JP2006053077A - Tape shape measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tape shape measuring apparatus capable of measuring a tape shape such as a curve and width fluctuation, without imparting excessive force onto a tape if possible, by simple constitution. <P>SOLUTION: This tape shape measuring apparatus S1 for measuring the shape of the magnetic tape MT is provided with an attraction block 10 having a chargeable flat attraction face 10a for attracting the magnetic tape MT, a guide member 21 slidable along the attraction face 10a in a longitudinal direction of the magnetic tape MT between the magnetic tape MT and the attraction face 10a, and for separating the magnetic tape MT from the attraction face 10a to guide the attraction of the magnetic tape MT, and an air pressing-out means 30 for pressing the attracted magnetic tape MT to press out air between the magnetic tape MT and the attraction face 10a. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

The present invention relates to a tape shape measuring apparatus for measuring the shape of a tape such as a magnetic tape.
About.

  In recent years, the track width of a magnetic tape tends to be remarkably narrow as the recording density increases. As a result, a tracking error tends to occur when the deflection in the width direction of the magnetic tape increases. One factor that causes this tracking error is the bending or width variation of the magnetic tape. Therefore, it is desired to develop an apparatus and method for accurately measuring the curvature and width variation of a magnetic tape.

  As a first conventional method for measuring the curvature of such a magnetic tape, a magnetic tape is arranged on two rollers arranged at a predetermined interval, and weights are fixed to both ends of the magnetic tape, and the length of the magnetic tape is measured. There has been proposed a method of obtaining a curvature by applying a tension in a direction and measuring a distance from a predetermined reference line to an edge while the tension is applied (see Patent Document 1).

  As a second method, after placing the magnetic tape on an inclined measuring table, a part of the magnetic tape is bent in a semicircular shape, and the measuring roller is rotated by its own weight from above the bent part. There has been proposed a method in which a magnetic tape is stretched to a measuring table by moving and the curvature is measured from the height of the edge of the stretched magnetic tape (see Patent Document 2).

Furthermore, as a third method, there is proposed a method of measuring a curvature by providing an inclined guide between two reference guides and detecting a traveling position of the magnetic tape that changes due to the curvature (Patent Document 3). reference).
JP 11-37704 A (paragraph numbers 0023 to 0056, FIG. 1) JP 11-339650 A (paragraph numbers 0015 to 0032, FIG. 1) JP 2002-267437 A (paragraph numbers 0019 to 0025, FIG. 1)

  However, in the method described in Patent Document 1, measurement without tension is impossible, and the magnetic tape does not adhere to the flat surface, the edge curls, and the measurement value may vary.

  In the method described in Patent Document 2, since the rolling speed of the measuring roller changes between the upper part and the lower part of the measuring table, when the condition for stretching the magnetic tape is not constant in the longitudinal direction, Because of the bending, the amount of bending is not constant, and the measurement value may vary. Further, since there is no means for attracting the magnetic tape to the measuring table after the magnetic tape is stretched, the magnetic tape curls after the stretching and the edge or the central part is lifted, and the measurement value may vary.

  In the method described in Patent Document 3, since the measurement is performed while the magnetic tape is running, it is impossible to measure the shape of the magnetic tape without tension. In addition, noise due to rotation of the guide is included in the measurement data, and accurate measurement may not be possible.

  Therefore, an object of the present invention is to provide a tape shape measuring apparatus that can measure a tape shape such as a curve and a width variation with a simple configuration and applying as little force as possible to the tape.

  As means for solving the above-mentioned problem, the first invention is a tape shape measuring device for measuring the shape of a tape, and for adsorbing the tape, an adsorption table having a chargeable and flat adsorption surface; A guide member that is slidable in the longitudinal direction of the tape along the suction surface between the tape and the suction surface and that separates the tape from the suction surface and guides the suction of the tape. An apparatus for measuring the shape of a tape, comprising: an air extruding unit that presses the tape and extrudes air between the tape and the suction surface.

According to such a tape shape measuring apparatus, the tape is arranged on the adsorption surface of the adsorption table, and the guide member is slid along the adsorption surface in the longitudinal direction of the tape between the arranged tape and the adsorption surface. Thus, after the tape is once separated from the suction surface, the tape can be guided to the suction surface in a state where an extra force such as tension is not applied. Then, by appropriately charging the suction surface, the tape guided to the suction surface can be sucked to the suction surface, and curling and the like can be prevented. Further, when the air extruding means presses the adsorbed tape, the air between the tape and the adsorbing surface is pushed out, and the tape comes into close contact with the adsorbing surface.
Therefore, by measuring the tape adsorbed on the adsorbing surface with such a simple configuration without applying excessive force as much as possible, it is possible to accurately measure the shape such as the curvature of the tape. it can.

  A second invention is the tape shape measuring apparatus according to the first invention, wherein the guide member has a convex guide surface on the tape side.

  According to such a tape shape measuring apparatus, the tape can be gently guided to the suction surface by the convex guide surface of the guide member.

  According to a third aspect of the invention, there is provided the tape shape according to the first or second aspect, further comprising slide drive means for sliding the guide member along the suction surface at a predetermined speed. It is a measuring device.

  According to such a tape shape measuring apparatus, the guide member can be slid at a predetermined speed by the slide driving means.

  In a fourth aspect of the present invention, the suction table is configured such that the suction surface is sequentially charged behind the guide member and the tape is sucked to the charged suction surface. It is a tape shape measuring apparatus in any one of 1st invention from 3rd invention.

  According to such a tape shape measuring apparatus, the suction surface is sequentially charged after the guide member has passed, and the guided tape can be sequentially sucked.

  A fifth invention is the tape shape measuring apparatus according to any one of the first to fourth inventions, wherein the air push-out means includes a nozzle for blowing air onto the tape.

  According to such a tape shape measuring apparatus, by blowing air from the nozzle to the tape, the tape can be pressed and air between the tape and the suction surface can be pushed out without damaging the tape.

  A sixth aspect of the invention is the tape shape measuring apparatus according to any one of the first to fourth aspects, wherein the air pushing means includes a roller that rolls on the tape.

  According to such a tape shape measuring apparatus, the tape can be directly pressed by the roller and air can be reliably pushed out.

  According to a seventh aspect of the invention, there is provided a relative position holding means for holding a relative position between the pressing position of the tape by the air pushing means and the guide member. It is a tape shape measuring apparatus in any one of invention.

  According to such a tape shape measuring apparatus, the relative position relationship between the pressing position by the air pushing means and the guide member is held by the relative position holding means. That is, even if the guide member slides, the pressed position of the guided tape is held at a predetermined position by the relative position holding means. Therefore, in the longitudinal direction of the tape, the tape can be similarly pressed by the air extruding means.

  According to an eighth aspect of the present invention, the suction table includes a transparent portion through which light can pass, and optically measures the shape of the tape adsorbed on the suction table by irradiating the transparent portion with light. The tape shape measuring apparatus according to any one of the first to seventh inventions, further comprising an objective measuring means.

  According to such a tape shape measuring apparatus, the optical measuring means irradiates light to the transparent part of the suction table, and the light that has passed through the transparent part is received by an appropriate light receiver, thereby The shape can be measured.

  The ninth invention further comprises a two-dimensional displacement sensor or a CCD line sensor for measuring the shape of the tape adsorbed on the adsorption table. It is a tape shape measuring apparatus in any one.

  According to such a tape shape measuring apparatus, it is possible to measure the shape of the adsorbed tape such as the curve value, the width variation, and the curve variation amount by the two-dimensional displacement sensor or the CCD line sensor.

  A tenth aspect of the present invention includes any one of the first to ninth aspects, further comprising a charge removing unit that removes static electricity from the suction table and the tape after measuring the shape of the tape. It is a tape shape measuring apparatus of crab.

  According to such a tape shape measuring apparatus, the static electricity on the suction table and the tape can be removed by the charge removing means. Therefore, for example, it is possible to prevent variations in measured values based on unexpected suction of the tape due to charging of the suction table.

  The eleventh aspect of the invention is the tape according to any one of the first to tenth aspects, further comprising tape running means for running and stopping the tape along the suction surface. It is a shape measuring device.

  According to such a tape shape measuring apparatus, the tape shape can be continuously measured by causing the tape running means to run and stop the tape in a predetermined manner.

  According to the present invention, it is possible to provide a tape shape measuring apparatus capable of measuring a tape shape such as a curve and a width variation with a simple configuration without applying as much force as possible to the tape.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In the description of each embodiment, the same constituent elements are denoted by the same reference numerals, and redundant descriptions are omitted.

<< First Embodiment >>
The tape shape measuring apparatus according to the first embodiment will be described with reference to FIGS. In the drawings to be referred to, FIG. 1 is a perspective view schematically showing a configuration of a tape shape measuring apparatus according to the first embodiment. 2A and 2B are side views of the tape shape measuring apparatus according to the first embodiment, where FIG. 2A shows an initial suction state, and FIG. 2B shows a late suction state. FIG. 3 is a perspective view showing a measurement situation by the optical measuring means according to the first embodiment. FIG. 4 is a plan view showing a measuring method by the optical measuring means according to the first embodiment. FIG. 5 is a plan view showing a state of charge removal by the charge removal bar according to the first embodiment.
For the convenience of drawing, the optical measuring means shown in FIG. 3 is omitted from FIG.

<Configuration of tape shape measuring device>
As shown in FIG. 1, the tape shape measuring apparatus S <b> 1 according to the first embodiment uses a magnetic tape MT as a measurement target, and the shape (curvature value) in a state where the magnetic tape MT is attracted to an electrostatic adsorption table 10. ). The tape shape measuring device S1 mainly includes an electrostatic chuck 10, a guide member 21, an air push-out means 30, a guide member / nozzle slide drive means 40 (hereinafter referred to as slide drive means 40), and an optical measurement. A means 50A (see FIG. 3), a charge removal bar 61 (charge removal means), and a magnetic tape running means 70 are provided.
However, the measurement object according to the present invention is not limited to the magnetic tape MT, and may be anything as long as it is in the form of a tape (long strip).

[Electrostatic adsorption stand]
The electrostatic attraction stand 10 has a flat attraction surface 10a (see FIG. 2A) on the upper side thereof, and the attraction surface 10a is charged with static electricity to favorably attract the magnetic tape MT. It is a stand. As shown in FIG. 2A, the electrostatic chuck 10 includes a plurality of electrode pairs 11A, 11B, 11C, 11D, 11E, and 11F (six sets for the sake of clarity in the first embodiment) and three transparent layers. It has parts 13A, 13B, and 13C (see FIG. 3).
In addition, the interval between the plus electrode and the minus electrode constituting the electrode pairs 11A to 11F and the interval between the adjacent electrode pairs 11A to 11F are set based on the voltage applied to the electrostatic chuck 10. Specifically, for example, when a voltage of 500 V to 3 KV is applied, the interval between the plus electrode and the minus electrode and the interval between adjacent electrodes are set to 0.5 to 5.0 mm.

(Electrode pair)
The electrode pairs 11A to 11F are arranged in the order of the electrode pairs 11A, 11B, 11C, 11D, 11E, and 11F from the feed reel R1 side to the winding reel R2 side, that is, along the traveling direction of the magnetic tape MT. It is embedded in the electrostatic chuck 10 with a part thereof exposed to the chucking surface 10a.

The electrode pairs 11A to 11F are connected to a power source (both not shown) via switches or the like. These switches are connected to a sensor (not shown) that detects the position of the guide member 21 in the longitudinal direction of the magnetic tape MT, and switches corresponding to the rear electrode pairs 11A to 11F through which the guide member 21 has passed are sequentially provided. The suction surface 10a can be sequentially charged behind the guide member 21 (feed reel R1 side). That is, the magnetic tape MT is sequentially attracted to the attracting surface 10a after the guide member 21 has passed (see FIG. 2B).
2A and 2B, electrode pairs 11A to 11F depicting “+, −” indicate a state in which the switch is turned on.

(Transparent part)
The transparent portions 13A, 13B, and 13C are arranged at positions where the optical measuring means 50A measures the edge of the magnetic tape MT. Specifically, in the first embodiment, the transparent portion 13A is between the electrode pair 11A and the electrode pair 11B, the transparent portion 13B is between the electrode pair 11C and the electrode pair 11D, and the transparent portion 13C is the electrode pair 11E. And the electrode pair 11F.
Further, the transparent portions 13A to 13C have a width over at least a reference line AC (see FIG. 4) described later.
Further, the transparent portions 13A to 13C are formed of a material through which a laser L1 (see FIG. 3) irradiated from a laser generator 51 of the optical measuring unit 50A described later can pass. Examples of such a material include resins such as glass, polypropylene, and acrylic.
Therefore, with the magnetic tape MT attracted to the attracting surface 10 a, the transparent portions 13 </ b> A to 13 </ b> C are irradiated with the laser L <b> 1 and the transmitted laser L <b> 1 is received below the electrostatic attraction table 10, The position of the edge can be measured.

  Such transparent portions 13A to 13C are formed by punching the electrostatic chuck 10 in the thickness direction, and a transparent member made of the material is fitted into the punched portion so that the suction surface 10a is flat. ing. Therefore, it is possible to prevent the measurement error from occurring due to the edge of the magnetic tape MT falling into the slit corresponding to the measurement position, for example, compared to the case where the slit is simply formed in the width direction.

[Guide member]
The guide member 21 is slidable in the longitudinal direction of the magnetic tape MT between the magnetic tape MT disposed (placed) on the electrostatic adsorption table 10 and the adsorption surface 10a. This is a member for guiding the magnetic tape MT to the attracting surface 10a again after being separated from 10a. Such a guide member 21 can satisfactorily guide the magnetic tape MT to the attracting surface 10a without applying excessive force such as tension to the magnetic tape MT and in a state in which wrinkles are not easily generated. The magnetic tape MT can be attracted to the attracting surface 10a in a state where the extra force is difficult to be applied.

The guide member 21 according to the first embodiment has a wing shape in a side view in the width direction of the magnetic tape MT, and has a guide surface 21a on the upper side (the magnetic tape MT side) (FIG. 2A). reference). That is, the guide surface 21a is convex upward in a side view, and has a curved surface with the top portion slightly approaching the rear side (feed reel R1 side).
Therefore, by sliding the guide member 21 to the front side (winding reel R2 side), the magnetic tape MT is once gently separated from the adsorption surface 10a between the front end of the guide member 21 and the top portion, The magnetic tape MT can be gently guided to the attracting surface 10a between the top and the rear end of the guide member 21.

  The guide member 21 is supported at a predetermined height (Δh1) with respect to the suction surface 10a by an arm 41 (see FIG. 1) of the slide drive means 40 described later. Further, the guide member 21 can be driven to slide along the suction surface 10a while the predetermined height (Δh1) is maintained by driving the slide driving means 40. The predetermined height (Δh1) in the first embodiment is a distance between the suction surface 10a and the rear end of the guide surface 21a, and is set to 0.5 to 15 mm.

[Air extrusion means]
The air extruding means 30 blows and presses air on the upper surface of the magnetic tape MT adsorbed on the electrostatic adsorption table 10, and accompanies the lower surface of the magnetic tape MT and the adsorbing surface 10a, and between the magnetic tape MT and the adsorbing surface 10a. It is a means to push out the air caught in (pinched). That is, the air extruding means 30 according to the first embodiment is a non-contact type with respect to the magnetic tape MT.

  The air extruding means 30 mainly includes a nozzle 31 that blows air to be blown onto the magnetic tape MT, an air supply pump (not shown) connected to the nozzle 31 via a hose 32, and the like. The nozzle 31 has a slit-shaped air outlet corresponding to the width of the magnetic tape MT, and can press the magnetic tape MT evenly in the width direction.

  Further, the nozzle 31 is rotatably supported by an arm 41 of a slide driving means 40 described later (a spraying position adjusting mechanism), and the nozzle 31 can be rotated to a predetermined position to adjust the air spraying position. It has become. In addition, it is preferable that the spraying position on the magnetic tape MT is adjusted so as to be substantially on the top surface of the magnetic tape MT immediately after electrostatic adsorption.

  Furthermore, since the nozzle 31 is supported by the arm 41 as described above, the relative positional relationship between the guide member 21 and the nozzle 31 is maintained at a predetermined level. Therefore, when the guide member 21 and the nozzle 31 are integrally slid without rotating the nozzle 31, the air blowing position (pressing position) to the magnetic tape MT and the relative position of the guide member 21 are as follows. The arm 41 can be held in a predetermined manner, and the arm 41 functions as “relative position holding means”.

  Furthermore, the air supply pump that supplies air to the nozzle 31 is set so that the air flow rate from the nozzle 31 is 5 to 50 L / min.

[Slide drive means]
The slide drive unit 40 keeps the guide member 21 and the nozzle 31 along the suction surface 10a while maintaining a predetermined height position with respect to the suction surface 10a and holding the relative position between the guide member 21 and the nozzle 31. Means for driving (moving) the slide at a predetermined speed.

  The slide drive means 40 according to the first embodiment mainly includes an arm 41 that supports the guide member 21 and the nozzle 31, a guide rail 42 that is fixed to the floor surface or the like in parallel with the longitudinal direction of the magnetic tape MT, and a guide rail. And a moving mechanism for moving the arm 41 along the line 42. The moving mechanism includes a roller 43 provided at the lower end of the arm 41 and a driving device (not shown) that rotates the roller 43.

  Therefore, by operating the driving device under a predetermined condition, the roller 43 is rotated, the arm 41 is moved along the guide rail 42, and these are adsorbed while maintaining the relative positions of the guide member 21 and the nozzle 31. It can slide along the surface 10a. Moreover, it is preferable that the said drive device is operated so that the slide (moving) speed of the guide member 21 and the nozzle 31 may be set to 0.5-20 m / min.

  A height position adjusting mechanism (not shown) for adjusting the height position of the guide member 21 relative to the suction surface 10a is provided between the arm 41 and the guide member 21. It can be adjusted to a desired height position (Δh1). For example, the height position adjusting mechanism forms a long hole in the height direction (the thickness direction of the magnetic tape MT) at the tip of the arm 41, and a bolt (not shown) for fixing the guide member 21 to the long hole. It is comprised by inserting.

  Furthermore, between the arm 41 and the nozzle 31, as described above, a blowing adjustment mechanism that adjusts the blowing position of the air blown from the nozzle 31 is provided. The spray position adjusting mechanism is configured by, for example, a rotation shaft member (not shown) that pivotally supports the nozzle 31 on the arm 41.

[Optical measurement means]
As shown in FIG. 3, the optical measuring means 50 </ b> A is a means for optically measuring the shape of the magnetic tape MT adsorbed on the adsorption surface 10 a of the electrostatic adsorption table 10. The optical measuring means 50A is a means for measuring the position of the edge by irradiating the edge portion of the magnetic tape MT covering the transparent portions 13A to 13C with a belt-like laser L1 in the width direction, and the transparent portions 13A to 13C. It is provided corresponding to each of. Here, the optical measuring means 50A corresponding to the transparent portion 13A will be specifically described.

  The optical measuring means 50A mainly includes a laser generator 51 that irradiates the transparent portion 13A with the laser L1, a laser receiver 52 that receives the laser L1 that has passed through the transparent portion 13A, and an arm 53 that connects them. ing. The laser generator 51 is disposed on the upper side of the electrostatic adsorption table 10, and the laser receiver 52 is disposed on the lower side of the electrostatic adsorption table 10, and is fixed at a predetermined position with respect to the electrostatic adsorption table 10.

  Therefore, the laser generator 51 irradiates the transparent portion 13A with a belt-like laser L1 in the width direction so as to straddle a reference line AC described later, and the laser receiver 52 receives the laser L1 transmitted through the transparent portion 13A. By detecting the length in the width direction, the position of the edge of the magnetic tape MT in the transparent portion 13A (specifically, the measurement point A) can be measured.

  Then, by performing the same operation on the optical measuring means 50A and 50A related to the transparent portions 13B and 13C, the transparent portion 13B (specifically, measurement point B) and the transparent portion 13C (specifically, measurement) Each edge position of the magnetic tape MT at the point C) can be measured.

[Static removal bar]
Returning to FIG. 1, the description will be continued.
The static elimination bar 61 (static elimination means) is an apparatus for removing static electricity (charge) charged on the electrostatic chuck 10 and the magnetic tape MT after measurement by the optical measurement means 50A. Such a static elimination bar 61 is a well-known device, for example, a device that includes an electrode and discharges it by applying a pulse current thereto to generate air containing ions (ion air) (see FIG. 5).
Note that the types of ions (negative ions and positive ions) included in the ion air are determined in accordance with the types of static electricity (negative or positive) on the electrostatic chuck 10 and the magnetic tape MT. In addition, the type of static electricity that the magnetic tape MT has depends mainly on the material of the electrostatic chuck 10 and its chucking surface 10a and the magnetic tape MT.

[Magnetic tape running means]
The magnetic tape running means 70 is means for appropriately running and stopping the magnetic tape MT along the electrostatic chuck 10. The magnetic tape traveling means 70 mainly includes a feed-side spindle (not shown) on which the feed reel R1 is mounted, a winding spindle (not shown) on which the winding reel R2 is mounted, and a spindle control that controls the rotation of these spindles. Part (not shown) and guide rollers 71A and 71B for guiding the magnetic tape MT to the electrostatic chuck 10 are configured. Then, the spindle control unit controls the rotation and stop of the feeding spindle and the winding spindle, and the magnetic tape MT repeats running and stopping as appropriate. Therefore, all the shapes of the magnetic tape MT wound around the feed reel R1 can be continuously measured.

  The spindle control unit, the air supply pump of the air extruding means 30, the driving device of the slide driving means 40, and a sensor for detecting the position of the guide member 21 for controlling on / off of the electrode pairs 11A to 11F (whichever (Not shown) etc. may be electrically connected, and a control unit (not shown) for controlling these may be further provided to repeat the adsorption, measurement, static elimination, running, adsorption, etc. of the magnetic tape MT. Needless to say.

<Operation of tape shape measuring device>
Next, the shape measuring method of the magnetic tape MT will be described together with the operation of the tape shape measuring apparatus S1 according to the first embodiment.
The method for measuring the shape of the magnetic tape MT according to the first embodiment includes a first step for electrostatically attracting the magnetic tape MT to the electrostatic chuck 10, a second step for measuring the shape of the attracted magnetic tape MT, It includes a third step of removing static electricity from the electroadsorption table 10 and the magnetic tape MT, and a fourth step of running the magnetic tape MT.
Hereinafter, each step will be described.

[First step: electrostatic adsorption of magnetic tape]
The feed reel R1 and the winding reel R2 are respectively attached to the corresponding spindles (not shown), the magnetic tape MT is pulled out from the feed reel R1, passed through the guide roller 71A, the upper side of the guide member 21, and the guide roller 71B, and then wound. The magnetic tape is placed on the suction surface 10a of the electrostatic chuck 10 and fixed to the reel R2.
Then, an air supply pump (not shown) of the air extruding means 30 is operated to blow a predetermined flow rate of air from the nozzle 31 to a predetermined position of the magnetic tape MT.

Next, as shown in FIGS. 2A and 2B, the guide member 21 and the nozzle 31 are attracted by operating the drive device (not shown) of the slide drive means 40 while air is blown onto the magnetic tape MT. Slide along the surface 10a at a predetermined speed. That is, the guide member 21 is slid in the longitudinal direction of the magnetic tape MT along the suction surface 10a between the magnetic tape MT placed on the suction surface 10a of the electrostatic suction table 10 and the suction surface 10a. .
Then, the magnetic tape MT is once separated from the attracting surface 10a by the guide surface 21a of the guide member 21, and then guided again to the attracting surface 10a without applying extra force such as tension.

  Along with the guidance of the magnetic tape MT to the attracting surface 10a, a sensor (not shown) for detecting the position of the guide member 21 in the longitudinal direction of the magnetic tape MT is activated to correspond to the magnetic tape MT guided by the attracting surface 10a. The switches connected to the electrode pairs 11A to 11F are sequentially interlocked, and the electrode pairs 11A to 11F corresponding to the guided magnetic tape MT are turned on. Then, the attracting surface 10a is sequentially charged corresponding to the guidance of the magnetic tape MT. Therefore, the magnetic tape MT is charged with static electricity (electric charge) and is sequentially attracted to the attracting surface 10a by electrostatic attraction.

  Furthermore, the air blown out from the nozzle 31 presses the adsorbed magnetic tape MT with a predetermined pressure. When pressed in this way, the air is entrained on the attracting surface 10a and the lower surface of the magnetic tape MT, and the air interposed between the magnetic tape MT and the attracting surface 10a is pushed out. Therefore, the magnetic tape MT can be satisfactorily adhered to the attracting surface 10a.

[Second step: Measurement of shape of magnetic tape]
Subsequently, the shape of the magnetic tape MT adsorbed in this way is measured by the optical measuring means 50A. More specifically, as shown in FIGS. 3 and 4, measurement points A, B, and C are set on the edges of the magnetic tape MT covering the transparent portions 13A to 13C, respectively. Then, the displacement (curvature value) of the measurement point B with respect to the reference line AC passing through the measurement points A and C is obtained.

  Specifically, from the laser generators 51, 51, 51 arranged above the measurement points A, B, C, respectively, the strip-shaped lasers L1, L1, L1 are respectively arranged in the width direction so as to straddle the reference line AC. Irradiate. Lasers L1 and L1 that have passed through the transparent portions 13A, 13B, and 13C are respectively received by the laser receivers 52, 52, and 52 below the electrostatic adsorption table 10, that is, below the measurement points A, B, and C, respectively. , L1 are received. At this time, when the magnetic tape MT is curved, the amount of light received by the belt-like laser L1 in the width direction (the length in the width direction of the transmitted laser L1) decreases.

  Next, the positions (edge positions) of the measurement points A, B, and C are obtained by detecting the length in the width direction of the transmitted laser L1 by the laser receivers 52, 52, and 52. Based on the positions of the measurement points A, B, and C, the distance between the reference line AC and the measurement point B, that is, the displacement (ΔD) is calculated, and the calculated value becomes the curvature value at the measurement point B. (See illustration).

[Third step: Static neutralization of electrostatic chuck and magnetic tape]
After the measurement, the static electricity (electric charge) on the electrostatic adsorption table 10 and the magnetic tape MT is removed by electrostatic adsorption in the first step. Specifically, as shown in FIG. 5, the static elimination bar 61 is operated to blow ion air containing ions onto the electrostatic chuck 10 and the magnetic tape MT. Thereby, the static electricity (electric charge) carried on the electrostatic chuck 10 and the magnetic tape MT can be removed.

[Fourth step: running of magnetic tape]
Thereafter, the spindle (not shown) of the magnetic tape running means 70 is operated to wind up the measured portion of the magnetic tape MT on the winding reel R2, and a new magnetic tape MT is fed from the feed reel R1 onto the electrostatic chuck 10. Pull out.
Thereafter, adsorption of the magnetic tape MT to the electrostatic adsorption table 10, shape measurement, and static elimination are repeated. By repeating such an operation, all the shapes of the magnetic tape MT wound around the winding reel R1 can be measured.

  As described above, according to the tape shape measuring apparatus S1 according to the first embodiment, the magnetic tape MT is guided to the attracting surface 10a in a state where an extra force such as tension is not applied, and air is further pushed out by the air extruding means 30. The magnetic tape MT can be adsorbed while being in close contact with the adsorbing surface 10a. Then, by measuring the magnetic tape MT adsorbed in such a state, it is possible to accurately measure a shape such as a curvature value.

  In addition, as shown in FIG. 4, the width variation and curvature variation amount are measured by measuring the edge positions on both sides in the width direction of the magnetic tape MT and narrowing the measurement interval in the longitudinal direction or setting the measurement points appropriately. You can also

<< Second Embodiment >>
Next, a tape shape measuring apparatus according to the second embodiment will be described with reference to FIG. FIG. 6 is a side view of the tape shape measuring apparatus according to the second embodiment.

  As shown in FIG. 6, the tape shape measuring apparatus according to the second embodiment is different from the tape shape measuring apparatus S <b> 1 according to the first embodiment in that the magnetic tape MT is directly pressed by the roller 36 and air is pushed out. .

  More specifically, the tape shape measuring apparatus according to the second embodiment is configured to replace the nozzle 31, the hose 32, the air supply pump, and the like as an air extruding unit, mainly a roller 36 that presses the upper surface of the magnetic tape MT; A roller arm 37 that includes a roller pressing force adjusting mechanism that rotatably supports the roller 36 and adjusts the pressing force of the roller 36 is provided. The roller arm 37 is pivotally supported by the arm 41 (see FIG. 1) like the nozzle 31, and the pressing position of the roller 36 is on the upper surface of the magnetic tape MT immediately after being attracted to the attracting surface 10a. It is set to correspond. That is, the air pressing means according to the second embodiment is a contact type with respect to the magnetic tape MT.

  The roller 36 that is in direct contact with the magnetic tape MT is preferably made of rubber having a rubber hardness of 10 ° to 70 ° so as not to damage the magnetic tape MT by pressing. Examples of such rubber include urethane rubber.

  The roller pressing force adjusting mechanism of the roller arm 37 is constituted by, for example, a compression coil spring, a hydraulic cylinder, etc., and the pressing force by the roller 36 can be set as desired. The pressing force by the roller 36 is a linear pressure in the width direction of the magnetic tape MT, and is preferably set to 0.2942 N / mm (0.03 kgf / mm) to 9.80665 N / mm (1.0 kgf / mm). .

  Therefore, the roller 36 directly presses the upper surface of the magnetic tape MT attracted to the attracting surface 10a, and reliably pushes out the air between the magnetic tape MT and the attracting surface 10a, thereby bringing the magnetic tape MT into close contact with the attracting surface 10a. be able to.

<< Third Embodiment >>
Next, a tape shape measuring apparatus according to the third embodiment will be described with reference to FIG. FIG. 7 is a perspective view showing a measurement situation by the optical measuring means according to the third embodiment.

  As shown in FIG. 7, the tape shape measuring apparatus according to the third embodiment includes optical measuring means 50B, 50B, 50B provided corresponding to the transparent portions 13A to 13C. Here, the optical measuring means 50B provided for the transparent portion 13A will be specifically described.

  The optical measuring means 50B includes a light projector 55, a light receiver 56, a linear gauge 57, and an arm 58 that irradiates the edge portion of the magnetic tape MT adsorbed so as to cover the transparent portion 13A with a condensing light beam L2. It is configured with. The focus (condensing point) of the condensing light beam L2 irradiated by the projector 55 is aligned with the magnetic tape MT.

  The light projector 55 is disposed above the electrostatic chuck 10 and the light receiver 56 is disposed below the electrostatic chuck 10 so as to sandwich the magnetic tape MT that is sucked. The light projector 55 and the light receiver 56 are connected by an arm 58, and are movable in the width direction of the magnetic tape MT by a guide or the like (not shown). The linear gauge 57 is fixed to the arm 58, and its freely movable measuring part is in contact with the side surface of the electrostatic adsorption table 10, and the amount of movement in the width direction of the light projector 55 and the light receiver 56, that is, the above-mentioned collection. The position of the light spot in the width direction can be measured.

  Therefore, according to the optical measuring means 50B according to the third embodiment, after setting the measurement points A, B, and C in the state where the magnetic tape MT is attracted to the attracting surface 10a, as in the first embodiment, The edge position of the magnetic tape MT at each of the measurement points A to C can be detected by moving the projector 55 and the light receiver 56 in the width direction while irradiating the condensed light beam L2. More specifically, the position where the light receiver 56 switches between detection / non-detection of the light beam L2 becomes an edge portion at each of the measurement points A to C, and the position is measured by the linear gauge 57.

  And the curvature value in the measurement point B can be calculated | required similarly to 1st Embodiment based on the position of each measurement point AC measured in this way.

  As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to each said embodiment, You may combine suitably each component demonstrated by embodiment in the range which does not deviate from the meaning of this invention. In addition, for example, the following appropriate changes are possible.

  In the first embodiment described above, after the measurement, the static electricity charged on the magnetic tape MT is removed by the charge removal bar 61 (see FIG. 1) as the charge removal means. However, the charge removal means is not limited to this, for example, FIG. A local static eliminator 63 shown may be used. The local static eliminator 63 has an elongated static eliminator 63a having electrical conductivity, and is a device that can be neutralized by bringing the static eliminator 63a into contact with the electrostatic chuck 10 and the magnetic tape MT. Therefore, after the measurement of the magnetic tape MT, the static electricity of the electrostatic chuck 10 and the magnetic tape MT can be removed by sliding the local static eliminator 63 while keeping the static eliminator 63a in contact.

  In the first embodiment described above, the guide member 21 having the convex guide surface 21a (see FIG. 2A) is used. However, the shape of the guide member is not limited to this, for example, as shown in FIG. Alternatively, a guide member 23 having a rectangular side view in the width direction and having a guide surface 23a parallel to the suction surface 10a may be used. Such a guide member 23 can be easily configured, although the guide accuracy of the magnetic tape MT to the attracting surface 10a is slightly inferior to the guide member 21 having the convex guide surface 21a. In this case, the distance (Δh2) between the guide surface 23a and the suction surface 10a is defined as the height of the guide member 23.

  In the first embodiment described above, the curvature of the magnetic tape MT is measured using the optical measuring means 50A including the laser generator 51, the laser receiver 52, etc. In addition to this, for example, a two-dimensional displacement sensor, Alternatively, an optical measuring means may be configured from a CCD line sensor or the like, and the shape of the magnetic tape MT may be measured. Thus, when using a two-dimensional displacement sensor and a CCD line sensor, not only the curvature value of the magnetic tape MT but also the width variation and the amount of curvature variation can be measured. Further, when the two-dimensional displacement sensor or the CCD line sensor is used as described above, it is not necessary to provide the transparent portions 13A to 13C on the electrostatic chuck 10.

  In the first embodiment described above, the position of the attracted magnetic tape MT is measured by the optical measuring means 50A. For example, a scale is engraved in the width direction on the attracting surface 10a of the electrostatic attraction stand 10, and this scale is used. The position of the edge of the magnetic tape MT may be measured.

  In the first embodiment described above, since the guide member 21 and the nozzle 31 are provided on the arm 41, when the arm 41 is moved, the guide member 21 and the nozzle 31 slide integrally along the suction surface 10a. In addition to this, for example, the guide member 21 and the nozzle 31 may be connected to different slide driving means and slid in synchronization.

  In the first embodiment described above, the guide member 21 and the nozzle 31 are mechanically moved at a predetermined speed by the drive device of the slide drive means 40. However, the guide member 21 and the nozzle 31 are moved manually. Also good.

  Hereinafter, based on an Example, this invention is demonstrated further more concretely.

(1) Examples 1 and 2: Examination of the shape of the guide member A guide member 21 having a convex guide surface 21a with a magnetic tape MT1 having a curvature value of 0 mm and a magnetic tape MT2 having a curvature value of 2 mm as measurement targets. The case of using (see FIG. 2 (a)) is Example 1, and the case of using a guide member 23 (see FIG. 9) whose side view in the width direction is rectangular is Example 2. went. In this measurement, the optical measurement means 40A according to the first embodiment is used, and the measurement is repeated 10 times at the same measurement point. As the repeated measurement accuracy, the standard deviation value of the measured curvature value is used. (3σ) was determined. Other adsorption conditions and measurement results are shown in Table 1.

  As is clear from Table 1, the first embodiment using the guide member 21 having the convex guide surface 21a is more accurate than the second embodiment using the guide member 23 having a rectangular side view (measured value). It was confirmed that the standard deviation value (3σ) indicating (variation) was small. That is, it is considered that the magnetic tape was better guided to the attracting surface 10a when the guide member 21 having the convex guide surface 21a was used.

(2) Example 3, Comparative Example 4: Examination of Air Blowing Position Next, the air blowing position from the nozzle 31 (see FIG. 1) was examined. Example 3 shows a case where air is blown to the magnetic tape immediately before electrostatic adsorption by being guided to the adsorption surface 10a by the guide member 21, and a case where air is blown to the magnetic tape immediately after electrostatic adsorption is guided to the adsorption surface 10a. Example 4 was adopted. The air blowing position was adjusted by rotating the nozzle 31 at a predetermined angle with respect to the arm 41. Other adsorption conditions and measurement results are shown in Table 2.

  As is clear from Table 2, the standard deviation value (3σ) in Example 4 in which air is blown onto the magnetic tape immediately after electrostatic adsorption is larger than that in Example 3 in which air is blown onto the magnetic tape immediately before adsorption. It was confirmed to be smaller. Thus, it is considered that air was blown onto the magnetic tape immediately after the magnetic tape was electrostatically attracted to the attracting surface 10a, thereby extruding air between the magnetic tape and the attracting surface 10a, thereby allowing good adhesion.

(3) Examples 5 and 6: Examination of air flow rate Next, the flow rate of air blown from the nozzle 31, that is, the flow rate of air blown onto the magnetic tape immediately after the adsorption was examined. The case where the air amount was 22.8 (L / min) was Example 5, and the case where the air amount was 16.8 (L / min) was Example 6. Other adsorption conditions and measurement results are shown in Table 3.

  As is apparent from Table 3, the standard deviation value (3σ) was smaller in Example 6 with a smaller air spray amount than in Example 5. Thereby, it is assumed that the amount of air blown onto the magnetic tape is preferably small. This is thought to be because turbulence is likely to occur when the amount of air is large.

(4) Examples 7 and 8: Examination of moving speed of guide member Next, the moving (sliding) speed of the guide member 21 was examined. Example 7 is a case where the guide member 21 is moved at a low speed of 2.0 (m / min), and Example 8 is a case where the guide member 21 is moved at a medium speed of 8.0 (m / min). Other adsorption conditions and measurement results are shown in Table 4.

  As is clear from Table 4, the standard deviation value (3σ) was smaller in Example 7 in which the guide member 21 was moved at a lower speed than in Example 8. This is because the amount of air entrained on the lower surface of the magnetic tape is reduced by moving the guide member 21 at a low speed, and the air is pushed out well by the air pushing means 30 synchronized with the guide member 21. It is done.

(5) Examples 9, 10: Examination of guide member height Next, the height position of the guide member 21 with respect to the suction surface 10a was examined. The case where the height (Δh1) of the guide member 21 is 7.0 mm is Example 9, and the case where the height is 1.0 mm is Example 10. Other adsorption conditions and measurement results are shown in Table 5. This examination was performed only on the magnetic tape MT1 having a curvature value of 0 mm.

  As is clear from Table 5, the standard deviation value (3σ) was smaller in Example 10 in which the height position of the guide member 21 was lower than in Example 9. This is considered to be because the length of the magnetic tape located between the guide member 21 and the attracting surface 10a is shortened by lowering the guide member 21, thereby reducing the air accompanying the lower surface of the magnetic tape. .

(6) Example 11, Comparative Example 1: Comparison between the method of the present invention and the conventional method Subsequently, for the magnetic tape MT2 having a curvature value of 2 mm, the method according to Example 11 and the method according to Comparative Example 1 Then, comparison of repeatability was performed. Table 6 below shows adsorption conditions and measurement results.
Ten measurement points were set on the magnetic tape MT2, and the bending value was measured five times for each measurement point in the same manner as in Example 1 to obtain the repeatability (σ).

  Next, with the method according to Comparative Example 1, the bending value was measured repeatedly at five times for the ten measurement points, and the repeatability (σ) was obtained. Here, Comparative Example 1 will be described. In Comparative Example 1, the electrostatic suction table 10 is not used, but a porous suction table provided with an appropriate air suction device is used. Adsorbed. Moreover, the guide member was not moved by the slide drive means 40 but manually moved by human power.

  As is clear from Table 6, the repeatability (σ) according to Example 11 was generally smaller than the repeatability (σ) according to Comparative Example 1. That is, according to Example 11, it was confirmed that measurement was possible with high accuracy.

It is a perspective view which shows the structure of the tape shape measuring apparatus which concerns on 1st Embodiment. (A), (b) is a side view of the tape shape measuring apparatus which concerns on 1st Embodiment, (a) shows an adsorption | suction initial state, (b) shows an adsorption | suction late state. It is a perspective view which shows the measurement condition by the tape shape measuring apparatus which concerns on 1st Embodiment. It is a top view which shows the measuring method by the tape shape measuring apparatus which concerns on 1st Embodiment. It is a top view which shows the static elimination condition by the static elimination bar which concerns on 1st Embodiment. It is a side view which shows a part of tape shape measuring apparatus which concerns on 2nd Embodiment. It is a perspective view which shows the measurement condition by the optical measuring means which concerns on 3rd Embodiment. It is a side view which shows the static elimination condition by the local static elimination apparatus which concerns on the modification of a static elimination means. It is a side view which concerns on the modification of a guide member.

Explanation of symbols

MT magnetic tape S1 tape shape measuring apparatus 10 electrostatic adsorption table 10a adsorption surface 11A, 11B, 11C, 11D, 11E, 11F electrode pair 13A, 13B, 13C transparent portion 21, 23 guide member 21a, 23a guide surface 30 air extrusion means 31 Nozzle 36 Roller 40 Slide drive means 41 Arm (relative position holding means)
50A, 50B Optical measuring means 51 Laser generator 52 Laser receiver 55 Projector 56 Receiver 57 Linear gauge 61 Static elimination bar (static elimination means)
63 Local static eliminator (static elimination means)
70 Magnetic tape running means

Claims (1)

A tape shape measuring device for measuring the shape of a tape,
In order to adsorb the tape, an adsorption table having a chargeable and flat adsorption surface;
A guide member that is slidable in the longitudinal direction of the tape along the suction surface between the tape and the suction surface, and guides the suction of the tape by separating the tape from the suction surface;
An air extruding means that presses the adsorbed tape and extrudes air between the tape and the adsorbing surface;
A tape shape measuring apparatus comprising:

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