CN106484167B - Touch sensing unit, sensing array, smart device and carpet - Google Patents

Touch sensing unit, sensing array, smart device and carpet Download PDF

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Publication number
CN106484167B
CN106484167B CN201510551365.8A CN201510551365A CN106484167B CN 106484167 B CN106484167 B CN 106484167B CN 201510551365 A CN201510551365 A CN 201510551365A CN 106484167 B CN106484167 B CN 106484167B
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electrode
touch sensing
touch
sensing unit
insulated
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CN106484167A (en
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朱晓枭
朱光
孟宪松
王中林
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Beijing Institute of Nanoenergy and Nanosystems
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Beijing Institute of Nanoenergy and Nanosystems
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Abstract

The invention provides a touch sensing unit, a sensing array, intelligent equipment and a carpet. The touch sensing unit adopts a flexible and bendable material capable of being curled as a basal layer and adopts a flexible conductive material as an electrode material, the whole touch sensing unit array forms a flexible device, the touch sensing unit can be bent and curled, the preparation process is simple, and the whole touch sensing unit can be used in a large area. According to the invention, the anti-interference electrode is additionally arranged between the two electrodes of the touch sensing unit, so that the information transmission precision of the sensing array can be improved, and the identification resolution is improved. The invention can realize the functions of image acquisition, contact stress distribution characterization, object tracing and positioning, real-time tracking of motion trail and the like, and can be applied to the fields of touch panels, hand-written electronic signatures, fingerprint identification, security protection, intelligent home, public safety and the like with one or more requirements of image acquisition, contact stress distribution mapping or positioning and tracking and the like.

Description

Touch sensing unit, sensing array, smart device and carpet
Technical Field
The invention relates to the technical field of sensors, in particular to a touch sensing unit, a sensing array, intelligent equipment and a carpet.
Background
Along with the rapid development of science and technology, smart machine wide application in fields such as intelligent house, public safety has appeared the product that has moving object localization tracking demand, like intelligent carpet etc. has also appeared the product that has image acquisition, contact stress distribution survey and drawing demand, like the image acquisition appearance of fingerprint collection etc. contact stress distribution survey and drawing appearance.
However, no touch sensing device based on contact electrification effect has been presented at present. Moreover, for the current sensing device, the structural design of various functional electrodes is not reasonable, the occupied area is large, the number of touch units which can be arranged in unit area is limited, and the array texture is generally hard, so that the large-area application of the array is limited.
In addition, in the process of developing the touch sensing units, the applicant also finds that induced charges generated by electrification of a touch generate electric field distribution centered on a touch position in space, corresponding electrodes of other touch sensing units around the touch point are in the electric field, induced electric signals are also generated, and the generated induced electric signals greatly influence the recognition accuracy of the touch point, so that the recognition efficiency of the sensing matrix is reduced. How to solve the problem becomes the key to the success of the development of the touch sensing unit.
Disclosure of Invention
Technical problem to be solved
The invention provides a touch sensing unit, a sensing array and intelligent equipment, aiming at the defects that the traditional touch sensing array is hard in texture and cannot realize large-area continuous application.
(II) technical scheme
According to one aspect of the present invention, a touch sensing unit is provided. This touch sensing unit includes: a substrate 10; a first electrode 21 and a second electrode 22 disposed on the substrate 10 and insulated from each other; the electrification component 40 is used for sensing the touch of an object to generate a sensing electric signal; wherein the induced electrical signal generates an induced electrical signal at the first electrode 21 and the second electrode 22.
According to another aspect of the invention, a touch sensing array is also provided. The touch sensing array comprises m rows and n columns of touch sensing units as described above, wherein: the first electrodes 21 of the n touch sensing units along the first direction are connected in series to form a first direction signal acquisition circuit, the touch sensing array comprises m first direction signal acquisition circuits, and all the first direction signal acquisition circuits are insulated from each other; the second electrodes 22 of the m touch sensing units along the second direction are connected in series to form a path of second direction signal acquisition circuit, and the touch sensing array includes n paths of second direction signal acquisition circuits, which are insulated from each other.
According to still another aspect of the present invention, there is also provided a touch panel. The touch panel adopts the sensing unit or the touch sensing array.
According to another aspect of the invention, a smart device is also provided. The intelligent device adopts the touch sensing array.
According to another aspect of the invention, a pattern acquisition instrument is also provided. The pattern acquisition instrument adopts the intelligent equipment.
According to another aspect of the invention, a contact stress distribution mapper is also provided. The stress distribution characterization instrument adopts the intelligent equipment.
According to another aspect of the invention, a carpet is also provided. The carpet adopts the intelligent equipment.
(III) advantageous effects
According to the technical scheme, the touch sensing unit, the sensing array and the intelligent equipment have the following beneficial effects:
(1) the sensing unit is an active passive sensing unit, does not need an external power supply when in work, and is an active excitation electric signal, so that the defect that the traditional semiconductor sensing device based on silicon substrate and the like needs active power supply is overcome, the energy consumption of the device is reduced, and the application range of the device is expanded;
(2) the flexible, bendable and crimpable material is used as a substrate layer, the flexible conductive material is used as an electrode material, the whole touch sensing unit array forms a flexible device, and the flexible and crimpable material can be bent and crimped, so that the defect that the traditional semiconductor sensing device based on silicon-based and the like is hard is overcome;
(3) the used materials are easy to obtain and low in price, the energy consumption in the preparation process is low, the process is simple, the processing, the operation, the control and the use are simple, the prepared sensing array device is a flexible device and can be bent and curled, and the whole large-area use can be realized while the higher identification precision is kept. Compared with the traditional sensor based on semiconductor materials such as silicon-based materials and the like, the sensor overcomes the defects of high cost, complex preparation process, high energy consumption and incapability of realizing large-area use of the whole sensor;
(4) the connection mode of the sensing units is that the sensing units are connected in series in the same row and the same column, and different rows and different columns are insulated, so that the internal connection mode of a sensing unit matrix is greatly simplified, and the manufacturing mode of a sensing device is also simplified;
(5) an anti-interference electrode is added between the two electrodes of the touch unit. The anti-interference electrode can reduce the strength of induced electric signals of two electrodes touching the sensing unit around the contact point as the center, and improve the strength difference between the induced electric signals of the two electrodes in the sensing unit at the touch position and the induced electric signals of the two electrodes in the sensing unit without touching the point, thereby improving the transmission information precision of the sensing array and improving the identification resolution;
(6) the patterned design of the sensing unit integrates three electrode modules with different functions, simplifies the structure of a device, realizes the functions of positioning the position of the sensing unit and the contact stress between an object and the sensing unit according to an electric signal excited by a single sensing unit, collecting the shape of the contact object by the sensing unit array and mapping the contact stress distribution between the object and the sensing unit, and reduces the mutual influence of the electric signals between the internal electrodes of the sensing unit and between the sensing units.
Due to the advantages, the touch sensing unit provided by the invention can meet one or more requirements of tracing and positioning an object, tracking a motion track in real time, and acquiring an image or mapping a contact stress distribution. The method can be widely applied to intelligent equipment products such as touch panels, handwritten electronic signatures, pattern recognition of fingerprints and the like, contact stress distribution mapping and the like, and has wide application prospect.
Drawings
FIG. 1 is a cross-sectional view of a touch sensing unit according to a first embodiment of the present invention;
FIG. 2 is an exploded view of the touch sensing unit shown in FIG. 1;
FIG. 3 is a diagram illustrating a signal acquisition circuit in a touch sensor array according to a second embodiment of the invention;
FIG. 4 is a flowchart illustrating a method for fabricating a touch sensor array according to a third embodiment of the present invention;
FIG. 5 is a perspective view of a touch sensing unit according to a fourth embodiment of the present invention;
FIG. 6 is an exploded view of a touch sensing unit according to a seventh embodiment of the present invention;
fig. 7 is an exploded view of a touch sensing unit according to an eighth embodiment of the invention.
[ Main element ]
10-a flexible substrate;
21-a first electrode;
21 a-a first portion; 21 b-a second portion; 21 c-third part;
22-a second electrode;
22 a-a first portion; 22 b-a second portion; 22 c-a third portion;
21' -electric connection part
30-an anti-interference electrode;
31 — a first insulating layer; 32-a second insulating layer;
40-an electrification component;
41-a first charging layer; 42-second electrification layer.
Detailed Description
The invention adopts common flexible material as substrate, flexible conductive material as electrode, and flexible electrification material as electrification layer, and has the advantages of low cost, flexibility, crimpability, light weight, thinness and realization of large-area application.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
First, first embodiment
In one exemplary embodiment of the present invention, an active passive touch sensing unit is provided. The sensing unit does not need to provide an external power supply for power supply work, and active work is realized by using an induced electric signal generated in touch as an identification electric signal. Fig. 1 is a cross-sectional view of a touch sensing unit according to a first embodiment of the invention. Fig. 2 is an exploded view of the touch sensing unit shown in fig. 1. Referring to fig. 1 and fig. 2, the touch sensing unit of the present embodiment includes:
a flexible substrate 10;
a first electrode 21 having a columnar shape formed on the flexible substrate 10;
the electrical connection part 21 'is formed on at least one side of the first electrode 21 along the first direction, and the first electrodes of the touch sensing units adjacent to each other along the first direction are connected through the electrical connection part 21';
a second electrode 22 formed outside the first electrode 21, insulated from the first electrode 21 inside, and insulated from the electrical connection portion 21' therebelow;
an interference-free electrode 30 formed outside the first electrode 21, between the electrical connection portion 21 'and the second electrode 22, insulated from the inside first electrode 21, insulated from the electrical connection portion 21' by a first insulating layer 31 thereunder, and insulated from the second electrode 22 by a second insulating layer 32 thereabove;
an electrification component 40 formed above the first electrode 21 and the second electrode 22, including: a first and a second electrification layer 41 and 42, wherein the lower surface of the second electrification layer 42 is electrically connected to the upper surfaces of the first and the second electrodes 21 and 22;
the first direction signal acquisition end and the second direction signal acquisition end of the touch sensing unit are respectively led out from the electrical connection portion 21 'and the second electrode 22, and the first electrode 21, the electrical connection portion 21', the second electrode 22, the anti-interference electrode 30, the first insulating layer 31 and the second insulating layer 32 are all made of flexible materials.
The following describes each component of the touch sensing unit in this embodiment in detail.
The flexible substrate 10 plays a role of supporting the entire touch sensing unit (the entire touch sensing array), and is made of a flexible material that can be rolled and has a certain mechanical strength. Generally, a non-woven fabric material, a polymer material such as polyimide, a woven material, a carbon fiber material, a resin material, or the like may be selected as the flexible substrate to support the touch sensing unit.
The first electrode 21, the electrical connection portion 21', the second electrode 22, and the interference-free electrode 30 are all made of flexible, rollable conductive material, such as: conductive cloth material, metal film material, and the like. The first insulating layer 31 and the second insulating layer 32 are each made of a flexible, crimpable insulating material, such as: polyimide materials, polyethylene materials, paper materials, and the like.
The first and second charging layers 41 and 42 are also made of a flexible, rollable material, which is a material located at different positions on the rubbing electrode assembly. The friction electrode sequence is ordered according to the attraction degree of the materials to the charges, and the positive charges on the contact surface of the two materials are transferred from the surface of the material with the negative polarity in the friction electrode sequence to the surface of the material with the positive polarity in the friction electrode sequence at the moment of mutual contact. For a detailed description of the triboelectric series and the related materials, reference may be made to the prior patents of the applicant of the present invention (application numbers: 201310355924.9; 201410193259.2; 201410486066.6, etc.).
In this embodiment, a flexible substrate is adopted, and a flexible electrode, an insulating layer and an electrification layer are adopted, so that the whole touch sensing unit (the whole touch sensing array) is a flexible device. The flexible device can greatly expand the application range, if the flatness of the used bottom surface has higher tolerance, the use of the flexible device is still not influenced even if the surface is uneven, in addition, the flexible device is a bendable and crimpable device, can be applied to the bent bottom surface and well attached, and can realize the use of the whole large area.
In this embodiment, the size and shape of the flexible substrate 10 will depend on the number, size and shape of the self-driven touch sensor arrays fabricated thereon, and the thickness thereof will typically be between 10nm and 10 cm.
The first and second charging layers 41 and 42 are formed above the first and second electrodes 21 and 22, and they can be attached to each other or suspended. The underlying second charge layer 42 is electrically connected to the first electrode 21 and the second electrode 22.
In this embodiment, the induced electrical signal is generated by the first and second power generation layers 41 and 42 being in contact with each other, and the touch sensing unit does not need an external power supply during operation, and is an active power generation electrical signal, so that the defect that a conventional semiconductor sensing device based on silicon-based or the like needs active power supply is overcome, and the application range of the device is expanded while the energy consumption of the device is reduced.
Referring to fig. 1 and fig. 2, the radial dimension of the first electrode 21 depends on the dimension of the entire touch sensing unit, and the thickness thereof is equal to the sum of the thicknesses of the electrical connection portion 21', the first insulating layer 31, the interference-free electrode 30, the second insulating layer 32, and the second electrode 21. The first electrode 21 and the lower surface of the electrical connection portion 21' are on the same surface of the substrate 10.
In the present embodiment, the first electrode 21 is a rectangular parallelepiped, but the invention is not limited thereto, and may also be other types of cylinders, such as a cylinder, an elliptic cylinder, a square cylinder, a triangular cylinder, and the like.
The electrical connection portion 21' is used for electrically connecting the first electrodes of the touch sensing units adjacent to each other in the first direction, and may be in a strip shape or a surface shape. In the embodiment, the electrical connection portion 21' is a strip, and has a thickness smaller than that of the first electrode 21 and a width smaller than that of the first electrode 21.
Referring to fig. 2, the shape and size of the second electrode 22 and the interference-free electrode 30 are determined by the shape and size of the first electrode 21, and the thickness of the two electrodes is typically between 10nm and 10 cm. The thicknesses of the two may be the same or different.
In this embodiment, there is no other insulating medium between the inside of the second electrode 22 and the outside of the first electrode 21, i.e. insulation is performed only by air. Of course, those skilled in the art can fill an insulating medium between the two according to actual needs. Likewise, the inside of the interference rejection electrode 30 and the outside of the first electrode 21 may be insulated from each other by air or an insulating medium.
It is noted that the distance d between the inner side of the second electrode 22 and the outer side of the first electrode 211Greater than 0mm, the distance d between the inner side of the interference-free electrode 30 and the outer side of the first electrode 212Is greater than 0 mm. In general, d is1≥d2
Also, the shapes and sizes of the first and second insulating layers 31 and 32 are determined by the shapes and sizes of the first and second electrodes 21 and 22, and the thickness thereof is generally between 10nm and 10 cm. The two insulating layers prevent the electrode units with different functions from being mutually conducted.
In this embodiment, the first electrode 21, the second electrode 22 and the anti-interference electrode 30 are skillfully combined through the complementary pattern design, so that the space is greatly saved, and more touch sensing units can be integrated in a limited area.
When an object is in contact with the touch sensing unit of the present embodiment, as shown in fig. 1, induced charges are generated on the surfaces of the first and second charge layers 41 and 42 by the contact electrification effect of the first and second charge layers 41 and 42, induced charges generated on the surface of the second charge layer 42 generate induced electrical signals on the first and second electrodes 21 and 22, and the induced electrical signals are conducted out through the first electrode 21 (and the electrical connection portion 21') and the second electrode 22.
Induced charges generated by contact electrification generate electric field distribution with the contact position as the center in space, and induced electric signals are also generated when the first electrodes 21 and the second electrodes 22 of other touch sensing units around the contact point are in the electric field, and the generated induced electric signals greatly influence the identification precision of the contact point, so that the identification efficiency of the sensing matrix is reduced.
In this embodiment, by introducing the anti-interference electrode 30, the exposed anti-interference electrode 30 is added between the first electrode 21 and the second electrode 22, and most of the space electric field lines of the induced charges generated by the contact electrification are terminated at the introduced anti-interference electrode, so that induced electric signals generated by other touch sensing units around the contact point are reduced, and the intensity difference between the induced electric signals of the first electrode 21 and the second electrode 22 in the touch sensing unit at the contact point and the induced electric signals of the first electrode 21 and the second electrode 22 in the touch sensing unit at the non-contact point is greatly improved, thereby improving the transmission information precision of the whole sensing array and improving the identification resolution.
In other embodiments, the interference-free electrode may not be provided.
In other embodiments, the arrangement of the first electrode 21 and the second electrode 22 may be variously selected, and the arrangement is not limited to such an inner and outer sheath layer pattern, and the two electrodes may be arranged separately.
It should be particularly noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", and the like, mentioned in the embodiment are only directions referring to the drawings, and are not intended to limit the protection scope of the present invention. In addition, the present embodiments may provide examples of parameters that include particular values, but the parameters need not be exactly equal to the corresponding values, but may approximate the corresponding values within acceptable error tolerances or design constraints.
Second and third embodiments
In a second exemplary embodiment of the invention, a touch sensing array is further provided based on the touch sensing unit of the first embodiment.
Fig. 3 is a schematic diagram of a signal acquisition circuit in a touch sensor array according to a second embodiment of the invention. Referring to fig. 3, the sensor array includes: 8 x 8 total 64 touch sensing units. The first and second electrification layers of the 64 touch sensing units are connected into a whole.
The first electrodes 21 of the 8 touch sensing units along the first direction are connected in series through the electrical connection portion 21', so as to form a first direction signal acquisition circuit. The first direction signal acquisition circuit has 8 paths (A-H) in total, and the paths are insulated from one another. The second electrodes 22 of the 8 touch sensing units along the second direction are connected in series to form a second direction signal acquisition circuit. Similarly, the second direction signal acquisition circuit has 8 paths (a-h) in total, and the paths are insulated from one another.
In the embodiment, the first direction and the second direction are perpendicular to each other, but the invention is not limited thereto. In other embodiments of the present invention, the included angle θ between the first direction and the second direction satisfies: 0 DEG < theta.ltoreq.90 DEG, and the invention can be realized, and a corresponding description will be given in the following embodiments.
In this embodiment, the first and second charging layers 41 and 42 of 64 touch sensor cells are connected in one piece. In other embodiments of the present invention, some touch sensing units may be connected into one piece, or a single touch sensing unit is not connected to other touch sensing units, which does not affect the implementation of the present invention.
In addition, in the present embodiment, 64 touch sensing units are located on the same substrate 10. The base 10 is a flexible substrate such as a non-woven fabric material, a polymer material such as polyimide, a woven material, a carbon fiber material, a resin material, or the like.
It should be particularly noted that in the touch sensing array of the present embodiment, the anti-jamming electrodes 30 of each touch sensing unit are independent from each other and are not connected to each other, so that each anti-jamming electrode 30 functions in the sensing unit where it is located.
When an object touches a certain sensing unit in the present embodiment touch sensing array, as described in the first embodiment, the first and second charging layers 41 and 42 of the sensing unit generate induced electrical signals due to the touch charging effect, and the induced electrical signals derived from the first electrode 21 are output along the first direction signal acquisition circuit. The induced electrical signal derived from the second electrode 22 is output along the second direction signal acquisition circuit where the induced electrical signal is located, and according to the cartesian coordinate positioning principle, the acquired electrical signal is traced back and reversely pushed along the coordinate shown in fig. 3, so that the position information of the object touch point is obtained, the object tracing and positioning can be realized, the real-time tracking can be realized, and the object pattern can also be acquired. The strength of the transmission signal can represent the contact stress when the object is in contact with the sensing array, and then the contact stress distribution when the object is in contact with the sensing array can be mapped.
It should be noted that the number of rows and columns of the touch sensing units in the touch sensing array of the present invention can be designed according to the needs, and is not limited to the specific number of rows or columns in this embodiment.
Third and fourth embodiments
In a third embodiment of the present invention, a method for fabricating a sensor array according to the second embodiment is also provided. FIG. 4 is a flowchart illustrating a method for fabricating a touch sensor array according to a third embodiment of the invention. Referring to fig. 1, fig. 2 and fig. 4, a method for manufacturing a touch sensor array of the present embodiment includes:
step A: selecting and cutting a flexible substrate 10 with a proper size, and marking 64 positions of touch sensing units on the flexible substrate 10;
in the subsequent steps, each touch sensing unit is formed at a corresponding position.
And B: forming 64 first electrodes 21 and electrical connection portions 21 'of touch sensing units on the surface of the flexible substrate 10, wherein the first electrodes 21 of the 8 touch sensing units along the first direction are connected in series through the electrical connection portions 21' to form a first direction signal acquisition circuit;
in the step, an anti-etching agent is spin-coated, metal is deposited after exposure and development, and then the first electrode and the corresponding electrical connection part of each touch sensing unit are formed. That is, in the present embodiment, the first electrode 21 and the electrical connection portion 21' are formed simultaneously.
Of course, in other embodiments of the present invention, the flexible conductive layer may be deposited first, and then the first electrode 21 and the corresponding electrical connection portion 21' of each touch sensing unit are formed by etching.
As shown in fig. 4 and 2, in 8 lines of first direction signal acquisition circuits (a to H) insulated from each other, each line of signal acquisition circuit is formed by connecting the first electrodes 21 of the adjacent touch sensing units in series through the electrical connection portion 21', and in total, m lines of first direction signal acquisition circuits are insulated from each other.
And C: forming a first insulating layer on the electrical connection portion 21' at the outer side of the first electrode 21 of each touch sensing unit;
the first insulating layer 31 is formed on the surface of the 8 first direction signal acquisition circuits composed of the first electrode 21 and the electrical connection portion 21 ', and covers the upper surface of the electrical connection portion 21 ' of each first direction signal acquisition circuit, the sidewall of the first electrode 21, and the connection portion between the first electrode 21 and the electrical connection portion 21 '. In this embodiment, the first insulating layers 31 of the touch sensing units are connected together.
Step D: forming an anti-interference electrode 30 on the first insulating layer 31 of each touch sensing unit;
the interference-free electrode 30 is insulated from the first electrode 21 and the electrical connection portion 21' by a first insulating layer 31. The interference-free electrodes 30 of the 64 touch sensing units are not electrically connected to each other.
Step E: forming a second insulating layer 32 on the anti-interference electrode 30 of each touch sensing unit;
step F: forming second electrodes 22 on the second insulating layers 32 of the touch sensing units, wherein the second electrodes 22 of the 8 touch sensing units along the second direction are connected in series to form a second direction signal acquisition circuit, and the whole sensing array forms 8 second direction signal acquisition circuits;
the second electrodes 22 of the 64 touch sensing units are formed on the surface of the second insulating layer 32, and there are 8-way insulated second signal acquisition circuits, each of which is formed by connecting the second electrodes 22 of the adjacent touch sensing units in series, and the adjacent second direction signal acquisition circuits are insulated from each other.
Step G: forming an electrification component on the upper surfaces of the first electrode 21 and the second electrode 22 of each touch sensing unit in the sensing array;
the charging element 40 and the first electrode 21 and the second electrode 22 can be closely attached or suspended. The electrification assembly 40 may be two layers, one layer, or none, as will be described in detail below. In addition, the electrification components 40 of the touch sensing units are connected into one piece.
For the purpose of brief description, any technical features of the first embodiment that can be applied to the same are described herein, and the same description is not repeated. In addition, it should be specifically noted that unless steps are specifically described or must occur in sequence, the order of the above steps is not limited to that listed above and may be changed or rearranged as desired.
Fourth and fourth embodiments
In another exemplary embodiment of the present invention, another touch sensing unit is also provided. The touch sensing unit does not need to provide an external power supply for power supply work, and the self-driven work is realized by taking an induced electric signal generated in touch as an identification electric signal. Compared with the touch sensing unit of the first embodiment, the touch sensing unit of the present embodiment is different in that: different from the first embodiment, the design of the electrode patterning in the touch sensing unit is different.
Fig. 5 is a perspective view of a touch sensing unit according to a fourth embodiment of the invention. Referring to fig. 5, the touch sensing unit of the present embodiment includes: the device comprises a substrate 10, a first electrode 21, a first insulating layer 31, a tamper resistant electrode 30, a second insulating layer 32, a second electrode 22 and an electrification assembly 40.
The first insulating layer 31, the interference-free electrode 30, and the second insulating layer 32 are formed from bottom to top at the middle position of the touch sensing unit, and are all in a cross shape. The three layers have the same shape and correspond in position, so that the area between the substrate 10 and the electrification component 40 of the touch sensing unit is divided into four areas on the horizontal plane, namely a first area, a second area, a third area and a fourth area. The first area and the third area are diagonal areas, and the second area and the fourth area are diagonal areas.
Wherein the first electrode 21 includes: a first portion 21a located at the second region, a second portion 21b located at the fourth region, and a third portion 21c in a stripe shape connecting the first and second portions. The second electrode 22 includes: a first portion 22a located at the first region, a second portion 22b located at the third region, and a third portion 22c in a stripe shape connecting the first and second portions.
Wherein the first, second and third portions 21a, 21b and 21c of the first electrode and the first and second portions 22a and 22b of the second electrode are located on the same surface of the substrate 10. The anti-interference electrode is formed between the third portion 21c of the first electrode and the third portion 22c of the second electrode, and the lower surface of the anti-interference electrode is electrically insulated from the upper surface of the third portion 21c of the first electrode by the first insulating layer 31, and the upper surface of the anti-interference electrode is electrically insulated from the lower surface of the third portion 22c of the second electrode by the second insulating layer 32.
Wherein the upper surfaces of the first and second portions 21a, 21b of the first electrode; the upper surfaces of the first and second portions 22a and 22b of the second electrode are electrically connected to the lower surface of the second charge layer 42.
Referring to fig. 5, a first portion 21a and a second portion 21b of the first electrode; the first and second portions 22a, 22b of the second electrode are rectangular in shape, the radial dimension is limited to the touch sensing unit, and the thickness is generally between 10nm and 10 cm. The thicknesses of the first electrode and the second electrode may be the same or different.
The first portion 21a and the second portion 21b of the first electrode; the shape of the first and second portions 22a, 22b of the second electrode may also be other than rectangular, for example: circular, triangular, elliptical, polygonal, etc., as long as the corresponding dimension and electrical connection relationship are satisfied, the present invention can be implemented.
In this embodiment, the interference rejection electrode 30 and the first and second portions 21a and 21b of the first electrode and the first and second portions 22a and 22b of the second electrode on the outer side may be insulated by only air. The distance d between the outside of the tamper resistant electrode 30 and the inside of the first and second portions 21a, 21b of the first electrode3> 0mm, and the distance d between the inner sides of the first part 22a and the second part 22b of the second electrode4>0mm。
It should be noted that, besides air insulation, those skilled in the art may fill an insulating medium between the interference-free electrode and the first electrode (and the second electrode) to achieve insulation according to actual needs, and details are not described herein.
Similarly, the shape and size of the first insulating layer 31 and the second insulating layer 32 are determined by the shape and size of the tamper resistant electrode 30, and the thickness thereof is generally between 10nm and 10 cm. The two insulating layers prevent the electrode units with different functions from being mutually conducted.
In this embodiment, the first electrode 21, the second electrode 22 and the anti-interference electrode 30 are skillfully combined through the complementary pattern design, so that the space is greatly saved, and more touch sensing units can be integrated in a limited area. Meanwhile, due to the structural design, the size of the device in the thickness direction can be reduced.
In this embodiment, the charging assembly 40 includes: a first charging layer 41 and a second charging layer 42. Wherein the first and second charging layers 41 and 42 are formed above the first and second electrodes 21 and 22. The first charging layer 41 is disposed on the second charging layer 42, and both of them can be tightly attached or suspended. The second electrification layer 42 is electrically connected to the first electrode 21 and the second electrode 22.
For the purpose of brief description, any technical features of the first embodiment that can be applied to the same are described herein, and the same description is not repeated. Most of the advantages of this embodiment are similar to those of the first embodiment, and the description thereof will not be repeated.
Fifth and fifth embodiments
In a fifth exemplary embodiment of the invention, a touch sensing array is further provided based on the touch sensing unit of the fourth embodiment.
Compared with the touch sensor array of the second embodiment, the touch sensor array of the present embodiment is different in that: the matrix is arranged in different modes, wherein the first direction signal acquisition circuit and the second direction signal acquisition circuit are distributed in an acute angle.
In addition, in the touch sensing array of the present embodiment, the anti-interference electrodes 30 in each touch sensing unit are electrically connected to each other, all the anti-interference electrodes 30 may be connected into a whole, and any number of the anti-interference electrodes 30 may be connected to each other in any combination or in any manner.
In this embodiment, because the angles of the first direction signal acquisition circuit and the second direction signal acquisition circuit and the connection mode of the anti-interference electrode 30 are different, the signal acquisition circuits arranged in a unit area are denser, and the intensity difference between the induced electrical signals of the first electrode 21 and the second electrode 22 in the sensing unit at the position point and the induced electrical signals of the first electrode 21 and the second electrode 22 in the sensing unit without contact is further enhanced.
For the purpose of brief description, any technical features of the second embodiment that can be applied to the same are described herein, and the same description is not repeated.
Sixth and sixth embodiments
In a sixth embodiment of the present invention, a method for fabricating a sensor array as described in the fifth embodiment is also provided. Referring to fig. 5 and fig. 3, the method for manufacturing a touch sensor array of the present embodiment includes:
step A': selecting and cutting a flexible substrate 10 with a proper size, and marking 64 positions of touch sensing units on the flexible substrate 10;
in the following steps, each touch sensing unit is formed at a relative position, and will not be described further.
Step B': forming 64 first electrodes 21 of touch sensing units on the surface of the flexible substrate 10, wherein the first electrodes 21 of 8 touch sensing units along the first direction are connected in series to form a first direction signal acquisition circuit;
the first electrode 21 formed here includes: a first portion 21a, a second portion 21b and a third portion 21c, which are formed simultaneously.
As shown in fig. 4, there are 8-way signal acquisition circuits a to H insulated from each other, each signal acquisition circuit is formed by connecting the first electrodes 21 of the adjacent touch sensing cells in series, and the adjacent signal acquisition circuits are insulated from each other.
Step C': forming a first insulating layer 31 on the third portion 21c of the first electrode of each touch sensing unit and the surface of the connecting line between the first electrodes 21 of adjacent touch sensing units;
the first insulating layer 31 is formed on the surface of the 8-way first-direction signal acquisition circuit composed of the first electrodes 21.
Step D': forming an anti-interference electrode 30 on the first insulating layer 31 of each touch sensing unit;
the tamper resistant electrode 30 is formed between the first portion 21a, the second portion 21b of the first electrode and the first portion 22a, the second portion 22b of the second electrode. The 64 interference-free electrodes 30 are electrically connected.
Step E': forming a second insulating layer 32 on the anti-interference electrode 30 of each touch sensing unit;
step F': forming a third part 22c of a second electrode on the second insulating layer 32 of each touch sensing unit, and forming a first part 22a and a second part 22b of the second electrode at corresponding positions on the substrate 10, wherein the second electrodes 22 of 8 touch sensing units along the second direction are connected in series to form a second direction signal acquisition circuit, and form 8 second direction signal acquisition circuits in total;
as shown in fig. 5, the first portions 22a and the second portions 22b of the second electrodes of 64 touch sensing units are formed on the surface of the substrate 10, and the third portions 22c of the second electrodes are formed on the surface of the second insulating layer 32, as shown in fig. 4, there are 8 signal acquisition circuits, which are insulated from each other, and each signal acquisition circuit is formed by connecting the second electrodes 22 of adjacent touch sensing units in series, and the adjacent second direction signal acquisition circuits are insulated from each other.
In this embodiment, the first portion 22a, the second portion 22b, and the third portion 22c of the second electrode are formed simultaneously. In other embodiments of the present invention, however, the first portion 22a and the second portion 22B of the second electrode may be formed in step B', while only the third portion 22c is formed in this step.
Step G': forming an electrification component 40 on the surface of the first electrode 21 and the second electrode 22 of each touch sensing unit;
the charging element 40 and the first electrode 21 and the second electrode 22 can be closely attached or suspended. The electrification assembly 40 may be two layers, one layer, or none, as will be described in detail below. In addition, the electrification components 40 of the touch sensing units are connected into one piece.
It should be noted that, because of the differences in the patterning design, the present embodiment is better applied to position location, pattern acquisition, or contact stress distribution mapping in an ultra-wide range.
For the purpose of brief description, any technical features of the third embodiment that can be applied to the same are described herein, and the same description is not repeated.
Seventh, seventh embodiment
In a seventh embodiment of the present invention, a touch sensing unit is provided. Referring to fig. 6 and comparing with fig. 2, the touch sensing unit of the present embodiment has a structure substantially similar to that of the touch sensing unit of the first embodiment, and the difference is only that: it has only one electrification layer.
The lower surface of the charge layer is electrically connected to the upper surfaces of the first electrode 21 and the second electrode 22. In addition, the material of the electrification layer is different from that of the first electrode 21 and the second electrode 22, that is, the electrification layer is made of a material which is located at a different position on the rubbing electrode sequence from that of the first electrode 21 and the second electrode 22.
In the embodiment, only one electrification layer is provided, when an object contacts the sensing unit, residual induced charges are generated on the object and the electrification layer due to the contact electrification effect between the object and the electrification layer, and accordingly, the first electrode 21 and the second electrode 22 at the contacted positions generate induced electric signals; induced charges generated by contact electrification generate electric field distribution taking a contact position as a center in space, the first electrode 21 and the second electrode 22 of the peripheral integrated sensing electrode unit at the contact point are also in the electric field, induced electric signals are also generated, the anti-interference electrode 30 is used for reducing the strength of the induced electric signals of the first electrode 21 and the second electrode 22 of the peripheral integrated sensing unit taking the contact point as the center, and the strength difference between the induced electric signals of the first electrode 21 and the second electrode 22 in the sensing unit at the position point and the induced electric signals of the first electrode 21 and the second electrode 22 in the sensing unit without contact is improved.
Eighth and eighth embodiments
In an eighth embodiment of the present invention, a touch sensing unit is provided. Referring to fig. 7 and comparing with fig. 2, the touch sensing unit of the present embodiment has a structure substantially similar to that of the touch sensing unit of the first embodiment, except that: it has no charge layer. Wherein, the first electrode 21 and the second electrode 22 are used as the electrification component 40.
The present embodiment has no electrification layer, when an object contacts the sensing unit, residual induced charges will be generated on the object and the sensing unit electrode due to the contact electrification effect between the object and the sensing unit electrode, and accordingly, the first electrode 21 and the second electrode 22 at the contacted positions will generate induced electric signals; induced charges generated by contact electrification generate electric field distribution taking a contact position as a center in space, the first electrode 21 and the second electrode 22 of the peripheral integrated sensing electrode unit at the contact point are also in the electric field, induced electric signals are also generated, the anti-interference electrode 30 is used for reducing the strength of the induced electric signals of the first electrode 21 and the second electrode 22 of the peripheral integrated sensing unit taking the contact point as the center, and the strength difference between the induced electric signals of the first electrode 21 and the second electrode 22 in the sensing unit at the position point and the induced electric signals of the first electrode 21 and the second electrode 22 in the sensing unit without contact is improved.
Ninth, ninth embodiment
In a ninth embodiment of the present invention, a touch panel is further provided. The touch panel adopts the sensing array given in the second embodiment or the fifth embodiment.
When an object touches the sensing array of the touch panel, the shape of the object and its position in the touch panel can be determined, and the position of the object can be tracked in real time. When a plurality of objects touch the panel, the enlargement, reduction or other definition operations of multi-point touch can be realized according to the related operations defined by the back-end program.
The touch panel can be applied to the fields of smart phone touch screens, tablet computer touch screens and the like.
Tenth and tenth embodiments
In a fifth embodiment of the present invention, there is also provided a pattern grabber. The pattern acquisition instrument adopts the sensing array given in the second embodiment or the fifth embodiment.
When the object is contacted with the pattern collector, a high-resolution image of the object pattern can be obtained.
Eleventh, eleventh embodiment
In a sixth embodiment of the present invention, a contact stress distribution mapper is also provided. The contact stress distribution mapper adopts the sensing array given in the second embodiment or the fifth embodiment.
When the object is contacted with the contact stress distribution mapping instrument, the contact stress distribution of each part when the object is contacted with the contact stress distribution mapping instrument can be obtained.
Twelfth and twelfth embodiments
In a fifth embodiment of the present invention, a smart carpet is also provided. The intelligent carpet adopts the sensing array given in the second embodiment or the fifth embodiment.
As an object moves across the smart carpet, the shape of the object and its location on the smart carpet can be determined and the location of the object can be tracked in real time. When a plurality of objects touch the panel, the tracking of the plurality of objects can be realized according to the definition of the back-end program.
It should be noted that, besides the pattern collector, the contact stress distribution mapper and the intelligent carpet, the sensing array can also be applied to other intelligent equipment products with the requirements of real-time tracking of the motion trajectory of the object, pattern collection of the object and contact stress distribution mapping.
So far, ten embodiments of the present invention have been described in detail with reference to the accompanying drawings. From the above description, those skilled in the art should clearly understand the present invention as a driving touch sensing unit, a sensing array smart device product and a manufacturing method thereof.
It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. Furthermore, the above definitions of the various elements and methods are not limited to the particular structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by one of ordinary skill in the art, for example:
(1) the shape of the first electrode and the second electrode can also be regular shapes such as triangle and parallelogram, curved shapes such as circle and ellipse, or other irregular forms;
(2) in the above embodiments, the touch sensing unit is taken as an example for explanation, but the present invention can also be applied to other non-touch sensing units having the first electrode and the second electrode with similar structures.
In summary, the present invention provides a rollable active passive flexible sensor array that can be used continuously in a large area. The sensing array utilizes the contact electrification effect to generate an induced electric signal to realize self-driven work; the intensity of an interference signal is greatly inhibited by carrying out patterning design on the sensing unit; the sensing units are closely arranged by designing the matrix arrangement mode of the sensing units. The invention can accurately realize the functions of single-point positioning, multi-point identification, image acquisition, contact stress distribution mapping, position dynamic tracking and the like, meets the requirements of handwritten electronic signatures, fingerprint identification, image acquisition, contact stress distribution mapping, tracing positioning and the like, can be widely applied to intelligent equipment products such as electronic product touch screens, intelligent homes and the like, and has wide application prospects in the fields of Internet of things, security, public safety and the like. In addition, the preparation method of the sensing array is simple, the cost is low, the requirement on the use environment is low, and the requirement on industrial production is met.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (25)

1. A touch sensing unit, comprising:
a substrate (10);
a first electrode (21) and a second electrode (22) arranged on the substrate (10) and insulated from each other;
the electrification component (40) is used for sensing the touch of an object to generate a sensing electric signal; and
a tamper-resistant electrode (30) formed between the first electrode (21) and the second electrode (22) and insulated from the first electrode (21) and the second electrode (22);
wherein the induced electrical signal generates induced electrical signals at the first electrode (21) and the second electrode (22);
the electrification component (40) is in one of the following forms:
the first electrode (21) and the second electrode (22) are used as an electrification component;
the electrification assembly (40) includes: a charging layer; wherein the electrification layer is made of a material which is positioned at a position different from the positions of the first electrode (21) and the second electrode (22) on the rubbing electrode sequence, and the lower surface of the electrification layer is electrically connected to the upper surfaces of the first electrode (21) and the second electrode (22); and
the electrification assembly (40) includes: a first electrification layer (41) and a second electrification layer (42) which are attached to each other or suspended in the air; wherein the first electrification layer (41) and the second electrification layer (42) are made of materials which are positioned at different positions on the rubbing electrode sequence, and the lower surface of the second electrification layer (42) is electrically connected to the upper surfaces of the first electrode (21) and the second electrode (22).
2. The touch sensor unit according to claim 1, wherein the first electrode (21) is formed in a columnar shape on the substrate (10);
the touch sensing unit further comprises an electrical connection part (21') formed on at least one side of the first electrode (21) along the first direction;
the second electrode (22) is formed on the outer side of the first electrode (21), is insulated from the first electrode (21) on the inner side, and is insulated from the lower electric connection part (21'); and
the electric connection part (21') and the second electrode (22) are respectively led out of a first direction signal acquisition end and a second direction signal acquisition end of the touch sensing unit.
3. The touch sensor unit according to claim 2, wherein the electrical connection portion (21 ') is planar or strip-shaped extending along the first direction, and the electrical connection portion (21') is strip-shaped, and has a thickness smaller than that of the first electrode (21) and a width smaller than that of the first electrode (21).
4. Touch sensing unit according to claim 3, characterized in that the tamper resistant electrode (30) is formed on the outside of the first electrode (21), between the electrical connection (21 ') and the second electrode (22), insulated from the inside first electrode (21), insulated from the electrical connection (21') by a first insulating layer (31) on the bottom and insulated from the second electrode (22) by a second insulating layer (32) on the top.
5. Touch sensor unit according to claim 4, wherein the second electrode (22) is insulated from the inner first electrode (21) and the interference-free electrode (30) is insulated from the inner first electrode (21) by air or an insulating medium.
6. Touch sensor unit according to claim 1, characterized in that the upper part of the substrate (10) is divided into four areas-a first area, a second area, a third area and a fourth area, the first area and the third area being diagonal areas, the second area and the fourth area being diagonal areas;
the first electrode (21) comprises: a first portion (21a) located at the second region, a second portion (21b) located at the fourth region, and a third portion (21c) in a stripe shape connecting the first portion and the second portion;
the second electrode (22) comprises: a first portion (22a) located at the first region, a second portion (22b) located at the third region, and a third portion (22c) in a strip shape connecting the first portion and the second portion;
the first electrode and the second electrode are respectively led out of a first direction signal acquisition end and a second direction signal acquisition end of the touch sensing unit; the third portion (21c) of the first electrode is insulated from the third portion (22c) of the second electrode.
7. Touch sensor unit according to claim 6, characterized in that it is insulated from the first electrode (21) and the second electrode (22) by a first insulating layer (31) and a second insulating layer (32), respectively,
the first insulating layer (31), the anti-interference electrode (30) and the second insulating layer (32) are formed from bottom to top at the middle position of the touch sensing unit, the three layers correspond to each other in position and are identical in shape and are in a cross shape, and therefore the upper part of the substrate (10) is divided into the four areas;
the interference-free electrode (30) is formed between the third part (21c) of the first electrode and the third part (22c) of the second electrode, and is insulated from the third part (21c) of the first electrode by a first insulating layer (31) below the interference-free electrode and from the third part (22c) of the second electrode by a second insulating layer (32) above the interference-free electrode.
8. The touch sensor unit according to claim 7, wherein the first (21a), second (21b), and third (21c) portions of the first electrode and the first (22a) and second (22b) portions of the second electrode are formed on the same surface of the substrate (10).
9. Touch sensor unit according to claim 8, wherein the tamper-resistant electrode (30) is insulated from the first (21a) and second (21b) parts of the outer first electrode and the first (22a) and second (22b) parts of the second electrode by air or an insulating medium.
10. Touch sensing unit according to any of claims 7-9, characterized in that the first (21a), the second (21b) part of the first electrode; the shape of the first and second portions (22a, 22b) of the second electrode is one of the following shapes: rectangular, circular, triangular, oval, and polygonal.
11. The touch sensor unit of claim 4 or 7, wherein:
the anti-interference electrode (30) is made of flexible conductive material;
the first insulating layer (31) and the second insulating layer (32) are made of a flexible insulating material.
12. The touch sensor unit of any of claims 1, 3-5, 7-9, wherein the substrate is a flexible non-conductive material;
the first electrode (21), the electrical connection part (21') and the second electrode (22) are all made of flexible conductive materials.
13. The touch sensor unit of claim 12,
the flexible conductive material is: a conductive cloth material or a metal thin film material;
the flexible non-conductive material is one or more of the following materials: non-woven fabric material, polymer material such as polyimide, textile material, carbon fiber material, and resin material.
14. A touch sensor array comprising m rows and n columns of touch sensor units according to any one of claims 1 to 13, wherein:
first electrodes (21) of n touch sensing units along a first direction are connected in series to form a first direction signal acquisition circuit, the touch sensing array comprises m first direction signal acquisition circuits, and all the circuits are insulated from each other;
the second electrodes (22) of the m touch sensing units along the second direction are connected in series to form a path of second direction signal acquisition circuit, the touch sensing array comprises n paths of second direction signal acquisition circuits, and all the paths are insulated from each other.
15. The touch sensor array according to claim 14, wherein when the first electrode (21) includes a third portion (21c) in a stripe shape connecting the first portion and the second portion, and the second electrode (22) includes a third portion (22c) in a stripe shape connecting the first portion and the second portion, the first direction is in a direction of the third portion (21c) of the first electrode touching the sensor unit; the second direction is along a direction of touching a third portion (22c) of the second electrode of the sensing unit.
16. The touch sensor array of claim 14, wherein the angle θ between the first and second directions satisfies: theta is more than 0 degree and less than or equal to 90 degrees.
17. The touch sensing array of claim 14, wherein θ is 90 °.
18. The touch sensing array according to any one of claims 14-17, wherein the tamper resistant electrodes of each touch sensing unit are insulated from each other or connected in any combination.
19. Touch sensor array according to one of claims 14 to 17, wherein all or part of the electrification components (40) of m rows and n columns of touch sensor units are connected into one piece.
20. A touch panel using the touch sensor unit according to any one of claims 1 to 13 or the touch sensor array according to any one of claims 14 to 18.
21. The touch panel of claim 20, wherein the touch panel is used for a touch screen.
22. A smart device, characterized in that a touch sensing array according to any of claims 14-19 is used.
23. The smart device of claim 22, wherein the smart device is configured for image acquisition.
24. The smart device of claim 22, wherein the smart device is configured for contact stress distribution mapping.
25. Carpet, characterized in that a smart device according to claim 22 is applied.
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