WO2015129531A1 - Inspection device, inspection method, program, and recording medium - Google Patents

Inspection device, inspection method, program, and recording medium Download PDF

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Publication number
WO2015129531A1
WO2015129531A1 PCT/JP2015/054526 JP2015054526W WO2015129531A1 WO 2015129531 A1 WO2015129531 A1 WO 2015129531A1 JP 2015054526 W JP2015054526 W JP 2015054526W WO 2015129531 A1 WO2015129531 A1 WO 2015129531A1
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inspection
backlight
inspection apparatus
inspected
unit
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PCT/JP2015/054526
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French (fr)
Japanese (ja)
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正敬 近藤
北島 功朗
稲葉 豊
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オムロン株式会社
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Priority to CN201580005275.7A priority Critical patent/CN105934665B/en
Publication of WO2015129531A1 publication Critical patent/WO2015129531A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Definitions

  • the present invention relates to an inspection apparatus, an inspection method, a program, and a recording medium.
  • Patent Document 1 an inspection apparatus for inspecting an object to be inspected such as a backlight panel is known (for example, see Patent Document 1).
  • the inspection apparatus of Patent Document 1 includes a line sensor camera that captures an image of a backlight panel from directly above, and two line sensor cameras that capture an image of the backlight panel from obliquely above, and the imaging results of these line sensor cameras. Is configured to detect defects based on For this reason, by moving one line sensor camera, it is possible to shorten the inspection time as compared with the case of imaging the backlight panel while changing the angle of the line sensor camera with respect to the backlight panel. .
  • the present invention has been made to solve the above problems, and an object of the present invention is to provide an inspection apparatus, an inspection method, a program, and a recording medium capable of improving the accuracy of defect detection. is there.
  • An inspection apparatus inspects an object to be inspected on which sheet-like optical components are stacked, and inspects a charging unit that charges the optical component and an object to be inspected in a state where the optical component is charged. A part.
  • the gap between the optical components can be reduced by adsorbing the optical components to each other during inspection.
  • a defect can be made easy to detect.
  • the accuracy of defect detection can be improved.
  • the inspection apparatus may include a static elimination unit that neutralizes an object to be inspected by the inspection unit.
  • the inspection apparatus may include a protection circuit that protects the object to be inspected.
  • the inspection unit may include an imaging unit that images the object to be inspected and a determination unit that determines the presence or absence of a defect based on an imaging result of the imaging unit.
  • the object to be inspected may include a backlight.
  • This configuration allows the backlight to be inspected.
  • the inspection method according to the present invention is for inspecting an object to be inspected on which sheet-like optical components are laminated.
  • the step of charging the optical component, and the step of inspecting the object to be inspected with the optical component charged. Is provided.
  • the gap between the optical components can be reduced by adsorbing the optical components to each other during inspection.
  • a defect can be made easy to detect.
  • the accuracy of defect detection can be improved.
  • the program according to the present invention is for causing a computer to execute the above-described inspection method.
  • the recording medium according to the present invention records a program for causing a computer to execute the above-described inspection method.
  • the inspection apparatus According to the inspection apparatus, inspection method, program, and recording medium of the present invention, it is possible to improve the accuracy of defect detection.
  • FIG. 1 is a block diagram showing a schematic configuration of an inspection apparatus according to an embodiment of the present invention.
  • FIG. 2 is an exploded perspective view showing an example of a backlight inspected by the inspection apparatus.
  • FIG. 3 is a circuit diagram showing a protection circuit of the inspection apparatus of FIG.
  • FIG. 4 is a schematic diagram showing a state before the backlight is charged.
  • FIG. 5 is a schematic diagram showing a state in which the backlight is charged.
  • FIG. 6 is a graph showing the inspection result of the inspection apparatus according to the comparative example.
  • FIG. 7 is a graph showing the inspection result of the inspection apparatus according to the example corresponding to the present embodiment.
  • the inspection apparatus 100 (see FIG. 1) is configured to inspect the backlight 200 (see FIG. 2). Specifically, the inspection apparatus 100 is configured to determine whether or not there is a defect at each position in plan view of the backlight 200 based on luminance unevenness when the backlight 200 is turned on. Yes. As an example of the cause of the defect, there is an intrusion of foreign matter such as dust or a scratch.
  • the backlight 200 inspected by the inspection apparatus 100 is, for example, a surface light source device that illuminates liquid crystal from the back.
  • the backlight 200 is an example of the “inspection object” in the present invention.
  • the backlight 200 includes a plurality of LEDs (light emitting diodes) 201, a light guide plate 202, a diffusion sheet 203, prism sheets 204 and 205, a frame 206 that accommodates them, and a frame 206. And a reflecting plate 207 provided on the lower surface side of the.
  • the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are examples of the “optical component” in the present invention.
  • the plurality of LEDs 201 are provided on an FPC (flexible printed wiring board) 208 and are arranged along a side surface of the light guide plate 202 at a predetermined interval.
  • the light guide plate 202 is configured to cause the light emitted from the LEDs 201 to emit light.
  • a diffusion sheet 203 and prism sheets 204 and 205 are laminated.
  • a double-sided tape 209 having a light shielding property is attached to the outer edge portion of the upper surface of the prism sheet 205 and the upper surface side of the frame 206.
  • the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are thin sheet-like components.
  • a gap H (see FIG. 4) may be generated between the diffusion sheet 203 and the prism sheet 204 and between the prism sheet 204 and the prism sheet 205. Therefore, the inspection apparatus 100 according to the present embodiment is configured to inspect the backlight 200 with the gap H reduced.
  • the inspection apparatus 100 includes a charging unit 1, an inspection unit 2, and a charge removal unit 3.
  • the charging unit 1 is provided to charge the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 of the backlight 200.
  • the charging unit 1 is configured to generate anions N (see FIG. 4) and supply the anions N to the surface 200a of the backlight 200 (see FIG. 4).
  • the inspection unit 2 is configured to inspect the backlight 200 (see FIG. 5) in a state where the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are charged.
  • the inspection unit 2 includes an imaging unit 21 that images the backlight 200, a data processing unit 22 that processes image data captured by the imaging unit 21, and the presence or absence of defects based on the data processed by the data processing unit 22. And a determination unit 23 for determining
  • the imaging unit 21 is an area sensor, for example, and has a function of imaging the entire surface 200a of the backlight 200.
  • the data processing unit 22 is configured to process the image data obtained by the imaging unit 21 based on a predetermined algorithm.
  • the determination unit 23 is configured to determine whether or not the luminance at each position of the backlight 200 is within a predetermined range based on the data processed by the data processing unit 22. Then, the determination unit 23 determines that there is no defect in a portion where the luminance is within the predetermined range, and determines that there is a defect in a portion where the luminance is outside the predetermined range.
  • the neutralization unit 3 is provided to neutralize the backlight 200 inspected by the inspection unit 2.
  • the static elimination unit 3 is configured to generate cations and anions and supply the cations and anions to the surface 200 a of the backlight 200.
  • the neutralization unit 3 has a function of neutralizing and removing the anions N adsorbed on the surface 200 a of the backlight 200.
  • the inspection apparatus 100 is provided with a DC power supply 4 and a protection circuit 5.
  • the DC power supply 4 is provided to turn on the backlight 200 during inspection.
  • the protection circuit 5 is disposed between the DC power supply 4 and the backlight 200 and is provided to suppress an overcurrent from flowing through the LED 201 of the backlight 200.
  • the protection circuit 5 includes a Zener diode 5 a, the anode of the Zener diode 5 a is connected to the negative side of the DC power supply 4, and the cathode of the Zener diode 5 a is connected to the positive side of the DC power supply 4. .
  • the inspection apparatus 100 is provided with a computer (not shown) for controlling the inspection apparatus 100.
  • the computer includes a recording medium on which a program for executing an inspection method described later is recorded. That is, the inspection apparatus 100 is controlled to perform an inspection method described later by the computer when the program is executed by the computer.
  • the backlight 200 (see FIG. 2) to be inspected is installed in a transport device (not shown) such as an index table. Then, the backlight 200 is connected to the DC power supply 4 via the protection circuit 5 as shown in FIG. Thereafter, the backlight 200 is transported to the charged region by the transport device.
  • a transport device not shown
  • the backlight 200 is connected to the DC power supply 4 via the protection circuit 5 as shown in FIG.
  • the backlight 200 is transported to the charged region by the transport device.
  • the anion N is generated by the charging unit 1 (see FIG. 1), and the anion N is supplied to the surface 200 a of the backlight 200.
  • the anion N is adsorbed on the surface 200a of the backlight 200, and the backlight 200 is charged. More specifically, the upper surface side of the prism sheet 205 is positively charged and the lower surface side of the prism sheet 205 is negatively charged by the anions N adsorbed on the surface 200a. Accordingly, in the prism sheet 204, the diffusion sheet 203, and the light guide plate 202, the upper surface side is positively charged, and the lower surface side is negatively charged.
  • the prism sheet 205 and the prism sheet 204 are adsorbed, the prism sheet 204 and the diffusion sheet 203 are adsorbed, and the diffusion sheet 203 and the light guide plate 202 are adsorbed. Thereby, the gap H (see FIG. 4) between the sheets is reduced. Thereafter, the charged backlight 200 is transported to the inspection area by the transport device.
  • the entire surface 200a of the backlight 200 is imaged by the imaging unit 21 (see FIG. 1). Thereafter, the data processing unit 22 (see FIG. 1) processes the image data obtained by the imaging unit 21 based on a predetermined algorithm.
  • the determination unit 23 determines whether or not the luminance at each position of the backlight 200 is within a predetermined range. Then, it is determined that there is no defect for a portion whose luminance is within a predetermined range, and it is determined that there is a defect for a portion whose luminance is outside the predetermined range. That is, in the present embodiment, the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are charged, and the backlight 200 in a state where the gap H between them is reduced is inspected by the inspection unit 2.
  • the cation and the anion are generated by the static eliminating unit 3 (see FIG. 1), and the cation and the anion are supplied to the surface 200a of the backlight 200.
  • the anion N adsorbed on the surface 200a of the backlight 200 is neutralized and removed.
  • the neutralized backlight 200 is removed from the transport device.
  • the charging unit 1 that charges the backlight 200 and the inspection unit 2 that inspects the charged backlight 200 are provided.
  • the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are adsorbed to each other at the time of inspection, whereby the gap H between them can be reduced.
  • the gap H between them can be reduced.
  • the gap H can be reduced without contact, the accuracy of defect detection can be improved without damaging the backlight 200.
  • the protection circuit 5 by providing the protection circuit 5, it is possible to suppress an overcurrent from flowing through the LED 201 at the time of inspection, and thus it is possible to suppress the LED 201 from being damaged.
  • the optical components (light guide plate, diffusion sheet, and prism sheet) on which the backlight is laminated are inspected in an uncharged state.
  • the backlight is laminated. Inspection was performed with the optical parts charged. Further, the backlight to be inspected has defects formed in advance at a predetermined position P (see FIGS. 6 and 7), and the same backlight was used in the comparative example and the example.
  • inspection apparatus by a comparative example was shown in FIG. 6, and the test result of the test
  • the vertical axis represents the luminance
  • the horizontal axis represents the position
  • the inspection result of the predetermined linear region including the position P where the defect is formed is shown.
  • the luminance unevenness at each position of the backlight was large. This is considered to be due to the large influence of the gap generated between the optical components of the backlight.
  • the predetermined range luminance range in which it is determined that there is no defect
  • the defect formed at the position P cannot be detected. That is, in the inspection apparatus according to the comparative example, the luminance unevenness due to the defect is almost the same as the luminance unevenness due to the gap, and it is difficult to discriminate these. Note that if the predetermined range R1 is narrowed in order to detect luminance unevenness due to a defect, the luminance unevenness due to the gap is erroneously detected as a defect.
  • the luminance unevenness at each position of the backlight was reduced as compared with the comparative example. This is presumably because the optical components of the backlight are charged and the optical components are attracted to each other, and the gap between the optical components is reduced. Note that the luminance unevenness at the position P is caused by a defect, and therefore remains at the same level as in the comparative example. For this reason, since the brightness at the position P is outside the predetermined range R2 by narrowing the predetermined range R2 for determining the presence or absence of defects compared to the comparative example, the defect formed at the position P is appropriately detected. We were able to.
  • the luminance unevenness due to the defect can be made obvious by reducing the luminance unevenness due to the gap, and thus the defect can be appropriately detected. As a result, the accuracy of defect detection could be improved.
  • the predetermined range R2 could be set to about 2/3 of the predetermined range R1.
  • the backlight 200 is shown as an example of an object to be inspected.
  • the present invention is not limited to this, and the object to be inspected may be a laminate of sheet-like optical components.
  • the diffusion sheet 203 and the prism sheets 204 and 205 are stacked on the upper surface of the light guide plate 202.
  • the present invention is not limited to this. It may be something like this.
  • the charging unit 1 generates the negative ions N.
  • the present invention is not limited thereto, and the charging unit may generate positive ions.
  • the imaging unit 21 is an area sensor
  • the present invention is not limited thereto, and the imaging unit may be a line sensor.
  • the present invention can be used for an inspection apparatus, an inspection method, a program, and a recording medium for inspecting an object to be inspected on which sheet-like optical components are stacked.

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Abstract

This inspection device, which inspects articles comprising sheet-shaped optical components laminated together, has an electrostatic charging unit that electrostatically charges optical components and an inspection unit that inspects an article with the optical components therein electrostatically charged.

Description

検査装置、検査方法、プログラムおよび記録媒体Inspection device, inspection method, program, and recording medium
 本発明は、検査装置、検査方法、プログラムおよび記録媒体に関する。 The present invention relates to an inspection apparatus, an inspection method, a program, and a recording medium.
 従来、バックライトパネルなどの被検査体を検査する検査装置が知られている(たとえば、特許文献1参照)。 Conventionally, an inspection apparatus for inspecting an object to be inspected such as a backlight panel is known (for example, see Patent Document 1).
 特許文献1の検査装置は、バックライトパネルを真上から撮像するラインセンサーカメラと、バックライトパネルを斜め上方から撮像する2つのラインセンサーカメラとを備えており、これらのラインセンサーカメラの撮像結果に基づいて不良を検出するように構成されている。このため、1つのラインセンサーカメラを移動させることにより、バックライトパネルに対するラインセンサーカメラの角度を変更させながら、バックライトパネルを撮像する場合に比べて、検査時間の短縮を図ることが可能である。 The inspection apparatus of Patent Document 1 includes a line sensor camera that captures an image of a backlight panel from directly above, and two line sensor cameras that capture an image of the backlight panel from obliquely above, and the imaging results of these line sensor cameras. Is configured to detect defects based on For this reason, by moving one line sensor camera, it is possible to shorten the inspection time as compared with the case of imaging the backlight panel while changing the angle of the line sensor camera with respect to the backlight panel. .
特開2007-333449号公報JP 2007-333449 A
 ここで、シート状の光学部品が積層された被検査体では、光学部品の間に隙間が生じやすい。そして、検査装置による検査時に、光学部品の間に隙間が生じている場合には、その隙間に起因して輝度ムラが生じることにより、欠陥の判別が困難になるので、欠陥検出の精度向上を図ることが困難である。なお、特許文献1の検査装置においても、同様の問題点が存在する。 Here, in the inspected object in which the sheet-like optical components are laminated, a gap is easily generated between the optical components. And if there is a gap between the optical components during the inspection by the inspection device, luminance unevenness occurs due to the gap, which makes it difficult to determine the defect. It is difficult to plan. The inspection apparatus disclosed in Patent Document 1 has the same problem.
 本発明は、上記の課題を解決するためになされたものであり、本発明の目的は、欠陥検出の精度向上を図ることが可能な検査装置、検査方法、プログラムおよび記録媒体を提供することである。 The present invention has been made to solve the above problems, and an object of the present invention is to provide an inspection apparatus, an inspection method, a program, and a recording medium capable of improving the accuracy of defect detection. is there.
 本発明による検査装置は、シート状の光学部品が積層された被検査体を検査するものであり、光学部品を帯電させる帯電部と、光学部品が帯電された状態の被検査体を検査する検査部とを備える。 An inspection apparatus according to the present invention inspects an object to be inspected on which sheet-like optical components are stacked, and inspects a charging unit that charges the optical component and an object to be inspected in a state where the optical component is charged. A part.
 このように構成することによって、検査時に、光学部品を互いに吸着させることにより、光学部品の間の隙間を減らすことができる。これにより、隙間に起因する輝度ムラを抑制することができるので、欠陥を検出しやすくすることができる。その結果、欠陥検出の精度向上を図ることができる。 With this configuration, the gap between the optical components can be reduced by adsorbing the optical components to each other during inspection. Thereby, since the brightness nonuniformity resulting from a clearance gap can be suppressed, a defect can be made easy to detect. As a result, the accuracy of defect detection can be improved.
 上記検査装置において、検査部により検査された被検査体を除電する除電部を備えていてもよい。 The inspection apparatus may include a static elimination unit that neutralizes an object to be inspected by the inspection unit.
 このように構成すれば、検査後に、塵埃などが付着するのを抑制するとともに、静電破壊の発生を抑制することができる。 With this configuration, it is possible to suppress the adhesion of dust and the like after the inspection and to suppress the occurrence of electrostatic breakdown.
 上記検査装置において、被検査体を保護する保護回路を備えていてもよい。 The inspection apparatus may include a protection circuit that protects the object to be inspected.
 このように構成すれば、検査時に被検査体が破損するのを抑制することができる。 If configured in this way, it is possible to suppress the object to be inspected from being damaged during inspection.
 上記検査装置において、検査部は、被検査体を撮像する撮像部と、撮像部による撮像結果に基づいて欠陥の有無を判定する判定部とを含んでいてもよい。 In the inspection apparatus, the inspection unit may include an imaging unit that images the object to be inspected and a determination unit that determines the presence or absence of a defect based on an imaging result of the imaging unit.
 このように構成すれば、撮像結果に基づいて欠陥の有無を判定することができる。 With this configuration, it is possible to determine the presence or absence of a defect based on the imaging result.
 上記検査装置において、被検査体は、バックライトを含んでいてもよい。 In the above inspection apparatus, the object to be inspected may include a backlight.
 このように構成すれば、バックライトを検査することができる。 This configuration allows the backlight to be inspected.
 本発明による検査方法は、シート状の光学部品が積層された被検査体を検査するものであり、光学部品を帯電させる工程と、光学部品が帯電された状態の被検査体を検査する工程とを備える。 The inspection method according to the present invention is for inspecting an object to be inspected on which sheet-like optical components are laminated. The step of charging the optical component, and the step of inspecting the object to be inspected with the optical component charged. Is provided.
 このように構成することによって、検査時に、光学部品を互いに吸着させることにより、光学部品の間の隙間を減らすことができる。これにより、隙間に起因する輝度ムラを抑制することができるので、欠陥を検出しやすくすることができる。その結果、欠陥検出の精度向上を図ることができる。 With this configuration, the gap between the optical components can be reduced by adsorbing the optical components to each other during inspection. Thereby, since the brightness nonuniformity resulting from a clearance gap can be suppressed, a defect can be made easy to detect. As a result, the accuracy of defect detection can be improved.
 本発明によるプログラムは、上記した検査方法をコンピュータに実行させるためのものである。 The program according to the present invention is for causing a computer to execute the above-described inspection method.
 本発明による記録媒体は、上記した検査方法をコンピュータに実行させるためのプログラムが記録されたものである。 The recording medium according to the present invention records a program for causing a computer to execute the above-described inspection method.
 本発明の検査装置、検査方法、プログラムおよび記録媒体によれば、欠陥検出の精度向上を図ることができる。 According to the inspection apparatus, inspection method, program, and recording medium of the present invention, it is possible to improve the accuracy of defect detection.
図1は、本発明の一実施形態による検査装置の概略構成を示したブロック図である。FIG. 1 is a block diagram showing a schematic configuration of an inspection apparatus according to an embodiment of the present invention. 図2は、検査装置により検査されるバックライトの一例を示した分解斜視図である。FIG. 2 is an exploded perspective view showing an example of a backlight inspected by the inspection apparatus. 図3は、図1の検査装置の保護回路を示した回路図である。FIG. 3 is a circuit diagram showing a protection circuit of the inspection apparatus of FIG. 図4は、バックライトが帯電される前の状態を示した模式図である。FIG. 4 is a schematic diagram showing a state before the backlight is charged. 図5は、バックライトが帯電された状態を示した模式図である。FIG. 5 is a schematic diagram showing a state in which the backlight is charged. 図6は、比較例による検査装置の検査結果を示したグラフである。FIG. 6 is a graph showing the inspection result of the inspection apparatus according to the comparative example. 図7は、本実施形態に対応する実施例による検査装置の検査結果を示したグラフである。FIG. 7 is a graph showing the inspection result of the inspection apparatus according to the example corresponding to the present embodiment.
 以下、本発明の実施形態について図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
 まず、図1~図3を参照して、本発明の一実施形態による検査装置100の概略構成について説明する。 First, a schematic configuration of an inspection apparatus 100 according to an embodiment of the present invention will be described with reference to FIGS.
 検査装置100(図1参照)は、バックライト200(図2参照)を検査するように構成されている。具体的には、検査装置100は、バックライト200を点灯させたときの輝度ムラに基づいて、バックライト200の平面視における各位置に欠陥が存在するか否かを判定するように構成されている。なお、欠陥の原因の一例としては、塵埃などの異物の侵入、または、傷などによるものが挙げられる。 The inspection apparatus 100 (see FIG. 1) is configured to inspect the backlight 200 (see FIG. 2). Specifically, the inspection apparatus 100 is configured to determine whether or not there is a defect at each position in plan view of the backlight 200 based on luminance unevenness when the backlight 200 is turned on. Yes. As an example of the cause of the defect, there is an intrusion of foreign matter such as dust or a scratch.
 ここで、検査装置100により検査されるバックライト200は、たとえば、液晶を背面から照明する面光源装置である。なお、バックライト200は、本発明の「被検査体」の一例である。 Here, the backlight 200 inspected by the inspection apparatus 100 is, for example, a surface light source device that illuminates liquid crystal from the back. The backlight 200 is an example of the “inspection object” in the present invention.
 このバックライト200は、図2に示すように、複数のLED(発光ダイオード)201と、導光板202と、拡散シート203と、プリズムシート204および205と、これらを収容するフレーム206と、フレーム206の下面側に設けられた反射板207とを備えている。なお、導光板202、拡散シート203、プリズムシート204および205は、本発明の「光学部品」の一例である。 As shown in FIG. 2, the backlight 200 includes a plurality of LEDs (light emitting diodes) 201, a light guide plate 202, a diffusion sheet 203, prism sheets 204 and 205, a frame 206 that accommodates them, and a frame 206. And a reflecting plate 207 provided on the lower surface side of the. The light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are examples of the “optical component” in the present invention.
 複数のLED201は、FPC(フレキシブルプリント配線板)208に設けられ、導光板202の側面に沿って所定の間隔を隔てて配置されている。導光板202は、LED201から出射された光を面発光させるように構成されている。導光板202の上面上には、拡散シート203、プリズムシート204および205が積層されている。プリズムシート205の上面の外縁部と、フレーム206の上面側とには、遮光性を有する両面テープ209が貼り付けられている。 The plurality of LEDs 201 are provided on an FPC (flexible printed wiring board) 208 and are arranged along a side surface of the light guide plate 202 at a predetermined interval. The light guide plate 202 is configured to cause the light emitted from the LEDs 201 to emit light. On the upper surface of the light guide plate 202, a diffusion sheet 203 and prism sheets 204 and 205 are laminated. A double-sided tape 209 having a light shielding property is attached to the outer edge portion of the upper surface of the prism sheet 205 and the upper surface side of the frame 206.
 そして、このようなバックライト200では、導光板202、拡散シート203、プリズムシート204および205が薄いシート状の部品であることから、良品であっても、導光板202と拡散シート203との間、拡散シート203とプリズムシート204との間、および、プリズムシート204とプリズムシート205との間に隙間H(図4参照)が生じ得る。そこで、本実施形態の検査装置100では、隙間Hを減らした状態でバックライト200を検査するように構成されている。 In such a backlight 200, the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are thin sheet-like components. A gap H (see FIG. 4) may be generated between the diffusion sheet 203 and the prism sheet 204 and between the prism sheet 204 and the prism sheet 205. Therefore, the inspection apparatus 100 according to the present embodiment is configured to inspect the backlight 200 with the gap H reduced.
 具体的には、検査装置100は、図1に示すように、帯電部1と、検査部2と、除電部3とを備えている。 Specifically, as shown in FIG. 1, the inspection apparatus 100 includes a charging unit 1, an inspection unit 2, and a charge removal unit 3.
 帯電部1は、バックライト200の導光板202、拡散シート203、プリズムシート204および205を帯電させるために設けられている。この帯電部1は、陰イオンN(図4参照)を発生させるとともに、その陰イオンNをバックライト200の表面200a(図4参照)に供給するように構成されている。 The charging unit 1 is provided to charge the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 of the backlight 200. The charging unit 1 is configured to generate anions N (see FIG. 4) and supply the anions N to the surface 200a of the backlight 200 (see FIG. 4).
 検査部2は、導光板202、拡散シート203、プリズムシート204および205が帯電された状態のバックライト200(図5参照)を検査するように構成されている。この検査部2は、バックライト200を撮像する撮像部21と、撮像部21により撮像された画像データを処理するデータ処理部22と、データ処理部22により処理されたデータに基づいて欠陥の有無を判定する判定部23とを含んでいる。 The inspection unit 2 is configured to inspect the backlight 200 (see FIG. 5) in a state where the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are charged. The inspection unit 2 includes an imaging unit 21 that images the backlight 200, a data processing unit 22 that processes image data captured by the imaging unit 21, and the presence or absence of defects based on the data processed by the data processing unit 22. And a determination unit 23 for determining
 撮像部21は、たとえばエリアセンサであり、バックライト200の表面200aの全体を撮像する機能を有する。データ処理部22は、撮像部21によって得られた画像データを所定のアルゴリズムに基づいて処理するように構成されている。判定部23は、データ処理部22により処理されたデータに基づいて、バックライト200の各位置における輝度が所定範囲内であるか否かを判定するように構成されている。そして、判定部23は、輝度が所定範囲内である部分については欠陥がないと判定し、輝度が所定範囲外である部分については欠陥があると判定するようになっている。 The imaging unit 21 is an area sensor, for example, and has a function of imaging the entire surface 200a of the backlight 200. The data processing unit 22 is configured to process the image data obtained by the imaging unit 21 based on a predetermined algorithm. The determination unit 23 is configured to determine whether or not the luminance at each position of the backlight 200 is within a predetermined range based on the data processed by the data processing unit 22. Then, the determination unit 23 determines that there is no defect in a portion where the luminance is within the predetermined range, and determines that there is a defect in a portion where the luminance is outside the predetermined range.
 除電部3は、検査部2により検査されたバックライト200を除電するために設けられている。この除電部3は、陽イオンおよび陰イオンを発生させるとともに、その陽イオンおよび陰イオンをバックライト200の表面200aに供給するように構成されている。除電部3は、バックライト200の表面200aに吸着された陰イオンNを中和して除去する機能を有する。 The neutralization unit 3 is provided to neutralize the backlight 200 inspected by the inspection unit 2. The static elimination unit 3 is configured to generate cations and anions and supply the cations and anions to the surface 200 a of the backlight 200. The neutralization unit 3 has a function of neutralizing and removing the anions N adsorbed on the surface 200 a of the backlight 200.
 また、検査装置100には、図3に示すように、直流電源4と、保護回路5とが設けられている。直流電源4は、検査時にバックライト200を点灯させるために設けられている。保護回路5は、直流電源4とバックライト200との間に配置されており、バックライト200のLED201に過電流が流れるのを抑制するために設けられている。具体的には、保護回路5は、ツェナーダイオード5aを含み、そのツェナーダイオード5aのアノードが直流電源4の負極側に接続され、ツェナーダイオード5aのカソードが直流電源4の正極側に接続されている。 Further, as shown in FIG. 3, the inspection apparatus 100 is provided with a DC power supply 4 and a protection circuit 5. The DC power supply 4 is provided to turn on the backlight 200 during inspection. The protection circuit 5 is disposed between the DC power supply 4 and the backlight 200 and is provided to suppress an overcurrent from flowing through the LED 201 of the backlight 200. Specifically, the protection circuit 5 includes a Zener diode 5 a, the anode of the Zener diode 5 a is connected to the negative side of the DC power supply 4, and the cathode of the Zener diode 5 a is connected to the positive side of the DC power supply 4. .
 なお、検査装置100には、検査装置100を制御するためのコンピュータ(図示省略)が設けられている。このコンピュータは、後述する検査方法を実行させるためのプログラムが記録された記録媒体を備えている。すなわち、検査装置100は、コンピュータでプログラムが実行されることによって、コンピュータにより後述する検査方法を行うように制御される。 The inspection apparatus 100 is provided with a computer (not shown) for controlling the inspection apparatus 100. The computer includes a recording medium on which a program for executing an inspection method described later is recorded. That is, the inspection apparatus 100 is controlled to perform an inspection method described later by the computer when the program is executed by the computer.
 -検査方法-
 次に、図1~図5を参照して、本実施形態の検査装置100によるバックライト200の検査方法について説明する。
-Inspection method-
Next, an inspection method for the backlight 200 by the inspection apparatus 100 according to the present embodiment will be described with reference to FIGS.
 まず、検査対象であるバックライト200(図2参照)が、インデックステーブルなどの搬送装置(図示省略)に設置される。そして、バックライト200が、図3に示すように、保護回路5を介して直流電源4に接続される。その後、搬送装置により、バックライト200が帯電領域に搬送される。 First, the backlight 200 (see FIG. 2) to be inspected is installed in a transport device (not shown) such as an index table. Then, the backlight 200 is connected to the DC power supply 4 via the protection circuit 5 as shown in FIG. Thereafter, the backlight 200 is transported to the charged region by the transport device.
 次に、帯電部1(図1参照)により、図4に示すように、陰イオンNが発生されるとともに、その陰イオンNがバックライト200の表面200aに供給される。これにより、図5に示すように、陰イオンNがバックライト200の表面200aに吸着され、バックライト200が帯電される。具体的には、表面200aに吸着した陰イオンNにより、プリズムシート205の上面側が正に帯電されるとともに、プリズムシート205の下面側が負に帯電される。これに伴い、プリズムシート204、拡散シート203および導光板202において、上面側がそれぞれ正に帯電され、下面側がそれぞれ負に帯電される。 Next, as shown in FIG. 4, the anion N is generated by the charging unit 1 (see FIG. 1), and the anion N is supplied to the surface 200 a of the backlight 200. Thereby, as shown in FIG. 5, the anion N is adsorbed on the surface 200a of the backlight 200, and the backlight 200 is charged. More specifically, the upper surface side of the prism sheet 205 is positively charged and the lower surface side of the prism sheet 205 is negatively charged by the anions N adsorbed on the surface 200a. Accordingly, in the prism sheet 204, the diffusion sheet 203, and the light guide plate 202, the upper surface side is positively charged, and the lower surface side is negatively charged.
 このため、プリズムシート205とプリズムシート204とが吸着され、プリズムシート204と拡散シート203とが吸着され、拡散シート203と導光板202とが吸着される。これにより、各シート間の隙間H(図4参照)が減少する。その後、搬送装置により、帯電されたバックライト200が検査領域に搬送される。 For this reason, the prism sheet 205 and the prism sheet 204 are adsorbed, the prism sheet 204 and the diffusion sheet 203 are adsorbed, and the diffusion sheet 203 and the light guide plate 202 are adsorbed. Thereby, the gap H (see FIG. 4) between the sheets is reduced. Thereafter, the charged backlight 200 is transported to the inspection area by the transport device.
 次に、直流電源4により、バックライト200のLED201に電流が供給され、バックライト200が点灯される。なお、このとき、保護回路5により、直列に接続された複数のLED201間の電圧が所定値以上にならないことから、LED201に過電流が流れないようになっている。 Next, a current is supplied from the DC power source 4 to the LED 201 of the backlight 200, and the backlight 200 is turned on. At this time, since the voltage between the plurality of LEDs 201 connected in series does not exceed a predetermined value by the protection circuit 5, no overcurrent flows through the LEDs 201.
 そして、撮像部21(図1参照)により、バックライト200の表面200aの全体が撮像される。その後、データ処理部22(図1参照)により、撮像部21によって得られた画像データが所定のアルゴリズムに基づいて処理される。 Then, the entire surface 200a of the backlight 200 is imaged by the imaging unit 21 (see FIG. 1). Thereafter, the data processing unit 22 (see FIG. 1) processes the image data obtained by the imaging unit 21 based on a predetermined algorithm.
 次に、判定部23(図1参照)により、データ処理部22により処理されたデータに基づいて、バックライト200の各位置における輝度が所定範囲内であるか否かが判定される。そして、輝度が所定範囲内である部分については欠陥がないと判定され、輝度が所定範囲外である部分については欠陥があると判定される。つまり、本実施形態では、導光板202、拡散シート203、プリズムシート204および205が帯電され、それらの間の隙間Hが減少した状態のバックライト200が検査部2により検査される。 Next, based on the data processed by the data processing unit 22, the determination unit 23 (see FIG. 1) determines whether or not the luminance at each position of the backlight 200 is within a predetermined range. Then, it is determined that there is no defect for a portion whose luminance is within a predetermined range, and it is determined that there is a defect for a portion whose luminance is outside the predetermined range. That is, in the present embodiment, the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are charged, and the backlight 200 in a state where the gap H between them is reduced is inspected by the inspection unit 2.
 その後、直流電源4からLED201への電流の供給が停止される。そして、搬送装置により、検査が終了されたバックライト200が除電領域に搬送される。 Thereafter, the supply of current from the DC power supply 4 to the LED 201 is stopped. And the backlight 200 by which the test | inspection was complete | finished is conveyed by the conveyance apparatus to a static elimination area.
 次に、除電部3(図1参照)により、陽イオンおよび陰イオンが発生されるとともに、その陽イオンおよび陰イオンがバックライト200の表面200aに供給される。これにより、バックライト200の表面200aに吸着された陰イオンNが中和されて除去される。このため、プリズムシート205、プリズムシート204、拡散シート203および導光板202の帯電状態が解消される。その後、除電されたバックライト200が搬送装置から取り外される。 Next, the cation and the anion are generated by the static eliminating unit 3 (see FIG. 1), and the cation and the anion are supplied to the surface 200a of the backlight 200. Thereby, the anion N adsorbed on the surface 200a of the backlight 200 is neutralized and removed. For this reason, the charged state of the prism sheet 205, the prism sheet 204, the diffusion sheet 203, and the light guide plate 202 is eliminated. Thereafter, the neutralized backlight 200 is removed from the transport device.
 -効果-
 本実施形態では、上記のように、バックライト200を帯電させる帯電部1と、帯電されたバックライト200を検査する検査部2とが設けられている。このように構成することによって、検査時に、導光板202、拡散シート203、プリズムシート204および205を互いに吸着させることにより、それらの間の隙間Hを減らすことができる。これにより、隙間Hに起因する輝度ムラを抑制することができるので、欠陥を検出しやすくすることができる。その結果、欠陥検出の精度向上を図ることができる。
-effect-
In the present embodiment, as described above, the charging unit 1 that charges the backlight 200 and the inspection unit 2 that inspects the charged backlight 200 are provided. With this configuration, the light guide plate 202, the diffusion sheet 203, and the prism sheets 204 and 205 are adsorbed to each other at the time of inspection, whereby the gap H between them can be reduced. Thereby, since the brightness nonuniformity resulting from the clearance gap H can be suppressed, a defect can be easily detected. As a result, the accuracy of defect detection can be improved.
 また、非接触で隙間Hを減らすことができるので、バックライト200を損傷させることなく、欠陥検出の精度向上を図ることができる。 Moreover, since the gap H can be reduced without contact, the accuracy of defect detection can be improved without damaging the backlight 200.
 また、本実施形態では、検査部2により検査されたバックライト200を除電する除電部3を設けることによって、検査後に、塵埃などが付着するのを抑制するとともに、静電破壊の発生を抑制することができる。 Moreover, in this embodiment, by providing the static elimination part 3 which neutralizes the backlight 200 test | inspected by the test | inspection part 2, while suppressing that dust etc. adhere after an test | inspection, generation | occurrence | production of electrostatic breakdown is suppressed. be able to.
 また、本実施形態では、保護回路5を設けることによって、検査時に、LED201に過電流が流れるのを抑制することができるので、LED201が破損するのを抑制することができる。 Further, in the present embodiment, by providing the protection circuit 5, it is possible to suppress an overcurrent from flowing through the LED 201 at the time of inspection, and thus it is possible to suppress the LED 201 from being damaged.
 -実験例-
 次に、図6および図7を参照して、上記した本実施形態の効果を確認するために行った実験について説明する。この実験では、比較例による検査装置によりバックライトを検査するとともに、本実施形態に対応する実施例による検査装置によりバックライトを検査した。
-Experimental example-
Next, with reference to FIG. 6 and FIG. 7, the experiment conducted in order to confirm the effect of this embodiment mentioned above is demonstrated. In this experiment, the backlight was inspected by the inspection apparatus according to the comparative example, and the backlight was inspected by the inspection apparatus according to the example corresponding to this embodiment.
 なお、比較例による検査装置では、バックライトの積層された光学部品(導光板、拡散シートおよびプリズムシート)が帯電していない状態で検査を行い、実施例による検査装置では、バックライトの積層された光学部品が帯電している状態で検査を行った。また、検査対象であるバックライトは、所定の位置P(図6および図7参照)に予め欠陥が形成されており、比較例と実施例とで同じものを用いた。そして、比較例による検査装置の検査結果を図6に示し、実施例による検査装置の検査結果を図7に示した。図6および図7では、縦軸が輝度であり、横軸が位置であり、欠陥が形成された位置Pを含む所定の線状領域の検査結果を示した。 In the inspection apparatus according to the comparative example, the optical components (light guide plate, diffusion sheet, and prism sheet) on which the backlight is laminated are inspected in an uncharged state. In the inspection apparatus according to the embodiment, the backlight is laminated. Inspection was performed with the optical parts charged. Further, the backlight to be inspected has defects formed in advance at a predetermined position P (see FIGS. 6 and 7), and the same backlight was used in the comparative example and the example. And the test result of the test | inspection apparatus by a comparative example was shown in FIG. 6, and the test result of the test | inspection apparatus by an Example was shown in FIG. In FIGS. 6 and 7, the vertical axis represents the luminance, the horizontal axis represents the position, and the inspection result of the predetermined linear region including the position P where the defect is formed is shown.
 図6に示すように、比較例による検査装置の検査結果では、バックライトの各位置における輝度ムラが大きかった。これは、バックライトの光学部品の間に生じた隙間の影響が大きいと考えられる。このため、欠陥の有無を判定するための所定範囲(欠陥がないと判定される輝度の範囲)R1を広くする必要があるので、位置Pに形成された欠陥を検出することができなかった。すなわち、比較例による検査装置では、欠陥に起因する輝度ムラが隙間に起因する輝度ムラと同程度であり、これらを判別することが困難であった。なお、欠陥に起因する輝度ムラを検出するために、所定範囲R1を狭くすると、隙間に起因する輝度ムラを欠陥であると誤検出してしまう。 As shown in FIG. 6, in the inspection result of the inspection apparatus according to the comparative example, the luminance unevenness at each position of the backlight was large. This is considered to be due to the large influence of the gap generated between the optical components of the backlight. For this reason, since it is necessary to widen the predetermined range (luminance range in which it is determined that there is no defect) R1 for determining the presence / absence of a defect, the defect formed at the position P cannot be detected. That is, in the inspection apparatus according to the comparative example, the luminance unevenness due to the defect is almost the same as the luminance unevenness due to the gap, and it is difficult to discriminate these. Note that if the predetermined range R1 is narrowed in order to detect luminance unevenness due to a defect, the luminance unevenness due to the gap is erroneously detected as a defect.
 これに対して、図7に示すように、実施例による検査装置の検査結果では、比較例に比べて、バックライトの各位置における輝度ムラが小さくなった。これは、バックライトの光学部品が帯電されることにより、光学部品が互いに吸着され、光学部品の間の隙間が減少したためであると考えられる。なお、位置Pの輝度ムラは、欠陥に起因するものであるため、比較例と同じ程度の大きさで残っている。このため、欠陥の有無を判定するための所定範囲R2を、比較例に比べて狭くすることにより、位置Pの輝度が所定範囲R2外になるので、位置Pに形成された欠陥を適切に検出することができた。すなわち、実施例による検査装置では、隙間に起因する輝度ムラを低減することにより、欠陥に起因する輝度ムラを顕在化させることができるので、欠陥を適切に検出することができた。その結果、欠陥検出の精度向上を図ることができた。なお、今回の実験では、実施例の輝度ムラを比較例の2/3程度にすることができたので、所定範囲R2を所定範囲R1の2/3程度にすることができた。 On the other hand, as shown in FIG. 7, in the inspection results of the inspection apparatus according to the example, the luminance unevenness at each position of the backlight was reduced as compared with the comparative example. This is presumably because the optical components of the backlight are charged and the optical components are attracted to each other, and the gap between the optical components is reduced. Note that the luminance unevenness at the position P is caused by a defect, and therefore remains at the same level as in the comparative example. For this reason, since the brightness at the position P is outside the predetermined range R2 by narrowing the predetermined range R2 for determining the presence or absence of defects compared to the comparative example, the defect formed at the position P is appropriately detected. We were able to. That is, in the inspection apparatus according to the example, the luminance unevenness due to the defect can be made obvious by reducing the luminance unevenness due to the gap, and thus the defect can be appropriately detected. As a result, the accuracy of defect detection could be improved. In this experiment, since the luminance unevenness of the example could be reduced to about 2/3 of the comparative example, the predetermined range R2 could be set to about 2/3 of the predetermined range R1.
 -他の実施形態-
 なお、今回開示した実施形態は、すべての点で例示であって、限定的な解釈の根拠となるものではない。したがって、本発明の技術的範囲は、上記した実施形態のみによって解釈されるものではなく、特許請求の範囲の記載に基づいて画定される。また、本発明の技術的範囲には、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれる。
-Other embodiments-
In addition, embodiment disclosed this time is an illustration in all the points, Comprising: It does not become a basis of limited interpretation. Therefore, the technical scope of the present invention is not interpreted only by the above-described embodiments, but is defined based on the description of the scope of claims. Further, the technical scope of the present invention includes all modifications within the meaning and scope equivalent to the scope of the claims.
 たとえば、本実施形態では、被検査体の一例としてバックライト200を示したが、これに限らず、被検査体はシート状の光学部品が積層されたものであればよい。 For example, in the present embodiment, the backlight 200 is shown as an example of an object to be inspected. However, the present invention is not limited to this, and the object to be inspected may be a laminate of sheet-like optical components.
 また、本実施形態では、導光板202の上面上に、拡散シート203、プリズムシート204および205が積層される例を示したが、これに限らず、シート状の光学部品の枚数や配置はどのようなものであってもよい。 In the present embodiment, the diffusion sheet 203 and the prism sheets 204 and 205 are stacked on the upper surface of the light guide plate 202. However, the present invention is not limited to this. It may be something like this.
 また、本実施形態では、帯電部1が陰イオンNを発生させる例を示したが、これに限らず、帯電部が陽イオンを発生させるようにしてもよい。 In the present embodiment, the charging unit 1 generates the negative ions N. However, the present invention is not limited thereto, and the charging unit may generate positive ions.
 また、本実施形態では、撮像部21がエリアセンサである例を示したが、これに限らず、撮像部がラインセンサであってもよい。 In the present embodiment, the example in which the imaging unit 21 is an area sensor has been described. However, the present invention is not limited thereto, and the imaging unit may be a line sensor.
 本発明は、シート状の光学部品が積層された被検査体を検査する検査装置、検査方法、プログラムおよび記録媒体に利用可能である。 The present invention can be used for an inspection apparatus, an inspection method, a program, and a recording medium for inspecting an object to be inspected on which sheet-like optical components are stacked.
 1   帯電部
 2   検査部
 3   除電部
 5   保護回路
 21  撮像部
 23  判定部
 100 検査装置
 200 バックライト(被検査体)
 202 導光板(光学部品)
 203 拡散シート(光学部品)
 204 プリズムシート(光学部品)
 205 プリズムシート(光学部品)
DESCRIPTION OF SYMBOLS 1 Charging part 2 Inspection part 3 Static elimination part 5 Protection circuit 21 Imaging part 23 Determination part 100 Inspection apparatus 200 Backlight (inspection object)
202 Light guide plate (optical component)
203 Diffusion sheet (optical component)
204 Prism sheet (optical component)
205 Prism sheet (optical component)

Claims (8)

  1.  シート状の光学部品が積層された被検査体を検査する検査装置であって、
     前記光学部品を帯電させる帯電部と、
     前記光学部品が帯電された状態の前記被検査体を検査する検査部とを備えることを特徴とする検査装置。
    An inspection apparatus for inspecting an object to be inspected on which sheet-like optical components are laminated,
    A charging unit for charging the optical component;
    An inspection apparatus comprising: an inspection unit that inspects the inspection target in a state where the optical component is charged.
  2.  請求項1に記載の検査装置において、
     前記検査部により検査された前記被検査体を除電する除電部を備えることを特徴とする検査装置。
    The inspection apparatus according to claim 1,
    An inspection apparatus comprising: a static elimination unit that neutralizes the object to be inspected by the inspection unit.
  3.  請求項1または2に記載の検査装置において、
     前記被検査体を保護する保護回路を備えることを特徴とする検査装置。
    The inspection apparatus according to claim 1 or 2,
    An inspection apparatus comprising a protection circuit for protecting the object to be inspected.
  4.  請求項1~3のいずれか1つに記載の検査装置において、
     前記検査部は、前記被検査体を撮像する撮像部と、前記撮像部による撮像結果に基づいて欠陥の有無を判定する判定部とを含むことを特徴とする検査装置。
    The inspection apparatus according to any one of claims 1 to 3,
    The inspection apparatus includes: an imaging unit that images the object to be inspected; and a determination unit that determines presence / absence of a defect based on an imaging result of the imaging unit.
  5.  請求項1~4のいずれか1つに記載の検査装置において、
     前記被検査体は、バックライトを含むことを特徴とする検査装置。
    The inspection apparatus according to any one of claims 1 to 4,
    The inspection apparatus includes a backlight.
  6.  シート状の光学部品が積層された被検査体を検査する検査方法であって、
     前記光学部品を帯電させる工程と、
     前記光学部品が帯電された状態の前記被検査体を検査する工程とを備えることを特徴とする検査方法。
    An inspection method for inspecting an object to be inspected on which sheet-like optical components are laminated,
    Charging the optical component; and
    And a step of inspecting the inspection object in a state where the optical component is charged.
  7.  請求項6に記載の検査方法をコンピュータに実行させるためのプログラム。 A program for causing a computer to execute the inspection method according to claim 6.
  8.  請求項6に記載の検査方法をコンピュータに実行させるためのプログラムが記録された記録媒体。 A recording medium on which a program for causing a computer to execute the inspection method according to claim 6 is recorded.
PCT/JP2015/054526 2014-02-25 2015-02-19 Inspection device, inspection method, program, and recording medium WO2015129531A1 (en)

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