding to the intersection of the first electrode and the second electrode At least one layer of linear piezoelectric material grown in parallel with the first substrate.
The method of manufacturing a touch screen according to claim 18, wherein when said nano piezoelectric unit layer comprises a linear nano piezoelectric material vertically grown along said first substrate,

The first electrode and the second electrode that are not in contact with each other are formed on the second substrate.
The method of manufacturing a touch screen according to claim 18, wherein when said nano piezoelectric unit layer comprises at least one layer of linear piezoelectric material grown in parallel along said first substrate,

The second electrode is formed on the second substrate, and the first electrode is formed on the first substrate.
The fabrication method according to claim 19, wherein a microstructure is formed on the surface of the first electrode and/or the second electrode.
The fabricating method according to claim 21, wherein an auxiliary electrode is formed on the first electrode and/or the second electrode, and the auxiliary electrode surface is formed with the microstructure.
The manufacturing method according to any one of claims 19, 21, 22, wherein before the nano piezoelectric unit layer is formed on the first substrate,

Forming a primer layer on the first substrate;

A nano piezoelectric unit layer is formed on the underlayer.
The fabricating method according to claim 20, wherein an auxiliary electrode is formed on the second electrode, and the side of the auxiliary electrode opposite to the nano-piezoelectric cell layer includes a plurality of microstructures.
The manufacturing method according to any one of claims 18 to 24, wherein the pair of the first substrate and the second substrate are:

Forming a spacer between the first substrate and the second substrate, and then pairing the first substrate and the second substrate with the spacer, the spacer and the nano piezoelectric unit layer The second substrate is not in contact.