WO2015125756A1 - Air bearing device and measuring device - Google Patents

Air bearing device and measuring device Download PDF

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Publication number
WO2015125756A1
WO2015125756A1 PCT/JP2015/054205 JP2015054205W WO2015125756A1 WO 2015125756 A1 WO2015125756 A1 WO 2015125756A1 JP 2015054205 W JP2015054205 W JP 2015054205W WO 2015125756 A1 WO2015125756 A1 WO 2015125756A1
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WO
WIPO (PCT)
Prior art keywords
air bearing
bearing device
pad portion
region
suction
Prior art date
Application number
PCT/JP2015/054205
Other languages
French (fr)
Japanese (ja)
Inventor
角田　耕一
Original Assignee
オイレス工業株式会社
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Publication date
Application filed by オイレス工業株式会社 filed Critical オイレス工業株式会社
Priority to JP2016504097A priority Critical patent/JP6685894B2/en
Publication of WO2015125756A1 publication Critical patent/WO2015125756A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings

Definitions

  • the present invention relates to an air bearing device and a measuring device including the air bearing device, and more specifically, an air bearing device including a pad portion having a bearing surface provided with a suction region for applying a suction force, and the air
  • the present invention relates to a measuring device including a bearing device.
  • a coating apparatus for applying a coating solution such as a resist solution to a thin plate-like workpiece such as a glass substrate or a semiconductor wafer, or a jig on which a workpiece is placed.
  • An air bearing device is used for a measuring device that measures flatness and the like.
  • a coating apparatus disclosed in Patent Document 1 includes a base having a stage on which a substrate is held, a rail disposed on the base, a gantry that is relatively movable along the rail, and a gantry. And an application unit that applies a coating liquid to the substrate.
  • An air bearing device is attached to the gantry, and the air bearing device jets air onto the surface of the rail, whereby the gantry is supported in a state of floating from the rail.
  • an object of the present invention is to provide an air bearing device and a measuring device including the air bearing device that can achieve the flying accuracy that can meet the demands for further increasing the flying accuracy, further reducing the thickness of the product, and increasing the measurement accuracy. .
  • the first aspect of the air bearing device of the present invention includes a pad portion that can be lifted by a floating force generated by discharging a gas, and the pad portion is a gas.
  • a first pad portion having a bearing surface having a discharge area for discharging the liquid and a suction area for applying a suction force.
  • the air bearing device according to the first aspect wherein a porous body is disposed in the discharge region, and an intake groove is disposed in the suction region. Is provided.
  • the discharge region is arranged so as to surround the suction region.
  • the pad portion includes a discharge region from which gas is discharged. Includes a second pad portion having a bearing surface that does not include a suction region for applying a suction force.
  • a first aspect of the measuring apparatus of the present invention includes a measuring means for measuring flatness, warpage, or flatness of an object to be measured; Placement means on which a measurement object is placed, a support member mounted with the measurement means, and movable relative to the placement means, and for lifting the support member at a predetermined distance from the placement means
  • a first pad portion having a bearing surface having a region and a suction region for applying a suction force is provided.
  • the measuring apparatus according to the first aspect, wherein a porous body is disposed in the discharge region, and an intake groove is provided in the suction region. It has been.
  • the measuring apparatus according to the first or second aspect, wherein the discharge area is disposed so as to surround the suction area.
  • the bearing surface of the first pad portion is the upper surface and the first pad. A plurality of them are arranged so as to face the side surfaces.
  • the placing means includes a second side surface facing the first side surface, and the pad portion is And a second pad portion having a bearing surface facing the second side surface, which has a discharge region for discharging gas but does not have a suction region for applying a suction force.
  • the air bearing device and the measuring device according to the present invention can control the flying height of the air bearing device with higher accuracy by providing a suction area for applying a suction force to the pad portion of the air bearing device. Therefore, the flatness, warpage, flatness, thickness, and the like of the workpiece can be processed with higher accuracy by various processing devices including the air bearing device.
  • the flatness, warpage, flatness, thickness, etc. of the object to be measured can be measured with higher accuracy. It is possible to reduce the thickness of the product to be processed.
  • FIG. 4 is a cross-sectional view of the first pad portion taken along line IV-IV in FIG. 3. It is sectional drawing along the diameter of the 2nd pad part of a left side surface support air bearing apparatus.
  • FIG. 1 is a front view schematically showing a measuring apparatus 101 according to the first embodiment
  • FIG. 2 is a plan view of the measuring apparatus 101 shown in FIG. 1
  • FIG. 3 is a top view shown in FIG. 4 is a bottom view of the first pad portion 110 of the support air bearing device 109
  • FIG. 4 is a cross-sectional view of the first pad portion 110 taken along line IV-IV (diameter of the first pad portion 110) in FIG. 5
  • FIG. 6 is a first pad portion 110, 133 of the measuring device of FIG. 1.
  • FIG. 6 is a schematic plan view schematically showing the arrangement of second pad portions 134.
  • the measuring apparatus 101 of the embodiment is a measuring means for mainly measuring the flatness (JISC2504: 1999), warpage (JISB0415: 1975), or flatness (JISB0182: 1993) of the air rail 103 that is the object to be measured.
  • a laser displacement meter 105, a surface plate 107, which is a mounting means having a processing region 108 a where the air rail 103 measured by the laser displacement meter 105 is disposed, and a laser displacement meter 105 are attached and are relative to the surface plate 107.
  • a gantry 115 that is a movable support member, and an upper surface support air bearing device 109 that is an air bearing device mounted on the gantry 115 for floating the gantry 115 at a predetermined distance from the surface plate 107 are provided.
  • the air rail 103 is a member that constitutes an air levitation transfer device that supports an object to be processed such as a thin glass substrate in a non-contact manner by discharging a gas.
  • the upper surface support air bearing device 109 includes a first pad portion 110 that is a pad portion, and a discharge region 104 for applying a floating force to the first pad portion 110 by discharging a gas;
  • a bearing surface 114 having a suction area 106 provided with an intake groove 113 for applying a suction force is provided.
  • the gantry 115 on which the laser displacement meter 105 is attached can be lifted away from the surface plate 107 by a predetermined distance by the levitation force and the suction force applied from the first pad portion 110.
  • the measuring apparatus 101 of the present embodiment includes left and right side support air bearing devices 117 and 118 described later, in addition to the top support air bearing device 109.
  • the surface plate 107 has a rectangular parallelepiped shape, and a flat upper surface 108 thereof has a rectangular processing region 108a in plan view and a support region 108b disposed with the processing region 108a interposed in a direction orthogonal to the arrow L direction of the upper surface 108. And having.
  • the processing area 108a is an area for measuring the distance to the air rail 103 to be placed, and the support area 108b is conventionally known in the direction indicated by the arrow L in FIG. The region is moved by a driving means (not shown).
  • the gantry 115 includes a horizontal holding unit 115a on which the laser displacement meter 105 is mounted, and two first support units that extend in a direction intersecting the horizontal holding unit 115a and on which the upper surface support air bearing device 109 is mounted. 115b, a second support portion 115c to which the right side support air bearing device 117 is mounted, and a third support portion 115d to which the left side support air bearing device 118 is mounted.
  • the gantry 115 is supported without contacting the surface plate 107 by the upper surface support air bearing device 109, the right side surface support air bearing device 117, and the left side surface support air bearing device 118.
  • the horizontal holding portion 115 a extends across the width direction of the surface plate 107 (the left-right direction in FIGS. 1 and 2), and terminates beyond the right side surface 119 of the surface plate 107.
  • a second support portion 115c disposed on the right side in a front view extends perpendicular to the horizontal holding portion 115a.
  • a first pad portion 133 that is a pad portion of the right-side support air bearing device 117 is attached to the distal end portion of the second support portion 115c.
  • the third support portion 115d disposed on the left side when viewed from the front is an inverted L-shaped member, and one end thereof is connected to the tip portion of the first support portion 115b disposed on the left side when viewed from the front.
  • the second pad portion 134 that is the pad portion of the left side support air bearing device 118 is attached to the other end portion of the third support portion 115d.
  • the pair of first support portions 115b is provided with a horizontal holding portion 115a so that the first pad portion 110 of the upper surface support air bearing device 109 can be disposed at a position corresponding to the support region 108b of the upper surface 108 of the surface plate 107. Extends from.
  • the first pad portion 110 of the upper surface support air bearing device 109 is attached to the respective front ends of the pair of first support portions 115b via a conventionally known ball joint 131.
  • the gantry 115 is levitated at a predetermined distance from the upper surface 108 and the side surface 119 of the surface plate 107 by the upper surface supporting air bearing device 109 and the side surface supporting air bearing devices 117 and 118, and the W direction (
  • the movement of the gantry 115 in the longitudinal direction of the horizontal holding portion 115a and the direction orthogonal to the L direction in FIG. 2 is regulated by the right side support air bearing device 117 and the left side support air bearing device 118. 1, the upward movement of the gantry 115 is restricted by the suction force of the upper surface support air bearing device 109, as will be described later.
  • the upper surface support air bearing device 109 used in the measurement apparatus 101 according to the present embodiment will be described. As shown in FIG. 6, both first pad portions 110 of the upper surface support air bearing device 109 that are arranged on the upper surface 108 of the surface plate 107 on the left and right sides in front view have the same shape, Configuration, dimensions.
  • the right side support air bearing device 117 includes a gas supply source (not shown) such as a compressor that can supply a predetermined flow rate of gas at a predetermined pressure, a first pad portion 133 that is supplied with gas from the gas supply source, Is provided.
  • the left-side support air bearing device 118 includes a gas supply source (not shown) such as a compressor that can supply a predetermined flow rate of gas at a predetermined pressure, and a second pad part 134 that is supplied with gas from the gas supply source. . Therefore, when the operator operates the measuring apparatus 101, gas is supplied from a gas supply source (not shown) to the first pad units 110 and 133 and the second pad unit 134 by the drive signal from the control unit 135, A levitation force is generated by discharging gas from the first pad portions 110 and 133 and the second pad portion 134.
  • a gas supply source such as a compressor that can supply a predetermined flow rate of gas at a predetermined pressure
  • a second pad part 134 that is supplied with gas from the gas supply source. Therefore, when the operator operates the measuring apparatus 101, gas is supplied from a gas supply source (not shown) to the first pad units 110 and 133 and the second pad unit 134 by the drive signal from the control unit 135, A levitation force is generated by discharging gas
  • the first pad portion 110 of the upper surface support air bearing device 109 and the first pad portion 133 of the right side surface support air bearing device 117 have the same shape and configuration although the dimensions are different.
  • the first pad unit 110 will be described.
  • the right-side support air bearing device 117 has two first pad portions 133 that are spaced apart from each other in the direction of arrow L and have the same shape, size, and configuration.
  • the upper surface support air bearing device 109 has two first pad portions 110 that are separated in the direction of arrow L as shown in FIG.
  • the first pad portion 110 includes a circular bearing surface 114 in a bottom view.
  • the bearing surface 114 has a suction region 106 located substantially in the center and a discharge region 104 surrounding the suction region 106.
  • the suction region 106 is configured by an intake groove 113 that is a recess having a predetermined depth dimension.
  • the intake groove 113 has a circular shape in a bottom view, and the intake groove 113 communicates with the intake groove 113 penetrating in the thickness direction of the first pad 110 as shown in FIG. Accordingly, a suction force from suction means (not shown) such as a vacuum pump is applied to the intake groove 113 from the opposite bearing surface 112 side, which is the upper surface facing the bearing surface 114, via the intake through passage 121.
  • the discharge region 104 is constituted by a porous body 111 having a predetermined thickness.
  • the porous body 111 is a circular ring-shaped member as viewed from below, and has a plurality of pores communicating with each other for discharging gas.
  • the first pad portion 110 communicates with the fixing groove 116 in which the porous body 111 is mounted, the air supply groove 123 extending in a circular ring shape when viewed from the bottom, and the air supply groove 123.
  • An air supply passage 125 that is a hole that penetrates in the thickness direction of the pad portion 110 and reaches the anti-bearing surface 112. Further, the supply air passage 125 is connected to the gas supply source described above.
  • the intake groove 113 is circular in the bottom view, but it is needless to say that the intake groove 113 can have various shapes such as an ellipse and a polygon.
  • the suction region can be configured by a member having a plurality of intake ports or a porous body. Further, the number, shape, and position of the air supply groove 123, the intake through passage 121, and the air supply through passage 125 can be changed as appropriate.
  • the upper surface support air bearing device 109 and the right side surface support air bearing device 117 configured as described above receive a drive signal from the control unit 135, a gas having a predetermined pressure and a predetermined flow rate is supplied from a gas supply source (not shown) to the first pad unit 110. , 133.
  • the gas supplied to the first pad portions 110 and 133 is discharged from the pores of the porous body 111 through the supply air passage 125 and the supply groove 123 and collides with the upper surface 108 and the side surface 119 of the surface plate 107.
  • a levitation force is applied to the first pad portions 110 and 133.
  • the left side support air bearing device 118 includes a single second pad portion 134. Similar to the first pad portion 110 described above, the second pad portion 134 has a circular bearing surface 214 in a bottom view, and the bearing surface 214 is configured by a porous body 211 having a predetermined thickness. ing. That is, unlike the bearing surface 114 of the first pad portion 110, the bearing surface 214 of the second pad portion 134 does not include a suction region and includes only the discharge region 204.
  • the discharge region 204 is composed of a porous body 211.
  • the porous body 211 is a circular member as viewed from the bottom, and has a plurality of pores communicating with each other for discharging gas.
  • the second pad portion 134 communicates with the air supply groove 223 that extends in a circular ring shape when viewed from below and the air supply groove 223, and the second pad portion 134.
  • a supply air passage 225 that is a hole that penetrates in the thickness direction and reaches the anti-bearing surface 212. Further, the supply air passage 225 is connected to the gas supply source described above.
  • the gas supplied to the second pad portion 134 having the above-described configuration passes through the supply air passage 225 and the supply groove 223 and is discharged from the pores of the porous body 211 and collides with the side surface 119 of the surface plate 107 to form the second.
  • a levitation force is applied to the pad portion 134 of the.
  • the measuring device 101 causes the gas of a predetermined pressure (that is, compressed gas) from the gas source to the upper surface support air bearing device 109 and the left and right side surface support air bearing devices 117 and 118 according to the drive signal from the control unit 135.
  • a predetermined pressure that is, compressed gas
  • the compressed gas is ejected from the porous bodies 111 and 211, and the gantry 115 is supported in a state of being separated from the upper surface 108 and the side surface 119 of the surface plate 107 by a predetermined distance.
  • a suction means (not shown) is also driven by a drive signal from the control unit 135, and a predetermined suction force is applied from the intake groove 113 to the upper surface 108 and the side surface 119 of the surface plate 107.
  • the bearing surface 114 is held at a predetermined distance from the upper surface 108 and the side surface 119 of the surface plate 107. In this way, by providing the bearing surface 114 with a function capable of applying a suction force, the flying force by discharging the gas and the suction force acting in the opposite direction are applied, and the control accuracy regarding the flying height is improved. be able to.
  • the flatness of the air rail 103 on which the laser displacement meter 105 is placed in the processing area 108a by the drive signal of the control unit 135, warpage, and the gantry 115 is lifted from the surface plate 107 as described above.
  • the flatness is measured.
  • the laser displacement meter 105 uses a conventionally known measuring means including a light emitting element that emits a light beam such as a semiconductor laser and a light receiving element that receives a light beam reflected from the object to be measured. ing.
  • FIG. 7 is a schematic plan view schematically showing the arrangement of the first pad portions 110 and 133 and the second pad portion 134 of the measuring apparatus according to the second embodiment.
  • the measurement device according to the second embodiment is in accordance with the first embodiment including a single second pad portion 134 in that the left side support air bearing device 134 includes two second pad portions 134. Different from the measuring device 101. Since other configurations and effects of the measurement apparatus according to the second embodiment are the same as those of the measurement apparatus 101 according to the first embodiment, details are omitted.
  • control unit 135 includes the first pad unit 110 of the upper surface support air bearing device 109, the first pad unit 133 of the right side support air bearing device 117, and the left side support air bearing device 118. Needless to say, it is electrically connected to the second pad portion 134 and the operation of each component is controlled.
  • this embodiment is configured to include two second pad portions 134 in the left side support air bearing device 118, the amount of gas discharged can be adjusted more finely than the first embodiment, The flying height of the gantry 115 (see FIG. 1) can be performed with higher accuracy.
  • FIG. 8 is a schematic plan view schematically showing the arrangement of the first pad portions 110 and 133 of the measuring apparatus according to the third embodiment.
  • the measurement apparatus according to the third embodiment is different from the measurement apparatus 101 according to the first embodiment including the left side support air bearing device 134 in that it does not include the left side support air bearing device. Therefore, the third support portion 115d shown in FIG. 1 is not provided. Since other configurations and effects of the measuring apparatus according to the third embodiment are the same as those of the measuring apparatus 101 according to the first embodiment, details are omitted.
  • the first pad portion 133 disposed to face the side surface 119 of the surface plate 107 generates not only a levitation force but also a suction force, and the upper surface 108 of the surface plate 107 and the two side surfaces 119.
  • the distance between the gantry 115 (see FIG. 1) and the surface plate 107 can be maintained at a predetermined distance despite the configuration in which the separation distance is controlled with respect to one of them.
  • the non-contact support of the gantry 115 with respect to the surface plate 107 can be realized by the configuration of the third embodiment.
  • the porous body 111 is configured so as to surround the intake groove portion 113.
  • the porous body or the narrow portion constituting the discharge port
  • the left side support air bearing device 118 is configured to include only the discharge area, but it is also possible to provide a suction area.
  • the discharge port for discharging the gas is constituted by the pores of the porous bodies 111 and 211.
  • the plate member instead of the porous bodies 111 and 211, the plate member has pores. It is also possible to configure the discharge port by providing the.
  • the air bearing device of the present invention can be applied not only to the measuring device but also to various support devices that support the object to be supported in a non-contact manner, and it goes without saying that the applied device exhibits the effects and operations of the present invention. .
  • the surface plate 107 having the processing area 108a is used as the mounting device, but the mounting device of the present invention is not limited to the surface plate. It has a flat surface having a predetermined flatness (JISC2504: 1999), warpage (JISB0415: 1975), or flatness (JISB0182: 1993) for use in coating work, measurement work, etc., and has predetermined rigidity, hardness, and wear resistance.
  • a variety of pedestals can be used as mounting means.
  • As the surface plate a cast iron box-type surface plate, a JIS surface plate, a stone surface plate, or the like can be used.
  • the gantry according to the first to third embodiments is a gate-type support member provided across the upper surface 108 of the surface plate 107, and is connected to a holding member extending in a direction crossing the upper surface 108 and one end of the holding member. It is also possible to provide a cantilever-like support member provided with a support member supported by a surface plate.
  • the first and second embodiments are measuring apparatuses including a first pad portion 133 that faces one side surface of the surface plate 107 and a second pad portion 134 that faces the other side surface 119.
  • the measuring device of the invention is not limited to the above configuration. It is also possible to adopt a configuration in which the second pad portion is provided so as to face both side surfaces 119. Furthermore, the number and position of the first pad portions 110 and 133 in the direction of the arrow L can be changed as appropriate.
  • the configuration includes a plurality of first pad portions 110 and 133 in the direction of the arrow L, but a configuration including a single first pad portion is also possible. It is also possible to adopt a configuration in which the upper surface support air bearing device including the first and second pad portions is disposed to face the upper surface 108.
  • the first pad portion 110 disposed to face the upper surface 108 of the surface plate 107 and the first pad portion 133 disposed to face the side surface 119 are configured separately.
  • the pad portion may be configured to include an L-shaped bearing surface in front view that can be disposed opposite to both the upper surface 108 and the side surface 119.
  • the surface plate 107 in the first to third embodiments has a configuration in which a horizontal upper surface 108 and both side surfaces 119 connected to both ends of the upper surface 108 are orthogonal to each other, but the air bearing device of the present invention is used.
  • the possible mounting means is not limited to this configuration.
  • the pad portion is parallel to the surface of the mounting means.
  • the object of the air bearing device of the present invention can be achieved as long as it is provided with a bearing surface that can be extended.

Abstract

The purpose of the invention is to provide an air bearing device that has improved floating precision and thus achieves floating precision that meets the demands of making products thinner and improving the precision of measurements, and a measuring device comprising the air bearing device. The present invention provides an air bearing device and a measuring device comprising the air bearing device, wherein the air bearing device comprises a pad unit that can float by way of a lifting force from the discharge of air, and the pad unit comprises a first pad unit that has a bearing face having a discharge region from which air is discharged and a suction region that applies a suctioning force.

Description

エアベアリング装置及び測定装置Air bearing device and measuring device
　本発明は、エアベアリング装置及び当該エアベアリング装置を備える測定装置に関し、より具体的には、吸引力を付与する吸引領域が設けられているベアリング面を有するパッド部を備えるエアベアリング装置及び当該エアベアリング装置を備える測定装置に関する。 The present invention relates to an air bearing device and a measuring device including the air bearing device, and more specifically, an air bearing device including a pad portion having a bearing surface provided with a suction region for applying a suction force, and the air The present invention relates to a measuring device including a bearing device.
　従来より、液晶パネルや半導体素子等の製造工程では、ガラス基板や半導体ウエハといった薄板状の被加工物にレジスト液等の塗液を塗布する塗布装置や、被加工物が配置される治具の平面度等を測定する測定装置等にエアベアリング装置が利用されている。 Conventionally, in the manufacturing process of liquid crystal panels and semiconductor elements, a coating apparatus for applying a coating solution such as a resist solution to a thin plate-like workpiece such as a glass substrate or a semiconductor wafer, or a jig on which a workpiece is placed. An air bearing device is used for a measuring device that measures flatness and the like.
　例えば、特許文献１に開示される塗布装置は、基板が保持されるステージを有する基台と、基台に配置されているレールと、レールに沿って相対的に移動可能なガントリと、ガントリに装着され基板に塗液を塗布する塗布ユニットと、を備える。ガントリには、エアベアリング装置が装着され、エアベアリング装置がレールの表面にエアを噴出することにより、ガントリはレール上から浮上した状態で支持される。 For example, a coating apparatus disclosed in Patent Document 1 includes a base having a stage on which a substrate is held, a rail disposed on the base, a gantry that is relatively movable along the rail, and a gantry. And an application unit that applies a coating liquid to the substrate. An air bearing device is attached to the gantry, and the air bearing device jets air onto the surface of the rail, whereby the gantry is supported in a state of floating from the rail.
特開２００８－２３８１４４号JP 2008-238144 A
　ところで、近年、製品の小型化の要求に伴い、液晶パネルの厚さを薄くすること（薄厚化）や半導体素子の微細化が望まれている。しかし、従来の塗布装置で使用されているエアベアリング装置で得られる浮上精度では、製品に対する更なる薄厚化や、エアベアリング装置を備える測定装置が実現できる測定精度の高精度化の要請に応えられない恐れがある。 By the way, in recent years, with the demand for miniaturization of products, it has been desired to reduce the thickness of the liquid crystal panel (thinning) and miniaturize semiconductor elements. However, the floating accuracy obtained with the air bearing device used in the conventional coating device can meet the demand for further thinning of the product and higher measurement accuracy that can be realized by a measuring device equipped with an air bearing device. There is no fear.
　本発明は、かかる事情に鑑みてなされたものである。すなわち、浮上精度を高め、製品のさらなる薄厚化や、測定精度の高精度化の要請に応えうる浮上精度を実現できるエアベアリング装置及び当該エアベアリング装置を備える測定装置を提供することを目的とする。 The present invention has been made in view of such circumstances. That is, an object of the present invention is to provide an air bearing device and a measuring device including the air bearing device that can achieve the flying accuracy that can meet the demands for further increasing the flying accuracy, further reducing the thickness of the product, and increasing the measurement accuracy. .
　上述した課題を解決し、目的を達成するために、本発明のエアベアリング装置の第１の態様は、気体を吐出することによる浮上力により浮上可能なパッド部を備え、前記パッド部は、気体が吐出される吐出領域と、吸引力を付与する吸引領域とを有するベアリング面を有する第１のパッド部を備える。 In order to solve the above-described problems and achieve the object, the first aspect of the air bearing device of the present invention includes a pad portion that can be lifted by a floating force generated by discharging a gas, and the pad portion is a gas. Is provided with a first pad portion having a bearing surface having a discharge area for discharging the liquid and a suction area for applying a suction force.
　また、本発明のエアベアリング装置の第２の態様によれば、第１の態様のエアベアリング装置であって、前記吐出領域には、多孔質体が配置され、前記吸引領域には、吸気溝が設けられている。 According to the second aspect of the air bearing device of the present invention, the air bearing device according to the first aspect, wherein a porous body is disposed in the discharge region, and an intake groove is disposed in the suction region. Is provided.
　さらに、本発明のエアベアリング装置の第３の態様によれば、第１又は第２の態様のエアベアリング装置であって、前記吐出領域は、前記吸引領域を取り囲むように配置されている。 Furthermore, according to a third aspect of the air bearing device of the present invention, in the air bearing device according to the first or second aspect, the discharge region is arranged so as to surround the suction region.
　さらに、本発明のエアベアリング装置の第４の態様によれば、第１乃至第３のいずれかの態様のエアベアリング装置であって、前記パッド部は、気体が吐出される吐出領域を具備するが、吸引力を付与する吸引領域を具備しないベアリング面を有する第２のパッド部を備える。 Furthermore, according to a fourth aspect of the air bearing device of the present invention, in the air bearing device according to any one of the first to third aspects, the pad portion includes a discharge region from which gas is discharged. Includes a second pad portion having a bearing surface that does not include a suction region for applying a suction force.
　さらに、上述した課題を解決し、目的を達成するために、本発明の測定装置の第１の態様は、被測定物の平坦度、反り若しくは平面度を測定するための測定手段と、前記被測定物が配置される載置手段と、前記測定手段が装着され、前記載置手段に対して相対移動可能な支持部材と、前記支持部材を前記載置手段から所定距離離間し浮上させるための、前記支持部材に装着されるエアベアリング装置と、を備え、前記エアベアリング装置は、気体を吐出することによる浮上力により浮上可能なパッド部を備え、前記パッド部が、気体が吐出される吐出領域と、吸引力を付与する吸引領域とを有するベアリング面を有する第１のパッド部を備える。 Furthermore, in order to solve the above-described problems and achieve the object, a first aspect of the measuring apparatus of the present invention includes a measuring means for measuring flatness, warpage, or flatness of an object to be measured; Placement means on which a measurement object is placed, a support member mounted with the measurement means, and movable relative to the placement means, and for lifting the support member at a predetermined distance from the placement means An air bearing device mounted on the support member, the air bearing device including a pad portion that can be lifted by a levitation force generated by discharging gas, and the pad portion discharging gas being discharged. A first pad portion having a bearing surface having a region and a suction region for applying a suction force is provided.
　また、本発明の測定装置の第２の態様によれば、第１の態様の測定装置であって、前記吐出領域には、多孔質体が配置され、前記吸引領域には、吸気溝が設けられている。 According to the second aspect of the measuring apparatus of the present invention, the measuring apparatus according to the first aspect, wherein a porous body is disposed in the discharge region, and an intake groove is provided in the suction region. It has been.
　本発明の測定装置の第３の態様によれば、第１又は第２の態様の測定装置であって、前記吐出領域は、前記吸引領域を取り囲むように配置されている。 According to a third aspect of the measuring apparatus of the present invention, the measuring apparatus according to the first or second aspect, wherein the discharge area is disposed so as to surround the suction area.
　本発明の測定装置の第４の態様によれば、第１乃至第３のいずれかの態様の測定装置であって、前記第１のパッド部は、その前記ベアリング面が前記上面及び前記第１の側面に対向するように複数配置されている。 According to a fourth aspect of the measuring apparatus of the present invention, in the measuring apparatus according to any one of the first to third aspects, the bearing surface of the first pad portion is the upper surface and the first pad. A plurality of them are arranged so as to face the side surfaces.
　本発明の測定装置の第５の態様によれば、第４の態様の測定装置であって、前記載置手段は、前記第１の側面に対向する第２の側面を備え、前記パッド部は、気体が吐出される吐出領域を具備するが、吸引力を付与する吸引領域を具備しない、前記第２の側面に対向するベアリング面を有する第２のパッド部を有する。 According to a fifth aspect of the measurement apparatus of the present invention, in the measurement apparatus according to the fourth aspect, the placing means includes a second side surface facing the first side surface, and the pad portion is And a second pad portion having a bearing surface facing the second side surface, which has a discharge region for discharging gas but does not have a suction region for applying a suction force.
　本発明にかかるエアベアリング装置及び測定装置は、エアベアリング装置のパッド部に吸引力を付与する吸引領域を設けることで、エアベアリング装置の浮上量の制御をより高精度で行うことができる。よって、エアベアリング装置を備える種々の加工装置により、被加工物の平坦度、反り、若しくは平面度や厚さ等をより高精度に加工できる。特に、本発明のエアベアリング装置を備える測定装置によれば、被測定物の平坦度、反り、若しくは平面度や厚さ等をより高精度で測定できるため、後工程において、当該被測定物を用いて加工する製品の薄厚化を実現できる。 The air bearing device and the measuring device according to the present invention can control the flying height of the air bearing device with higher accuracy by providing a suction area for applying a suction force to the pad portion of the air bearing device. Therefore, the flatness, warpage, flatness, thickness, and the like of the workpiece can be processed with higher accuracy by various processing devices including the air bearing device. In particular, according to the measuring apparatus including the air bearing device of the present invention, the flatness, warpage, flatness, thickness, etc. of the object to be measured can be measured with higher accuracy. It is possible to reduce the thickness of the product to be processed.
第１の実施形態に係る測定装置を模式的に示す正面図である。It is a front view showing typically the measuring device concerning a 1st embodiment. 図１に示す測定装置の平面図である。It is a top view of the measuring apparatus shown in FIG. 図１に示す上面支持エアベアリング装置の第１のパッド部の下面図である。It is a bottom view of the 1st pad part of the upper surface support air bearing apparatus shown in FIG. 図３の線ＩＶ－ＩＶに沿った第１のパッド部の断面図である。FIG. 4 is a cross-sectional view of the first pad portion taken along line IV-IV in FIG. 3. 左側側面支持エアベアリング装置の第２のパッド部の直径に沿った断面図である。It is sectional drawing along the diameter of the 2nd pad part of a left side surface support air bearing apparatus. 図１の測定装置の第１及び第２のパッド部の配置を模式的に示す模式平面図である。It is a schematic plan view which shows typically arrangement | positioning of the 1st and 2nd pad part of the measuring apparatus of FIG. 第２の実施形態に係る測定装置の第１及び第２のパッド部の配置を模式的に示す模式平面図である。It is a schematic plan view which shows typically arrangement | positioning of the 1st and 2nd pad part of the measuring apparatus which concerns on 2nd Embodiment. 第３の実施形態に係る測定装置の第１のパッド部の配置を模式的に示す模式平面図である。It is a schematic plan view which shows typically arrangement | positioning of the 1st pad part of the measuring apparatus which concerns on 3rd Embodiment.
　以下に、本発明に係るエアベアリング装置を備える測定装置の実施形態について図面を参照しつつ説明する。なお、この実施形態により本発明が限定されるものではない。 Hereinafter, an embodiment of a measuring device including an air bearing device according to the present invention will be described with reference to the drawings. In addition, this invention is not limited by this embodiment.
（第１の実施形態）
　図１は、第１の実施形態に係る測定装置１０１を模式的に示す正面図であり、図２は、図１に示す測定装置１０１の平面図であり、図３は、図１に示す上面支持エアベアリング装置１０９の第１のパッド部１１０の下面図であり、図４は、図３の線ＩＶ－ＩＶ（第１のパッド部１１０の直径）に沿った第１のパッド部１１０の断面図であり、図５は、左側側面支持エアベアリング装置１１８の第２のパッド部１３４の直径に沿った断面図であり、図６は、図１の測定装置の第１のパッド部１１０、１３３、第２のパッド部１３４の配置を模式的に示す模式平面図である。 (First embodiment)
1 is a front view schematically showing a measuring apparatus 101 according to the first embodiment, FIG. 2 is a plan view of the measuring apparatus 101 shown in FIG. 1, and FIG. 3 is a top view shown in FIG. 4 is a bottom view of the first pad portion 110 of the support air bearing device 109, and FIG. 4 is a cross-sectional view of the first pad portion 110 taken along line IV-IV (diameter of the first pad portion 110) in FIG. 5 is a cross-sectional view taken along the diameter of the second pad portion 134 of the left side support air bearing device 118, and FIG. 6 is a first pad portion 110, 133 of the measuring device of FIG. 1. FIG. 6 is a schematic plan view schematically showing the arrangement of second pad portions 134.
　実施形態の測定装置１０１は、主として、被測定物であるエアレール１０３の平坦度（ＪＩＳＣ２５０４：１９９９）、反り（ＪＩＳＢ０４１５：１９７５）、若しくは平面度（ＪＩＳＢ０１８２：１９９３）を測定するための測定手段であるレーザ変位計１０５と、レーザ変位計１０５により測定されるエアレール１０３が配置される処理領域１０８ａを有する載置手段である定盤１０７と、レーザ変位計１０５が装着され、定盤１０７に対して相対移動可能な支持部材であるガントリ１１５と、ガントリ１１５を定盤１０７から所定距離離間し浮上させるための、ガントリ１１５に装着されるエアベアリング装置である上面支持エアベアリング装置１０９とを備える。なお、エアレール１０３は、気体を吐出することにより薄厚ガラス基板等の被処理物を非接触に支持するエア浮上搬送装置を構成する部材である。 The measuring apparatus 101 of the embodiment is a measuring means for mainly measuring the flatness (JISC2504: 1999), warpage (JISB0415: 1975), or flatness (JISB0182: 1993) of the air rail 103 that is the object to be measured. A laser displacement meter 105, a surface plate 107, which is a mounting means having a processing region 108 a where the air rail 103 measured by the laser displacement meter 105 is disposed, and a laser displacement meter 105 are attached and are relative to the surface plate 107. A gantry 115 that is a movable support member, and an upper surface support air bearing device 109 that is an air bearing device mounted on the gantry 115 for floating the gantry 115 at a predetermined distance from the surface plate 107 are provided. The air rail 103 is a member that constitutes an air levitation transfer device that supports an object to be processed such as a thin glass substrate in a non-contact manner by discharging a gas.
　さらに、上面支持エアベアリング装置１０９は、パッド部である第１のパッド部１１０を具備し、第１のパッド部１１０には気体を吐出することによる浮上力を付与するための吐出領域１０４と、吸引力を付与するための吸気溝部１１３が設けられている吸引領域１０６とを有するベアリング面１１４が設けられている。第１のパッド部１１０から付与される浮上力と吸引力により、レーザ変位計１０５が装着されているガントリ１１５を定盤１０７から所定距離離間し浮上させることができる。なお、本実施形態の測定装置１０１は、上面支持エアベアリング装置１０９に加え、後述する左右側面支持エアベアリング装置１１７、１１８を備える。 Further, the upper surface support air bearing device 109 includes a first pad portion 110 that is a pad portion, and a discharge region 104 for applying a floating force to the first pad portion 110 by discharging a gas; A bearing surface 114 having a suction area 106 provided with an intake groove 113 for applying a suction force is provided. The gantry 115 on which the laser displacement meter 105 is attached can be lifted away from the surface plate 107 by a predetermined distance by the levitation force and the suction force applied from the first pad portion 110. Note that the measuring apparatus 101 of the present embodiment includes left and right side support air bearing devices 117 and 118 described later, in addition to the top support air bearing device 109.
　定盤１０７は直方体形状であり、その平坦な上面１０８は、平面視で矩形状の処理領域１０８ａと、上面１０８の矢印Ｌ方向に直交する方向に関し処理領域１０８ａを挟んで配置される支持領域１０８ｂと、を有する。処理領域１０８ａは、載置されるエアレール１０３までの距離を計測する領域であり、支持領域１０８ｂは、上面支持エアベアリング装置１０５の第１のパッド部１１０が図２の矢印Ｌ方向に従来から知られる不図示の駆動手段により移動する領域である。 The surface plate 107 has a rectangular parallelepiped shape, and a flat upper surface 108 thereof has a rectangular processing region 108a in plan view and a support region 108b disposed with the processing region 108a interposed in a direction orthogonal to the arrow L direction of the upper surface 108. And having. The processing area 108a is an area for measuring the distance to the air rail 103 to be placed, and the support area 108b is conventionally known in the direction indicated by the arrow L in FIG. The region is moved by a driving means (not shown).
　ガントリ１１５は、レーザ変位計１０５が装着されている水平保持部１１５ａと、水平保持部１１５ａに交差する方向に延在し、上面支持エアベアリング装置１０９が装着されている２つの第１の支持部１１５ｂと、右側面支持エアベアリング装置１１７が装着される第２の支持部１１５ｃと、左側面支持エアベアリング装置１１８が装着される第３の支持部１１５ｄとを備える。ガントリ１１５は、上面支持エアベアリング装置１０９、右側面支持エアベアリング装置１１７及び左側面支持エアベアリング装置１１８により定盤１０７に接触せずに支持される。 The gantry 115 includes a horizontal holding unit 115a on which the laser displacement meter 105 is mounted, and two first support units that extend in a direction intersecting the horizontal holding unit 115a and on which the upper surface support air bearing device 109 is mounted. 115b, a second support portion 115c to which the right side support air bearing device 117 is mounted, and a third support portion 115d to which the left side support air bearing device 118 is mounted. The gantry 115 is supported without contacting the surface plate 107 by the upper surface support air bearing device 109, the right side surface support air bearing device 117, and the left side surface support air bearing device 118.
　水平保持部１１５ａは、定盤１０７の幅方向（図１及び図２の左右方向）に横切るように延在し、定盤１０７の右側の側面１１９を越えて終端している。その終端部には、正面視において右側に配置される第２の支持部１１５ｃが水平保持部１１５ａに対して垂直に延在する。当該第２の支持部１１５ｃの先端部には、右側面支持エアベアリング装置１１７のパッド部である第１のパッド部１３３が装着されている。 The horizontal holding portion 115 a extends across the width direction of the surface plate 107 (the left-right direction in FIGS. 1 and 2), and terminates beyond the right side surface 119 of the surface plate 107. At the end portion, a second support portion 115c disposed on the right side in a front view extends perpendicular to the horizontal holding portion 115a. A first pad portion 133 that is a pad portion of the right-side support air bearing device 117 is attached to the distal end portion of the second support portion 115c.
　また、正面視において左側に配置される第３の支持部１１５ｄは、逆Ｌ字形状の部材であり、その一端部が、正面視左側に配置される第１の支持部１１５ｂの先端部に連結され、第３の支持部１１５ｄの他端部には、左側面支持エアベアリング装置１１８のパッド部である第２のパッド部１３４が装着されている。 The third support portion 115d disposed on the left side when viewed from the front is an inverted L-shaped member, and one end thereof is connected to the tip portion of the first support portion 115b disposed on the left side when viewed from the front. The second pad portion 134 that is the pad portion of the left side support air bearing device 118 is attached to the other end portion of the third support portion 115d.
　さらに、定盤１０７の上面１０８の支持領域１０８ｂに対応する位置に、上面支持エアベアリング装置１０９の第１のパッド部１１０が配置できるように一対の第１の支持部１１５ｂが、水平保持部１１５ａから延びている。一対の第１の支持部１１５ｂのそれぞれの先端部には、従来より知られるボールジョイント１３１を介して上面支持エアベアリング装置１０９の第１のパッド部１１０が装着されている。 Further, the pair of first support portions 115b is provided with a horizontal holding portion 115a so that the first pad portion 110 of the upper surface support air bearing device 109 can be disposed at a position corresponding to the support region 108b of the upper surface 108 of the surface plate 107. Extends from. The first pad portion 110 of the upper surface support air bearing device 109 is attached to the respective front ends of the pair of first support portions 115b via a conventionally known ball joint 131.
　このように、ガントリ１１５は、上面支持エアベアリング装置１０９及び側面支持エアベアリング装置１１７、１１８により、定盤１０７の上面１０８及び側面１１９から所定距離離間し浮上するともに、定盤１０７のＷ方向（ガントリ１１５の水平保持部１１５ａの長手方向、図２のＬ方向に直交する方向）に関する移動は、右側面支持エアベアリング装置１１７、左側面支持エアベアリング装置１１８により規制されている。なお、図１の正面視において、ガントリ１１５の上方向への移動は、後述するように、上面支持エアベアリング装置１０９の吸引力により規制される。 As described above, the gantry 115 is levitated at a predetermined distance from the upper surface 108 and the side surface 119 of the surface plate 107 by the upper surface supporting air bearing device 109 and the side surface supporting air bearing devices 117 and 118, and the W direction ( The movement of the gantry 115 in the longitudinal direction of the horizontal holding portion 115a and the direction orthogonal to the L direction in FIG. 2 is regulated by the right side support air bearing device 117 and the left side support air bearing device 118. 1, the upward movement of the gantry 115 is restricted by the suction force of the upper surface support air bearing device 109, as will be described later.
　本実施形態に係る測定装置１０１に利用されている上面支持エアベアリング装置１０９について説明する。なお、図６に示されるように、定盤１０７の上面１０８上に正面視で左右にそれぞれ二個ずつ配置される上面支持エアベアリング装置１０９の両第１のパッド部１１０は、同一の形状、構成、寸法である。また、右側面支持エアベアリング装置１１７は、所定圧力で所定流量の気体を供給できるコンプレッサ等の気体供給源（不図示）と、気体供給源から気体を供給される第１のパッド部１３３と、を備える。左側面支持エアベアリング装置１１８は、所定圧力で所定流量の気体を供給できるコンプレッサ等の気体供給源（不図示）と、気体供給源から気体を供給される第２のパッド部１３４と、を備える。従って、操作者が測定装置１０１を操作すると、制御部１３５からの駆動信号により、不図示の気体供給源から気体が第１のパッド部１１０、１３３及び第２のパッド部１３４へ供給され、第１のパッド部１１０、１３３及び第２のパッド部１３４から気体を吐出することで浮上力を発生する。 The upper surface support air bearing device 109 used in the measurement apparatus 101 according to the present embodiment will be described. As shown in FIG. 6, both first pad portions 110 of the upper surface support air bearing device 109 that are arranged on the upper surface 108 of the surface plate 107 on the left and right sides in front view have the same shape, Configuration, dimensions. The right side support air bearing device 117 includes a gas supply source (not shown) such as a compressor that can supply a predetermined flow rate of gas at a predetermined pressure, a first pad portion 133 that is supplied with gas from the gas supply source, Is provided. The left-side support air bearing device 118 includes a gas supply source (not shown) such as a compressor that can supply a predetermined flow rate of gas at a predetermined pressure, and a second pad part 134 that is supplied with gas from the gas supply source. . Therefore, when the operator operates the measuring apparatus 101, gas is supplied from a gas supply source (not shown) to the first pad units 110 and 133 and the second pad unit 134 by the drive signal from the control unit 135, A levitation force is generated by discharging gas from the first pad portions 110 and 133 and the second pad portion 134.
　上面支持エアベアリング装置１０９の第１のパッド部１１０及び右側面支持エアベアリング装置１１７の第１のパッド部１３３は、寸法は異なるものの同一の形状、構成であるので、上面支持エアベアリング装置１０９の第１のパッド部１１０について説明する。なお、図６に示されるように、右側面支持エアベアリング装置１１７は、矢印Ｌ方向に互いに離間配置され、互いに同一の形状、寸法、構成の２つの第１のパッド部１３３を有する。 The first pad portion 110 of the upper surface support air bearing device 109 and the first pad portion 133 of the right side surface support air bearing device 117 have the same shape and configuration although the dimensions are different. The first pad unit 110 will be described. As shown in FIG. 6, the right-side support air bearing device 117 has two first pad portions 133 that are spaced apart from each other in the direction of arrow L and have the same shape, size, and configuration.
　上面支持エアベアリング装置１０９は、図６に示されるように矢印Ｌ方向に離間する２つの第１のパッド部１１０を有する。第１のパッド部１１０は、図３に示されるように下面視において円形状のベアリング面１１４を備える。ベアリング面１１４は、ほぼ中央に位置する吸引領域１０６と、吸引領域１０６を取り囲む吐出領域１０４とを有する。吸引領域１０６は、所定深さ寸法を有する凹部である吸気溝部１１３により構成される。吸気溝部１１３は、下面視において円形状であり、図４に示されるように吸気溝部１１３には、第１のパッド部１１０の厚さ方向に貫通する吸気貫通路１２１が連通している。従って、真空ポンプ等の不図示の吸引手段からの吸引力が、ベアリング面１１４に対向する上面である反ベアリング面１１２側から吸気貫通路１２１を介し、吸気溝部１１３へ付与される。 The upper surface support air bearing device 109 has two first pad portions 110 that are separated in the direction of arrow L as shown in FIG. As shown in FIG. 3, the first pad portion 110 includes a circular bearing surface 114 in a bottom view. The bearing surface 114 has a suction region 106 located substantially in the center and a discharge region 104 surrounding the suction region 106. The suction region 106 is configured by an intake groove 113 that is a recess having a predetermined depth dimension. The intake groove 113 has a circular shape in a bottom view, and the intake groove 113 communicates with the intake groove 113 penetrating in the thickness direction of the first pad 110 as shown in FIG. Accordingly, a suction force from suction means (not shown) such as a vacuum pump is applied to the intake groove 113 from the opposite bearing surface 112 side, which is the upper surface facing the bearing surface 114, via the intake through passage 121.
　また、吐出領域１０４は、所定厚さを有する多孔質体１１１により構成されている。多孔質体１１１は、下面視で円形リング状の部材であり、気体を吐出させる互いに連通する複数の細孔を有する。また、第１のパッド部１１０は、多孔質体１１１が装着される固定溝１１６と、下面視で円形リング状に延在する給気溝１２３と、給気溝１２３に連通し、第１のパッド部１１０の厚さ方向に貫通し反ベアリング面１１２に至る穴である給気貫通路１２５と、を有する。さらに、給気貫通路１２５は、前述の気体供給源に連結されている。 Further, the discharge region 104 is constituted by a porous body 111 having a predetermined thickness. The porous body 111 is a circular ring-shaped member as viewed from below, and has a plurality of pores communicating with each other for discharging gas. The first pad portion 110 communicates with the fixing groove 116 in which the porous body 111 is mounted, the air supply groove 123 extending in a circular ring shape when viewed from the bottom, and the air supply groove 123. An air supply passage 125 that is a hole that penetrates in the thickness direction of the pad portion 110 and reaches the anti-bearing surface 112. Further, the supply air passage 125 is connected to the gas supply source described above.
　なお、図３に示すように吸気溝部１１３は、下面視では、円形としているが、楕円形、多角形等の種々の形状とすることができることは言うまでもない。吸気溝部１１３を設ける代わりに、複数の吸気口を有する部材又は多孔質体により吸引領域を構成することも可能である。また、給気溝１２３、吸気貫通路１２１及び給気貫通路１２５の数、形状、位置は適宜変更可能である。 In addition, as shown in FIG. 3, the intake groove 113 is circular in the bottom view, but it is needless to say that the intake groove 113 can have various shapes such as an ellipse and a polygon. Instead of providing the intake groove 113, the suction region can be configured by a member having a plurality of intake ports or a porous body. Further, the number, shape, and position of the air supply groove 123, the intake through passage 121, and the air supply through passage 125 can be changed as appropriate.
　上記構成の上面支持エアベアリング装置１０９及び右側面支持エアベアリング装置１１７が、制御部１３５から駆動信号を受けると、不図示の気体供給源から所定圧力及び所定流量の気体が第１のパッド部１１０、１３３に供給される。第１のパッド部１１０、１３３に供給された気体は、給気貫通路１２５及び給気溝１２３を通り多孔質体１１１の細孔から吐出され、定盤１０７の上面１０８及び側面１１９に衝突し第１のパッド部１１０、１３３に浮上力を付与する。 When the upper surface support air bearing device 109 and the right side surface support air bearing device 117 configured as described above receive a drive signal from the control unit 135, a gas having a predetermined pressure and a predetermined flow rate is supplied from a gas supply source (not shown) to the first pad unit 110. , 133. The gas supplied to the first pad portions 110 and 133 is discharged from the pores of the porous body 111 through the supply air passage 125 and the supply groove 123 and collides with the upper surface 108 and the side surface 119 of the surface plate 107. A levitation force is applied to the first pad portions 110 and 133.
　次に、左側面支持エアベアリング装置１１８の第２のパッド部１３４について説明する。左側面支持エアベアリング装置１１８は単一の第２のパッド部１３４を備える。第２のパッド部１３４は、上記の第１のパッド部１１０と同様に、下面視において円形状のベアリング面２１４を有し、ベアリング面２１４は、所定厚さを有する多孔質体２１１により構成されている。すなわち、第２のパッド部１３４のベアリング面２１４は、第１のパッド部１１０のベアリング面１１４と異なり、吸引領域を備えず、吐出領域２０４のみを備える。吐出領域２０４は、多孔質体２１１により構成されている。 Next, the second pad portion 134 of the left side support air bearing device 118 will be described. The left side support air bearing device 118 includes a single second pad portion 134. Similar to the first pad portion 110 described above, the second pad portion 134 has a circular bearing surface 214 in a bottom view, and the bearing surface 214 is configured by a porous body 211 having a predetermined thickness. ing. That is, unlike the bearing surface 114 of the first pad portion 110, the bearing surface 214 of the second pad portion 134 does not include a suction region and includes only the discharge region 204. The discharge region 204 is composed of a porous body 211.
　多孔質体２１１は、下面視で円形状の部材であり、気体を吐出させる互いに連通する複数の細孔を有する。また、第２のパッド部１３４は、第１のパッド部１１０と同様に、下面視で円形リング状に延在する給気溝２２３と、給気溝２２３に連通し、第２のパッド部１３４の厚さ方向に貫通し反ベアリング面２１２に至る穴である給気貫通路２２５と、を有する。さらに、給気貫通路２２５は、前述の気体供給源に連結されている。 The porous body 211 is a circular member as viewed from the bottom, and has a plurality of pores communicating with each other for discharging gas. Similarly to the first pad portion 110, the second pad portion 134 communicates with the air supply groove 223 that extends in a circular ring shape when viewed from below and the air supply groove 223, and the second pad portion 134. And a supply air passage 225 that is a hole that penetrates in the thickness direction and reaches the anti-bearing surface 212. Further, the supply air passage 225 is connected to the gas supply source described above.
　上記構成の第２のパッド部１３４に供給された気体は、給気貫通路２２５及び給気溝２２３を通り多孔質体２１１の細孔から吐出され、定盤１０７の側面１１９に衝突し第２のパッド部１３４に浮上力を付与する。 The gas supplied to the second pad portion 134 having the above-described configuration passes through the supply air passage 225 and the supply groove 223 and is discharged from the pores of the porous body 211 and collides with the side surface 119 of the surface plate 107 to form the second. A levitation force is applied to the pad portion 134 of the.
　以上の構成において、測定装置１０１は、制御部１３５からの駆動信号により、気体源から所定圧力の気体（すなわち圧縮気体）が、上面支持エアベアリング装置１０９及び左右側面支持エアベアリング装置１１７、１１８に供給されると、圧縮気体が多孔質体１１１、２１１から噴出し、ガントリ１１５が、定盤１０７の上面１０８及び側面１１９から所定距離離れた状態で支持される。 In the above-described configuration, the measuring device 101 causes the gas of a predetermined pressure (that is, compressed gas) from the gas source to the upper surface support air bearing device 109 and the left and right side surface support air bearing devices 117 and 118 according to the drive signal from the control unit 135. When supplied, the compressed gas is ejected from the porous bodies 111 and 211, and the gantry 115 is supported in a state of being separated from the upper surface 108 and the side surface 119 of the surface plate 107 by a predetermined distance.
　さらに、不図示の吸引手段も、制御部１３５からの駆動信号により駆動され、所定の吸引力が吸気溝部１１３から定盤１０７の上面１０８及び側面１１９に対して付与される。浮上力と吸引力が適宜制御されることにより、定盤１０７の上面１０８及び側面１１９からベアリング面１１４が所定距離離れた状態で保持される。このように、吸引力を付与できる機能をベアリング面１１４に設けることにより、気体を吐出することによる浮上力とそれに対向する方向へ作用する吸引力を付与し、浮上量に関する制御の精度を向上させることができる。 Further, a suction means (not shown) is also driven by a drive signal from the control unit 135, and a predetermined suction force is applied from the intake groove 113 to the upper surface 108 and the side surface 119 of the surface plate 107. By appropriately controlling the levitation force and the suction force, the bearing surface 114 is held at a predetermined distance from the upper surface 108 and the side surface 119 of the surface plate 107. In this way, by providing the bearing surface 114 with a function capable of applying a suction force, the flying force by discharging the gas and the suction force acting in the opposite direction are applied, and the control accuracy regarding the flying height is improved. be able to.
　測定装置１０１は、上述の通りガントリ１１５を定盤１０７から浮上させた状態で、レーザ変位計１０５が制御部１３５の駆動信号により処理領域１０８ａに載置されているエアレール１０３の平坦度、反り、若しくは平面度を測定する。なお、本実施形態では、レーザ変位計１０５は、半導体レーザ等の光線を照射する発光素子と、被測定物から反射される光線を受光する受光素子とを備える従来から知られる測定手段を利用している。 In the measurement apparatus 101, the flatness of the air rail 103 on which the laser displacement meter 105 is placed in the processing area 108a by the drive signal of the control unit 135, warpage, and the gantry 115 is lifted from the surface plate 107 as described above. Alternatively, the flatness is measured. In the present embodiment, the laser displacement meter 105 uses a conventionally known measuring means including a light emitting element that emits a light beam such as a semiconductor laser and a light receiving element that receives a light beam reflected from the object to be measured. ing.
（第２の実施形態）
　第２の実施形態に係る測定装置について図７を参照しつつ説明する。図７は、第２の実施形態に係る測定装置の第１のパッド部１１０、１３３、第２のパッド部１３４の配置を模式的に示す模式平面図である。第２の実施形態に係る測定装置は、左側面支持エアベアリング装置１３４が２つの第２のパッド部１３４を備える点で、単一の第２のパッド部１３４を備える第１の実施形態に係る測定装置１０１と異なる。第２の実施形態に係る測定装置のその他の構成及び効果は、第１の実施形態に係る測定装置１０１と同じであるので、詳細は割愛する。 (Second Embodiment)
A measuring apparatus according to the second embodiment will be described with reference to FIG. FIG. 7 is a schematic plan view schematically showing the arrangement of the first pad portions 110 and 133 and the second pad portion 134 of the measuring apparatus according to the second embodiment. The measurement device according to the second embodiment is in accordance with the first embodiment including a single second pad portion 134 in that the left side support air bearing device 134 includes two second pad portions 134. Different from the measuring device 101. Since other configurations and effects of the measurement apparatus according to the second embodiment are the same as those of the measurement apparatus 101 according to the first embodiment, details are omitted.
　なお、制御部１３５（図１参照。）が、上面支持エアベアリング装置１０９の第１のパッド部１１０、右側面支持エアベアリング装置１１７の第１のパッド部１３３、左側面支持エアベアリング装置１１８の第２のパッド部１３４とに電気的に接続され、各構成要素の動作が制御されることは言うまでない。 Note that the control unit 135 (see FIG. 1) includes the first pad unit 110 of the upper surface support air bearing device 109, the first pad unit 133 of the right side support air bearing device 117, and the left side support air bearing device 118. Needless to say, it is electrically connected to the second pad portion 134 and the operation of each component is controlled.
　本実施形態は、左側面支持エアベアリング装置１１８に第２のパッド部１３４を２つ備える構成であるので、第１の実施形態と比べ、気体の吐出量をより精細に調整することができ、ガントリ１１５（図１参照。）の浮上量をより高精度で行うことができる。 Since this embodiment is configured to include two second pad portions 134 in the left side support air bearing device 118, the amount of gas discharged can be adjusted more finely than the first embodiment, The flying height of the gantry 115 (see FIG. 1) can be performed with higher accuracy.
（第３の実施形態）
　第３の実施形態に係る測定装置について図８を参照しつつ説明する。図８は、第３の実施形態に係る測定装置の第１のパッド部１１０、１３３の配置を模式的に示す模式平面図である。第３の実施形態に係る測定装置は、左側面支持エアベアリング装置を備えない点で、左側面支持エアベアリング装置１３４を備える第１の実施形態に係る測定装置１０１と異なる。したがって、図１に示される第３の支持部１１５ｄを備えない構成である。第３の実施形態に係る測定装置のその他の構成及び効果は、第１の実施形態に係る測定装置１０１と同じであるので、詳細は割愛する。 (Third embodiment)
A measuring apparatus according to a third embodiment will be described with reference to FIG. FIG. 8 is a schematic plan view schematically showing the arrangement of the first pad portions 110 and 133 of the measuring apparatus according to the third embodiment. The measurement apparatus according to the third embodiment is different from the measurement apparatus 101 according to the first embodiment including the left side support air bearing device 134 in that it does not include the left side support air bearing device. Therefore, the third support portion 115d shown in FIG. 1 is not provided. Since other configurations and effects of the measuring apparatus according to the third embodiment are the same as those of the measuring apparatus 101 according to the first embodiment, details are omitted.
　本実施形態の構成は、定盤１０７の側面１１９に対向配置される第１のパッド部１３３が、浮上力のみならず吸引力をも発生させ、定盤１０７の上面１０８と、２つの側面１１９の一方に対して離間距離を制御する構成であるにも拘わらず、ガントリ１１５（図１参照。）と定盤１０７との間を所定距離に維持することができる。このように、ガントリの浮上量の制御を高い精度で要求されない場合には、第３の実施形態の構成により、ガントリ１１５の定盤１０７に対する非接触支持を実現することもできる。 In the configuration of the present embodiment, the first pad portion 133 disposed to face the side surface 119 of the surface plate 107 generates not only a levitation force but also a suction force, and the upper surface 108 of the surface plate 107 and the two side surfaces 119. However, the distance between the gantry 115 (see FIG. 1) and the surface plate 107 can be maintained at a predetermined distance despite the configuration in which the separation distance is controlled with respect to one of them. As described above, when the control of the flying height of the gantry is not required with high accuracy, the non-contact support of the gantry 115 with respect to the surface plate 107 can be realized by the configuration of the third embodiment.
　なお、上記第１～第３の実施形態では、多孔質体１１１が吸気溝部１１３を取り囲むように構成されているが、必ずしも完全に取り囲む必要はなく、多孔質体（若しくは吐出口を構成する細孔）を部分的に取り囲むように延在することも可能である。また、本実施形態では、左側面支持エアベアリング装置１１８は、吐出領域のみを備える構成としているが、吸引領域を設けることも可能である。 In the first to third embodiments, the porous body 111 is configured so as to surround the intake groove portion 113. However, it is not always necessary to completely surround the porous body 111, and the porous body (or the narrow portion constituting the discharge port) is not necessarily required. It is also possible to extend so as to partially surround the hole). Further, in the present embodiment, the left side support air bearing device 118 is configured to include only the discharge area, but it is also possible to provide a suction area.
　上記した第１～第３の実施形態では、気体を吐出する吐出口を多孔質体１１１、２１１の細孔により構成しているが、多孔質体１１１、２１１の代わりに、板部材に細孔を設けることにより吐出口を構成することも可能である。 In the first to third embodiments described above, the discharge port for discharging the gas is constituted by the pores of the porous bodies 111 and 211. However, instead of the porous bodies 111 and 211, the plate member has pores. It is also possible to configure the discharge port by providing the.
　本発明のエアベアリング装置は、測定装置のみならず、被支持物を非接触で支持する種々の支持装置に適用でき、その適用された装置は、本発明の効果及び作用を奏することは言うまでもない。 The air bearing device of the present invention can be applied not only to the measuring device but also to various support devices that support the object to be supported in a non-contact manner, and it goes without saying that the applied device exhibits the effects and operations of the present invention. .
　上記第１～第３の実施形態において、処理領域１０８ａを有する定盤１０７が載置手段として用いられているが、本発明の載置手段は、当該定盤に限定されない。塗布作業、測定作業などで使用するための所定の平坦度（ＪＩＳＣ２５０４：１９９９）、反り（ＪＩＳＢ０４１５：１９７５）、若しくは平面度（ＪＩＳＢ０１８２：１９９３）を有する平面を備え、所定の剛性、硬度、耐摩耗性を有する種々の台が載置手段として利用できる。また、定盤として、鋳鉄製の箱型定盤、ＪＩＳ定盤、石定盤等が利用できる。 In the first to third embodiments, the surface plate 107 having the processing area 108a is used as the mounting device, but the mounting device of the present invention is not limited to the surface plate. It has a flat surface having a predetermined flatness (JISC2504: 1999), warpage (JISB0415: 1975), or flatness (JISB0182: 1993) for use in coating work, measurement work, etc., and has predetermined rigidity, hardness, and wear resistance. A variety of pedestals can be used as mounting means. As the surface plate, a cast iron box-type surface plate, a JIS surface plate, a stone surface plate, or the like can be used.
　第１～第３の実施形態のガントリは、定盤１０７の上面１０８を跨いで設けられる門型支持部材であるが、上面１０８を横切る方向に延びる保持部材と、保持部材一方の端部に連結され、定盤に支持される支持部材と、を備える片持ち梁状の支持部材とすることも可能である。 The gantry according to the first to third embodiments is a gate-type support member provided across the upper surface 108 of the surface plate 107, and is connected to a holding member extending in a direction crossing the upper surface 108 and one end of the holding member. It is also possible to provide a cantilever-like support member provided with a support member supported by a surface plate.
　第１及び第２の実施形態は、定盤１０７の一方の側面に対向する第１のパッド部１３３と、他方の側面１１９に対向する第２のパッド部１３４を備える測定装置であるが、本発明の測定装置は、上記構成に限定されない。両側面１１９に対向するように第２のパッド部を設ける構成とすることも可能である。さらに、矢印Ｌ方向に関する第１のパッド部１１０、１３３の数や位置は、適宜変更できる。例えば、上記実施形態では、矢印Ｌ方向に複数の第１のパッド部１１０、１３３を備える構成であるが、単一の第１のパッド部を備える構成とすることも可能である。また、第１と第２のパッド部を備える上面支持エアベアリング装置を上面１０８に対向配置する構成とすることも可能である。 The first and second embodiments are measuring apparatuses including a first pad portion 133 that faces one side surface of the surface plate 107 and a second pad portion 134 that faces the other side surface 119. The measuring device of the invention is not limited to the above configuration. It is also possible to adopt a configuration in which the second pad portion is provided so as to face both side surfaces 119. Furthermore, the number and position of the first pad portions 110 and 133 in the direction of the arrow L can be changed as appropriate. For example, in the above-described embodiment, the configuration includes a plurality of first pad portions 110 and 133 in the direction of the arrow L, but a configuration including a single first pad portion is also possible. It is also possible to adopt a configuration in which the upper surface support air bearing device including the first and second pad portions is disposed to face the upper surface 108.
　第１～第３の実施形態において、定盤１０７の上面１０８に対向配置される第１のパッド部１１０と、側面１１９に対向配置される第１のパッド部１３３は、別体として構成されているが、本発明はこの構成に限定されない。例えば、パッド部が、上面１０８及び側面１１９の両方に対向配置できる正面視でＬ字形状のベアリング面を備える構成とすることも可能である。 In the first to third embodiments, the first pad portion 110 disposed to face the upper surface 108 of the surface plate 107 and the first pad portion 133 disposed to face the side surface 119 are configured separately. However, the present invention is not limited to this configuration. For example, the pad portion may be configured to include an L-shaped bearing surface in front view that can be disposed opposite to both the upper surface 108 and the side surface 119.
　第１～第３の実施形態における定盤１０７は、水平な上面１０８と、上面１０８の両端部に接続する両側面１１９とが、互いに直交する構成であるが、本発明のエアベアリング装置が利用できる載置手段は、この構成に限定されない。例えば、定盤１０７の上面１０８が水平方向に関し傾斜する面であっても、側面１１９が、図１の鉛直方向に関し傾斜する面であっても、パッド部が載置手段の面に対して平行に延在できるベアリング面を備える限り、本発明のエアベアリング装置の目的は達成できる。 The surface plate 107 in the first to third embodiments has a configuration in which a horizontal upper surface 108 and both side surfaces 119 connected to both ends of the upper surface 108 are orthogonal to each other, but the air bearing device of the present invention is used. The possible mounting means is not limited to this configuration. For example, even if the upper surface 108 of the surface plate 107 is a surface inclined with respect to the horizontal direction or the side surface 119 is a surface inclined with respect to the vertical direction of FIG. 1, the pad portion is parallel to the surface of the mounting means. The object of the air bearing device of the present invention can be achieved as long as it is provided with a bearing surface that can be extended.
　本出願は、２０１４年２月１８日に出願された日本特許出願２０１４－０２８０３４号の利益を主張するものであり、その内容は全体として参照して本明細書に援用される。 This application claims the benefit of Japanese Patent Application No. 2014-028034 filed on February 18, 2014, the contents of which are incorporated herein by reference in their entirety.
１０１　　　　　測定装置
１０３　　　　　エアレール
１０４　　　　　吐出領域
１０５　　　　　レーザ変位計
１０６　　　　　吸引領域
１０７　　　　　定盤
１０８　　　　　上面
１０８ａ　　　　処理領域
１０８ｂ　　　　支持領域
１０９　　　　　上面支持エアベアリング装置
１１０、１３３　第１のパッド部
１３４　　　　　第２のパッド部
１１１、２１１　多孔質体
１１３　　　　　吸気溝部
１１７、１１８　側面支持エアベアリング装置
１２１　　　　　吸気貫通路
１２３　　　　　吸気溝
１２５　　　　　給気貫通路 DESCRIPTION OF SYMBOLS 101 Measurement apparatus 103 Air rail 104 Discharge area | region 105 Laser displacement meter 106 Suction area 107 Surface plate 108 Upper surface 108a Processing area 108b Support area 109 Upper surface support air bearing apparatus 110, 133 1st pad part 134 2nd pad part 111, 211 Porous Material body 113 Intake groove portions 117 and 118 Side support air bearing device 121 Intake passage 123 Intake groove 125 Supply passage

Claims (9)

  1. 　気体を吐出することによる浮上力により浮上可能なパッド部を備え、
    　前記パッド部は、気体が吐出される吐出領域と、吸引力を付与する吸引領域とを有するベアリング面を有する第１のパッド部を備えることを特徴とするエアベアリング装置。     Provided with a pad that can be lifted by floating force by discharging gas,
    The said pad part is provided with the 1st pad part which has a bearing surface which has the discharge area | region where gas is discharged, and the suction area | region which provides a suction force, The air bearing apparatus characterized by the above-mentioned.
  2. 　前記吐出領域には、多孔質体が配置され、前記吸引領域には、吸気溝が設けられていることを特徴とする請求項１に記載のエアベアリング装置。 The air bearing device according to claim 1, wherein a porous body is disposed in the discharge region, and an intake groove is provided in the suction region.
  3. 　前記吐出領域は、前記吸引領域を取り囲むように配置されていることを特徴とする請求項１又は２に記載のエアベアリング装置。 The air bearing device according to claim 1 or 2, wherein the discharge region is disposed so as to surround the suction region.
  4. 　前記パッド部は、気体が吐出される吐出領域を具備するが、吸引力を付与する吸引領域を具備しないベアリング面を有する第２のパッド部を備えることを特徴とする請求項１～３のいずれか一項に記載のエアベアリング装置。 4. The pad portion according to claim 1, further comprising a second pad portion having a bearing surface that includes a discharge region from which gas is discharged but does not include a suction region that applies a suction force. An air bearing device according to claim 1.
  5. 　被測定物の平坦度、反り若しくは平面度を測定するための測定手段と、
    　前記被測定物が配置される載置手段と、
    　前記測定手段が装着され、前記載置手段に対して相対移動可能な支持部材と、
    　前記支持部材を前記載置手段から所定距離離間し浮上させるための、前記支持部材に装着されるエアベアリング装置と、を備え、
    　前記エアベアリング装置は、気体を吐出することによる浮上力により浮上可能なパッド部を備え、前記パッド部が、気体が吐出される吐出領域と、吸引力を付与する吸引領域とを有するベアリング面を有する第１のパッド部を備えることを特徴とする測定装置。     Measuring means for measuring the flatness, warpage or flatness of the object to be measured;
    Mounting means on which the object to be measured is placed;
    A support member mounted with the measurement means and movable relative to the placement means;
    An air bearing device mounted on the support member for floating the support member at a predetermined distance from the mounting means,
    The air bearing device includes a pad portion that can be lifted by a floating force generated by discharging a gas, and the pad portion includes a bearing surface having a discharge region for discharging a gas and a suction region for applying a suction force. A measuring device comprising: a first pad portion.
  6. 　前記吐出領域には、多孔質体が配置され、前記吸引領域には、吸気溝が設けられていることを特徴とする請求項５に記載の測定装置。 The measuring apparatus according to claim 5, wherein a porous body is disposed in the discharge region, and an intake groove is provided in the suction region.
  7. 　前記吐出領域は、前記吸引領域を取り囲むように配置されていることを特徴とする請求項５又は６に記載の測定装置。 The measuring apparatus according to claim 5 or 6, wherein the discharge area is arranged so as to surround the suction area.
  8. 　前記載置手段は、前記被測定物が載置される上面と、前記上面に対し交差する方向に延在する第１の側面と、を備え、
    　前記第１のパッド部は、その前記ベアリング面が前記上面及び前記第１の側面に対向するように配置されていることを特徴とする請求項５～７のいずれか一項に記載の測定装置。     The placing means includes an upper surface on which the object to be measured is placed, and a first side surface extending in a direction intersecting the upper surface,
    The measuring apparatus according to any one of claims 5 to 7, wherein the first pad portion is disposed such that the bearing surface thereof faces the upper surface and the first side surface. .
  9. 　前記載置手段は、前記第１の側面に対向する第２の側面を備え、
    　前記パッド部は、気体が吐出される吐出領域を具備するが、吸引力を付与する吸引領域を具備しない、前記第２の側面に対向するベアリング面を有する第２のパッド部を有することを特徴とする請求項８に記載の測定装置。     The placing means includes a second side surface facing the first side surface,
    The pad portion includes a second pad portion having a bearing surface facing the second side surface, which has a discharge region from which gas is discharged but does not have a suction region for applying a suction force. The measuring apparatus according to claim 8.
PCT/JP2015/054205 2014-02-18 2015-02-17 Air bearing device and measuring device WO2015125756A1 (en)

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