WO2015189920A1 - Système de détection de signal et procédé de détection de signal - Google Patents

Système de détection de signal et procédé de détection de signal Download PDF

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WO2015189920A1
WO2015189920A1 PCT/JP2014/065402 JP2014065402W WO2015189920A1 WO 2015189920 A1 WO2015189920 A1 WO 2015189920A1 JP 2014065402 W JP2014065402 W JP 2014065402W WO 2015189920 A1 WO2015189920 A1 WO 2015189920A1
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signal
detection
output
circuit
detection system
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PCT/JP2014/065402
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English (en)
Japanese (ja)
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久亮 金井
李　ウェン
幕内　雅巳
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株式会社日立製作所
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Priority to PCT/JP2014/065402 priority Critical patent/WO2015189920A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/26—Measuring noise figure; Measuring signal-to-noise ratio

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  • the present invention relates to a technique for detecting a minute signal.
  • Patent Document 1 describes “a voltage or current of a certain input signal”.
  • the input signal is time-division multiplexed, and the multiplexing conditions are set.
  • the weak signal is detected with a high signal-to-noise ratio by optimizing and applying a two-stage averaging process to the response signal.
  • Patent Document 2 Japanese Patent Laid-Open No. 2002-221546
  • Input to the circuit 11 store the output time series (13), calculate its power spectrum (15), generate noise (16), gradually increase its intensity and combine it with the input signal to nonlinear
  • the power spectrum is supplied to the circuit 11, the power spectrum is calculated for each noise intensity, the peak of each power spectrum is detected (18), the peak value is obtained, the maximum of these peak values is obtained, and the period of the maximum peak is determined.
  • the period of the weak signal to be obtained (20) ”.
  • SNR Signal-to-noise ratio
  • a semiconductor inspection or measurement device irradiates a wafer to be inspected or measured with a laser, light, electron beam, etc., and converts scattered light or secondary electrons from the wafer into an electrical signal with a detector such as a photomultiplier or scintillator.
  • a detector such as a photomultiplier or scintillator.
  • the measurement resolution is improved by reducing the dose of laser, light, and electron beams.
  • the intensity of the desired signal is reduced by reducing the dose. Since it becomes relatively smaller than noise generated by a detector, an amplifier, etc., it becomes difficult to detect a desired signal with high accuracy.
  • Patent Document 1 it is necessary to further increase the number of times of averaging along with further miniaturization of the semiconductor, increase the size and cost of the device due to the increase in the number of channels of the detector, There is a possibility that throughput decreases due to the increase.
  • an object of the present invention is to provide a minute signal detection system and method that can be realized with a small-scale configuration that improves the signal detection performance of a multilevel signal or an analog signal. .
  • a signal detection system is a signal detection system that is binarized in response to a voltage or current value of an input signal in a non-linear manner.
  • 1st and 2nd nonlinear response part which outputs 1 bit discrete signal, and offset superposition signal which superimposed offset according to said 1 bit discrete signal on said detection signal, and said 1st and 2nd nonlinearity
  • a discrete signal acquisition unit that synchronously acquires each 1-bit discrete signal output from the response unit, and a signal that converts the 1-bit discrete signal acquired synchronously by the discrete signal acquisition unit into digital data or image data
  • a processing unit wherein an input signal of the first nonlinear response unit is the detection signal, and an input signal of the second nonlinear response unit is the offset weight output by another nonlinear response unit. It is a signal, there is a signal detection system.
  • the present invention it is possible to provide a minute signal detection system that can be realized with a small-scale configuration that improves the detection accuracy of a low-level SNR multilevel signal or an analog signal, and an adjustment method thereof.
  • FIG. 1 is an example of a block diagram of a minute signal detection system according to a first embodiment. It is a figure explaining the operation principle of a bistable circuit. It is a block diagram explaining an example of the bistable circuit which concerns on 1st Embodiment. It is a block diagram explaining an example of the bistable circuit which comprises a minute signal detection system.
  • FIG. 5 is a diagram showing an example of input / output waveforms of the minute signal detection system according to the first embodiment. It is the figure which showed the signal detection performance with respect to the signal-to-noise ratio which concerns on 1st Embodiment. It is an example of the block diagram explaining the minute signal detection system concerning a 2nd embodiment.
  • FIG. 1 is a diagram showing a configuration of a minute signal detection system according to the first embodiment, and it is possible to detect a detection signal having a resolution of N bits (N ⁇ 1).
  • the minute signal detection system of this embodiment includes a first nonlinear response unit 106a, N second nonlinear response units 106b to 106d, a discrete signal acquisition unit 107, a signal processing unit 108, a data display unit 109, and a termination unit 110. It consists of.
  • the first nonlinear response unit 106a includes a 1-bit discrete signal 111 that responds nonlinearly according to the voltage or current magnitude of the detection signal 113, and an offset superimposed signal obtained by adding an offset corresponding to the 1-bit discrete signal to the detection signal. 112 is output.
  • Each of the second non-linear response units 106b to 106d has the same configuration as the first non-linear response unit 106a by using the offset superimposed signal of the non-linear response unit of the previous stage as an input signal of the non-linear response unit of the next stage.
  • Discrete signal acquisition unit 107 synchronously acquires N 1-bit discrete signals output from nonlinear response units 106a to 106d.
  • the signal processing unit 108 performs processing such as Fourier transform and addition averaging on the signal acquired by the discrete signal acquisition unit 107 and converts the signal into digital data or image data.
  • the data display unit 109 includes a termination unit 110 that terminates the offset superimposed signal output from the final stage nonlinear response unit 406d that displays digital data or image data.
  • the nonlinear response units 106a to 106d include a delay circuit 101 that delays an input signal, a bistable circuit 102 that outputs a signal that responds nonlinearly according to the voltage or current of the input signal, and the bi-stable circuit.
  • a comparison circuit 103 that binarizes and outputs an output signal of the stabilization circuit 102 to a predetermined voltage or current, a variable amplification circuit 104 that multiplies the output signal of the comparison circuit 103 with an arbitrary amplification factor, and a variable amplification circuit 104 It comprises an adder circuit 105 that adds the output and the output signal of the delay circuit 101.
  • the bistable circuit 102 changes its output signal in a hysteresis depending on the magnitude of the voltage or current of the input signal and the voltage or current of the output signal of the bistable circuit 102, and two values are output in the output signal. It is configured such that the probability of taking is higher than the probability of taking other values.
  • variable amplification circuit included in the non-linear response unit of the nth stage (1 ⁇ n ⁇ N) amplifies the voltage or current so that 2 ⁇ (N ⁇ n) of the minimum resolution of the desired signal is output. It is desirable to set the rate.
  • the termination unit 110 terminates the offset superimposed signal output from the second nonlinear response unit 106b and stabilizes the system.
  • the delay unit and the variable amplification circuit that constitute the second nonlinear response unit 106b The same effect can be obtained by omitting the adding circuit.
  • a bistable circuit As an example of a bistable circuit, a quartic function potential circuit is shown.
  • the quaternary function potential circuit uses the stochastic resonance phenomenon in which the intensity of only the desired signal component increases in the low SNR input signal by using the stochastic fluctuation of noise. 2].
  • si (t) is the desired signal component of the input signal
  • ni (t) is the noise component of the input signal
  • x (t) is the output signal
  • U (t, x) is the potential
  • t is the time
  • a and b Represents an arbitrary constant.
  • FIG. 2 shows the potential shape of the bistable circuit represented by [Equation 2] and the state of the output signal.
  • the horizontal axis is the output signal x (t), and the vertical axis is the potential U (t, x).
  • FIG. 2A shows a potential shape in a steady state when the input signal is zero, which has two stable states (wells), and a shape having a barrier of height ⁇ U between the two stable states. It becomes.
  • the negative side well has the code “0”
  • the positive side well has the code “1”
  • the output signal is located in the negative side well.
  • a desired signal si (t) having a positive value enough to leave a barrier is input, as shown in FIG. 2B
  • the potential is increased so that one well is high and the other well is low. Tilt.
  • the output signal changes only slightly in the well, and the sign of the output signal remains “0” and does not match the sign of the input signal.
  • noise ni (t) having a magnitude that eliminates the barrier is superimposed on this state, as shown in FIG. 2C
  • the output signal changes its state to the positive well along the potential gradient, and the desired signal si The same code “1” as in (t) is output.
  • the state transition of the output signal is moderately induced by the noise component, and a signal having a strong correlation with the desired signal is output.
  • This phenomenon is called stochastic resonance.
  • the mathematical formula of the quaternary function potential circuit is derived by substituting [Formula 2] into [Formula 1] and integrating both sides with time, and is expressed by the following formula [Formula 3].
  • FIG. 3 shows a circuit configuration of a quartic function potential circuit.
  • the quartic function potential circuit includes an adder circuit 301 that adds two feedback signals from the input signal and the positive feedback amplifier circuit 303 and the third square circuit 305, an integration circuit 302 that integrates the added signal, and a linear signal obtained by integrating the integrated signal.
  • a positive feedback amplifier circuit 303 that amplifies and outputs to the adder circuit 301; a negative feedback amplifier circuit 304 that linearly amplifies the integrated signal and outputs the amplified signal to the third square circuit 305; and an adder circuit that obtains the third square of the linearly amplified signal
  • the third-order square circuit 305 that outputs to 301 can be configured.
  • the Schmitt trigger circuit shown in FIG. 4 can be used as another bistable circuit.
  • the Schmitt trigger circuit includes an operational amplifier 401, an input resistance element 402, and a feedback resistance element 403. An input signal is applied to one terminal of the input resistance element 402, and the other terminal is connected to a plus terminal of the operational amplifier 401.
  • the feedback resistor element 403 has one terminal connected to the plus terminal of the operational amplifier 401 and the other terminal connected to the output terminal of the operational amplifier 401.
  • the Schmitt trigger circuit like the quartic function potential circuit, changes the output signal to hysteresis according to the input / output signal, and the probability that the output signal can take two values is higher than the probability that the other value can take another value. Although it has higher characteristics, the signal detection performance may be lower than that of a quartic function potential circuit, but it can be configured with a smaller circuit scale.
  • the input signal (b) in which noise is superimposed on the desired signal (a) is input to the first nonlinear response unit 106a, it is nonlinear in the bistable circuit 102 according to the magnitude of the voltage or current of the input signal.
  • the responding signal (c) is output.
  • the output signal of the bistable circuit 102 is converted into a positive or negative 1-bit discrete signal by the comparison circuit 103 according to the level of the comparison voltage.
  • the 1-bit discrete signal is amplified to an arbitrary signal amplitude by the variable amplifier circuit 104, added by the adder circuit 105 with the input signal delayed by the delay circuit 101, and output as an offset superimposed signal (d).
  • the amplification factor of the variable amplifier circuit 104 is set to have an amplitude that is twice the minimum resolution of the desired signal.
  • the offset superimposed signal output from the first nonlinear response unit 106a is input to the second nonlinear response unit 106b, and a signal (e) that is nonlinearly responded by the bistable circuit is output, and the first nonlinear response unit 106a.
  • a 1-bit discrete signal and an offset superimposed signal are output based on the same operation principle as in FIG.
  • the signal waveform (f) obtained by demodulating the quaternary signal from the 1-bit discrete signals output from the nonlinear response units 106a and 106b has a strong correlation with the desired signal (a) and has a higher signal detection rate than the input signal.
  • the 1-bit discrete signals output from the non-linear response units 106a and 106b are acquired synchronously by the discrete signal acquisition unit 107, and converted into digital data or image data by performing processing such as Fourier transform and addition averaging in the signal processing unit 108. Then, digital data or image data is displayed on the data display unit 109.
  • FIG. 6 shows the simulation result of the signal detection rate in the minute signal detection system with 4 gradation resolution.
  • the horizontal axis is the signal-to-noise ratio (SNR), and the vertical axis is the signal detection rate.
  • SNR signal-to-noise ratio
  • the SNR is lower than 1, the signal detection rate 602 is applied. It can be seen that the signal detection performance is improved.
  • the minute signal detection system of this embodiment it is possible to detect a 2 ⁇ N tone low SNR input signal with high accuracy by N-stage cascade connection of nonlinear response units including a bistable circuit. Therefore, it is possible to avoid the parallelization of detectors required in the conventional method and avoid the increase in size and cost of the apparatus, and it is impossible with a single nonlinear circuit that expresses stochastic resonance. Allows signal detection of values.
  • FIG. 7 is a diagram illustrating a configuration of a minute signal detection system according to the second embodiment.
  • the effect of the first embodiment can be expected when the SNR is 1 or less, and the first implementation is performed when the SNR is 1 or more. It can be seen that the signal detection performance is higher when the form is not applied. This is because the bistable circuit constituting the nonlinear response unit has an effect of improving the signal detection rate only when the noise intensity is appropriate.
  • the signal detection performance is maximized by switching between application and non-application of the nonlinear response unit according to the SNR of the input signal.
  • the present invention provides a signal detection system capable of performing the above.
  • the minute signal detection system of the second embodiment includes a first nonlinear response unit 706a, N second nonlinear response units 706b to 706d, a discrete signal acquisition unit 707, a detection signal acquisition unit 708, a selector unit 709, a signal A processing unit 710, a data display unit 711, and a termination unit 712 are included.
  • the first non-linear response unit 706a includes a 1-bit discrete signal 711 that responds non-linearly according to the voltage or current magnitude of the detection signal 415, and an offset superimposed signal obtained by adding an offset corresponding to the 1-bit discrete signal to the detection signal. 712 is output.
  • Each of the second non-linear response units 706b to 706d has the same configuration as the first non-linear response unit 706a, using the offset superimposed signal of the non-linear response unit of the previous stage as an input signal of the non-linear response unit of the next stage.
  • the discrete signal acquisition unit 707 synchronously acquires N 1-bit discrete signals output from the non-linear response units 706a to 706d.
  • the detection signal acquisition unit 708 acquires the voltage or current of the detection signal.
  • the selector unit 709 selects the signals acquired by the discrete signal acquisition unit 707 and the detection signal acquisition unit 708 based on the control signal.
  • the signal processing unit 710 converts the signal selected by the selector unit 709 into digital data or image data by performing processing such as Fourier transform and addition averaging.
  • Data display unit 711 displays digital data or image data.
  • the termination unit 712 terminates the offset superimposed signal output from the final stage nonlinear response unit 706d.
  • the signal processing unit 710 includes a statistical data evaluation function 714 for evaluating the signal amplitude and noise variance of the signal output from the selector, a frequency spectrum, and the like based on the statistical data, and a statistical data evaluation function 714.
  • a selector control function 713 for outputting a control signal for selecting a selector according to the evaluation result is included.
  • FIG. 8 shows a switching control flow of application / non-application of the non-linear response unit according to the SNR in the minute signal detection system of the present embodiment.
  • the selector 709 is set on the detection signal acquisition unit 708 side (S801).
  • the detection signal acquisition unit (S802) acquires the detection signal
  • the statistical data evaluation function 7 measures the signal amplitude, noise variance, and the like of the detection signal and calculates the SNR (S803).
  • the control signal is output so that the selector selects the discrete signal acquisition unit (S805).
  • the control signal is selected to select the detection signal acquisition unit. Is output (S806).
  • the signal detection system of the present embodiment can maintain a state where the signal detection performance is maximized regardless of the SNR value.
  • the threshold value of the SNR needs to be adjusted according to the characteristics of the nonlinear characteristic section, and it is desirable to adjust the threshold value so that the signal detection performance is kept high.
  • the selector unit and the signal processing unit are described separately, but it is also possible to include a selector function in the signal processing unit and to have the same function by arithmetic processing.
  • FIG. 9 shows a signal detection system according to a third embodiment including means for automatically optimizing the gain of the variable amplifier circuit included in the nonlinear response unit.
  • the minute signal detection system of the third embodiment includes a first nonlinear response unit 906a, N second nonlinear response units 906b to 906d, a discrete signal acquisition unit 907, a detection signal acquisition unit 908, a selector unit 909, a signal A processing unit 910, a data display unit 911, and a termination unit 912 are included. Since the operation of each configuration is substantially the same as that of the second embodiment, description thereof is omitted.
  • the signal processing unit 910 includes a statistical data evaluation function 914 for evaluating the signal amplitude and noise variance of the signal output from the selector, or the frequency spectrum based on the statistical data, A selector control function 913 that outputs a selector control signal for selecting a selector according to the evaluation result of the statistical data evaluation function 914, and an amplification of the variable amplification circuit included in each nonlinear response unit according to the evaluation result of the statistical data evaluation function 914 And a parameter control function 915 for outputting a parameter control signal 919 for adjusting the rate.
  • a statistical data evaluation function 914 for evaluating the signal amplitude and noise variance of the signal output from the selector, or the frequency spectrum based on the statistical data
  • a selector control function 913 that outputs a selector control signal for selecting a selector according to the evaluation result of the statistical data evaluation function 914, and an amplification of the variable amplification circuit included in each nonlinear response unit according to the evaluation result of the statistical data evaluation function 914
  • the amplification factor of the variable amplification circuit of the second nonlinear response unit 906b is 1 ⁇ 2 of the amplification factor specified for the variable amplification circuit 904 of the first nonlinear response unit 906a.
  • the amplification factor of the variable amplification circuit of the third nonlinear response unit 906c is 1/4, and the amplification factor of the variable amplification circuit of the Nth nonlinear response unit 906d is 1/2 (N ⁇ 1).
  • a parameter control signal 919 is output.
  • FIG. 10 shows an example of a flowchart for adjusting the control parameters of the third embodiment.
  • the selector 909 is set in the detection signal acquisition unit 908 (S1001).
  • the statistical data evaluation function 914 measures the maximum amplitude (Vmax) of the detection signal acquired by the detection signal acquisition unit 908 (S1002), and sets the amplification factor of the nth stage variable amplification circuit 904 to Vmax / 2 ⁇ n. (S1003).
  • N represents the number of stages of the nonlinear response unit 906.
  • the selector 909 is set in the discrete signal acquisition unit 907 (S1004), the control parameter of the bistable circuit 902 is set to the minimum value (S1005), and the signal detection performance (P0) is measured by the statistical data evaluation function 914. (S1006).
  • the control parameter of the bistable system circuit 902 is increased (S1007), and the signal detection performance (P1) is measured (S1008).
  • the signal detection performance P1 after the increase in the control parameter is compared with the previous signal detection performance P0 (S1009). If the signal detection performance P1 after the increase in the control parameter is large, P1 is replaced with P0 (S1010), and the control parameter is increased. Then, the loop for evaluating the signal detection performance P1 is repeated again (S1007 to S1009). If the signal detection performance P1 after the increase of the control parameter is smaller than P0, the control parameter is decreased (S1011) and the adjustment is terminated.
  • control parameters of the signal detection system can be optimized so that the signal detection performance is maximized by the above adjustment flowchart.
  • the gain of the variable amplifier circuit can be automatically optimized based on the statistical data of the detection signal so that the signal detection performance is maximized, the startup time or throughput of the signal detection system can be reduced. Improvement can be expected.
  • 11 and 12 show an example of an apparatus to which the signal detection system according to the first, second or third embodiment is applied.
  • FIG. 11 is a diagram illustrating an example of an electron microscope apparatus to which the signal detection system according to the first, second, or third embodiment is applied.
  • An electron gun 1101 that emits an electron beam
  • lenses 1102-1 and 1102-2 for narrowing the electron beam diameter that adjusts the irradiation position of the electron beam
  • a stage 1104 on which a sample 1105 is installed and a sample
  • a detector 1106 that detects secondary electrons emitted from 1105
  • a signal detection board 1107 that amplifies the detection signal, converts it into a digital signal, and performs signal processing
  • a monitor 1108 that displays the signal-processed data as an image.
  • An electron microscope configured. In this electron microscope, the signal detection system according to the first, second, or third embodiment is mounted on the signal detection board 1107 to improve the SNR of the detection signal output from the detector 1106.
  • the SNR can be improved by mounting the signal detection system on the signal detection board, even when the number of detectors in parallel and the number of integration processes are reduced, the low SNR can be accurately obtained. It is possible to detect a desired signal component from the signal. As a result, by applying this embodiment, the apparatus can be reduced in size, cost, power saving, and high throughput.
  • FIG. 12 is a diagram illustrating an example of an ultrasonic diagnostic apparatus to which the signal detection system according to the first, second, or third embodiment is applied.
  • the ultrasonic diagnostic apparatus transmits an ultrasonic signal to an object to be measured and detects an ultrasonic probe 1203 that detects the reflected signal, an apparatus main body 1202 that performs arithmetic processing on the detected signal, and an image that displays the arithmetically processed signal.
  • the ultrasonic probe 1203 includes the signal detection system according to the first, second, or third embodiment.
  • the ultrasonic probe 1203 is equipped with a plurality of channels of detectors and detection circuits mounted on the ultrasonic probe 1203 in order to improve the detection sensitivity of the reflected signal. For this reason, the ultrasonic probe 1203 is increased in size and power consumption is increased, and the workability of the ultrasonic probe may be deteriorated.
  • the present invention is not limited to the above-described embodiment, and includes various modifications.
  • each of the above-described embodiments has been described in detail for easy understanding of the present invention, and is not necessarily limited to the one having all the configurations described.
  • a part of the configuration of an embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of an embodiment.
  • Each of the above-described configurations, functions, processing units, processing means, and the like may be realized by hardware by designing a part or all of them with, for example, an integrated circuit.
  • Each of the above-described configurations, functions, and the like may be realized by software by interpreting and executing a program that realizes each function by the processor.
  • Information such as programs, tables, and files that realize each function can be stored in a memory, a hard disk, a recording device such as an SSD (Solid State Drive), or a recording medium such as an IC card, an SD card, or a DVD.
  • SSD Solid State Drive
  • DESCRIPTION OF SYMBOLS 101 Delay circuit, 102 ... Bistable circuit, 103 ... Comparison circuit, 104 ... Variable amplifier circuit, 105 ... Adder circuit, 106a-106d ... Nonlinear response part, 107 ... Discrete signal acquisition part, 108 ... Signal processing part, 109 ... Waveform display unit 110 ... Terminal unit 111 ... 1-bit discrete signal 112 ... Offset superimposed signal 113 ... Detection signal 301 ... Adder circuit 302 ... Integral circuit 303 ... Positive feedback amplifier circuit 304 ... Negative feedback amplifier circuit 305... Cubic square circuit 401...
  • Bistable circuit 903 Reference circuit 904 Variable amplifier circuit 905 Adder circuit 906a to 906d Nonlinear response unit 907 Discrete signal acquisition unit 908 Detection signal acquisition unit 909 Selector unit 910 Signal processing unit 911 Data display unit, 912 ... Terminal unit, 913 ... Selector control function, 914 ... Statistical data evaluation function, 915 ... Parameter control function, 916 ... Detection signal, 917 ... 1-bit discrete signal, 918 ... Offset superimposed signal, 919 ... Parameter control Signal 1101 ... Electron gun 1102-1 1102-2 ... Lens 1103 ... Deflecting electrode 1104 ... S Over di-, 1105 ... Sample, 1106 ... detector, 1107 ... signal processing board, 1108 ... data display unit 1201 ... image display unit, 1202 ... device main body, 1203 ... ultrasonic probe

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Abstract

Le but de la présente invention est de fournir un système de détection de signal faible pour améliorer la précision de détection de signal pour un signal de détection ou un signal analogique ayant une pluralité de tensions ou de niveaux de courant. L'invention concerne un système de détection de signal caractérisé par le fait de comprendre de première et seconde unités de réponse non linéaire qui répondent chacune de manière non linéaire à la valeur de tension ou de courant d'un signal d'entrée et fournissent en sortie un signal discret à un bit binarisé et un signal de superposition décalé dans lequel un décalage correspondant au signal discret à un bit est superposé sur un signal de détection, une unité d'acquisition de signaux discrets pour synchroniser et acquérir les signaux discrets à un bit délivrés par les première et seconde unités de réponse non linéaire, et une unité de traitement de signal de décalage pour convertir les signaux discrets à un bit synchronisés et acquis par l'unité d'acquisition de signaux discrets en données numériques ou en données d'image, et caractérisé en ce que le signal d'entrée pour la première unité de réponse non linéaire est le signal de détection et le signal d'entrée pour la seconde unité de réponse non linéaire est le signal de superposition décalé délivré par une autre unité de réponse non linéaire.
PCT/JP2014/065402 2014-06-11 2014-06-11 Système de détection de signal et procédé de détection de signal WO2015189920A1 (fr)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012175371A (ja) * 2011-02-21 2012-09-10 Nippon Telegr & Teleph Corp <Ntt> 受信方法、及び受信装置
WO2013121831A1 (fr) * 2012-02-17 2013-08-22 株式会社日立製作所 Procédé et système de détection de signal très petit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012175371A (ja) * 2011-02-21 2012-09-10 Nippon Telegr & Teleph Corp <Ntt> 受信方法、及び受信装置
WO2013121831A1 (fr) * 2012-02-17 2013-08-22 株式会社日立製作所 Procédé et système de détection de signal très petit

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